Semiconductor device and method for manufacturing the same

Abstract

To provide a semiconductor device capable of stabilizing characteristics and a manufacturing method thereof.SOLUTION: A semiconductor device according to an embodiment includes a base, a first silicon carbide region, and a second silicon carbide region. The first silicon carbide region includes at least one selected from the group consisting of nitrogen, phosphorus, and arsenic. The second silicon carbide region includes at least one selected from the group consisting of boron, aluminum, and gallium. The first silicon carbide region is provided between the base and the second silicon carbide region. At least a portion of the first silicon carbide region includes fluorine.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] Embodiments of the present invention relate to semiconductor devices and methods for manufacturing the same. [Background technology]

[0002] For example, there are semiconductor devices that contain silicon carbide. In semiconductor devices, stable characteristics are desired. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2014-146748 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] Embodiments of the present invention provide a semiconductor device capable of stabilizing its characteristics and a method for manufacturing the same. [Means for solving the problem]

[0005] According to embodiments of the present invention, the semiconductor device includes a substrate, a first silicon carbide region, and a second silicon carbide region. The first silicon carbide region includes at least one selected from the group consisting of nitrogen, phosphorus, and arsenic. The second silicon carbide region includes at least one selected from the group consisting of boron, aluminum, and gallium. The first silicon carbide region is provided between the substrate and the second silicon carbide region. At least a portion of the first silicon carbide region contains fluorine. [Brief explanation of the drawing]

[0006] [Figure 1] Figure 1 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. [Figure 3]Figure 3 is a graph illustrating a semiconductor device according to the first embodiment. [Figure 4] Figures 4(a) to 4(d) are schematic plan views illustrating the characteristics of a semiconductor device. [Figure 5] Figure 5 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. [Figure 6] Figure 6 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. [Figure 7] Figure 7 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. [Figure 8] Figure 8 is a flowchart illustrating a method for manufacturing a semiconductor device according to the second embodiment. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figure 1 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. As shown in Figure 1, the semiconductor device 110 according to this embodiment includes a substrate 18, a first silicon carbide region 10, and a second silicon carbide region 20.

[0009] The substrate 18 may include, for example, silicon carbide (SiC). The substrate 18 may be, for example, a silicon carbide substrate. The substrate 18 may be, for example, a silicon carbide bulk single crystal substrate. In one example, the silicon carbide contained in the substrate 18 is 4H-SiC. The substrate 18 may contain 3C-SiC. The conductivity type of the substrate 18 is arbitrary.

[0010] The first silicon carbide region 10 and the second silicon carbide region 20 contain SiC. The first silicon carbide region 10 and the second silicon carbide region 20 may contain, for example, 3C-SiC.

[0011] The first silicon carbide region 10 contains a first impurity. The first impurity contains at least any one selected from the group consisting of nitrogen, phosphorus, and arsenic. The first silicon carbide region 10 is of n-type.

[0012] The second silicon carbide region 20 contains a second impurity. The second impurity contains at least any one selected from the group consisting of boron, aluminum, and gallium. The second silicon carbide region 20 is of p-type. The first silicon carbide region 10 is provided between the substrate 18 and the second silicon carbide region 20.

[0013] Taking the first direction D1 from the substrate 18 to the first silicon carbide region 10 as the Z-axis direction. Taking one direction perpendicular to the Z-axis direction as the X-axis direction. Taking the direction perpendicular to the Z-axis direction and the X-axis direction as the Y-axis direction.

[0014] The first silicon carbide region 10 and the second silicon carbide region 20 are in a layered form along the X-Y plane. The first silicon carbide region 10 includes a first surface 10F. The first surface 10F faces the substrate 18. As will be described later, the first surface 10F may be inclined with respect to the crystal plane of the substrate 18 (for example, the (0001) plane). The first silicon carbide region 10 may include a second surface 10G. The first surface 10F is between the substrate 18 and the second surface 10G. The second surface 10G faces the second silicon carbide region 20.

[0015] At least a part of the first silicon carbide region 10 contains fluorine. Thereby, stable characteristics can be obtained.

[0016] For example, the substrate 18 contains base plane dislocations (BPDs). Based on the base plane dislocations in the substrate 18, base plane dislocations occur in the first silicon carbide region 10. During the operation of the semiconductor device, stacking faults extend from the base plane dislocations into the first silicon carbide region 10. These stacking faults are, for example, single Shockley stacking faults.

[0017] For example, when holes are injected into an n-type silicon carbide semiconductor device, stacking faults originating from the BPD expand. This easily degrades the forward characteristics. Furthermore, when partial dislocations of stacking faults reach the p-type semiconductor region, leakage current increases in the reverse characteristics. This results in a breakdown voltage failure.

[0018] It was found that the inclusion of fluorine in the first silicon carbide region 10 suppresses the expansion of stacking faults originating from the BPD. This suppresses the degradation of properties caused by the expansion of stacking faults. According to this embodiment, a semiconductor device with stabilized properties can be provided.

[0019] During operation of the semiconductor device 110, the electric field tends to concentrate at the interface between the first silicon carbide region 10 and the second silicon carbide region 20. By introducing fluorine at a depth deeper than this interface (for example, the second surface 10G), the expansion of stacking faults is suppressed in the vicinity of the electric field concentration. This effectively suppresses variations in properties.

[0020] Figure 2 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. As shown in Figure 2, in the semiconductor device 111 according to this embodiment, the first silicon carbide region 10 includes a first local region 10A. In the first local region 10A, the fluorine concentration is locally high. The first local region 10A may extend parallel to a plane (for example, the XY plane) that intersects the first direction D1. The position of the first local region 10A in the Z-axis direction is between the interface between the first silicon carbide region 10 and the second silicon carbide region 20 and the substrate 18.

[0021] Figure 3 is a graph illustrating a semiconductor device according to the first embodiment. Figure 3 shows the results of SIMS (Secondary Ion Mass Spectrometry) analysis of semiconductor device 111. The horizontal axis of Figure 3 represents the position pZ in the Z-axis direction. For example, it represents the fluorine concentration C1.

[0022] As shown in Figure 3, the first silicon carbide region 10 includes a first position p1 in the Z-axis direction (first direction D1). In the profile of the fluorine concentration C1 along the first direction D1, the fluorine concentration C1 reaches a first peak value pv1 at the first position p1. The first local region 10A includes this first position p1.

[0023] Such a first local region 10A can be formed, for example, by ion implantation of fluorine from the side of the second silicon carbide region 20. Ion implantation allows for the effective implantation of fluorine at a high concentration at the desired depth (first position p1).

[0024] In the example in Figure 3, the first peak value pv1 of the fluorine concentration C1 is approximately 5 × 10⁻⁶. 17 cm -3 In this embodiment, the first peak value pv1 is 1 × 10⁻⁶. 16 cm -3 The above 1 x 10 20 cm -3 The following is sufficient. Fluorine can effectively suppress the expansion of stacking faults.

[0025] For example, the fluorine concentration C1 in the first local region 10A may be 1 / 10 or more of the first peak value pv1. In one example, the width w1 in the first direction D1 of the first local region 10A may be 0.5 μm or less.

[0026] The distance dp1 along the Z-axis direction between the first position p1 and the second surface 10G is preferably, for example, 2 μm or less. More preferably, the distance dp1 is, for example, 1 μm or less. The first position p1 is included in the first silicon carbide region 10.

[0027] In the embodiment, fluorine may be provided in the first silicon carbide region 10 with a broad concentration profile. In the embodiment, the profile of fluorine concentration C1 does not need to have a clear peak at the first position p1. For example, at one position included in a region where the distance from the second surface 10G is 1 μm or less, the fluorine concentration C1 is 1 × 10⁻⁶. 16 cm -3 That concludes the explanation. The fluorine concentration C1 at this one location is higher than the fluorine concentration C1 at a distance of 2 μm from the second surface 10G. Even with this configuration, expansion of the lamination result can be suppressed.

[0028] As illustrated in Figure 3, fluorine may be introduced locally. With high controllability, a desired concentration of fluorine can be introduced into the first silicon carbide region 10.

[0029] As described above, fluorine is introduced into the first silicon carbide region 10 via the second silicon carbide region 20 by ion implantation. Fluorine can be effectively introduced to relatively deep locations. Other elements (e.g., chlorine) have difficulty reaching the depth of the first silicon carbide region 10. By using fluorine as the element to be introduced, fluorine can be efficiently introduced to the desired location.

[0030] Figures 4(a) to 4(d) are schematic plan views illustrating the characteristics of a semiconductor device. Figures 4(a) and 4(b) correspond to semiconductor device 111 according to the embodiment. Figures 4(c) and 4(d) correspond to semiconductor device 119 of the reference example. In semiconductor device 119, the first silicon carbide region 10 does not contain fluorine. In semiconductor device 119, the first local region 10A is not provided. These figures schematically illustrate photoluminescence images. By irradiating the semiconductor device with ultraviolet light, it is possible to determine whether the BPD expands into stacking faults. Figures 4(a) and 4(c) correspond to the state before irradiation with ultraviolet light. Figures 4(b) and 4(d) correspond to the state after irradiation with ultraviolet light.

[0031] As shown in Figures 4(c) and 4(d), in the reference example semiconductor device 119, ultraviolet light irradiation causes the stacking fault SF originating from the BPD to expand. The stacking fault SF reaches the second surface 10G.

[0032] In contrast, as shown in Figures 4(a) and 4(b), in the semiconductor device 111 according to the embodiment, although the stacking fault SF expands when irradiated with ultraviolet light, the stacking fault SF does not expand beyond the first local region 10A. The stacking fault SF does not reach the second surface 10G and does not reach the second silicon carbide region 20.

[0033] When the stacking fault SF expands and reaches the p-type second silicon carbide region 20, the leakage current in the reverse direction increases through the stacking fault SF as a path. In this embodiment, the stacking fault SF is prevented from reaching the second surface 10G and the second silicon carbide region 20. The leakage current path is suppressed, resulting in stable characteristics.

[0034] For example, between the substrate 18 and the first local region 10A, stacking faults expand due to at least one of voltage application and ultraviolet irradiation. Between the first local region 10A and the second silicon carbide region 20, stacking faults do not substantially expand due to at least one of voltage application and ultraviolet irradiation. By providing a region containing fluorine (e.g., the first local region 10A), the expansion of stacking faults can be suppressed in the region above that region.

[0035] Figure 5 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. As shown in Figure 5, in the semiconductor device 112 according to this embodiment, the first silicon carbide region 10 includes a plurality of first local regions 10A. At least one of the plurality of first local regions 10A includes the first position p1 (the position where the fluorine concentration C1 is at its peak). The plurality of first local regions 10A are provided along a plane (for example, the XY plane) that intersects the first direction D1.

[0036] For example, multiple island-shaped first local regions 10A may be provided. For example, multiple stripe-shaped first local regions 10A may be provided.

[0037] As shown in Figure 5, the first silicon carbide region 10 includes a first surface 10F facing the substrate 18. The angle between the (0001) surface of the first silicon carbide region 10 and the first surface 10F is defined as angle θ. Angle θ may be greater than 0. For example, angle θ may be between 1° and 10°. Angle θ corresponds to the offset angle.

[0038] Let thickness d be the thickness of multiple first local regions 10A along the first direction D1. Let distance w be the distance between multiple first local regions 10A along the second direction D2, which intersects the first direction D1. The second direction D2 is, for example, the X-axis direction.

[0039] In this embodiment, the angle θ, thickness d, and distance w may satisfy, for example, the relationship w < (d / tanθ). This suppresses the BPD from the substrate 18 from extending upward by passing through the multiple first local regions 10A. For example, the BPD from the substrate 18 collides with one of the multiple first local regions 10A. The collision of the BPD with one of the multiple first local regions 10A suppresses the expansion of the stacking result starting from the BPD.

[0040] In this embodiment, fluorine may be present between multiple lattice points of the crystal lattice of the first silicon carbide region 10.

[0041] Figure 6 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. In the semiconductor device 113 according to this embodiment, at least a portion of the second silicon carbide region 20 contains fluorine. The configuration of the semiconductor device 113, excluding this portion, may be the same as that of the semiconductor devices 110 to 112.

[0042] As shown in Figure 6, in this example, the second silicon carbide region 20 includes a second local region 20A. The second local region 20A contains fluorine. For example, the second local region 20A may locally contain fluorine.

[0043] In the semiconductor device 113, for example, the expansion of stacking defects from the upward direction (surface side) of the second silicon carbide region 20 can be suppressed. More stable characteristics can be obtained.

[0044] As shown in FIG. 6, for example, the second silicon carbide region 20 includes a second position p2 in the first direction D1. In the profile of the fluorine concentration C1 along the first direction D1, the fluorine concentration C1 may become a second peak value at the second position p2. In one example, the second peak value is 1×10 16 cm -3 or more and 1×10 20 cm -3 or less.

[0045] For example, the second local region 20A includes the second position p2. Such a second local region 20A extends parallel to the plane (X-Y plane) intersecting the first direction D1.

[0046] FIG. 7 is a schematic cross-sectional view illustrating a semiconductor device according to the first embodiment. As shown in FIG. 7, the semiconductor device 120 according to the embodiment includes, in addition to the above-described substrate 18, first silicon carbide region 10, and second silicon carbide region 20, a third silicon carbide region 30, a first electrode 51, a second electrode 52, a third electrode 53, and an insulating portion 61.

[0047] The third silicon carbide region 30 contains at least any one selected from the group consisting of nitrogen, phosphorus, and arsenic. The third silicon carbide region 30 contains SiC. The third silicon carbide region 30 is, for example, n-type.

[0048] The direction from the first electrode 51 to the second electrode 52 is along the first direction D1. The first silicon carbide region 10 includes a first partial region 10a and a second partial region 10b. The boundary between these partial regions may be clear or unclear.

[0049] The second silicon carbide region 20 includes a third partial region 20c and a fourth partial region 20d. The boundary between these partial regions may be clear or unclear.

[0050] The third subregion 20c lies between the first subregion 10a and the third silicon carbide region 30 in the first direction D1. The direction from the second subregion 10b to the third electrode 53 is along the first direction D1. The fourth subregion 20d lies between the second subregion 10b and the third silicon carbide region 30 in the second direction D2, which intersects the first direction D1. The second direction D2 is, for example, the X-axis direction.

[0051] The first electrode 51 is electrically connected to the first silicon carbide region 10. The second electrode 52 is electrically connected to the third silicon carbide region 30. The insulating portion 61 is located between the second partial region 10b and the third electrode 53.

[0052] In this example, the second silicon carbide region 20 further includes the fifth subregion 20e. The third silicon carbide region 30 is located between the fourth subregion 20d and the fifth subregion 20e in the second direction D2. The second electrode 52 is electrically connected to the fifth subregion 20e.

[0053] The current flowing between the first electrode 51 and the second electrode 52 can be controlled by the potential of the third electrode 53. The potential of the third electrode 53 may be, for example, a potential based on the potential of the second electrode 52. The third electrode 53 functions as a gate electrode. The semiconductor device 120 is, for example, a transistor.

[0054] In the semiconductor device 120, the first silicon carbide region 10 contains fluorine. The first silicon carbide region 10 includes a first local region 10A. The second silicon carbide region 20 may contain fluorine. The second silicon carbide region 20 may include a second local region 20A. The expansion of stacking faults is suppressed. Stable properties are obtained.

[0055] In the semiconductor device 120, the substrate 18 may be n-type. In this case, the semiconductor device 120 is a MOS-type FET. For example, the first silicon carbide region 10 corresponds to, for example, a drift layer. The second silicon carbide region 20 corresponds to, for example, a p-well. The third silicon carbide region 30 corresponds to, for example, n + Corresponds to the source.

[0056] In this embodiment, the substrate 18 may be p-type. In this case, the semiconductor device 120 is an IGBT (Insulated Gate Bipolar Transistor).

[0057] The first silicon carbide region 10 and the second silicon carbide region 20 according to this embodiment may be applied to diodes and the like.

[0058] In the embodiment, the first local region 10A may include at least one selected from the group consisting of fluorine, nitrogen, and phosphorus. For example, the semiconductor device according to the embodiment (e.g., the semiconductor device 111 illustrated in Figure 2) includes a substrate 18, a first silicon carbide region 10, and a second silicon carbide region 20. At least a portion of the first silicon carbide region 10 contains a first element. The first element includes at least one selected from the group consisting of fluorine, nitrogen, and phosphorus. The first silicon carbide region 10 includes a first position p1 in a first direction D1 (see, for example, Figure 2). In the profile of the concentration of the first element along the first direction D1, the concentration of the first element reaches a first peak value pv1 at the first position p1. By locally providing not only fluorine, but also nitrogen or phosphorus, the expansion of stacking faults can be suppressed.

[0059] (Second Embodiment) The second embodiment relates to a method for manufacturing a semiconductor device. Figure 8 is a flowchart illustrating a method for manufacturing a semiconductor device according to the second embodiment. As shown in Figure 8, the method for manufacturing a semiconductor device according to the embodiment involves preparing a structure 10X (see Figure 1) (step S101) and introducing fluorine (first introduction: step S110).

[0060] The structure 10X includes a substrate 18, a first silicon carbide region 10, and a second silicon carbide region 20 (see Figure 1). The first silicon carbide region 10 contains a first impurity element, which includes at least one selected from the group consisting of nitrogen, phosphorus, and arsenic. The second silicon carbide region 20 contains a second impurity element, which includes at least one selected from the group consisting of boron, aluminum, and gallium. In a first direction D1 from the substrate 18 to the first silicon carbide region 10, the first silicon carbide region 10 is located between the substrate 18 and the second silicon carbide region 20.

[0061] Fluorine is introduced into the first silicon carbide region 10. Fluorine introduction is carried out, for example, by ion implantation.

[0062] This allows for the production of semiconductor devices such as 110-112, which can be used to manufacture semiconductor devices in which the expansion of stacking faults can be suppressed.

[0063] The preparation of structure 10X (step S101) may include introducing a second impurity element into a portion of the silicon carbide layer that will become the first silicon carbide region 10 (step S102). The preparation of structure 10X (step S101) may further include heat treatment after the introduction of the second impurity element (step S103). The heat treatment conditions may be, for example, 1600°C to 1900°C for 1 to 10 minutes. The heat treatment may activate the impurities, for example.

[0064] Prior to the introduction of fluorine (step S110), at least a portion of the first silicon carbide region 10 may be irradiated with at least one selected from the group consisting of hydrogen (protons), helium, and electrons (step S104). Irradiating with hydrogen (protons), etc., before ion implantation of fluorine makes it easier to introduce fluorine to the desired position in the first silicon carbide region 10. For example, fluorine can be introduced with high controllability.

[0065] After the introduction of fluorine (step S110), fluorine may be further introduced into the second silicon carbide region 20 (second introduction: step S120). This allows, for example, the formation of a second local region 20A, which can more effectively suppress stacking faults.

[0066] The embodiment may include the following configuration (e.g., proposed technical details). (Composition 1) Substrate and, A first silicon carbide region comprising at least one selected from the group consisting of nitrogen, phosphorus, and arsenic, A second silicon carbide region comprising at least one selected from the group consisting of boron, aluminum, and gallium, wherein the first silicon carbide region is provided between the substrate and the second silicon carbide region, Equipped with, A semiconductor device wherein at least a portion of the first silicon carbide region contains fluorine.

[0067] (Configuration 2) The first silicon carbide region includes a first position in a first direction from the substrate to the first silicon carbide region, The semiconductor device according to configuration 1, wherein, in the profile of fluorine concentration along the first direction, the fluorine concentration has a first peak value at the first position.

[0068] (Composition 3) The aforementioned first peak value is 1 × 10⁻⁶ 16 cm -3 The above 1 x 10 20 cm -3 The semiconductor device described in Configuration 2 is as follows.

[0069] (Composition 4) The first silicon carbide region includes the first local region, The first local region includes the first position, The semiconductor device according to configuration 2 or 3, wherein the first local region extends parallel to a plane intersecting the first direction.

[0070] (Composition 5) The fluorine concentration in the first local region is 1 / 10 or more of the first peak value. The semiconductor device according to configuration 4, wherein the width of the first local region in the first direction is 0.5 μm or less.

[0071] (Composition 6) The first silicon carbide region includes a plurality of first local regions, At least one of the plurality of first local regions includes the first position, The semiconductor device according to configuration 2 or 3, wherein the plurality of first local regions are provided along a plane intersecting the first direction.

[0072] (Composition 7) The first silicon carbide region includes a first surface facing the substrate, The angle θ between the (0001) plane of the first silicon carbide region and the first plane, the thickness d of the plurality of first local regions along the first direction, and the distance w between the plurality of first local regions along the second direction intersecting the first direction are, A semiconductor device as described in configuration 6, satisfying the relationship w < (d / tanθ).

[0073] (Composition 8) The semiconductor device according to any one of configurations 1 to 6, wherein the fluorine is located between a plurality of lattice points of the crystal lattice of the first silicon carbide region.

[0074] (Composition 9) The semiconductor device according to configuration 1, wherein at least a portion of the second silicon carbide region contains fluorine.

[0075] (Composition 10) The second silicon carbide region includes a second position in the first direction from the substrate to the first silicon carbide region, The semiconductor device according to configuration 9, wherein, in the profile of fluorine concentration along the first direction, the fluorine concentration has a second peak value at the second position.

[0076] (Composition 11) The aforementioned second peak value is 1 × 10⁻⁶ 16 cm -3 The above 1 x 10 20 cm -3 The semiconductor device described in configuration 10 is as follows.

[0077] (Composition 12) The second silicon carbide region includes a second local region, The second local region includes the second position, The semiconductor device according to configuration 10 or 11, wherein the second local region extends parallel to a plane intersecting the first direction.

[0078] (Composition 13) Between the substrate and the first local region, stacking faults are expanded by applying a voltage and / or irradiating with ultraviolet light. The semiconductor device according to configuration 4 or 5, wherein the stacking fault between the first local region and the second silicon carbide region is not substantially expanded by at least one of the voltage application and the ultraviolet irradiation.

[0079] (Composition 14) The third silicon carbide region, First electrode and, The second electrode and The third electrode and Insulating part and, Furthermore, The third silicon carbide region comprises at least one selected from the group consisting of nitrogen, phosphorus, and arsenic. The direction from the first electrode to the second electrode is along the first direction, The first silicon carbide region includes a first subregion and a second subregion, The second silicon carbide region includes a third subregion and a fourth subregion, The third subregion is located between the first subregion and the third silicon carbide region in the first direction. The direction from the second subregion to the third electrode is along the first direction, The fourth subregion is located between the second subregion and the third silicon carbide region in a second direction intersecting the first direction. The first electrode is electrically connected to the first silicon carbide region, The second electrode is electrically connected to the third silicon carbide region, The insulating portion is located between the second partial region and the third electrode, in the semiconductor device according to any one of configurations 2 to 6.

[0080] (Composition 15) The second silicon carbide region further includes a fifth subregion, The third silicon carbide region is located between the fourth subregion and the fifth subregion in the second direction. The semiconductor device according to configuration 14, wherein the second electrode is electrically connected to the fifth subregion.

[0081] (Composition 16) Substrate and, A first silicon carbide region containing a first impurity element, which includes at least one selected from the group consisting of nitrogen, phosphorus, and arsenic, A second silicon carbide region comprising at least one selected from the group consisting of boron, aluminum, and gallium, wherein in a first direction from the substrate to the first silicon carbide region, the first silicon carbide region is provided between the substrate and the second silicon carbide region, Equipped with, At least a portion of the first silicon carbide region contains a first element comprising at least one selected from the group consisting of fluorine, nitrogen, and phosphorus. The first silicon carbide region includes a first position in the first direction, A semiconductor device wherein, in the profile of the concentration of the first element along the first direction, the concentration of the first element has a first peak value at the first position.

[0082] (Composition 17) A structure is prepared, the structure comprising a substrate, a first silicon carbide region and a second silicon carbide region, the first silicon carbide region comprising a first impurity element comprising at least one selected from the group consisting of nitrogen, phosphorus and arsenic, the second silicon carbide region comprising a second impurity element comprising at least one selected from the group consisting of boron, aluminum and gallium, and in a first direction from the substrate to the first silicon carbide region, the first silicon carbide region is provided between the substrate and the second silicon carbide region. A method for manufacturing a semiconductor device, comprising introducing fluorine into the first silicon carbide region.

[0083] (Composition 18) The preparation of the aforementioned structure is Introducing the second impurity element into a portion of the silicon carbide layer that constitutes the first silicon carbide region, The process involves heat treatment after the introduction of the second impurity element, A method for manufacturing a semiconductor device as described in configuration 17, including the method described in configuration 17.

[0084] (Composition 19) A method for manufacturing a semiconductor device according to configuration 17 or 18, wherein, prior to the introduction of the fluorine, at least a portion of the first silicon carbide region is irradiated with at least one selected from the group consisting of hydrogen, helium, and electrons.

[0085] (Composition 20) A method for manufacturing a semiconductor device according to any one of configurations 17 to 19, wherein fluorine is further introduced into the second silicon carbide region.

[0086] According to the embodiment, it is possible to provide a semiconductor device and a method for manufacturing the same that can stabilize its characteristics.

[0087] In this specification, "perpendicular" and "parallel" do not mean strictly perpendicular and strictly parallel, but also include variations in the manufacturing process, for example, and it is sufficient if they are substantially perpendicular and substantially parallel.

[0088] Embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in a semiconductor device, such as the substrate, silicon carbide region, electrodes, and insulating part, is included within the scope of the present invention as long as those skilled in the art can appropriately select from the known range to implement the present invention and obtain similar effects.

[0089] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0090] Furthermore, all semiconductor devices and their manufacturing methods that can be implemented by those skilled in the art by appropriately modifying the design based on the semiconductor device and its manufacturing method described above as embodiments of the present invention also fall within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0091] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0092] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0093] 10, 20, 30: 1st, 2nd, and 3rd silicon carbide regions; 10A, 20A: 1st and 2nd local regions; 10F, 10G: 1st and 2nd planes; 10X: structure; 10a, 10b: 1st and 2nd subregions; 18: substrate; 20c, 20d, 20e: 3rd, 4th, and 5th subregions; 51-53: 1st to 3rd electrodes; 61: insulating part; 110-113, 120: semiconductor device; C1: fluorine concentration; D1, D2: 1st and 2nd directions; SF: stacking fault; d: thickness; dp1: distance; p1, p2: 1st and 2nd positions; pZ: position; pv1: 1st peak value; w: distance; w1: width; θ: angle

Claims

1. Substrate and, A first silicon carbide region comprising at least one selected from the group consisting of nitrogen, phosphorus, and arsenic, A second silicon carbide region comprising at least one selected from the group consisting of boron, aluminum, and gallium, wherein the first silicon carbide region is provided between the substrate and the second silicon carbide region, Equipped with, At least a portion of the first silicon carbide region contains fluorine, The first silicon carbide region includes a first position in a first direction from the substrate to the first silicon carbide region, In the fluorine concentration profile along the first direction, the fluorine concentration reaches a first peak value at the first position. The first silicon carbide region includes a plurality of first local regions, At least one of the plurality of first local regions includes the first position, The plurality of first local regions are provided along a plane intersecting the first direction, The first silicon carbide region includes a first surface facing the substrate, The angle θ between the (0001) plane of the first silicon carbide region and the first plane, the thickness d of the plurality of first local regions along the first direction, and the distance w between the plurality of first local regions along the second direction intersecting the first direction are, A semiconductor device that satisfies the relationship w < (d / tanθ).

2. The aforementioned first peak value is 1 × 10⁻⁶ １６ cm －３ The above 1 x 10 ２０ cm －３ The semiconductor device according to claim 1, wherein the semiconductor device is as follows:

3. The fluorine concentration in the first local region is 1 / 10 or more of the first peak value. The semiconductor device according to claim 1, wherein the width of the first local region in the first direction is 0.5 μm or less.

4. The semiconductor device according to claim 1, wherein the fluorine is located between a plurality of lattice points of the crystal lattice of the first silicon carbide region.

5. The semiconductor device according to claim 1, wherein at least a portion of the second silicon carbide region contains fluorine.

6. The second silicon carbide region includes a second position in the first direction from the substrate to the first silicon carbide region, The semiconductor device according to claim 5, wherein, in the profile of fluorine concentration along the first direction, the fluorine concentration has a second peak value at the second position.

7. The second peak value is 1 × 10⁻⁶ １６ cm －３ The above 1 x 10 ２０ cm －３ The semiconductor device according to claim 6, which is as follows:

8. The second silicon carbide region includes a second local region, The second local region includes the second position, The semiconductor device according to claim 6 or 7, wherein the second local region extends parallel to a plane intersecting the first direction.

9. Between the substrate and the first local region, stacking faults are expanded by applying a voltage and / or irradiating with ultraviolet light. The semiconductor device according to claim 1, wherein the stacking fault does not expand between the first local region and the second silicon carbide region by at least one of the voltage application and the ultraviolet irradiation.

10. A substrate and, A first silicon carbide region comprising at least one selected from the group consisting of nitrogen, phosphorus, and arsenic, A second silicon carbide region comprising at least one selected from the group consisting of boron, aluminum, and gallium, wherein the first silicon carbide region is provided between the substrate and the second silicon carbide region, The third silicon carbide region, First electrode and, The second electrode and The third electrode and Insulating part and, Equipped with, At least a portion of the first silicon carbide region contains fluorine, The first silicon carbide region includes a first position in a first direction from the substrate to the first silicon carbide region, In the fluorine concentration profile along the first direction, the fluorine concentration reaches a first peak value at the first position. The third silicon carbide region comprises at least one selected from the group consisting of nitrogen, phosphorus, and arsenic. The direction from the first electrode to the second electrode is along the first direction, The first silicon carbide region includes a first subregion and a second subregion, The second silicon carbide region includes a third subregion and a fourth subregion. The third subregion is located between the first subregion and the third silicon carbide region in the first direction. The direction from the second subregion to the third electrode is along the first direction, The fourth subregion is located between the second subregion and the third silicon carbide region in a second direction intersecting the first direction. The first electrode is electrically connected to the first silicon carbide region, The second electrode is electrically connected to the third silicon carbide region, The insulating portion is a semiconductor device located between the second partial region and the third electrode.

11. The second silicon carbide region further includes a fifth subregion, The third silicon carbide region is located between the fourth subregion and the fifth subregion in the second direction. The semiconductor device according to claim 10, wherein the second electrode is electrically connected to the fifth subregion.

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