Method and apparatus for processing workpiece

Abstract

To repair a work-affected layer including damage caused by grinding.SOLUTION: After a grinding step, a melting step is carried out, a recess 200 of a wafer 100, which is a grinding surface in the grinding step, is irradiated with a laser beam and melted. Therefore, it is possible to easily flatten the recess 200, which is difficult to hit with a polishing pad, and to easily repair a work-affected layer including the damage caused in the grinding step. Also, a boundary region 220 of the recess 200 is irradiated with a second laser beam 402. This melts and cools the boundary region 220, such that even when a crack is formed in the boundary region 220 during the grinding step, the crack can be joined. Therefore, it is possible to reduce the possibility that the wafer 100 will be cracked or chipped starting from this crack in the subsequent steps.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a method and apparatus for thinning a workpiece. [Background technology]

[0002] There is a processing method in which the center of a workpiece is ground to form a recess and a protrusion surrounding the recess. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-071286 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the ground surface of the workpiece is prone to small cracks, chips, and scratches caused by grinding, which can lead to cracks and breakage during transportation or subsequent processes after grinding, and can also reduce the die's flexural strength when the workpiece is cut into chips. Stress tends to concentrate particularly at the boundaries between the concave and convex portions, making them more susceptible to fracture than other areas. Therefore, if cracks or small chips occur near the boundaries, the convex portions may break from the boundaries during transportation or subsequent processes, potentially propagating to the central region where the device is formed.

[0005] The object of the present invention is to repair a process-affected layer including damage such as cracks, scratches, and chips caused by grinding in a processing method in which a recess and a protrusion surrounding the recess are formed. [Means for solving the problem]

[0006] The method for processing a workpiece (the present processing method) of the present invention comprises a holding step of holding the workpiece by a holding table, a grinding step of grinding the center of the workpiece held on the holding table with a grinding wheel to form a recess in the center and a protrusion surrounding the recess on the outer periphery, and a melting step of irradiating a laser beam on the grinding surface in the grinding step to melt the surface, wherein the melting step comprises: rotating the holding table holding the workpiece; The first laser beam is reflected and dispersed by the vibrating galvanometer mirror. of the workpiece irradiating the bottom surface of the recess; and Every time the holding table rotates The method includes changing the tilt of the galvanometer mirror to change the irradiation range of the first laser beam on the bottom surface of the recess. In the present processing method, the melting step may include irradiating a boundary region including the boundary between the recessed portion and the protruding portion and a periphery of the boundary with a second laser beam. In this processing method, the boundary region may include at least one of an inner side surface of the protrusion and an outer peripheral portion of the recess that is continuous with the side surface. In this processing method, the grinding step includes a vertical grinding step in which the grinding wheel is moved vertically relative to the holding table, and a horizontal movement step in which the grinding wheel is moved horizontally relative to the holding table toward the center of the workpiece, and the vertical grinding step and the horizontal movement step may form an inclined surface that slopes in a stepped or sloped manner from the inner periphery of the upper surface of the convex portion toward the center of the concave portion, and the boundary region may include the inclined surface. The processing apparatus of the present invention (the present processing apparatus) comprises a holding table for holding a workpiece, a grinding unit for grinding the workpiece held on the holding table with a grinding wheel, a laser beam application unit for irradiating a laser beam onto the workpiece ground by the grinding unit, and a moving unit for moving the holding table between the grinding unit and the laser beam application unit, wherein the grinding unit grinds the center of the workpiece to form a recess in the center of the workpiece and also form a convex portion surrounding the recess on the outer periphery, and the laser beam application unit irradiates the laser beam onto the grinding surface of the workpiece to melt it, and a first laser beam reflected and dispersed by a vibrating galvanometer mirror is applied to the grinding surface. , the workpiece rotating together with the holding table configured to irradiate the bottom surface of the recess, Every time the holding table rotates The laser beam irradiation device further includes a control unit that changes the tilt of the galvanometer mirror to change the irradiation range of the first laser beam on the bottom surface of the recess. In the present processing apparatus, the laser beam application unit may apply the second laser beam to a boundary region including a boundary between the recessed portion and the protruding portion and a periphery of the boundary. The processing apparatus may further include a vertical movement unit that moves the grinding wheel relative to the holding table in a vertical direction, and a horizontal movement unit that moves the grinding wheel relative to the holding table in a horizontal direction toward the center of the workpiece, and the grinding unit may grind the workpiece while moving the grinding wheel relative to the holding table using the vertical movement unit and the horizontal movement unit, thereby forming an inclined surface that slopes in a stepped or sloped manner from the inner periphery of the upper surface of the convex portion toward the center of the concave portion, and the boundary region may include the inclined surface. [Effects of the Invention]

[0007] In this processing method and processing device, after grinding, a laser beam is irradiated onto the recessed portions of the workpiece, which are the grinding surface of the workpiece, to melt them. This makes it possible to easily flatten recessed portions that are difficult to reach with a polishing pad, and to easily repair process-affected layers, including damage caused during grinding.

[0008] Furthermore, in the configuration in which a laser beam is irradiated onto the boundary region of the recess, even if a crack is formed in the boundary region during grinding, the crack can be welded by melting and cooling the boundary region, thereby reducing the possibility of the crack starting from the crack causing a crack or chip in the workpiece in a subsequent process. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is an explanatory diagram showing the configuration of a grinding device. [Figure 2] FIG. 2 is a perspective view showing the configuration of a rough grinding unit and a finish grinding unit. [Figure 3] FIG. 2 is a cross-sectional view showing the configuration of a rough grinding unit and a finish grinding unit. [Figure 4] FIG. 2 is a perspective view showing the configuration of a laser beam application unit. [Figure 5] FIG. 10 is an explanatory diagram showing a rough grinding step. [Figure 6] FIG. 2 is an explanatory diagram showing a melting step. [Figure 7] FIG. 10 is an explanatory diagram showing a boundary region. [Figure 8] FIG. 2 is an explanatory diagram showing an optical system of a laser beam application unit. [Figure 9] FIG. 10 is an explanatory diagram showing another boundary region. [Figure 10] FIG. 10 is an explanatory diagram showing yet another boundary region. [Figure 11] FIG. 10 is an explanatory diagram showing yet another boundary region. [Figure 12] FIG. 4 is an explanatory diagram showing an irradiation range of a first laser beam. DETAILED DESCRIPTION OF THE INVENTION

[0010] 1 is an example of a processing device, and includes a holding table 5 that holds a wafer 100, a rough grinding unit 30, and a finish grinding unit 31. In the grinding device 1, the wafer 100 held on the holding table 5 is ground by the rough grinding unit 30 and the finish grinding unit 31.

[0011] The grinding apparatus 1 grinds the central portion of the wafer 100 to form a circular recess and an annular protrusion surrounding the recess in the wafer 100, and grinds the bottom surface of the recess to a preset thickness. In other words, the grinding apparatus 1 is configured to perform so-called TAIKO grinding on the wafer 100.

[0012] Therefore, in the grinding device 1, the rough grinding unit 30 and the finish grinding unit 31 are configured to grind the center of the wafer 100 held on the holding surface 4 of the holding table 5 with a grinding wheel, thereby forming a recess in the center of the wafer 100 and forming a protrusion surrounding the recess on the outer periphery of the wafer 100.

[0013] A wafer 100 shown in Fig. 1 is an example of a workpiece, such as a circular semiconductor wafer. A device (not shown) is formed on a front surface 101 of the wafer 100. The front surface 101 of the wafer 100 faces downward in Fig. 1 and is protected by a protective tape 103 attached thereto. A back surface 102 of the wafer 100 is subjected to a grinding process.

[0014] The grinding device 1 includes a device base 10 and a control unit 7 that controls each component of the grinding device 1.

[0015] A first cassette 150 and a second cassette 151 are arranged on the front side (-Y direction side) of the equipment base 10. The first cassette 150 and the second cassette 151 each have a plurality of shelves therein, and each shelf accommodates one wafer 100.

[0016] The openings (not shown) of the first cassette 150 and the second cassette 151 face the +Y direction. A robot hand 155 is disposed on the +Y direction side of these openings. The robot hand 155 carries the processed wafer 100 into the first cassette 150 or the second cassette 151. The robot hand 155 also removes the unprocessed wafer 100 from the first cassette 150 or the second cassette 151 and places it on the temporary storage unit 152.

[0017] The wafer 100 placed on the temporary placement unit 152 is placed on the holding surface 4 of the holding table 5 near the temporary placement unit 152 by the carry-in unit 153 .

[0018] The holding table 5 has a holding surface 4 for holding the wafer 100. The holding surface 4 is connected to a suction source (not shown) and is capable of suction-holding the wafer 100 via the protective tape 103.

[0019] Furthermore, the holding table 5, while holding the wafer 100 on the holding surface 4, is rotatable, for example, in the direction of arrow 501, about a central axis that passes through the center of the holding surface 4 and extends in the Z-axis direction.

[0020] In this embodiment, four holding tables 5 are arranged at equal intervals in the circumferential direction on the upper surface of a turntable 6 arranged on an apparatus base 10. The turntable 6 is an example of a moving unit, and moves the holding tables 5 among the rough grinding unit 30, the finish grinding unit 31, and the laser beam application unit 40.

[0021] A rotation shaft (not shown) for rotating the turntable 6 is disposed at the center of the turntable 6. This rotation shaft allows the turntable 6 to rotate in the direction of arrow 502, for example, around an axis extending in the Z-axis direction. The rotation of the turntable 6 causes the four holding tables 5 to revolve. This allows the holding tables 5 to be positioned sequentially near the temporary placement unit 152, below the rough grinding unit 30, below the finish grinding unit 31, and below the laser beam application unit 40.

[0022] The rough grinding unit 30 is an example of a grinding unit that grinds the wafer 100 held on the holding table 5 using a grinding wheel, and is provided, for example, on a column (not shown) that is erected on the apparatus base 10. 2, the rough grinding unit 30 includes a grinding wheel 34 having a rough grinding stone 33, and a spindle 35 that rotates the grinding wheel 34. As shown in Fig. 2, the rough grinding unit 30 is configured to roughly grind the wafer 100 held on the rotating holding table 5 by the grinding wheel 34 (the rough grinding stone 33 of the grinding wheel 34) by lowering the rough grinding unit 30 as shown by arrow 504 while rotating the grinding wheel 34 as shown by arrow 503.

[0023] As shown in FIG. 3, the grinding apparatus 1 also includes a vertical movement unit 50 that moves the grinding wheel 34 of the rough grinding unit 30 relative to the holding table 5 in the vertical direction (Z-axis direction), and a horizontal movement unit 60 that moves the grinding wheel 34 of the rough grinding unit 30 relative to the holding table 5 in the horizontal direction toward the center of the wafer 100.

[0024] The horizontal movement unit 60 includes a ball screw 61 extending horizontally and a movement block 62. The vertical movement unit 50 is attached to the movement block 62, and the vertical movement unit 50 holds the rough grinding unit 30.

[0025] A ball screw 61 is threadedly engaged with the moving block 62. In the horizontal moving unit 60, a motor (not shown) rotates the ball screw 61, causing the moving block 62 to move horizontally toward the center of the wafer 100 held on the holding table 5. As a result, the vertical moving unit 50 attached to the moving block 62, the rough grinding unit 30 held by the vertical moving unit 50, and the grinding wheel 34 provided on the rough grinding unit 30 move horizontally together with the moving block 62.

[0026] The vertical movement unit 50 has a ball screw 51 extending in the Z-axis direction, a holding plate 52 that holds the rough grinding unit 30, and a nut portion 53 attached to the holding plate 52. The ball screw 51 is screwed into the nut portion 53.

[0027] In the vertical movement unit 50, a motor (not shown) rotates a ball screw 51, thereby moving a holding plate 52 in the Z-axis direction. As a result, the rough grinding unit 30 held by the holding plate 52 and the grinding wheel 34 provided on the rough grinding unit 30 move in the Z-axis direction together with the holding plate 52.

[0028] The finish grinding unit 31 is an example of a grinding unit that uses a grinding wheel to grind the wafer 100 held on the holding table 5, and is provided, for example, on a column (not shown) that is erected on the apparatus base 10. As shown in Figures 2 and 3, the finish grinding unit 31 has a similar configuration to the rough grinding unit 30, except that it has a finish grinding wheel 37 instead of the rough grinding wheel 33.

[0029] 3, the grinding apparatus 1 is also equipped with a vertical movement unit 50 and a horizontal movement unit 60 for moving the finish grinding unit 31, which have the same configuration as those for moving the rough grinding unit 30. That is, the grinding apparatus 1 is equipped with the vertical movement unit 50 for moving the grinding wheel 34 of the finish grinding unit 31 relative to the holding table 5 in the vertical direction, and the horizontal movement unit 60 for moving the grinding wheel 34 of the finish grinding unit 31 relative to the holding table 5 in the horizontal direction toward the center of the wafer 100.

[0030] After the finish grinding, the wafer 100 is positioned below the laser beam application unit 40 by rotating the turntable 6 .

[0031] 4, the laser beam application unit 40 has a first optical path 41 and a second optical path 42, and applies a laser beam to the ground surface of the wafer 100 ground by the rough grinding unit 30 and the finish grinding unit 31. In this way, the laser beam application unit 40 melts the ground surface.

[0032] After being irradiated with the laser beam, the wafer 100 is transported by the unloading unit 154 to the cleaning unit 156 and cleaned. The cleaned wafer 100 is then loaded by the robot hand 155 into the first cassette 150 or the second cassette 151 (the cassette from which the wafer 100 was removed).

[0033] The control unit 7 controls each component of the grinding apparatus 1 to perform grinding on the wafer 100. A method for processing the wafer 100 in the grinding apparatus 1 under the control of the control unit 7 will be described below.

[0034] (1) Holding step In processing the wafer 100, first, the control unit 7 controls the robot hand 155 shown in FIG. 1 to take out the unprocessed wafer 100, for example, from the first cassette 150, and place it on the temporary storage unit 152. Next, the control unit 7 controls the carry-in unit 153 to hold the wafer 100 on the temporary storage unit 152 and place the wafer 100 on the holding surface 4 of the holding table 5 with the back surface 102 facing up. Thereafter, the control unit 7 connects the holding surface 4 to a suction source (not shown). As a result, the holding surface 4 suction-holds the wafer 100 via the protective tape 103. In this manner, the wafer 100 is held by the holding table 5.

[0035] (2) Grinding step In this step, the rough grinding unit 30 and the finish grinding unit 31 grind the center of the wafer 100 held on the holding table 5 with a grinding wheel 34 (i.e., the rough grinding wheel 33 or the finish grinding wheel 37), thereby forming a recess in the center of the wafer 100 and forming a protrusion surrounding the recess on the outer periphery of the wafer 100.

[0036] (2-1) Rough grinding step After the holding step, the control unit 7 rotates the turntable 6 shown in FIG. 1 so that the holding table 5 holding the wafer 100 is positioned below the rough grinding unit 30.

[0037] Then, the control unit 7 controls the horizontal movement unit 60 shown in Figure 3 to adjust the horizontal position of the rough grinding unit 30, thereby positioning the rough grinding stone 33 of the grinding wheel 34 inside the outer periphery of the wafer 100.

[0038] Next, the control unit 7 rotates the grinding wheel 34 of the rough grinding unit 30, and moves the rough grinding unit 30 along the Z-axis direction for grinding by the vertical movement unit 50. Furthermore, the control unit 7 rotates the holding table 5 by a drive source (not shown).

[0039] As a result, the rough grinding stone 33 of the rotating grinding wheel 34 comes into contact with the back surface 102 of the wafer 100 held on the rotating holding table 5, and roughly grinds the back surface 102.

[0040] In this grinding, the control unit 7 positions the outer edge of the rough grinding wheel 33 inside the outer periphery of the wafer 100. Therefore, the rough grinding wheel 33 grinds the center of the back surface 102 of the wafer 100. As a result, a recess 200 having a bottom surface 202 and an inner side surface 201 is formed on the back surface 102 of the wafer 100, as shown in Fig. 5. Furthermore, an annular protrusion 210 surrounding the recess 200 is formed along the outer periphery of the recess 200.

[0041] During grinding with the rough grinding wheel 33, the control unit 7 measures the thickness of the bottom surface 202 of the recess 200 using a thickness measuring device (not shown). Then, the control unit 7 carries out grinding with the rough grinding wheel 33 until the thickness of the bottom surface 202 reaches a predetermined rough grinding thickness.

[0042] (2-2) Finish grinding step In the finish grinding step, the surface of the wafer 100 ground by the rough grinding wheel 33 is finish-ground. In this step, the control unit 7 first rotates the turntable 6 shown in FIG. 1 so that the holding table 5 holding the wafer 100 is positioned below the finish grinding unit 31.

[0043] Then, the control unit 7 controls the horizontal movement unit 60 shown in Figure 3 to adjust the horizontal position of the finish grinding unit 31, thereby placing the finish grinding wheel 37 at a position inside the outer periphery of the wafer 100, similar to the position where the rough grinding wheel 33 was placed in the rough grinding step.

[0044] Then, similarly to the rough grinding forming step, the control unit 7 rotates the grinding wheel 34 and moves the finish grinding unit 31 along the Z-axis direction for grinding by the vertical movement unit 50. Furthermore, the control unit 7 rotates the holding table 5 by a drive source (not shown).

[0045] As a result, the finish grinding stone 37 of the rotating grinding wheel 34 comes into contact with the recess 200 on the back surface 102 of the wafer 100 held on the rotating holding table 5, and finish-grinds the recess 200.

[0046] During grinding with the finish grinding wheel 37, the control unit 7 measures the thickness of the bottom surface 202 of the recess 200 using a thickness measuring device (not shown). Then, the control unit 7 carries out grinding with the finish grinding wheel 37 until the thickness of the bottom surface 202 reaches a predetermined finish grinding thickness.

[0047] (3) Melting step In this step, the laser beam application unit 40 irradiates with a laser beam the recesses 200 on the back surface 102 of the wafer 100, which is the grinding surface in the grinding step, and the boundary region including the boundary between the protrusions 210 and the recesses 200, to melt them. The melted region melted in the melting step includes the grinding surface and a process-affected layer formed to a predetermined thickness from the grinding surface and having distortions including cracks, scratches, damage, etc. due to processing.

[0048] Here, the configuration of the laser beam application unit 40 will be described in detail. 6, the first optical path 41 of the laser beam application unit 40 is configured to apply a laser beam to the bottom surface 202 of the recess 200 of the wafer 100. On the other hand, the second optical path 42 is configured to apply light to a boundary region 220 (the hatched portion in FIG. 7) in the recess 200 of the wafer 100.

[0049] 7, boundary region 220 is a region that includes the boundary between recessed portion 200 and protruding portion 210 and the periphery of this boundary. Specifically, boundary region 220 includes inner surface 201 of recessed portion 200 and the vicinity of inner surface 201 on bottom surface 202 (the outer peripheral portion of bottom surface 202 that is continuous with inner surface 201).

[0050] 8 is an explanatory diagram showing the optical system of the laser beam application unit 40. As shown in this figure, in addition to a first optical path 41 and a second optical path 42, the laser beam application unit 40 is provided with an oscillator 43 that oscillates a laser beam, and a beam splitter (branching unit) 44 that splits the oscillated laser beam into two laser beams, a first laser beam 401 and a second laser beam 402. The first laser beam 401 is incident on the first optical path 41, while the second laser beam 402 is incident on the second optical path 42.

[0051] The first optical path 41 and the second optical path 42 are configured to irradiate the wafer 100 with a laser beam by a galvano scanner system.

[0052] As shown in Figure 8, the first optical path 41 has a first mirror group 72 having multiple mirrors 70 and 71 that reflect the first laser beam 401 and adjust the optical path, a first galvanometer mirror (galvanometer scanner) 73, and a first fθ lens 74.

[0053] The first galvanometer mirror 73 reflects the first laser beam 401 from the first mirror group 72 while vibrating (rotating), thereby dispersing the first laser beam 401 in a direction perpendicular to the optical axis and irradiating the first laser beam 401 onto substantially the entire surface of the first fθ lens 74.

[0054] The first fθ lens 74 is a one-dimensional fθ lens with a relatively large diameter that includes multiple lenses. The first fθ lens 74 is, for example, a telecentric type, and converts the first laser beam 401, which is incident via the first galvanometer mirror 73, into a parallel beam having an equal focusing height and irradiates it onto the bottom surface 202 of the recess 200 on the wafer 100.

[0055] The second optical path 42 also has a second mirror group 82 having multiple mirrors 80 and 81 that reflect the second laser beam 402 and adjust the optical path, a second galvanometer mirror (galvanometer scanner) 83, and a second fθ lens 84.

[0056] The second galvanometer mirror 83 reflects the second laser beam 402 from the second mirror group 82 while vibrating (rotating), thereby dispersing the second laser beam 402 in a direction perpendicular to the optical axis and irradiating the second laser beam 402 onto substantially the entire surface of the second fθ lens 84.

[0057] The second fθ lens 84 is a one-dimensional fθ lens with a relatively small diameter and including multiple lenses. The second fθ lens 84 is, for example, a telecentric type, and converts the second laser beam 402 incident thereon via the second galvanometer mirror 83 into parallel beams having the same focusing height, and irradiates the boundary region 220 of the recess 200 on the wafer 100 from an oblique direction.

[0058] The control unit 7 performs the melting step using the laser beam application unit 40 having such a configuration. That is, the control unit 7 first rotates the turntable 6 shown in FIG. 1 so that the holding table 5 holding the wafer 100 is positioned below the laser beam application unit 40.

[0059] Next, the control unit 7 controls the first galvanometer mirror 73 and the second galvanometer mirror 83 to adjust the directions of the first laser beam 401 and the second laser beam 402 so that the first laser beam 401 from the first optical path 41 is irradiated onto the bottom surface 202 of the recess 200 in the wafer 100, and so that the second laser beam 402 from the second optical path 42 is irradiated onto the boundary region 220 of the recess 200 from an oblique direction.

[0060] Then, while rotating the holding table 5 by a drive source (not shown), the control unit 7 controls the oscillator 43 of the laser beam application unit 40 to irradiate the first laser beam 401 from the first optical path 41 onto the bottom surface 202 of the recess 200 in the wafer 100, and to irradiate the second laser beam 402 from the second optical path 42 onto the boundary region 220 of the recess 200. As a result, the recess 200, which is the ground surface of the wafer 100, is irradiated with the first laser beam 401 and the second laser beam 402, and the recess 200 is melted.

[0061] After the first laser beam 401 has been irradiated onto the entire bottom surface 202 of the recess 200 and the second laser beam 402 has been irradiated onto the entire boundary region 220, the control unit 7 stops the irradiation of the first laser beam 401 and the second laser beam 402. As a result, the melted boundary region 220 and the recess 200 are cooled and solidified.

[0062] As described above, in this embodiment, after the grinding step, a melting step is performed to melt the process-affected layer formed on the inner surface 201 of the convex portion 210, which is part of the boundary region 220 that comes into contact with the grinding wheel 34 in the grinding step, and the process-affected layer of the concave portion 200 of the wafer 100, which is the grinding surface in the grinding step, by irradiating them with the first laser beam 401 and the second laser beam 402. Then, the melted boundary region 220 and the concave portion 200 are cooled and solidified as the irradiation of the first laser beam 401 and the second laser beam 402 is stopped.

[0063] In this embodiment, this melting and cooling process melts the damage layer (strain layer) formed in the grinding step at a predetermined thickness from the grinding surface of the boundary region 220 and the recessed portion 200, allowing crystal growth in the molten region to form a seed crystal, which then recrystallizes. This flattens the boundary region 220 and the recessed portion 200, and also heals cracks within the damage layer formed in the grinding step at a predetermined thickness from the grinding surface, thereby reducing internal damage to the wafer 100 (the workpiece). Furthermore, flattening the wafer 100 increases its flexural strength, thereby reducing the risk of cracks or chips occurring in the wafer 100 after the melting step and increasing the flexural strength of the resulting chips.

[0064] Here, polishing the grinding surface with a polishing pad (CMP polishing or dry polishing) may be considered to process the grinding surface (planarization and damage reduction). However, in this embodiment, the grinding surface of the wafer 100 is a recess 200 surrounded by a protrusion 210, and in view of the shape of the recess 200, it is difficult to bring a polishing pad into proper contact with the recess 200. Furthermore, CMP is a process using a chemical solution, and both CMP polishing and dry polishing remove part of the grinding surface, generating polishing debris that may contaminate the workpiece or the inside of the equipment. However, the process of removing damage using the laser beam irradiation unit 40 is performed by melting, so liquid processing is not required, and there are also advantages in that no processing debris is generated, preventing contamination of the workpiece or the equipment.

[0065] On the other hand, in the melting step in this embodiment, it is possible to easily change the irradiation ranges of the first laser beam 401 and the second laser beam 402 by controlling the first galvanometer mirror 73 and the second galvanometer mirror 83 to change the directions of the first laser beam 401 and the second laser beam 402. Therefore, in this embodiment, the entire recess 200 can be easily irradiated with the laser beam in the melting step, and therefore the recess 200 can be processed well and efficiently.

[0066] Furthermore, in this embodiment, the second laser beam 402 is irradiated onto the boundary region 220 of the recess 200 using the second optical path 42. This melts and cools the boundary region 220, so even if a crack is formed in the boundary region 220 during the grinding step, the crack can be welded. This reduces the possibility that the crack will cause a crack or chip in the wafer 100 in a subsequent process.

[0067] In the grinding step described above, the inner side surface 201 of the recess 200 in the wafer 100 may be formed as an inclined surface.

[0068] For example, in the rough grinding unit 30, the vertical movement unit 50 and the horizontal movement unit 60 (see Figure 3) may be used to move the grinding wheel 34 relative to the holding table 5 while grinding the wafer 100, thereby forming an inclined surface that slopes in a stepped or sloped manner from the inner periphery of the upper surface of the convex portion 210 on the wafer 100 toward the center of the concave portion 200 (toward the center of the wafer 100).

[0069] In this case, the rough grinding step in the grinding step includes a vertical grinding step in which a grinding wheel 34 including a rough grinding stone 33 is moved vertically relative to the holding table 5, and a horizontal movement step in which the grinding wheel 34 is moved horizontally relative to the holding table 5 toward the center of the wafer 100. The vertical grinding step and horizontal movement step form an inclined surface that slopes in a stepped or sloped manner from the inner periphery of the upper surface of the convex portion 210 toward the center of the concave portion 200. The vertical grinding step and horizontal movement step may be repeated multiple times.

[0070] Specifically, the control unit 7 may make the inner surface 201 of the recess 200 in the wafer 100 an inclined surface that slopes in a stepped manner from the inner periphery of the upper surface of the protrusion 210 toward the center of the recess 200, as shown in Figure 9.

[0071] In this case, in the rough grinding step, the control unit 7 first controls the vertical movement unit 50 to perform a vertical grinding step, and vertically lowers the grinding wheel 34 including the rotating rough grinding stone 33 to form a recess 200 as shown in Fig. 5. At this time, the control unit 7 stops the vertical grinding step (lowering of the grinding wheel 34) before the thickness of the bottom surface 202 of the recess 200 reaches a predetermined rough grinding thickness, and controls the horizontal movement unit 60 to perform a horizontal movement step, and horizontally moves the grinding wheel 34 to move the rough grinding stone 33 closer to the center of the wafer 100 by a predetermined distance.

[0072] Thereafter, the control unit 7 stops the horizontal movement step (horizontal movement of the grinding wheel 34) and performs the vertical grinding step again, performing grinding with the rough grinding wheel 33 until the thickness of the bottom surface 202 of the recess 200 reaches a predetermined rough grinding thickness. As a result, as shown in Fig. 9, the inner surface 201 of the recess 200 becomes a stepped inclined surface including a horizontal surface 203.

[0073] Furthermore, in the finish grinding step, the control unit 7 grinds, for example, only the bottom surface 202 of the recess 200 formed in the rough grinding step, so that the thickness of the bottom surface 202 reaches a predetermined finished thickness.

[0074] By such a grinding step, the inner surface 201 of the inclined surface is included in the boundary region 220. Then, by the melting step, the second laser beam 402 is irradiated onto the boundary region 220 including the inner surface 201 of the inclined surface, and this portion is melted and cooled. In this configuration, by making the inner surface 201 an inclined surface, it is possible to prevent stress from concentrating at the corner between the inner surface 201 and the bottom surface 202, which would otherwise cause cracking of the wafer 100. In addition, this configuration has the effect of making it easier to form a metal film all the way to the outer periphery of the bottom surface 202 when forming the film on the grinding surface in the next process, and the effect of increasing the adhesion of the tape in the boundary region 220 when applying a protective tape to the grinding surface in the next process.

[0075] The control unit 7 may also make the inner surface 201 of the recess 200 in the wafer 100 an inclined surface that slopes from the inner periphery of the upper surface of the protrusion 210 toward the center of the recess 200, as shown in FIG.

[0076] In this case, in the rough grinding step, the control unit 7 performs a vertical grinding step (lowering the grinding wheel 34) while performing a horizontal movement step (horizontal movement of the grinding wheel 34) until the thickness of the bottom surface 202 of the recess 200 reaches a predetermined rough grinding thickness. As a result, as shown in Fig. 10, the inner surface 201 of the recess 200 becomes a sloped inclined surface without any steps.

[0077] Furthermore, the control unit 7 may make the inner surface 201 of the recess 200 in the wafer 100 an inclined surface as shown in FIG. In this case, the control unit 7 performs the horizontal movement step while performing the vertical grinding step in the rough grinding step, and stops the vertical grinding step before the thickness of the bottom surface 202 of the recess 200 reaches a predetermined rough grinding thickness.

[0078] After the control unit 7 moves the rough grinding wheel 33 a predetermined distance closer to the center of the wafer 100, it stops the horizontal movement step and performs the vertical grinding step again, performing grinding with the rough grinding wheel 33 until the thickness of the bottom surface 202 of the recess 200 reaches the predetermined rough grinding thickness. As a result, the inner surface 201 of the recess 200 becomes an inclined surface including a horizontal surface 203 and a slope 204, as shown in FIG.

[0079] As shown in FIG. 8, the second laser beam 402 from the second optical path 42 is irradiated onto the inner surface 201 from an oblique direction, so that the inner surface 201 can be melted well even if the inner surface 201 is an inclined surface including the horizontal surface 203.

[0080] Furthermore, if the inner surface 201 is not formed as an inclined surface, the grinding device 1 does not need to be equipped with the horizontal movement unit 60, as long as the horizontal installation positions of the rough grinding unit 30 and the finish grinding unit 31 are set so that they can perform TAIKO grinding processing to form recesses 200 and protrusions 210 in the wafer 100.

[0081] 7, the boundary region 220 melted by the second laser beam 402 from the second optical path 42 is a region including the inner side surface 201 of the recess 200 and the vicinity of the inner side surface 201 on the bottom surface 202. In this regard, the boundary region 220 melted by the second laser beam 402 may be a region including at least either the inner side surface of the protrusion 210 (i.e., the inner side surface 201 of the recess 200) or the outer peripheral portion of the bottom surface 202 that is continuous with the inner side surface 201.

[0082] For example, in boundary region 220, the boundary between recess 200 and protrusion 210 is the area where stress is most likely to concentrate and crack, so it is preferable to remove damage from the processing-affected layer at the boundary. Therefore, boundary region 220 does not need to include the entire inner surface 201 of recess 200. The extent to which the outer periphery of bottom surface 202, which is continuous with inner surface 201, is included in boundary region 220 may be adjusted in consideration of productivity, such as the length of a crack formed in recess 200 or how much the laser beam can be deflected.

[0083] In addition, in this embodiment, when irradiating the laser beam from the first optical path 41 and the second optical path 42 in the melting step, the first galvanometer mirror 73 and the second galvanometer mirror 83 are finely vibrated during one rotation of the holding table 5, thereby concentrating the laser beam at multiple focal points in a concentric pattern and forming multiple irradiation lines.

[0084] In this regard, in the first optical path 41, which irradiates the bottom surface 202 of the recess 200 of the wafer 100 with the first laser beam 401 (see Figure 8), the irradiation area of ​​the first laser beam 401 is wide, so it may be difficult to cover the irradiation area only by the vibration of the first galvanometer mirror 73 that can be performed during one rotation of the holding table 5.

[0085] In this case, the irradiation range of the first optical path 41 on the bottom surface 202 may be changed by changing the tilt of the first galvanometer mirror 73 every time the holding table 5 makes one rotation. Then, the holding table 5 may be rotated while the first galvanometer mirror 73 is vibrated by a certain amount at the changed tilt, thereby forming multiple irradiation lines again.

[0086] 12, the control unit 7 may control the first galvanometer mirror 73 so that the first laser beam 401 is irradiated onto a portion of the bottom surface 202 each time the holding table 5 makes one rotation. In Fig. 12, the ranges irradiated with the first laser beam 401 during the first to third rotations of the holding table 5 are indicated by ranges 511 to 513, respectively. Each of the ranges 511 to 513 includes a plurality of irradiation lines 405.

[0087] When changing the irradiation range of the first optical path 41 with respect to the bottom surface 202, the holding table 5 holding the wafer 100 may be moved in the horizontal direction (XY direction) instead of changing the tilt of the first galvanometer mirror 73. Alternatively, the laser beam application unit 40 may be moved in the horizontal direction (XY direction) instead of the holding table 5.

[0088] In the melting step of this embodiment, the boundary region 220 and the entire bottom surface 202 of the recess 200 of the wafer 100 are irradiated with a laser beam and melted using the first optical path 41 and the second optical path 42. In this regard, the melting step may be performed by using only the second optical path 42 without using the first optical path 41, to melt only the boundary region 220 of the recess 200.

[0089] Even in this case, the cracks in the boundary region 220 can be bonded by melting and cooling the boundary region 220, thereby reducing the possibility that the cracks will cause cracks or chips in the wafer 100. Furthermore, the surface of the boundary region 220 can be flattened, which increases the flexural strength of the wafer 100 and makes the wafer 100 less likely to crack.

[0090] Furthermore, as described above, in order to irradiate the entire surface of the bottom surface 202 of the recess 200 with the first laser beam 401 through the first optical path 41, it may be necessary to change the tilt of the first galvanometer mirror 73 or move the holding table 5 in the horizontal direction. In this regard, by not irradiating the bottom surface 202 with the first laser beam 401 using the first optical path 41, it is possible to omit the configuration for changing the tilt of the first galvanometer mirror 73 and for horizontally moving the holding table 5, and also to shorten the irradiation time of the laser beam in the melting step.

[0091] In addition, in the melting step, the control unit 7 may simultaneously or separately irradiate the bottom surface 202 of the recess 200 of the wafer 100 with the first laser beam 401 from the first optical path 41 and the boundary region 220 with the second laser beam 402 from the second optical path 42 (see Figure 8).

[0092] When the first laser beam 401 and the second laser beam 402 are irradiated simultaneously, there is a possibility that these laser beams will interfere with each other. In particular, when the first laser beam 401 is irradiated near the center of the bottom surface 202 while the second laser beam 402 is irradiated onto the boundary region 220, there is a high possibility that the beams will interfere with each other.

[0093] Here, since the area of ​​the boundary region 220 is smaller than that of the bottom surface 202, the irradiation of the second laser beam 402 through the second optical path 42 is completed earlier than the irradiation of the first laser beam 401 through the first optical path 41.

[0094] Therefore, when the irradiation of the first laser beam 401 and the irradiation of the second laser beam 402 are carried out simultaneously, it is preferable that the control unit 7 first irradiates the boundary region 220 with the second laser beam 402, and also irradiates the outer portion of the bottom surface 202 that is close to the boundary region 220 with the first laser beam 401, and after completing the irradiation of the boundary region 220 with the second laser beam 402, stops the irradiation of the second laser beam 402 and irradiates the vicinity of the center of the bottom surface 202 with the first laser beam 401. This makes it possible to suppress interference between the first laser beam 401 and the second laser beam 402.

[0095] Note that irradiation of the laser beam from only one of the first optical path 41 and the second optical path 42 can be achieved by stopping irradiation of the laser beam from the other one. For this purpose, an attenuator (not shown) may be disposed downstream of the beam splitter 44 (see FIG. 8 ) in the optical path of the laser beam (between the beam splitter 44 and the first optical path 41, and between the beam splitter 44 and the second optical path 42). In this case, the attenuator can reduce the power of the first laser beam 401 incident on the first optical path 41 or the second laser beam 402 incident on the second optical path 42 to zero. Therefore, irradiation of the laser beam from the first optical path 41 or the second optical path 42 to the wafer 100 can be easily stopped.

[0096] In this embodiment, the grinding apparatus 1 has, as grinding units, a rough grinding unit 30 and a finish grinding unit 31. In this regard, the grinding apparatus 1 may have only one grinding unit (for example, the rough grinding unit 30), and this grinding unit may form a recess 200 in the center of the wafer 100 and a protrusion 210 surrounding the recess 200 on the outer periphery. [Explanation of symbols]

[0097] 1: grinding device, 4: holding surface, 5: holding table, 6: turntable, 7: control unit, 10: device base, 30: rough grinding unit, 31: finish grinding unit, 33: rough grinding wheel, 34: grinding wheel, 35: spindle, 37: finish grinding wheel, 40: laser beam irradiation unit; 41: first optical path, 42: second optical path, 43: oscillator, 44: Beam splitter, 50: Vertical movement unit, 51: Ball screw, 52: Holding plate, 53: Nut part, 60: Horizontal movement unit, 61: Ball screw, 62: moving block, 70: mirror, 72: first mirror group, 73: first galvanometer mirror, 74: first fθ lens, 80: mirror, 82: second mirror group, 83: second galvanometer mirror, 84: second fθ lens, 100: wafer, 101: front surface, 102: back surface, 103: protective tape, 150: first cassette, 151: second cassette, 152: temporary placement unit, 153: Loading unit, 154: Unloading unit, 155: Robot hand, 156: cleaning unit, 200: recess, 201: inner surface, 202: bottom surface, 203: horizontal surface, 204: slope, 210: convex portion, 220: boundary region, 401: first laser beam, 402: Second laser beam, 405: Irradiation line

Claims

1. a holding step of holding the workpiece by a holding table; a grinding step of grinding the center of the workpiece held on the holding table with a grinding wheel to form a recess in the center and a protrusion surrounding the recess on the outer periphery; a melting step of irradiating a laser beam onto the grinding surface in the grinding step to melt the surface; Preparation, The melting step comprises: rotating the holding table holding the workpiece; irradiating a bottom surface of the recess of the workpiece with a first laser beam reflected and dispersed by a vibrating galvanometer mirror; and changing the tilt of the galvanometer mirror every time the holding table makes one rotation, thereby changing the irradiation range of the first laser beam on the bottom surface of the recess. A method for processing a workpiece, characterized by:

2. the melting step includes irradiating a boundary region including a boundary between the recessed portion and the protruding portion and a periphery of the boundary with a second laser beam. The method for processing a workpiece according to claim 1.

3. the boundary region includes at least one of an inner side surface of the protrusion and an outer peripheral portion of the recess that is continuous with the side surface. The method for processing a workpiece according to claim 2.

4. The grinding step includes: a vertical grinding step of moving the grinding wheel relative to the holding table in a vertical direction; a horizontal movement step of relatively moving the grinding wheel with respect to the holding table in a horizontal direction toward the center of the workpiece; Including, by the vertical grinding step and the horizontal moving step, an inclined surface is formed that slopes in a step-like or slope-like manner from the inner periphery of the upper surface of the convex portion toward the center of the concave portion; the boundary region includes the inclined surface; 3. The method for processing a workpiece according to claim 2.

5. a holding table for holding the workpiece; a grinding unit that grinds the workpiece held on the holding table with a grinding wheel; a laser beam application unit that applies a laser beam to the workpiece ground by the grinding unit; a moving unit that moves the holding table between the grinding unit and the laser beam application unit, the grinding unit grinds the center of the workpiece to form a recess in the center of the workpiece and a protrusion surrounding the recess on the outer periphery of the workpiece; the laser beam application unit applies the laser beam to the grinding surface of the workpiece to melt it, and is configured to apply a first laser beam reflected and dispersed by a vibrating galvanometer mirror to the bottom surface of the recess of the workpiece rotating together with the holding table; a control unit that changes the inclination of the galvanometer mirror every time the holding table makes one rotation, thereby changing the irradiation range of the first laser beam on the bottom surface of the recess. A processing device characterized by:

6. the laser beam application unit applies the second laser beam to a boundary region including a boundary between the concave portion and the convex portion and a periphery of the boundary; The processing device according to claim 5.

7. a vertical movement unit that moves the grinding wheel relative to the holding table in a vertical direction; a horizontal movement unit that moves the grinding wheel relatively to the holding table in a horizontal direction toward the center of the workpiece, In the grinding unit, the grinding wheel is moved relative to the holding table by the vertical movement unit and the horizontal movement unit while grinding the workpiece, thereby forming an inclined surface that slopes in a step-like or slope-like manner from the inner periphery of the upper surface of the convex portion toward the center of the concave portion; the boundary region includes the inclined surface; 7. The processing device according to claim 6.

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