Improved showerhead pumping shape dimensions for trapping precursors

Abstract

A gas injector is described that includes a vacuum channel having an inlet opening at a front surface of the injector and an outlet opening at a back surface. The vacuum channel includes a first leg that extends a first length from the inlet opening at the front surface at a first angle relative to the front surface, and a second leg that extends a second length from the first leg to an outlet opening at the back surface at a second angle relative to the front surface. The processing chamber and method of use include a plurality of processing regions that are delimited about an outer peripheral edge by one or more vacuum channels. The first processing region has a first vacuum channel having a first outer diameter, and the second processing region has a second vacuum channel having a second outer diameter, the first outer diameter being smaller than the second outer diameter.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to apparatus and methods for narrowing a transition deposition zone. In particular, some embodiments of the present disclosure relate to a batch processing chamber having improved pumping geometry dimensions.

Background Art

[0002] In an atomic layer deposition (ALD) chamber, deposition can occur on chamber parts other than the wafer being processed. In this case, the chamber is typically constructed such that parts where deposition occurs can be cleaned in situ or removed for ex situ cleaning. A set of parts that are periodically replaced can be called a process kit.

[0003] In some cases, the deposition on the process kit can accumulate to the point where the deposition flakes off and causes defect problems for the wafers being processed. Also, this unwanted deposition can result in process variations such as changes in film thickness, film uniformity, or film properties. Since some deposited films do not have good options for in situ cleaning, the process kit accumulates the deposition until it has to be removed and potentially replaced. This can result in increased machine downtime and operating costs.

[0004] In some batch processing chambers where the substrate moves between different processing stations (also called processing regions) on the same electrostatic chuck, it is possible to prevent deposition on most chamber parts due to separation of reactants between different processing stations. However, the electrostatic chuck that supports the wafer moves with the wafer between different stations. Parts of the electrostatic chuck are exposed to process conditions within the processing stations and unwanted film deposition will also accumulate.

[0005] In these cases, deposition at the edges of the electrostatic chuck can be limited to prevent it from extending beyond the pumping channel due to the backside purge flow in the chamber. The wafer / electrostatic chuck edge is a transition region where deposition decreases from an area comparable to deposition on the wafer to an area where no deposition occurs.

[0006] Therefore, an apparatus and method are needed that minimizes deposits on the surface of the processing chamber. [Overview of the project]

[0007] One or more embodiments of the present disclosure relate to a gas distribution plate comprising a body, the body having a front and back surface and an external peripheral edge defining the thickness of the body. A vacuum channel has a front inlet opening and a back outlet opening. The vacuum channel comprises a first leg extending from the front inlet opening over a first length at a first angle with respect to the front surface, and a second leg extending from the first leg over a second length at a second angle with respect to the front surface to the back outlet opening.

[0008] Further embodiments of the present disclosure relate to a processing chamber comprising a substrate support, a first processing area, and a second processing area. The substrate support has a top surface configured to support a wafer during processing and to move the wafer between a plurality of processing areas. The substrate support includes an edge ring having an inwardly projecting internal projection, the internal projection being sized to provide a gap between the top surface of the substrate support and the top surface of the inwardly projecting internal projection. The first processing area comprises a first gas distribution plate having a first front surface on the opposite side of the top surface of the substrate support. The first gas distribution plate has a first vacuum channel on its first front surface, the first vacuum channel having a first outer diameter. The second processing area comprises a second gas distribution plate having a second front surface on the opposite side of the top surface of the substrate support. The second gas distribution plate has a second vacuum channel on its second front surface. The second vacuum channel has an inlet opening on its front surface and an outlet opening on the second back surface of the second gas distribution plate. The second vacuum channel comprises a first leg extending from the inlet opening on the second front surface over a first length at a first angle with respect to the second front surface, and a second leg extending from the first leg over a second length to the outlet opening on the second rear surface at a second angle with respect to the second front surface. The inlet opening of the second vacuum channel has a second inner diameter greater than the first outer diameter.

[0009] A more detailed description of the Disclosure, which has been briefly summarized above, can be obtained by referring to the embodiments, some of which are shown in the accompanying drawings, in a manner that allows for a more detailed understanding of the features described herein. However, it should be noted that the accompanying drawings are merely typical embodiments of the Disclosure, and therefore the Disclosure may permit other equally valid embodiments, and should not be considered to limit the scope of the Disclosure. [Brief explanation of the drawing]

[0010] [Figure 1] This is an isometric cross-sectional view of a processing chamber according to one or more embodiments of the present disclosure. [Figure 2]This is a cross-sectional view of a processing chamber according to one or more embodiments of the present disclosure. [Figure 3] This is a schematic partial cross-sectional view of a processing area according to one or more embodiments of the present disclosure. [Figure 3A] This is an enlarged view of region 3A in Figure 3. [Figure 3B] This is a schematic cross-sectional view of a gas distribution plate according to one or more embodiments of the present disclosure. [Figure 4] This is a schematic partial cross-sectional view of a processing area according to one or more embodiments of the present disclosure. [Figure 4A] This is an enlarged view of region 4A in Figure 4. [Figure 4B] This is a schematic cross-sectional view of a gas distribution plate according to one or more embodiments of the present disclosure. [Figure 5] This is a schematic diagram of a deposition and transfer region according to one or more embodiments of the present disclosure. [Figure 6] This is a schematic diagram of a deposition and transfer region according to one or more embodiments of the present disclosure. [Figure 7] This is a schematic cross-sectional view of a portion of a gas distribution plate according to one or more embodiments of the present disclosure. [Figure 8] This is a partial schematic cross-sectional view of a gas distribution plate according to one or more embodiments of the present disclosure. [Figure 9] This is a schematic cross-sectional view of a gas distribution plate having a replaceable purge ring according to one or more embodiments of the present disclosure. [Figure 10] This is a partial schematic cross-sectional view of a gas distribution plate according to one or more embodiments of the present disclosure. [Figure 11A] This is a partial schematic cross-sectional view of a vacuum channel according to one or more embodiments of the present disclosure. [Figure 11B] This is a partial schematic cross-sectional view of a vacuum channel according to one or more embodiments of the present disclosure. [Figure 11C] This is a partial schematic cross-sectional view of a vacuum channel according to one or more embodiments of the present disclosure. [Figure 11D]This is a partial schematic cross-sectional view of a vacuum channel according to one or more embodiments of the present disclosure. [Figure 11E] This is a partial schematic cross-sectional view of a vacuum channel according to one or more embodiments of the present disclosure. [Modes for carrying out the invention]

[0011] Prior to describing some exemplary embodiments of this disclosure, it should be understood that this disclosure is not limited to the structural or process step details shown in the following description. Other embodiments of this disclosure are possible and can be practiced or implemented in various ways.

[0012] As used herein and in the appended claims, the term “substrate” means the surface or part of a surface on which the process acts. It will also be understood by those skilled in the art that a reference to a substrate can mean only a part of a substrate unless the context otherwise explicitly indicates. Furthermore, a reference to “deposit on a substrate” can mean both a bare substrate and a substrate on which one or more films or features are deposited or formed.

[0013] As used herein, the term "substrate" means any substrate or the surface of a material formed on a substrate on which film processing is performed during a manufacturing process. For example, the substrate surface on which processing can be performed can be made of materials such as silicon, silicon oxide, strained silicon, silicon on insulator (SOI), carbon-doped silicon oxide, amorphous silicon, doped silicon, germanium, gallium arsenide, glass, sapphire, etc., and any other materials such as metals, metal nitrides, metal alloys, and other conductive materials, depending on the application. The substrate includes, but is not limited to, semiconductor wafers. The substrate can be subjected to a pretreatment process for polishing, etching, reducing, oxidizing, hydroxylating, annealing, UV curing, electron beam curing, and / or firing the substrate surface. In addition to directly performing film processing on the surface of the substrate itself, in the present disclosure, as will be disclosed in more detail below, any of the disclosed film processing steps can also be performed on the underlying layer formed on the substrate, and the term "substrate surface" is intended to include such an underlying layer as the context indicates. Thus, for example, when a film / layer or a partial film / layer is deposited on the substrate surface, the exposed surface of the newly deposited film / layer becomes the substrate surface.

[0014] As used in this specification and the appended claims, the terms "precursor", "reactant", "reactive gas", etc. are used interchangeably to mean any gaseous species that can react with the substrate surface or a film formed on the substrate surface.

[0015] Most deposition chambers do not have individual chemicals and pump various chemicals through the same pump port location. In some recent batch processing chambers, the precursors are separated between different processing stations. Pumping hardware can be used to pump gases to the wafer through the same location. The problem of deposition buildup still exists with this structure. Accordingly, one or more embodiments of the present disclosure stagger the pumping locations between spatially separated processing stations. Some embodiments use different sensitivities for each of the reactive gases to minimize support surface deposition.

[0016] One or more embodiments of the present disclosure are directed to methods and apparatus for narrowing the width of the transition region between uniform deposition on a wafer and non-deposition of an adjacent support surface. Some embodiments advantageously provide apparatus and methods for minimizing or removing off-wafer deposition by staggering the pumping locations with respect to the wafer.

[0017] Some embodiments of the present disclosure advantageously provide an improved system architecture for minimizing deposition caused by thermal processes by spatially isolating highly reactive precursors. Some embodiments strategically target purge gases around the wafer, along with localized pumping near the wafer edge. One or more embodiments of the present disclosure advantageously provide apparatus and methods for improving precursor confinement while maintaining low non-uniformity in film thickness.

[0018] Metal oxide ALD films are impossible to clean from the deposition hardware and accumulate on the chamber walls during deposition because precursor and oxidant gases mix in the same process environment. Replacing components such as electrostatic chucks and showerheads can be costly and time-consuming. Therefore, some embodiments of this disclosure provide systems that have localized pumping near the wafer edge and improved pumping inlet shape dimensions relative to the wafer. By balancing the impact on wafer film thickness, deposition on chamber components outside the wafer boundary is reduced. In some embodiments, to keep the electrostatic chuck (ESC) area around the wafer clean, a replaceable edge ring is mounted on the ESC so as to extend up to 3 mm into the wafer edge, and back edge purging prevents the diffusion of precursor gases onto the ESC surface. In some embodiments, the purging gas provides an aerodynamic boundary across the entire edge ring, reducing film deposition on the ring.

[0019] The following description is given primarily in relation to batch processing chambers as shown in Figure 1, but those skilled in the art will recognize that the scope of this disclosure is not limited to batch chambers. In some embodiments, gas distribution plates and / or pumping components are configured to provide staggered pumping for different locations on the wafer.

[0020] Figures 1 and 2 show batch processing chambers 100 according to one or more embodiments of the present disclosure. Figure 1 shows a processing chamber 100 as an isometric cross-sectional view according to one or more embodiments of the present disclosure. Figure 2 shows a cross-sectional view of a processing chamber 100 according to one or more embodiments of the present disclosure. Accordingly, some embodiments of the present disclosure relate to a processing chamber 100 incorporating a substrate support 200 and a top plate 300.

[0021] The processing chamber 100 has a housing 102 having walls 104 and a bottom 106. The housing 102, together with the top plate 300, defines an internal volume 109, also called the processing volume.

[0022] The processing station 110 shown comprises three main components: a top plate 300 (also called a lid), a pump / purge insert 330, and a gas distribution plate 112. The processing chamber 100 further comprises a plurality of processing stations 110. The processing stations 110 are located within the internal volume 109 of the housing 102 and are positioned in a circular structure around the rotation axis 211 of the substrate support 200. Each processing station 110 comprises a gas distribution plate 112 (also called a gas injector) having a front surface 114. In some embodiments, each front surface 114 of the gas distribution plate 112 is substantially coplanar. The processing station 110 is defined as an area where processing may occur. For example, in some embodiments, the processing station 110 is defined as an area bounded by the support surface 231 of the substrate support 200 and the front surface 114 of the gas distribution plate 112, as described below. In the embodiments shown, the heaters 230 act as substrate support surfaces and form a component of the substrate support 200. Each heater 230 comprises a support surface 231 and a bottom surface 232, defining the thickness of the heater 230. In some embodiments, the support surface 231 further includes a supply for at least three lift pins extending through the support surface 231. A support plate 245 is present around the heaters 230 in the embodiments shown. The support plate 245 is connected to the substrate support 200 and has multiple openings through which the heaters 230 extend. In some embodiments, the support plate 245 provides a passage for backside purge gas.

[0023] The processing station 110 can be configured to perform any suitable process and provide any suitable process conditions. The type of gas distribution plate 112 used depends, for example, on the type of process to be performed and the type of showerhead, i.e., gas injector. For example, a processing station 110 configured to operate as an atomic layer deposition apparatus may have a showerhead, i.e., vortex-type gas injector. On the other hand, a processing station 110 configured to operate as a plasma station may have one or more electrode and / or grounding plate configurations to generate plasma and, at the same time, allow a flow of plasma gas toward the wafer. The embodiment shown in Figure 2 has a different type of processing station 110 on the left side of the figure (processing station 110a) than on the right side of the figure (processing station 110b). Suitable processing stations 110 include, but are not limited to, thermal processing stations, microwave plasma stations, 3-electrode CCPs, ICPs, parallel-plate CCPs, UV exposure stations, laser processing stations, pumping chambers, annealing stations, and measurement stations. The embodiments shown in Figures 1 and 2 illustrate a quadruple-symmetric structure of a processing station, but the scope of this disclosure is not limited to a four-station processing chamber.

[0024] In some embodiments, the percentage of the deposition thickness decreases in this transition region, depending on the deposition chemical used and the sensitivity of the deposition process to the precursor concentration. In some embodiments, a narrower transition region allows for more uniform deposition over a wider area of ​​the wafer being processed, while reducing deposition on surfaces other than the wafer.

[0025] Referring to Figures 3, 3A, 3B, 4, 4A, and 4B, one or more embodiments of the present disclosure relate to a processing chamber having a plurality of processing areas. Figure 3 shows a portion of a first processing area 311. For example, the first processing area 311 may be a component of the left-hand processing station 110a shown in Figure 2. Figure 3A shows an enlarged view of area 3A in Figure 3. Figure 3B shows a diagram of the gas distribution plate 320 in Figure 3A. Figure 4 shows a portion of a second processing area 312, and Figure 4A shows an enlarged view of area 4A in Figure 4. Figure 4B shows a diagram of the gas distribution plate 320 in Figure 4A. For example, the second processing area 312 may be a component of the right-hand processing station 110b shown in Figure 2. The use of order such as “first,” “second,” etc., is for descriptive purposes only to refer to different components and should not be interpreted as any particular order of operation or priority.

[0026] Each processing region 311, 312 has a height H defined by the front surface 321 of the gas distribution plate 320 and the top surface 331 of the substrate support 333. The height H of the processing regions 311, 312 decreases when the wafer 60 is positioned on the top surface 331 of the substrate support 333, as shown. Each of the processing regions 311, 312 is bounded around its outer peripheral edge by one or more vacuum channels 341a, 341b.

[0027] The gas distribution plate 320 shown in Figures 3, 3B, 4, and 4B includes a plenum 322 region into which reactive gas flows. The reactive gas flows from the plenum 322 through openings 324 to processing regions 311, 312. The figures show three openings 324 for illustrative purposes only and should not be construed as limiting the scope of this disclosure. Those skilled in the art will likely be familiar with the arrangement of the openings 324, and the configuration of the openings 324 is that of a showerhead gas distribution plate. In some embodiments, the gas distribution plate 320 does not have a plenum 322 region, and the gas flows directly into the processing regions without passing through openings.

[0028] The first processing region 311 has a first vacuum channel 341a having a first inner diameter ID1, a first outer diameter OD1, and a first vacuum channel width W1. Although the first vacuum channel 341a is described as a component of the first processing region 311, it will be understood by those skilled in the art that the first vacuum channel 341a is a component of the gas distribution plate 320 or other components that define the extent of the first processing region 311. In other words, the gas distribution plate 320 that defines the extent of the first processing region 311 has a first vacuum channel 341a having a first inner diameter ID1, a first outer diameter OD1, and a first vacuum channel width W1, as shown in Figure 3B.

[0029] The second processing region 312 has a second vacuum channel 341b having a second inner diameter ID2, a second outer diameter OD2, and a second vacuum channel width W2. Although the second vacuum channel 341b is described as a component of the second processing region 312, it will be understood by those skilled in the art that the second vacuum channel 341b is a component of the gas distribution plate 320 or other components that define the extent of the second processing region 312. In other words, the gas distribution plate 320 that defines the extent of the second processing region 312 has a second vacuum channel 341b having a second inner diameter OD1, a second outer diameter OD2, and a second vacuum channel width W2, as shown in Figure 3B.

[0030] Figure 7 shows a cross-sectional view of a vacuum channel according to one or more embodiments of the present disclosure. In some embodiments, the first vacuum channel 341a and / or the second vacuum channel 341b is a trench 343 formed on the bottom surface of the showerhead. The trench 343 is connected to a vacuum plenum 345 via a plurality of conduits 344. Each conduit has an opening 344a in the plenum 345 and an opening 344b in the trench 343, providing a fluid connection between the trench 343 and the plenum 345.

[0031] In some embodiments, the first outer diameter OD1 is smaller than the second outer diameter OD2. In other words, in some embodiments, the second outer diameter OD2 is larger than the first outer diameter OD1. In some embodiments, the first outer diameter OD1 is larger than the second outer diameter OD2. In other words, in some embodiments, the second outer diameter OD2 is smaller than the first outer diameter OD1.

[0032] In some embodiments of binary reactions—reactions using a precursor dose and a reactant dose—there are two distinct process regions, namely a first process region 311 and a second process region 312. Each of the first and second process regions 311 has vacuum channels 341a and 341b. The outer diameters OD1 and OD2 of the vacuum channels 341a and 341b differ, for example, depending on the reactivity of the reactive species delivered in a particular process region. For example, in some embodiments of binary reactions, one of the first reactive gas or the second reactive gas has a slower reaction rate. The reactant with the slower reaction rate is called the rate-determining reactant, because the deposition process cannot proceed at a rate faster than the rate at which the rate-determining reactant can react with the substrate surface. In some embodiments, the vacuum channel with the larger outer diameter is associated with the reactant that is the rate-determining reactant.

[0033] In some embodiments, the outer diameter of the vacuum channel is different to vary the size of the transition zone between total deposition on the wafer and non-deposition on the wafer edge exclusion zone. The deposition transition zone is formed by an atomic layer deposition (ALD) reaction between a first reactant and a second reactant. In some embodiments, the first processing region 311 and the second processing region 312 are concentric.

[0034] The outer portion of the wafer is the area of ​​contact points during processing and is typically omitted in the final device. This area of ​​the wafer is called the edge exclusion zone. Typically, the edge exclusion zone is about 2 mm wide. For example, a 300 mm diameter wafer with a 2 mm edge exclusion zone provides a usable area of ​​296 mm in diameter (300 mm minus 2 mm on each side).

[0035] Figure 5 shows a schematic diagram of the outer peripheral edge 62 of a wafer 60 having a portion of the substrate support 333. The wafer 60 shown has a thick line 64 indicating the beginning of the edge exclusion zone 355, and an even thicker line indicating the outer peripheral edge 62 of the wafer 60. In some embodiments, the substrate support 333 has a region where the total deposition extends outside the diameter of the wafer. The transition zone 360 ​​is outside the total deposition region 350. The transition zone 360 ​​has a deposition thickness gradient in which the total deposition in region 350 decreases to the non-deposited region 365 outside the transition zone 355.

[0036] In a typical ALD process, the transition zone between full deposition and non-deposition is approximately 6 mm wide. In the embodiment shown, the transition zone 360 ​​begins within the edge exclusion zone 355 and extends beyond the outer peripheral edge 62 of the wafer 60, resulting in deposition on the portion of the substrate support 333. If the transition zone begins at the beginning of the edge exclusion zone, at least 4 mm of deposition will be present on the substrate support.

[0037] Accordingly, some embodiments of the present disclosure advantageously provide apparatus and methods for narrowing the width of a transition zone and thereby narrowing the width of the deposition on a substrate support. In some embodiments, the width of the transition zone is reduced and positioned so that the entire transition zone is within the wafer edge exclusion zone.

[0038] Figure 6 shows another embodiment using an apparatus according to one or more embodiments of the present disclosure, using diagrams similar to those in Figure 5. In the embodiment shown in Figure 6, the transition zone 360, which extends from the total deposition area 350 at line 361 to the non-deposited area at dotted line 362, has a width narrower than the width of the edge exclusion zone 355. In the embodiment shown, the entire transition zone 360 ​​is located within the edge exclusion zone 355, and therefore the total deposition area 350 covers the wafer 60 within the edge exclusion zone 355, and no deposition occurs on the substrate surface 333.

[0039] In some embodiments, the deposition migration zone 360 ​​is smaller than the deposition migration zone formed on the substrate in a similar processing chamber having the same first and second outer diameters. In some embodiments, the deposition migration zone 360 ​​is smaller than the deposition migration zone formed in a processing chamber having one vacuum channel. For example, a time-domain ALD process is performed in a single-wafer processing chamber.

[0040] The inventors have determined that the difference between the first outer diameter OD1 and the second outer diameter OD2 is the width W of the transition zone 355. Z It was found that this can have an effect. In some embodiments, the difference between the first outer diameter OD1 and the second outer diameter OD2 is 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, or 10 mm or more. In some embodiments, the difference between the first outer diameter OD1 and the second outer diameter OD2 is in the range of 1 mm to 8 mm, or in the range of 2 mm to 5 mm.

[0041] In some embodiments, the difference between the first outer diameter OD1 and the second inner diameter ID2 is the width W of the transition zone 355. ZThis affects the following. In some embodiments, the difference between the first outer diameter OD1 and the second inner diameter ID2 is 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, or 10 mm or more. In some embodiments, the difference between the first outer diameter OD1 and the second outer diameter OD2 is in the range of 1 mm to 8 mm, or in the range of 2 mm to 5 mm. In some embodiments, the difference between the first outer diameter OD1 and the second inner diameter ID2 is a negative number of 5 mm, 4 mm, 3 mm, 2 mm, or 1 mm or less. As used in this method, a negative width means that the second inner diameter ID2 is smaller than the first outer diameter OD1. In some embodiments, the second inner diameter ID2 is within ±0.5 mm or ±0.25 mm of the first outer diameter OD1.

[0042] In some embodiments, the first inner diameter ID1 is within ±5 mm, ±10 mm, ±15 mm, or ±20 mm of the outer diameter of the wafer being processed. For example, in some embodiments where a 300 mm wafer is being processed, the first inner diameter ID1 is in the range of 280 mm to 320 mm, or 285 mm to 315 mm, or 290 mm to 310 mm, or 295 mm to 305 mm.

[0043] In some embodiments, the first outer diameter OD1 is smaller than the diameter of the wafer supported on the plate support. In some embodiments, the first outer diameter OD1 is 5 mm, 4 mm, 3 mm, 2 mm, or 1 mm or more smaller than the diameter of the wafer being processed. In other words, in some embodiments, the first outer diameter OD1 is 5 mm, 4 mm, 3 mm, 2 mm, or 1 mm or more smaller than the diameter of the substrate being processed.

[0044] In some embodiments, the first outer diameter OD1 is within ±5 mm, ±10 mm, ±15 mm, or ±19 mm of the outer diameter of the wafer being processed. The first outer diameter OD1 is greater than the first inner diameter ID1. For example, in some embodiments where a 300 mm wafer is being processed, the first outer diameter OD1 is in the range of 281 mm to 319 mm, or 285 mm to 315 mm, or 290 mm to 310 mm, or 295 mm to 305 mm.

[0045] In some embodiments, the second inner diameter ID2 is within -5mm, 0mm, 5mm, 10mm, 15mm, 20mm, 25mm, 30mm, 35mm, or 40mm of the outer diameter of the wafer being processed. As used in this method, negative numbers mean that the diameter mentioned is smaller than the wafer being processed. For example, in some embodiments where a 300mm wafer is being processed, the second inner diameter ID2 is in the range of 295mm to 340mm, or 300mm to 335mm, or 305mm to 330mm, or 310mm to 325mm, or 315mm to 320mm.

[0046] In some embodiments, the second outer diameter OD2 is within -4mm, 0mm, 5mm, 10mm, 15mm, 20mm, 25mm, 30mm, 35mm, 40mm, or 41mm of the outer diameter of the wafer being processed. The second outer diameter OD2 is greater than the second inner diameter ID2. For example, in some embodiments where a 300mm wafer is being processed, the second outer diameter ID2 is in the range of 296mm to 341mm, or 300mm to 340mm, or 305mm to 335mm, or 310mm to 330mm, or 315mm to 325mm.

[0047] In some embodiments, the first vacuum channel width W1 is 10 mm, 9 mm, 8 mm, 7 mm, 6 mm, 5 mm, 4 mm, 3 mm, or 2 mm or less. In some embodiments, the second vacuum channel width W2 is 10 mm, 9 mm, 8 mm, 7 mm, 6 mm, 5 mm, 4 mm, 3 mm, or 2 mm or less. In some embodiments, the openings of the first vacuum channel (first vacuum channel width W1) and the second vacuum channel (second vacuum channel width W2) are 10 mm, 9 mm, 8 mm, 7 mm, 6 mm, 5 mm, 4 mm, 3 mm, or 2 mm or less, respectively.

[0048] Referring again to Figures 3 and 4, some embodiments further include a first purge area 380a and / or a second purge area 380b outside the first processing area 311 and / or the second processing area 312, respectively. In some embodiments, the first purge area 380 and / or the second purge area 380b include purge gas ports 382a and 382b that provide a flow of purge gas to prevent the diffusion of process gas from the processing areas 311 and 312. In some embodiments, the purge area is outside the processing areas 311 and 312 between processing stations 110 (shown in Figure 1). In some embodiments, the first processing area 311 and the second processing area 312 are spatially separated by the purge area.

[0049] Some embodiments of this disclosure relate to methods for processing a substrate. The substrate is exposed to a first reactant in a first processing region 311 and to a second reactant in a second processing region 312. The first processing region 311 is defined around its outer perimeter by a first vacuum channel 341a having a first inner diameter ID1 and a first outer diameter OD1 defining a first width W1. The second processing region 312 is defined around its outer perimeter by a second vacuum channel 341b having a second inner diameter ID2 and a second outer diameter OD2 defining a second width W2. Either the first outer diameter OD1 of the first vacuum channel 341a or the second outer diameter OD2 of the second vacuum channel 341b is greater than the other of the first vacuum channel 341a or the second vacuum channel 341b.

[0050] In some embodiments, the method further includes moving the substrate from a first processing area 311 to a second processing area 312. In some embodiments, the substrate support 200 (e.g., the substrate support 200 in Figure 1) can be rotated such that the substrate support moves a certain distance around a rotation axis 211, thereby moving the wafer from a first processing station having the first processing area 311 to a second processing station having the second processing area 312.

[0051] Some embodiments of this disclosure relate to a showerhead, or gas distribution plate 320, having a double exhaust channel. Figure 8 shows an embodiment of the gas distribution plate 320 in which a first processing region 311 and a second processing region 312 are superimposed. The processing region is defined by a first vacuum channel 341a and a second vacuum channel 341b. Either the first vacuum channel 341a or the second vacuum channel 341b is used in conjunction with either the first processing region 311 or the second processing region 312. For example, in a first reaction, a first process gas flows into the first processing region 311, flows across the wafer 60, and exits through the first vacuum channel 341a. In a second reaction, a second process gas flows into the second processing region 312, flows across the wafer 60, and exits through the second vacuum channel 341b. While the first process gas is flowing, the second vacuum channel 341b may be under vacuum at the same pressure as the first processing area 311, or it may have a purge gas flow to prevent the reactive gas from flowing into the second vacuum channel 341b. While the second process gas is flowing, the first vacuum channel 341a may be under vacuum at the same pressure as the second processing area 312, or it may have a purge gas flow to prevent the reactive gas from flowing into the first vacuum channel 341a.

[0052] In some embodiments, the gas distribution plate 320 includes a double plenum exhaust. As shown in Figure 8, in some embodiments, a first vacuum channel 341a is connected to a first plenum 345a, and a second vacuum channel 341b is connected to a second plenum 345b. At any given time during processing, the first plenum 345a and the second plenum 345b may be under vacuum or may have gas flowing toward the processing area. In some embodiments, a purge gas channel 382 is located on the opposite side of the processing area from the vacuum channel to provide a purge gas flow to prevent reactive gases from moving to the rest of the processing chamber.

[0053] In some embodiments, the gas distribution plate 320 includes a separable shower head 327 and pump rings 401 and 402. In some embodiments, a purge ring 381 surrounds the pump rings 401 and 402 when the gas distribution plate 320 is assembled. The separable gas distribution plate 320 allows for easy modification of the outer diameter of the vacuum channels. For example, a first pump ring 401 having a first vacuum channel 341a with a first outer diameter OD1 can be replaced with a second pump ring 402 having a second vacuum channel 341b with a second outer diameter OD2.

[0054] In some embodiments, multiple processing stations are present, as shown in Figure 1. In some embodiments, the substrate support is configured to support multiple substrates on multiple heaters, electrostatic chucks, or more generally, on a support surface. The pump ring of the gas distribution plate 320 can be easily modified to adjust the deposition and transfer zone by swapping the pump ring with one of a different outer diameter.

[0055] Referring to Figures 10, 11A, and 11B, one or more embodiments of the present disclosure relate to a gas distribution plate 320 having a multi-legged vacuum channel 440. The gas distribution plate 320 has a body having a front surface 321 and a back surface 323. As shown in Figure 9, a plurality of openings extend through the body of the gas distribution plate 320, allowing the passage of gas from the plenum 322 to the processing area 312. In the embodiment shown in Figure 3, the plenum 322 is integrated into the gas distribution plate 320. In the embodiment shown in Figure 10, the plenum 322 is formed between the back surface 323 and the backing plate 325 of the gas distribution plate 320. The body of the gas distribution plate 320 is bounded by an external peripheral edge 328.

[0056] The vacuum channel 440 extends from the front surface 321 to the back surface 323 of the gas distribution plate 320. The vacuum channel has an inlet opening 446 on the front surface 321 and an outlet opening 448 on the back surface 323. The vacuum channel 440 includes a first leg 441 extending from the inlet opening 446 on the front surface 321 over a first length L1 at a first angle Θ1 with respect to the front surface 321, and a second leg 442 extending from the first leg 441 over a second length L2 to the outlet opening 448 on the back surface 323 at a second angle Θ2 with respect to the front surface 321.

[0057] Referring to Figure 11A, the first leg 441 has a length L1 measured from the front surface 321 of the gas distribution plate 320. Since the widths of the first leg 441 and the second leg 442 may differ, the lengths of the first leg 441 and the second leg 442 are measured relative to the intersection 453 of the first line 451 and the second line 452. The first line 451 is a virtual line measured at the center of the first leg 441 relative to the inner diameter ID and outer diameter OD of the first leg 441. The second line 452 is a virtual line measured at the center of the second leg 442 relative to the surface of the second leg 442 at the center of the gas distribution plate and the surface of the second leg 442 far from the center of the gas distribution plate.

[0058] In some embodiments, the first leg 441 has a first length L1 ranging from 1 mm to 7.5 mm. In some embodiments, the first leg 441 has a first length L1 ranging from 2 mm to 6 mm, or from 3 mm to 5 mm, or about 4 mm.

[0059] In some embodiments, the first leg 441 extends from the front surface 321 at a first angle Θ1. An angle less than 90° means that the end of the first leg 441 closer to the back surface 323 is farther from the center of the gas distribution plate 320, and therefore the first leg 441 is inclined toward the back surface 323 and the outer peripheral edge 328. In some embodiments, the first angle Θ1 is in the range of 80° to 100° relative to the front surface 321, or in the range of 85° to 95° relative to the front surface. In some embodiments, the first angle is 92°, 91°, 90°, 85°, 80°, 75° or less relative to the front surface 321, and also 65°, 70°, 75°, 80° or more.

[0060] The width W1 of the first leg 441 is in the range of 1 mm to 3 mm, or 1.5 mm to 2.5 mm, or 1.75 mm to 2.25 mm. In some embodiments, the width W1 of the first leg 441 is uniform throughout along the depth into the gas distribution plate. In some embodiments, the width of the first leg varies along the depth into the gas distribution plate.

[0061] In some embodiments, the first leg is a continuous circular channel formed on the front surface of the gas distribution plate. Figure 10 shows a continuous channel for the first leg 441 and a number of openings 444 for the second leg 442, each having an opening that connects the second leg 442 to the channel which is the first leg 441.

[0062] In some embodiments, the first leg of the vacuum channel has an inner diameter in the range of 300 mm to 302 mm. In some embodiments, the first leg of the vacuum channel has an outer diameter in the range of 301 mm to 305 mm.

[0063] In some embodiments, as shown in Figure 11D, the inlet opening 446 of the vacuum channel 440 has a fillet 447 on the front surface 321. In some embodiments, the fillet 447 has a radius r ranging from 0.15 mm to 0.4 mm. fIt has the following characteristics. If fillet 447 is present, the inner diameter ID and outer diameter OD are measured from the outer extension of fillet 447.

[0064] In some embodiments, as shown in Figure 11E, the inlet opening 446 of the vacuum channel 440 has a chamfer 449 on its front surface 321. In some embodiments, the chamfer 449 has a chamfered surface having a length ranging from 0.1 mm to 0.4 mm. When the chamfer 449 is present, the inner diameter ID and outer diameter OD are measured from the outer extension of the chamfer 449.

[0065] Referring back to Figure 11C from Figure 11A, in some embodiments, the second leg 442 has a second width W2 in the range of 1.1 mm to 6 mm, or in the range of 2 mm to 5 mm, or in the range of 3 mm to 4 mm. In some embodiments, the width W2 of the second leg 442 is the same as or wider than the width W1 of the first leg 441.

[0066] In some embodiments, the second angle Θ2 of the second leg 442 is smaller than the first angle Θ1 of the first leg 441. In some embodiments, the second angle Θ2 is in the range of 25° to 70°, or 30° to 65°, or 35° to 60°, or 40° to 55°.

[0067] Referring again to Figure 10, in some embodiments, the shape of the vacuum channel 440 allows the wafer 60 to protrude from the edge ring 245 by lengths ranging from 1 mm to 5 mm, 1.5 mm to 4 mm, or 2 mm to 3 mm.

[0068] Some embodiments of this disclosure relate to a processing chamber incorporating a gas distribution plate 320 shown in Figures 10 to 11E. In some embodiments, the processing chamber comprises a first gas distribution plate having a first front surface on the opposite side of the top surface of a substrate support, the first gas distribution plate having a first vacuum channel on the first front surface, and the first vacuum channel having a first outer diameter. In some embodiments, the processing chamber includes a second processing region comprising a second gas distribution plate having a second front surface on the opposite side of the top surface of a substrate support, the second gas distribution plate having a second vacuum channel on the second front surface, the second vacuum channel having an inlet opening on the front surface and an outlet opening on the second back surface of the second gas distribution plate, the second vacuum channel comprising a first leg extending a first length from the inlet opening on the second front surface at a first angle with respect to the second front surface, and a second leg extending a second length from the first leg to the outlet opening on the second back surface at a second angle with respect to the second front surface, the inlet opening of the second vacuum channel having a second inner diameter greater than a first outer diameter.

[0069] Further embodiments relate to a processing method in which a wafer is exposed to a first reactant in a first processing area and to a second reactant in a second processing area. The first and second processing areas have a gas distribution plate having vacuum channels having different inner diameters.

[0070] Throughout this specification, any reference to “one embodiment,” “a particular embodiment,” “one or more embodiments,” or “embodiment” means that a particular feature, structure, material, or property described in relation to an embodiment is included in at least one embodiment of this disclosure. Therefore, the appearance of phrases such as “in one or more embodiments,” “in a particular embodiment,” “in one embodiment,” or “in an embodiment” in various places throughout this specification does not necessarily mean the same embodiment of this disclosure. Furthermore, particular features, structures, materials, or properties can be combined in any suitable way in one or more embodiments.

[0071] While this disclosure has been described herein with reference to specific embodiments, it will be understood by those skilled in the art that the embodiments described are merely illustrative of the principles and applications of this disclosure. It will be apparent to those skilled in the art that various modifications and changes can be made to the methods and apparatus of this disclosure without departing from the spirit and scope of this disclosure. Accordingly, this disclosure may include modifications and changes that fall within the scope of the appended claims and their equivalents.

Claims

1. A main body having a front and back surface and an outer peripheral edge that define the thickness of the main body, A vacuum channel having an inlet opening on the front and an outlet opening on the back, comprising a first leg extending from the inlet opening on the front at a first angle with respect to the front and over a first length, and a second leg extending from the first leg to the outlet opening on the back at a second angle with respect to the front and over a second length. A gas distribution plate comprising, A gas distribution plate wherein the first angle is in the range of 80° to 100° with respect to the front surface, the second leg has a second angle in the range of 35° to 60° with respect to the front surface, the first leg has a first width in the range of 1 mm to 3 mm, the second leg has a second width in the range of 2 mm to 5 mm, and the first leg has an inner diameter in the range of 300 mm to 302 mm.

2. The gas distribution plate according to claim 1, wherein the first leg has a first length in the range of 1 mm to 7.5 mm.

3. The gas distribution plate according to claim 1, wherein the first leg has an outer diameter in the range of 301 mm to 305 mm.

4. The gas distribution plate according to claim 1, wherein the inlet opening has a fillet on the front surface, and the fillet has a radius in the range of 0.15 mm to 0.4 mm.

5. The gas distribution plate according to claim 1, wherein the inlet opening has a chamfer on its front surface, and the chamfer has a chamfered surface with a length in the range of 0.1 mm to 0.4 mm.

6. A substrate support having a top surface configured to support a wafer during processing and to move the wafer between a plurality of processing regions, wherein the substrate support comprises an edge ring having an internal projection projecting inward, and the internal projection is sized to provide a gap between the top surface of the substrate support and the top surface of the internal projection projecting inward, A first processing region comprising a first gas distribution plate having a first front surface on the opposite side of the top surface of the substrate support, wherein the first gas distribution plate has a first vacuum channel on its first front surface, and the first vacuum channel has a first outer diameter, and the first processing region A second processing region comprising a second gas distribution plate having a second front surface on the opposite side of the top surface of the substrate support, wherein the second gas distribution plate has a second vacuum channel on the second front surface, the second vacuum channel has an inlet opening on the second front surface and an outlet opening on the second back surface of the second gas distribution plate, the second vacuum channel having a first leg extending a first length from the inlet opening on the second front surface at a first angle with respect to the second front surface, and a second leg extending a second length from the first leg to the outlet opening on the second back surface at a second angle with respect to the second front surface, and the inlet opening of the second vacuum channel has a second inner diameter larger than the first outer diameter, and A processing chamber equipped with the following:

7. The processing chamber according to claim 6, wherein the first leg has a first length in the range of 1 mm to 7.5 mm.

8. The processing chamber according to claim 6, wherein the first angle is in the range of 80° to 100° with respect to the second front surface.

9. The processing chamber according to claim 6, wherein the first leg has a first width in the range of 1 mm to 3 mm.

10. The processing chamber according to claim 6, wherein the first leg has an inner diameter in the range of 300 mm to 302 mm.

11. The processing chamber according to claim 10, wherein the first leg has an outer diameter in the range of 301 mm to 305 mm.

12. The processing chamber according to claim 6, wherein the inlet opening has a fillet on the second front surface, and the fillet has a radius in the range of 0.15 mm to 0.4 mm.

13. The processing chamber according to claim 6, wherein the inlet opening has a chamfer on the second front surface, and the chamfer has a chamfered surface with a length in the range of 0.1 mm to 0.4 mm.

14. The processing chamber according to claim 6, wherein the second leg has a second width in the range of 2 mm to 5 mm.

15. A method for processing a substrate, Exposing the wafer supported on the substrate support according to claim 6 to the first reactant within the first processing area according to claim 6, Moving the wafer to the second processing area described in claim 6, Exposing the wafer to the second reactant within the second processing area described in claim 6. Methods that include...

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