Processing recipe generation method, processing recipe generation device, and processing recipe display method

Abstract

To benefit generation of a new processing recipe utilizing an existing processing recipe.SOLUTION: A generation method of a processing recipe for generating a second processing recipe adopted in a second processing device by utilizing a first processing recipe adopted in a first processing device comprises the first step and the second step. The first step inputs the first processing recipe. The second step adopts a first parameter already set to a first item to a second item common to the first item as a second parameter of the second item. The first parameter defines the content of the first processing being the target of execution by the first processing device and corresponding to the first item. The second parameter defines the content of the second processing being the target of execution by the second processing device and corresponding to the second item.SELECTED DRAWING: Figure 18

Description

[Technical Field]

[0001] The present disclosure relates to techniques for generating process recipes for use in processing.

[0002] Substrate processing apparatuses that perform a plurality of processes on substrates are known. For example, a substrate processing apparatus includes a plurality of processing sections, each of which performs a process on a substrate (hereinafter referred to as a "substrate process").

[0003] Substrate processing is performed by different processing units according to specifications and / or procedures called process recipes. For example, if the substrate processing is to clean a substrate, the process recipe specifies the processing units that will perform the cleaning and the various parameters that will be employed in the cleaning.

[0004] There may be cases where substrate processing is partially common among different substrate processing apparatuses, for example, both the first substrate processing apparatus and the second substrate processing apparatus may have a processing unit for cleaning substrates.

[0005] For example, Patent Document 1 proposes a technique for copying a processing recipe for a different substrate processing apparatus. For example, Patent Document 2 proposes a technique for correcting a recipe that defines processing conditions. For example, Patent Document 3 discloses a technique for creating and editing a processing recipe using a recipe input screen. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-214350 [Patent Document 2] Japanese Patent Publication No. 2020-47865 [Patent Document 3] Japanese Patent Publication No. 2020-88312 Summary of the Invention [Problem to be solved by the invention]

[0007] Adopting a portion of a process recipe (hereinafter referred to as an "existing process recipe") that has already been generated for a first substrate processing apparatus as a portion of a new process recipe (hereinafter referred to as a "new process recipe") for a second substrate processing apparatus will facilitate generating a new process recipe using an existing process recipe.

[0008] However, there may be cases where none of the processing units in the first substrate processing apparatus can perform the processing performed by the processing unit in the second substrate processing apparatus. For example, when both the first and second substrate processing apparatuses have the function of cleaning substrates, the second substrate processing apparatus may have a processing unit that performs bubbling of the cleaning liquid (hereinafter referred to as a "bubbling unit"), while the first substrate processing apparatus may not have a processing unit that performs bubbling.

[0009] In such a case, simply copying an existing process recipe or modifying process parameters is not considered appropriate when creating a new process recipe, because the existing process recipes for the first substrate processing apparatus, which does not have a processing unit capable of bubbling, do not include a process recipe that employs bubbling.

[0010] The present disclosure has been made in view of the above-mentioned problems, and aims to provide a technique that contributes to the generation of a new process recipe using an existing process recipe. [Means for solving the problem]

[0011] A first aspect of the present disclosure is a process recipe generation method, which utilizes a first process recipe employed in a first processing apparatus to generate a second process recipe employed in a second processing apparatus.

[0012] In the first processing recipe, a plurality of first parameters have already been individually set for a plurality of first items. The plurality of first items individually correspond to a plurality of first processes. All of the plurality of first processes are to be executed by the first processing device. The plurality of first parameters individually define the contents of the plurality of first processes.

[0013] In the second processing recipe, a plurality of second parameters are to be set individually for a plurality of second items. The plurality of second parameters define the contents of a plurality of second processes, respectively. The plurality of second items correspond individually to the plurality of second processes. All of the plurality of second processes are to be executed by the second processing device.

[0014] The method includes a first step and a second step. In the first step, one of the first process recipes is input. In the second step, for one of the plurality of second items common to one of the plurality of first items, one of the plurality of first parameters that has already been set for the one of the plurality of first items is adopted as the one of the plurality of second parameters.

[0015] before In the first step, the one first process recipe is selected from a plurality of first process recipes.

[0016] The method further includes a third step, which is performed prior to the first step, of displaying quantitative information about the number of second items common to the number of first items for each of the first processing recipes.

[0017] In this disclosure 2 The first aspect is LikeThe method for generating such a process recipe further includes a fourth step, which is performed after the second step, and which indicates that the plurality of second parameters need to be set for any of the plurality of second items that is not common to any of the plurality of first items.

[0018] In this disclosure 3 The first aspect is Or in the second aspect The method for generating such a process recipe further includes a fifth step, which is performed after the second step, and which indicates the presence of any of the plurality of first items that is not common to any of the plurality of second items.

[0019] In this disclosure 4 The embodiment is a process recipe generating apparatus that uses a first process recipe employed in a first processing apparatus to generate a second process recipe employed in a second processing apparatus.

[0020] In the first processing recipe, a plurality of first parameters have already been individually set for a plurality of first items. The plurality of first items individually correspond to a plurality of first processes. All of the plurality of first processes are to be executed by the first processing device. The plurality of first parameters individually define the contents of the plurality of first processes.

[0021] In the second processing recipe, a plurality of second parameters are to be set individually for a plurality of second items. The plurality of second parameters define the contents of a plurality of second processes, respectively. The plurality of second items correspond individually to the plurality of second processes. All of the plurality of second processes are to be executed by the second processing device.

[0022] The apparatus includes an input unit and a calculation unit. The input unit inputs one of the first process recipes. The calculation unit adopts, for one of the plurality of second items common to one of the plurality of first items, one of the plurality of first parameters that has already been set for the one of the plurality of first items as the one of the plurality of second parameters.

[0023] before The input unit receives the one of the first processing recipes selected from the plurality of first processing recipes. The apparatus includes an output unit. Prior to input of the one of the first processing recipes, the output unit displays quantitative information of the second items common to the first items for each of the plurality of first processing recipes.

[0024] In this disclosure 5 The mode of In the fourth aspect The process recipe generation apparatus includes an output unit that, after one of the plurality of first parameters is adopted as one of the plurality of second parameters, displays a message indicating that the plurality of second parameters need to be set for any of the plurality of second parameters that is not common to any of the plurality of first parameters.

[0025] In this disclosure 6 The mode of In the fourth aspect The process recipe generation apparatus includes an output unit that indicates the presence of any of the first items that is not common to any of the second items after the one of the plurality of first parameters is adopted as the one of the plurality of second parameters.

[0030] The present disclosure 7 The embodiment is a processing recipe display method including a first step and a second step.

[0031] In a first processing recipe employed in a first processing apparatus, a plurality of first parameters are already set individually for a plurality of first items. The plurality of first items individually correspond to a plurality of first processes. All of the plurality of first processes are to be executed by the first processing apparatus. The plurality of first parameters individually define the contents of the plurality of first processes.

[0032] In a second processing recipe employed in a second processing apparatus, a plurality of second parameters are set individually for a plurality of second items. The plurality of second parameters define the contents of a plurality of second processes, respectively. The plurality of second items correspond individually to the plurality of second processes. All of the plurality of second processes are to be executed by the second processing apparatus.

[0033] The first step detects items that are common between the plurality of first items and the plurality of second items as common items, and the second step displays quantitative information about the common items.

[0034] The present disclosure 8 The embodiment is 7 In the first step, all of the first process recipes are compared with one of the second process recipes, and in the second step, the information about the common items is displayed for each of the first process recipes. [Effects of the Invention]

[0035] A method for generating a processing recipe according to a first aspect of the present disclosure and a method for generating a processing recipe according to a second aspect of the present disclosure 4 According to the process recipe creation device of this aspect, an operator is not required to set parameters for common items in a new process recipe, and it is easy to create a new process recipe using an existing process recipe. The third step is performed prior to the first step, which helps the operator obtain information to help him or her decide which existing processing recipe to select.

[0037] In this disclosure 2A method for generating a processing recipe according to the present invention 5 According to the process recipe creation device of the aspect, a message indicating that parameters need to be set for the missing items is displayed. Such a message helps to remind the operator of the processes required for creating a new process recipe.

[0038] In this disclosure 3 A method for generating a processing recipe according to the present invention 6 According to the process recipe creation device of this aspect, the presence of redundant items is displayed, which helps the operator to delete unnecessary items in creating a new process recipe.

[0040] In this disclosure 7 According to the processing recipe display method of the aspect, quantitative information on common items can be obtained, and this information can serve as criteria for an operator to select an existing processing recipe. Such criteria contribute to easy generation of a new processing recipe using an existing processing recipe.

[0041] In this disclosure 8 According to the processing recipe display method of this aspect, an existing processing recipe can be easily selected from a plurality of existing processing recipes, and a new processing recipe can be easily created using an existing processing recipe. [Brief explanation of the drawings]

[0042] [Figure 1] 1 is a plan view showing an example of a schematic configuration of a substrate processing apparatus according to an embodiment; [Figure 2] FIG. 2 is a block diagram showing an example of a functional configuration of the substrate processing apparatus according to the embodiment. [Figure 3] 10A and 10B are diagrams illustrating units that may be included in a drying processing unit, a cleaning processing unit, and a chemical processing unit. [Figure 4] FIG. 10 is a tree diagram illustrating an example of a configuration employed in the drying processing unit. [Figure 5]FIG. 10 is a tree diagram illustrating an example of a configuration employed in the cleaning processing unit. [Figure 6] FIG. 1 is a tree diagram illustrating an example of a configuration employed in a chemical solution treatment unit. [Figure 7] FIG. 1 is a tree diagram illustrating an example of a configuration employed in a chemical solution treatment unit. [Figure 8] FIG. 1 is a tree diagram illustrating an example of a configuration employed in a chemical solution treatment unit. [Figure 9] FIG. 10 is a diagram illustrating an example of an operation screen in the substrate processing apparatus. [Figure 10] FIG. 10 is a diagram illustrating a carrier display window. [Figure 11] FIG. 10 is a diagram illustrating an example of a process start window. [Figure 12] FIG. 10 illustrates an example sub-window that functions as a warning. [Figure 13] FIG. 10 is a diagram illustrating an example of a sub-window that functions as a recipe editing screen. [Figure 14] FIG. 10 illustrates an example sub-window that functions as an indication. [Figure 15] FIG. 10 is a diagram illustrating an example of a subwindow that is displayed when a button is clicked. [Figure 16] 10 is a flowchart illustrating a group of steps for generating a new process recipe. [Figure 17] 10 is a flowchart illustrating details of steps. [Figure 18] 10 is a flowchart illustrating a group of processes that a step may have. [Figure 19] FIG. 10 is a diagram illustrating an example of a subwindow displayed by executing a step. [Figure 20] FIG. 10 is a diagram illustrating an example of a sub-window that functions as a screen for inputting a processing recipe. [Figure 21] FIG. 1 is a block diagram illustrating a configuration of a substrate processing apparatus system. DETAILED DESCRIPTION OF THE INVENTION

[0043] Hereinafter, each embodiment of the present disclosure will be described with reference to the accompanying drawings. The components described in each embodiment are merely examples, and the scope of the present disclosure is not intended to be limited to these examples. The drawings are merely schematic illustrations. In the drawings, the dimensions and number of each part may be exaggerated or simplified as necessary to facilitate understanding. In the drawings, parts having similar configurations and functions are assigned the same reference numerals, and duplicate explanations are appropriately omitted.

[0044] In this specification, expressions indicating relative or absolute positional relationships (e.g., "parallel," "orthogonal," "center") not only indicate the exact positional relationship, but also indicate a state including tolerances and a state in which the same level of functionality is obtained. Expressions indicating that two or more things are equal (e.g., "identical," "equal," "homogeneous") not only indicate a state in which they are strictly equal quantitatively, but also indicate a state in which there is a difference that allows for tolerances or similar functionality, unless otherwise specified.

[0045] Unless otherwise specified, expressions indicating shape (such as "rectangular" or "cylindrical") not only represent the shape strictly geometrically, but also represent shapes that have, for example, irregularities or chamfers, within the scope of achieving the same effect.

[0046] The expressions "comprises," "includes," "has," "includes," or "has" of one element are not exclusive expressions that exclude the presence of other elements.

[0047] <1. Configuration of the substrate processing apparatus> 1 is a plan view showing an example of a schematic configuration of substrate processing apparatuses FA, FB, and FC according to this embodiment. The substrate processing apparatuses FA, FB, and FC are first collectively described as substrate processing apparatus F in FIG. For example, the substrate processing apparatuses FA, FB, and FC differ from one another in terms of differences in chemical processing units 6A, 6B, and 6C, which will be described later. In the following example, the substrate processing apparatus F has the functions of performing chemical processing, cleaning processing, and drying processing on substrates W.

[0048] The substrate processing apparatus F includes, for example, an input section 1, a first transport section 2, a second transport section 3, a drying processing section 4, a cleaning processing section 5, a chemical processing section 6, an output section 7, an input section 8, an output section 9, a control section 10, and a memory section 20.

[0049] The loading unit 1 has a function of loading unprocessed substrates W from outside the substrate processing apparatus F into the substrate processing apparatus F. The loading unit 1 has, for example, two mounting tables 11. Each of the mounting tables 11 has a function of loading a carrier C1. The carrier C1 can store a plurality of unprocessed substrates W (for example, 25 or less).

[0050] The mounting table 11 is provided with, for example, a sensor unit 11m. The sensor unit 11m has, for example, a function of measuring the number of substrates W stored in the carrier C1. Information about the number of substrates W measured by the sensor unit 11m is stored in the memory unit 20 together with, for example, identification information of the carrier C1. The information about the number of substrates W is used, for example, in the control unit 10 to obtain information related to the amount of substrates W processed in the drying processing unit 4, the cleaning processing unit 5, and the chemical processing unit 6.

[0051] The unloading unit 7 has a function of unloading processed substrates W from, for example, the substrate processing apparatus F to the outside of the substrate processing apparatus F. The unloading unit 7 is located, for example, adjacent to the loading unit 1. The unloading unit 7 has, for example, two loading tables 71. Each loading table 71 has a function of loading a carrier C1. The unloading unit 7 unloads the carrier C1 together with multiple processed substrates W stored in the carrier C1 to the outside of the substrate processing apparatus F.

[0052] The first transport unit 2 is located, for example, along the input unit 1 and the output unit 7. The first transport unit 2 has a function of, for example, removing all of the substrates W stored in the carrier C1 placed on the input unit 1 and transporting them to the second transport unit 3.

[0053] For example, all of the substrates W stored in the two carriers C1 are transported to the second transport unit 3. The substrates W stored in the two carriers C1 form one lot of substrates. For example, the plurality of substrates W constituting one lot of substrates are treated as a unit of processing in the drying processing unit 4, cleaning processing unit 5, and chemical processing unit 6.

[0054] The drying processing unit 4, the cleaning processing unit 5, and the chemical processing unit 6 are, for example, located along one direction in that order from the side closest to the first transport unit 2. The second transport unit 3 moves, for example, along the same one direction.

[0055] The drying processing unit 4 has a function of storing a plurality of substrates W in a low-pressure chamber and drying them, for example.

[0056] The cleaning processing unit 5 has a function of, for example, performing a cleaning process with pure water on a plurality of substrates W. The chemical processing unit 6 has a function of, for example, performing a chemical process on a plurality of substrates W with a processing liquid containing a chemical liquid.

[0057] The first transport section 2 has the function of, for example, receiving a processed substrate W from the second transport section 3, transporting the processed substrate W to a carrier C1 placed on the loading table 71 of the discharge section 7, and storing it in this carrier C1.

[0058] The input unit 8 is located, for example, near the mounting table 11. The input unit 8 has a function of inputting signals in response to, for example, the actions of an operator as a user. This allows the operator to select or input various types of information. The input unit 8 is configured, for example, with a touch panel. The input unit 8 may also have an operation unit including buttons that can be pressed or other various operations, or a microphone that allows voice input. For example, the operator can create and edit a processing recipe via the input unit 8 and store it in the storage unit 20. For example, the operator can specify a processing recipe for multiple substrates W to be processed from a recipe group including multiple processing recipes stored in the storage unit 20 via the input unit 8.

[0059] The output unit 9 is located near the mounting table 11, for example. The output unit 9 has a function of outputting various types of information, for example, in response to control by the control unit 10. The output unit 9 includes, for example, a display unit capable of visually outputting various types of information. The display unit has a function of displaying a screen (hereinafter also referred to as a "recipe editing screen") for an operator to edit a processing recipe, for example, in response to a signal input by the input unit 8 in response to an operator's action. The output unit 9 may also include, for example, a speaker capable of audibly outputting various types of information. The various types of information output visibly or audibly by the output unit 9 may include, for example, information indicating various states of the substrate processing apparatus F and information indicating various alarms (warnings). For example, the input unit 8 and the display unit of the output unit 9 may be realized by the same display unit having a touch panel.

[0060] 2 is a block diagram showing an example of the functional configuration of the substrate processing apparatus F according to this embodiment. The operation of the substrate processing apparatus F having the above configuration is generally controlled by a control unit 10, for example, as shown in FIG.

[0061] The control unit 10 has, for example, a calculation unit 10x and a memory 10y. The calculation unit 10x is implemented using an electric circuit exemplified by, for example, a central processing unit (CPU) that functions as at least one processor. The memory 10y is implemented using an electric circuit exemplified by, for example, a random access memory (RAM) that temporarily stores information. Various pieces of information temporarily obtained by various calculations in the calculation unit 10x are appropriately stored in the memory 10y.

[0062] The calculation unit 10x, for example, reads and executes a program stored in the storage unit 20, thereby realizing various functional configurations for the control unit 10 to execute overall control of the operation of the substrate processing apparatus F. The various functional configurations include, for example, a part that creates a schedule for processing a plurality of substrates W in the substrate processing apparatus F, and a part that causes the drying processing unit 4, the cleaning processing unit 5, and the chemical processing unit 6 to process the plurality of substrates W in accordance with the schedule.

[0063] When the calculation unit 10x executes overall control of the operation of the substrate processing apparatus F, the memory 10y is used as, for example, a workspace for storing temporarily generated or acquired information, etc. At least a part of the functional configuration realized by the control unit 10 may be realized by hardware such as, for example, a dedicated electronic circuit.

[0064] The storage unit 20 is configured with a non-volatile storage medium exemplified by a hard disk drive (HDD), a flash memory, or a solid state drive (SSD), for example.

[0065] For example, folders 20a, 20b, and 20c are stored in advance in the storage unit 20. Various programs, such as a schedule creation program and a processing program, are stored in the folder 20a. A recipe group including multiple types of processing recipes is stored in the folder 20b.

[0066] Various types of data are stored in advance in folder 20c. The various types of data include, for example, data for configuring a screen for inputting a processing recipe (also referred to as "screen configuration data"). The screen configuration data includes, for example, information required for displaying a plurality of setting items that configure the processing recipe and inputting setting conditions such as numerical values. The various types of data stored in folder 20c include, for example, files that define information about the hardware of substrate processing apparatus F.

[0067] FIG. 3 is a diagram illustrating units that may be included in the drying processing unit 4, units that may be included in the cleaning processing unit 5, and units that may be included in the chemical processing unit 6.

[0068] For example, the drying processing unit 4 includes a lifter, an IPA ("IPA" indicates "isopropyl alcohol"; the same applies below) unit, an IPA vaporizer, an IPA concentration meter, an HF ("HF" indicates "hydrofluoric acid"; the same applies below) concentration meter, an HCL ("HCL" indicates "hydrochloric acid"; the same applies below) concentration meter, a resistivity meter, an N2 ("N2" indicates nitrogen gas; the same applies below) blower, a high-flow N2 blower, an exhaust pump, a flow controller, a Vapor ("Vapor" indicates "vaporization") unit, a fixed needle valve, and a motor needle valve.

[0069] For example, the cleaning processing unit 5 includes a lifter, shower, hot water unit, ultrasonic unit, O3 ("O3" stands for "ozone"; the same applies below) unit, chemical solution injection unit, water transfer unit, degassing unit, hydrogen water ("hydrogen water" stands for "hydrogen peroxide") unit, ammonia water unit, CO2 ("CO2" stands for "carbon dioxide") bubbling unit, N2 bubbling unit, liquid level gauge, processing unit internal thermometer, resistivity meter, N2 blow, flow rate controller, fixed needle valve, and motor needle valve.

[0070] For example, the chemical treatment unit 6 includes a lifter, a pure water supply line, an H3PO4 ("H3PO4" indicates "phosphoric acid") supply line, a pure water temperature control unit, an H3PO4 temperature control unit, an ultrasonic unit, an O3 gas unit, an N2 bubbling unit, a thermometer inside the treatment unit, a resistivity meter, a flow controller, a fixed needle valve, a motor needle valve, a filter bypass line, and a particle monitor.

[0071] A lifter in the drying processing section 4 transfers the substrate W to and from the second transport section 3. The substrate W is subjected to drying processing in the drying processing section 4 while being held by the lifter inside the drying processing section 4.

[0072] The lifter of the cleaning processing section 5 transfers the substrate W to and from the second transport section 3. The substrate W is subjected to cleaning processing in the cleaning processing section 5 while being held by the lifter inside the cleaning processing section 5.

[0073] A lifter of the chemical processing unit 6 transfers the substrate W to and from the second transport unit 3. The substrate W is subjected to chemical processing in the chemical processing unit 6 while being held by the lifter inside the chemical processing unit 6.

[0074] The N2 bubbling unit has a function of bubbling a processing liquid (for example, hydrogen peroxide solution in the cleaning processing unit 5, and phosphoric acid solution in the chemical processing unit 6) with nitrogen gas.

[0075] The ultrasonic unit has a function of vibrating a processing liquid (for example, hydrogen peroxide solution in the cleaning processing unit 5, or phosphoric acid solution in the chemical processing unit 6) to generate ultrasonic waves in the liquid.

[0076] In the chemical treatment section 6, the H3PO4 input line is a facility having a function of inputting the phosphoric acid solution into a predetermined tank (hereinafter also referred to as the "chemical tank"). The H3PO4 temperature control unit has a function of preheating the phosphoric acid solution to a high temperature before it is input into the chemical tank.

[0077] 4 is a tree diagram illustrating an example of the configuration employed in the drying processing unit 4. The drying processing unit 4 includes a lifter 401, an IPA unit 402, a vacuum unit 403, an N2 blower 404, an N2 line 405, an N2 sub-valve 406, an N2 main valve 407, and a flow controller 408. The N2 blower 404 has a function of blowing nitrogen gas onto the substrate W. Nitrogen gas is supplied to the N2 blower 404 from the N2 sub-valve 406 via the N2 line 405. The flow rate of the nitrogen gas is controlled by the flow controller 408. Nitrogen gas is supplied to the N2 sub-valve 406 together with or via the N2 main valve 407.

[0078] 5 is a tree diagram illustrating an example of the configuration employed in the cleaning processing unit 5. The cleaning processing unit 5 includes a lifter 501, a TMY ("TMY" stands for "trimethyl-2-hydroxyethylammonium hydroxide") unit 502, an HF unit 503, an H2O2 ("H2O2" stands for hydrogen peroxide) unit 504, a pure water supply line 505, a hot water supply line 506, a shower 507, a resistivity meter 508, and a processing unit thermometer 509. The resistivity meter 508 measures the resistivity of the pure water supplied through the pure water supply line 505, for example.

[0079] 6, 7, and 8 are tree diagrams illustrating configurations employed in the chemical liquid processing unit 6. FIG. 6 illustrates a configuration employed in the chemical liquid processing unit 6A. FIG. 7 illustrates a configuration employed in the chemical liquid processing unit 6B. FIG. 8 illustrates a configuration employed in the chemical liquid processing unit 6C. The chemical liquid processing unit 6A is provided as the chemical liquid processing unit 6 in the substrate processing apparatus FA. The chemical liquid processing unit 6B is provided as the chemical liquid processing unit 6 in the substrate processing apparatus FB. The chemical liquid processing unit 6C is provided as the chemical liquid processing unit 6 in the substrate processing apparatus FC.

[0080] 6, chemical treatment unit 6A includes lifter 601, circulation pump 602, ultrasonic unit 603, H3PO4 unit 604, temperature adjustment unit 605, flow rate controller 606, cooling tank 607, and diluted H3PO4 input line 608.

[0081] The lifter 601 transfers the substrate W to and from the second transfer part 3 and holds the substrate W inside the chemical treatment part 6. The circulation pump 602 is a pump that has the function of re-introducing the chemical liquid (here, phosphoric acid solution) that has overflowed from the chemical treatment part 6 back into the chemical treatment part 6. The ultrasonic unit 603 is a unit that has the function of applying vibrations to the chemical liquid (here, phosphoric acid solution). The H3PO4 unit 604 is a unit that has the function of injecting the phosphoric acid solution into the chemical treatment part 6. The temperature adjustment unit 605 is a unit that has the function of preheating the phosphoric acid solution before it is introduced into the chemical treatment part 6. The flow rate controller 606 has the function of controlling the flow rate of the phosphoric acid solution introduced into the chemical treatment part 6. The cooling tank 607 is a tank that has the function of cooling the phosphoric acid solution before it is discharged from the chemical treatment part 6.

[0082] 7, chemical solution treatment unit 6B includes lifter 601, circulation pump 602, H3PO4 unit 604, temperature adjustment unit 605, flow rate controller 606, cooling tank 607, and diluted H3PO4 introduction line 608. Compared to chemical solution treatment unit 6A, chemical solution treatment unit 6B lacks ultrasonic unit 603.

[0083] 8, the chemical treatment section 6C includes a lifter 601, a circulation pump 602, an H3PO4 unit 604, a temperature adjustment unit 605, a flow rate controller 606, a cooling tank 607, a diluted H3PO4 introduction line 608, and an N2 bubbling unit 61.

[0084] The N2 bubbling unit 61 is a unit that has the function of introducing nitrogen into the chemical solution in the chemical solution tank and causing nitrogen bubbles to collide with the substrate W. Such bubble collisions contribute to improving the performance of the chemical solution processing on the substrate W.

[0085] The N2 bubbling unit 61 has, for example, an N2 bubbler tube 611, an N2 line 612, an N2 sub-valve 613, an N2 main valve 614, and a flow controller 615. The N2 bubbler tube 611 is located in a chemical tank and has a tip (not shown) that is immersed in the chemical liquid when the chemical liquid is introduced into the chemical tank. The functions of the N2 line 612, the N2 sub-valve 613, the N2 main valve 614, and the flow controller 615 are equivalent to the functions of the N2 line 405, the N2 sub-valve 406, the N2 main valve 407, and the flow controller 408, respectively.

[0086] Compared to chemical liquid processing unit 6A, chemical liquid processing unit 6C lacks ultrasonic unit 603 and has an additional N2 bubbling unit 61. Compared to chemical liquid processing unit 6B, chemical liquid processing unit 6C has an additional N2 bubbling unit 61.

[0087] In Fig. 6, the N2 bubbling unit 61 that chemical processing unit 6C has but chemical processing unit 6A does not has is shown by a chain line. In Fig. 7, the N2 bubbling unit 61 that chemical processing unit 6C has but chemical processing unit 6B does not have, and the ultrasonic unit 603 that chemical processing unit 6A has but chemical processing unit 6B does not have are shown by a chain line. In Fig. 8, the ultrasonic unit 603 that chemical processing unit 6A has but chemical processing unit 6C does not have are shown by a chain line.

[0088] <2. Creating a new processing recipe based on an existing processing recipe> The generation of a new processing recipe is explained below using as an example a case where a processing recipe used in a substrate processing apparatus FA equipped with a chemical processing unit 6A and / or a processing recipe used in a substrate processing apparatus FB equipped with a chemical processing unit 6B is adopted as an existing processing recipe, and a processing recipe used in a substrate processing apparatus FC equipped with a chemical processing unit 6C is generated as a new processing recipe.

[0089] For example, in the storage unit 20 of the substrate processing apparatus FC, the processing recipes of the substrate processing apparatuses FA and FB are stored in advance in a folder 20b as existing processing recipes.

[0090] A graphical user interface is used to generate a new process recipe. The graphical user interface used to generate a new process recipe is realized by cooperation of the input unit 8, the output unit 9, and the control unit 10 under the control of the control unit 10, which operates based on a program stored in, for example, the folder 20a. Note that the following description will exemplify a case where the execution of the substrate processing apparatus FC is controlled using the graphical user interface.

[0091] 9 is a diagram showing an example of an operation screen 100 in the substrate processing apparatus FC. The operation screen 100 is displayed on the output unit 9, for example.

[0092] The operation screen 100 displays areas 100a, 100b, 100c, 100d, 100e, 100f, 100g, and 100h (so-called radio buttons on the screen, hereinafter simply referred to as "buttons") in which a predetermined process is executed by clicking (hereinafter simply referred to as "click") using, for example, a mouse as the input unit 8.

[0093] Clicking button 100a displays a processing start window, which will be described later. Clicking button 100b causes the loading unit 1 to load a substrate W into the substrate processing apparatus FC using a carrier C1. Clicking button 100c causes the unloading unit 7 to unload a substrate W from the substrate processing apparatus FC to the outside using a carrier C1. Clicking button 100d causes all carriers C1 to be unloaded from the substrate processing apparatus FC to the outside. Clicking button 100e stops the storage of carriers C1 into the substrate processing apparatus FC from the outside. Clicking button 100f starts a process of changing identification information used to individually identify carriers C1. Clicking button 100g deletes information about carrier C1. Clicking button 100h displays information about the presence or absence of substrates W in carrier C1. This information is obtained, for example, from sensor unit 11m and is stored in control unit 10 and / or memory unit 20.

[0094] Fig. 10 is a diagram illustrating a carrier display window 101. The carrier display window 101 is displayed, for example, in an area surrounded by a frame on the operation screen 100. In the example illustrated in Fig. 10, information about a carrier C1 whose symbol identifying a certain carrier C1 (displayed as "Carrier ID" in the carrier display window 101) is "i" is displayed in the first row of the carrier display window 101 (the row displayed as "1" in the leftmost column in the carrier display window 101). For example, information about multiple carriers C1 is displayed in different rows in the carrier display window 101.

[0095] 11 is a diagram illustrating an example of a process start window 102. The process start window 102 is displayed, for example, in the operation screen 100, with priority over the carrier display window 101. For example, the carrier display window 101 is not displayed in the area where the process start window 102 is displayed. FIG. 11 illustrates an example in which the title bar of the process start window 102 displays the title text "Process Start."

[0096] Buttons 102a, 102b, 102c, 102d, and 102e are displayed in the process start window 102. When the button 102a is clicked, the process start window 102 closes.

[0097] In the example shown in FIG. 11, button 102b is labeled "Browse." Clicking button 102b initiates selection of a processing recipe. For example, clicking button 102b displays another sub-window, which displays one or more existing processing recipes stored in folder 20b in storage unit 20. The operator selects one of the displayed existing processing recipes.

[0098] For example, the file name of the selected existing processing recipe is displayed in display field 102f, or the file name of the existing processing recipe is specified by directly inputting the file name into display field 102f.

[0099] Clicking button 102c selects a symbol specifying carrier C1, for example, by selecting from a pull-down menu. Clicking button 102d starts processing based on the selected processing recipe. However, as will be described later, the processing does not necessarily start immediately, and there are cases where the processing is not executed. Clicking button 102e stops the execution of processing based on the selected processing recipe.

[0100] When the button 102d is clicked, the specified existing process recipe is treated as the selected existing process recipe, and it is confirmed whether the selected existing process recipe is suitable for the substrate processing apparatus FC.

[0101] <2-1. When an item required for a new processing recipe is missing from an existing processing recipe> As described above, the chemical processing unit 6B of the substrate processing apparatus FB does not have the N2 bubbling unit 61 that the chemical processing unit 6C of the substrate processing apparatus FC has. Therefore, it is not appropriate to use the existing processing recipe used in the substrate processing apparatus FB as a new processing recipe to be adopted in the substrate processing apparatus FC.

[0102] When such an existing processing recipe is selected, clicking button 102d displays a warning. Fig. 12 is a diagram showing an example of a sub-window 103 that functions as such a warning. Sub-window 103 has buttons 103a and 103b, and displays a message prompting the user to edit the processing recipe. Fig. 12 shows an example in which the message "Required items have not been set. Please edit the recipe." is used.

[0103] When a new process recipe to be adopted in the substrate processing apparatus FC is generated from an existing process recipe used in the substrate processing apparatus FB, the "necessary items" correspond to items related to the N2 bubbling unit 61. Alternatively, the "necessary items" correspond to items related to one or more of the N2 bubbler pipe 611, N2 line 612, N2 sub valve 613, N2 main valve 614, and flow controller 615 of the N2 bubbling unit 61.

[0104] Clicking button 103a closes sub-window 103. Clicking button 103b displays the recipe editing screen.

[0105] 13 is a diagram showing an example of a sub-window 200 that functions as a recipe editing screen. In the sub-window 200, a first parameter display area 201 and a second parameter display area 202 are displayed.

[0106] The first parameter display area 201 displays patterns of processing performed by the components of the substrate processing apparatus FC. Here, two of the chemical processing operations performed in the chemical processing unit 6C are exemplified. The left column "LifterSpeed" in row 201a indicates that the right column of row 201a displays information about the speed of the lifter 601, for example, a speed fluctuation pattern. The left column "N2 Bubbling" in row 201b indicates that the right column of row 201b displays information about the N2 bubbling unit 61, for example, a nitrogen bubbling pattern. For example, the operator may be able to update the information in the right column for both rows 201a and 201b.

[0107] Because the chemical treatment unit 6B does not have an N2 bubbling unit 61, the existing treatment recipe used therefor does not contain information corresponding to the N2 bubbling unit 61. This lack of information is indicated in Fig. 13 by a diagonal line in the background of row 201b and by the display of "NON" in the right column of row 201b. This lack of information may also be indicated by coloring the background or by decorating the displayed text.

[0108] By inputting a nitrogen bubbling pattern in the right column of row 201b through an operator's operation on sub-window 200, a processing recipe that eliminates the shortage can be obtained.

[0109] The second parameter display area 202 displays various quantities used in the processing executed in the chemical processing unit 6C. Four quantities in the chemical processing unit 6C are displayed here. Two steps in the chemical processing (hereinafter referred to as "chemical processing steps") are also displayed in rows 202a and 202b. For example, the operator can update the information in each column in either row 202a or 202b.

[0110] Row 202x displays the titles for rows 202a and 202b. The leftmost column of row 202x displays "Step," and the columns below it in rows 202a and 202b display the numbers of the respective chemical liquid processing steps. The first chemical liquid processing step is displayed as "Step 1" in the leftmost column of row 202a, and the second chemical liquid processing step is displayed as "Step 2" in the leftmost column of row 202b.

[0111] The second column from the left of row 202x displays "Time," and the columns below it, rows 202a and 202b, display the time (e.g., number of seconds) for which each chemical liquid treatment step is to be performed. In Fig. 13, the first chemical liquid treatment step is performed for 900 seconds, and the second step is performed for 100 seconds.

[0112] The third column from the left of row 202x displays "Item A," and the columns below it, rows 202a and 202b, display patterns indicating that item A is executed in each chemical liquid processing step. For example, if item A corresponds to whether or not the circulation pump 602 is stopped, "Item A" is displayed as "Pump stop." For example, when a value of 1 is assigned as the amount for "Pump stop," this means that the circulation pump 602 is operating, and when a value of 2 is assigned, this means that the circulation pump 602 is stopped. In FIG. 13, if item A corresponds to whether or not the circulation pump 602 is stopped, this example illustrates a case in which the circulation pump 602 is operating in the first chemical liquid processing step and is stopped in the second chemical liquid processing step.

[0113] The fourth column from the left in row 202x displays "Item B," and the columns below it, rows 202a and 202b, display the amounts used when item B is executed in each chemical treatment step. For example, if item B corresponds to the amount of phosphoric acid solution added by the H3PO4 unit 604, "Item B" is labeled "Phosphoric Acid Addition Amount." For example, "Phosphoric Acid Addition Amount" indicates the volume of phosphoric acid solution added in liters. In FIG. 13, if item B corresponds to the amount of phosphoric acid solution added by the H3PO4 unit 604, the volume of the phosphoric acid solution added in the first chemical treatment step is 100 liters, and the volume of the phosphoric acid solution added in the second chemical treatment step is 100 liters.

[0114] The fifth column from the left (rightmost column) of row 202x displays "Item C," and the columns below it, rows 202a and 202b, display the amounts used when item C is executed in each chemical processing step. For example, if item C corresponds to the flow rate of nitrogen used by N2 bubbling unit 61, "Item C" is labeled as "N2 bubbling flow rate." For example, "N2 bubbling flow rate" indicates the flow rate of nitrogen in liters.

[0115] When a processing recipe used in the substrate processing apparatus FB is selected as the existing processing recipe, the existing processing recipe does not contain information about the N2 bubbling unit 61. This lack of information is indicated in Fig. 13 by a diagonal line in the background of the rightmost columns of rows 202x, 202a, and 202b and by the display of "NON" in the rightmost columns of rows 202a and 202b. This lack of information may also be indicated by coloring the background or by decorating the displayed text.

[0116] A recipe that eliminates the shortage can be obtained by inputting the nitrogen flow rate into the rightmost column of each of rows 202a and 202b through an operator's operation on sub-window 200. In the case where item C in Fig. 13 corresponds to the nitrogen flow rate from N2 bubbling unit 61, for example, an operation is performed in which 100 liters is input as the nitrogen flow rate in the first chemical liquid processing step into the rightmost column of row 202a, and 200 liters is input as the nitrogen flow rate in the second chemical liquid processing step into the rightmost column of row 202b.

[0117] Not only can the deficiencies corresponding to the above-described rows 201b, 202a, and 202b be resolved, but also various pieces of information in items that are not lacking can be updated by an operator's operation on the sub-window 200.

[0118] In this way, the existing process recipe used in the substrate processing apparatus FB is modified to eliminate all missing items, resulting in a new process recipe to be used in the substrate processing apparatus FC (hereinafter also referred to as a "missing item resolution recipe"). The missing item resolution recipe is stored in folder 20b by operating a button (not shown) (which may be provided in sub-window 200).

[0119] <2-2. When an existing processing recipe has an item that is not required for the new processing recipe> In the selection of a processing recipe, a case where an existing processing recipe employed in the substrate processing apparatus FA is selected will be described below.

[0120] Like chemical processing unit 6B, chemical processing unit 6A included in substrate processing apparatus FA does not include N2 bubbling unit 61. Therefore, in this case as well, clicking button 102d displays a warning as exemplified in sub-window 103 shown in Fig. 12 and operates the recipe editing screen as exemplified in sub-window 200 shown in Fig. 13, thereby generating a shortage resolution recipe.

[0121] However, chemical processing unit 6A includes ultrasonic unit 603, which chemical processing unit 6C does not include. The shortage resolution recipe generated as described above also includes information about ultrasonic unit 603, similar to the existing processing recipe.

[0122] The following describes the case where a shortage resolution recipe created from an existing processing recipe used in the substrate processing apparatus FA is selected in the selection of a processing recipe. Since the shortage resolution recipe has already resolved the above-mentioned shortage, the warning illustrated in sub-window 103 is not displayed even when button 102d is clicked. When button 102d is clicked, a warning message is displayed instead of the warning. FIG. 14 is a diagram illustrating a sub-window 104 that functions as such a warning message. Sub-window 104 has buttons 104a, 104b, and 104c, and displays a message indicating the warning. FIG. 14 illustrates a case where the message "This recipe contains unnecessary setting items" is used as the warning message.

[0123] When a new processing recipe to be adopted in the substrate processing apparatus FC is generated from a shortage resolution recipe generated from an existing processing recipe used in the substrate processing apparatus FA, the “unnecessary setting items” correspond to the items related to the ultrasonic unit 603.

[0124] Clicking button 104a closes sub-window 104. Clicking button 104b displays the recipe editing screen.

[0125] 15 is a diagram showing an example of a sub-window 200 that is displayed when button 104b is clicked. In this case, sub-window 200 also displays a first parameter display area 201 and a second parameter display area 202, similar to sub-window 200 (see FIG. 13) that is displayed when button 103b is clicked. Sub-window 200 also displays a surplus area 203.

[0126] In addition to rows 201a and 201b that display the components of the substrate processing apparatus FC, row 201c is also displayed in the first parameter display area 201. Row 201c displays information about components that the substrate processing apparatus FA does not have but that the substrate processing apparatus FC does have. The left column of row 201c, "DSM Pattern," indicates that the right column of row 201c displays information about the ultrasonic unit 603, for example, a pattern for applying ultrasonic waves to a chemical solution.

[0127] The fact that the information displayed in row 201c in the substrate processing apparatus FC is redundant is indicated by a sandy background to row 201c. Since such information is redundant, it may be deleted from the selected existing processing recipe or the selected shortage resolution recipe. For example, by clicking button 200p, the redundant information is deleted from the selected existing processing recipe or the selected shortage resolution recipe. Following this deletion, row 201c may be erased from first parameter display area 201.

[0128] The surplus area 203 displays surplus item D. In FIG. 15, item D is identified as "Item D" in column 203x. Column 203a indicates the amount used when item D is executed in the first chemical liquid processing step, and column 203b indicates the amount used when item D is executed in the second chemical liquid processing step. For example, if item D corresponds to the power input to the ultrasonic unit 603, "Item D" is marked as "Wattage." For example, the amount of "Wattage" indicates a power value in watts. In this case, FIG. 15 illustrates an example in which the power input in the first chemical liquid processing step is 20 watts, and the power input in the second chemical liquid processing step is 30 watts.

[0129] 15, the fact that the surplus area 203 displays surplus items is exemplified by the surplus area 203 being displayed apart from the second parameter display area 202 and by a sandy background in the surplus area 203. The fact that the surplus area 203 displays surplus items may be visualized by only one of the separate display and the sandy background. The surplus may be indicated by coloring the background or by decorating the displayed characters.

[0130] Such redundant items may be deleted from the selected existing process recipe or the selected shortage resolution recipe. For example, by clicking button 200q, the redundant items are deleted from the selected existing process recipe or the selected shortage resolution recipe. Following this deletion, the redundant items area 203 may be erased from sub-window 200.

[0131] If there are multiple redundant items, for example, multiple columns 203x, 203a, and 203b are provided, each forming a column.

[0132] In addition to the deletion of the surplus corresponding to the row 201c and the surplus area 203 described above, various information in the items that are not deleted may be updated by the operator's operation on the sub-window 200.

[0133] In this way, a new process recipe to be used in the substrate processing apparatus FC is obtained from the selected existing process recipe or shortage resolution recipe. The obtained new process recipe is stored in folder 20b by operating a button (not shown) (which may be provided in sub-window 200).

[0134] Since redundant items do not interfere with the operation of the chemical processing unit 6C, and therefore the substrate processing apparatus FC, there is no need to delete the redundant items. Therefore, substrate processing may be performed immediately after clicking button 104b. Even if a new processing recipe is selected and then button 102d (FIG. 11) is clicked, the substrate processing apparatus FC performs substrate processing based on the processing recipe.

[0135] <2-3. Example of process groups for generating new process recipes> In this section, an operation for generating a new process recipe from an existing process recipe will be described using a flowchart.

[0136] 16 is a flowchart illustrating a group of steps for generating a new process recipe. In FIG. 16, this group of steps is labeled "Generate new process recipe." This group of steps is realized by, for example, the control unit 10, the input unit 8, the output unit 9, and the storage unit 20.

[0137] Steps S101 and S102 are executed when the operator selects an existing processing recipe. The control unit 10 references the folder 20b in the storage unit 20 and causes the output unit 9 to display a screen for loading an existing processing recipe. This screen corresponds to the processing start window 102 (see FIG. 11) in the above example, and in FIG. 16, this screen is labeled "recipe loading screen" in step S101.

[0138] The operator refers to the recipe loading screen and selects an existing processing recipe. Following the example above, the operator clicks button 102b in processing start window 102 and specifies the existing processing recipe from an additionally displayed sub-window (not shown, but described later with reference to FIG. 19). Alternatively, the operator specifies the existing processing recipe by inputting the file name of the existing processing recipe into display field 102f. These clicks and file name input are performed by the operator using input unit 8, for example. The specified existing processing recipe is treated as the selected existing processing recipe by clicking button 102d.

[0139] In step S102, it is determined whether an existing processing recipe has been selected. This determination is made by the control unit 10, for example.

[0140] Step S102 is repeatedly executed until the result of the determination in step S102 becomes positive, that is, until an existing processing recipe is selected. For example, as illustrated in FIG.

[0141] If the result of the determination in step S102 is affirmative, step S103 is executed, in which the items of the selected existing process recipe are compared with the items of the new process recipe.

[0142] In step S103, it is determined whether the items of the selected existing process recipe are insufficient or surplus compared to the items of the new process recipe. If there are items common to the selected existing process recipe and the new process recipe (hereinafter also referred to as "common items"), for example, "parameter reuse" may be performed in step S103. "Parameter reuse" here refers to the reuse of parameters of the existing process recipe for the common items in the new process recipe. Examples of parameter reuse will be described later.

[0143] In step S104, it is determined whether there are any missing items. A "missing item" here refers to an item that is required in the new process recipe but does not exist in the existing process recipe. The missing item can be referred to as a "necessary item" displayed in sub-window 103 (see FIG. 12). In the above example, the nitrogen bubbling pattern and item C (e.g., the nitrogen flow rate used in nitrogen bubbling) correspond to the missing items.

[0144] If it is determined in step S104 that there is a missing item, steps S105, S106, S107, and S108 are executed, whereas if it is determined in step S104 that there is no missing item, step S109 is executed.

[0145] In steps S105, S106, S107, and S108, parameters for the missing items are filled in. Following the example above, if there are missing items, subwindow 103 (see FIG. 12) is displayed. This display is executed in step S105, which is labeled "Display indicating the existence of missing items."

[0146] The operator recognizes this display and fills in the missing parameters on the recipe editing screen. This filling can be considered editing of the existing processing recipe. Continuing with the above example, the operator clicks button 103b in subwindow 103, and subwindow 200 (see FIG. 13) is displayed. This display is executed in step S106, which is labeled "Display Recipe Editing Screen."

[0147] The operator inputs parameters for the missing items by operating the input unit 8. In the above example, in the first parameter display area 201, the nitrogen bubbling pattern is input in the right column of row 201b, and the nitrogen flow rate is input in the rightmost column of each of rows 202a and 202b.

[0148] The edited existing processing recipe is stored in folder 20b under the control of control unit 10 via input unit 8 by an operator. Whether or not such storage has been performed is determined in step S107. The operator's operation for storage marks the completion of editing of the existing processing recipe, and is one way of making the determination result of "Is recipe editing completed?" in step S107 affirmative.

[0149] Step S107 is executed until the determination result of step S107 becomes positive. As illustrated in FIG. 16, step S106 may be executed again. If the determination result of step S107 becomes positive, step S108 is executed. Here, it is determined whether or not any missing items remain in the edited existing processing recipe. If the determination result is positive, steps S105, S106, and S107 are further executed. The operator's operation for storage in this case is the completion of further editing of the edited existing processing recipe, and is another way of making the determination result of "Is recipe editing completed?" in step S107 positive.

[0150] If the determination result in step S108 is negative, the edited existing processing recipe is a shortage resolution recipe.If the determination result in step S108 is positive, steps S109, S110, S111, S112, and S113 are executed.

[0151] In step S109, it is determined whether there are any surplus items. The term "surplus items" here refers to items that exist in the existing process recipe but do not exist in the new process recipe. In the above example, information related to the ultrasonic unit 603, such as the pattern for applying ultrasonic waves to the chemical solution, and item D (e.g., the power input to the ultrasonic unit 603) are surplus items.

[0152] If the determination result in step S109 is positive (if there are surplus items), steps S110, S111, S112, and S113 are executed. If the determination result in step S109 is negative (if there are no surplus items), step S114 is executed. In step S114, the edited processing recipe is stored.

[0153] In steps S110, S111, S112, and S113, excess items are removed. Continuing with the example above, if excess items exist, subwindow 104 (see FIG. 14) is displayed. This display is performed in step S110, which is labeled "Display indicating the presence of excess items."

[0154] The operator recognizes this display and deletes the redundant items on the recipe editing screen. This deletion can be considered an edit to the existing processing recipe. Continuing with the example above, the operator clicks button 104b in subwindow 103, and subwindow 200 (see FIG. 15) is displayed. This display is executed in step S111, which is labeled "Display Recipe Editing Screen."

[0155] The operator deletes redundant items by operating input unit 8. In the example described above, by clicking button 200p in sub-window 200, information about ultrasonic unit 603, for example, a pattern for applying ultrasonic waves to a chemical solution, is deleted from the existing processing recipe being edited, and row 201c disappears from first parameter display area 201. In the example described above, by clicking button 200q in sub-window 200, item D (for example, the power input to ultrasonic unit 603) is deleted from the existing processing recipe being edited, and redundant area 203 disappears from sub-window 200.

[0156] The edited existing processing recipe is stored in folder 20b by an operator via input unit 8 under the control of control unit 10. Whether or not such storage has been performed is determined in step S112. The operator's operation for storage marks the completion of editing of the existing processing recipe.

[0157] Step S112 is executed until the determination result of step S112 becomes positive. As illustrated in FIG. 16, step S111 may be executed again. If the determination result of step S112 becomes positive, step S113 is executed. In step S113, it is determined whether or not any surplus items remain in the edited existing processing recipe. If the determination result is positive, steps S110, S111, and S112 are further executed.

[0158] If the determination result in step S113 is negative, the edited existing process recipe can be adopted as the new process recipe. If the determination result in step S113 is negative, the generation of the new process recipe ends.

[0159] Even if an existing process recipe having surplus items is used, the operation of the substrate processing apparatus FC will not be affected. Therefore, if the determination result in step S104 is negative or if the determination result in step S108 is negative, the shortage resolution recipe may be used as a new process recipe, and the operation according to the flowchart may end as indicated by the dashed arrow in Figure 16. In accordance with the above example, a new process recipe is obtained by clicking button 104b.

[0160] After the flowchart is completed, the substrate processing apparatus FC performs substrate processing based on the new processing recipe.

[0161] <2-4. Comparing the items in two processing recipes> This section describes an example of the details of step S103 shown in Fig. 16. Fig. 17 is a flowchart illustrating the details of step S103. Unlike the labeling of step S103 in Fig. 16, Fig. 17 illustrates a flowchart simply labeled "Comparison Process."

[0162] Step S103 includes steps S103a and S103b. In step S103a, common items are detected. In step S103b, parameters are reused.

[0163] When steps S101 and S102 are executed and an existing process recipe is selected by a corresponding operation from the operator, items in the existing process recipe are compared with items required for the new process recipe in step S103a, and items common to both are detected.

[0164] In line with the above example, items common to both are illustrated as row 201a in the first parameter display area 201 of the sub-window 200 illustrated in FIG. 13. Specifically, information about the speed of the lifter 601, such as the speed fluctuation pattern ("LifterSpeed"), is an example of a common item. For example, in the second parameter display area 202 of the sub-window 200, common items are illustrated in a column labeled "Time," a column labeled "Item A," and a column labeled "Item B." Specifically, common items include the time for which the chemical treatment step is performed, the operation of the circulating pump 602, and the amount of phosphoric acid solution supplied by the H3PO4 unit 604.

[0165] For example, common items are illustrated as rows 201a and 201b in the first parameter display area 201 of the sub-window 200 illustrated in Fig. 15. Specifically, information about the speed of the lifter 601, such as the speed fluctuation pattern ("LifterSpeed"), and information about the N2 bubbling unit 61, such as the nitrogen bubbling pattern ("N2 Bubbling"), are examples of common items. For example, in the second parameter display area 202 of the sub-window 200, common items are illustrated in a column labeled "Time," a column labeled "Item A," a column labeled "Item B," and a column labeled "Item C." Specifically, common items include the time for which the chemical solution treatment step is performed, the operation of the circulating pump 602, the amount of phosphoric acid solution introduced by the H3PO4 unit 604, and the flow rate of nitrogen used by the N2 bubbling unit 61.

[0166] After the process of step S103a is completed, step S103b is executed, in which the parameters of the existing process recipe for the common item are adopted as parameters of the new process recipe for the common item.

[0167] Following the above example, the sub-window 200 illustrated in Fig. 13 will be described below. In the first parameter display area 201, information about the speed of the lifter 601, for example, the value "100" which is a parameter in the existing process recipe for the speed fluctuation pattern ("LifterSpeed"), is adopted as the value of the speed fluctuation pattern ("LifterSpeed") in the new process recipe. The value of the parameter thus adopted is displayed in the sub-window 200. The same applies to the common items "LifterSpeed" and "N2 Bubbling" in the first parameter display area 201 in the sub-window 200 illustrated in Fig. 15.

[0168] For example, in the second parameter display area 202 of the sub-window 200 illustrated in FIG. 13 , a value of “900” in a field labeled “Time,” which was a parameter relating to the time at which a first chemical processing step is performed in the existing process recipe, is adopted as the value of the parameter relating to the time at which the first chemical processing step is performed in the new process recipe. For example, a value of “100” in a parameter relating to the time at which a second chemical processing step is performed in the existing process recipe is adopted as the value of the parameter relating to the time at which the second chemical processing step is performed in the new process recipe. The values ​​of the parameters adopted in this manner are displayed in the sub-window 200. The same applies to the common items “Item A,” “Item B,” and “Item C” in the second parameter display area 202 illustrated in FIG. 15 .

[0169] When the process of step S103b is completed, step S103 of the comparison process is completed, and step S104 (see FIG. 16) is executed.

[0170] <2-5. Variations of comparison processing> FIG. 18 is a flowchart illustrating a group of steps that step S103 may include. This group of steps facilitates the operator's selection of an existing processing recipe. This group of steps is exemplified as steps S103x and S103y. FIG. 18 can be seen as a variation of the comparison process illustrated by the flowchart in FIG. 17.

[0171] After the process of step S103a is completed, steps S103x and S103y are executed before step S103b is executed. Step S103x is executed before step S103y, and displays the number of items common to the existing process recipe and the new process recipe.

[0172] FIG. 19 is a diagram illustrating an example of a sub-window 300 displayed on the output unit 9 by executing step S103x.

[0173] Sub-window 300 shows an example in which multiple existing process recipes are displayed, each on a different line. In Fig. 19, five existing process recipes with file names "#1," "#2," "#3," "#4," and "#5" are displayed in the column for recipe name (labeled "Recipe Name" in Fig. 19). Selection of an existing process recipe is realized by an operator's operation using sub-window 300.

[0174] 19, the subwindow 300 displays common items, surplus items, missing items, and the item match rate. The common items column displays the number of common items, the surplus items column displays the number of surplus items, and the missing items column displays the number of missing items. The item match rate is an index showing the number of common items, and is expressed as a percentage of the number of items in the new process recipe, for example.

[0175] The operator can select one existing process recipe from the multiple existing process recipes displayed in sub-window 300. Step S103y is a step for determining whether such a selection has been made. Step S103y is repeatedly executed until the determination in step S103y becomes positive. For example, as illustrated in FIG. 18, if the determination in step S103y is negative, step S103x may be executed again.

[0176] If the determination in step S103y is affirmative, the process of step S103b is executed.

[0177] If step S103 includes steps S103x and S103y, step S103y performs processing similar to step S102, and therefore step S102 is omitted. For example, by executing step S101, specifically by clicking button 102b on process start window 102, sub-window 300 is displayed. For example, by the operator selecting one of the existing process recipes in sub-window 300 and clicking button 301 labeled "OK," the selected existing process recipe is treated as the target for recipe editing.

[0178] Alternatively, the calculation unit 10x may select one existing processing recipe from a plurality of existing processing recipes, for example, based on the item match rate, rather than through an operation by an operator.

[0179] Sub-window 300 may be displayed by other operations. Fig. 20 is a diagram showing an example of sub-window 400 that functions as a screen for inputting a processing recipe. For example, the recipe input screen introduced in Patent Document 3 can be used as this screen.

[0180] For example, when inputting a process recipe using sub-window 400, in order to use an existing process recipe for a new process recipe, the user may click on button 410 labeled "Open" to display sub-window 300.

[0181] <2-6. Substrate Processing Equipment System> 21 is a block diagram illustrating the configuration of a substrate processing apparatus system FX. The substrate processing apparatus system FX includes a substrate processing apparatus FC and a recipe creation unit G. The substrate processing apparatus FC and the recipe creation unit G are communicatively connected via a bus 510.

[0182] The configuration of the substrate processing apparatus FC is similar to that shown in Fig. 2. However, to avoid complexity in the illustration, the internal configuration of the control unit 10 is omitted. In addition, the configuration of the substrate processing apparatus FC is illustrated as being communicably connected to one another via a bus 510.

[0183] The recipe creation unit G has, for example, a calculation unit 81 and a memory 91. The calculation unit 81 is implemented, for example, by an electric circuit exemplified by at least one CPU. The memory 91 is implemented, for example, by an electric circuit exemplified by a RAM for temporarily storing information. Various pieces of information temporarily obtained by various calculations in the calculation unit 81 are stored in the memory 91 as appropriate.

[0184] In the substrate processing apparatus system FX, among the processes for generating a new processing recipe from an existing processing recipe as described above, the process that was previously performed by the control unit 10 of the substrate processing apparatus FC is now performed by the recipe generation unit G.

[0185] For example, in the flowchart shown in FIG. 16, the function of the control unit 10 referencing the folder 20b from the memory unit 20 and displaying a screen for loading an existing processing recipe on the output unit 9 in step S101, and the function of determining whether an existing processing recipe has been selected in step S102 are performed by the recipe generation unit G.

[0186] <3. Other Descriptions of the Present Disclosure> In the above example, a technique for generating a new process recipe, which is a process recipe to be employed in the substrate processing apparatus FC, by utilizing an existing process recipe, which is a process recipe to be employed in the substrate processing apparatus FA and / or the substrate processing apparatus FB, has been described. Hereinafter, the present disclosure will be described in a more organized manner.

[0187] <3-1. Explanation of the method and apparatus for generating a processing recipe> In an existing process recipe, multiple parameters are set individually for multiple items. The multiple items here correspond to multiple processes individually. The parameters set for a certain item define the content of the process corresponding to that item.

[0188] For example, the multiple items in the substrate processing apparatus FA include the speed fluctuation pattern ("LifterSpeed" in FIG. 15), the pattern of applying ultrasonic waves to the chemical solution ("DSM Pattern" in FIG. 15), the time for which the chemical solution processing step is performed ("Time" in FIG. 15), the operation of the circulation pump 602 ("Item A" in FIG. 15), the amount of phosphoric acid solution supplied by the H3PO4 unit 604 ("Item B" in FIG. 15), and the power supplied to the ultrasonic unit 603 ("Item D" in FIG. 15).

[0189] The item "speed fluctuation pattern" corresponds to the process of lifting and lowering the substrate W by the lifter 601, and this process is the target to be executed by the substrate processing apparatus FA. A parameter value "100" is set for this item.

[0190] The item "pattern of applying ultrasonic waves to chemical liquid" corresponds to the process in which the ultrasonic unit 603 applies ultrasonic waves to the chemical liquid for processing, and this process is to be executed by the substrate processing apparatus FA. A parameter value "300" is set for this item.

[0191] The item "time for which chemical liquid processing step is performed" corresponds to the process "chemical liquid processing," which is the target of execution by the substrate processing apparatus FA. A parameter value of "900" (this is the value for the first chemical liquid processing step) or a value of "100" (this is the value for the second chemical liquid processing step) is set for this item.

[0192] The item "operation of circulation pump 602" corresponds to the process of operating circulation pump 602, and this process is the target to be executed by substrate processing apparatus FA. A value of "1" (this is the value for the first chemical liquid processing step) or a value of "2" (this is the value for the second chemical liquid processing step) is set for this item.

[0193] The item "amount of phosphoric acid solution supplied by H3PO4 unit 604" corresponds to the process of supplying phosphoric acid solution to the chemical liquid tank, and this process is the target to be executed by the substrate processing apparatus FA. A parameter value of "100" (which is adopted for both the first chemical liquid processing step and the second chemical liquid processing step) is set for this item.

[0194] The item "power input to ultrasonic unit 603" corresponds to the process in which ultrasonic unit 603 applies ultrasonic waves to the processing chemical, and this process is the target to be executed by substrate processing apparatus FA. For this item, a parameter value "20" (this is the value for the first chemical processing step) or a value "30" (this is the value for the second chemical processing step) is set.

[0195] For example, the multiple items in the substrate processing apparatus FB include the speed fluctuation pattern ("LifterSpeed" in FIG. 13), the time for which the chemical processing step is performed ("Time" in FIG. 13), the operation of the circulating pump 602 ("Item A" in FIG. 13), and the amount of phosphoric acid solution supplied by the H3PO4 unit 604 ("Item B" in FIG. 13). The processes corresponding to each of these items are the same as those described above for the substrate processing apparatus FA, except that all of these processes are performed by the substrate processing apparatus FB. The parameters set for each of these items are the same as those described above for the substrate processing apparatus FA.

[0196] In a new process recipe, multiple parameters are set individually for multiple items. The multiple items here correspond to multiple processes individually. The parameters set for a certain item define the content of the process corresponding to that item.

[0197] The multiple items in the substrate processing apparatus FC include the speed fluctuation pattern ("LifterSpeed" in Figures 13 and 15), the nitrogen bubbling pattern ("N2 Bubbling" in Figures 13 and 15), the time during which the chemical processing step is performed ("Time" in Figures 13 and 15), the operation of the circulation pump 602 ("Item A" in Figures 13 and 15), the amount of phosphoric acid solution input by the H3PO4 unit 604 ("Item B" in Figures 13 and 15), and the flow rate of nitrogen used by the N2 bubbling unit 61 ("Item C" in Figures 13 and 15).

[0198] The item "speed fluctuation pattern" corresponds to the process of raising and lowering the substrate W by the lifter 601, and this process is to be executed by the substrate processing apparatus FC. The items "nitrogen bubbling pattern" and "nitrogen flow rate used by the N2 bubbling unit 61" both correspond to the process of nitrogen bubbling by the N2 bubbling unit 61, and this process is to be executed by the substrate processing apparatus FC. The item "time for which the chemical liquid processing step is executed" corresponds to the process of chemical liquid processing, and this process is to be executed by the substrate processing apparatus FC. The item "operation of the circulation pump 602" corresponds to the process of operation of the circulation pump 602, and this process is to be executed by the substrate processing apparatus FC. The item "amount of phosphoric acid solution supplied by the H3PO4 unit 604" corresponds to the process of supplying phosphoric acid solution to the chemical liquid tank, and this process is to be executed by the substrate processing apparatus FC.

[0199] To generate a new process recipe, one existing process recipe is input, for example, from the input unit 8 (hereinafter, this step is tentatively referred to as the "first step"). The first step is realized by, for example, executing S101 and S102 (see FIG. 16) and performing an operation by an operator.

[0200] When an item in an existing process recipe is common to an item in a new process recipe (such an item is also referred to as a "common item" in the above description), the parameter already set for that common item in the existing process recipe is adopted as the parameter to be set for that common item in the new process recipe (hereinafter, this step is tentatively referred to as a "second step"). The second step is realized, for example, by executing S103 (see FIG. 16), S103a, and S103b (see FIG. 17). The second step is executed, for example, by calculation unit 10x using the existing process recipe stored in folder 20b.

[0201] The parameters that have already been set for the common items in the existing processing recipe are adopted as the parameters to be set for the common items in the new processing recipe, and are displayed corresponding to, for example, "LifterSpeed," "Time," "Item A," and "Item B" in Figure 13.

[0202] The first and second steps eliminate the need for an operator to set parameters for common items in new process recipes, and facilitate the creation of new process recipes using existing process recipes.

[0203] In the first step, one existing process recipe to be edited may be selected from multiple existing process recipes. In the above example, as shown in Fig. 19, five existing process recipes with file names "#1," "#2," "#3," "#4," and "#5" are displayed in sub-window 300, and one existing process recipe is selected from these. This selection is achieved by the display of sub-window 300 by output unit 9 (hereinafter, this step is tentatively referred to as the "third step") and the operator's specification of an existing process recipe.

[0204] In the third step, quantitative information on the common items, such as the number and the item match rate, is displayed, and the third step is performed before the first step, which helps the operator obtain information to decide on the selection of an existing processing recipe. Alternatively, as described above, the existing processing recipe may be designated by the calculation unit 10x instead of by the operator.

[0205] After the second step is performed, a message indicating that parameters need to be set for the missing items may be displayed. Such a message is displayed in step S105 by, for example, the output unit 9. Such a message is illustrated as subwindow 103 in FIG. 12.

[0206] A missing item can be said to be any item in the new process recipe that is not common to any item in the existing process recipes.

[0207] In the above example, among the items of the new processing recipe, the nitrogen bubbling pattern ("N2 Bubbling" in FIG. 13) and the nitrogen flow rate used by the N2 bubbling unit 61 ("Item C" in FIGS. 13 and 15) are items that are not common to any of the items of the existing processing recipes, and thus correspond to missing items.

[0208] Displaying the need to set parameters for missing items helps remind the operator of the processes required for creating a new process recipe.

[0209] After the second step is performed, the presence of surplus items may be displayed. Such display may be performed in step S110 by, for example, the output unit 9. Such display is illustrated in FIG. 14 as sub-window 104.

[0210] A redundant item can be said to be any item in an existing process recipe that is not common to any item in a new process recipe.

[0211] In the above example, among the items of the existing processing recipe, the pattern for applying ultrasonic waves to the chemical solution ("DSM Pattern" in FIG. 15) and the power input to the ultrasonic unit 603 ("Item D" in FIG. 15) are items that are not common to any of the items of the new processing recipe, and therefore correspond to surplus items.

[0212] The display of the existence of redundant items helps the operator to delete unnecessary items in the creation of a new process recipe by clicking buttons 200p and 200q, for example.

[0213] From the above description, the substrate processing apparatus FC can also be described as an apparatus for creating a new process recipe, and the substrate processing apparatus FC can also be described as being used to perform a method for creating a new process recipe.

[0214] <3-2. Explanation of the processing equipment system> The substrate processing apparatus system FX can be described as follows: The substrate processing apparatus system FX includes a recipe creation unit G and a substrate processing apparatus FC.

[0215] The recipe creation unit G uses an existing process recipe that is a process recipe that is employed in the substrate processing apparatus FA and / or the substrate processing apparatus FB to create a new process recipe that is a process recipe that is employed in the substrate processing apparatus FC.

[0216] In an existing process recipe, multiple parameters have already been set individually for multiple items, and the multiple items correspond to multiple processes individually. The multiple processes referred to here are the targets of execution by the substrate processing apparatus FA and / or substrate processing apparatus FB for which the existing process recipe has been adopted. Examples of parameters, items, and processes for the substrate processing apparatus FA and / or substrate processing apparatus FB have already been described in <3-1. Description of Method and Apparatus for Generating a Process Recipe>.

[0217] In a new process recipe, multiple parameters are set individually for multiple items, and the multiple items correspond to multiple processes individually. The multiple processes referred to here are the processes to be executed by the substrate processing apparatus FC when the new process recipe is adopted. Examples of parameters, items, and processes for the substrate processing apparatus FC have already been described in <3-1. Description of the method and apparatus for generating a process recipe>.

[0218] The parameters set for each item define the content of the process corresponding to that item.

[0219] When an item in an existing process recipe is common to an item in a new process recipe (such an item is also referred to as a "common item" in the above description), the recipe creation unit G adopts the parameter already set for that common item in the existing process recipe as the parameter to be set for that common item in the new process recipe. Such adoption corresponds to the second step in the above description. In the substrate processing apparatus system FX, such adoption is performed by the calculation unit 81 of the recipe creation unit G using the existing process recipe stored in folder 20b.

[0220] In the substrate processing apparatus system FX, the process of generating a new process recipe using an existing process recipe is performed by the recipe creation unit G, not the substrate processing apparatus FC. The substrate processing apparatus system FX can be configured by adding the recipe creation unit G to the substrate processing apparatus FC, and a new process recipe can be generated. After the new process recipe is stored in the folder 20b in the substrate processing apparatus FC, the recipe creation unit G can be removed from the substrate processing apparatus system FX, resulting in a substrate processing apparatus FC that does not perform the process of generating a new process recipe.

[0221] <3-3. How to display the processing recipe> In view of step S103 (see FIGS. 17 and 18), the method for displaying a processing recipe can be described as follows.

[0222] In an existing process recipe employed in the substrate processing apparatus FA and / or the substrate processing apparatus FB, multiple parameters have already been set individually for multiple items. The multiple items here correspond individually to multiple processes. The parameters set for an item define the content of the process corresponding to that item. All of the multiple processes are to be performed by the substrate processing apparatus FA and / or the substrate processing apparatus FB for which the existing process recipe is employed. Examples of parameters, items, and processes for the substrate processing apparatus FA and / or the substrate processing apparatus FB have already been described in <3-1. Description of the method and apparatus for generating a process recipe>.

[0223] In a new process recipe employed in the substrate processing apparatus FC, multiple parameters are set individually for multiple items. The multiple parameters here respectively define the contents of multiple processes. The multiple items correspond individually to multiple processes. All of the multiple processes are to be performed by the substrate processing apparatus FC. Examples of parameters, items, and processes for the substrate processing apparatus FC have also been described in <3-1. Description of the method and apparatus for generating a process recipe>.

[0224] Step S103a can be said to be a first step of detecting items that are common between a plurality of items in the existing process recipe and a plurality of items in the new process recipe as common items.

[0225] Step S103x can be said to be a second step of displaying quantitative information about common items, such as the number of common items and the item match rate (see FIG. 19).

[0226] The method including the first and second steps can be considered a display method for displaying a process recipe. The quantitative information of common items provided by this display method serves as a criterion for an operator to select an existing process recipe. Such a criterion contributes to the easy creation of a new process recipe using an existing process recipe.

[0227] In the first step, all of the existing process recipes are compared with one new process recipe. Following the example described above, the existing process recipes (file names "#1," "#2," "#3," "#4," and "#5") are compared with the new process recipe in sub-window 300 shown in FIG. 19 .

[0228] In the second step, quantitative information about common items is displayed for each of the multiple existing process recipes. Following the example described above, the number of common items is displayed in the "Common Items" column for each of the multiple existing process recipes (file names "#1," "#2," "#3," "#4," and "#5") in the sub-window 300 shown in FIG. 19. In the sub-window 300, an index indicating the number of common items for the multiple existing process recipes is displayed in the "Item Match Rate" column as quantitative information about the common items. This index is, for example, the percentage of the number of common items relative to the number of items in the new process recipe.

[0229] The first and second steps make it easy to select an existing process recipe from a plurality of existing process recipes, and thus contribute to easily generating a new process recipe using an existing process recipe.

[0230] The processing explained in this organized explanation can be applied to processing other than processing on substrates W. The above organized explanation is valid even when the substrate processing apparatuses FA, FB, and FC are treated as processing apparatuses that perform processing on processing targets other than substrates W.

[0231] It should be noted that all or part of the components constituting each of the above-described embodiments and various modified examples can be combined as appropriate within a range that does not cause contradictions. [Explanation of symbols]

[0232] 6, 6A, 6B, 6C Chemical treatment section 8 Input section 9 Output section 10 Control Unit 10x,81 arithmetic unit 10y,91 memory 20a, 20b folder 61 N2 bubbling unit 100 operation screen 101 Carrier Display Window 102 Processing Start Window 103, 104, 200, 300, 400 subwindows 601 Lifter 602 Circulation Pump 603 Ultrasonic Unit 604 H3PO4 units 606 Flow Controller A,B,C,D items F, FA, FB, FC substrate processing equipment FX Substrate Processing System G Recipe Generation Unit S101, S102, S103, S103a, S103b, S103x, S103y, S104, S105, S106, S107, S108, S109, S110, S111, S112, S113 steps W substrate

Claims

1. A method for generating a second processing recipe to be employed in a second processing apparatus using a first processing recipe to be employed in a first processing apparatus, comprising: a plurality of first parameters have already been set individually for a plurality of first items in the first processing recipe, the plurality of first items correspond individually to a plurality of first processes, all of the plurality of first processes are to be executed by the first processing device, and the plurality of first parameters individually define the contents of the plurality of first processes; In the second processing recipe, a plurality of second parameters are to be set individually for a plurality of second items, the plurality of second parameters define the contents of a plurality of second processes, the plurality of second items correspond to the plurality of second processes individually, and all of the plurality of second processes are to be executed by the second processing device; The method comprises: a first step of inputting the first process recipe; a second step of adopting, for one of the plurality of second items common to one of the plurality of first items, one of the plurality of first parameters that has already been set for the one of the plurality of first items as the one of the plurality of second parameters; Equipped with In the first step, the one first process recipe is selected from a plurality of first process recipes; a third step, which is carried out prior to the first step, of displaying quantitative information of the second items common to the first items for each of the first processing recipes; The method for generating a process recipe further comprises:

2. A method for generating a processing recipe according to claim 1, comprising: a fourth step, which is executed after the second step, of displaying that it is necessary to set the plurality of second parameters for any of the plurality of second items that is not common to any of the plurality of first items; The method for generating a process recipe further comprises:

3. A method for generating a processing recipe according to claim 1 or claim 2, comprising: a fifth step, performed after the second step, of indicating the presence of any of the plurality of first items that are not common to any of the plurality of second items; The method for generating a process recipe further comprises:

4. An apparatus for generating a second processing recipe to be employed in a second processing apparatus by utilizing a first processing recipe to be employed in a first processing apparatus, comprising: a plurality of first parameters have already been set individually for a plurality of first items in the first processing recipe, the plurality of first items correspond individually to a plurality of first processes, all of the plurality of first processes are to be executed by the first processing device, and the plurality of first parameters individually define the contents of the plurality of first processes; In the second processing recipe, a plurality of second parameters are to be set individually for a plurality of second items, the plurality of second parameters define the contents of a plurality of second processes, the plurality of second items correspond to the plurality of second processes individually, and all of the plurality of second processes are to be executed by the second processing device; The device comprises: an input unit for inputting the first processing recipe; a calculation unit that, for one of the plurality of second items common to one of the plurality of first items, adopts one of the plurality of first parameters that has already been set for the one of the plurality of first items as the one of the plurality of second parameters; Equipped with the input unit is configured to select one of the first processing recipes from a plurality of the first processing recipes and input the selected one to the input unit; an output unit that displays, for each of the plurality of first processing recipes, quantitative information of items common to the plurality of first items among the plurality of second items, prior to input of the one of the first processing recipes; A process recipe generation apparatus comprising:

5. A processing recipe generation device according to claim 4, comprising: an output unit that displays, after one of the plurality of first parameters is adopted as one of the plurality of second parameters, that the plurality of second parameters need to be set for any of the plurality of second items that is not common to any of the plurality of first items. A process recipe generation apparatus comprising:

6. A processing recipe generation apparatus according to claim 4, comprising: an output unit that displays the presence of any of the plurality of first items that is not common to any of the plurality of second items after the one of the plurality of first parameters is adopted as the one of the plurality of second parameters. A process recipe generation apparatus comprising:

7. a first processing recipe employed in a first processing apparatus has a plurality of first parameters already set for a plurality of first items, the plurality of first items individually corresponding to a plurality of first processes, all of the plurality of first processes being targets for execution by the first processing apparatus, and the plurality of first parameters individually defining the contents of the plurality of first processes; In a second processing recipe employed in a second processing apparatus, a plurality of second parameters are set individually for a plurality of second items, the plurality of second parameters respectively define the contents of a plurality of second processes, the plurality of second items correspond individually to the plurality of second processes, and all of the plurality of second processes are to be executed by the second processing apparatus, a first step of detecting, as a common item, an item that is common between the plurality of first items and the plurality of second items; a second step of displaying quantitative information about the common items; A processing recipe display method comprising:

8. The processing recipe display method according to claim 7, comprising: In the first step, any of the plurality of first process recipes is compared with one of the second process recipes; In the second step, the information on the common items is displayed corresponding to each of the plurality of first processing recipes.

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