Multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials

Abstract

We provide a multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials. [Solution] The system comprises a first coating module 1, a second coating module 2, a movable block 3 for upstream temperature control, a movable block 4 for downstream temperature control, an upstream flow control valve 5, a downstream flow control valve 6, a central gasket 7, an upstream slit control block 9, an upstream slit lead screw 9, a downstream slit control block, and a downstream slit lead screw. When coating is performed, the flow velocity of the upstream optical liquid adhesive is controlled through the large inclined slit gap formed by the upstream slit control block and the central gasket, stabilizing the upstream meniscus. Meanwhile, the flow velocity of the downstream optical liquid adhesive is controlled through the small vertical slit gap formed by the downstream slit control block and the central gasket. This ensures thin film surface quality, enables multilayer coating, and guarantees stability.

Description

Technical Field

[0001] The present invention relates to the technical field of coating machines, and particularly to a multi-layer slit coating slot die head and a usage method for suppressing interlayer erosion applicable to multiple materials.

Background Art

[0002] The multi-layer thin film manufacturing technology is based on the conventional thin film manufacturing process. By precisely controlling the number of layers, thickness, and interface characteristics of materials, an advanced manufacturing process for multi-functional integration and high-performance improvement is realized, which is one of the core technologies in fields such as optoelectronics, semiconductors, and flexible electronics. Due to its excellent material compatibility and performance optimization capabilities, this technology is currently widely applied to the manufacturing of important components in advanced products such as high-end displays, energy storage devices, and optical components.

[0003] The multi-layer thin film manufacturing technology can endow the thin film system with more excellent optical, electrical, and mechanical performances by coating or depositing materials with different functions layer by layer. During operation, the multi-layer slit coating slot die head transports a plurality of liquid materials to the slit outlet through different coating passages respectively and sequentially coats them on the substrate. By realizing multi-layer coating, the optical and electrical performances of the thin film can be effectively enhanced, or special functions such as conductivity, waterproofness, and antireflection can be imparted.

[0004] However, conventional multilayer coating equipment often employs a simple layered structure, and because it does not undergo optimized design for the flow characteristics of the coating material and the stability of the multilayer interface, interlayer erosion frequently occurs, causing diffusion or mixing at the film interface and affecting the overall performance and reliability of the thin film. Furthermore, conventional multilayer coating equipment is often a fixed outlet device, and since the slit width and internal flow path cannot be adjusted, it can only meet the coating requirements of a single fluid, limiting its range of applications and lacking flexibility. Its lack of flexibility in adapting to diverse coating materials, and the large differences in fluid properties between different materials, easily cause non-uniformity of liquid flow rate and pressure at the outlet, which further exacerbates interlayer erosion.

[0005] Therefore, designing slit coating slot die heads that can accommodate a variety of coating materials, suppress interlayer erosion, and ensure the stability of multilayer coating has become a critical issue that the thin-film coating industry must urgently address. To meet the urgent need for high-performance thin-film coating processes in industry, it is not only necessary to improve the uniformity and interfacial stability of multilayer coating in the structural design of the equipment, but also to precisely control the flow rate and pressure of different materials through fluid control technology for multilayer liquids. [Overview of the project] [Problems that the invention aims to solve]

[0006] The present invention has been made in view of the above technical problems, and provides a multilayer slit coating slot die head that can suppress interlayer erosion, is applicable to a variety of coating materials and can suppress interlayer erosion, thereby achieving stability in multilayer coating. [Means for solving the problem]

[0007] To achieve the above objectives, the present invention employs the following technical means. One aspect of the present invention is a multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, comprising a first coating module, a second coating module, an upstream temperature control movable block, a downstream temperature control movable block, an upstream flow control valve, a downstream flow control valve, a central gasket, an upstream slit control block, an upstream slit lead screw, a downstream slit control block, and a downstream slit lead screw, wherein the central gasket is located between the first coating module and the second coating module, the upstream temperature control movable block is located in a recessed groove at the top of the first coating module, the downstream temperature control movable block is located in a recessed groove at the top of the second coating module, and the upstream slit control block is located in the first coating module The downstream slit control block is located in the bottom groove between the rule and the central gasket, the upstream slit lead screw is connected to the upstream slit control block by passing through the first coating module, the downstream slit lead screw is connected to the downstream slit control block by passing through the second coating module, the upstream flow control valve is mounted on the upper outside of the first coating module and communicates with a passage in the upstream temperature control movable block via a passage in the first coating module, and the downstream flow control valve is mounted on the upper outside of the second coating module and communicates with a passage in the downstream temperature control movable block via a passage in the second coating module.

[0008] Furthermore, a rectangular groove is provided on the inside of the top of the first coating module for arranging a movable block for upstream temperature control, and the movable block for upstream temperature control is fixed by bolts, and a trapezoidal groove is provided on the inside of the bottom of the first coating module for arranging an upstream slit control block. An arc-shaped manifold is provided on the inner wall of the aforementioned movable block for upstream temperature control. Inside the aforementioned movable block for upstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. Inside the first coating module, a passage is provided, the liquid supply port of the passage is fixedly connected to an upstream flow control valve, and the liquid discharge port of the passage is in communication with a manifold. A rectangular groove is provided on the inside of the top of the second coating module for arranging a movable block for downstream temperature control, and the movable block for downstream temperature control is fixed by bolts. A trapezoidal groove is provided on the inside of the bottom of the second coating module for arranging a downstream slit control block. An arc-shaped manifold is provided on the inner wall of the aforementioned movable block for downstream temperature control. Inside the aforementioned movable block for downstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. A passage is provided inside the second coating module, the liquid supply port of the passage is fixedly connected to a downstream flow control valve, and the liquid discharge port of the passage is in communication with a manifold.

[0009] Furthermore, the first coating module and the second coating module are separated by the central gasket and fixed together by bolts.

[0010] Furthermore, the depth h2 of the trapezoidal groove provided on the inside of the bottom of the first coating module is smaller than the overall thickness h1 of the upstream slit control block, and the depth h4 of the trapezoidal groove provided on the inside of the bottom of the second coating module is smaller than the overall thickness h3 of the downstream slit control block. [Effects of the Invention]

[0011] This invention offers the following advantages compared to the prior art. 1. According to the present invention, when applying the product, the flow velocity of the upstream optical liquid adhesive is controlled through the inclined large slit gap formed by the upstream slit control block and the central gasket, stabilizing the upstream meniscus. Meanwhile, the flow velocity of the downstream optical liquid adhesive is controlled through the vertical small slit gap formed by the downstream slit control block and the central gasket, thereby ensuring thin film surface quality, realizing multilayer coating, and guaranteeing stability.

[0012] 2. The present invention satisfies the coating of various materials, and by exchanging the movable block for upstream temperature control and the movable block for downstream temperature control according to the coating formed by different materials, it satisfies the coating of multilayer thin films made of different materials using different manifolds, and satisfies the manufacturing needs of multilayer thin films made of multiple materials by designing various internal flow paths of slot die heads in accordance with the selection of the central gasket.

[0013] 3. By preheating the inside of the upstream temperature control movable block and the downstream temperature control movable block, the present invention allows various optical liquid adhesives to be preheated to a semi-colloidal state at an appropriate temperature inside the slot die head, thereby significantly suppressing interlayer erosion according to the flow path design, improving production efficiency and stability, increasing the types of products that can be produced, and achieving better process adaptability. [Brief explanation of the drawing]

[0014] [Figure 1] This is a schematic diagram (assembly diagram) of the overall configuration of the present invention. [Figure 2] This is a rear view (exploded view) of Figure 1. [Figure 3] This is a cross-sectional view of Figure 1. [Modes for carrying out the invention]

[0015] The present invention will be further described below with reference to the drawings. As shown in Figures 1-3, the multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials comprises a first coating module 1, a second coating module 2, an upstream temperature control movable block 3, a downstream temperature control movable block 4, an upstream flow control valve 5, a downstream flow control valve 6, a central gasket 7, an upstream slit control block 8, an upstream slit lead screw 9, a downstream slit control block 10, and a downstream slit lead screw 11. The central gasket 7 is located between the first coating module 1 and the second coating module 2, the upstream temperature control movable block 3 is located in a groove at the top of the first coating module 1, the downstream temperature control movable block 4 is located in a groove at the top of the second coating module 2, and the upstream slit control block 8 is located between the first coating module 1 and the second coating module 2. The downstream slit control block 10 is located in the bottom groove between the second coating module 2 and the central gasket 7, the upstream slit lead screw 9 is connected to the upstream slit control block 8 by passing through the first coating module 1, the downstream slit lead screw 11 is connected to the downstream slit control block 10 by passing through the second coating module 2, the upstream flow control valve 5 is mounted on the upper outside of the first coating module 1 and communicates with the passage in the upstream temperature control movable block 3 via a passage in the first coating module 1, and the downstream flow control valve 6 is mounted on the upper outside of the second coating module 2 and communicates with the passage in the downstream temperature control movable block 4 via a passage in the second coating module 2.

[0016] Furthermore, a rectangular groove is provided on the inside of the top of the first coating module 1 for arranging the movable block 3 for upstream temperature control, and the movable block 3 for upstream temperature control is fixed by bolts, and a trapezoidal groove is provided on the inside of the bottom of the first coating module 1 for arranging the upstream slit control block 8. An arc-shaped manifold is provided on the inner wall of the aforementioned movable block 3 for upstream temperature control. Inside the aforementioned movable block 3 for upstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. Inside the first coating module 1, a passage is provided. The liquid supply port of the passage is fixedly connected to the upstream flow control valve 5, and the liquid discharge port of the passage communicates with the manifold. Inside the inner side of the top of the second coating module 2, a rectangular concave groove for arranging the downstream temperature control movable block 4 is provided, and the downstream temperature control movable block 4 is fixed by bolts. Inside the inner side of the bottom of the second coating module 2, a trapezoidal concave groove for arranging the downstream slit control block 10 is provided. An arc-shaped manifold is opened on the inner wall of the downstream temperature control movable block 4. Inside the downstream temperature control movable block 4, a liquid storage tank is provided below the arc-shaped manifold. Inside the second coating module 2, a passage is provided. The liquid supply port of the passage is fixedly connected to the downstream flow control valve 6, and the liquid discharge port of the passage communicates with the manifold.

[0017] Furthermore, the first coating module 1 and the second coating module 2 are separated via the central gasket 7 and fixed by bolts.

[0018] Furthermore, the depth h2 of the trapezoidal concave groove provided inside the bottom of the first coating module 1 is smaller than the thickness h1 of the entire upstream slit control block 8, and the depth h4 of the trapezoidal concave groove provided inside the bottom of the second coating module 2 is smaller than the thickness h3 of the entire downstream slit control block 10.

[0019] The present invention adjusts the width of the internal flow path and the slit according to various coating materials according to the following steps.

[0020] First, an appropriate upstream temperature control movable block 3, a downstream temperature control movable block 4, and a central gasket 7 are selected according to the thickness of each layer of the multilayer thin film and the materials used. The selected upstream temperature control movable block 3 and downstream temperature control movable block 4 are then inserted into rectangular grooves provided on the inside of the top of the first coating module 1 and the inside of the top of the second coating module 2, respectively.

[0021] Next, the upstream slit lead screw 9 and the downstream slit lead screw 11 are manually adjusted counterclockwise to change the positions of the upstream slit control block 8 and the downstream slit control block 10 to the central gasket 7. Then, depending on the multilayer thin film to be finally manufactured, the corresponding upstream slit lead screw 9 and the downstream slit lead screw 11 are rotated clockwise, causing the upstream slit lead screw 9 and the downstream slit lead screw 11 to move the upstream slit control block 8 and the downstream slit control block 10 outward, and the rotation stops when the slit reaches the required width. After that, the upstream temperature control movable block 3 and the downstream temperature control movable block 4 begin preheating according to the thickness of the thin film.

[0022] The optical liquid adhesive required for coating enters the manifolds of the upstream temperature control movable block 3 and the downstream temperature control movable block 4 from the upstream flow control valve 5 and the downstream flow control valve 6, respectively. During this process, the optical liquid adhesive is heated and becomes semi-colloidal, filling the manifold. Then, the upstream optical liquid adhesive flows into the inclined large slit gap formed by the upstream slit control block 8 and the central gasket 7, and because the flow velocity is slow, it stabilizes the upstream meniscus. The downstream optical liquid adhesive flows into the vertical small slit gap formed by the downstream slit control block 10 and the central gasket 7, and because the flow velocity is fast, the quality of the thin film surface can be guaranteed.

[0023] As described above, any person with ordinary skill in the art can make various other modifications and variations based on the technical means and technical idea of ​​the present invention, and all such modifications and variations fall within the scope of protection of the claims.

[0024] (Note) (Note 1) The system comprises a first coating module (1), a second coating module (2), a movable block for upstream temperature control (3), a movable block for downstream temperature control (4), an upstream flow control valve (5), a downstream flow control valve (6), a central gasket (7), an upstream slit control block (8), an upstream slit lead screw (9), a downstream slit control block (10), and a downstream slit lead screw (11). The central gasket (7) is located between the first coating module (1) and the second coating module (2). The aforementioned movable block (3) for upstream temperature control is located in a groove at the top of the first coating module (1), The downstream temperature control movable block (4) is located in a groove at the top of the second coating module (2), The upstream slit control block (8) is located in the bottom groove between the first coating module (1) and the central gasket (7). The downstream slit control block (10) is located in the bottom groove between the second coating module (2) and the central gasket (7). The upstream slit lead screw (9) penetrates the first coating module (1) and is connected to the upstream slit control block (8). The downstream slit lead screw (11) penetrates the second coating module (2) and is connected to the downstream slit control block (10). The upstream flow control valve (5) is mounted on the upper outside of the first coating module (1) and communicates with a passage in the upstream temperature control movable block (3) via a passage in the first coating module (1). A multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, characterized in that the downstream flow control valve (6) is mounted on the upper outside of the second coating module (2) and communicates with a passage in the downstream temperature control movable block (4) via a passage in the second coating module (2).

[0025] (Note 2) A rectangular groove is provided on the inside of the top of the first coating module (1) for arranging the movable block (3) for upstream temperature control, and the movable block (3) for upstream temperature control is fixed by bolts. A trapezoidal groove is provided on the inside of the bottom of the first coating module (1) for arranging the upstream slit control block (8). An arc-shaped manifold is provided on the inner wall of the aforementioned movable block (3) for upstream temperature control. Inside the aforementioned movable block (3) for upstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. A passage is provided inside the first coating module (1), the liquid supply port of the passage is fixedly connected to the upstream flow control valve (5), and the liquid discharge port of the passage is in communication with the manifold. A rectangular groove is provided on the inside of the top of the second coating module (2) for arranging the downstream temperature control movable block (4), and the downstream temperature control movable block (4) is fixed by bolts, and a trapezoidal groove is provided on the inside of the bottom of the second coating module (2) for arranging the downstream slit control block (10), An arc-shaped manifold is provided on the inner wall of the downstream temperature control movable block (4). Inside the aforementioned movable block (4) for downstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. A multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, as described in Appendix 1, characterized in that a passage is provided inside the second coating module (2), the liquid supply port of the passage is fixedly connected to a downstream flow control valve (6), and the liquid discharge port of the passage is in communication with a manifold.

[0026] (Note 3) The multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, as described in Appendix 1, is characterized in that the first coating module (1) and the second coating module (2) are separated by the central gasket (7) and fixed by bolts.

[0027] (Note 4) A multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, as described in Appendix 1, characterized in that the depth h2 of a trapezoidal groove provided on the inside of the bottom of the first coating module (1) is smaller than the overall thickness h1 of the upstream slit control block (8), and the depth h4 of a trapezoidal groove provided on the inside of the bottom of the second coating module (2) is smaller than the overall thickness h3 of the downstream slit control block (10). [Explanation of symbols]

[0028] 1: First coating module, 2: Second coating module, 3: Movable block for upstream temperature control, 4: Movable block for downstream temperature control, 5: Upstream flow control valve, 6: Downstream flow control valve, 7: Center gasket; 8: Upstream slit control block, 9: Upstream slit lead screw, 10: Downstream slit control block, 11: Downstream slit lead screw.

Claims

1. The system comprises a first coating module (1), a second coating module (2), a movable block for upstream temperature control (3), a movable block for downstream temperature control (4), an upstream flow control valve (5), a downstream flow control valve (6), a central gasket (7), an upstream slit control block (8), an upstream slit lead screw (9), a downstream slit control block (10), and a downstream slit lead screw (11). The central gasket (7) is located between the first coating module (1) and the second coating module (2). The aforementioned movable block (3) for upstream temperature control is located in a groove at the top of the first coating module (1), The downstream temperature control movable block (4) is located in a groove at the top of the second coating module (2), The upstream slit control block (8) is located in the bottom groove between the first coating module (1) and the central gasket (7). The downstream slit control block (10) is located in the bottom groove between the second coating module (2) and the central gasket (7). The upstream slit lead screw (9) penetrates the first coating module (1) and is connected to the upstream slit control block (8). The downstream slit lead screw (11) penetrates the second coating module (2) and is connected to the downstream slit control block (10). The upstream flow control valve (5) is mounted on the upper outside of the first coating module (1) and communicates with a passage in the upstream temperature control movable block (3) via a passage in the first coating module (1). A multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, characterized in that the downstream flow control valve (6) is mounted on the upper outside of the second coating module (2) and communicates with a passage in the downstream temperature control movable block (4) via a passage in the second coating module (2).

2. A rectangular groove is provided on the inside of the top of the first coating module (1) for arranging the movable block (3) for upstream temperature control, and the movable block (3) for upstream temperature control is fixed by bolts, and a trapezoidal groove is provided on the inside of the bottom of the first coating module (1) for arranging the upstream slit control block (8), An arc-shaped manifold is provided on the inner wall of the aforementioned movable block (3) for upstream temperature control. Inside the aforementioned movable block (3) for upstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. A passage is provided inside the first coating module (1), the liquid supply port of the passage is fixedly connected to the upstream flow control valve (5), and the liquid discharge port of the passage is in communication with the manifold. A rectangular groove is provided on the inside of the top of the second coating module (2) for arranging the downstream temperature control movable block (4), and the downstream temperature control movable block (4) is fixed by bolts, and a trapezoidal groove is provided on the inside of the bottom of the second coating module (2) for arranging the downstream slit control block (10), An arc-shaped manifold is provided on the inner wall of the downstream temperature control movable block (4). Inside the aforementioned movable block (4) for downstream temperature control, a liquid storage tank is provided below the arc-shaped manifold. The multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, as described in claim 1, is characterized in that a passage is provided inside the second coating module (2), the liquid supply port of the passage is fixedly connected to a downstream flow control valve (6), and the liquid discharge port of the passage is in communication with a manifold.

3. The multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, characterized in that the first coating module (1) and the second coating module (2) are separated by the central gasket (7) and fixed by bolts, as described in claim 1.

4. The multilayer slit coating slot die head for suppressing interlayer erosion applicable to multiple materials, characterized in that the depth h2 of the trapezoidal groove provided on the inside of the bottom of the first coating module (1) is less than the overall thickness h1 of the upstream slit control block (8), and the depth h4 of the trapezoidal groove provided on the inside of the bottom of the second coating module (2) is less than the overall thickness h3 of the downstream slit control block (10).

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