Photoelectric conversion device, photoelectric conversion system, and mobile body

The photoelectric conversion device addresses crosstalk issues by using multiple signal lines and conductors to shield or transmit signals, enhancing the simultaneous readout of display and sensing signals with reduced noise and improved resolution.

JP7819146B2Active Publication Date: 2026-02-24CANON KK
View PDF 9 Cites 0 Cited by

Patent Information

Application Number
JP2023059094
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2023-03-31
Publication Date
2026-02-24
Estimated Expiration
2043-03-31

AI Technical Summary

Technical Problem

Crosstalk occurs between signal lines in photoelectric conversion devices due to parasitic capacitance, affecting noise components in the readout of signals from pixels.

Method used

The device employs a configuration with multiple column signal lines for each column, including first and second signal lines for different groups of rows, with conductors arranged between these lines to act as shields or signal lines during specific scanning periods, reducing crosstalk by maintaining a greater distance and using dummy pixels or potential supply units to manage signal interference.

Benefits of technology

This configuration effectively reduces noise components due to crosstalk, enabling simultaneous readout of display and sensing signals with improved resolution and reduced interference.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 00000013_0000
    Figure 00000013_0000
  • Figure 00000013_0001
    Figure 00000013_0001
  • Figure 00000013_0002
    Figure 00000013_0002
Patent Text Reader

Abstract

To reduce a noise component caused by a crosstalk which occurs between a plurality of signal lines disposed in rows.SOLUTION: In a photoelectric conversion device 100, a plurality of pixels 101 constitutes a plurality of rows and columns, a plurality of column signal lines 103 includes a plurality of first signal lines 301 and a plurality of second signal lines 302, and the plurality of rows includes a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group. A read-out circuit performs a first vertical scan for reading out signals of pixels in the plurality of first group rows via the plurality of first signal lines in the columns and a second vertical scan for reading out signals of pixels in the plurality of second group rows via the plurality of second signal lines in the columns. The second vertical scan is performed during a period from the start of the first vertical scan to the end of the first vertical scan. A conductor 303 which is not electrically connected to any one of the plurality of pixels during the period from the start of the first vertical scan to the end of the first vertical scan is disposed between the plurality of first signal lines and the plurality of second signal lines.SELECTED DRAWING: Figure 1
Need to check novelty before this filing date? Find Prior Art

Description

[Technical Field]

[0001] The present invention relates to a photoelectric conversion device, a photoelectric conversion system, and a moving object. [Background technology]

[0002] Patent Document 1 shows a configuration in which two signal lines are arranged corresponding to each pixel column, one signal line is connected to pixels in odd-numbered rows, and the other signal line is connected to pixels in even-numbered rows. One of the two column signal lines arranged in each pixel column is used to obtain sensing information, and the other is used to obtain a display image. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-33072 Summary of the Invention [Problem to be solved by the invention]

[0004] In a photoelectric conversion device in which a plurality of pixels are arranged in a plurality of rows and a plurality of columns, it is advantageous to provide two or more column signal lines for each column in order to speed up the readout of signals from the plurality of pixels. However, in the device described in Patent Document 1, crosstalk can occur due to parasitic capacitance between the signal lines for obtaining a display image and the signal lines for obtaining a sensing image.

[0005] An object of the present invention is to provide an advantageous technique for reducing noise components due to crosstalk occurring between a plurality of signal lines arranged in each column. [Means for solving the problem]

[0006] A first aspect of the present invention relates to a photoelectric conversion device including a plurality of pixels arranged to form a plurality of rows and a plurality of columns, a plurality of column signal lines, and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, wherein the plurality of column signal lines include a plurality of first signal lines and a plurality of second signal lines for each of the plurality of columns, and the plurality of rows include a plurality of first group rows that form a first group and a plurality of second group rows that form a second group, and the readout circuit includes a first vertical scan that reads out signals of pixels in the plurality of first group rows via the plurality of first signal lines of each column, and a readout circuit that reads out signals of pixels in the plurality of second group rows. and a second vertical scanning for reading out signals of pixels in a row different from the plurality of first group rows and the plurality of second group rows via the plurality of second signal lines of each column, the second vertical scanning being performed during a period from the start of the first vertical scanning to the end of the first vertical scanning, and conductors that are not electrically connected to any of the plurality of pixels are arranged between the plurality of first signal lines and the plurality of second signal lines, and in a first mode, the conductors in each column are used as third signal lines for the readout circuit to read out signals of pixels in a row different from the plurality of first group rows and the plurality of second group rows, and in a second mode, the conductors in each column are used as third signal lines for the plurality of first signal lines and the plurality of second signal lines. 2 It is used as a shield between signal lines. A second aspect of the present invention relates to a photoelectric conversion device including a plurality of pixels arranged to form a plurality of rows and a plurality of columns, a plurality of column signal lines, and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, wherein the plurality of column signal lines include a plurality of first signal lines, a plurality of second signal lines, and a third signal line for each of the plurality of columns, the plurality of rows including a plurality of first group rows that form a first group and a plurality of second group rows that form a second group, and the third signal line is arranged between the plurality of first signal lines and the plurality of second signal lines, and in a first mode, the third signal line is used to read out signals from at least some of the plurality of pixels by the readout circuit during a vertical scanning period, and in a second mode, the third signal line is not electrically connected to any of the plurality of pixels during the vertical scanning period. [Effects of the Invention]

[0007] According to the present invention, an advantageous technique is provided for reducing noise components due to crosstalk occurring between a plurality of signal lines arranged in each column. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view showing the configuration of a photoelectric conversion device according to a first embodiment. [Figure 2] FIG. 2 is a diagram schematically showing vertical scanning in the photoelectric conversion device according to the first embodiment. [Figure 3] FIG. 3 is a plan view showing the arrangement of a plurality of column signal lines in each column according to the first embodiment. [Figure 4] FIG. 10 is a plan view showing the arrangement of a plurality of column signal lines in each column according to the second embodiment. [Figure 5] FIG. 10 is a plan view showing the configuration of a photoelectric conversion device according to a third embodiment. [Figure 6] FIG. 10 is a plan view illustrating signal readout in a photoelectric conversion device according to a third embodiment. [Figure 7] FIG. 10 is a plan view illustrating signal readout in a photoelectric conversion device according to a third embodiment. [Figure 8]FIG. 13 is a plan view showing the arrangement of a plurality of column signal lines in each column according to the fourth embodiment. [Figure 9] FIG. 13 is a cross-sectional view showing the arrangement of a plurality of column signal lines in each column according to the fifth embodiment. [Figure 10] FIG. 13 is a plan view showing the configuration of a photoelectric conversion device according to a sixth embodiment. [Figure 11] FIG. 13 is a plan view showing the configuration of a photoelectric conversion device according to a seventh embodiment. [Figure 12] FIG. 1 is a diagram illustrating the configuration of a photoelectric conversion system. [Figure 13] FIG. 1 is a diagram illustrating the configuration of a moving body. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0010] FIG. 1 schematically illustrates a configuration of a photoelectric conversion device 100 according to a first embodiment of the present disclosure. The photoelectric conversion device 100 may be configured as, for example, an imaging device or an image sensor. The photoelectric conversion device 100 may include a plurality of pixels 101 arranged to form a plurality of rows and a plurality of columns. The plurality of pixels 101 may be understood as constituting a pixel array consisting of a plurality of rows and a plurality of columns. Although FIG. 1 illustrates only 12 pixels 101 arranged to form 6 rows and 2 columns, in practice, many more pixels 101 may be arranged to form many more rows and many more columns. Hereinafter, a row refers to a row formed by a plurality of pixels 101, and a column refers to a column formed by a plurality of pixels 101.

[0011] The photoelectric conversion device 100 may further include a plurality of column signal lines 103 and a readout circuit RD that reads out signals from the plurality of pixels 101 via the plurality of column signal lines 103. The readout circuit RD may include a vertical scanning circuit 102, a first signal processing circuit 104, and a second signal processing circuit 105. The vertical scanning circuit 102 vertically scans the plurality of pixels 101 (a pixel array configured of the pixels 101). More specifically, the vertical scanning circuit 102 selects a plurality of rows configured of the plurality of pixels 101 in a predetermined order according to a predetermined rule, and outputs signals from the pixels 101 in the selected row to the corresponding column signal lines 103. The pixels 101 in the selected row may also be understood as selected pixels 101. The first signal processing circuit 104 reads out signals output from the pixels 101 in the selected row via the plurality of column signal lines 103. The first signal processing circuit 104 may include an AD converter that AD converts the signals output from the pixels 101 in the selected row via the plurality of column signal lines 103. The second signal processing circuit 105 can process and output signals read out by the first signal processing circuit 104 from the pixels 101 in the selected row.

[0012] In the photoelectric conversion device 100, two or more column signal lines 103 are assigned to each of a plurality of columns. In the example of FIG. 1, six column signal lines 103 are assigned to each column. Therefore, in the example of FIG. 1, signals from six pixels 101 for each column can be simultaneously read out by the readout circuit RD (first signal processing circuit 104). In other words, in the example of FIG. 1, signals from six rows of pixels 101 can be simultaneously read out by the readout circuit RD (first signal processing circuit 104).

[0013] The photoelectric conversion device 100 includes a plurality of rows each composed of a plurality of pixels 101, including a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group. The first group rows refer to rows constituting the first group. The second group rows refer to rows constituting the second group. The first group rows constituting the first group and the second group rows constituting the second group are different rows. The pixels 101 in the first group rows may be used, for example, to generate image signals for display. The pixels 101 in the second group rows may be used, for example, to generate image signals for sensing. Sensing may include, for example, obtaining phase difference information for focusing on a subject (display object) and obtaining light intensity information for adjusting the exposure of the display object. Note that the present invention is not limited to the above example. For example, the pixels in the first group rows may be used as pixels for recording moving images, and the pixels in the second group rows may be used as pixels for displaying or monitoring moving images. Alternatively, for example, the pixels in the first group row may be used as pixels for displaying or recording moving images, and the pixels in the second group row may be used as pixels for motion detection.

[0014] FIG. 2 schematically shows vertical scanning in the photoelectric conversion device 100 of the first embodiment. Solid lines 201 indicate vertical scanning for reading out image signals for display from a plurality of pixels 101 in a first group row, which is referred to as first vertical scanning. Dotted lines 202 indicate vertical scanning for reading out image signals for sensing from a plurality of pixels 101 in a second group row, which is referred to as second vertical scanning. In the example of FIGS. 1 and 2, of the six column signal lines 103 provided in each column, the four left column signal lines 103 (also referred to as first signal lines 301 for distinction) are used to read out image signals for display. Furthermore, of the six column signal lines 103 provided in each column, the two right column signal lines 103 (also referred to as second signal lines 302 for distinction) are used to read out image signals for sensing. In each column, the four column signal lines 103 (first signal lines 301) on the left side are each electrically connected to one of four pixels 101 selected from six pixels 101 arranged in different rows. In addition, in each column, the two column signal lines 103 (second signal lines 302) on the right side are each electrically connected to one of the remaining two pixels 101 selected from six pixels 101 arranged in different rows.

[0015] With this configuration, readout of image signals for display from the pixels 101 in the plurality of first group rows and readout of image signals for sensing from the pixels 101 in the plurality of second group rows can be performed simultaneously or in parallel. From another perspective, the second vertical scanning for reading out image signals for sensing, indicated by the dotted line 202, can be performed in the period from the start to the end of the first vertical scanning for reading out image signals for display, indicated by the solid line 201. From yet another perspective, the first vertical scanning and the second vertical scanning are performed in parallel.

[0016] In this example, the number of column signal lines 103 for reading out pixel signals for display is greater than the number of column signal lines 103 for reading out pixel signals for sensing. However, conversely, the number of column signal lines 103 for reading out pixel signals for display may be less than the number of column signal lines 103 for reading out pixel signals for sensing. In this case, the first vertical scanning for reading out image signals for sensing can be performed during the period from the start of the second vertical scanning for reading out image signals for display to the end of the second vertical scanning. Alternatively, the number of column signal lines 103 for reading out pixel signals for display may be the same as the number of column signal lines 103 for reading out pixel signals for sensing.

[0017] In the example of FIG. 2, the number of column signal lines 103 (second signal lines 302) for reading out pixel signals for sensing is half the number of column signal lines 103 (first signal lines 301) for reading out pixel signals for display. Therefore, in one vertical scanning period for reading out pixel signals for display, pixel signals for sensing are read out twice from each pixel 101 for sensing. across It can be read out.

[0018] 1, four pixels 101 arranged consecutively in the column direction are used as display pixels 101, and two pixels 101 arranged consecutively in the column direction are used as sensing pixels 101. However, a plurality of sensing pixels 101 may be arranged dispersedly among a row of a plurality of display pixels 101. Such an arrangement is advantageous for achieving high resolution for display images and sensing images.

[0019] Consider a case where one of the plurality of column signal lines 103 (first signal line 301) for reading out image signals for display and one of the plurality of column signal lines 103 (second signal line 302) for reading out image signals for sensing are arranged adjacent to each other. In this case, during a period in which a first vertical scan for reading out pixel signals for display and a second vertical scan for reading out pixel signals for sensing are performed in parallel, there occurs a timing when crosstalk between the adjacent first signal line 301 and second signal line 302 becomes a problem.

[0020] For example, at time t1 in FIG. 2, the row (pixels 101) from which the image signal for display is read out and the row (pixels 101) from which the pixel signal for sensing is read out are quite far apart. Therefore, at time t1, it is quite likely that the image signal for sensing is a high-luminance signal and the image signal for display is a low-luminance signal. If the first signal line 301 and the second signal line 302 are adjacent to each other at time t1, the image signal for sensing and the image signal for display may affect each other due to crosstalk between the first signal line 301 and the second signal line 302. Note that, since signals are supplied to the multiple first signal lines 301 from pixels 101 located in adjacent positions (rows), the signal intensities are similar to each other, and the effect of crosstalk is negligible. Similarly, since signals are supplied to the multiple second signal lines 302 from pixels 101 located in adjacent positions (rows), the signal intensities are similar to each other, and the effect of crosstalk is negligible.

[0021] FIG. 3 illustrates an example of the arrangement of the column signal lines 103 in each column. As described above, the column signal lines 103 include a plurality of first signal lines 301 and a plurality of second signal lines 302 for each of the columns configured by the plurality of pixels 101 included in the photoelectric conversion device 100. The readout circuit RD performs a first vertical scan to read out signals from the pixels 101 in the first group rows via the plurality of first signal lines 301 in each column, and a second vertical scan to read out signals from the pixels 101 in the second group rows via the plurality of second signal lines 302 in each column. The second vertical scan is performed during the period from the start of the first vertical scan to the end of the first vertical scan. A conductor 303 is arranged between the plurality of first signal lines 301 and the plurality of second signal lines 302. The plurality of first signal lines 301 and the plurality of second signal lines 302 may be arranged on the same wiring layer or on different wiring layers. The conductor 303 is not electrically connected to any of the plurality of pixels 101 at least during the period from the start of the first vertical scan to the end of the first vertical scan.

[0022] A fixed potential may be supplied to the conductor 303 from the potential supply unit 111. The potential supply unit 111 may be, for example, a dummy pixel from which no signal is read out at least during the period from the start of the first vertical scanning to the end of the first vertical scanning. The dummy pixel may be electrically connected to the conductor 303 at least during the period from the start of the first vertical scanning to the end of the first vertical scanning. Alternatively, the potential supply unit 111 may be, for example, a potential supply line such as a power supply line or a ground line. A switch may be provided between the potential supply unit 111 and the conductor 303, and the switch may be controlled by a control unit (or a readout circuit RD) (not shown). The conductor 303 may be used as a signal line for transmitting signals during periods other than the period from the start of the first vertical scanning to the end of the first vertical scanning.

[0023] The multiple first signal lines 301 can be arranged side by side without any other conductive lines (second signal lines 302, conductors 303) in between. The multiple second signal lines 302 can be arranged side by side without any other conductive lines (first signal lines 301, conductors 303) in between.

[0024] In the above configuration, the shortest distance between the first structure consisting of the plurality of first signal lines 301 and the second structure consisting of the plurality of second signal lines 302 is greater than the shortest distance between the plurality of first signal lines 301 and the shortest distance between the plurality of second signal lines 302. Such a configuration is advantageous for reducing crosstalk between the plurality of first signal lines 301 and the plurality of second signal lines 302, particularly crosstalk between adjacent first signal lines 301 and second signal lines 302. Furthermore, the conductor 303 is also advantageous for reducing crosstalk between the plurality of first signal lines 301 and the plurality of second signal lines 302, particularly crosstalk between adjacent first signal lines 301 and second signal lines 302.

[0025] A second conductor 303′ may be arranged between two adjacent columns, in other words, between the column signal lines 103 of a given column and the column signal lines 103 of an adjacent column. A fixed potential may be supplied to the second conductor 303′ from a second potential supply unit (not shown) similar to the potential supply unit 111. The second potential supply unit may be, for example, a dummy pixel from which no signal is read out at least during the period from the start of the first vertical scanning to the end of the first vertical scanning. The dummy pixel may be electrically connected to the second conductor 303′ at least during the period from the start of the first vertical scanning to the end of the first vertical scanning. Alternatively, the second potential supply unit may be, for example, a potential supply line such as a power supply line or a ground line. A switch may be provided between the second potential supply unit and the second conductor 303′, and the switch may be controlled by a control unit (or a readout circuit RD) (not shown). The second conductor 303' may be used as a signal line for transmitting signals during periods other than the period from the start to the end of the first vertical scanning.

[0026] The configuration of the photoelectric conversion device 100 of the second embodiment will be described below with reference to Fig. 4. Matters not mentioned in the second embodiment may follow those of the first embodiment. Fig. 4 illustrates an example of the arrangement of multiple column signal lines 103 in each column of the photoelectric conversion device 100 of the second embodiment.

[0027] In the second embodiment, in two adjacent columns, the arrangement of the multiple first signal lines 301 and the multiple second signal lines 302 is line-symmetrical with respect to a virtual line VL extending in the column direction between the two columns. That is, in the second embodiment, the multiple second signal lines 302 in a certain column are adjacent to the second signal lines 302 in the adjacent column without any first signal lines 301 in between. Similarly, in the second embodiment, in two adjacent columns, the multiple first signal lines 301 in a certain column (the column on the right in FIG. 4) are adjacent to the first signal lines 301 in the adjacent column (a column not shown in FIG. 4 to the right of the right column) without any second signal lines 302 in between.

[0028] In the second embodiment, a conductor (corresponding to the second conductor 303′ in the first embodiment) is not arranged between two columns, i.e., between the second signal line 302 in the column on the left side of the virtual line VL and the second signal line 302 in the column on the right side of the virtual line VL in FIG. 4 . However, in the second embodiment, the second signal lines 302 or the first signal lines 301 are adjacent to each other between two columns. In other words, the second signal lines 302 for reading out image signals for sensing or the first signal lines 301 for reading out image signals for display are adjacent to each other between two columns. Therefore, in the second embodiment, the problem of crosstalk between two columns is acceptable. A configuration in which no conductor is arranged between two columns is effective in reducing the overall area of ​​the photoelectric conversion device 100.

[0029] The configuration of a photoelectric conversion device 100 according to the third embodiment will be described below with reference to FIGS. 5, 6, and 7. Matters not mentioned in the second embodiment may follow those of the first embodiment. FIG. 5 illustrates an example of the arrangement of multiple column signal lines 103 in each column of the photoelectric conversion device 100 according to the third embodiment. The photoelectric conversion device 100 according to the third embodiment can operate in any of multiple modes, including a first mode and a second mode. FIG. 6 schematically illustrates operation in the first mode, and FIG. 7 schematically illustrates operation in the second mode.

[0030] In the first mode, the conductors 303 of each column are used as third signal lines by the readout circuit RD to read out signals from pixels in a row different from the plurality of first group rows and the plurality of second group rows. In the second mode, the conductors 303 of each column are used as shields between the plurality of first signal lines 301 and the plurality of second signal lines 302. In the second mode, the readout circuit RD performs a first vertical scan and also performs a second vertical scan during a period from the start of the first vertical scan to the end of the first vertical scan. The operation of the second mode is similar to the function of the first embodiment. In the second mode, for example, the potential supply unit 111 is electrically connected to the conductors 303, and a fixed potential can be supplied from the potential supply unit 111 to the conductors 303.

[0031] The first mode can also be understood as a mode in which the conductor 303 as the third signal line is used by the readout circuit RD to read out signals from at least some of the multiple pixels 101 during a vertical scanning period. The second mode can also be understood as a mode in which the conductor 303 as the third signal line is not electrically connected to any of the multiple pixels 101 during a vertical scanning period.

[0032] The potential supply unit 111 may be, for example, a dummy pixel from which no signal is read out at least during the period from the start of the first vertical scan to the end of the first vertical scan. The dummy pixel may be electrically connected to the conductor 303 at least during the period from the start of the first vertical scan to the end of the first vertical scan in the second mode. Alternatively, the potential supply unit 111 may be, for example, a potential supply line such as a power supply line or a ground line. A switch may be provided between the potential supply unit 111 and the conductor 303, and the switch may be controlled by a control unit (or a readout circuit RD) (not shown).

[0033] The configuration of a photoelectric conversion device 100 according to the fourth embodiment will be described below with reference to Fig. 8. The fourth embodiment is an improved version of the third embodiment, and matters not mentioned in the fourth embodiment may follow those of the third embodiment. Fig. 8 illustrates an example of the arrangement of multiple column signal lines 103 in each column of the photoelectric conversion device 100 according to the fourth embodiment.

[0034] In the fourth embodiment, in two adjacent columns, the arrangement of the multiple first signal lines 301 and the multiple second signal lines 302 is line-symmetrical with respect to a virtual line VL extending in the column direction between the two columns. That is, in the fourth embodiment, the multiple second signal lines 302 in a certain column are adjacent to the second signal lines 302 in the adjacent column without any first signal lines 301 in between. Similarly, in the fourth embodiment, in two adjacent columns, the multiple first signal lines 301 in a certain column (the column on the right in FIG. 8) are adjacent to the first signal lines 301 in the adjacent column (a column not shown in FIG. 8 to the right of the right column) without any second signal lines 302 in between.

[0035] In the fourth embodiment, a conductor (corresponding to the second conductor 303′ in the third embodiment) is not arranged between two columns, i.e., in FIG. 8, between the second signal line 302 in the column on the left side of the virtual line VL and the second signal line 302 in the column on the right side of the virtual line VL. However, in the fourth embodiment, the second signal lines 302 or the first signal lines 301 are adjacent to each other between two columns. In other words, the second signal lines 302 for reading out image signals for sensing or the first signal lines 301 for reading out image signals for display are adjacent to each other between two columns. Therefore, in the fourth embodiment, the problem of crosstalk between two columns is tolerable. A configuration in which no conductor is arranged between two columns is effective in reducing the overall area of ​​the photoelectric conversion device 100.

[0036] The configuration of the photoelectric conversion device 100 of the fifth embodiment will be described below with reference to Fig. 9. Matters not mentioned in the fifth embodiment may follow those of the first embodiment. Fig. 9 illustrates an example of the arrangement of multiple column signal lines 103 in each column of the photoelectric conversion device 100 of the fifth embodiment.

[0037] Each pixel 101 may include a photoelectric conversion unit (e.g., a photodiode), a transistor, a floating diffusion, etc. The photoelectric conversion unit, the source and drain of the transistor, the floating diffusion, etc. are arranged in a semiconductor layer 902. A microlens 901 may be arranged on a first surface S1 side of the semiconductor layer 902. A wiring structure 903 may be arranged on a second surface S2 side of the semiconductor layer 902. A plurality of first signal lines 301, a plurality of second signal lines, and one or more conductors 303 may be arranged in the wiring structure 903. The plurality of first signal lines 301, the plurality of second signal lines, and the one or more conductors 303 may be electrically insulated from each other by an interlayer insulating film. A plurality of first signal lines 301 are arranged in a first wiring layer L1, a plurality of second signal lines 302 are arranged in a second wiring layer L2, and one or a plurality of conductors 303 are arranged between the first wiring layer L1 and the second wiring layer L2. A single conductor 303 may be arranged between the first wiring layer L1 and the second wiring layer L2.

[0038] The configuration of the photoelectric conversion device 100 of the sixth embodiment will be described below with reference to Fig. 10. Matters not mentioned in the sixth embodiment may follow those of the first embodiment. Fig. 10 illustrates an example of the arrangement of multiple column signal lines 103 in each column of the photoelectric conversion device 100 of the sixth embodiment.

[0039] The photoelectric conversion device 100 of the sixth embodiment may have a configuration in which, for example, the conductor 303 is removed from the photoelectric conversion device 100 of the first embodiment. The photoelectric conversion device 100 of the sixth embodiment may operate in the same manner as the photoelectric conversion device 100 of the first embodiment. The shortest distance d3 between a first structure consisting of a plurality of first signal lines 301 and a second structure consisting of a plurality of second signal lines 302 is greater than the shortest distance d1 between the plurality of first signal lines 301 and the shortest distance d2 between the plurality of second signal lines 302. Such a configuration is advantageous for reducing crosstalk between the plurality of first signal lines 301 and the plurality of second signal lines 302, particularly between adjacent first signal lines 301 and second signal lines 302.

[0040] The configuration of the photoelectric conversion device 100 of the seventh embodiment will be described below with reference to Fig. 11. Matters not mentioned in the seventh embodiment may follow those of the second embodiment. Fig. 11 illustrates an example of the arrangement of multiple column signal lines 103 in each column of the photoelectric conversion device 100 of the seventh embodiment.

[0041] The photoelectric conversion device 100 of the seventh embodiment may have a configuration in which the conductor 303 is removed from the photoelectric conversion device 100 of the second embodiment, for example. The photoelectric conversion device 100 of the seventh embodiment may operate in the same manner as the photoelectric conversion device 100 of the second embodiment. The shortest distance d3 between a first structure consisting of a plurality of first signal lines 301 and a second structure consisting of a plurality of second signal lines 302 is greater than the shortest distance d1 between the plurality of first signal lines 301 and the shortest distance d2 between the plurality of second signal lines 302. Such a configuration is advantageous for reducing crosstalk between the plurality of first signal lines 301 and the plurality of second signal lines 302, particularly between adjacent first signal lines 301 and second signal lines 302.

[0042] An example of a photoelectric conversion system using the photoelectric conversion devices of the above embodiments will be described below.

[0043] FIG. 12 is a block diagram showing the configuration of a photoelectric conversion system 1200 according to this embodiment. The photoelectric conversion system 1200 of this embodiment includes a photoelectric conversion device 1215. Here, any of the photoelectric conversion devices 100 described in the above embodiments can be applied to the photoelectric conversion device 1215. The photoelectric conversion system 1200 can be used, for example, as an imaging system. Specific examples of imaging systems include a digital still camera, a digital camcorder, and a surveillance camera. FIG. 12 shows an example of a digital still camera as the photoelectric conversion system 1200.

[0044] 12 includes a photoelectric conversion device 1215, a lens 1213 that forms an optical image of a subject on the photoelectric conversion device 1215, an aperture 1214 that adjusts the amount of light passing through the lens 1213, and a barrier 1212 that protects the lens 1213. The lens 1213 and the aperture 1214 form an optical system that focuses light on the photoelectric conversion device 1215.

[0045] The photoelectric conversion system 1200 includes a signal processing unit 1216 that processes an output signal output from a photoelectric conversion device 1215. The signal processing unit 1216 performs signal processing operations, performing various corrections and compression on an input signal as necessary and outputting the signal. The photoelectric conversion system 1200 also includes a buffer memory unit 1206 for temporarily storing image data and an external interface unit (external I / F unit) 1209 for communicating with an external computer or the like. The photoelectric conversion system 1200 also includes a recording medium 1211 such as a semiconductor memory for recording or reading image data, and a recording medium control interface unit (recording medium control I / F unit) 1210 for recording or reading data from the recording medium 1211. The recording medium 1211 may be built into the photoelectric conversion system 1200 or may be removable. Communication between the recording medium control I / F unit 1210 and the recording medium 1211 and communication from the external I / F unit 1209 may be performed wirelessly.

[0046] The photoelectric conversion system 1200 further includes an overall control and calculation unit 1208 that performs various calculations and controls the entire digital still camera, and a timing generation unit 1217 that outputs various timing signals to the photoelectric conversion device 1215 and the signal processing unit 1216. Here, timing signals and the like may be input from an external source, and the photoelectric conversion system 1200 only needs to include at least the photoelectric conversion device 1215 and the signal processing unit 1216 that processes the output signal output from the photoelectric conversion device 1215. As explained in the fourth embodiment, the timing generation unit 1217 may be mounted on the photoelectric conversion device. The overall control and calculation unit 1208 and the timing generation unit 1217 may be configured to perform some or all of the control functions of the photoelectric conversion device 1215.

[0047] The photoelectric conversion device 1215 outputs an image signal to the signal processing unit 1216. The signal processing unit 1216 performs predetermined signal processing on the image signal output from the photoelectric conversion device 1215 and outputs image data. The signal processing unit 1216 also generates an image using the image signal. The signal processing unit 1216 may also perform distance measurement calculations on the signal output from the photoelectric conversion device 1215. The signal processing unit 1216 and the timing generating unit 1217 may be mounted on the photoelectric conversion device. That is, the signal processing unit 1216 and the timing generating unit 1217 may be provided on the substrate on which the pixels are arranged, or may be provided on a separate substrate. By configuring an imaging system using the photoelectric conversion device of each of the above-described embodiments, an imaging system capable of acquiring higher quality images can be realized.

[0048] The photoelectric conversion system and the moving body of this embodiment will be described with reference to Fig. 13. Fig. 13 is a schematic diagram showing an example of the configuration of the photoelectric conversion system and the moving body according to this embodiment. In this embodiment, an example of an in-vehicle camera is shown as the photoelectric conversion system.

[0049] FIG. 13 shows an example of a vehicle system and a photoelectric conversion system mounted thereon that performs image capture. The photoelectric conversion system 1301 includes a photoelectric conversion device 1302, an image preprocessing unit 1315, an integrated circuit 1303, and an optical system 1314. The optical system 1314 forms an optical image of a subject on the photoelectric conversion device 1302. The photoelectric conversion device 1302 converts the optical image of the subject formed by the optical system 1314 into an electrical signal. The photoelectric conversion device 1302 is the photoelectric conversion device 100 of any of the above-described embodiments. The image preprocessing unit 1315 performs predetermined signal processing on the signal output from the photoelectric conversion device 1302. The function of the image preprocessing unit 1315 may be incorporated into the photoelectric conversion device 1302. The photoelectric conversion system 1301 is provided with at least two sets of an optical system 1314, a photoelectric conversion device 1302, and an image pre-processing unit 1315, and the output from each set of image pre-processing unit 1315 is input to the integrated circuit 1303.

[0050] The integrated circuit 1303 is an integrated circuit for use in an imaging system, and includes an image processing unit 1304 including a memory 1305, an optical distance measurement unit 1306, a distance measurement calculation unit 1307, an object recognition unit 1308, and an abnormality detection unit 1309. The image processing unit 1304 performs image processing such as development and defect correction on the output signal of the image pre-processing unit 1315. The memory 1305 temporarily stores captured images and stores the positions of defects in the captured pixels. The optical distance measurement unit 1306 focuses on the subject and measures the distance. The distance measurement calculation unit 1307 calculates distance information from multiple image data acquired by multiple photoelectric conversion devices 1302. The object recognition unit 1308 recognizes subjects such as cars, roads, signs, and people. If the abnormality detection unit 1309 detects an abnormality in the photoelectric conversion device 1302, it notifies the main control unit 1313 of the abnormality.

[0051] The integrated circuit 1303 may be realized by dedicated hardware, a software module, or a combination thereof. It may also be realized by an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), or the like, or a combination thereof.

[0052] The main control unit 1313 supervises and controls the operations of the photoelectric conversion system 1301, the vehicle sensor 1310, the control unit 1320, etc. It is also possible to adopt a method in which the main control unit 1313 is not provided, and the photoelectric conversion system 1301, the vehicle sensor 1310, and the control unit 1320 each have their own communication interface and send and receive control signals via a communication network (for example, CAN standard).

[0053] The integrated circuit 1303 has a function of receiving a control signal from the main control unit 1313 or transmitting a control signal or a set value to the photoelectric conversion device 1302 by its own control unit.

[0054] The photoelectric conversion system 1301 is connected to a vehicle sensor 1310 and can detect the vehicle's driving conditions, such as vehicle speed, yaw rate, and steering angle, as well as the conditions of the environment outside the vehicle and other vehicles and obstacles. The vehicle sensor 1310 also serves as a distance information acquisition means for acquiring distance information to an object. The photoelectric conversion system 1301 is also connected to a driving assistance control unit 1311 that performs various driving assistance functions, such as automatic steering, automatic cruising, and collision prevention functions. In particular, the collision determination function determines whether or not a collision with another vehicle or obstacle has occurred based on the detection results of the photoelectric conversion system 1301 and the vehicle sensor 1310. This allows for avoidance control when a collision is predicted, and activation of safety devices in the event of a collision.

[0055] The photoelectric conversion system 1301 is also connected to an alarm device 1312 that issues an alarm to the driver based on the determination result of the collision determination unit. For example, if the collision determination unit determines that there is a high possibility of a collision, the main control unit 1313 performs vehicle control to avoid the collision and mitigate damage by applying the brakes, releasing the accelerator, suppressing engine output, etc. The alarm device 1312 warns the user by sounding an alarm or the like, displaying alarm information on a display screen of a car navigation system or meter panel, vibrating the seat belt or steering wheel, etc.

[0056] The present specification and drawings include the following disclosure. (Item 1) A photoelectric conversion device comprising: a plurality of pixels arranged to form a plurality of rows and a plurality of columns; a plurality of column signal lines; and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, the plurality of column signal lines include a plurality of first signal lines and a plurality of second signal lines for each of the plurality of columns; the plurality of rows includes a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group, the readout circuit performs a first vertical scan to read out signals of pixels in the plurality of first group rows via the plurality of first signal lines of each column, and a second vertical scan to read out signals of pixels in the plurality of second group rows via the plurality of second signal lines of each column, the second vertical scan being performed during a period from the start of the first vertical scan to the end of the first vertical scan; a conductor that is not electrically connected to any of the plurality of pixels during a period from the start of the first vertical scanning to the end of the first vertical scanning is disposed between the plurality of first signal lines and the plurality of second signal lines; A photoelectric conversion device characterized by: (Item 2) During the period, a fixed potential is supplied to the conductor. 2. The photoelectric conversion device according to item 1, (Item 3) further comprising dummy pixels from which no signal is read out during the period; During the period, the conductor is electrically connected to the dummy pixel. 2. The photoelectric conversion device according to item 1, (Item 4) A second conductor is disposed between two adjacent rows. 4. The photoelectric conversion device according to any one of items 1 to 3, characterized in that: (Item 5) In two adjacent columns, the arrangement of the plurality of first signal lines and the plurality of second signal lines is symmetrical with respect to a virtual line extending in the column direction between the two columns. 4. The photoelectric conversion device according to any one of items 1 to 3, characterized in that: (Item 6) No conductor is disposed between the two rows. 6. The photoelectric conversion device according to item 5, (Item 7) in a first mode, the conductor of each column is used as a third signal line for the readout circuit to read out signals of pixels in a row different from the plurality of first group rows and the plurality of second group rows; In the second mode, the conductors in each column are used as shields between the first signal lines. 5. The photoelectric conversion device according to any one of items 1 to 4, characterized in that: (Item 8) In the second mode, the readout circuit performs the first vertical scanning and also performs the second vertical scanning during the period from the start of the first vertical scanning to the end of the first vertical scanning. 8. The photoelectric conversion device according to item 7, (Item 9) In the second mode, a fixed potential is applied to the conductor. 9. The photoelectric conversion device according to item 7 or 8, (Item 10) the plurality of first signal lines and the plurality of second signal lines are arranged in the same wiring layer; 10. The photoelectric conversion device according to any one of items 1 to 9, characterized in that: (Item 11) the plurality of first signal lines are arranged in a first wiring layer; the plurality of second signal lines are arranged in a second wiring layer; the conductor is disposed between the first wiring layer and the second wiring layer; 10. The photoelectric conversion device according to any one of items 1 to 9, characterized in that: (Item 12) A photoelectric conversion device comprising: a plurality of pixels arranged to form a plurality of rows and a plurality of columns; a plurality of column signal lines; and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, the plurality of column signal lines include, for each of the plurality of columns, a plurality of first signal lines, a plurality of second signal lines, and a third signal line; the plurality of rows includes a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group, the third signal line is disposed between the plurality of first signal lines and the plurality of second signal lines, and is used to read out signals from some of the plurality of pixels by the readout circuit during a vertical scanning period in a first mode, and is not electrically connected to any of the plurality of pixels during a vertical scanning period in a second mode; A photoelectric conversion device characterized by: (Item 13) A photoelectric conversion device comprising: a plurality of pixels arranged to form a plurality of rows and a plurality of columns; a plurality of column signal lines; and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, the plurality of column signal lines include a plurality of first signal lines and a plurality of second signal lines for each of the plurality of columns; the plurality of rows includes a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group, the readout circuit performs a first vertical scan to read out signals of pixels in the plurality of first group rows via the plurality of first signal lines of each column, and a second vertical scan to read out signals of pixels in the plurality of second group rows via the plurality of second signal lines of each column, the second vertical scan being performed during a period from the start of the first vertical scan to the end of the first vertical scan; a shortest distance between a first structure consisting of the plurality of first signal lines and a second structure consisting of the plurality of second signal lines is greater than a shortest distance between the plurality of first signal lines and a shortest distance between the plurality of second signal lines; A photoelectric conversion device characterized by: (Item 14) The photoelectric conversion device according to any one of items 1 to 13, a signal processing unit that processes a signal output from the photoelectric conversion device; A photoelectric conversion system comprising: (Item 15) The photoelectric conversion device according to any one of items 1 to 13, a distance information acquisition means for acquiring distance information to an object from distance measurement information based on a signal from the photoelectric conversion device, A moving body further comprising a control means for controlling the moving body based on the distance information.

[0057] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0058] 101: pixel, 102: vertical scanning circuit, 103: column signal line, 104: first signal processing circuit, 105: second signal processing circuit, RD: readout circuit, 301: first signal line, 302: second signal line, 303, 303': conductor

Claims

1. A photoelectric conversion device comprising: a plurality of pixels arranged to form a plurality of rows and a plurality of columns; a plurality of column signal lines; and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, the plurality of column signal lines include a plurality of first signal lines and a plurality of second signal lines for each of the plurality of columns; the plurality of rows includes a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group, the readout circuit performs a first vertical scan to read out signals of pixels in the plurality of first group rows via the plurality of first signal lines of each column, and a second vertical scan to read out signals of pixels in the plurality of second group rows via the plurality of second signal lines of each column, the second vertical scan being performed during a period from the start of the first vertical scan to the end of the first vertical scan; a conductor that is not electrically connected to any of the plurality of pixels during a period from the start of the first vertical scanning to the end of the first vertical scanning is disposed between the plurality of first signal lines and the plurality of second signal lines; in a first mode, the conductor of each column is used as a third signal line for the readout circuit to read out signals of pixels in a row different from the plurality of first group rows and the plurality of second group rows; In a second mode, the conductors of each column are used as a shield between the first signal lines and the second signal lines. A photoelectric conversion device characterized by:

2. In the second mode, the readout circuit performs the first vertical scanning and also performs the second vertical scanning during the period from the start of the first vertical scanning to the end of the first vertical scanning.

2. The photoelectric conversion device according to claim 1.

3. In the second mode, a fixed potential is applied to the conductor.

2. The photoelectric conversion device according to claim 1.

4. A photoelectric conversion device comprising: a plurality of pixels arranged to form a plurality of rows and a plurality of columns; a plurality of column signal lines; and a readout circuit that reads out signals from the plurality of pixels via the plurality of column signal lines, the plurality of column signal lines include, for each of the plurality of columns, a plurality of first signal lines, a plurality of second signal lines, and a third signal line; the plurality of rows includes a plurality of first group rows constituting a first group and a plurality of second group rows constituting a second group, the third signal line is disposed between the plurality of first signal lines and the plurality of second signal lines, and is used to read out signals from at least some of the plurality of pixels by the readout circuit during a vertical scanning period in a first mode, and is not electrically connected to any of the plurality of pixels during a vertical scanning period in a second mode; A photoelectric conversion device characterized by:

5. The photoelectric conversion device according to any one of claims 1 to 4, a signal processing unit that processes a signal output from the photoelectric conversion device; A photoelectric conversion system comprising:

6. The photoelectric conversion device according to any one of claims 1 to 4, a distance information acquisition means for acquiring distance information to an object from distance measurement information based on a signal from the photoelectric conversion device, A moving body further comprising a control means for controlling the moving body based on the distance information.

Citation Information

Patent Citations

  • Solid-state imaging device

    JP2011082813A

  • Solid-state imaging apparatus

    JP2013168634A

  • Solid state image sensor

    JP2016195186A

  • Imaging apparatus

    JP2016213795A

  • Imaging apparatus

    JP2017126925A