Vibration damping device

Abstract

To provide a vibration suppression device which enables improvement of controllability of vibration suppression set according to a vibration direction.SOLUTION: A vibration suppression device includes: multiple actuators which enable active control; and a control unit which enables vibration suppression in multiple directions based on control of the multiple actuators. The control unit controls the multiple actuators so that vertical vibration, lateral vibration, and inclination are reduced.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a vibration damping device.

Background Art

[0002] Biological-derived substances such as transplanted organs or cells, messenger RNA vaccines, etc. are easily damaged by impacts and vibrations, and it is desirable to prevent impacts and vibrations from acting on them during their transportation.

[0003] In Patent Document 1, two arms are erected from the inner bottom surface of a case, and a two-axis gimbal mechanism part is attached thereto. The inner frame has a bottomed cylindrical shape, and an impact mitigation mechanism for mitigating impacts in the depth direction of the cylinder is provided at the bottom thereof. The impact mitigation mechanism is composed of a mounting plate separate from the inner frame and a coil spring inserted between the lower surface thereof and the bottom wall of the inner frame. The side wall of the inner frame is in close contact when a container box is mounted, and a configuration for restricting lateral movement of the container box is disclosed. In Patent Document 2, there are a transport case, an arm erected on the inner bottom wall surface thereof, a mounting part and a swing mechanism, a temperature control box detachable from the outer wall surface of the transport case, and a heater provided in the temperature control box. The mounting part receives the mounting of a storage container in which a biological-derived substance is stored, the swing mechanism supports the mounting part swingably with respect to the arm, and the heater of the temperature control box receives power supply from a battery and executes temperature adjustment in the transport case in a state where the temperature control box is mounted on the transport case. A configuration is disclosed. In Patent Document 3, a battery and a test tube holding container equipped with a heater for horizontally accommodating and holding test tubes are incorporated in a case body having a heat insulation function. The lid of the test tube holding container is divided into a large and a small part that can be opened and closed independently, and a temperature adjustment mechanism for adjusting the temperature in the case body is further equipped. A configuration is disclosed. Patent Document 4 discloses a configuration comprising: an acquisition unit for acquiring vibrations of an end effector attached to the tip of a robot arm; an actuator for exciting the end effector; and a control unit for controlling the actuator in accordance with the vibrations acquired by the acquisition unit so as to reduce the vibrations of the end effector. [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2016-47018 [Patent Document 2] International Publication No. 2010 / 013419 [Patent Document 3] Japanese Utility Model Publication No. 5-53616 [Patent Document 4] Japanese Patent Publication No. 2018-1370 [Overview of the project] [Problems that the invention aims to solve]

[0005] However, in the technologies disclosed in Patent Documents 1 to 3, vibration damping is performed by a passive mechanism, so it was not possible to actively control vibration damping according to the direction of vibration. Furthermore, in the technology disclosed in Patent Document 4, an actuator is attached to the end effector, and only vibrations transmitted from the base end of the one-dimensionally extending link array could be reduced. Therefore, the present invention aims to provide a vibration damping device that can improve the controllability of vibration damping according to the direction of vibration. [Means for solving the problem]

[0006] To solve the above problems, a vibration damping device according to one aspect of the present invention comprises a plurality of actively controllable actuators and a control unit that enables vibration damping in multiple directions based on the control of the plurality of actuators.

[0007] This allows for multi-axis vibration control while simultaneously performing vibration control according to the vibration frequency. As a result, it becomes possible to improve the controllability of vibration control according to the vibration direction, expand the frequency band of vibrations that can be controlled, and improve vibration control accuracy.

[0008] Furthermore, according to one aspect of the present invention, the control unit controls the plurality of actuators so as to reduce vertical and horizontal vibrations.

[0009] This improves the stability of the object being transported and reduces damage to the object during transport.

[0010] Furthermore, according to one aspect of the present invention, the control unit controls the plurality of actuators so as to reduce the tilt.

[0011] This allows the object to be kept level during transport, preventing it from tipping over or spilling liquids.

[0012] Furthermore, according to one aspect of the present invention, the vibration damping device comprises N (where N is a positive integer) tilting actuators, each with a motor mounted on the rotation axis of the gimbal mechanism, and M (where M is a positive integer) electric actuators using ball screws.

[0013] This reduces not only the vertical and horizontal vibrations but also the tilt of the object being controlled, improving the stability of the object during transport while accommodating various conditions during transport.

[0014] Furthermore, a vibration damping device according to one aspect of the present invention further comprises a plate and a frame that supports the plate so as to be tiltable, the tilt actuator includes a first tilt actuator on which a first motor is mounted on the rotation axis of the first gimbal mechanism that tilts the plate around a first axis, and a second tilt actuator on which a second motor is mounted on the rotation axis of the second gimbal mechanism that tilts the frame around a second axis, the electric actuator includes a first electric actuator using a first ball screw that causes the frame to move linearly in the direction of a third axis, and a second electric actuator provided spaced apart from the first electric actuator and using a second ball screw that causes the frame to move linearly in the direction of the third axis.

[0015] This allows for the placement of tilt actuators around the plate and electric actuators beneath the plate, thereby reducing not only the vertical and lateral vibrations of the object to be damped, but also its tilt. As a result, it becomes possible to secure space for placing the object to be damped on the plate, and improve the stability of the object during transport while accommodating various conditions during transport.

[0016] Furthermore, according to one aspect of the present invention, the vibration damping device comprises N (where N is a positive integer of 2 or more) tilting actuators, each of which has a motor mounted on the rotation axis of the gimbal mechanism.

[0017] This allows for a reduction in both lateral sway and tilt of the object being damped, while suppressing an increase in the height of the damping device. Therefore, it is possible to improve the stability of the object being damped during transport while suppressing an increase in the space required for installing the damping device.

[0018] Furthermore, a vibration damping device according to one aspect of the present invention further comprises a plate and a frame that supports the plate so as to be tiltable, wherein the tilt actuator includes a first tilt actuator on which a first motor is mounted on the rotation axis of the first gimbal mechanism that tilts the plate around a first axis, and a second tilt actuator on which a second motor is mounted on the rotation axis of the second gimbal mechanism that tilts the frame around a second axis.

[0019] As a result, while arranging the tilt actuators around the plate, it is possible to reduce not only the roll of the vibration control target but also the tilt. For this reason, it becomes possible to secure a space for arranging the vibration control target on the plate, and while suppressing an increase in the space required for installing the vibration control device, it is possible to improve the stability during transportation of the vibration control target.

[0020] Further, according to the vibration control device according to one aspect of the present invention, the actuator includes M (M is an integer of 3 or more) electric actuators using ball screws.

[0021] As a result, by using a plurality of electric actuators of one type, it is possible to reduce not only the pitching and rolling of the vibration control target but also the tilt. For this reason, it is possible to improve the stability during transportation of the vibration control target while coping with various situations during transportation, and it is possible to reduce the complexity of production management as compared with the case of using a plurality of types of electric actuators.

[0022] Further, the vibration control device according to one aspect of the present invention further includes a plate, and the electric actuator includes a first electric actuator using a first ball screw that linearly moves the plate in the normal direction of the plate, a second electric actuator that is provided apart from the first electric actuator and uses a second ball screw that linearly moves the plate in the normal direction of the plate, and a third electric actuator that is provided apart from the first electric actuator and the second electric actuator and uses a third ball screw that linearly moves the plate in the normal direction of the plate.

[0023] As a result, while disposing the electric actuator under the plate, it is possible to reduce not only the pitching and rolling of the vibration control target but also the inclination. For this reason, while suppressing an increase in the space required for installing the vibration control device, it is possible to secure a space for disposing the vibration control target on the plate, and to improve the stability of the vibration control target during conveyance while coping with various situations during conveyance.

[0024] Further, the vibration control device according to one aspect of the present invention further includes a regeneration control unit that converts the kinetic energy of the actuator into regenerative energy.

[0025] As a result, it is possible to utilize the energy that is wasted during the control of the actuator or when the actuator is turned off, and to improve the energy efficiency.

[0026] Further, according to the vibration control device according to one aspect of the present invention, the regeneration control unit has a function of varying the internal resistance of the actuator, and by making the reverse operating force of the actuator due to regeneration variable, full active vibration control, passive vibration control, and semi-active vibration control can be switched.

[0027] As a result, while enabling the utilization of the regenerative energy generated from the actuator, it is possible to operate the actuator that can be actively controlled as a passive damper and a semi-active suspension. For this reason, it is possible to achieve compactification, weight reduction, and cost reduction by reducing the number of parts, and to improve the energy efficiency. The control unit may control the first inclination actuator and the second inclination actuator based on the dynamic characteristics of the vibration control target vibrated by the vibration control device and the transient characteristics when the plate is inclined. The vibration control device may further include a vibration isolation table that can isolate a band around the resonance frequency of the vibration control target vibrated by the vibration control device. The motor mounted on the rotation axis of the gimbal mechanism is preferably a servo motor. At least one of a torsion coil spring and a rotary damper may be attached to the rotation axis of the gimbal mechanism. [Effects of the Invention]

[0028] According to one aspect of the present invention, it is possible to improve the controllability of vibration damping according to the direction of vibration. [Brief explanation of the drawing]

[0029] [Figure 1] Figure 1 is a block diagram showing the configuration of a vibration damping device according to the first embodiment. [Figure 2] Figure 2 is a perspective view showing the configuration of the vibration damping mechanism according to the first embodiment. [Figure 3] Figure 3 is a cross-sectional view showing the configuration of the electric actuator in Figure 1. [Figure 4] Figure 4 is a side view showing an example of a state in which acceleration is applied to an object. [Figure 5] Figure 5 is a side view showing another example of an object being subjected to acceleration. [Figure 6] Figure 6 is a side view showing the state of the object when the running surface is inclined. [Figure 7] Figure 7 is a block diagram showing an example of the hardware configuration of the control unit in Figure 1. [Figure 8] Figure 8 is a perspective view showing the configuration of the vibration damping mechanism according to the second embodiment. [Figure 9] Figure 9 is a perspective view showing the configuration of the vibration damping mechanism according to the third embodiment. [Figure 10] Figure 10 is a diagram illustrating the acceleration acting on the object in the fourth embodiment. [Figure 11] Figure 11 shows the control block used in the fourth embodiment. [Figure 12] Figure 12 shows the configuration of a vibration damping mechanism according to a modified example of the fourth embodiment. [Modes for carrying out the invention]

[0030] The embodiments of the present invention will be described in detail below with reference to the attached drawings. Note that the following embodiments are not limiting to the present invention, and not all combinations of features described in the embodiments are necessarily essential to the configuration of the present invention. The configuration of the embodiments may be modified or changed as appropriate depending on the specifications and various conditions (usage conditions, usage environment, etc.) of the device to which the present invention is applied. The technical scope of the present invention is determined by the claims and is not limited by the following individual embodiments. Furthermore, the drawings used in the following description may differ in scale and shape from the actual structure in order to make each configuration easier to understand.

[0031] First Embodiment Figure 1 is a block diagram showing the configuration of the vibration damping device 11 according to the first embodiment. In Figure 1, the vibration damping device 11 comprises a sensor 21, a vibration damping mechanism 24A, a regenerative control device 25, a control unit 26, and an energy storage device 27. The vibration damping mechanism 24A comprises a tilting actuator K, an electric actuator D, and a passive mechanism B. The control unit 26 comprises a vibration damping control device 22 and an ECU (Electronic Control Unit) 23.

[0032] Object 13 is held by the vibration damping mechanism 24A. Object 13 is an object (vibration-damped object) that is subjected to vibration damping treatment by the vibration damping device 11. Object 13 may be, for example, a living organism such as an organ or cell for transplantation, or a messenger RNA vaccine. Object 13 may also be, for example, a food item such as a wedding cake or ramen for delivery. The transport device 12 transports the object 13 held by the vibration damping mechanism 24A. The transport device 12 may be, for example, a truck, motorcycle, bicycle, train, ship, trolley (including an autonomous driving device), or drone. The power supply 14 supplies power to the vibration damping device 11. The power supply 14 may be, for example, a battery.

[0033] The vibration damping device 11 actively controls the vibration damping mechanism 24A, enabling vibration damping in multiple directions. The vibration damping mechanism 24A holds the object 13 while damping its vibrations. The vibration damping mechanism 24A is equipped with multiple actuators that can be actively controlled. For example, the vibration damping mechanism 24A can be equipped with tilt actuators K and electric actuators D as multiple actuators. The tilt actuator K reduces the lateral sway and tilt of the object 13 based on active control by the control unit 26. The tilt actuator K can be equipped with a gimbal mechanism and a motor mounted on the rotation axis of the gimbal mechanism. The electric actuator D reduces the vertical sway of the object 13 based on active control by the control unit 26. The electric actuator D can be equipped with a ball screw that converts rotational motion into linear motion and a motor that generates rotational motion. For example, a servo motor can be used as the motor. The passive mechanism B passively dampens the object 13 against vibrations from the outside world. Passive mechanism B is, for example, a spring or a damper.

[0034] Sensor 21 detects physical quantities related to the motion of the object 13 or the vibration damping mechanism 24A. Sensor 21 may be, for example, an angle sensor, a gyro sensor, an acceleration sensor, a torque sensor, or a displacement sensor, and these may be used in combination.

[0035] The control unit 26 enables vibration damping in multiple directions by controlling multiple actuators provided in the vibration damping mechanism 24A. The control unit 26 can control the multiple actuators so as to reduce the vertical, horizontal, and tilt of the object 13. The control unit 26 may also change the vibration damping frequency depending on the type of object 13 to be damped. The vibration damping frequency can be set to a vibration frequency that causes large damage to the object 13. The control unit 26 may use a vibration damping control method such as the skyhook theory.

[0036] The vibration control device 22 controls the tilt actuator K and the electric actuator D based on the values ​​detected by the sensor 21. The ECU 23 drives the tilt actuator K and the electric actuator D based on commands from the vibration control device 22. The ECU 23 may include a driver or inverter to drive the tilt actuator K and the electric actuator D.

[0037] The regenerative control device 25 converts the kinetic energy of the actuator into regenerative energy. The regenerative control device 25 can store the regenerative energy in the energy storage device 27. The regenerative control device 25 can also supply the regenerative energy as power to the tilt actuator K and the electric actuator D. Furthermore, the regenerative control device 25 has a function to change (adjust) the internal resistance of the actuator, and by adjusting the reverse force of the actuator due to regeneration, it is possible to switch between fully active vibration damping, passive vibration damping, and semi-active vibration damping.

[0038] The energy storage device 27 can store the regenerative energy supplied from the regenerative control device 25. Furthermore, the energy storage device 27 can supply the stored regenerative energy to the power source 14. The energy storage device 27 is, for example, a secondary battery.

[0039] Here, the vibration damping device 11 enables vibration damping in multiple directions based on the control of multiple actuators, thereby increasing the number of directions in which vibration can be damped and enabling vibration damping control according to the vibration frequency. As a result, it is possible to improve the controllability of vibration damping according to the direction of vibration, expand the frequency band of vibrations that can be damped, and improve vibration damping accuracy. For example, it is possible to suppress damage to the object 13 while responding to various transport environments such as strong winds, rough roads, curves, steps, slopes, and acceleration / deceleration during the transport of the object 13.

[0040] Furthermore, by mounting the electric actuator D on the vibration damping device 11, vertical vibration can be fully and actively controlled. By using a ball screw for the electric actuator D, responsiveness, reverse operation, power transmission efficiency, and vibration damping accuracy can be improved compared to using a sliding screw or roller screw.

[0041] Furthermore, by employing a servo motor for the electric actuator D, it becomes possible to make the vibration damping device 11 more compact compared to the case where a hydraulic system is used, and maintenance can be improved.

[0042] Furthermore, by mounting a tilt actuator K, which has a servo motor attached to the rotation axis of the gimbal mechanism, on the vibration damping device 11, tilt and lateral sway can also be fully and actively controlled. The vibration damping effect can also be improved by attaching a torsion coil spring or rotary damper to the rotation axis of the gimbal mechanism.

[0043] Furthermore, the vibration damping device 11 can servo-off the electric actuator D when no vibrations are occurring in the target of damping. In this case, by employing a ball screw for the electric actuator D, the reverse operation performance can be improved, and the original passive vibration damping effect of springs and dampers can be obtained. The vibration damping device 11 can also servo-off the tilt actuator K when no vibrations are occurring in the target of damping.

[0044] Furthermore, by mounting the regenerative control device 25 on the vibration damping device 11, energy caused by vibrations of the electric actuator D and the tilting actuator K can be absorbed and returned to the conveying device 12. By using a ball screw for the electric actuator D, reverse operation can be improved, energy recovery efficiency can be improved, and energy saving can be achieved.

[0045] Furthermore, the regenerative control device 25 can control the resistance force in the reverse direction of the electric actuator D by controlling the regenerative resistance. Since this resistance force depends on the rotational angular velocity of the servo motor, it can achieve behavior similar to a passive damper and a semi-active suspension. Therefore, it can also function as a damper (passive mechanism B) mounted on the vibration damping device 11 (it is also possible to omit the damper), which can lead to a reduction in the weight and cost of the vibration damping device 11. A similar system can be constructed even when a rotary damper or the like is added to the tilting actuator K.

[0046] The vibration damping device 11 can be suitably used, for example, when transporting living cells in the field of regenerative medicine. In the field of regenerative medicine, it is expected that the use of autologous cells, which do not pose a risk of immune rejection compared to allogeneic cells, will continue to increase.

[0047] Autologous cells are collected from patients at the clinic, cultured, and then tested. This process involves transporting the cells back to the clinic via cell processing facilities and testing companies, resulting in a higher number of transport steps compared to allogeneic cells. Currently, cells are often frozen and transported as frozen cells, but these require thawing and 2-4 weeks for culture. In contrast, transporting live cells significantly reduces culture time and is highly efficient. Furthermore, for more complex cell types such as cell aggregates and organs, frozen transport becomes difficult, so the need for live cell transport is expected to increase in the future.

[0048] Temperature and vibration are parameters that affect cell performance and viability. While temperature has been studied and verified in various places, the effects of vibration have not been quantified. However, it is clear that vibration affects the maintenance of cell function and viability, and the effect is greater in living cells, especially advanced cells, than in frozen cells, requiring careful handling during transport. Furthermore, it is expected that the frequency range affected will differ depending on the cell type, and vibration damping against vibrations at those frequencies will likely be essential.

[0049] According to the paper (The sensitivity of human mesenchymal stem cells to vibration and cold storage conditions representative of cold transportation Authors: NI Nikolaev, Y. Liu, H. Hussein and DJ Williams), a study investigating the effects of low-temperature storage (2-8°C) and vibration (10-50Hz) on human mesenchymal stem cells showed that cell viability decreased significantly at 25Hz vibration. In other words, the vibration damping device 11 can be used to precisely dampen vibrations at 25Hz in human mesenchymal stem cells, while not controlling vibrations at other frequencies, and the damping frequency can also be changed depending on the cell.

[0050] By using these methods selectively, the vibration damping device 11 does not always need to be fully active; it only needs to be fully active when necessary, thus saving energy. It should be noted that vibrations can be categorized into harmful and non-harmful vibrations. For example, there are beneficial vibrations and frequency bands, such as those that activate cells through agitation of a culture medium. Therefore, the vibration damping device 11 may have not only a vibration damping function based on fully active control but also an excitation function, and may be capable of imparting beneficial vibrations to the object 13.

[0051] In the example shown in Figure 1, a regenerative control device 25 is provided between the ECU 23 and the vibration damping mechanism 24A, but the regenerative control function may be integrated into the ECU 23. If the ECU 23 has the regenerative control function, there is no need to provide a separate regenerative control device 25 in addition to the control unit 26, and the vibration damping device 11 can be made more compact. In other words, the regenerative control unit 25 may be located within the control unit 26.

[0052] Figure 2 is a perspective view showing the configuration of the vibration damping mechanism 24A according to the first embodiment. In Figure 2, the vibration damping mechanism 24A is capable of vibration damping in the directions of the first axis X, second axis Y, and third axis Z, which are mutually orthogonal in three-dimensional space. The oscillation in the direction of the first axis X and second axis Y is sometimes called lateral oscillation, and the oscillation in the direction of the third axis Z is sometimes called vertical oscillation. The vibration damping mechanism 24A comprises a base 1, a base 2, a frame 3, a plate 4, electric actuators D1 and D2, and tilt actuators K1 to K4. Reference numeral 40 indicates the upper surface of plate 4. The first axis may be referred to as the X axis, the second axis as the Y axis, and the third axis as the Z axis.

[0053] Base 1 can be installed on the transport device 12 shown in Figure 1. Base 1 is frame-shaped to reduce weight. The base 2 is installed on base 1 via springs A1 to A4. Springs A1 to A4 are positioned at the four corners of base 1, and can support the four corners of base 2 from below. Springs A1 to A4 can absorb vertical vibrations and assist in the vibration damping operation of electric actuators D1 and D2. Base 1 and springs A1 to A4 are optional.

[0054] Electric actuators D1 and D2 are installed on the base 2 in an upright position, spaced apart from each other. The electric actuators D1 and D2 can absorb vertical vibrations by causing the screw shafts of the ball screws to move linearly in the direction of the third axis Z. The base 2 is frame-shaped to reduce weight. The electric actuators D1 and D2 can be positioned in the center of two opposing sides 2a and 2b of the base 2. Springs B1 and B2 are attached to each electric actuator D1 and D2 in an upright position. The springs B1 and B2 may also be arranged to spirally surround each electric actuator D1 and D2.

[0055] A frame 3 is mounted on electric actuators D1 and D2 via tilt actuators K1 and K2. Here, tilt actuators K1 and K2 can tilt the frame 3 around a first axis X. The tilt actuators K1 and K2 can be positioned in the center of the outer two opposing sides 3a and 3b of the frame 3. Each tilt actuator K1 and K2 is equipped with a gimbal mechanism J1 and J2 and motors M1 and M2. Motors M1 and M2 are mounted (connected) to the rotation axes R1 and R2 of each gimbal mechanism J1 and J2. Each rotation axis R1 and R2 is inserted into the frame 3 in the direction of the first axis X and fixed to the frame 3. Each tilt actuator K1 and K2 is fixed on electric actuators D1 and D2 via support members F1 and F2. Each support member F1 and F2 can fix each gimbal mechanism J1 and J2 on electric actuators D1 and D2 by surrounding the outer surface of each gimbal mechanism J1 and J2.

[0056] Inside frame 3, plate 4 is installed via tilt actuators K3 and K4. The normal direction of plate 4 can be set to the direction of the third axis Z. Here, tilt actuators K3 and K4 can tilt frame 3 around the second axis Y. Tilt actuators K3 and K4 can be positioned in the center of the outer two opposing sides 3c and 3d of frame 3. Each tilt actuator K3 and K4 is equipped with gimbal mechanisms J3 and J4 and motors M3 and M4. Motors M3 and M4 are mounted (connected) to the rotation axes R3 and R4 of each gimbal mechanism J3 and J4. Each rotation axis R3 and R4 penetrates frame 3 in the direction of the second axis Y and is inserted into the sides 4c and 4d of plate 4 and fixed to plate 4.

[0057] Furthermore, the materials for the base 1, base 2, frame 3, and plate 4 may be metals such as aluminum or alloys such as duralumin to ensure strength, or resins to reduce weight, or a combination of these.

[0058] When transporting the object 13 in Figure 1, the vibration damping mechanism 24A is installed on the transport device 12, and the object 13 is placed on the plate 4. The sensor 21 in Figure 1 detects physical quantities related to the motion of the plate 4 or the object 13. The sensor 21 in Figure 1 may also detect physical quantities related to the motion of the base 1. Physical quantities related to motion include, for example, velocity, angular velocity, acceleration, displacement, distance, and torque.

[0059] During the transport of the object 13, the control unit 26 controls motors M1 to M4 based on the values ​​detected by sensor 21, applying torque in a direction that cancels out the rotational and centrifugal forces applied to plate 4, and rotating the rotation axes R1 to R4 of gimbal mechanisms J1 to J4 so that plate 4 is kept horizontal relative to the inclination of the transport device 12. By fully active control of each tilt actuator K1 to K4, the control unit 26 can control not only the rotational force applied to the object to be damped, but also the centrifugal force when the transport device 12 is tilted and travels along curved sections. Furthermore, the control unit 26 controls electric actuators D1 and D2 based on the values ​​detected by sensor 21, generating thrust in a direction that cancels out the vertical vibration acceleration applied to the object 13.

[0060] This allows for the placement of tilt actuators K1 to K4 around plate 4 and electric actuators D1 and D2 below plate 4, thereby reducing both vertical and horizontal swaying of the object 13, as well as its tilt. As a result, it becomes possible to secure space for placing the object 13 on plate 4, and improve the stability of the object 13 during transport while accommodating various conditions during transport.

[0061] For example, when the control unit 26 is damping lateral oscillation in the direction of the first axis X, it can coordinately control motors M3 and M4 so that the lateral oscillation is absorbed. In coordinated control of motors M3 and M4, motors M3 and M4 can be rotated simultaneously at the same rotational speed and by the same angle so that the lateral oscillation in the direction of the first axis X is absorbed. Furthermore, when damping lateral oscillation in the direction of the second axis Y, the control unit 26 can coordinately control motors M1 and M2 so that the lateral oscillation is absorbed. In the coordinated control of motors M1 and M2, motors M1 and M2 can be rotated simultaneously at the same rotational speed and by the same angle so that the lateral oscillation in the direction of the second axis Y is absorbed.

[0062] Furthermore, when damping vertical oscillations in the direction of the third axis Z, the control unit 26 can coordinately control the electric actuators D1 and D2 so that the vertical oscillations are absorbed. In the coordinated control of electric actuators D1 and D2, the electric actuators D1 and D2 can be simultaneously made to move linearly at the same speed and by the same displacement so that the vertical oscillations in the direction of the third axis Z are absorbed.

[0063] Furthermore, the regenerative control device 25 converts the rotational energy (vibration energy) of motors M1 to M4 and electric actuators D1 and D2 that have reversed due to vibration into regenerative energy and stores it. Regenerative operation is possible both when the control unit 26 is performing vibration damping control and when the control unit 26 is not performing vibration damping control. The storage location for energy may be the battery of the transport device 12, or a separate battery may be provided to be used for servo motor driving. In addition, the regenerative control device 25 may use regenerative resistance to provide a damping effect to the tilt actuators K1 to K4 and electric actuators D1 and D2, and may be used as a substitute for dampers.

[0064] Furthermore, by attaching torsion coil springs or rotary dampers to the rotating shafts R1 to R4, a spring-mass-damper system can be constructed to improve the vibration damping effect. Passive vibration damping can also be performed when the servo is off. In addition, by incorporating springs B1 and B2 into the output shafts of electric actuators D1 and D2 and providing a damper function when the servo is off, one actuator can provide three functions: spring, damper, and full active control. With this configuration, it is possible to reduce the number of parts in the vibration damping device 11, make it more compact, and reduce costs, and it can also be used as a substitute for a semi-active damper by controlling the regenerative resistance.

[0065] Note that Figure 2 shows an example where motors M1 to M4 are provided for each tilt actuator K1 to K4, but motors M1 and M2 may be omitted for either tilt actuator K1 or K2, and motors M3 and M4 may be omitted for either tilt actuator K3 or K4.

[0066] Furthermore, while Figure 2 shows an example where the vibration damping mechanism 24A includes four tilting actuators K1 to K4 and two electric actuators D1 and D2, the vibration damping mechanism 24A may also include N (where N is a positive integer) tilting actuators and M (where M is a positive integer) electric actuators.

[0067] Furthermore, the control unit 26 can absorb vertical oscillations in the direction of the third axis Z by simultaneously moving the electric actuators D1 and D2 in a linear motion at the same speed and with the same displacement. The control unit 26 may also absorb lateral oscillations in the direction of the first axis X as well as vertical oscillations in the direction of the third axis Z by making the speeds or displacements of the linear motions of the electric actuators D1 and D2 different from each other. The frame 3, gimbal mechanisms J3 and J4, and motors M3 and M4 of the vibration damping mechanism 24A are optional.

[0068] Figure 3 is a cross-sectional view showing the configuration of the electric actuator D in Figure 1. The electric actuator D can be used as the electric actuators D1 and D2 in Figure 2. In Figure 3, the electric actuator D converts rotational motion into linear motion and outputs an axial force in the axial direction. The electric actuator D comprises a screw shaft 51, a nut 52, an output shaft 53, and a cotter 54. The screw shaft 51 and the nut 52 can be used as ball screws constituting a linear motion device. The screw shaft 51 performs rotational motion based on the rotational force generated from a drive source such as a motor 65. The nut 52 converts the rotational motion of the screw shaft 51 into linear motion in the axial direction of the screw shaft 51. The output shaft 53 outputs an axial force based on the linear motion converted by the nut 52. The shape of the output shaft 53 is, for example, cylindrical. The inner circumferential surface of the output shaft 53 can be configured to follow the outer circumferential surface of the nut 52. The nut 52 can be provided between the outer circumferential surface of the screw shaft 51 and the inner circumferential surface of the output shaft 53.

[0069] The cotter 54 is used as a coupling member to connect the output shaft 53 to the nut 52. The cotter 54 is removable from the nut 52 by passing through the output shaft 53 in a direction perpendicular to the axial direction of the screw shaft 51. When inserted into the nut 52, the cotter 54 is supported by the nut 52 with the cotter 54 protruding towards the output shaft 53. The cotter 54 can be used as an axial force transmission member from the nut 52 to the output shaft 53.

[0070] The screw shaft 51 is provided with a screw groove 51m. The screw groove 51m is spirally arranged on the outer circumferential surface of the screw shaft 51. The nut 52 is provided with a screw groove 52m. The screw groove 52m is spirally arranged on the inner circumferential surface of the nut 52 so as to be opposite to the screw groove 51m. The screw grooves 51m and 52m form a spiral ball rolling path between the screw shaft 51 and the nut 52.

[0071] The material of the screw shaft 51, nut 52, output shaft 53, and cotter 54 is not particularly limited as long as it is a rigid body, and may be a metal such as iron or aluminum alloy, or a nonmetal such as ceramic. The cross-sectional shape of each screw groove 51m, 52m may be, for example, a circular arc or a Gothic arc.

[0072] The electric actuator D further comprises a bearing 55. The bearing 55 supports the output shaft 53 so as to be able to move linearly within a housing that encloses the output shaft 53. The bearing 55 is, for example, a sliding bearing. The bearing 55 can be fixed to the outer circumferential surface of the output shaft 53. The material of the bearing 55 is, for example, resin.

[0073] One end of the screw shaft 51 is connected to a gear 63. The gear 63 is rotatably supported in the housing 62 via a bearing 61 and is fixed axially by a gear fixing nut 64. The bearing 61 is, for example, an angular contact ball bearing. The gear 63 is connected to a motor 65 via a reduction gear 66. The windings of the motor 65 are connected to the ECU 23 in Figure 1.

[0074] The rotational force generated by the motor 65 is reduced via the reduction stage 66 and then input to the screw shaft 51 via the gear 63, causing the screw shaft 51 to rotate. As the screw shaft 51 rotates, the balls between the screw shaft 51 and the nut 52 circulate through a ball circulator (not shown) in a ball rolling path, causing the nut 52 to move in a linear motion. The axial force resulting from the linear motion of the nut 52 is then transmitted to the output shaft 53 via the cotter 54 and output through the output shaft 53. The plate 4 in Figure 1 can then move in a vertical linear motion based on the axial force output through the output shaft 53.

[0075] Figure 4 is a side view showing an example of a state in which acceleration is applied to the object 13. Note that in Figure 4, the gimbal mechanism J3 is shown in enlargement when the object 13 is placed on the plate 4 in Figure 2. The transport device 12 is assumed to be traveling on a horizontal plane.

[0076] In Figure 4, when acceleration FA is applied to the object 13, a torque FB equivalent to the product of the distance from the center of gravity of the object 13 to the rotation axis R3 and the acceleration is applied to the rotation axis R3. The control unit 26 calculates this torque FB using an acceleration sensor, torque sensor, or gyro sensor, and controls motors M3 and M4 so that a torque is applied in a direction that cancels out the torque FB.

[0077] Figure 5 is a side view showing another example of the state in which acceleration is applied to the object 13. Note that in Figure 5, the gimbal mechanism J3 is shown in enlargement when the object 13 is placed on the plate 4 in Figure 2. The transport device 12 is assumed to be traveling on a horizontal plane.

[0078] In Figure 5, it is assumed that an acceleration FC is applied to the object 13. Sensor 21 detects the acceleration FC applied to the object 13. Then, control unit 26 tilts plate 4 by an angle P that the resultant force FE, generated by gravity FD and acceleration FC acting on the object 13, makes with the vertical. By tilting plate 4 so that it is perpendicular to the resultant force FE, control unit 26 can eliminate the acceleration acting laterally on the object 13, thereby preventing spillage of culture medium, etc.

[0079] Figure 6 is a side view showing the state of the object 13 when the travel surface 5 of the transport device 12 is inclined. In Figure 6, the gimbal mechanism J3 is shown in enlargement when the object 13 is placed on the plate 4 in Figure 2.

[0080] In Figure 6, the transport device 12 in Figure 1 is traveling on an inclined surface (travel surface 5). Sensor 21 detects the inclination angle of the travel surface 5. The control unit 26 then controls motors M3 and M4 to tilt the plate 4 by the same angle as the inclination angle of the travel surface 5, thereby maintaining the plate 4 horizontally.

[0081] Figure 7 is a block diagram showing an example of the hardware configuration of the control unit 26 in Figure 1. In Figure 7, the control unit 26 comprises a processor 101, a communication control device 102, a communication interface 103, a main memory device 104, an auxiliary storage device 105, and an input / output interface 107. The processor 101, the communication control device 102, the communication interface 103, the main memory device 104, the auxiliary storage device 105, and the input / output interface 107 are interconnected via an internal bus 106. The main memory device 104 and the auxiliary storage device 105 are accessible from the processor 101.

[0082] In addition, an inverter 111 and a sensor 112 are provided outside the control unit 26. The inverter 111 and sensor 112 are connected to the internal bus 106 via an input / output interface 107.

[0083] The inverter 111 generates the motor drive current based on commands from the processor 101. The inverter 111 can, for example, control the motor using PWM (Pulse Width Modulation). The sensor 112 may be, for example, an angle sensor, a gyroscope, an accelerometer, a torque sensor, or a displacement sensor, and these may be used in combination.

[0084] The processor 101 is hardware that controls the operation of the entire control unit 26. The processor 101 may include a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). The processor 101 may also include a GPU (Graphics Processing Unit). The processor 101 may be a single-core processor or a multi-core processor. The processor 101 may include hardware circuits such as accelerators that perform part of the processing (for example, an FPGA (Field-Programmable Gate Array) or an ASIC (Application Specific Integrated Circuit)). The processor 101 may operate as a neural network.

[0085] The main memory device 104 can be composed of, for example, semiconductor memory such as SRAM (Static Random Access Memory) or DRAM (Dynamic Random Access Memory). The main memory device 104 can store programs executed by the processor 101, and can also provide a work area for the processor 101 to execute programs.

[0086] The auxiliary storage device 105 is a storage device with a large storage capacity, such as a hard disk drive or an SSD (Solid State Drive). The auxiliary storage device 105 can hold executable files of various programs and data used to execute programs. The auxiliary storage device 105 can store the vibration damping program 105A. The vibration damping program 105A may be software that can be installed on the control unit 26, or it may be incorporated into the control unit 26 as firmware.

[0087] The communication control device 102 is hardware that has the function of controlling communication with the outside world. The communication control device 102 is connected to the network 109 via the communication interface 103. The network 109 may be the Internet or a WAN (Wide Area Network). Alternatively, the network 109 may be a LAN (Local Area Network) such as WiFi or Ethernet (registered trademark). Furthermore, the network 109 may be a mixture of the Internet, WAN, and LAN.

[0088] The input / output interface 107 converts data input from the sensor 112 into a data format that the processor 101 can process, and converts data output from the processor 101 into a signal format that the inverter 111 can process.

[0089] The processor 101 reads the vibration damping program 105A into the main memory device 104 and executes the vibration damping program 105A, thereby actively controlling the tilt actuators K1 to K4 and the electric actuators D1 and D2 shown in Figure 2, and reducing the vertical, horizontal, and tilt of the object to be damped.

[0090] The execution of the vibration damping program 105A may be distributed among multiple processors or computers. Alternatively, the processor 101 may instruct a cloud computer or similar entity via the network 109 to execute all or part of the vibration damping program 105A and receive the execution results. As described above, this embodiment makes it possible to improve the controllability of vibration damping according to the direction of vibration. Furthermore, the electric actuators D1 and D2 may be detachable from the vibration damping mechanism 24A. For example, if vertical vibration damping is not required, the electric actuators D1 and D2 may be removed from the vibration damping mechanism 24A.

[0091] Second Embodiment A second embodiment of the present invention will be described with reference to Figure 8. Components similar to those in the first embodiment are given the same reference numerals, and detailed descriptions are omitted. Figure 8 is a perspective view showing the configuration of the vibration damping mechanism 24B according to the second embodiment. The vibration damping mechanism 24B of the second embodiment does not have electric actuators D1 and D2, compared to the vibration damping mechanism 24A of the first embodiment (Figure 2). In the second embodiment, the frame 3 is installed on the base 2 via tilting actuators K1 and K2 without the interposition of electric actuators D1 and D2. Furthermore, each tilting actuator K1 and K2 is fixed to the base 2 via support members F1 and F2.

[0092] The electric actuators D1 and D2 are unnecessary when vibration damping of vertical shaking is not required. The vibration damping mechanism 24B, which does not have electric actuators D1 and D2, is smaller and lighter than the vibration damping mechanism 24A shown in Figure 1. Because the vibration damping mechanism 24B is small, it is possible to reduce the space required for its installation.

[0093] Third Embodiment A third embodiment of the present invention will be described with reference to Figure 9. Components similar to those in the first embodiment are given the same reference numerals, and detailed descriptions are omitted. Figure 9 is a perspective view showing the configuration of the vibration damping mechanism 24C according to the third embodiment. The vibration damping mechanism 24C of the second embodiment has a plate 4' and electric actuators D1 to D3 instead of the frame 3, plate 4, electric actuators D1, D2, and tilt actuators K1 to K4 of the vibration damping mechanism 24A of the first embodiment (Figure 2).

[0094] As shown in Figure 9, electric actuators D1 to D3 are installed on the base 2 in an upright position, spaced apart from each other. The electric actuators D1 to D3 can absorb vertical, horizontal, and tilt movements by causing the screw shafts of the ball screws to move linearly in the direction of the third axis Z. The electric actuators D1 to D3 are positioned at both ends of side 2b and in the center of side 2a of the base 2. Springs B1 to B3 are attached to each electric actuator D1 to D3 in an upright position. The springs B1 to B3 may also be arranged to spirally surround each electric actuator D1 to D3.

[0095] A plate 4' is installed on the electric actuators D1 to D3. Here, the normal direction of plate 4' can be set to the direction of the third axis Z. The electric actuators D1 to D3 can support the lower surface 42 of plate 4' at three points.

[0096] When transporting the object 13 in Figure 1, the vibration damping mechanism 24C is installed on the transport device 12, and the object 13 is placed on the plate 4'. The sensor 21 in Figure 1 detects physical quantities related to the motion of the plate 4' or the object 13.

[0097] During the transport of the object 13, the control unit 26 controls the electric actuators D1 to D3 based on the values ​​detected by the sensor 21, causing the electric actuators D1 to D3 to move linearly so that the rotational force and centrifugal force applied to the plate 4' are canceled out, and the plate 4 is kept horizontal relative to the inclination of the transport device 12. The control unit 26 also controls the electric actuators D1 to D3 based on the values ​​detected by the sensor 21, generating thrust in a direction that cancels out the vertical vibration acceleration acting on the object 13.

[0098] This allows for the placement of electric actuators D1 to D3 beneath plate 4' while reducing the tilt of the object 13, along with its vertical and horizontal swaying. As a result, it is possible to secure space for placing the object 13 on plate 4' while suppressing the increase in space required for installing the vibration damping mechanism 24C, and to improve the stability of the object 13 during transport while accommodating various conditions during transport. The area of ​​the upper surface 41 of plate 4' is larger than the area of ​​the upper surface 40 of plate 4.

[0099] For example, when the control unit 26 is damping lateral oscillation in the direction of the first axis X, it can coordinately control the electric actuators D1 to D3 so that the lateral oscillation is absorbed. Similarly, when the control unit 26 is damping lateral oscillation in the direction of the second axis Y, it can coordinately control the electric actuators D1 to D3 so that the lateral oscillation is absorbed. Furthermore, when the control unit 26 is damping vertical oscillation in the direction of the third axis Z, it can coordinately control the electric actuators D1 to D3 so that the vertical oscillation is absorbed. The control unit 26 can individually set the operating amounts of the electric actuators D1 to D3 and make the speed or displacement of the linear motion of the electric actuators D1 to D3 different from each other in order to absorb the lateral oscillation, oscillation, and tilt of the plate 4' simultaneously. For example, the vertical oscillation of the plate 4' is absorbed on a running surface with a downward slope on the electric actuator D2 side. In this case, the control unit 26 increases the amount of protrusion of the output shafts of the output shafts of the electric actuators D1 and D3, and moves the electric actuators D1 to D3 in a linear motion in accordance with the vertical oscillation of the plate 4', thereby reducing the vertical oscillation of the plate 4' while maintaining the plate 4' horizontally.

[0100] In Figure 9, the vibration damping mechanism 24C is shown as an example equipped with three electric actuators D1 to D3, but it may be equipped with four or more electric actuators.

[0101] Fourth Embodiment A fourth embodiment of the present invention will be described with reference to Figures 10 and 11. Components similar to those in the first embodiment are given the same reference numerals, and detailed descriptions are omitted. As shown in Figure 10, the object 13A in this embodiment is a vertically elongated object. The center of gravity G of the object 13A is far from the rotation axis R3 of the plate 4. In a case like that shown in Figure 10, it is preferable to control the tilting of the plate 4 while considering the dynamic characteristics of the object 13A and the transient characteristics when the plate is tilted. If control is performed without considering the dynamic characteristics of the object 13A and the transient characteristics when the plate is tilted, the following issues may occur. <When the dynamic characteristics of object 13A are not considered> If an acceleration a acts on object 13A at its resonant frequency, the sway of object 13A will exceed the target tilt angle of plate 4, potentially causing object 13A to tip over. <If transient characteristics during plate tilt are not considered> When acceleration acts on object 13A at a high frequency, the angular acceleration when tilting plate 4 also increases, resulting in a large force being applied tangentially to the object's center of gravity G relative to the rotation axis R3 of plate 4. Furthermore, this force increases with increasing distance between the center of gravity G and the rotation axis R3 (center of gravity distance r). If the tilt angle is not calculated taking this into account, object 13A will fall over.

[0102] In this embodiment, vibration damping is performed to prevent such phenomena from occurring. Figure 10 shows the acceleration applied to the object 13A when the plate 4 is tilted. The object 13A is subjected to acceleration a due to external force, acceleration g due to gravity, and acceleration due to angular acceleration during tilting (θ as the derivative of θ by 2 degrees). In this embodiment, when the above-mentioned accelerations are decomposed into components in the horizontal direction with respect to the object 13A, the target tilt angle is calculated and controlled (vibration damping) is performed so that the sum of the horizontal components becomes zero. In other words, the control is performed so as to satisfy the calculation formula shown in equation (1).

number

[0103] When equation (1) is linearly approximated by taking θ as an infinitesimal value, we obtain equation (2).

number

[0104] By performing a Laplace transform on equation (2) and solving for θ, we can find the target slope angle θ. ref This is calculated. Furthermore, to improve control accuracy, the viscosity coefficient d of the object 13A is introduced. The viscosity coefficient d is a parameter that is adjusted in the actual machine.

number

[0105] Looking at equation (3), the second term on the right-hand side is the transfer function of a second-order lag system, which can be seen as the dynamic characteristic of object 13A. In this case, the resonant frequency f [Hz] of object 13A is given by equation (4).

number

[0106] Equations (3) and (4) show that when the frequency of the external force acceleration a approaches the resonant frequency f, the shaking of the object 13A increases, and therefore the tilt angle must also be increased. Furthermore, equation (3) shows that when acceleration acts at a high frequency exceeding the resonant frequency f, the angular acceleration of plate 4 also increases, and therefore the tilt angle must be decreased.

[0107] Considering the characteristics described above, when the motor angle is feedback-controlled with respect to the target tilt angle, the control block is preferably as shown in Figure 11. In this embodiment, the control unit 26 employs the control block shown in Figure 11 to control the operation of the tilt actuator K. Therefore, even when the center of gravity G of the object to be damped 13A is far from the rotation axis R3 of the plate 4, the control of the tilt actuator K can be performed while considering the dynamic characteristics of the object to be damped 13A and the transient characteristics when the plate is tilted. As a result, the vibration damping device of this embodiment can exhibit a high vibration damping effect.

[0108] Variation 1 Furthermore, if it is desired to mechanically avoid the resonant frequency f of the object 13A, a vibration isolation table 120 capable of silencing the frequency band around the resonant frequency f may be combined with the vibration damping mechanism 24A, as shown in Figure 12. In this case, the expected resonant frequency f is approximately a few Hz. In Figure 12, the vibration isolation table 120 is installed under the base 1. Furthermore, if the control bandwidth of the control unit 26 is small, installing the vibration isolation table 120 can cut out high-frequency bands such as sudden speed changes caused by sudden acceleration or deceleration of the transport device 12, and impact acceleration caused by collisions, thereby improving the vibration damping effect. In this case, the acceleration used for control is the acceleration after vibration isolation. Therefore, the sensor 21 that detects acceleration due to external forces is installed on the upper surface of the vibration isolation table 120.

[0109] As described above, according to Modification 1, by adding a vibration isolation table 120 to the vibration damping device 11 of the first embodiment, it is possible to fully and actively dampen vertical and horizontal vibrations while ignoring the resonant frequency and high-frequency acceleration of the object to be damped 13A.

[0110] Variation 2 The configuration of the tilt actuator K is not limited to those described above. For example, servo motors may be used as the motors M1 to M4 provided on the rotation axes R1 to R4 of the gimbal mechanism J1 to J4. In other words, servo motors may be attached to the rotation axes R1 to R4 to fully actively control the rotation angle. Alternatively, torsion coil springs or rotary dampers may be attached to the rotation axes R1 to R4. By attaching torsion coil springs or rotary dampers to the rotation axes R1 to R4, a spring-mass-damper system can be constructed to improve vibration damping. Furthermore, passive vibration damping can be performed when the servo is off.

[0111] Although embodiments of the present invention have been described above, the present invention is not limited to the embodiments described above and includes various modifications. For example, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace parts of the configuration of each embodiment with other configurations. [Explanation of symbols]

[0112] 11 Vibration damping device, 12 Conveying device, 13 Object, 14 Power supply, 21 Sensor, 22 Vibration damping control device, 23 ECU, 24A Vibration damping mechanism, 25 Regenerative control device, 26 Control unit, 27 Energy storage device, K Tilt actuator, D Electric actuator, B Passive mechanism

Claims

1. Multiple actuators that can be actively controlled, A vibration damping device comprising a control unit that enables vibration damping in multiple directions based on the control of the plurality of actuators, The actuator is N (where N is a positive integer) tilt actuators, each with a motor mounted on the rotation axis of the gimbal mechanism, M (where M is a positive integer) electric actuators using ball screws, A vibration damping device that includes this.

2. The vibration damping device according to claim 1, wherein the control unit controls the plurality of actuators so as to reduce vertical and horizontal shaking.

3. The vibration damping device according to claim 1, wherein the control unit controls the plurality of actuators so as to reduce the tilt.

4. A plate and The system further comprises a frame that supports the aforementioned plate in a tiltable manner, The aforementioned tilting actuator is A first tilting actuator, in which a first motor is mounted on the rotation axis of a first gimbal mechanism that tilts the plate around a first axis, The device includes a second tilt actuator, the rotation axis of which a second motor is mounted, which tilts the frame around a second axis, The aforementioned electric actuator is A first electric actuator using a first ball screw that causes the frame to move linearly in the direction of the third axis, The vibration damping device according to claim 1, further comprising a second electric actuator provided at a distance from the first electric actuator and using a second ball screw to cause the frame to move linearly in the direction of the third axis.

5. The vibration damping device according to claim 1, wherein the actuator includes N (where N is a positive integer of 2 or more) tilt actuators, each of which has a motor mounted on the rotation axis of the gimbal mechanism.

6. A plate and The system further comprises a frame that supports the aforementioned plate in a tiltable manner, The aforementioned tilting actuator is A first tilting actuator, in which a first motor is mounted on the rotation axis of a first gimbal mechanism that tilts the plate around a first axis, A second tilting actuator, in which a second motor is mounted on the rotation axis of a second gimbal mechanism that tilts the frame around a second axis, A vibration damping device according to claim 5, including the following:

7. The vibration damping device according to claim 1, comprising M (where M is an integer of 3 or more) electric actuators using ball screws.

8. With additional plates, The aforementioned electric actuator is A first electric actuator using a first ball screw that causes the plate to move linearly in the direction normal to the plate, A second electric actuator is provided spaced apart from the first electric actuator and uses a second ball screw to move the plate in a linear motion in the direction normal to the plate, A third electric actuator is provided spaced apart from the first electric actuator and the second electric actuator, and uses a third ball screw to move the plate in a linear motion in the direction normal to the plate, A vibration damping device according to claim 7, including the following:

9. The vibration damping device according to claim 1, further comprising a regenerative control unit that converts the kinetic energy of the actuator into regenerative energy.

10. The vibration damping device according to claim 9, wherein the regenerative control unit has a function to adjust the internal resistance of the actuator, and by making the reverse force of the actuator due to regeneration variable, it is possible to switch between fully active vibration damping, passive vibration damping and semi-active vibration damping.

11. The vibration damping device according to claim 4 or 6, wherein the control unit controls the first tilting actuator and the second tilting actuator based on the dynamic characteristics of the object to be damped by the vibration damping device and the transient characteristics when the plate is tilted.

12. The vibration damping device according to claim 1, further comprising a vibration isolation table capable of vibration isolation in the band around the resonant frequency of the vibration-damped object to be damped by the vibration damping device.

13. The vibration damping device according to claim 1 or 5, wherein the motor mounted on the rotation axis of the gimbal mechanism is a servo motor.

14. The vibration damping device according to claim 13, wherein at least one of a torsion coil spring and a rotary damper is attached to the rotation axis of the gimbal mechanism.

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