PCB clamp, PCB transport tray, and PCB transport device

Abstract

To provide a substrate clamp which can reduce the size and the weight, and which has a small operation trouble risk, a substrate conveyance tray, and a substrate transport device.SOLUTION: A substrate clamp according to the present invention, comprises: a base body; a clamp mechanism; and an impact relaxation mechanism. The clamp mechanism includes: a first rotational member; a substrate gripping part that is fixed to the first rotational member; a first rotational shaft supported by the base body; and a first elastic body connecting the base body with the first rotational member. When an external force is applied, the first rotational member is rotated around the first rotational shaft to shift a close state to an open state, and the first elastic body is deformed to apply a reaction force to the first rotational member. The impact relaxation member includes: a second rotational member; a substrate contact part that is fixed to the second rotational member; a second rotational shaft supported by the base body; and a second elastic body connecting the base body with the second rotational member. When the substrate contact part is depressed from a side surface, the second rotational member is rotated around the second rotational shaft as well as deforming the second elastic body to apply the reaction force to the second rotational member.SELECTED DRAWING: Figure 7

Description

Technical Field

[0001] The present invention relates to a substrate clamp, a substrate transfer tray, and a substrate transfer device used for substrate transfer.

Background Art

[0002] A substrate transfer tray used for substrate transfer includes a substrate clamp for gripping a substrate. If the substrate transfer tray is lightweight, it is possible to improve the transfer speed and reduce the cost of the transfer mechanism. However, in order to reduce the weight of the substrate transfer tray, miniaturization and weight reduction of the substrate clamp are required. Conventionally, a substrate transfer tray generally includes a linear guide for shock absorption of the substrate and a rotation mechanism for the substrate clamp (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the configuration as described in Patent Document 1, since the linear guide and the rotation mechanism have to be designed separately, there is a problem in miniaturization. In addition, for miniaturization, a sliding bearing made of a resin material with a small friction coefficient is used for the linear guide, but there is a problem that the friction coefficient of the sliding bearing increases due to wear, resulting in operational failures.

[0005] In view of the above circumstances, an object of the present invention is to provide a substrate clamp, a substrate transfer tray, and a substrate transfer device that can be miniaturized and have a low risk of operational failures.

Means for Solving the Problems

[0006] To achieve the above objective, a substrate clamp according to one embodiment of the present invention comprises a base body, a clamping mechanism, and an impact mitigation mechanism. The above-mentioned substrate includes a substrate support portion that contacts the back surface of a substrate having a front surface, a back surface, and side surfaces. The clamping mechanism comprises a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member. The clamping mechanism has a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion. When an external force is applied, the first rotating member rotates around the first rotating shaft, transitioning from the closed state to the open state, and the first elastic body deforms, applying a reaction force to the first rotating member. The shock mitigation mechanism comprises a second rotating member, a substrate contact portion fixed to the second rotating member, a second rotating shaft supported by the base body, and a second elastic body connecting the base body and the second rotating member. When the substrate contact portion is pressed from the side, the second rotating member rotates around the second rotating shaft, and the second elastic body deforms, applying a reaction force to the second rotating member.

[0007] The clamping mechanism further includes a third rotation axis supported by the base and parallel to the first rotation axis, and a fourth rotation axis supported by the first rotating member and parallel to the first rotation axis. The first elastic body may connect the third rotation axis and the fourth rotation axis.

[0008] The first elastic body may be a tension spring that is stretched as the first rotating member rotates.

[0009] The second elastic body may be a compression spring that is compressed as the second rotating member rotates.

[0010] The second elastic body described above does not deform even when a force equivalent to the weight of the substrate is applied to the substrate contact portion, but may deform when a force exceeding the force equivalent to the weight of the substrate is applied to the substrate contact portion.

[0011] The substrate support portion and the substrate contact portion may be made of polyimide resin.

[0012] To achieve the above objective, a substrate transport tray according to one embodiment of the present invention comprises a tray frame and a first substrate clamp. The tray frame described above surrounds an opening on which a substrate, having a front surface, a back surface, and sides, is placed. The first substrate clamp described above is positioned around the opening of the tray frame and comprises a base, a clamping mechanism, and an impact mitigation mechanism. The above-mentioned substrate includes a substrate support portion that contacts the above-mentioned back surface. The clamping mechanism comprises a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member. The clamping mechanism has a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion. When an external force is applied, the first rotating member rotates around the first rotating shaft, transitioning from the closed state to the open state, and the first elastic body deforms, applying a reaction force to the first rotating member. The shock mitigation mechanism comprises a second rotating member, a substrate contact portion fixed to the second rotating member, a second rotating shaft supported by the base body, and a second elastic body connecting the base body and the second rotating member. When the substrate contact portion is pressed from the side, the second rotating member rotates around the second rotating shaft, and the second elastic body deforms, applying a reaction force to the second rotating member.

[0013] The substrate transport tray may further include a second substrate clamp positioned on the periphery of the opening of the tray frame. The second substrate clamp comprises a base and a clamping mechanism. The above-mentioned substrate includes a substrate support portion that contacts the above-mentioned back surface. The clamping mechanism comprises a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member. The clamping mechanism has a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion. When an external force is applied, the first rotating member rotates around the first rotating shaft, transitioning from the closed state to the open state, and the first elastic body deforms, applying a reaction force to the first rotating member.

[0014] The first substrate clamp described above is positioned on the vertically downward side of the periphery of the opening, The second substrate clamp may be positioned on the vertically upward side of the periphery of the opening.

[0015] To achieve the above objective, a substrate transport device according to one embodiment of the present invention comprises a substrate transport tray and a substrate transport mechanism. The above-described substrate transport tray comprises a tray frame surrounding an opening on which a substrate having a front surface, a back surface, and sides is placed, and a first substrate clamp positioned on the periphery of the opening of the tray frame. The above-mentioned substrate transport mechanism moves the above-mentioned substrate transport tray. The above-mentioned first substrate clamp comprises a base, a clamping mechanism, and a shock absorption mechanism. The above-mentioned substrate includes a substrate support portion that contacts the above-mentioned back surface. The clamping mechanism comprises a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member. The clamping mechanism has a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion. When an external force is applied, the first rotating member rotates around the first rotating shaft, transitioning from the closed state to the open state, and the first elastic body deforms, applying a reaction force to the first rotating member. The impact mitigation mechanism includes a second rotating member, a substrate contact portion fixed to the second rotating member, a second rotating shaft supported by the base body, and a second elastic body connecting the base body and the second rotating member. When the substrate contact portion is pressed from the side surface, the second rotating member rotates around the second rotating shaft and the second elastic body is deformed to apply a reaction force to the second rotating member.

Advantages of the Invention

[0016] As described above, according to the present invention, it is possible to provide a substrate clamp, a substrate transfer tray, and a substrate transfer device that can be miniaturized and lightened, and have a small risk of operation failure.

Brief Description of the Drawings

[0017] [Figure 1] It is a perspective view of a substrate transfer tray according to an embodiment of the present invention. [Figure 2] It is a plan view of the substrate transfer tray. [Figure 3] It is a perspective view of the substrate transfer tray on which a substrate is mounted. [Figure 4] It is a plan view of the substrate transfer tray on which a substrate is mounted. [Figure 5] It is a plan view of the substrate. [Figure 6] It is a perspective view of a substrate clamp included in the substrate transfer tray. [Figure 7] It is a perspective view of the substrate clamp. [Figure 8] It is a perspective view of a partial configuration of the substrate clamp. [Figure 9] It is an exploded perspective view of a partial configuration of the substrate clamp. [Figure 10] It is a plan view of the substrate clamp. [Figure 11] It is a cross-sectional view of the substrate clamp. [Figure 12] It is a schematic diagram showing a closed state of a clamp mechanism included in the substrate clamp. [Figure 13] It is a schematic diagram showing an open state of a clamp mechanism included in the substrate clamp. [Figure 14] This is a schematic diagram showing the open state of the clamping mechanism of the above-mentioned substrate clamp and the substrate itself. [Figure 15] This is a schematic diagram showing the closed state of the clamping mechanism of the above-mentioned substrate clamp and the substrate itself. [Figure 16] This is a schematic diagram showing the closed state of the clamping mechanism of the above-mentioned substrate clamp. [Figure 17] This is a schematic diagram showing the open state of the clamping mechanism of the above-mentioned circuit board clamp. [Figure 18] This is a schematic diagram illustrating the shock absorption mechanism provided by the above-mentioned substrate clamp. [Figure 19] This is a plan view of the substrate support stays provided in the above-mentioned substrate transport tray. [Figure 20] This is a perspective view of a substrate transport apparatus according to an embodiment of the present invention. [Figure 21] This is a perspective view of the substrate transport mechanism of the above-mentioned substrate transport device. [Figure 22] This is a schematic diagram of the above-mentioned substrate transport device. [Figure 23] This is a perspective view of the bottom of the substrate transport tray of the above-mentioned substrate transport device. [Figure 24] This is a plan view of a substrate transport device according to a modified example of the present invention. [Modes for carrying out the invention]

[0018] Embodiments of the present invention will be described below with reference to the drawings.

[0019] [Configuration of the PCB transport tray] The substrate transport tray according to this embodiment will now be described. Figure 1 is a perspective view of the substrate transport tray 100 according to this embodiment, and Figure 2 is a plan view of the substrate transport tray 100. Figure 3 is a perspective view of the substrate transport tray 100 with a substrate S placed on it, and Figure 4 is a plan view of the substrate transport tray 100 in the same state. As shown in Figures 3 and 4, the side on which the substrate S is placed is the front of the substrate transport tray 100, and the opposite side is the back. Figures 1 to 4 are all views of the substrate transport tray 100 from the front.

[0020] As shown in Figures 3 and 4, the substrate S is a substrate with a rectangular main surface. Figure 5 is a plan view showing each surface of the substrate S. As shown in the figure, the front side of the substrate S is the substrate surface P1, the main surface on the back side of the substrate S is the substrate back surface P2, and the side connecting the periphery of the substrate surface P1 and the substrate back surface P2 is the substrate side surface P3. Also, as shown in Figure 4, the four sides of the substrate S are each denoted as sides H. The substrate surface P1 and the substrate back surface P2 are parallel to the XZ plane, and the substrate side surface P3 is parallel to the XY plane or the YZ plane. Two of the sides H are parallel to the X direction, and the other two are parallel to the Z direction.

[0021] As shown in Figures 1 and 2, the substrate transport tray 100 includes a tray frame 101, a substrate clamp 102, and a substrate support stay 103.

[0022] The tray frame 101 is frame-shaped and forms an opening 104 on which the substrate S is placed. As shown in Figure 4, the opening 104 is slightly larger than the outer shape of the substrate S. Since the substrate S has a rectangular substrate surface P1 and a substrate back surface P2, the opening 104 also has a rectangular shape when viewed from a direction perpendicular to the substrate surface P1 and substrate back surface P2 of the substrate S (Y direction). The distance between the tray frame 101 and each side H is, for example, 33 mm.

[0023] The substrate clamp 102 secures the substrate S to the tray frame 101. Figure 6 is a perspective view of the substrate clamp 102. As shown in Figures 2 and 6, multiple substrate clamps 102 are provided on the tray frame 101 around the periphery of the opening 104. As shown in Figure 2, the number of substrate clamps 102 can be 19 on the vertically downward (downward in the figure) side of the opening 104, 9 on each of the left and right sides, and 10 on the vertically upward (upward in the figure) side. The number of substrate clamps 102 can also be changed as appropriate.

[0024] Figure 7 is a perspective view of the substrate clamp 102, and is a perspective view taken from a different direction than Figure 6. Figure 8 is a perspective view of a part of the substrate clamp 102, and Figure 9 is an exploded perspective view of a part of the substrate clamp 102. Figure 10 is a plan view of the substrate clamp 102. Figure 11 is a cross-sectional view of the substrate clamp 102, which is a cross-sectional view taken along line AA in Figure 10. As shown in these figures, the substrate clamp 102 comprises a base body 111, a clamping mechanism 112, and an impact mitigation mechanism 113.

[0025] The base 111 is fixed to the tray frame 101 and supports the clamp mechanism 112 and the shock absorption mechanism 113. As shown in Figures 7 to 11, the base 111 includes a first fixing member 121 (see Figure 8), a second fixing member 122 (see Figure 8), a third fixing member 123 (see Figure 11), a substrate support part 124 (see Figure 7), and a cover 125 (see Figure 7).

[0026] As shown in Figure 8, the first fixing member 121 and the second fixing member 122 are provided sandwiching the clamp mechanism 112 and the shock absorption mechanism 113. The third fixing member 123 (see Figure 11) is provided between the first fixing member 121 and the second fixing member 122, near the shock absorption mechanism 113. The substrate support portion 124 (see Figure 7) contacts the back surface P2 (see Figure 5) of the substrate and supports the substrate S. One substrate support portion 124 is provided on both the first fixing member 121 and the second fixing member 122.

[0027] As shown in Figure 8, the first fixing member 121 is provided with a hole 121a, and the second fixing member 122 is provided with a hole 122a. The substrate support portion 124 is fixed to the first fixing member 121 and the second fixing member 122 by being inserted into the holes 121a and 122a, respectively. As shown in Figure 9, the first fixing member 121 is provided with shaft holes 121b, 121c, and 121d. Also, as shown in Figure 9, the second fixing member 122 is provided with shaft holes 122b, 122c, and 122d. Of these, shaft hole 121c penetrates the first fixing member 121, and shaft hole 122d penetrates the second fixing member 122.

[0028] As shown in Figure 7, the cover 125 covers the base body 111, the clamping mechanism 112, and the shock absorption mechanism 113, preventing the film-forming material from adhering to them. The cover 125 is fixed to the first fixing member 121 and the second fixing member 122 by screws 182 inserted through holes 121e and 122e (see Figure 8).

[0029] The clamping mechanism 112 grips the substrate S. As shown in Figures 7 to 11, the clamping mechanism 112 comprises a first rotating member 131 (see Figure 9), a substrate gripping part 132 (see Figure 7), a first rotating shaft 133 (see Figure 9), a third rotating shaft 134 (see Figure 9), a fourth rotating shaft 135 (see Figure 9), an opening / closing part 136 (see Figure 9), and a first elastic body 137 (see Figure 9).

[0030] As shown in Figure 9, the first rotating member 131 comprises a first arm 131a and a second arm 131b extending in the same direction. A shaft hole 131c is provided at the tip of the first arm 131a, and a shaft hole 131d is provided at the tip of the second arm 131b. The shaft hole 131c passes through the first arm 131a, and the shaft hole 131d passes through the second arm 131b. Two holes 131e are provided at the end of the first rotating member 131 opposite to the shaft hole 131c.

[0031] The substrate gripping portion 132 grips the substrate S together with the substrate support portion 124. As shown in Figure 7, the substrate gripping portion 132 is a plate-shaped member and is fixed to the first rotating member 131 by a screw 181 inserted through a hole 131e (see Figure 8).

[0032] The first rotating shaft 133 is the rotating shaft of the first rotating member 131. As shown in Figure 9, one end of the first rotating shaft 133 is inserted into the shaft hole 121b via a bearing 141 and a spacer 142, and is rotatably supported with respect to the first fixed member 121. Also, as shown in Figure 9, the other end of the first rotating shaft 133 is inserted into the shaft hole 122b via a bearing 141 and a spacer 142, and is rotatably supported with respect to the second fixed member 122.

[0033] The third rotation axis 134 is the rotation axis of the first elastic body 137 and is parallel to the first rotation axis 133. As shown in Figure 9, one end of the third rotation axis 134 is inserted into the shaft hole 121c via a bearing 141 and is rotatably supported relative to the first fixed member 121. This one end of the third rotation axis 134 passes through the shaft hole 121c and protrudes to the outside of the first fixed member 121. Also, as shown in Figure 9, the other end of the third rotation axis 134 is inserted into the shaft hole 122c via a bearing 141 and is rotatably supported relative to the second fixed member 122. This other end of the third rotation axis 134 passes through the shaft hole 122c and protrudes to the outside of the second fixed member 122.

[0034] The fourth rotation axis 135 is the rotation axis of the first elastic body 137 and is parallel to the first rotation axis 133. As shown in Figure 9, the fourth rotation axis 135 is inserted into the shaft holes 131c and 131d via bearings 141 and is rotatably supported relative to the first rotating member 131. Both ends of the fourth rotation axis 135 pass through the shaft holes 131c and 131d and protrude outward from the first arm 131a and the second arm 131b.

[0035] The opening / closing section 136 rotates the first rotating member 131 when pressed from the outside. As shown in Figure 9, the opening / closing section 136 has a disc shape, and a fourth rotating shaft 135 is inserted through its center. As shown in Figure 7, the opening / closing section 136 is positioned between the first arm 131a and the second arm 131b.

[0036] The first elastic body 137 applies a reaction force to the first rotating member 131. Two first elastic bodies 137 are provided, as shown in Figure 9, connecting the third rotating shaft 134 and the fourth rotating shaft 135 on both sides of the clamping mechanism 112. The first elastic body 137 can be a tension spring, but it may be any other elastic body.

[0037] Figures 12 to 17 are schematic diagrams showing the gripping of the substrate S by the clamping mechanism 112. In Figure 12, the substrate support portion 124 and the substrate gripping portion 132 are in close proximity, and this state will be referred to as the "closed state" below. Here, as shown in Figure 13, an external force is applied by the pressing mechanism R to press the opening / closing portion 136 (arrow A1 in the figure). As a result, the first rotating member 131 rotates around the first rotation axis 133 (arrow A2 in the figure), and the substrate support portion 124 and the substrate gripping portion 132 are separated. Hereafter, this state will be referred to as the "open state". As shown in Figures 16 and 17, the first elastic body 137 is stretched in conjunction with the rotation of the first rotating member 131, and a reaction force F1 is applied to the fourth rotation axis 135 as shown in Figure 17. Furthermore, since the third rotation shaft 134 and the fourth rotation shaft 135 are rotatable, the first elastic body 137 is prevented from being disconnected due to the rotation of the first rotating member 131.

[0038] As shown in Figure 14, the substrate S is placed in the "open state" and the back surface P2 of the substrate is brought into contact with the substrate support part 124. Furthermore, when the pressing mechanism R is moved away from the opening / closing part 136 (arrow A3 in the figure), the rotation of the first rotating member 131 returns to its original position due to the reaction force F1 from the first elastic body 137 (arrow A4 in the figure). As a result, as shown in Figure 15, the clamp mechanism 112 is put into the "closed state" and the substrate S is sandwiched between the substrate support part 124 and the substrate gripping part 132. In this way, the substrate S is gripped by the clamp mechanism 112. Note that the substrate gripping part 132 may be in contact with the substrate surface P1 of the substrate S in the "closed state", or it may be separated from the substrate surface P1 with a small gap.

[0039] The shock mitigation mechanism 113 mitigates the impact received from the substrate S. As shown in Figures 7 to 11, the shock mitigation mechanism 113 comprises a second rotating member 151 (see Figure 9), a substrate contact portion 152 (see Figure 11), a second rotating shaft 153 (see Figure 9), and a second elastic body 154 (see Figure 11).

[0040] The second rotating member 151 has an L-shape as shown in Figure 9 and has a first portion 151a and a second portion 151b. A hole 151c is provided in the first portion 151a. The substrate contact portion 152 (see Figure 11) contacts the side surface P3 of the substrate. The substrate contact portion 152 is fixed to the second rotating member 151 by a screw 183 inserted through the hole 151c.

[0041] The second rotating shaft 153 is the rotating shaft of the second rotating member 151. As shown in Figure 9, one end of the second rotating shaft 153 is inserted into the shaft hole 121d via a bearing 141 and a spacer 142, and is rotatably supported relative to the first fixed member 121. Also, as shown in Figure 9, the other end of the second rotating shaft 153 is inserted into the shaft hole 122d via a bearing 141 and a spacer 142, and is rotatably supported relative to the second fixed member 122.

[0042] The second elastic body 154 applies a reaction force to the second rotating member 151. The second elastic body 154 is positioned between the second portion 151b and the third fixed member 123, as shown in Figure 11. The second elastic body 154 can be a compression spring, but it may be any other elastic body.

[0043] Figure 18 is a schematic diagram showing impact mitigation by the impact mitigation mechanism 113. As described above, the substrate S is gripped by the clamp mechanism 112, but misalignment of the substrate S may occur when the substrate S is placed, and as shown in Figure 18, the substrate side P3 of the substrate S may collide with the substrate contact portion 152. In addition, if any impact is applied to the substrate transport tray 100 while the substrate transport tray 100 is being transported after the substrate S has been gripped, the substrate S may also collide with the substrate contact portion 152.

[0044] In this case, the substrate contact portion 152 is pressed against the substrate S, and the second rotating member 151 rotates around the second rotation axis 153 (arrow A5 in the figure). The second elastic body 154 is compressed as the second rotating member 151 rotates, and a reaction force F2 is applied to the second rotating member 151 as shown in Figure 18. As a result, the substrate S returns to its original position. The impact of the collision of the substrate S with the substrate contact portion 152 is absorbed and mitigated by the compression of the second elastic body 154.

[0045] Furthermore, the second elastic body 154 may be configured not to deform even when a force equivalent to the weight of the substrate S is applied to the substrate contact portion 152, but to deform when a force exceeding the force equivalent to the weight of the substrate S is applied to the substrate contact portion 152. The substrate clamp 102 is also positioned vertically below the opening 104 (see Figure 2) as described above, in which case a force equivalent to the weight of the substrate S is applied to the substrate contact portion 152.

[0046] The "force equivalent to the weight" of the substrate S is the force obtained by dividing the weight of the substrate S by the number of substrate clamps 102 positioned vertically below the opening 104. By configuring the second elastic body 154 as described above, the second rotating member 151 does not rotate when the substrate S is placed on the substrate clamps 102, and the second rotating member 151 rotates only when an impact is applied to mitigate the impact. Specifically, if the second elastic body 154 is a compression spring, the above configuration can be achieved by adjusting its spring constant.

[0047] The substrate clamp 102 has the configuration described above. The material of the substrate clamp 102 is not particularly limited, but the substrate support portion 124 and the substrate contact portion 152 may be made of a resin such as polyimide. The other parts may be made of a metal such as aluminum.

[0048] As shown in Figure 2, the substrate support stay 103 connects the tray frames 101 through an opening 104 and supports the substrate S. Figure 19 is a plan view of the substrate support stay 103. As shown in the figure, the substrate support stay 103 comprises a first support portion 161, a second support portion 162, a shaft portion 163, and a substrate support pin 164.

[0049] The first support portion 161 connects the tray frame 101 and the shaft portion 163. The first support portion 161 has a U-shape to avoid interference with the substrate clamp 102. The second support portion 162 connects the tray frame 101 and the shaft portion 163 on the opposite side from the first support portion 161. The second support portion 162 has a U-shape similar to the first support portion 161.

[0050] The shaft portion 163 is rod-shaped and extends in one direction (Z direction), connecting the first support portion 161 and the second support portion 162. Multiple substrate support pins 164 are provided on the shaft portion 163 at predetermined intervals and contact the back surface of the substrate S. The tips of the substrate support pins 164 may be made of resin or the like. The first support portion 161, the second support portion 162, and the shaft portion 163 may be made of metal such as aluminum.

[0051] [Effects of PCB transport trays] As described above, the substrate clamp 102 in the substrate transport tray 100 is equipped with a clamping mechanism 112 and an impact mitigation mechanism 113, so that the substrate clamp 102 can grip the substrate S and mitigate impacts to the substrate S. For this reason, the substrate transport tray can be made smaller and lighter compared to when the clamping mechanism and impact mitigation mechanism are provided separately in the substrate transport tray. In addition, the substrate clamp 102 does not have a configuration that causes changes in the coefficient of friction, such as a sliding bearing, so the risk of malfunction is small.

[0052] [Regarding substrate transport equipment] A substrate transport device utilizing the substrate transport tray 100 described above will now be explained. Figure 20 is a schematic diagram of a substrate transport device 200 equipped with the substrate transport tray 100, Figure 21 is an enlarged view of a part of the configuration of the substrate transport device 200, and Figure 22 is a schematic diagram of the substrate transport device 200. As shown in these figures, the substrate transport device 200 includes a substrate transport tray 100 and a substrate transport mechanism 210.

[0053] The substrate transport mechanism 210 includes a linear motor unit 211, guide rollers 212, a lower guide rail 213, and an upper guide rail 214, and moves the substrate transport tray 100. Figure 21 shows a magnified view of the linear motor unit 211, guide rollers 212, and lower guide rail 213 of the substrate transport mechanism 210.

[0054] The linear motor unit 211 is positioned along the transport line of the substrate transport tray 100 and propels the substrate transport tray 100 along the line. An electromagnet 215 is positioned on the linear motor unit 211. Figure 23 is a perspective view showing the bottom surface of the substrate transport tray 100. As shown in the figure, a magnet 216 is positioned on the bottom surface of the substrate transport tray 100. A magnetic force acts between the electromagnet 215 and the magnet 216, applying thrust to the substrate transport tray 100.

[0055] The guide rollers 212 are positioned in front of and behind the linear motor unit 211 and contact the substrate transport tray 100. The guide rollers 212 rotate to guide the movement of the substrate transport tray 100.

[0056] The lower guide rail 213 is positioned along the transport line of the substrate transport tray 100 and guides the movement of the substrate transport tray 100. As shown in Figures 21 and 22, magnets 217 are arranged on the lower guide rail 213, and the magnets 218 arranged at the bottom of the substrate transport tray 100 and the magnets 217 attract each other (arrow B in Figure 22), thereby offsetting a portion of the weight of the substrate transport tray 100.

[0057] The upper guide rail 214 is positioned along the transport line of the substrate transport tray 100 and guides the movement of the substrate transport tray 100. As shown in Figure 22, magnets 219 are arranged on the upper guide rail 214, and the magnets 220 arranged on the top of the substrate transport tray 100 and the magnets 219 attract each other (arrow C in Figure 22), thereby offsetting a portion of the weight of the substrate transport tray 100.

[0058] The substrate transport device 200 has the configuration described above. In the substrate transport device 200, the substrate transport tray 100 is lightweight, so it can be transported quickly. The substrate transport mechanism 210 may also propel the substrate transport tray 100 by a mechanism other than a linear motor, for example, by using a magnetic screw. Alternatively, the substrate transport mechanism 210 may propel the substrate transport tray 100 by rotating the guide roller 212 with a motor.

[0059] [Differentiation] A modified example of the substrate transport tray 100 will now be described. Figure 24 is a plan view of a substrate transport tray 300 according to a modified example of the present invention. As shown in the figure, the substrate transport tray 300 includes a tray frame 101, a substrate clamp 102, a substrate support stay 103, and a substrate clamp 301. The tray frame 101, substrate clamp 102, and substrate support stay 103 have the above-described configuration. The substrate clamp 301 has a configuration in which the impact mitigation mechanism 113 (see Figure 9) of the substrate clamp 102 is not included.

[0060] As shown in Figure 24, a substrate clamp 102 can be placed on the vertically downward (downward in the figure) side of the opening 104, and a substrate clamp 301 can be placed on the vertically upward (upward in the figure) side of the opening 104. Furthermore, substrate clamps 102 and 301 can be alternately placed on the left and right sides of the opening 104. Since the weight of the substrate S does not rest on the vertically upward side of the substrate transport tray 300, it is possible to use a substrate clamp 301 without the shock absorption mechanism 113. Note that both substrate clamps 301 and 102 may be placed on the vertically upward side of the opening 104. Also, only substrate clamps 301 or only substrate clamps 102 may be placed on the left and right sides of the opening 104.

[0061] [About the embodiments of the present invention] Although embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to the embodiments described above and can be modified in various ways. It is also possible to arbitrarily combine at least two of the feature parts described in the above embodiments. [Explanation of symbols]

[0062] 100, 300... PCB transport trays 101...Tray frame 102... Circuit board clamp 103... Circuit board support stay 104...Aperture 111...Base 112... Clamping mechanism 113... Impact mitigation mechanism 121...First fixing member 122...Second fixing member 123...Third fixing member 124... Circuit board support section 131...First rotating member 132...Substrate gripping part 133...First axis of rotation 134...Third rotation axis 135...Fourth axis of rotation 136...Opening / Closing Part 137...First elastic body 151...Second rotating member 152... Circuit board contact area 153...Second rotation axis 154...Second elastic body 200... Circuit board transport device 210... Circuit board transport mechanism 301... Circuit board clamp

Claims

1. A substrate having a surface, a back surface and side surfaces, and a substrate support portion that contacts the back surface of the substrate, A clamping mechanism comprising a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member, wherein the clamping mechanism takes a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion, and when an external force is applied, the first rotating member rotates around the first rotating shaft to transition from the closed state to the open state, and the first elastic body deforms to apply a reaction force to the first rotating member, An impact mitigation mechanism comprising a second rotating member, a substrate contact portion fixed to the second rotating member, a second rotating shaft supported by the base body, and a second elastic body connecting the base body and the second rotating member, wherein when the substrate contact portion is pressed from the side, the second rotating member rotates around the second rotating shaft and the second elastic body deforms to apply a reaction force to the second rotating member. A circuit board clamp equipped with the following features.

2. A substrate clamp according to claim 1, The clamping mechanism further includes a third rotation axis supported by the base and parallel to the first rotation axis, and a fourth rotation axis supported by the first rotating member and parallel to the first rotation axis. The first elastic body connects the third rotation axis and the fourth rotation axis. Circuit board clamp.

3. A substrate clamp according to claim 1, The first elastic body is a tension spring that is stretched as the first rotating member rotates. Circuit board clamp.

4. A substrate clamp according to claim 1, The second elastic body is a compression spring that is compressed as the second rotating member rotates. Circuit board clamp.

5. A substrate clamp according to any one of claims 1 to 4, The second elastic body does not deform when a force equivalent to the weight of the substrate is applied to the substrate contact portion, but deforms when a force exceeding the force equivalent to the weight of the substrate is applied to the substrate contact portion. Circuit board clamp.

6. A substrate clamp according to any one of claims 1 to 4, The substrate support portion and the substrate contact portion are made of polyimide resin. Circuit board clamp.

7. A tray frame surrounding an opening on which a substrate having a front surface, a back surface, and sides is placed, A first substrate clamp is positioned on the opening periphery of the tray frame. It is equipped with, The first substrate clamp is, A base body having a substrate support portion that contacts the aforementioned back surface, A clamping mechanism comprising a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member, wherein the clamping mechanism takes a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion, and when an external force is applied, the first rotating member rotates around the first rotating shaft to transition from the closed state to the open state, and the first elastic body deforms to apply a reaction force to the first rotating member, An impact mitigation mechanism comprising a second rotating member, a substrate contact portion fixed to the second rotating member, a second rotating shaft supported by the base body, and a second elastic body connecting the base body and the second rotating member, wherein when the substrate contact portion is pressed from the side, the second rotating member rotates around the second rotating shaft and the second elastic body deforms to apply a reaction force to the second rotating member. Equipped with PCB transport tray.

8. A substrate transport tray according to claim 7, A second substrate clamp positioned on the opening periphery of the tray frame. Furthermore, it is equipped with, The aforementioned second substrate clamp is A base body having a substrate support portion that contacts the aforementioned back surface, A clamping mechanism comprising: a first rotating member; a substrate gripping portion fixed to the first rotating member; a first rotating shaft supported by the base body; and a first elastic body connecting the base body and the first rotating member, wherein the clamping mechanism has a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion, and when an external force is applied, the first rotating member rotates around the first rotating shaft to transition from the closed state to the open state, and the first elastic body deforms to apply a reaction force to the first rotating member. Equipped with PCB transport tray.

9. A substrate transport tray according to claim 8, The first substrate clamp is positioned on the vertically downward side of the opening periphery, The second substrate clamp is positioned on the vertically upward side of the periphery of the opening. PCB transport tray.

10. PCB transport tray and A substrate transport mechanism for moving the substrate transport tray and It is equipped with, The aforementioned substrate transport tray is A tray frame surrounding an opening on which a substrate having a front surface, a back surface, and sides is placed, A first substrate clamp is positioned on the opening periphery of the tray frame. It is equipped with, The first substrate clamp is, A base body having a substrate support portion that contacts the aforementioned back surface, A clamping mechanism comprising a first rotating member, a substrate gripping portion fixed to the first rotating member, a first rotating shaft supported by the base body, and a first elastic body connecting the base body and the first rotating member, wherein the clamping mechanism takes a closed state in which the substrate gripping portion contacts or is close to the surface and clamps the substrate together with the substrate support portion, and an open state in which the substrate gripping portion is separated from the surface and does not clamp the substrate together with the substrate support portion, and when an external force is applied, the first rotating member rotates around the first rotating shaft to transition from the closed state to the open state, and the first elastic body deforms to apply a reaction force to the first rotating member, An impact mitigation mechanism comprising a second rotating member, a substrate contact portion fixed to the second rotating member, a second rotating shaft supported by the base body, and a second elastic body connecting the base body and the second rotating member, wherein when the substrate contact portion is pressed from the side, the second rotating member rotates around the second rotating shaft and the second elastic body deforms to apply a reaction force to the second rotating member. Equipped with PCB transport device.

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