Liquid handling device, sensor device using the same, thermal switch, and liquid handling method

Abstract

To provide a liquid operation technology including a liquid transportation from an arbitrary direction or to an arbitrary direction.SOLUTION: A liquid operation device includes a micro lattice structure which includes a conductive structure having a periodic structure of three-dimensionally arranged micro cavities, and a dielectric layer covering the structure. It is possible to operate loading of a liquid into the micro lattice structure and unloading of the liquid by selectively controlling application and release of a voltage between the structure and the liquid.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a liquid operation device that operates a liquid in an arbitrary direction using a micro-periodic structure, a sensor device, a thermal switch, and a liquid operation method using the same.

Background Art

[0002] Currently, the development of IoT (Internet of Things) devices that connect various physical objects and cyber spaces is actively underway. For example, there is a need for IoT-type devices that monitor the states of various liquids such as environmental water, sewage, industrially related liquids, and human body fluids, and efficient liquid sampling with a simple configuration is required.

[0003] Techniques for monitoring phosphates in seawater using a microfluidic device composed of minute flow channels (see, for example, Non-Patent Document 1), and techniques for sucking and discharging a liquid by electrocapillary pressure using microchannels arranged in a honeycomb shape (see, for example, Non-Patent Document 2) have been demonstrated. A technique for sucking a liquid by applying a voltage between a nanostructured porous gold (Au) structure and the liquid has also been proposed (see, for example, Non-Patent Document 3).

Prior Art Documents

Non-Patent Documents

[0004]

Non-Patent Document 1

[0005] The monitoring device described in Non-Patent Document 1 uses a mechanical pump and requires complete sealing of the flow path except for the inlet and outlet. If the flow path becomes clogged, the system will cease to function. Non-Patent Document 2 has a configuration in which linear microchannels are arranged in a honeycomb shape, and liquid can only be transported in the direction in which the microchannels extend. Non-Patent Document 3 uses a nanoscale random metal porous material, and it is difficult to form an insulating coating inside the porous material. Therefore, even if liquid can be drawn into the porous material, the drawn liquid cannot be discharged.

[0006] One objective of the present invention is to provide a liquid handling technique that includes the transport of liquids from or to any direction. [Means for solving the problem]

[0007] In one embodiment, the liquid handling device is A microlattice structure having a conductive structure having a periodic structure of microcavities arranged in three dimensions, and a dielectric layer covering the structure. The system is equipped with a mechanism that allows for the selective control of the application and release of voltage between the structure and the liquid, thereby enabling the manipulation of the intake and discharge of the liquid into the microlattice structure. [Effects of the Invention]

[0008] A liquid handling technology is provided that includes the transport of liquids from or to any direction. This technology enables operations such as liquid sampling, transfer, fusion, and separation, as well as applications to various sensor devices, thermal switches, and the like. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram showing the basic configuration of the liquid handling device according to the first embodiment. [Figure 2] This figure shows an example of a microlattice structure used in liquid handling devices. [Figure 3] This figure shows a metal coating applied by sputtering. [Figure 4] This figure shows a metal coating applied by electroless plating. [Figure 5] This figure shows the experimental setup and measurement results for contact angle change using EWOD (electrowetting-on-dielectric). [Figure 6] This is a diagram illustrating a first example configuration for droplet absorption using EWOD. [Figure 7] This is a snapshot of droplet absorption immediately after voltage application in the configuration shown in Figure 6. [Figure 8] This is a diagram illustrating a second configuration example of droplet absorption using EWOD. [Figure 9] This is a snapshot of droplet absorption immediately after voltage application in the configuration shown in Figure 8. [Figure 10] This is a snapshot of droplet discharge immediately after the voltage is turned off in the configuration shown in Figure 8. [Figure 11] It is a diagram of a third configuration example for generating a microdroplet array using EWOD. [Figure 12] It is a schematic diagram showing the basic configuration of the liquid operation device of the second embodiment. [Figure 13A] It is a schematic diagram of one-dimensional transport using the liquid operation device of FIG. 12. [Figure 13B] It is a schematic diagram of two-dimensional transport using the liquid operation device of FIG. 12. [Figure 13C] It is a schematic diagram of three-dimensional transport using the liquid operation device of FIG. 12. [Figure 14] It is a schematic diagram of droplet fusion by a liquid operation device. [Figure 15] It is a schematic diagram of droplet splitting by a liquid operation device. [Figure 16] It is a schematic diagram showing an example of a sensor device using a liquid operation device. [Figure 17] It is a schematic diagram showing another example of a sensor device using a liquid operation device. [Figure 18] It is a schematic diagram showing an example of a biosensor using a liquid operation device. [Figure 19] It is a diagram showing an example of liquid operation in the biosensor of FIG. 18. [Figure 20] It is a schematic diagram showing another example of a biosensor using a liquid operation device. [Figure 21] It is a diagram showing an example of liquid operation in the biosensor of FIG. 20. [Figure 22] It is a diagram showing an application example of the liquid operation device to a thermal switch.

Embodiments for Carrying Out the Invention

[0010] Embodiments of the present invention will be described below with reference to the drawings. The embodiments described below are examples for concretizing the technical concept of the invention and do not limit the present invention to the configurations described below. In the drawings, the same reference numerals are used for identical components, and redundant descriptions may be omitted. The sizes and positional relationships of the components shown in the drawings may be exaggerated to facilitate understanding of the invention.

[0011] <First Embodiment> Figure 1 is a schematic diagram showing the basic configuration of the liquid handling device 100 of the first embodiment. The liquid handling device 100 manipulates liquids in any direction using EWOD. Liquid manipulation includes sampling, aspiration, transfer, fusion, mixing, splitting, discharge, and other processing of liquids. To achieve this, a microlattice structure 10 having a periodic structure of three-dimensional microcavities is used.

[0012] Figure 1(a) is a schematic diagram of a microlattice structure 10, and (b) is a schematic diagram of a liquid handling device 100 utilizing EWOD. The microlattice structure 10 is formed of a conductive structure 11A or 11B (hereinafter collectively referred to as "structure 11" as appropriate) having a periodic structure of three-dimensionally arranged microcavities 115, and a dielectric layer 14 covering the structure 11. In the example of Figure 1, the microcavities 115 are formed of polyhedra composed of micropillars 111, but the example is not limited to this, and microcavities with periodic structures such as gyroids, face-centered lattices, body-centered lattices, and hexagonal lattices may be formed. When the size of the periodic structure microcavities 115 is on the order of millimeters, the effect of gravity becomes large, making it difficult to draw liquid in any direction. Making the microcavities 115 finer increases the suction force, but the effect of viscosity becomes larger, making discharge difficult. From this, the size or diameter of the microcavity is on the order of microns, preferably several tens of micrometers to several hundred micrometers.

[0013] The conductive structure 11 may contain non-conductive material in part, provided that EWOD can be realized. For example, in the microlattice structure 10A, structure 11A is formed of a skeleton 12 and a conductive layer 13 covering the skeleton 12, and the skeleton 12 may be made of a non-conductive material such as resin, ceramic, or glass. A dielectric layer 14 is formed covering the conductive layer 13 on the surface of the skeleton 12. On the other hand, as in the microlattice structure 10B, the entire structure 11B may be made of a conductive material. In this case, a dielectric layer 14 is formed covering the surface of structure 11B. In either case, EWOD technology can be utilized by applying a voltage to the microlattice structure 10A or 10B.

[0014] EWOD is a technique that changes the wettability of a substrate to a liquid by applying a voltage between the substrate and a liquid covered with an insulating film. As shown in Figure 1(b), one terminal of the power supply 15 is connected to the conductive structure 11 of the microlattice structure 10, and the other terminal is connected to the liquid 120, and a voltage is applied, which changes the wettability of the microlattice structure 10 to the liquid 120. By increasing the wettability, the liquid 120 can be drawn into the three-dimensional microcavity 115. The liquid 120 taken into the microlattice structure 10 by the application of voltage may be pure water, aqueous solution, ionic liquid, liquid metal, or certain alcohols such as ethylene glycol (dihydric alcohol) or glycerin (trihydric alcohol). By releasing the voltage, the liquid 120 is discharged from the microcavity 115. The wettability to the liquid 120 can be changed by turning the voltage on and off. When the initial state is one in which a voltage is applied, and the liquid is introduced into the microlattice structure 10 by releasing the applied voltage, the liquid may be an oil or other nonpolar substance.

[0015] In known configurations (see Non-Patent Document 2), liquid can only be transported in a specific direction in which the microchannels extend. In contrast, the liquid handling device 100 uses a microlattice structure 10 having a three-dimensional arrangement of microcavities, so it can absorb liquid 120 from any direction and discharge liquid 120 in any direction.

[0016] <Fabrication of microlattice structures> Figure 2 shows an example of the fabrication of a microlattice structure 10 used in a liquid handling device 100. In this example, the framework 12 of the microlattice structure 10 is fabricated using a 3D printer. Specifically, a stereolithography 3D printer is used to fabricate a three-dimensional periodic framework 12 using a photocurable resin. Figure 2(a) is an image of the actually fabricated framework 12, (b) is a schematic diagram of the framework 12, and (c) is a schematic diagram of the unit structures 110 that constitute the framework 12.

[0017] The framework 12 is made of acrylic resin and includes a 5×5×3 unit structure 110. The dimensions (W×L×H) of the unit structure 110 are 1mm×1mm×1mm or less, and a micron-order microcavity 115 is formed inside the unit structure 110. The width t of the micropillars 111 that make up the microcavity 115 is 0.2mm. By covering the framework 12 with a conductive layer 13, a conductive structure 11A (see Figure 1(a)) is obtained. Alternatively, a structure 11B made entirely of conductors may be fabricated using a metal 3D printer.

[0018] Figure 3 shows metal coating by sputtering, and Figure 4 shows metal coating by electroless plating. A conductive structure 11A is obtained by applying a metal coating to the resin skeleton 12 prepared in Figure 2. Any coating method can be used as long as it can impart conductivity to the skeleton 12, but here, sputtering or electroless plating, which can form a film at a temperature lower than the softening temperature of the resin, is used.

[0019] Figure 3(a) is an optical image of the structure 11A after sputtering, and (b) is a scanning electron microscope (SEM) image. A chromium (Cr) and gold (Au) target is used to form a Cr / Au thin film on the framework 12. The underlying Cr film functions as an adhesion layer to the framework 12. The total thickness of the Cr / Au thin film is approximately 75 nm. The gloss of the Au is observed in the optical image (a). Electrical conductivity of the Cr / Au thin film was confirmed with a tester.

[0020] Figure 4(a) is an optical image of the structure 11A after electroless plating, and (b) is an SEM image. A Ni thin film with a thickness of approximately 300 nm is formed on the surface of the framework 12 by electroless nickel (Ni) plating. An Au electroplating film may be laminated on top of the Ni electroless plating film. Electrical conductivity of the Ni thin film was confirmed with a tester. The material of the conductive layer 13 is not limited to Au and Ni, but other good conductors such as Ag, Cu, Pt, Pd, Al, In, Ti, Co, Ta, Ir, V, and W may be used. Alternatively, transparent conductive films such as indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), and indium gallium zinc oxide (IGZO) may be used.

[0021] A dielectric layer 14 is formed on the surface of the metal coating shown in Figure 3 or Figure 4. The dielectric layer 14 can be formed from silicone, polyvinyl chloride, polyparaxylylene (known as "Parylene®"), etc. When forming a dielectric layer 14 of silicone or polyvinyl chloride, an insulating resin film with a thickness of approximately 10 μm is formed by immersing the structure 11A in an organic solvent or sol containing silicone or polyvinyl chloride and then withdrawing it. A dielectric layer 14 of polyparaxylylene is formed to a thickness of 1 μm to 10 μm by chemical vapor deposition. The type of dielectric layer 14 is not limited to silicone, polyvinyl chloride, or polyparaxylylene, and other insulating polymer thin films may be formed. A fluorine-based polymer thin film with higher water repellency than polyparaxylylene may be formed on the polyparaxylylene thin film to facilitate the discharge of liquid when the voltage is released. Alternatively, mineral oil or silicone oil may be pre-filled in the microcavity 115 to provide lubrication. This results in a microlattice structure 10.

[0022] Liquid aspiration by EWOD is confirmed using a sample in which a dielectric layer 14 of polyparaxylylene is formed on the surface of a conductive structure 11. To prevent leakage current when liquid comes into contact, the thickness of the polyparaxylylene dielectric layer 14 is increased from 8 μm to 9 μm. Young-Lippmann equation cosθ = cosθ 0 + (ε 0 ε) r / 2γt)V 2 Therefore, by reducing the thickness t of the dielectric layer 14, the applied voltage V can be reduced. Here, θ is the contact angle after the change due to EWOD, θ0 is the static contact angle on the dielectric layer 14, ε0 is the permittivity of vacuum, ε r γ is the relative permittivity of the dielectric, and γ is the surface tension. Depending on the type of dielectric used, the dielectric layer 14 may be thinned within the range that does not cause leakage current, thereby reducing the applied voltage V.

[0023] As a preliminary experiment for liquid aspiration using EWOD, the change in contact angle when the applied voltage is changed is measured. Figure 5(a) is a schematic diagram of the experimental setup for the change in contact angle due to voltage application, and (b) is the measurement result. 20 μL of 1 M KCl aqueous solution is dropped onto a substrate 210 on which a Ni thin film 202 and a polyparaxylylene layer 203 are formed in that order on a resin substrate 201. The contact angle θ is measured when the positive terminal of the power supply 15 is connected to the droplet 121 and the GND terminal is connected to the Ni thin film 202 to apply a potential difference.

[0024] As shown in Figure 5(b), as the applied voltage (V) is increased, the contact angle θ (degrees) decreases and the wettability increases. Around 400-700V, there is no significant change in the contact angle θ. Above 800V, unstable droplets are observed. Based on the preliminary experiment in Figure 5, liquid absorption by EWOD is observed using a sample of microlattice structure 10 having three-dimensional periodic microcavities.

[0025] <Demonstration of liquid absorption using a liquid-operated device> Figure 6 is a schematic diagram showing a first configuration example of droplet absorption by EWOD, and Figure 7 is a snapshot of droplet absorption immediately after voltage application. As shown in Figure 6, electrodes 16 connected to a conductive structure 11 are provided on the outer circumference of the microlattice structure 10. The electrodes 16 are connected to the ground potential of the power supply 15 to constitute a liquid handling device 100A. A droplet 121 of 1M KCl is dropped from above the microlattice structure 10, the droplet 121 is connected to the positive potential of the power supply 15, and a voltage of 500V is applied.

[0026] Figures 7(a) to (e) are snapshots taken 0.00 seconds, 0.03 seconds, 0.06 seconds, 0.09 seconds, and 0.12 seconds after the start of voltage application, respectively. When the Au electrode 205 is brought into contact with the droplet 121 and a voltage of 500V is applied between the droplet 121 and the microlattice structure 10, the droplet 121 penetrates into the microlattice structure 10 and is completely absorbed after 0.12 seconds. Thus, liquid suction by the liquid handling device 100A using the microlattice structure 10 has been demonstrated.

[0027] Figure 8 is a schematic diagram showing a second configuration example of droplet absorption by EWOD, Figure 9 is a snapshot of droplet absorption immediately after voltage application, and Figure 10 is a snapshot immediately after voltage removal. In the liquid handling device 100B of Figure 8, a microlattice structure 10 connected to an electrode 16 is placed on a non-conductive substrate 18, and the microlattice structure 10 is filled with silicone oil 125 with a kinematic viscosity of 10 cSt.

[0028] The electrode 16 is connected to the positive potential of the power supply 15 to constitute the liquid handling device 100B. A droplet 123 of 1M KCl is dropped onto the microlattice structure 10 filled with silicone oil 125. The droplet 123 is connected to the ground potential with the Au electrode 205. A voltage of 500V is applied between the electrode 16 and the droplet 123.

[0029] Figures 9(a) to (d) are snapshots taken 0.00 seconds, 0.03 seconds, 0.06 seconds, and 0.09 seconds after the start of voltage application, respectively. Figures 10(a) to (f) are snapshots taken 0.00 seconds, 0.03 seconds, 0.06 seconds, 0.09 seconds, 0.12 seconds, and 0.15 seconds after the voltage application was removed, respectively. By applying a voltage of 500V between the high-potential microlattice structure 10 and the ground-potential droplet 123, the droplet 123 is absorbed into the microlattice structure 10 filled with silicone oil 125. By turning off the voltage application, the droplet 123 can be withdrawn from the microlattice structure 10. In this way, the absorption and discharge of liquid by the liquid handling device 100B using the microlattice structure 10 has been demonstrated.

[0030] Figure 11 is a schematic diagram showing a third configuration example for generating a microdroplet array using EWOD. In this third configuration example, microdroplets 129 are generated inside the microlattice structure 10. By passing the interface between the aqueous solution 127 and an immiscible liquid 126 such as oil 128 through the microlattice structure 10, an array of microdroplets 129 is generated inside the microlattice structure 10.

[0031] The liquid handling device 100C includes an electrode 16 connected to a microlattice structure 10, a power supply 15, and a switch 17 for switching the voltage application to the microlattice structure 10 on and off. The electrode 16 may be formed into a cylindrical or polygonal tube shape and used as a container for an immiscible liquid 126.

[0032] When switch 17 is open, the microlattice structure 10 is hydrophobic or hydrophobic with respect to the aqueous solution 127, and the aqueous solution 127 and oil 128 are separated on the surface of the microlattice structure 10. In the absence of applied voltage, the microlattice structure 10 is wettable with respect to the oil 128, but since the specific gravity of oil 128 is less than that of aqueous solution 127, a layer of oil 128 is formed on top of the layer of aqueous solution 127.

[0033] When the switch 17 is closed and a voltage is applied between the aqueous solution 127 and the microlattice structure 10, the microlattice structure 10 becomes more easily wetted by the aqueous solution 127 than by the oil 128, and the aqueous solution 127 is absorbed into the interior of the microlattice structure 10. The oil 128 remains on the surface of the microlattice structure 10.

[0034] By opening switch 17 and releasing the applied voltage, the microlattice structure 10 becomes water-repellent to the aqueous solution 127 and becomes more easily wetted by the oil 128 than by the aqueous solution 127. The aqueous solution 127 is discharged from the microlattice structure 10, and the oil 128 is absorbed into the interior of the microlattice structure 10. The aqueous solution 127 absorbed into the interior of the microlattice structure 10 is replaced by the oil 128, but tiny droplets 129 of the aqueous solution 127 trapped in the microcavities 115 remain. Due to the periodic arrangement of the microcavities 115, an array of tiny droplets 129 is generated inside the microlattice structure 10.

[0035] The liquid handling device 100C can divide liquid into microdroplets 129 for sampling, and is expected to be applied to biosensors and bioassays. For example, using an array of microdroplets 129, highly sensitive diagnostics of infections and diseases such as digital PCR (polymerase chain reaction) and digital ELISA (enzyme-linked immunosorbent assay) will be possible.

[0036] <Second Embodiment> Figure 12 is a schematic diagram showing the basic configuration of the liquid handling device 200 of the second embodiment. The liquid handling device 200 uses an array of multiple microlattice structures 10 to transport, fuse, and divide liquid in a desired direction.

[0037] The liquid handling device 200 has a plurality of microlattice structures 10a, 10b, 10c, and 10d (hereinafter collectively referred to as "microlattice structures 10") arranged on the substrate 21. The number of microlattice structures 10 used is not limited to four, and any number of two or more microlattice structures 10 can be used. Furthermore, the arrangement of the microlattice structures 10 is not limited to one direction, and two-dimensional arrangement in the plane and three-dimensional arrangement in space are possible. If, in the coordinate system of Figure 12, the plane of the substrate 21 on which the microlattice structures 10 are arranged is the XY plane, and the direction orthogonal to the XY plane is the Z direction, then the microlattice structures 10 can be arranged in any of the X, Y, or Z directions.

[0038] Each microlattice structure 10 is connected to a power supply 22 via a switchable relay array 24. The substrate 21 is grounded to ground potential. By controlling the switching with a microcomputer 25, the voltage applied to each microlattice structure 10 can be individually controlled to transport the liquid 120 in a desired direction.

[0039] Figure 13A is a schematic diagram of one-dimensional transport using the liquid handling device 200, Figure 13B is a schematic diagram of two-dimensional transport using the liquid handling device 200, and Figure 13C is a schematic diagram of three-dimensional transport using the liquid handling device 200. In Figures 13A to 13C, the microlattice structure 10 having a periodic structure of microcavities 115 (see Figure 1) arranged in three dimensions is simplified and represented as a cube.

[0040] In the one-dimensional transport shown in Figure 13A, the liquid 120 can be transported in the X direction at a desired timing by sequentially selecting and applying voltage to the microlattice structures 10a, 10b, 10c, and 10d. In the two-dimensional transport shown in Figure 13B, the microlattice structures 10a-10d and 10e-10h are arranged in two rows in the XY plane, and the liquid is transported in the order 10a→10e→10f→10b→10c→10g→10h→10d. The liquid transport path is not limited to the example in Figure 13B; the liquid 120 can be transported in any order by selecting the microlattice structure 10 to which voltage is applied. For example, the liquid may be transported in the order 10a→10b→10c→10d→10h→10g→10f→10e, with microlattice structures 10a and 10e used as the intake and outlet, respectively. In this case, some of the intermediate microlattice structures 10 may be provided with filtering functions. The two-dimensional arrangement of the microlattice structure 10 is not limited to the XY plane, but may also be arranged in the XZ plane or the YZ plane.

[0041] In the three-dimensional transport shown in Figure 13C, a two-dimensional array of microlattice structures 10e, 10f, 10g, and 10h and a two-dimensional array of microlattice structures 10a, 10b, 10c, and 10d are stacked in two layers in the Z direction. For example, the liquid 120 drawn into microlattice structure 10f may be transported in the order of microlattice structure 10b → 10a → 10e → 10h → 10d, or in the order of microlattice structure 10b → 10c → 10d.

[0042] In Figures 13A to 13C, the amount of liquid attracted to and held by the microlattice structure 10 is determined by the dimensions of the microlattice structure 10, and a constant volume of liquid 120 can always be taken inside. The flexible one-dimensional, two-dimensional, or three-dimensional transport of a constant volume of liquid 120 is a technology that cannot be achieved with known configurations.

[0043] In any of the configurations shown in Figures 13A to 13C, each microlattice structure 10 has a periodic microcavity 115 (see Figure 1) that communicates in three dimensions, allowing observation of liquid moving through the array of microlattice structures 10. This suggests a combination of the liquid handling device 200 with an optical instrument. By using the sequence of multiple microlattice structures 10, colormetric detection, which confirms the amplification of DNA or RNA by a change in color, and fluorescence detection become possible. Due to the periodic structure of the microcavity 115 of each microlattice structure 10, even if the liquid handling device 200 is tilted or inverted, the liquid 120 can be held inside the microlattice structure 10 without falling and transported in the desired direction by controlling the applied voltage. Combining it with an optical instrument and transporting liquid with the device inverted is difficult to achieve with known configurations.

[0044] <Fusion and separation of droplets> Figure 14 is a schematic diagram of droplet fusion by the liquid manipulation device 200. Figure 14(a) is a perspective view, and (b) is a top view. For ease of illustration, the microlattice structure 10 is also simplified as a cube in Figure 14. The microlattice structure 10 shown by the solid line is connected to ground potential and the voltage application is off, while the microlattice structure 10 shown by the dotted line is connected to high potential and the voltage application is on.

[0045] For example, microlattice structures 10a to 10i (hereinafter collectively referred to as "microlattice structures 10" as appropriate) arranged in a 3x3 array are used. A voltage is applied to microlattice structures 10c and 10g to attract droplets 121a and 121b, respectively. Then, by turning off the voltage application to microlattice structures 10c and 10g and applying a voltage to the microlattice structure 10 along a desired path, droplets 121a and 121b can be fused into a single droplet 122. By sequentially selecting and applying voltage to microlattice structures 10f and 10e for droplet 121a, and sequentially selecting and applying voltage to microlattice structures 10d and 10e for droplet 121b, droplets 121a and 121b can be fused at microlattice structure 10e, generating and holding droplet 122.

[0046] Alternatively, droplets 121a may be directly transferred from microlattice structure 10c to 10e, and droplets 121b may be directly transferred from microlattice structure 10g to 10e, without going through microlattice structures 10f and 10d, and then fused. Each microlattice structure 10 has a microcavity 115 that communicates in the three-dimensional direction and is open in any direction, so droplets 121 can be transferred in the diagonal direction of the 3x3 array as well.

[0047] Figure 15 is a schematic diagram of droplet splitting by the liquid handling device 200. Figure 15(a) is a perspective view, and (b) is a top view. Similar to Figure 14, the microlattice structure 10 is simplified and represented as a cube, with solid lines indicating the microlattice structure 10 connected to the ground potential and dashed lines indicating the microlattice structure 10 connected to the high potential.

[0048] The droplet 122 held in the microlattice structure 10e of the 3x3 array of microlattice structures 10a to 10i is divided. The voltage applied to microlattice structure 10e is turned off, and voltage is applied to the adjacent microlattice structures 10d and 10f on both sides of microlattice structure 10e, thereby attracting the droplet 122 to microlattice structures 10d and 10f. After the droplet 122 has been attracted to microlattice structures 10d and 10f, the voltage applied to microlattice structures 10d and 10f is released, and voltage is applied to microlattice structures 10c and 10g. This allows the divided droplets 121a and 121b to be transferred to microlattice structures 10c and 10g, respectively.

[0049] Each microlattice structure 10 has a microcavity 115 that communicates in three dimensions and is open in all directions, so by selecting microlattice structures 10c and 10g, the droplet 122 of microlattice structure 10e can be directly divided diagonally. Alternatively, after dividing the droplet 122 into microlattice structures 10d and 10f, the divided droplets 121a and 121b can be further divided by selecting two microlattice structures adjacent to each microlattice structure. For example, for the droplet 121a held in microlattice structure 10d, microlattice structures 10a and 10g may be selected, and for the droplet 121a held in microlattice structure 10f, microlattice structures 10c and 10i may be selected to divide it into four droplets.

[0050] <Examples of application to sensor devices> Figure 16 is a schematic diagram of a sensor device 30A using a liquid handling device 100. The sensor device 30A uses electrical suction and discharge of liquid by a microlattice structure 10 to sample and sense external bulk liquid 301. The external bulk liquid 301 may include environmental water, sewage, wastewater, or industrial-related liquids.

[0051] The sensor device 30A includes a sensor body 32, a sampling and detection unit 31, and a communication unit 33. A control unit 35 is provided in the sensor body 32 to control the overall operation of the sensor device 30A. The control unit 35 is composed of, for example, a microprocessor and memory. The communication unit 33 may have wireless communication capabilities or communication capabilities via cable connection.

[0052] The sensor device 30A is mounted on the wall 302 of a sewer or drainpipe such that at least a portion of the sampling and detection unit 31 is immersed in the bulk liquid 301. The sampling and detection unit 31 includes a grounding pipe 310A, a micro-grid structure 10 positioned inside the grounding pipe 310A, a sensor probe 311, and a power supply 15. The positive potential of the power supply 15 is connected to the conductive structure 11 of the micro-grid structure 10, and the ground potential is connected to the grounding pipe 310A. When a high potential is applied to the micro-grid structure 10 with the inlet 312 of the grounding pipe 310 immersed in the bulk liquid 301, the micro-grid structure 10 becomes hydrophilic with respect to the bulk liquid 301 and draws in a predetermined amount from the bulk liquid 301. When the drawn liquid comes into contact with the sensor probe 311, a physical quantity of the bulk liquid 301 or a predetermined substance contained in the bulk liquid 301 is detected. The physical quantities of the bulk liquid 301 include temperature, pH value, and water level. The specified substances include certain molecules, bacteria, viruses, tritium, and heavy metals.

[0053] The sensor device 30A may continuously sample and sense the bulk liquid 301, or it may perform sampling and sensing at predetermined timings. The control unit 35 may control the timing of voltage application by the power supply 15. At the timing of voltage application, the microlattice structure 10 takes in a predetermined amount of liquid each time. The communication unit 33 may transmit the sensing results from the sensor device 30A to a server, cloud, etc.

[0054] When a bioprobe modified to bind to a specific substance is used as the sensor probe 311, it is possible to detect specific molecules in sewage or environmental water. Multiple sensor devices 30A can be installed in sewers to monitor the distribution of biomarkers in the sewage. Monitoring the distribution of biomarkers allows for the visualization of the spread of infectious diseases. The sensor device 30A can also be attached to the wall of a toilet bowl to detect urinary protein and urinary glucose, enabling personal health monitoring.

[0055] Figure 17 is a schematic diagram of a sensor device 30B using the liquid handling device 200 shown in Figure 12. The sensor device 30B divides and samples a predetermined amount of liquid droplet using a plurality of micro-grid structures 10a to 10g (collectively referred to as "micro-grid structures 10" as appropriate). The sensor device 30B has a grounding tube 310B and a plurality of micro-grid structures 10a to 10g arranged inside the grounding tube 310B. Each of the plurality of micro-grid structures 10a to 10g is connected to the positive potential of the power supply 22 (see Figure 12) via a relay array 24 (see Figure 12) as shown in Figure 12. A micro-grid structure 10 with voltage applied is schematically shown as a dotted cube, and a micro-grid structure 10 with voltage application turned off is schematically shown as a solid cube.

[0056] By sequentially applying voltage to the micro-grid structures 10a, 10b, 10c, ..., a predetermined amount of liquid 120, determined by the dimensions of the micro-grid structures 10, can be transferred to adjacent micro-grid structures 10 in a relay manner. When the liquid 120 attracted to micro-grid structure 10a is transferred to the next micro-grid structure 10b and the voltage application to micro-grid structure 10b is turned off, the voltage application to micro-grid structures 10a and 10c is turned on, allowing for a new sample of liquid 120. By selecting every other micro-grid structure 10 to which voltage is applied, the liquid 120 can be sampled while being divided into predetermined amounts.

[0057] Figure 18 is a schematic diagram of a biosensor 40 using a liquid handling device 200A. The biosensor 40 is an example of a sensor device. By utilizing droplet sampling, transfer, fusion, and division by the liquid handling device 200A, a biosensor 40 for antigen / antibody testing (inome assay) and other applications can be realized. The liquid handling device 200A has multiple microlattice structures 10, and as shown in Figure 12, the voltage applied to each microlattice structure 10 can be individually controlled. For illustrative purposes, each microlattice structure 10 is schematically represented as a cube. The multiple microlattice structures 10 include a microlattice structure 10R connected to the reagent intake port 41, a microlattice structure 10S connected to the sample intake port 42, a microlattice structure 10Mt for antigen testing, and a microlattice structure 10Mc for control.

[0058] Reagent 41 contains labeled antibody 411. Sample 42 is blood, saliva, etc., and may contain a specific antigen 421. The surface of the micropillar 111 of the 10Mt microlattice structure for antigen testing is modified with antibody 402, which specifically binds to antigen 421. The surface of the micropillar 111 of the 10Mc microlattice structure for control is modified with control antibody 401. Sample 42 in contact with microlattice structure 10S and reagent 41 in contact with microlattice structure 10R are sampled, transferred, fused, and separated by selectively controlling the voltage applied to multiple microlattice structures 10, and finally supplied to the 10Mt microlattice structure for antigen testing and the 10Mc microlattice structure for control. Antigen 421 labeled with labeled antibody 411 reacts specifically with antibody 402. Control antibody 401 is used to determine whether the detection result is based on a specific antigen-antibody reaction.

[0059] Figure 19 shows an example of liquid manipulation in the biosensor 40 of Figure 18. Microlattice structures 10 to which voltage is applied are shown as dashed rectangles, and microlattice structures 10 to which voltage is not applied are shown as solid lines. Sample 42 supplied to microlattice structure 10S is taken into the interior of microlattice structure 10a by making the adjacent microlattice structure 10a high potential and is sampled. Reagent 41 supplied to microlattice structure 10R is taken into the interior of microlattice structure 10b by making the adjacent microlattice structure 10b high potential and is sampled. By turning off the voltage application to microlattice structures 10a and 10b and applying voltage to microlattice structure 10c, reagent 41 and sample 42 are taken into microlattice structure 10c from microlattice structures 10b and 10a, respectively. Reagent 41 and sample 42 spontaneously fuse in microlattice structure 10c.

[0060] By sequentially selecting the microlattice structures 10c, 10d, 10e, and 10f, the reagent 41 and sample 42 are mixed to obtain liquid 43. The mixing of reagent 41 and sample 42 is not limited to the example of transferring them clockwise as shown in the figure, but can also be achieved by moving them back and forth between at least two microlattice structures 10.

[0061] Next, a voltage is applied simultaneously to the microlattice structures 10a and 10f to split the mixed liquid 43 into two droplets 45. By sequentially selecting microlattice structures 10g and 10Mt, one droplet 45 is supplied to the microlattice structure 10Mt for antigen testing and reacted. By sequentially selecting microlattice structures 10e and 10Mc, the other droplet 45 is supplied to the control microlattice structure 10Mc and reacted.

[0062] After a predetermined time has elapsed, the voltage applied to the microlattice structures 10Mt and 10Mc is released, the droplet 45 is discharged, and detection is performed. In the example shown in the figure, the droplet is discharged from microlattice structure 10h, which is connected to the discharge port of the biosensor 40, by relaying the droplet through microlattice structures 10g, 10d, and 10e. If the color changes in both microlattice structures 10Mt and 10Mc, it indicates that the antigen was present; if neither color changes, it means the assay has failed. After detection, a washing solution is injected from microlattice structure 10i, and all microlattice structures 10 are washed by pH treatment or high-temperature treatment. This allows for repeated use of the biosensor 40. The biosensor 40 can be used for rapid testing of viruses and bacteria.

[0063] Figure 20 is a schematic diagram of a biosensor 50 using a liquid handling device 200B. The biosensor 50 is an example of a sensor device. By utilizing droplet sampling, transfer, fusion, and division by the liquid handling device 200B, a biosensor 50 that performs real-time PCR testing is realized. The liquid handling device 200B has multiple microlattice structures 10, and as shown in Figure 12, the voltage applied to each microlattice structure 10 can be controlled individually. For convenience of illustration, the microlattice structures 10 are schematicly represented as cubes. The multiple microlattice structures 10 include a microlattice structure 10R connected to the reagent intake port 51, a microlattice structure 10S connected to the sample intake port 52, a microlattice structure 10Pc connected to a cooling device, a microlattice structure 10Ph connected to a heating device, and a microlattice structure 10FD connected to a fluorescence detection device.

[0064] Reagent 51 contains a fluorescent probe 511, a primer 512, a polymerase 513, and deoxynucleoside triphosphates (dNTPs) 514, and is buffered. Sample 52 may contain RNA and / or DNA 521, such as from a virus. Sample 52, which has come into contact with the microlattice structure 10S, and reagent 51, which has come into contact with the microlattice structure 10R, are sampled, mixed, divided, and fused by selective voltage application to multiple microlattice structures 10, and are detected by fluorescence multiple times on the microlattice structure 10FD.

[0065] Figure 21 shows an example of liquid operation in the biosensor 50 of Figure 20. Microlattice structures 10 to which voltage is applied are shown as dashed rectangles, and grounded microlattice structures 10 are shown as solid lines. Sample 52 supplied to microlattice structure 10S is taken into the interior of microlattice structure 10a by making the adjacent microlattice structure 10a high potential and is sampled. Reagent 51 supplied to microlattice structure 10R is taken into the interior of microlattice structure 10b by making the adjacent microlattice structure 10b high potential and is sampled. By turning off the voltage application to microlattice structures 10a and 10b and applying voltage to microlattice structure 10c, the reagent 51 and sample 52 are taken into microlattice structure 10c from microlattice structures 10a and 10b, respectively. The reagent 51 and sample 52 spontaneously fuse in microlattice structure 10c.

[0066] By sequentially selecting the microlattice structures 10c, 10d, 10e, and 10f, the reagent 51 and sample 52 are mixed to obtain liquid 53. The mixing of reagent 51 and sample 52 is not limited to the example of transferring them clockwise as shown in the figure, but can also be achieved by moving them back and forth between at least two microlattice structures 10.

[0067] Next, liquid 53 is alternately transferred to microlattice structures 10Pc and 10Ph, and cooling and heating are repeated. Droplets being cooled in microlattice structure 10Pc are indicated by symbol 55, and droplets being heated in microlattice structure 10Ph are indicated by symbol 56, but the same liquid 53 is undergoing different treatments. Through this heating and cooling, DNA is amplified by one cycle of polymerase chain reaction (PCR), and is detected by fluorescence in microlattice structure 10FD. The microlattice structure 10FD is irradiated with light emitted from LED 58, and the fluorescence intensity is detected by sensor filter 57. The heating and cooling of the droplets and fluorescence detection are repeated for the required number of cycles, and PCR fluorescence detection is performed in real time.

[0068] Once the required number of PCR fluorescence detection cycles are complete, the sample droplets are discharged and all microlattice structures 10 are washed, making the biosensor 50 reusable. The biosensor 50 can be used for detecting viruses and bacteria, analyzing cancer genes, and biological research.

[0069] Thus, by using a microlattice structure 10 having a periodic structure of three-dimensionally arranged microcavities, highly sensitive diagnosis of infection and disease becomes possible. Liquid manipulation using the microlattice structure 10 involves fabricating a microlattice structure by covering a conductive structure having a periodic structure of three-dimensionally arranged microcavities with a dielectric layer, and then selectively applying a voltage between the conductive structure and the liquid to control the intake and discharge of the liquid into the microlattice structure 10.

[0070] By arranging multiple microlattice structures 10 in one, two, or three dimensions, and selecting two or more microlattice structures from among them, a liquid can be sampled, transported in any direction, fused, mixed, divided, and discharged. The methods of sampling and liquid transport are not limited to the examples described above; a configuration may be used in which a voltage is applied to the microlattice structure 10, it is submerged in water, and then the voltage is released to draw oils into the microlattice structure 10. When transporting oil between multiple microlattice structures 10, the voltage applied to the microlattice structures 10 can be selectively released to transport the oil in a desired direction.

[0071] <Examples of application to thermal switches> Figure 22 shows an example of applying the liquid operation device 100 of the embodiment to a thermal switch 60. Electric vehicle batteries need to have low thermal conductivity at low temperatures to improve insulation and high heat dissipation at high temperatures. The liquid operation technology of the embodiment can be applied to thermal switching technology that switches between insulation and heat dissipation.

[0072] The thermal switch 60 has a liquid handling device 100 positioned between the heat source 610 and the heat sink 620. The microlattice structure 10 of the liquid handling device 100 is positioned between the heat source 610 and the heat sink 620. One terminal of the power supply 15 is connected to the liquid 120, and the other terminal is connected to the conductive structure 11A or 11B (see Figure 1) of the microlattice structure 10. By controlling the application and release of voltage by switching the switch 17 on and off, the wettability of the microlattice structure 10 to the liquid 120 is changed, thereby controlling the attraction and discharge of the liquid 120 into the microlattice structure 10.

[0073] If the liquid 120 is a polar aqueous solution, as shown in Figures 22(b) and (c), the inside of the microlattice structure 10 is filled with the liquid 120 by applying a voltage, and the liquid 120 is discharged by releasing the voltage, switching to the state shown in Figure 22(a). If the fluid inside the microlattice structure 10 is air, the thermal conductivity at 20°C is 0.0257 W / m·K. If the fluid inside the microlattice structure 10 is water, the thermal conductivity at 20°C is 0.582 W / m·K, and the thermal conductivity of the space between the heat source 610 and the heat sink 620 can be changed by about 20 times. Antifreeze may also be used as the liquid 120. By using the thermal switch 60, the thermal characteristics at low and high temperatures can be changed. [Explanation of Symbols]

[0074] 10, 10a~10i, 10S, 10R, 10Mt, 10Mc, 10Pc, 10Ph, 10FD microlattice structures 11A, 11B Conductive structures 12 skeletons 13. Conductive layer 14 Dielectric layer 15, 22 Power supply 16 electrodes 17 Switches 24 relay array 25 Microcomputers 30A, 30B Sensor Devices 31 Sampling and detection unit 32 Sensor body 35 Control Unit 40, 50 Biosensors (Sensor Devices) 60 Thermal switches 100, 100A, 100B, 200, 200A, 200B Liquid handling devices 110 Unit Structures 111 Micropillar 115 microcavities 120 liquid 121, 123 droplet 125 Silicone Oil 127 Aqueous solution 128 Oil 129 tiny droplets

Claims

1. A plurality of microlattice structures having a conductive structure having a periodic structure of microcavities arranged in three dimensions and communicating in the three-dimensional direction, and a dielectric layer covering the structure, A means for transferring the liquid between the plurality of microlattice structures by individually controlling the application or release of voltage between the structures of the plurality of microlattice structures and the liquid, A liquid handling device equipped with the following features.

2. The structure is formed of a conductor, or has a framework that forms the microcavity and a conductive layer that covers the framework. The liquid handling device according to claim 1.

3. The plurality of microlattice structures have a polyhedral shape, gyroid, or lattice structure that constitutes the microcavity. The liquid handling device according to claim 1.

4. A microlattice structure having a conductive structure having a periodic structure of microcavities arranged in three dimensions and communicating in the three-dimensional direction, and a dielectric layer covering the structure, Means capable of controlling the application or release of voltage between the structure of the microlattice structure and the liquid, Equipped with, The means involves applying the voltage to incorporate a first liquid having molecular polarity into the microlattice structure, and then turning off the voltage to replace the first liquid inside the microlattice structure with a second liquid that does not have molecular polarity, while retaining droplets of the first liquid in the microcavity. Liquid handling device.

5. The means selects adjacent microlattice structures among the plurality of microlattice structures, switches the voltage of one of the adjacent microlattice structures from applied to deactivated, and switches the voltage of the other of the adjacent microlattice structures from deactivated to applied, thereby transferring the liquid between the one microlattice structure and the other microlattice structure. The liquid handling device according to claim 1.

6. The means transfers, divides, mixes or fuses the liquid between the plurality of microlattice structures by individually controlling the application and release of the voltage between the plurality of microlattice structures and the liquid. The liquid handling device according to claim 1.

7. The means controls the application and release of the voltage to the first microlattice structure among the plurality of microlattice structures to cause the first liquid to be incorporated into the first microlattice structure, controls the application and release of the voltage to the second microlattice structure to cause the second liquid to be incorporated into the second microlattice structure, and individually controls the application and release of the voltage to the plurality of microlattice structures to transfer, fuse, or separate the first liquid and the second liquid. The liquid handling device according to claim 1.

8. A liquid handling device according to any one of claims 1 to 3 and 5 to 7, A sensor for detecting the physical quantity of the liquid incorporated into at least one of the plurality of microlattice structures or a predetermined substance contained in the liquid, A sensor device having the following features.

9. The sensor device according to claim 8, wherein the means enables sampling of the liquid at a desired timing by individually controlling the application and release of the voltage to the plurality of microlattice structures.

10. A control unit that controls the sampling timing of the liquid, A transmitter that transmits the detection result from the aforementioned sensor, A sensor device according to claim 9, having the following features.

11. Multiple microlattice structures are fabricated by covering conductive structures having a periodic structure of microcavities arranged in three dimensions and communicating in the three-dimensional direction with a dielectric layer. By individually controlling the application or release of voltage between the structures of the plurality of microlattice structures and the liquid, the liquid is transferred between the plurality of microlattice structures. Liquid manipulation methods.

12. The plurality of microlattice structures are arranged in one, two, or three dimensions, The liquid handling method according to claim 11, wherein the liquid is sampled, transported in any direction, fused, mixed, divided, or discharged by individually controlling the application or release of a voltage between the structures in the plurality of microlattice structures and the liquid.

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