Clean room system and air circulation method

Abstract

To reduce an energy use amount in a clean room.SOLUTION: A clean room system is installed in a clean room. The clean room system includes: an air blowing section that sends air to an indoor side of the clean room; a suction section that is installed above the air blowing section and sucks the air; a humidity measurement section that measures humidity on the indoor side of the clean room; a cleanliness measurement section that measures cleanliness on the indoor side of the clean room; a determination section that determines whether or not to send the air or determines an air blowing amount that is an amount of the air on the basis of the humidity and the cleanliness; and an air blowing control section that controls the air blowing section on the basis of a determination result obtained by the determination section. The clean room is divided into areas. The determination section makes a determination with respect to each area, and the air blowing control section performs control with respect to each area. The suction section includes an air exhaust fan for sending the sucked air to the air blowing section.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a clean room system and an air circulation method. [Background technology]

[0002] Conventionally, there has been known a method for forming a low-temperature and highly clean area inside a clean room.

[0003] For example, a damper for adjusting the air volume is provided in a duct used to blow air from an air conditioner to a space to be air-conditioned. In this way, a method for adjusting the air volume to an appropriate level is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-184900 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in conventional methods, the volume of air blown from an air conditioner or the like is often constant. That is, the volume of air is constant whether or not there is a need to blow less air, so the volume of air may be excessive in situations where there is a need to blow less air, resulting in wasted energy.

[0006] The present invention has been made in view of the above problems, and has an object to reduce the amount of energy used in a clean room. [Means for solving the problem]

[0007] The clean room system according to each embodiment of the present invention (for example, the clean room system 10 shown in FIG. 1) a blower (for example, the first air conditioner 11 and the second air conditioner 12 shown in FIG. 1) that blows air into the clean room; a temperature measurement unit (such as the temperature sensor SER1 shown in FIG. 1) that measures the temperature inside the clean room; a cleanliness measurement unit (e.g., the particle counter SER2 shown in FIG. 1) that measures the cleanliness inside the clean room; a determination unit (e.g., PLC100 shown in FIG. 1 ) that determines whether to blow the air or the amount of blown air, based on the temperature and the cleanliness; an air blowing control unit (e.g., PLC 100 shown in FIG. 1) that controls the air blowing unit based on the determination result by the determination unit; Includes.

[0008] With the above configuration, the clean room system can grasp the temperature, cleanliness, etc. Therefore, the clean room system can determine whether to blow air using the blower unit or the volume of air to be blown by the blower unit, taking both the temperature and cleanliness into consideration. When such a determination is made to switch between blowing air and not blowing air, or when the volume of air is appropriately changed, the electricity used for blowing air is turned off at least as little as possible compared to when air is constantly blown. This reduces the amount of energy used in the clean room.

[0009] Further, the temperature measurement unit The temperature is measured at multiple locations (for example, as shown in FIG. 4), The highest temperature (e.g., the highest temperature SR11) and the lowest temperature (e.g., the lowest temperature SR12) are extracted from the temperatures, The determination unit A first airflow rate (e.g., a first determination result J1 shown in FIG. 6 ) determined based on a temperature difference (e.g., a temperature difference SR1) between the highest temperature and the lowest temperature, and a second airflow rate (e.g., a second determination result J2 shown in FIG. 6 ) determined based on the cleanliness, are determined; A determination is made to adopt the larger air volume of the first air volume and the second air volume (for example, a determination result J3 shown in FIG. 6).

[0010] With the above configuration, the clean room system can identify the appropriate air volume to satisfy the environmental conditions of temperature and cleanliness. By adopting the largest air volume among them, the air volume can be set to match the environmental conditions that require the most air volume to satisfy the environmental conditions of temperature and cleanliness.

[0011] The clean room system further includes a humidity measurement unit (e.g., a humidity sensor SER3) that measures humidity in the clean room, The determination unit It is desirable to determine the flow rate of the air based on the temperature, the cleanliness, and the humidity.

[0012] With the above configuration, the clean room system can grasp three or more environmental conditions, including temperature, cleanliness, and humidity. Temperature, cleanliness, and humidity are often the target of standards. Therefore, by being able to grasp temperature, cleanliness, and humidity, the inside of the clean room can be managed to meet the environmental conditions stipulated by the standards.

[0013] Furthermore, a clean room system (for example, the clean room system shown in FIG. 1) installed in a clean room may be a blower (for example, the first air conditioner 11 and the second air conditioner 12 shown in FIG. 1) that blows air into the clean room; a humidity measuring unit (e.g., humidity sensor SER3) that measures the humidity inside the clean room; a cleanliness measurement unit (e.g., the particle counter SER2 shown in FIG. 1) that measures the cleanliness inside the clean room; a determination unit (e.g., PLC100 shown in FIG. 1 ) that determines whether to blow the air or the amount of blown air, based on the humidity and the cleanliness; an air blowing control unit (e.g., PLC 100 shown in FIG. 1) that controls the air blowing unit based on the determination result by the determination unit; It is desirable that the configuration includes:

[0014] With the above configuration, the clean room system can grasp environmental conditions including at least cleanliness and humidity. Standards and the like often target cleanliness, humidity, etc. Therefore, by being able to grasp cleanliness, humidity, etc., it is possible to manage the inside of the clean room so as to satisfy the environmental conditions stipulated by the standards and the like.

[0015] Further, the humidity measuring unit measuring the humidity at a plurality of locations; The highest humidity (for example, the highest humidity SR31 shown in FIG. 9) and the lowest humidity (for example, the lowest humidity SR32 shown in FIG. 9) are extracted from the humidities, A third airflow rate (e.g., the third determination result J4 shown in FIG. 9 ) determined based on the humidity difference between the maximum humidity and the minimum humidity (e.g., the humidity difference SR3 shown in FIG. 9 ) and a second airflow rate (e.g., the second determination result J2 shown in FIG. 9 ) determined based on the cleanliness level are determined; It is desirable to determine whether the larger of the third air volume and the second air volume is to be used.

[0016] With the above configuration, the clean room system can identify the appropriate air volume to satisfy the environmental conditions of humidity and cleanliness. By adopting the largest air volume among them, the air volume can be set to match the environmental conditions that require the most air volume to satisfy the environmental conditions of humidity and cleanliness.

[0017] Further, the blower unit It is desirable to blow air into the clean room so that it contains a swirling component that rotates in the blowing direction (for example, from right to left in Figures 2 and 3, which is the x-axis direction) (for example, when blowing air as shown in Figure 2 or 3). When a swirling component is imparted by such a configuration, the amount of air induced (induction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

[0018] The air conditioner further includes an adjusting unit (e.g., the PLC 100, the TIC 32, and the cold water valve 33 shown in FIG. 11 ) that adjusts the temperature of the air with water based on the determination result by the determining unit, It is desirable that the blower blows the air conditioned by the regulating unit.

[0019] With the above-described configuration, the clean room system can adjust the temperature of the air blown by the blower by water cooling or the like.

[0020] In this way, if the temperature of the air blown by the blower can be adjusted with water based on the determination results of temperature, humidity, etc., the clean room system can adjust the temperature of the air blown by the blower without running refrigerant piping as in air cooling. Furthermore, compared to air cooling, adjustment using water, etc. can reduce the risk of greenhouse gas leakage.

[0021] The clean room system divides the clean room into areas, The determination unit Determining for each of the areas, The air blowing control unit It is desirable to control each area (for example, by dividing the area into an 11th area E11, a 12th area E12, a 13th area E13, a 14th area E14, a 21st area E21, a 22nd area E22, a 23rd area E23, and a 24th area E24, etc., as shown in Figure 13, etc.).

[0022] With the above configuration, the clean room system can measure, determine, and control the environmental conditions for each area. When the areas are separated, even if the environmental conditions differ from area to area, it is possible to blow air appropriate to each area.

[0023] The blower unit has a filter (for example, the filter FR shown in FIG. 15 ), a differential pressure measuring unit (e.g., a differential pressure gauge SER24 shown in FIG. 15 ) that measures the pressure difference (e.g., the pressure difference SRP shown in FIG. 15 ) between a first pressure (e.g., the first pressure P1 shown in FIG. 15 ) of the first air that the blower blows to the filter and a second pressure (e.g., the second pressure P2 shown in FIG. 15 ) of the second air that is blown from the filter into the interior of the clean room; a wind speed measuring unit (for example, the air flow meter SER22 shown in FIG. 15) that measures the wind speed of the first air (for example, the wind speed SRV shown in FIG. 15); Further comprising: It is desirable to determine (for example, as shown in FIG. 16) or predict (for example, as shown in FIG. 17) the life of the filter based on the air pressure difference and the wind speed.

[0024] Also, a recorded value (e.g., the recorded value CRB shown in FIG. 16 or FIG. 17) obtained by dividing the square root of the air pressure difference by the wind speed is recorded, It is desirable to determine that the filter has reached the end of its life when the recorded value is equal to or greater than a threshold value (for example, as shown in Figure 16), or to predict that the filter has reached the end of its life when a predicted point based on the recorded value is equal to or greater than a threshold value (for example, as shown in Figure 17).

[0025] As described above, a configuration that determines or predicts the filter lifespan can prevent replacing a filter that has sufficient remaining lifespan, compared to periodic replacement of filters. Also, compared to a configuration that monitors a differential pressure gauge or the like to determine the filter lifespan, it can reduce the amount of manpower required. In this way, it is possible to reduce costs due to unnecessary replacement and reduce the number of people required to monitor the filters, thereby achieving labor savings.

[0026] Furthermore, with the above-described configuration, it becomes clear whether or not it is time to replace the filter, and so-called "visualization" can be achieved.

[0027] An air circulation method performed by a clean room system including an air blower that blows air into a clean room and is installed in the clean room, comprising: A temperature measurement procedure (e.g., step S1 shown in FIG. 5) in which the clean room system measures the temperature inside the clean room; A clean room system includes a cleanliness measurement procedure (e.g., step S2 shown in FIG. 5) for measuring the cleanliness of the interior of the clean room; A determination procedure (e.g., step S3 and step S4 shown in FIG. 5 ) in which the clean room system determines whether to blow the air or the blowing amount, which is the amount of the air, based on the temperature and the cleanliness; The clean room system performs an air blowing control procedure (e.g., step S5 shown in FIG. 5) for controlling the air blowing unit based on the determination result of the determination procedure. Includes.

[0028] With the above configuration, the clean room system can grasp the temperature, cleanliness, etc. Therefore, the clean room system can determine whether to blow air using the blower unit or the volume of air to be blown by the blower unit, taking both the temperature and cleanliness into consideration. If such a determination is made to switch between blowing air and not blowing air, or to change the volume of air to an appropriate volume, it is possible to reduce the amount of electricity used for blowing air compared to when air is constantly blown. Therefore, the amount of energy used in the clean room can be reduced. [Effects of the Invention]

[0029] According to each embodiment of the present invention, it is possible to reduce the amount of energy used in a clean room. [Brief explanation of the drawings]

[0030] [Figure 1] 1 is a cross-sectional view showing an example of the overall configuration of a clean room system in a first embodiment. [Figure 2] FIG. 10 is a front view showing an example of the configuration of an air intake port having fins attached thereto so as to give a counterclockwise swirling component to the air being blown in when viewed from inside the room. [Figure 3] FIG. 10 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a clockwise swirling component to the air being blown in when viewed from inside the room. [Figure 4] FIG. 10 is a diagram showing an example of measurement results of the temperature in a clean room. [Figure 5] 1 is a flowchart showing a first example of an air circulation method in a clean room system. [Figure 6] FIG. 1 is a diagram showing a first example of an air circulation method in a clean room system. [Figure 7] FIG. 2 is a functional block diagram showing an example of the functional configuration of the clean room system according to the first embodiment. [Figure 8] 10 is a flowchart showing a second example of an air circulation method in a clean room system. [Figure 9]FIG. 10 is a diagram showing a second example of an air circulation method in a clean room system. [Figure 10] FIG. 10 is a functional block diagram showing an example of the functional configuration of a clean room system according to a second embodiment. [Figure 11] FIG. 10 is a cross-sectional view showing an example of the overall configuration of a clean room system according to a second embodiment. [Figure 12] 10 is a flowchart showing a third example of an air circulation method in a clean room system. [Figure 13] FIG. 10 is a diagram illustrating an example in which determination and control are performed by dividing the area into sections. [Figure 14] FIG. 10 is a diagram showing a modified example of an area. [Figure 15] FIG. 10 is a diagram illustrating an example of the configuration of an air blower having a filter. [Figure 16] FIG. 10 is a diagram illustrating an example of determining the life of a filter. [Figure 17] FIG. 10 is a diagram showing an example of a predicted filter life. DETAILED DESCRIPTION OF THE INVENTION

[0031] Hereinafter, details of each embodiment will be described with reference to the accompanying drawings. Note that in the description of each embodiment and the drawings, components having substantially the same functional configuration are designated by the same reference numerals, and redundant description will be omitted.

[0032] First Embodiment <Overall configuration example> 1 is a cross-sectional view showing an example of the overall configuration of a clean room system according to a first embodiment. The following description will be given taking as an example a clean room system 10 as shown in the figure. Note that in the following description, devices and the like required for explaining the embodiment will be illustrated.

[0033] As shown in the figure, in this example, two manufacturing devices MC are arranged in a clean room. These manufacturing devices MC manufacture products such as semiconductors. Below, an example of the number and arrangement of manufacturing devices MC as shown in the figure will be explained.

[0034] In the following, the x-axis, which is the horizontal direction of the diagram, is the width direction of the clean room. In the example shown below, the air conditioner blows air in the x-axis direction. On the other hand, the z-axis, which is the vertical direction of the diagram, is the height direction of the clean room. In other words, the z-axis is the so-called direction of gravity. Furthermore, the depth direction is the y-axis.

[0035] <Example of a blower> As shown in the figure, the clean room system 10 has an air conditioner that blows air into the clean room. For example, as shown in the figure, an air conditioner (the air conditioner installed at the left end of the clean room in the figure; hereinafter referred to as the "first air conditioner 11") is installed on one wall (for example, the wall on the left end of the figure; hereinafter referred to as the "first wall"). Then, an air conditioner (the air conditioner installed at the right end of the clean room in the figure; hereinafter referred to as the "second air conditioner 12") is installed in addition to the first air conditioner 11 on the wall facing the first wall (for example, the wall on the right end of the figure; hereinafter referred to as the "second wall"). The following description will be given using an example in which two air conditioners, the first air conditioner 11 and the second air conditioner 12, are installed as shown in the figure.

[0036] The first air conditioner 11 and the second air conditioner 12 preferably have the following configuration, for example.

[0037] FIG. 2 is a front view showing an example of the configuration of an air intake port to which fins are attached so as to give a counterclockwise swirling component to the air being blown in when viewed from inside the room.

[0038] FIG. 3 is a front view showing an example of the configuration of an air supply port in which fins are attached so as to give a clockwise swirling component to the air being blown in when viewed from inside the room.

[0039] The air conditioner is configured so that multiple fins 20 are installed at the air intake port 21 on the front side. The fins 20 send air into the clean room by giving the air a rotational component (hereinafter referred to as "swirl component"). In Figures 2 and 3, the direction from right to left is the air sending direction, i.e., the direction toward the inside of the clean room.

[0040] For example, as shown in the figure, the fins 20 are attached at equal intervals and radially in the rotational direction around the center of the air intake port 21. Furthermore, each fin 20 is arranged so as to be inclined with respect to the central axis 22. Note that in Figures 2 and 3, each fin 20 has an opposite inclination angle with respect to the central axis 22.

[0041] In this way, when the fins 20 are arranged so as to be inclined with respect to the central axis 22 and the fins 20 are arranged radially, the air can be made to flow along the fins 20 when it is blown, that is, when it passes through the air intake port 21. This allows the air conditioner to blow air into the clean room with a swirling component.

[0042] The air conditioner has a plurality of configurations, for example, as shown in the figure. In this way, the temperature, cleanliness, etc. of the control area EC are controlled by sending air to the control area EC. The following describes an example in which the temperature is the object of control.

[0043] If the air contains a swirling component when it is sent in, the swirling components are likely to interfere with each other. Specifically, by making the swirling components of the air sent out from adjacent air inlets in the same or opposite directions, the swirling components can interact to either enhance each other or cancel each other out.

[0044] Furthermore, when there is a swirling component as shown in the figure, an induction effect occurs. In other words, when a swirling component is included, a flow that draws in surrounding air, a so-called induced airflow, is likely to occur. In this way, when a swirling component is given, the amount of induced air (induction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

[0045] <About clean rooms> A clean room is a space with an area where environmental conditions such as temperature and cleanliness are controlled. For example, the environmental conditions are defined by standards such as ISO (International Organization for Standardization) 14644-1 or the US Federal Air Cleanliness Standard 209E.

[0046] Specifically, for "Class 6" in ISO 14644-1, the temperature conditions are set to be within the range of "23°C ± 5°C." Furthermore, for "Class 6" in ISO 14644-1, the cleanliness level is set to 1.0 x 10 particles with a particle size of 0.1 micrometers (μm) or more in the room. 6 pieces / cubic meter (pieces / m 3 The conditions are set so that the air cleanliness is below 100%.

[0047] In this way, the clean room has a space that is controlled by an air conditioner or the like so that the controlled area EC meets predetermined conditions.

[0048] <PLC(Programmable Logic Controller)について> 1, the PLC 100 is an example of a control device that controls devices such as air conditioners and a calculation device that performs processes such as judgments. The PLC 100 also acquires data from installed sensors via a network, a cable, or the like.

[0049] For example, the PLC 100 is an information processing device having an electronic circuit or the like.

[0050] <Example of temperature measurement section> For example, a temperature sensor SER1 is installed in a clean room as shown in Fig. 1. The temperature sensor SER1 is a sensor that measures the temperature at or around the location where the sensor is installed.

[0051] For example, by installing the temperature sensor SER1 at multiple locations in a clean room, the PLC 100 can obtain the following measurement results.

[0052] 4 is a diagram showing an example of the measurement results of the temperature in a clean room. The example shown is an example in which temperature sensors are installed at 19 locations in the clean room.

[0053] In the illustrated example, the highest temperature (hereinafter referred to as "maximum temperature SR11") among the measurement results at 19 locations is "25.35°C."

[0054] Similarly, in the illustrated example, the lowest temperature (hereinafter referred to as "lowest temperature SR12") among the measurement results at 19 locations is "22.90°C."

[0055] Then, the PLC 100 calculates the temperature difference SR1 based on the maximum temperature SR11 and the minimum temperature SR12, for example, as in the following equation (1). Temperature difference = maximum temperature - minimum temperature (1)

[0056] As in the above formula (1), the PLC 100 calculates the difference between the highest temperature SR11 and the lowest temperature SR12 extracted from the multiple measurement results to obtain the temperature difference SR1. Specifically, in the illustrated example, based on the above formula (1), the temperature difference SR1 is "25.35°C - 22.90°C = 2.45°C."

[0057] The temperature difference SR1 is an example of a value that indicates so-called "temperature unevenness." In other words, if the temperature difference SR1 is a large value, the temperature unevenness is large, and the clean room system can determine that the temperature in the clean room is not uniform due to the existence of high-temperature spots in the clean room, etc. On the other hand, if the temperature difference SR1 is a small value, the clean room system will determine that the temperature unevenness is small. For example, the magnitude of the temperature unevenness can be determined by comparing the temperature difference SR1 with a preset threshold value, etc.

[0058] <Example of cleanliness measurement section> For example, as shown in Fig. 1, a particle counter SER2 is installed in the clean room. That is, in the clean room, the particle counter SER2 or the like measures the number of particles in the clean room. Data indicating the measurement results is transmitted to the PLC 100.

[0059] <First example of air circulation method> The clean room system implements the following air circulation method, for example.

[0060] FIG. 5 is a flowchart showing a first example of an air circulation method in a clean room system.

[0061] <Temperature measurement example> (Step S1) In step S1, the temperature measurement unit measures the temperature.

[0062] <Example of cleanliness measurement> (Step S2) In step S2, the cleanliness measurement unit measures the cleanliness.

[0063] <Example of judgment based on temperature and cleanliness> (Step S3) In step S3, the determination unit makes a determination based on the temperature and cleanliness, for example, whether or not to blow air.

[0064] <Example of Determination of Whether to Blow Air> (Step S4) In step S4, the determination unit determines whether or not to blow air based on the determination result in step S3.

[0065] Next, if it is determined that air should be blown (YES in step S4), the clean room system proceeds to step S5. On the other hand, if it is determined that air should not be blown (NO in step S4), the clean room system ends the process, i.e., keeps the blower stopped.

[0066] <Air blowing example> (Step S5) In step S5, the air blowing control unit controls the air blowing unit to blow air.

[0067] Specifically, the above process is performed as follows.

[0068] FIG. 6 is a diagram showing a first example of an air circulation method in a clean room system.

[0069] As shown in Fig. 6(A), when step S1 is first performed, the maximum temperature SR11, minimum temperature SR12, temperature difference SR1, etc. are determined by calculating the above formula (1), etc. Then, as shown in the figure, based on the temperature difference SR1, etc., it is determined whether the temperature difference is large or small, and whether or not to blow air (that is, whether to turn the air blow "ON" or "OFF" is determined). Hereinafter, the determination result based on the temperature will be referred to as the "first determination result J1."

[0070] 6(B), when step S2 is performed, the cleanliness level SR2, etc. is determined. As shown in the figure, based on the cleanliness level SR2, etc., it is determined whether the cleanliness level is within an acceptable range, and whether to blow air is determined. Hereinafter, the determination result based on the cleanliness level will be referred to as the "second determination result J2."

[0071] Next, as shown in FIG. 6(C), the clean room system obtains a final judgment result (hereinafter simply referred to as "judgment result J3") based on the first judgment result J1 and the second judgment result J2.

[0072] For example, if either the first judgment result J1 or the second judgment result J2 is a judgment result that "air is blown," the judgment result J3 will be "air is blown." That is, the judgment result J3 is determined by taking the "OR" (logical sum) of the first judgment result J1 and the second judgment result J2, or the like.

[0073] <Example of functional configuration> 7 is a functional block diagram showing an example of the functional configuration of the clean room system in the first embodiment. For example, the clean room system 10 has a functional configuration including an air blower 10F1, a temperature measuring unit 10F2, a cleanliness measuring unit 10F3, a determining unit 10F4, and an air blowing control unit 10F5. The functional configuration shown in the figure will be described below as an example.

[0074] The blower 10F1 performs a blowing procedure to blow air into the clean room. For example, the blower 10F1 is realized by an air conditioner or the like.

[0075] The temperature measurement unit 10F2 performs a temperature measurement procedure to measure the temperature inside the clean room. For example, the temperature measurement unit 10F2 is realized by a temperature sensor SER1 or the like.

[0076] The cleanliness measurement unit 10F3 performs a cleanliness measurement procedure to measure the cleanliness in the clean room. For example, the cleanliness measurement unit 10F3 is realized by a particle counter SER2 or the like.

[0077] The determining unit 10F4 performs a determining procedure to determine whether or not to blow air based on the temperature and cleanliness, etc. For example, the determining unit 10F4 is realized by the PLC 100 or the like.

[0078] The air blowing control unit 10F5 performs an air blowing control procedure for controlling the air blowing unit 10F1 based on the determination result by the determination unit 10F4. For example, the air blowing control unit 10F5 is realized by the PLC 100 or the like.

[0079] As described above, if the clean room system is configured to blow air only when it is necessary to satisfy both the temperature and cleanliness conditions, the amount of energy used in the clean room can be reduced compared to when air is constantly blown.

[0080] Second Embodiment The second embodiment differs from the first embodiment in that it uses humidity and cleanliness. The following description will focus on the differences from the first embodiment, and redundant description will be omitted.

[0081] <Example of humidity measurement section> For example, a humidity sensor SER3 is installed in a clean room as shown in Fig. 1. The humidity sensor SER3 is a sensor that measures the humidity at or around the location where the sensor is installed.

[0082] For example, by installing humidity sensors SER3 at multiple locations in a clean room, the PLC 100 can acquire measurement results, etc., in the same way as for temperature in the first embodiment.

[0083] <Second example of air circulation method> In the second embodiment, the clean room system performs, for example, the following air circulation method.

[0084] 8 is a flowchart showing a second example of the air circulation method in the clean room system. Compared to the first example, the second example differs in that it includes steps S21 and S22.

[0085] Then, the PLC 100 calculates the humidity difference based on the highest humidity among the measured humidities and the lowest humidity among the measured humidities, for example, as shown in the following formula (2). Humidity difference = maximum humidity - minimum humidity (2)

[0086] As in the above formula (2), the PLC 100 calculates the difference between the maximum humidity and the minimum humidity extracted from the multiple measurement results to obtain the humidity difference.

[0087] The humidity difference is an example of a value that indicates so-called "humidity unevenness." In other words, if the humidity difference is large, the humidity unevenness is large, and the clean room system can determine that the humidity in the clean room is not uniform due to the occurrence of low humidity areas in the clean room. On the other hand, if the humidity difference is small, the clean room system can determine that the humidity unevenness is small. For example, the magnitude of humidity unevenness can be determined by comparing the humidity difference with a preset threshold value.

[0088] <Humidity measurement example> (Step S21) In step S21, the humidity measurement unit measures the humidity.

[0089] <Example of Determination Based on Humidity and Cleanliness> (Step S22) In step S22, the determination unit makes a determination based on the humidity and cleanliness, for example, whether or not to blow air.

[0090] Specifically, the above process is performed as follows.

[0091] 9 is a diagram showing a second example of an air circulation method using a clean room system. Note that the cleanliness, that is, the example shown in FIG. 9(B), is the same as in the first embodiment, and therefore a description thereof will be omitted.

[0092] 9(A), first, when step S21 is performed, the maximum humidity SR31, the minimum humidity SR32, the humidity difference SR3, etc. are determined by calculating the above formula (2), etc. Then, as shown in the figure, based on the humidity difference SR3, etc., it is determined whether the humidity difference is large or small, and whether or not to blow air. Hereinafter, the determination result based on humidity will be referred to as the "third determination result J4."

[0093] Next, as shown in FIG. 6(C), the clean room system obtains a judgment result J3 based on the second judgment result J2 and the third judgment result J4.

[0094] <Example of functional configuration> 10 is a functional block diagram showing an example of the functional configuration of a clean room system in the second embodiment. Compared to the first embodiment, the second embodiment differs in that the functional configuration includes a humidity measuring unit 10F20.

[0095] The humidity measurement unit 10F20 performs a humidity measurement procedure to measure the humidity inside the clean room. For example, the humidity measurement unit 10F20 is realized by a humidity sensor SER3 or the like.

[0096] As described above, if the clean room system is configured to blow air only when it is necessary to satisfy both humidity and cleanliness conditions, the amount of energy used in the clean room can be reduced compared to when air is constantly blown.

[0097] <Third embodiment> The clean room system may have the following configuration, for example.

[0098] <Overall configuration example> FIG. 11 is a cross-sectional view showing an example of the overall configuration of a clean room system according to the second embodiment.

[0099] For example, an air conditioner, which is an example of a blower, may be a third air conditioner 31, as shown in the figure. That is, in the clean room, blowers may be installed in the arrangement and orientation shown, such as a plurality of third air conditioners 31 as shown in the figure.

[0100] Furthermore, wireless temperature and humidity sensors SER5 are installed at multiple locations in the clean room. Therefore, in the third embodiment, the temperature and humidity are measured at multiple locations in the clean room by the multiple wireless temperature and humidity sensors SER5, and the measurement results are transmitted to the PLC 100.

[0101] Furthermore, in the illustrated example, a TIC (Temperature Indication Controller, hereinafter simply referred to as "TIC32") and a chilled water valve 33 are examples of adjustment units that perform an adjustment procedure to adjust the temperature of air (hereinafter referred to as "air temperature") blown by the third air conditioner 31 with water, based on control by a PLC 100 that is an example of a control unit. Below, an example will be described in which the PLC 100, TIC 32, and chilled water valve 33 water-cool the air temperature.

[0102] <Third example of air circulation method> In the third embodiment, the clean room system performs, for example, the following air circulation method.

[0103] FIG. 12 is a flowchart showing a third example of an air circulation method in a clean room system.

[0104] <Example of Determining Whether Data Has Been Acquired from All Sensors> (Step S301) In step S301, the control unit determines whether data has been acquired from all sensors. In other words, if any of the sensors has a malfunction, not all data will be available. Therefore, the control unit determines whether such a malfunction has occurred.

[0105] Next, if it is determined that data has been acquired from all sensors (YES in step S301), the clean room system proceeds to step S303. On the other hand, if it is determined that data has not been acquired from all sensors (NO in step S301), the clean room system proceeds to step S302.

[0106] <Example of issuing an alarm, etc.> (Step S302) In step S302, the control unit issues an alarm or the like. That is, the clean room system notifies the manager or the like that a sensor or the like is malfunctioning.

[0107] <Calculation example of temperature difference and humidity difference> (Step S303) In step S303, the determination unit calculates the temperature difference and the humidity difference. For example, the temperature difference is calculated as in the following equation (3). ΔT = Max(T1~T4) - Min(T1~T4) (3)

[0108] In the above formula (3), "ΔT" indicates the temperature difference. Furthermore, "Max()" indicates a function that extracts the maximum temperature among the temperatures entered in "()". Furthermore, "Min()" indicates a function that extracts the minimum temperature among the temperatures entered in "()".

[0109] Moreover, the above formula (3) is an example in which the measurement targets are four locations, "T1," "T2," "T3," and "T4."

[0110] Next, for example, the humidity difference is calculated as in the following equation (4). ΔH = Max(H1~H4) - Min(H1~H4) (4)

[0111] In the above formula (4), "ΔH" indicates the humidity difference. Also, "Max()" and "Min()" are the same as in the above formula (3).

[0112] The above formula (4) is an example in which the measurement target locations are four locations, "H1", "H2", "H3", and "H4".

[0113] <Example of Determining Whether Temperature Difference or Humidity Difference is Greater than Threshold Value> (Step S304) In step S304, the determination unit determines whether the temperature difference or the humidity difference is greater than a threshold value. For example, the determination unit makes the determination according to the following equation (5). Judgment result = (ΔT>ΔTb) OR (ΔH>ΔHb) (5)

[0114] In the above formula (5), "ΔT" and "ΔH" are the same as in the above formulas (3) and (4). "ΔTb" is a threshold value for determining whether or not there is temperature unevenness, and the value is set in advance. Similarly, "ΔHb" is a threshold value for determining whether or not there is humidity unevenness, and the value is set in advance. Therefore, if either the value of "ΔT" or "ΔH" is greater than the threshold value, the judgment unit judges that there is temperature unevenness or humidity unevenness (hereinafter simply referred to as "unevenness present"). On the other hand, if the values ​​of both "ΔT" and "ΔH" are equal to or less than the threshold value, the judgment unit judges that there is neither temperature unevenness nor humidity unevenness (hereinafter simply referred to as "no unevenness").

[0115] Next, if it is determined that there is unevenness (YES in step S304), the clean room system proceeds to step S305. On the other hand, if it is determined that there is no unevenness (NO in step S304), the clean room system proceeds to step S306.

[0116] <Example of "Uneven" setting> (Step S305) In step S305, the determination unit sets the determination result as "unevenness exists." For example, the determination result of "unevenness exists" or "no unevenness" is input to a flag or the like. Hereinafter, the determination result of "unevenness exists" or "no unevenness" is referred to as "TH_ng." "TH_ng" is data that is set to "1" or "0," with "unevenness exists" being set to "1." On the other hand, the determination result of "no unevenness" is input as "0" to "TH_ng."

[0117] Therefore, in step S305, the determination unit sets "TH_ng=1".

[0118] <Example of "No Unevenness" Settings> (Step S306) In step S306, the determination unit sets the determination result to “no unevenness.” Therefore, in step S306, the determination unit sets “TH_ng=0.”

[0119] <Example of determining the amount of water based on the representative temperature> (Step S307) In step S307, the determination unit determines the amount of water based on the representative temperature.

[0120] The representative temperature is, for example, the temperature at a specific location in a clean room. That is, the representative temperature is, for example, a temperature selected in advance from "T1," "T2," "T3," "T4," etc.

[0121] If the representative temperature is high, the determining unit determines that the amount of chilled water should be increased by increasing the opening of the chilled water valve. In this way, by increasing the amount of chilled water flowing through the coil of the air conditioner, the temperature of the air being blown can be adjusted to be lower.

[0122] <Example of Determining Whether or Not "Unevenness Exists"> (Step S308) In step S308, the determination unit determines whether or not there is “unevenness.” That is, the determination unit determines whether “TH_ng=0” or “TH_ng=1.”

[0123] In addition, in step S308, the determination result, i.e., the air volume controlled in the subsequent stage, is maintained for about 30 minutes to avoid drastic changes in the determination result. For example, a moving average value or the like is used to determine whether or not to change the determination result.

[0124] Next, if it is determined that there is "unevenness" (YES in step S308), the clean room system proceeds to step S309. On the other hand, if it is determined that there is not "unevenness" (NO in step S308), the clean room system proceeds to step S310.

[0125] <Example of increasing airflow> (Step S309) In step S309, the airflow control unit increases the airflow rate. For example, the airflow control unit controls the airflow rate according to the following equation (6). N = N + ΔN (6)

[0126] In the above formula (6), "N" indicates the current airflow (hereinafter referred to as "current value"), and "ΔN" is the amount of change in airflow (hereinafter simply referred to as "change amount"), which is a preset value.

[0127] <Example of Reducing Air Volume> (Step S310) In step S310, the airflow control unit reduces the airflow rate. For example, the airflow control unit controls the airflow rate according to the following equation (7). N = N - ΔN (7) In the above formula (7), "N" and "ΔN" are the same as in the above formula (6).

[0128] <Example of Determining Whether Air Volume is Less than the Lower Limit> (Step S311) In step S311, the determination unit determines whether the airflow rate is smaller than the lower limit value LT. For example, the lower limit value LT is set in advance as shown in FIG.

[0129] That is, the determination unit determines whether the current value is smaller than the lower limit LT as a result of the calculation of the above formula (7). There are circumstances in which the blower unit cannot blow air at an air volume smaller than the lower limit LT. Therefore, the determination unit determines not to set an air volume smaller than the lower limit LT.

[0130] Next, if it is determined that the air volume is smaller than the lower limit (YES in step S311), the clean room system proceeds to step S312. On the other hand, if it is determined that the air volume is not smaller than the lower limit (NO in step S311), the clean room system ends the process.

[0131] <Example of setting the airflow rate to the lower limit> (Step S312) In step S312, the air flow control unit sets the air volume to the lower limit value.

[0132] As described above, if the air temperature can be adjusted using water based on the results of temperature and humidity determinations, the clean room system can adjust the air temperature without the need for refrigerant piping as in air cooling. Furthermore, compared to air cooling, adjustment using water can reduce the risk of greenhouse gas leakage.

[0133] <Modification> The clean room system may be configured as follows:

[0134] <About the air blower> The blower unit of the air conditioner or the like is preferably installed at a lower position, lower than the suction unit, as shown in FIG.

[0135] <About the suction unit> An air intake port, which is an example of a suction unit, is desirably installed at an upper position higher than the air conditioners in the z-axis direction, for example, as shown in FIG. 1. For example, in the example shown, an air intake port (in the figure, this is an air intake port installed at the left end of the clean room and installed above the first air conditioner 11; hereinafter referred to as "first air intake port 13") is installed on one wall. Then, an air intake port (in the figure, this is an air intake port installed at the right end of the clean room and installed above the second air conditioner 12; hereinafter referred to as "second air intake port 14") is installed separately from the first air intake port 13 on the wall opposite the wall where the first air conditioner 11 is located. Below, an example in which two air intake ports are installed as shown in the figure will be described.

[0136] As shown in the figure, the first air intake 13 includes devices such as an exhaust fan 13F and a cooling coil 13C, while the second air intake 14 includes devices such as an exhaust fan 14F and a cooling coil 14C.

[0137] <Example of discharge section> For example, a damper 15, which is an example of an exhaust unit, may be installed in the clean room as shown in Fig. 1. For example, the damper 15 is installed on a ceiling 16 or the like.

[0138] The exhaust section is installed at a point at least a certain distance away from the blower section (in the figure, this is in the x-axis direction). First, the damper 15 is installed together with the air conditioner. The damper 15 is installed at a point where the temperature of the air blown by the air conditioner rises. Specifically, at least one damper (hereinafter referred to as the "first damper") is installed for each air conditioner.

[0139] In some cases, a heat generating element such as manufacturing equipment MC is placed between the first damper and the air conditioner. In such cases, a damper different from the first damper (hereinafter referred to as a "second damper") is further installed at a predetermined interval between the first damper and the air conditioner to accommodate the heat generating element.

[0140] The predetermined interval is, for example, an interval determined by the standard manufacturing equipment MC and the working area of ​​the manufacturing equipment MC, etc. By setting such an interval, it is possible to deal with even if the arrangement of the manufacturing equipment MC is changed.

[0141] <Example of stratifying upper and lower layers> As shown in the example in Figure 1, in a clean room, it is desirable to have a layer (hereinafter referred to as the "lower layer E2") that can be controlled to meet conditions such as temperature by having a blower at the bottom blow air into the room and a suction unit at the top suck air in, and a layer (hereinafter referred to as the "upper layer E1") formed above the lower layer E2.

[0142] In the illustrated example, the lower floor E2 is the management area EC. In this example, the management area EC, i.e., the lower floor E2, is set in advance as an area having a height of 2 meters or less from the floor GD.

[0143] Note that a height of 2 meters from the floor GD is an example of the maximum height of the air blower unit. In other words, the maximum height at which the air blower unit can directly blow air is 2 meters from the floor GD. Therefore, the maximum height of the air blower unit is determined by the size of the air conditioner and the height at which it can blow air. Therefore, the area below 2 meters from the floor GD is the controlled area EC, and the temperature, etc. of the controlled area EC is controlled by the air conditioner, etc.

[0144] For example, as shown in the figure, if an upper layer E1 and a lower layer E2 are layered, a high temperature area, a so-called "heat pool," can be created in the upper part of the clean room.

[0145] If there is a "heat pool," the temperature difference between the bottom and top can be increased. In this way, if the temperature difference between the intake air and the exhaust air is large, the transport power can be reduced. Therefore, creating a "heat pool" can save energy.

[0146] In addition, creating a "heat pool" makes it easier for cold air to stagnate at the bottom, which makes it easier for the bottom to become cooler, and reduces the amount of energy needed to cool the bottom.

[0147] Furthermore, by creating a "heat pool," the area that is cooled by airflow or the like is often limited to the lower layer. In other words, by creating a "heat pool," the area that needs to be controlled by airflow or the like is smaller than the entire clean room. Therefore, compared to controlling the entire clean room, creating a "heat pool" can save energy.

[0148] <Example of a fixed distance> The location where the exhaust unit is to be installed, which is at least a certain distance away from the blower unit, is, for example, the following location.

[0149] For example, suppose the distance from the first wall to the second wall (hereinafter simply referred to as "width") is "40 meters." In this case, the damper 15 is installed, for example, at a point that is at least a certain distance away from the first wall or the second wall. In this case, the certain distance is, for example, "1.0 meter."

[0150] The certain distance is not limited to 1.0 meter. In other words, the certain distance varies depending on the conditions of the clean room, the strength of the air blown by the blower, the width, the layout of the manufacturing equipment, etc.

[0151] If you move a certain distance away from the air blower, the room temperature will be as follows:

[0152] The room temperature is lowest at a distance of 0.0 meters from the first or second wall, and the temperature increases as the distance increases. For example, suppose the set temperature is 22.0°C.

[0153] At a distance of 1.0 meter or more, the room temperature will be close to the set temperature, i.e., the room temperature will be higher than at the point of the air blower. Therefore, it is desirable to install a heating element such as a manufacturing device at a point 1.0 meter or more away from the air blower. In other words, stratification is likely to occur due to the rise in room temperature at a point 1.0 meter or more away from the air blower. Therefore, it is desirable to install a heating element at a point 1.0 meter or more away, and to install an exhaust section at a distance of 1.0 meter or more. If the exhaust section is installed at such a point, air can be exhausted at the point where the temperature rises, allowing the temperature and other conditions in the clean room to be maintained.

[0154] Furthermore, the air conditioners may be fans, etc. Furthermore, the air conditioners may have different configurations as shown in FIG. 1, or may have the same configuration.

[0155] Furthermore, multiple exhaust sections whose opening / closing or opening degree can be adjusted may be provided in a dispersed manner on the ceiling. Such a configuration can accommodate changes in the location of heat generating elements (such as manufacturing equipment) in the clean room. This configuration is also preferable because it can accommodate not only location changes but also the operation or non-operation of the manufacturing equipment. In this case, for example, the opening / closing and opening degree can be adjusted manually or using a control device depending on the location of the manufacturing equipment. Furthermore, the opening / closing and opening degree can be adjusted manually or using a control device depending on the operation or non-operation of the manufacturing equipment.

[0156] The number of air conditioners can be any number, from one to three or more. Furthermore, the air conditioners can be installed anywhere on the x-axis and y-axis. For example, when the distance from wall to wall is long, i.e., in a large space, the air volume of the air conditioners may be insufficient. In such cases, as shown in Figure 1, for example, the fans are arranged facing each other on the x-axis. This makes it possible to compensate for the insufficient air volume with a small number of air conditioners. Furthermore, with this configuration, the air blown by both air conditioners collides at a midpoint or the like. This collision of the air against each other has the effect of pushing the air upward in a clean room.

[0157] On the other hand, in a small space where the distance from wall to wall is short, even a single air conditioner can create stratification. In such cases, taking into account construction costs, etc., a single air conditioner may be sufficient.

[0158] The blower unit does not have to have the configuration shown in Fig. 2. For example, the blower unit may have a mechanism with a different shape, arrangement, or inclination angle. It is desirable that the blower unit be configured to blow air into the clean room by drawing in surrounding air.

[0159] Specifically, the configuration for inducing ambient air is a mechanism that first collects the air to be sent out and then pushes out the collected air. With such a mechanism, the air pressure at the location where the air was pushed out drops after it has been pushed out, causing the surrounding air to flow in and creating an induced airflow. In this way, a configuration that inducing ambient air to blow air can efficiently blow air. Note that the blower unit may also induct and blow ambient air using methods and mechanisms other than those described above.

[0160] The blower may also have mechanisms other than those shown in the drawings. For example, the blower may further have a filter or an air cooler. The air cooler (cooling coil) can be arranged extending in the height direction corresponding to the control area EC. The presence of an air cooler can keep the temperature of the air blown from the first air conditioner 11 and the second air conditioner 12 almost constant. The air cooler can also be arranged in the upper blower unit. With such a configuration, the thickness of the air conditioner can be reduced, allowing for more extensive use of the work area of ​​the clean room.

[0161] Furthermore, an evaporator of a refrigeration cycle can be used for the air cooler, etc. In this case, the condenser of the refrigeration cycle can be installed on the outer wall of the clean room, etc. In the above example, the air cooler, etc. can be installed on the roof, etc., via refrigerant piping, i.e., as an outdoor unit. Also, a type in which cold water is circulated from the outside through a heat exchanger can be used as the air cooler, etc. Furthermore, a configuration in which a heat exchanger is installed outside and cold air is supplied to the air cooler, etc. through a duct can be used. This allows for more effective use of the indoor space.

[0162] Other environmental conditions that may be managed in a clean room include temperature, humidity, cleanliness, vibration, pressure, gas components, static electricity, electromagnetic waves, microorganisms, or a combination of these. The clean room system may also perform assessments by combining two or more of the temperature, humidity, cleanliness, and other environmental conditions. Therefore, the clean room system may perform assessments or other processes using combinations other than those described above. In this way, combining multiple environmental conditions allows control to be performed to meet the conditions specified in standards, etc.

[0163] It is desirable that the environmental conditions to be managed include temperature, cleanliness, and humidity. Temperature, cleanliness, humidity, etc. are often the target of standards, etc. Therefore, if the temperature, cleanliness, humidity, etc. can be grasped, the inside of the clean room can be managed to meet the environmental conditions stipulated by the standards, etc.

[0164] Furthermore, not all spaces in a clean room need meet the environmental conditions defined for "Class 6." That is, the area in a clean room that is predefined as meeting the environmental conditions (the control area EC in the above example) may be a portion of the clean room. For example, the control area EC is defined as a range up to a certain height from the floor GD, as shown in the figure. Therefore, the control area EC is managed by an air conditioner or the like to maintain a temperature of, for example, 23°C ± 5°C. On the other hand, areas other than the control area EC (such as areas higher than the control area EC and areas lower than the floor GD in the example shown in FIG. 1) are not subject to management, and the temperature does not need to be within the range of 23°C ± 5°C.

[0165] The number of air intakes may be one or more. The air intakes may be located anywhere on the x-axis and y-axis. It is also desirable that the wind speed at which the air intakes draw in is equal to or less than a predetermined wind speed. That is, if the air intakes draw in a large amount of air at once, the upper and lower layers of air tend to mix. Therefore, it is desirable that the air intakes draw in air at a wind speed that makes it difficult for the upper and lower layers of air to mix. Specifically, it is desirable that the predetermined wind speed be equal to or less than 1 meter per second. The number of air intakes or the direction of air intake may be determined to ensure a wind speed that does not mix the upper and lower layers of air.

[0166] The suction unit may be configured to be connected to a duct DT or the like. As shown in Fig. 1, for example, a mechanism may be used in which air is sucked in from the inlet of the duct DT in the center of the clean room, and the air flows from the inlet of the duct DT to the second air intake port 14 via piping. In other words, the suction unit only needs to be able to suck in air above the blower unit, and the mechanism of the duct DT or the like, its location on the plane, and the configuration of the device, etc., are not important. A configuration in which a duct DT or the like is connected is particularly effective in a configuration without a ceiling.

[0167] Furthermore, the air sent through the duct DT may be discharged to the outside of the clean room through a separate exhaust duct or the like, without being circulated within the clean room.

[0168] Furthermore, the air intakes are not limited to a combination of the first air intake 13 and the second air intake 14. For example, in a configuration using two or more air intakes, all may be first air intakes 13. In a configuration using the first air intake 13, the air to be sent out can be cooled evenly in the height direction.

[0169] On the other hand, for example, in a configuration using two or more air intakes, all of them may be second air intakes 14. In a configuration using second air intakes 14, the filter portion and the like can be made thinner.

[0170] It is desirable that the discharge section has an opening like the damper 15. That is, it is desirable that the discharge section has a mechanism that can open / close the opening or adjust the opening degree. In this way, if the opening or opening degree can be adjusted, the discharge section can adjust the flow rate or flow velocity of the air passing through in accordance with the temperature, etc. For example, when the temperature rises due to the operation of the manufacturing equipment, the opening may be opened to make it easier for the air to be discharged. Alternatively, the flow rate may be adjusted to keep the wind speed below a predetermined speed.

[0171] The discharge unit may be realized by other mechanisms. For example, the discharge unit may include a window, a hole, or the like. For example, the discharge unit may have a sensor that measures values ​​such as temperature, flow rate, or flow velocity, and may have a system configuration in which the measurement results from the sensor are fed back to open / close the opening or adjust the opening degree using an actuator, or the like.

[0172] The first damper and the second damper may be different in size. For example, the first damper may be a damper that always sucks in air and is larger than the second damper, etc.

[0173] It is desirable that the first damper and the second damper are configured so that their opening degrees can be adjusted from inside the room. With such a configuration, the work of climbing up to the ceiling to adjust the opening degrees can be reduced. It is also desirable that the opening degrees can be adjusted remotely using a control device or the like. With such a configuration, the workload can be reduced.

[0174] <About the sensor> For example, as shown in Figure 1, the clean room may have a sensor such as an airflow meter SER4. For example, the airflow meter SER4 is a pitot tube.

[0175] Therefore, the blower and the airflow control unit may be configured to measure the air volume, the air velocity, or a combination thereof with the airflow meter SER4 and perform feedback control, etc. On the other hand, the blower and the airflow control unit may be configured to perform sequence control, etc., without the airflow meter SER4, etc.

[0176] With feedback from the airflow meter SER4, the clean room system can precisely control the airflow rate, etc.

[0177] <Regarding environmental conditions such as temperature, humidity, and cleanliness> As in the above example, temperature-based judgments are not limited to judgments based on temperature differences, i.e., the presence or absence of temperature unevenness. For example, ISO and other standards set ranges such as "23°C ± 5°C." Using these values ​​as thresholds, the clean room system may judge whether each temperature is within the range specified by the standard. If any of the measurement results includes a temperature outside the range, or if the maximum temperature or minimum temperature is outside the range, the clean room system may make a judgment to blow air or increase the airflow.

[0178] Similarly, the target may be humidity or cleanliness, etc. If a range is not defined by standards, etc., the range may be independently set.

[0179] By using such criteria for judgment, the clean room system can be controlled to satisfy the conditions stipulated by standards, etc.

[0180] <Determining air volume, etc.> The determination is not limited to determining whether or not to blow air. For example, the determination may also determine the air volume, etc. For example, when the determination is made based on the temperature and the cleanliness, the air volume is first determined separately based on the respective measurement results. Note that when determining whether or not to blow air, as in FIG. 6, for example, the air volume is a preset air volume.

[0181] Specifically, the clean room system specifies an air volume (hereinafter referred to as "first air volume") corresponding to the temperature difference. Similarly, the clean room system specifies an air volume (hereinafter referred to as "second air volume") corresponding to the cleanliness level. Then, the clean room system, for example, compares the first air volume with the second air volume and adopts the larger air volume.

[0182] In this way, the optimum air volume for satisfying each environmental condition can be identified. By adopting the largest air volume among them, the air volume can be set to match the environmental condition that requires the most air volume to satisfy the environmental condition.

[0183] Similarly, the clean room system may specify an air volume corresponding to the humidity difference (hereinafter referred to as the "third air volume"). That is, the clean room system may specify two or more of the first air volume, the second air volume, and the third air volume, and adopt the largest air volume among these air volumes.

[0184] The air volume is set by, for example, changing the amount of air blown by the blower per unit time, the length of time the blower blows air (i.e., the time the blower is turned "ON"), the wind speed, the rotation speed of the fins, the voltage of the motor that rotates the fins, the number of fins that rotate, or a combination of these.

[0185] The airflow rate corresponding to the temperature difference, cleanliness level, or humidity difference is a value that is set in advance using a table, for example.

[0186] In this way, by determining not only whether to blow air but also the air volume, the clean room system can adjust the strength of the airflow. In particular, this often reduces power consumption compared to when the only options are "100%" (blow air) or "0%" (do not blow air).

[0187] <About adjustments> The blown air temperature does not have to be water-cooled. That is, the adjustment may be performed by increasing the blown air temperature. Furthermore, the hardware used for the adjustment may be a device other than the above example.

[0188] <Regarding warnings, etc.> The alarm etc. is not limited to emitting an alarm sound etc. In other words, the notification method is not limited as long as it can notify the manager or the person in the clean room that an abnormality has occurred. For example, the alarm etc. may be configured to emit a light or a message etc. Furthermore, the warning etc. may display or transmit data etc. that is used for a sensor that cannot acquire data, i.e., to investigate the cause of a failure or to identify the location of the failure. In this way, when a failure etc. is notified by an alarm etc., the manager etc. can quickly notice an abnormality such as a sensor failure.

[0189] <Example of judging by area> The clean room system may divide the clean room into areas and perform a determination for each area, for example, as follows.

[0190] 13 is a diagram showing an example of performing judgment and control by dividing the area into areas. For example, a clean room is divided into areas as shown in the figure, such as an 11th area E11, a 12th area E12, a 13th area E13, a 14th area E14, a 21st area E21, a 22nd area E22, a 23rd area E23, and a 24th area E24.

[0191] In this way, by dividing the clean room into areas and performing measurement, judgment, and control for each area, the inside of the clean room can be controlled in detail.

[0192] The size of the area, how to divide it, the number of areas, etc. are set in advance. For example, the area may be divided as follows:

[0193] Fig. 14 is a diagram showing modified examples of the areas. For example, the areas may be divided as shown in Fig. 14(A), Fig. 14(B), Fig. 14(C), or Fig. 14(D) based on the size of the clean room, the locations where sensors are installed, the layout of the manufacturing equipment, etc.

[0194] By dividing the areas in this way, even if the environmental conditions differ from area to area, it is possible to blow air that is appropriate for each area.

[0195] <Example of determining and predicting filter life> Furthermore, the clean room system preferably includes a control device CNT, as shown in Fig. 11. The control device CNT is, for example, an information processing device such as a server. Therefore, the control device CNT acquires data measured by various sensors via the PLC 100 or the like. Then, the control device CNT determines and predicts the life of a filter in an air blower having a filter, for example, as follows.

[0196] 15 is a diagram showing an example of the configuration of an air blower having a filter. For example, as shown in the figure, the air blower has a filter FR in the direction in which the first air conditioner 11 blows air (to the right of the first air conditioner 11 in the example shown).

[0197] The filter FR removes particles and the like contained in the air being blown. The filter FR may also slow down the speed of the air being blown. Therefore, after a certain period of use, the filter FR reaches the end of its "life" due to damage, wear, dirt, clogging, or the like. That is, a filter FR that has reached the end of its life may no longer be able to adequately purify the air being blown, or may become clogged and cause other problems, such as being unable to blow air sufficiently. Therefore, it is desirable to replace a filter FR that has reached the end of its life.

[0198] The control device CNT measures, for example, parameters as shown in the figure, and determines whether or not the filter FR has reached the end of its life based on the measurement results.

[0199] For example, the clean room system 10 has a hardware configuration including a barometer SER21, an airflow meter SER22, a barometer SER23, a differential pressure meter 24, and the like.

[0200] As shown in the figure, the barometer SER21 measures the air pressure (hereinafter referred to as "first air") sent to the filter FR by the first air conditioner 11, that is, the air pressure (hereinafter referred to as "first air pressure P1") of the air before passing through the filter FR.

[0201] As shown in the figure, the barometer SER23 measures the air pressure (hereinafter referred to as "second air") blown from the filter FR into the interior of the clean room, i.e., the air pressure (hereinafter referred to as "second air pressure P2") of the air after passing through the filter FR.

[0202] The differential pressure gauge 24, which is an example of a differential pressure measuring unit, measures the difference between the first atmospheric pressure P1 and the second atmospheric pressure P2 (hereinafter referred to as the "pressure difference SRP").

[0203] The air flow meter SER22, which is an example of an air velocity measuring unit, measures the air velocity SRV before passing through the filter FR.

[0204] Using the above measurement results, the management device CNT determines the life of the filter FR, for example, as follows.

[0205] 16A and 16B are diagrams showing examples of determining the lifespan of a filter. For example, the lifespan of a filter is determined as shown in FIG. 16A or FIG. 16B.

[0206] 16(A), the horizontal axis represents wind speed SRV and the vertical axis represents the square root of pressure difference SRP. In the initial state, that is, immediately after replacing the filter FR, the characteristics are as shown in the initial state CRA1 shown in the figure. Specifically, in the initial state CRA1, even if the wind speed SRV changes, the square root of pressure difference SRP does not change much.

[0207] As the filter FR is used, the characteristics often change from the initial state CRA1 to the replacement time state CRA2, as shown in the figure.

[0208] In the replacement due state CRA2, the square root of the pressure difference SRP changes significantly with changes in the air velocity SRV compared to the initial state CRA1. In this state, the first air conditioner 11 blows air at a constant pressure, so the first pressure P1 remains almost constant over time, whereas the pressure drops significantly after the air passes through the filter FR. In other words, if the filter FR is clogged, the filter FR weakens the force of the air being blown, which can easily cause a significant drop in pressure.

[0209] Therefore, if a value indicating a trend such as the replacement time status CRA2 (for example, the slope of the replacement time status CRA2) is set as a threshold value in advance, the management device CNT can determine the filter life by calculating the square root of the air pressure difference SRP, etc.

[0210] In Figure 16(B), the horizontal axis represents time (the time the filter FR has been in use, i.e., the time elapsed since the filter FR was replaced), and the vertical axis represents the result of dividing the square root of the pressure difference SRP by the wind speed SRV.

[0211] The recorded value CRB is, for example, an example of the result of dividing the square root of the pressure difference SRP by the wind speed SRV, calculated daily. As shown in the figure, the recorded value CRB increases over time. In response to this, a judgment value JL, which serves as a threshold for determining whether it is time to replace the air conditioner, is preset in the management device CNT.

[0212] In this way, the management device CNT can determine that the point at which the recorded value CRB reaches the judgment value JL (in the drawing, this is the point indicated as the end of life point LP) is the end of the life of the filter FR.

[0213] Furthermore, the management device CNT may predict the life of the filter, for example, as follows.

[0214] 17 is a diagram showing an example of a filter life prediction. For example, assume that the recorded value CRB is input as shown in FIG. 16(B). As shown in the figure, at the current time T1, the recorded value CRB has not reached the judgment value JL, so it is determined that the current time T1 is not the time to replace the filter FR.

[0215] Therefore, the management device CNT predicts the time when the life is expected to end (hereinafter referred to as "prediction time T2") based on the recorded value CRB, for example, as shown in the figure. Specifically, the management device CNT first calculates a prediction line PL based on the recorded value CRB. Points on the prediction line PL are the prediction points.

[0216] The forecast line PL is calculated, for example, by taking a moving average of the calculation results for the most recent month indicated by the recorded values ​​CRB, an average of the recorded values ​​CRB, or by the least squares method based on the recorded values ​​CRB.

[0217] As shown in the figure, when the prediction line PL is extended, the intersection point PP with the judgment value JL is obtained. For example, the intersection point PP obtained in this manner is the point at which the filter FR reaches the end of its life, i.e., the prediction point becomes equal to or greater than the threshold value, and the time at which the filter FR reaches the end of its life is predicted to be the prediction time T2.

[0218] With this configuration, the clean room system can predict when the filter FR will need to be replaced.

[0219] The hardware configuration is not limited to the configuration shown in the figure. For example, a hardware configuration without the differential pressure gauge 24 may be used. In this configuration, the management device CNT calculates the difference between the atmospheric pressures measured by the barometer SER21 and the barometer SER23 to calculate the pressure difference SRP. In this way, the pressure difference SRP and the wind speed SRV may be obtained by calculation or the like. Furthermore, the measurement results may be calculated based on measurement results obtained from sensors other than those shown in the figure. In this way, the number of sensors can be reduced by estimating the measurement results based on measurement results from other sensors or by using the measurement results of other sensors in common.

[0220] As described above, a configuration that determines or predicts the filter lifespan can prevent replacing a filter that has sufficient remaining lifespan, compared to periodic replacement of filters. Also, compared to a configuration that monitors a differential pressure gauge or the like to determine the filter lifespan, it can reduce the amount of manpower required. In this way, it is possible to reduce costs due to unnecessary replacement and reduce the number of people required to monitor the filters, thereby achieving labor savings.

[0221] Furthermore, with the above-described configuration, it becomes clear whether or not it is time to replace the filter, and so-called "visualization" can be achieved.

[0222] <Modification to increase the airflow rate> It is desirable that the clean room system further judges the following conditions and controls the blower. Condition 1) When the temperature of the air blown by the air blowing unit is adjusted with water, the cold water control valve that adjusts the amount of water used by the adjustment unit (hereinafter simply referred to as "water amount") is fully open, or the cold water control valve is opened so that the amount of water exceeds the preset upper limit (hereinafter referred to as "water amount upper limit"). Second condition) When the temperature of the air blown by the blower is equal to or lower than a preset lower limit (hereinafter referred to as the "temperature lower limit").

[0223] When it is determined that at least one of the two conditions, such as the first condition and the second condition, is met, the clean room system preferably controls the airflow rate to increase.

[0224] When a clean room system controls the air blower by making a judgment based on a combination of temperature difference, humidity difference, cleanliness, etc., the clean room system may control to reduce the air blowing volume if the temperature difference, humidity difference, cleanliness, etc. meet the conditions of standards, etc. When such control is performed, the air blowing volume is reduced, which may cause the temperature inside the clean room to rise.

[0225] The first and second conditions shown above are examples of conditions used to detect when the blown air temperature is outside the control range or when the temperature approaches the outside of the control range when adjusting the temperature inside the clean room.

[0226] Specifically, when the blown air is water-cooled, if the chilled water control valve is fully open or reaches the upper limit of the water flow rate, it can be assumed that the room temperature has risen to a level where it is difficult to further lower the room temperature by blowing water-cooled blown air. Therefore, the clean room system determines whether the water cooling is at or near its limit and the room temperature has risen based on the first condition. In such a state, since water cooling has reached its limit, it may be impossible to lower the room temperature unless the blown air volume is increased. Therefore, when the first condition is met, it is desirable for the clean room system to control the blower unit to increase the blown air volume.

[0227] Furthermore, when the blown air temperature reaches the lower limit, it can be assumed that the indoor temperature has risen to a level where it is difficult to further lower the indoor temperature by lowering the blown air temperature. To lower the indoor temperature, assuming a constant airflow rate, the clean room system can lower the indoor temperature by lowering the blown air temperature, i.e., by blowing cooler air. However, when the second condition is met, i.e., when the blown air temperature is equal to or lower than the lower limit, it can be assumed that the blown air temperature is at or near the limit for lowering the blown air temperature. Therefore, the clean room system determines whether the blown air temperature is at or near the limit for lowering the blown air temperature and the indoor temperature has risen based on the second condition. In such a state, since lowering the blown air temperature is at its limit, it may be impossible to lower the indoor temperature unless the blown air volume is increased. Therefore, when the second condition is met, it is desirable for the clean room system to control the blower unit to increase the blown air volume.

[0228] [Other embodiments] In the examples given above, the value may be a statistical value such as an average, a moving average or a median.

[0229] In the above example, the processes do not have to be performed in the order shown in the drawings, etc. For example, the processes such as measurements may be performed in an order different from the order shown in the drawings or in parallel.

[0230] Furthermore, each process may use AI (Artificial Intelligence) etc. For example, the life of a filter may be predicted based on machine learning using past data as learning data.

[0231] The device in the above example does not have to be a single device. For example, there may be multiple devices such as information processing devices. That is, an information processing system consisting of multiple information processing devices may execute processing or data storage in a distributed, redundant, virtualized, parallel, or combination thereof manner. Furthermore, for example, devices such as a PLC and a management device may be integrated into a single device.

[0232] The processing in the embodiments may be realized, for example, by a program for causing a computer to execute the processing. That is, based on the program for executing the processing, a computer such as an information processing device executes the processing by cooperating with an arithmetic unit, a control unit, a storage unit, etc.

[0233] The program may also be distributed on a computer-readable storage medium, such as an auxiliary storage device such as an optical disk or hard disk, a USB memory, or a magnetic tape. The program may also be distributed via a telecommunications line, such as a network.

[0234] The present invention is not limited to the above-described configurations, such as those described in the above-described embodiments, and may be combined with other elements. These aspects may be changed without departing from the spirit of the present invention, and may be appropriately determined depending on the application form. [Explanation of symbols]

[0235] 10 Clean Room System 10F1 Air blower 10F2 Temperature measurement section 10F20 Humidity measurement unit 10F3 Cleanliness Measurement Section 10F4 Judgment section 10F5 Air flow control unit 11 1st air conditioner 12 2nd air conditioner 13 First air intake 13C Cooling coil 13F Exhaust fan 14 Second intake port 14C cooling coil 14F Exhaust fan 15 Damper 16 Ceiling 20 Finn 21 Air supply port 22 Center axis 24 Differential pressure gauge 31 3rd air conditioner 33 Cold water valve 100 PLC CNT management device CRA1 initial state CRA2 Replacement time status CRB Record Value DT Duct E1 upper layer E2 lower layer E11 Area 11 E12 Area 12 E13 13th Area E14 14th Area E21 Area 21 E22 Area 22 E23 Area 23 E24 24th Area EC management area FR filter GD Floor J1 1st judgment result J2 2nd judgment result J3 Judging Results J4 3rd judgment result JL judgment value LP end of life LT Lower limit MC manufacturing equipment P1 1st atmospheric pressure P2 Second atmospheric pressure PL forecast line PP intersection SER1 Temperature Sensor SER2 Particle Counter SER3 Humidity Sensor SER4 Air Flow Meter SER5 Wireless Temperature and Humidity Sensor SER21 Barometer SER22 Air flow meter SER23 Barometer SER24 Differential Pressure Gauge SR1 temperature difference SR2 cleanliness SR3 Humidity difference SR11 Maximum temperature SR12 minimum temperature SR31 Maximum humidity SR32 minimum humidity SRP pressure difference SRV wind speed T1 Current time T2 prediction time point

Claims

1. A clean room system installed in a clean room, a blower that blows air into the clean room; a suction unit that is installed above the blower unit and that draws in the air; a temperature measuring unit that measures the temperature inside the clean room; a cleanliness measurement unit that measures the cleanliness within the clean room; an air blowing control unit that controls an air blowing amount, which is the amount of air blown from the air blowing unit, based on the temperature and the cleanliness; Including, The blower unit includes fins arranged radially, Dividing the clean room into a plurality of areas, each of the temperature measuring unit and the cleanliness measuring unit performs measurement in each of the plurality of areas; the air blowing control unit acquires data from the temperature measurement unit and the cleanliness measurement unit for each of the areas, and performs control based on the acquired data; The suction unit includes an exhaust fan that sends the sucked air to the blower unit. Clean room system.

2. Further comprising a humidity measuring unit that measures humidity inside the clean room, The air blowing control unit controls the amount of air blown based on the temperature, the cleanliness, and the humidity. The clean room system according to claim 1 .

3. The blower unit is The air sent into the clean room is sent so as to include a swirling component which is a component that rotates in the sending direction.

3. The clean room system according to claim 1 or 2.

4. Further comprising an adjusting unit that adjusts the temperature of the air with water, The air blowing unit blows the air adjusted by the adjustment unit. The clean room system according to any one of claims 1 to 3.

5. The blower unit has a filter, a differential pressure measuring unit that measures a difference in pressure between a first atmospheric pressure of the first air that the blower blows to the filter and a second atmospheric pressure of the second air that is blown from the filter into the clean room; a wind speed measuring unit that measures the wind speed of the first air; Further comprising: The life of the filter is determined or predicted based on the air pressure difference and the wind speed. The clean room system according to any one of claims 1 to 4.

6. Recording the square root of the pressure difference divided by the wind speed; When the recorded value is equal to or greater than a threshold, it is determined that the filter has reached the end of its service life, or when a predicted point based on the recorded value is equal to or greater than a threshold, it is predicted that the filter has reached the end of its service life. The clean room system according to claim 5.

7. An air circulation method performed by a clean room system that is installed in the clean room and includes a blower unit that blows air into a clean room divided into a plurality of areas and has radially arranged fins, and an exhaust fan that is installed above the blower unit and sends the sucked air to the blower unit, and includes a suction unit that sucks in the air, and the clean room system is installed in the clean room, a temperature measurement step in which the clean room system measures temperatures in each of the plurality of areas within the clean room; a cleanliness measurement procedure in which the clean room system measures the cleanliness in each of the plurality of areas in the clean room; an air blowing control step in which the clean room system controls an air blowing volume, which is the amount of air blown from the air blowing unit, for each of the plurality of areas based on the temperature and the cleanliness in each of the areas; An air circulation method including:

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