Optical component positioning device and exposure device

Abstract

To provide an optical member position adjusting device that can hold a lens having a large numerical aperture.SOLUTION: An optical member position adjusting device 60A that adjusts the position of an optical member 37A housed in a housing 50 has a cylindrical member 61A holding the optical member inside the housing, where the cylindrical member comprises: a first portion 66A attached to the housing; a second portion 67A which is provided for the first portion with a predetermined distance in a prescribed direction, and holds the optical member; and a guide part 75A which is formed in a connected state with the first portion and the second portion, and guides the second portion in a prescribed direction for the first portion by changing the predetermined distance.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to an optical member position adjusting device and an exposure device.

Background Art

[0002] Conventionally, an optical member position adjusting device provided in an exposure device or the like has been known (for example, see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

[0004] An aspect of the optical member position adjusting device of the present invention is an optical member position adjusting device that adjusts the position of an optical member housed in a housing, and has a cylindrical member that holds the optical member inside the housing. The cylindrical member has a first portion attached to the housing, a second portion provided at a predetermined interval in a predetermined direction with respect to the first portion and holding the optical member, and a guide portion formed in a state of being connected to each of the first portion and the second portion, and guiding the second portion in the predetermined direction with respect to the first portion by changing the predetermined interval. The predetermined direction is the axial direction of the cylindrical member. The first portion is partitioned by a groove that penetrates the cylindrical member in the radial direction at a first end portion on the first side of the cylindrical member in the axial direction. The second portion is partitioned by the groove at a second end portion on the second side opposite to the first side in the axial direction. The groove is located between the first portion and the second portion. In the first portion The side opposite the second part of the end face, a first concave portion recessed in the axial direction is formed. In the second portion The side opposite the first part of the end face, a second concave portion recessed in the axial direction is formed. The guide portion is formed by cutting it out from the cylindrical member through the groove. The first concave portion and washers disposed in the second concave portion are provided.

[0005] An embodiment of the exposure apparatus of the present invention comprises the optical element position adjustment device described above. [Brief explanation of the drawing]

[0006] [Figure 1] This is a perspective view showing the schematic configuration of an exposure apparatus according to one embodiment of the present invention. [Figure 2] This is a perspective view showing the projection system of the exposure apparatus. [Figure 3] This is a cross-sectional view showing one of the partial projection optical systems within the same projection system. [Figure 4] This is a side view of the optical component position adjustment device in the standard configuration of the exposure apparatus. [Figure 5] This is a perspective view of the optical component positioning device. [Figure 6] This is an enlarged view of section B1 in Figure 4. [Figure 7] This is a side view of the optical element position adjustment device in an extended configuration. [Figure 8] This flowchart shows an example of how to adjust the projection system. [Figure 9] This is a side view of a conventional optical component positioning device. [Modes for carrying out the invention]

[0007] Hereinafter, an embodiment of the optical element positioning device and exposure device according to the present invention will be described using the example shown in Figure 1, where the exposure device 1 is a multi-lens type scanning exposure panel exposure device. The exposure device 1 exposes an image of the pattern of the mask M onto a plate PT (photosensitive substrate) made of a panel-shaped flat glass coated with photoresist. This type of plate PT is used in thin display panels such as liquid crystal displays or organic EL displays. In the following explanation, the Z-axis will be taken perpendicular to the surface of the plate PT when it is in focus. Furthermore, the X-axis will be taken in a plane parallel to that surface, along the scanning direction of the mask M and plate PT during scanning exposure, and the Y-axis will be taken in a direction perpendicular to the X-axis (non-scanning direction).

[0008] In this specification, "connection" means that multiple members to be connected are already linked together.

[0009] In Figure 1, the exposure apparatus 1 comprises a light source 10, for example, an ultra-high pressure mercury lamp that generates illumination light EL (exposure light) for exposure; an illumination system IS that illuminates multiple trapezoidal illumination regions IRA, etc. on the pattern surface of the mask M with a uniform illuminance distribution using illumination light EL; a mask stage 21 that holds and moves the mask M parallel to the XY plane via a mask holder (not shown); a projection system PS (projection optical system) consisting of a multi-lens type projection optical system that forms an image of the pattern of the mask M on multiple trapezoidal exposure regions PRA, etc. on the surface of the plate PT; and a plate stage 22 that holds and moves the plate PT. Furthermore, the exposure apparatus 1 includes a multi-axis laser interferometer 23A for measuring the position information of the mask stage 21, a multi-axis laser interferometer 23B for measuring the position information of the plate stage 22, a drive system (not shown) including a linear motor that synchronously drives the mask stage 21 and the plate stage 22 based on the measurement results of the laser interferometers 23A and 23B, a wavefront aberration measuring device 24, for example, a shearing interferometer, provided on the plate stage 22 for measuring the wavefront aberration of the projection system PS, and a main control device (not shown) that comprehensively controls the operation of the entire apparatus.

[0010] Illumination light EL emitted from the light source 10 enters the focusing optical system 11 via an elliptical mirror, a mirror, a shutter (not shown), and a wavelength-selective filter (not shown). The wavelength-selective filter selects one or more wavelengths of light from, for example, the i-line (wavelength 365 nm), the g-line (wavelength 436 nm), and the h-line (wavelength 405 nm). The illumination light EL that has passed through the focusing optical system 11 is incident on the input end 12 of the branching optical system 13. The illumination light EL emitted from the output ends 14A to 14G of the branching optical system 13 illuminates the illumination regions IRA to IRG via the corresponding partial illumination systems ILA to ILG. There are the same number of output ends 14A to 14G as there are partial projection optical systems PLA to PLG that constitute the projection system PS (seven in this embodiment). The partial illumination systems IRA to ILG each include a collimating lens, a fly-eye integrator (optical integrator), and a condenser lens, respectively. The illumination system IS is composed of the optical components from the focusing optical system 11 to the partial illumination systems IRA to ILG. As shown in Figure 2, the trapezoidal illumination regions IRA to IRG are divided into three illumination regions IRA, IRB, and IRC in the first row, which are arranged in the Y direction, and four illumination regions IRD, IRE, IRF, and IRG in the second row, which are separated from them in the -X direction and shifted by half a period in the Y direction. The illumination regions IRA to IRG are divided in accordance with the arrangement of the partial projection optical systems PLA to PLG, which will be described later.

[0011] In Figure 1, illumination light from the illumination regions IRA to IRG of the mask M is incident on a projection system PS consisting of multiple (seven in this embodiment) partial projection optical systems PLA to PLG arranged in two rows along the Y direction to correspond to each illumination region. The partial projection optical systems PLA to PLG form an image of the pattern in the illumination regions IRA to IRG on the corresponding exposure region PRA, etc. Figure 1 shows the schematic configuration of the optical system inside the lens barrel for each partial projection optical system PLA~PLG. The partial projection optical systems PLA~PLG are, as an example, two-stage reflecting and refraction systems arranged in the Z direction with identical configurations, forming a nearly telecentric, high-resolution imaging optical system on both sides. Each of the partial projection optical systems PLA~PLG forms a 1:1 upright image as an example, with an aperture of approximately 0.1.

[0012] In this case, when viewing all illumination regions IRA~IRG in the X direction, the illumination regions IRA~IRG are arranged without gaps in the Y direction. Therefore, while exposing plate PT with the image of the illumination regions IRA~IRG projected by the projection system PS, the mask M is moved in the +X direction (or -X direction) relative to the illumination regions IRA~IRG by the mask stage 21, and plate PT is moved in the +X direction (or -X direction) relative to the exposure region PRA, etc. by the plate stage 22, in synchronous manner. In this way, the pattern of the entire surface of mask M can be exposed to one pattern formation region (partition region) of plate PT in a single scan exposure.

[0013] As shown in Figure 2, the partial projection optical system PLA~PLG is divided into a first row of three partial projection optical systems PLA, PLB, PLC arranged in the Y direction, and a second row of four partial projection optical systems PLD, PLE, PLF, PLG arranged opposite to them in the -X direction and offset by half a cycle in the Y direction. The partial projection optical system PLA~PLG is supported by an optical system frame 26, which is flat and has an aperture that allows illumination light to pass through, as shown by the dashed line. The optical system frame 26 is supported by a base member (not shown) on which a plate stage 22 is movably mounted. The number and arrangement of the partial projection optical systems PLA~PLG that constitute the projection system PS are arbitrary.

[0014] The configurations of the partial projection optical systems PLA to PLG are identical, and below, the configuration of the partial projection optical system PLA will be described with reference to Figure 3. In Figure 3, the partial projection optical system PLA includes a first reflection / refracting system G1P that forms a primary image I1 of the pattern in the illumination area IRA of the mask M, a field aperture (not shown) located near the primary image I1, a first (upper) lens barrel (tube) 50 that houses the first reflection / refracting system G1P, a second reflection / refracting system G2P that forms a secondary image I2 of the primary image I1 in the exposure area PRA on the plate PT, and a second (lower) lens barrel (tube) 52 that houses the second reflection / refracting system G2P. Furthermore, the first reflective / refracting system G1P includes an image shifter 28A (for example, multiple parallel plane plates) that shifts light incident from the mask M in the -Z direction, a first right-angle prism 30A that reflects that light in the +X direction, lenses 32A, 34A, 36A, lens (optical element) 37A, lens 38A, and lens 40A arranged in the +X direction in order from the first right-angle prism 30A side, and a first concave mirror 42A that reflects the light reflected by the first reflective surface of the right-angle prism 30A and passing through lenses 32A to 40A in the -X direction. For example, lenses 32A to 40A are each disc-shaped. Here, the optical axis of the optical system composed of lenses 32A to 40A and the first concave mirror 42A is designated as AX1. The light reflected by the first concave mirror 42A passes through lenses 40A to 32A, and is reflected in the -Z direction by the second reflecting surface of the right-angle prism 30A to form a primary image I1.

[0015] Also, the first lens barrel 50 is prismatic and has a first lens barrel portion 50a that holds the image shifter 28A and the right-angle prism 30A, a second lens barrel portion 50b that is cylindrical and holds lenses 32A and 34A, a third lens barrel portion 50c that is cylindrical and houses lenses 36A, 37A, 38A, and 40A, and a fourth lens barrel portion 50d that is a short cylindrical shape with a closed other end and holds the first concave mirror 42A. The first lens barrel 50 is configured such that the first lens barrel portion 50a, the second lens barrel portion 50b, the third lens barrel portion 50c, and the fourth lens barrel portion 50d are connected by bolts or the like (not shown). An annular holding member 50c1 is provided coaxially with the third lens barrel portion 50c on the inner peripheral surface of the third lens barrel portion 50c. The first lens barrel 50 is fixed to the upper surface of the optical system frame 26.

[0016] The configuration of the second reflection-refraction system G2P is substantially the same as that of the first reflection-refraction system G1P. That is, the second reflection-refraction system G2P includes a second right-angle prism 30B that reflects light incident from the primary image I1 in the -Z direction in the +X direction, lenses 32B, 34B, 36B, 37B, 38B, and 40B disposed in the optical path of the light reflected by the second right-angle prism 30B, a second concave mirror 42B that reflects the light passing through lens 40B in the -X direction, and an image shifter 28B or the like that shifts the light reflected by the second concave mirror 42B, passes through lenses 40B to 32B, and is reflected in the -Z direction by the right-angle prism 30B. Here, the optical axis of the optical system composed of lenses 32B to 40B and the second concave mirror 42B is designated as AX2. A secondary image I2 is formed in the exposure region PRA by the light that has passed through the image shifter 28B. The second lens barrel 52 is formed by connecting a first lens barrel portion 52a that holds the image shifter 28B and the right-angle prism 30B, a second lens barrel portion 52b that holds the lenses 32B and 34B, a third lens barrel portion 52c that houses the lenses 36B, 37B, 38B, and 40B, and a fourth lens barrel portion 52d that holds the second concave mirror 42B. An annular holding member 52c1 is provided coaxially with the third lens barrel portion 52c on the inner peripheral surface of the third lens barrel portion 52c. The second lens barrel 52 is fixed to the bottom surface of the optical system frame 26.

[0017] Also, the partial projection optical system PLA has a first adjustment device 8A and a third adjustment device 8C that perform coarse adjustment of the imaging characteristics by adjusting the positional relationship of the lenses 36A and 36B with respect to the third lens barrel portions 50c and 52c. The partial projection optical system PLA has a second adjustment device 8B and a fourth adjustment device 8D that perform fine adjustment of the imaging characteristics by adjusting the positional relationship of the lenses 40A and 40B with respect to the third lens barrel portions 50c and 52c. In this embodiment, the first and third adjustment devices 8A and 8C having the same configuration adjust the rotation angles (tilt angles) of the lenses 36A and 36B around two orthogonal directions in a plane perpendicular to the optical axes AX1 and AX2, and are devices for coarsely adjusting the decentered coma aberration. Similarly, the second and fourth adjustment devices 8B and 8D having the same configuration adjust the rotation angles of the lenses 40A and 40B around two orthogonal directions in a plane perpendicular to the optical axes AX1 and AX2, and are devices for finely adjusting the decentered coma aberration.

[0018] The exposure apparatus 1 includes the optical member position adjustment devices 60A and 60B of this embodiment that are fixed to the third lens barrel portions 50c of the first lens barrel 50 and the third lens barrel portions 52c of the second lens barrel 52. Since the configurations of the optical member position adjustment devices 60A and 60B are the same as each other, the optical member position adjustment device 60A will be described below. The optical component position adjustment device 60A adjusts the position of the lens 37A housed in the third lens barrel section 52c. As shown in Figures 4 and 5, the optical component position adjustment device 60A has a mechanism for holding the lens 37A inside the third lens barrel section 52c. In Figure 5, the lens 37A is shown by a dashed line. In this embodiment, the cylindrical member 61A is cylindrical. Hereinafter, the radial direction of the cylindrical member 61A will be simply referred to as the radial direction. The circumferential direction of the cylindrical member 61A will be simply referred to as the circumferential direction. A groove 63A is formed in the cylindrical wall 62A of the cylindrical member 61A, which penetrates the cylindrical wall 62A (cylindrical member 61A) in the radial direction. The cylindrical wall 62A is a cylindrical wall that constitutes the cylindrical member 61A. In this specification, "a groove that penetrates the cylindrical member in the radial direction" means that there are two cylindrical walls 62A that are connected to each other so as to sandwich the axis O1 of the cylindrical member 61A from a direction perpendicular to the axis O1, and the groove 63A penetrates at least one of these two cylindrical walls 62A in the radial direction.

[0019] The groove 63A divides the cylindrical member 61A into a first portion 66A, a second portion 67A, and a flexure portion (guide portion, flexure) 75A. In other words, the cylindrical member 61A comprises a first portion 66A, a second portion 67A, and a flexure portion 75A. The first part 66A and the second part 67A are connected by a flexure portion 75A. The flexure portion 75A is formed to be connected to each of the first part 66A and the second part 67A.

[0020] The first portion 66A and the second portion 67A are both cylindrical. The first portion 66A is formed at the first end of the cylindrical member 61A on the first side D1 (hereinafter simply referred to as the first side D1) in the direction of the axis O1 of the cylindrical member 61A (a predetermined direction). The second portion 67A is formed at the second end of the cylindrical member 61A on the second side D2 (hereinafter simply referred to as the second side D2) opposite to the first side D1 in the direction of the axis O1. The second portion 67A is provided at a predetermined distance from the first portion 66A in the direction of the axis O1. As shown in Figure 6, a pair of protrusions 66Ad projecting toward the second side D2 are formed on the end face 66Aa of the second side D2 of the first portion 66A. The pair of protrusions 66Ad are spaced apart from each other in the circumferential direction. Hereinafter, the protrusion 66Ad of the pair that is positioned in the first direction D3 in the circumferential direction (hereinafter also simply referred to as the first direction D3) will be referred to as protrusion 66Ad1. The protrusion 66Ad of the pair that is positioned in the second direction D4 in the circumferential direction opposite to the first direction D3 (hereinafter also simply referred to as the second direction D4) will be referred to as protrusion 66Ad2.

[0021] Between the pair of protrusions 66Ad, a first recess (recess) 66Ab is formed, which is recessed toward the first side D1 than the pair of protrusions 66Ad. The first recess 66Ab penetrates the cylindrical wall 62A of the first portion 66A in the radial direction. The first portion 66A has a through hole 66Ac that extends in the direction of the axis O1 and opens to the bottom surface of the first recess 66Ab.

[0022] A second recess 67Ad is formed on the end face 67Aa of the first side D1 of the second portion 67A, recessing toward the second side D2. The second recess 67Ad penetrates the cylindrical wall 62A of the second portion 67A radially. A pair of protrusions 67Ae are formed on the bottom surface of the second recess 67Ad, projecting toward the first side D1. The pair of protrusions 67Ae are spaced apart from each other in the circumferential direction. Hereinafter, the protrusion 67Ae positioned in the first direction D3 of the pair of protrusions 67Ae will also be referred to as protrusion 67Ae1. The protrusion 67Ae positioned in the second direction D4 of the pair of protrusions 67Ae will also be referred to as protrusion 67Ae2.

[0023] Between the pair of protrusions 67Ae, a first recess (recess) 67Ab is formed, which is recessed toward the second side D2 than the pair of protrusions 67Ae. The first recess 67Ab is opposite to the first recess 66Ab of the first portion 66A in the direction of axis O1. In the side view in Figure 6, the first recesses 66Ab and 67Ab are oval in shape as a whole. The second portion 67A has a through hole 67Ac that extends in the direction of the axis O1 and opens to the bottom surface of the first recess 67Ab. The through hole 67Ac is collinear with the through hole 66Ac of the first portion 66A. Note that one of the first recess 66Ab and the first recess 67Ab does not need to be formed.

[0024] As shown in Figure 5, the inner circumferential surface of the second portion 67A has a small diameter portion 67Af located on the first side D1 and a large diameter portion 67Ag located on the second side D2, which is further away from the small diameter portion 67Af. A first retaining portion 67Ah is formed on the stepped portion between the small diameter portion 67Af and the large diameter portion 67Ag. The first retaining portion 67Ah protrudes from the stepped portion toward the second side D2 and extends to near the end face 66Ai of the second side D2 in the second portion 67A. A second retaining portion 69A is fixed to the end face 66Ai of the second portion 67A. The second retaining portion 69A and the first retaining portion 67Ah constitute a retaining portion 70A. The second retaining portion 69A and the first retaining portion 67Ah are each provided in a part of the circumferential direction of the second portion 67A. That is, each of the multiple retaining portions 70A is provided in a part of the circumferential direction of the second portion 67A.

[0025] The second retaining portion 69A is formed of an elastic metal piece or the like. The second retaining portion 69A protrudes radially inward from the inner peripheral edge of the end face 66Ai and faces the first retaining portion 67Ah in the direction of axis O1. The first retaining portion 67Ah and the second retaining portion 69A contact the outer peripheral edge of the lens 37A from the first side D1 and the second side D2, respectively. The first retaining portion 67Ah and the second retaining portion 69A sandwich the outer peripheral edge of the lens 37A in the direction of axis O1. In this way, the retaining portion 70A contacts the lens 37A and holds the lens 37A. The second portion 67A holds the lens 37A. The optical component positioning device 60A is equipped with multiple (three in this embodiment) holding parts 70A. The multiple holding parts 70A are arranged with spacing between them in the circumferential direction. Preferably, the multiple holding parts 70A are arranged at equal angles to each other around the axis O1. The optical component position adjustment device 60A may have as few as one holding portion 70A.

[0026] As shown in Figure 6, the flexure portion 75A is separated from the cylindrical member 61A by a groove 63A. The flexure portion 75A includes a first connecting piece 76A and a second connecting piece 77A that connect the first portion 66A and the second portion 67A in the direction of the axis O1. The first connecting piece 76A has a first arm portion 79A and a second arm portion 80A. The first arm portion 79A extends in a first direction D3 from the protrusion 66Ad1 (end face 66Aa) of the first portion 66A. The second arm 80A extends from the tip of the first arm 79A in a second direction D4. The second arm 80A is positioned second to the second side D2 compared to the first arm 79A. The second arm 80A is connected to the protrusion 67Ae1 (end face 67Aa) of the second portion 67A. The first arm portion 79A and the second arm portion 80A are positioned within the portion of the second recess 67Ad that is in a first orientation D3 relative to the protrusion 67Ae1.

[0027] The second connecting piece 77A has a third arm portion 82A and a fourth arm portion 83A. The third arm 82A extends in the second direction D4 from the protrusion 66Ad2 of the first portion 66A (the portion of the end face 66Aa adjacent to the portion where the first arm 79A is provided, in the second direction D4). Here, adjacent portions mean, for example, that the distance between the portions where the arms 79A and 82A are joined to the first portion 66A is less than or equal to twice the average length of each arm 79A and 82A. The fourth arm 83A extends from the tip of the third arm 82A in a first direction D3. The fourth arm 83A is positioned second to the third arm 82A in a second direction D2. The fourth arm 83A is connected to the protrusion 67Ae2 of the second portion 67A (the portion of the end face 67Aa adjacent to the portion to which the second arm 80A is joined in a second direction D4). The third arm 82A and the fourth arm 83A are positioned within the portion of the second recess 67Ad that is in a second orientation D4 relative to the protrusion 67Ae2.

[0028] The circumferential lengths of the arms 79A, 80A, 82A, and 83A are equal to each other. The lengths of the arms 79A, 80A, 82A, and 83A in the direction of axis O1 are shorter than the lengths of the first part 66A and the second part 67A in the direction of axis O1. The flexure section 75A as a whole is a so-called pantograph shape, which is "<>" shaped. The first part 66A, the second part 67A, and the flexure part 75A, configured as described above, are integrally formed from brass, stainless steel, or the like. The flexure part 75A is elastically deformable and can also be elastically restored. The flexure part 75A guides the second part 67A relative to the first part 66A in the direction of the axis O1.

[0029] As shown in Figure 5, the optical element position adjustment device 60A is equipped with multiple flexure portions 75A (three in this embodiment). The multiple flexure portions 75A are arranged with spacing between them in the circumferential direction. Preferably, the multiple flexure portions 75A are arranged at equal angles to each other around the axis O1. First recesses 66Ab, 67Ab, etc. are also formed corresponding to the multiple flexure portions 75A. The multiple holding parts 70A and the multiple flexure parts 75A are arranged so as not to overlap each other in the circumferential direction when viewed in the direction of the axis O1. The number of flexure parts 75A provided by the optical element position adjustment device 60A may be as small as one. The optical element positioning device 60A configured as described above is manufactured, for example, by performing known laser cutting, wire cutting, etc., on a cylindrical member formed of brass. Since the flexure portion 75A is demarcated by forming a groove 63A in the cylindrical member 61A, there is no need to add a new member to the cylindrical member 61A when forming the flexure portion 75A.

[0030] As shown in Figure 6, an annular washer 86A is placed in the first recess 66Ab of the first part 66A and the first recess 67Ab of the second part 67A. A screw 87A is placed in the through hole 66Ac of the first part 66A and the through hole 67Ac of the second part 67A. The longitudinal middle portion of the screw 87A is placed in the hole of the washer 86A. For example, the screw 87A is fixed to parts 66A and 67A respectively by a nut (not shown) that fits with the screw 87A. The washer 86A is placed for each pair of first recesses 66Ab and 67Ab. For example, when the thickness (axial length) of the washer 86A is a predetermined thickness, the first arm portion 79A and the second arm portion 80A are parallel to each other, and the third arm portion 82A and the fourth arm portion 83A are parallel to each other. Hereafter, the arrangement of portions 66A and 67A of the optical element position adjustment device 60A shown in Figure 4 will be referred to as the reference arrangement.

[0031] On the other hand, as shown in Figure 7, a washer 86A1, which has a longer length (thickness) in the axial direction O1 than the washer 86A, is placed in the first recesses 66Ab and 67Ab. In this case, the first connecting piece 76A and the second connecting piece 77A extend in the axial direction O1. This results in an extended configuration of the optical element position adjustment device 60A, where the distance between the first part 66A and the second part 67A is wider than in the standard configuration of the optical element position adjustment device 60A. The flexure part 75A guides the second part 67A in the axial direction O1 relative to the first part 66A by changing the predetermined interval. Thus, the distance between the first part 66A and the second part 67A can be adjusted by the thickness of the washer 86A.

[0032] As shown in Figure 4, the optical element position adjustment device 60A is located inside the third lens barrel section 50c. The first portion 66A of the optical element position adjustment device 60A contacts the retaining member 50c1 from the second side D2 and is fixed (attached) to the third lens barrel section 50c by fitting into the third lens barrel section 50c. By adjusting the thickness of the washer 86A, the position of the lens 37A in the axial direction O1 relative to the third lens barrel 50c is adjusted.

[0033] Next, an example of a method for adjusting the optical characteristics or imaging characteristics of the projection system PS of this embodiment will be described with reference to the flowchart in Figure 8. First, in step S1 of Figure 8, the manufacturing of each component of the multiple partial projection optical system PLA~PLG of the projection system PS, the assembly and adjustment of each component, and their mounting to the optical system frame 26 are carried out. In the next step S3, rough adjustments are made to the first reflection / refractory system G1P in the first tube 50 using the first adjustment device 8A for each partial projection optical system PLA~PLG, and to the optical component position adjustment device 60A. Rough adjustments are also made to the second reflection / refractory system G2P in the second tube 52 using the third adjustment device 8C, and to the optical component position adjustment device 60B. In the next step S5, while measuring wavefront aberration using, for example, a wavefront aberration measuring device (not shown), the first reflection / refracting system G1P is fine-tuned using the second adjustment device 8B for each partial projection optical system PLA~PLG, and the second reflection / refracting system G2P is fine-tuned using the fourth adjustment device 8D.

[0034] Subsequently, in step S7, the standalone, pre-adjusted projection system PS is mounted between the mask stage 21 and the plate stage 22, as shown in Figure 2. In the next step S9, rough adjustments are made to the first reflection / refractive system G1P using the first adjustment device 8A for each partial projection optical system PLA~PLG, and to the optical component position adjustment device 60A. In the next step S11, for example, while measuring wavefront aberration on-body using the wavefront aberration measuring device 24 shown in Figure 1, the first reflection / refractive system G1P is finely adjusted using the second adjustment device 8B for each partial projection optical system PLA~PLG, and the optical component position adjustment device 60A is also finely adjusted. By performing the above steps, the projection system PS is adjusted.

[0035] As shown in Figure 9, the conventional optical element position adjustment device 95A includes a second holding member 96A, a leaf spring 97A, and a cylindrical member 98A. For example, the second retaining member 96A is cylindrical. The second retaining member 96A is arranged coaxially with the third lens barrel portion 50c and fixed to the inner circumferential surface of the third lens barrel portion 50c. For example, the leaf spring 97A is annular in shape. The outer edge of the leaf spring 97A is fixed to the end face of the first side D1 of the second retaining member 96A. The cylindrical member 98A is cylindrical in shape. The cylindrical member 98A holds the lens 37A. The cylindrical member 98A is located inside the second retaining member 96A and is arranged coaxially with the second retaining member 96A. A gap S15 is formed between the cylindrical member 98A and the second retaining member 96A. The inner circumferential edge of the leaf spring 97A is fixed to the first side end face D1 of the cylindrical member 98A.

[0036] The inner edge of the leaf spring 97A deforms as shown by the dashed line L1 in Figure 9, thereby adjusting the position of the lens 37A in the axial direction O1 relative to the third lens barrel 50c. However, since the second holding member 96A that holds the lens 37A is positioned between the third lens barrel 50c and the cylindrical member 98A, the optical element position adjustment device 95A can only hold lenses with a smaller numerical aperture (NA) than the lenses that can be held by the optical element position adjustment device 60A of this embodiment. The NA is expressed by equation (1). NA = n × sinθ ··(1) Here, θ is the maximum angle of the light ray entering the lens from the object (or the light ray focusing from the lens onto the object) with respect to the optical axis. n is the refractive index of the medium between the object and the lens. Generally, the resolution δ, which corresponds to the resolution of a lens, is inversely proportional to the numerical aperture, as shown in equation (2), where λ is the wavelength of the light source.

[0037]

number

[0038] In the projection optical system of an exposure apparatus, using a lens with a large numerical aperture is advantageous in terms of achieving high resolution because it allows for the resolution of finer lines. If a lens with a large numerical aperture is to be held by the second holding member 96A, the maximum angle θ increases, and the diameter of the lens increases. Therefore, the diameter of the second holding member 96A must be increased. As a result, the diameter of the third lens barrel portion 50c provided on the outer circumference of the second holding member 96A must be further increased.

[0039] As described above, in the optical element position adjustment device 60A of this embodiment, the cylindrical member 61A comprises a first portion 66A, a second portion 67A, and a flexure portion 75A. Therefore, without adding a new member to the cylindrical member 61A, a flexure portion 75A that guides the second portion 67A in the direction of the axis O1 relative to the first portion 66A can be provided by changing the predetermined interval. Since no new member is added to the cylindrical member 61A, the outer diameter of the optical element position adjustment device 60A does not become larger than the outer diameter of the cylindrical member 61A, and the inner diameter of the optical element position adjustment device 60A does not become smaller than the inner diameter of the cylindrical member 61A. Therefore, for example, when attached to a third lens barrel section 50c with a constant inner diameter, the optical element position adjustment device 60A can hold a lens 37A with a larger numerical aperture compared to the conventional optical element position adjustment device 95A.

[0040] The first portion 66A is defined at the first end of the first side D1 of the cylindrical member 61A, and the second portion 67A is defined at the second end of the second side D2 of the cylindrical member 61A. This makes it easier for portions 66A and 67A to become cylindrical, and for example, a disc-shaped lens 37A can be easily and securely held within the second portion 67A. The flexure section 75A comprises a first connecting piece 76A and a second connecting piece 77A. The first connecting piece 76A has a first arm 79A and a second arm 80A, and the second connecting piece 77A has a third arm 82A and a fourth arm 83A. As a result, the flexure section 75A has a pantograph-type mechanism, which allows the second part 67A to be reliably guided in the direction of the axis O1 relative to the first part 66A.

[0041] A first recess 66Ab is formed in the first portion 66A, and a first recess 67Ab is formed in the second portion 67A. A washer 86A for adjusting the distance between the first portion 66A and the second portion 67A can be securely held within the first recesses 66Ab and 67Ab. The multiple flexure sections 75A are arranged with spacing between them in the circumferential direction. This allows the movement of the second section 67A relative to the first section 66A to be stabilized regardless of its position in the circumferential direction.

[0042] The multiple holding portions 70A and the multiple flexure portions 75A are arranged so as not to overlap each other in the circumferential direction when viewed in the direction of the axis O1. The deformation of the second portion 67A by the multiple flexure portions 75A is easily transmitted to the second side D2 portion of the second portion 67A relative to the flexure portions 75A. By configuring it in this way, the lens 37A is held by the less deformable portion of the second portion 67A, and the influence of the second portion 67A on the holding of the lens 37A can be suppressed. Furthermore, in the exposure apparatus 1 of this embodiment, the exposure apparatus 1 can be configured using an optical element position adjustment device 60A that can hold a lens 37A with a large numerical aperture.

[0043] Alternatively, a female thread may be formed in the through hole 67Ac of the second portion 67A, and a fully threaded screw shaft that fits into this female thread may be placed in the through holes 66Ac and 67Ac. This screw shaft is rotated by a drive motor, and the drive motor is controlled by the main control device of the exposure apparatus. Based on the color of the illumination light EL, the main control unit rotates the screw shaft using a drive motor. By controlling it in this way, the position of the lens 37A in the direction of the axis O1 can be adjusted instantly based on the color of the illumination light EL.

[0044] Although one embodiment of the present invention has been described in detail above with reference to the drawings, the specific configuration is not limited to this embodiment, and modifications, combinations, deletions, etc., of the configuration are also included without departing from the spirit of the present invention. For example, in the above embodiment, the first recesses 66Ab and 67Ab do not need to be formed in portions 66A and 67A.

[0045] The shape of the groove formed in the cylindrical member 61A is such that the flexure portion partitioned by the groove can guide the second portion relative to the first portion in the direction of axis O1. For example, the flexure portion as a whole may be in the shape of a "><" character. In this case, the third arm portion 82A extends from a portion in a first direction D3 relative to the portion on the end face 66Aa of the first portion 66A where the first arm portion 79A is provided, to a second direction D4. The fourth arm portion 83A extends from the tip of the third arm portion 82A in a first direction D3. The fourth arm portion 83A is connected to a portion in a first direction D3 relative to the portion on the end face 67Aa of the second portion 67A where the second arm portion 80A is joined.

[0046] For example, in a front view of the cylindrical member 61A from the side, the first portion may be the portion of the cylindrical member 61A on the first side with respect to the axis O1, and the second portion may be the portion of the cylindrical member 61A on the second side opposite to the first side with respect to the axis O1. Thus, the predetermined direction may be a direction intersecting the axis O1 direction. The holding portion 70A and the flexure portion 75A may be arranged so as to overlap each other in the circumferential direction when viewed in the direction of the axis O1. The optical component is not limited to lens 37A; it may also be a reflector, prism, or the like.

[0047] When exposing with the exposure device 1, the position of the lens 37A in the direction of the axis O1 relative to the third lens barrel 50c may be adjusted. In that case, the actuator is attached to the second part 67A side without using the washer 86A. Then, by operating this actuator, the second part 67A is moved relative to the first part 66A in the direction of the optical axis AX1 (axis O1 direction). [Explanation of symbols]

[0048] 1. Exposure apparatus 37A, 37B Lenses (Optical Components) 50 First telescope tube (body) 52. Second telescope tube (body) 60A, 60B Optical Component Position Adjustment Device 61A cylindrical parts 63A Ditch 66A Part 1 66Aa, 67Aa end face 66Ab,67Ab 1st concave part (concave part) 67A Part 2 70A Holding Section 76A Episode 1 77A 2nd sequel 79A First wrist 80A Second Wrist 82A Third wrist 83A Fourth wrist D1 Side 1 D2 Side 2 D3 1st direction D4 2nd direction O1 axis

Claims

1. An optical element positioning device for adjusting the position of an optical element housed in a housing, The housing has a cylindrical member inside which it holds the optical element, The aforementioned cylindrical member is A first part that is attached to the housing, A second portion is provided at a predetermined distance in a predetermined direction relative to the first portion and holds the optical member, It comprises a guide portion formed in a state connected to the first portion and the second portion, which guides the second portion in the predetermined direction relative to the first portion by changing the predetermined interval, The predetermined direction is the axial direction of the cylindrical member, The first portion is defined at the first end of the cylindrical member on the first side in the axial direction by a groove that penetrates the cylindrical member radially, The second portion is demarcated by the groove at the second end on the second side opposite to the first side in the axial direction. The groove is positioned between the first portion and the second portion. A first recess is formed on the end face of the first portion facing the second portion, which is recessed in the axial direction. A second recess is formed on the end face of the second portion facing the first portion, which is recessed in the axial direction. The guide portion is formed by cutting it out from the cylindrical member through the groove. The device comprises washers positioned in the first recess and the second recess. Optical component positioning device.

2. A first through-hole is formed in the bottom surface of the first recess, extending in the axial direction and penetrating the first portion. A second through-hole is formed in the bottom surface of the second recess, extending in the axial direction and penetrating the second portion. The optical member positioning device according to claim 1, comprising screws disposed in the first through hole, the second through hole, and the hole in the washer, and fixed to the first and second portions, respectively.

3. The guide portion includes a first connecting piece and a second connecting piece that connect the first portion and the second portion in the axial direction, The first connecting piece is, A first arm portion extends from the second end face of the first portion in a first direction in the circumferential direction, A second arm extends from the tip of the first arm in a second direction opposite to the first direction in the circumferential direction and is connected to the end face on the first side of the second portion, It has, The second connecting piece is, A third arm extends in the second direction from a portion adjacent in the second direction to the portion on the end face of the first portion to the portion on which the first arm is provided, A fourth arm extends from the tip of the third arm in the first direction and is connected to a portion of the end face of the second portion that is adjacent in the second direction to the portion to which the second arm is joined, An optical member positioning device according to claim 1 or 2, having the following features.

4. The system includes multiple of the aforementioned guide sections, The optical member positioning device according to any one of claims 1 to 3, wherein the plurality of guide portions are arranged at intervals from each other in the circumferential direction.

5. The second portion includes a holding portion provided in a part of the circumferential direction, which contacts the optical member and holds the optical member, The optical member positioning device according to any one of claims 1 to 4, wherein the holding portion and the guide portion are arranged so as not to overlap each other in the circumferential direction when viewed in the axial direction of the cylindrical member.

6. An exposure apparatus comprising an optical element positioning device according to any one of claims 1 to 5.

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