Manufacturing method for semiconductor devices

Abstract

To suppress slip defect in a semiconductor wafer from developing.SOLUTION: A manufacturing method for a semiconductor device comprises: an area forming step of forming an impurity area including a first impurity, on a semiconductor wafer; an annealing step of annealing the semiconductor wafer while supporting a lower surface of the semiconductor wafer; and a removing step of removing at least a portion of the impurity area by removing an area including the lower surface of the semiconductor wafer. The first impurity may be oxygen. After the annealing step, the maximum value of concentration of the first impurity in the impurity area may be 1×1018 / cm3 or more.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] This invention relates to a method for manufacturing a semiconductor device. [Background technology]

[0002] Conventionally, it is known that semiconductor devices are formed using semiconductor wafers such as silicon (see, for example, Patent Documents 1-3). Patent Document 1: Japanese Patent Application Laid-Open No. 5-62867 Patent document 2 Japanese Patent Application Laid-Open No. 9-190954 Patent Document 3: Japanese Unexamined Patent Publication No. 2005-64524 [Overview of the Initiative] [Problems that the invention aims to solve]

[0003] In a semiconductor wafer, it is preferable to have few defects in the region where the semiconductor device is formed. [Means for solving the problem]

[0004] One embodiment of the present invention provides a method for manufacturing a semiconductor device. The manufacturing method may include a region formation step of forming an impurity region containing a first impurity on a semiconductor wafer. The manufacturing method may include an annealing step of annealing the semiconductor wafer while supporting its lower surface. The manufacturing method may include a removal step of removing at least a portion of the impurity region by removing a region including the lower surface of the semiconductor wafer.

[0005] During the region formation stage, impurity regions may be formed across the entire surface of the semiconductor wafer.

[0006] The manufacturing method involves forming at least a portion of the structure of the semiconductor element on the upper surface above the impurity region. side A structure formation stage may be included between the region formation stage and the removal stage.

[0007] The first impurity may be oxygen.

[0008] After the annealing step, the maximum value of the concentration of the first impurity in the impurity region may be 1×10 , ,

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[0009] After the annealing step, the concentration of the first impurity in the impurity region may be less than 1×10 20 / cm 3 or less.

[0010] In the region formation step, the first impurity may be implanted from the lower surface of the semiconductor wafer.

[0011] In the region formation step, the first impurity may be implanted at a plurality of depth positions.

[0012] In the region formation step, a semiconductor wafer may be formed by bonding a first wafer in which an impurity region is formed and a second wafer.

[0013] After the annealing step, the width of the impurity region in the depth direction may be 100 μm or less.

[0014] The manufacturing method may include a lower surface side structure formation step of forming at least a part of the configuration of the semiconductor element on the lower surface side of the semiconductor wafer after the removal step.

[0015] In the removal step, the entire impurity region may be removed. <00​​​​​​​​​​​​​​It should be noted that the above summary of the invention does not enumerate all of its features. Furthermore, subcombinations of these features may also constitute an invention. [Brief explanation of the drawing]

[0020] [Figure 1] This shows the process of annealing a semiconductor wafer 100. [Figure 2] This is a magnified view of region A in Figure 1. [Figure 3] This figure illustrates one embodiment of the present invention. [Figure 4] This is a flowchart showing an example of a semiconductor device manufacturing method. [Figure 5] This diagram illustrates the region formation stage S410, the upper surface structure formation stage S420, and the annealing stage S430. [Figure 6] This diagram illustrates the removal step S440 and the lower surface structure formation step S450. [Figure 7] This shows an example of the impurity concentration distribution in the depth direction of a semiconductor wafer 100. [Figure 8] This shows another example of the impurity concentration distribution in the depth direction of the impurity region 140. [Figure 9] This is a diagram illustrating another example of the region formation stage S410. [Figure 10] This figure illustrates other examples of the region formation stage S410, the upper surface structure formation stage S420, and the annealing stage S430. [Figure 11] This figure illustrates other examples of the removal step S440 and the lower surface structure formation step S450. [Modes for carrying out the invention]

[0021] The present invention will be described below through embodiments, but these embodiments are not intended to limit the scope of the claims. Furthermore, not all combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0022] In this specification, one side of a semiconductor wafer in a direction parallel to its depth is referred to as "top," and the other side as "bottom." Of the two main surfaces of a wafer, substrate, layer, or other component, one surface is referred to as the top surface, and the other surface as the bottom surface. The directions of "top" and "bottom" are not limited to the direction of gravity or the direction in which the semiconductor device is mounted.

[0023] In this specification, technical matters may be described using the Cartesian coordinate axes, the X, Y, and Z axes. The Cartesian coordinate axes merely specify the relative positions of components and do not limit any particular direction. For example, the Z axis does not limit the direction to height relative to the ground. Note that the +Z axis direction and the -Z axis direction are opposite directions. When the sign is not specified and only the Z axis direction is written, it means the direction parallel to the +Z and -Z axes.

[0024] In this specification, the orthogonal axes parallel to the top and bottom surfaces of the semiconductor wafer are defined as the X and Y axes. The axis perpendicular to the top and bottom surfaces of the semiconductor wafer is defined as the Z axis. In this specification, the direction of the Z axis may be referred to as the depth direction. In this specification, the direction parallel to the top and bottom surfaces of the semiconductor wafer, including the X and Y axes, may be referred to as the horizontal direction.

[0025] Furthermore, the region from the center of the semiconductor wafer in the depth direction to the top surface is sometimes referred to as the top surface of the semiconductor wafer. Similarly, the region from the center of the semiconductor wafer in the depth direction to the bottom surface is sometimes referred to as the bottom surface of the semiconductor wafer.

[0026] In this specification, the terms "identical" or "equal" may include cases where there are errors due to manufacturing variations, etc. Such errors are, for example, within 10%.

[0027] When charged particles such as ions or electrons are injected into a semiconductor wafer with a predetermined acceleration energy, these particles have a predetermined distribution in the depth direction. In this specification, the peak position of this distribution may be referred to as the position where the particles were injected, or the depth at which they were injected.

[0028] Figure 1 shows an example of a semiconductor device manufacturing process. The semiconductor device includes semiconductor elements such as transistors or diodes. The semiconductor device is formed on a semiconductor wafer 100. The semiconductor wafer 100 is made of a semiconductor material such as silicon, silicon carbide, or gallium nitride. The semiconductor wafer 100 is, for example, disc-shaped when viewed from above in the Z-axis direction. In Figure 1, the semiconductor wafer 100 is, for example, rectangular in cross-sectional view in the Y-axis direction. In Figure 1, the edges of the semiconductor wafer 100 are not chamfered, but the edges of the semiconductor wafer 100 may be chamfered. Multiple semiconductor devices (semiconductor chips) may be formed on the semiconductor wafer 100. Multiple semiconductor devices can be manufactured by dicing the semiconductor wafer 100 into individual pieces.

[0029] Figure 1 shows the process of annealing a semiconductor wafer 100. For example, in the manufacturing process of semiconductor devices, impurities may be injected into the semiconductor wafer 100, and then it may be annealed at a predetermined temperature and time. By annealing the semiconductor wafer 100, the impurities can be diffused and activated as donors or acceptors. When annealing the semiconductor wafer 100, a transport boat 200 on which the semiconductor wafers 100 are placed is put into the annealing furnace. Multiple semiconductor wafers 100 may be placed on the transport boat 200.

[0030] Figure 2 is an enlarged view of region A in Figure 1. Region A includes the area where the semiconductor wafer 100 and the transport boat 200 are in contact. The semiconductor wafer 100 has an upper surface 21 and a lower surface 23. The upper surface 21 and the lower surface 23 are the two main surfaces of the semiconductor wafer 100. In other words, the upper surface 21 and the lower surface 23 are the two surfaces with the largest area on the semiconductor wafer 100.

[0031] In this example, at least a portion of the lower surface 23 of the semiconductor wafer 100 is supported by the transport boat 200. The portion of the lower surface 23 of the semiconductor wafer 100 that is in contact with the transport boat 200 is referred to as the support portion 110. In this example, only the edge of the lower surface 23 of the semiconductor wafer 100 is in contact with the transport boat 200, but the entire lower surface 23 of the semiconductor wafer 100 may be in contact with the transport boat 200.

[0032] When the lower surface 23 of the semiconductor wafer 100 is supported, stress is generated near the support portion 110 due to the weight of the semiconductor wafer 100. If the semiconductor wafer 100 is annealed in this state, defects may occur in the support portion 110. In this specification, such defects are referred to as slips 120. These defects are distortions in the crystal structure of the semiconductor wafer 100 (i.e., crystal defects). As shown by the arrows in Figure 2, the slips 120 propagate in the direction from the support portion 110 toward the upper surface 21.

[0033] The semiconductor wafer 100 includes an element region 130 on which semiconductor elements are formed. In this example, the element region 130 is in contact with the upper surface 21 of the semiconductor wafer 100. The element region 130 is the region that remains as a semiconductor device. The region of the semiconductor wafer 100 other than the element region 130 is removed during the manufacturing process. For example, the semiconductor wafer 100 is formed thicker than the semiconductor substrate of the semiconductor device to be ultimately manufactured in order to prevent damage during the manufacturing process. Towards the end of the manufacturing process, the thickness of the semiconductor wafer 100 is adjusted according to the voltage withstand capability of the semiconductor device. For example, the thickness of the semiconductor wafer 100 is adjusted by grinding the lower surface 23 of the semiconductor wafer 100. Figures 1 and 2 show the semiconductor wafer 100 before the thickness is adjusted.

[0034] If the aforementioned slip 120 progresses to the element region 130, it will affect the characteristics of the semiconductor device. For example, the leakage current of the semiconductor device may increase, and the breakdown voltage may decrease. The higher the annealing temperature, the more likely slip 120 is to occur and progress. In particular, at high annealing temperatures of 1000°C or higher, the occurrence of slip 120 becomes significant, and the likelihood of slip 120 reaching the element region 130 increases.

[0035] On the other hand, in the manufacturing process of semiconductor devices, it is possible to anneal the semiconductor wafer 100 at a high temperature. For example, when impurities injected into the element region 130 of the semiconductor wafer 100 are diffused to a location far from the injection site, the annealing temperature becomes high. In such cases, the possibility of slip 120 reaching the element region 130 increases. While annealing at a low temperature can suppress the occurrence and progression of slip 120, the annealing time becomes long if the impurities are to diffuse sufficiently, which reduces the throughput of the manufacturing process.

[0036] Furthermore, when the diameter of the semiconductor wafer 100 exceeds approximately 300 mm, the occurrence of slip 120 becomes significant, and the likelihood of slip 120 reaching the element region 130 increases. This is thought to be because the weight of the semiconductor wafer 100 increases, leading to increased stress near the support portion 110.

[0037] Furthermore, the oxygen concentration initially present in the semiconductor wafer 100 is 8 × 10⁻⁶. 17 / cm 3 When the following conditions are met, the occurrence of slip 120 becomes significant, and the likelihood of slip 120 reaching the element region 130 increases. This is thought to be because a decrease in oxygen concentration makes it easier for slip 120 to progress.

[0038] Figure 3 illustrates one embodiment of the present invention. In this example, an impurity region 140 containing a first impurity is pre-formed on the semiconductor wafer 100 before the annealing process at a high temperature (e.g., 1000°C or higher). In this specification, the impurity forming the impurity region 140 is referred to as the first impurity. The impurity region 140 is located on the lower surface 23 side of the semiconductor wafer 100. The lower surface 23 side refers to the region between the center of the semiconductor wafer 100 in the depth direction and the lower surface 23. The impurity region 140 has a higher atomic concentration (atoms / cm³) of the first impurity per unit volume than other regions. 3 This is a region where the concentration is locally high. In this specification, the atomic concentration of impurities per unit volume is simply expressed as impurity concentration ( / cm³). 3 It may be referred to as [a specific term]. The impurity concentration can be measured by known methods such as SIMS (Secondary Ion Mass Spectrometry).

[0039] A slip 120 that has reached the impurity region 140 from the lower surface 23 has its progression suppressed by the first impurity contained in the impurity region 140. For example, if a slip 120 that has been progressing through the silicon crystal comes into contact with the first impurity, it is conceivable that it will be unable to bypass the first impurity and its progression toward the upper surface 21 will be suppressed. As a result, the impurity region 140 prevents the slip 120 from the lower surface 23 from progressing toward the upper surface 21 beyond the impurity region 140.

[0040] The first impurity present in high concentrations in the impurity region 140 is, for example, oxygen. However, the first impurity is not limited to oxygen. The first impurity may be any element that can suppress or inhibit the progression of slip 120. The first impurity may be nitrogen, hydrogen, carbon, or any other element. The first impurity is an element different from the semiconductor material forming the semiconductor wafer.

[0041] It is preferable that at least a portion of the impurity region 140 is located on the lower surface 23 side of the element region 130. This suppresses the slip 120 from reaching the element region 130. The entire impurity region 140 may be located on the lower surface 23 side of the element region 130, or a portion of it may be located in the element region 130.

[0042] The impurity region 140 may be arranged in an XY plane parallel to the lower surface 23 such that it overlaps with at least the support portion 110. The impurity region 140 may be arranged across the entire semiconductor wafer 100 in the XY plane. In other words, the impurity region 140 may be arranged to overlap the entire lower surface 23.

[0043] Figure 4 is a flowchart of an example of a semiconductor device manufacturing method. The manufacturing method in this example comprises a region formation step S410, an annealing step S430, and a removal step S440. The manufacturing method may further include an upper surface structure formation step S420 and a lower surface structure formation step S450. In this example, the annealing step S430 is included in the upper surface structure formation step S420.

[0044] Figure 5 illustrates the region formation stage S410, the upper surface structure formation stage S420, and the annealing stage S430. In the descriptions of each stage in Figure 5, etc., the structure near region A is shown. The semiconductor wafer 100 in this example is an N-type wafer. That is, immediately after cutting from the ingot, donors such as phosphorus are distributed almost uniformly throughout the semiconductor wafer 100. In this specification, donors that are distributed almost uniformly throughout the initial semiconductor wafer 100 are sometimes referred to as bulk donors.

[0045] In the region formation step S410, an impurity region 140 is formed on the lower surface 23 side of the semiconductor wafer 100. In this example, the impurity region 140 is formed by implanting ions of a first impurity, such as oxygen ions, from the lower surface 23 of the semiconductor wafer 100. The ions of the first impurity may be implanted from the entire surface of the lower surface 23. In this case, the impurity region 140 is formed at a predetermined depth from the lower surface 23, overlapping the entire surface of the lower surface 23. In other examples, the impurity region 140 may be formed by epitaxial growth. Alternatively, a wafer with the impurity region 140 formed on its surface and a wafer containing the element region 130 may be bonded together to form the semiconductor wafer 100.

[0046] Next, in the upper surface structure formation step S420, at least a portion of the structure of the semiconductor device (sometimes referred to as the upper surface structure) is formed on the upper surface 21 side of the impurity region 140. The semiconductor device in this example is a trench gate type transistor. The upper surface structure in this example includes an emitter region 12, a base region 14, and a gate trench 40. Figure 5 schematically shows the upper surface structure. The emitter region 12 is an N+ type region provided in contact with the upper surface 21 of the semiconductor wafer. The base region 14 is a P type region provided below the emitter region 12. Below the base region 14, an N- type drift region 18 is provided. The impurity concentration of the drift region 18 may be approximately the same as the bulk donor concentration. In other words, the drift region 18 may be a region that remains without the formation of regions such as the emitter region 12 and the base region 14.

[0047] The gate trench 40 is provided from the top surface 21 of the semiconductor wafer 100 to the drift region 18. The gate trench 40 includes a gate electrode 44 and a gate insulating film 42. The gate electrode 44 is formed of a conductive material such as polysilicon doped with impurities. The gate insulating film 42 is provided between the gate electrode 44 and the semiconductor wafer 100 to electrically insulate them. The gate insulating film 42 is, for example, an oxide film. The emitter region 12 and the base region 14 are in contact with the side surface of the gate trench 40. When a predetermined gate voltage is applied to the gate electrode 44, the base region 14 at the boundary with the gate trench 40 inverts to an N-type configuration, forming a channel. As a result, current flows between the emitter region 12 and the drift region 18. In other words, the transistor turns on.

[0048] The upper structure may include an interlayer insulating film 38 and an emitter electrode 52. The emitter electrode 52 is an electrode containing a metal such as aluminum. The emitter electrode 52 is connected to the emitter region 12. The interlayer insulating film 38 electrically insulates the gate electrode 44 and the emitter electrode 52. The interlayer insulating film 38 may be provided on the upper surface 21 of the semiconductor wafer 100 so as to cover the gate trench 40.

[0049] The emitter region 12 and the base region 14 may be formed by impregnating the semiconductor wafer 100 with impurities and performing an annealing process. This annealing process may correspond to annealing step S430. This annealing process may be performed using a transport boat 200.

[0050] As described above, during the annealing step S430, slip 120 may occur on the lower surface 23 of the semiconductor wafer 100. In this example, even if slip 120 occurs, the impurity region 140 can suppress the progression of slip 120. Therefore, it is possible to prevent slip 120 from progressing to the element region 130.

[0051] Figure 6 illustrates the removal step S440 and the lower surface structure formation step S450. In the removal step S440, the region including the lower surface 23 of the semiconductor wafer 100 is removed. In this example, the lower surface 23 of the semiconductor wafer 100 is ground by a method such as CMP. In the removal step S440, at least a portion of the impurity region 140 is removed. For example, the lower surface 23 side of the semiconductor wafer 100 is ground until at least the interior of the impurity region 140 is reached. This removes the region where slip 120 occurred. In the example in Figure 6, the entire impurity region 140 is removed. That is, the semiconductor wafer 100 is ground up to the upper surface 21 side beyond the impurity region 140. After the removal step S440, the semiconductor wafer 100 has a lower surface 25. The lower surface 25 is located closer to the upper surface 21 than the original lower surface 23.

[0052] In the lower surface structure formation step S450, after the removal step S440, at least a part of the structure of the semiconductor element (referred to as the lower surface structure) is formed on the lower surface 25 side of the semiconductor wafer 100. The semiconductor element shown in Figure 6 is an IGBT (Insulated Gate Bipolar Transistor). In this example, the lower surface structure includes a collector region 22 and a collector electrode 24. The lower surface structure may further include a buffer region 20. The collector region 22 is a P-type region provided in contact with the lower surface 25. The collector electrode 24 is an electrode provided on the lower surface 25 and contains a metal such as aluminum. The gate voltage applied to the gate electrode 44 controls whether or not current flows between the emitter electrode 52 and the collector electrode 24. The buffer region 20 is an N-type region provided between the drift region 18 and the collector region 22. The donor concentration in the buffer region 20 is higher than the donor concentration in the drift region 18. The buffer region 20 functions as a field stop layer that prevents the depletion layer extending from the PN junction of the base region 14 and the drift region 18 from reaching the collector region 22.

[0053] As illustrated in the examples in Figures 5 and 6, even in a manufacturing process that includes a high-temperature annealing step S430, it is possible to suppress the slip 120 from reaching the element region 130. Therefore, it is possible to manufacture semiconductor devices with fewer defects while increasing the throughput of the manufacturing process.

[0054] Figure 7 shows an example of the impurity concentration distribution in the depth direction of a semiconductor wafer 100. Figure 7 shows the concentration distribution of primary impurities such as oxygen injected into the impurity region 140, and does not include the concentrations of other impurities. Figure 7 also shows the concentration distribution after the annealing step S430.

[0055] Let P1 be the maximum value of the first impurity concentration in the impurity region 140. In this example, the first impurity region 140 is formed by implanting oxygen ions and other first impurities at depth Z1. Therefore, the impurity concentration distribution shows a peak with its apex at depth Z1. The maximum value P1 in this example is the first impurity concentration at the apex of that peak.

[0056] The maximum value P1 is preferably 1×10 18 / cm 3 or more. By setting the maximum value P1 to 1×10 18 / cm 3 or more, even when the annealing temperature is 1000°C or higher, it is possible to suppress the slip 120 from reaching the element region 130. The maximum value P1 may be 5×10 18 / cm 3 or more, and may be 1×10 19 / cm 3 or more.

[0057] Note that the first impurity such as oxygen may be distributed throughout the semiconductor wafer 100. For example, when forming a semiconductor ingot, the first impurity is contained throughout the ingot. Since the semiconductor wafer 100 is cut out from the ingot, the first impurity may be contained throughout the semiconductor wafer 100. As an example, throughout the semiconductor wafer 100 cut out from an ingot formed by the MCZ method, oxygen of 4×10 17 / cm 3 or less is contained. In this example, let the concentration of the first impurity distributed throughout the semiconductor wafer 100 be D. The concentration D may be the average value of the concentration of the first impurity throughout the semiconductor wafer 100. The maximum value P1 may be 5 times or more, 10 times or more, or even 50 times or more of the concentration D. The concentration D in this example is 4×10 17 / cm 3 or less. In a semiconductor wafer without the impurity region 140 formed and with an average oxygen concentration of 4×10 17 / cm 3 or less, the progress of the slip 120 could not be suppressed.

[0058] Note that the concentration of the first impurity in the impurity region 140 may be less than 1×10 20 / cm 3 That is, the maximum value P1 is 1×10 20 / cm 3It may be less than 5 × 10⁻¹⁰. If the concentration of the first impurity in the impurity region 140 is too high, the first impurity may diffuse into the device region 130 and affect the characteristics of the semiconductor device. The concentration of the first impurity in the impurity region 140 is 5 × 10⁻¹⁰. 19 / cm 3 The following may be true: 1 × 10 19 / cm 3 The following is also acceptable.

[0059] In this example, the central position in the depth direction of the semiconductor wafer 100 is defined as depth position Zc. Depth position Z1 is located between the bottom surface 23 and depth position Zc. When impurities are implanted by ion implantation, the impurity concentration distribution has a peak with its apex near depth position Z1. The range of the full width at half maximum in the depth direction of this peak is defined as the width W1 of the impurity region 140 in the depth direction. The width W1 may be 100 μm or less. The impurity region 140 does not need to be formed over a very wide depth range to suppress the progression of slip 120. The width W1 may be 50 μm or less, 20 μm or less, or 10 μm or less. The width W1 may be 1 μm or more, 2 μm or more, or 5 μm or more. The width W1 may be 10% or less, 5% or less, or 1% or less of the thickness of the semiconductor wafer 100 (distance from the top surface 21 to the bottom surface 23).

[0060] Let L1 be the distance between the impurity region 140 and the bottom surface 23. The distance L1 may be 100 μm or less, 50 μm or less, or 20 μm or less. The distance L1 may also be 0 μm. In other words, the impurity region 140 may be exposed to the bottom surface 23. By reducing the distance L1, the distance in the Z direction over which the slip 120 propagates can be shortened.

[0061] Let L2 be the distance between the impurity region 140 and the upper surface 21. The distance L2 may be 400 μm or more. By securing the distance L2, the element region 130 can be secured. The distance L2 may also be 200 μm or more. The distance L2 can be set by the thickness of the element region 130 to be formed. The distance between the element region 130 and the impurity region 140 may be 0 μm or more, 10 μm or more, or 100 μm or more.

[0062] Figure 8 shows another example of the impurity concentration distribution in the depth direction of the impurity region 140. In this example, the impurity region 140 is formed by injecting the first impurity at multiple depth positions (e.g., Z1, Z2, Z3). The other aspects are the same as in the example in Figure 7. According to this example, it is easier to secure the width W1 of the impurity region 140. In addition to the effect of suppressing the progression of slip 120, the impurity region 140 can also exhibit a gettering effect by incorporating nearby unwanted components and combining them with the first impurity. The gettering effect can also be improved by securing the width W1. The gettering effect is the effect of capturing and fixing impurities present in the semiconductor wafer 100 that cause metal contamination, etc.

[0063] For example, depending on the type of impurity or the acceleration energy of the impurity ions, the full width at half maximum of a single concentration peak may be small. Even in this case, the width W1 of the impurity region 140 can be secured by implanting ions of the first impurity at multiple depth positions. The concentration peaks at each depth position Z1, Z2, and Z3 may overlap or be separated. Separate concentration peaks mean that the concentration in the valley between two peaks is less than half the concentration at the peak. The concentrations P1, P2, and P3 of the first impurity at each depth position Z1, Z2, and Z3 may be the same or different. Furthermore, the first impurity of the same element may be implanted at each depth position Z1, Z2, and Z3, or the first impurity of different elements may be implanted. For example, oxygen may be implanted at each depth position Z1, Z2, and Z3, or oxygen may be implanted at one depth position and nitrogen at another depth position. By implanting first impurities of different elements, a gettering effect can be achieved for a variety of components.

[0064] Figure 9 illustrates another example of the region formation step S410. In this example, in the region formation step S410, a semiconductor wafer 100 is formed by bonding a first wafer 101 on which an impurity region 140 has been formed with a second wafer 102. A known method can be used to bond the wafers together.

[0065] The first wafer 101 has an impurity region 140 formed on its surface. The impurity region 140 may be formed by ion implantation or by epitaxial growth. Alternatively, the entire first wafer 101 may be an impurity region 140. In other words, the first wafer 101 may contain a high concentration of first impurities such as oxygen throughout the wafer. The second wafer 102 may include an element region 130 on which a semiconductor element is to be formed.

[0066] In the region formation step S410, the impurity region 140 and the second wafer 102 are bonded together. In this case, the side of the first wafer 101 opposite to the impurity region 140 becomes the bottom surface 23 of the semiconductor wafer 100. Also, the side of the second wafer 102 opposite to the side bonded to the first wafer 101 becomes the top surface 21 of the semiconductor wafer 100. The processing after the region formation step S410 is the same as the example described in Figures 5 and 6.

[0067] Figure 10 illustrates another example of the region formation stage S410, the upper surface structure formation stage S420, and the annealing stage S430. In this example, a portion of the impurity region 140 is formed in the device region 130. Other aspects are the same as in the example in Figure 5.

[0068] As described above, in the region formation step S410 of this example, a portion of the impurity region 140 is formed in the element region 130, and the remaining portion is formed on the lower surface 23 side of the element region 130. In the upper surface structure formation step S420, the upper surface structure is formed in the same manner as in the example in Figure 5. Also, in the annealing step S430, the semiconductor wafer 100 is annealed in the same manner as in the example in Figure 5.

[0069] Figure 11 illustrates another example of the removal step S440 and the lower surface structure formation step S450. In this example, in the removal step S440, the region including the lower surface 23 of the semiconductor wafer 100 is removed so that a portion of the impurity region 140 remains. In the removal step S440, the impurity region 140 below the device region 130 is removed.

[0070] In the lower surface structure formation step S450, the remaining impurity region 140 is used as the N-type region of the semiconductor device. In this example, a portion of the remaining impurity region 140 is used as the buffer region 20. For example, if the first impurity is oxygen, by injecting hydrogen into the impurity region 140, hydrogen, oxygen, and defects can combine and function as a donor. Therefore, by injecting hydrogen into the region of the impurity region 140 that is close to the upper surface 21, the buffer region 20 can be formed. Furthermore, on the lower surface 25 side of the buffer region 20, a P-type collector region 22 can be formed by injecting an acceptor such as boron. Also, if the semiconductor device is a MOSFET, an N-type drain region may be formed instead of the buffer region 20 and the collector region 22. Through such a process, an N-type region such as the buffer region 20 can be easily formed near the lower surface 25.

[0071] In Figure 5, etc., an example is shown in which the first impurity is injected from the lower surface 23 of the semiconductor wafer 100. In other examples, the first impurity may be injected from the upper surface 21 of the semiconductor wafer 100. Also, if the thickness of the element region 130 is small, the impurity region 140 may be formed on the upper surface 21 side of the semiconductor wafer 100.

[0072] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications or improvements can be made to the above embodiments. It will be clear from the claims that such modified or improved forms may also be included in the technical scope of the present invention. [Explanation of Symbols]

[0073] 12...Emitter region, 14...Base region, 18...Drift region, 20...Buffer region, 21...Top surface, 22...Collector region, 23...Bottom surface, 24...Collector electrode, 25...Bottom surface, 38...Interlayer insulating film, 40...Gate trench, 42...Gate insulating film, 44...Gate electrode, 52...Emitter electrode, 100...Semiconductor wafer, 101...First wafer, 102...Second wafer, 110...Support region, 120...Slip, 130...Element region, 140...Impurity region, 200...Transport boat

Claims

1. A region formation step in which an impurity region containing a first impurity is formed on a semiconductor wafer, The process includes an annealing step in which the semiconductor wafer is annealed while the lower surface of the semiconductor wafer is supported, and an upper surface structure formation step in which at least a part of the structure of the semiconductor element is formed in the element region above the impurity region, The removal step involves removing the region including the lower surface of the semiconductor wafer, thereby removing the impurity region and making the remaining region the element region. Equipped with, In the region formation step, the impurity region is formed at a distance of 10 μm or more from the element region. After the annealing step, the width in the depth direction of the impurity region is 100 μm or less. A method for manufacturing a semiconductor device.

2. A region formation step in which an impurity region containing a first impurity is formed on a semiconductor wafer, An annealing step in which the semiconductor wafer is annealed while the lower surface of the semiconductor wafer is supported, A removal step in which at least a portion of the impurity region is removed by removing the region including the lower surface of the semiconductor wafer. Equipped with, Following the removal step, the semiconductor wafer is further comprising a lower surface structure formation step in which at least a portion of the semiconductor element is formed on the lower surface side, In the removal step, a portion of the impurity region is left intact. In the lower surface structure formation step, the remaining impurity region is used as the N-type region of the semiconductor device. A method for manufacturing a semiconductor device.

3. In the region formation step, the impurity region is formed over the entire surface of the semiconductor wafer. A method for manufacturing a semiconductor device according to claim 1 or 2.

4. Between the region formation step and the removal step, there is a step of forming an upper surface structure on the upper surface side of the impurity region, in which at least a portion of the structure of the semiconductor element is formed. The method for manufacturing a semiconductor device according to claim 2.

5. The first impurity is oxygen. A method for manufacturing a semiconductor device according to any one of claims 1 to 4.

6. After the annealing step, the maximum concentration of the first impurity in the impurity region is 1 × 10⁻⁶. １８ / cm ３ That's all. A method for manufacturing a semiconductor device according to any one of claims 1 to 5.

7. After the annealing step, the concentration of the first impurity in the impurity region is 1 × 10 ２０ / cm ３ Less than The method for manufacturing a semiconductor device according to claim 6.

8. In the region formation step, the first impurity is injected from the lower surface of the semiconductor wafer. A method for manufacturing a semiconductor device according to any one of claims 1 to 7.

9. In the removal step, the entire impurity region is removed. A method for manufacturing a semiconductor device according to claim 1.

10. In the annealing step, the semiconductor wafer is heated to 1000°C or higher. A method for manufacturing a semiconductor device according to any one of claims 1 to 9.

11. The impurity region is located at a distance of 400 μm or more from the upper surface of the semiconductor wafer. A method for manufacturing a semiconductor device according to any one of claims 1 to 10.

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