Airtight connection unit, airtight connection assembly, airtight container and vaporizer, and method for manufacturing airtight connection assembly

Abstract

To enable reception of an electric signal or the like between an internal part and an external part of an air tight container while maintaining air tight of an air tight container with a simple construction.SOLUTION: An airtight connection assembly comprises: a conductive member constructing a path of a signal or fluid; a sealing part that contains a first sealing part having a shape that can cover a first hole formed in a separation wall of an air tight container, and a sealing material; and a connection part containing a connector connected to one or both end parts of the conductive member. In the airtight connection assembly, a second hole as a penetration hole formed so as to communicate the internal part with the external part of the air tight container is formed in the first sealing member. The conductive member is individually inserted into a second hole. The sealing material is filled to the conductive member and an inner peripheral surface of the second hole. By coupling the connector and the first sealing part, a coupling member for fixing a position relation of the connector and the first sealing part may be further comprised, and a second sealing member that surrounds a first hole, and is interposed to between the interference wall and the first sealing part may be further comprised.SELECTED DRAWING: Figure 14

Description

[Technical Field]

[0001] The present invention relates to an airtight connection unit that enables transmission of electrical signals between the inside and outside of an airtight container while maintaining the airtightness of the airtight container in which an electrical device or the like is housed, and to an airtight connection assembly, an airtight container, and a vaporizer, which are related products. The present invention also relates to a method for manufacturing the airtight connection assembly. [Background technology]

[0002] In the technical field, there is known a technique for preventing explosions induced by sparks generated from an electrical device by maintaining the pressure of the gas inside an airtight container that houses the electrical device higher than the pressure of the gas surrounding the airtight container. More specifically, there is known a technique for housing the electrical device inside an airtight container and maintaining the pressure of the gas (e.g., an inert gas such as nitrogen gas) inside the container higher than the pressure of the surrounding gas, thereby preventing, for example, explosive, flammable, or spontaneously combustible gas, vapor, or dust (hereinafter, sometimes collectively referred to as "flammable substances") from entering the inside of the airtight container (see, for example, Patent Document 1).

[0003] The above technology is also effective when flammable materials are present inside an airtight container. For example, a tank containing flammable materials is placed inside the airtight container, and the inside of the airtight container is filled with an inert gas. This allows the flammable materials to be contained inside the airtight container even if they leak from the tank. In addition, by maintaining the gas pressure inside the airtight container higher than the pressure of the surrounding air, it is possible to prevent the surrounding air from entering the inside of the airtight container, thereby suppressing the oxygen concentration inside the airtight container below the lower explosive limit and preventing the flammable materials from burning and exploding.

[0004] Incidentally, there are cases where it is necessary to supply power from outside the airtight container to an electrical device housed inside the airtight container, or to extract an electrical signal output from an electrical device housed inside the airtight container or a sensor or the like provided on a tank to the outside of the airtight container. In such cases, it is common to use a special connector called a "hermetic connector" or "airtight terminal" to exchange the above-mentioned power and / or electrical signals between the inside and outside of the airtight container.

[0005] In such a special connector, for example, the metal outer ring and the lead wire are hermetically sealed via glass, electrically insulating the metal outer ring and the lead wire while maintaining the airtightness of the airtight container (see, for example, Patent Document 2). Note that the lead wire and a cable or the like for electrically connecting to another device outside the airtight container can be connected by, for example, welding or soldering. Alternatively, the cable or the lead wire can be connected via, for example, a connector. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] U.S. Patent No. 5,101,710 [Patent Document 2] Japanese Patent Application Publication No. 57-211255 Summary of the Invention [Problem to be solved by the invention]

[0007] Hermetic connectors currently available on the market come in a wide variety of configurations, such as different sizes and shapes of the metal outer ring, different thicknesses, shapes and materials of the lead wires, and different sealing materials (e.g., glass, etc.). However, the number of variations is limited, and it is not always easy to obtain a hermetic connector that is suitable for the required specifications of the intended application.

[0008] As mentioned above, the lead wires constituting the hermetic connector can be connected to cables or the like for electrical connection with other devices outside and / or inside the airtight container via, for example, a connector. However, in conventional hermetic connectors, there are no unified standards for the configuration of the lead wires (such as the thickness, shape, and material of each lead wire, and the arrangement of the lead wires). Therefore, to facilitate the connection between the lead wires constituting conventional hermetic connectors and the above-mentioned cables, it is necessary to prepare dedicated connectors corresponding to each hermetic connector (the configuration of the lead wires therein). As a result, there is a risk of problems such as increased costs for devices (e.g., vaporizers) that include airtight containers or the like equipped with hermetic connectors.

[0009] As described above, there is a demand in the technical field for a technology that allows transmission of electrical signals and the like between the inside and outside of an airtight container while maintaining the airtightness of the airtight container with a simple configuration. [Means for solving the problem]

[0010] In view of the above problems, the inventor conducted extensive research and discovered that the above requirements can be met by realizing the three functions of insulation, sealing, and connection, which are achieved by a single structure in conventional hermetic connectors, using multiple structures.

[0011] Specifically, the airtight connection unit according to the present invention (hereinafter, sometimes referred to as the "unit of the present invention") is an airtight connection unit that enables transmission and reception of signals or fluids between the inside and outside of an airtight container via one or more conductive members inserted into a first hole that penetrates a partition wall of the airtight container. The unit of the present invention comprises a sealing portion and a connecting portion. The sealing portion includes a first sealing member that is a member having a shape that can cover the first hole. The connecting portion includes connectors that can be connected to either one or both ends of the conductive members. In the unit of the present invention, a second hole is formed that penetrates the first sealing member so that the conductive member inserted into the first hole can be further inserted.

[0012] Furthermore, the airtight connection assembly according to the present invention (hereinafter sometimes referred to as the "assembly of the present invention") is an airtight connection assembly comprising the above-described unit of the present invention and a conductive member, and the sealing portion further comprising a sealing material. Furthermore, the conductive members are individually inserted into the second holes, and a sealing material is filled between the conductive members and the inner surfaces of the second holes. In addition, a connector is connected to one or both ends of the conductive members.

[0013] Furthermore, the airtight container according to the present invention (hereinafter, sometimes referred to as the "container of the present invention") is an airtight container including the above-mentioned assembly of the present invention. Furthermore, the first hole is blocked by the first sealing member covering the first hole. In addition, the conductive member is inserted into the first hole via the second hole and extends from the inside to the outside of the airtight container.

[0014] Additionally, the vaporizer according to the present invention (hereinafter, sometimes referred to as "vaporizer of the present invention") is a vaporizer comprising the airtight container of the present invention described above, a tank housed inside the airtight container of the present invention, and a sensor and / or a heater. The sensor is configured to output a detection signal corresponding to the amount and / or state of the gas and / or gas source material, which is a substance that serves as a gas generation source, housed inside the tank. The heater is configured to receive power to heat the gas source. The vaporizer of the present invention is configured so that the gas and / or the detection signal and / or power are exchanged between the inside and outside of the container of the present invention via a conductive member provided in the assembly of the present invention.

[0015] On the other hand, the method for manufacturing an assembly for airtight connection according to the present invention (hereinafter sometimes referred to as the "method of the present invention") is a method for manufacturing the above-mentioned assembly of the present invention, and includes the steps listed below.

[0016] Connecting a connector to one or both ends of the conductive member, individually inserting the conductive members into the second holes, filling a sealant between the inner circumferential surface of the second hole and the conductive member, inserting the conductive member into the first hole, and fixing a first sealing member at a predetermined position on the partition wall of the airtight container to block the first hole with the first sealing member. [Effects of the Invention]

[0017] According to the unit of the present invention, the sealing portion that performs the functions of insulating and sealing the conductive member and the connector that performs the function of connecting the conductive member are configured as separate, independent components, which allows for a wider range of options for the configuration of the sealing portion and the connector. Therefore, it is possible to provide a container of the present invention that can be assembled with the assembly of the present invention, the container of the present invention, and the vaporizer of the present invention with a simple configuration that has a high degree of freedom and allows for the transmission of electrical signals between the inside and outside of the airtight container while maintaining the airtightness of the container.

[0018] In other words, the unit of the present invention allows for more flexible configuration of the sealing portion and connector than conventional techniques, making it easy to realize an airtight connection unit that is optimal for the required specifications. Furthermore, because the unit and / or assembly of the present invention has a simple configuration, there is no need to prepare a dedicated connector, which reduces the cost of the device including the airtight container.

[0019] Other objects, other features and attendant advantages of the present invention will be readily apparent from the following description of the embodiments of the present invention which will be given with reference to the drawings. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a schematic cross-sectional view showing an example of the configuration of an airtight connection unit (first unit) according to a first embodiment of the present invention. [Figure 2] 1 is a schematic cross-sectional view showing an example of the configuration of an airtight connection assembly (first assembly) according to a first embodiment of the present invention. [Figure 3]1 is a schematic cross-sectional view showing an example of the configuration of an airtight container (first container) according to a first embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing an example of the configuration of a vaporizer (first vaporizer) according to a first embodiment of the present invention. [Figure 5] 3 is a flowchart showing an example of the flow of each step included in the method for manufacturing an airtight connection assembly according to the first embodiment of the present invention (first method). [Figure 6] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of an airtight connection unit (second unit) according to a second embodiment of the present invention. [Figure 7] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of an airtight connection assembly (second assembly) according to a second embodiment of the present invention. [Figure 8] FIG. 4 is a schematic cross-sectional view showing an example of the configuration of an airtight container (second container) according to a second embodiment of the present invention. [Figure 9] 10 is a flowchart showing an example of the flow of each step included in a method for manufacturing an airtight connection assembly according to a second embodiment of the present invention (second method). [Figure 10] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of an airtight connection unit (third unit) according to a third embodiment of the present invention. [Figure 11] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of an airtight connection assembly (third assembly) according to a third embodiment of the present invention. [Figure 12] FIG. 10 is a schematic cross-sectional view showing an example of the configuration of an airtight container (third container) according to a third embodiment of the present invention. [Figure 13] 10 is a flowchart showing an example of the flow of each step included in a method for manufacturing an airtight connection assembly according to a third embodiment of the present invention (third method). [Figure 14] 1 is a schematic exploded perspective view showing an example of the configuration of an airtight connection assembly (embodiment assembly) according to an embodiment of the present invention. [Figure 15] FIG. 15 is a schematic exploded perspective view of the embodiment assembly shown in FIG. 14 turned upside down. [Figure 16]16 is a schematic exploded perspective view showing the positional relationship between a recess formed on a surface of a first sealing member that faces the airtight container and a second sealing member provided in the embodiment assembly shown in FIGS. 14 and 15. FIG. [Figure 17] 17 is a schematic exploded perspective view showing a state in which a conductive member connected to an external connector provided in the embodiment assembly shown in FIGS. 14 to 16 is inserted into a first hole formed in a partition wall of the airtight container and a second hole formed in a first sealing member. FIG. [Figure 18] FIG. 18 is a schematic perspective view showing a state in which the embodiment assembly shown in FIGS. 14 to 17 is attached to an airtight container. DETAILED DESCRIPTION OF THE INVENTION

[0021] First Embodiment <composition> (1) Airtight connection unit An airtight connection unit (hereinafter, sometimes referred to as a "first unit") according to a first embodiment of the present invention will be described below with reference to the drawings.

[0022] The first unit is an airtight connection unit that enables transmission of signals or fluids between the inside and outside of the airtight container via one or more conductive members that are inserted into a first hole that penetrates a partition wall of the airtight container. The first unit includes a sealing part and a connecting part.

[0023] The sealing portion includes a first sealing member, which is a member having a shape capable of covering the first hole. The shape of the first sealing member is not particularly limited as long as it is a shape capable of covering the first hole, which is a through-hole formed in the partition wall of the airtight container. Typically, the first sealing member is a plate-shaped member larger than the first hole. Furthermore, the material constituting the first sealing member is not particularly limited as long as it can withstand the usage environment in the application of the airtight container to which the first unit is attached. Typically, the material constituting the first sealing member is metal such as aluminum or iron, resin, or a composite material thereof.

[0024] The connection portion includes a connector that can be connected to one or both ends of the conductive member. The first unit is configured so that a connector can be connected to one or both ends of the conductive member to communicate a conductive member (for example, a signal line provided in a sensor or a pipe through which a fluid flows) provided in another device or facility, etc., and a conductive member provided in a device or facility, etc., disposed inside the airtight container to which the first unit is applied, in order to exchange a signal transmitted by the conductive member or a fluid flowing through a passage formed by the conductive member.

[0025] If the signal is an electrical signal, the connector may be, for example, a plug or jack (including a receptacle), or a male or female bullet terminal. If the signal is an optical signal, the connector may be, for example, an optical connector. On the other hand, if a fluid flows through a passage formed by a conductive member, the connector may be, for example, a joint. The number of connectors connected to either end of the conductive member may be one or more (i.e., two or more). In the latter case, the multiple connectors may be the same type of connector or different types of connectors. In the first unit, for example, commercially available general connectors and / or joints may be used as the connectors included in the connection portion.

[0026] As described above, the first sealing member is a member having a shape capable of covering the first hole. When the airtight connection assembly according to the present invention, manufactured from the first unit, is attached to the airtight container, the first sealing member is arranged to cover the first hole. The means and / or techniques for achieving and maintaining this state are not particularly limited. For example, the first sealing member may be fixed to the partition wall of the airtight container with fastening members such as bolts or screws inserted into through-holes formed in the partition wall of the airtight container and / or the first sealing member, or the first sealing member may be fixed to the partition wall of the airtight container with, for example, an adhesive, to cover the first hole. Even in this state, to enable transmission of signals and / or fluids between the inside and outside of the airtight container via the conductive member, it is necessary to be able to extend the conductive member from the inside to the outside of the airtight container via the first sealing member arranged to cover the first hole.

[0027] Therefore, the first unit is provided with second holes penetrating the first sealing member so that the conductive member inserted through the first hole can be further inserted. The number, size, and shape of the second holes are appropriately designed, for example, according to the number, thickness, and shape of the conductive members to be inserted through the second holes. The arrangement of the second holes does not necessarily correspond to the arrangement of the connection points between the connector and the conductive members in the connection section. For example, as described in detail below, the second holes may be spaced sufficiently far apart or each second hole may be located in a position that is easily accessible from the surrounding area, for the purpose of facilitating the operation of filling a sealant between the inner circumferential surfaces of the second holes and the conductive members. This allows signals and / or fluids to be exchanged between the inside and outside of the airtight container via the conductive members even when the first holes are covered by the first sealing member.

[0028] FIG. 1 is a schematic cross-sectional view showing an example of the configuration of a first unit. In FIG. 1, a partition wall 310 and a conductive member 210 of an airtight container 300 to which the first unit is attached are depicted by dashed lines. The airtight container 300 and the conductive member 210 are not included in the components of the first unit. The first unit 101 shown in FIG. 1 enables transmission and reception of signals or fluids between the inside and outside of the airtight container 300 via the conductive member 210, which is a member that forms a path for signals or fluids, while maintaining the airtightness of the airtight container 300. The first unit 101 includes a sealing portion 110 (the portion surrounded by a thick dashed line) and a connection portion 120.

[0029] The conductive member 210 will be described in detail in the description of the airtight connection assembly to be given later, and therefore will not be described here. The sealing part 110 includes a first sealing member 111 which is a member having a shape capable of covering a first hole 311 which is a through-hole formed in a partition wall 310 of the airtight container 300. The first sealing member 111 illustrated in Fig. 1 is a plate-shaped member made of aluminum (the portion with diagonal lines slanting upward to the right).

[0030] 1 is in a state in which the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 by bolts (not shown) so as to cover the first holes 311 and block the first holes 311. In this state, second holes 111a, which are through holes formed to communicate with the first holes 311, are formed in the first sealing member 111. In other words, the first holes 311 are formed in the partition wall 310 of the airtight container 300 so as to have a size and shape that allows them to communicate with all of the second holes 111a.

[0031] 1 includes, as the above-mentioned connectors, an external connector 121 and an internal connector 122. The external connector 121 is a connector configured to be connected to the conductive member 210 at an end of the conductive member 210 located outside the airtight container 300, and to enable transmission and reception of signals and / or fluids between the conductive member 210 and a conductive member (e.g., a signal line of a sensor or a pipe through which a fluid flows) included in another device or facility (not shown) located outside the airtight container 300. On the other hand, the internal connector 122 is a connector configured to be connected to the conductive member 210 at an end of the conductive member 210 located inside the airtight container 300, and to enable transmission and reception of signals and / or fluids between the conductive member 210 and a conductive member (e.g., a signal line of a sensor or a pipe through which a fluid flows) included in another device or facility (not shown) located inside the airtight container 300. For example, the external connector 121 and the internal connector 122 are commercially available connectors having terminals that can be electrically connected to the respective conductive members 210 that are electric wires.

[0032] As described above, the number, size, shape, etc. of the second holes 111a formed in the first sealing member 111 are designed appropriately according to the number, thickness, and shape of the conductive members 210 inserted through the second holes 111a. In the first unit 101 illustrated in Fig. 1, the two second holes 111a are arranged at positions that are easily accessible from the periphery, with a sufficient gap between them. This makes it easy to fill the gap between the inner circumferential surfaces of the second holes 111a and the conductive members 210 with a sealing material (this will be described in detail later).

[0033] (2) Airtight connection assembly An airtight connection assembly according to a first embodiment of the present invention (hereinafter, may be referred to as a "first assembly") will be described below with reference to the drawings.

[0034] As stated at the beginning of this specification, the present invention relates not only to the inventive unit having the above-mentioned characteristics but also to an airtight connection assembly. The "airtight connection assembly" is an assembly that includes the inventive unit and enables transmission of electrical signals between the inside and outside of an airtight container that houses an electrical device or the like while maintaining the airtightness of the airtight container.

[0035] The first assembly is an assembly for hermetic connection that includes the first unit and conductive members described above, and the sealing portion further includes a sealing material. Furthermore, the conductive members are individually inserted into the second holes, and a sealing material is filled between the conductive members and the inner circumferential surfaces of the second holes. Additionally, a connector is connected to one or both ends of the conductive members. The first unit has already been described in detail in the description of the first unit described above, so a description thereof will be omitted here.

[0036] A conductive member is a member that constitutes a path for a signal and / or a fluid. The signal transmitted by the conductive member is not particularly limited and may be, for example, an electric signal (including, for example, a detection signal output from a sensor or the like and an instruction signal output from a control device or the like, as well as power output from a power supply device or the like) or an optical signal. If the signal is an electric signal, the conductive member is an electric wire, which may be covered with, for example, an insulator and / or a protective coating. If the signal is an optical signal, the conductive member is an optical fiber, which may be, for example, an optical cable covered with a protective coating. On the other hand, the fluid flowing through the path formed by the conductive member is also not particularly limited and may be, for example, a fluid such as a gas or a liquid. In this case, the conductive member may be, for example, a tubular member such as a tube or a pipe, having a space formed therein that serves as a flow path for the fluid. Unlike electric wires and optical fibers, tubular members such as a tube or a pipe do not necessarily need to be covered with an insulator and / or a protective coating.

[0037] The number of conductive members included in the first assembly may be one or more (i.e., two or more). When the first assembly includes multiple conductive members, the signals flowing through the multiple paths formed by these multiple conductive members may all be electrical signals, all may be optical signals, or all may be fluids, or may include at least two or more of electrical signals, optical signals, and fluids.

[0038] The sealing material is not particularly limited as long as it is a material that can remain between the conductive member and the inner surface of the second hole and maintain airtightness in the usage environment of the airtight container to which the first assembly is attached. Note that "airtight" here is not necessarily limited to a state in which gas leakage is completely prevented, but also includes a state in which gas leakage is prevented to the extent required for the usage of the airtight container to which the first assembly is attached.

[0039] Specific examples of the sealing material include polymer organic materials, such as rubbers (e.g., silicone sealant) and resins (e.g., epoxy resins), and ceramic materials (e.g., glass). Furthermore, the polymer organic materials may be room-temperature curable, thermosetting, or thermoplastic, as long as they can withstand the operating environment of the airtight container to which the first assembly is attached. Therefore, the materials constituting the conductive member and the first sealing member must be able to withstand the conditions during filling and / or curing of the sealing material. Alternatively, the sealing material may be a solid member, such as a grommet, that is pre-formed to fit the shape of the second hole and has a through-hole through which the conductive member is inserted.

[0040] The first hole is closed by the sealing portion including the first sealing member and the sealing material as described above, thereby achieving the function of airtightly sealing the airtight container.

[0041] However, when multiple conductive members are inserted into one second hole, there is a risk that the sealing material may not be filled sufficiently to enhance airtightness, for example, because the sealing material is not filled sufficiently between the multiple conductive members. For this reason, in the first assembly, the conductive members are inserted individually into the second holes as described above. That is, one conductive member is inserted into one second hole, but multiple conductive members are not inserted into one second hole.

[0042] FIG. 2 is a schematic cross-sectional view showing an example of the configuration of a first assembly. In FIG. 2, a partition wall 310 of an airtight container 300 to which the first assembly is attached is depicted by a dashed line. The airtight container 300 is not included in the components of the first assembly. The first assembly 201 shown in FIG. 2 is an airtight connection assembly including two conductive members 210, a sealing portion 110 (the portion surrounded by a thick dashed dotted line), and a connection portion 120. In other words, the first assembly 201 is an airtight connection assembly including the above-described first unit 101 and two conductive members 210, and the sealing portion 110 further includes a sealant 113. The two conductive members 210 are individually inserted into the second holes 111a, and the sealant 113 is filled between each conductive member 210 and the inner circumferential surface of the second holes 111a. An external connector 121 and an internal connector 122 are connected to both ends of the conductive member 210, respectively.

[0043] The conductive member 210 is an electric wire that transmits an electric signal, and the electric wire is covered with a protective coating made of an insulator. The sealing part 110 includes a first sealing member 111, which is a member having a shape capable of covering a first hole 311, which is a through-hole formed in the partition wall 310 of the airtight container 300, and a sealing material 113. The first sealing member 111 is a plate-shaped member made of aluminum (the part with diagonal lines slanting upward to the right), and the sealing material 113 is a room-temperature curing silicone sealant (the part painted black).

[0044] 2 illustrates the first assembly 201 in a state in which the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 by bolts (not shown) so as to cover the first hole 311 and block the first hole 311. As illustrated in FIG. 2, the first hole 311 is formed in the partition wall 310 of the airtight container 300 so as to have a size and shape that allows the first hole 311 to communicate with all of the second holes 111a.

[0045] Furthermore, second holes 111a, which are through holes formed to connect the inside and outside of the airtight container 300 when the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 so as to cover the first holes 311, are formed in the first sealing member 111, and the conductive members 210 are individually inserted into the second holes 111a, and sealing material 113 is filled between the conductive members 210 and the inner surfaces of the second holes 111a.

[0046] 2 are disposed at positions that are easily accessible from the periphery and spaced apart from each other with a sufficient gap between them, which facilitates the work of filling the gap between the inner circumferential surface of second hole 111a and conductive member 210 with sealant 113, as described above.

[0047] (3) Airtight container An airtight container according to a first embodiment of the present invention (hereinafter, may be referred to as a "first container") will be described below with reference to the drawings.

[0048] As stated at the beginning of this specification, the present invention relates not only to the inventive unit and the inventive assembly having the characteristics as described above, but also to an airtight container comprising the inventive assembly.

[0049] The first container is an airtight container including the first assembly described above. Details of the first assembly have already been described in the description of the first assembly, so a description thereof will be omitted here. The configuration of the airtight container, such as the size, shape, and material of the partition wall of the airtight container constituting the first container, can be appropriately selected depending on, for example, the device and / or equipment housed inside the airtight container, the properties of the fluid such as gas, and the usage environment in the intended use of the airtight container.

[0050] In the first container, a first sealing member of the first assembly covers a first hole, which is a through-hole formed in a partition wall of the first container, thereby blocking the first hole. Furthermore, a conductive member is inserted into the first hole via a second hole, which is a through-hole formed in the first sealing member, and extends from the inside to the outside of the first container.

[0051] FIG. 3 is a schematic cross-sectional view showing an example of the configuration of a first container. The first container 301 shown in FIG. 3 is an airtight container including a first assembly 201. The first container 301 includes a first assembly 201. The first container 301 has the same configuration as the first assembly 201 shown in FIG. 2, except that the first container 301 does not include an internal connector. Also in the first container 301, a first hole 311, which is a through-hole, is formed in a partition wall 310, and the first hole 311 is blocked by a first sealing member 111 included in a sealing unit 110 of the first assembly 201. Furthermore, a conductive member 210 is inserted into the first hole 311 via a second hole 111a formed in the first sealing member 111, and extends from the inside to the outside of the first container 301.

[0052] A sensor 420 is housed inside the first container 301 (see the oval drawn by the broken line), and the conductive member 210 is, for example, an electric wire serving as a path for transmitting a detection signal output from the sensor 420. However, the conductive member 210 may also be a power line that supplies power to a device or facility housed inside the first container 301, or may be piping such as a tube or pipe that transfers a fluid between a tank housed inside the first container 301 and the outside of the first container 301.

[0053] As described above, the first assembly 201 included in the first container 301 illustrated in Fig. 3 does not include an internal connector. Therefore, in the example illustrated in Fig. 3, the signal lines 421 and 422 included in the sensor 420 are directly connected to the two conductive members 210 included in the first assembly 201. However, if the first assembly 201 included in the first container 301 includes an internal connector, these can be easily connected by the internal connector.

[0054] (4) Carburetor A vaporizer according to a first embodiment of the present invention (hereinafter, may be referred to as a "first vaporizer") will be described below with reference to the drawings.

[0055] As stated at the beginning of this specification, the present invention not only relates to the inventive unit, the inventive assembly and the inventive container having the characteristics described above, but also to a vaporizer comprising the inventive container.

[0056] The first vaporizer is a vaporizer including the first container described above, a tank accommodated inside the first container, and a sensor and / or a heater. Details of the first container have already been described in the description of the first container described above, so a description thereof will be omitted here.

[0057] The tank is a container that stores the gas to be supplied by the first vaporizer and / or the gas raw material, which is the substance that will be the source of the gas, and the gas stored inside the tank and / or the gas generated inside the tank is discharged from inside the first container to the outside.

[0058] The sensor is configured to output a detection signal corresponding to the amount and / or state of the gas and / or gas raw material, which is a substance that generates the gas, contained inside the tank. The amount of the gas and / or gas raw material refers to, for example, the mass, volume, and liquid level (if the gas raw material is a liquid) of the gas and / or gas raw material. The state of the gas and / or gas raw material refers to, for example, the temperature, pressure, and concentration of specific components of the gas and / or gas raw material.

[0059] The heater is configured to receive power to heat the gas raw material. Specific examples of such a heater include a resistance heater, a dielectric heater, a microwave heater, and an induction heater. Typically, the heater is a resistance heater.

[0060] Additionally, the first vaporizer is configured so that gas and / or detection signals and / or power are exchanged between the inside and outside of the first container via the conductive member provided in the first assembly.

[0061] The first vaporizer may be configured so that at least one of the gas, the detection signal, and the power is transmitted between the inside and outside of the first container without passing through the conductive member of the first assembly. For example, the first vaporizer may include an outlet pipe as a flow path configured to deliver the gas from the inside of the tank to the outside of the airtight container, separate from the conductive member. In this case, the configuration of the outlet pipe is not particularly limited as long as it is capable of delivering the gas from the inside of the tank to the outside of the airtight container, and can be selected appropriately depending on, for example, the properties of the gas and the usage environment of the vaporizer.

[0062] Fig. 4 is a schematic diagram showing an example of the configuration of a first vaporizer. The first vaporizer 401 shown in Fig. 4 includes the first container 301 described above, a tank 410 accommodated inside the first container 301, a sensor 420, and an outlet pipe 430 that discharges gas generated inside the tank 410 from the inside of the first container 301 to the outside. In the example shown in Fig. 4, the sensor 420 is configured to detect the temperature (T) of the gas raw material (a substance that serves as a gas generation source) stored inside the tank 410, the concentration (C) of a specific component in the gas raw material, and the pressure (P) of the gas generated from the gas raw material. Note that a heater is not shown in the example shown in Fig. 4.

[0063] First vaporizer 401 includes an inlet pipe 440 that introduces a carrier gas below the liquid surface of the gas raw material stored inside tank 410. In addition, first vaporizer 401 includes a flow rate control device 510 that controls the flow rate of the carrier gas introduced into tank 410, and a flow meter 520 that measures the flow rate of a mixed gas of the carrier gas and the gas generated from the gas raw material that is discharged from the inside to the outside of first container 301 through discharge pipe 430.

[0064] The first vaporizer 401 having the above-described configuration is configured to introduce a carrier gas at a predetermined flow rate below the liquid surface of the gas raw material stored in the tank 410, while maintaining constant the temperature of the gas raw material stored in the tank 410 and the pressure of the gas generated from the gas raw material. The first vaporizer 401 then discharges a mixed gas of the gas generated from the gas raw material and the carrier gas from the exhaust port of the tank 410 to the outside of the first container 301 via the discharge pipe 430. That is, the first vaporizer 401 is a bubbling-type vaporizer.

[0065] In the first vaporizer 401 having the above-described configuration, the flow rate Qs of the gas generated from the gas raw material can be obtained by subtracting the flow rate Q1 of the carrier gas measured by the flow control device 510 from the flow rate Q2 of the mixed gas measured by the flow meter 520 (Qs=Q2-Q1).

[0066] In the process of supplying the gas generated from the gas raw material at a predetermined flow rate as described above to a predetermined destination (chamber 530 in FIG. 4), detection signals corresponding to the temperature (T) of the gas raw material, the concentration (C) of a specific component in the gas raw material, and the pressure (P) of the gas generated from the gas raw material are output from sensor 420. These detection signals are transmitted from the inside to the outside of first container 301 by first assembly 201 provided in first container 301 while maintaining the airtightness of first container 301, and are transmitted to a control device or the like (not shown) via plug 450 connected to an external connector (not shown) provided in first assembly 201 and cable 460 connected to plug 450, and are used to control the flow rate of the gas.

[0067] In the first container and the first vaporizer illustrated with reference to FIGS. 3 and 4, respectively, the conductive member is configured as a signal line (electric wire) that transmits the detection signal output from the sensor from the inside to the outside. However, as described above, the conductive member is a member that configures a signal or fluid passage. Furthermore, the signal transmitted by the conductive member is not limited to an electrical signal and may be, for example, an optical signal. Furthermore, the fluid flowing through the passage configured by the conductive member is also not particularly limited and may be, for example, a fluid such as a gas or a liquid. Therefore, the conductive member may be, for example, an electric wire or an optical fiber, or may be, for example, a tubular member such as a tube or a pipe having a space formed therein that serves as a fluid flow path. Specifically, the outlet pipe 430 and the inlet pipe 440 provided in the first vaporizer 401 illustrated in FIG. 4 may be configured to exchange the gas and gas raw material between the inside and outside of the first container 301 via the first assembly 201 arranged to cover a through-hole (not shown) formed in the partition wall 310 of the first container 301.

[0068] (5) Manufacturing method of an assembly for airtight connection A method for manufacturing an airtight connection assembly according to a first embodiment of the present invention (hereinafter, sometimes referred to as a "first method") will be described below with reference to the drawings.

[0069] As stated at the beginning of this specification, the present invention not only relates to the inventive unit, the inventive assembly, the inventive container and the inventive vaporizer having the characteristics described above, but also to a method for manufacturing the inventive assembly.

[0070] The first method is a method for manufacturing the first assembly described above. Details of the first assembly have already been described in the description of the first assembly described above, so a description thereof will be omitted here. Furthermore, the first method includes the following steps:

[0071] Step A: Connecting a connector to at least one end of the conductive member. Step B: Inserting the conductive members individually into the second holes, which are through holes formed in the first sealing member. Step C: Filling a sealant between the inner circumferential surface of the second hole and the conductive member. Step D: Inserting the conductive member into the first hole, which is a through-hole formed in the partition wall of the airtight container. Step E: Fixing a first sealing member to a predetermined position on the partition wall of the airtight container to close the first hole with the first sealing member.

[0072] Fig. 5 is a flowchart showing an example of the flow of each step included in the first method. In the first method illustrated in Fig. 5, the steps are executed in the order of S10, S20, S30, S40, and S50. That is, in the first method illustrated in Fig. 5, the above-described steps are executed in the order of "step A → step B → step C → step D → step E." However, the execution order of steps A to E included in the first method does not necessarily have to be as described above, and the execution order of each step can be changed as appropriate depending on, for example, the configuration of the airtight container to which the first assembly is applied, the first assembly, and the surrounding environment of the airtight container.

[0073] Specifically, for example, the first assembly 201 illustrated in FIG. 2 can be assembled from the first unit 101 illustrated in FIG. 1 by the following procedure. First, an external connector 121 is connected to one end of two conductive members 210. Next, each of the conductive members 210 connected to the external connector 121 is individually inserted into two second holes 111a formed in the first sealing member 111, starting from the end opposite the external connector 121. Then, a sealant 113 is filled between the inner circumferential surface of each second hole 111a and the conductive member 210, and then cured. The end of each conductive member 210, which constitutes an assembly consisting of the external connector 121, the conductive member 210, and the first sealing member 111 assembled in this way, opposite the external connector 121, is inserted into a first hole 311 formed in the partition wall 310 of the airtight container 300 from the outside of the airtight container 300.

[0074] Furthermore, the first sealing member 111 is fixed to a predetermined position on the partition wall 310 of the airtight container 300 with bolts (not shown), and the first hole 311 is covered and blocked by the first sealing member 111. The end of the conductive member 210 opposite to the external connector 121 is connected to a device or facility (not shown), such as a sensor, disposed inside the airtight container 300. The connection may be a direct connection between the conductive member 210 and a terminal of the device or facility, or may be a connection via an internal connector 122 included in the first unit 101 illustrated in FIG. 1. If the internal connector 122 can pass through the first hole 311, the conductive member 210 and the internal connector 122 may be connected before the first sealing member 111 is fixed to a predetermined position on the partition wall 310 of the airtight container 300.

[0075] <effect> As described above, in the first unit, the sealing portion and the connecting portion can be formed using readily available general-purpose components, such as commercially available metal plates and connectors, etc. As a result, the first unit can provide an airtight connection assembly that maintains the airtightness of the airtight container with a simple configuration and enables transmission of electrical signals and the like between the inside and outside of the airtight container.

[0076] The first assembly is an assembly for airtight connection that includes a first unit and a conductive member, and the sealing portion further includes a sealant, the conductive members are individually inserted into the second holes, the sealant is filled between the conductive members and the inner circumferential surface of the second hole, and a connector is connected to one or both ends of the conductive members. As a result, the first assembly can provide an airtight container that can transmit and receive electrical signals between the inside and outside of the airtight container while maintaining the airtightness of the airtight container with a simple configuration.

[0077] Furthermore, the first container is an airtight container including a first assembly, the first hole is closed by a first sealing member, and a conductive member inserted into the first hole via a second hole formed in the first sealing member extends from the inside to the outside of the first container. As a result, in the first container, electrical signals and the like can be exchanged between the inside and outside of the first container while maintaining the airtightness of the first container with a simple configuration.

[0078] In addition, the first vaporizer includes a first container. As a result, as already described in the description of the first container, it is possible to maintain the airtightness of the first container with a simple configuration while enabling the exchange of electrical signals and the like between the inside and outside of the first container. Therefore, the first vaporizer can reduce, for example, leakage of gas from a tank accommodated inside the first container to the outside of the first container and / or intrusion of foreign matter (e.g., ambient gas, etc.) from the outside of the first container into the inside of the tank, and therefore it is possible to provide a vaporizer with high safety with a simple configuration.

[0079] On the other hand, in a first method for manufacturing a first assembly having the above-described configuration, the following steps can be individually performed: connecting the conductive member and the connector (step A), inserting the conductive member into the second hole of the first sealing member (step B), filling a sealant between the inner circumferential surface of the second hole and the conductive member (step C), inserting the conductive member into the first hole of the airtight container (step D), and closing the first hole by fixing the first sealing member to a predetermined position on the partition wall of the airtight container (step E). Thus, according to the first method, a first assembly that can achieve the above-described effects can be easily manufactured through a simple and flexible process.

[0080] Second Embodiment <composition> (1) Airtight connection unit An airtight connection unit (hereinafter, sometimes referred to as a "second unit") according to a second embodiment of the present invention will be described below with reference to the drawings.

[0081] In the airtight connection units (units of the present invention) according to various embodiments of the present invention, including the first unit described above, the sealing portion and the connection portion can be formed from readily available general-purpose components, such as commercially available metal plates and connectors. As a result, the unit of the present invention can provide an airtight connection assembly that maintains the airtightness of the airtight container with a simple configuration and enables the transmission and reception of electrical signals between the inside and outside of the airtight container.

[0082] For example, if the conductive member is made of a flexible material, the connector connected to one or both ends of the conductive member and / or the conductive member itself can move flexibly. As a result, for example, as described above, the workability of fixing the first sealing member to a predetermined position on the partition wall of the airtight container can be improved. However, depending on the surrounding conditions of the location where the airtight connection assembly formed by the unit of the present invention is attached, the work of fixing the first sealing member may actually be more difficult if the connector and / or the conductive member are able to move flexibly. Furthermore, depending on the configuration of the conductive member, the conductive member may be damaged by bending or deforming, for example, during assembly into the airtight container.

[0083] Therefore, the second unit is an airtight connection unit that further includes a coupling portion including a coupling member in addition to the components of the first unit described above. The coupling member is a member that can couple at least one of the connectors and the first sealing member to fix the positional relationship between the connector and the first sealing member.

[0084] The specific configuration of the coupling member is not particularly limited as long as it is capable of coupling at least one connector included in the connection portion and the first sealing member so as to fix the positional relationship between the connector and the first sealing member. For example, the coupling member may include a connector holding member that is a member for holding the connector, and a connector support member that is a member for connecting the first sealing member and the connector holding member and supporting the connector holding member. In this case, the connector holding member and the connector support member may be configured as separate members or may be configured as an integrated member.

[0085] As described above, the first unit has a second hole penetrating the first sealing member so that the conductive member inserted into the first hole, which is a through-hole formed in the partition wall of the airtight container, can be further inserted. When the first assembly is assembled from the first unit, the conductive members are individually inserted into the second hole, and a sealant is filled between each conductive member and the inner circumferential surface of the second hole. Therefore, in the second unit, it is desirable that the coupling member have a structure that does not or hardly interferes with the sealing material filling operation even when the sealing material is filled between the conductive member and the inner circumferential surface of the second hole after at least one connector included in the connection portion is coupled to the first sealing member by the coupling member.

[0086] A specific example of the configuration of the coupling member described above is a configuration including a pair of opposing plate-shaped connector support members and a plate-shaped connector holding member coupled to one end of the pair of connector support members so as to span one end of the pair of connector support members. In this case, when the airtight connection assembly is assembled from the second unit, a sealant can be filled between the conductive member and the inner circumferential surface of the second hole through the space between the pair of connector support members. Alternatively, the coupling member may be composed of a plate-shaped connector holding member and a connector support member as a plurality of legs extending from the connector holding member toward the first sealing member. In this case, when the airtight connection assembly is assembled from the second unit, a sealant can be filled between the conductive member and the inner circumferential surface of the second hole through the space between adjacent legs.

[0087] The material of the joining member is also not particularly limited as long as it can withstand the usage environment of the airtight container to which the airtight connection assembly formed by the second unit is attached. Typically, the material of the joining member is metal such as aluminum or iron, resin, or a composite material thereof.

[0088] Fig. 6 is a schematic cross-sectional view showing an example of the configuration of the second unit. As with Fig. 1 described above, the second unit 102 shown in Fig. 6 is in a state in which the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 by bolts (not shown) so as to cover the first hole 311 and close the first hole 311. The partition wall 310 and the conductive member 210 of the airtight container 300 to which the airtight connection assembly formed by the second unit 102 is attached are also shown by dashed lines.

[0089] 6 further includes a coupling portion 130 including a coupling member 131 configured to couple the external connector 121 and the first sealing member 111 together and fix the positional relationship between the external connector 121 and the first sealing member 111. Except for this, the second unit 102 has the same configuration as the first unit 101 illustrated in FIG. 1. Therefore, the following description of the second unit 102 will mainly focus on the above-mentioned differences.

[0090] As illustrated in FIG. 6, the coupling member 131 included in the coupling portion 130 of the second unit 102 is composed of a connector holding member 131a and a connector support member 131b (the portion with the diagonal checkered pattern). The connector holding member 131a is a member for holding the external connector 121. The connector support members 131b are a pair of plate-shaped members facing each other, and the connector holding member 131a is coupled to one end of the pair of connector support members 131b so as to hang over the other end of the pair of connector support members 131b. The positional relationship between the external connector 121 and the first sealing member 111 can be fixed by fixing the other ends of the pair of connector support members 131b to the outer edge portion of the first sealing member 111. When assembling the airtight connection assembly from the second unit 102 illustrated in FIG. 6, the sealant 113 can be easily filled between the conductive member 210 and the inner circumferential surface of the second hole 111a through the space between the pair of connector support members 131b (this will be described in detail later).

[0091] (2) Airtight connection assembly An airtight connection assembly according to a second embodiment of the present invention (hereinafter, may be referred to as a "second assembly") will be described below with reference to the drawings.

[0092] The second assembly is an assembly for airtight connection that includes the above-mentioned second unit as an airtight connection unit in addition to the components included in the first assembly, and at least one connector and the first sealing member are joined by a joining member to fix the positional relationship between the connector and the first sealing member. Note that the specific configurations of the second unit and the joining portion included in the second unit that constitute the second assembly have already been described in the description of the above-mentioned second unit, so description thereof will be omitted here.

[0093] FIG. 7 is a schematic cross-sectional view showing an example of the configuration of the second assembly. As illustrated in FIG. 7, the coupling member 131 included in the coupling unit 130 of the second assembly 202 is composed of a connector holding member 131a and a connector support member 131b (the portion with a diagonal checkered pattern). The connector holding member 131a is a plate-shaped member for holding the external connector 121. The connector support member 131b is a plurality of columnar (rod-shaped) or plate-shaped members configured as legs extending from the connector holding member 131a toward the first sealing member 111. The connector holding member 131a is coupled to one end of the plurality of connector support members 131b. Furthermore, the other ends of the plurality of connector support members 131b are fixed to the surface of the first sealing member 111 (the surface opposite the partition wall 310 of the airtight container 300). This fixes the positional relationship between the external connector 121 and the first sealing member 111. As a result, in the second assembly 202 illustrated in Figure 7, the sealing material 113 can be easily filled between the conductive member 210 and the inner surface of the second hole 111a through the space between the multiple connector support members 131b.

[0094] (3) Airtight container An airtight container according to a second embodiment of the present invention (hereinafter, may be referred to as a "second container") will be described below with reference to the drawings.

[0095] The second container is an airtight connection assembly that includes the above-described second assembly as the airtight connection assembly in addition to the components of the first container. Note that the specific configurations of the second assembly constituting the second container and the coupling portion of the second assembly have already been described in the above description of the second assembly, and therefore will not be described here.

[0096] Fig. 8 is a schematic cross-sectional view showing an example of the configuration of the second container. The second container 302 shown in Fig. 8 further includes a coupling portion 130 including a coupling member 131 configured to couple the external connector 121 and the first sealing member 111 together and fix the positional relationship between the external connector 121 and the first sealing member 111. Except for this, the second container 302 has the same configuration as the first container 301 shown in Fig. 3. Therefore, the following description of the second container 302 will mainly focus on the above differences.

[0097] As illustrated in FIG. 8, the coupling member 131 included in the coupling section 130 provided in the second assembly 202 constituting the second container 302 is composed of a connector holding member 131a and a connector support member 131b (the portion with the diagonal checkered pattern). The connector holding member 131a is a plate-shaped member for holding the external connector 121. The connector support members 131b are a pair of plate-shaped members facing each other, and the connector holding member 131a is coupled to one end of the pair of connector support members 131b. The other ends of the pair of connector support members 131b are fixed to the outer edge portion of the first sealing member 111, thereby fixing the positional relationship between the external connector 121 and the first sealing member 111.

[0098] Furthermore, when assembling the second container 302 illustrated in FIG. 8, the sealing material 113 can be easily filled between the conductive member 210 and the inner surface of the second hole 111a through the space between the pair of connector support members 131b.

[0099] (4) Carburetor A vaporizer according to a second embodiment of the present invention (hereinafter, may be referred to as a "second vaporizer") will be described below.

[0100] The second vaporizer is a vaporizer that includes the components of the first vaporizer described above, and also includes a second container as an airtight container instead of the first container described above. Details of the second container have already been described in the above description of the second container, so further description and reference to the drawings will be omitted here.

[0101] (5) Manufacturing method of an assembly for airtight connection A method for manufacturing an airtight connection assembly according to a second embodiment of the present invention (hereinafter, sometimes referred to as a "second method") will be described below with reference to the drawings.

[0102] The second method is a method of assembling the second assembly from a second unit instead of the first unit. That is, the airtight connection assembly manufactured by the second method further includes a joining portion including a joining member that joins at least one connector and the first sealing member to fix the positional relationship between the connector and the first sealing member. Therefore, the second method further includes the following step F in addition to the configuration of the first method.

[0103] Step F: joining at least one connector and the first sealing member with a joining member to fix the positional relationship between the connector and the first sealing member.

[0104] The elements constituting the second assembly have already been described in the description of the second assembly, and therefore will not be described here. FIG. 9 is a flowchart showing an example of the flow of the steps included in the second method. In the second method illustrated in FIG. 9, the steps are executed in the order of S10, S20, S25, S30, S40, and S50. That is, in the second method illustrated in FIG. 9, the above-described steps are executed in the order of "step A → step B → step F → step C → step D → step E." However, the execution order of steps A to E and F included in the second method does not necessarily have to be as described above, and the execution order of the steps can be changed as appropriate depending on, for example, the configuration of the airtight container to which the second assembly is applied and the second assembly, the surrounding environment of the airtight container, and the like.

[0105] <effect> As described above, the second unit is an airtight connection unit that, in addition to the configuration of the first unit described above, further includes a coupling portion including a coupling member that can couple at least one of the connectors to the first sealing member to fix the positional relationship between the connector and the first sealing member. Therefore, according to the second unit, by coupling at least one connector included in the coupling portion to the first sealing member with the coupling member, the positional relationship between the connector and the first sealing member can be fixed. As a result, even if the connector and / or the conductive member are flexible, problems such as a decrease in efficiency in fixing the first sealing member during the process of assembling the second assembly and / or damage to the conductive member can be reduced. Naturally, the same effect can be achieved during the process of assembling the second assembly in the manufacturing process of the second container and the second vaporizer.

[0106] Additionally, in the second method, the following steps can be individually performed: connecting the conductive member and the connector (step A), inserting the conductive member into the second hole of the first sealing member (step B), joining the connector and the first sealing member with a joining member (step F), filling a sealant between the inner circumferential surface of the second hole and the conductive member (step C), inserting the conductive member into the first hole of the airtight container (step D), and closing the first hole by fixing the first sealing member to a predetermined position on the partition wall of the airtight container (step E). Therefore, according to the second method, a simple and flexible process can be used to easily manufacture a second assembly that maintains the airtightness of the airtight container with a simple configuration, enables transmission and reception of electrical signals and the like between the inside and outside of the airtight container, and can achieve the effects described above.

[0107] Third Embodiment <composition> (1) Airtight connection unit An airtight connection unit (hereinafter, sometimes referred to as a "third unit") according to a third embodiment of the present invention will be described below with reference to the drawings.

[0108] In an airtight connection assembly constituted by the airtight connection units (units of the present invention) according to various embodiments of the present invention, including the first unit and second unit described above, the first hole, which is a through-hole formed in the partition wall of the airtight container, is covered with the first sealing member to close the first hole and achieve airtightness. However, depending on the application of the airtight container to which the airtight connection assembly is attached, it may be difficult to achieve sufficient airtightness with the above-described configuration. Specific examples of such cases include when the partition wall and / or the first sealing member of the airtight container do not have sufficient flatness, or when the partition wall and / or the first sealing member of the airtight container are deformed due to stress acting in conjunction with fixing the first sealing member to the partition wall of the airtight container.

[0109] Therefore, the third unit is an airtight connection unit that further includes a second sealing member in addition to the components of the first unit or the second unit described above. The second sealing member is a member that can surround the first hole and be interposed between the partition wall of the airtight container and the first sealing member when the airtight connection assembly formed by the third unit is attached to the airtight container (hereinafter, sometimes referred to as "state A").

[0110] The second sealing member enhances the airtightness of the airtight container by reducing gas leakage through the first hole, which is a through-hole formed in the partition wall of the airtight container, and through the gap between the partition wall of the airtight container and the first sealing member in the state A. Therefore, as described above, the second sealing member needs to surround the first hole and be interposed between the partition wall of the airtight container and the first sealing member in the state A.

[0111] As long as the above requirements are met, the specific configuration of the second sealing member is not particularly limited, but typically, a sealing member well known in the art, such as an O-ring, a packing, a gasket, etc., can be used as the second sealing member. Alternatively, a material similar to the above-mentioned sealing material may be disposed so as to surround the first hole in state A and to be interposed between the partition wall of the airtight container and the first sealing member.

[0112] Furthermore, in state A of the first sealing member and / or the partition wall of the airtight container, a structure such as a groove or a step may be provided in the portion facing the second sealing member to facilitate positioning of the second sealing member in the process of assembling the airtight connection assembly from the third unit, or to reduce deviation of the second sealing member from its predetermined position.

[0113] Furthermore, as described above, when the first sealing member is fixed to the partition wall of the airtight container using fastening members such as bolts or screws inserted into through holes formed in the partition wall of the airtight container and / or the first sealing member, there is a risk that the airtightness of the airtight container may be reduced due to gas leakage, for example, between the fastening member and the through hole.

[0114] In the above case, the second sealing member may be configured to surround not only the first hole formed in the partition wall of the airtight container but also the through hole through which the fastening member is inserted in state A. This reduces gas leakage through a gap between the through hole formed in the partition wall of the airtight container for inserting the fastening member and the fastening member, thereby reducing a decrease in the airtightness of the airtight container. Alternatively, the second sealing member may be configured to surround only the first hole formed in the partition wall of the airtight container in state A but not the through hole through which the fastening member is inserted. This reduces gas leakage through a gap between the through hole formed in the first sealing member for inserting the fastening member and the fastening member, thereby reducing a decrease in the airtightness of the airtight container. In addition to the above, a member such as a packing or a gasket may be interposed between the partition wall of the airtight container and the fastening member to reduce a decrease in the airtightness of the airtight container.

[0115] Fig. 10 is a schematic cross-sectional view showing an example of the configuration of the third unit. The third unit 103 shown in Fig. 10 further includes a second sealing member 112 (the portion shaded diagonally downward to the right) that surrounds the first hole 311 formed in the partition wall 310 of the airtight container 300 in the above-described state A and is disposed so as to be interposed between the partition wall 310 of the airtight container 300 and the first sealing member 111. Except for this point, the third unit 103 has the same configuration as the first unit 101 shown in Fig. 1. The second sealing member 112 included in the third unit 103 shown in Fig. 10 is an O-ring.

[0116] (2) Airtight connection assembly Hereinafter, an airtight connection assembly according to a third embodiment of the present invention (hereinafter, may be referred to as a "third assembly") will be described with reference to the drawings.

[0117] The third assembly includes the above-mentioned third unit as an airtight connection unit in addition to the components included in the first assembly or the second assembly. Furthermore, in the third assembly, a second sealing member is disposed so as to surround the first hole and to be interposed between the partition wall of the airtight container and the first sealing member in the above-mentioned state A. The specific configuration and arrangement of the second sealing member have already been described in the description of the above-mentioned third unit, so a description thereof will be omitted here.

[0118] Fig. 11 is a schematic cross-sectional view showing an example of the configuration of a third assembly. In the third assembly 203 shown in Fig. 11, in state A, a second sealing member 112 is disposed so as to surround the first hole 311 formed in the partition wall 310 of the airtight container 300 and to be interposed between the partition wall 310 of the airtight container 300 and the first sealing member 111 (portion shaded diagonally downward to the right). Except for this point, the third assembly 203 has the same configuration as the second assembly 202 shown in Fig. 7. The second sealing member 112 included in the third assembly 203 shown in Fig. 11 is an O-ring.

[0119] (3) Airtight container An airtight container according to a third embodiment of the present invention (hereinafter, may be referred to as a "third container") will be described below with reference to the drawings.

[0120] The third container includes the above-mentioned third assembly as an airtight connection assembly in addition to the components of the first container or the second container, and a second sealing member is disposed so as to surround the first hole and be interposed between the partition wall of the third container and the first sealing member. The specific configuration and arrangement of the second sealing member have already been described in the description of the third assembly above, and therefore will not be described here.

[0121] Fig. 12 is a schematic cross-sectional view showing an example of the configuration of a third container. In the third container 303 shown in Fig. 12, in state A, a second sealing member 112 is disposed so as to surround a first hole 311 formed in a partition wall 310 of the third container 303 and to be interposed between the partition wall 310 of the third container 303 and the first sealing member 111 (the portion shaded diagonally downward to the right). Except for this point, the third container 303 has the same configuration as the second container 302 shown in Fig. 8. The second sealing member 112 provided in the third assembly 203 constituting the third container 303 shown in Fig. 12 is an O-ring.

[0122] (4) Carburetor A vaporizer according to a third embodiment of the present invention (hereinafter, may be referred to as a "third vaporizer") will be described below.

[0123] The third vaporizer is a vaporizer that includes the above-mentioned third container as an airtight container in addition to the components of the first or second vaporizer. Details of the third container have already been described in the above description of the third container, so further description and reference to the drawings will be omitted here.

[0124] (5) Manufacturing method of an assembly for airtight connection Hereinafter, a method for manufacturing an airtight connection assembly according to a third embodiment of the present invention (hereinafter, sometimes referred to as a "third method") will be described with reference to the drawings.

[0125] The third method is a method for assembling the third assembly from the third unit. That is, the airtight connection assembly manufactured by the third method further includes a second sealing member that surrounds the first hole, which is a through-hole formed in the partition wall of the airtight container, and that can be interposed between the partition wall and the first sealing member. Therefore, the third method further includes the following steps G and H in addition to the configuration of the first or second method.

[0126] Step G: Inserting the conductive member into the second sealing member. Step H: disposing a second sealing member so as to surround the first hole formed in the partition wall of the airtight container and to be interposed between the partition wall and the first sealing member;

[0127] The elements constituting the third assembly have already been described in the description of the third assembly, and therefore will not be described here. FIG. 13 is a flowchart showing an example of the flow of the steps included in the third method. In the third method illustrated in FIG. 13, the steps are executed in the order of S10, S20, S25, S30, S35, S40, S45, and S50. That is, in the third method illustrated in FIG. 13, the above-described steps are executed in the order of "step A → step B → step F → step C → step G → step D → step H → step E." However, the execution order of steps A to E and steps F to H included in the third method does not necessarily have to be as described above. The execution order of the steps can be changed as appropriate depending on, for example, the configuration of the airtight container to which the third assembly is applied and the third assembly, the surrounding environment of the airtight container, and the like.

[0128] <effect> As described above, the third unit is an airtight connection unit that, in addition to the configuration of the first unit or the second unit described above, further includes a second sealing member that is a member that surrounds the first hole and can be interposed between the partition wall of the airtight container and the first sealing member when the airtight connection assembly formed by the third unit is attached to the airtight container (State A). Therefore, the third unit can sufficiently achieve the airtightness required for the use of the third container, which is an airtight container including the third assembly, which is an airtight connection assembly formed by the third unit, and / or the third vaporizer, which is a vaporizer including the third container, even when the partition wall of the airtight container and / or the first sealing member do not have sufficient flatness as described above, or when the partition wall of the airtight container and / or the first sealing member are deformed due to stress acting in conjunction with fixing the first sealing member to the partition wall of the airtight container.

[0129] In addition, in the third method, the following steps can be individually performed: connecting the conductive member and the connector (step A), inserting the conductive member into the second hole of the first sealing member (step B), joining the connector and the first sealing member with a joining member (step F), filling a sealant between the inner circumferential surface of the second hole and the conductive member (step C), inserting the conductive member into the second sealing member (step G), inserting the conductive member into the first hole of the airtight container (step D), arranging the second sealing member at a predetermined position between the partition wall of the airtight container and the first sealing member (step H), and fixing the first sealing member to a predetermined position on the partition wall of the airtight container to close the first hole (step E). Thus, the third method makes it possible to easily manufacture the third assembly, which is simple and has a high degree of flexibility, and which maintains the airtightness of the airtight container with a simple configuration, enables transmission of electrical signals and the like between the inside and outside of the airtight container, and can achieve the above-mentioned effects. [Example]

[0130] Hereinafter, an airtight connection assembly according to an embodiment of the present invention (hereinafter, sometimes referred to as an "embodiment assembly") will be described in more detail with reference to the drawings.

[0131] <composition> FIG. 14 is a schematic exploded perspective view showing an example of the configuration of an example assembly, and FIG. 15 is a schematic exploded perspective view of the example assembly 204 shown in FIG. 14 turned upside down. The example assembly 204 shown in FIGS. 14 and 15 has a similar configuration to the third assembly 203 shown in FIG. 11 except that the number of second holes 111a formed in the first sealing member 111 for inserting conductive members is four and the connection portion 120 does not include an internal connector 122. To facilitate understanding of the configuration of the example assembly, a portion of the partition wall 310 of the airtight container 300 is also depicted, as in FIGS. 2, 7, and 11. The sealant to be filled in the second holes 111a formed in the first sealing member 111 and the conductive members to be inserted into the second holes 111a are omitted from both FIGS. 14 and 15.

[0132] 14 and 15, the embodiment assembly 204 is an airtight connection assembly including a conductive member (not shown), a sealing portion 110, and a connection portion 120. The conductive member is a member that constitutes a passage for a signal or a fluid. The sealing portion 110 includes a first sealing member 111, which is an aluminum plate-like member having a shape capable of covering a first hole 311, which is a through-hole formed in a partition wall 310 of the airtight container 300, and a sealing material (not shown).

[0133] 16 is a schematic exploded perspective view showing the positional relationship between the recess formed on the surface of the first sealing member 111 of the embodiment assembly 204 shown in FIGS. 14 and 15 facing the airtight container 300 and the second sealing member 112. As shown in FIGS. 14 to 16, the surface of the first sealing member 111 of the embodiment assembly 204 facing the airtight container 300 has a circular recess corresponding to the shape of the O-ring serving as the second sealing member 112. This facilitates alignment of the O-ring when assembling the embodiment assembly 204 to the airtight container 300 and prevents misalignment of the O-ring. If there is a risk of a decrease in the airtightness of the airtight container 300 due to a gap between the illustrated bolt that secures the first sealing member 111 to the airtight container 300 and a through-hole formed in the partition wall 310 of the airtight container 300 for inserting the bolt, it is preferable to seal the gap with a known means such as a packing or a gasket.

[0134] As described above, the connection unit 120 included in the embodiment assembly 204 does not include an internal connector as the aforementioned connector, but only includes the external connector 121. The external connector 121 is a connector for electrically connecting the conductive member included in the embodiment assembly 204 to a conductive member included in another device or facility at an end of the conductive member on the external side of the airtight container 300. Furthermore, in a state where the embodiment assembly 204 is attached to the airtight container 300 (state A), the first sealing member 111 is formed with four second holes 111a, which are through holes formed to communicate with the first holes 311 of the airtight container 300. The conductive members are inserted one by one into these second holes 111a, and a sealant (not shown) is filled between the conductive members and the inner circumferential surfaces of the second holes 111a. This allows electrical signals and the like to be transmitted between the inside and outside of the airtight container 300 by the conductive member extending from the inside to the outside of the airtight container 300 while maintaining the airtightness of the airtight container 300.

[0135] In the embodiment assembly 204, the sealing unit 110 further includes a second sealing member 112 which is a member that surrounds the first hole 311 formed in the partition wall 310 of the airtight container 300 in the above-described state A and is disposed so as to be interposed between the partition wall 310 of the airtight container 300 and the first sealing member 111. In addition, the embodiment assembly 204 further includes a coupling unit 130 which includes a coupling member 131 which is a member configured to couple the external connector 121 and the first sealing member 111 to fix the positional relationship between the external connector 121 and the first sealing member 111.

[0136] The coupling member 131 included in the coupling section 130 of the embodiment assembly 204 comprises a connector holding member, which is a plate-shaped member for holding the external connector 121, and a pair of connector support members, which are plate-shaped members for fixing both ends of the holding member to the first sealing member 111; these members are integrally formed. The external connector 121 is fixed and held by the connector holding member with connection terminals inserted into through-holes formed in the plate-shaped connector holding member. That is, the external connector 121 illustrated in FIGS. 14 to 16 is a so-called "receptacle," and a commercially available general-purpose receptacle, for example, can be used as the external connector 121. A general-purpose receptacle only needs to have the functions of insulating and connecting terminals and does not need to have the sealing function to achieve airtightness, which provides a wider range of connector options than conventional hermetic connectors. Furthermore, general-purpose receptacles are generally available at low prices.

[0137] Next, an example of a procedure for assembling the embodiment assembly 204 having the above-described configuration will be described below with reference to FIG. 17. FIG. 17 is a schematic exploded perspective view showing a state in which the conductive members 210 connected to the external connector 121 included in the embodiment assembly 204 shown in FIGS. 14 to 16 are inserted into the first hole 311 formed in the partition wall 310 of the airtight container 300 and the second hole 111a formed in the first sealing member 111. Note that in FIG. 17 and the following description, only two conductive members 210 are mentioned for the purpose of making FIG. 17 easier to understand and for the purpose of explaining the procedure for assembling the embodiment assembly 204 in an easy-to-understand manner. However, it goes without saying that one conductive member 210 can be inserted into each of all the second holes 111a formed in the first sealing member 111, and a sealant can be filled between the inner circumferential surface of each second hole 111a and the conductive member 210 to seal the gap. Alternatively, if there are any second holes 111a formed in the first sealing member 111 that the conductive member 210 is not inserted through, the airtight container 300 can be made airtight by filling and sealing the second holes 111a with a sealing material.

[0138] 17, the conductive members 210 are connected to predetermined terminals of the external connector 121 (step A), the conductive members 210 are inserted into through holes formed in the coupling member 131, and the external connector 121 is fixed to the coupling member 131 with fastening members. Next, each of the conductive members 210 is inserted into each of two second holes 111a formed in the first sealing member 111 (step B). Then, the first sealing member 111 is fixed to a predetermined position on the opposite side of the coupling member 131 from the external connector 121 (step F). Next, a room-temperature curing silicone sealant (not shown) is filled between the inner circumferential surfaces of the individual second holes 111a and the conductive members 210, and the sealant is cured (step C).

[0139] The conductive member 210 protruding from the second hole 111a of the first sealing member 111 of the assembly thus assembled, which includes the external connector 121, the conductive member 210, the coupling member 131, the first sealing member 111, and the sealing material, is inserted into an O-ring serving as the second sealing member 112 and a first hole 311 formed in the partition wall 310 of the airtight container 300 (steps G and D). Then, in a state in which the O-ring is partially fitted into a recess formed on the surface of the first sealing member 111 facing the airtight container 300 and aligned (step H), the first sealing member 111 is fixed at a predetermined position on the partition wall 310 of the airtight container 300 by a fastening member, and the first hole 311 is closed by the first sealing member 111 (step E). That is, the example assembly 204 can be manufactured by a procedure similar to the manufacturing method (third method) of the airtight connection assembly according to the third embodiment of the present invention described above.

[0140] The end of the conductive member 210 opposite to the external connector 121 is connected to a device or facility (not shown) such as a sensor disposed inside the airtight container 300. This connection may be via the internal connector 122, as in the first to third assemblies 201 to 203 illustrated in FIGS. 2, 7, and 11. Alternatively, this connection may be direct connection between the conductive member 210 and a terminal of the device or facility, as in the first to third assemblies 201 to 203 illustrated in FIGS. 3, 8, and 12.

[0141] <effect> 14 to 17 is attached to the airtight container 300. A plug 450 is connected to the external connector 121 of the embodiment assembly 204 illustrated in Fig. 18, and a cable 460 is connected to the plug 450. This enables transmission and reception of electrical signals between, for example, a device or facility such as a sensor (not shown) disposed inside the airtight container 300 and a control device (not shown) disposed outside the airtight container 300.

[0142] 14 to 18 and the above description, in the embodiment assembly 204, the sealing portion 110 and the connecting portion 120 can be formed using readily available general-purpose components such as commercially available metal plates and connectors. As a result, the embodiment assembly 204 can maintain the airtightness of the airtight container 300 with a simple configuration, while enabling transmission and reception of electrical signals and the like between the inside and outside of the airtight container 300.

[0143] Moreover, in the embodiment assembly 204, the sealing part 110 further includes a second sealing member 112 which is a member that surrounds the first hole 311 in the above-described state A and is disposed so as to be interposed between the partition wall 310 of the airtight container 300 and the first sealing member 111. Therefore, even when the partition wall 310 and / or the first sealing member 111 of the airtight container 300 do not have sufficient flatness as described above, or when the partition wall 310 and / or the first sealing member 111 of the airtight container 300 are deformed due to stress acting in conjunction with the fixing of the first sealing member 111 to the partition wall 310 of the airtight container 300, sufficient airtightness can be achieved in the use of the airtight container 300 to which the embodiment assembly 204 is attached.

[0144] Furthermore, in the embodiment assembly 204, the external connector 121 and the first sealing member 111 are joined by a joining member 131, and the positional relationship between the external connector 121 and the first sealing member 111 is fixed. Therefore, even in cases where, for example, the external connector 121 and / or the conductive member 210 are able to move flexibly and therefore it becomes difficult to fix the embodiment assembly 204 to the airtight container 300, or where the conductive member 210 is damaged by being bent or deformed during assembly into the airtight container 300, problems such as reduced work efficiency and damage to the conductive member 210 can be reduced.

[0145] The effects achieved by the embodiment assembly 204 as described above are similarly achieved in an airtight container to which the embodiment assembly 204 is attached and in a vaporizer or the like that includes the airtight container.

[0146] For the purpose of explaining the present invention, several embodiments and examples having specific configurations have been described above, sometimes with reference to the accompanying drawings. However, the scope of the present invention should not be construed as being limited to these exemplary embodiments and examples, and it goes without saying that appropriate modifications can be made within the scope of the claims and the matters described in the specification. [Explanation of symbols]

[0147] 101 Unit 1 102 Unit 2 103 Unit 3 110 Sealing part 111 First sealing member 111a 2nd hole 112 Second sealing member 113 Encapsulating materials 120 Connection 121 (external) connector 122 (internal) connector 130 Joint 131 Connecting member 131a Connector holding member 131b Connector support member 201 1st Assembly 202 2nd Assembly 203 Third Assembly 204 Example Assembly 210 Conductive material 300 airtight container 301 1st container 302 Second container 303 Third container 310 Bulkhead 311 Hole 1 401 First Carburetor 410 Tank 420 Sensors 421, 422 signal lines 430 Outlet pipe 440 Introductory pipe 450 plug 460 Cable 510 Flow control device 520 flowmeter 530 Chamber

Claims

1. An airtight connection unit that enables transmission and reception of signals or fluids between the inside and outside of an airtight container via one or more conductive members that are inserted into a first hole that penetrates a partition wall of the airtight container, a sealing portion including a first sealing member that is a general-purpose member having a flat plate shape larger than the first hole and capable of covering the first hole; a connecting portion including a general-purpose connector that can be connected to either one or both ends of the conductive member and is a member separate from the conductive member; a coupling portion including a coupling member that is a member capable of coupling at least one of the connectors and the first sealing member to fix a positional relationship between the connector and the first sealing member; Equipped with second holes are formed through the first sealing member so that the conductive members inserted into the first holes can be further inserted individually; the number, size, and shape of the second holes are designed according to the number, thickness, and shape of the conductive members to be inserted through the second holes; the sealing portion further includes a sealant that is filled between the conductive member and the inner circumferential surface of the second hole to maintain airtightness, the insertion position of the conductive member in the second hole is not restricted by any member other than the sealing material; Airtight connection unit.

2. 2. The airtight connection unit according to claim 1, a second sealing member that surrounds the first hole and is capable of being interposed between the partition wall and the first sealing member; Airtight connection unit.

3. 3. An airtight connection assembly comprising the airtight connection unit according to claim 1 or 2 and the conductive member, the conductive members are individually inserted into the second holes, the sealing material is filled between the conductive member and the inner circumferential surface of the second hole, The connector is connected to one or both ends of the conductive member. Airtight connection assembly.

4. An airtight container comprising the airtight connection assembly according to claim 3, the first sealing member covers the first hole, thereby closing the first hole; the conductive member is inserted into the first hole via the second hole and extends from the inside to the outside of the airtight container; Airtight container.

5. The airtight container according to claim 4; a tank accommodated inside the airtight container; a sensor configured to output a detection signal corresponding to the amount and / or state of the gas and / or the gas raw material, which is a substance that generates the gas, contained inside the tank, and / or a heater configured to receive power and heat the gas raw material; A vaporizer comprising: The gas and / or the detection signal and / or the power are transmitted between the inside and the outside of the airtight container via the conductive member provided in the airtight connection assembly. Vaporizer.

6. A method for manufacturing an airtight connection assembly that enables transmission and reception of a signal or a fluid between the inside and the outside of an airtight container via one or more conductive members that are inserted into a first hole that penetrates a partition wall of the airtight container, comprising: The airtight connection assembly includes: a sealing portion including a first sealing member that is a general-purpose member having a flat plate shape larger than the first hole and capable of covering the first hole; a connecting portion including a general-purpose connector that can be connected to either one or both ends of the conductive member and is a member separate from the conductive member; The airtight connection assembly includes a coupling portion including a coupling member that couples at least one of the connectors and the first sealing member to fix a positional relationship between the connector and the first sealing member; Equipped with second holes are formed through the first sealing member so that the conductive members inserted into the first holes can be further inserted individually; the number, size, and shape of the second holes are designed according to the number, thickness, and shape of the conductive members to be inserted through the second holes; the sealing portion further includes a sealant that is filled between the conductive member and the inner circumferential surface of the second hole to maintain airtightness, the insertion position of the conductive member in the second hole is not restricted by any member other than the sealing material, The method for manufacturing the airtight connection assembly includes: connecting the connector to at least one end of the conductive member; Inserting the conductive members individually into the second holes; filling the sealant between the inner circumferential surface of the second hole and the conductive member; Inserting the conductive member into the first hole; fixing the first sealing member at a predetermined position of the partition wall to close the first hole with the first sealing member; and connecting at least one of the connectors and the first sealing member with the connecting member to fix a positional relationship between the connector and the first sealing member; Including, A method for manufacturing an assembly for an airtight connection.

7. A method for manufacturing an airtight connection assembly according to claim 6, comprising the steps of: the airtight connection assembly further includes a second sealing member that surrounds the first hole and is capable of being interposed between the partition wall and the first sealing member; The method for manufacturing the airtight connection assembly includes: Inserting the conductive member into the second sealing member; and disposing the second sealing member so as to surround the first hole and be interposed between the partition wall and the first sealing member; Further comprising: A method for manufacturing an assembly for an airtight connection.

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