Multi-wavelength transmission optical filter

Abstract

To provide an interference filter capable of detecting a plurality of channels, using a single optical sensor.SOLUTION: An optical filter can comprise an interference filter that passes at least two channels associated with at least two transmission peaks, and a plurality of blockers. Each blocker of the plurality of blockers passes the respective channels associated with the respective transmission peaks of the at least two transmission peaks, and blocks one or more channels other than the respective channels associated with the respective transmission peaks.SELECTED DRAWING: Figure 2

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This patent application is a part of the "MULTI-TRANSMISSION OPTICAL FILTER" application filed on October 9, 2019. U.S. Provisional Patent Application No. 62 / 912,951, entitled "TER," filed on October 7, 2020. The filed U.S. Non-Provisional Patent Application No. 16 / 9 entitled "MULTI-TRANSMISSION OPTICAL FILTER" No. 48,960, which is expressly incorporated herein by reference. . [Background technology]

[0002] Interference filters reflect one or more spectral bands or lines and transmit others. Interference filters are optical filters that separate incident and reflected waves at the boundary of the interference filter. The interference effect that occurs can result in wavelength selectivity. Summary of the Invention

[0003] According to some embodiments, the optical filter of the present invention comprises at least two transmission peaks. an interference filter that passes at least two channels associated with the blockers, each blocker of said plurality of blockers comprising said at least two Each of the two transmission peaks is passed through the corresponding channel. and one or more channels other than the respective channels associated with the respective transmission peaks. Blocking the channel.

[0004] In some embodiments, the sensor device of the present invention uses multiple channels. The optical sensor may include an optical device that collects data using the optical sensor. The optical device includes a spacer, a first mirror, and a second mirror. The optical signal is associated with at least two transmission peaks, and a plurality of blockers are a plurality of blockers attached to a device, each blocker of the plurality of blockers being connected to one of the plurality of channels; each associated with each of the at least two transmission peaks Passing through the channel.

[0005] According to some embodiments, the binary multispectral filter of the present invention comprises a plurality of The filter may include a plurality of interference filters and a plurality of blockers, each of the plurality of interference filters The interference filters are arranged in such a way that each channel associated with each pair of transmission peaks a plurality of interference filters configured to pass a pair of interference filters, and the first blocker is associated with a first blocker of the blockers passing a channel associated with a first transmission peak of each pair of transmission peaks; and a second transmission peak of each pair of said transmission peaks, said second transmission peak being blocked; and the interference filter is configured to include a second blocker of the plurality of blockers. the second blocker is associated with the channel associated with the second transmission peak. configured to pass the channel associated with the first transmission peak and to block the channel associated with the first transmission peak. It has been completed. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic diagram of an exemplary interference filter. [Figure 2] FIG. 1 is a schematic diagram of an exemplary device incorporating an interference filter. [Figure 3]1 is a graph showing an example of a transmittance chart of an interference filter. [Figure 4] 10 is a graph showing an example of a transmittance chart of an interference filter associated with spacers of different thicknesses. [Figure 5] 1 is a graph showing an example of a transmittance chart of an interference filter. DETAILED DESCRIPTION OF THE INVENTION

[0007] The following detailed description of the embodiments refers to the accompanying drawings, in which: The numbers may identify the same or similar elements.

[0008] Optical sensors use filters to transmit light at desired frequencies for detection. For example, an optical sensor may have one or more channels, referred to herein as channels. The detection may be performed over a range of frequencies. In some cases, the optical sensor may be configured to detect interference filters. Interference filters (IF filters) may be used to transmit channels and block unwanted frequencies of light. (e.g., interferometers, Fabry-Perot interferometers, etalons, and / or Lyot filters) , which may transmit light associated with a transmission peak based on the geometry and material composition of the interference filter. In some embodiments, the interference filter is configured to have a free spectral range (FS) of the interference filter. R), and can be configured to transmit a channel associated with a transmission peak within the optical sensor The device may be able to perform channel-related detection.

[0009] When it is beneficial to use a single optical sensor to perform multiple channel detection To facilitate detection of multiple channels, the FSR of the interference filter is However, the F Increasing SR increases the resonator bandwidth, which can reduce the spectral resolution. Therefore, extending the FSR to increase the range of addressable channels is may not be a viable solution for your use case. When multiple channel detection is performed, the interference filters are composed of two or more different spacers. thickness, so that the interference filter can have two or more corresponding channels. However, the use of multiple spacer thicknesses can This complicates the fabrication of the capacitor and is difficult or impossible to achieve using some deposition techniques. There is a possibility that this may occur.

[0010] The interference filter transmits channels associated with transmission peaks in specific regions of the FSR. When configured to transmit at frequencies other than the desired transmission peak (e.g. For example, a second channel associated with a second transmission peak (due to harmonic effects) can also be passed. For example, interference filters may be susceptible to harmonic effects due to transmissions occurring in the region of the FSR. When configured to transmit a peak, the interference filter overlaps with the desired channel. A possible second transmission peak may also be transmitted. In such cases, an interference filter ( or another filter) is not configured to block unwanted harmonic transmission peaks, The sensor may detect noise in the desired channel.

[0011] The embodiments described herein provide two or more transmission peaks for measurement by an optical sensor. The first transmission peak (e.g., in the harmonic region of the FSR of the interference filter) and the corresponding The interference transmitted through the channel associated with the second transmission peak is harmonically related to the first transmission peak. An interference filter is provided that has two or more bands corresponding to two or more transmission peaks. Each blocker may be configured to block one of the two or more respective transmission peaks. and one of the two or more transmission peaks may be passed through a respective channel associated with the other of the two or more transmission peaks. Blockers may block one or more other transmission peaks. It may be possible to use transmission peaks in the region of the FSR that cause interference. This does not increase the design complexity or manufacturing difficulty compared to variable spacer designs. In particular, near-infrared (NIR) and visible spectral ranges (e.g., red light wavelength ranges) Enables optical sensors to detect in broader wavelength ranges (e.g., broader and / or biologically significant wavelength ranges) It could be.

[0012] 1 is a diagram of an exemplary interference filter 100. In some embodiments, the interference filter The filter 100 may be a spectral filter or a multi-spectral filter (e.g., a bi- It may be composed of a multi-spectral filter and / or a multi-spectral filter. In some embodiments, the interference filter 100 may be used in biometric sensor devices, security sensors, and other devices. sensor devices, health monitoring sensor devices, object identification sensor devices, spectroscopic identification sensors The sensor may be included in a sensor of a wearable device, a sensor of a sensor device, or a sensor of a wearable device. As such, the interference filter 100 comprises one or more spacers 110 and a set of mirrors 12. 0 and a set of blockers 130-1 and 130-2. The propagation of light through the mirror 120 and the reflection of light by the mirror 120 cause interference, resulting in a specific channel Or, light related to only a frequency range (e.g., a transmission peak) can be passed. The channel may vary depending on the thickness of the spacer 110 or the distance between the spacer 110 and / or the mirror 120. For example, the spacer 11 may be configurable by changing the material properties of the spacer 11. When the thickness of the filter 100 is changed, the channels of the interference filter 100 may shift upward or downward. Similarly, if different regions of the spacer 110 have different thicknesses, or if there are interference filters, If different spacers 110 of the filter 100 have different thicknesses, the spacers 110 may be spaced apart in different areas or in different positions. The spacer 110 may allow channels associated with different transmission peaks to pass. Additionally, varying the material properties of the spacer 110 and / or mirror 120 can change the transmission peak. The spacer 110 can be made of glass, polymer, and The light source may be made of any material that allows light to pass through, such as a substrate and / or a substrate. The spacer 110 is made of silicon dioxide (SiO2), silicon hydride (Si:H), niobium titanium oxide (NbTiOx), niobium tantalum oxide (NbTaOx), or It may also contain zinc oxide (ZnO), etc. Si:H has a high harmonic transmission peak for a given design. The use of Si:H may provide material absorption in regions prone to cracking, and the use of Si:H may provide a high harmonic transmission peak. This means that the functionality of blocker 130 can be provided in relation to the In this case, the interference filter 100 includes a single blocker 130 that blocks the first transmission peak, and and a spacer 110 partially composed of Si:H that blocks the second transmission peak. For example, the area of ​​the interference filter 100 that is not covered by a single blocker 130 The region may include spacers 110 composed of Si:H, thus forming multiple blocks. This reduces the costs associated with implementing a locker. The mirror may be mounted on the hydrogenated silicon spacer 110 of the interference filter 100. The mirror 120 may comprise a reflective layer such as a reflective glass layer and / or a reflective layer such as a It may be attached to the opposite surface of the spacer 110. In some embodiments, the mirror 120 may be constructed of a reflective material such as a silver layer and / or , mirror 120 and spacer 110 may collectively have a thickness below a threshold value. For example, the mirror 120 and spacer 110 may be fabricated with a thickness of less than about 3 microns. A Riperot interferometer may be formed.

[0013] As shown, the interference filter 100 includes a plurality of blockers 130. 130 blocks (e.g., reflects, absorbs, or a combination thereof) light associated with the first frequency. a device capable of passing (e.g., transmitting) light associated with a second frequency; For example, the blocker 130 may include an optical filter. In this case, the blocker 130 may be attached to the surface of the interference filter 100. In some embodiments, the blockers 130 overlap each other on the surface of the interference filter 100. This may not be possible.

[0014] In the example shown in FIG. 1, the blocker 130-1 is approximately 1100 nm (the wavelength of the transmittance chart 150). The transmission peak is shown by the dashed ellipse on the right. Rocker 130-2 is located at approximately 775 nm (around the transmission peak on the left side of the Transmission Chart 150). The transmission chart 150 is configured to pass through a channel in the This is explained in more detail in relation to 3.

[0015] Each blocker 130 is connected to one channel other than the channel passed by that blocker 130. For example, blocker 130-1 may be configured to block one or more of the channels. blocks light of wavelengths related to blocker 130-2 (e.g., about 775 nm) The blocker 130-2 may be configured to receive a wave associated with the blocker 130-1. The filter may be configured to block light of a wavelength of about 1100 nm (e.g., about 1100 nm). The interference filter 100 uses a blocker 130 to block unwanted frequencies. Utilizing a transmission peak related to a harmonic transmission peak by Improving the accuracy of measurements performed by optical sensors associated with the interference filter 100 It is possible to do this.

[0016] A method for analyzing the propagation of electromagnetic waves through a layered medium is used to measure the transmission peaks and In one example, a corresponding harmonic transmission peak associated with the transmission peak can be identified. The peaks and corresponding harmonic transmission peaks can be determined using the transfer matrix method. For example, the transfer matrix method requires the shape and size of the mirror 120 and the spacer 110. Associated with mirror 120 and spacer 110 based at least in part on material composition A harmonic response may be identified, which may include a transmission peak and one or more corresponding harmonic transmissions. It may show a peak.

[0017] The interference filter 100 can include a plurality of spacers 110 of different thicknesses. Each thickness of the spacer 110 corresponds to a respective pair of transmission peaks (or a respective plurality of transmission peaks). ) and a corresponding set of blockers 130. Examples of relevant transmission charts are shown in Figures 4 and 5. In some embodiments, The spacer 110 and the mirror 120 are arranged such that the spacer 110 and the mirror 120 form a transmission peak. The wavelength may be configured to create a space and corresponding harmonic transmission peaks. The thickness of the spacer 110 and the mirror 120 and / or the size of the spacer 110 and the mirror 120 The material properties, etc., are such that the spacer 110 and the mirror 120 have a transmission peak and one or more corresponding The optical fiber may be configured to transmit a corresponding harmonic transmission peak.

[0018] As noted above, FIG. 1 is provided as an example only. Other examples are provided in relation to FIG. may differ from that described.

[0019] FIG. 2 is a diagram of an exemplary device 200 incorporating the interference filter 100. The sensor 200 may include any device including an interference filter 100 and an optical sensor 210. In some embodiments, the device 200 is an optical device. 0 is described in more detail elsewhere herein. The device 200 may include a spectrometer and / or a spectral sensor (e.g., a binary multispectral The sensor device may be a sensor device such as a battery management system (BMS) sensor. The device 200 includes an interference filter 100 and an optical sensor 210. 0 includes devices that can detect light. For example, optical sensors 210 can detect images. The sensor may include a multispectral sensor, a multispectral sensor, and / or a spectral sensor. In some embodiments, the optical sensor 210 is a charge-coupled device (CCD) sensor. , and / or complementary metal oxide semiconductor (CMOS) sensors, etc. In some embodiments, the optical sensor 210 may be a front side illumination (FSI) sensor, and and / or backside illumination (BSI) sensors. As shown, the first blocker 130 of the interference filter 100 is associated with the first transmission peak. As shown by reference numeral 230, the interference filter 100 The second blocker 130 may pass the channel associated with the second transmission peak.

[0020] As noted above, Figure 2 is provided as an example only. Other examples are provided in relation to Figure 2. may differ from that described.

[0021] FIG. 3 illustrates an exemplary transmission chart 300 (e.g., a transmission chart) for the interference filter 100. As shown in the figure, the transmission chart 300 is a first transmission peak. For example, the first transmission peak 310 includes a first transmission peak 320. Interference associated with the harmonic transmission peak of the over-peak 310 (i.e., the second transmission peak 320) This may occur in the region of the free spectral range (FSR) 330 of the filter 100 .

[0022] The harmonic peaks interfere with the sensing operation of the sensor device (e.g., device 200). For example, a first channel at about 775 nm (e.g., a harmonic of another channel) as the primary channel (not as a secondary channel) and a second channel at about 1100 nm. Consider an interference filter that is configured to: In addition to the first channel at 775 nm, the second channel's harmonic transmission peak at 775 nm is passed. Therefore, the interference filter may be configured to filter out the first channel and the harmonic transmission peak at the overlap. This can cause interference with the first channel at 775 nm.

[0023] By utilizing the harmonic transmission peaks associated with the blocker 130 and the first transmission peak 310, By this, the interference filter 100 reduces interference, and the effective spectrum of the interference filter 100 The range can be increased by configuring two spacers in the interference filter. Instead of passing through the first and second channels (which is (which may cause interference between the harmonic transmission peaks of the single filter) The second channel (associated with the first transmission peak 310) and the second channel The harmonic transmission peak of the panel (associated with the second transmission peak 320) may be passed. Each blocker of the filter 100 is connected to one of the first and second channels. Therefore, the interference filter 100 can block two interference signals with the thickness of a single spacer. , which allows light associated with the transmission peak of the interference filter 100 to pass. and simplifying the manufacturing of the interference filter 100 for a given spacer thickness profile. The number of channels that can be passed can be increased.

[0024] FIG. 4 illustrates an interference filter (e.g., an interference filter) associated with spacers 110 of different thicknesses. FIG. 4 shows an exemplary transmission chart 400 for the filter 100. Five of the eight regions of the interference filter are shown as examples only and are not shown. The interference filter, as shown at 410, A plurality of spacers 110 of different thicknesses may be included. As shown, each spacer 1 10 includes a set of mirrors 120 and a plurality of blockers 130 (e.g., For example, a corresponding pair.

[0025] Each region of the interference filter is determined by the thickness of the respective spacer 110 and / or the spacer 110 and / or mirror 120. Each channel is designated by reference numeral 420. If the channel is in the region of the FSR associated with each harmonic transmission peak, the interference filter Each region of may pass a channel associated with a respective harmonic transmission peak. Each channel associated with a wave transmission peak is indicated by reference numeral 430 . As shown, each region of the interference filter associated with a different spacer thickness has a respective It may be associated with pairs of spacers 110. One spacer 110 of each pair is designated by reference numeral 4. 20, and the other spacer 110 of each pair may be The channel indicated by 430 may be blocked. The number of channels passed is determined by the number of channels outside the region of the FSR where the interference filter is associated with harmonic effects. This is increased compared to approaches that use a single channel.

[0026] FIG. 5 shows an exemplary transmission chart for an interference filter (e.g., interference filter 100). As illustrated by chart 500, some embodiments , the interference filter comprises a plurality of first-order filter channels 510 and a plurality of second-order filter channels 511. Each secondary filter channel 520 may have a corresponding primary filter The harmonic transmission peaks of the first order filter channel 510 may be associated with the harmonic transmission peaks of the first order filter channel 510. The filter channel 510 and the secondary filter channel 520 are spaced approximately 5 nm apart from each other. This can be achieved by configuring the properties of the mirror 120 or the spacer 110. Therefore, the sensor device (e.g., device 200) The spacing and number of addressable channels can be adjusted without utilizing the secondary filter channel 520. This can be increased compared to the traditional approach.

[0027] As noted above, Figure 5 is provided as an example. Other examples are given with respect to Figure 5. It may vary from what is described.

[0028] The foregoing disclosure provides illustrations and descriptions, but is not intended to be exhaustive or to be construed in any way as being in any precise form disclosed. It is not intended to limit the scope of the invention to the specific embodiments. Modifications and variations are possible in light of the above disclosure. This may be made or acquired from practice of the embodiments.

[0029] As used herein, meeting a threshold may mean, depending on the context, that the value is greater than the threshold. ,More than threshold,Higher than threshold,Above threshold,Less than threshold,Lower than threshold,Below threshold,Below threshold, Or it may refer to the same as the threshold value.

[0030] Specific combinations of features may be claimed and / or disclosed in the specification. Although these combinations are provided, they are not intended to limit the disclosure of various embodiments. Indeed, many of these features may be incorporated into the present invention without being specifically recited in the claims. The compounds may be combined in different ways and / or in ways not disclosed herein. Each dependent claim may depend directly on only one claim, but may also depend on various embodiments. The disclosure includes each dependent claim in combination with all other claims in the claim set. It is something.

[0031] Any element, act, or instruction used herein may be used unless expressly described as such. Unless otherwise specified, they should not be construed as critical or essential. In this case, the indefinite articles "a" and "an" are intended to include one or more items and are used interchangeably with "one" and "one Furthermore, as used herein, the definite article "The" is intended to include one or more items referenced in connection with the definite article "the"; may be used interchangeably with "one or more." Additionally, as used herein, the term A "set" is a set of one or more items (e.g., related items, unrelated items, related and unrelated items). "one or more" is intended to include "one or more" or "one or more combinations of" If only one item is intended, the phrase "only one" or similar language may be used. Also, as used herein, the terms "have," "have" and "having" are used. "based on," "and the like" are intended to be open-ended terms. is intended to mean "based at least in part on," unless expressly stated otherwise. Also, as used herein, the term "or" refers to a combination of two or more elements when used in a series. are intended to be inclusive and unless expressly stated otherwise (e.g., "any " or "either one only"), replaced with "and / or" It can be used as such.

Claims

1. 1. An interference filter, comprising: one or more spacers; a set of mirrors attached to opposite sides of the one or more spacers; a set of blockers including a first blocker and a second blocker; the first blocker and the second blocker are attached to a surface of one of the sets of mirrors and do not overlap with each other on the surface of one of the sets of mirrors; The first blocker is passing a first set of channels associated with a first set of transmission peaks; blocking a second set of channels associated with a second set of transmission peaks; It is configured as follows: The second blocker is blocking the first set of channels; or passing said second set of channels; an interference filter configured to perform one or more of:

2. 2. The interference filter of claim 1, wherein the second blocker is: blocking the first set of channels; and passing said second set of channels An interference filter configured as follows.

3. 2. The interference filter of claim 1, wherein the first blocker for blocking the second set of channels comprises: an interference filter configured to one or more of reflect or absorb light associated with one or more frequency ranges corresponding to the second set of channels;

4. 10. The interference filter of claim 1, wherein the first blocker is an optical filter.

5. 2. The interference filter of claim 1, wherein the set of blockers is supported by the mirror.

6. 10. The interference filter of claim 1, wherein the first set of channels includes a channel at 1100 nm.

7. 10. The interference filter of claim 1, wherein the second set of channels includes a 775 nm channel.

8. 2. An interference filter according to claim 1, the one or more spacers include a first spacer and a second spacer; and An interference filter, wherein a first thickness of the first spacer is different from a second thickness of the second spacer.

9. 1. An interference filter, comprising: one or more spacers; a set of mirrors attached to opposite sides of the one or more spacers; a set of blockers including a first blocker and a second blocker; the first blocker and the second blocker are attached to a surface of one of the sets of mirrors and do not overlap with each other on the surface of one of the sets of mirrors; The first blocker is passing one or more first channels associated with one or more first transmission peaks; blocking one or more second channels associated with one or more second transmission peaks; An interference filter configured as follows.

10. 10. The interference filter of claim 9, wherein the second blocker is configured to reflect light associated with one or more frequency ranges corresponding to the one or more second channels.

11. 10. The interference filter of claim 9, wherein a first thickness of a first region of the spacer is different from a second thickness of a second region of the spacer.

12. 10. The interference filter of claim 9, wherein the one or more spacers comprise silicon dioxide (SiO), silicon hydride (Si:H), niobium-titanium-oxide (NbTiOx), niobium-tantalum-oxide (NbTaOx), or zinc oxide (ZnO).

13. 10. An interference filter according to claim 9, wherein one first transmission peak of the one or more first transmission peaks is a harmonic transmission peak of one second transmission peak of the one or more second transmission peaks.

14. 10. The interference filter of claim 9, wherein the set of blockers is supported by the mirror.

15. An interference filter comprising: one or more spacers; a set of mirrors attached to opposite sides of the one or more spacers; a set of blockers including a first blocker and a second blocker; the first blocker and the second blocker are attached to a surface of one of the sets of mirrors and do not overlap with each other on the surface of one of the sets of mirrors; The first blocker is Passing through the first channel, Block the second channel It is configured as follows: The second blocker is blocking the first channel; or passing through the second channel an interference filter configured to perform one or more of:

16. 16. An interference filter according to claim 15, the first channel is associated with a first transmission peak; The second channel is associated with a second transmission peak.

17. 16. An interference filter according to claim 15, wherein the first blocker for blocking the second channel comprises: An interference filter configured to absorb light associated with a frequency range corresponding to the second channel.

18. 16. An interference filter according to claim 15, wherein the set of blockers is supported by the mirror.

19. 16. An interference filter according to claim 15, wherein the one or more spacers comprise silicon hydride (Si:H).

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