Analysis device, analysis method, analysis program, and storage medium

Abstract

To allow a user to grasp intuitively what kind of material is being analyzed.SOLUTION: An analysis and observation device A includes an analysis unit 62, a primary storage device 21b that reads a substance library Li, which is composed of a plurality of substance types associated with a plurality of features Ch, and a processing unit 21a that performs processing on the basis of the substance library Li. The substance library Li is configured by storing hierarchical information of a higher-level classification C1 representing the generic name of the material and a lower-level classification C3 representing the type of the material. The processing unit 21a has a spectrum acquiring unit 212 for acquiring an intensity distribution spectrum, a feature extracting unit 213 for extracting features Ch of the substance on the basis of the intensity distribution spectrum, a substance estimation unit 214 for estimating the type of the substance on the basis of the extracted features Ch from the lower-level classification C3, and a user interface control unit 215 for displaying the estimated lower-level classification C3 and the upper-level classification C1 to which the lower-level classification C3 belongs in a hierarchical manner on the display unit 22.SELECTED DRAWING: Figure 13B

Description

[Technical Field]

[0001] The technology disclosed herein relates to an analysis device, an analysis method, an analysis program, and a storage medium storing the analysis program. [Background technology]

[0002] For example, Patent Document 1 discloses an analytical device (X-ray fluorescence analytical device) capable of performing X-ray fluorescence analysis (XRF). Specifically, the analytical device disclosed in Patent Document 1 includes an X-ray tube that emits X-rays to an object to be analyzed (a sample) and a detector that detects X-rays from the object to be analyzed, and is capable of creating and displaying a spectrum that indicates the relationship between X-ray energy and the content of elements based on the X-rays detected by the detector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2017 / 006383 Summary of the Invention [Problem to be solved by the invention]

[0004] However, while simply displaying a spectrum such as that disclosed in Patent Document 1 allows one to roughly grasp the elements contained in the object to be analyzed, it is not easy to intuitively grasp what kind of substance the object to be analyzed is.

[0005] The technology disclosed herein has been made in consideration of these points, and its purpose is to allow the user to intuitively grasp what kind of substance the object of analysis is. [Means for solving the problem]

[0006] A first aspect of the present disclosure relates to an analytical device that generates an intensity distribution spectrum by irradiating a target object with a primary electromagnetic wave or a primary ray, and performs a component analysis of the target object based on the intensity distribution spectrum. The analytical device includes a storage unit that reads out a substance library that associates types of substances with characteristics that constitute the substances, and a processing unit that executes processing based on the substance library.

[0007] According to a first aspect of the present disclosure, the substance library is configured by storing hierarchical information of higher-level classifications representing the general names of the substances and lower-level classifications representing the types of multiple substances belonging to the higher-level classifications, and the processing unit includes a spectrum acquisition unit that acquires the intensity distribution spectrum, a feature extraction unit that extracts features contained as constituents of the object to be analyzed based on the intensity distribution spectrum acquired by the spectrum acquisition unit, a substance estimation unit that estimates the type of substance from the lower-level classifications based on the features extracted by the feature extraction unit and the substance library read out by the memory unit, and a user interface control unit that causes the lower-level classifications estimated by the substance estimation unit and the higher-level classifications to which the lower-level classifications belong to be hierarchically displayed on a display unit.

[0008] According to the first aspect, by displaying the lower classifications together with the higher classifications, not only can the specific type of substance be grasped from the lower classification, but also the general type, properties, characteristics, etc. of the substance can be grasped through the higher classifications, thereby enabling the user to intuitively grasp what kind of substance the object of analysis is.

[0009] Furthermore, according to a second aspect of the present disclosure, the substance estimation unit may estimate a plurality of substances that are relatively highly likely to be contained in the object to be analyzed from the sub-classifications, and the user interface control unit may cause the display unit to display the sub-classifications corresponding to each of the plurality of substances arranged in order of highest probability, an icon for switching between displaying and hiding the sub-classifications, and the super-classification to which the sub-classification belongs.

[0010] According to the second aspect, the use of icons provides an interface that is more intuitive to operate, and by arranging the subcategories in order of certainty, the user can intuitively understand to which subcategory a substance type belongs.

[0011] Furthermore, according to a third aspect of the present disclosure, the substance library is configured by storing hierarchical information of intermediate classifications representing a plurality of systems belonging to the higher classification and to which at least some of the lower classifications belong, together with hierarchical information of the higher classifications and the lower classifications, and the user interface control unit may cause the display unit to display the intermediate classification to which the lower classifications belong and a second icon for switching between displaying and hiding the intermediate classification.

[0012] According to the third aspect, by providing intermediate classifications in addition to the upper and lower classifications, substances can be classified more finely. Furthermore, for users who do not want such detailed classifications, the intermediate classifications can be hidden by operating the second icon, thereby providing a more intuitive interface and improving usability.

[0013] Furthermore, according to a fourth aspect of the present disclosure, the storage unit may read out, as the substance libraries, a first substance library generated according to a first standard and a second substance library generated according to a second standard; the substance estimation unit may estimate, from among the substances that may be contained in the object to be analyzed, a plurality of substances that are relatively likely to be included, from the subclassifications belonging to the first substance library and the subclassifications belonging to the second substance library; and the user interface control unit may cause the display unit to display the subclassifications estimated by the substance estimation unit together with identification information indicating whether the subclassification belongs to the first substance library or the second substance library.

[0014] According to the fourth aspect, by providing multiple substance libraries, a more flexible classification system can be provided, thereby making it possible to meet a wide range of needs. Furthermore, by displaying identification information on the display unit, the user can easily understand which substance library the classification system is based on. This allows the user to use a library that is suitable for them, even when standards commonly used in different industries or cultural areas differ, making it possible to meet a wide range of needs.

[0015] According to a fifth aspect of the present disclosure, the storage unit may read out, as the substance libraries, a first substance library generated in accordance with a first standard and a user-defined substance library created based on a user's operational input; the substance estimation unit may estimate, from among substances that may be contained in the analyte, a plurality of substances with a relatively high probability from the subclassifications belonging to the first substance library and the subclassifications belonging to the user-defined substance library; and the user interface control unit may cause the display unit to display the subclassifications estimated by the substance estimation unit together with identification information indicating whether the subclassification belongs to the first substance library or the user-defined substance library.

[0016] According to the fifth aspect, by providing a user-defined substance library in addition to a predetermined substance library, a more flexible classification system can be provided, thereby making it possible to meet a wide range of needs. Furthermore, by displaying identification information on the display unit, the user can easily understand which user-defined substance library the classification system is based on. This can help the user intuitively understand.

[0017] Furthermore, according to a sixth aspect of the present disclosure, the substance library may be configured by storing the higher-level classifications and supplementary explanations regarding the generic names of the substances represented by the higher-level classifications in association with each other, and the user interface control unit may accept a selection from the higher-level classifications displayed on the display unit and cause the supplementary explanation associated with the selected higher-level classification to be displayed on the display unit.

[0018] According to the sixth aspect, by displaying a supplementary explanation corresponding to the selected higher classification on the display unit, the user can understand information related to the higher classification, such as the general type, properties, characteristics, etc. of the substance, which is advantageous in helping the user understand what kind of substance the object to be analyzed is.

[0019] Furthermore, according to a seventh aspect of the present disclosure, the user interface control unit may accept a selection from the sub-classifications displayed on the display unit, and cause the display unit to display the supplementary explanation corresponding to the higher-level classification to which the selected sub-classification belongs.

[0020] According to the seventh aspect, by displaying on the display unit a supplementary explanation corresponding to the higher-level classification to which the selected lower-level classification belongs, the user can grasp information related to the higher-level classification, such as the general type, properties, characteristics, etc. of the substance, which is advantageous in helping the user understand what kind of substance the object of analysis is.

[0021] Furthermore, according to an eighth aspect of the present disclosure, the analysis device may include an emission unit that emits primary electromagnetic waves or primary rays toward the object to be analyzed, and a detector that receives secondary electromagnetic waves generated in the object to be analyzed when the primary electromagnetic waves or the primary rays are irradiated onto the object to be analyzed, and generates an intensity distribution spectrum that is an intensity distribution for each wavelength of the secondary electromagnetic waves, and the spectrum acquisition unit may acquire the intensity distribution spectrum generated by the detector.

[0022] According to a ninth aspect of the present disclosure, the feature extraction unit may extract, as the feature of the substance, the type of element contained in the substance and the content of the element.

[0023] According to a tenth aspect of the present disclosure, the feature extraction unit may extract a molecular structure contained in the substance as the feature of the substance.

[0024] An eleventh aspect of the present disclosure relates to an analytical method for generating an intensity distribution spectrum by irradiating a target object with a primary electromagnetic wave or a primary ray, and performing a component analysis of the target object based on the intensity distribution spectrum, using an analytical device including a memory unit for storing information and a processing unit. This analytical method includes a reading step in which the memory unit reads out a substance library that associates types of substances with characteristics that constitute the substances, and a processing step in which the processing unit executes processing based on the substance library.

[0025] According to an eleventh aspect of the present disclosure, the substance library is configured by storing hierarchical information of higher-level classifications representing the general names of the substances and lower-level classifications representing the types of multiple substances belonging to the higher-level classifications, and the processing steps include an acquisition step of acquiring the intensity distribution spectrum, an extraction step of extracting features contained in the object of analysis as components of the object of analysis based on the intensity distribution spectrum acquired by the acquisition step, an estimation step of estimating the type of substance from the lower-level classifications based on the features extracted by the extraction step and the substance library read out by the reading step, and a display step of hierarchically organizing the lower-level classifications estimated by the estimation step and the higher-level classifications to which the lower-level classifications belong, and displaying them on a display unit.

[0026] According to the eleventh aspect, by displaying the lower classifications together with the higher classifications, not only can the specific type of substance be grasped from the lower classification, but also the general type, properties, characteristics, etc. of the substance can be grasped through the higher classifications, thereby enabling the user to intuitively grasp what kind of substance the object of analysis is.

[0027] A twelfth aspect of the present disclosure relates to an analysis program that, when executed by an analysis device including a memory unit that stores information and a processing unit, generates an intensity distribution spectrum by irradiating a target object with a primary electromagnetic wave or a primary ray, and performs a component analysis of the target object based on the intensity distribution spectrum. The analysis program causes the analysis device to execute a reading step in which the memory unit reads out a substance library that associates types of substances with characteristics that constitute the substances, and a processing step in which the processing unit performs processing based on the substance library.

[0028] According to a twelfth aspect of the present disclosure, the substance library is configured by storing hierarchical information of higher-level classifications representing the general names of the substances and lower-level classifications representing the types of multiple substances belonging to the higher-level classifications, and the processing step causes the analysis device to execute the following steps: an acquisition step for acquiring the intensity distribution spectrum; an extraction step for extracting features contained in the object to be analyzed as components of the object to be analyzed based on the intensity distribution spectrum acquired by the acquisition step; an estimation step for estimating the type of substance from the lower-level classifications based on the features extracted by the extraction step and the substance library read out by the reading step; and a display step for displaying the lower-level classifications estimated by the estimation step and the higher-level classifications to which the lower-level classifications belong in a hierarchical manner on a display unit.

[0029] According to the twelfth aspect, by displaying the lower classifications together with the higher classifications, not only can the specific type of substance be grasped from the lower classification, but also the general type, properties, characteristics, etc. of the substance can be grasped through the higher classifications, thereby enabling the user to intuitively grasp what kind of substance the object of analysis is.

[0030] A thirteenth aspect of the present disclosure relates to a computer-readable storage medium, which stores the analysis program according to the twelfth aspect. [Effects of the Invention]

[0031] As described above, according to the present disclosure, it is possible for a user to intuitively grasp what kind of substance the analysis target is. [Brief explanation of the drawings]

[0032] [Figure 1] FIG. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device. [Figure 2] FIG. 2 is a perspective view illustrating an optical system assembly. [Figure 3] FIG. 3 is a side view illustrating an optical system assembly. [Figure 4] FIG. 4 is a front view illustrating an optical system assembly. [Figure 5] FIG. 5 is an exploded perspective view illustrating an optical system assembly. [Figure 6] FIG. 6 is a side view showing a schematic configuration of the optical system assembly. [Figure 7] FIG. 7 is a schematic diagram illustrating the configuration of the analytical optical system. [Figure 8] FIG. 8 is a schematic diagram illustrating the configuration of the slide mechanism. [Figure 9A] FIG. 9A is a diagram for explaining horizontal movement of the head portion. [Figure 9B] FIG. 9B is a diagram for explaining the horizontal movement of the head portion. [Figure 10A] FIG. 10A is a diagram for explaining the operation of the tilting mechanism. [Figure 10B] FIG. 10B is a diagram for explaining the operation of the tilting mechanism. [Figure 11] FIG. 11 is a block diagram illustrating the configuration of the controller main body unit 2. As shown in FIG. [Figure 12] FIG. 12 is a block diagram illustrating the configuration of the control unit. [Figure 13A] FIG. 13A is a diagram for explaining the basic concept of the analysis method. [Figure 13B] FIG. 13B is a diagram for explaining the basic concept of the analysis method. [Figure 14] FIG. 14 is a flowchart illustrating the basic operation of the analytical observation device. [Figure 15] FIG. 15 is a flowchart illustrating a procedure for analyzing a sample by the control unit. [Figure 16A] FIG. 16A is a diagram illustrating an example of a display screen of the display unit. [Figure 16B] FIG. 16B is a diagram illustrating an example of a display screen of the display unit. [Figure 16C] FIG. 16C is a diagram illustrating an example of a display screen of the display unit. [Figure 16D] FIG. 16D is a diagram illustrating an example of a display screen of the display unit. [Figure 16E] FIG. 16E is a diagram illustrating an example of a display screen of the display unit. [Figure 16F] FIG. 16F is a diagram illustrating an example of a display screen of the display unit. [Figure 16G] FIG. 16G is a diagram illustrating an example of a display screen of the display unit. [Figure 16H] FIG. 16H is a diagram illustrating an example of a display screen of the display unit. DETAILED DESCRIPTION OF THE INVENTION

[0033] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Note that the following description is for illustrative purposes only.

[0034] <Overall configuration of analytical observation device A> Fig. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device A as an analytical device according to an embodiment of the present disclosure. The analytical observation device A illustrated in Fig. 1 can perform magnified observation of a sample SP as an observation target and an analysis target, and can also perform component analysis of the sample SP.

[0035] In detail, the analytical observation device A according to this embodiment magnifies and images a sample SP made up of, for example, a specimen such as a minute object, an electronic component, a workpiece, etc., and is thereby able to search for a portion of the sample SP where component analysis is to be performed, and to inspect and measure its appearance, etc. When focusing on its observation function, the analytical observation device A can be called a magnification observation device, or simply a microscope, or a digital microscope.

[0036] The analytical observation device A can also perform techniques called laser induced breakdown spectroscopy (LIBS), laser induced plasma spectroscopy (LIPS), etc., when analyzing the components of the sample SP. When focusing on its analytical function, the analytical observation device A can also be called a component analysis device, simply an analysis device, or a spectroscopic device.

[0037] The analytical observation device A according to this embodiment is not limited to an analytical device using the LIBS method. The analytical observation device A may be configured as an analytical device using an analysis method based on energy dispersive X-ray spectroscopy (EDX) using an electron beam obtained by a scanning electron microscope (SEM) (hereinafter referred to as "SEM / EDX"), Raman spectroscopy, infrared spectroscopy, and ultraviolet-visible-near-infrared spectroscopy (UV-Vis-NIR). Of these, infrared spectroscopy includes at least Fourier transform infrared spectroscopy and photothermal conversion infrared spectroscopy.

[0038] Here, for example, when the LIBS method is used, the sample SP is mainly made up of inorganic substances, and when infrared spectroscopy or the like is used, the sample SP is mainly made up of organic substances.

[0039] As shown in FIG. 1, the analytical observation device A according to this embodiment comprises, as main components, an optical system assembly (optical system main body) 1, a controller main body 2, and an operation unit 3.

[0040] Of these, the optical system assembly 1 is capable of capturing and analyzing the sample SP, and outputting electrical signals corresponding to the capturing and analysis results to the outside.

[0041] The controller main body 2 has a control unit 21 for controlling various components that make up the optical system assembly 1, such as the first camera 81. The controller main body 2 can cause the optical system assembly 1 to observe and analyze the sample SP via the control unit 21. The controller main body 2 also has a display unit 22 that can display various information. This display unit 22 can display images captured by the optical system assembly 1, data showing the analysis results of the sample SP, and the like.

[0042] The operation unit 3 has a mouse 31 that accepts operation inputs from the user, a console 32, and a keyboard 33 (the keyboard 33 is only shown in FIG. 11). By operating buttons, adjustment knobs, etc. on the console 32, it is possible to instruct the controller main body 2 to import image data, adjust brightness, focus the first camera 81, etc.

[0043] The operation unit 3 does not need to have all three of the mouse 31, the console 32, and the keyboard 33, and may have any one or two of them. Furthermore, a touch panel input device, a voice input device, or the like may be used in addition to or instead of the mouse 31, the console 32, and the keyboard 33. In the case of a touch panel input device, it can be configured to be able to detect any position on the screen displayed on the display unit 22.

[0044] <Details of Optical Assembly 1> 2 to 4 are respectively a perspective view, a side view, and a front view illustrating the optical system assembly 1. Also, Fig. 5 is an exploded perspective view of the optical system assembly 1, and Fig. 6 is a side view showing a schematic configuration of the optical system assembly 1.

[0045] As shown in FIGS. 1 to 6, the optical system assembly 1 includes a stage 4 that supports various devices and on which a sample SP is placed, and a head unit 6 that is attached to the stage 4. Here, the head unit 6 is configured by attaching an observation housing 90 that houses an observation optical system 9 to an analysis housing 70 that houses an analysis optical system 7. Here, the analysis optical system 7 is an optical system for analyzing the components of the sample SP. The observation optical system 9 is an optical system for performing magnified observation of the sample SP. The head unit 6 is configured as a group of devices that combine the functions of analyzing the sample SP and magnified observation.

[0046] In the following description, the front-rear direction and left-right direction of the optical system assembly 1 are defined as shown in Figures 1 to 4. That is, the side facing the user is the front side of the optical system assembly 1, and the opposite side is the rear side of the optical system assembly 1. When a user faces the optical system assembly 1, the right side as seen from the user is the right side of the optical system assembly 1, and the left side as seen from the user is the left side of the optical system assembly 1. The definitions of the front-rear direction and left-right direction are intended to facilitate understanding of the description and do not limit the actual state of use. Either direction may be used as the front.

[0047] In the following description, the left-right direction of the optical system assembly 1 is defined as the "X direction," the front-to-back direction of the optical system assembly 1 as the "Y direction," the up-and-down direction of the optical system assembly 1 as the "Z direction," and the direction of rotation around an axis parallel to the Z axis as the "φ direction." The X and Y directions are perpendicular to each other on the same horizontal plane, and the direction along this horizontal plane is defined as the "horizontal direction." The Z axis is the direction of the normal perpendicular to the horizontal plane. These definitions can also be changed as appropriate.

[0048] As will be described in detail later, the head unit 6 can move along and swing around a central axis Ac shown in Figures 2 to 6. As shown in Figure 6 and other figures, the central axis Ac is configured to extend in the horizontal direction, particularly in the front-to-rear direction.

[0049] (Stage 4) The stage 4 has a base 41 set on a workbench or the like, a stand 42 connected to the base 41, and a mounting table 5 supported by the base 41 or the stand 42. The stage 4 is a member for determining the relative positional relationship between the mounting table 5 and the head unit 6, and is configured so that at least the observation optical system 9 and the analysis optical system 7 of the head unit 6 can be attached.

[0050] The base 41 constitutes approximately the lower half of the stage 4, and is formed in the shape of a pedestal whose front-to-rear dimension is longer than its left-to-right dimension, as shown in Fig. 2. The base 41 has a bottom surface that is placed on a workbench or the like. A mounting table 5 is attached to the front portion of the base 41.

[0051] 6 and other figures, a first support portion 41a and a second support portion 41b are provided in a rear portion of the base 41 (particularly, a portion located rearward of the mounting table 5) in a state where they are lined up in order from the front side. The first and second support portions 41a, 41b are both provided so as to protrude upward from the base 41. A circular bearing hole (not shown) is formed in the first and second support portions 41a, 41b and is arranged so as to be concentric with the central axis Ac.

[0052] The stand 42 constitutes the upper half of the stage 4, and is formed in a columnar shape extending vertically perpendicular to the base 41 (particularly the bottom surface of the base 41) as shown in Figures 2, 3, 6, etc. The head unit 6 is attached to the front surface of the upper part of the stand 42 via a separate mounting fixture 43.

[0053] 6 and other figures, a first mounting portion 42a and a second mounting portion 42b are provided on the lower portion of the stand 42, lined up in order from the front. The first and second mounting portions 42a, 42b are configured to correspond to the first and second support portions 41a, 41b described above. Specifically, the first and second support portions 41a, 41b and the first and second mounting portions 42a, 42b are laid out so that the first support portion 41a is sandwiched between the first mounting portion 42a and the second mounting portion 42b, and the second mounting portion 42b is sandwiched between the first support portion 41a and the second support portion 41b.

[0054] Additionally, the first and second mounting portions 42a and 42b are formed with circular bearing holes (not shown) that are concentric and have the same diameter as the bearing holes formed in the first and second support portions 41a and 41b. A shaft member 44 is inserted into these bearing holes via bearings (not shown), such as cross roller bearings. The shaft member 44 is positioned so that its axis is concentric with the aforementioned central axis Ac. By inserting the shaft member 44, the base 41 and the stand 42 are connected so as to be able to swing relative to each other. The shaft member 44, together with the first and second support portions 41a and 41b and the first and second mounting portions 42a and 42b, constitute a tilting mechanism 45 in this embodiment.

[0055] By connecting the base 41 and the stand 42 via the tilting mechanism 45, the stand 42 is supported by the base 41 in a state in which it can swing about the central axis Ac. By swinging the stand 42 about the central axis Ac, it tilts left and right with respect to a predetermined reference axis As (see FIGS. 10A and 10B). In the non-tilted state shown in FIG. 4 and other figures, this reference axis As can be an axis extending perpendicular to the upper surface (mounting surface 51 a) of the mounting table 5. Furthermore, the central axis Ac functions as the central axis (center of rotation) of the swing caused by the tilting mechanism 45.

[0056] Specifically, the tilting mechanism 45 according to this embodiment can tilt the stand 42 approximately 90° to the right with respect to the reference axis As, or approximately 60° to the left with respect to the reference axis As. As described above, the head unit 6 is attached to the stand 42, and therefore the head unit 6 can also be tilted left and right with respect to the reference axis As. Tilting the head unit 6 is equivalent to tilting the analysis optical system 7 and the observation optical system 9, and ultimately tilting the analysis optical axis Aa and observation optical axis Ao, which will be described later.

[0057] The mounting fixture 43 has a rail portion 43a that guides the head portion 6 along the longitudinal direction of the stand 42, and a lock lever 43b that locks the relative position of the head portion 6 with respect to the rail portion 43a. Here, the longitudinal direction of the stand 42 coincides with the vertical direction (first direction) in the non-tilted state, and coincides with the direction extending along the analysis optical axis Aa, the observation optical axis Ao, and the reference axis As. In the tilted state, the longitudinal direction of the stand 42 does not coincide with the vertical direction and the direction extending along the reference axis As, but still coincides with the direction extending along the analysis optical axis Aa and the observation optical axis Ao. The longitudinal direction of the stand 42 will also be referred to as the "approximately vertical direction" in the following description.

[0058] The rear portion of the head unit 6 (specifically, the head mounting member 61) is inserted into the rail portion 43a. The rear portion of the rail portion 43a can be moved substantially vertically. Then, with the head unit 6 set at a desired position, the head unit 6 can be fixed at the desired position by operating the lock lever 43b. The position of the head unit 6 can also be adjusted by operating the first operating dial 46 shown in Figures 2 and 3.

[0059] Furthermore, the stage 4 or the head unit 6 has a built-in head driver 47 for moving the head unit 6 in a substantially vertical direction. The head driver 47 includes an actuator (e.g., a stepping motor) (not shown) controlled by the controller main body 2, and a motion conversion mechanism that converts rotation of the output shaft of the stepping motor into linear motion in a substantially vertical direction, and moves the head unit 6 based on drive pulses input from the controller main body 2. By moving the head unit 6 with the head driver 47, the head unit 6, and therefore the analysis optical axis Aa and the observation optical axis Ao, can be moved substantially vertically.

[0060] The mounting table 5 is disposed forward of the center of the base 41 in the front-rear direction, and is attached to the upper surface of the base 41. The mounting table 5 is configured as an electrically operated mounting table, and can move the sample SP placed on its mounting surface 51a in the horizontal direction, raise and lower it in the up-down direction, and rotate it in the φ direction.

[0061] Specifically, as shown in Figures 2 to 4, the mounting table 5 of this embodiment has a mounting table main body 51 having a mounting surface 51a for placing a sample SP, a mounting table support part 52 arranged between the base 41 and the mounting table main body 51 and displacing the mounting table main body 51, and a mounting table drive part 53 shown in Figure 11 described later.

[0062] The mounting table main body 51 is configured as a so-called XY stage. The upper surface of the mounting table main body 51 configures a mounting surface 51a on which the sample SP is placed. This mounting surface 51a is formed to extend substantially horizontally. The sample SP is placed on the mounting surface 51a in an open-to-air state, i.e., without being contained in a vacuum chamber or the like.

[0063] The mounting table support part 52 is a member that connects the base 41 and the mounting table main body 51, and is formed in a generally cylindrical shape that extends in the vertical direction. The mounting table support part 52 can accommodate a mounting table drive part 53.

[0064] The mounting table driving unit 53 includes a plurality of actuators (for example, stepping motors) (not shown) controlled by the controller main body 2, and a motion conversion mechanism that converts the rotation of the output shaft of the stepping motor into linear motion, and moves the mounting table main body 51 based on drive pulses input from the controller main body 2. By the mounting table driving unit 53 moving the mounting table main body 51, the mounting table main body 51, and therefore the sample SP placed on the mounting surface 51a, can be moved in the horizontal and vertical directions.

[0065] Similarly, the mounting table driving unit 53 can rotate the mounting table main body 51 in the φ direction around a predetermined rotation axis based on a driving pulse input from the controller main body 2. By rotating the mounting table main body 51 with the mounting table driving unit 53, the sample SP placed on the mounting surface 51a can also be rotated in the φ direction. Note that the configuration including the mounting table driving unit 53 is not essential. The mounting table main body 51 may also be configured to be rotated manually.

[0066] In particular, the placement surface 51a according to this embodiment is configured to be rotatable around the reference axis As shown in Fig. 6 etc. as the rotation axis. That is, in this embodiment, the reference axis As, which is the reference for tilt, and the rotation axis of the placement surface 51a are coaxial.

[0067] Moreover, the stage main body 51 can be manually moved and rotated by operating the second operation dial 54, etc., as shown in Fig. 2. Details of the second operation dial 54 will be omitted.

[0068] Returning to the explanation of the base 41 and the stand 42, the base 41 described above has a first tilt sensor Sw3 built in. This first tilt sensor Sw3 can detect the tilt of a reference axis As perpendicular to the mounting surface 51a with respect to the direction of gravity. Meanwhile, a second tilt sensor Sw4 is attached to the stand 42. This second tilt sensor Sw4 can detect the tilt of the analysis optical system 7 with respect to the direction of gravity (more specifically, the tilt of the analysis optical axis Aa with respect to the direction of gravity). The detection signals of the first tilt sensor Sw3 and the second tilt sensor Sw4 are both input to the control unit 21.

[0069] (Head part 6) The head section 6 has a head mounting member 61, an analysis unit 62 configured by accommodating the analysis optical system 7 in an analysis housing 70, an observation unit 63 configured by accommodating the observation optical system 9 in an observation housing 90, a housing connector 64, and a slide mechanism (horizontal drive mechanism) 65 (the analysis unit 62 and the observation unit 63 are only shown in FIG. 5 ). The head mounting member 61 is a member for connecting the analysis housing 70 to the stand 42. The analysis unit 62 is a device for analyzing the components of the sample SP using the analysis optical system 7. The observation unit 63 is a device for observing the sample SP using the observation optical system 9. The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. The slide mechanism 65 is a mechanism for sliding the analysis housing 70 relative to the stand 42.

[0070] More specifically, the head mounting member 61 according to this embodiment is disposed on the rear side of the head unit 6, and is configured as a plate-like member for mounting the head unit 6 to the stand 42. As described above, the head mounting member 61 is fixed to the mounting fixture 43 of the stand 42.

[0071] The head mounting member 61 has a plate body 61a extending substantially parallel to the rear surface of the head unit 6, and a cover member 61b protruding forward from the lower end of the plate body 61a. In a first mode (described later) in which the reflective objective lens 74 faces the sample SP, the plate body 61a is spaced apart from the rear surface of the head unit 6 in the front-to-rear direction. In a second mode (described later) in which the objective lens 92 faces the sample SP, the plate body 61a is in close contact with or close to the rear surface of the head unit 6.

[0072] 8, a guide rail 65a constituting a slide mechanism 65 is attached to the left end of the head mounting member 61. The guide rail 65a connects the head mounting member 61 to other elements in the head unit 6 (specifically, the analysis optical system 7, the observation optical system 9, and the housing connector 64) so ​​that they can be displaced relative to each other in the horizontal direction.

[0073] The configurations of the analysis unit 62, the observation unit 63, the housing connector 64, and the slide mechanism 65 will be described below in order.

[0074] -Analysis Unit 62- FIG. 7 is a schematic diagram illustrating the configuration of the analytical optical system 7. As shown in FIG.

[0075] The analysis unit 62 has an analysis optical system 7 and an analysis housing 70 that houses the analysis optical system 7. The analysis optical system 7 is a collection of components for analyzing a sample SP as an analysis target, and each component is housed in the analysis housing 70. The elements for analyzing the sample SP also include the control unit 21 of the controller main body 2.

[0076] The analytical optical system 7 can perform analysis using, for example, the LIBS method. A communication cable C1 is connected to this analytical optical system 7 for sending and receiving electrical signals between the analytical optical system 7 and the controller main body 2. This communication cable C1 is not essential, and the analytical optical system 7 and the controller main body 2 may be connected via wireless communication.

[0077] The term "optical system" is used in a broad sense. That is, the analytical optical system 7 is defined as a system that includes not only optical elements such as lenses, but also a light source, an image sensor, etc. The same applies to the observation optical system 9.

[0078] As shown in Fig. 7, the analytical optical system 7 according to this embodiment includes an output unit 71, an output adjustment means 72, a deflection element 73, a reflective objective lens 74, a spectroscopic element 75, a first parabolic mirror 76A, a first detector 77A, a first beam splitter 78A, a second parabolic mirror 76B, a second detector 77B, a second beam splitter 78B, a coaxial illuminator 79, an imaging lens 80, a first camera 81, and a side illuminator 84. Some of the components of the analytical optical system 7 are also shown in Fig. 6. The side illuminator 84 is only shown in Fig. 11.

[0079] These components are useful in the analytical observation device A using the LIBS method, but depending on the analytical method, the reflective objective lens 74 and the like may not be necessary, and only some of the components may be required. The analytical observation device A only needs to include the emission part 71 and at least one of the first and second detectors 77A and 77B.

[0080] The emission unit 71 emits a primary electromagnetic wave or a primary ray to the sample SP. In particular, the emission unit 71 according to this embodiment is configured by a laser light source that emits laser light as the primary electromagnetic wave.

[0081] Although detailed illustration is omitted, the emission unit 71 according to this embodiment has an excitation light source constituted by a laser diode (LD) or the like, a focusing lens that focuses the laser output from the excitation light source and outputs it as laser excitation light, a laser medium that generates a fundamental wave based on the laser excitation light, a Q switch for pulse oscillation of the fundamental wave, a rear mirror and output mirror for resonating the fundamental wave, and a wavelength conversion element that converts the wavelength of the laser light output from the output mirror.

[0082] Here, it is preferable to use, for example, a rod-shaped Nd:YAG as the laser medium in order to obtain high energy per pulse. In this embodiment, the wavelength (so-called fundamental wavelength) of photons emitted from the laser medium by stimulated emission is set to 1064 nm in the infrared region.

[0083] Furthermore, a passive Q-switch can be used as the Q-switch, which increases transmittance when the intensity of the fundamental wave exceeds a predetermined threshold. The passive Q-switch is composed of a saturable absorber such as Cr:YAG. By using a passive Q-switch, it becomes possible to automatically generate pulses when a predetermined amount of energy or more is accumulated in the laser medium. Alternatively, a so-called active Q-switch, whose attenuation rate can be controlled externally, can also be used.

[0084] The wavelength conversion element is configured using two nonlinear optical crystals such as LBO (LiBO). By using two crystals, a third harmonic wave can be generated from the fundamental wave. In this embodiment, the wavelength of the third harmonic wave is set to 355 nm in the ultraviolet range.

[0085] That is, the emission unit 71 according to this embodiment can output laser light consisting of ultraviolet light as the primary electromagnetic wave. This allows analysis by the LIBS method to be performed on optically transparent samples SP such as glass. In addition, the proportion of laser light in the ultraviolet range that reaches the human retina is very small. By configuring the laser light so that it does not form an image on the retina, the safety of the device can be improved.

[0086] In the case of an analytical observation device A using an analytical method other than the LIBS method, electromagnetic waves other than laser light can be used as the primary electromagnetic wave depending on the type of analytical method. For example, when Raman spectroscopy is used, a predetermined monochromatic light can be used as the primary electromagnetic wave. Furthermore, when infrared spectroscopy is used, infrared light can be used as the primary electromagnetic wave, and when ultraviolet-visible-near-infrared spectroscopy is used, electromagnetic waves belonging to ultraviolet light, visible light, and near-infrared light can be used as the primary electromagnetic wave.

[0087] Depending on the type of analysis method, it is also possible to emit primary rays consisting of radiation, rather than primary electromagnetic waves, from the emission unit 71. In the case of an analytical observation device A using SEM / EDX or X-ray fluorescence analysis, the emission unit 71 will emit X-rays, electron beams, charged particles, etc. as primary rays. In the case of an analytical observation device A using mass spectrometry, the emission unit 71 will emit electron beams, neutral atoms, lasers, ionized gases, or plasma gases.

[0088] The output adjustment means 72 is disposed on the optical path connecting the emission unit 71 and the deflection element 73, and is capable of adjusting the output of the laser light (primary electromagnetic wave). Specifically, the output adjustment means 72 according to this embodiment includes a half-wave plate 72a and a polarizing beam splitter 72b. The half-wave plate 72a is configured to rotate relative to the polarizing beam splitter 72b, and by controlling the angle of rotation, the amount of light passing through the polarizing beam splitter 72b can be adjusted.

[0089] The laser light (primary electromagnetic wave) whose output has been adjusted by the output adjustment means 72 is reflected by a mirror (not shown) and enters the deflection element 73.

[0090] Specifically, deflection element 73 is laid out so as to reflect the laser light output from emission unit 71 and passed through output adjustment means 72, and to direct it to sample SP via reflective objective lens 74, while also passing light generated in sample SP in response to this laser light (light emitted as plasma is generated on the surface of sample SP, hereinafter referred to as "plasma light") and directing this to first detector 77A and second detector 77B. Deflection element 73 is also laid out so as to pass visible light collected for imaging, and direct most of it to first camera 81.

[0091] The ultraviolet laser light reflected by the deflection element 73 propagates as parallel light along the analysis optical axis Aa and reaches the reflective objective lens 74 .

[0092] The reflective objective lens 74 is configured to collect secondary electromagnetic waves generated in the sample SP when the sample SP is irradiated with the primary electromagnetic waves or primary rays emitted from the emission unit 71. In particular, the reflective objective lens 74 according to this embodiment is configured to collect laser light as the primary electromagnetic waves and irradiate the sample SP with the laser light (primary electromagnetic waves), and to collect plasma light (secondary electromagnetic waves) generated in the sample SP in response to the laser light (primary electromagnetic waves) irradiated onto the sample SP. In this case, the secondary electromagnetic waves correspond to plasma light emitted in association with plasma generation on the surface of the sample SP.

[0093] The reflective objective lens 74 is configured to coaxially arrange an optical system related to the emission of the primary electromagnetic wave from the emission unit 71 and an optical system related to the reception of the reflected light by the first camera 81 and the reception of the secondary electromagnetic wave by the first and second detectors 77A, 77B. In other words, the reflective objective lens 74 is shared by the two types of optical systems.

[0094] The reflective objective lens 74 has an analysis optical axis Aa that extends substantially in the vertical direction. The analysis optical axis Aa is arranged so as to be parallel to the observation optical axis Ao of the objective lens 92 of the observation optical system 9.

[0095] More specifically, the reflective objective lens 74 according to this embodiment is a Schwarzschild-type objective lens consisting of two mirrors. As shown in Fig. 7, the reflective objective lens 74 has a primary mirror 74a that is circular and has a relatively large diameter, and a secondary mirror 74b that is disk-shaped and has a relatively small diameter.

[0096] The primary mirror 74a passes the laser light (primary electromagnetic wave) through an opening provided in its center, while reflecting the plasma light (secondary electromagnetic wave) generated in the sample SP with mirror surfaces provided around it. The latter plasma light is reflected again by the mirror surface of the secondary mirror 74b and passes through the opening of the primary mirror 74a while being coaxial with the laser light.

[0097] Secondary mirror 74b is configured to transmit the laser light that has passed through the opening of primary mirror 74a, while collecting and reflecting the plasma light reflected by primary mirror 74a. The former laser light is irradiated onto sample SP, while the latter plasma light passes through the opening of primary mirror 74a and reaches deflector element 73, as described above.

[0098] Therefore, when laser light is input to the reflective objective lens 74, the laser light passes through the secondary mirror 74b located in the center of the reflective objective lens 74 and reaches the surface of the sample SP. The laser light that reaches the sample SP locally turns the sample SP into plasma, and as a result, plasma light is emitted. This plasma light passes through an opening provided around the secondary mirror 74b and reaches the primary mirror 74a. The plasma light that reaches the primary mirror 74a is reflected by its mirror surface to reach the secondary mirror 74b, where it is reflected again and reaches the deflection element 73 from the reflective objective lens 74. The reflected light that reaches the deflection element 73 passes through the deflection element 73 and reaches the spectroscopic element 75.

[0099] In the case of an analytical observation device A using an analytical method other than the LIBS method, electromagnetic waves other than plasma light can be used as the secondary electromagnetic wave depending on the type of analytical method. For example, when Raman spectroscopy is used, Raman scattered light can be used as the secondary electromagnetic wave. When infrared spectroscopy is used, light reflected by or transmitted through the sample SP can be used as the secondary electromagnetic wave. When ultraviolet-visible-near-infrared spectroscopy is used, electromagnetic waves belonging to ultraviolet light, visible light, and near-infrared light can be used as the secondary electromagnetic wave.

[0100] When Raman spectroscopy is used, the secondary electromagnetic wave is not an electromagnetic wave generated in the sample SP, but rather a reflected light reflected by the sample SP. When Fourier transform infrared spectroscopy and ultraviolet-visible-near-infrared spectroscopy are used, the secondary electromagnetic wave is a primary electromagnetic wave that has passed through the sample SP or a primary electromagnetic wave that has been reflected by the sample SP.

[0101] Furthermore, various electromagnetic waves can be used as secondary electromagnetic waves even when primary rays, rather than primary electromagnetic waves, are emitted from the emission part 71. Specifically, when the analytical observation device A is configured using SEM / EDX, the first and second detectors 77A, 77B receive characteristic X-rays as secondary electromagnetic waves.

[0102] The spectroscopic element 75 is disposed between the deflector element 73 and the first beam splitter 78A in the optical axis direction of the reflective objective lens 74 (the direction along the analytical optical axis Aa), and guides a portion of the plasma light generated in the sample SP to the first detector 77A, while directing the other portion to the second detector 77B, etc. Most of the latter plasma light is directed to the second detector 77B, but the remainder reaches the first camera 81.

[0103] Specifically, the plasma light (secondary electromagnetic waves) returning from the sample SP contains various wavelength components in addition to the wavelength corresponding to the laser light as the primary electromagnetic waves. Therefore, the spectroscopic element 75 according to this embodiment reflects electromagnetic waves in a short wavelength band among the secondary electromagnetic waves returning from the sample SP and guides them to the first detector 77A. The spectroscopic element 75 also transmits electromagnetic waves in other bands and guides them to the second detector 77B, etc.

[0104] The first parabolic mirror 76A is a so-called parabolic mirror, and is disposed between the spectroscopic element 75 and the first detector 77A. The first parabolic mirror 76A collects the secondary electromagnetic waves reflected by the spectroscopic element 75, and causes the collected secondary electromagnetic waves to be incident on the first detector 77A.

[0105] The first detector 77A receives secondary electromagnetic waves generated in the sample SP when the primary electromagnetic waves or primary rays emitted from the emission section 71 are irradiated onto the sample SP, and generates an intensity distribution spectrum, which is the intensity distribution for each wavelength of the secondary electromagnetic waves.

[0106] In particular, when the emission unit 71 is configured using a laser light source and the reflective objective lens 74 is configured to collect plasma light as a secondary electromagnetic wave generated in response to irradiation with laser light as a primary electromagnetic wave, the first detector 77A separates the light by reflecting the light at different angles for each wavelength and causes each of the separated light beams to enter an image sensor having multiple pixels. This allows the wavelength of light received by each pixel to differ and the received light intensity to be obtained for each wavelength. In this case, the intensity distribution spectrum corresponds to the intensity distribution for each wavelength of light.

[0107] The analytical observation device A can also detect absorption of the primary electromagnetic wave in the sample SP by irradiating the sample SP with the primary electromagnetic wave. In this case, the emission unit 71 continuously irradiates the primary electromagnetic wave while changing the wavelength. The first and second detectors 77A and 77B can generate an intensity distribution spectrum based on the wavelength of the primary electromagnetic wave absorbed in the sample SP and the magnitude of thermal expansion caused by the absorption of the primary electromagnetic wave.

[0108] For example, when photothermal infrared spectroscopy is used as the analytical method, the analytical observation device A irradiates the sample SP with infrared light as a primary electromagnetic wave. The irradiated infrared light is absorbed by the sample SP. The sample SP experiences a temperature change as the primary electromagnetic wave is absorbed, and thermal expansion occurs in response to this temperature change. The analytical observation device A can analyze the characteristics of the sample SP based on the relationship between the magnitude of thermal expansion of the sample SP and the wavelength corresponding to that thermal expansion. In other words, when photothermal infrared spectroscopy is used, the first and second detectors 77A and 77B as detectors generate an intensity distribution spectrum that represents the relationship between the wavelength of the infrared light irradiated onto the sample SP and the magnitude of the temperature change and thermal expansion that occurs for each wavelength.

[0109] The analytical observation device A can also detect ionized sample SP by irradiating the sample SP with primary electromagnetic waves or primary rays. In this case, the emission unit 71 irradiates the sample SP with an electron beam, neutral atoms, a laser, ionized gas, or plasma-like gas. The first and second detectors 77A and 77B can generate an intensity distribution spectrum based on the m / z (a dimensionless quantity obtained by dividing the mass of an ion by unified atomic mass units and then dividing by the charge number of the ion) of the sample SP ionized by the primary electromagnetic waves or primary rays and the magnitude of the detected intensity for each m / z.

[0110] For example, when electron ionization (EI) is used as the analytical method, the analytical observation device A irradiates the sample SP with thermoelectrons as primary electromagnetic waves. The sample SP irradiated with the thermoelectrons is ionized. The analytical observation device A can analyze the characteristics of the sample SP based on the relationship between the m / z of the ionized sample SP and its detection intensity.

[0111] The intensity distribution spectrum may be constructed using the received light intensity acquired for each wave number. Because wavelengths and wave numbers correspond uniquely, even when the received light intensity acquired for each wave number is used, the intensity distribution spectrum can be regarded as an intensity distribution for each wavelength. The same applies to the second detector 77B described below.

[0112] The first detector 77A may be, for example, a Czerny-Turner type detector. The entrance slit of the first detector 77A is aligned with the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the first detector 77A is input to the control unit 21 of the controller main body 2.

[0113] First beam splitter 78A reflects a portion of the light transmitted through spectroscopic element 75 (secondary electromagnetic waves in the infrared region including the visible light band) and guides it to second detector 77B, while transmitting the other portion (part of the visible light band) and directing it to second beam splitter 78B. Of the plasma light belonging to the visible light band, a relatively large amount of plasma light is directed to second detector 77B, and a relatively small amount of plasma light is directed to first camera 81 via second beam splitter 78B.

[0114] The second parabolic mirror 76B is a so-called parabolic mirror, similar to the first parabolic mirror 76A, and is disposed between the first beam splitter 78A and the second detector 77B. The second parabolic mirror 76B collects the secondary electromagnetic waves reflected by the first beam splitter 78A, and causes the collected secondary electromagnetic waves to be incident on the second detector 77B.

[0115] Similar to the first detector 77A, the second detector 77B receives secondary electromagnetic waves generated in the sample SP when the primary electromagnetic waves or primary rays emitted from the emission section 71 are irradiated onto the sample SP, and generates an intensity distribution spectrum, which is the intensity distribution for each wavelength of the secondary electromagnetic waves.

[0116] In particular, when the emission unit 71 is configured using a laser light source and the reflective objective lens 74 is configured to collect plasma light as a secondary electromagnetic wave generated in response to irradiation with laser light as a primary electromagnetic wave, the second detector 77B separates the light by reflecting the light at different angles for each wavelength and causes each of the separated light beams to enter an image sensor having multiple pixels. This allows the wavelength of light received by each pixel to differ and the received light intensity to be obtained for each wavelength. In this case, the intensity distribution spectrum corresponds to the intensity distribution for each wavelength of light.

[0117] The second detector 77B may be, for example, a Czerny-Turner type detector. The entrance slit of the second detector 77B is aligned with the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the second detector 77B is input to the control unit 21 of the controller main body 2, similar to the intensity distribution spectrum generated by the first detector 77A.

[0118] The control unit 21 receives the ultraviolet intensity distribution spectrum generated by the first detector 77A and the infrared intensity distribution spectrum generated by the second detector 77B. Based on these intensity distribution spectra, the control unit 21 performs a component analysis of the sample SP using the basic principles described below. By using a combination of the ultraviolet intensity distribution spectrum and the infrared intensity distribution spectrum, the control unit 21 can perform a component analysis using a wider frequency range.

[0119] The second beam splitter 78B reflects the illumination light (visible light) emitted from the LED light source 79a and passed through the optical element 79b, and irradiates the sample SP with this light via the first beam splitter 78A, the spectroscopic element 75, the deflection element 73, and the reflective objective lens 74. The reflected light (visible light) reflected by the sample SP returns to the analytical optical system 7 via the reflective objective lens 74.

[0120] The coaxial illuminator 79 includes an LED light source 79a that emits illumination light and an optical element 79b through which the illumination light emitted from the LED light source 79a passes. The coaxial illuminator 79 functions as a so-called "coaxial epi-illuminator." The illumination light emitted from the LED light source 79a propagates coaxially with the laser light (primary electromagnetic wave) output from the emission unit 71 and irradiated onto the sample SP, and with the light (secondary electromagnetic wave) returning from the sample SP.

[0121] More specifically, the coaxial illumination 79 irradiates illumination light via an optical path that is coaxial with the primary electromagnetic wave emitted from the emission unit 71. Specifically, the portion of the optical path of the illumination light that connects the deflection element 73 and the reflective objective lens 74 is coaxial with the optical path of the primary electromagnetic wave. Furthermore, the portion of the optical path of the illumination light that connects the first beam splitter 78A and the reflective objective lens 74 is coaxial with the optical path of the secondary electromagnetic wave.

[0122] The second beam splitter 78B also transmits the reflected light that has returned to the analysis optical system 7 and has passed through the first beam splitter 78A, and the plasma light that has passed through the first beam splitter 78A without reaching the first and second detectors 77A and 77B, and causes them to enter the first camera 81 via the imaging lens 80.

[0123] 7, the coaxial illumination 79 is built into the analysis housing 70, but the present disclosure is not limited to such a configuration. For example, a light source may be laid out outside the analysis housing 70, and the light source may be coupled to the analysis optical system 7 via an optical fiber cable.

[0124] The side illuminator 84 is disposed so as to surround the reflective objective lens 74. Although not shown, the side illuminator 84 irradiates illumination light from the side of the sample SP (in other words, from a direction tilted with respect to the analysis optical axis Aa).

[0125] The first camera 81 collects the light reflected by the sample SP via the reflective objective lens 74. The first camera 81 captures an image of the sample SP by detecting the amount of received reflected light that has been collected.

[0126] Specifically, the first camera 81 of this embodiment photoelectrically converts the light incident through the imaging lens 80 using multiple pixels arranged on its light receiving surface, converting it into an electrical signal corresponding to the optical image of the subject (sample SP).

[0127] The first camera 81 may have a plurality of light receiving elements arranged along the light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. Specifically, the first camera 81 according to this embodiment is configured with an image sensor made of a CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. The first camera 81 may also be configured with an image sensor made of, for example, a CCD (Charged-Coupled Device).

[0128] First camera 81 then inputs electrical signals generated by detecting the amount of light received by each light receiving element to control unit 21 of controller main body 2. Control unit 21 generates image data corresponding to the optical image of the subject based on the input electrical signals.

[0129] The optical components described so far are housed in the aforementioned analysis housing 70. A through-hole 70a is provided in the bottom surface of the analysis housing 70. The reflective objective lens 74 faces the mounting surface 51a via this through-hole 70a.

[0130] A shielding member 83 shown in Fig. 7 may be disposed inside the analyzing housing 70. This shielding member 83 is disposed between the through-hole 70a and the reflective objective lens 74, and can be inserted into the optical path of the laser light based on an electrical signal input from the controller main body 2 (see the dotted line in Fig. 7). The shielding member 83 is configured so as to be impermeable to at least the laser light.

[0131] By inserting the shielding member 83 into the optical path, it is possible to restrict the emission of laser light from the analyzing housing 70. The shielding member 83 may be disposed between the emission part 71 and the output adjusting means 72.

[0132] 8, the analysis housing 70 defines a space for accommodating the analytical optical system 7 as well as a space for accommodating the slide mechanism 65. In this sense, the analysis housing 70 can also be regarded as one element of the slide mechanism 65.

[0133] Specifically, the analyzing casing 70 according to this embodiment is formed in a box shape with a shorter front-rear dimension than its left-right dimension. The left portion of the front surface 70b of the analyzing casing 70 protrudes forward to ensure a movement margin for the guide rail 65a in the front-rear direction. Hereinafter, this protruding portion will be referred to as the "protruding portion" and will be denoted by the reference numeral 70c. This protruding portion 70c is located in the lower half of the front surface 70b in the up-down direction (in other words, only the lower half of the left portion of the front surface 70b protrudes).

[0134] -Basic principles of analysis using analytical optical systems 7- The control unit 21 performs a component analysis of the sample SP based on the intensity distribution spectra input from the first detector 77A and the second detector 77B. As a specific analysis method, the LIBS method can be used, as described above. The LIBS method is a method for analyzing components contained in the sample SP at the elemental level (so-called elemental analysis method).

[0135] Generally, when high energy is applied to a substance, electrons are separated from the atomic nucleus, and the substance enters a plasma state. The electrons that are separated from the atomic nucleus temporarily enter a high-energy and unstable state, but by losing energy from that state, they are captured by the atomic nucleus again and transition to a low-energy and stable state (in other words, they return from a plasma state to a non-plasma state).

[0136] Here, the energy lost from the electrons is emitted as electromagnetic waves, but the magnitude of the energy of these waves is determined by the energy levels based on the shell structure specific to each element. In other words, the energy of the electromagnetic waves emitted when electrons return from plasma to a non-plasma state has a value specific to each element (or more precisely, the orbit of the electron bound to the atomic nucleus). The magnitude of the energy of the electromagnetic waves is determined by their wavelength. Therefore, by analyzing the wavelength distribution of the electromagnetic waves emitted from the electrons, that is, the wavelength distribution of the light emitted from a substance when it becomes plasma, it is possible to analyze the components contained in that substance at the elemental level. This method is generally called atomic emission spectroscopy (AES).

[0137] The LIBS method is an analytical technique that belongs to the AES method. Specifically, in the LIBS method, energy is imparted to a substance (sample SP) by irradiating it with a laser (primary electromagnetic waves). Here, the area irradiated with the laser is locally converted into plasma, and by analyzing the intensity distribution spectrum of the plasma light (secondary electromagnetic waves) emitted as a result of this plasma conversion, it is possible to analyze the components of the substance.

[0138] That is, as described above, the wavelength of each plasma light (secondary electromagnetic wave) has a unique value for each element, so when the intensity distribution spectrum forms a peak at a specific wavelength, the element corresponding to that peak is a component of the sample SP. When the intensity distribution spectrum contains multiple peaks, the component ratio of each element can be calculated by comparing the intensities (amounts of received light) of each peak.

[0139] The LIBS method does not require vacuuming and allows component analysis to be performed in an open-air state. Furthermore, although it is a destructive test of the sample SP, it does not require processing such as dissolving the entire sample SP, and the positional information of the sample SP remains (it is merely a locally destructive test).

[0140] -Observation Unit 63- The observation unit 63 has an observation optical system 9 and an observation housing 90 that houses the observation optical system 9. The observation optical system 9 is a collection of parts for observing a sample SP as an observation target, and each part is housed in the observation housing 90. The elements for observing the sample SP also include the control unit 21 of the controller main body 2.

[0141] The observation optical system 9 includes a lens unit 9a having an objective lens 92. As shown in FIG. 3 and other figures, this lens unit 9a corresponds to a cylindrical lens barrel arranged at the bottom end of the observation housing 90. The lens unit 9a is held by the observation housing 90. The lens unit 9a can be removed from the observation housing 90 as a single unit.

[0142] A communication cable C2 for transmitting and receiving electrical signals to and from the controller main body 2, and an optical fiber cable C3 for guiding illumination light from the outside, are connected to the observation housing 90. Note that the communication cable C2 is not essential, and the observation optical system 9 and the controller main body 2 may be connected via wireless communication.

[0143] Specifically, as shown in Figure 6, the observation optical system 9 includes a group of mirrors 91, an objective lens 92, a second camera 93 as a second imaging unit, a second coaxial illumination 94, and a second lateral illumination 95.

[0144] The objective lens 92 has an observation optical axis Ao extending substantially vertically, and collects illumination light to illuminate the sample SP placed on the mounting stage main body 51, while also collecting light (reflected light) from the sample SP. The observation optical axis Ao is arranged so as to be parallel to the analysis optical axis Aa of the reflective objective lens 74 of the analysis optical system 7. The reflected light collected by the objective lens 92 is received by the second camera 93.

[0145] The mirror group 91 transmits the reflected light collected by the objective lens 92 and guides it to the second camera 93. The mirror group 91 according to this embodiment can be configured using a total reflection mirror, a beam splitter, and the like, as exemplified in FIG. 6. The mirror group 91 also reflects illumination light emitted from a second coaxial illumination 94 and guides it to the objective lens 92.

[0146] The second camera 93 collects the reflected light focused by the objective lens 92 and captures an image of the sample SP by detecting the amount of received reflected light. Specifically, the second camera 93 according to this embodiment photoelectrically converts the light incident from the sample SP through the objective lens 92 using a plurality of pixels arranged on its light receiving surface, converting it into an electrical signal corresponding to an optical image of the subject (sample SP).

[0147] The second camera 93 may have a plurality of light receiving elements arranged along its light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light receiving element. The second camera 93 according to this embodiment is configured with a CMOS image sensor, similar to the first camera 81, but a CCD image sensor can also be used.

[0148] The second camera 93 then inputs electrical signals generated by detecting the amount of light received by each light receiving element to the control unit 21 of the controller main body 2. The control unit 21 generates image data corresponding to the optical image of the subject based on the input electrical signals.

[0149] The second coaxial illuminator 94 emits illumination light guided through the optical fiber cable C3. The second coaxial illuminator 94 emits illumination light through a common optical path with the reflected light collected through the objective lens 92. In other words, the second coaxial illuminator 94 functions as a "coaxial epi-illuminator" that is coaxial with the observation optical axis Ao of the objective lens 92. Note that instead of guiding illumination light from the outside through the optical fiber cable C3, a light source may be built into the lens unit 9a. In this case, the optical fiber cable C3 is not required.

[0150] 6, the second side illumination 95 is configured by a ring illumination arranged to surround the objective lens 92. Similar to the side illumination 84 in the analysis optical system 7, the second side illumination 95 irradiates illumination light from diagonally above the sample SP.

[0151] -Housing connector 64- The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. By connecting the two housings 70, 90 with the housing connector 64, the analysis optical system 7 and the observation optical system 9 move integrally.

[0152] The housing connector 64 can be attached to the inside or outside of the analysis housing 70, or to the stand 42. In particular, in this embodiment, the housing connector 64 is adapted to be attached to the outer surface of the analysis housing 70.

[0153] Specifically, the housing connector 64 according to this embodiment is configured to be attachable to the aforementioned protrusion 70c of the analyzing housing 70, and is configured to hold the lens unit 9a to the right of the protrusion 70c.

[0154] 3, when the observation housing 90 is connected to the analysis housing 70 by the housing connector 64, the front surface of the protrusion 70c protrudes further forward than the front portions of the housing connector 64 and the observation housing 90. Thus, in this embodiment, when the housing connector 64 holds the observation housing 90, the observation housing 90 and at least a portion of the analysis housing 70 (the protrusion 70c in this embodiment) are laid out so as to overlap each other when viewed from the side (when viewed from a direction perpendicular to the direction of movement of the observation optical system 9 and the analysis optical system 7 by the slide mechanism 65).

[0155] The housing connector 64 according to this embodiment can fix the relative position of the analysis optical axis Aa with respect to the observation optical axis Ao by fixing the observation housing 90 to the analysis housing 70.

[0156] 8, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are arranged to be aligned along the direction (front-to-back direction in this embodiment) in which the observation optical system 9 and the analysis optical system 7 move relatively to the mounting table 5 by the slide mechanism 65. Particularly in this embodiment, the observation optical axis Ao is arranged to be positioned forward of the analysis optical axis Aa.

[0157] Furthermore, as shown in FIG. 8, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are positioned so that their positions coincide in a non-moving direction (left-right direction in this embodiment) that is along the horizontal direction and perpendicular to the aforementioned moving direction (front-back direction in this embodiment).

[0158] -Slide mechanism 65- Fig. 8 is a schematic diagram illustrating the configuration of the slide mechanism 65. Figs. 9A and 9B are diagrams illustrating the horizontal movement of the head unit 6.

[0159] The slide mechanism 65 is configured to move the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the horizontal direction so that imaging of the sample SP by the observation optical system 9 and irradiation of electromagnetic waves (laser light) when generating an intensity distribution spectrum by the analysis optical system 7 (in other words, irradiation of electromagnetic waves by the emission part 71 of the analysis optical system 7) can be performed on the same location on the sample SP as the object to be observed.

[0160] The direction of movement of the relative positions by the slide mechanism 65 can be the direction in which the observation optical axis Ao and the analysis optical axis Aa are aligned. As shown in Fig. 8, the slide mechanism 65 according to this embodiment moves the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the front-rear direction.

[0161] The slide mechanism 65 according to this embodiment displaces the analysis housing 70 relative to the stand 42 and the head mounting member 61. The analysis housing 70 and the lens unit 9a are connected by the housing connector 64, so that displacing the analysis housing 70 displaces the lens unit 9a integrally.

[0162] Specifically, the slide mechanism 65 according to this embodiment has a guide rail 65a and an actuator 65b. Of these, the guide rail 65a is configured to protrude forward from the front surface of the head mounting member 61.

[0163] More specifically, the base end of the guide rail 65a is fixed to the head mounting member 61. Meanwhile, the tip end portion of the guide rail 65a is inserted into a storage space defined within the analysis housing 70, and is attached in a state in which it can be inserted into or removed from the analysis housing 70. The insertion and removal direction of the analysis housing 70 relative to the guide rail 65a is equal to the direction in which the head mounting member 61 and the analysis housing 70 are moved away from or closer to each other (the front-to-rear direction in this embodiment).

[0164] The actuator 65b can be, for example, a linear motor or a stepping motor that operates based on an electrical signal from the control unit 21. By driving this actuator 65b, the analysis housing 70, and therefore the observation optical system 9 and the analysis optical system 7, can be displaced relative to the stand 42 and the head mounting member 61. When a stepping motor is used as the actuator 65b, a motion conversion mechanism that converts the rotational motion of the output shaft of the stepping motor into linear motion in the forward and backward directions is further provided.

[0165] The slide mechanism 65 further has a movement amount sensor Sw2 for detecting the movement amount of the observation optical system 9 and the analysis optical system 7. The movement amount sensor Sw2 can be configured with, for example, a linear scale (linear encoder) or a photointerrupter.

[0166] The movement amount sensor Sw2 detects the relative distance between the analysis casing 70 and the head mounting member 61, and inputs an electrical signal corresponding to the relative distance to the controller main body 2. The controller main body 2 determines the amount of displacement of the observation optical system 9 and the analysis optical system 7 by calculating the amount of change in the relative distance input from the movement amount sensor Sw2.

[0167] 9A and 9B, operation of the slide mechanism 65 causes the head unit 6 to slide horizontally, and the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5 are moved (horizontally moved). This horizontal movement switches the head unit 6 between a first mode in which the reflective objective lens 74 faces the sample SP, and a second mode in which the objective lens 92 faces the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first mode and the second mode.

[0168] 9A and 9B, in the first mode, the head unit 6 is in a relatively advanced state, and in the second mode, the head unit 6 is in a relatively retreated state. The first mode is an operation mode for performing component analysis of the sample SP using the analytical optical system 7, and the second mode is an operation mode for performing magnified observation of the sample SP using the observation optical system 9.

[0169] In particular, the analytical observation device A according to this embodiment is configured so that the location at which the reflective objective lens 74 is pointed in the first mode and the location at which the objective lens 92 is pointed in the second mode are the same. Specifically, the analytical observation device A is configured so that the location at which the analytical optical axis Aa and the sample SP intersect in the first mode and the location at which the observation optical axis Ao and the sample SP intersect in the second mode are the same (see FIG. 9B).

[0170] To achieve this configuration, the movement amount D2 of the head unit 6 when the slide mechanism 65 is actuated is set to be the same as the distance D1 between the observation optical axis Ao and the analysis optical axis Aa (see FIG. 8). In addition, the alignment direction of the observation optical axis Ao and the analysis optical axis Aa is set to be parallel to the movement direction of the head unit 6, as shown in FIG.

[0171] Furthermore, in this embodiment, by adjusting the dimensions of the housing connector 64 in the approximately vertical direction, the distance between the sample SP and the center of the reflective objective lens 74 in the first mode (more specifically, the location where the analysis optical axis Aa and the reflective objective lens 74 intersect) is set to match the distance between the sample SP and the center of the objective lens 92 in the second mode (second state) (more specifically, the location where the observation optical axis Ao and the objective lens 92 intersect). This setting can also be performed by determining the in-focus position using autofocus.

[0172] Furthermore, the reflective objective lens 74 and the objective lens 92 may be designed so that their working distances (WD) match each other. This ensures that if the lens is in focus before the mode is switched, it will remain in focus after the mode is switched, and prevents the lens and sample SP from colliding when the mode is switched, even if the lens and sample SP were extremely close to each other before the mode was switched.

[0173] By configuring as described above, before and after switching between the first mode and the second mode, it becomes possible to perform image generation of the sample SP by the observation optical system 9 and generation of an intensity distribution spectrum by the analysis optical system 7 (specifically, irradiation of a primary electromagnetic wave by the analysis optical system 7 when an intensity distribution spectrum is generated by the analysis optical system 7) on the same location in the sample SP from the same direction.

[0174] Furthermore, as shown in Figure 9B, in the second mode in which the head section 6 is moved relatively backward, the aforementioned cover member 61b of the head mounting member 61 is positioned so as to cover (shield) the reflective objective lens 74 that constitutes the analytical optical system 7, and in the first mode in which the head section 6 is moved relatively forward, it is positioned so as to be spaced away from the reflective objective lens 74 (non-shield).

[0175] In the former shielded state, even if laser light is unintentionally emitted, the laser light can be blocked by the cover member 61b. This improves the safety of the device. Furthermore, when laser light is not being emitted, it is possible to prevent foreign matter from entering the analyzing housing 70.

[0176] (Details of tilt mechanism 45) 10A and 10B are diagrams for explaining the operation of the tilt mechanism 45. Hereinafter, the tilt mechanism 45, including its relationship with the housing connector 64, will be described in detail with reference to FIGS. 10A and 10B.

[0177] The tilting mechanism 45 is a mechanism constituted by the aforementioned shaft member 44 and the like, and is capable of tilting at least the observation optical system 9 out of the analysis optical system 7 and the observation optical system 9 with respect to a reference axis As perpendicular to the mounting surface 51a.

[0178] As described above, in this embodiment, the relative position of the observation optical axis Ao with respect to the analysis optical axis Aa is maintained by integrally connecting the analysis housing 70 and the observation housing 90 with the housing connector 64. Therefore, when the observation optical system 9 having the observation optical axis Ao is tilted, the analysis optical system 7 having the analysis optical axis Aa will tilt integrally with the observation optical system 9, as shown in Figures 10A and 10B.

[0179] In this way, the tilting mechanism 45 according to this embodiment tilts the analytical optical system 7 and the observation optical system 9 together while maintaining the relative position of the observation optical axis Ao with respect to the analytical optical axis Aa.

[0180] Furthermore, the operation of the slide mechanism 65 and the operation of the tilt mechanism 45 are independent of each other, and a combination of the two operations is permitted. Therefore, the slide mechanism 65 can move the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining at least the tilted attitude of the observation optical system 9 by the tilt mechanism 45. That is, in the analytical observation device A according to this embodiment, the head unit 6 can slide back and forth while the observation optical system 9 remains tilted, as indicated by the double-headed arrow A1 in Fig. 10B.

[0181] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, and therefore the slide mechanism 65 moves the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining the tilted state of both the observation optical system 9 and the analytical optical system 7 by the tilt mechanism 45.

[0182] Furthermore, the analytical observation device A is configured to be able to perform eucentric observation. That is, in the analytical observation device A, a three-dimensional coordinate system specific to the device is defined, which is formed by three axes parallel to the X direction, the Y direction, and the Z direction. The secondary storage device 21c of the control unit 21 further stores the coordinates of an intersection position, which will be described later, in the three-dimensional coordinate system of the analytical observation device A. The coordinate information of the intersection position may be stored in the secondary storage device 21c in advance when the analytical observation device A is shipped from the factory. Furthermore, the coordinate information of the intersection position stored in the secondary storage device 21c may be updatable by the user of the analytical observation device A.

[0183] 10A and 10B, if the angle of the analytical optical axis Aa with respect to the reference axis As is referred to as the "tilt θ," the analytical observation device A is configured to allow the emission of laser light when the tilt θ is below a predetermined first threshold θmax, for example. To keep the tilt θ below the first threshold θmax, a hardware constraint can be imposed on the tilt mechanism 45. For example, the operating range of the tilt mechanism 45 may be physically limited by providing a brake mechanism (not shown) in the tilt mechanism 45.

[0184] The observation optical axis Ao, which is the optical axis of the objective lens 92, intersects with the central axis Ac. When the objective lens 92 oscillates around the central axis Ac, the intersection position of the observation optical axis Ao and the central axis Ac is maintained constant, while the angle (tilt θ) of the observation optical axis Ao with respect to the reference axis As changes. In this way, when the user oscillates the objective lens 92 around the central axis Ac using the tilting mechanism 45, for example, if the observation target portion of the sample SP is at the above-mentioned intersection position, even if the objective lens 92 is tilted, a eucentric relationship is maintained in which the center of the field of view of the second camera 93 does not move from the same observation target portion. Therefore, it is possible to prevent the observation target portion of the sample SP from deviating from the field of view of the second camera 93 (the field of view of the objective lens 92).

[0185] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, so that the analytical optical axis Aa, which is the optical axis of the reflective objective lens 74, intersects with the central axis Ac, just like the observation optical axis Ao. When the reflective objective lens 74 oscillates around the central axis Ac, the angle (tilt θ) of the analytical optical axis Aa with respect to the reference axis As changes while the intersection position between the analytical optical axis Aa and the central axis Ac remains constant.

[0186] As described above, the tilting mechanism 45 can tilt the stand 42 by approximately 90° to the right with respect to the reference axis As, or by approximately 60° to the left with respect to the reference axis As. However, if the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, tilting the stand 42 excessively may result in the laser light emitted from the analytical optical system 7 being directed toward the user.

[0187] Therefore, if the tilt of the observation optical axis Ao and the analysis optical axis Aa relative to the reference axis As is denoted by θ, it is desirable that the tilt θ be within a range that satisfies a predetermined safety standard, at least under conditions in which laser light can be emitted. Specifically, in this embodiment, the tilt θ is adjustable within a range below the predetermined first threshold θmax, as described above.

[0188] <Details of controller body 2> FIG. 11 is a block diagram illustrating the configuration of the controller main body 2. FIG. 12 is a block diagram illustrating the configuration of the control unit 21. FIGS. 13A and 13B are diagrams for explaining the basic concept of the analysis method according to the present disclosure. In this embodiment, the controller main body 2 and the optical system assembly 1 are configured separately, but the present disclosure is not limited to such a configuration. At least a part of the controller main body 2 may be provided in the optical system assembly 1. For example, at least a part of the processing unit 21a that configures the control unit 21 may be built into the optical system assembly 1.

[0189] As described above, the controller main body 2 according to this embodiment includes the control unit 21 that performs various processes and the display unit 22 that displays information related to the processes performed by the control unit 21. The control unit 21 is electrically connected to at least the mouse 31, the console 32, the keyboard 33, the head drive unit 47, the mounting table drive unit 53, the actuator 65b, the emission unit 71, the output adjustment means 72, the LED light source 79a, the first camera 81, the shielding member 83, the lateral illuminator 84, the second camera 93, the second coaxial illuminator (second coaxial illuminator) 94, the second lateral illuminator (second lateral illuminator) 95, the lens sensor Sw1, the movement amount sensor Sw2, the first tilt sensor Sw3, and the second tilt sensor Sw4.

[0190] The control unit 21 electrically controls the head drive unit 47, the mounting table drive unit 53, the actuator 65b, the emission unit 71, the output adjustment means 72, the LED light source 79a, the first camera 81, the shielding member 83, the lateral light 84, the second camera 93, the second coaxial light 94 and the second lateral light 95.

[0191] Furthermore, output signals from the first camera 81, the second camera 93, the lens sensor Sw1, the movement amount sensor Sw2, the first tilt sensor Sw3, and the second tilt sensor Sw4 are input to the control unit 21. The control unit 21 performs calculations and the like based on the input output signals and executes processing based on the calculation results. As hardware for performing such processing, the control unit 21 according to this embodiment has a processing unit 21a that executes various processes, a primary storage device 21b and a secondary storage device 21c that store data related to the processes performed by the processing unit 21a, and an input / output bus 21d.

[0192] The processing unit 21a is composed of a CPU, a system LSI, a DSP, etc. By executing various programs, the processing unit 21a performs analysis of the sample SP and controls each part of the analytical observation device A, such as the display unit 22. In particular, the processing unit 21a according to this embodiment can execute processing based on a substance library Li. As will be described later, this substance library Li refers to a collection of data in which the types of substances that make up the sample SP are stored in association with the characteristics that make up the substances.

[0193] Furthermore, the processing unit 21a according to this embodiment has, as functional elements, a mode switching unit 211, a spectrum acquisition unit 212, a feature extraction unit 213, a substance estimation unit 214, a user interface control unit (hereinafter simply referred to as a "UI control unit") 215, and a library generation unit 216. These elements may be realized by a logic circuit or by executing software. Furthermore, at least some of these elements may be provided in the optical system assembly 1, such as the head unit 6.

[0194] The primary storage device 21b is configured with a volatile memory. The primary storage device 21b according to this embodiment can read out the substance library Li from the secondary storage device 21c or the like and store it primarily. The primary storage device 21b is an example of the "storage unit" in this embodiment.

[0195] 13A, the substance library Li is configured by storing hierarchical information of higher-level classifications C1 that represent the general names of substances that are thought to be contained in the sample SP, and lower-level classifications C3 that represent the types of substances that belong to this higher-level classification C1. The higher-level classification C1 may be configured to include at least one of the lower-level classifications C3.

[0196] For example, if the sample SP is a steel material, the higher classification C1 may be alloy steel, carbon steel, cast iron, etc., or may be a classification obtained by subdividing these classifications, such as stainless steel, cemented carbide, high-tensile steel, etc. Furthermore, as a classification other than steel products, aluminum alloy may be added in addition to alloy steel, etc.

[0197] Furthermore, if the sample SP is a steel material, the subclassification C3 may be a classification such as austenitic, precipitation hardened, or ferritic, or may be a classification such as SUS301 or SUS302 that is a subdivision of these classifications based on the Japanese Industrial Standards (JIS). The subclassification C3 may be a classification that subdivides at least the upper class C1. Furthermore, if the upper class C1 is set to an aluminum alloy, for example, duralumin may be used as the lower class C3. In other words, the upper class C1 may be a classification to which at least a portion of the lower class C3 belongs.

[0198] On the other hand, if the sample SP is an organic compound, the higher classification C1 may be a classification based on the presence or absence of aromaticity, such as aromatic compounds or aliphatic compounds, a classification based on skeletal structure, such as chain compounds or cyclic compounds, a classification by functional group, or a combination of these classifications. Furthermore, classifications specific to a particular research field, such as oil and fat compounds or nucleic acid compounds, may also be used.

[0199] In this case, the subclassification C3 may be a classification obtained by subdividing the classification related to aromaticity, such as benzene-based aromatic compounds, heteroaromatic compounds, and non-benzene-based aromatic compounds, or may be a classification further subdivided based on skeletal structure, such as the presence or absence of a C-H bond or a C=C bond, or may be a combination of these classifications.

[0200] One or more intermediate classifications C2 may be provided between the upper classification C1 and the lower classification C3. In this case, the hierarchical information of the intermediate classification C2 is stored together with the hierarchical information of the upper classification C1 and the lower classification C3 to form the substance library Li. The intermediate classifications C2 represent multiple systems belonging to the upper classification C1.

[0201] For example, if sample SP is a steel material, and classifications such as stainless steel, cemented carbide, and high-tensile steel are used as the higher classification C1, and classifications such as SUS301, SUS302, and A2017 are used as the lower classification C3, then the middle classification C2 may be a classification such as austenitic or precipitation hardened, or may be a classification that collectively refers to part of the lower classification C3, such as "SUS300 series."

[0202] The substance library Li shown in FIG. 13A includes, for example, a first substance library Li1 generated according to a first standard (standard 1) and a second substance library Li2 generated according to a second standard (standard 2). Examples of the first or second standard include the aforementioned JIS, as well as standards based on the International Organization for Standardization (ISO) (hereinafter simply referred to as "ISO"), the EN standard established by the European Committee for Standardization (hereinafter simply referred to as "EN"), and the standard established by the American National Standards Institute (ANSI) (hereinafter simply referred to as "ANSI"). Commercial standards or similar databases can also be used. Furthermore, a user-defined substance library Liu generated according to user input can also be used as the substance library Li. While a library based on a standard such as JIS has been described here, this embodiment is not limited to this. For example, a specific library commonly used in a specific industry or field may also be used. Furthermore, a library in which multiple substances are grouped according to a user's unique perspective may also be used.

[0203] The primary storage device 21b of this embodiment can read out one or more of the first substance library Li1, the second substance library Li2, and the user-defined substance library as the substance library Li and store them primarily.

[0204] Furthermore, the subclassifications C3 that make up the substance library Li are configured to correspond to the characteristics Ch of substances that are thought to be contained in the sample SP. For example, when the LIBS method, SEM, or EDX method is used as the analytical method, the characteristics Ch of the substance include a set of information on the constituent elements of the sample SP and the content (or content rate) of those constituent elements.

[0205] In this case, by incorporating the combination of constituent elements and the upper and lower limits of the content (or content rate) of each constituent element for each substance that constitutes the subclassification C3 into the substance library Li, it becomes possible to estimate the subclassification C3 from the characteristics Ch of the substance, as described below.

[0206] The characteristics Ch of a substance include not only information that a user can intuitively grasp, but also internal data of the analytical observation device A. For example, when analyzing an intensity distribution spectrum through fitting a model formula, parameters used in fitting the intensity distribution spectrum can be used as the characteristics Ch of a substance.

[0207] Furthermore, when using a method suitable for analyzing organic compounds, such as IR, the characteristics Ch of a substance can include information on the details of covalent bonds, information indicating the presence or absence of specific functional groups in the constituent substances, etc.

[0208] Furthermore, the substance library Li according to this embodiment is configured by storing higher-level classifications C1 and supplementary explanations D1 regarding the generic names of the substances represented by the higher-level classifications C1 in association with each other. The supplementary explanations D1 are composed of text data describing the properties, etc., of each higher-level classification C1. As shown in FIG. 13B, the substance library Li is further configured to store, in addition to the higher-level classifications C1, intermediate classifications C2 and supplementary explanations D2 regarding the systems of the substances represented by the intermediate classifications C2 in association with each other. The supplementary explanations D2 are composed of text data describing the properties, etc., of each intermediate classification C2. For the lower-level classification C3, as shown in FIG. 13B, the supplementary explanation D3 may be left blank (no supplementary explanation), or, as with the higher-level classifications C1 and C2, text data describing some properties, etc., may be stored (supplementary explanation included). The presence or absence of a supplementary explanation D3 can also be individually set for each lower-level classification C3.

[0209] The secondary storage device 21c is configured with a non-volatile memory such as a hard disk drive or a solid state drive. The secondary storage device 21c can continuously store the substance library Li. Note that instead of storing the substance library Li in the secondary storage device 21c, the substance library Li may be read from an external device such as a storage medium 1000.

[0210] Furthermore, the controller main body 2 can read a storage medium 1000 that stores a program (see FIG. 13B). In particular, the storage medium 1000 according to this embodiment stores an analysis program that programs the analysis method according to this embodiment. This analysis program is read and executed by the controller main body 2. When the controller main body 2 executes the analysis program, the analytical observation device A functions as an analysis device that executes the analysis method according to this embodiment.

[0211] -Mode switching unit 211- The mode switching unit 211 switches from the first mode to the second mode or from the second mode to the first mode by moving the analysis optical system 7 and the observation optical system 9 forward and backward in the horizontal direction (in this embodiment, the front-to-back direction).

[0212] Specifically, the mode switching unit 211 according to this embodiment reads in advance the distance between the observation optical axis Ao and the analysis optical axis Aa, which is stored in advance in the secondary storage device 21 c. Next, the mode switching unit 211 operates the actuator 65 b of the slide mechanism 65 to move the analysis optical system 7 and the observation optical system 9 forward and backward.

[0213] Here, the mode switching unit 211 compares the displacement of the observation optical system 9 and the analytical optical system 7 detected by the movement amount sensor Sw2 with a distance read in advance to determine whether the former displacement amount has reached the latter distance. Then, when the displacement amount reaches a predetermined distance, the mode switching unit 211 stops the advancement and retraction of the analytical optical system 7 and the observation optical system 9. Note that the predetermined distance may be set in advance, or may be configured so that the predetermined distance coincides with the maximum movable range of the actuator 65b.

[0214] After switching to the first mode by the mode switching unit 211, the head unit 6 can also be tilted.

[0215] -Spectrum Acquisition Unit 212- The spectrum acquisition unit 212 acquires an intensity distribution spectrum via the first and second detectors 77A and 77B by causing the analysis optical system 7 to emit a primary electromagnetic wave or a primary ray in the first mode.

[0216] Specifically, spectrum acquiring unit 212 according to this embodiment emits a primary electromagnetic wave or a primary ray (e.g., laser light or an electron beam) from emission unit 71. A secondary electromagnetic wave (e.g., plasma light) generated by emitting the primary electromagnetic wave or the primary ray reaches first detector 77A and second detector 77B.

[0217] The first and second detectors 77A and 77B function as detectors and generate intensity distribution spectra based on the secondary electromagnetic waves that reach them. The intensity distribution spectra thus generated are acquired by the spectrum acquisition unit 212.

[0218] -Feature Extraction Unit 213- The feature extraction unit 213 extracts the feature Ch of a substance contained as a constituent component in the sample SP based on the intensity distribution spectrum acquired by the spectrum acquisition unit 212. For example, when the LIBS method, SEM, or EDX method is used as the analysis method, the feature extraction unit 213 calculates the peak position and the peak height in the acquired intensity distribution spectrum. Based on the peak position and peak height thus calculated, the feature extraction unit 213 extracts the constituent elements of the sample SP and the content of the constituent elements as the feature Ch of the substance.

[0219] Here, the feature extraction unit 213 can extract the feature Ch of a substance by fitting the intensity distribution spectrum with a predetermined model formula. In this case, the feature Ch of a substance can include various parameters in the model formula in addition to or instead of information that the user can intuitively grasp. Furthermore, when machine learning such as a neural network is used, the intensity distribution spectrum itself may be used as the feature Ch.

[0220] Furthermore, when a method suitable for analyzing organic substances, such as NMR or IR, is used, the feature extraction unit 213 extracts one or more peak positions from the intensity distribution spectrum and acquires the bond structure corresponding to the peak positions as the feature Ch of the substance. In this case, the feature extraction unit 213 can acquire details of the covalent bonds in the constituent substances of the sample SP, or the presence or absence of specific functional groups in the constituent substances.

[0221] -Substance Estimation Department 214- The substance estimation unit 214 estimates the type of the substance from among the sub-classifications C3 based on the characteristics Ch of the substance extracted by the characteristics extraction unit 213 and the substance library Li read out by the secondary storage device 21b.

[0222] As described above, the subclassifications C3 constituting the substance library Li are configured to correspond to the characteristics Ch of substances thought to be contained in the sample SP. The substance estimation unit 214 then compares the characteristics Ch of a substance extracted by the characteristic extraction unit 213 with the substance library Li read out by the secondary storage device 21b, thereby estimating the substance from which the characteristics Ch were extracted from the subclassification C3. Here, comparison refers not only to calculating the similarity with representative data registered in the substance library Li, but also to the general act of obtaining an index indicating the accuracy of a substance using a group of parameters registered in the substance library Li.

[0223] In addition to the case where a subclassification C3 and a feature Ch are uniquely linked, as in the case of "substance a" and "feature α" shown in FIG. 13A, there may also be multiple candidates for the subclassification C3 corresponding to "feature α." In this case, the feature extraction unit 213 estimates multiple substances from the subclassification C3 that are relatively likely to be contained in the sample SP, and outputs the estimated subclassifications C3 in descending order of likelihood. Here, the accuracy can be determined using an index based on parameters obtained during analysis of the intensity distribution spectrum. For example, when the intensity distribution spectrum is analyzed by fitting a model formula, an index indicating the accuracy of the fitting, such as the sum of squared residuals between the model formula obtained by fitting and the intensity distribution spectrum acquired by the spectrum acquisition unit 212, can be used. Alternatively, when various parameter sets or discrimination spaces trained by machine learning are registered in the substance library Li, the accuracy of each subclassification C3 can be obtained from the parameter sets or discrimination spaces.

[0224] 13A , when the first substance library Li1 and the second substance library Li2 are read into the secondary storage device 21b, the substance estimation unit 214 may check one of the first substance library Li1 and the second substance library Li2 against the substance characteristic Ch, or may check both the first substance library Li1 and the second substance library Li2 against the substance characteristic Ch. In particular, the substance estimation unit 214 according to this embodiment can switch between a control mode in which one of the first and second substance libraries Li1, Li2 is checked against the substance characteristic Ch and a control mode in which both the first and second substance libraries Li1, Li2 are checked against the substance characteristic Ch, based on a user's operation input.

[0225] In the latter control mode, the substance estimation unit 214 can estimate a plurality of substances that may be contained in the sample SP with a relatively high degree of certainty from the sub-classifications C3 belonging to the first substance library Li1 and the sub-classifications C3 belonging to the second substance library Li2. For example, if the sub-classifications C3 belonging to the first substance library Li1 contain a total of N1 substances and the sub-classifications C3 belonging to the second substance library Li2 contain a total of N2 substances, the substance estimation unit 214 will estimate the sub-classification C3 that corresponds to the substance characteristic Ch from the N1+N2 sub-classifications C3.

[0226] The same applies when the substance library Li includes a user-defined substance library Liu. In this case, the substance estimation unit 214 can estimate substances with a relatively high probability among substances that may be contained in the sample SP from multiple sub-categories C3 belonging to the first substance library Li1 and the sub-categories C3 belonging to the user-defined substance library. Note that if there are multiple sub-categories C3 with relatively similar probability as substances that may be contained in the sample SP and it is difficult to determine which is better among the sub-categories C3, the substance that may be contained in the sample SP may be estimated from the higher-level category C1 or the middle-level category C2 to which the lower-level category C3 belongs, instead of the lower-level category C3.

[0227] The substance estimation unit 214 also compares the estimated lower class C3 with the substance library Li to estimate the intermediate class C2 to which the lower class C3 belongs, and ultimately the higher class C1. An electrical signal indicating the estimation result is input to the UI control unit 215.

[0228] -UI control unit 215- The UI control unit 215 hierarchically organizes the lower class C3 estimated by the substance estimation unit 214 and the higher class C1 to which the lower class C3 belongs, and displays them on the display unit 22. The content displayed on the display unit 22 may be a tree structure showing the hierarchical relationship between the lower class C3 and the higher class C1, as shown in Figures 13A and 13B, or may display only a structure related to a specific lower class C3 out of the hierarchical structure, as illustrated in Figures 16A to 16H described below.

[0229] Furthermore, when an intermediate classification C2 is set between a higher classification C1 and a lower classification C3, the UI control unit 215 can also display the intermediate classification C2 to which the lower classification C3 belongs, based on the electrical signal input from the substance estimation unit 214. As shown in output D4 in the lower part of Fig. 13B , the UI control unit 215 can display, as the analysis result, the lower classification C3 estimated by the substance estimation unit 214, the intermediate classification C2 to which the lower classification C3 belongs, and the higher classification C1 to which the intermediate classification C2 belongs, on the display unit 22, with the inclusion relationship of each classification indicated.

[0230] As described in the description of the substance library Li, each superordinate category C1 is stored in association with a corresponding supplementary explanation D1. The UI control unit 215 according to this embodiment can accept a selection from among the superordinate categories C1 displayed on the display unit 22 and cause the display unit 22 to display the supplementary explanation D1 associated with the selected superordinate category C1. The UI control unit 215 can also accept a selection from among the subordinate categories C3 displayed on the display unit 22 and cause the display unit 22 to display the supplementary explanation D1 associated with the superordinate category C1 to which the selected subordinate category C3 belongs.

[0231] That is, when a predetermined higher-level category C1 is selected, the UI control unit 215 according to this embodiment can display the supplementary explanation D1 corresponding to the higher-level category C1 on the display unit 22, and can also display the same supplementary explanation D1 on the display unit 22 when a lower-level category C3 belonging to the higher-level category C1 is selected. Here, if the supplementary explanation D3 is also stored in the lower-level category C3, the UI control unit 215 can display both the supplementary explanation D1 for the higher-level category C1 and the supplementary explanation D3 for the lower-level category C3, as shown in FIG. 13B.

[0232] The same applies when the intermediate classification C2 is set. As shown in the output D4 in the lower part of Fig. 13B, the UI control unit 215 can display, on the display unit 22, text data that combines the supplementary explanation D1 for the higher classification C1 and the supplementary explanation D2 for the intermediate classification C2 as the supplementary explanation.

[0233] Furthermore, the UI control unit 215 can display the subclassification C3 estimated by the substance estimation unit 214 together with identification information D5 indicating to which of the first substance library Li1, the second substance library Li2, and the user-defined substance library Liu the subclassification C3 belongs, on the display unit 22. This identification information D5 may be displayed on the display unit 22 together with information such as the analysis results and supplementary explanations, as exemplified in Fig. 13B.

[0234] -Library Generation Unit 216- The library generation unit 216 generates a user-defined substance library based on user input. The library generation unit 216 can set the names and hierarchical information of the upper classification C1, the middle classification C2, and the lower classification C3, as well as the supplementary explanation D1 associated with the upper classification C1, the supplementary explanation D2 associated with the middle classification C2, and the supplementary explanation D3 associated with the lower classification C3. The user-defined substance library Liu generated by the library generation unit 216 is stored in the secondary storage device 21c and is read and used as needed by the substance estimation unit 214, etc. Here, the upper classification C1, the middle classification C2, and the lower classification C3 can be registered with definitions uniquely defined by the user, or portions of them can be referenced from existing standards. The hierarchical structure between classifications and the supplementary explanations associated with each classification can be added and edited by the user at will. Furthermore, the feature Ch extracted by the feature extraction unit 213, for example, information indicating the composition of a substance, can be registered as is in one of the upper classification C1, the middle classification C2, or the lower classification C3, or automatically set as an initial value. Furthermore, when estimating substances using machine learning, training can be performed using the feature Ch registered by the user. This enables appropriate estimation of user-specific substances that do not exist in existing standards.

[0235] <Specific example of control flow> Fig. 14 is a flowchart illustrating the basic operation of the analytical observation device A. Fig. 15 is a flowchart illustrating the procedure for analyzing the sample SP by the control unit 21.

[0236] 14, a search for an analysis target is performed by the observation optical system 9 in the second mode. In this step S1, based on an operational input by the user, the control unit 21 searches for a portion (analysis target) to be analyzed by the analysis optical system 7 among the portions of the sample SP while adjusting conditions such as the exposure time of the second camera 93 and the brightness of the image data generated by the second camera 93, such as the illumination light guided by the optical fiber cable C3. At this time, the control unit 21 saves the image data generated by the second camera 93 as necessary.

[0237] In the next step S2, the control unit 21 receives an instruction to switch from the second mode to the first mode based on an operation input by the user. Then, the mode switching unit 211 activates the slide mechanism 65 to slide the observation optical system 9 and the analysis optical system 7 together, thereby switching from the second mode to the first mode.

[0238] In the following step S3, the primary storage device 21b serving as a storage unit reads out the substance library Li from the secondary storage device 21c or the like. This step S3 is an example of a "reading step" in this embodiment. Step S3 as a reading step may also be executed during processing step S4. The reading step S3 may be executed at a timing earlier than at least step S43 among steps S41 to S46 described below.

[0239] In the following step S4, after the mode switching is completed, the spectrum acquisition unit 212, the feature extraction unit 213, and the substance estimation unit 214 perform component analysis of the sample SP. In addition, in this step S4, the UI control unit 215 also controls the display unit 22. Step S4 is an example of a "processing step" in this embodiment. Specifically, the processing performed in step S4 as a processing step is made up of steps S41 to S46 in FIG. 15.

[0240] First, in step S41, spectrum acquisition unit 212 causes laser light to be emitted from emission unit 71, and causes first and second detectors 77A and 77B to receive plasma light resulting from the emission. First and second detectors 77A and 77B generate intensity distribution spectra, which are the intensity distributions for each wavelength of the plasma light. The intensity distribution spectra generated by first and second detectors 77A and 77B are acquired by spectrum acquisition unit 212. Step S41 is an example of the "acquisition process" in this embodiment.

[0241] In the following step S42, the feature extraction unit 213 extracts the feature Ch of the substance contained in the sample SP based on the intensity distribution spectrum acquired by the spectrum acquisition unit 212. In this example, the feature extraction unit 213 extracts the constituent elements of the sample SP and the content ratios of the constituent elements as the feature Ch of the substance. This extraction may be performed based on various physical models, may be performed through a calibration curve graph, or may be performed using a statistical method such as multiple regression analysis. Step S42 is an example of the "extraction step" in this embodiment.

[0242] In the following step S43, the substance estimation unit 214 estimates the type of substance contained in the sample SP (in particular, the type of substance irradiated with laser light) based on the substance characteristics Ch extracted by the characteristic extraction unit 213. This estimation can be performed by the substance estimation unit 214 comparing the substance characteristics Ch with the substance library Li. At this time, two or more of the subclassifications C3 are estimated in descending order of accuracy based on the accuracy (similarity) between the type of substance classified as the subclassification C3 in the substance library Li and the content rate of the constituent elements extracted by the characteristic extraction unit 213. Step S43 is an example of an "estimation identification step" in this embodiment.

[0243] In the following step S44, the substance estimation unit 214 searches for the corresponding middle-level classification C2 and upper-level classification C1 for each of the lower-level classifications C3 identified in step S43. The substance estimation unit 214 sets the data to be displayed on the display unit 22 from the hierarchical structure stored in the substance library Li by grouping each of the lower-level classifications C3 that were the search targets and the searched middle-level classification C2 and upper-level classification C1 into one set.

[0244] In the next step S45, the UI control unit 215 reads the annotations D1, D2, and D3 associated with each of the lower category C3, the middle category C2, and the higher category C1 that were grouped into one set in step S44. The UI control unit 215 combines the read annotations D1 to D3 to create text data to be displayed on the display unit 22. If the annotation D3 associated with the lower category C3 is blank (if the annotation D3 has not been set), the UI control unit 215 creates text data by combining only the annotation D2 associated with the middle category C2 and the annotation D1 associated with the higher category C1. If the annotation D2 associated with the middle category C2 is also blank, the UI control unit 215 generates text data using only the annotation D1 associated with the higher category C1.

[0245] In the following step S46, the UI control unit 215 displays various data on the display unit 22. Step S46 is an example of a "display step" in this embodiment. In step S46, in addition to the hierarchical structure set in step S44, various user interfaces such as icons for accepting user operation inputs are displayed on the display unit 22. The user interfaces displayed on the display unit 22 will be described below with reference to FIGS. 16A to 16H.

[0246] -Example of user interface- 16A to 16H are diagrams illustrating examples of display screens of the display unit 22. Immediately after the transition from step S45 to step S46, the UI control unit 215 causes the display unit 22 to display, as shown in Fig. 16A, first information Vd1 indicating the feature Ch extracted by the feature extraction unit 213, second information Vd2 indicating the type of substance estimated by the substance estimation unit 214, and third information Vd3 indicating the hierarchical structure of the estimated substance.

[0247] 16A, the first information Vd1 displays information indicating that the sample SP contains iron, chromium, and nickel, along with numerical data indicating that the iron content is 74%, the chromium content is 17%, and the nickel content is 9%. Below the first information Vd1, a first icon Ic1 is displayed that accepts clicks or other operations using the mouse 31. Although details are omitted, clicking on the first icon Ic1 labeled "Detection Settings..." allows settings related to the processing performed by the feature extraction unit 213 to be changed.

[0248] Further below the first icon Ic1, a second icon Ic2 is displayed, which accepts click operations, such as a click, using the mouse 31. By operating the second icon Ic2 labeled "Spectrum," fourth information Vd4 indicating the intensity distribution spectrum acquired by the spectrum acquisition unit 212 and the feature Ch extracted from the intensity distribution spectrum can be displayed on the display unit 22, as exemplified in Fig. 16B. In the illustrated example, it can be seen that the intensity distribution spectrum has peaks at a wavelength λ1 corresponding to iron, a wavelength λ2 corresponding to chromium, and a wavelength λ3 corresponding to nickel.

[0249] Returning to FIG. 16A , to the left of the first information Vd1, the second information Vd2 indicates that the higher-level material classification C1 is “stainless steel.” Below the second information Vd2, the third information Vd3 indicates the intermediate classifications C2 belonging to the higher-level material classification C1, in the order of “austenitic,” “precipitation hardened,” and “austenitic.” This order corresponds to the order of accuracy of the lower classifications C3 corresponding to each intermediate classification C2. In this example, the austenitic intermediate classification C2 includes both a lower classification C3 with higher accuracy than the lower classification C3 belonging to the precipitation hardened material and a lower classification C3 with lower accuracy than the lower classification C3 belonging to the precipitation hardened material. In the illustrated example, the lower classification C3 with relatively high accuracy includes SUS302, etc., the lower classification C3 with medium accuracy includes SUS631, etc., and the lower classification C3 with relatively low accuracy includes SUS304, SUS321, SUS305, etc. (not shown).

[0250] To learn more about the subclassification C3, first click on the fifth icon Ic5 displayed to the left of the intermediate classification C2, such as "austenitic." This fifth icon Ic5 belongs to the intermediate classification C2 and is an icon for switching between displaying and hiding the "second intermediate classification" to which the subclassification C3 belongs. The UI control unit 215 displays the fifth icon Ic5 on the display unit 22, particularly in the display field for the third information Vd3. The fifth icon Ic5 is an example of the "second icon" in this embodiment.

[0251] The second intermediate classification is a classification obtained by subdividing the intermediate classification C2. By further subdividing this second intermediate classification, the lower classification C3 in this example can be obtained. Note that the second intermediate classification is not essential. Also, a third intermediate classification belonging to the second intermediate classification may be set, or an additional intermediate classification belonging to the third intermediate classification may be set. The lower classification C3 may be associated with the lowest level of the intermediate classification thus set. Note that the intermediate classification, second intermediate classification, third intermediate classification, and additional intermediate classification may be set only for some of the lower classifications C3, and the presence or absence of an intermediate classification to which the lower classification C3 belongs and the number of intermediate classifications into which it is subdivided may vary depending on the lower classification C3. That is, if SUS300, SUS301, and SUS303Se are set as the lower class C3, then the intermediate class C2, "austenitic," may be set for the lower class C3, SUS300 and SUS301, and a second intermediate class, "SUS303 series," may be set for SUS303Se in addition to the intermediate class C2, "austenitic." In this way, by varying the presence or absence of an intermediate class to which the lower class C3 belongs and the number of intermediate classes into which it is subdivided, depending on the properties of the lower class C3, it is possible to more appropriately notify the user of the system and generic name of the class to which the sample SP as the analysis target belongs.

[0252] Here, by operating the fifth icon Ic5 located to the left of the "austenitic" icon at the top in FIG. 16A, a second intermediate classification belonging to the "austenitic" icon can be displayed on the display unit 22, particularly in the display field for the third information Vd3, as illustrated in FIG. 16C. In this example, "SUS300 series" is displayed as the second intermediate classification. Furthermore, when the upper classification C1 is expanded to the intermediate classification C2 and then to the second intermediate classification, the display of the second information Vd2 also changes, as illustrated in FIG. 16C. In the illustrated example, the fact that "austenitic" as the intermediate classification C2 belongs to "stainless steel" as the upper classification C1 and that "SUS300 series" as the second intermediate classification belongs to "austenitic" as the intermediate classification C2 is displayed as the second information Vd on the display unit 22. Note that the above-mentioned identification information may be displayed in various display fields as classifications even higher than the upper classification C1, as illustrated in FIG. 16C. In the illustrated example, the identification information is shown above the second information Vd2 as the "library in use," but the identification information may also be incorporated into the display field of the third information Vd3. The identification information can be used as the highest classification, even higher than the higher classification C1.

[0253] A sixth icon Ic6 is further displayed to the left of the second intermediate classification displayed as "SUS300 series." This sixth icon Ic6 is an icon for switching between displaying and hiding the lower classification C3 belonging to the second intermediate classification, and is displayed on the display unit 22 by the UI control unit 215.

[0254] By operating the sixth icon Ic6, as illustrated in FIG. 16D, the subcategory C3 belonging to the "SUS300 series" can be displayed on the display unit 22, particularly in the display field of the third information Vd3. Specifically, the UI control unit 215 according to the present embodiment can display, in addition to the subcategory C3 displayed by operating the sixth icon Ic6, the subcategory C1, the intermediate category C2, and the second intermediate category to which the subcategory C3 belongs, on the display unit 22, particularly in the display field of the third information Vd3, as illustrated in FIG. 16D. Furthermore, as illustrated in FIG. 16D, details of the subcategory C1, etc., to which the subcategory C3 belongs, are also reflected in the display content of the second information Vd2. In the illustrated example, the subcategory C3 is displayed as "SUS302," which has a relatively high probability, and "SUS303Se," which has a relatively low probability.

[0255] In addition, below the third information Vd3, a third icon Ic3 is displayed, which accepts click operations, etc., using the mouse 31. By operating the third icon Ic3, which is labeled "Display Description," the text data created in the above-mentioned step S45 can be displayed on the display unit 22.

[0256] Here, Fig. 16E shows an example of a display screen when the third icon Ic3 is operated from the state shown in Fig. 16C (a state in which the sub-category C3 is not displayed). Fig. 16F shows an example of a display screen when the third icon Ic3 is operated from the state shown in Fig. 16D (a state in which the sub-category C3 is displayed). Each display screen shows fifth information Vd5 indicating text data made up of supplementary explanations D1 to D3 for each category.

[0257] Here, for example, as described with reference to FIG. 13B, if the annotation D3 corresponding to the lower category C3 is blank, as illustrated in FIGS. 16E and 16F, the display screen when the third icon Ic3 is operated from a state in which the lower category C3 is hidden and the display screen when the third icon Ic3 is operated from a state in which the lower category C3 is displayed will be identical except for the second information Vd. In this case, the display unit 22 will display text data as the fifth information Vd5 that combines the annotation D1 related to the higher category C1, the annotation D2 related to the middle category C2, and the annotation related to the second middle category. On the other hand, if the annotation D3 related to the lower category C3 has been set, the annotation related to the lower category C3 will also be displayed on the display screen when the fifth information Vd5 is displayed from a state in which the lower category C3 is displayed.

[0258] Also, a fourth icon Ic4 that accepts a click operation or the like using the mouse 31 is displayed to the right of the third icon Ic3. When an operation on the fourth icon Ic4 is accepted, the UI control unit 215 switches the display content of the display unit 22 from the display screen exemplified in Fig. 16A or 16B to 16F to the display screen exemplified in Fig. 16G.

[0259] Specifically, when the UI control unit 215 accepts an operation on the fourth icon Ic4, it causes the display unit 22 to display sixth information Vd6 indicating an interface for selecting the classification standard of the higher classification C1 to the lower classification C3. This sixth information Vd6 displays a plurality of seventh icons Ic7 for selecting "JIS," "ISO," "EN," "ANSI," and "user-defined," which exemplify the first or second standard.

[0260] For example, clicking on the seventh icon Ic7 located to the left of the "JIS" notation selects "JIS" as the first standard, and processing is performed using the first substance library Li1 generated according to "JIS." In this case, as shown in Fig. 16A etc., identification information indicating that "JIS" has been selected can be superimposed on the fourth icon Ic4.

[0261] Furthermore, when the seventh icon Ic7 located to the left of the notation "User Defined" is clicked, a standard originally defined by the user is selected, and processing is performed using the user-defined library set by the user. The user-defined library can be set, for example, by operating the eighth icon Ic8 labeled "Edit" (details omitted). The operation status of the seventh icon Ic7 and the user-defined library settings can be saved by operating the ninth icon Ic9 labeled "Save." When the tenth icon Ic10 labeled "Back" is clicked, the UI control unit 215 switches the display content of the display unit 22 from the display screen illustrated in FIG. 16G to the display screen illustrated in FIG. 16A or FIGS. 16B to 16F.

[0262] In addition, two or more standards can be selected by operating two or more of the seventh icons Ic7 in the sixth information Vd6. For example, if "ISO" is selected as the second standard in addition to "JIS" as the first standard, processing will be performed using both the first substance library Li1 generated according to "JIS" and the second substance library Li2 generated according to "ISO." In this case, as illustrated in FIG. 16H, the fourth icon Ic4 can be superimposed with identification information D5 indicating that both "JIS" and "ISO" have been selected. In this case, the third information Vd3 will simultaneously display "Stainless Steel," a higher-level classification C1 based on "JIS," as well as "ISO / TS 15510," a higher-level classification C1 based on "ISO." These higher-level classifications C1 may be ordered by accuracy. Furthermore, when a user-defined library is selected, the UI control unit 215 can superimpose information indicating that a standard originally defined by the user has been selected, such as "user-defined," on the fourth icon Ic4 as identification information D5. Note that, in response to switching of the selection of the seventh icon Ic7, the substance estimation unit 214 may re-estimate a sub-classification C3 corresponding to the substance characteristic Ch from among the sub-classifications C3 belonging to the selected standard, and update the information displayed in the third information Vd3 with the re-estimated content.

[0263] <Intuitive understanding of matter> As described above, according to this embodiment, as exemplified by output D4 in Fig. 13B and third information Vd3 in Fig. 16D, by displaying lower category C3 together with higher category C1 on display unit 22, not only can the specific type of substance be grasped from lower category C3, but also the general type, properties, characteristics, etc. of the substance can be grasped through higher category C1. This allows the user to intuitively grasp what kind of substance sample SP is.

[0264] 16D, a sixth icon Ic6 for switching between displaying and hiding the subclassification C3 can be used to provide a more intuitive interface. Also, as shown in the example of "SUS302" and "SUS303Se," arranging the subclassifications C3 in order of likelihood allows the user to intuitively understand which subclassification C3 a substance belongs to.

[0265] 13A, 13B, 16A, etc., by providing a middle-level classification C2 in addition to the upper-level classification C1 and the lower-level classification C3, substances can be classified more finely. For users who do not want such detailed classification, the middle-level classification C2 can be hidden by operating the fifth icon Ic5, thereby providing a more intuitive interface and improving usability.

[0266] 13A, 13B, 16G, and 16H, providing multiple substance libraries Li1 and Li2 provides a more flexible classification system, enabling users to use a library suited to their needs even when standards used as conventions differ due to differences in industry or culture. Displaying identification information D5 on the display unit 22, such as by superimposing the fourth icon Ic4, allows users to easily understand which substance library Li the classification system is based on. This helps users intuitively understand the classification system.

[0267] Furthermore, by providing a user-defined substance library in addition to the predetermined substance libraries Li1 and Li2, a more flexible classification system can be provided, which in turn makes it possible to meet a wide range of needs.

[0268] 13B, 16E, and 16F, by displaying on the display unit 22 the supplementary explanation D1 associated with the selected superordinate category C1 or the superordinate category C1 to which the selected subcategory C3 belongs, the user can grasp information related to the superordinate category C1, such as the general type, properties, and characteristics of the substance. This is advantageous in helping the user understand what kind of substance the sample SP is. [Explanation of symbols]

[0269] A. Analysis and observation equipment (analysis equipment) SP sample (analyte) 1 Optical Assembly 6 Head 62 Analysis Units 71 Exit section 77A First detection unit (detection unit) 77B Second detection unit (detection unit) 2 Controller body 21 Control section 21a Processing section 212 Spectrum acquisition unit 213 Feature Extraction Unit 214 Material Estimation Department 215 UI control unit (user interface control unit) 21b Primary storage device (storage unit) 22 Display section C1 Upper classification C2 intermediate classification C3 Subclassification D1 Supplementary explanation (Supplementary explanation related to higher classification) D5 Identification Information Ic5 5th icon (2nd icon) Ic6 6th Icon (Icon) Li Materials Library Li1 First material library Li2 Second Material Library S3 Read step S4 Processing Step S41 Acquisition process S42 Extraction process S43 Presumed Project S46 indicates project 1000 Memory Media

Claims

1. An analytical apparatus that generates an intensity distribution spectrum by emitting a primary electromagnetic wave or a primary ray to an object to be analyzed, and analyzes the components of the object to be analyzed based on the intensity distribution spectrum, a storage unit that reads out a substance library in which types of substances are associated with characteristics that constitute the substances; a processing unit that performs processing based on the substance library, The substance library comprises: A higher classification representing the general name of the substance; and a subclassification representing a plurality of substance types belonging to the superclassification, The processing unit a spectrum acquisition unit that acquires the intensity distribution spectrum; a feature extraction unit that extracts features contained as constituent components of the analysis object based on the intensity distribution spectrum acquired by the spectrum acquisition unit; a substance estimation unit that estimates the type of the substance from among the subclassifications based on the features extracted by the feature extraction unit and the substance library read by the storage unit; a user interface control unit that hierarchically displays the lower classification estimated by the substance estimation unit and the higher classification to which the lower classification belongs on a display unit, the substance library associates the substance type with one or more of the characteristics; The feature extraction unit extracts, as features of the substance, the types of elements contained in the substance and the content rates of the elements. An analytical device characterized by:

2. An analytical device that generates an intensity distribution spectrum by emitting a primary electromagnetic wave or a primary ray to an object to be analyzed, and performs component analysis of the object to be analyzed based on the intensity distribution spectrum, a storage unit that reads out a substance library in which types of substances are associated with characteristics that constitute the substances; a processing unit that performs processing based on the substance library, The substance library comprises: A higher classification representing the general name of the substance; and a subclassification representing a plurality of substance types belonging to the superclassification, The processing unit a spectrum acquisition unit that acquires the intensity distribution spectrum; a feature extraction unit that extracts features contained as constituent components of the analysis object based on the intensity distribution spectrum acquired by the spectrum acquisition unit; a substance estimation unit that estimates the type of the substance from among the subclassifications based on the features extracted by the feature extraction unit and the substance library read by the storage unit; a user interface control unit that hierarchically displays the lower classification estimated by the substance estimation unit and the higher classification to which the lower classification belongs on a display unit, the substance library associates the substance type with one or more of the characteristics; The feature extraction unit extracts a molecular structure contained in the substance as a feature of the substance. An analytical device characterized by:

3. 3. The analyzer according to claim 1, the substance estimation unit estimates a plurality of substances with a relatively high probability from among substances that may be contained in the analyte from the subclassifications; The user interface control unit the subclasses corresponding to each of the plurality of substances arranged in descending order of likelihood; an icon for switching between displaying and hiding the sub-categories; and the higher-level category to which the lower-level category belongs, are displayed on the display unit. An analytical device characterized by:

4. 4. The analytical device according to claim 3, the substance library is configured by storing hierarchical information of intermediate classifications representing a plurality of systems belonging to the higher classification and to which at least some of the lower classifications belong, together with hierarchical information of the higher classifications and the lower classifications; The user interface control unit the intermediate classification to which the subclass belongs; a second icon for switching between displaying and hiding the intermediate classification, and An analytical device characterized by:

5. The analytical device according to claim 3 or 4, The storage unit includes, as the substance library: a first substance library generated according to a first standard; a second substance library generated according to a second standard; the substance estimation unit estimates a plurality of substances that may be contained in the analyte and that have a relatively high probability from the subclassifications belonging to the first substance library and the subclassifications belonging to the second substance library; The user interface control unit causes the display unit to display the subclassification estimated by the substance estimation unit together with identification information indicating whether the subclassification belongs to the first substance library or the second substance library. An analytical device characterized by:

6. 3. The analyzer according to claim 1, The storage unit includes, as the substance library: a first substance library generated according to a first standard; A user-defined substance library created based on user input; the substance estimation unit estimates substances with a relatively high probability among substances that may be contained in the analyte from a plurality of sub-classes belonging to the first substance library and the sub-classes belonging to the user-defined substance library; The user interface control unit causes the display unit to display the subclassification estimated by the substance estimation unit together with identification information indicating whether the subclassification belongs to the first substance library or the user-defined substance library. An analytical device characterized by:

7. The analytical device according to any one of claims 1 to 6, the substance library is configured by storing the higher classifications and supplementary explanations regarding the generic names of the substances represented by the higher classifications in association with each other, The user interface control unit accepts a selection from the higher-level categories displayed on the display unit, and causes the display unit to display the supplementary explanation associated with the selected higher-level category. An analytical device characterized by:

8. 8. The analytical device according to claim 7, The user interface control unit accepts a selection from the sub-classifications displayed on the display unit, and causes the display unit to display the supplementary explanation associated with the super-classification to which the selected sub-classification belongs. An analytical device characterized by:

9. The analytical device according to any one of claims 1 to 8, an emission unit that emits a primary electromagnetic wave or a primary ray toward the object to be analyzed; a detector that receives secondary electromagnetic waves generated in the object to be analyzed by irradiating the object to be analyzed with the primary electromagnetic waves or the primary rays, and generates an intensity distribution spectrum that is an intensity distribution for each wavelength of the secondary electromagnetic waves, The analysis device is characterized in that the spectrum acquisition unit acquires the intensity distribution spectrum generated by the detector.

10. An analytical method for generating an intensity distribution spectrum by irradiating a primary electromagnetic wave or a primary ray onto an object to be analyzed, using an analytical device including a memory unit that stores information and a processing unit, and for performing component analysis of the object to be analyzed based on the intensity distribution spectrum, comprising: a reading step in which the storage unit reads out a substance library in which types of substances are associated with characteristics constituting the substances; a processing step in which the processing unit executes processing based on the substance library, The substance library comprises: A higher classification representing the general name of the substance; and a subclassification representing a plurality of substance types belonging to the superclassification, The processing step includes: an acquisition step of acquiring the intensity distribution spectrum; an extraction step of extracting features contained in the analyte as components of the analyte based on the intensity distribution spectrum acquired in the acquisition step; an estimation step of estimating the type of the substance from among the subclassifications based on the features extracted in the extraction step and the substance library read in the reading step; a display step of hierarchically displaying the lower classification estimated by the estimation step and the higher classification to which the lower classification belongs on a display unit, the substance library associates the substance type with one or more of the characteristics; The extraction step extracts the type of element contained in the substance and the content of the element as the characteristics of the substance. An analytical method characterized by:

11. An analytical method for generating an intensity distribution spectrum by irradiating a primary electromagnetic wave or a primary ray onto an object to be analyzed, using an analytical device including a memory unit that stores information and a processing unit, and for performing component analysis of the object to be analyzed based on the intensity distribution spectrum, comprising: a reading step in which the storage unit reads out a substance library in which types of substances are associated with characteristics constituting the substances; a processing step in which the processing unit executes processing based on the substance library, The substance library comprises: A higher classification representing the general name of the substance; and a subclassification representing a plurality of substance types belonging to the superclassification, The processing step includes: an acquisition step of acquiring the intensity distribution spectrum; an extraction step of extracting features contained in the analyte as components of the analyte based on the intensity distribution spectrum acquired in the acquisition step; an estimation step of estimating the type of the substance from among the subclassifications based on the features extracted in the extraction step and the substance library read in the reading step; a display step of hierarchically displaying the lower classification estimated by the estimation step and the higher classification to which the lower classification belongs on a display unit, the substance library associates the substance type with one or more of the characteristics; The extraction step extracts a molecular structure contained in the substance as a feature of the substance. An analytical method characterized by:

12. An analysis program that, when executed by an analysis device having a storage unit that stores information and a processing unit, generates an intensity distribution spectrum by emitting a primary electromagnetic wave or a primary ray to an analysis target, and performs component analysis of the analysis target based on the intensity distribution spectrum, a reading step in which the storage unit reads out a substance library in which types of substances are associated with characteristics constituting the substances; a processing step in which the processing unit executes processing based on the substance library, The substance library comprises: A higher classification representing the general name of the substance; and a subclassification representing a plurality of substance types belonging to the superclassification, The processing step includes: an acquisition step of acquiring the intensity distribution spectrum; an extraction step of extracting features contained in the analyte as components of the analyte based on the intensity distribution spectrum acquired in the acquisition step; an estimation step of estimating the type of the substance from among the subclassifications based on the features extracted in the extraction step and the substance library read in the reading step; a display step of displaying the lower classification estimated by the estimation step and the higher classification to which the lower classification belongs in a hierarchical state on a display unit, the substance library associates the substance type with one or more of the characteristics; The extraction step extracts the type of element contained in the substance and the content of the element as the characteristics of the substance. An analysis program characterized by:

13. An analysis program that, when executed by an analysis device having a memory unit for storing information and a processing unit, generates an intensity distribution spectrum by emitting a primary electromagnetic wave or a primary ray to an object to be analyzed, and performs a component analysis of the object to be analyzed based on the intensity distribution spectrum, a reading step in which the storage unit reads out a substance library in which types of substances are associated with characteristics constituting the substances; a processing step in which the processing unit executes processing based on the substance library, The substance library comprises: A higher classification representing the general name of the substance; and a subclassification representing a plurality of substance types belonging to the superclassification, The processing step includes: an acquisition step of acquiring the intensity distribution spectrum; an extraction step of extracting features contained in the analyte as components of the analyte based on the intensity distribution spectrum acquired in the acquisition step; an estimation step of estimating the type of the substance from among the subclassifications based on the features extracted in the extraction step and the substance library read in the reading step; a display step of displaying the lower classification estimated by the estimation step and the higher classification to which the lower classification belongs in a hierarchical state on a display unit, the substance library associates the substance type with one or more of the characteristics; The extraction step extracts a molecular structure contained in the substance as a feature of the substance. An analysis program characterized by:

14. The analysis program according to claim 12 or 13 is stored. A computer-readable storage medium comprising:

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