Terminal inspection device

Abstract

To provide a technique of accurately detecting an abnormal state of a terminal.SOLUTION: A terminal inspection device includes a first light radiation unit, a first light detection unit, and a determination unit. The first light radiation unit radiates first light. The first light detection unit detects the first light which was radiated from the first light radiation unit and propagated through a through-hole in a terminal of a semiconductor device, according to the state of the terminal of the semiconductor device. The determination unit determines whether the state of the terminal is an abnormal state on the basis of the result of detection by the first light detection unit.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] This disclosure relates to a terminal inspection device Place .

Background Art

[0002] In the inspection of the terminals of a semiconductor device, an appearance inspection is performed to check whether there are deformations and defects in external lead terminals such as main electrode terminals and control terminals. However, in the conventional visual appearance inspection by an operator, there were variations in the judgment criteria depending on the operator's skill level and human errors such as inspection omissions. Therefore, in Patent Document 1, a technique has been proposed in which an external lead terminal is passed through the optical path of an optical sensor, and the deformation of the terminal is detected based on the light shielding state of the light by the terminal.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the prior art, there was a problem that the abnormal state of the terminal could not be accurately detected even when using an optical sensor.

[0005] Therefore, this disclosure has been made in view of the above problems, and an object thereof is to provide a technique capable of accurately detecting the abnormal state of a terminal.

Means for Solving the Problems

[0006] The terminal inspection apparatus according to this disclosure includes a first light irradiation unit that irradiates a first light, a first light detection unit that detects the first light irradiated from the first light irradiation unit and passing through a through hole provided in the terminal, according to the state of the terminal of the semiconductor device, and a determination unit that determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit. a second light irradiation unit that irradiates a second light, and a second light detection unit whose detection of the second light is obstructed by the terminal, depending on the state of the terminal. Equipped with The determination unit determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit and the detection result of the second light detection unit. ru. [Effects of the Invention]

[0007] According to this disclosure, the first light detection unit detects the first light passing through the through hole according to the state of the terminal, and the determination unit determines whether or not the state of the terminal is abnormal based on the detection result of the first light detection unit. With this configuration, the abnormal state of the terminal can be accurately detected. [Brief explanation of the drawing]

[0008] [Figure 1] This is a block diagram showing the configuration of the terminal inspection device according to Embodiment 1. [Figure 2] This is a perspective view showing the configuration of the terminal inspection device and semiconductor device according to Embodiment 1. [Figure 3] These are a cross-sectional view and a side view showing the configuration of the terminals of the semiconductor device according to Embodiment 1. [Figure 4] This is a cross-sectional view illustrating the operation of the terminal inspection device according to Embodiment 1. [Figure 5] This is a side view illustrating the operation of the terminal inspection device according to Embodiment 1. [Figure 6] This is a diagram illustrating the operation of the terminal inspection device according to Embodiment 1. [Figure 7] This is a diagram illustrating the operation of the terminal inspection device according to Embodiment 1. [Figure 8] This is a diagram illustrating the operation of the terminal inspection device according to Embodiment 1. [Figure 9] These are a cross-sectional view and a side view showing the configuration of the terminals of a semiconductor device according to Modification 1. [Figure 10] Cross-sectional view and side view showing the configuration of the terminals of the semiconductor device according to Modified Example 2. [Figure 11] Perspective view showing the configuration of the terminal inspection device and the semiconductor device according to Embodiment 2. [Figure 12] Top view for explaining the operation of the terminal inspection device according to Embodiment 2. [Figure 13] View for explaining the operation of the terminal inspection device according to Embodiment 2. [Figure 14] View for explaining the operation of the terminal inspection device according to Embodiment 2. [Figure 15] Perspective view showing the configuration of the terminal inspection device and the semiconductor device according to Embodiment 3. [Figure 16] Cross-sectional view and side view showing the configuration of the terminals of the semiconductor device according to Embodiment 3. [Figure 17] Cross-sectional view for explaining the operation of the terminal inspection device according to Embodiment 3. [Figure 18] Side view for explaining the operation of the terminal inspection device according to Embodiment 3. [Figure 19] View for explaining the operation of the terminal inspection device according to Embodiment 3. [Figure 20] View for explaining the operation of the terminal inspection device according to Embodiment 3. [Figure 21] View for explaining the operation of the terminal inspection device according to Embodiment 3. [Figure 22] Cross-sectional view for explaining the operation of the terminal inspection device according to Embodiment 3.

Mode for Carrying Out the Invention

[0009] The embodiments will be described below with reference to the attached drawings. The features described in each of the embodiments below are illustrative, and not all features are necessarily required. In addition, in the descriptions below, the same or similar reference numerals are used for similar components in multiple embodiments, and the different components are mainly described. Also, in the descriptions below, specific positions and directions such as "up" and "down" do not necessarily have to coincide with the positions and directions in actual implementation.

[0010] <Embodiment 1> Figure 1 is a block diagram showing the configuration of a terminal inspection device according to this first embodiment. The terminal inspection device in Figure 1 comprises a first photoelectric sensor 1, a second photoelectric sensor 2, a determination unit 6, and a transport unit 7.

[0011] The first photoelectric sensor 1 includes a first light irradiation unit 1a and a first light detection unit 1b, and the second photoelectric sensor 2 includes a second light irradiation unit 2a and a second light detection unit 2b.

[0012] The determination unit 6 is configured to determine whether the state of the semiconductor device's terminals is abnormal based on the detection result of the first light detection unit 1b and the detection result of the second light detection unit 2b. The determination unit 6 is implemented as a function of a CPU (Central Processing Unit), for example, by executing a program stored in a storage device such as a semiconductor memory, which is not shown.

[0013] The transport unit 7 transports semiconductor devices at a constant speed, for example. The transport unit 7 is, for example, a robot.

[0014] Figure 2 is a perspective view showing the configuration of the first photoelectric sensor 1 and the second photoelectric sensor 2 according to this embodiment 1, and the configuration of the semiconductor device 11.

[0015] As shown in Figure 2, the semiconductor device 11 has terminals 12. The terminals 12 are external lead terminals such as main electrode terminals and control terminals. The transport unit 7 transports the semiconductor device 11 in the y-axis direction so that the terminals 12 pass between the first light irradiation unit 1a and the first light detection unit 1b, and between the second light irradiation unit 2a and the second light detection unit 2b.

[0016] Figure 3 is a cross-sectional view and a side view showing the configuration of the terminal 12 of the semiconductor device 11 according to this embodiment 1. As shown in Figure 3, the terminal 12 is provided with a through hole 12a. Although the through hole 12a is not shown in Figure 2, the transport unit 7 transports the semiconductor device 11 so that the through hole 12a faces the first light irradiation unit 1a and the first light detection unit 1b. In the example of Figure 3, the shape of the through hole 12a in plan view is circular and has a certain width in cross-sectional view, but as will be described later, the shape of the through hole 12a is not limited to the shape shown in Figure 3. Also, the through hole 12a is provided at the tip of the terminal 12, but is not limited to this.

[0017] Figure 4 is a cross-sectional view of terminal 12 as seen from the y-axis direction, showing the normal and abnormal states of terminal 12, and Figure 5 is a side view of terminal 12 as seen from the x-axis direction, showing the normal and abnormal states of terminal 12. Here, the normal state refers to a state in which the inclination of terminal 12 in the x-axis direction is within a predetermined range of angles, and a state in which the inclination of terminal 12 in the y-axis direction is within a predetermined range of angles.

[0018] The first light irradiator 1a irradiates with first light 1c, and the second light irradiator 2a irradiates with second light 2c. The first light 1c and the second light 2c may be visible light, infrared light, or ultraviolet light.

[0019] The first light detection unit 1b detects the first light 1c that is irradiated from the first light irradiation unit 1a and passes through the through hole 12a provided in the terminal 12, depending on the state of the terminal 12. In this embodiment 1, as shown in Figure 4, when the state of the terminal 12 is normal, the first light detection unit 1b detects the first light 1c that is irradiated from the first light irradiation unit 1a and passes through the through hole 12a provided in the terminal 12. In this case, the detection state of the first light detection unit 1b is the OFF state, which does not detect the terminal 12.

[0020] On the other hand, if the terminal 12 is in an abnormal state, at least a portion of the first light 1c irradiated from the first light irradiation unit 1a will be absorbed or reflected by the terminal 12. Therefore, the first light detection unit 1b will either not detect the first light 1c irradiated from the first light irradiation unit 1a and passing through the through hole 12a provided in the terminal 12, or will detect the first light 1c with a relatively small light intensity. In this case, the detection state of the first light detection unit 1b will be the ON state, which detects the terminal 12.

[0021] The determination unit 6 determines whether the state of terminal 12 is abnormal based on the detection result of the first light detection unit 1b. For example, the determination unit 6 determines that the state of terminal 12 is normal if the amount of first light 1c detected by the first light detection unit 1b is greater than or equal to a threshold, that is, if the detection state of the first light detection unit 1b is OFF. On the other hand, the determination unit 6 determines that the state of terminal 12 is abnormal if the amount of first light 1c detected by the first light detection unit 1b is less than a threshold, that is, if the detection state of the first light detection unit 1b is ON.

[0022] In this case, if the abnormality determination is based solely on the detection result of the first light detection unit 1b, it would incorrectly determine that the state of terminal 12 is normal when an abnormality occurs in which terminal 12 itself is missing or absent. Therefore, in this embodiment 1, the determination unit 6 determines whether or not the state of terminal 12 is abnormal, based not only on the detection result of the first light detection unit 1b but also on the detection result of the second light detection unit 2b. Next, this will be explained.

[0023] Figure 6 shows the normal state of terminal 12, and Figure 7 shows the abnormal state of terminal 12. The normal state, as used here, is, for example, a state in which terminal 12 is present without any missing components.

[0024] The second light detection unit 2b's detection of the second light 2c is hindered by terminal 12, depending on the state of terminal 12. As shown in Figure 6, when terminal 12 is in a normal state, the second light detection unit 2b's detection of the second light 2c is hindered by terminal 12. Therefore, the second light detection unit 2b either does not detect the second light 2c irradiated from the second light irradiation unit 2a, or detects the second light 2c with a relatively low light intensity. In this case, the detection state of the second light detection unit 2b becomes the ON state, which detects terminal 12.

[0025] On the other hand, if the state of terminal 12 is abnormal, as shown in the middle terminal 12 of Figure 7, the second light detection unit 2b detects the second light 2c emitted from the second light irradiation unit 2a. In this case, the detection state of the second light detection unit 2b becomes the OFF state, which does not detect terminal 12.

[0026] The determination unit 6 determines whether the state of terminal 12 is abnormal or not based on the detection result of the first light detection unit 1b and the detection result of the second light detection unit 2b.

[0027] For example, as shown in Figure 6, the determination unit 6 determines that the state of terminal 12 is normal when the detection state of the first light detection unit 1b is OFF and the detection state of the second light detection unit 2b is ON. In other words, the determination unit 6 determines that terminal 12 is not missing and that the inclination of terminal 12 in the x-axis and y-axis directions is within a predetermined range of angles. On the other hand, as shown in Figure 7, for example, the determination unit 6 determines that the state of terminal 12 is abnormal when the detection state of the first light detection unit 1b is OFF and the detection state of the second light detection unit 2b is OFF.

[0028] In this way, the determination unit 6 can determine whether the state of terminal 12 is abnormal or not based on the detection result of the first light detection unit 1b and the detection result of the second light detection unit 2b, thereby determining various abnormalities of terminal 12.

[0029] In this embodiment 1, the determination unit 6 calculates a first total time during a predetermined period of transport of the semiconductor device 11 in which the first light 1c is not detected by the first light detection unit 1b, and a second total time during which the second light 2c is not detected by the second light detection unit 2b. In other words, the determination unit 6 calculates a first total time during a predetermined period of transport of the semiconductor device 11 in which the terminal 12 is detected by the first light detection unit 1b in an ON state, and a second total time during which the terminal 12 is detected by the second light detection unit 2b in an ON state.

[0030] The determination unit 6 then determines whether the state of terminal 12 is abnormal based on the first total time and the second total time. Here, as an example, the determination unit 6 determines that the state of terminal 12 is abnormal if the first total time is less than the first threshold, if the first total time is greater than the second threshold which is greater than the first threshold, or if there is no second total time. The first threshold and the second threshold may be constant values, or they may be values ​​obtained by multiplying the second total time of the ON state in which terminal 12 is detected by the second light detection unit 2b by a certain percentage. For example, the first threshold may be a value obtained by multiplying the second total time by 50%, and the second threshold may be a value obtained by multiplying the second total time by a value greater than 50%.

[0031] Figure 8 shows an abnormal state of terminal 12 that is different from the abnormal state in Figure 7. In the abnormal state in Figure 8, terminal 12 is slightly deformed, yet the detection state of the first light detection unit 1b is almost OFF, just like in the normal state.

[0032] Figures 6, 7, and 8 show the time-dependent changes in the detection state of the first photodetector 1b and the second photodetector 2b during a predetermined period of transport of the semiconductor device 11. The predetermined period of transport of the semiconductor device 11 is, for example, the period during which the terminal 12 is assumed to pass between the second light irradiation unit 2a and the second photodetector 2b. The period other than this is a mask period 9 during which neither the first photodetector 1b nor the second photodetector 2b performs detection.

[0033] Regarding the first total time in which terminal 12 is detected by the first light detection unit 1b in the ON state during the predetermined period mentioned above, i.e., the period other than the mask period 9, the first total time in the normal state shown in Figure 6 is longer than the first total time in the abnormal state shown in Figure 8. In this embodiment 1, the determination unit 6 determines that the state of terminal 12 is abnormal when the first total time is less than the first threshold. Therefore, by appropriately setting the first threshold, the state in Figure 8 can be determined to be abnormal.

[0034] Furthermore, regarding the first total time in which the terminal 12 is detected by the first light detection unit 1b in the ON state during periods other than the mask period 9, the first total time in the normal state shown in Figure 6 is shorter than the first total time in the abnormal state shown in Figures 4 and 5. In this embodiment 1, the determination unit 6 determines that the state of the terminal 12 is abnormal when the first total time is greater than the second threshold. Therefore, by appropriately setting the second threshold, the states in Figures 4 and 5 can be determined to be abnormal. This abnormal state will be explained again in embodiment 3.

[0035] Furthermore, in the abnormal state shown in Figure 7, there is no second total time during periods other than the mask period 9 in which the terminal 12 is detected by the second light detection unit 2b in the ON state. In this embodiment 1, the determination unit 6 determines that the state of the terminal 12 is abnormal when there is no second total time, and therefore can determine that the state in Figure 7 is an abnormal state.

[0036] On the other hand, the determination unit 6 determines that the state of terminal 12 is normal if the first total time is between the first threshold and the second threshold, and there is a second total time. As described above, in this embodiment 1, it is possible to determine not only the abnormal states in Figures 4, 5 and 7, but also the abnormal state in Figure 8.

[0037] <Summary of Embodiment 1> According to the terminal inspection device of this embodiment 1, the first light detection unit 1b detects the first light 1c passing through the through hole 12a according to the state of the terminal 12, and the determination unit 6 determines whether or not the state of the terminal 12 is abnormal based on the detection result of the first light detection unit 1b. With this configuration, the chances of missing confirmation of whether or not the state of the terminal 12 is abnormal can be reduced compared to visual determination, so that the abnormal state of the terminal 12 can be accurately detected. Furthermore, it is expected that setting new conditions and maintenance after the introduction of inspection will be easier than with image determination.

[0038] In this embodiment 1, the second light detection unit 2b determines whether the detection of the second light 2c is obstructed by the terminal 12, depending on the state of the terminal 12. The determination unit 6 then determines whether the state of the terminal 12 is abnormal based on the detection result of the first light detection unit 1b and the detection result of the second light detection unit 2b. With this configuration, the abnormal state shown in Figure 7 can be further determined, so the abnormal state of the terminal 12 can be detected more accurately.

[0039] In this embodiment 1, the determination unit 6 determines whether the state of terminal 12 is abnormal based on a first total time during which the first photodetector 1b is ON and a second total time during which the second photodetector 2b is ON, within a predetermined period during the transport of the semiconductor device 11. The determination unit 6 then determines that the state of terminal 12 is abnormal if the first total time is less than a first threshold, if the first total time is greater than a second threshold, or if there is no second total time. With this configuration, the abnormal states shown in Figures 4, 5, 7, and 8 can be determined, and the abnormal state of terminal 12 can be detected more accurately.

[0040] In this embodiment 1, a terminal inspection device equipped with a second light irradiation unit 2a and a second light detection unit 2b was described. However, if only the abnormal condition shown in Figures 4 and 5 needs to be determined, the second light irradiation unit 2a and the second light detection unit 2b are not essential.

[0041] <Example 1> Figure 9 shows a cross-sectional view and a side view of the through-hole 12a of the terminal 12 according to this modified example 1. As shown in Figure 9, the shape of the through-hole 12a in the cross-sectional view may have a tapered shape from the first surface 12b to the second surface 12c of the terminal 12. With such a configuration, it is possible to adjust the allowable range of inclination of the terminal 12 in the x-axis direction, which defines the normal state.

[0042] <Modification 2> Figure 10 shows a cross-sectional view and a side view of the through-hole 12a of the terminal 12 according to this modified example 2. As shown in Figure 10, the shape of the through-hole 12a in cross-sectional view has a tapered shape that narrows from the first surface 12b of the terminal 12 to the intermediate portion 12d between the first surface 12b and the second surface 12c, and may have a constant width from the intermediate portion 12d to the second surface 12c. With this configuration, similar to modified example 1, it is possible to adjust the allowable range of inclination of the terminal 12 in the x-axis direction, which defines the normal state. Furthermore, with this configuration, the strength of the terminal 12 can be ensured compared to modified example 1.

[0043] <Variation 3> In Embodiment 1, the determination unit 6 determined whether the state of terminal 12 was abnormal based on a first total time during which the first photodetector 1b was ON and a second total time during which the second photodetector 2b was ON, within a predetermined period during the transport of the semiconductor device 11. However, the total time during which the device was OFF may be used instead of the total time during which it was ON. Alternatively, the determination of whether the state of terminal 12 was abnormal may be based on the sum of the first total time and the second total time. Note that the above modifications may be applied to embodiments described later.

[0044] <Embodiment 2> The configuration of the terminal inspection device according to this second embodiment is the same as the configuration of the first embodiment, with the addition of a third photoelectric sensor 3 including a third light irradiation unit 3a and a third light detection unit 3b, and a fourth photoelectric sensor 4 including a fourth light irradiation unit 4a and a fourth light detection unit 4b.

[0045] Figure 11 is a perspective view showing the configuration of the first photoelectric sensor 1, the second photoelectric sensor 2, the third photoelectric sensor 3, and the fourth photoelectric sensor 4 according to this second embodiment, as well as the configuration of the semiconductor device 11. Figure 12 is a top view showing these configurations.

[0046] The third light irradiator 3a irradiates a third light 3c that intersects with the first light 1c in a plan view, and the fourth light irradiator 4a irradiates a fourth light 4c that intersects with the first light 1c in a plan view. The third light 3c and the fourth light 4c may be visible light, infrared light, or ultraviolet light.

[0047] The third light detection unit 3b detects the third light 3c emitted from the third light irradiation unit 3a and passing through the first side (+x side) of the terminal 12, depending on the state of the terminal 12. In this embodiment 2, the third light detection unit 3b detects the third light 3c when the state of the terminal 12 is normal. The normal state here refers to a state in which the terminal 12 is located on the -x side of a predetermined design position.

[0048] The fourth light detection unit 4b detects the fourth light 4c emitted from the fourth light irradiation unit 4a and passing through the second side (-x side) of the terminal 12, depending on the state of the terminal 12. In this embodiment 2, the fourth light detection unit 4b detects the fourth light 4c when the state of the terminal 12 is normal. The normal state here refers to a state in which the terminal 12 is located on the +x side of a predetermined design position.

[0049] Figures 13 and 14 are diagrams illustrating the determination made by the determination unit 6 according to this second embodiment. The determination unit 6 determines whether the state of terminal 12 is abnormal or not based on the detection result of the first light detection unit 1b, the detection result of the second light detection unit 2b, the detection result of the third light detection unit 3b, and the detection result of the fourth light detection unit 4b.

[0050] For example, the determination unit 6 determines that the state of terminal 12 is normal if the first total time is less than the first threshold, the first total time is greater than the second threshold, or there is no second total time, and both the detection state of the third light detection unit 3b and the fourth light detection unit 4b are in the OFF state. For example, the determination unit 6 determines that the state of terminal 12 is abnormal if at least one of the detection states of the third light detection unit 3b and the fourth light detection unit 4b is in the ON state, regardless of the first total time and the second total time. In this specification, for example, at least one of A, B, C, ..., and Z means any one of all combinations obtained by selecting one or more from the groups A, B, C, ..., and Z.

[0051] Thus, in this embodiment 2, it is possible to determine abnormal conditions not only for the abnormal conditions determined in embodiment 1, but also for the positional misalignment of the terminal 12 in the x-axis direction in a plan view.

[0052] Although not shown in Figures 13 and 14, the directions of travel of the third light 3c and the fourth light 4c are slightly offset from the transport direction of the semiconductor device 11 so that positional deviations in the x-axis direction can be detected for terminals 12 passing through the first photoelectric sensor 1 and the second photoelectric sensor 2. In this case, the determination unit 6 may determine whether there is an OFF state during a predetermined period of transport of the semiconductor device 11 in which the third light 3c is not detected by the third light detection unit 3b, and whether there is an OFF state during which the fourth light 4c is not detected by the fourth light detection unit 4b. The predetermined period of transport of the semiconductor device 11 referred to here is substantially the same as the predetermined period described in Embodiment 1, for example.

[0053] Furthermore, the determination unit 6 may determine that the state of terminal 12 is abnormal if there is at least one of the following periods: a time when the third light 3c is not detected by the third light detection unit 3b, and a time when the fourth light 4c is not detected by the fourth light detection unit 4b. With this configuration, as shown in Figure 14, it is possible to identify which of the multiple terminals 12 has a misalignment in the x-axis direction. In addition, it is possible to suppress false determinations caused by the third light detection unit 3b and the fourth light detection unit 4b detecting light-blocking objects other than terminal 12.

[0054] <Summary of Embodiment 2> According to the terminal inspection device of this second embodiment, the device determines whether the state of terminal 12 is abnormal based on the detection result of the first light detection unit 1b, the detection result of the second light detection unit 2b, the detection result of the third light detection unit 3b, and the detection result of the fourth light detection unit 4b. With this configuration, the abnormal state of terminal 12 can be detected more accurately.

[0055] Furthermore, according to this second embodiment, the determination unit 6 determines that the state of terminal 12 is abnormal if, within a predetermined period during the transport of the semiconductor device 11, there is at least one of the following periods: a time when the third light 3c is not detected by the third light detection unit 3b, and a time when the fourth light 4c is not detected by the fourth light detection unit 4b. With this configuration, it is possible to identify which of the multiple terminals 12 has a misalignment in the x-axis direction, and to suppress false determinations due to the detection of light-shielding objects other than terminal 12.

[0056] <Embodiment 3> Figure 15 is a perspective view showing the configuration of the first photoelectric sensor 1 and the second photoelectric sensor 2 according to this third embodiment, and the configuration of the semiconductor device 11. As shown in Figure 15, the terminal inspection device according to this third embodiment comprises a plurality of first light irradiation units 1a and a plurality of first light detection units 1b. Hereinafter, a configuration in which two first light irradiation units 1a are provided flanking one second light irradiation unit 2a, and two first light detection units 1b are provided flanking one second light detection unit 2b will be described. However, the number and arrangement of the plurality of first photoelectric sensors 1 (i.e., the plurality of first light irradiation units 1a and the plurality of first light detection units 1b) are not limited to this.

[0057] Figure 16 is a cross-sectional view and a side view showing the terminal 12 according to this third embodiment. As shown in Figure 16, in this third embodiment, the terminal 12 is provided with multiple through holes 12a. The following description will focus on a configuration in which one through hole 12a is provided at the tip of the terminal 12 and another through hole 12a is provided at the base of the terminal 12. However, the number and arrangement of the multiple through holes 12a are not limited to those shown in Figure 16, as long as they correspond to the number and arrangement of the multiple first photoelectric sensors 1.

[0058] Figure 17 is a cross-sectional view taken from the y-axis direction showing the normal and abnormal states of terminal 12, and Figure 18 is a side view taken from the x-axis direction showing the normal and abnormal states of terminal 12. Here, the normal state refers to a state in which, for example, the inclination of each part of terminal 12 where the through hole 12a is provided is within a predetermined range of angles in the x-axis direction, and the inclination of each part in the y-axis direction is within a predetermined range of angles.

[0059] When terminal 12 is in a normal state, the multiple first light detection units 1b each detect the multiple first light beams 1c that are irradiated from the multiple first light irradiation units 1a and pass through the multiple through holes 12a provided in terminal 12. In this case, the detection state of the multiple first light detection units 1b will be OFF, meaning that terminal 12 is not detected.

[0060] On the other hand, if the state of terminal 12 is abnormal, one or more first light detection units 1b will either not detect the first light 1c irradiated from the corresponding first light irradiation unit 1a and passing through the corresponding through hole 12a, or will detect a first light 1c with a relatively low light intensity. In this case, the detection state of one or more first light detection units 1b will be ON, which detects terminal 12.

[0061] The second light irradiation unit 2a and the second light detection unit 2b are the same as those described in Embodiment 1.

[0062] The determination unit 6 determines whether the state of terminal 12 is abnormal or not based on the detection results of the multiple first light detection units 1b and the detection results of the second light detection unit 2b.

[0063] Figure 19 shows the normal state of terminal 12, while Figures 20 and 21 show the abnormal state of terminal 12. Figure 22 is a cross-sectional view of the abnormal state shown in Figure 21, viewed from the y-axis direction.

[0064] For example, in Figure 19, the first total ON time of each of the multiple first light detection units 1b is between a first threshold and a second threshold, and the second light detection unit 2b has a second total ON time, so the determination unit 6 determines that the state of terminal 12 is normal. For example, in Figure 20, the second total ON time of the second light detection unit 2b is not present, so the determination unit 6 determines that the state of terminal 12 is abnormal. For example, in Figure 21, the first total ON time of any of the multiple first light detection units 1b is above the second threshold, so the determination unit 6 determines that the state of terminal 12 is abnormal.

[0065] <Summary of Embodiment 3> According to the terminal inspection device of this embodiment 3 described above, the device determines whether the state of the terminal 12 is abnormal based on the detection results of the multiple first light detection units 1b and the detection results of the second light detection unit 2b. With this configuration, it is possible to determine whether there is an abnormality such as partial deformation of the terminal 12, and thus the abnormal state of the terminal 12 can be detected more accurately. Note that the configuration of this embodiment 3 may be combined with the configuration of embodiment 2.

[0066] Furthermore, it is possible to freely combine each embodiment and each variation, and to modify or omit each embodiment and each variation as appropriate.

[0067] The various aspects of this disclosure are summarized below as an appendix.

[0068] (Note 1) A first light irradiation unit that irradiates with first light, A first light detection unit detects the first light emitted from the first light irradiation unit and passing through a through hole provided in the terminal, depending on the state of the terminal of the semiconductor device. A determination unit that determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit. A terminal inspection device equipped with the following features.

[0069] (Note 2) A second light irradiation unit that irradiates with a second light, Depending on the state of the terminal, the detection of the second light is obstructed by the terminal in the second light detection unit. Furthermore, The terminal inspection apparatus according to Appendix 1, wherein the determination unit determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit and the detection result of the second light detection unit.

[0070] (Note 3) The system further comprises a transport unit for transporting the semiconductor device, The terminal inspection apparatus as described in Appendix 2, wherein the determination unit determines that the state of the terminal is abnormal based on a first total time during a predetermined period of time during transport of the semiconductor device in which the first light is not detected by the first light detection unit and a second total time during which the second light is not detected by the second light detection unit.

[0071] (Note 4) The terminal inspection device according to Appendix 3, which determines that the state of the terminal is abnormal when the first total time is less than a first threshold, when the first total time is greater than a second threshold which is greater than the first threshold, or when there is no second total time.

[0072] (Note 5) The terminal inspection device according to any one of the appendices 1 to 4, wherein the shape of the through hole in a cross-sectional view is tapered from the first surface to the second surface of the terminal.

[0073] (Note 6) The terminal inspection device according to any one of the appendices 1 to 4, wherein the shape of the through hole in a cross-sectional view is tapered from the first surface of the terminal to an intermediate portion between the first surface and the second surface, and has a constant width from the intermediate portion to the second surface.

[0074] (Note 7) A third light irradiating unit that irradiates a third light that intersects with the first light in a plan view, A third light detection unit detects the third light emitted from the third light irradiation unit and passing through the first side of the terminal, depending on the state of the terminal. A fourth light irradiating unit that irradiates a fourth light that intersects with the first light in a plan view, A fourth light detection unit detects the fourth light emitted from the fourth light irradiation unit and passing through the second side of the terminal opposite to the first side, depending on the state of the terminal. Furthermore, The terminal inspection apparatus as described in Appendix 2, wherein the determination unit determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit, the detection result of the second light detection unit, the detection result of the third light detection unit, and the detection result of the fourth light detection unit.

[0075] (Note 8) The system further comprises a transport unit for transporting the semiconductor device, The terminal inspection apparatus according to Appendix 7, wherein the determination unit determines that the state of the terminal is abnormal if, during a predetermined period of time while the semiconductor device is being transported, there is at least one of the following periods: a time when the third light is not detected by the third light detection unit and a time when the fourth light is not detected by the fourth light detection unit.

[0076] (Note 9) The multiple first light detection units each detect, according to the state of the terminal, the multiple first light beams irradiated from the multiple first light irradiation units and passing through the multiple through holes provided in the terminal. The terminal inspection apparatus according to Appendix 2 or Appendix 7, wherein the determination unit determines whether the state of the terminal is abnormal based on the detection results of the plurality of first light detection units and the detection results of the second light detection unit.

[0077] (Note 10) A semiconductor device in which an abnormality in the terminals has been determined by a terminal inspection device described in any one of the items from Appendix 1 to Appendix 9. [Explanation of Symbols]

[0078] 1a first light irradiation section, 1b first light detection section, 1c first light, 2a second light irradiation section, 2b second light detection section, 2c second light, 3a third light irradiation section, 3b third light detection section, 3c third light, 4a fourth light irradiation section, 4b fourth light detection section, 4c fourth light, 6 judgment section, 7 transport section, 11 semiconductor device, 12 terminal, 12a Through hole, 12b 1st side, 12c 2nd side, 12d middle part.

Claims

1. A first light irradiation unit that irradiates with first light, A first light detection unit detects the first light emitted from the first light irradiation unit and passing through a through hole provided in the terminal, depending on the state of the terminal of the semiconductor device. A determination unit that determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit, A second light irradiation unit that irradiates with a second light, Depending on the state of the terminal, the detection of the second light is obstructed by the terminal in the second light detection unit. Equipped with, The terminal inspection device includes a determination unit which determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit and the detection result of the second light detection unit.

2. A terminal inspection device according to claim 1, The system further comprises a transport unit for transporting the semiconductor device, Terminal inspection device, wherein the determination unit determines that the state of the terminal is abnormal based on a first total time during a predetermined period of time during transport of the semiconductor device in which the first light is not detected by the first light detection unit and a second total time during which the second light is not detected by the second light detection unit.

3. A terminal inspection device according to claim 2, A terminal inspection device that determines that the state of the terminal is abnormal if the first total time is less than a first threshold, if the first total time is greater than a second threshold which is greater than the first threshold, or if there is no second total time.

4. A terminal inspection device according to claim 1, A terminal inspection device wherein the shape of the through hole in a cross-sectional view has a tapered shape from the first surface to the second surface of the terminal.

5. A terminal inspection device according to claim 1, A terminal inspection device wherein the shape of the through hole in cross-sectional view has a tapered shape that narrows from the first surface of the terminal to the intermediate portion between the first surface and the second surface, and has a constant width from the intermediate portion to the second surface.

6. A terminal inspection device according to claim 1, A third light irradiating unit that irradiates a third light that intersects with the first light in a plan view, A third light detection unit detects the third light emitted from the third light irradiation unit and passing through the first side of the terminal, depending on the state of the terminal. A fourth light irradiating unit that irradiates a fourth light that intersects with the first light in a plan view, A fourth light detection unit detects the fourth light emitted from the fourth light irradiation unit and passing through the second side of the terminal opposite to the first side, depending on the state of the terminal. Furthermore, The terminal inspection device includes a determination unit which determines whether the state of the terminal is abnormal based on the detection result of the first light detection unit, the detection result of the second light detection unit, the detection result of the third light detection unit, and the detection result of the fourth light detection unit.

7. A terminal inspection device according to claim 6, The system further comprises a transport unit for transporting the semiconductor device, Terminal inspection device, wherein the determination unit determines that the state of the terminal is abnormal if, during a predetermined period of time while the semiconductor device is being transported, there is at least one of the following periods: a time when the third light is not detected by the third light detection unit and a time when the fourth light is not detected by the fourth light detection unit.

8. A terminal inspection device according to claim 2, The multiple first light detection units each detect, according to the state of the terminal, the multiple first light beams irradiated from the multiple first light irradiation units and passing through the multiple through holes provided in the terminal. The terminal inspection device includes a determination unit which determines whether the state of the terminal is abnormal based on the detection results of the plurality of first light detection units and the detection results of the second light detection unit.

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