Methods and systems for microfluidic device fabrication

Abstract

The present disclosure provides methods for forming a microfluidic device. The method for forming a microfluidic device may include providing a microfluidic structure and a membrane, treating a surface of the microfluidic structure, a surface of the membrane, or both, with a solvent, and then pressing the microfluidic structure together with the membrane under first heating conditions to form a microfluidic device containing the solvent, and applying a negative pressure to the microfluidic device under second heating conditions, wherein the negative pressure is applied for a period of more than 30 minutes or at a pressure less than 20 kilopascals (kPa) to remove at least a portion of the solvent. In some embodiments, the present disclosure provides devices consistent with the methods herein.

Description

[Technical Field]

[0001] cross reference This application claims the benefit of U.S. Provisional Patent Application No. 62 / 965,690, filed January 24, 2020, which is incorporated herein by reference in its entirety.

[0002] Government Ownership Statement This invention was made with government support under Small Business Innovation Research Grant No. 1R43OD023028-01 awarded by the National Institutes of Health. The U.S. Government has certain rights in this invention. [Background technology]

[0003] Microfluidic devices are devices that contain small-scale fluid-handling structures. Typically, microfluidic devices operate on the sub-millimeter scale and handle microliter, nanoliter, or smaller volumes of fluid. In microfluidic devices, the primary fouling or soiling mechanism is air or bubbles trapped inside the microstructures. This can be particularly problematic when thermoplastic materials are used to create microfluidic structures, as thermoplastics have very low gas permeability.

[0004] To avoid fouling due to trapped air, microfluidic structures use either simple straight or branched channel designs with thermoplastic materials, or fabricate devices using highly gas-permeable materials such as elastomers. However, simple designs limit the potential functionality of microfluidic devices, and elastomeric materials are difficult and expensive to manufacture, especially on a large scale.

[0005] One application of microfluidic structures is digital polymerase chain reaction (dPCR). dPCR involves diluting a nucleic acid sample into one or fewer nucleic acid templates within a microfluidic structure that provides an array of numerous compartments, and then running a PCR reaction across the entire array. The target nucleic acid is quantified by counting the compartments where the template is successfully amplified by PCR and applying Poisson statistics to the results. Unlike the popular quantitative real-time PCR (qPCR), which quantifies the template by comparing the PCR amplification rate of an unknown sample with that of a set of known qPCR standards, dPCR has been shown to exhibit higher sensitivity, precision, and reproducibility.

[0006] For genomic researchers and clinicians, dPCR is particularly powerful for detecting rare variants, quantifying copy number variations, and quantifying next-generation sequencing libraries. Potential clinical use for liquid biopsies using cell-free DNA and viral load quantification further enhances the value of dPCR technology. Existing dPCR solutions have used elastomeric valve arrays, silicon through-hole approaches, and microfluidic encapsulation of oil droplets. Despite the growing number of available dPCR platforms, dPCR has been at a disadvantage compared to older qPCR technologies, which rely on counting the number of PCR amplification cycles. A combination of throughput, ease of use, performance, and cost are key barriers to greater market adoption of dPCR. Summary of the Invention

[0007] This paper provides the method and device that can be useful for amplifying and quantifying nucleic acid.The present disclosure provides the method, system and device that can use dPCR to prepare sample, amplify sample and analyze sample.This can make it possible to amplify and quantify nucleic acid with reduced cost and complexity compared with other systems and methods.

[0008] In one aspect, the present disclosure provides a method for forming a microfluidic device, the method comprising: (b) providing a microfluidic structure and a membrane; (c) treating a surface of the microfluidic structure, a surface of the membrane, or both, with a solvent; (c) following (b), pressing the microfluidic structure together with the membrane under first heating conditions to form a microfluidic device containing the solvent; and (d) applying a negative pressure to the microfluidic device under second heating conditions, wherein the negative pressure is applied for a period of more than 30 minutes or at a pressure less than 20 kilopascals (kPa) to remove at least a portion of the solvent from (b).

[0009] In some embodiments, the microfluidic structure comprises a microchannel, a plurality of microchambers, a plurality of wicking openings, or any combination thereof. In some embodiments, treating comprises applying one or more solvents. In some embodiments, the one or more solvents comprise a solvent selected from the group consisting of isopropyl alcohol, acetone, ethyl alcohol, hexane, cyclohexane, toluene, and benzene. In some embodiments, pressing comprises applying a force of at least about 0.5 kilonewtons (kN). In some embodiments, the first heating condition comprises heating to a temperature of at least about 60° C. In some embodiments, applying a negative pressure comprises applying a pressure of less than about 7 kPa. In some embodiments, the second heating condition comprises heating the microfluidic device to a temperature of at least about 70° C. In some embodiments, heating the microfluidic device to a temperature of at least about 70° C. removes at least about 75% of the solvent from the microfluidic device. In some embodiments, applying a negative pressure comprises applying a negative pressure for at least about 2 hours. In some embodiments, applying a negative pressure removes at least about 50% of the solvent from the microfluidic device. In some embodiments, applying a negative pressure under a second heating condition reduces separation between the microfluidic structure and the membrane. In some embodiments, the microfluidic structure comprises a channel or chamber having a feature size of at most about 500 micrometers. In some embodiments, removing the solvent increases the yield of the microfluidic device by at least about 25%. In some embodiments, the microfluidic device has a usable feature ratio of at least about 0.5. In some embodiments, the method further includes applying an increased pressure to the microfluidic device, the increased pressure being sufficient to expel at least a portion of the solvent.

[0010] Additional aspects and advantages of the present disclosure will become readily apparent to those skilled in the art from the following detailed description, wherein only illustrative embodiments of the present disclosure are shown and described. As will be realized, the present disclosure is capable of other and different embodiments, and its several details can be modified in various obvious respects, all without departing from the present disclosure. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.

[0011] Incorporation by Reference All publications, patents, and patent applications mentioned in this specification are herein incorporated by reference to the same extent as if each individual publication, patent, or patent application was specifically and individually indicated to be incorporated by reference.

[0012] The novel features of the invention are set forth with particularity in the appended claims. A better understanding of the features and advantages of the present invention will be obtained by reference to the following detailed description, which sets forth illustrative embodiments, and the accompanying drawings (also referred to herein as "Figure" and "FIG."), which illustrate, by way of example, the principles of the invention. [Brief explanation of the drawings]

[0013] [Figure 1A] 1A and 1B show examples of microfluidic structures, with FIG. 1A showing the structure from an overhead view. [Figure 1B] 1A and 1B show examples of microfluidic structures, and FIG. 1B shows a cross section of the structure. [Figure 2A] 2A and 2B show schematic diagrams of exemplary arrangements of microchambers, siphoning openings, and microchannels within a microfluidic device, with FIG. 2A illustrating an embodiment in which parallel subchannels and one or more cross-channels are used to form a lattice of microchambers. [Figure 2B]2A and 2B show schematic diagrams of exemplary arrangements of microchambers, siphon openings, and microchannels within a microfluidic device, with FIG. 2B showing an embodiment in which a single microchannel in a serpentine pattern forms a hexagonal lattice of microchambers. [Figure 3A] 3A illustrates the use of an exemplary microfluidic device, with FIG. 3A showing the delivery of reagents at low pressure. [Figure 3B] An exemplary method of using the microfluidic device is shown in FIG. 3B, which illustrates the application of a pressure differential across the microfluidic device to enable dispensing and outgassing. [Figure 3C] An exemplary method of using the microfluidic device is shown in FIG. 3C, which shows providing fluid at low pressure to clear a microchannel. [Figure 3D] An exemplary method of use of the microfluidic device is shown, with FIG. 3D showing the state of the system after completion of the method. [Figure 4] 1 illustrates a schematic of a method for manufacturing a microfluidic device. [Figure 5] 1 illustrates a schematic of an exemplary digital PCR process employed in a microfluidic device. [Figure 6] 1 shows a schematic diagram of a machine for performing nucleic acid amplification and quantification methods in a single machine. [Figure 7] 1 illustrates schematically an exemplary computer control system programmed or otherwise configured to carry out the methods provided herein. [Figure 8A] 8A shows a microfluidic device formed by micromolding a thermoplastic. [Figure 8B] 8A shows the microfluidic device and sample dispensing, and FIG. 8B shows a fluorescent image of the sample dispensing process. [Figure 9] 1 illustrates an exemplary system for processing a nucleic acid sample. [Figure 10A]Figure 10A shows two-color (one color representing the sample signal and the other color representing the normalized signal) fluorescence detection of nucleic acid amplification of compartments containing, on average, approximately one copy of nucleic acid template and compartments with zero copies of nucleic acid template (no template control, or NTC), with Figure 10B showing zero copies per compartment after amplification (NTC). [Figure 10B] Figure 10B shows two-color (one color representing the sample signal and the other color representing the normalized signal) fluorescent detection of nucleic acid amplification for compartments containing, on average, approximately one copy of nucleic acid template and for compartments with zero copies of nucleic acid template (no template control, or NTC), while Figure 10B shows nucleic acid amplification for compartments containing approximately one copy per compartment. [Figure 10C] Figure 10C shows two-color (one color representing the sample signal and the other color representing the normalized signal) fluorescence detection of nucleic acid amplification in compartments containing, on average, approximately one copy of the nucleic acid template and in compartments with zero copies of the nucleic acid template (no template control, or NTC), and shows a plot of the NTC fluorescence intensity in both fluorescent colors. [Figure 10D] Figure 10D shows two-color (one color representing the sample signal and the other color representing the normalized signal) fluorescence detection of nucleic acid amplification for compartments containing, on average, approximately one copy of the nucleic acid template and compartments with zero copies of the nucleic acid template (no template control, or NTC), and shows a plot of the fluorescence intensity of both fluorescent colors for the amplified sample. [Figure 11] 1 is a flowchart of an exemplary process for forming a microfluidic device. [Figure 12] 1A-1D are exemplary schematic diagrams for forming a microfluidic device. [Figure 13] 1 is an example of a microfluidic device fabricated by the methods described herein. [Figure 14] 1 is an example of a microfluidic device fabricated by pressurizing and heating a liquid followed by removal of the solvent. [Figure 15] 1 is an example of a microfluidic fabricated by pressurizing and heating air followed by no solvent removal. [Figure 16]1 is an example of a microfluidic device fabricated by pressurizing and heating a liquid followed by solvent removal. [Figure 17] 1 is an example of a microfluidic device fabricated by pressurizing and heating air followed by solvent removal. [Figure 18A] 18A and 18B are exemplary close-up images of a microfluidic device fabricated without solvent removal before (FIG. 18A) and after (FIG. 18B) pressurizing and heating the liquid. [Figure 18B] 18A and 18B are exemplary close-up images of a microfluidic device fabricated without solvent removal before (FIG. 18A) and after (FIG. 18B) pressurizing and heating the liquid. [Figure 19A] 19A and 19B are exemplary close-up images of a vacuum-treated microfluidic device before (FIG. 19A) and after (FIG. 19B) pressurizing and heating the liquid. [Figure 19B] 19A and 19B are exemplary close-up images of a vacuum-treated microfluidic device before (FIG. 19A) and after (FIG. 19B) pressurizing and heating the liquid. [Figure 20A] 20A and 20B are exemplary close-up images of a heat-treated microfluidic device before (FIG. 20A) and after (FIG. 20B) pressurizing and heating the liquid. [Figure 20B] 20A and 20B are exemplary close-up images of a heat-treated microfluidic device before (FIG. 20A) and after (FIG. 20B) pressurizing and heating the liquid. [Figure 21A] 21A and 21B are exemplary close-up views of a vacuum- and heat-treated microfluidic device before (FIG. 21A) and after (FIG. 21B) pressurizing and heating the liquid. [Figure 21B] 21A and 21B are exemplary close-up views of a vacuum- and heat-treated microfluidic device before (FIG. 21A) and after (FIG. 21B) pressurizing and heating the liquid. DETAILED DESCRIPTION OF THE INVENTION

[0014] While various embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many variations, changes, and substitutions may occur to those skilled in the art without departing from the invention. It is understood that various alternatives to the embodiments of the invention described herein may be employed.

[0015] As used herein, the terms "amplification" and "amplifying" are used interchangeably and generally refer to producing one or more copies of a nucleic acid or "amplification product." Such amplification may be using, for example, polymerase chain reaction (PCR) or isothermal amplification.

[0016] As used herein, the term "nucleic acid" generally refers to polymeric forms of any length (e.g., at least 2, 3, 4, 5, 6, 7, 8, 9, 10, 100, 500, or 1000 nucleotides), either deoxyribonucleotides or ribonucleotides, or analogs thereof. Nucleic acids can include one or more subunits selected from adenosine (A), cytosine (C), guanine (G), thymine (T), and uracil (U), or variants thereof. Nucleotides can include A, C, G, T, or U, or variants thereof. Nucleotides can include any subunit that can be incorporated into a growing nucleic acid chain. Such subunits can be specific to one of A, C, G, T, or U, or the more complementary A, C, G, T, or U, or any other subunit that is complementary to a purine (e.g., A or G, or variants thereof) or a pyrimidine (e.g., C, T, or U, or variants thereof). In some examples, nucleic acids can be single-stranded or double-stranded. In some cases, the nucleic acid molecule is circular. Non-limiting examples of nucleic acids include DNA and RNA. Nucleic acids can include coding or non-coding regions of genes or gene fragments, loci (or loci) defined by linkage analysis, exons, introns, messenger RNA (mRNA), transfer RNA, ribosomal RNA, small interfering RNA (siRNA), small hairpin RNA (shRNA), microRNA (miRNA), ribozymes, cDNA, recombinant nucleic acids, branched nucleic acids, plasmids, vectors, isolated DNA of any sequence, isolated RNA of any sequence, nucleic acid probes, and primers. Nucleic acids can also include one or more modified nucleotides, such as methylated nucleotides and nucleotide analogs.

[0017] As used herein, the terms "polymerase chain reaction reagents" or "PCR reagents" are used interchangeably and generally refer to compositions containing reagents necessary to complete a nucleic acid amplification reaction (e.g., DNA amplification); non-limiting examples of such reagents include a primer set or priming site (e.g., a nick) with specificity for a target nucleic acid, a polymerase, a suitable buffer, cofactors (e.g., divalent and monovalent cations), dNTPs, and other enzymes. PCR reagents may also include probes, indicators, and molecules comprising a probe and an indicator.

[0018] As used herein, the term "probe" generally refers to a molecule comprising a detectable moiety, the presence or absence of which may be used to detect the presence or absence of an amplification product. Non-limiting examples of detectable moieties may include a radioactive label, a stable isotope label, a fluorescent label, a chemiluminescent label, an enzymatic label, a colorimetric label, or any combination thereof.

[0019] As used herein, the term "extension" generally refers to the incorporation of nucleotides into a template-directed nucleic acid. Extension may occur with the assistance of an enzyme. For example, extension may occur with the assistance of a polymerase. Conditions under which extension may occur include an "extension temperature," which generally refers to the temperature at which extension is achieved, and an "extension period," which generally refers to the time allotted for extension to occur.

[0020] As used herein, the term "indicator molecule" generally refers to a molecule that includes a detectable moiety, the presence or absence of which can be used to indicate the partitioning of a sample. Non-limiting examples of detectable moieties can include a radioactive label, a stable isotope label, a fluorescent label, a chemiluminescent label, an enzyme label, a colorimetric label, or any combination thereof.

[0021] The term "sample" as used herein generally refers to any sample that contains or is suspected of containing a nucleic acid molecule. For example, a sample may be a biological sample containing one or more nucleic acid molecules. A biological sample may be obtained (e.g., extracted or isolated) from or contain blood (e.g., whole blood), plasma, serum, urine, saliva, mucosal excretions, sputum, stool, and tears. A biological sample may be a fluid sample or a tissue sample (e.g., a skin sample). In some examples, a sample is obtained from an acellular body fluid such as whole blood. In such cases, the sample may contain cell-free DNA and / or cell-free RNA. In some examples, the sample may contain circulating tumor cells. In some examples, the sample is an environmental sample (e.g., soil, waste, ambient air, etc.), an industrial sample (e.g., a sample from any industrial process), and a food sample (e.g., dairy products, vegetable products, and meat products).

[0022] As used herein, the term "fluid" generally refers to a liquid or gas. A fluid cannot maintain a defined shape and will flow over an observable time frame, filling the container in which it is placed. Thus, a fluid may have any suitable viscosity that allows it to flow. When two or more fluids are present, each fluid may be independently selected from among essentially any fluid (liquid, gas, etc.) by one of ordinary skill in the art.

[0023] As used herein, the term "distribute" generally refers to dividing or dispersing into multiple portions, or sharing. For example, a distributed sample is a sample that is separated from other samples. Examples of structures that allow for sample distribution include wells and microchambers.

[0024] As used herein, the term "microfluidic" generally refers to a chip, area, device, article, or system that includes at least one microchannel, a plurality of wicking openings, and an array of microchambers. The microchannels may have cross-sectional dimensions of about 10 millimeters (mm) or less, about 5 mm or less, about 4 mm or less, about 3 mm or less, about 2 mm or less, about 1.5 mm or less, about 1 mm or less, about 750 micrometers (μm) or less, about 500 μm or less, about 250 μm or less, about 100 μm or less, or less.

[0025] As used herein, the term "depth" generally refers to the distance measured from the bottom of a microchannel, wicking opening, or microchamber to the membrane capping the array of microchannels, wicking openings, and microchambers.

[0026] As used herein, the terms "cross-section" or "cross-sectional" may be used interchangeably and generally refer to the dimension or area of ​​a microchannel or wicking opening that is substantially perpendicular to the long dimension of the feature.

[0027] The present disclosure describes microfluidic devices that are formed from thermoplastics and incorporate membranes that allow for pressurized gas release when pressure is released while functioning as a gas barrier. Using thermoplastics to form microfluidic structures can enable the use of inexpensive and scalable injection molding processes, while the membranes can provide the ability to release gas under pressure, avoiding fouling issues that can exist in some microfluidic structures that do not incorporate such membranes.

[0028] One application of this structure is a microfluidic design formed from thermoplastic plastic and incorporating an array of dead-end microchambers connected by microchannels. This design can be used in dPCR applications to distribute reagents to the array of microchambers, thereby quantifying nucleic acids in dPCR.

[0029] Microfluidic device for analyzing nucleic acid samples In one aspect, the present disclosure provides a microfluidic device for analyzing nucleic acid samples. The device may include a microchannel connected to an inlet and an outlet. The microfluidic device may also include multiple microchambers and multiple siphoning openings. The multiple microchambers may be connected to the microchannel by multiple siphoning openings. The microfluidic device may include a thin thermoplastic membrane that caps and seals (e.g., hermetically seals) the microchannel, the microchambers, and the siphoning openings. The thin thermoplastic membrane may be at least partially gas-permeable when a pressure differential is applied across the thermoplastic membrane.

[0030] 1A and 1B illustrate examples of microfluidic structures according to certain embodiments of the present disclosure. FIG. 1A shows an exemplary microfluidic device from a top view. The microfluidic device includes a microchannel 110 with an inlet 120 and an outlet 130. The microchannel is connected to multiple siphon openings 101B-109B. The multiple siphon openings connect the microchannel to multiple microchambers 101A-109A. FIG. 1B illustrates a cross-sectional view of a single microchamber along dashed line A-A'. The single microchamber 101A is connected to the microchannel 110 by siphon opening 101B. The microfluidic device body 140 may be formed from a rigid plastic material. The microstructure of the microfluidic device may be capped and sealed by a thin membrane 150. The thin membrane may be gas-impermeable when a small pressure differential is applied across the membrane and gas-permeable when a large pressure differential is applied across the membrane. This may allow gas release through the membrane when pressure is applied to the internal structure of the microfluidic device. In an alternative embodiment, outgassing can occur when a vacuum is applied to the exterior of the microfluidic device.

[0031] The gas permeability of the thin film can be induced by high pressure. In some embodiments, the pressure-induced gas-permeable thin film can cover the array of microchambers, and the microchannels and wicking openings can be covered by a non-gas-permeable membrane. In some embodiments, the pressure-induced gas-permeable thin film can cover the array of microchambers and wicking openings, and the microchannels can be covered by a non-gas-permeable membrane. Alternatively, the pressure-induced gas-permeable thin film can cover the array of microchambers, the wicking openings, and the microchannels. In some embodiments, the thickness of the thin film can be about 500 micrometers (μm) or less, about 250 μm or less, about 200 μm or less, about 150 μm or less, about 100 μm or less, about 75 μm or less, about 50 μm or less, about 25 μm or less, or less. In some embodiments, the thickness of the thin film can be about 0.1 μm to about 200 μm, or about 0.5 μm to about 150 μm. In some examples, the thickness of the thin film can be about 50 μm to about 200 μm. In some examples, the thickness of the thin film can be about 100 μm to about 200 μm. In some examples, the thickness of the thin film is about 100 μm to about 150 μm. In one example, the thin film is about 100 μm thick. The thickness of the thin film can be selected based on the manufacturability of the thin film, the breathability of the thin film, the volume of each compartment that is outgassed, the available pressure, and / or the time to complete the wicking process.

[0032] In some embodiments, a microfluidic device may comprise a single array of microchambers. In some embodiments, a microfluidic device may comprise multiple arrays of microchambers, each array of microchambers separated from the others. The arrays of microchambers may be arranged in a line, a grid configuration, an alternating pattern, or any other configuration. In some embodiments, a microfluidic device may have at least about 1, at least about 2, at least about 3, at least about 4, at least about 5, at least about 10, at least about 15, at least about 20, at least about 30, at least about 40, at least about 50, or more arrays of microchambers. In some embodiments, the arrays of microchambers are identical. In some embodiments, a microfluidic device may comprise multiple arrays of microchambers that are not identical. The arrays of microchambers may all have the same external dimensions (e.g., the length and width of the array of microchambers that encompass all features of the array of microchambers), or the arrays of microchambers may have different external dimensions.

[0033] In some embodiments, the array of microchambers can have a width of up to about 100 mm, about 75 mm, about 50 mm, about 40 mm, about 30 mm, about 20 mm, about 10 mm, about 8 mm, about 6 mm, about 4 mm, about 2 mm, about 1 mm, or less. The array of microchambers can have a length of up to about 50 mm, about 40 mm, about 30 mm, about 20 mm, about 10 mm, about 8 mm, about 6 mm, about 4 mm, about 2 mm, 1 mm, or less. The width can be about 1 mm to 100 mm, or 10 mm to 50 mm. The length can be about 1 mm to 50 mm, or 5 mm to 20 mm.

[0034] In some examples, the array of microchambers may have a width of about 100 mm and a length of about 40 mm. In some examples, the array of microchambers may have a width of about 80 mm and a length of about 30 mm. In some examples, the array of microchambers may have a width of about 60 mm and a length of about 25 mm. In some examples, the array of microchambers may have a width of about 40 mm and a length of about 15 mm. In some examples, the array of microchambers may have a width of about 30 mm and a length of about 10 mm. In some examples, the array of microchambers may have a width of about 20 mm and a length of about 8 mm. In some examples, the array of microchambers may have a width of about 10 mm and a length of about 4 mm. The overall dimensions may be determined by the total number of microchambers used, the dimensions of each microchamber, and the minimum distance between each microchamber for manufacturability.

[0035] In some embodiments, the microchannel is substantially parallel to the long dimension of the microfluidic device. In some embodiments, the microchannel can be substantially perpendicular to the long dimension of the microfluidic device. In some embodiments, the microchannel can be neither substantially parallel nor substantially perpendicular to the long dimension of the microfluidic device. The angle between the microchannel and the long dimension of the microfluidic device can be at least about 5°, at least about 10°, at least about 15°, at least about 20°, at least about 30°, at least about 40°, at least about 50°, at least about 60°, at least about 70°, at least about 90°, at least about 100°, at least about 110°, at least about 120°, at least about 130°, at least about 140°, at least about 150°, at least about 160°, or at least about 170°. In some embodiments, the microchannel can be a single long channel. In some embodiments, the microchannel can have bends, curves, or corners. A microchannel can have a major dimension of 100 mm or less, about 75 mm or less, about 50 mm or less, about 40 mm or less, about 30 mm or less, about 20 mm or less, about 10 mm or less, about 8 mm or less, about 6 mm or less, about 4 mm or less, about 2 mm or less, or less. The length of a microchannel can be constrained by the length or width of the geometry of the microfluidic device. A microchannel can have a depth of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 80 μm or less, about 60 μm or less, about 30 μm or less, about 20 μm or less, about 10 μm or less, or less. The microchannels can have a cross-sectional dimension (e.g., width) of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 75 μm or less, about 50 μm or less, about 40 μm or less, about 30 μm or less, about 20 μm or less, about 10 μm or less, or less.

[0036] In some examples, the cross-sectional dimensions of the microchannel may be about 100 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 100 μm wide by about 80 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 100 μm wide by about 60 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 100 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 100 μm wide by about 20 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 100 μm wide by about 10 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 80 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 60 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 40 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 20 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 10 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 80 μm wide by about 80 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 60 μm wide by about 60 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 40 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 20 μm wide by about 20 μm deep. In some examples, the cross-sectional dimensions of the microchannel may be about 10 μm wide by about 10 μm deep. The cross-sectional shape of the microchannel may be any suitable cross-sectional shape, including, but not limited to, circular, oval, triangular, square, or rectangular. The cross-sectional area of ​​the microchannel may be constant along the length of the microchannel. Alternatively, or in addition, the cross-sectional area of ​​the microchannel may vary along the length of the microchannel. The cross-sectional area of ​​the microchannel can vary from about 50% to 150%, from about 60% to 125%, from about 70% to 120%, from about 80% to 115%, from about 90% to 110%, from about 95% to 100%, or from about 98% to 102%. The cross-sectional area of ​​the microchannel can vary from about 10,000 square micrometers (μm2 ) or less, approximately 7,500μm 2 Below, approximately 5,000μm 2 Below, approximately 2,500μm 2 Below, approximately 1,000μm 2 Below, approximately 750μm 2 Below, approximately 500μm 2 Below, approximately 400μm 2 Below, approximately 300μm 2 Below, approximately 200μm 2 Below, approximately 100μm 2 It can be less than or equal to.

[0037] In some embodiments, a microchannel can have a single inlet and a single outlet. Alternatively, a microchannel can have multiple inlets, multiple outlets, or multiple inlets and multiple outlets. The inlets and outlets can have the same diameter, or they can have different diameters. The inlets and outlets can have diameters of about 2.5 millimeters (mm) or less, about 2 mm or less, about 1.5 mm or less, about 1 mm or less, less than about 0.5 mm, or less.

[0038] In some embodiments, the array of microchambers may have at least about 1,000 microchambers, at least about 5,000 microchambers, at least about 10,000 microchambers, at least about 20,000 microchambers, at least about 30,000 microchambers, at least about 40,000 microchambers, at least about 50,000 microchambers, at least about 100,000 microchambers, or more. In some examples, the microfluidic device may have about 10,000 to about 30,000 microchambers. In some examples, the microfluidic device may have about 15,000 to about 25,000 microchambers. The microchambers may be cylindrical, hemispherical, or a combination of cylindrical and hemispherical shapes. The microchamber may have a diameter of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 80 μm or less, about 60 μm or less, about 30 μm or less, about 15 μm or less, or less. The depth of the microchamber may be about 500 μm or less, about 250 μm or less, about 100 μm or less, about 80 μm or less, about 60 μm or less, about 30 μm or less, about 15 μm or less, or less. In some examples, the microchamber may have a diameter of about 30 μm and a depth of about 100 μm. In some examples, the microchamber may have a diameter of about 35 μm and a depth of about 80 μm. In some examples, the microchamber may have a diameter of about 40 μm and a depth of about 70 μm. In some examples, the microchamber may have a diameter of about 50 μm and a depth of about 60 μm. In some examples, the microchamber may have a diameter of about 60 μm and a depth of about 40 μm. In some examples, the microchamber may have a diameter of about 80 μm and a depth of about 35 μm. In some examples, the microchamber may have a diameter of about 100 μm and a depth of about 30 μm. In some embodiments, the microchamber and the microchannel have the same depth. In alternative embodiments, the microchamber and the microchannel have different depths.

[0039] In some embodiments, the length of the wick opening is constant. In some embodiments, the length of the wick opening varies. The wick opening may have a major dimension of about 150 μm or less, about 100 μm or less, about 50 μm or less, about 25 μm or less, about 10 μm or less, about 5 μm or less, or less. In some embodiments, the depth of the wick opening may be about 50 μm or less, about 25 μm or less, about 10 μm or less, about 5 μm or less, or less. The wick opening may have a cross-sectional width of about 50 μm or less, about 40 μm or less, about 30 μm or less, about 20 μm or less, about 10 μm or less, about 5 μm or less, or less.

[0040] In some examples, the cross-sectional dimensions of the wicking opening may be about 50 μm wide by about 50 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 50 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 50 μm wide by about 30 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 50 μm wide by about 20 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 50 μm wide by about 10 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 50 μm wide by about 5 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 40 μm wide by about 50 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 30 μm wide by about 50 μm deep. In some examples, the cross-sectional dimensions of the wicking opening may be about 20 μm wide by about 50 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 10 μm wide by about 50 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 5 μm wide by about 50 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 40 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 30 μm wide by about 30 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 20 μm wide by about 20 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 10 μm wide by about 10 μm deep. In some examples, the cross-sectional dimensions of the wick opening may be about 5 μm wide by about 5 μm deep. The cross-sectional shape of the wick opening may be any suitable cross-sectional shape, including, but not limited to, circular, oval, triangular, square, or rectangular. In some embodiments, the cross-sectional area of ​​the wick opening may be constant along the length of the wick opening. Alternatively, or in addition, the cross-sectional area of ​​the siphon opening may vary along its length. The cross-sectional area of ​​the siphon opening may be larger at the connection to the microchannel than at the connection to the microchamber. Alternatively, the cross-sectional area of ​​the siphon opening at the connection to the microchamber may be larger than the cross-sectional area of ​​the siphon opening at the connection to the microchannel.The cross-sectional area of ​​the wicking opening can vary from about 50% to 150%, from about 60% to 125%, from about 70% to 120%, from about 80% to 115%, from about 90% to 110%, from about 95% to 100%, or from about 98% to 102%. The cross-sectional area of ​​the wicking opening is about 2,500 μm. 2 Below, approximately 1,000μm 2 Below, approximately 750μm 2 Below, approximately 500μm 2 Below, approximately 250μm 2 Below, approximately 100μm 2 Below, approximately 75μm 2 Below, approximately 50μm 2 Below, approximately 25μm 2 The cross-sectional area of ​​the siphon opening at the connection to the microchannel can be about 98% or less, about 95% or less, about 90% or less, about 85% or less, about 80% or less, about 75% or less, about 70% or less, about 60% or less, about 50% or less, about 40% or less, about 30% or less, about 20% or less, about 10% or less, about 5% or less, about 1% or less, or about 0.5% or less of the cross-sectional area of ​​the microchannel.

[0041] In some embodiments, the siphon opening is substantially perpendicular to the microchannel. In some embodiments, the siphon opening is not substantially perpendicular to the microchannel. In some embodiments, the angle between the siphon opening and the microchannel can be at least about 5°, at least about 10°, at least about 15°, at least about 20°, at least about 30°, at least about 40°, at least about 50°, at least about 60°, at least about 70°, at least about 90°, at least about 100°, at least about 110°, at least about 120°, at least about 130°, at least about 140°, at least about 150°, at least about 160°, or at least about 170°.

[0042] The microchambers can be arranged in a variety of patterns. Figures 2A and 2B show exemplary patterns of arrangement of microchambers, siphon openings, and microchannels. In some embodiments, multiple microchannels are employed, while in some embodiments, a single microchannel can be used. In some embodiments, a microchannel can comprise a group of subchannels. The group of subchannels can be connected by one or more cross-channels. In some of these embodiments, the subchannels are substantially parallel to one another, such that the array of microchambers forms a lattice of microchambers. Figure 2A shows an embodiment in which parallel subchannels 230 and one or more cross-channels 220 are used to form a lattice of microchambers.

[0043] In some embodiments, the microchambers are constructed with curved or angled subchannels connecting the microchambers to form a hexagonal lattice of microchambers. The hexagonal lattice of microchambers can also be formed and connected by a single microchannel, such as by microchannels forming a serpentine pattern 240 throughout the microfluidic device. Figure 2B shows an embodiment in which a single microchannel in a serpentine pattern forms the hexagonal lattice of microchambers.

[0044] In some embodiments, the length of the subchannel is constant. In some embodiments, the length of the subchannel can vary. The subchannel can have a major dimension of 100 mm or less, about 75 mm or less, about 50 mm or less, about 40 mm or less, about 30 mm or less, about 20 mm or less, about 10 mm or less, about 8 mm or less, about 6 mm or less, about 4 mm or less, about 2 mm or less, or less. The length of the subchannel can be constrained by the length or width of the geometry of the microfluidic device. In some embodiments, the subchannel can have the same cross-sectional dimension as the microchannel. In some embodiments, the subchannel can have a different cross-sectional dimension than the microchannel. In some embodiments, the subchannel can have the same depth as the microchannel but a different cross-sectional dimension. In some embodiments, the subchannel can have the same cross-sectional dimension as the microchannel but a different depth. For example, the subchannel can have a depth of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 80 μm or less, about 60 μm or less, about 30 μm or less, about 15 μm or less, or less. The subchannels can have a cross-sectional width of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 75 μm or less, about 50 μm or less, about 40 μm or less, about 30 μm or less, about 20 μm or less, about 10 μm or less, or less.

[0045] In some examples, the cross-sectional dimensions of the subchannels can be about 100 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 100 μm wide by about 80 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 100 μm wide by about 60 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 100 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 100 μm wide and about 20 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 100 μm wide by about 10 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 80 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 60 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 40 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 20 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 10 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 80 μm wide by about 80 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 60 μm wide by about 60 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 40 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 20 μm wide by about 20 μm deep. In some examples, the cross-sectional dimensions of the subchannels can be about 10 μm wide by about 10 μm deep. The cross-sectional shape of the subchannels can be any suitable cross-sectional shape, including, but not limited to, circular, oval, triangular, square, or rectangular. In some embodiments, the cross-sectional shape of the subchannels is different from the cross-sectional shape of the microchannel. In some embodiments, the cross-sectional shape of the subchannels is the same as the cross-sectional shape of the microchannel. The cross-sectional area of ​​the subchannel may be constant along the length of the subchannel. Alternatively, or in addition, the cross-sectional area of ​​the subchannel may vary along the length of the microchannel.The cross-sectional area of ​​the subchannel can vary between about 50% and 150%, between about 60% and 125%, between about 70% and 120%, between about 80% and 115%, between about 90% and 110%, between about 95% and 100%, or between about 98% and 102%. The cross-sectional area of ​​the subchannel is about 10,000 μm. 2 Below, approximately 7,500μm 2 Below, approximately 5,000μm 2 Below, approximately 2,500μm 2 Below, approximately 1,000μm 2 Below, approximately 750μm 2 Below, approximately 500μm 2 Below, approximately 400μm 2 Below, approximately 300μm 2 Below, approximately 200μm 2 Below, approximately 100μm 2 In some embodiments, the cross-sectional area of ​​the subchannel is the same as the cross-sectional area of ​​the microchannel. In some embodiments, the cross-sectional area of ​​the subchannel can be less than or equal to the cross-sectional area of ​​the microchannel. The cross-sectional area of ​​the subchannel can be about 98% or less, about 95% or less, about 90% or less, about 85% or less, about 80% or less, about 75% or less, about 70% or less, about 60% or less, about 50% or less, about 40% or less, about 30% or less, about 20% or less, or less than the cross-sectional area of ​​the microchannel.

[0046] In some embodiments, the length of the cross-channel is constant. In some embodiments, the length of the cross-channel can vary. The cross-channel can have a major dimension of about 100 mm or less, about 75 mm or less, about 50 mm or less, about 40 mm or less, about 30 mm or less, about 20 mm or less, about 10 mm or less, about 8 mm or less, about 6 mm or less, about 4 mm or less, about 2 mm or less, or less. The length of the cross-channel can be constrained by the length or width of the geometry of the microfluidic device. In some embodiments, the cross-channel can have the same cross-sectional dimension as the microchannel. In some embodiments, the cross-channel can have a different cross-sectional dimension than the microchannel. In some embodiments, the cross-channel can have the same depth but a different cross-sectional dimension than the microchannel. In some embodiments, the cross-channel can have the same cross-sectional dimension but a different depth than the microchannel. For example, the cross-channel can have a depth of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 80 μm or less, about 60 μm or less, about 30 μm or less, about 15 μm or less, or less. The cross-channels can have a cross-sectional width of about 500 μm or less, about 250 μm or less, about 100 μm or less, about 75 μm or less, about 50 μm or less, about 40 μm or less, about 30 μm or less, about 20 μm or less, about 10 μm or less, or less.

[0047] In some examples, the cross-sectional dimensions of the cross-channel may be about 100 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 100 μm wide by about 80 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 100 μm wide and about 60 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 100 μm wide and about 40 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 100 μm wide and about 20 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 100 μm wide by about 10 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 80 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 60 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 40 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 20 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 10 μm wide by about 100 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 80 μm wide by about 80 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 60 μm wide by about 60 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 40 μm wide by about 40 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 20 μm wide by about 20 μm deep. In some examples, the cross-sectional dimensions of the cross-channel may be about 10 μm wide by about 10 μm deep.

[0048] The cross-sectional shape of the cross-channel can be any suitable cross-sectional shape, including, but not limited to, circular, oval, triangular, square, or rectangular. In some embodiments, the cross-sectional shape of the cross-channel is different from the cross-sectional shape of the microchannel. In some embodiments, the cross-sectional shape of the cross-channel is the same as the cross-sectional shape of the microchannel. The cross-sectional area of ​​the cross-channel can be constant over the length of the cross-channel. Alternatively, or in addition, the cross-sectional area of ​​the cross-channel can vary over the length of the microchannel. The cross-sectional area of ​​the cross-channel can vary by about 50% to 150%, about 60% to 125%, about 70% to 120%, about 80% to 115%, about 90% to 110%, about 95% to 100%, or about 98% to 102%. The cross-sectional area of ​​the cross-channel can be greater than about 10,000 μm 2 Below, approximately 7,500μm 2 Below, approximately 5,000μm 2 Below, approximately 2,500μm 2 , about 1,000μm 2 Below, approximately 750μm 2 Below, approximately 500μm 2 Below, approximately 400μm 2 Below, approximately 300μm 2 Below, approximately 200μm 2 Below, approximately 100μm 2 In some embodiments, the cross-sectional area of ​​the cross-channel is the same as the cross-sectional area of ​​the microchannel. In some embodiments, the cross-sectional area of ​​the cross-channel is smaller than the cross-sectional area of ​​the microchannel. The cross-sectional area of ​​the cross-channel can be about 98% or less, about 95% or less, about 90% or less, about 85% or less, about 80% or less, about 75% or less, about 70% or less, about 60% or less, about 50% or less, about 40% or less, about 30% or less, about 20% or less, or less than the cross-sectional area of ​​the microchannel.

[0049] Methods for fabricating microfluidic devices In one aspect, the present disclosure provides a method for fabricating a microfluidic device. The method can include injection molding a thermoplastic to create a microfluidic structure. The microfluidic structure can include a microchannel, a plurality of microchambers, and a plurality of siphoning openings. The plurality of microchambers can be connected to the microchannel by a plurality of siphoning openings. The microchannel can include an inlet and an outlet. A thermoplastic film can be applied to cap the microfluidic structure. The thermoplastic film can be at least partially gas permeable when a pressure differential is applied across the thermoplastic film.

[0050] In some embodiments, the thermoplastic thin film is formed by injection molding. The thermoplastic thin film may be applied to the microfluidic structure by thermal bonding. Alternatively, or in addition, the thin film may be applied by chemical bonding. In some embodiments, the thermoplastic thin film is formed as part of and during the injection molding process to form the microfluidic device.

[0051] The body and membrane of the microfluidic device may comprise the same material. Alternatively, the body and membrane of the microfluidic device may comprise different materials. The body and membrane of the microfluidic device may comprise a thermoplastic. Examples of thermoplastics include, but are not limited to, cycloolefin polymer, acrylic, acrylonitrile butadiene styrene, nylon, polylactic acid, polybenzimidazole, polycarbonate, polyethersulfone, polyetheretherketone, polyetherimide, polyethylene, polyphenylene oxide, polyphenylene sulfide, polypropylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polyester, polyurethane, or any derivative thereof. The microfluidic device may comprise a homopolymer, a copolymer, or a combination thereof. The microfluidic device may be formed of a non-elastic material. Alternatively, or in addition, the microfluidic device may be formed of an elastic material.

[0052] In exemplary embodiments of the present disclosure, both the thermoplastic and the membrane are composed of cycloolefin polymers. One suitable thermoplastic is Zeonor 1430R (Zeon Chemical, Japan), while one suitable membrane is Zeonox 1060R (Zeon Chemical, Japan). In some embodiments, the membrane is a material that is gas-impermeable at low pressure and at least partially gas-permeable under pressure.

[0053] In some embodiments, the inlets and outlets are formed by mechanical drilling, hi some embodiments, the inlets and outlets are formed by melting, dissolving, or etching a thermoplastic.

[0054] FIG. 4 illustrates a method of manufacturing an embodiment of the present disclosure. In FIG. 4, an injection molding process 401 is used to form a microfluidic structure. The microfluidic structure includes an array of microchambers connected to at least one microchannel through a wicking opening, as shown in FIGS. 1A and 1B. The microfluidic structure is capped with a thin film. The capping process covers the openings on at least one side of the microstructure to close and seal the microstructure. In some embodiments of the present disclosure, capping is performed by a process 402 that applies a thin film to an injection-molded microfluidic structure. In some embodiments of the present disclosure, capping is performed by forming a thin film as part of the injection molding process 401.

[0055] As another example, while described in the context of microstructures formed by injection molding, microfluidic devices formed by other microfabrication techniques may also benefit from the use of such thin thermoplastic films that allow outgassing as described above. Such techniques include micromachining, microlithography, hot embossing, and other microfabrication techniques.

[0056] In one aspect, the present disclosure provides a method for forming a microfluidic device. The method for forming a microfluidic device can include providing a microfluidic structure and a membrane. The surface of the microfluidic structure, the surface of the membrane, or both can be treated with a solvent. The microfluidic structure can be pressed together with the membrane under first heating conditions to form a microfluidic device containing the solvent. A negative pressure can be applied to the microfluidic device under second heating conditions, and the negative pressure can be applied for a period of more than 30 minutes or at a pressure of less than 20 kilopascals (kPa) to remove at least a portion of the solvent.

[0057] 11 is a flowchart of an exemplary process 1100 for forming a microfluidic device. This process may be performed using at least one appropriately configured system, as described elsewhere herein. The system may be an operator (e.g., a human technician), an automated system (e.g., capable of functioning without human intervention), or a semi-automated system (e.g., a human performing some operations while a machine performs other operations). The system may perform all operations in one system (e.g., having one chamber for pressing, heating, and applying vacuum) or may perform operations in multiple systems (e.g., a heated jig for thermal bonding and a heated vacuum oven for solvent removal).

[0058] The system can provide a microfluidic structure and a membrane (1110). The microfluidic structure can be a microfluidic structure as described elsewhere herein. The microfluidic structure can include at least about 2, 3, 4, 5, 6, 7, 8, 9, 10, 50, 100, 250, 500, 1,000, 5,000, 10,000, 50,000, 100,000, 500,000, 1,000,000, or more features. The microfluidic structure can include up to about 1,000,000, 500,000, 100,000, 50,000, 10,000, 5,000, 1,000, 500, 250, 100, 50, 10, 9, 8, 7, 6, 5, 4, 3, 2, or fewer features. The feature may be at least one microchannel, at least one microchamber, at least one suction opening, or any combination thereof. For example, a microfluidic structure may have 100,000 microchannels, 100,000 microchambers, and five suction arrays. The microfluidic structure may be produced by injection methods (e.g., injection molding), extrusion methods (e.g., filament deposition 3D printing), or light-based methods (e.g., stereolithography, digital light projection 3D printing, laser sintering), etc. The microfluidic structure may be configured to accommodate and contain reactions (e.g., PCR reactions, chemical synthesis reactions). The microfluidic structure may be made of one or more materials. The one or more materials may be composites, plastics, metals, etc. Plastics can be methacrylates (e.g., polymethyl methacrylate (PMMA), polylauryl methacrylate (PLMA)), polylactic acid (PLA), polyunsaturated polymers (e.g., polyethylene, polypropylene), cyclic olefin copolymers (COC), polycarbonate, polysulfone, or polyetherimide, etc. Composites can be a combination of plastics, reinforcing agents (e.g., carbon fiber, nanoparticles, etc.). Metals can be pure metals (e.g., aluminum, iron) or alloys (e.g., stainless steel, tin).

[0059] The membrane can be a simple membrane (e.g., without defined features), a patterned membrane (e.g., including defined features), or a microfluidic system. The membrane can be the same microfluidic system (e.g., with the same features) as the microfluidic system, or a different microfluidic system (e.g., with different microfluidic features). The membrane can be produced by injection methods (e.g., injection molding), extrusion methods (e.g., filament deposition 3D printing, membrane extrusion), or light-based methods (e.g., stereolithography, digital light projection 3D printing, laser sintering), etc. The membrane can be made of a material as described above. The membrane can be made of the same material as the microfluidic structure. Alternatively, the membrane can be made of a different material than the microfluidic structure. For example, a microfluidic structure made of PMMA can be bonded to a membrane made of PLMA. In another example, both the microfluidic structure and the membrane can be COC polymers.

[0060] The system may treat the surface of the microfluidic structure, the surface of the membrane, or both with a solvent (1120). The treatment may be a solvent treatment, a physical process (e.g., plasma treatment, heat treatment), a roughening treatment, or any combination thereof. The solvent may be an organic solvent or an inorganic solvent (e.g., water, an aqueous solution, a eutectic metal mixture, a molten salt). The organic solvent may be a nonpolar solvent (e.g., hexane, cyclohexane, cyclohexene, toluene, xylene, toluene, benzene, carbon tetrachloride, etc.) or a polar solvent (e.g., methanol, ethanol, isopropanol, ethyl acetate, chloroform, acetone, dimethyl sulfoxide (DMSO), N-methylformamide (NMF), etc.). The solvent may be selected based on the solubility of the materials of the microfluidic structure, the membrane, or both. For example, a solvent may be selected because it does not completely dissolve the polymer of the membrane but provides sufficient solvation to create a strong seal between the membrane and the microfluidic structure. The treatment may involve introducing the solvent as a vapor, such as by drop casting, spin coating, doctor blading, or centrifugal casting (e.g., passing a carrier gas through a bubbler chamber to provide an open dish of solvent within a container containing the microfluidic device and / or membrane). For example, the membrane can be placed in a bell jar equipped with an inlet for nitrogen gas bubbled with cyclohexane, thus applying the evaporated cyclohexane to the membrane. The microfluidic device and membrane can be treated with the same or different solvents. For example, the microfluidic device can be treated with cyclohexane and the membrane with a mixture of xylenes. The treatment may include a waiting period after the solvent is applied. The waiting period can be a time to allow the solvent to interact with the microfluidic device and / or membrane before further treatment. The waiting period can be at least about 0.5, 1, 5, 10, 30, 60, 120, 180, 240, 300, 500, 1,000, or more seconds. The wait time can be up to about 1,000, 500, 300, 240, 180, 120, 60, 30, 10, 5, 1, 0.5, or less seconds. The wait period can be a range defined by any two numbers above.For example, after applying the acetone, the membrane can be left for 30-60 seconds to allow the acetone to soften the membrane's polymer.

[0061] The system may press the microfluidic structure together with the membrane under a first heating condition to form a microfluidic device containing the solvent (1130). Pressing may be performed with the aid of a jig, vice, hydraulic press, or pressurized gas chamber (e.g., autoclave, pressurized oven), etc., to bond the microfluidic structure to the membrane. Pressing may include applying a force of at least about 0.5 kiloNewtons (kN), 1 kN, 2 kN, 4 kN, 6 kN, 8 kN, 10 kN, 15 kN, 20 kN, 25 kN, 30 kN, 40 kN, 50 kN, or greater. Pressing may include applying a force of up to about 50 kN, 40 kN, 30 kN, 25 kN, 20 kN, 15 kN, 10 kN, 8 kN, 6 kN, 4 kN, 2 kN, 1 kN, 0.5 kN, or less.Pressing is performed at approximately 0.5kN to 1kN, 0.5kN to 2kN, 0.5kN to 4kN, 0.5kN to 6kN, 0.5kN to 8kN, 0.5kN to 10kN, 0.5kN to 15kN, 0.5kN to 20kN, 0.5kN to 25kN, 0.5kN to 30kN, 0.5kN to 40kN, 0.5kN to 50kN, 1kN to 2kN, 1kN to 4kN, 1kN to 6kN, 1kN to 8kN, 1kN to 10kN, 1kN to 15kN, 1kN to 20kN, 1kN~25kN, 1kN~30kN, 1kN~40kN, 1kN~50kN, 2kN~4kN, 2kN~6kN, 2kN~8kN, 2kN~10kN, 2kN~15kN, 2kN~20kN, 2k N~25kN, 2kN~30kN, 2kN~40kN, 2kN~50kN, 4kN~6kN, 4kN~8kN, 4kN~10kN, 4kN~15kN, 4kN~20kN, 4kN~25kN, 4kN~30kN, 4kN~40kN, 4kN~50kN, 6kN~8kN, 6kN~10kN, 6kN~15kN, 6kN~20kN, 6kN~25kN, 6kN~30kN, 6kN~40kN, 6kN~50kN, 8kN~1 0kN, 8kN~15kN, 8kN~20kN, 8kN~25kN, 8kN~30kN, 8kN~40kN, 8kN~50kN, 10kN~15kN, 10kN~20kN, 10kN~25kN, 10kN~30 The pressing may include applying a force of 10 kN, 10 kN to 40 kN, 10 kN to 50 kN, 15 kN to 20 kN, 15 kN to 25 kN, 15 kN to 30 kN, 15 kN to 40 kN, 15 kN to 50 kN, 20 kN to 25 kN, 20 kN to 30 kN, 20 kN to 40 kN, 20 kN to 50 kN, 25 kN to 30 kN, 25 kN to 40 kN, 25 kN to 50 kN, 30 kN to 40 kN, 30 kN to 50 kN, or 40 kN to 50 kN. In one example, the pressing includes applying a force of at least 1 kN. In another example, the pressing includes applying a force of 1 kN to 40 kN. The first heating condition can be heating the microfluidic structure together with the membrane to a temperature of at least about 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100, 105, 110, 120, 130, 140, 150, 160, 170, 180, 190, 200, or more degrees Celsius.The first heating condition can be heating the microfluidic structure together with the membrane to a temperature of up to about 200, 190, 180, 170, 160, 150, 140, 130, 120, 110, 105, 100, 95, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, or less °C. The first heating condition can be heating to a temperature range defined by any two of the above values. For example, the first heating condition can be heating to a temperature within the range of 75 °C to 85 °C. The first heating condition can be heating to at least about 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or more °C below the boiling point of the solvent. The first heating condition can be heating to a temperature below the boiling point of the solvent by up to about 10, 9, 8, 7, 6, 5, 4, 3, 2, 1, or less degrees Celsius. For example, if cyclohexane is used as the solvent, the first heating condition can be heating to 78 degrees Celsius, since the boiling point of cyclohexane is about 80 degrees Celsius. Pressing can be performed simultaneously with the first heating condition. Pressing can occur before and / or after the first heating condition. For example, the microfluidic device can be heated and then placed under pressure. Pressing and the first heating condition can be maintained for at least about 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 30, 45, 60, or more minutes. The pressing and first heating conditions can be maintained for up to about 60, 45, 30, 20, 19, 18, 17, 16, 15, 14, 13, 12, 11, 10, 9, 8, 7, 6, 5, 4, 3, 2, 1, or fewer minutes. For example, n-hexane can be applied to both the microfluidic structure and the membrane, and the two can be pressed together at 350 kPa and held at a temperature of 80°C for 2 minutes to form a microfluidic device. Heating under the first heating conditions can remove at least a small portion of the solvent from the microfluidic device. Heating under the first heating conditions can remove at least about 1, 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 97, 98, 99, or more percent of the solvent.Heating under the first heating conditions may remove up to about 99, 98, 97, 95, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, 20, 15, 10, 5, 1, or less percent of the solvent.

[0062] Subsequently, to form a microfluidic device, the system may apply a negative pressure to the microfluidic device for a period of more than 30 minutes to remove at least a portion of the solvent under second heating conditions (1140). The residual solvent may be solvent left over from operation 1120. The negative pressure may be applied using a vacuum pump. The vacuum pump may be attached to a chamber (e.g., a bell jar, a vacuum oven) containing the microfluidic device. The negative pressure may be a pressure drop of at least about 1, 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, or more kPa. The negative pressure can be a pressure drop of up to about 100, 99, 98, 97, 96, 95, 94, 93, 92, 91, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, 20, 15, 10, 5, 1, or less kPa. The negative pressure can be applied in parallel with the second heating condition. The negative pressure can be applied before and / or after the second heating condition. The second heating condition can be heating the microfluidic device to a temperature of at least about 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100, 105, 110, 120, 130, 140, 150, 160, 170, 180, 190, 200, or more degrees Celsius. The second heating condition can be heating the microfluidic device to a temperature of up to about 200, 190, 180, 170, 160, 150, 140, 130, 120, 110, 105, 100, 95, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, or less degrees Celsius. The second heating condition can be heating to a temperature range defined by any two of the above values. For example, the second heating condition can be heating to a temperature within the range of 80° C. to 90° C. The second heating condition can be heating to at least about 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, or more degrees C. below the boiling point of the solvent.The second heating condition can be heating to a temperature up to about 10, 9, 8, 7, 6, 5, 4, 3, 2, 1, or less degrees Celsius below the boiling point of the solvent. The boiling point of the solvent can depend on the amount of negative pressure applied. For example, if cyclohexane is used as the solvent, the boiling point of cyclohexane is about 45 degrees Celsius at a pressure of 20 kPa, so the second heating condition can be heating to 44 degrees Celsius. The negative pressure and / or second heating condition may be applied for at least about 0.25, 0.5, 0.75, 1, 1.5, 2, 2.5, 3, 3.5, 4, 4.5, 5, 5.5, 6, 6.5, 7, 7.5, 8, 8.5, 9, 9.5, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 30, 36, 42, 48, 54, 60, 66, 72 hours or more. The negative pressure and / or second heating condition may be applied for up to about 72, 66, 60, 54, 48, 42, 36, 30, 24, 23, 22, 21, 20, 19, 18, 17, 16, 15, 14, 13, 12, 11, 10, 9.5, 9, 8.5, 8, 7.5, 7, 6.5, 6, 5, 5, 5, 4.5, 4, 3.5, 3, 2.5, 2, 1.5, 1, 0.75, 0.5, 0.25 hours, or less. The heating and / or negative pressure of operation 1140 may remove at least a small portion of the residual solvent from the microfluidic device. The heating and / or negative pressure of operation 1140 may remove at least about 1, 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 99.9, or more percent of the residual solvent. The heating and / or negative pressure of operation 1140 may remove up to about 99.9, 99, 98, 97, 96, 95, 94, 93, 92, 91, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, 20, 15, 10, 5, 1, or less percent of the residual solvent. Applying negative pressure under second heating conditions may reduce the separation between the microfluidic structure and the membrane.

[0063] Additional strategies may be utilized to further reduce the amount of residual solvent in the microfluidic device. Increased pressure may be applied to the microfluidic device. The increased pressure may be sufficient to expel at least a portion of the residual solvent. For example, a pressurized gas line may be attached to the microfluidic device, and a dry gas may be flowed through the device to further remove the residual solvent. The microfluidic device may be washed with a different solvent having a higher vapor pressure. For example, if octane was used as the solvent to bond the microfluidic structure and membrane, pentane may be rapidly flowed through to remove most of the high-boiling octane before the microfluidic device is subjected to negative pressure and a second heating condition.

[0064] 12 is an exemplary schematic diagram for forming a microfluidic device. The microfluidic structure 1210 and membrane 1220 can be formed as described elsewhere herein. The microfluidic structure 1210 can have features with a feature size of at least about 0.1, 1, 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 125, 150, 175, 200, 225, 250, 275, 300, 325, 350, 375, 400, 450, 500, 550, 600, 650, 700, 750, 800, 850, 900, 950, 1,000, or more micrometers. The microfluidic structure 1210 can have features with feature sizes of up to about 1,000, 950, 900, 850, 800, 750, 700, 650, 600, 550, 500, 450, 400, 375, 350, 325, 300, 275, 250, 225, 200, 175, 150, 125, 100, 90, 80, 70, 60, 50, 40, 30, 20, 10, 5, 1, 0.1, or less micrometers. The microfluidic structure can have multiple different feature sizes. For example, the microfluidic structure can have a 500-micrometer well connected to a 250-micrometer channel by a 100-micrometer trough. The feature can be a channel, chamber, well, pump, neck, or the like. In this exemplary schematic, membrane 1220 has solvent 1230 applied to it, as described in operation 1120 of FIG.

[0065] Following operation 1130 of FIG. 11 , the microfluidic structure and membrane are bonded to produce microfluidic device 1240. Microfluidic device 1240 may include voids 1250. The voids may be features as described above. The voids 1250 may retain some of the solvent 1230 after the bonding process is complete. The retained solvent may weaken the microfluidic device, causing the microfluidic structure 1210 and membrane 1220 to delaminate or separate when pressure and / or heat are applied. To remove residual solvent from voids 1250, microfluidic device 1240 may be placed in a vacuum chamber 1260. The vacuum chamber 1260 may be involved in performing operation 1140 of FIG. 11 to remove residual solvent from the microfluidic device. Removing residual solvent may reduce delamination of the microfluidic structure and membrane. For example, the amount of delamination may be reduced by at least about 1, 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 99.9, or more percent. For example, the amount of delamination may be reduced by up to about 99.9, 99, 98, 97, 96, 95, 94, 93, 92, 91, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, 20, 15, 10, 5, 1, or less percent. For example, a microfluidic device that has been treated with heat and vacuum may have 50% less delamination under operating conditions than an untreated microfluidic device.

[0066] 18A-18B are exemplary close-up images of a microfluidic device fabricated without solvent removal before (FIG. 18A) and after (FIG. 18B) pressurizing and heating the liquid. Pressurizing and heating the liquid can simulate the operating conditions of a microfluidic device. The large, dark bubbles seen throughout FIG. 18B may be a sign of delamination of the microfluidic structure from the membrane.

[0067] 19A-19B are exemplary close-up images of a vacuum-treated microfluidic device before (FIG. 19A) and after (FIG. 19B) pressurizing and heating the liquid. 20A-20B are exemplary close-up images of a heat-treated microfluidic device before (FIG. 20A) and after (FIG. 20B) pressurizing and heating the liquid. Both the microfluidic devices in FIGS. 19B and 20B show a reduction in the number and severity of bubbles and delamination compared to FIG. 18B.

[0068] 21A-21B are exemplary close-up images of a vacuum- and heat-treated microfluidic device before (FIG. 21A) and after (FIG. 21B) pressurizing and heating the liquid, as described elsewhere herein. The use of both heat treatment and negative pressure can eliminate residual solvent and delamination. Removal of residual solvent can increase the yield of the microfluidic device production process by at least about 1, 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100, 125, 150, 175, 200, 250, 300, 400, 500, 600, 700, 800, 900, 1,000, or more percent. Removal of residual solvent may increase the yield of a microfluidic device production process by up to about 1,000, 900, 800, 700, 600, 500, 400, 300, 250, 200, 175, 150, 125, 100, 95, 90, 85, 80, 75, 70, 65, 60, 55, 50, 45, 40, 35, 30, 25, 20, 15, 10, 5, 1, or less percent. The usable feature fraction of a microfluidic device may be the number of usable features (e.g., microchambers) divided by the total number of such features in the microfluidic device. For example, a microfluidic device with 500 usable microchambers out of a total of 1,500 microchambers has a usable microchamber fraction of 0.33. Microfluidic devices produced using my methods and systems described herein may have a usable feature fraction of at least about 0.01, 0.05. 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95, 0.96, 0.97, 0.98, 0.99, 0.999, or more. Microfluidic devices produced using my methods and systems described herein may have a usable feature fraction of up to about 0.999, 0.99, 0.95, 0.9, 0.85, 0.8, 0.75, 0.7, 0.65, 0.6, 0.55, 0.5, 0.45, 0.4, 0.35, 0.3, 0.25, 0.2, 0.15, 0.1, 0.05, 0.01, or less.

[0069] Method for analyzing nucleic acid samples In one aspect, the present disclosure provides a method for analyzing a nucleic acid sample using a microfluidic device. The method may include providing a microfluidic device including a microchannel. The microchannel may include an inlet and an outlet. The microfluidic device may further include a plurality of microchambers connected to the microchannel by a plurality of wicking openings. The microfluidic device may be sealed by a thermoplastic thin film disposed adjacent to a surface of the microfluidic device, such that the thermoplastic thin film caps the microchannel, the plurality of microchambers, and the plurality of wicking openings. A reagent may be added to the inlet or outlet. The microfluidic device may be filled by providing a first pressure difference between the reagent and the microfluidic device, causing the reagent to flow into the microfluidic device. A second pressure difference may be applied between the microchannel and the plurality of microchambers to move the reagent into the plurality of microchambers, and the reagent may be distributed to the microchambers by passing gas in the plurality of microchambers through the thermoplastic thin film. The second pressure difference may be greater than the first pressure difference. A third pressure difference may be applied between the inlet and the outlet to introduce fluid into the microchannel without introducing the fluid into the microchambers. The third pressure differential may be less than the second pressure differential.

[0070] In some embodiments, the inlets and outlets are in fluid communication with pneumatic pumps. In some embodiments, the microfluidic device is in contact with a vacuum system. Sample loading and distribution can be performed by applying a pressure differential across various features of the microfluidic device. In some embodiments, sample loading and distribution can be performed without the use of valves between the microchamber and the microchannel to isolate the sample. For example, filling a microchannel can be performed by applying a pressure differential between the sample to be loaded and the microchannel. This pressure differential can be achieved by pressurizing the sample or by applying a vacuum to the microchannel. Filling a microchamber can be performed by applying a pressure differential between the microchannel and the microchamber. This can be achieved by pressurizing the microchannel or by applying a vacuum to the microchamber. Sample distribution can be performed by applying a pressure differential between a fluid and the microchannel. This pressure differential can be achieved by pressurizing the fluid or by applying a vacuum to the microchannel.

[0071] The membrane may have different permeability characteristics under different applied pressure differentials. For example, the membrane may be gas-impermeable under first and third pressure differentials (e.g., low pressure), which may be pressure differentials of smaller magnitude. The membrane may be at least partially gas-permeable under a second pressure differential (e.g., high pressure), which may be pressure differentials of larger magnitude. The first and third pressure differentials may be the same or different. The first pressure differential may be the difference in pressure between an inlet or outlet reagent and the microfluidic device. During filling of the microfluidic device, the pressure of the reagent may be higher than the pressure of the microfluidic device. During filling of the microfluidic device, the pressure differential (e.g., low pressure) between the reagent and the microfluidic device may be about 8 pounds per square inch (psi) or less, about 6 psi or less, about 4 psi or less, about 2 psi or less, about 1 psi or less, or less. In some examples, during filling of the microfluidic device, the pressure differential between the reagent and the microfluidic device may be about 1 psi to about 8 psi. In some examples, during filling of the microfluidic device, the pressure differential between the reagent and the microfluidic device can be from about 1 psi to about 6 psi. In some examples, during filling of the microfluidic device, the pressure differential between the reagent and the microfluidic device can be from about 1 psi to about 4 psi. The microfluidic device can be filled by applying a pressure differential between the reagent and the microfluidic device for about 20 minutes or less, about 15 minutes or less, about 10 minutes or less, about 5 minutes or less, about 3 minutes or less, about 2 minutes or less, about 1 minute or less, or less.

[0072] A filled microfluidic device may have reagents in the microchannels, wicking openings, microchambers, or any combination thereof. Backfilling of the reagent into the microchambers may occur during filling of the microfluidic device or during application of a second pressure differential. The second pressure differential (e.g., high pressure) may correspond to a pressure difference between the microchannel and the multiple microchambers. During application of the second pressure differential, the first fluid in the higher pressure region may force the second fluid in the lower pressure region out of the microfluidic device through the membrane. The first and second fluids may comprise a liquid or a gas. The liquid may comprise an aqueous or oil-based mixture. The second pressure differential may be achieved by pressurizing the microchannel. Alternatively, or in addition, the second pressure differential may be achieved by applying a vacuum to the microchambers. During application of the second pressure differential, the reagent in the microchannel may flow into the microchambers. Furthermore, during application of the second pressure differential, gas trapped in the wicking openings, microchambers, and microchannels may outgas through the membrane. During backfilling and outgassing of the microchamber, the pressure difference between the microchamber and the microchannel can be about 6 psi or more, about 8 psi or more, about 10 psi or more, about 12 psi or more, about 14 psi or more, about 16 psi or more, about 18 psi or more, about 20 psi or more, or more. In some examples, during backfilling of the microchamber, the pressure difference between the microchamber and the microchannel is about 8 psi to about 20 psi. In some examples, during backfilling of the microchamber, the pressure difference between the microchamber and the microchannel is about 8 psi to about 18 psi. In some examples, during backfilling of the microchamber, the pressure difference between the microchamber and the microchannel is about 8 psi to about 16 psi. In some examples, during backfilling of the microchamber, the pressure difference between the microchamber and the microchannel is about 8 psi to about 14 psi. In some examples, during backfilling of the microchamber, the pressure difference between the microchamber and the microchannel is about 8 psi to about 12 psi.In some examples, during backfilling of the microchamber, the pressure differential between the microchamber and the microchannel is about 8 psi to about 10 psi. The microchamber can be backfilled and outgassed by applying a pressure differential for more than about 5 minutes, more than about 10 minutes, more than about 15 minutes, more than about 20 minutes, more than about 25 minutes, more than about 30 minutes, or more.

[0073] The sample can be distributed by removing excess sample from the microchannel. Removing excess sample from the microchannel can prevent reagents in one microchamber from diffusing into the microchannel and into other microchambers through the wicking opening. Excess sample in the microchannel can be removed by introducing a fluid into the inlet or outlet of the microchannel. The pressure of the fluid can be higher than the pressure of the microchannel, thereby creating a pressure difference between the fluid and the microchannel. The fluid can be oxygen, nitrogen, carbon dioxide, air, a noble gas, or any combination thereof. During sample distribution, the pressure difference between the fluid and the microchannel can be about 8 psi or less, about 6 psi or less, about 4 psi or less, about 2 psi or less, about 1 psi or less, or less. In some examples, during sample distribution, the pressure difference between the fluid and the microchannel can be about 1 psi to about 8 psi. In some examples, during sample distribution, the pressure difference between the fluid and the microchannel can be about 1 psi to about 6 psi. In some examples, during sample distribution, the pressure difference between the fluid and the microchannel can be about 1 psi to about 4 psi. The sample can be dispensed by applying a pressure differential between the fluid and the microchannel for about 20 minutes or less, about 15 minutes or less, about 10 minutes or less, about 5 minutes or less, about 3 minutes or less, about 2 minutes or less, about 1 minute or less, or less.

[0074] 3A-3D illustrate a method of using the microfluidic device shown in FIG. 1A. In FIG. 3A, low pressure is applied to a reagent at inlet 120 via air pump 300, forcing the reagent into microchannel 110 and filling the microchamber through the wicking opening. The pressure forces the reagent to flow through the microchannel, thereby forcing it into the microchamber through the wicking opening. At this time, gas bubbles, such as bubble 301, may remain within the microchamber, wicking opening, or microchannel. Filling by applying low pressure may continue until the microchamber, wicking opening, and microchannel are substantially filled with reagent. The reagent may be a reagent used in a polymerase chain reaction. In some embodiments, the reagent is diluted so that there is no more than one PCR template in the reagent per microchamber of the microfluidic device.

[0075] In Figure 3B, a pneumatic pump 300 is connected to both the inlet 120 and the outlet 130, applying high pressure. The high pressure is transmitted through the reagent and applied to gas bubbles, such as bubble 301. Under the influence of this high pressure, the membrane 150 becomes gas permeable, allowing bubble 301 to release gas through the membrane 150. Applying this high pressure allows the microchambers, wicking openings, and microchannels to be substantially free of gas bubbles, thereby avoiding fouling.

[0076] In FIG. 3C, the fluid is reintroduced by applying a low pressure to the gas at the inlet 120 via an air pressure pump 300. The air pressure may not be high enough to expel the gas through the membrane or to force gas bubbles into the wicking openings and microchambers. Instead, the gas may remove the reagent from the microchannels, leaving the reagent isolated within each microchamber and wicking opening. In some embodiments, the gas is air. In some embodiments, the gas may be an inert gas, such as nitrogen, carbon dioxide, or a noble gas. Such a gas may be used to avoid reactions between the reagent and the component gases of air.

[0077] Figure 3D shows the state of the system after low pressure is applied in Figure 3C. After applying the low-pressure gas, the microchamber and wicking openings can remain filled with reagent, while the microchannels can be emptied of reagent. The reagent can remain stationary within the microchamber due to the capillary force and high surface tension created by the wicking openings. The capillary force and high surface tension can prevent the reagent from flowing into the microchannels and minimize evaporation of the reagent.

[0078] Partitioning of the sample can be confirmed by the presence of an indicator in the reagent. The indicator can include a molecule with a detectable moiety. The detectable moiety can include a radioactive species, a fluorescent label, a chemiluminescent label, an enzymatic label, a colorimetric label, or any combination thereof. Non-limiting examples of radioactive species include: 3 H, 14 C. 22 Na, 32 P, 33 P, 35 S, 42 K. 45 Ca, 59 Fe, 123 I, 124 I, 125 I, 131 I, or 203Hg. Non-limiting examples of fluorescent labels include fluorescent proteins, optically active dyes (e.g., fluorescent dyes), organometallic fluorophores, or any combination thereof. Non-limiting examples of chemiluminescent labels include enzymes of the luciferase class, such as Cypridina luciferase, Gaussia luciferase, Renilla luciferase, and firefly luciferase. Non-limiting examples of enzyme labels include horseradish peroxidase (HRP), alkaline phosphatase (AP), β-galactosidase, glucose oxidase, or other labels.

[0079] In some embodiments, the indicator molecule is a fluorescent molecule. Fluorescent molecules can include fluorescent proteins, fluorescent dyes, and organometallic fluorophores. In some embodiments, the indicator molecule is a protein fluorophore. Protein fluorophores can include green fluorescent protein (GFP, a fluorescent protein that fluoresces in the green region of the spectrum, generally emitting light having a wavelength of 500-550 nanometers), cyan fluorescent protein (CFP, a fluorescent protein that fluoresces in the cyan region of the spectrum, generally emitting light having a wavelength of 450-500 nanometers), and red fluorescent protein (RFP, a fluorescent protein that fluoresces in the red region of the spectrum, generally emitting light having a wavelength of 600-650 nanometers).Non-limiting examples of protein fluorophores include AcGFP, AcGFP1, AmCyan, AmCyan1, AQ143, AsRed2, Azami Green, Azurite, BFP, Cerulean, CFP, CGFP, Citrine, copGFP, CyPet, dKeima-Tandem, DsRed, dsRed-Express, dsRed-Monomer, DsRed2, dTomato, dTomato-Tandem, EBFP, EBFP2, ECFP, EGFP, Emerald, EosFP, EYFP, GFP, HcRed-Tandem, HcRed1, JRed, Katuska, Kusabira Orange, Kusabira Orange2, mApple, mBanana, mCerulean, mCFP, mCherry, mCitrine, mECFP, mEmerald, mGrape1, mGrape2, mHoneydew, and Midori-Ishi Mutants and spectral variants of Cyan, mKeima, mKO, mOrange, mOrange2, mPlum, mRaspberry, mRFP1, mRuby, mStrawberry, mTagBFP, mTangerine, mTeal, mTomato, mTurquoise, mWasabi, PhiYFP, ReAsH, Sapphire, Superfolder GFP, T-Sapphire, TagCFP, TagGFP, TagRFP, TagRFP-T, TagYFP, tdTomato, Topaz, TurboGFP, Venus, YFP, YPet, ZsGreen, and ZsYellow1 are included.

[0080] In some embodiments, the indicator molecule is a fluorescent dye. Non-limiting examples of fluorescent dyes include SYBR green, SYBR blue, DAPI, propidium iodide, Hoeste, SYBR gold, ethidium bromide, acridine, proflavine, acridine orange, acriflavine, fluorcoumanin, ellipticine, daunomycin, chloroquine, distamycin D, chromomycin, homidium, mithramycin, ruthenium polypyridyl, anthramycin, phenanthridine and acridine, ethidium bromide, propidium iodide, hexidium iodide, dihydroethidium, ethidium homodimer-1 and -2, ethidium monoazide, and ACMA, Hoechst 33258, Hoechst 33342, Hoechst 34580, DAPI, acridine orange, 7-AAD, actinomycin D, LDS751, hydroxystilbamidine, SYTOX Blue, SYTOX Green, SYTOX Orange, POPO-1, POPO-3, YOYO-1, YOYO-3, TOTO-1, TOTO-3, JOJO-1, LOLO-1, BOBO-1, BOBO-3, PO-PRO-1, PO-PRO-3, BO-PRO-1, BO-PRO-3, TO-PRO-1, TO-PRO-3, TO-PRO-5, JO-PRO-1, LO-PRO-1, YO-PRO-1, YO-PRO-3, PicoGreen, OliGreen, RiboGreen, SYBR Gold, SYBR Green I, SYBR Green II, SYBR DX, SYTO-40, -41, -42, -43, -44, -45 (blue), SYTO-13, -16, -24, -21, -23, -12, -11, -20, -22, -15, -14, -25 (green), SYTO-81, -80, -82, -83, -84, -85 (orange), SYTO-64, -17, -59, -61, -62, -60, -63 (red), fluorescein, fluorescein isothiocyanate (FITC), tetramethylrhodamine isothiocyanate (TRITC), rhodamine, tetramethylrhodamine, R-phycoerythrin, Cy-2, Cy-3, Cy-3.5, Cy-5, Cy5.5, Cy-7, Texas Red, Phar-Red, allophycocyanin (APC), Sybr Green I, Sybr Green II, Sybr Gold, CellTracker Green, 7-AAD, ethidium homodimer I, ethidium homodimer II, ethidium homodimer III, ethidium bromide, umbelliferone, eosin, green fluorescent protein, erythrosine, coumarin, methylcoumarin, pyrene, malachite green, stilbene, Lucifer Yellow, Cascade Blue, dichlorotriazinylamine fluorescein fluorescein), dansyl chloride, fluorescent lanthanide complexes such as those containing europium and terbium, carboxytetrachlorofluorescein, 5 and / or 6-carboxyfluorescein (FAM), 5-(or 6-)iodoacetamidofluorescein, 5-{[2(and 3)-5-(acetylmercapto)-succinyl]amino}fluorescein (SAMSA-fluorescein), Lissamine rhodamine B sulfonyl chloride, 5 and / or 6 carboxyrhodamine (ROX), 7-amino-methyl-coumarin, 7-amino-4-methylcoumarin-3-acetic acid (AMCA), BODIPY fluorophores, 8-methoxypyrene-1,3,6-trisulfonic acid trisodium salt, 3,6-disulfonato-4-amino-naphthalimide, phycobiliproteins, AlexaFluor 350, 405, 430, 488, 532, 546, 555, 568, 594, 610, 633, 635, 647, 660, 680, 700, 750, and 790 dyes, DyLight 350, 405, 488, 550, 594, 633, 650, 680, 755, and 800 dyes, or other fluorophores.

[0081] In some embodiments, the indicator molecule is an organometallic fluorophore. Non-limiting examples of organometallic fluorophores include lanthanide ion chelates, non-limiting examples of which include tris(dibenzoylmethane)mono(1,10-phenanthroline)europium(III), tris(dibenzoylmethane)mono(5-amino-1,10-phenanthroline)europium(III), and Lumi4-Tb cryptate.

[0082] In some embodiments, images of the microfluidic device are taken. Images may be taken of a single microchamber, an array of microchambers, or multiple arrays of microchambers simultaneously. In some embodiments, images are taken through the body of the microfluidic device. In some embodiments, images are taken through a membrane of the microfluidic device. In some embodiments, images are taken through both the body and membrane of the microfluidic device. In some embodiments, the body of the microfluidic device is substantially optically transparent. In some embodiments, the body of the microfluidic device is substantially optically opaque. In some embodiments, the membrane is substantially optically transparent. In some embodiments, images may be taken before filling the microfluidic device with reagents. In some embodiments, images may be taken after filling the microfluidic device with reagents. In some embodiments, images may be taken while filling the microfluidic device with reagents. In some embodiments, images are taken to confirm reagent dispensing. In some embodiments, images are taken during the reaction to monitor the product of the reaction. In some embodiments, the product of the reaction includes an amplification product. In some embodiments, images are taken at specified intervals. Alternatively, or in addition, a video of the microfluidic device may be taken. The specified intervals may include taking images during the reaction at least every 300 seconds, at least every 240 seconds, at least every 180 seconds, at least every 120 seconds, at least every 90 seconds, at least every 60 seconds, at least every 30 seconds, at least every 15 seconds, at least every 10 seconds, at least every 5 seconds, at least every 4 seconds, at least every 3 seconds, at least every 2 seconds, at least every 1 second, or more frequently.

[0083] In some embodiments, the method for using the microfluidic device may further include amplifying the nucleic acid sample. The microfluidic device may be filled with an amplification reagent including nucleic acid molecules, components necessary for the amplification reaction, indicator molecules, and amplification probes. The amplification may be performed by thermal cycling multiple microchambers. The detection of nucleic acid amplification may be performed by imaging the microchambers of the microfluidic device. The nucleic acid molecules may be quantified by counting the microchambers that successfully amplify the nucleic acid molecules and applying Poisson statistics. In some embodiments, the amplification and quantification of nucleic acids may be performed in a single integrated unit.

[0084] Various nucleic acid amplification reactions can be used to amplify nucleic acid molecules in a sample and generate amplification products. Amplification of nucleic acid targets can be linear, exponential, or a combination thereof. Non-limiting examples of nucleic acid amplification methods include primer extension, polymerase chain reaction, reverse transcription, isothermal amplification, ligase chain reaction, helicase-dependent amplification, asymmetric amplification, rolling circle amplification, and multiple displacement amplification. In some embodiments, the amplification product is DNA or RNA. For embodiments aimed at DNA amplification, any DNA amplification method can be employed. DNA amplification methods include, but are not limited to, PCR, real-time PCR, assembly PCR, asymmetric PCR, digital PCR, dial-out PCR, helicase-dependent PCR, nested PCR, hot-start PCR, inverse PCR, methylation-specific PCR, miniprimer PCR, multiplex PCR, overlap-extension PCR, thermal asymmetric interlaced PCR, touchdown PCR, and ligase chain reaction. In some embodiments, DNA amplification is linear, exponential, or any combination thereof. In some embodiments, DNA amplification is achieved by digital PCR (dPCR).

[0085] The reagents required for nucleic acid amplification may include a polymerizing enzyme, a reverse primer, a forward primer, and an amplification probe. Examples of polymerizing enzymes include, but are not limited to, nucleic acid polymerases, transcriptases, or ligases (e.g., enzymes that catalyze the formation of bonds). Polymerizing enzymes may be naturally occurring or synthetic. Examples of polymerases include DNA polymerases, RNA polymerases, thermostable polymerases, wild-type polymerases, modified polymerases, E. coli DNA polymerase I, T7 DNA polymerase, bacteriophage T4 DNA polymerase, phi29 (phi29) DNA polymerase, Taq polymerase, Tth polymerase, Tli polymerase, Pfu polymerase, Pwo polymerase, VENT polymerase, DEEPVENT polymerase, Ex-Taq polymerase, LA-Taw polymerase, Sso polymerase, Poc polymerase, Pab polymerase, Mth polymerase, ES4 polymerase, Tru polymerase, Tac polymerase, Tne polymerase, Tma polymerase, Tca polymerase, Tih polymerase, Tfi polymerase, Platinum These include Taq polymerase, Tbr polymerase, Tfl polymerase, Pfutubo polymerase, Pyrobest polymerase, KOD polymerase, Bst polymerase, Sac polymerase, Klenow fragment polymerase with 3'-5' exonuclease activity, and their mutants, modified products, and derivatives. For hot-start polymerases, denaturation at a temperature of about 92°C to 95°C for a period of about 2 to 10 minutes can be used.

[0086] In some embodiments, the amplifier probe is a sequence-specific oligonucleotide probe. The amplifier probe may be optically active when hybridized to the amplification product. In some embodiments, the amplifier probe is detectable as nucleic acid amplification progresses. The intensity of the optical signal may be proportional to the amount of amplification product. The probe may be linked to any of the optically active detectable moieties (e.g., dyes) described herein and may further include a quencher capable of blocking the optical activity of the associated dye. Non-limiting examples of probes that may be useful as detectable moieties include TaqMan probes, TaqMan Tamara probes, TaqMan MGB probes, Lion probes, locked nucleic acid probes, or molecular beacons. Non-limiting examples of quenchers that may be useful for blocking the optical activity of the probe include Black Hole Quencher (BHQ), Iowa Black FQ and RQ quenchers, or Internal ZEN Quenchers. Alternatively, or in addition, the probe or quencher may be any probe useful in the context of the disclosed methods.

[0087] In some embodiments, the amplification probe is a dual-labeled fluorescent probe. The dual-labeled probe may comprise a fluorescent reporter and a fluorescent quencher linked to a nucleic acid. The fluorescent reporter and the fluorescent quencher may be positioned close to each other. The proximity of the fluorescent reporter and the fluorescent quencher may block the optical activity of the fluorescent reporter. The dual-labeled probe may bind to the nucleic acid molecule to be amplified. During amplification, the fluorescent reporter and the fluorescent quencher may be cleaved by the exonuclease activity of the polymerase. By cleaving the fluorescent reporter and the quencher from the amplification probe, the fluorescent reporter may regain its optical activity, allowing detection. Dual-labeled fluorescent probes can include a 5' fluorescent reporter with an excitation maximum wavelength of about 450 nanometers (nm), 500 nm, 525 nm, 550 nm, 575 nm, 600 nm, 625 nm, 650 nm, 675 nm, 700 nm, or greater, and an emission maximum wavelength of about 500 nm, 525 nm, 550 nm, 575 nm, 600 nm, 625 nm, 650 nm, 675 nm, 700 nm, or greater. Dual-labeled fluorescent probes can also include a 3' fluorescent quencher. The fluorescent quencher can quench fluorescence emission wavelengths of about 380 nm to 550 nm, 390 nm to 625 nm, 470 nm to 560 nm, 480 nm to 580 nm, 550 nm to 650 nm, 550 nm to 750 nm, or 620 nm to 730 nm.

[0088] In some embodiments, nucleic acid amplification is performed by thermal cycling the microchambers of the microfluidic device. Thermal cycling can include controlling the temperature of the microfluidic device by applying heat or cooling to the microfluidic device. Heating or cooling methods can include resistive heating or cooling, radiative heating or cooling, conductive heating or cooling, convective heating or cooling, or any combination thereof. Thermal cycling can include incubating the microchambers at a temperature high enough to denature the nucleic acid molecules for a sustained period, followed by a cycle of incubating the microchambers at an extension temperature for an extension period. The denaturation temperature can vary depending on, for example, the particular nucleic acid sample, the reagents used, and the reaction conditions. In some embodiments, the denaturation temperature can be between about 80°C and about 110°C. In some embodiments, the denaturation temperature can be between about 85°C and about 105°C. In some embodiments, the denaturation temperature can be between about 90°C and about 100°C. In some embodiments, the denaturation temperature can be between about 90°C and about 98°C. In some embodiments, the denaturation temperature can be between about 92°C and about 95°C. In some embodiments, the denaturation temperature can be at least about 80°C, at least about 81°C, at least about 82°C, at least about 83°C, at least about 84°C, at least about 85°C, at least about 86°C, at least about 87°C, at least about 88°C, at least about 89°C, at least about 90°C, at least about 91°C, at least about 92°C, at least about 93°C, at least about 94°C, at least about 95°C, at least about 96°C, at least about 97°C, at least about 98°C, at least about 99°C, at least about 100°C, or more.

[0089] The duration of denaturation can vary depending on, for example, the specific nucleic acid sample, the reagents used, and the reaction conditions. In some embodiments, the duration of denaturation can be about 300 seconds or less, 240 seconds, 180 seconds, 120 seconds, 90 seconds, 60 seconds, 55 seconds, 50 seconds, 45 seconds, 40 seconds, 35 seconds, 30 seconds, 25 seconds, 20 seconds, 15 seconds, 10 seconds, 5 seconds, 2 seconds, or 1 second. In alternative embodiments, the duration of denaturation can be about 120 seconds or less, 90 seconds, 60 seconds, 55 seconds, 50 seconds, 45 seconds, 40 seconds, 35 seconds, 30 seconds, 25 seconds, 20 seconds, 15 seconds, 10 seconds, 5 seconds, 2 seconds, or 1 second.

[0090] The extension temperature can vary depending on, for example, the particular nucleic acid sample, the reagents used, and the reaction conditions. In some embodiments, the extension temperature can be about 30°C to about 80°C. In some embodiments, the extension temperature can be about 35°C to about 75°C. In some embodiments, the extension temperature can be about 45°C to about 65°C. In some embodiments, the extension temperature can be about 55°C to about 65°C. In some embodiments, the extension temperature can be about 40°C to about 60°C. In some embodiments, the extension temperature is at least about 35°C, at least about 36°C, at least about 37°C, at least about 38°C, at least about 39°C, at least about 40°C, at least about 41°C, at least about 42°C, at least about 43°C, at least about 44°C, at least about 45°C, at least about 46°C, at least about 47°C, at least about 48°C, at least about 49°C, at least about 50°C, at least about 51°C, at least about 52°C, at least about 53°C, at least about 54°C, at least about 55°C, at least about 56°C, at least about 57°C, at least about 58°C, at least about 59°C, at least about 60°C, at least about 61°C, at least about 62°C, at least about 63°C, at least about 64°C, at least about 65°C, at least about 66°C, at least about 67°C, at least about 68°C, at least about 69°C, at least about 70°C, at least about 71°C, at least about 72°C, at least about 73°C, at least about 74°C, at least about 75°C, at least about 76°C, at least about 77°C, at least about 78°C, at least about 79°C, at least about 80°C, at least about 81°C, at least about 82°C, at least about 83°C, at least about 84°C, at least about 85°C, at least about 86°C, at least about 87°C, at least about 88°C, at least about 89°C, at least about 90°C The temperature may be about 57°C, at least about 58°C, at least about 59°C, at least about 60°C, at least about 61°C, at least about 62°C, at least about 63°C, at least about 64°C, at least about 65°C, at least about 66°C, at least about 67°C, at least about 68°C, at least about 69°C, at least about 70°C, at least about 71°C, at least about 72°C, at least about 73°C, at least about 74°C, at least about 75°C, at least about 76°C, at least about 77°C, at least about 78°C, at least about 79°C, or at least about 80°C.

[0091] The extension time can vary depending on, for example, the specific nucleic acid sample, the reagents used, and the reaction conditions. In some embodiments, the duration of the extension can be about 300 seconds or less, 240 seconds, 180 seconds, 120 seconds, 90 seconds, 60 seconds, 55 seconds, 50 seconds, 45 seconds, 40 seconds, 35 seconds, 30 seconds, 25 seconds, 20 seconds, 15 seconds, 10 seconds, 5 seconds, 2 seconds, or 1 second. In alternative embodiments, the duration of the extension can be about 120 seconds or less, 90 seconds, 60 seconds, 55 seconds, 50 seconds, 45 seconds, 40 seconds, 35 seconds, 30 seconds, 25 seconds, 20 seconds, 15 seconds, 10 seconds, 5 seconds, 2 seconds, or 1 second.

[0092] Nucleic acid amplification can include multiple cycles of thermal cycling. Any suitable number of cycles can be performed. In some embodiments, the number of cycles performed can be more than about 5, more than about 10, more than about 15, more than about 20, more than about 30, more than about 40, more than about 50, more than about 60, more than about 70, more than about 80, more than about 90, more than about 100, or more. The number of cycles performed can depend on the number of cycles required to obtain detectable amplification products. For example, the number of cycles required to detect nucleic acid amplification during dPCR can be about 100 or less, about 90 or less, about 80 or less, about 70 or less, about 60 or less, about 50 or less, about 40 or less, about 30 or less, about 20 or less, about 15 or less, about 10 or less, about 5 or less cycles, or less.

[0093] The time to reach a detectable amount of amplification product can vary depending on the specific nucleic acid sample, the reagents used, the amplification reaction used, the number of amplification cycles used, and the reaction conditions. In some embodiments, the time to reach a detectable amount of amplification product can be about 120 minutes or less, 90 minutes or less, 60 minutes or less, 50 minutes or less, 40 minutes or less, 30 minutes or less, 20 minutes or less, 10 minutes or less, or 5 minutes or less.

[0094] In some embodiments, the ramping rate (e.g., the rate at which the microchamber transitions from one temperature to another) is important for amplification. For example, the temperature and time at which the amplification reaction results in a detectable amount of amplification product can vary depending on the ramping rate. The ramping rate can affect the time, temperature, or both time and temperature used during amplification. In some embodiments, the ramping rate is constant between cycles. In some embodiments, the ramping rate varies between cycles. The ramping rate can be adjusted based on the sample being processed. For example, an optimal ramping rate can be selected to provide a robust and efficient amplification method.

[0095] FIG. 5 illustrates a digital PCR process employed in the microfluidic device described above. In operation 501, reagents are dispensed as shown in FIGS. 3A-3D. In operation 502, the reagents are thermally cycled to perform a PCR reaction on the reagents in the microchambers. This operation may be performed using, for example, a flat-block thermal cycler. In operation 503, image acquisition is performed to determine which microchambers successfully performed the PCR reaction. Image acquisition may be performed using, for example, a three-color probe detection unit. In operation 504, Poisson statistics are applied to the microchamber counts determined in operation 503 to convert the raw number of positive chambers to nucleic acid concentrations.

[0096] System for analyzing nucleic acid samples In one aspect, the present disclosure provides an apparatus for analyzing nucleic acid samples using a microfluidic device. The apparatus may include a transfer stage configured to hold one or more microfluidic devices. The microfluidic device may include a microchannel with an inlet and an outlet, multiple microchambers connected to the microchannel by multiple suction openings, and a membrane capping or covering the microfluidic device. The apparatus may include a pneumatic module in fluid communication with the microfluidic device. The pneumatic module may load reagents into the microfluidic device and dispense the reagents into the microchambers. The apparatus may include a thermal module in thermal communication with the multiple microchambers. The thermal module may control the temperature of the microchambers and thermally cycle the microchambers. The apparatus may include an optical module capable of imaging the multiple microchambers. The apparatus may also include a computer processor coupled to the transfer stage, the pneumatic module, the thermal module, and the optical module. The computer processor can be programmed to (i) direct the pneumatic module to load reagents into the microfluidic device and distribute the reagents into the plurality of microchambers, (ii) direct the thermal module to thermal cycle the plurality of microchambers, and (iii) direct the optical module to image the plurality of microchambers.

[0097] The transfer stage may be configured to load microfluidic devices, hold microfluidic devices, and eject microfluidic devices. The transfer stage may be stationary at one or more coordinates. Alternatively, or in addition, the transfer stage may be capable of moving in the X direction, the Y direction, the Z direction, or any combination thereof. The transfer stage may be capable of holding a single microfluidic device. Alternatively, or in addition, the transfer stage may be capable of holding at least two, at least three, at least four, at least five, at least six, at least seven, at least eight, at least nine, at least ten, or more microfluidic devices.

[0098] The pneumatic module may be configured to be in fluid communication with the inlets and outlets of the microfluidic device. The pneumatic module may have multiple connection points that can connect to multiple inlets and multiple outlets. The pneumatic module may be capable of filling, backfilling, and dispensing a single array of microchambers at a time or multiple arrays of microchambers in parallel. The pneumatic module may further comprise a vacuum module. The pneumatic module may provide increased pressure to the microfluidic device or may provide a vacuum to the microfluidic device.

[0099] A thermal module can be configured in thermal communication with the microchambers of the microfluidic device. The thermal module can be configured to control the temperature of a single array of microchambers or to control the temperature of multiple arrays of microchambers. The thermal control module can implement the same thermal program across all arrays of microchambers or can implement different thermal programs for different arrays of microchambers.

[0100] The optical module can be configured to emit and detect light at multiple wavelengths. The emission wavelengths can correspond to the excitation wavelengths of the indicator and amplifier probes used. The emitted light can include wavelengths with a maximum intensity of about 450 nm, 500 nm, 525 nm, 550 nm, 575 nm, 600 nm, 625 nm, 650 nm, 675 nm, 700 nm, or any combination thereof. The detected light can include wavelengths with a maximum intensity of about 500 nm, 525 nm, 550 nm, 575 nm, 600 nm, 625 nm, 650 nm, 675 nm, 700 nm, or any combination thereof. The optical module can be configured to emit light at one, two, three, four, or more wavelengths. The optical module can be configured to detect light at one, two, three, four, or more wavelengths. A wavelength of the emitted light can correspond to the excitation wavelength of the indicator molecule. Another wavelength of the emitted light can correspond to the excitation wavelength of the amplifier probe. One detected wavelength of light may correspond to the emission wavelength of an indicator molecule. Another detected wavelength of light may correspond to an amplifier probe used to detect a reaction within the microchamber. The optical module may be configured to image a section of the array of microchambers. Alternatively, or in addition, the optical module may image the entire array of microchambers in a single image.

[0101] FIG. 6 illustrates a machine 600 for performing the process of FIG. 5 in a single machine. The machine 600 includes a pneumatic module 601, which includes a pump and a manifold and can be moved in the Z direction and is operable to apply pressure as described in FIGS. 3A-3D. The machine 600 also includes a thermal module 602, such as a flat-block thermal cycler, for thermally cycling the microfluidic device and thereby performing a polymerase chain reaction. The machine 600 further includes an optical module 603, such as an epifluorescence optical module, that can optically determine which microchambers in the microfluidic device successfully performed a PCR reaction. The optical module 603 can provide this information to a processor 604, which uses Poisson statistics to convert the raw counts of successful microchambers into nucleic acid concentrations. A transfer stage 605 is used to move a given microfluidic device between various modules, and multiple microfluidic devices may be handled simultaneously. The microfluidic devices described above, combined with incorporating this functionality into a single machine, reduce the cost, workflow complexity, and space requirements of dPCR over other implementations of dPCR.

[0102] The present disclosure is not to be limited in scope by the specific embodiments described herein. Indeed, other various embodiments and modifications of the present disclosure, in addition to those described herein, will be apparent to those skilled in the art from the foregoing description and accompanying figures.

[0103] For example, while described in the context of dPCR applications, other microfluidic devices that may require multiple separated, liquid-filled microchambers separated by gas or other fluids may benefit from the use of thin thermoplastic membranes to allow gas release and avoid gas fouling, while also providing manufacturability and cost advantages. Besides PCR, other nucleic acid amplification methods, such as loop-mediated isothermal amplification, can be adapted to perform digital detection of specific nucleic acid sequences according to embodiments of the present disclosure. Microchambers can also be used to isolate single cells with suction openings designed to approximate the diameter of the cells to be isolated. In some embodiments, embodiments of the present disclosure can be used to separate plasma from whole blood when the suction opening is much smaller than the size of a blood cell.

[0104] Computer system for analyzing nucleic acid samples and forming microfluidic devices - Patent Application 20070122997 The present disclosure provides a computer-controlled system programmed to implement the disclosed methods. FIG. 7 illustrates a computer system 701 that can be programmed or otherwise configured for nucleic acid sample processing and analysis, including sample distribution, amplification, and detection. The computer system 701 can coordinate various aspects of the disclosed methods and systems. The computer system 701 can be a user's electronic device or a computer system that can be remotely located relative to the electronic device. The electronic device can be a mobile electronic device. The computer system 701 can be programmed or otherwise configured to perform one or more of the operations of FIG. 11. For example, heating conditions and application of negative pressure can be computer-controlled. In another example, the computer system can control the application of solvent to a microfluidic structure.

[0105] The computer system 701 includes a central processing unit (CPU, also referred to herein as a "processor" and a "computer processor") 705, which may be a single-core or multi-core processor, or multiple processors for parallel processing. The computer system 701 also includes memory or memory locations 710 (e.g., random access memory, read-only memory, flash memory), an electronic storage unit 715 (e.g., a hard disk), a communication interface 720 (e.g., a network adapter) for communicating with one or more other systems, and peripheral devices 725, such as cache, other memory, data storage devices, and / or electronic display adapters. The memory 710, the storage unit 715, the interface 720, and the peripheral devices 725 are in communication with the CPU 705 via a communication bus (solid lines), such as a motherboard. The storage unit 715 may be a data storage unit (or data repository) for storing data. The computer system 701 may be operably coupled to a computer network ("network") 730 with the aid of the communication interface 720. Network 730 may be the Internet, an Internet and / or extranet, or an intranet and / or extranet that can communicate with the Internet. Network 730 may, in some cases, be a telecommunications and / or data network. Network 730 may include one or more computer servers that may enable distributed computing, such as cloud computing. Network 730 may, in some cases, implement a peer-to-peer network with the aid of computer system 701, which may enable devices coupled to computer system 701 to operate as clients or servers.

[0106] The CPU 705 may execute a series of machine-readable instructions, which may be embodied in a program or software. The instructions may be stored in a memory location, such as the memory 710. The instructions may be directed to the CPU 705, which may then program or otherwise configure the CPU 705 to implement the methods of the present disclosure. Examples of operations performed by the CPU 705 may include fetch, decode, execute, and writeback.

[0107] The CPU 705 may be part of a circuit, such as an integrated circuit. One or more other components of the system 701 may be included in the circuit. In some cases, the circuit is an application specific integrated circuit (ASIC).

[0108] The storage unit 715 may store files such as drivers, libraries, and saved programs. The storage unit 715 may store user data, such as user preferences and user programs. The computer system 701 may optionally include one or more additional data storage units external to the computer system 701, such as located on a remote server in communication with the computer system 701 via an intranet or the Internet.

[0109] Computer system 701 can communicate with one or more remote computer systems via network 730. For example, computer system 701 can communicate with a remote computer system of a user (e.g., a service provider). Examples of remote computer systems include a personal computer (e.g., a portable PC), a slate or tablet PC (e.g., an Apple® iPad, a Samsung® Galaxy Tab), a telephone, a smartphone (e.g., an Apple® iPhone, an Android-enabled device, a Blackberry®), or a personal digital assistant. A user can access computer system 701 via network 730.

[0110] The methods described herein may be implemented by machine (e.g., a computer processor) executable code stored in an electronic storage location of computer system 701, such as memory 710 or electronic storage unit 715. The machine-executable or machine-readable code may be provided in the form of software. In use, the code may be executed by processor 705. In some cases, the code may be retrieved from storage unit 715 and stored in memory 710 for easy access by processor 705. In some circumstances, electronic storage unit 715 may be omitted, and machine-executable instructions may be stored on memory 710.

[0111] The code may be pre-compiled and configured for use on a machine having a processor adapted to execute the code, or may be compiled at run time. The code may be provided in a programming language that can be selected to allow the code to be executed in a pre-compiled or compiled manner.

[0112] In one aspect, the present disclosure provides a non-transitory computer-readable medium comprising machine-executable code that, when executed by one or more computer processors, implements a method for forming a microfluidic device for amplifying and quantifying nucleic acid samples. The method may include: injection molding a thermoplastic to create a microfluidic structure comprising at least one microchannel, a plurality of microchambers, and a plurality of wicking openings, wherein the plurality of microchambers are connected to the at least one microchannel by the plurality of wicking openings; forming at least one inlet and at least one outlet, wherein the at least one inlet and at least one outlet are in fluid communication with at least the microchannel; and applying a thermoplastic film to cap the microfluidic structure, wherein the thermoplastic film is at least partially gas-permeable to a pressure differential applied across the thermoplastic film.

[0113] In one aspect, the present disclosure provides a non-transitory computer-readable medium comprising machine-executable code that, when executed by one or more computer processors, implements a method for analyzing and quantifying nucleic acid samples, the method including providing a microfluidic device comprising at least one microchannel, the at least one microchannel comprising at least one inlet and at least one outlet, the microfluidic device further comprising a plurality of microchambers connected to the microchannel by a plurality of wicking openings, and a thermoplastic thin film disposed adjacent to a surface of the microfluidic device, the thermoplastic thin film adapted to cap the microchannel, the plurality of microchambers, and the plurality of wicking openings; providing a reagent to the at least one inlet or the at least one outlet; and filling the microfluidic device by providing a first pressure differential between the reagent and the microfluidic device. The method may include filling the microchannel with a first pressure differential to cause a reagent to flow into the microfluidic device; applying a second pressure differential between the microchannel and the plurality of microchambers to move the reagent into the plurality of microchambers and passing gas in the plurality of microchambers through the plurality of microchambers, the plurality of wicking openings, and a thermoplastic film capping or covering the microchannel, the second pressure differential being greater than the first pressure differential; and applying a third pressure differential between the at least one inlet and the at least one outlet to introduce fluid into the microchannel without introducing fluid into the microchambers, the third pressure differential being less than the second pressure differential.

[0114] In one aspect, the present disclosure provides a non-transitory computer-readable medium including machine-executable code that, when executed by one or more computer processors, implements a method for forming a microfluidic device. The method may include providing a microfluidic structure and a membrane; treating the surface of the microfluidic structure, the surface of the membrane, or both, with a solvent; subsequently pressing the microfluidic structure together with the membrane under first heating conditions to form a microfluidic device containing the solvent; and applying a negative pressure to the microfluidic device under second heating conditions. The negative pressure may be applied for a period of more than 30 minutes or at a pressure less than 20 kilopascals to remove at least a portion of the solvent. Implementation of the method may include selecting a solvent based at least in part on the material from which the microfluidic structure and / or membrane are constructed. The computer may monitor the progress of pressing the microfluidic structure and membrane. For example, a sum harmonic generation signal formed at the interface between the solvent and membrane can be used to determine the degree of intercalation of the solvent into the polymer of the membrane. The computer-readable medium may be configured to improve the consistency of the produced microfluidic devices. For example, the computer readable medium can maintain substantially similar conditions for a series of microfluidic devices, thus reducing the variability that exists between devices.

[0115] Aspects of the systems and methods provided herein, such as computer system 701, can be embodied in programming. Various aspects of the technology may be thought of as a "product" or "article of manufacture," typically in the form of machine (or processor) executable code and / or associated data executed or embodied in some type of machine-readable medium. The machine-executable code can be stored in an electronic storage unit, such as memory (e.g., read-only memory, random-access memory, flash memory) or a hard disk. "Storage" type media can include any or all of the tangible memory of a computer, processor, or the like, or their associated modules, such as various semiconductor memories, tape drives, disk drives, etc., that may provide non-transitory storage for software programming at any one time. All or portions of the software may sometimes be communicated via the Internet or various other telecommunications networks. Such communication may enable, for example, loading of the software from one computer or processor to another, e.g., from a management server or host computer to an application server computer platform. Thus, another type of medium that may carry software elements includes light waves, radio waves, and electromagnetic waves, such as those used across physical interfaces between local devices, through wired and optical landline networks, and on various air links. Physical elements that carry such waves, such as wired or wireless links, or optical links, may also be considered software-bearing media. As used herein, unless limited to non-transitory, tangible "storage" media, terms such as computer or machine "readable medium" refer to any medium that participates in providing instructions to a processor for execution.

[0116] Thus, machine-readable media such as computer-executable code may take many forms, including, but not limited to, tangible storage media, carrier wave media, or physical transmission media. Non-volatile storage media include optical or magnetic disks, such as any of the storage devices of any computer, such as those that may be used to implement the databases, etc., shown in the figures. Volatile storage media include dynamic memory, such as the main memory of such a computer platform. Tangible transmission media include coaxial cables; copper wire, including the wires that comprise a bus within a computer system, and optical fiber. Carrier wave transmission media may take the form of electric or electromagnetic signals, or acoustic or light waves, such as those generated during radio frequency (RF) and infrared (IR) data communications. Thus, common forms of computer-readable media include, for example, floppy disks, flexible disks, hard disks, magnetic tape, any other magnetic media, CD-ROMs, DVDs or DVD-ROMs, any other optical media, punched card paper tape, any other physical storage medium with a pattern of holes, RAM, ROM, PROMs and EPROMs, FLASH-EPROMs, any other memory chips or cartridges, carrier waves carrying data or instructions, cables or links carrying such carrier waves, or any other medium from which a computer reads programming code and / or data. Many of these forms of computer-readable media may be involved in carrying one or more sequences of one or more instructions to a processor for execution.

[0117] The computer system 701 may include or be in communication with an electronic display 735 that includes a user interface (UI) 740 for providing, for example, a depth profile of the epithelial tissue. Examples of UIs include, but are not limited to, graphical user interfaces (GUIs) and web-based user interfaces.

[0118] The methods and systems of the present disclosure can be implemented by one or more algorithms. The algorithms can be implemented by software when executed by the central processing unit 705. The algorithms can, for example, regulate the systems or implement the methods provided herein. For example, the algorithms can monitor the pressure of solvent outgassing from the microfluidic device and adjust the heat, vacuum pressure, and / or time to reach a predetermined level of solvent within the microfluidic device.

[0119] While preferred embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Numerous variations, changes, and substitutions will occur to those skilled in the art without departing from the invention. It is understood that various alternatives to the embodiments of the invention described herein can be employed in practicing the invention. The following claims define the scope of the invention, and it is intended that methods and structures within the scope of these claims and their equivalents be covered thereby.

[0120] Example 1: Demonstration of Reagent Dispensing Reagent distribution is demonstrated using a microfluidic device fabricated using standard microscope slide dimensions. The total dimensions of the microfluidic device are 1 inch wide, 3 inches long, and 0.6 inches thick. The device contains four different microchamber array designs, for a total of eight different microchamber arrays. Figure 8A shows an eight-unit device and an enlarged perspective view of one of the four array designs. The microfluidic device is molded from cycloolefin polymer (COP), Zeonor 790R (Zeon Chemicals, Japan), and sealed by thermal bonding using a 100 μm COP thin film, Zeonox ZF14 (Zeon Chemicals, Japan). The enlarged microfluidic segment shown has serpentine microchannels connected to the microchambers by wicking openings. The microchambers are in a lattice configuration. The microchambers and microchannels are 40 μm deep, and the wicking openings are 10 μm deep. Each separated microfluidic segment has an inlet and outlet channel. Before the membrane is thermally bonded to the base of the microfluidic device, the inlet and outlet channels are mechanically drilled. The inlet and outlet channels have a diameter of 1.6 mm.

[0121] Figure 8B shows a fluorescence image of reagent loading, backfilling of the microchamber, and dispensing. Prior to loading the microfluidic device, 2 microliters (μL) of 4 kilodalton (kDa) fluorescein-conjugated dextran (Sigma-Aldrich, St. Louis, MO) is pipetted into the inlet. The microfluidic device is then contacted with an air pressure controller. The air pressure controller loads the microchannels of the microfluidic device by applying 4 psi of pressure to the inlet for 3 minutes. The microchamber is filled by pressurizing both the inlet and outlet to 10 psi for 20 minutes. Reagent is then dispensed by flushing air at 4 psi through the inlet of the microfluidic device to remove the reagent from the microchannel.

[0122] Example 2: Single-instrument workflow for dPCR The method for nucleic acid amplification and quantification in a microfluidic device can be performed in a single instrument. The instrument can be capable of reagent distribution, thermal cycling, image acquisition, and data analysis. Figure 9 shows a prototype instrument capable of a single-instrument workflow. The instrument is designed to accommodate up to four devices at a time and perform image acquisition and thermal cycling simultaneously. The instrument includes a pneumatic module for reagent distribution, a thermal module for temperature control and thermal cycling, an optical module for imaging, and a scanning module. The optical module has dual fluorescence imaging capabilities and can detect fluorescence emissions at approximately 520 nm and 600 nm, corresponding to the emission wavelengths of the FAM and ROX fluorophores, respectively. The optical module has a 25 mm x 25 mm field of view and a 0.14 numerical aperture (NA).

[0123] The single-instrument workflow can be tested using an established qPCR assay that utilizes TaqMan probes as reporters. Briefly, a nucleic acid sample is mixed with PCR reagents, which include a forward primer, a reverse primer, a TaqMan probe, and an ROX indicator. The sequence of the forward primer is 5'-GCC TCA ATA AAG CTT GCC TTG A-3'. The sequence of the reverse primer is 5'-GGG GCG CAC TGC TAG AGA-3'. The sequence of the TaqMan probe is 5'-[FAM]-CCA GAG TCA CAC AAC AGA CGG GCA CA-[BHQ1]-3'. The nucleic acid sample and PCR reagents are loaded and dispensed into the microfluidic device according to the protocol described above. PCR amplification is performed by increasing the microchamber temperature to 95°C and holding that temperature for 10 minutes, followed by 40 cycles of ramping the microchamber temperature from 95°C to 59°C at a rate of 2.4°C per second, holding at 59°C for 1 minute, and then returning the temperature to 95°C. Figures 10A-10D show fluorescence images of a sample containing approximately one nucleic acid template copy per compartment and a compartment with zero nucleic acid template copies per compartment (no template control, or NTC) after PCR amplification, as well as fluorescence intensity plots of a sample containing approximately one nucleic acid copy per compartment and the NTC compartment after PCR amplification. Figure 10A shows a fluorescence image of a dispensed sample without nucleic acid template; each gray dot represents a single microchamber containing PCR reagents. Images were taken by exciting the ROX indicator in each microchamber with light at approximately 575 nm and imaging the emission spectrum, which has an emission maximum at approximately 600 nm. Figure 10B shows a partitioned sample containing approximately one copy of the nucleic acid template per compartment after PCR amplification. After PCR amplification, imaging reveals a microchamber containing the ROX indicator and a microchamber containing both the ROX indicator and the emission from the FAM probe. The excitation wavelength of the FAM probe is approximately 495 nm, with an emission wavelength maximum of approximately 520 nm. Each microchamber contains the ROX indicator, the FAM probe, and the BHQ-1 quencher.As in Figure 10A, each gray dot represents a microchamber containing a dispensed sample that does not contain a nucleic acid template. White dots represent microchambers containing successfully amplified nucleic acid samples. Upon successful PCR amplification, the FAM fluorophore and BHQ-1 quencher can be cleaved from the TaqMan probe, resulting in a detectable fluorescent signal. Figures 10C and 10D show two-dimensional scatter plots of FAM fluorescence intensity as a function of ROX fluorescence intensity for each microchamber of a dispensed and amplified microfluidic device, respectively. Figure 10C shows a sample with zero nucleic acid template per compartment, resulting in a predominantly constant FAM fluorescence intensity across a range of ROX fluorescence intensities. Figure 10D shows a sample with approximately one copy of nucleic acid template per compartment, resulting in a FAM fluorescence intensity that varies as a function of ROX fluorescence intensity due to the presence of an amplification signal within the compartment.

[0124] Example 3: Effect of treatments on fabricated microfluidic devices Figures 13-17 are examples of microfluidic devices at various points in the operation of Figure 11. In each of Figures 13-17, five images are optical microscope images showing large areas of the microfluidic device. Figure 13 is an example of a microfluidic device after treating the surface of the microfluidic structure, the surface of the membrane, or both with a solvent. The microfluidic device can be formed by spin-coating an extruded cycloolefin polymer (COP) membrane with cyclohexane or ethanol, followed by pressing an injection-molded COP microfluidic structure onto the solvent-coated membrane at 350 kPa and 80°C for 2 minutes. Figure 14 is an example of a microfluidic device after liquid pressurization and heating. Microfluidic devices can be exposed to heat and liquid pressure as part of their use. Heat and liquid pressure can result in delamination 1410. Delamination can be observed by a darkening of the image. In Figure 14, more delamination is observable than is marked. More intensive delamination can be observed in Figure 15, an example of a microfluidic device after air pressurization and heating. The increased darkness throughout the image of the microfluidic device may indicate near complete delamination of the microfluidic structure from the membrane.

[0125] Figure 16 is an example of a processed microfluidic device after liquid pressurization and heating. Processing of the microfluidic device can include reducing the pressure around the device to approximately 4 kPa (a drop of approximately 97 kPa) while heating the device to 80 °C, and maintaining the vacuum and temperature for 24 hours. In contrast to Figure 14, Figure 16 does not demonstrate the occurrence of delamination. Similarly, Figure 17, an example of a processed microfluidic device after air pressurization and heating, does not demonstrate the complete delamination observed in Figure 15. This may be due to more complete removal of solvent in Figures 16-17 compared to Figures 14-15. Removing residual solvent increases the percentage of usable microfluidic devices, reducing waste and costs.

[0126] While preferred embodiments of the present invention have been shown and described herein, it will be obvious to those skilled in the art that such embodiments are provided by way of example only. It is not intended that the present invention be limited by the specific examples provided herein. The present invention has been described with reference to the foregoing specification, and the descriptions and illustrations of the embodiments herein are not meant to be construed in a limiting sense. Numerous variations, changes, and substitutions will occur to those skilled in the art without departing from the invention. Furthermore, it is to be understood that all aspects of the present invention are not limited to the specific depictions, configurations, or relative proportions set forth herein, which depend upon a variety of conditions and variables. It is to be understood that various alternatives to the embodiments of the present invention described herein may be employed in practicing the present invention. It is therefore intended that the present invention also cover such alternatives, modifications, variations, or equivalents. The following claims define the scope of the invention, and it is intended that methods and structures within the scope of these claims and their equivalents be covered thereby.

Claims

1. 1. A method for forming a microfluidic device, comprising: providing a microfluidic structure and membrane with a single inlet connected via microchannels to a plurality of dead-end microchambers; treating the surface of the microfluidic structure, the surface of the membrane, or both, with a solvent; subsequent to treating the surface of the microfluidic device, pressing the microfluidic structure together with the membrane under first heating conditions to form the microfluidic device containing the solvent; applying a negative pressure to the microfluidic device under second heating conditions, the negative pressure being applied for a period of more than 30 minutes or at a pressure less than 20 kilopascals (kPa) to remove at least a portion of the solvent; The method of claim 1, wherein the second heating condition comprises heating the microfluidic device at a temperature in the range of 1° C. to 10° C. below the boiling point of the solvent, the boiling point of the solvent being dependent on the magnitude of the applied negative pressure.

2. The method of claim 1 , wherein the microfluidic structure further comprises a plurality of wicking openings.

3. The method of claim 1 , wherein the treating comprises application of one or more solvents.

4. 4. The method of claim 3, wherein the one or more solvents comprise a solvent selected from the group consisting of isopropyl alcohol, acetone, ethyl alcohol, hexane, cyclohexane, toluene, and benzene.

5. The method of claim 1 , wherein the pressing comprises applying a force of at least about 0.5 kilonewtons (kN).

6. 10. The method of claim 1, wherein the first heating condition comprises heating to a temperature of at least about 60°C.

7. The method of claim 1 , wherein said applying said negative pressure comprises applying a pressure of less than about 7 kPa.

8. The method of claim 1 , wherein the second heating condition comprises heating the microfluidic device to a temperature of at least about 70° C.

9. 10. The method of claim 8, wherein at least about 75% of the solvent is removed from the microfluidic device by heating the microfluidic device to a temperature of at least about 70°C.

10. The method of claim 1 , wherein applying the negative pressure comprises applying the negative pressure for at least about 2 hours.

11. The method of claim 1 , wherein applying the negative pressure removes at least about 50% of the solvent from the microfluidic device.

12. The method of claim 1 , wherein applying the negative pressure under the second heating condition reduces separation between the microfluidic structure and the membrane.

13. The method of claim 1 , wherein the microchannel or the dead-end microchamber has a feature size of up to about 500 micrometers.

14. 10. The method of claim 1, wherein removing the solvent increases the yield of the microfluidic device production process by at least about 25%.

15. The method of claim 1 , wherein the microfluidic device has a usable feature ratio of at least about 0.5.

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