Devices and methods for calibration, monitoring and control of integrated photonic systems

Abstract

A device and method comprising: a photodetector with a waveguide; two metal layers connected to the photodetector; a measuring device connected between the two metal layers for measuring an electrical parameter between the two metal layers, the electrical parameter being indicative of an amount of light propagating in the waveguide; and a voltage source connected between the two metal layers, where applying a voltage between the two metal layers changes the refractive index of the waveguide, thereby affecting the phase of the light propagating in the waveguide, and the voltage to be applied is determined according to the resistance measured by the resistance measuring device.

Description

[Technical Field]

[0001] The present disclosure relates generally to photonic systems, and more particularly to methods and devices for calibrating, monitoring and controlling photonic devices. [Background technology]

[0002] Photonics is the physical science of the generation, detection, and manipulation of light (photons) by emission, transmission, modulation, signal processing, switching, amplification, and sensing.

[0003] Photonic systems are becoming increasingly prevalent in all fields including, but not limited to, light detection, telecommunications, information processing, photonic computing, lighting, metrology, spectroscopy, holography, medicine (surgery, vision correction, endoscopy, health monitoring), biophotonics, military technology, laser material processing, art diagnostics, materials processing, art diagnostics involving infrared reflectography (X-ray, ultraviolet fluorescence, XRF), agriculture, and robotics.

[0004] Some important applications of photonic systems include transmitting and receiving information, multiplexing and demultiplexing information, etc. Photonic devices can include, but are not limited to, photodetectors including photodiodes or phototransistors, laser diodes, light-emitting diodes, solar and photovoltaic cells, displays, and optical amplifiers. Other examples include devices for modulating light beams and for combining and separating light beams of different wavelengths. Summary of the Invention [Problem to be solved by the invention]

[0005] The need for photonic devices arises from the limitations and restrictions of electronic devices. The first limitation is due to electron velocity saturation in terms of information transfer rate. The second limitation arises from the high power consumption of electronic devices, and therefore the heat generated and cost. The use of photonic devices provides higher rates with little heating, thus solving or facilitating these problems. [Means for solving the problem]

[0006] An illustrative embodiment of the disclosed subject matter is a device comprising: a photodetector comprising a waveguide; two metal layers connected to the photodetector; a measurement device connected between the two metal layers for measuring an electrical parameter between the two metal layers, the electrical parameter indicative of the amount of light propagating in the waveguide; and a voltage source connected between the two metal layers, wherein applying a voltage between the two metal layers changes the refractive index of the waveguide, thereby affecting the phase of the light propagating in the waveguide, the voltage to be applied being determined according to the resistance measured by the resistance measurement device. In the device, the photodetector optionally further comprises a p-doped region, an n-doped region, and a waveguide guiding intrinsic region, and the device further comprises a second p-doped region and a second n-doped region, the second p-doped region and the second n-doped region being doped to a higher level than the p-doped region and the n-doped region. In the device, the device is optionally disposed on a silicon dioxide layer disposed on a silicon layer. In the device, a value of an electrical parameter is optionally measured to evaluate a parameter of a photodetector. In the device, a value of an electrical parameter is optionally measured to evaluate an amount of light passing through the photodiode, and a voltage is applied to control the amount of light. In the device, the electrical parameter is optionally resistance or conductance. In the device, the measuring device is optionally an ohmmeter or amperemeter.

[0007] Another aspect of the present disclosure is a method for generating a calibration model for a device, system, or subsystem, the method including: obtaining an indication of a control parameter affecting the behavior of the device, system, or subsystem; obtaining a plurality of value sets, each set of value sets including an input parameter value; obtaining a value to be applied and applying the value to the control parameter; measuring a value of an output parameter of the device, system, or subsystem obtained in response to applying the control parameter value; determining a calibration model of the device, system, or subsystem based on at least one set of the measured input parameter, the applied value of the control parameter, and the value of the output parameter; and storing the calibration model. The method may further include obtaining one or more characteristics for the control parameter, the characteristics being selected from the group consisting of a value range and a resolution. The method may further include measuring an impulse response of the circuit. The method may further include measuring a relaxation time of photocarriers. Within the method, the calibration model is optionally further based on a physical model of the device, system, or subsystem. Within the method, the calibration model is optionally further based on a mathematical model of the device, system or subsystem.

[0008] Another aspect of the present disclosure is a method for calibrating a device, system, or subsystem, the method including receiving values ​​for input parameters, receiving required values ​​for output parameters, determining values ​​for control parameters to be applied to obtain the required values ​​for the output parameters using a calibration model of the device, system, or subsystem, and storing the calibration model. Within the method, one of the input parameters is optionally temperature, one control parameter is optionally a phase shifter voltage, and one of the output parameters is optionally a resistance or conductance indicative of the phase of light propagating in the waveguide. Within the method, the resistance or conductance optionally indicates the phase of light propagating in the waveguide. The method is optionally performed offline.

[0009] Another aspect of the present disclosure is a method for monitoring and controlling a device, system, or subsystem, comprising receiving measurements of input parameters, obtaining values ​​for at least one control parameter from a model of the device, system, or subsystem, and applying the value of the at least one control parameter to obtain a required value of an output parameter of the device, system, or subsystem. Within the method, one of the input parameters is optionally temperature, one control parameter is optionally a phase shifter voltage, and one of the output parameters is optionally resistance or conductance. Within the method, the resistance or conductance optionally indicates the phase of light propagating in the waveguide. The method is optionally performed online. Within the method, the device, system, or subsystem is optionally initially operated with values ​​for the control parameters determined during an offline calibration phase.

[0010] The disclosed subject matter will be more fully understood and appreciated from the following detailed description taken in conjunction with the drawings, in which corresponding or like numbers or characters indicate corresponding or like components. Unless otherwise specified, the drawings provide illustrative examples or aspects of the disclosure and do not limit the scope of the disclosure. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 illustrates an example of a coherent optical transceiver using multiple photonic devices. [Figure 2] FIG. 1 illustrates a device that provides a photonic implementation of a Convolutional Neural Network (CNN) that implements a broadcast-and-weight protocol. [Figure 3] 1 is a diagram of the schematic structure of an integrated optics finite impulse response (FIR) grating filter. [Figure 4] 1 is a schematic diagram of a transmitter using TDM, in accordance with some exemplary embodiments of the present disclosure. [Figure 5] 5 is a schematic diagram of a receiver corresponding to the transmitter of FIG. 4, in accordance with some exemplary embodiments of the present disclosure. [Figure 6] FIG. 10 is a schematic diagram of another transmitter using all-optical multiplexing, in accordance with some example embodiments of the present disclosure. [Figure 7] 7 is a schematic diagram of a receiver corresponding to the transmitter of FIG. 6, in accordance with some exemplary embodiments of the present disclosure. [Figure 8] 1 is a schematic diagram of a device for monitoring and controlling a photonic device, according to some embodiments of the present disclosure. [Figure 9] 9 is a schematic circuit diagram in which the device of FIG. 8 may be used, according to some embodiments of the present disclosure. [Figure 10]1 is a schematic diagram of entities associated with a calibration model of a device, system, or subsystem, according to some embodiments of the present disclosure. [Figure 11] 1 is a flowchart of a method for generating a calibration model of a device according to some embodiments of the present disclosure. [Figure 12] 1 is a flowchart of a method for creating and using a calibration model, according to some embodiments of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0012] Photonics is concerned with the generation, detection, and manipulation of light by emission, transmission, modulation, signal processing, switching, amplification, and sensing.

[0013] Photonic systems are becoming increasingly prevalent in multiple applications across a variety of fields.

[0014] The need for photonic devices arises from the limitations and restrictions of electronic devices, including the rate at which information is transferred and the high power consumption of electronic devices, and therefore the heat generated and cost.

[0015] The use of photonic devices reduces these problems, but photonic devices are not without their challenges. The first problem can be their physical size. While electronic devices can be on the order of a few nanometers in size, current photonic devices are on the order of tens of micrometers in size. Their relatively large size also increases the device's sensitivity to manufacturing issues, for example, due to variations in the manufacturing process between different areas of the same device.

[0016] Another problem with photonic devices is their significant sensitivity to size or shape deviations and to environmental conditions such as temperature changes. Thus, a small deviation in the manufacturing process or a temperature that is slightly different from the intended one can lead to a component not being of the designed size, thus significantly reducing its functionality.

[0017] Therefore, in some circuits, some electronic devices can be replaced with photonic devices when the tradeoff is positive. For example, photonic devices can be used when high rates are needed, but not when multiple components are required and the available physical area is limited.

[0018] Reference is now made to FIG. 1, which shows an example of a coherent optical transceiver that uses multiple photonic devices to decode a received wavelength 104 according to an electrical signal 108 and transmit it to a corresponding receiver over a full-duplex fiber 112, and vice versa.

[0019] If any of the components behave differently than expected due to manufacturing variations, temperature effects, or other reasons, the resulting signal will not be as expected and the performance of the system will be degraded.

[0020] See FIG. 2, which shows another example of a device providing a photonic implementation of a convolutional neural network (CNN) that implements a broadcast-and-wait protocol. This design uses two or more micro ring resonators (MRRs) 212, 216, 220, and 224, respectively, and photodiodes such as 228 and 232. The MRRs perform multiply-and-accumulate (MAC) operations, and the broadcast-and-wait protocol carries the MAC results across layers. In the broadcast-and-wait protocol, each neuron output is modulated by a laser diode (LD) at wavelengths λ...λ. n The multiplexed wavelengths are bundled together by wavelength division multiplexing 236 and placed on waveguides for broadcast to the destination layer.

[0021] In the destination layer, each neuron receives all incoming wavelengths. Each wavelength is then multiplied in amplitude using its corresponding micro-ring. The multiplication is done by tuning the ring in resonance and off-resonance with each laser wavelength. A photodiode then sums all incoming wavelengths into an aggregate photocurrent.

[0022] It will be appreciated that each ring, such as 212, 216, 220 and 224, resonates wavelengths whose circumference is an integer multiple thereof, thereby creating constructive interference.

[0023] Thus, slight variations in the diameter of one or more rings, for example due to manufacturing variations or temperature changes, may cause the rings not to transmit the correct wavelengths and may not provide the expected constructive interference, and therefore the device may not output the expected power.

[0024] There may be several further examples demonstrating the sensitivity of systems comprising photonic devices, for example silicon optical filters reconstructed from Benes switch matrices of various sizes.

[0025] It will be appreciated that the more photonic devices a circuit has, for example, the larger the Benes switch matrix, the more sensitive the circuit will be as errors can accumulate and result in reflections, destructive interference, or other problems.

[0026] Figure 3 shows a schematic diagram of an integrated optical finite impulse response (FIR) lattice filter implemented by cascading symmetric and asymmetric Mach-Zehnder interferometers (MZIs). MZIs with equal-length arms are denoted symmetric MZIs, while MZIs with unequal-length arms are denoted as asymmetric MZIs. Using tunable phase-shift elements on the MZI arms, the symmetric MZI is a variable coupler that controls the amount of power directed to the upper or lower arm. The asymmetric MZI is a fixed-delay and variable-phase-shift element. Using this type of filter structure, an FIR lattice filter with variable complex coefficients is obtained. The filter order is determined by the number of cascaded symmetric and asymmetric MZI pairs. For a unity-order filter, the symmetric MZI must be interleaved with the asymmetric MZI. This filter is a photonic device that is sensitive to fabrication, temperature, and other variations. For proper operation of the device, a thermo-optic shifter 304 is used for correct phase matching.

[0027] To monitor photonic devices, some conventional methods split the received optical energy and use a portion of that light to assess the system's wavelength offset and phase shift. However, such splitting reduces the received energy, and further splitting to monitor additional components further reduces the energy, which can ultimately result in significant energy loss. Furthermore, such splitting can cause reflections that can further impair the output. Furthermore, assessing degradation using these methods does not allow for output correction because the physical structure and state of the components are fixed.

[0028] Thus, one problem of this disclosure is the need to monitor the performance of a photonic device to determine whether the photonic device provides the expected output.

[0029] Another issue of this disclosure is the need to correct parameters that deviate from the expected performance of such devices, for example, a phase shift in a photonic device, to ensure its proper operation, and if a phase shift is detected, to correct it.

[0030] Yet another problem of the present disclosure is the need to perform evaluation and correction of the behavior of photonic devices in a non-invasive manner, without affecting the device itself and without allocating a portion of the delivered energy for evaluation purposes, thereby avoiding energy waste.

[0031] Yet another problem of the present disclosure is the need to perform monitoring and control of a photonic device using a single device, rather than a first device for monitoring and a second device for control, thus reducing the footprint of the correction device and wasted energy.

[0032] Another problem of the present disclosure is the need to monitor and control the behavior of photonic devices in the context of the circuit they are placed in. Because correlations such as reflections may exist between components, different behaviors may be observed between independent photonic devices or within a circuit, and different corrections may be required.

[0033] Another problem of the present disclosure is the need for a consistent way to create calibrated models for the behavior of photonic devices or systems or subsystems comprising photonic devices. Such models can then be used to monitor and control the behavior of the device or circuit at run time.

[0034] 4-7 below show exemplary all-optical circuits for the transmitter and receiver.

[0035] Figure 4 shows an all-optical multiplexing transmitter operating with time-division multiplexing (TDM) by a pulsed laser, where the clock is transmitted on a polarization orthogonal to the signal. i It receives a pulsed laser 404, electrical input 1 (408), and electrical input 2 (412), and outputs multiplexed channels 416 at a bit rate as a pulsed laser and a clock at half that bit rate in TM mode.

[0036] Figure 5 shows the corresponding all-optical demultiplexing receiver, operating with time division multiplexing (TDM) by pulsed lasers, where the clock is transmitted on a polarization orthogonal to the signal.

[0037] The transmitter-receiver pair in Figures 4-5 works by splitting the input laser pulse into data and clock components by polarization, so they do not affect each other.

[0038] Figure 6 shows an all-optical multiplexed transmitter operating using time division multiplexing (TDM) with pulsed lasers over a full duplex fiber, and Figure 7 shows the corresponding receiver.

[0039] The transmitter-receiver pair in Figures 6-7 works by splitting the input laser pulse into data and clock into different fibers, thus ensuring that they do not affect each other.

[0040] It will be appreciated that each of the circuits in Figures 4-7 comprises multiple photonic devices, and that the operation of each circuit is highly dependent on the proper operation of its components. Therefore, it is important that the required components are calibrated in the context of the circuit and monitored in use. If deviations from required behavior are detected, corrections also need to be introduced.

[0041] One technical solution of the present disclosure is a device for monitoring and controlling the phase of a photonic device. - region, a waveguide through which the light to be measured propagates, and N - The device comprises a PIN photodiode, which comprises a region and a P region, respectively, intended to create an ohmic contact. + Area and N + Area and through P - Area and N - The semiconductor device further comprises two metal contacts connected to the region and the semiconductor device.

[0042] When light propagating in a waveguide creates free electrons and holes, it reduces the resistance / increases the conductance of the device. The resistance / conductance, which can then be measured, indicates the amount of light propagating. On the other hand, applying a voltage to the device changes the electron and hole concentration, thereby changing the refractive index of the waveguide, which can shift the phase of the propagating light and change its amplitude due to its effect on constructive or destructive interference. Therefore, phase shifters can be created to monitor and control the phase of light propagating in a waveguide.

[0043] Another technical solution of the present disclosure relates to offline creation of a calibration model of a photonic device or a system or subsystem comprising photonic devices, which model can be used for individual offline calibration of each device, including determining its operating point, when a sample of the device is available.

[0044] The term input parameter may be broadly interpreted to include any existing parameter of a device, environment or circuit, such as temperature, jitter, noise, etc., that can be measured and that can affect the behavior of a device, system or subsystem.

[0045] The term control parameter may be broadly interpreted to include any parameter that may be applied to a device, system, or subsystem, such as various temperatures, voltages, or currents.

[0046] The term output parameter may be broadly interpreted to include any parameter that indicates a performance factor of a device, system, or subsystem, such as the amount of light transmitted, bit error rate, etc.

[0047] During model generation, different sets of input parameters may be provided and different values ​​of one or more control parameters may be set. Output parameters may be measured under these conditions. The sets of input parameters, control parameters, and outputs may be used by mathematical, physical, and / or AI techniques to generate a model.

[0048] In a further step, when a sample of the device is available, an individual offline calibration can be performed for each device. Input parameters can be measured and provided to the model, required output parameters can be obtained, for example, from the requirements, and values ​​for control parameters can be obtained so that the device, system, or subsystem operates and provides the required output. These values ​​are sometimes called operating points.

[0049] When the device, system or subsystem is in use and operated, for example according to an operating point determined during offline calibration, the model may receive measurements of input parameters and provide values ​​for control parameters for fine control of the device, system or subsystem to obtain required values ​​of output parameters.

[0050] The control parameter refinement can be performed continuously in order for the device, system or subsystem to provide the required output according to the existing and optionally changing conditions of the environment and system.

[0051] In one example, a model of a device can be created and used that can control the phase of propagating light, as described above, where the input parameter can be temperature, the control parameter is an applied voltage, and the output parameter is resistance, which indicates the amount of light.

[0052] Thus, during calibration model generation, temperatures may be measured, different voltages may be applied, and the corresponding resistances may be measured. A calibration model of the device may be determined empirically, analytically, or using a combination thereof, for example, by combining measurements with a mathematical or physical model of the photonic device to obtain the model. The model, which may be used for offline calibration of the device as well as for online monitoring and control, may indicate, for each measured temperature and required resistance, what voltage needs to be applied to reach the required resistance, and therefore the required phase of the propagated light. The model, which may be expressed as an analytical function, lookup table, etc., may be provided to and stored in a microcontroller (MCU) that controls the measurements and voltage application of the device.

[0053] Another technical solution of the present disclosure relates to measuring the relaxation time of photocarriers after the propagation of a light pulse. When the light pulse begins to propagate, the concentration of electrons and holes increases and then decreases during the relaxation time. The relaxation curve is affected by material properties, such as the amount of contamination or defects in the semiconductors that make up the photonic device. Therefore, using a voltage source and a resistance measurement device to measure the relaxation time can provide information about the material properties and manufacturing process.

[0054] Yet another technical solution of the present disclosure relates to a voltage source and a resistance or photocurrent measuring device, which makes it possible to investigate the impulse response and transfer function of a photonic device in response to discrete pulses of light.

[0055] One technical effect of the present disclosure is to provide a single device that enables calibration, monitoring, and control of one or more parameters of a photonic device, such as the optical phase of an optical phase shifter. The single device helps reduce the footprint, power consumption, installation costs, and operating costs of different devices used to monitor and control the photonic device.

[0056] Another technical effect of the present disclosure provides for calibrating, monitoring, and controlling one or more photonic devices within a system or subsystem, thus ensuring that the system or subsystem operates as expected as a whole, rather than operating on each photonic device separately, which may expose the system or subsystem to unexpected inter-effects that may impair its performance.

[0057] Yet another technical effect of the present disclosure is to provide offline generation of calibration models for monitoring and controlling devices, systems, or subsystems, as well as offline calibration of a particular device, either standalone or as part of a system or subsystem, and online monitoring and control of the device, system, or subsystem.

[0058] Yet another technical effect of the present disclosure provides for investigating additional parameters and properties of photonic devices and their manufacturing processes, or of systems comprising photonic devices.

[0059] Reference is now made to FIG. 8, which illustrates a schematic diagram of a device for monitoring and controlling photonic devices, according to some embodiments of the present disclosure.

[0060] The device is P - doped region 808 and N - The photodetector includes a doped region 812 and a waveguide 704 disposed therebetween, the waveguide 704 being made of, for example, silicon. i ) substrate 832, i O2) layer 836.

[0061] The device is constructed with two metal layers 824 and 828, fabricated for example from aluminum (Al), and a P +Doped region 816 and N + and a doped region 820. + Doped region 816 and N + The doped region 820 is P - Doped region 808 and N - It will be appreciated that the doped region 812 is doped to a higher level than the doped region 812 .

[0062] It will be appreciated that the disclosed P type-Intrinsic-N type (PIN) structure is exemplary only and that other configurations and materials may be used, for example, rib waveguide PIN.

[0063] The device may include a resistance or photocurrent measuring device 832, such as an ohmmeter or ampere meter, and a voltage source 836. The ohmmeter 832 and the voltage source 836 may be connected to a microcontroller unit (MCU) 840. The ohmmeter 832 may report the measured resistance to the MCU 840.

[0064] In the offline model generation stage, a model may be generated and stored in MCU 840. During the offline calibration stage, the model may be used to determine correction voltages to be applied, and during the monitoring and control stage, the model may be used to determine correction voltages to be applied and provide corresponding commands to voltage source 836 so that the concentration of electrons and electron-holes in the PN junction increases or decreases, thereby changing the refractive index in waveguide 804 and changing the phase of the guided light by the required amount.

[0065] It will be appreciated that the voltage may be placed in reverse bias or forward bias.

[0066] The disclosed structures can be used with any required components of a device for monitoring and controlling the amount of light. For example, pulse shaper 420 or tunable phase shifter 424 of Figure 4, pulse shaper 604 or 608 or tunable phase shifter 612 of Figure 6, chirped Bragg grating 504 of Figure 5, or chirped Bragg grating 704 of Figure 7 can be implemented as the phase shifter shown in Figure 3. To monitor and control the device, thermo-optic phase shifter 304 of Figure 3 can be implemented as the device of Figure 8 and thus monitored and controlled.

[0067] Reference is now made to FIG. 9, which illustrates a schematic circuit in which the disclosed devices may be used. The circuit, generally referenced 900, includes a transmitter 904 and a receiver 908, such as, but not limited to, the transmitters and receivers of FIGS. 4 and 5, the transmitters and receivers of FIGS. 6 and 7, or any other implementation involving photonic devices. The transmitter 904 may transmit information onto a channel 912, and the receiver 908 may receive information from the channel 912. Thus, the transmitter 904, the receiver 908, and the channel 912 may all affect the performance of the system. Therefore, it may be insufficient to evaluate the performance of one or more components of the transmitter 904 or the receiver 908, or even the transmitter 904 or the receiver 908 as a whole; rather, it may be necessary to evaluate the performance of the entire system.

[0068] The values ​​required to ensure the system provides the required output may be stored as part of a calibration model within MCU 916. It will be appreciated that MCU 916 may be accessed via interface 120, which may comprise I / O devices such as a display, a keyboard, a pointing device such as a mouse or touch screen, etc.

[0069] Reference is now made to Figure 10, which shows a schematic diagram of the entities involved in generating a calibration model of a device, system, or subsystem, such as the schematic circuit of Figure 9 above, or any of the circuits of Figures 4-7 above. The calibration model may be generated offline, for example, during the design of the system. The model may then be used during offline calibration when the circuit is available for testing, and further during online monitoring and control when the system is in use.

[0070] A model-based calibration and physical model 1008 may receive a set of input parameters 1004 related to the circuit and environment, such as temperature, clock jitter, noise such as laser noise, etc. These parameters may be measured by any suitable equipment and reported manually or automatically via a suitable interface.

[0071] During model generation, the model-based calibration and physical model 1008 may further receive instructions about input parameters 1012 that may be controlled and their characteristics, such as range, accuracy, or resolution. For example, the parameters may include laser bias, modulator bias, phase shifter bias, TIA bias, thermoelectric cooler bias, etc., each with its own characteristics.

[0072] The applicable output or performance of the system may be expressed as one or more output parameters 1016, also referred to as response parameters, such as, but not limited to, bit error rate, throughput, frame loss, etc.

[0073] The measured values ​​of the input parameters 1004, the values ​​of the control parameters 1012, and the values ​​of the output parameters 1016 can be used by the model-based calibration and physical model 1008 to generate a calibration model. A table can be created correlating values ​​of input parameters such as temperature and jitter, controlled parameters such as V phase shifter, I laser, V modulator, or V amplifier, and output parameters such as bit error rate. Table 1 below shows an example of such a table. [Table 1]

[0074] Therefore, under the conditions of 300 degrees Kelvin and 10pS jitter, 2*10 -6 A bit rate of 0.05 can be achieved by applying the following control parameters: a phase shifter voltage of 3 V, a laser current of 20 mA, a modulator voltage of 2.5 V, and an amplifier voltage of 5.5 V.

[0075] It will be appreciated that Table 1 is only an example and is merely intended to demonstrate the relationship between measurements, controls to be applied, and the output of the circuit. In some situations, there may be more input, control, or output parameters. In further situations, there may be several parameters of the same type; for example, a filter of order 3 may require three phase shifter voltage values.

[0076] In the phase shifter examples disclosed above, the control to be applied is a voltage and the output is a resistance, which indicates the phase of the propagated light.

[0077] Reference is now made to FIG. 11, which illustrates a flowchart of a method for generating a calibration model, according to some embodiments of the present disclosure.

[0078] In step 1100, a model generation process may be designed, including determining input parameters such as temperature, control parameters such as input voltage, and output (response) parameters such as resistance, bit error rate, etc. For the input, control, and output parameters, several characteristics may be determined, such as resolution, where higher resolution may be more accurate but may take longer due to more measurements that need to be performed and more processing time to determine the model, achievable or recommended value ranges, e.g., values ​​that are more energy efficient or provide a longer useful life of the device, constraints, etc.

[0079] It will be appreciated that various experimental design strategies or methodologies can be applied to reduce the time and cost of data collection. Some non-limiting examples of optimized designs may include A-optimal, V-optimal, D-optimal, Sobol sequences, etc.

[0080] In step 1104, input parameters may be measured (or optionally set, if possible), values ​​of controlled parameters may be applied, and resulting output measurements may be taken. For example, a voltage may be applied and the resulting resistance may be measured, and based on this measurement, an appropriate bias voltage may be determined for the required phase adjustment. The measurements may be organized in a data structure similar to Table 1 above.

[0081] Based on the measurements, in step 1108, a model may be created, for example, based on the discrete points represented as rows in Table 1. The model may be based on mathematical techniques such as linear or nonlinear regression, Gaussian process regression, AI techniques such as neural networks (NNs), deep NNs, shallow NNs, clustering, dimensionality reduction, etc.

[0082] Any known physical model of one or more devices may be used and incorporated into the model. In some embodiments, the model may be integrated, combining all controlled parameters and all output parameters. In other embodiments, for example, when some parameters are orthogonal to each other, the model may be implemented as two or more separate models, and optionally a simple model.

[0083] In step 1112, the model may be optimized and made more accurate, for example, using mathematical techniques, computing techniques, etc. For example, linear areas of the model may be determined and treated separately from other areas, while non-linear areas may require higher resolution of the controlled parameters.

[0084] In step 1116, the model may be stored in the form of an equation, a lookup table, a combination thereof, or in any other manner. The model may be stored in the MCU or in a data storage device accessible to the MCU.

[0085] In some embodiments, if the results are unsatisfactory, e.g., the output parameters do not obtain satisfactory values, a redesign of one or more devices may be performed. For example, in the device shown in FIG. 3, the phase shift depends on the bias voltage multiplied by the length, and therefore the length of the device may be increased to allow for a larger phase without increasing the voltage. It will be appreciated that if a model is generated during the design of a device and is found to be excessively complex with more than a predetermined number of parameters, it may be inferred that the design is suboptimal and that the device, system, or subsystem needs to be redesigned.

[0086] In addition to the calibration process, additional measurements can be performed, the results of which are used to evaluate other aspects of the photonic device or system, or the fabrication process. Such measurements can include circuit relaxation times, which can provide information about material parameters and the fabrication process, and impulse responses, which can provide information about the response function of the subsystem, circuit, or entire system.

[0087] Reference is now made to FIG. 12, which illustrates a flowchart of a method, generally referenced 1200, for creating and using a calibration model.

[0088] In step 1204, the model may be generated offline, as detailed in connection with FIG. 11 above.

[0089] In step 1208, one or more devices may be calibrated offline using the model generated in step 1204. Calibration may provide for adjusting the operating point for each such device. Because photonic devices tend to be relatively large, variations in the manufacturing process exist between devices and within each device and can have a significant effect on their behavior. Therefore, individual calibration may be required for each such device.

[0090] In step 1212, measurements of input parameters and required output parameters may be provided to the model. It will be appreciated that the combination of measured input parameters and required output values ​​may not correspond to a particular case (e.g., a particular row in a measurement table such as Table 1), and thus the model may be required to provide a recommended value for the control parameter under existing conditions. In a simplified linear example, that value may be obtained by interpolating other values ​​in the data used to generate the model.

[0091] In step 1216, the model may determine the required values ​​for the control parameters that will produce the required output, and in step 1220, the values ​​of the control parameters may be stored in association with the particular device. It will be appreciated that multiple rows in Table 1 may be used by the model to determine how the control parameters should be varied to obtain the required output, although only a few rows may correspond to the required output.

[0092] In step 1224, the device can be used and online monitoring and control can be performed according to existing and changing conditions of the circuit, environment, etc.

[0093] Operating the device may begin with the values ​​of the control parameters obtained in the offline calibration step 1216. In step 1228, measurements of the input parameters and required output parameters may be received by the model.

[0094] In step 1232, using the received measurements and predicted output values, the model may determine values ​​to be applied for the control parameters to achieve the required output, similar to the offline calibration step 1216. These values ​​may be those initially determined in step 1216 above, and may require refinement due to existing and changing conditions under which the device is used.

[0095] In step 1236, the MCU may apply the determined values ​​or commands to set those values, such as the required voltage between the metal layers, to achieve the required output, such as the required resistance indicating the required phase of the light propagating in the waveguide.

[0096] The present invention may be a system, method, and / or computer program product, which may include a computer-readable storage medium (or media) having computer-readable program instructions thereon for causing a processor to perform aspects of the present invention.

[0097] A computer-readable storage medium may be a tangible device capable of retaining and storing instructions for use by an instruction-execution device. A computer-readable storage medium may be, for example, but not limited to, an electronic storage device, a magnetic storage device, an optical storage device, an electromagnetic storage device, a semiconductor storage device, or any suitable combination of the above. A non-exhaustive list of more specific examples of computer-readable storage media includes portable computer diskettes, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), static random access memory (SRAM), portable compact disc read-only memory (CD-ROM), digital versatile disk (DVD), memory sticks, floppy disks, mechanically encoded devices such as punch cards or raised structures in grooves that have instructions recorded on them, and any suitable combination of the above. As used herein, computer-readable storage media should not be construed as being transitory signals per se, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating in waveguides or other transmission media (e.g., light pulses passing through fiber optic cables), or electrical signals transmitted through wires.

[0098] The computer-readable program instructions described herein may be downloaded from a computer-readable storage medium to each computing / processing device, or may be downloaded to an external computer or external storage device over a network, such as the Internet, a local area network, a wide area network, and / or a wireless network. The network may include copper transmission cables, fiber optic transmission cables, wireless transmissions, routers, firewalls, switches, gateway computers, and / or edge servers. A network adapter card or network interface in each computing / processing device receives the computer-readable program instructions from the network and forwards the computer-readable program instructions for storage in a computer-readable storage medium within the respective computing / processing device.

[0099] The computer-readable program instructions for carrying out the operations of the present invention may be assembler instructions, instruction-set-architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state-setting data, or either source or object code written in any combination of one or more programming languages, such as "C," C#, C++, Java, Phyton, Smalltalk, etc. The computer-readable program instructions may execute entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the latter scenario, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or the connection may be to an external computer (e.g., through the Internet using an Internet Service Provider). In some embodiments, electronic circuitry, including, for example, a programmable logic circuit, a field-programmable gate array (FPGA), or a programmable logic array (PLA), may execute computer-readable program instructions by utilizing state information of the computer-readable program instructions to personalize the electronic circuitry to implement aspects of the present invention.

[0100] Aspects of the present invention are described herein with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer-readable program instructions.

[0101] These computer-readable program instructions may be provided to a processor of a general-purpose computer, special-purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions executing on the processor of the computer or other programmable data processing apparatus create means for implementing the functions / acts specified in one or more blocks of the flowcharts and / or block diagrams. These computer-readable program instructions may also be stored on a computer-readable storage medium that can instruct a computer, programmable data processing apparatus, and / or other device to function in a particular manner, such that a computer-readable storage medium having instructions stored thereon comprises an article of manufacture containing instructions that implement aspects of the functions / acts specified in one or more blocks of the flowcharts and / or block diagrams.

[0102] The computer-readable program instructions may also be loaded into a computer, other programmable data processing apparatus, or other device to cause a series of operational steps to be performed on the computer, other programmable apparatus, or other device to create a computer-implemented process, such that the instructions executing on the computer, other programmable apparatus, or other device implement the functions / acts specified in one or more blocks of the flowcharts and / or block diagrams.

[0103] The flowcharts and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of the present invention. In this regard, each block in the flowcharts or block diagrams may represent a module, segment, or portion of instructions, comprising one or more executable instructions for implementing a specified logical function(s). In some alternative implementations, the functions noted in the blocks may occur out of the order noted in the figures. For example, two blocks shown in succession may in fact be executed substantially concurrently, or the blocks may sometimes be executed in reverse order, depending on the functionality involved. It should also be noted that each block of the block diagrams and / or flowchart diagrams, and combinations of blocks in the block diagrams and / or flowchart diagrams, may be implemented by a dedicated hardware-based system that performs the specified functions or acts, or a combination of dedicated hardware and computer instructions.

[0104] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly dictates otherwise. Furthermore, it will be understood that the terms "comprises" and / or "comprising," as used herein, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0105] The corresponding structure, material, acts, and equivalents of all means-plus-function or step-plus-function elements in the following claims are intended to include any structure, material, or acts for performing the function that is specifically claimed in combination with other claimed elements. The description of the present invention has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the invention. The examples were chosen and described in order to best explain the principles and practical applications of the invention and to enable others skilled in the art to understand the invention in various embodiments with various modifications as may be suited to the particular uses contemplated.

Claims

1. 1. A device for calibrating a photonic system, comprising: a photodetector comprising a PIN junction including a p-doped region, an intrinsic silicon bulk waveguide, and an n-doped region; two metal layers connected to the photodetector, wherein the p-doped region and the n-doped region are in contact with the intrinsic silicon bulk waveguide, and the two metal layers are not in contact with the intrinsic silicon bulk waveguide; a measuring device connected between the two metal layers for measuring a value of an electrical parameter between the two metal layers, the electrical parameter being indicative of the amount of light propagating in the intrinsic silicon bulk waveguide, thereby measuring into the intrinsic silicon bulk waveguide to avoid energy waste; a voltage source connected between the two metal layers, wherein applying a voltage between the two metal layers changes the refractive index of the intrinsic silicon bulk waveguide, thereby affecting the phase of light propagating in the intrinsic silicon bulk waveguide, and the voltage to be applied is determined according to the value measured by the measurement device; A device comprising:

2. 10. The device of claim 1, further comprising a second p-doped region and a second n-doped region, the second p-doped region and the second n-doped region being doped to a higher level than the p-doped region and the n-doped region.

3. The device of claim 1 , wherein the device is disposed on a silicon dioxide layer disposed on a silicon layer.

4. The device of claim 1 , wherein the value of the electrical parameter is measured to estimate a parameter of the photodetector.

5. 10. The device of claim 1, wherein the value of the electrical parameter is measured to estimate an amount of light passing through a photodiode, and the voltage is applied to control the amount of light.

6. The device of claim 1 , wherein the electrical parameter is resistance or conductance.

7. The device of claim 1 , wherein the measuring device is an ohmmeter or an amperemeter.

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