Multi-level DC pulse power supply and control method for a multi-level DC pulse power supply

Abstract

To eliminate malfunction of an LC resonant circuit caused by a voltage level when a DC power supply is switched when a multi-level DC pulse voltage is output by selecting the DC voltage of a DC power supply.SOLUTION: A multilevel DC pulse power supply and a control method thereof according to the present invention are configured and controlled to set the time point for switching the DC voltage of a DC power supply to an appropriate timing based on the voltage state of an LC resonant circuit during supply and regeneration, thereby suppressing malfunction of the LC resonant circuit caused by the voltage level when the DC power supply is switched in the voltage relationship between the input voltage of the LC resonant circuit and the voltage of the output capacitor.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a DC pulse power supply and a method for controlling the DC pulse power supply, and more particularly to a multi-level DC pulse power supply that supplies a multi-level high-frequency pulse voltage to a load, and a method for controlling the multi-level DC pulse power supply.

Background Art

[0002] In the manufacturing process of semiconductor devices, plasma processing apparatuses are used in film formation processes, etching processes, ashing processes, etc. because of the advantage that high-precision process control is easy. In this plasma processing apparatus, a DC pulse power supply is used as a power supply that applies pulsed DC power to high-frequency plasma.

[0003] The DC pulse power supply needs to generate high-voltage pulses with a peak value of about several hundred V to several kV. Patent Documents 1 to 3 disclose a pulse power supply that generates a DC pulse voltage by a charge / discharge circuit composed of a capacitor, an LC resonance circuit of a reactor, and a semiconductor switch, and Patent Document 2 discloses a pulse power supply that generates a multi-level DC pulse voltage.

[0004] Patent Document 1 discloses a configuration including a DC power supply and two switching elements, forming an LC resonance circuit by a capacitive load and a charge / discharge circuit including a switching element, a capacitor, and a reactor, and generating a negative-polarity DC pulse voltage by complementarily turning on / off the two switching elements to move charges between the capacitive load and the capacitor. Patent Document 1 also discloses a configuration for regenerating the energy accumulated in the capacitive load to the power supply device side.

[0005] Patent Document 2 describes a configuration comprising a basic voltage generation unit that supplies two voltage levels of DC pulse voltage, and a resonant drive unit that raises and lowers the DC pulse voltage between the two voltage levels. The basic voltage generation unit is equipped with a current-limiting resistor to prevent element damage due to excessive inrush current, such as when the power is turned on. Patent Document 2 discloses that, in order to improve power loss due to this current-limiting resistor and the rise and fall characteristics of the DC pulse voltage, a switching operation is performed between the basic voltage generation unit and the resonant drive unit when the charging voltage of the output capacitor charged by the resonant current is equal to a predetermined potential of the basic voltage generation unit, and when the charging voltage of the output capacitor discharged by the resonant current is equal to the ground potential. Patent Document 2 also discloses a configuration for generating a DC pulse voltage of a variable voltage level.

[0006] Patent Document 3 addresses the problems of Patent Document 2, which requires voltage detection means and complex control for switching control of switching elements, by providing a resonant leg circuit consisting of two switching elements that supply a resonant current during LC resonant operation, and a main leg circuit consisting of two switching elements that selectively output either the power supply voltage or the ground potential at the voltage output terminal. The main leg circuit enables faster rising and falling times by using partial resonance, which utilizes a portion of the rising and falling slopes of the resonant waveform through switching operation. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2018-107904 [Patent Document 2] Patent No. 6613411 [Patent Document 3] Patent No. 6810317 [Overview of the Initiative] [Problems that the invention aims to solve]

[0008] The pulse power supply devices described in Patent Documents 1 and 3 output a single-level DC pulse voltage based on the potential difference between a predetermined voltage and ground potential.

[0009] In addition to the method of supplying a single-level DC pulse voltage to the plasma load when exciting a plasma, there is a known method of supplying multiple levels of DC pulse voltages with different pulse levels by providing several predetermined voltages.

[0010] A DC pulse power supply that generates a single-level DC pulse voltage outputs one DC voltage. In contrast, a DC pulse power supply that generates multiple levels of DC pulse voltage selectively switches between and outputs different DC voltages.

[0011] The inventors of this application have found that a DC pulse power supply that generates a multi-level DC pulse voltage using a selected DC voltage has operational challenges that are not anticipated with a single-level DC pulse power supply that generates a single-level DC pulse voltage using a single DC voltage.

[0012] In an LC resonant circuit, the voltage state resulting from a single DC voltage supplied from a DC power source differs from the voltage state resulting from a DC voltage selected from among several types of DC voltages supplied from the DC power source, due to the switching of DC voltages.

[0013] More specifically, when a single-level DC pulse voltage is generated, the charging voltage of the LC resonant circuit's capacitor and the DC voltage of the DC power supply are at the same voltage level. However, when selecting the DC voltage of the DC power supply to output a multi-level DC pulse voltage, the charging voltage of the LC resonant circuit's capacitor and the DC voltage of the DC power supply become different voltage levels depending on the switching state at the time of switching the DC power supply. This difference in voltage levels at the time of switching presents a problem as it can cause malfunctions in the operation of the LC resonant circuit.

[0014] Malfunctions caused by differences in voltage levels during switching include, for example, the supply of a peak-shaped positive voltage during a supply operation that provides a negative voltage to a plasma load, and malfunctions where the return to zero voltage is incomplete due to insufficient regenerative operation.

[0015] Figure 7 in Patent Document 2 discloses an example configuration that includes three DC voltage sources with different output voltages and generates three levels of DC pulse voltage by selecting the DC voltage of the DC power supply. However, Patent Document 2 does not disclose anything about the fact that differences in voltage levels occur when selecting the DC voltage of the DC power supply, or that these differences in voltage levels can cause malfunctions in the LC resonant circuit.

[0016] The present invention aims to solve the aforementioned conventional problems and eliminate malfunctions of the LC resonant circuit caused by voltage levels during DC power supply switching when selecting the DC voltage of a DC power supply to output multi-level DC pulse voltages. [Means for solving the problem]

[0017] The multi-level DC pulse power supply and its control method of the present invention suppress malfunctions of the LC resonant circuit caused by voltage level changes during DC power supply switching by setting the timing of switching between DC voltages with different voltage levels of the DC power supply to an appropriate timing for each voltage state of the LC resonant circuit, such as the voltage state when supplying power and the voltage state when regenerating power.

[0018] The present invention comprises an embodiment A of a multi-level DC pulse power supply and an embodiment B of a control method for a multi-level DC pulse power supply.

[0019] (A: Multi-level DC pulse power supply) The multi-level DC pulse power supply of the present invention is a multi-level DC pulse power supply that outputs multiple levels of high-frequency pulse voltages. (a) A DC power supply unit that selectively switches and outputs multiple levels of DC voltage, (b) A resonance section that converts the DC voltage of the DC power supply section into a high-frequency pulse voltage, (c) A control section that controls the switching operation and is provided with.

[0020] The resonance section of the present invention includes an LC resonance circuit and a bidirectional switch that switches the current direction of this LC resonance circuit. The control section controls a first switching operation for switching the voltage level of the DC voltage output by the DC power supply section and a second switching operation for switching the bidirectional switch. (d) In the control of the switching operation of the control section, (d1) The first switching operation is a switching operation in the DC power supply section, and is an operation for switching the voltage level of the DC voltage applied from the DC power supply section to the LC resonance circuit. (d2) The second switching operation is a switching operation in the LC resonance circuit, and is an operation for switching between a supply operation for supplying a DC voltage to the output capacitor of the LC resonance circuit and a regeneration operation for regenerating the electrostatic energy accumulated in the output capacitor. (d3) The control section controls so that the timing of the first switching operation is between the supply operation timing at the regeneration operation timing of the second switching operation.

[0021] The control section of the present invention outputs a control signal for controlling the switching operations of the DC power supply section and the LC resonance circuit. The control signal output by the control section includes a voltage switching signal for selectively switching the voltage levels of a multi-level DC voltage in the first switching operation, and a switching signal for controlling the bidirectional switch to switch between the supply operation and the regeneration operation in the second switching operation.

[0022] In the second switching operation, the switching signal for controlling the bidirectional switch includes a supply switching signal for controlling one switching element of the bidirectional switch to switch to the supply operation and a regeneration switching signal for controlling the other switching element of the bidirectional switch to switch to the regeneration operation.

[0023] <� The timing for setting the voltage switching signal for the first switching operation is within the period between the time constant of the LC resonant circuit elapsed from the regenerative switching signal in the second switching operation and the rising edge of the subsequent supply switching signal. The timing of the first switching operation is set to fall within this period in the second switching operation. By performing the first switching operation within the period set in the second switching operation, malfunctions of the LC resonant circuit caused by changes in voltage level during DC power supply switching are eliminated.

[0024] (LC resonant circuit configuration) The LC resonant circuit of the present invention is composed of a π-type LC circuit or an L-type LC circuit. A π-type LC circuit consists of a power supply capacitor connected in parallel to the DC power supply section, an output capacitor connected in parallel to the output terminal, and a reactor connected in series between the power supply capacitor and the output capacitor. In this π-type LC resonant circuit, the electrostatic energy stored in the output capacitor during regenerative operation is regenerated into the power supply capacitor.

[0025] An L-type LC circuit is a series LC circuit consisting of a reactor connected in series between the input and output terminals and an output capacitor connected in parallel to the output terminal. In this L-type LC resonant circuit, the electrostatic energy stored in the output capacitor during regenerative operation is regenerated into the DC power supply.

[0026] As an auxiliary mechanism to release the electrostatic energy stored in the output capacitor, a configuration in which a series circuit of a switching element and a resistor is connected in parallel to the output capacitor is also possible. By switching the switching element connected in parallel to the output capacitor to the ON state during regenerative operation, the electrostatic energy of the output capacitor that is not sufficiently regenerated during regeneration is consumed by the resistor. The resistor brings the electrostatic energy of the output capacitor to a zero state, ensuring the continuous repetition of the resonant operation of the LC resonant circuit.

[0027] (Two-way switch) A bidirectional switch can be configured in several ways. One configuration of a bidirectional switch comprises a parallel connection of a first series circuit of a switching element and a diode, and a second series circuit of the same switching element and diode. The diodes in the first and second series circuits connected in parallel have opposite conduction directions. The direction of current is switched by switching both switching elements of the bidirectional switch.

[0028] Another configuration of the bidirectional switch includes a parallel connection of a first series circuit consisting of a switching element, a diode, and a reactor, and a second series circuit consisting of a switching element, a diode, and a reactor. The conduction directions of the diodes in the first and second series circuits connected in parallel are opposite to each other. The direction of current is switched by switching both switching elements of the bidirectional switch. This bidirectional switch is not limited to a configuration in which the inductor values ​​of the reactors in the first and second series circuits are the same, but may also be configured with different inductor values. By setting the inductor values ​​of the reactors to different values, the time constants of the supply operation and regenerative operation can be set individually.

[0029] (DC power supply) The DC power supply unit of the present invention can be configured in multiple forms. One configuration of the DC power supply unit comprises multiple DC voltage sources with different voltage levels and a switching element that selectively switches between these multiple DC voltage sources. Another configuration of the DC power supply unit comprises a single DC voltage source and a voltage generation circuit that generates multiple voltage levels from this single DC voltage source.

[0030] (B: Control method for multi-level DC pulse power supply) The multi-level DC pulse power supply of the present invention comprises a DC power supply unit that selectively switches and outputs multiple levels of DC voltage, and a resonant unit that converts the DC voltage of the DC power supply unit into a high-frequency pulse voltage. The resonant unit comprises an LC resonant circuit and a bidirectional switch that switches the direction of the current in the LC resonant circuit. The control method for the multi-level DC pulse power supply of the present invention controls the selective switching of the multiple levels of DC voltage and the switching of the current direction in the LC resonant circuit of the multi-level DC pulse power supply, and outputs multiple levels of high-frequency pulse voltage.

[0031] The control method of the present invention is (a) Control of a first switching operation that switches the voltage level of the DC voltage output by the DC power supply unit, (b) Control of a second switching operation to switch the bidirectional switch and It is equipped with, (c) The first switching operation is the control of the operation of switching the voltage level of the DC voltage applied to the LC resonant circuit. (d) The second switching operation is the control of switching between a supply operation, which supplies a DC voltage to the output capacitor of the LC resonant circuit, and a regenerative operation, which recovers the electrostatic energy stored in the output capacitor. (e) The first switching operation time is between the regenerative operation time and the supply operation time of the second switching operation.

[0032] The control method of the present invention controls the switching operation of the DC power supply and the switching operation of the LC resonant circuit using a control signal.

[0033] The first switching operation for switching the voltage level of the DC voltage applied to the LC resonant circuit is an operation to selectively switch DC power supplies with different voltage levels according to a voltage switching signal, or an operation to selectively switch the voltage level of the DC power supply generated by the DC power supply unit. The second switching operation for switching between the supply operation and regenerative operation of the LC resonant circuit involves switching the conduction direction of the bidirectional switch toward the load side based on the supply switching signal for the supply operation, and switching the conduction direction of the bidirectional switch toward the power supply side based on the regenerative switching signal for the regenerative operation.

[0034] The setting time for the voltage switching signal in the first switching operation is set within the period between the time constant of the LC resonant circuit elapsed from the regenerative switching signal in the second switching operation and the rising edge of the subsequent supply switching signal. By setting the voltage switching signal for the first switching operation within this period in the second switching operation, malfunctions of the LC resonant circuit caused by voltage levels during DC power supply switching are eliminated. [Effects of the Invention]

[0035] As described above, according to the present invention, when selecting the voltage level of the DC voltage of a DC power supply to output a multi-level DC pulse voltage, it is possible to eliminate malfunctions of the LC resonant circuit caused by the voltage level during switching of the DC power supply. [Brief explanation of the drawing]

[0036] [Figure 1] This is a schematic diagram of a first configuration example of the multi-level DC pulse power supply of the present invention. [Figure 2] This figure shows the signals and voltage waveforms of each component when a multi-level DC pulse power supply is being properly controlled. [Figure 3] This diagram shows the signals and voltage waveforms at each component when the voltage Vc across the power supply capacitor switches from voltage level V1 to voltage level V2. [Figure 4] This diagram shows the key parts of the signals and voltage waveforms at each stage when the voltage Vc across the power supply capacitor switches from voltage level V1 to voltage level V2. [Figure 5] This figure shows the operating state at each time point t1 to t7 in Figure 3. [Figure 6] This diagram shows a portion of the signals and voltage waveforms at various points when the voltage Vc across the power supply capacitor switches from voltage level V2 to voltage level V1. [Figure 7] This diagram shows the key parts of the signals and voltage waveforms at each stage when the voltage Vc across the power supply capacitor switches from voltage level V2 to voltage level V1. [Figure 8]This figure shows the operating status at each time point t11 ​​to t17 in Figure 6. [Figure 9] This is a diagram illustrating a first configuration example of the control unit. [Figure 10] This diagram illustrates an example of operation of the first configuration example of the control unit. [Figure 11] This diagram illustrates the second and third configuration examples of the control unit. [Figure 12] This diagram illustrates an example of operation of the second configuration example of the control unit. [Figure 13] This diagram illustrates an example of operation of the third configuration example of the control unit. [Figure 14] This diagram illustrates the signals and voltage waveforms of each component during a control malfunction. [Figure 15] This diagram shows the key parts of the signals and voltage waveforms in each component during a malfunction when switching from voltage level V1 to voltage level V2. [Figure 16] This diagram illustrates the operating state in a manner of erroneous control during the switching from voltage level V1 to voltage level V2. [Figure 17] This diagram shows the key parts of the signals and voltage waveforms in each component during a malfunction when switching from voltage level V1 to voltage level V2. [Figure 18] This diagram illustrates the operating state in a manner of erroneous control during the switching from voltage level V1 to voltage level V2. [Figure 19] This diagram shows the key parts of the signals and voltage waveforms in each component during a malfunction when switching from voltage level V1 to voltage level V2. [Figure 20] This diagram illustrates the operating state in a manner of erroneous control during the switching from voltage level V1 to voltage level V2. [Figure 21] This diagram shows the key parts of the signals and voltage waveforms in each component during a malfunction when switching from voltage level V1 to voltage level V2. [Figure 22] This diagram illustrates the operating state in a manner of erroneous control during the switching from voltage level V1 to voltage level V2. [Figure 23]This diagram shows the key parts of the signals and voltage waveforms in each component during the erroneous control behavior when switching from voltage level V2 to voltage level V1. [Figure 24] This diagram illustrates the operating state in a manner of miscontrol during the switching from voltage level V2 to voltage level V1. [Figure 25] This diagram shows the key parts of the signals and voltage waveforms in each component during the erroneous control behavior when switching from voltage level V2 to voltage level V1. [Figure 26] This diagram illustrates the operating state in a manner of miscontrol during the switching from voltage level V2 to voltage level V1. [Figure 27] This diagram shows the key parts of the signals and voltage waveforms in each component during the erroneous control behavior when switching from voltage level V2 to voltage level V1. [Figure 28] This diagram illustrates the operating state in a manner of miscontrol during the switching from voltage level V2 to voltage level V1. [Figure 29] This diagram shows the key parts of the signals and voltage waveforms in each component during the erroneous control behavior when switching from voltage level V2 to voltage level V1. [Figure 30] This diagram illustrates the operating state in a manner of miscontrol during the switching from voltage level V2 to voltage level V1. [Figure 31] This figure shows a second example configuration of a multi-level DC pulse power supply. [Figure 32] This figure shows a third example configuration of a multi-level DC pulse power supply. [Figure 33] This figure shows a fourth example configuration of a multi-level DC pulse power supply. [Modes for carrying out the invention]

[0037] (1) First configuration example of a multi-level DC pulse power supply, and the signals and voltage waveforms of each part. Figure 1 is a schematic diagram of a first configuration example of the multi-level DC pulse power supply 1 of the present invention. The multi-level DC pulse power supply 1 of the present invention is a power supply device that supplies a DC pulse voltage to a load 5. The load 5 is a capacitive load, such as a plasma load, and is represented in Figure 1 by a capacitor 51 with load capacitance CE. When the load 5 is a plasma load, the multi-level DC pulse power supply 1 supplies a negative DC pulse voltage.

[0038] The multi-level DC pulse power supply 1 comprises a DC power supply unit 2, a resonant unit 3, and a control unit 4. The DC power supply unit 2 and the resonant unit 3, which are connected in series, generate a DC pulse voltage and supply it to the load 5.

[0039] The DC power supply unit 2 is a power supply unit that selectively switches and outputs multiple levels of DC voltage. In Figure 1, two DC power supplies with different voltage levels are provided: DC power supply 21 with voltage level V1 and DC power supply 22 with voltage level V2. A switching element SW2 selectively outputs the DC voltages of the two DC power supplies 21 and 22. The switching element SW2 is switched by voltage switching signals QH and QL. Switching by voltage switching signal QH outputs the voltage V1 of DC power supply 21, and switching by voltage switching signal QL outputs the voltage V2 of DC power supply 22.

[0040] Although Figure 1 shows an example where two voltage levels, V1 and V2, are selectively output, the DC power supply unit 2 of the present invention is not limited to two voltage levels; it may also output three or more voltage levels. When there are three or more voltage levels, DC power supplies for each voltage level are provided, and these DC power supplies are selectively output by switching them with a switching element SW2.

[0041] Furthermore, as an alternative configuration for the DC power supply unit 2, it may be configured to generate multiple voltage levels from the voltage of a single DC power supply. A configuration that generates multiple voltage levels can be achieved by applying any circuit configuration such as a voltage divider circuit or a voltage booster circuit.

[0042] The resonant section 3 converts the DC voltage from the DC power supply section 2 into a high-frequency pulse voltage and supplies the converted high-frequency pulse voltage to the load 5. The resonant section 3 includes an LC resonant circuit RES and a bidirectional switch SW1 that switches the direction of the current in the LC resonant circuit RES.

[0043] The LC resonant circuit RES shown in Figure 1 illustrates an example of a π-type LC circuit configuration. The LC resonant circuit RES is a π-type LC circuit consisting of a power supply capacitor 31 connected in parallel to the DC power supply unit 2, an output capacitor 32 connected in parallel to the output terminal, and a reactor 33 connected in series between the power supply capacitor 31 and the output capacitor 32. Here, the capacitance of the power supply capacitor 31 is represented by C1, and the capacitance of the output capacitor 32 is represented by C2.

[0044] In this π-type LC circuit, electrostatic energy is stored in the power supply capacitor 31 by the DC voltages V1 and V2 supplied from the DC power supply unit 2. The electrostatic energy stored in the power supply capacitor 31 is exchanged with the output capacitor 32 via the reactor 33 through resonant operation.

[0045] The bidirectional switch SW1 has a configuration in which a series circuit of a switching element and diode D1, whose on / off state is controlled by a supply switching signal QP1, and a series circuit of a switching element and diode D2, whose on / off state is controlled by a regenerative switching signal QP2 are connected in parallel, and is connected between the power supply capacitor 31 and the reactor 33.

[0046] Diode D1 is connected with the forward direction from the output capacitor 32 to the power supply capacitor 31, and diode D2 is connected with the forward direction from the power supply capacitor 31 to the output capacitor 32. In the circuit shown in Figure 1, the DC power supplies 21 and 22 are grounded on their positive voltage side to supply a negative voltage to the resonant section 3, and a configuration is shown in which a negative voltage is applied to the load 5. In this configuration of supplying a negative voltage, during the resonant operation of the resonant section 3, the bidirectional switch SW1 is turned on by the supply switching signal QP1, causing current to flow through diode D1, and supply operation is performed by charging current from the power supply capacitor 31 to the output capacitor 32. When the regenerative switching signal QP2 is turned on, current flows through diode D2, and regenerative operation is performed by discharging current from the output capacitor 32 to the power supply capacitor 31.

[0047] The control unit 4 controls the switching operation of the DC power supply unit 2 and the resonant unit 3. The control unit 4 outputs voltage switching signals QH and QL to the switching element SW2 of the DC power supply unit 2 to control the switching operation of the switching element SW2. Voltage switching signal QH connects the DC power supply 21 and the output terminal of the DC power supply unit 2 via the switching operation of the switching element SW2, and outputs a DC voltage with voltage level V1. Voltage switching signal QL connects the DC power supply 22 and the output terminal of the DC power supply unit 2 via the switching operation of the switching element SW2, and outputs a DC voltage with voltage level V2.

[0048] The control unit 4 outputs a supply switching signal QP1 and a regenerative switching signal QP2 to the bidirectional switch SW1 of the resonant unit 3, which control the switching operation of the bidirectional switch SW1. The supply switching signal QP1 controls the on / off state of the switching element to which diode D1 of the bidirectional switch SW1 is connected, causing a charging current to flow from the power supply capacitor 31 to the output capacitor 32 to perform the supply operation. The regenerative switching signal QP2 controls the on / off state of the switching element to which diode D2 of the bidirectional switch SW1 is connected, causing a regenerative current to flow from the output capacitor 32 to the power supply capacitor 31 to perform the regenerative operation.

[0049] During supply operation and regenerative operation, which are switched by the switching operation of the bidirectional switch SW1, the voltage Vc of the power supply capacitor 31 is switched by the switching operation of the switching element SW2 to become the DC voltage V1 of the DC power supply 21 or the DC voltage V2 of the DC power supply 22.

[0050] (2) Signals, voltage waveforms, and operation examples of each part during normal control Figures 2 to 8 illustrate the signals, voltage waveforms, and operational examples of each component when the control unit 4 is functioning correctly.

[0051] (2a) Signal and voltage waveforms of each part during normal control Figure 2 shows the signals and voltage waveforms of each component when a multi-level DC pulse power supply is being controlled correctly.

[0052] Figure 2(a) shows the voltage waveform of the voltage Vc across the power supply capacitor 31, illustrating an example of a voltage waveform where the voltage Vc of the power supply capacitor 31 periodically changes alternately between voltage levels V1 and V2 with a time interval Tvc. This interval Tvc is the periodic interval at which the peak voltage value of the high-frequency pulse output by the multi-level DC pulse power supply 1 changes.

[0053] Figure 2(b) shows the signal waveform of the voltage switching signal QH. The side of the switching element SW2 connected to the DC power supply 21 is switched ON, supplying a negative voltage high DC voltage V1 to the resonant section 3 and charging the power supply capacitor 31 with voltage V1. Figure 2(c) shows the signal waveform of the voltage switching signal QL. The side of the switching element SW2 connected to the DC power supply 22 is switched ON, supplying a negative voltage low DC voltage V2 to the resonant section 3 and charging the power supply capacitor 31 with voltage V2.

[0054] Figure 2(d) shows the signal waveform of the supply switching signal QP1. By switching the side to which diode D1 of the bidirectional switch SW1 is connected to the ON state, the power supply capacitor 31 is connected to the output capacitor 32 via the reactor 33 to form a π-type LC resonant circuit. In this π-type LC resonant circuit, the forward direction of diode D1 is from the output capacitor 32 to the power supply capacitor 31, so the negative voltage Vc of the power supply capacitor 31 is applied to the output capacitor 32 in a supply operation. Figure 2(e) shows the signal waveform of the regeneration switching signal QP2. By switching the side to which diode D2 of the bidirectional switch SW1 is connected to the ON state, the power supply capacitor 31 is connected to the output capacitor 32 via the reactor 33 to form a π-type LC resonant circuit. In this π-type LC resonant circuit, the forward direction of diode D2 is from the power supply capacitor 31 to the output capacitor 32, so the voltage of the output capacitor 32 is returned to the power supply capacitor 31 in a regenerative operation.

[0055] Figure 2(f) shows the voltage waveform of the output voltage Vout of the multi-level DC pulse power supply 1. A negative voltage is generated at the output capacitor 32 due to the supply operation of the supply switching signal QP1, and a zero voltage is generated due to the regenerative operation of the regenerative switching signal QP2.

[0056] The output voltage Vout at the output terminal of the resonant section 3 of the multi-level DC pulse power supply is the voltage across the output capacitor 32. This high-frequency pulse voltage periodically changes between the negative voltage generated by the supply operation due to the supply switching signal QP1 and the zero voltage generated by the regenerative operation due to the regenerative switching signal QP2, due to the resonant operation of the resonant section 3. The negative voltage values ​​of this high-frequency pulse voltage are voltages V1 and V2, and these voltage levels V1 and V2 change according to the switching operation of the DC power supply section 2.

[0057] (2b) The manner in which voltage level V1 is switched to voltage level V2. The switching process from voltage level V1 to voltage level V2 will be explained using Figures 3 to 5. Figure 3 shows some of the signals and voltage waveforms at various points when the voltage Vc across the power supply capacitor 31 switches from voltage level V1 to voltage level V2. Here, both voltage levels V1 and V2 are negative voltages, and the negative voltage level of voltage level V2 is smaller than that of voltage level V1.

[0058] Figure 3(a) shows the voltage waveform of the voltage Vc across the power supply capacitor 31, illustrating the state in which the voltage Vc switches from voltage V1 to voltage V2. Figures 3(b) and (c) show the signal waveforms of the voltage switching signals QH and QL used to switch the voltage Vc across the power supply capacitor 31. At time tC1, the supply of voltage V1 from the DC power supply 21 stops when the voltage switching signal QH switches from a high level to a low level, and the supply of voltage V2 from the DC power supply 22 starts when the voltage switching signal QL switches from a low level to a high level. As the switching element SW2 switches at time tC1, the voltage Vc across the power supply capacitor 31 switches from DC voltage V1 to DC voltage V2.

[0059] Figure 3(d) shows the signal waveform of the supply switching signal QP1, which switches the side to which diode D1 of the bidirectional switch SW1 is connected to the ON state. The supply switching signal QP1 turns on the switching element connected to diode D1 of the bidirectional switch SW1 between time points t1 and t2, and between time points t5 and t6, and supplies power to the output capacitor 32. Diode D1 is configured to have the current flowing from the output capacitor 32 to the power supply capacitor 31 in the forward direction.

[0060] Figure 3(e) shows the signal waveform of the regenerative switching signal QP2, which switches the side of the bidirectional switch SW1 to which diode D2 is connected to the ON state. Between time points t3 and t4, and between time points t7 and t8, the regenerative switching signal QP2 turns on the switching element connected to the diode D2 side of the bidirectional switch SW1, and regenerative operation from the output capacitor 32 is performed. Diode D2 is configured to have the current direction from the power supply capacitor 31 to the output capacitor 32 as the forward direction.

[0061] The time point tC1 for the switching operation of the voltage Vc of the power capacitor 31 from voltage V1 to voltage V2 is set within the period T12 between the time point (t4) for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time point (t5) for the supply operation that supplies a DC voltage to the output capacitor 32.

[0062] Figure 3(f) shows the voltage waveform of the output voltage Vout of the multi-level DC pulse power supply 1. Before the switching element SW2 switches from voltage V1 to voltage V2, the voltage Vc across the power supply capacitor 31 is voltage V1. When the voltage Vc across the power supply capacitor 31 is voltage V1, the voltage across the output capacitor 32 becomes a negative voltage (2 × V1) at time t2, when the supply switching signal QP1 is in operation, and becomes zero at time t3, when the regenerative switching signal QP2 is in operation. As a result, between time t2 and time t3, a voltage Vc of (2 × V1) is output as the output voltage Vout.

[0063] At the point after the switching element SW2 switches the output voltage Vout of the DC power supply unit 2 from voltage V1 to voltage V2, the voltage Vc across the power supply capacitor 31 is voltage V2. When the voltage Vc across the power supply capacitor 31 is voltage V2, the output voltage Vout becomes a negative voltage (2 × V2) at time t6, when the supply switching signal QP1 is in operation, and becomes zero voltage at time t7, when the regenerative switching signal QP2 is in operation. As a result, a voltage Vc of (2 × V2) is output as the output voltage Vout between time t6 and time t7. Note that the voltage Vc across the output capacitor 32 becomes twice the voltage of the power supply capacitor 31 due to resonant operation.

[0064] The settings for the power supply voltage switching point will be explained below using Figures 4 and 5. The multi-level DC pulse power supply of the present invention suppresses malfunctions of the LC resonant circuit caused by voltage levels during DC power supply switching by setting the timing of the power supply voltage switching performed in the first switching operation of the DC power supply unit to be within the period between the timing of the regenerative operation and the timing of the supply operation in the second switching operation of the resonant unit. More specifically, the said period is the period between the time when the regenerative switching signal is input in the second switching operation and the time constant of the LC resonant circuit has elapsed, and the rising edge of the supply switching signal that is input thereafter.

[0065] Figure 4 shows the essential parts of the signals and voltage waveforms when the voltage Vc of the power supply capacitor 31 switches from voltage V1 to V2. The points t1, t2, t7, and t8 shown in Figure 3 are omitted, and only points t3 to t6 are shown. Figure 4 shows the signal states and output voltage Vout in each section A to E, which are divided by the signal states of the supply switching signal QP1 and the regenerative switching signal QP2 that control the second switching operation.

[0066] In section A, the voltage switching signals QH and QL are at high and low levels, respectively (Figures 4(b) and 4(c)), so the voltage Vc across the power supply capacitor 31 is voltage V1 (Figure 4(a)). Also, the regenerative switching signal QP2 and the supply switching signal QP1 are both at low levels, and the bidirectional switch SW1 is in the off state (Figures 4(d) and 4(e)), so the output voltage Vout is voltage (2 × V1) due to the previous supply operation (Figure 4(f)).

[0067] In section B, similar to section A, the voltage switching signals QH and QL are in the High and Low states, respectively (Figures 4(b) and 4(c)), and the voltage Vc across the power supply capacitor 31 is voltage V1 (Figure 4(a)). On the other hand, the supply switching signal QP1 remains at the Low level, but the regenerative switching signal QP2 rises from the Low state to the High state at time t3, entering the regenerative operation state (Figures 4(d) and 4(e)), and the output voltage Vout rises from voltage (2 × V1) towards zero voltage with a time constant Tr due to the regenerative operation (Figure 4(f)).

[0068] In section C, at time tC1, the voltage switching signal QH switches from a high level to a low level, and the voltage switching signal QL switches from a low level to a high level (Figures 4(b) and 4(c)). As a result, the voltage Vc across the power supply capacitor 31 switches from voltage V1 to voltage V2 at time tC1 (Figure 4(a)).

[0069] The regenerative switching signal QP2 switches from a high level to a low level at time t4, which is the switching point between section B and section C. As a result, both the regenerative switching signal QP2 and the supply switching signal QP1 are at a low level, and the bidirectional switch SW1 is in the off state (Figures 4(d) and 4(e)). The output voltage Vout is held at the zero voltage of section B (Figure 4(f)).

[0070] In section D, the voltage switching signals QH and QL are in a Low and High state, respectively, due to the voltage switching that occurred at time tC1 in section C (Figures 4(b) and 4(c)), and the voltage Vc across the power supply capacitor 31 is voltage V2 (Figure 4(a)). On the other hand, the regenerative switching signal QP2 remains at a Low level, but the supply switching signal QP1 rises from a Low level at time t5 and switches to a High level, entering the supply operation state (Figures 4(d) and 4(e)), and the output voltage Vout decreases from zero voltage to voltage (2 × V2) with a time constant Tr due to the supply operation (Figure 4(f)).

[0071] In section E, similar to section D, the voltage switching signals QH and QL are at Low and High levels, respectively (Figures 4(b) and 4(c)), and the voltage Vc across the power supply capacitor 31 is voltage V2 (Figure 4(a)). On the other hand, the supply switching signal QP1 switches from High to Low at time t6, which is the switching point between section D and section E. Therefore, both the regenerative switching signal QP2 and the supply switching signal QP1 are at Low levels, and the bidirectional switch SW1 is in the OFF state (Figures 4(d) and 4(e)). The output voltage Vout is maintained at the voltage of section D (2 × V2) (Figure 4(f)).

[0072] Figure 5 shows the operating state at each time point t1 to t7 shown in Figure 3. Here, an example of a π-type LC resonant circuit is shown.

[0073] Figure 5(a) shows the operating state during power supply at time t1. The voltage Vc of the power supply capacitor 31 is the voltage V1 charged by the voltage V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and charging current is supplied from the power supply capacitor 31 to the output capacitor 32 by resonant operation. Here, since the voltage V1 is a negative voltage, the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side.

[0074] Due to resonant operation, the output voltage Vout becomes (V1+VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL (=2×V1-V1) of the reactor 33. Since the inductor voltage VL is equal to voltage V1, the output voltage Vout becomes (2×V1). The output capacitor 32 is charged to the voltage (2×V1).

[0075] Figure 5(b) shows the operating state during holding at time t2. Since both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, the bidirectional switch SW1 is turned off and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is maintained at voltage (2 × V1), and the output voltage Vout is also maintained at voltage (2 × V1).

[0076] Figure 5(c) shows the operating state during regeneration at time t3. The bidirectional switch SW1 is switched to the direction in which diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and regeneration of discharge current from the output capacitor 32 to the power supply capacitor 31 occurs through resonant operation. Here, since the voltage V1 is a negative voltage, the direction of current flowing through reactor 33 is from the power supply capacitor 31 side to the output capacitor 32 side.

[0077] Due to regeneration through resonant operation, the output voltage Vout becomes (V1-VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33, considering the forward direction of diode D2. Since the inductor voltage VL is (2×V1-V1), the output voltage Vout becomes (V1-(2×V1-V1)=0). The output capacitor 32 discharges from voltage (2×V1) to zero voltage.

[0078] Figure 5(d) shows the operating state during holding at time t4. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0079] Figure 5(e) shows the state at time tC1 where the DC voltage has been switched from voltage level V1 to voltage level V2. Here, both voltage levels V1 and V2 are negative voltages, and voltage level V2 is smaller than voltage level V1 in the negative direction. At time tC1, the bidirectional switch SW1 is in the off state and the resonant operation is stopped, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0080] Figure 5(f) shows the operating state during power supply at time t5. The voltage Vc of the power supply capacitor 31 is the voltage V2 charged by the voltage level V2 of the DC power supply 22. The bidirectional switch SW1 is switched to the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and charging current is supplied from the power supply capacitor 31 to the output capacitor 32 by resonant operation.

[0081] Due to resonant operation, the output voltage Vout becomes (V2+VL), which is the sum of the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL (=2×V2-V2) of the reactor 33. Since the inductor voltage VL is the voltage V2, the output voltage Vout becomes the voltage (2×V2). The output capacitor 32 is charged to the voltage (2×V2).

[0082] Figure 5(g) shows the operating state during holding at time t6. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V2), and the output voltage Vout is also held at voltage (2 × V2).

[0083] Figure 5(h) shows the operating state during regeneration at time t7. The bidirectional switch SW1 is switched to the direction in which diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed by the resonant operation.

[0084] Due to regeneration through resonant operation, the output voltage Vout becomes (V2-VL), which is the sum of the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33, considering the forward direction of diode D2. Since the inductor voltage VL is (2×V2-V2), the output voltage Vout becomes zero voltage (=(V2-(2×V2-V2))). The charging voltage of the output capacitor 32 discharges from voltage (2×V2) towards zero voltage.

[0085] (2c) The manner in which voltage level V2 is switched to voltage level V1. The switching behavior from voltage level V2 to voltage level V1 will be explained using Figures 6 to 8. Figure 6 shows some of the signals and voltage waveforms at each part when the voltage Vc of the power supply capacitor 31 switches from voltage level V2 to voltage level V1. Here, both voltage levels V1 and V2 are negative voltages, and voltage level V2 has a smaller negative voltage level than voltage level V1.

[0086] Figure 6(a) shows the voltage waveform of the voltage Vc across the power supply capacitor 31, where the voltage Vc is switching from DC voltage V2 to DC voltage V1. Figures 6(b) and (c) show the signal waveforms of the voltage switching signals QH and QL used to switch the voltage Vc across the power supply capacitor 31. At time tC2, the voltage switching signal QH switches from a low level to a high level, initiating the supply of voltage V1 from the DC power supply 21, and the voltage switching signal QL switches from a high level to a low level, stopping the supply of voltage V2 from the DC power supply 22. The switching element SW2 switches at time tC2, causing the voltage Vc across the power supply capacitor 31 to switch from voltage V2 to voltage V1.

[0087] Figure 6(d) shows the signal waveform of the supply switching signal QP1, which switches the side to which diode D1 of the bidirectional switch SW1 is connected to the ON state. Between time points t11 and t12, and between time points t15 and t16, the supply switching signal QP1 turns on the switching element connected to diode D1 of the bidirectional switch SW1, and the supply operation to the output capacitor 32 is performed. Diode D1 is configured to have the current direction from the output capacitor 32 to the power supply capacitor 31 as the forward direction.

[0088] Figure 6(e) shows the signal waveform of the regenerative switching signal QP2, which switches the side of the bidirectional switch SW1 to which diode D2 is connected to the ON state. Between time points t13 and t14, and between time points t17 and t18, the regenerative switching signal QP2 turns on the switching element connected to the diode D2 side of the bidirectional switch SW1, and regenerative operation from the output capacitor 32 is performed. Diode D2 is configured to have the current direction from the power supply capacitor 31 to the output capacitor 32 as the forward direction.

[0089] The time point tC2 for the switching operation of the voltage Vc of the power capacitor 31 from voltage V2 to voltage V1 is set within the period T21 between the time point t14 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time point t15 for the supply operation that supplies a DC voltage to the output capacitor 32.

[0090] Figure 6(f) shows the voltage waveform of the output voltage Vout of the multi-level DC pulse power supply 1. Before the switching element SW2 switches from voltage V2 to voltage V1, the voltage Vc across the power supply capacitor 31 is voltage V2. When the voltage Vc across the power supply capacitor 31 is voltage V2, the output voltage Vout becomes a negative voltage (2 × V2) at time t12, when the supply switching signal QP1 is in operation, and becomes zero voltage at time t13, when the regenerative switching signal QP2 is in operation. As a result, a voltage Vc of (2 × V2) is output as the output voltage Vout between time t12 and time t13.

[0091] At the point after the switching element SW2 switches the output voltage Vout of the DC power supply unit 2 from voltage V2 to voltage V1, the voltage Vc across the power supply capacitor 31 is voltage V1. When the voltage Vc across the power supply capacitor 31 is voltage V1, the output voltage Vout becomes a negative voltage (2 × V2) at time t16, when the supply switching signal QP1 is in operation, and becomes zero voltage at time t17, when the regenerative switching signal QP2 is in operation. As a result, a voltage (2 × V1) is output as the output voltage Vout between time t16 and time t17. Note that the voltage across the output capacitor 32 becomes twice the voltage Vc of the power supply capacitor 31 due to resonant operation.

[0092] The settings for the power supply voltage switching point will be explained below using Figures 7 and 8. Figure 7 shows the essential parts of the signals and voltage waveforms when the voltage Vc of the power supply capacitor 31 switches from voltage V2 to voltage V1. The points t11, t12, t17, and t18 shown in Figure 6 are omitted, and only points t13 to t16 are shown. Figure 7 shows the signal states and output voltage Vout in each section 1A to 1E, which are divided by the signal states of the supply switching signal QP1 and the regenerative switching signal QP2 that control the second switching operation.

[0093] In section 1A, the voltage switching signals QH and QL are at Low and High levels, respectively (Figures 7(b) and 7(c)), so the voltage Vc across the power supply capacitor 31 is voltage V2 (Figure 7(a)). Also, the regenerative switching signal QP2 and the supply switching signal QP1 are both at Low levels, and the bidirectional switch SW1 is in the OFF state (Figures 7(d) and 7(e)), so the output voltage Vout is voltage (2 × V2) due to the previous supply operation (Figure 7(f)).

[0094] In section 1B, similar to section 1A, the voltage switching signals QH and QL are in the Low and High levels, respectively (Figures 7(b) and 7(c)), and the voltage Vc across the power supply capacitor 31 is voltage V2 (Figure 7(a)). On the other hand, the supply switching signal QP1 remains at the Low level, but the regenerative switching signal QP2 rises from the Low level to the High level at time t13, entering the regenerative operation state (Figures 7(d) and 7(e)), and the output voltage Vout rises from voltage (2 × V2) towards zero voltage with a time constant Tr due to the regenerative operation (Figure 7(f)).

[0095] In section 1C, at time tC2, the voltage switching signal QH switches from a low level to a high level, and the voltage switching signal QL switches from a high level to a low level (Figures 7(b) and 7(c)). As a result, the voltage Vc of the power supply capacitor 31 switches from voltage V2 to voltage V1 at time tC2 (Figure 7(a)). The regenerative switching signal QP2 switches from a high level to a low level at time t14, which is the switching point between section 1B and section 1C. Therefore, both the regenerative switching signal QP2 and the supply switching signal QP1 are at a low level, and the bidirectional switch SW1 is in the off state (Figures 7(d) and 7(e)). The output voltage Vout is held at the zero voltage of section 1B (Figure 7(f)).

[0096] In section 1D, the voltage switching performed at time tC2 in section 1C results in the voltage switching signals QH and QL being at high and low levels, respectively (Figures 7(b) and 7(c)), and the voltage Vc across the power supply capacitor 31 is at voltage level V1 (Figure 7(a)). Meanwhile, the regenerative switching signal QP2 remains at a low level, but the supply switching signal QP1 rises from a low level at time t15 and switches to a high level, entering the supply operation state (Figures 7(d) and 7(e)). The output voltage Vout decreases from zero voltage towards voltage (2 × V1) with a time constant Tr due to the supply operation (Figure 7(f)).

[0097] In section 1E, similar to section 1D, the voltage switching signals QH and QL are at high and low levels, respectively (Figures 7(b) and 7(c)), and the voltage Vc across the power supply capacitor 31 is at voltage level V1 (Figure 7(a)). On the other hand, the supply switching signal QP1 switches from high to low level at time t16, which is the switching point between section 1D and section 1E. Therefore, both the regenerative switching signal QP2 and the supply switching signal QP1 are at low levels, and the bidirectional switch SW1 is in the off state (Figures 7(d) and 7(e)). The output voltage Vout is maintained at the voltage of section 1D (2 × V1) (Figure 7(f)).

[0098] Figure 8 shows the operating state at each time point t11 ​​to t17 shown in Figure 6. Here, an example of a π-type LC resonant circuit is shown as the LC resonant circuit.

[0099] Figure 8(a) shows the operating state during power supply at time t11. The voltage Vc of the power supply capacitor 31 is the voltage V2 charged by the voltage level V2 of the DC power supply 22. The bidirectional switch SW1 is switched to the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and charging current is supplied from the power supply capacitor 31 to the output capacitor 32 by resonant operation. Here, since the voltage V2 is a negative voltage, the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side.

[0100] Due to resonant operation, the output voltage Vout becomes (V2+VL), which is the sum of the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL (=2×V2-V2) of the reactor 33. Since the inductor voltage VL is the voltage V2, the output voltage Vout becomes the voltage (2×V2). The output capacitor 32 is charged to the voltage (2×V2).

[0101] Figure 8(b) shows the operating state during holding at time t12. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V2), and the output voltage Vout is also held at voltage (2 × V2).

[0102] Figure 8(c) shows the operating state during regeneration at time t13. The bidirectional switch SW1 is switched to the direction in which diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and regeneration of discharge current from the output capacitor 32 to the power supply capacitor 31 occurs through resonant operation. Here, since the voltage V1 is a negative voltage, the direction of current flowing through reactor 33 is from the power supply capacitor 31 side to the output capacitor 32 side.

[0103] Due to regeneration through resonant operation, the output voltage Vout becomes (V2-VL), which is the sum of the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33, considering the forward direction of diode D2. Since the inductor voltage VL is (2×V2-V2), the output voltage Vout becomes (V2-(2×V2-V2)=0). The charging voltage of the output capacitor 32 discharges from (2×V2) toward zero voltage.

[0104] Figure 8(d) shows the operating state during holding at time t14. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0105] Figure 8(e) shows the state at time tC2 where the DC voltage has been switched from voltage level V2 to voltage level V1. Here, both voltage levels V1 and V2 are negative voltages, and voltage level V2 is smaller than voltage level V1 in the negative direction. At time tC2, the bidirectional switch SW1 is in the off state, the resonant operation is stopped, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0106] Figure 8(f) shows the operating state during power supply at time t15. The voltage Vc of the power supply capacitor 31 is the voltage V1 charged by the voltage level V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33, and charging current is supplied from the power supply capacitor 31 to the output capacitor 32 by resonant operation.

[0107] Due to the resonant operation, the output voltage Vout becomes (V1+VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL (=2×V1-V1) of the reactor 33. Since the inductor voltage VL is V1, the output voltage Vout becomes (2×V1). The charging voltage of the output capacitor 32 is charged to (2×V1).

[0108] Figure 8(g) shows the operating state during holding at time t16. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V1), and the output voltage Vout is also held at voltage (2 × V1).

[0109] Figure 8(h) shows the operating state during regeneration at time t17. The bidirectional switch SW1 is switched to the direction in which diode D2 conducts in response to the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32, and reactor 33, and the discharge current from the output capacitor 32 to the power supply capacitor 31 is regenerated by the resonant operation.

[0110] Due to regeneration through resonant operation, the output voltage Vout becomes (V1-VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33, considering the forward direction of diode D2. Since the inductor voltage VL is (2×V1-V1), the output voltage Vout becomes (V1-(2×V1-V1))=0. The charging voltage of the output capacitor 32 discharges from (2×V1) towards zero voltage.

[0111] (3) Example of configuration and control of the control unit Examples of the configuration and control of the control unit 4 will be explained using Figures 9 to 13. The blocks shown in each of the configuration examples below represent functional blocks for generating the QH signal, QL signal, supply switching signal QP1, and regenerative switching signal QP2. These functional blocks can be configured with circuits that perform their respective functions, or they may be configured to implement their functions programmatically using an FPGA or the like.

[0112] (3a) First configuration example and control example A first configuration example and control example of the control unit 4 will be explained with reference to Figures 9 and 10. In Figure 9, the control unit 4A of the first configuration example includes a pulse signal generation unit 4a, a QP1 signal generation unit 4b, a QP2 signal generation unit 4c, a delay unit 4d, a QH signal generation unit 4e, and a QL signal generation unit 4f.

[0113] The pulse signal generation unit 4a generates a pulse signal by receiving a clock signal from an external device (not shown) or an internal device.

[0114] The QP1 signal generation unit 4b and the QP2 signal generation unit 4c use the pulse signal generated by the pulse signal generation unit 4a to generate a supply switching signal QP1 and a regenerative switching signal QP2, which control the on / off operation of the switching element of the bidirectional switch SW1. The supply switching signal QP1 is a control signal that controls the supply operation in the resonant operation of the resonant circuit, and the regenerative switching signal QP2 is a control signal that controls the regenerative operation in the resonant operation of the resonant circuit. The time interval between the supply switching signal QP1 and the regenerative switching signal QP2 corresponds to the resonant frequency of the resonant circuit.

[0115] Furthermore, the time widths of the supply switching signal QP1 and the regenerative switching signal QP2 themselves depend on the rise time Tr and fall time Tr of the resonant circuit, and are set to be within the time required for the rise and fall to be fully completed. Note that the rise time Tr and fall time Tr can be set based on the time width corresponding to the time constant of the resonant circuit.

[0116] In the present invention, the time tC1 for the switching operation of the voltage Vc of the power capacitor 31 from voltage V1 to voltage V2 is set within the period T12 between the time t4 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time t5 for the supply operation that supplies a DC voltage to the output capacitor 32. The time tC2 for the switching operation of the voltage Vc of the power capacitor 31 from DC voltage V2 to DC voltage V1 is set within the period T21 between the time t14 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time t15 for the supply operation that supplies a DC voltage to the output capacitor 32.

[0117] The delay unit 4d sets the time of the switching operation tC1 within the period T12 between the time of the regenerative operation and the time of the supply operation, and sets the time of the switching operation tC2 within the period T21 between the time of the regenerative operation and the time of the supply operation, by determining a delay time from the time of the regenerative operation. The delay time td can be obtained by reading data stored in an external device (not shown) or in a storage device (not shown) within the control unit 4A. The delay time td is set to the time width of period T12 when setting the time of the switching operation tC1, and to the time width of period T21 when setting the time of the switching operation tC2.

[0118] The timing for generating the delay time can be determined based on a trigger signal generated separately by an external device or control unit (not shown). When the delay unit 4d receives a trigger signal, it sets a delay time td starting from the time of the regenerative switching signal QP2, which occurs after the time the trigger signal is received. The voltage switching signals QH and QL are generated at the time tC1 of the switching operation, which is the time when the delay time td has elapsed.

[0119] The QH signal generation unit 4e and the QL signal generation unit 4f receive signals from the delay unit 4d and generate voltage switching signals QH and QL, respectively.

[0120] The QH signal generation unit 4e and the QL signal generation unit 4f switch the voltage switching signal QH from a high level to a low level and the voltage switching signal QL from a low level to a high level when the voltage before voltage switching is voltage level V1, thereby switching the switching element SW2 of the DC power supply unit 2. As a result, the voltage level V2 of the DC power supply 22 is output.

[0121] On the other hand, if the voltage before voltage switching is voltage level V2, the voltage switching signal QH is switched from low level to high level, and the voltage switching signal QL is switched from high level to low level, switching the switching element SW2 of the DC power supply unit 2, thereby outputting voltage level V1 of the DC power supply 21.

[0122] Figure 10 is a flowchart illustrating an example of the operation of the control unit according to the first configuration example shown in Figure 9. The pulse signal generation unit 4a receives a clock signal (S1) and generates a pulse signal (S2). The QP1 signal generation unit 4b outputs the pulse signal as a supply switching signal QP1 (S3). The QP2 signal generation unit 4c outputs the next pulse signal input from the pulse signal generation unit 4a as a regenerative switching signal QP2 (S4).

[0123] The delay unit 4d determines whether a trigger signal has been received (S5). If it determines that no trigger signal has been received, S5 is repeated. On the other hand, if it determines that a trigger signal has been received, the regenerative switching signal QP2 from the QP2 signal generation unit 4c is delayed by a predetermined delay time td (S6). The QH signal generation unit 4e and the QL signal generation unit 4f generate voltage switching signals QH and QL based on the signals delayed by the delay unit 4d (S7).

[0124] (3b) Second configuration example and control example The second configuration example of the control unit compares the time when the voltage level changes with the time when the supply switching signal QP1 and the regenerative switching signal QP2 are generated. It determines whether the time when the voltage level changes falls within the period between the regenerative switching signal QP2 and the supply switching signal QP1. If the time when the voltage level changes falls outside this period, it delays the time when the voltage level changes. This controls the system so that the time when the voltage level changes falls within the period between the regenerative switching signal QP2 and the supply switching signal QP1.

[0125] A second configuration example and control example of the control unit 4 will be explained using Figures 11(a) and 12. The control unit 4B of the second configuration example includes a pulse signal generation unit 4a, a QP1 signal generation unit 4b, a QP2 signal generation unit 4c, a delay unit 4d, a QH signal generation unit 4e, a QL signal generation unit 4f, a rising edge detection unit 4g, a falling edge detection unit 4h, and a period determination unit 4i.

[0126] The pulse signal generation unit 4a generates a pulse signal by receiving a clock signal from an external or internal device (not shown) and outputs the pulse signal to the QP1 signal generation unit 4b and the QP2 signal generation unit 4c.

[0127] The QP1 signal generation unit 4b and the QP2 signal generation unit 4c use the pulse signal generated by the pulse signal generation unit 4a to generate a supply switching signal QP1 and a regenerative switching signal QP2, which control the on / off operation of the switching element of the bidirectional switch SW1. The supply switching signal QP1 is a control signal that controls the supply operation in the resonant operation of the resonant circuit, and the regenerative switching signal QP2 is a control signal that controls the regenerative operation in the resonant operation of the resonant circuit. The time interval between the supply switching signal QP1 and the regenerative switching signal QP2 corresponds to the resonant frequency of the resonant circuit.

[0128] Furthermore, the time widths of the supply switching signal QP1 and the regenerative switching signal QP2 themselves depend on the rise time Tr and fall time Tr of the resonant circuit and are set to be within the time required for the rise and fall to be fully completed.

[0129] The time point tC1 for the switching operation of the voltage Vc of the power capacitor 31 from voltage V1 to voltage V2 is set within the period T12 between the time point t4 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time point t5 for the supply operation that supplies a DC voltage to the output capacitor 32. The time point tC2 for the switching operation of the voltage Vc of the power capacitor 31 from voltage V2 to voltage V1 is set within the period T21 between the time point t14 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time point t15 for the supply operation that supplies a DC voltage to the output capacitor 32.

[0130] The delay unit 4d sets a predetermined delay time from the time of operation of the regenerative operation in order to set the time of the switching operation tC1 within the period T12 between the time of operation of the regenerative operation and the time of operation of the supply operation, and the time of the switching operation tC2 within the period T21 between the time of operation of the regenerative operation and the time of operation of the supply operation. The delay time td can be obtained by reading data stored in an external device (not shown) or in a storage device (not shown) within the control unit 4B. When setting the time of the switching operation tC1, the delay time td is set to be within the time width of period T12, and when setting the time of the switching operation tC2, it is set to be within the time width of period T21.

[0131] The delay unit 4d generates a delay time when the point in time when the voltage level changes falls outside the period between the generation of the supply switching signal QP1 and the regenerative switching signal QP2, and delays the point in time when the voltage level changes by a predetermined delay time. By delaying the point in time when the voltage level changes, the point in time when the voltage level changes is controlled to fall within the period between the generation of the regenerative switching signal QP2 and the generation of the supply switching signal QP1.

[0132] The rising edge detection unit 4g and the falling edge detection unit 4h receive a voltage level signal delayed by the delay unit 4d and detect the rising and falling edges of that signal.

[0133] The QH signal generation unit 4e receives a signal from the falling edge detection unit 4h and generates a voltage switching signal QH. The QL signal generation unit 4f receives a signal from the rising edge detection unit 4g and generates a voltage switching signal QL.

[0134] If the voltage before voltage switching is voltage level V1, the voltage switching signal QH is switched from high level to low level, and the voltage switching signal QL is switched from low level to high level, thereby switching the switching element SW2 of the DC power supply unit 2. As a result, the voltage level V2 of the DC power supply 22 is output.

[0135] On the other hand, if the voltage before voltage switching is voltage level V2, the voltage switching signal QH is switched from low level to high level, and the voltage switching signal QL is switched from high level to low level, switching the switching element SW2 of the DC power supply unit 2, thereby outputting voltage level V1 of the DC power supply 21.

[0136] The period determination unit 4i receives the supply switching signal QP1 from the QP1 signal generation unit 4b, the regenerative switching signal QP2 from the QP2 signal generation unit 4c, the rising edge detection signal from the rising edge detection unit 4g, and the falling edge detection signal from the falling edge detection unit 4h.

[0137] In the period determination unit 4i, the timing of the voltage level change is detected by both the detection signal from the rising edge detection unit 4g and the detection signal from the falling edge detection unit 4h, or by either signal. A suitable period for changing the voltage level within the time interval between the regenerative switching signal QP2 and the supply switching signal QP1 is determined, and it is determined whether or not the timing of the voltage level change falls within this period.

[0138] When it is determined that the voltage level change occurs within the specified period, the QH signal generation unit 4e outputs a voltage switching signal QH, and the QL signal generation unit 4f outputs a voltage switching signal QL. On the other hand, when it is determined that the voltage level change occurs outside the specified period, the delay unit 4d delays the voltage level signal.

[0139] Figure 12 is a flowchart illustrating a control example using the second configuration example shown in Figure 11(a). Steps S11 to S14 are for generating the supply switching signal QP1 and the regenerative switching signal QP2, steps S15 to S19 are for detecting the point in time of the voltage level change, and steps S20 to S22 are for determining whether the point in time of the voltage level change is within a predetermined period, and for generating the voltage switching signals QH and QL by delaying the voltage level signal as necessary based on the determination result.

[0140] The pulse signal generation unit 4a receives a clock signal (S11) and generates a pulse signal (S12). The QP1 signal generation unit 4b outputs the pulse signal as a supply switching signal QP1 (S13). The QP2 signal generation unit 4c outputs the next pulse signal input from the pulse signal generation unit 4a as a regenerative switching signal QP2 (S14).

[0141] The delay unit 4d receives a voltage level signal as input (S15). The rising edge detection unit 4g detects the point at which the voltage level signal rises (S16) and generates a rising edge signal Sup (S17). The falling edge detection unit 4h detects the point at which the voltage level signal falls (S18) and generates a falling edge signal Sdown (S19).

[0142] The period determination unit 4i receives the supply switching signal QP1, the regenerative switching signal QP2, the rising edge signal Sup, and the falling edge signal Sdown, and determines whether the rising edge signal Sup and the falling edge signal Sdown are present within the period between the regenerative switching signal QP2 and the supply switching signal QP1 (S20).

[0143] When the rising edge signal Sup and the falling edge signal Sdown are within the period, the QH signal generation unit 4e generates a voltage switching signal QH based on the rising edge signal Sup, and the QL signal generation unit 4f generates a voltage switching signal QL based on the falling edge signal Sdown (S21). When the rising edge signal Sup and the falling edge signal Sdown are outside the period, the delay unit 4d delays the voltage level signal by a predetermined delay time (S22).

[0144] After S22, steps S16 to S20 are repeated until the rising edge signal Sup and the falling edge signal Sdown fall within the specified period. The delay time of the delay unit 4d can be arbitrarily determined as it is used to shift the timing of the voltage level signals.

[0145] (3c) Third Configuration Example and Control Example A third configuration example and control example of the control unit 4 will be explained using Figures 11(b) and 13.

[0146] The second configuration example delays the voltage level signal, whereas the third configuration example delays the supply switching signal QP1 and the regenerative switching signal QP2. The third configuration example compares the time when the voltage level changes with the time when the supply switching signal QP1 and the regenerative switching signal QP2 are generated, and determines whether the time when the voltage level changes falls within the period between the regenerative switching signal QP2 and the supply switching signal QP1. If the time when the voltage level changes falls outside this period, the supply switching signal QP1 and the regenerative switching signal QP2 are delayed. This controls the system so that the time when the voltage level changes falls within the period between the regenerative switching signal QP2 and the supply switching signal QP1.

[0147] The control unit 4C of the third configuration example includes a pulse signal generation unit 4a, a QP1 signal generation unit 4b, a QP2 signal generation unit 4c, a delay unit 4d1, a delay unit 4d2, a QH signal generation unit 4e, a QL signal generation unit 4f, a rising edge detection unit 4g, a falling edge detection unit 4h, and a period determination unit 4i.

[0148] The pulse signal generation unit 4a generates a pulse signal by receiving a clock signal from an external or internal device (not shown) and outputs the pulse signal to the QP1 signal generation unit 4b and the QP2 signal generation unit 4c.

[0149] The QP1 signal generation unit 4b and the QP2 signal generation unit 4c use the pulse signal generated by the pulse signal generation unit 4a to generate a supply switching signal QP1 and a regenerative switching signal QP2, which control the on / off operation of the switching element of the bidirectional switch SW1. The supply switching signal QP1 is a control signal that controls the supply operation in the resonant operation of the resonant circuit, and the regenerative switching signal QP2 is a control signal that controls the regenerative operation in the resonant operation of the resonant circuit. The time interval between the supply switching signal QP1 and the regenerative switching signal QP2 is determined depending on the resonant frequency of the resonant circuit.

[0150] Furthermore, the time widths of the supply switching signal QP1 and the regenerative switching signal QP2 themselves depend on the rise time Tr and fall time Tr of the resonant circuit and are set to be within the time required for the rise and fall to be fully completed.

[0151] The time point tC1 for the switching operation of the voltage Vc of the power capacitor 31 from voltage V1 to voltage V2 is set within the period T12 between the time point t4 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time point t5 for the supply operation that supplies a DC voltage to the output capacitor 32. The time point tC2 for the switching operation of the voltage Vc of the power capacitor 31 from DC voltage V2 to DC voltage V1 is set within the period T21 between the time point t14 for the regenerative operation that recovers the electrostatic energy stored in the output capacitor 32 and the time point t15 for the supply operation that supplies a DC voltage to the output capacitor 32.

[0152] The delay units 4d1 and 4d2 set the time of the switching operation tC1 within the period T12 between the time of the regenerative operation and the time of the supply operation, and set the time of the switching operation tC2 within the period T21 between the time of the regenerative operation and the time of the supply operation, by determining a delay time from the time of the regenerative operation. The delay time td can be obtained by reading data stored in an external device (not shown) or in a storage device (not shown) within the control unit 4C. The delay time td is set to the time width of period T12 when setting the time of the switching operation tC1, and to the time width of period T21 when setting the time of the switching operation tC2.

[0153] The delay unit 4d1 generates a delay time when the time of voltage level change falls outside the period between the time of supply switching signal QP1 and regenerative switching signal QP2 generation, and controls the supply switching signal QP1 to delay so that the time of voltage level change is advanced by a predetermined time relative to the supply switching signal QP1. By making the time of voltage level change advanced by a predetermined time relative to the time of supply switching signal QP1, the time of voltage level change is set to fall within the period between the time of regenerative switching signal QP2 generation and the time of supply switching signal QP1 generation.

[0154] The delay unit 4d2 generates a delay time when the point in time when the voltage level changes falls outside the period between the generation of the supply switching signal QP1 and the regenerative switching signal QP2. It then controls the regenerative switching signal QP2 to advance so that the point in time when the voltage level changes is delayed by a predetermined amount of time relative to the regenerative switching signal QP2. By making the point in time when the voltage level changes delayed by a predetermined amount of time relative to the point in time when the regenerative switching signal QP2 is generated, the point in time when the voltage level changes is set to fall within the period between the generation of the regenerative switching signal QP2 and the generation of the supply switching signal QP1. In the delay unit 4d2, the control that advances by a predetermined amount of time is equivalent to a delay control that includes a delay of one cycle, and the term "delay" is used accordingly.

[0155] The rise time detection unit 4g and the fall time detection unit 4h receive a voltage level signal and detect the rising and falling times of that signal.

[0156] The QH signal generation unit 4e receives a signal from the rising edge detection unit 4g and generates a voltage switching signal QH. The QL signal generation unit 4f receives a signal from the falling edge detection unit 4h and generates a voltage switching signal QL.

[0157] If the voltage before voltage switching is voltage level V1, the voltage switching signal QH is switched from high level to low level, and the voltage switching signal QL is switched from low level to high level, thereby switching the switching element SW2 of the DC power supply unit 2. As a result, the voltage level V2 of the DC power supply 22 is output.

[0158] On the other hand, if the voltage before voltage switching is voltage level V2, the voltage switching signal QH is switched from low level to high level, and the voltage switching signal QL is switched from high level to low level, switching the switching element SW2 of the DC power supply unit 2, thereby outputting voltage level V1 of the DC power supply 21.

[0159] The period determination unit 4i receives the supply switching signal QP1 from the QP1 signal generation unit 4b, the regenerative switching signal QP2 from the QP2 signal generation unit 4c, the rising edge detection signal from the rising edge detection unit 4g, and the falling edge detection signal from the falling edge detection unit 4h.

[0160] In the period determination unit 4i, the timing of the voltage level change is detected by both or either the detection signal of the rising edge detection unit 4g and the detection signal of the falling edge detection unit 4h, and a suitable period for changing the voltage level is determined from between the regenerative switching signal QP2 and the supply switching signal QP1, and it is determined whether or not the timing of the voltage level change falls within this period.

[0161] When it is determined that the voltage level change occurs within the specified period, the QH signal generation unit 4e outputs a voltage switching signal QH, and the QL signal generation unit 4f outputs a voltage switching signal QL. On the other hand, when it is determined that the voltage level change occurs outside the specified period, the delay unit 4d1 delays or advances the supply switching signal QP1 by a predetermined amount of time, and the delay unit 4d2 delays or advances the regenerative switching signal QP2 by a predetermined amount of time, thereby delaying or advancing the voltage level signal relative to the supply switching signal QP1 and the regenerative switching signal QP2, so that the voltage level change occurs within the specified period.

[0162] Figure 13 is a flowchart illustrating a control example of the third configuration example shown in Figure 11(b). Steps S31 to S34 are steps to generate the supply switching signal QP1 and the regenerative switching signal QP2, steps S35 to S39 are steps to detect the point in time of the voltage level change, and steps S40 to S42 are steps to determine whether the point in time of the voltage level change is within a predetermined period, and based on the determination result, delay the voltage level signal as necessary to generate the voltage switching signals QH and QL.

[0163] The pulse signal generation unit 4a receives a clock signal (S31) and generates a pulse signal (S32). The QP1 signal generation unit 4b outputs the pulse signal as a supply switching signal QP1 (S33). The QP2 signal generation unit 4c outputs the next pulse signal input from the pulse signal generation unit 4a as a regenerative switching signal QP2 (S34).

[0164] The rising edge detection unit 4g and the falling edge detection unit 4h receive a voltage level signal (S35). The rising edge detection unit 4g detects the point at which the voltage level signal rises (S36) and generates a rising edge signal Sup (S37). The falling edge detection unit 4h detects the point at which the voltage level signal falls (S38) and generates a falling edge signal Sdown (S39).

[0165] The period determination unit 4i receives the supply switching signal QP1, the regenerative switching signal QP2, the rising edge signal Sup, and the falling edge signal Sdown, and determines whether the rising edge signal Sup and the falling edge signal Sdown are present within the period between the regenerative switching signal QP2 and the supply switching signal QP1 (S40).

[0166] When the rising edge signal Sup and the falling edge signal Sdown are within the period, the QH signal generation unit 4e generates a voltage switching signal QH based on the rising edge signal Sup, and the QL signal generation unit 4f generates a voltage switching signal QL based on the falling edge signal Sdown (S41). When the rising edge signal Sup and the falling edge signal Sdown are outside the period, the delay unit 4d1 delays or advances the supply switching signal QP1 by a predetermined amount of time, and the delay unit 4d2 delays or executes the regenerative switching signal QP2 by a predetermined amount of time. This delays or advances the voltage level signals relative to the supply switching signal QP1 and the regenerative switching signal QP2 so that the voltage level change occurs within the period (S42).

[0167] After S42, steps S40 and S42 are repeated until the rising edge signal Sup and the falling edge signal Sdown fall within the specified period. The delay time of the delay section 4d is to shift the timing so that the relationship between the voltage level signal and the supply switching signal QP1 and the regenerative switching signal QP2 falls within the specified period, and can be set arbitrarily.

[0168] (4) Examples of signals, voltage waveforms, and operation of each part during malfunction The following describes a case where the voltage level switching operation by the control unit is incorrectly controlled.

[0169] (4a) Signal and voltage waveforms of each part during erroneous control Figure 14 illustrates the signals and voltage waveforms of each component during a malfunction. Figure 14 shows the signals and voltage waveforms of each component when a multi-level DC pulse power supply is malfunctioning and not properly controlled. The numbers assigned to the components are based on Figure 1.

[0170] Figure 14(a) shows the voltage waveform of the voltage Vc across the power supply capacitor 31, illustrating an example of a voltage waveform that periodically changes alternately between voltage V1 and voltage V2 with an interval Tvc. This interval Tvc is the periodic interval at which the peak voltage value of the high-frequency pulse output by the multi-level DC pulse power supply 1 changes.

[0171] Figure 14(b) shows the signal waveform of the voltage switching signal QH. The side of the switching element SW2 connected to the DC power supply 21 is switched to the ON state, supplying a high voltage V1 in the negative direction to the resonant section 3 and charging the power supply capacitor 31 with voltage V1.

[0172] Figure 14(c) shows the signal waveform of the voltage switching signal QL. The side of the switching element SW2 connected to the DC power supply 22 is switched to the ON state, supplying a low voltage V2 in the negative direction to the resonant section 3 and charging the power supply capacitor 31 with voltage V2.

[0173] Figure 14(d) shows the signal waveform of the supply switching signal QP1. By switching the side to which diode D1 of the bidirectional switch SW1 is connected to the ON state, the power supply capacitor 31 is connected to the output capacitor 32 via the reactor 33 to form a π-type LC resonant circuit. In this π-type LC resonant circuit, the forward direction of diode D1 is from the output capacitor 32 to the power supply capacitor 31, so the voltage Vc of the power supply capacitor 31 is applied to the output capacitor 32 in a supply operation.

[0174] Figure 14(e) shows the signal waveform of the regenerative switching signal QP2. By switching the side to which diode D2 of the bidirectional switch SW1 is connected to the ON state, the power supply capacitor 31 is connected to the output capacitor 32 via the reactor 33 to form a π-type LC resonant circuit. In this π-type LC resonant circuit, the forward direction of diode D1 is from the power supply capacitor 31 to the output capacitor 32, so the output voltage Vout of the output capacitor 32 is returned to the power supply capacitor 31 in a regenerative operation.

[0175] Figure 14(f) shows the voltage waveform of the output voltage Vout of the multi-level DC pulse power supply 1. When properly controlled, a negative voltage is generated across the output capacitor 32 due to the supply operation of the supply switching signal QP1, and a zero voltage is generated due to the regenerative operation of the regenerative switching signal QP2.

[0176] The output voltage Vout at the output terminal of the resonant section 3 of the multi-level DC pulse power supply is the voltage across the output capacitor 32. This high-frequency pulse voltage periodically changes between the negative voltage generated by the supply operation due to the supply switching signal QP1 and the zero voltage generated by the regenerative operation due to the regenerative switching signal QP2, due to the resonant operation of the resonant section 3. The negative voltage values ​​of this high-frequency pulse voltage are DC voltages V1 and V2, which change according to the switching operation of the DC power supply section 2.

[0177] If a miscontrol causes a discrepancy between the switching timing of the voltage switching signals QH and QL and the generation timing of the supply switching signal QP1 and the regeneration switching signal QP2, an incorrect voltage will be generated in the output voltage Vout. The voltage waveform indicated by "P" in Figure 14(f) shows a malfunction state in which a positive peak voltage is generated in the output voltage Vout during regeneration, while the voltage waveform indicated by "Q" in Figure 14(f) shows a malfunction state in which regeneration does not occur and the output voltage Vout does not return to zero voltage.

[0178] (4b) Modes of miscontrol when switching from voltage level V1 to voltage level V2 The nature of the miscontrol that occurs when switching from voltage level V1 to voltage level V2 will be explained using Figures 15 to 22. Figures 15, 17, 19, and 21 show the main parts of the signals and voltage waveforms of each part, while Figures 16, 18, 20, and 22 show the operating state.

[0179] Sections A, B, C, D, and E represent sections defined by combinations of signal states of the supply switching signal QP1 and the regenerative switching signal QP2. Section A represents the period from when the supply switching signal QP1 changes from a high level to a low level until the regenerative switching signal QP2 changes to a high level. Section B represents the period when the regenerative switching signal QP2 is in a high level state. Section C represents the period from when the regenerative switching signal QP2 is in a high level state until the supply switching signal QP1 changes to a low level. Section D represents the period when the supply switching signal QP1 is in a high level state. Section E represents the period from when the supply switching signal QP1 changes from a high level to a low level until the regenerative switching signal QP2 changes to a high level.

[0180] As mentioned above, section C is a section where normal control is achieved by switching the voltage level within this section. In contrast, sections A, B, D, and E are sections where switching the voltage level within these sections will result in malfunctions and prevent normal control. Sections A, B, D, and E will be explained below.

[0181] (Voltage level switching in section A) Section A is the period from when the supply switching signal QP1 changes from a high level to a low level until the regenerative switching signal QP2 changes to a high level. The malfunction that occurs when the voltage level switches in section A will be explained using Figures 15 and 16. Figure 15 shows the time points tA and t3 to t6.

[0182] Figures 15(b) and (c) show the voltage switching signals QH and QL, and Figure 15(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In Figure 15(f), the output voltage Vout shown by the solid line indicates a malfunction state when the voltage level is switched in section A, and the output voltage Vout shown by the dashed line indicates a normal operating state.

[0183] At time tA within section A, the DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2. As a result, at time t3 in section B, when the regenerative switching signal QP2 switches from a low level to a high level, the output voltage Vout rises from voltage (2 × V1) and generates a positive peak voltage. Here, the symbol P1 in the figure indicates the time when the peak voltage is generated. When the multi-level DC pulse power supply 1 supplies power to a capacitive load, the supplied voltage is required to be negative. Therefore, the generation of a positive voltage is desirable and would result in a malfunction.

[0184] The output voltage Vout decreases towards zero voltage within interval B with a time constant Tr. The time interval from t3 to t4, when the regenerative switching signal QP2 is at a high level, is set by the time constant Tr, which is the time interval until the positive peak voltage decreases to zero voltage.

[0185] During section C, the output voltage Vout is held at zero voltage. At time t5 in section D, when the supply switching signal QP1 switches from a low level to a high level, the output voltage Vout drops down toward voltage V2, and voltage V2 is held in section E.

[0186] Figure 16 shows the operating state at time points t1, t2, tA, t3, and t4. Here, an example of a π-type LC resonant circuit is shown.

[0187] Figure 16(a) shows the operating state during power supply at time t1. The voltage Vc across the power supply capacitor 31 is the voltage V1 charged by the voltage level V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32, and reactor 33, and charging current is supplied from the power supply capacitor 31 to the output capacitor 32 by resonant operation. Here, since the voltage V1 is a negative voltage, the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side.

[0188] Due to the resonant operation, the output voltage Vout becomes (V1+VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL (=2×V1-V1) of the reactor 33. Since the inductor voltage VL is V1, the output voltage Vout becomes (2×V1). Furthermore, since the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side, the output voltage Vout is a negative voltage. The charging voltage of the output capacitor 32 is charged to (2×V1).

[0189] Figure 16(b) shows the operating state during holding at time t2. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V1), and the output voltage Vout is also held at voltage (2 × V1).

[0190] FIG. 16(c) shows the operating state at time tA when the DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2. Due to the switching of the switching element SW2, the DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2. When the DC voltage switches from voltage V1 to voltage V2, the voltage of the power capacitor 31 becomes voltage V2. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, the bidirectional switch SW1 is in the off state and the resonance operation has stopped. Therefore, the charging voltage of the output capacitor 32 is held at voltage (2×V1), and the output voltage Vout is also held at voltage (2×V1).

[0191] FIG. 16(d) shows the operating state during regeneration at time t3. The bidirectional switch SW1 switches in the direction in which the diode D2 conducts due to the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power capacitor 31, the output capacitor 32, and the reactor 33. The regeneration of the discharge current from the output capacitor 32 to the power capacitor 31 is performed by the resonance operation. Here, the voltage of the output capacitor 32 is voltage (2×V1), and the voltage of the power capacitor 31 is voltage V2, both of which are negative voltages and in the relationship of 2×V1<V2. Therefore, the direction of the current flowing through the reactor 33 is from the power capacitor 31 side to the output capacitor 32 side.

[0192] Due to the regeneration by the resonance operation, considering the forward direction of the diode D2, the output voltage Vout becomes the voltage (V2 - VL) obtained by adding the charging voltage of the power capacitor 31, which is voltage V1, and the inductor voltage VL of the reactor 33. Since the inductor voltage VL becomes voltage (2×V1 - V2), the output voltage Vout becomes voltage (V2 - (2×V1 - V2)) = 2(V1 - V2). The charging voltage of the output capacitor 32 is discharged from voltage (2×V1) toward voltage (2×(V1 - V2)).

[0193] Here, since the current flowing through the reactor 33 is directed from the power supply capacitor 31 to the output capacitor 32, the output voltage Vout becomes a positive voltage, and a positive peak voltage is generated. Here, the symbol P1 in the figure indicates the point at which the peak voltage is generated. Subsequently, the output voltage Vout decreases toward zero voltage by the time constant Tr of the resonant circuit.

[0194] Figure 16(e) shows the operating state during holding at time t4. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0195] Therefore, if the voltage level switches in section A, a malfunction occurs in which a positive peak voltage is generated during regenerative operation.

[0196] (Voltage level switching in section B) Section B is the section in which the regenerative switching signal QP2 is in a high level state. The malfunction that occurs when the voltage level switches in section B will be explained using Figures 17 and 18. Note that Figure 18 shows the time points tB and t1 to t6.

[0197] Figures 17(b) and (c) show the voltage switching signals QH and QL, and Figure 17(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In Figure 17(f), the output voltage Vout shown by the solid line indicates a malfunction state when the voltage level is switched in section B, and the output voltage Vout shown by the dashed line indicates a normal operating state.

[0198] At time tB within section B, the DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2. As a result, at time t3 in section B, the regenerative switching signal QP2 switches from a low level to a high level (Figure 17(d)), and the output voltage Vout begins to rise from voltage (2 × V1) toward zero voltage with a time constant Tr. However, at time tB, the voltage of the power supply capacitor 31 switches to V2, so at time tB, the voltage of the output capacitor 32 rises to voltage Vα, and the output voltage Vout becomes voltage (2 × V2 - Vα) (Figure 17(f)). Note that voltage Vα represents the voltage value of the output capacitor 32 when it rises with a time constant Tr between time t3 and time tB.

[0199] Here, assuming that the voltage Vα across output capacitor 32 rises to approximately the same level as voltage V2, the output voltage Vout becomes voltage V2 (=2 × V2 - Vα = 2 × V2 - V2). The output voltage Vout is required to rise to zero voltage due to the regenerative state, but at the point indicated by P2 in the figure, a malfunction occurs in which the regenerative operation stops at voltage V2.

[0200] In section C, the output voltage Vout is held at voltage Vα. At time t5 in section D, when the supply switching signal QP1 switches from a low level to a high level (Figure 17(e)), the voltages of the power supply capacitor 31 and the output capacitor 32 are both at voltage V2 and are held at voltage V2, and voltage V2 is also held in section E (Figure 17(f)). At the time indicated by P3 in the figure, a malfunction occurs in which the regenerative operation stops at voltage V2.

[0201] Figure 18 shows the operating state at time points t1-t6 and tB. Here, an example of a π-type LC resonant circuit is shown.

[0202] Figure 18(a) shows the operating state during power supply at time t1. The voltage Vc across the power supply capacitor 31 is the voltage V1 charged by the voltage level V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32, and reactor 33, and charging current is supplied from the power supply capacitor 31 to the output capacitor 32 by resonant operation. Here, since the voltage V1 is a negative voltage, the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side.

[0203] Due to resonant operation, the output voltage Vout becomes (V1+VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL (=2×V1-V1) of the reactor 33. Since the inductor voltage VL is the voltage V1, the output voltage Vout becomes the voltage (2×V1). Note that since the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side, the output voltage Vout is a negative voltage. The charging voltage of the output capacitor 32 is charged to the voltage (2×V1).

[0204] Figure 18(b) shows the operating state during holding at time t2. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V1), and the output voltage Vout is also held at voltage (2 × V1).

[0205] Figure 18(c) shows the operating state during regeneration at time t3. The bidirectional switch SW1 is switched in the direction in which the diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33. The regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed by the resonance operation. Here, the voltage of the output capacitor 32 is the voltage (2 × V1), and the voltage of the power supply capacitor 31 is the voltage V1. Since both are negative voltages and have the relationship 2 × V1 < V1, the direction of the current flowing through the reactor 33 is from the power supply capacitor 31 side to the output capacitor 32 side.

[0206] Due to the regeneration by the resonance operation, considering the forward direction of the diode D2, the output voltage Vout becomes the voltage (V1 - VL) obtained by adding the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33. Since the inductor voltage VL becomes the voltage (2 × V1 - V1), the output voltage Vout becomes zero voltage (= (V1 - V1)). The charging voltage of the output capacitor 32 is discharged from the voltage (2 × V1) towards zero voltage with the time constant Tr of the resonance circuit.

[0207] Figure 18(d) shows the operating state at time tB when the DC voltage of the DC power supply unit 2 is switched from the voltage V1 to the voltage V2. The DC voltage of the DC power supply unit 2 is switched from the voltage V1 to the voltage V2 by the switching of the switching element SW2. When the DC voltage is switched from the voltage V1 to the voltage V2, the voltage of the power supply capacitor 31 becomes the voltage V2. Since the supply switching signal QP1 is an off signal and the regeneration switching signal QP2 is an on signal for the bidirectional switch SW1, the output voltage Vout starts to rise with the time constant Tr from the voltage (2 × V1) towards zero voltage.

[0208] At time tB in section B, the voltage across power capacitor 31 switches to voltage V2. Therefore, after rising to voltage Vα at time tB, the inductor voltage (Vα-V2) and the voltage V2 across power capacitor 31 result in the voltage ((V2-(Vα-V2)=(2×V2-Vα)). When voltage Vα is voltage V2, the output voltage Vout is voltage V2. The following explanation assumes that the output voltage Vout is voltage V2.

[0209] Figure 18(e) shows the operating state during hold at time t4. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage V2, and the output voltage Vout is also held at voltage V2.

[0210] Figure 18(f) shows the operating state during power supply at time t5. The voltage Vc across the power supply capacitor 31 is the voltage V2 charged by the voltage level V2 of the DC power supply 22. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32, and reactor 33. However, since both the power supply capacitor 31 and the output capacitor have a voltage of V2, no charging current is supplied from the power supply capacitor 31 to the output capacitor 32 due to resonant operation.

[0211] Figure 18(g) shows the operating state during holding at time t6. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage V2, and the output voltage Vout is also held at voltage V2.

[0212] (Voltage level switching in section D) Section D is the section in which the supply switching signal QP1 is in a high level state. The malfunction that occurs when the voltage level switches in section D will be explained using Figures 19 and 20. Note that Figure 20 shows the time points tD and t3 to t6.

[0213] Figures 19(b) and (c) show the voltage switching signals QH and QL, and Figure 19(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In Figure 19(f), the output voltage Vout shown by the solid line indicates a malfunction state when the voltage level is switched in section D, and the output voltage Vout shown by the dashed line indicates a normal operating state.

[0214] At time t3 in section B, when the regenerative switching signal QP2 switches from a low level to a high level (Figure 19(d)), the output voltage Vout begins to rise from voltage (2 × V1) toward zero voltage with a time constant Tr, and becomes zero voltage at time t4. The time interval from t3 to t4, when the regenerative switching signal QP2 is in a high level state, can be set by the time constant Tr of the resonant circuit, so that it becomes zero voltage at time t4 (Figure 19(f)).

[0215] During interval C, the output voltage Vout is held at zero voltage. At time t5 in interval D, when the supply switching signal QP1 switches from a low level to a high level (Figure 19(e)), the voltage across the power supply capacitor 31 is voltage V1 and the voltage across the output capacitor 32 is zero voltage, so the output voltage Vout drops from zero voltage to voltage (2 × V1) with a time constant Tr (Figure 19(f)). At time tD in interval D, when the voltage level switches from voltage V1 to voltage V2, the output voltage Vout drops to voltage Vβ at time tD (Figure 19(f)). Voltage Vβ represents the voltage value that has dropped with a time constant Tr between time t5 and time tD.

[0216] When the voltage drops to Vβ, the voltage across the power supply capacitor 31 is V2. When voltage Vβ is lower than voltage V2, the voltage difference between the output capacitor 32 and the power supply capacitor 31 becomes a reverse voltage across diode D2, so the output voltage Vout is held at voltage Vβ. Also, when voltage Vβ is higher than voltage V2, the inductor voltage becomes (Vβ-V2), so the output voltage Vout becomes voltage Vβ (=(Vβ-V2)+V2), and the output voltage Vout is held at voltage Vβ (Figure 19(f)). At the point indicated by P4 in the figure, a malfunction occurs in which the regenerative operation stops at voltage Vβ.

[0217] At time t6 in section E, the supply switching signal QP1 changes from a high level to a low level. The bidirectional switch SW1 is turned off, and the output voltage Vout is held at voltage Vβ (Figure 19(f)).

[0218] As described above, at time tD within interval D, when the voltage level switches from voltage V1 to voltage V2, the system malfunctions and does not operate normally. The output voltage Vout obtained under the supply conditions is not voltage (2 × V2) but voltage Vβ.

[0219] Figure 20 shows the operating state at time points t3 to t6 and tD, with time points t1 and t2 omitted. Here, an example of a π-type LC resonant circuit is shown.

[0220] Figure 20(a) shows the operating state during regeneration at time t3. The bidirectional switch SW1 is switched in the direction in which the diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33. The regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed by the resonance operation. Here, the voltage of the output capacitor 32 is voltage (2×V1) and the voltage of the power supply capacitor 31 is voltage V1, both of which are negative voltages and in the relationship of 2×V1 < V1. Therefore, the direction of the current flowing through the reactor 33 is from the power supply capacitor 31 side toward the output capacitor 32 side.

[0221] Due to the regeneration by the resonance operation, the output voltage Vout becomes the voltage (V1 - VL) obtained by adding the voltage V1, which is the charging voltage of the power supply capacitor 31, and the inductor voltage VL of the reactor 33, considering the forward direction of the diode D2. Since the inductor voltage VL becomes the voltage (2×V1 - V1), the output voltage Vout becomes zero voltage (= (V1 - V1)). The charging voltage of the output capacitor 32 is discharged from the voltage (2×V1) toward zero voltage with the time constant Tr of the resonance circuit.

[0222] Figure 20(b) shows the operating state during holding at time t4. The bidirectional switch SW1 is turned off because both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, and the resonance operation stops. By stopping the resonance operation, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage out is also held at zero voltage.

[0223] Figure 20(c) shows the operating state during supply at time t5. The voltage Vc of the power supply capacitor 31 is the voltage V1 charged by the voltage level V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which the diode D1 conducts by the on signal of the supply switching signal QP1 and the off signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33.

[0224] At this time, the voltage across the power supply capacitor 31 is voltage V1, the voltage across the output capacitor 32 is zero voltage, and the inductor voltage VL becomes voltage V1. Therefore, the output voltage Vout decreases from zero voltage to voltage (2 × V1) with a time constant Tr. The voltage drop progresses until the DC voltage switching point tD, at which point tD the voltage becomes Vβ.

[0225] Figure 20(d) shows the operating state at time tD when the DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2. The DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2 when the switching element SW2 switches. As the DC voltage switches from voltage V1 to voltage V2, the voltage across the power supply capacitor 31 becomes voltage V2. The bidirectional switch SW1 is off when the supply switching signal QP1 is an off signal and on when the regenerative switching signal QP2 is an on signal.

[0226] When voltage Vβ is lower than voltage V2, the voltage applied to diode D2 is the reverse voltage, so the output voltage Vout is held at voltage Vβ. Also, when voltage Vβ is higher than voltage V2, the inductor voltage becomes (Vβ-V2), so the output voltage Vout becomes voltage Vβ (=(Vβ-V2)+V2), and the output voltage Vout is held at voltage Vβ.

[0227] Figure 20(e) shows the operating state during hold at time t6. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage Vβ, and the output voltage Vout is also held at voltage Vβ.

[0228] (Voltage level switching in section E) Section E is the section in which both the supply switching signal QP1 and the regenerative switching signal QP2 are at a low level. The malfunction that occurs when the voltage level switches in section E will be explained using Figures 21 and 22. Note that Figure 22 shows the values ​​for time points tE and t3 to t6.

[0229] Figures 21(b) and (c) show the voltage switching signals QH and QL, and Figure 21(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In Figure 21(f), the output voltage Vout shown by the solid line indicates a malfunction state when the voltage level is switched in section E, and the output voltage Vout shown by the dashed line indicates a normal operating state.

[0230] At time t3 in section B, when the regenerative switching signal QP2 switches from a low level to a high level (Figure 21(d)), the output voltage Vout begins to rise from voltage (2 × V1) towards zero voltage with a time constant Tr, and reaches zero voltage at time t4. The time interval from t3 to t4, when the regenerative switching signal QP2 is in a high level state, can be set by the time constant Tr of the resonant circuit, so that the voltage at time t4 is zero (Figure 21(f)).

[0231] During section C, the output voltage Vout is held at zero voltage. At time t5 in section D, when the supply switching signal QP1 switches from a low level to a high level (Figure 21(e)), the voltage across the power supply capacitor 31 is voltage V1 and the voltage across the output capacitor 32 is zero voltage, so the output voltage Vout drops from zero voltage to voltage (2 × V1) with a time constant Tr (Figure 21(f)).

[0232] At time t6 in section E, the supply switching signal QP1 changes from a high level to a low level. The bidirectional switch SW1 is turned off, and the output voltage Vout is held at voltage (2 × V1) (Figure 21(f)). At time tE within section E, the voltage level switches from voltage V1 to voltage V2, but because the bidirectional switch SW1 is turned off, the output voltage Vout is held at voltage (2 × V1) (Figure 21(f)).

[0233] As described above, when the voltage level switches from voltage V1 to voltage V2 at time tE within interval E, it malfunctions instead of operating normally at the time indicated by P5 in the figure, and the output voltage Vout obtained in the supply state becomes voltage (2×V1) instead of voltage (2×V2).

[0234] Figure 22 shows the operating states at times t3 to t6, omitting times t1 and t2. Here, an example of a π-type LC resonance circuit is shown as the LC resonance circuit.

[0235] Figure 22(a) shows the operating state during regeneration at time t3. The bidirectional switch SW1 switches in the direction in which the diode D2 conducts according to the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33, and regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed by the resonance operation. Here, the voltage of the output capacitor 32 is voltage (2×V1) and the voltage of the power supply capacitor 31 is voltage V1, both of which are negative voltages and have a relationship of 2×V1 < V1. Therefore, the direction of the current flowing through the reactor 33 is from the power supply capacitor 31 side toward the output capacitor 32 side.

[0236] Due to the regeneration by the resonance operation, considering the forward direction of the diode D2, the output voltage Vout becomes voltage (V1 - VL), which is the sum of the charging voltage V1 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33. Since the inductor voltage VL becomes voltage (2×V1 - V1), the output voltage Vout becomes zero voltage (= (V1 - V1)). The charging voltage of the output capacitor 32 discharges from voltage (2×V1) toward zero voltage with the time constant Tr of the resonance circuit.

[0237] Figure 22(b) shows the operating state during holding at time t4. The bidirectional switch SW1 is in the off state and the resonance operation stops because both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals. By stopping the resonance operation, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0238] Figure 22(c) shows the operating state during power supply at time t5. The voltage Vc of the power supply capacitor 31 is the voltage V1 charged by the voltage level V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33.

[0239] At this time, the voltage across the power supply capacitor 31 is voltage V1, the voltage across the output capacitor 32 is zero voltage, and the inductor voltage VL is voltage V1, so the output voltage Vout drops from zero voltage to voltage (2 × V1) with a time constant Tr.

[0240] Figure 22(d) shows the operating state during hold at time t6. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V1), and the output voltage Vout is also held at voltage (2 × V1).

[0241] Figure 22(e) shows the operating state at time tE when the DC voltage of the DC power supply unit 2 switches from voltage V1 to voltage V2. The switching of the switching element SW2 switches the DC voltage of the DC power supply unit 2 from voltage V1 to voltage V2. As the DC voltage switches from voltage V1 to voltage V2, the voltage across the power supply capacitor 31 becomes voltage V2. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals for the bidirectional switch SW1, the output voltage Vout is held at voltage (2 × V1).

[0242] (4c) Modes of miscontrol when switching from voltage level V2 to voltage level V1 The manner of miscontrol during switching from voltage level V2 to voltage level V1 will be explained using Figures 23 to 30. Here, Figures 23, 25, 27, and 29 show the main parts of the signals and voltage waveforms of each section, while Figures 24, 26, 28, and 30 show the operating state. Sections 1A, 1B, 1C, 1D, and 1E are sections that are divided by the signal state combination of the supply switching signal QP1 and the regenerative switching signal QP2.

[0243] Section 1A represents the period from when the supply switching signal QP1 goes from a high level to a low level until the regenerative switching signal QP2 goes to a high level. Section 1B represents the period when the regenerative switching signal QP2 is in a high level state. Section 1C represents the period from when the regenerative switching signal QP2 goes to a high level until the supply switching signal QP1 goes to a low level. Section 1D represents the period when the supply switching signal QP1 is in a high level state. Section 1E represents the period from when the supply switching signal QP1 goes from a high level to a low level until the regenerative switching signal QP2 goes to a high level.

[0244] As mentioned above, section 1C is a section where normal control is performed by switching the voltage level within this section. In contrast, sections 1A, 1B, 1D, and 1E are sections where switching the voltage level within these sections will result in malfunctions and prevent normal control. Sections 1A, 1B, 1D, and 1E will be explained below.

[0245] (Voltage level switching in section 1A) Section 1A is the section from when the supply switching signal QP1 changes from a high level to a low level until the regenerative switching signal QP2 changes to a high level. The malfunction that occurs when the voltage level switches in section 1A will be explained using Figures 23 and 24. Figure 23 shows the situation at time points t1A and t13-t16.

[0246] Figures 23(b) and (c) show the voltage switching signals QH and QL, and Figure 23(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In Figure 23(f), the output voltage Vout shown by the solid line indicates a malfunction state when the voltage level is switched in the 1A section, and the output voltage Vout shown by the dashed line indicates a normal operating state.

[0247] At time t1A within section 1A, the DC voltage of the DC power supply unit 2 switches from voltage V2 to voltage V1. As a result, at time t13 in section 1B, when the regenerative switching signal QP2 switches from a low level to a high level, the output voltage Vout remains at voltage (2 × V2), and regeneration from the output capacitor 32 to the power supply capacitor 31 does not occur, resulting in a malfunction at the point indicated by P6 in the figure.

[0248] During section 1C, the output voltage Vout is maintained at (2 × V2). At time t15 in section 1D, even if the supply switching signal QP1 switches from a low level to a high level, the output voltage Vout is maintained at (2 × V2) and regeneration does not occur, resulting in a malfunction at the point indicated by P7 in the figure. The voltage (2 × V2) is maintained in section 1E.

[0249] Figure 24 shows the operating state at time points t12-t16 and t1A. Here, an example of a π-type LC resonant circuit is shown.

[0250] At time t12 when the power is supplied, the output voltage Vout in the operating state is (V2 + VL), which is the sum of the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL (= 2 × V2 - V2) of the reactor 33, due to resonant operation. Since the inductor voltage VL is voltage V2, the output voltage Vout is voltage (2 × V2). Note that since the direction of the current flowing through the reactor 33 is from the output capacitor 32 side to the power supply capacitor 31 side, the output voltage Vout is a negative voltage. The charging voltage of the output capacitor 32 is charged to voltage (2 × V2).

[0251] Fig. 24(a) shows the operating state during holding at time t12. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, the bidirectional switch SW1 is in the off state and the resonance operation stops. When the resonance operation stops, the charging voltage of the output capacitor 32 is held at the voltage (2×V2), and the output voltage Vout is also held at the voltage (2×V2).

[0252] Fig. 24(b) shows the operating state at time t1A when the DC voltage of the DC power supply unit 2 switches from the voltage V2 to the voltage V1. Due to the switching of the switching element SW2, the DC voltage of the DC power supply unit 2 switches from the voltage V2 to the voltage V1. When the DC voltage switches from the voltage V2 to the voltage V1, the voltage of the power supply capacitor 31 becomes the voltage V1. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, the bidirectional switch SW1 is in the off state and the resonance operation has stopped, so the charging voltage of the output capacitor 32 is held at the voltage (2×V2), and the output voltage Vout is also held at the voltage (2×V2).

[0253] Fig. 24(c) shows the operating state during regeneration at time t13. The bidirectional switch SW1 is switched by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2 in the direction in which the diode D2 conducts, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33. When the voltage of the output capacitor 32 is the voltage (2×V2) and the voltage of the power supply capacitor 31 is the voltage V1, and both are negative voltages and there is a relationship of 2×V2 = V1, the regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 due to the resonance operation of the resonance circuit is not performed, and malfunction occurs at the time indicated by P6 in the figure.

[0254] Figure 24(d) shows the operating state during holding at time t14. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, the bidirectional switch SW1 is in the off state and no resonance operation is performed. Since no resonance operation is performed, the charging voltage of the output capacitor 32 is held at the voltage V1 (= 2 × V2), and the output voltage Vout is also held at the voltage V1 (= 2 × V2).

[0255] Figure 24(e) shows the operating state during supply at time t15. Since the supply switching signal QP1 is an on signal and the regeneration switching signal QP2 is an off signal for the bidirectional switch SW1, a diode D1 whose forward direction is from the output capacitor 32 to the power supply capacitor 31 is connected. At this time, since both the voltage of the power supply capacitor 31 and the voltage of the output capacitor 32 are the voltage V1, no supply operation due to resonance operation is performed, and malfunction occurs at the time indicated by P7 in the figure.

[0256] Figure 24(f) shows the operating state during holding at time t16. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, the bidirectional switch SW1 is in the off state and no resonance operation is performed. Since no resonance operation is performed, the charging voltage of the output capacitor 32 is held at the voltage V1, and the output voltage Vout is also held at the voltage V1.

[0257] (Voltage level switching in section 1B) Section 1B is a section in which the regeneration switching signal QP2 is in the High level state. The malfunction when the voltage level is switched in section 1B will be described using FIGS. 25 and 26. Note that FIG. 26 shows the times t1B, t12 to t16.

[0258] Figures 25(b) and (c) show the voltage switching signals QH and QL, and FIG. 25(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In FIG. 25(f), the output voltage Vout shown by the solid line indicates the malfunction state when the voltage level is switched in section 1B, and the output voltage Vout shown by the broken line indicates the normal operation state.

[0259] At time t1B within section 1B, the DC voltage of the DC power supply unit 2 switches from voltage V2 to voltage V1. As a result, at time t13 in section 1B, the regenerative switching signal QP2 switches from a low level to a high level (Figure 25(d)). The output voltage Vout begins to rise from voltage (2 × V2) towards zero voltage with a time constant Tr, but at time t1B, when it rises to voltage Vγ, the voltage of the power supply capacitor 31 switches to voltage V1.

[0260] Here, if voltage Vγ rises to approximately the same level as voltage V2, the difference between the voltage across power supply capacitor 31 and the voltage across output capacitor 32 becomes smaller, so voltage Vγ no longer changes with voltage V2. The output voltage Vout is required to rise to zero voltage due to the regenerative state, but a malfunction occurs where the regenerative operation stops at the point indicated by P8 in the figure.

[0261] In section 1C, the output voltage Vout is held at voltage Vγ. At time t15 in section 1D, when the supply switching signal QP1 switches from a low level to a high level (Figure 25(e)), the voltage across the power supply capacitor 31 is voltage V1 and the voltage across the output capacitor 32 is voltage Vγ, so the voltage drops towards (2×V1-Vγ) with a time constant Tr. The output voltage Vout after the drop becomes voltage (2×V1-Vγ) and does not drop to voltage (2×V1), resulting in a malfunction where sufficient regenerative operation is not performed at the time indicated by P9 in the figure (Figure 25(f)).

[0262] Figure 26 shows the operating state at time points t12-t16 and t1B. Here, an example of a π-type LC resonant circuit is shown.

[0263] Fig. 26(a) shows the operating state during holding at time t12. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals, the bidirectional switch SW1 is in the off state and the resonance operation stops. When the resonance operation stops, the charging voltage of the output capacitor 32 is held at the voltage (2 × V2), and the output voltage Vout is also held at the voltage (2 × V2).

[0264] Fig. 26(b) shows the operating state during regeneration at time t13. The bidirectional switch SW1 is switched in the direction in which the diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, and a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33 is formed. By the resonance operation, regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed. Here, the voltage of the output capacitor 32 is the voltage (2 × V2), and the voltage of the power supply capacitor 31 is V2, both of which are negative voltages and in the relationship of 2 × V2 < V2. Therefore, the direction of the current flowing through the reactor 33 is from the power supply capacitor 31 side to the output capacitor 32 side.

[0265] Due to the regeneration by the resonance operation, considering the forward direction of the diode D2, the output voltage Vout becomes the voltage (V2 - VL) obtained by adding the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33. Since the inductor voltage VL becomes the voltage (2 × V2 - V2), when the regeneration operation is completed, the output voltage Vout becomes zero voltage (= (V2 - V2)). Therefore, the charging voltage of the output capacitor 32 is discharged from the voltage (2 × V2) toward zero voltage with the time constant Tr of the resonance circuit.

[0266] Fig. 26(c) shows the operating state at time t1B when the DC voltage of the DC power supply unit 2 is switched from the voltage V2 to the voltage V1. By the switching of the switching element SW2, the DC voltage of the DC power supply unit 2 is switched from the voltage V2 to the voltage V1. When the DC voltage is switched from the voltage V2 to the voltage V1, the voltage of the power supply capacitor 31 becomes the voltage V1.

[0267] During regenerative operation at time t13, the output voltage Vout begins to rise from voltage (2 × V2) toward zero voltage with a time constant Tr. However, at time t1B within section 1B, the voltage across the power supply capacitor 31 switches to voltage V1. Therefore, after rising to voltage Vγ at time t1B, the voltage becomes ((V1 - (Vγ - V1) = (2 × V1 - Vγ)) due to the inductor voltage (Vγ - V1) and the voltage across the power supply capacitor 31 V1. When voltage Vγ is voltage V1, the output voltage Vout becomes voltage V1.

[0268] Figure 26(d) shows the operating state during hold at time t14. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage Vγ, and the output voltage Vout is also held at voltage Vγ.

[0269] Figure 26(e) shows the operating state during power supply at time t15. The voltage Vc across the power supply capacitor 31 is the voltage V1 charged by the voltage level V1 of the DC power supply 21. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33. At this time, the inductor voltage VL is voltage (V1-Vγ), so the output voltage Vout is voltage (2×V1-Vγ). When voltage Vγ is voltage V1, the output voltage Vout is voltage V1.

[0270] Figure 26(f) shows the operating state during holding at time t16. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V1 - Vr), and the output voltage Vout is also held at voltage (2 × V1 - Vr).

[0271] (Voltage level switching in section 1D) Interval 1D is the interval during which the supply switching signal QP1 is at the High level. Regarding the malfunction when the voltage level switches in interval 1D, it will be described using FIGS. 27 and 28. Note that in FIG. 28, time points t1D, t13 to t16 are shown.

[0272] FIGS. 27(b) and (c) show the voltage switching signals QH and QL, and FIG. 27(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In FIG. 27(f), the output voltage Vout shown by the solid line indicates the malfunction state when the voltage level switches in interval 1D, and the output voltage Vout shown by the dashed line indicates the normal operation state.

[0273] At time point t13 in interval 1B, when the regeneration switching signal QP2 switches from the Low level state to the High level state (FIG. 27(d)), the output voltage Vout starts to rise with a time constant Tr from the voltage (2×V2) towards zero voltage and becomes zero voltage at time point t14. The time width from t13 to t14 when the regeneration switching signal QP2 is at the High level can be set to be zero voltage at time point t14 by setting it based on the time constant Tr of the resonance circuit (FIG. 27(f)).

[0274] During interval 1C, the output voltage Vout is held at zero voltage. At time point t15 in interval 1D, when the supply switching signal QP1 switches from the Low level state to the High level state (FIG. 27(e)), since the voltage of the power supply capacitor 31 is voltage V2 and the voltage of the output capacitor 32 is zero voltage, the output voltage Vout drops with a time constant Tr from zero voltage towards the voltage (2×V2) (FIG. 27(f)).

[0275] At time point t1D within interval 1D, when the voltage level switches from voltage V2 to voltage V1, the output voltage Vout drops to voltage Vδ at time point t1D (FIG. 27(f)). Voltage Vδ indicates the voltage value that has dropped with a time constant Tr from time point t15 to time point t1D.

[0276] When the voltage drops to Vδ, the voltage across the power supply capacitor 31 is V1. When voltage Vδ is lower than voltage V1, the voltage difference between the output capacitor 32 and the power supply capacitor 31 becomes a reverse voltage across diode D2, so the output voltage Vout is held at voltage Vδ. Also, when voltage Vδ is higher than voltage V1, the inductor voltage becomes (Vδ-V1), so the output voltage Vout becomes voltage Vδ (=(Vδ-V1)+V1), and the output voltage Vout is held at voltage Vδ (Figure 27(f)). At the point indicated by P10 in the figure, a malfunction occurs in which the regenerative operation stops at voltage Vδ.

[0277] At time t16 in section 1E, the supply switching signal QP1 changes from a high level state to a low level state. The bidirectional switch SW1 is turned off, and the output voltage Vout is held at voltage Vδ (Figure 27(f)).

[0278] As described above, at time t1D within section 1D, when the voltage level switches from voltage V2 to voltage V1, the system malfunctions instead of operating normally, and the output voltage Vout obtained under the supply conditions becomes voltage Vδ instead of voltage (2 × V1).

[0279] Figure 28 shows the operating state at time points t13-t16 and t1D, with time points t11 and t12 omitted. Here, an example of a π-type LC resonant circuit is shown as the LC resonant circuit.

[0280] Figure 28(a) shows the operating state during regeneration at time t13. The bidirectional switch SW1 is switched in the direction in which the diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33. By the resonance operation, regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed. Here, the voltage of the output capacitor 32 is the voltage (2×V2), and the voltage of the power supply capacitor 31 is V2, both of which are negative voltages and have a relationship of 2×V2<V2. Therefore, the direction of the current flowing through the reactor 33 is from the power supply capacitor 31 side to the output capacitor 32 side.

[0281] Due to the regeneration by the resonance operation, considering the forward direction of the diode D2, the output voltage Vout becomes the voltage (V2 - VL) obtained by adding the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33. Since the inductor voltage VL becomes the voltage (2×V2 - V2), the output voltage Vout becomes zero voltage (= (V2 - V1)). The charging voltage of the output capacitor 32 is discharged from the voltage (2×V2) toward zero voltage with the time constant Tr of the resonance circuit.

[0282] Figure 28(b) shows the operating state during holding at time t14. The bidirectional switch SW1 is in the off state and the resonance operation stops because both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals. By stopping the resonance operation, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0283] Figure 28(c) shows the operating state during supply at time t15. The voltage Vc of the power supply capacitor 31 is the voltage V2 charged by the voltage level V2 of the DC power supply 22. The bidirectional switch SW1 is switched in the direction in which the diode D1 conducts by the on signal of the supply switching signal QP1 and the off signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33.

[0284] At this time, the voltage across the power supply capacitor 31 is voltage V2, the voltage across the output capacitor 32 is zero voltage, and the inductor voltage VL becomes voltage V2. Therefore, the output voltage Vout drops from zero voltage to voltage (2 × V2) with a time constant Tr. The voltage drop continues until the DC voltage switching point t1D, which will be described later, and at the switching point t1D, the voltage becomes Vδ.

[0285] Figure 28(d) shows the operating state at time t1D when the DC voltage of the DC power supply unit 2 switches from voltage V2 to voltage V1. The switching of the switching element SW2 switches the DC voltage of the DC power supply unit 2 from voltage V2 to voltage V1. As the DC voltage switches from voltage V2 to voltage V1, the voltage across the power supply capacitor 31 becomes voltage V1. The bidirectional switch SW1 is off when the supply switching signal QP1 is an off signal and on when the regenerative switching signal QP2 is an on signal.

[0286] When the voltage Vδ is lower than the voltage V1 across the output capacitor 32, the voltage applied to the diode D2 becomes a reverse voltage, and the output voltage Vout is held at voltage Vδ. Also, when the voltage Vδ is higher than the voltage V1 across the output capacitor 32, the inductor voltage becomes (Vδ-V1), and the output voltage Vout becomes voltage Vδ (=(Vδ-V1)+V1), and the output voltage Vout is held at voltage Vδ.

[0287] Figure 28(e) shows the operating state during holding at time t16. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage Vδ, and the output voltage Vout is also held at voltage Vδ.

[0288] (Voltage level switching in section 1E) Section 1E is the section in which both the supply switching signal QP1 and the regenerative switching signal QP2 are at a low level. The malfunction that occurs when the voltage level switches in section 1E will be explained using Figures 29 and 30. Note that Figure 30 shows the conditions at time points t1E and t13-t16.

[0289] Figures 29(b) and (c) show the voltage switching signals QH and QL, and Figure 29(a) shows the voltage Vc of the power supply capacitor 31 switched by the voltage switching signals QH and QL. In Figure 29(f), the output voltage Vout shown by the solid line indicates a malfunction state when the voltage level is switched in section 1E, and the output voltage Vout shown by the dashed line indicates a normal operating state.

[0290] At time t13 in section 1B, when the regenerative switching signal QP2 switches from a low level to a high level (Figure 29(d)), the output voltage Vout begins to rise from voltage (2 × V2) towards zero voltage with a time constant Tr, and reaches zero voltage at time t14. The time interval from t13 to t14, when the regenerative switching signal QP2 is in a high level state, can be set by the time constant Tr of the resonant circuit, thereby making the voltage zero at time t14 (Figure 29(f)).

[0291] During section 1C, the output voltage Vout is held at zero voltage. At time t15 in section 1D, when the supply switching signal QP1 switches from a low level to a high level (Figure 29(e)), the voltage across the power supply capacitor 31 is voltage V2 and the voltage across the output capacitor 32 is zero voltage, so the output voltage Vout drops from zero voltage to voltage (2 × V2) with a time constant Tr (Figure 29(f)).

[0292] At time t16 in interval 1E, the supply switching signal QP1 changes from the High level state to the Low level state. The bidirectional switch SW1 turns off, and the output voltage Vout is held at the voltage (2×V2) (Fig. 29(f)). At time t1E within interval 1E, although the voltage level switches from voltage V2 to voltage V1, since the bidirectional switch SW1 is off, the output voltage Vout is held at the voltage (2×V2) and does not reach the voltage (2×V1), resulting in a malfunction where the supply operation is not achieved at the point indicated by P11 in the figure (Fig. 29(f)).[[ID=~]] [[ID=~]]

[0293] ~[[ID=~]] As described above, at time t1E within interval 1E, when the voltage level switches from voltage V2 to voltage V1, it malfunctions instead of operating normally, and the output voltage Vout obtained in the supply state becomes the voltage (2×V2) instead of the voltage (2×V1).[[ID=~]] [[ID=~]]

[0294] [[ID=~]] Fig. 30 shows the operating states at times t13~t16, t1E, and omits times t11, t12. Here, an example of a π-type LC resonance circuit is shown as the LC resonance circuit.[[ID=~]] [[ID=~]]

[0295] [[ID=~]] Fig. 30(a) shows the operating state during regeneration at time t13. The bidirectional switch SW1 is switched in the direction in which the diode D2 conducts by the off signal of the supply switching signal QP1 and the on signal of the regeneration switching signal QP2, forming a π-type LC resonance circuit of the power supply capacitor 31, the output capacitor 32, and the reactor 33. Through the resonance operation, regeneration of the discharge current from the output capacitor 32 to the power supply capacitor 31 is performed. Here, the voltage of the output capacitor 32 is the voltage (2×V2), and the voltage of the power supply capacitor 31 is the voltage V2. Since both are negative voltages and have the relationship 2×V2<V2, the direction of the current flowing through the reactor 33 is from the power supply capacitor 31 side to the output capacitor 32 side.~[[ID=~]] [[ID=~]]

[0296] [[ID=~]] Due to regeneration through resonant operation, the output voltage Vout, considering the forward direction of diode D2, becomes the sum of the charging voltage V2 of the power supply capacitor 31 and the inductor voltage VL of the reactor 33, which is (V2-VL). Since the inductor voltage VL is (2×V2-V2), the output voltage Vout becomes zero voltage (=(V2-V2)). The charging voltage of the output capacitor 32 is discharged from voltage (2×V2) towards zero voltage by the time constant Tr of the resonant circuit.

[0297] Figure 30(b) shows the operating state during holding at time t14. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at zero voltage, and the output voltage Vout is also held at zero voltage.

[0298] Figure 30(c) shows the operating state during power supply at time t15. The voltage Vc across the power supply capacitor 31 is the voltage V2 charged by the voltage level V2 of the DC power supply 22. The bidirectional switch SW1 is switched in the direction in which diode D1 conducts by the ON signal of the power supply switching signal QP1 and the OFF signal of the regenerative switching signal QP2, forming a π-type LC resonant circuit of the power supply capacitor 31, output capacitor 32 and reactor 33.

[0299] At this time, the voltage across the power supply capacitor 31 is voltage V2, the voltage across the output capacitor 32 is zero voltage, and the voltage VL across the inductor becomes voltage V2, so the output voltage Vout drops from zero voltage to voltage (2 × V2) with a time constant Tr. The voltage drop continues until the DC voltage switching point t1E, which will be described later, and at the switching point tE, the voltage becomes (2 × V2).

[0300] Figure 30(d) shows the operating state during holding at time t16. The bidirectional switch SW1 is in the off state because both the supply switching signal QP1 and the regenerative switching signal QP2 are off signals, and the resonant operation stops. As the resonant operation stops, the charging voltage of the output capacitor 32 is held at voltage (2 × V2), and the output voltage Vout is also held at voltage (2 × V2).

[0301] Figure 30(e) shows the operating state at time t1E when the DC voltage of the DC power supply unit 2 switches from voltage V2 to voltage V1. The switching of the switching element SW2 switches the DC voltage of the DC power supply unit 2 from voltage V2 to voltage V1. As the DC voltage switches from voltage V2 to voltage V1, the voltage across the power supply capacitor 31 becomes voltage V1. Since both the supply switching signal QP1 and the regeneration switching signal QP2 are off signals for the bidirectional switch SW1, the output voltage out is maintained at voltage (2 × V2).

[0302] (5) Other configurations of multi-level DC pulse power supplies Below, the second to fourth configuration examples are shown as examples of the configuration of the multi-level DC pulse power supply 1.

[0303] (5a) Second configuration example The second configuration example will be explained using Figure 31. The multi-level DC pulse power supply 1 of the second configuration example includes a DC power supply unit 2, a resonant unit 3B, and a control unit 4, similar to the first configuration example. The resonant unit 3B of the second configuration example has a different configuration from the resonant unit 3 of the first configuration example.

[0304] The resonant section 3B has a configuration in which a series circuit of a resistor 35 and a switching element 36 is connected in parallel to the output capacitor 32. By turning on the switching element 36, the resistor 35 is connected in parallel to the output capacitor 32. The on / off control of the switching element 36 is performed by a control signal QR from the control circuit. The control signal QR that turns on the switching element 36 is output during regenerative operation and is output before the regenerative switching signal QP2 ends. During the regenerative operation of the resonant circuit, a portion of the discharge current from the output capacitor 32 flows through the resistor 35. This forces the voltage of the output capacitor 32 to be induced to zero voltage during regeneration.

[0305] (5b) Third Configuration Example The third configuration example will be explained using Figure 32. The multi-level DC pulse power supply 1 of the third configuration example includes a DC power supply unit 2, a resonant unit 3C, and a control unit 4, similar to the first and second configuration examples. The resonant unit 3C of the third configuration example has a different configuration from the resonant unit 3 of the first configuration example and the resonant unit 3B of the second configuration example.

[0306] The resonant section 3C, similar to the second configuration example, includes a series circuit of a resistive element 35 and a switching element 36, and the two switching elements of the bidirectional switch SW1 are each provided with reactors 33a and 33b connected in series.

[0307] The bidirectional switch SW1 in the third configuration example is constructed by connecting two series circuits in parallel: a series circuit of a switching element, diode D1, and reactor 33a, and a series circuit of a switching element, diode D2, and reactor 33b.

[0308] In this third configuration example, the series circuit of the switching element, diode D1, and reactor 33a allows a supply current to flow in the resonant state when the switching element is turned on, and the series circuit of the switching element, diode D2, and reactor 33b allows a regenerative current to flow in the resonant state when the switching element is turned on. At this time, the inductance values ​​of each reactor 33a and 33b, along with the capacitance values ​​of the power supply capacitor 31 and the output capacitor 32, become parameters that determine the time constant.

[0309] In the third configuration example, by setting the inductance value L1 of reactor 33a and the inductance value L2 of reactor 33b, the time constants for the supply operation and the time constants for the regenerative operation can be set individually.

[0310] (5c) Fourth configuration example The fourth configuration example will be explained using Figure 33. The multi-level DC pulse power supply 1 of the fourth configuration example includes a DC power supply unit 2, a resonant unit 3D, and a control unit 4, similar to the first to third configuration examples. The resonant unit 3D of the fourth configuration example has a different configuration from the resonant units 3, 3B, and 3C of the first to third configuration examples.

[0311] The resonant sections 3 to 3C in the first to third configuration examples are configured to include a power supply capacitor 31, whereas the resonant section 3D in the fourth configuration example differs in that it does not include a power supply capacitor 31. The bidirectional switch SW1 of the resonant section 3D is connected to the output terminal of the DC power supply section 2 without connecting the power supply capacitor 31 in parallel. The resonant section 3D in the fourth configuration example is composed of a series LC circuit of a reactor 33 and an output capacitor 32.

[0312] In the first to third configuration examples, the regenerative current is regenerated to the power supply capacitor 31 in the π-type LC resonant sections 3, 3B, and 3C, whereas in the fourth configuration example, the regenerative current is regenerated to the DC power supplies 21 and 22 of the DC power supply section 2 in the series LC circuit of the resonant section 3D. [Industrial applicability]

[0313] The multi-level DC pulse power supply and the control method for the multi-level DC pulse power supply of the present invention can be applied to the manufacture of semiconductor devices, such as plasma processing equipment used in processes such as film deposition, etching, and ashing. [Explanation of Symbols]

[0314] 1. Multi-level DC pulse power supply 2 DC power supply section 3,3B,3C,3D resonant part 4,4A,4B,4C control section 4a Pulse signal generation unit 4b QP1 signal generator 4c QP2 signal generator 4d, 4d1, 4d2 delay section 4e QH signal generation section 4f QL signal generation section 4g rise detection unit 4h Falling edge detection unit 4i Period determination section 5 load 21,22 DC power supply 31 Power supply capacitors 32 Output Capacitors 33,33a,33b Reactors 35 Resistors 36 Switching elements D1, D2 diodes QH, QL voltage switching signal QP1 supply switching signal QP2 Regenerative Switching Signal QR control signal RES LC resonant circuit SW1 Two-way switch SW2 Switching element Sdown falling edge signal Sup rising edge signal T12, T21 period Tr time constant Tvc time interval V1, V2 Voltage Levels VL Inductor Voltage Vout output voltage td delay time

Claims

1. This is a multi-level DC pulse power supply that outputs multiple levels of high-frequency pulse voltages. (a) A DC power supply unit that selectively switches and outputs multiple levels of DC voltage, (b) A resonant section comprising an LC resonant circuit and a bidirectional switch for switching the current direction of the LC resonant circuit, which converts the DC voltage of the DC power supply section into a high-frequency pulse voltage, (c) A control unit that controls a first switching operation for switching the DC voltage output by the DC power supply unit and a second switching operation for switching the bidirectional switch, (d) In the control unit, (d1) The first switching operation is an operation to switch the DC voltage applied to the LC resonant circuit, (d2) The second switching operation is an operation that switches between a supply operation, which supplies a DC voltage to the output capacitor of the LC resonant circuit, and a regenerative operation, which recovers the electrostatic energy stored in the output capacitor. (d3) The first switching operation time is between the regenerative operation time and the supply operation time of the second switching operation. Multi-level DC pulse power supply.

2. The control signal output by the control unit is: In the first switching operation described above, the voltage switching signal is used to switch a switching element that selectively outputs a multi-level DC voltage. In the second switching operation described above, the supply switching signal for the supply operation controls one of the switching elements of the bidirectional switch, and the regenerative switching signal for the regenerative operation controls the other switching element of the bidirectional switch. The setting time for the voltage switching signal is within the period between the time the time constant of the LC resonant circuit has elapsed since the regenerative switching signal and the rising time of the subsequent supply switching signal. The multi-level DC pulse power supply according to claim 1.

3. The LC resonant circuit is a π-type LC circuit including a power capacitor connected in parallel to the DC power supply section, an output capacitor connected in parallel to the output terminal, and a reactor connected in series between the power capacitor and the output capacitor, and the regenerative operation regenerates to the power capacitor of the LC resonant circuit. The multi-level DC pulse power supply according to claim 1 or 2.

4. The LC resonant circuit is an L-type LC circuit including a reactor connected in series between the input terminal and the output terminal and an output capacitor connected in parallel to the output terminal, and the regenerative power is supplied to the DC power supply unit. The multi-level DC pulse power supply according to claim 1 or 2.

5. The bidirectional switch comprises a first series circuit of a switching element and a diode, and a parallel connection of a second series circuit of a switching element and a diode. The conduction directions of the diodes in the first series circuit and the diodes in the second series circuit are opposite to each other. The multi-level DC pulse power supply according to claim 1 or 2.

6. The bidirectional switch comprises a first series circuit of a switching element, a diode, and a reactor, and a parallel connection of a second series circuit of a switching element, a diode, and a reactor. The conduction directions of the diodes in the first series circuit and the diodes in the second series circuit are opposite to each other. The multi-level DC pulse power supply according to claim 1 or 2.

7. The device further comprises a series circuit of a switching element and a resistor, and this series circuit is connected in parallel to the output capacitor. The control unit switches the parallel-connected switching elements to the ON state during the regenerative operation. The multi-level DC pulse power supply according to claim 1 or 2.

8. The DC power supply unit is, A configuration comprising multiple DC voltage sources and a switching element that selectively switches between these multiple DC voltage sources. Or, The configuration includes a single DC voltage source and a voltage generation circuit that generates multiple levels of voltage from the single DC voltage source. The multi-level DC pulse power supply according to claim 1.

9. A control method for a multi-level DC pulse power supply that outputs multiple levels of high-frequency pulse voltage, comprising a DC power supply unit that selectively switches and outputs multiple levels of DC voltage, an LC resonant circuit and a bidirectional switch that switches the current direction of the LC resonant circuit, and a resonant unit that converts the DC voltage of the DC power supply unit into a high-frequency pulse voltage, wherein the multi-level DC pulse power supply outputs multiple levels of high-frequency pulse voltage. (a) Control of a first switching operation for switching the DC voltage output by the DC power supply unit, (b) Control of a second switching operation for switching the bidirectional switch and Equipped with, (c) The control of the first switching operation is the control of the operation of switching the DC voltage applied to the LC resonant circuit, (d) The second switching operation is the control of switching between a supply operation that supplies a DC voltage to the output capacitor of the LC resonant circuit and a regenerative operation that recovers the electrostatic energy stored in the output capacitor, (e) The first switching operation time is between the regenerative operation time and the supply operation time of the second switching operation. A control method for a multi-level DC pulse power supply.

10. The first switching operation described above selectively switches the DC voltage level by a voltage switching signal. The second switching operation involves switching one switching element of the bidirectional switch by the supply switching signal of the supply operation, and switching the other switching element of the bidirectional switch by the regenerative switching signal of the regenerative operation. The setting time for the voltage switching signal is within the period between the time constant of the LC resonant circuit elapsed from the regenerative switching signal and the rising edge time of the subsequent supply switching signal. A method for controlling a multi-level DC pulse power supply according to claim 9.

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