Blades, processing systems, and processing methods

Abstract

To provide a blade that can properly reduce resistance of the blade against a fluid.MEANS: A blade (BL) used in a fluid includes: a base material (BM); and a coating layer (TBC) formed on the base material. A plurality of first grooves (9) and a plurality of second grooves (7) are formed on a surface of the coating layer, where the plurality of first grooves has a pitch (P9) that is different from a pitch (P7) of the plurality of second grooves.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to the technical field of blades such as turbine blades, as well as processing systems and processing methods for processing blades.

Background Art

[0002] As an example of a blade, there is a turbine blade used in a turbine. For example, Patent Document 1 describes a turbine blade having a heat-resistant layer formed on its surface. Blades such as such turbine blades are required to appropriately reduce the resistance of the blade to the fluid.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

[0004] According to a first aspect, there is provided a blade used in a fluid, comprising a base material and a coating layer formed on the base material, wherein a plurality of first grooves and a plurality of second grooves are formed on the surface of the coating layer, and the pitch of the plurality of first grooves is different from the pitch of the plurality of second grooves.

[0005] According to a second aspect, there is provided a blade used in a fluid machine, comprising a base material and a coating layer formed on the base material, wherein a plurality of first grooves and a plurality of second grooves are formed on the surface of the coating layer, and the depth of the plurality of first grooves is different from the depth of the plurality of second grooves.

[0006] According to a third embodiment, a blade for use in a fluid is provided, comprising a base material and a coating layer formed on the base material, wherein a plurality of first grooves and a plurality of second grooves are formed on the surface of the coating layer, and the spacing between the plurality of first grooves is different from the spacing between the plurality of second grooves.

[0007] According to a fourth aspect, a processing system is provided which includes a beam irradiation device that irradiates an energy beam onto the surface of a coating layer formed on a substrate and having a plurality of second grooves formed thereon, and a control device that controls the beam irradiation device so as to form a plurality of first grooves on the surface of the coating layer at a pitch different from the pitch of the plurality of second grooves.

[0008] According to a fifth aspect, a processing method is provided which includes forming a plurality of second grooves on the surface of a coating layer formed on a substrate, and forming a plurality of first grooves on the surface at a pitch different from the pitch of the plurality of second grooves.

[0009] According to a sixth aspect, a turbine blade for use in a fluid is provided, comprising a base material and a heat-resistant layer formed on the base material, having a riblet structure on a second surface opposite to a first surface facing the base material, and reducing the transfer of heat from the fluid to the base material.

[0010] According to a seventh aspect, a processing system is provided comprising a beam irradiation device for irradiating an energy beam onto the surface of a heat-resistant layer formed on a substrate, which reduces the transfer of heat from a fluid to the substrate, and a control device for controlling the beam irradiation device to form a riblet structure on the surface.

[0011] According to the eighth aspect, a blade for use in a fluid is provided, wherein a riblet structure is formed on the surface of a base material, and a coating layer is formed on the surface on which the riblet structure is formed.

[0012] According to the ninth aspect, a blade for use in a fluid is provided, comprising a base material having a riblet structure formed on its surface, and a coating layer formed on the surface having the riblet structure.

[0013] According to a tenth embodiment, a blade for use in a fluid is provided, comprising a base material, wherein the base material has a plurality of first grooves arranged in a first pitch direction in a first section on the surface of the base material, and a plurality of second grooves arranged in a second pitch direction different from the first pitch direction in a second section adjacent to the first section on the surface of the base material.

[0014] According to the eleventh aspect, a blade for use in a fluid is provided, comprising a base material and a coating layer formed on the base material, wherein the coating layer has a plurality of first grooves arranged in a first pitch direction in a first section on the surface of the coating layer, and a plurality of second grooves arranged in a second pitch direction different from the first pitch direction in a second section adjacent to the first section on the surface of the coating layer.

[0015] According to a twelfth aspect, a processing method is provided which includes forming a riblet structure on the surface of a substrate and forming a coating layer on the surface on which the riblet structure is formed. [Brief explanation of the drawing]

[0016] [Figure 1] Figure 1 is a schematic cross-sectional view showing the overall structure of the processing system of this embodiment. [Figure 2] Figure 2 is a system configuration diagram showing the system configuration of the processing system of this embodiment. [Figure 3] Figure 3 is a perspective view showing the external appearance of the turbine. [Figure 4] Figure 4 is a perspective view showing the external appearance of a turbine blade. [Figure 5] Figure 5 is a cross-sectional view showing the structure of a turbine blade. [Figure 6]FIG. 6 is a cross-sectional view showing the structure of the processing head of the present embodiment. [Figure 7] FIG. 7 is a timing chart showing the measurement light incident on the detector and the interference light detected by the detector. [Figure 8] FIG. 8(a) is a perspective view showing the riblet structure, FIG. 8(b) is a cross-sectional view showing the riblet structure (cross-sectional view taken along line VIII-VIII' in FIG. 8(a)), and FIG. 8(c) is a top view showing the riblet structure. [Figure 9] FIG. 9(a) is a cross-sectional view showing the processing light EL irradiated onto the turbine blade to form the riblet structure, and FIG. 9(b) is a plan view showing the movement locus of the irradiation position of the processing light on the surface of the turbine blade. [Figure 10] FIG. 10 is a perspective view showing the riblet structure. [Figure 11] FIG. 11 is a perspective view showing the riblet structure. [Figure 12] FIG. 12 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 13] FIG. 13 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 14] FIG. 14 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 15] FIG. 15 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 16] FIG. 16 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 17] FIG. 17 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 18] FIG. 18 is a cross-sectional view showing an example of the riblet structure formed in the first modification. [Figure 19] FIG. 19(a) is a cross-sectional view showing a turbine blade in which a plurality of grooves are formed, and FIG. 19(b) is a top view showing a turbine blade in which a plurality of grooves are formed. [Figure 20]Figure 20 is a cross-sectional view showing a turbine blade in which both grooves and riblet structures are formed. [Figure 21] Figure 21 is a perspective view showing a turbine blade in which both grooves and riblet structures are formed. [Figure 22] Figure 22 is a top view showing a turbine blade in which both grooves and riblet structures are formed. [Figure 23] Figure 23 is a perspective view showing a turbine blade in which both a riblet structure and grooves shallower than those in the riblet structure are formed. [Figure 24] Figure 24 is a top view showing a turbine blade in which both grooves and riblet structures are formed. [Figure 25] Figure 25 is a top view showing a turbine blade in which both grooves and riblet structures are formed. [Figure 26] Figure 26 is a top view showing a turbine blade with a riblet structure formed on it. [Figure 27] Figure 27 is a perspective view showing a radial turbine blade with a riblet structure. [Figure 28] Figure 28 shows a turbine machine into which turbine blades are incorporated. [Modes for carrying out the invention]

[0017] Embodiments of the blade, processing system, and processing method will be described below with reference to the drawings. The embodiments of the blade, processing system, and processing method will be described below using the SYS processing system, which performs processing using a processing light (EL). However, the present invention is not limited to the embodiments described below.

[0018] Furthermore, the following explanation describes the positional relationships of the various components that make up the machining system SYS using the XYZ Cartesian coordinate system defined by the mutually orthogonal X, Y, and Z axes. For the sake of clarity, the following explanation assumes that the X-axis and Y-axis directions are horizontal (i.e., predetermined directions in the horizontal plane), and the Z-axis direction is vertical (i.e., a direction perpendicular to the horizontal plane, essentially the up and down direction). The rotational directions (in other words, inclination directions) around the X, Y, and Z axes are referred to as the θX direction, θY direction, and θZ direction, respectively. Here, the Z-axis direction may also be defined as the direction of gravity. The XY plane may also be defined as the horizontal direction.

[0019] (1) Structure of the processing system SYS First, the structure of the machining system SYS of this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a schematic cross-sectional view showing the structure of the machining system SYS of this embodiment. Figure 2 is a system configuration diagram showing the system configuration of the machining system SYS of this embodiment.

[0020] As shown in Figures 1 and 2, the processing system SYS comprises a processing device 1, a processing light source 21, a measurement light source 22, a stage device 3, and a control device 4. At least a portion of the processing device 1 and the stage device 3 are housed in the internal space of a housing 5. The internal space of the housing 5 may or may not be purged with a purge gas such as nitrogen gas. The internal space of the housing 5 may or may not be evacuated. However, the processing device 1 and the stage device 3 do not have to be housed in the internal space of the housing 5. In other words, the processing system SYS does not have to have a housing 5 that houses the processing device 1 and the stage device 3.

[0021] The processing apparatus 1 can process the workpiece W, which is the object to be processed, under the control of the control device 4. The workpiece W may be, for example, a metal, an alloy (e.g., duralumin), a semiconductor (e.g., silicon), a resin, a composite material (e.g., at least one of CFRP (Carbon Fiber Reinforced Plastic) and paint (for example, a paint layer applied to a substrate)), glass, or an object made of any other material.

[0022] In this embodiment, the processing apparatus 1 may process a turbine blade BL, which is an example of a workpiece W. The turbine blade BL is a component used in a turbine T, which is an example of a fluid machine. Specifically, the turbine blade BL is a blade-shaped component that constitutes the blades of the turbine T. An example of a turbine T is shown in Figures 3 and 4. Figure 3 is a perspective view showing the external appearance of the turbine T. Figure 4 is a perspective view showing the external appearance of a turbine blade BL. As shown in Figures 3 and 4, the turbine T comprises a plurality of turbine blades BL. The turbine blade BL includes a shank 91 and a blade body 92 coupled to the shank 91 and extending radially outward from the shank 91 of the turbine T. At least one of the shank 91 and the blade body 92 may be made of a single metal. At least one of the shank 91 and the blade body 92 may be made of multiple metals. At least one of the shank 91 and the blade body 92 may be manufactured by an existing manufacturing method (for example, a manufacturing method using at least one of casting, forging, additive manufacturing, subtractive manufacturing and machining). The shank 91 and the blade body 92 may be manufactured as a single unit. Alternatively, the shank 91 and the blade body 92, manufactured separately, may be joined by an existing joining method (for example, a joining method using at least one of welding, brazing, and bonding). Multiple shanks 91, each comprising multiple turbine blades BL, may be joined to one another. The joined multiple shanks 91 may constitute at least a part of a rotatable rotor RT.

[0023] The blade body 92 extends radially outward from the platform 911 of the shank 91 to the turbine T. The platform 911 includes a positive pressure side platform 9111 and a negative pressure side platform 9112. The blade body 92 includes a positive pressure surface 921, a negative pressure surface 922 facing the opposite side of the positive pressure surface 921, a root portion 923 coupled to the shank 91, and a tip portion 924 forming the end opposite to the root portion 923. The blade body 92 further includes a leading edge surface 925 located between the positive pressure surface 921 and the negative pressure surface 922, and a trailing edge surface 926 located between the positive pressure surface 921 and the negative pressure surface 922 on the opposite side of the leading edge surface 925. At least one of the surfaces of the positive pressure surface 921, the negative pressure surface 922, the leading edge surface 925, and the trailing edge surface 926 may include a curved surface. For example, in the example shown in Figure 4, at least the surfaces of the positive pressure surface 921 and the negative pressure surface 922 each include a curved surface.

[0024] Furthermore, the turbine T may be formed by integrally integrating the rotor RT and the turbine blades BL.

[0025] A turbine T is rotatable using the flow of fluid supplied to it. Specifically, a fluid (for example, at least one of water, steam, air, and gas) is supplied to the turbine T. The fluid supplied to the turbine T flows along the surface of each of the multiple turbine blades BL. Thus, the turbine blades BL are used in the fluid. As a result, the kinetic energy of the fluid is converted into rotational energy of the turbine T by the multiple turbine blades BL. An example of such a turbine T is at least one of a steam turbine that uses steam as the fluid and at least one of a gas turbine that uses gas as the fluid. Another example of such a turbine T is at least one of a hydraulic turbine that uses water as the fluid and at least one of a buoyancy turbine that uses air as the fluid. Furthermore, the turbine T may generate a fluid flow by its rotation.

[0026] The temperature of the fluid supplied to the turbine blade BL can be high. For example, when the turbine blade BL is used in a jet engine (i.e., when the turbine blade BL is used in a gas turbine), high-temperature combustion gas is supplied to the turbine blade BL as the fluid. In this case, the turbine blade BL may be subjected to heat-resistant treatment to reduce the influence of heat on the base material BM that constitutes the turbine blade BL. Specifically, as shown in Figure 5, which is a cross-sectional view showing the structure of the turbine blade BL (cross-sectional view IV-IV' in Figure 4), the turbine blade BL may comprise a base material BM having a blade shape and a heat-resistant layer TBC formed on the surface of the base material BM. The heat-resistant layer TBC is formed on the part of the surface of the base material BM that is affected by heat from the fluid. The heat-resistant layer TBC is a coating layer that reduces the transfer of heat from the fluid to the base material BM. For this reason, the turbine blade BL is in contact with the fluid via the heat-resistant layer TBC during use (i.e., during the period when fluid is supplied to the turbine blade BL). In other words, during the use of the turbine blade BL, the heat-resistant layer TBC (more specifically, the surface of the heat-resistant layer TBC opposite to the surface facing the substrate BM, and the surface of the heat-resistant layer TBC that is exposed to the outside) comes into contact with the fluid. As a result, the heat-resistant layer TBC present between the fluid and the substrate BM reduces the transfer of heat from the fluid to the substrate BM. Therefore, the thermal influence on the substrate BM is reduced. An example of such a heat-resistant layer TBC is a layer containing ceramic. The layer containing ceramic may be, for example, a layer formed of a porous material.

[0027] In the example shown in Figure 5, as described above, since both the positive pressure surface 921 and the negative pressure surface 922 contain curved surfaces, the surfaces of the base material BM and the heat-resistant layer TBC also contain curved surfaces. That is, the surface of the base material BM facing the heat-resistant layer TBC contains a curved surface. The surface exposed to the outside of the heat-resistant layer TBC also contains a curved surface. However, regardless of whether the positive pressure surface 921 and the negative pressure surface 922 contain curved surfaces or not, the surfaces of the base material BM and the heat-resistant layer TBC may or may not contain curved surfaces. Furthermore, the curved surface may be a surface where the curvature of each point on the surface changes only along one direction, like a part of a cylinder, or it may be a surface where the curvature of each point on the surface changes along two directions, like a part of a sphere. The surfaces of the base material BM and the heat-resistant layer TBC may also be flat.

[0028] Again in Figures 1 and 2, the processing apparatus 1 irradiates the workpiece W with processing light EL in order to process the workpiece W. For this reason, the processing apparatus 1 may also be called a beam irradiation device. The processing light EL can be any type of light, as long as it is possible to process the workpiece W by irradiating it with it. In this embodiment, we will proceed with the explanation using an example where the processing light EL is laser light, but the processing light EL may be a different type of light from laser light. Furthermore, the wavelength of the processing light EL can be any wavelength, as long as it is possible to process the workpiece W by irradiating it with it. For example, the processing light EL may be visible light or invisible light (for example, at least one of infrared light, ultraviolet light, and extreme ultraviolet light). The processing light EL may include pulsed light (for example, pulsed light with an emission time of picoseconds or less). Alternatively, the processing light EL may not include pulsed light. In other words, the processing light EL may be continuous light.

[0029] The processing apparatus 1 may perform a removal process by irradiating the workpiece W with processing light EL to remove a portion of the workpiece W. When performing a removal process, the processing apparatus 1 may form a riblet structure RB on the workpiece W, which will be described in detail later with reference to Figures 8(a) to 8(c). The riblet structure RB is a structure that can reduce the fluid resistance of the surface of the workpiece W (in particular, at least one of frictional resistance and turbulent frictional resistance). Here, "fluid" means a medium (for example, at least one of gas and liquid) flowing relative to the surface of the workpiece W. For example, if the surface of the workpiece W moves relative to the medium while the medium itself is stationary, this medium may also be referred to as a fluid.

[0030] In addition to or instead of removal processing, the processing apparatus 1 may perform additive processing to add a new structure to the workpiece W by irradiating the workpiece W with processing light EL. In this case, the processing apparatus 1 may form the above-described riblet structure RB on the surface of the workpiece W by performing additive processing. Alternatively, the processing apparatus 1 may perform machining to process the workpiece W by bringing a tool into contact with the workpiece W, in addition to or instead of at least one of removal processing and additive processing. In this case, the processing apparatus 1 may form the above-described riblet structure RB on the surface of the workpiece W by performing machining.

[0031] The processing light EL is supplied from the processing light source 21 that generates the processing light EL to the processing apparatus 1 via an optical propagation member (not shown) (for example, at least one of an optical fiber and a mirror). The processing apparatus 1 irradiates the workpiece W with the processing light EL supplied from the processing light source 21.

[0032] The processing apparatus 1 can further measure the workpiece W under the control of the control device 4. To measure the workpiece W, the processing apparatus 1 irradiates the workpiece W with measurement light ML. The measurement light ML can be any type of light, as long as it can measure the workpiece W when irradiated onto it. In this embodiment, the explanation will proceed using the example that the measurement light ML is laser light, but the measurement light ML can be a different type of light from laser light. Furthermore, the wavelength of the measurement light ML can be any wavelength, as long as it can measure the workpiece W when irradiated onto it. For example, the measurement light ML may be visible light or invisible light (for example, at least one of infrared light, ultraviolet light, and extreme ultraviolet light). The measurement light ML may include pulsed light (for example, pulsed light with an emission time of picoseconds or less). Alternatively, the measurement light ML may not include pulsed light. In other words, the measurement light ML may be continuous light.

[0033] The wavelength of the measurement light ML may be different from the wavelength of the processing light EL. For example, the wavelength of the measurement light ML may be shorter than the wavelength of the processing light EL. As an example, light in the wavelength band of 266 nm or 355 nm may be used as the measurement light ML, and light in the wavelength band of 532 nm, 1 μm, or 10 μm may be used as the processing light EL. In this case, the spot diameter of the measurement light ML on the workpiece W will be smaller than the spot diameter of the processing light EL on the workpiece W. As a result, the measurement resolution by the measurement light ML will be higher than the processing resolution by the processing light EL. However, the wavelength of the measurement light ML does not have to be shorter than the wavelength of the processing light EL. The wavelength of the measurement light ML may be the same as the wavelength of the processing light EL.

[0034] The measurement light ML is supplied from the measurement light source 22, which is the source of the measurement light ML, to the processing apparatus 1 via an optical propagation member (not shown) (for example, at least one of an optical fiber and a mirror). The processing apparatus 1 irradiates the workpiece W with the measurement light ML supplied from the measurement light source 22.

[0035] In this embodiment, the measurement light source 22 may include an optical comb light source. The optical comb light source is a light source capable of generating pulsed light containing frequency components arranged at equal intervals on the frequency axis (hereinafter referred to as "optical frequency comb"). In this case, the measurement light source 22 emits pulsed light containing frequency components arranged at equal intervals on the frequency axis as measurement light ML. However, the measurement light source 22 may include a light source other than the optical comb light source.

[0036] In the example shown in Figure 2, the processing system SYS is equipped with multiple measurement light sources 22. For example, the processing system SYS may be equipped with measurement light source 22#1 and measurement light source 22#2. The multiple measurement light sources 22 each emit multiple measurement light MLs that are phase-synchronized and coherent with each other. For example, the multiple measurement light sources 22 may have different oscillation frequencies. Therefore, the multiple measurement light MLs emitted by each of the multiple measurement light sources 22 will be multiple measurement light MLs with different pulse frequencies (for example, the number of pulses per unit time, which is the reciprocal of the emission period of the pulses). As an example, measurement light source 22#1 may emit measurement light ML#1 with a pulse frequency of 25GHz, and measurement light source 22#2 may emit measurement light ML#2 with a pulse frequency of 25GHz+α (for example, +100kHz). However, the processing system SYS may be equipped with a single measurement light source 22.

[0037] The processing apparatus 1 may be capable of measuring the state of the workpiece W using a measuring light ML. The state of the workpiece W may include the position of the workpiece W. The position of the workpiece W may include the position of the surface of the workpiece W. The position of the surface of the workpiece W may include the position of each subdivided surface portion of the workpiece W in at least one of the X-axis, Y-axis, and Z-axis directions. The position of the surface of the workpiece W may include the position of each subdivided surface portion of the workpiece W in at least one of the θX-axis, θY-axis, and θZ-axis directions. Furthermore, the position of each surface portion in at least one of the θX-axis, θY-axis, and θZ-axis directions may be considered equivalent to the orientation of each surface portion (i.e., the orientation of each surface portion (for example, the orientation of the normal to each surface portion), which is substantially equivalent to the amount of inclination of each surface portion with respect to at least one of the X-axis, Y-axis, and Z-axis). In this case, the state of the workpiece can also be said to substantially include the shape of the workpiece W (for example, the three-dimensional shape). Furthermore, the state of the workpiece W may include the size of the workpiece W (for example, the size in at least one of the X-axis, Y-axis, and Z-axis directions).

[0038] To process and measure a workpiece W, the processing apparatus 1 comprises a processing head 11 that emits processing light EL and measurement light ML onto the workpiece W, a head drive system 12 that moves the processing head 11, and a position measuring device 13. Furthermore, the processing head 11 comprises a processing optical system 111, a measurement optical system 112, and an injection optical system 113. The structure of the processing head 11 will be described in detail later.

[0039] The head drive system 12 moves the machining head 11 along at least one of the X-axis, Y-axis, and Z-axis directions under the control of the control device 4. In addition, the head drive system 12 may also move the machining head 11 along at least one of the θX, θY, and θZ directions, in addition to or instead of at least one of the X-axis, Y-axis, and Z-axis directions.

[0040] When the machining head 11 moves, the positional relationship between the stage 32 (and the workpiece W placed on the stage 32), as described later, and the machining head 11 changes. In other words, when the stage 32 moves, the relative positions of the stage 32, the workpiece W, and the machining head 11 change. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the positional relationship between the stage 32, the workpiece W, and each optical system of the machining head 11 (i.e., at least one of the machining optical system 111, the measurement optical system 112, and the injection optical system 113) changes. Furthermore, when the positional relationship between the stage 32, the workpiece W, and the machining head 11 changes, the irradiation positions of the machining light EL and the measurement light ML on the workpiece W change.

[0041] The position measuring device 13 is a sensor capable of measuring the position of the machining head 11. The position measuring device 13 may include, for example, at least one of an encoder and a laser interferometer. The control device 4 may move the machining head 11 based on the measurement results from the position measuring device 13. In other words, the control device 4 may change the positional relationship between the stage 32, the workpiece W, and the machining head 11 based on the measurement results from the position measuring device 13.

[0042] The stage device 3 comprises a base plate 31, a stage 32, a stage drive system 33, and a position measuring device 34. The base plate 31 is placed on a support surface (not shown). The stage 32 is placed on the base plate 31. A vibration isolation device (not shown) may be installed between the support surface and the base plate 31 to reduce the transmission of vibrations from the base plate 31 to the stage 32.

[0043] A workpiece W is placed on the stage 32. The stage 32 may hold the placed workpiece W. For example, the stage 32 may hold the workpiece W by vacuum attraction and / or electrostatic attraction. Alternatively, the stage 32 does not need to hold the placed workpiece W.

[0044] The stage drive system 33 moves the stage 32 under the control of the control device 4. Specifically, the stage drive system 33 moves the stage 32 relative to at least one of the surface platen 31 and the processing device 1. For example, the stage drive system 33 may move the stage 32 along at least one of the X-axis direction, Y-axis direction, Z-axis direction, θX direction, θY direction, and θZ direction under the control of the control device 4.

[0045] When the stage 32 moves, the positional relationship between the stage 32 (and consequently, the workpiece W placed on the stage 32) and the machining head 11 changes. Furthermore, when the positional relationship between the stage 32 and the workpiece W and the machining head 11 changes, the positional relationship between the stage 32 and the workpiece W and the optical systems of the machining head 11 changes. Furthermore, when the positional relationship between the stage 32 and the workpiece W and the machining head 11 changes, the irradiation positions of the machining light EL and the measurement light ML on the workpiece W change.

[0046] The position measuring device 34 is a sensor capable of measuring the position of the stage 32. The position measuring device 34 may include, for example, at least one of an encoder and a laser interferometer. The control device 4 may move the stage 32 based on the measurement results from the position measuring device 34. In other words, the control device 4 may change the positional relationship between the stage 32, the workpiece W, and the machining head 11 based on the measurement results from the position measuring device 34.

[0047] The control device 4 controls the operation of the machining system SYS. For example, the control device 4 sets the machining conditions for the workpiece W and controls the machining device 1 and the stage device 3 so that the workpiece W is machined according to the set machining conditions. For example, the control device 4 sets the measurement conditions for the workpiece W and controls the machining device 1 and the stage device 3 so that the workpiece W is measured according to the set measurement conditions.

[0048] The control device 4 may include, for example, an arithmetic unit and a memory device. The arithmetic unit may include, for example, at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The control device 4 functions as a device that controls the operation of the machining system SYS by having the arithmetic unit execute a computer program. This computer program is a computer program that causes the control device 4 (for example, the arithmetic unit) to perform (i.e., execute) the operations that the control device 4 should perform, as described later. In other words, this computer program is a computer program that causes the control device 4 to function in such a way that the machining system SYS performs the operations described later. The computer program executed by the arithmetic unit may be recorded in a memory device (i.e., a recording medium) provided by the control device 4, or it may be recorded in any storage medium (for example, a hard disk or semiconductor memory) that is built into or can be attached to the control device 4. Alternatively, the arithmetic unit may download the computer program to be executed from an external device of the control device 4 via a network interface.

[0049] The control device 4 does not have to be located inside the machining system SYS. For example, the control device 4 may be located outside the machining system SYS as a server or the like. In this case, the control device 4 and the machining system SYS may be connected by a wired and / or wireless network (or a data bus and / or communication line). As a wired network, a network using a serial bus interface, such as at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485, and USB, may be used. As a wired network, a network using a parallel bus interface may be used. As a wired network, a network using an Ethernet® compliant interface, such as at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T, may be used. As a wireless network, a network using radio waves may be used. An example of a network using radio waves is a network compliant with IEEE802.1x (for example, at least one of wireless LAN and Bluetooth®). As a wireless network, a network using infrared may be used. A network using optical communication may be used as the wireless network. In this case, the control device 4 and the machining system SYS may be configured to send and receive various types of information via the network. The control device 4 may also be able to send information such as commands and control parameters to the machining system SYS via the network. The machining system SYS may be equipped with a receiving device that receives information such as commands and control parameters from the control device 4 via the network. Alternatively, a first control device that performs some of the processing performed by the control device 4 may be provided inside the machining system SYS, while a second control device that performs other parts of the processing performed by the control device 4 may be provided outside the machining system SYS.

[0050] Furthermore, as a recording medium for recording the computer program executed by the arithmetic unit, at least one of the following may be used: optical discs such as CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, and Blu-ray®; magnetic media such as magnetic tape; magneto-optical disks; semiconductor memory such as USB memory; and any other medium capable of storing a program. The recording medium may also include equipment capable of recording the computer program (for example, a general-purpose or dedicated device on which the computer program is implemented in a state in which it can be executed in at least one form, such as software and firmware). Moreover, each process and function included in the computer program may be realized by logical processing blocks realized within the control device 4 (i.e., the computer) when the control device 4 executes the computer program, or by hardware such as a predetermined gate array (FPGA, ASIC) provided in the control device 4, or in a form in which logical processing blocks and partial hardware modules that realize some elements of the hardware are mixed.

[0051] (2) Structure of the machining head 11 Next, an example of the structure of the machining head 11 will be described with reference to Figure 6. Figure 6 is a cross-sectional view showing an example of the structure of the machining head 11.

[0052] As shown in Figure 6, the machining head 11 includes a machining optical system 111, a measuring optical system 112, and an injection optical system 113. The machining optical system 111, the measuring optical system 112, and the injection optical system 113 are housed in a housing 114. However, at least one of the machining optical system 111, the measuring optical system 112, and the injection optical system 113 does not need to be housed in the housing 114.

[0053] The processing optical system 111 is an optical system into which processing light EL emitted from the processing light source 21 is incident. The processing optical system 111 is an optical system that emits the processing light EL incident on it toward the emission optical system 113. In other words, the processing optical system 111 is an optical system that guides the processing light EL emitted from the processing light source 21 to the emission optical system 113. The processing light EL emitted by the processing optical system 111 is irradiated onto the workpiece W via the emission optical system 113.

[0054] The processing optical system 111 may include, for example, a position adjustment optical system 1111 and an angle adjustment optical system 1112. The position adjustment optical system 1111 can adjust the emission position of the processing light EL from the processing optical system 111. The position adjustment optical system 1111 may include, for example, parallel planar plates that can be tilted with respect to the direction of travel of the processing light EL, and the emission position of the processing light EL may be changed by changing the tilt angle of the parallel planar plates. The angle adjustment optical system 1112 can adjust the emission angle of the processing light EL from the processing optical system 111. The angle adjustment optical system 1112 may include, for example, a mirror that can be tilted with respect to the direction of travel of the processing light EL, and the emission angle of the processing light EL may be changed by changing the tilt angle of this mirror. However, the processing optical system 111 does not have to include at least one of the position adjustment optical system 1111 and the angle adjustment optical system 1112. In addition to or instead of at least one of the position adjustment optical system 1111 and the angle adjustment optical system 1112, the processing optical system 111 may include other optical elements or optical components.

[0055] The processing light EL emitted from the processing optical system 111 is incident on the output optical system 113. The output optical system 113 includes a beam splitter (e.g., a polarizing beam splitter) 1131, a galvanometer mirror 1132, and an fθ lens 1133.

[0056] The beam splitter 1131 emits the processing light EL incident on the beam splitter 1131 toward the galvanometer mirror 1132. In the example shown in Figure 6, the processing light EL incident on the beam splitter 1131 is emitted toward the galvanometer mirror 1132 by passing through the polarization separation surface. Therefore, in the example shown in Figure 6, the processing light EL is incident on the polarization separation surface of the beam splitter 1131 in a state where it has a polarization direction that can pass through the polarization separation surface (for example, a polarization direction that is p-polarized with respect to the polarization separation surface).

[0057] The galvanometer mirror 1132 is incident on the processing light EL emitted from the beam splitter 1131. The galvanometer mirror 1132 changes the irradiation position of the processing light EL on the workpiece W by deflecting the processing light EL (i.e., changing the emission angle of the processing light EL). For example, the galvanometer mirror 1132 includes an X-scanning mirror 1132X and a Y-scanning mirror 1132Y. Each of the X-scanning mirror 1132X and the Y-scanning mirror 1132Y is a variable-angle mirror whose angle with respect to the optical path of the processing light EL incident on the galvanometer mirror 1132 is changed. The X-scanning mirror 1132X deflects the processing light EL by oscillating or rotating to change the irradiation position of the processing light EL along the X-axis on the workpiece W (i.e., changing the angle of the X-scanning mirror 1132X with respect to the optical path of the processing light EL). The Y scanning mirror 1132Y deflects the processing light EL by oscillating or rotating to change the irradiation position of the processing light EL along the Y axis on the workpiece W (i.e., by changing the angle of the Y scanning mirror 1132Y with respect to the optical path of the processing light EL).

[0058] The fθ lens 1133 is incident on the processing light EL from the galvanometer mirror 1132. The fθ lens 1133 is an optical system for irradiating the workpiece W with the processing light EL from the galvanometer mirror 1132. In particular, the fθ lens 1133 is an optical system for focusing the processing light EL from the galvanometer mirror 1132 onto the workpiece W. Therefore, the fθ lens 1133 irradiates the workpiece W with the processing light EL in a converged state. As a result, the workpiece W is processed by the processing light EL.

[0059] The measurement optical system 112 is an optical system into which measurement light ML emitted from the measurement light source 22 is incident. The measurement optical system 112 is an optical system that emits the measurement light ML incident on it toward the emission optical system 113. In other words, the measurement optical system 112 is an optical system that guides the measurement light ML emitted from the measurement light source 22 to the emission optical system 113. The measurement light ML emitted by the measurement optical system 112 is irradiated onto the workpiece W via the emission optical system 113.

[0060] The measurement optical system 112 includes, for example, a mirror 1120, a beam splitter 1121, a beam splitter 1122, a detector 1123, a beam splitter 1124, a mirror 1125, a detector 1126, and a mirror 1127.

[0061] The measurement light ML emitted from the measurement light source 22 is incident on the beam splitter 1121. Specifically, the measurement light ML emitted from the measurement light source 22#1 (hereinafter referred to as "measurement light ML#1") is incident on the beam splitter 1121. The measurement light ML emitted from the measurement light source 22#2 (hereinafter referred to as "measurement light ML#2") is incident on the beam splitter 1121 via the mirror 1120. The beam splitter 1121 then emits the measurement light ML#1 and ML#2 that have been incident on it toward the beam splitter 1122.

[0062] The beam splitter 1122 reflects measurement light ML#1-1, which is a portion of measurement light ML#1 incident on the beam splitter 1122, toward the detector 1123. The beam splitter 1122 emits measurement light ML#1-2, which is another portion of measurement light ML#1 incident on the beam splitter 1122, toward the beam splitter 1124. The beam splitter 1122 reflects measurement light ML#2-1, which is a portion of measurement light ML#2 incident on the beam splitter 1122, toward the detector 1123. The beam splitter 1122 emits measurement light ML#2-2, which is another portion of measurement light ML#2 incident on the beam splitter 1122, toward the beam splitter 1124.

[0063] The measurement light beams ML#1-1 and ML#2-1 emitted from the beam splitter 1122 are incident on the detector 1123. The detector 1123 detects the interference light generated by the interference between the measurement light beams ML#1-1 and ML#2-1. Specifically, the detector 1123 detects the interference light by receiving it. For this reason, the detector 1123 may be equipped with a light-receiving element (a light-receiving unit, typically a photoelectric conversion element) capable of receiving light. The detection result of the detector 1123 is output to the control device 4.

[0064] The measurement light ML#1-2 and ML#2-2 emitted from the beam splitter 1122 are incident on the beam splitter 1124. The beam splitter 1124 emits at least a portion of the measurement light ML#1-2 incident on the beam splitter 1124 toward the mirror 1125. The beam splitter 1124 emits at least a portion of the measurement light ML#2-2 incident on the beam splitter 1124 toward the mirror 1127.

[0065] The measurement light ML#1-2 emitted from the beam splitter 1124 is incident on the mirror 1125. The measurement light ML#1-2 incident on the mirror 1125 is reflected by the reflective surface of the mirror 1125 (the reflective surface may also be called the reference surface). Specifically, the mirror 1125 reflects the measurement light ML#1-2 incident on the mirror 1125 toward the beam splitter 1124. In other words, the mirror 1125 emits the measurement light ML#1-3, which is the reflected light of the measurement light ML#1-2 incident on the mirror 1125, toward the beam splitter 1124. The measurement light ML#1-3 emitted from the mirror 1125 is incident on the beam splitter 1124. The beam splitter 1124 emits the measurement light ML#1-3 incident on the beam splitter 1124 toward the beam splitter 1122. The measurement light ML#1-3 emitted from beam splitter 1124 is incident on beam splitter 1122. Beam splitter 1122 then emits the measurement light ML#1-3 that has been incident on beam splitter 1122 toward detector 1126.

[0066] On the other hand, the measurement light ML#2-2 emitted from the beam splitter 1124 is incident on the mirror 1127. The mirror 1127 reflects the measurement light ML#2-2 that has been incident on it toward the emission optical system 113. In other words, the mirror 1127 emits the measurement light ML#2-2 that has been incident on it toward the emission optical system 113.

[0067] The measurement light ML#2-2 emitted from the mirror 1127 is incident on the emission optical system 113. The beam splitter 1131 of the emission optical system 113 emits the measurement light ML#2-2 incident on the beam splitter 1131 toward the galvanometer mirror 1132. In the example shown in Figure 4, the measurement light ML#2-2 incident on the beam splitter 1131 is reflected at the polarization separation surface and emitted toward the galvanometer mirror 1132. Therefore, in the example shown in Figure 4, the measurement light ML#2-2 is incident on the polarization separation surface of the beam splitter 1131 in a state where it has a polarization direction that can be reflected at the polarization separation surface (for example, a polarization direction that is s-polarized with respect to the polarization separation surface).

[0068] As described above, the beam splitter 1131 is incident on both the measurement light ML#2-2 and the processing light EL. In other words, both the measurement light ML#2-2 and the processing light EL pass through the beam splitter 1131. The beam splitter 1131 directs the processing light EL and the measurement light ML#2-2, which have been incident on the beam splitter 1131 from different directions, in the same direction (i.e., toward the same galvanometer mirror 1132). Therefore, the beam splitter 1131 essentially functions as a composite optical system that combines the processing light EL and the measurement light ML#2-2.

[0069] The galvanometer mirror 1132 is incident on the measurement light ML#2-2 emitted from the beam splitter 1131. The galvanometer mirror 1132 changes the irradiation position of the measurement light ML#2-2 on the workpiece W by deflecting the measurement light ML#2-2. For example, the X-scanning mirror 1132X deflects the measurement light ML#2-2 by oscillating or rotating to change the irradiation position of the measurement light ML#2-2 on the workpiece W along the X-axis (i.e., changing the angle of the X-scanning mirror 1132X with respect to the optical path of the measurement light ML#2-2). The Y-scanning mirror 1132Y deflects the measurement light ML#2-2 by oscillating or rotating to change the irradiation position of the measurement light ML#2-2 on the workpiece W along the Y-axis (i.e., changing the angle of the Y-scanning mirror 1132Y with respect to the optical path of the measurement light ML#2-2).

[0070] The fθ lens 1133 is incident on the measurement light ML#2-2 from the galvanometer mirror 1132. The fθ lens 1133 is an optical system for focusing the measurement light ML#2-2 from the galvanometer mirror 1132 onto the workpiece W. The fθ lens 1133 is an optical system for irradiating the workpiece W with the measurement light ML#2-2 from the galvanometer mirror 1132. The workpiece W is measured by the measurement light ML (specifically, the measurement light ML#2-2).

[0071] As described above, the galvanometer mirror 1132 is incident on both the measurement light ML#2-2 and the processing light EL. In other words, the galvanometer mirror 1132 is incident on both the processing light EL and the measurement light ML#2-2, which are combined by the beam splitter 1131. Therefore, both the measurement light ML#2-2 and the processing light EL pass through the same galvanometer mirror 1132. For this reason, the galvanometer mirror 1132 can change the irradiation position of the processing light EL and the irradiation position of the measurement light ML#2-2 on the workpiece W in a synchronized manner. In other words, the galvanometer mirror 1132 can change the irradiation position of the processing light EL and the irradiation position of the measurement light ML#2-2 on the workpiece W in a linked manner.

[0072] When the workpiece W is irradiated with measurement light ML#2-2, light caused by the irradiation of measurement light ML#2-2 is emitted from the workpiece W. In other words, when the workpiece W is irradiated with measurement light ML#2-2, light caused by the irradiation of measurement light ML#2-2 is emitted from the workpiece W. The light caused by the irradiation of measurement light ML#2-2 (in other words, the light emitted from the workpiece W due to the irradiation of measurement light ML#2-2) may include at least one of the following: measurement light ML#2-2 reflected by the workpiece W (i.e., reflected light), scattered light produced by the irradiation of measurement light ML#2-2 onto the workpiece W, measurement light ML#2-2 diffracted by the workpiece W (i.e., diffracted light), and measurement light ML#2-2 transmitted through the workpiece W (i.e., transmitted light).

[0073] At least a portion of the light emitted from the workpiece W due to the irradiation of measurement light ML#2-2 (hereinafter referred to as "measurement light ML#2-3") enters the emission optical system 113. The measurement light ML#2-3 that enters the emission optical system 113 enters the beam splitter 1131 via the fθ lens 1133 and the galvanometer mirror 1132. The beam splitter 1131 emits the measurement light ML#2-3 that enters the beam splitter 1131 toward the measurement optical system 112. In the example shown in Figure 6, the measurement light ML#2-3 that enters the beam splitter 1131 is reflected at the polarization separation surface and emitted toward the measurement optical system 112. Therefore, in the example shown in Figure 6, the measurement light ML#2-3 enters the polarization separation surface of the beam splitter 1131 with a polarization direction that allows it to be reflected at the polarization separation surface.

[0074] The measurement light ML#2-3 emitted from the beam splitter 1131 is incident on the mirror 1127 of the measurement optical system 112. The mirror 1127 reflects the measurement light ML#2-3 incident on the mirror 1127 toward the beam splitter 1124. The beam splitter 1124 emits at least a portion of the measurement light ML#2-3 incident on the beam splitter 1124 toward the beam splitter 1122. The beam splitter 1122 emits at least a portion of the measurement light ML#2-3 incident on the beam splitter 1122 toward the detector 1126.

[0075] As described above, in addition to the measurement light ML#2-3, measurement light ML#1-3 is incident on the detector 1126. That is, measurement light ML#2-3 that is directed to the detector 1126 via the workpiece W and measurement light ML#1-3 that is directed to the detector 1126 without passing through the workpiece W are incident on the detector 1126. Note that measurement light ML#1-3 may also be called reference light. The detector 1126 detects interference light generated by the interference of measurement light ML#1-3 and measurement light ML#2-3. Specifically, the detector 1126 detects interference light by receiving it. For this reason, the detector 1126 may be equipped with a light-receiving element (light-receiving unit) capable of receiving light. The detection result of the detector 1126 is output to the control device 4.

[0076] The control device 4 calculates the state of the workpiece W based on the detection results of detector 1123 and detector 1126. The principle for calculating the state of the workpiece W based on the detection results of detector 1123 and detector 1126 will now be explained with reference to Figure 7.

[0077] Figure 7 is a timing chart showing the measurement light ML#1-1 incident on detector 1123, the measurement light ML#2-1 incident on detector 1123, the interference light detected by detector 1123, the measurement light ML#1-3 incident on detector 1126, the measurement light ML#2-3 incident on detector 1126, and the interference light detected by detector 1126. Because the pulse frequencies of measurement light ML#1 and measurement light ML#2 are different, the pulse frequencies of measurement light ML#1-1 and measurement light ML#2-1 are also different. Therefore, the interference light between measurement light ML#1-1 and measurement light ML#2-1 is interference light in which the pulse light appears synchronized with the timing when the pulse light constituting measurement light ML#1-1 and the pulse light constituting measurement light ML#2-1 are simultaneously incident on detector 1123. Similarly, the pulse frequencies of measurement light ML#1-3 and measurement light ML#2-3 are different. Therefore, the interference light between measurement light ML#1-3 and measurement light ML#2-3 is interference light in which the pulsed light appears in synchronization with the timing when the pulsed light constituting measurement light ML#1-3 and the pulsed light constituting measurement light ML#2-3 are simultaneously incident on the detector 1126.

[0078] Here, the position (position on the time axis) of the pulsed light that creates the interference light detected by detector 1126 fluctuates based on the positional relationship between the processing head 11 and the workpiece W. This is because the interference light detected by detector 1126 is the interference light of measurement light ML#2-3 that travels to detector 1126 via workpiece W and measurement light ML#1-3 that travels to detector 1126 without going through workpiece W. On the other hand, the position (position on the time axis) of the pulsed light that creates the interference light detected by detector 1123 does not fluctuate based on the positional relationship between the processing head 11 and the workpiece W. Therefore, the time difference between the pulsed light that creates the interference light detected by detector 1126 and the pulsed light that creates the interference light detected by detector 1123 indirectly indicates the positional relationship between the processing head 11 and the workpiece W (typically, the distance between the processing head 11 and the workpiece W). For this reason, the control device 4 can calculate the state of the workpiece W based on the time difference between the pulsed light that creates the interference light detected by detector 1126 and the pulsed light that creates the interference light detected by detector 1123. Specifically, the control device 4 can calculate the position of the portion of the workpiece W irradiated with the measurement light ML#2-2 based on the time difference between the pulsed light that creates the interference light detected by the detector 1126 and the pulsed light that creates the interference light detected by the detector 1123. In other words, the control device 4 can obtain information regarding the position of the portion of the workpiece W irradiated with the measurement light ML#2-2. Furthermore, if the measurement light ML#2-2 is irradiated to multiple locations on the workpiece W and / or if the measurement light ML#2-2 is irradiated in a manner that scans the surface of the workpiece W, the control device 4 can also calculate the shape of the workpiece W.

[0079] The calculated state of the workpiece W may be used to control the machining system SYS. Specifically, the calculated state of the workpiece W may be used to control the machining device 1. The calculated state of the workpiece W may be used to control the machining head 11. The calculated state of the workpiece W may be used to control the head drive system 12. The calculated state of the workpiece W may be used to control the stage device 3. The calculated state of the workpiece W may be used to control the stage drive system 33.

[0080] For example, the control device 4 may change the relative positional relationship between the workpiece W and the machining head 11 based on the calculated state of the workpiece W, so that the relative positional relationship between the workpiece W and the machining head 11 becomes a desired positional relationship. In other words, the control device 4 may control a device that can change the relative positional relationship between the workpiece W and the machining head 11 based on the calculated state of the workpiece W, so that the relative positional relationship between the workpiece W and the machining head 11 becomes a desired positional relationship. An example of a device that can change the relative positional relationship between the workpiece W and the machining head 11 is at least one of the head drive system 12 and the stage drive system 33. An example of a "desired positional relationship" is a positional relationship in which the machining light EL and / or measurement light ML are irradiated to a desired position on the workpiece W.

[0081] For example, the control device 4 may change the irradiation position of the processing light EL so that the processing light EL is irradiated to a desired position on the workpiece W, based on the calculated state of the workpiece W. Examples of devices that can change the irradiation position of the processing light EL include the angle adjustment optical system 1112 of the processing optical system 111, the galvanometer mirror 1132 of the injection optical system 113, the head drive system 12, and the stage drive system 33.

[0082] For example, the control device 4 may change the irradiation position of the measuring light ML so that the measuring light ML is irradiated to a desired position on the workpiece W, based on the calculated state of the workpiece W. Examples of devices that can change the irradiation position of the measuring light ML include the angle adjustment optical system 1112 of the processing optical system 111, the galvanometer mirror 1132 of the injection optical system 113, the head drive system 12, and the stage drive system 33.

[0083] (3) riblet structure RB Next, the riblet structure RB formed on the workpiece W by the machining system SYS will be described with reference to Figures 8(a) and 8(b). Figure 8(a) is a perspective view showing the riblet structure RB, Figure 8(b) is a cross-sectional view showing the riblet structure RB (cross-sectional view VIII-VIII' of Figure 8(a)), and Figure 8(c) is a top view showing the riblet structure RB. In the following, the riblet structure RB formed on a turbine blade BL, which is a specific example of workpiece W, will be described in particular. However, a riblet structure RB formed on a workpiece W other than the turbine blade BL may have a similar structure.

[0084] As shown in Figures 8(a) to 8(c), the riblet structure RB may include a structure in which a plurality of convex structures 8 extending along a first direction along the surface of the turbine blade BL (i.e., at least one surface of the substrate BM and the heat-resistant layer TBC) are arranged along a second direction that is along the surface of the turbine blade BL and intersects the first direction. In the example shown in Figures 8(a) to 8(c), the riblet structure RB includes a structure in which a plurality of convex structures 8 extending along the X-axis are arranged along the Y-axis.

[0085] The convex structure 8 is a structure that protrudes along a direction intersecting both the direction in which the convex structure 8 extends and the direction in which the convex structures 8 are arranged. The convex structure 8 is a structure that protrudes from the surface of the turbine blade BL. In the examples shown in Figures 8(a) to 8(c), the convex structure 8 is a structure that protrudes along the Z-axis direction.

[0086] Between adjacent convex structures 8, grooves 9 are formed that are recessed compared to the surrounding area. Therefore, the riblet structure RB may include a structure formed by a plurality of grooves 9 that extend along a first direction along the surface of the turbine blade BL and are arranged along a second direction that is along the surface of the turbine blade BL and intersects the first direction.

[0087] As described above, the processing system SYS of this embodiment forms the riblet structure RB by performing a removal process. For this reason, the processing system SYS may form the riblet structure RB by performing a removal process to remove the portion of the turbine blade BL in which the groove 9 is formed. In other words, the processing system SYS may form the riblet structure RB by performing a removal process to remove a portion of the turbine blade BL in which the convex structure 8 is formed. For example, as shown in Figure 9(a), a cross-sectional view showing the processing light EL irradiated onto the turbine blade BL to form the riblet structure RB, and Figure 9(b), a plan view showing the trajectory of the movement of the irradiation position of the processing light EL on the surface of the turbine blade BL, the processing system SYS may irradiate the turbine blade BL with processing light EL so that the processing light EL irradiates the portion of the turbine blade BL in which the groove 9 is formed. Specifically, the machining system SYS may form a riblet structure RB by repeatedly performing a scanning operation in which the irradiation position of the machining light EL is moved along the X-axis direction in which the groove 9 extends, while irradiating the surface of the turbine blade BL with the machining light EL, and a stepping operation in which the irradiation position of the machining light EL is moved along the Y-axis intersecting the X-axis direction in which the groove 9 extends, without irradiating the surface of the turbine blade BL with the machining light EL. In this case, it can be said that the machining system SYS forms the riblet structure RB by forming the groove 9 (that is, it forms the convex structure 8).

[0088] Again in Figures 8(a) to 8(c), the convex structure 8 comprises, for example, a pair of sides 81 and 82 facing opposite directions. In the example shown in Figures 8(a) to 8(c), the convex structure 8 comprises a side 81 facing the -Y side and a side 82 facing the +Y side. Each of the pair of sides 81 and 82 is planar. However, at least one of the pair of sides 81 and 82 may include a curved surface.

[0089] The pair of sides 81 and 82 may be non-parallel to each other. In this case, the pair of sides 81 and 82 of the convex structure 8 may be connected via one end of each side (in the example shown in Figures 8(a) to 8(c), the upper end on the +Z side). The portion to which the pair of sides 81 and 82 of the convex structure 8 are connected constitutes the top 83 of the convex structure 8. In this case, the pair of sides 81 and 82 may be considered to be connected via the top 83 of the convex structure 8. In the example shown in Figures 8(a) to 8(c), the pair of sides 81 and 82 are connected such that the upper end of side 81 and the upper end of side 82 are in contact. In this case, the cross-sectional shape of the convex structure 8 including the Z-axis is triangular. However, the cross-sectional shape of the convex structure 8 including the Z-axis may have any shape other than a triangle. Also, the pair of sides 81 and 82 may be parallel to each other.

[0090] The side surface 81 of one convex structure 8 and the side surface 82 of another convex structure 8 adjacent to the first convex structure 8 along the direction in which the convex structures 8 are arranged may be connected at their other ends (in the example shown in Figures 8(a) to 8(c), the lower end on the -Z side). The portion where the side surface 81 of one convex structure 8 and the side surface 82 of the other convex structure 8 are connected constitutes a boundary portion 84 between the first convex structure 8 and the other convex structure 8. In other words, between two adjacent convex structures 8, there exists a boundary portion 84 corresponding to a recessed area compared to the surrounding area. In this case, the two adjacent convex structures 8 may be considered to be connected via the boundary portion 84. In the example shown in Figures 8(a) to 8(c), the two adjacent convex structures 8 are connected such that the lower end of the side surface 81 of one convex structure 8 and the lower end of the side surface 82 of the other convex structure 8 are in contact. In this case, the shape of the cross-section of the groove 9 including the Z axis is an inverted triangle. However, the cross-sectional shape of groove 9 including the Z-axis may have any shape other than an inverted triangle.

[0091] If the turbine blade BL comprises a base material BM and a heat-resistant layer TBC, the processing system SYS may form a riblet structure RB on the heat-resistant layer TBC, as shown in Figures 8(a) to 8(c). Specifically, the processing system SYS may form the riblet structure RB on the surface of the heat-resistant layer TBC facing away from the base material BM (in the example shown in Figures 8(a) to 8(c), the upper surface facing the +Z side). The processing system SYS may also form the riblet structure RB on the surface of the heat-resistant layer TBC opposite to the surface facing the base material BM. The processing system SYS may also form the riblet structure RB on the surface of the heat-resistant layer TBC that comes into contact with the fluid during use of the turbine blade BL. In this case, since the processing system SYS does not directly process the base material BM, the riblet structure RB can be reformed relatively easily. Specifically, when reforming the riblet structure RB, the heat-resistant layer TBC on which the riblet structure RB is formed is first peeled off, and then a new heat-resistant layer TBC is formed. Subsequently, the processing system SYS may form a new riblet structure RB on the newly formed heat-resistant layer TBC. Therefore, deterioration of the riblet structure RB (e.g., damage) can be dealt with relatively easily by reforming the riblet structure RB. Furthermore, because the processing system SYS does not directly process the base material BM, it can form a riblet structure RB on the surface of the base material BM even if direct processing is difficult or if the riblet structure RB was not originally formed therein. In other words, if the processing system SYS processes the heat-resistant layer TBC after it has been formed on the surface of the base material BM, the riblet structure RB can be formed relatively easily.

[0092] Alternatively, if the turbine blade BL comprises a base material BM and a heat-resistant layer TBC, the processing system SYS may form the riblet structure RB on the base material BM, as shown in Figure 10, a perspective view showing the riblet structure RB. Specifically, the processing system SYS may form the riblet structure RB on the surface of the base material BM facing the heat-resistant layer TBC (in the example shown in the figure, the upper surface facing the +Z side). In this case, as shown in Figure 10, the heat-resistant layer TBC may be formed on the surface of the base material BM (particularly the surface on which the riblet structure RB is formed) after the riblet structure RB has been formed on the base material BM. Because the heat-resistant layer TBC covers the surface of the base material BM, the shape of the surface of the heat-resistant layer TBC may be substantially the same as the shape of the surface of the base material BM on which the heat-resistant layer TBC is formed. For this reason, a turbine blade BL on which a heat-resistant layer TBC is formed on a base material BM on which the riblet structure RB is formed may be considered substantially equivalent to a turbine blade BL on which the riblet structure RB is formed on the heat-resistant layer TBC.

[0093] Alternatively, even if the turbine blade BL has a base material BM but does not have a heat-resistant layer TBC, the processing system SYS may form the riblet structure RB on the base material BM, as shown in the perspective view Figure 11 illustrating the riblet structure RB. In other words, the base material BM on which the riblet structure RB is formed does not necessarily have to have a heat-resistant layer TBC formed on it.

[0094] (4) Modified operation of forming the riblet structure RB Next, we will describe a modified version of the process for forming the riblet structure RB.

[0095] (4-1) First modified example of the operation of forming the riblet structure RB In the first modified example, the processing system SYS may form a riblet structure RB in which at least one of the top portion 83 of the convex structure 8 and the boundary portion 84 of the convex structure 8 is different from the shapes shown in Figures 8(a) to 8(c) and Figures 10 to 11 described above. The riblet structure RB formed in the first modified example will be described below with reference to Figures 12 to 18. Each of Figures 12 to 18 is a cross-sectional view showing an example of a riblet structure RB formed in the first modified example.

[0096] As shown in Figure 12, the processing system SYS may form a riblet structure RB such that the top 83 of the convex structure 8 includes a plane 831. The plane 831 connects one end of a pair of sides 81 and 82 of the convex structure 8 (the upper end on the +Z side in the example shown in Figure 12). In other words, the pair of sides 81 and 82 are connected via the plane 831 that constitutes the top 83. For this reason, in the example shown in Figure 12, the upper end of side 81 and the upper end of side 82 do not directly touch. The plane 831 intersects each of the pair of sides 81 and 82. The plane 831 is the surface facing away from the base material BM (the +Z side, and upward in the example shown in Figure 12). For this reason, the plane 831 may also be referred to as the top surface.

[0097] As shown in Figure 13, the processing system SYS may form a riblet structure RB such that the top 83 of the convex structure 8 includes a curved surface 832. The curved surface 832 connects one end (the upper end on the +Z side in the example shown in Figure 13) of a pair of sides 81 and 82 of the convex structure 8. In other words, the pair of sides 81 and 82 are connected via the curved surface 832 that constitutes the top 83. For this reason, in the example shown in Figure 13, the upper end of side 81 and the upper end of side 82 do not directly touch. The curved surface 832 intersects each of the pair of sides 81 and 82. The curved surface 832 is a surface facing the opposite side from the base material BM (the +Z side, and upward in the example shown in Figure 13). For this reason, the curved surface 832 may be called the top surface. The curved surface 832 may be a curved surface that is convex on the opposite side from the base material BM.

[0098] As shown in Figure 14, the machining system SYS may form a riblet structure RB such that the top 83 of the convex structure 8 includes both a flat surface 831 and a curved surface 832. For example, the top 83 may include a flat surface 831 and a pair of curved surfaces 832 that sandwich the flat surface 831. One end of the pair of curved surfaces 832 is connected to one end (e.g., the upper end) of a pair of side surfaces 81 and 82 of the convex structure 8. Furthermore, the flat surface 831 connects the other ends of the pair of curved surfaces 832. That is, one of the pair of curved surfaces 832 connects the flat surface 831 and the side surface 81, and the other of the pair of curved surfaces 832 connects the flat surface 831 and the side surface 82. In this case, the pair of side surfaces 81 and 82 are connected via the flat surface 831 and the pair of curved surfaces 832 that constitute the top 83. For this reason, in the example shown in Figure 14, the upper end of side surface 81 and the upper end of side surface 82 do not directly touch.

[0099] In the examples shown in Figures 12 to 14, the size D83 of the apex 83 may be set based on the pitch P8 of the convex structure 8. For example, the size D83 of the apex 83 may be set to be within the range of at least 1% to 9% (i.e., a few percent) of the pitch P8 of the convex structure 8. For example, the size D83 of the apex 83 may be set to be within the range of at least 1% to 6% of the pitch P8 of the convex structure 8. For example, the size D83 of the apex 83 may be set to be within the range of at least 1% to 3% of the pitch P8 of the convex structure 8. In this embodiment, "size D83 of the apex 83" may mean the size (typically the width) of the surface constituting the apex 83 in the direction in which the convex structures 8 are arranged. In the example shown in Figure 12, the size D83 of the apex 83 may mean the size in the Y-axis direction of the plane 831 included in the apex 83. In the example shown in Figure 13, the size D83 of the apex 83 may mean the size of the curved surface 832 included in the apex 83 in the Y-axis direction. In the example shown in Figure 14, the size D83 of the apex 83 may mean the sum of the sizes of the plane 831 and the pair of curved surfaces 832 included in the apex 83 in the Y-axis direction. Also, in this embodiment, the "pitch P8 of the convex structure 8" may mean the distance between two adjacent convex structures 8 in a direction intersecting the direction in which the convex structure 8 extends (pitch direction). In the example shown in Figure 12, the "pitch P8 of the convex structure 8" may mean the distance between two adjacent convex structures 8 in the Y-axis direction. Because the convex structure 8 and groove 9 are formed alternately in a direction intersecting the direction in which the convex structure 8 extends, the "pitch P8 of the convex structure 8" may be considered substantially the same as the "pitch P9 of the groove 9". In this embodiment, the "pitch P9 of the groove 9" may refer to the distance between two adjacent grooves 9 in a direction intersecting the direction in which the groove 9 extends (pitch direction). In the example shown in Figure 12, the "pitch P9 of the groove 9" may refer to the distance between two adjacent grooves 9 in the Y-axis direction.

[0100] In the examples shown in Figures 13 and 14, the radius of curvature of the curved surface 832 may be set to be within the range of 1 micrometer to 9 micrometers (i.e., several micrometers). The radius of curvature of the curved surface 832 may be set to be within the range of 1 micrometer to 6 micrometers. The radius of curvature of the curved surface 832 may be set to be within the range of 1 micrometer to 4 micrometers. The radius of curvature of the curved surface 832 may be set to be within the range of 1 micrometer to 2 micrometers.

[0101] When the top 83 includes at least one of the flat surface 831 and the curved surface 832, the angle of the corner formed on the top 83 becomes gentler (i.e., larger) compared to the case where the top 83 does not include the flat surface 831 and the curved surface 832 (resulting in the upper end of the side surface 81 and the upper end of the side surface 82 being in direct contact). As a result, the possibility of cracks occurring on the top 83 is reduced. Therefore, the processing system SYS can form a riblet structure RB with relatively high durability. In particular, the top 83 including the curved surface 832 may be considered substantially equivalent to a top 83 that has been chamfered. As a result, when the top 83 includes the curved surface 832, the possibility of cracks occurring on the top 83 is even lower compared to the case where the top 83 includes the flat surface 831. In other words, the processing system SYS can therefore form a riblet structure RB with even higher durability.

[0102] As shown in Figure 15, the processing system SYS may form a riblet structure RB such that the boundary portion 84 of the convex structure 8 includes a plane 841. The plane 841 connects two adjacent convex structures 8. That is, two adjacent convex structures 8 are connected via the plane 841 that constitutes the boundary portion 84. Specifically, the plane 841 connects the lower end of the side surface 81 of one convex structure 8 to the lower end of the side surface 82 of the other convex structure 8 adjacent to the first convex structure 8. Therefore, in the example shown in Figure 15, the lower end of the side surface 81 of one convex structure 8 and the lower end of the side surface 82 of the other convex structure 8 do not directly touch. The plane 841 intersects each of the pair of side surfaces 81 and 82. The plane 841 is the surface facing away from the base material BM (the +Z side, or upward, in the example shown in Figure 12). Therefore, the plane 841 may be referred to as the top surface.

[0103] As shown in Figure 16, the processing system SYS may form a riblet structure RB such that the boundary portion 84 of the convex structure 8 includes a curved surface 842. The curved surface 842 connects two adjacent convex structures 8. That is, two adjacent convex structures 8 are connected via the curved surface 842 that constitutes the boundary portion 84. Specifically, the curved surface 842 connects the lower end of the side surface 81 of one convex structure 8 to the lower end of the side surface 82 of the other convex structure 8 adjacent to the first convex structure 8. Therefore, in the example shown in Figure 16, the lower end of the side surface 81 of one convex structure 8 and the lower end of the side surface 82 of the other convex structure 8 do not directly touch. The curved surface 842 intersects each of the pair of side surfaces 81 and 82. The curved surface 842 is the surface facing away from the base material BM (the +Z side, or upward, in the example shown in Figure 12). Therefore, the curved surface 842 may be referred to as the top surface. The curved surface 842 may be a curved surface that is convex toward the substrate BM side.

[0104] As shown in Figure 17, the machining system SYS may form a riblet structure RB such that the boundary portion 84 of the convex structure 8 includes both a flat surface 841 and a curved surface 842. For example, the boundary portion 84 may include a flat surface 841 and a pair of curved surfaces 842. One end of one of the pair of curved surfaces 842 is connected to the other end (e.g., the lower end) of a side surface 81 of one convex structure 8. The other end of the pair of curved surfaces 842 is connected to the other end (e.g., the lower end) of a side surface 82 of another convex structure 8 adjacent to one convex structure 8. Furthermore, the flat surface 841 connects the other ends of the pair of curved surfaces 842. That is, one of the pair of curved surfaces 842 may connect the flat surface 841 to the side surface 81 of one convex structure 8, and the other of the pair of curved surfaces 842 may connect the flat surface 841 to the side surface 82 of the other convex structure 8. In this case, the two adjacent convex structures 8 are connected via a plane 841 and a pair of curved surfaces 842 that constitute the boundary portion 84. Therefore, in the example shown in Figure 17, the lower end of side surface 81 and the lower end of side surface 82 do not directly touch.

[0105] In the example shown in Figure 17, the sum of the sizes D842 of the pair of curved surfaces 842 (i.e., 2 × D842) may be set based on the pitch P8 of the convex structure 8. For example, the sum of the sizes D842 of the pair of curved surfaces 842 may be smaller than the pitch P8 of the convex structure 8. In this embodiment, "size D842 of the curved surface 842" may mean the size (typically the width) of the curved surface 842 in the direction in which the convex structures 8 are arranged. In the example shown in Figure 17, the size D842 of the curved surface 842 may mean the size of the curved surface 842 in the Y-axis direction. Also, in the examples shown in Figures 16 and 17, the radius of curvature of the curved surface 842 may be set to be within the range of 1 micrometer to 9 micrometers (i.e., several micrometers). The radius of curvature of the curved surface 842 may be set to be within the range of 1 micrometer to 6 micrometers. The radius of curvature of the curved surface 842 may be set to be within the range of 1 micrometer to 4 micrometers. The radius of curvature of the curved surface 842 may be set to be in the range of 1 micrometer to 2 micrometers.

[0106] When the boundary portion 84 includes at least one of the flat surface 841 and the curved surface 842, the angle of the corner formed in the boundary portion 84 becomes gentler compared to the case where the boundary portion 84 does not include the flat surface 841 and the curved surface 842 (resulting in the lower end of the side surface 81 and the lower end of the side surface 82 being in direct contact). As a result, the possibility of cracks occurring in the boundary portion 84 is reduced. Therefore, the processing system SYS can form a riblet structure RB with relatively high durability. In particular, the boundary portion 84 including the curved surface 842 may be considered substantially equivalent to a chamfered boundary portion 84. As a result, when the boundary portion 84 includes the curved surface 842, the possibility of cracks occurring in the boundary portion 84 is further reduced compared to the case where the boundary portion 84 includes the flat surface 841. Therefore, the processing system SYS can form a riblet structure RB with even higher durability.

[0107] As shown in Figure 18, the machining system SYS may form a riblet structure RB such that the top 83 of the convex structure 8 includes at least one of a flat surface 831 and a curved surface 832, and the boundary 84 of the convex structure 8 includes at least one of a flat surface 841 and a curved surface 842. Figure 18 shows a riblet structure RB in which the top 83 includes a flat surface 831 and a pair of curved surfaces 832, and the boundary 84 includes a flat surface 841 and a pair of curved surfaces 842. In this case as well, the machining system SYS can form a riblet structure RB with even greater durability.

[0108] Figures 12 to 18 above show examples in which the processing system SYS forms a riblet structure RB on the heat-resistant layer TBC. However, the processing system SYS may also form a riblet structure RB having the shape shown in Figures 12 to 18 on the base material BM. In this case as well, the processing system SYS can form a riblet structure RB with relatively high durability.

[0109] Furthermore, when a riblet structure RB having the shape shown in Figures 12 to 18 is formed on the substrate BM, as described above, the angle of the corner formed at least one of the apex 83 and boundary 84 of the convex structure 8 forming the riblet structure RB becomes gentler. As a result, the adhesion of the heat-resistant layer TBC to the corner is improved compared to the case where the angle of the corner formed at least one of the apex 83 and boundary 84 is relatively steep (i.e., relatively small).

[0110] Furthermore, if the angle of the corner formed on at least one of the apex 83 and the boundary 84 is gentle, it is possible to enjoy the effect that surface treatment of the substrate BM on which the riblet structure RB is formed is more likely to be performed appropriately, compared to the case where the angle of the corner formed on at least one of the apex 83 and the boundary 84 is relatively steep. For example, it is possible to enjoy the effect that quenching, which is one example of surface treatment, is more likely to be performed appropriately on the surface of the substrate BM on which the riblet structure RB is formed. As a result, when an arbitrary coating layer is formed on the substrate BM by performing surface treatment such as quenching on the surface of the substrate BM as described later, it is possible to enjoy the effect that the arbitrary coating layer is more likely to be formed appropriately on the substrate BM on which the riblet structure RB is formed.

[0111] (4-2) Second Modification of the Operation to Form the Riblet Structure RB In a second modification, the machining system SYS may form the riblet structure RB on a turbine blade BL that has grooves 7 formed on it, which are different from the grooves 9 that form the riblet structure RB. Here, the turbine blade BL with grooves 7 formed on it will be described with reference to Figures 19(a) and 19(b). Figure 19(a) is a cross-sectional view showing the turbine blade BL with grooves 7 formed on it, and Figure 19(b) is a top view showing the turbine blade BL with grooves 7 formed on it.

[0112] As shown in Figures 19(a) and 19(b), the turbine blade BL may have grooves 7 extending in a direction along the surface of the turbine blade BL. For example, the turbine blade BL may have a single groove 7 extending in a third direction along the surface of the turbine blade BL. For example, the turbine blade BL may have multiple grooves 7 extending in a third direction along the surface of the turbine blade BL. Multiple grooves 7 extending in a third direction may be arranged in a fourth direction intersecting the third direction. For example, the turbine blade BL may have multiple grooves 7 extending in multiple different directions along the surface of the turbine blade BL. For example, the turbine blade BL may have at least one groove 7 extending in a third direction along the surface of the turbine blade BL, and at least one groove 7 extending in a fourth direction that is in a direction along the surface of the turbine blade BL and intersects the third direction. In the example shown in Figures 19(a) and 19(b), the turbine blade BL has a plurality of grooves 7 extending along the X-axis and arranged along the Y-axis (hereinafter, grooves 7 extending along the X-axis will be referred to as "grooves 7X") and a plurality of grooves 7 extending along the Y-axis and arranged along the X-axis (hereinafter, grooves 7 extending along the Y-axis will be referred to as "grooves 7Y").

[0113] The depth D7 of the groove 7 (in the example shown in Figure 19(a), the size along the Z-axis) may be set based on the thickness D of the heat-resistant layer TBC on which the groove 7 is formed (in the example shown in Figure 19(a), the size along the Z-axis). For example, the depth D7 of the groove 7 may be set to be less than the thickness D9 of the heat-resistant layer TBC. The depth D7 of the groove 7 may also be set to be 30% or less of the thickness D9 of the heat-resistant layer TBC. For example, if the thickness D9 of the heat-resistant layer TBC is between 300 micrometers and 1 millimeter, the depth D7 of the groove 7 may be set to be between 90 micrometers (=300 micrometers × 30%) and 300 micrometers (=1 millimeter × 30%) or less.

[0114] When multiple grooves 7 are formed, the depths D7 of the multiple grooves 7 may be the same as those of the other. Alternatively, the depths D7 of at least two of the multiple grooves 7 may be different from those of the other. For example, the depth of a groove 7 formed on a first portion of the surface of a turbine blade BL may be different from the depth of a groove 7 formed on a second portion of the surface of a turbine blade BL. For example, the depth D7 of a groove 7 extending along a third direction may be different from the depth D7 of a groove 7 extending along a fourth direction intersecting the third direction.

[0115] When multiple grooves 7 are formed, the multiple grooves 7 may be formed to be arranged with the same pitch P7. In this embodiment, "pitch P7 of groove 7" may mean the distance between two adjacent grooves 7 in a direction intersecting the direction in which the grooves 7 extend (pitch direction). In the example shown in Figure 19, "pitch P7 of groove 7X" may mean the distance between two adjacent grooves 7X in the Y-axis direction. "Pitch P7 of groove 7Y" may mean the distance between two adjacent grooves 7X in the X-axis direction. Alternatively, the multiple grooves 7 may be formed to be arranged with different pitches P7. For example, the pitch P7 of a groove 7 extending along a third direction may be different from the pitch P7 of a groove 7 extending along a fourth direction. For example, the pitch P7 of a groove 7 formed on the third portion of the surface of a turbine blade BL may be different from the pitch P7 of a groove 7 formed on the fourth portion of a turbine blade BL.

[0116] The groove 7 may be a groove capable of relieving stress on the turbine blade BL. In other words, the groove 7 may have the function of being able to relieve stress on the turbine blade BL. In particular, since the groove 7 is formed in the heat-resistant layer TBC, the groove 7 may be a groove capable of relieving stress on the heat-resistant layer TBC. For example, when the temperature of the heat-resistant layer TBC changes, the heat-resistant layer TBC may expand or contract. In other words, the heat-resistant layer TBC may expand or contract. The groove 7 may be a groove that relieves the stress generated in the heat-resistant layer TBC due to the expansion or contraction of the heat-resistant layer TBC. For example, in this case, if the heat-resistant layer TBC deforms so that the width of the groove 7 changes in accordance with the expansion or contraction of the heat-resistant layer TBC, the stress generated in the heat-resistant layer TBC due to the expansion or contraction of the heat-resistant layer TBC can be addressed. As a result, the possibility of the heat-resistant layer TBC being damaged by stress is relatively reduced. Therefore, it becomes possible to manufacture a turbine blade BL that has relatively strong resistance to stress and appropriately reduced resistance to fluid.

[0117] The grooves 7 may be formed by a processing system different from the processing system SYS. For example, the grooves 7 may be formed by another processing system capable of forming grooves 7 by laser cutting or laser etching. The processing system SYS may, under the control of the control device 4, form the riblet structure RB described above on the turbine blade BL on which grooves 7 have been formed by another processing system. In this case, the processing system SYS may form the riblet structure RB based on information about the formed grooves 7. For example, the processing system SYS may measure the formed grooves 7 using measuring light ML and form the riblet structure RB based on information about the measurement results of the grooves 7 by measuring light ML. As a specific example, the processing system SYS may identify the position of the grooves 7 on the surface of the turbine blade BL (e.g., the surface of the heat-resistant layer TBC) based on information about the measurement results of the grooves 7 by measuring light ML, and form the riblet structure RB by irradiating processing light EL at a position that is in a predetermined positional relationship with the identified position of the grooves 7. In other words, information about the measurement results of the grooves 7 may be used as information for controlling the irradiation position of the processing light EL (so-called servo information).

[0118] Alternatively, the groove 7 may be formed by the machining system SYS. That is, the machining system SYS may form the groove 7 by removal machining using machining light EL, similar to how the groove 9 for forming the riblet structure RB is formed under the control of the control device 4. In this case, the machining system SYS may form the groove 9 first and then the riblet structure RB under the control of the control device 4. Alternatively, the machining system SYS may form the groove 7 first and then the riblet structure RB under the control of the control device 4.

[0119] When the machining system SYS forms a riblet structure RB on a turbine blade BL with grooves 7 formed on it (or forms the riblet structure RB on the turbine blade BL before forming grooves 7), it may form a riblet structure RB that satisfies the following structural conditions. The structural conditions that the riblet structure RB must satisfy will be explained below with reference to Figures 20 to 22. Figure 20 is a cross-sectional view showing a turbine blade BL with both grooves 7 and a riblet structure RB formed on it. Figure 21 is a perspective view showing a turbine blade BL with both grooves 7 and a riblet structure RB formed on it. Figure 22 is a top view showing a turbine blade BL with both grooves 7 and a riblet structure RB formed on it. In the example shown in Figures 20 to 22, the machining system SYS forms a riblet structure RB in which the top portion 83 includes a plane 831 and the boundary portion 84 includes a plane 841, and satisfies the structural conditions (that is, a riblet structure RB that includes the top portion 83 shown in Figure 12 and the boundary portion 84 shown in Figure 15, and satisfies the structural conditions). However, the processing system SYS may include a top portion 83 having a shape different from that shown in Figure 12 and / or a boundary portion 84 having a shape different from that shown in Figure 15, and may form a riblet structure RB that satisfies the structural conditions described later.

[0120] The structural conditions may include depth conditions relating to the depth D9 of the grooves 9 that form the riblet structure RB. For example, the depth conditions may include a first depth condition relating to the depth D9 of the grooves 9 themselves. The first depth condition may include the condition that the depth D9 of the grooves 9 is between 1 micrometer and 99 micrometers (i.e., between a few micrometers and several tens of micrometers). For example, in addition to or instead of the first depth condition, the depth conditions may include a second depth condition relating to the relationship between the depth D9 of the grooves 9 and the thickness D of the heat-resistant layer TBC. The second depth condition may include the condition that the depth D9 of the grooves 9 is less than the thickness D of the heat-resistant layer TBC, as shown in Figures 20 and 21. The second depth condition may also include the condition that the depth D9 of the grooves 9 is between 0.2% and 20% of the thickness D of the heat-resistant layer TBC. For example, the depth condition may include, in addition to or instead of at least one of the first and second depth conditions, a third depth condition relating to the relationship between the depth D9 of groove 9 and the depth D7 of groove 7. The third depth condition may include the condition that the depth D9 of groove 9 is different from the depth D7 of groove 7, as shown in Figures 20 and 21. The third depth condition may also include the condition that the depth D9 of groove 9 is smaller than the depth D7 of groove 7 (i.e., groove 9 is shallower than groove 7), as shown in Figures 20 and 21. In other words, the third depth condition may also include the condition that the depth D7 of groove 7 is greater than the depth D9 of groove 9 (i.e., groove 7 is deeper than groove 9), as shown in Figures 20 and 21. The third depth condition may also include the condition that the depth D7 of groove 7 is 1.5 times or more and 15 times or less the depth D9 of groove 9.

[0121] Here, if the third depth condition (in particular, the condition that the depth D9 of groove 9 is smaller than the depth D7 of groove 7) is met, the effect of the riblet structure RB (i.e., the effect of reducing fluid resistance on the surface of the turbine blade BL) is less likely to be hindered by groove 9. Specifically, as shown in Figure 23, if the depth D9 of groove 9 is larger than the depth D7 of groove 7, the bottom 71 of groove 7 will be higher than the bottom of groove 9 (i.e., the boundary 84). As a result, a partition wall 72 appears between the multiple convex structures 8, with the bottom 71 of groove 7 as its upper surface. As shown in Figure 23, this partition wall 72 may obstruct the fluid flowing along the multiple convex structures 8 between them (i.e., inside groove 9). In other words, as shown in Figure 23, the partition wall 72 may disturb the fluid flow along the convex structures 8. In particular, when the direction in which the convex structure 8 extends intersects with the direction in which the groove 7 extends, the partition wall 72 is likely to disturb the fluid flow along the convex structure 8. However, when the depth D9 of the groove 9 is smaller than the depth D7 of the groove 7, as shown in Figure 21, a partition wall 72 with the bottom 71 of the groove 7 as its upper surface does not appear between the multiple convex structures 8. As a result, as shown in Figure 21, the fluid flow between the multiple convex structures 8 (i.e., inside the groove 9) along the multiple convex structures 8 is unlikely to be disturbed by the partition wall 72. Therefore, the effect of reducing the fluid resistance on the surface of the turbine blade BL by the riblet structure RB can be appropriately enjoyed. However, when the direction in which the convex structure 8 extends and the direction in which the groove 7 extends are parallel, the groove 7 may form parts of different heights (for example, structures of different heights from the convex structures 8) within the riblet structure RB composed of multiple convex structures 8, which may reduce the effectiveness of the riblet structure RB.

[0122] The structural conditions may include pitch conditions relating to the pitch P9 of the grooves 9 that form the riblet structure RB. The pitch conditions may also include conditions relating to the relationship between the pitch P9 of groove 9 and the pitch P7 of groove 7. In particular, the pitch conditions may include conditions relating to the relationship between the pitch P9 of groove 9 in one direction and the pitch P7 of groove 7 in the same direction. In the examples shown in Figures 20 and 22, the pitch conditions may include conditions relating to the relationship between the pitch P9 of groove 9 in the Y-axis direction and the pitch P7 of groove 7 in the Y-axis direction. However, the pitch conditions may also include conditions relating to the relationship between the pitch P9 of groove 9 in one direction and the pitch P7 of groove 7 in a different direction. In the examples shown in Figures 20 and 22, the pitch conditions may include conditions relating to the relationship between the pitch P9 of groove 9 in the Y-axis direction and the pitch P7 of groove 7 in the X-axis direction. For example, the pitch conditions may include the condition that the pitch P9 of groove 9 and the pitch P7 of groove 7 are different. For example, the pitch condition may include the condition that the pitch P7 of groove 7 is greater than the pitch P9 of groove 9. For example, the pitch condition may include the condition that the pitch P7 of groove 7 is at least twice the pitch P9 of groove 9. When the condition that the pitch P7 of groove 7 is at least twice the pitch P9 of groove 9 is met, two or more grooves 9 are formed between two adjacent grooves 7 along the direction intersecting the direction in which groove 7 extends (i.e., the shorter direction of groove 7), as shown in Figures 20 and 22. In this case, the pitch condition may include the condition that the pitch P7 of groove 7 and the pitch P9 of groove 9 are set such that two or more grooves 9 are formed between two adjacent grooves 7 along the direction intersecting the direction in which groove 7 extends. For example, the pitch condition may include the condition that the pitch P7 of groove 7 is in the range of 20 times or more and 30 times or less the pitch P9 of groove 9. In other words, the pitch condition may include a condition that the pitch P7 of groove 7 and the pitch P9 of groove 9 are set such that 20 or more and 30 or fewer grooves 9 are formed between two adjacent grooves 7 along a direction intersecting the direction in which groove 7 extends. For example, the pitch condition may include a condition that the pitch P7 of groove 7 is an integer multiple of the pitch P9 of groove 9.When the condition is met that the pitch P7 of groove 7 is an integer multiple of the pitch P9 of groove 9, an integer number of grooves 9 are formed between two adjacent grooves 7 along a direction intersecting the direction in which groove 7 extends. In this case, the machining system SYS can relatively easily form a riblet structure RB having a regular structure on the turbine blade BL in which groove 7 is formed.

[0123] The structural conditions may include width conditions relating to the width W9 of the grooves 9 that form the riblet structure RB. The width conditions may also include conditions relating to the relationship between the width W9 of groove 9 and the width W7 of groove 7. In this embodiment, "width W9 of groove 9" may mean the size of groove 9 in the direction intersecting the direction in which groove 9 extends (i.e., the shorter direction of groove 9). Similarly, in this embodiment, "width W7 of groove 7" may mean the size of groove 7 in the direction intersecting the direction in which groove 7 extends (i.e., the shorter direction of groove 7). For example, the width conditions may include the condition that the width W9 of groove 9 and the width W7 of groove 7 are different. For example, the width conditions may include the condition that the width W7 of groove 7 is wider than the width W9 of groove 9. For example, the width conditions may include the condition that the width W7 of groove 7 is in the range of 1 or more and 10 or less than the width W9 of groove 9.

[0124] The structural conditions may include an extension direction condition relating to the direction in which the grooves 9 forming the riblet structure RB extend. The extension direction condition may include a condition relating to the relationship between the direction in which at least one groove 9 extends and the direction in which at least one groove 7 extends. In this embodiment, "the direction in which the groove 9 extends" may mean the direction in which the groove 9 extends along the surface of the turbine blade BL (for example, the surface of the heat-resistant layer TBC) on which the groove 9 is formed. Similarly, in this embodiment, "the direction in which the groove 7 extends" may mean the direction in which the groove 7 extends along the surface of the turbine blade BL (for example, the surface of the heat-resistant layer TBC) on which the groove 7 is formed. For example, the extension direction condition may include the condition that the direction in which at least one groove 9 extends and the direction in which at least one groove 7 extends are the same. In other words, the extension direction condition may include the condition that the direction in which at least one groove 9 extends and the direction in which at least one groove 7 extends are parallel. For example, the extension direction condition may include the condition that the direction in which at least one groove 9 extends is different from the direction in which at least one groove 7 extends. In other words, the extension direction condition may include the condition that the direction in which at least one groove 9 extends is intersect with the direction in which at least one groove 7 extends. In particular, the extension direction condition may include the condition that the direction in which at least one groove 9 extends is perpendicular to the direction in which at least one groove 7 extends. In the example shown in Figures 21 and 22, the extension direction condition includes the condition that, under the circumstances in which at least one groove 7X extends along the X-axis and at least one groove 7Y extends along the Y-axis, the direction in which each of the multiple grooves 9 extends is the same as the direction in which groove 7X extends (i.e., the X-axis direction). However, the extension direction condition may include the condition that, under the circumstances that at least one groove 7 extends along the X-axis direction and at least one groove 7 extends along the Y-axis direction, at least one of the multiple grooves 9 extends along at least one of the X-axis direction and the Y-axis direction.

[0125] Furthermore, the structural conditions may include pitch direction conditions relating to the pitch direction of the grooves 9 that form the riblet structure RB. The pitch direction conditions may include conditions relating to the relationship between the pitch direction of the multiple grooves 9 and the pitch direction of the multiple grooves 7. In this embodiment, "pitch direction of the multiple grooves 9" may mean the pitch direction along the surface of the turbine blade BL (for example, the surface of the heat-resistant layer TBC) in which the multiple grooves 9 are formed. Similarly, "pitch direction of the multiple grooves 7" in this embodiment may mean the pitch direction along the surface of the turbine blade BL (for example, the surface of the heat-resistant layer TBC) in which the grooves 7 are formed. For example, the pitch direction conditions may include the condition that the pitch direction of the multiple grooves 9 and the pitch direction of the multiple grooves 7 are the same. In other words, the pitch direction conditions may include the condition that the pitch direction of the multiple grooves 9 and the pitch direction of the multiple grooves 7 are parallel. For example, the pitch direction conditions may include the condition that the pitch direction of the multiple grooves 9 and the pitch direction of the multiple grooves 7 are different. In other words, the pitch direction conditions may include the condition that the pitch direction of the multiple grooves 9 and the pitch direction of the multiple grooves 7 intersect. In particular, the pitch direction condition may include the condition that the pitch direction of the multiple grooves 9 and the pitch direction of the multiple grooves 7 are orthogonal. In the example shown in Figures 21 and 22, the pitch direction condition includes the condition that, given that the pitch direction of the multiple grooves 7X is in the Y-axis direction and the pitch direction of the multiple grooves 7Y is in the X-axis direction, the pitch direction of each of the multiple grooves 9 is the same as the pitch direction of groove 7X (i.e., the Y-axis direction). However, the pitch direction condition may also include the condition that, given that the pitch direction of the multiple grooves 7 is in the X-axis direction and the pitch direction of the multiple grooves 7 is in the Y-axis direction, the pitch direction of the multiple grooves 9 is in the same direction as at least one of the X-axis direction and the Y-axis direction.

[0126] The structural conditions described above are examples of conditions set from the perspective of manufacturing a turbine blade BL that has relatively strong stress resistance and appropriately reduced fluid resistance. Therefore, when the structural conditions are met, the stress resistance of the turbine blade BL becomes relatively stronger and / or the fluid resistance of the turbine blade BL becomes smaller compared to when the structural conditions are not met.

[0127] When multiple grooves 7 are formed, as shown in Figure 22, the surface of the turbine blade BL (for example, the surface of the heat-resistant layer TBC) can be divided into multiple surface regions SA by the multiple grooves 7. In this case, the structural conditions for the groove 9 formed in the first surface region SA among the multiple surface regions SA may be the same as the structural conditions for the groove 9 formed in a second surface region SA that is different from the first surface region SA among the multiple surface regions SA. As described above, the structural conditions are conditions relating to at least one of the groove 9's depth W9, pitch P9, width W9, pitch direction, and extension direction. The depth W9, pitch P9, width W9, pitch direction, and extension direction are examples of the groove 9's characteristics. Therefore, the characteristics of the groove 9 formed in the first surface region SA among the multiple surface regions SA may be the same as the characteristics of the groove 9 formed in the second surface region SA among the multiple surface regions SA. Figure 22 shows an example where the structural conditions are the same in all of the multiple surface regions SA.

[0128] Alternatively, the structural conditions for the groove 9 formed in the first surface region SA among the multiple surface regions SA may be different from the structural conditions for the groove 9 formed in the second surface region SA among the multiple surface regions SA. In other words, the characteristics of the groove 9 formed in the first surface region SA among the multiple surface regions SA may be different from the characteristics of the groove 9 formed in the second surface region SA among the multiple surface regions SA. For example, as shown in Figure 24, a top view showing a turbine blade BL on which both grooves 7 and riblet structures RB are formed, the pitch P9 of the grooves 9 formed in surface regions SA#1 to SA#3 may be different from the pitch P9 of the grooves 9 formed in surface regions SA#4 to SA#6. As shown in Figure 24, the direction in which the grooves 9 formed in surface regions SA#1 to SA#3 extend may be different from the direction in which the grooves 9 formed in surface regions SA#4 to SA#6 extend. Furthermore, as shown in Figure 24, the pitch direction of the multiple grooves 9 formed in surface regions SA#1 to SA#3 may be different from the pitch direction of the multiple grooves 9 formed in surface regions SA#4 to SA#6.

[0129] Furthermore, as shown in Figure 25, a top view showing a turbine blade BL on which both grooves 7 and riblet structures RB are formed, the pitch P9 of the grooves 9 formed in surface region SA#1 may be different from the pitch P9 of the grooves 9 formed in the adjacent surface region SA#2 in the extension direction of the grooves 9 in surface region SA#1. The extension direction (or pitch direction) of the grooves 9 formed in surface region SA#2 may be different from the extension direction (or pitch direction) of the grooves 9 formed in the adjacent surface region SA#3 in the extension direction of the grooves 9 in surface region SA#2. The extension direction (or pitch direction) of the grooves 9 formed in surface region SA#2 may be different from the extension direction (or pitch direction) of the grooves 9 formed in surface region SA#5 adjacent in the direction intersecting the extension direction (pitch direction) of the grooves 9 formed in surface region SA#2. Furthermore, the extension direction (or pitch direction) and pitch P9 of the groove 9 formed in surface region SA#5 may be different from the extension direction (or pitch direction) and pitch P9 of the groove 9 formed in the adjacent surface region SA#6 in the extension direction of the groove 9 in surface region SA#5.

[0130] The structural conditions applied to each surface region SA (in other words, the characteristics of the grooves 9) may be set according to the characteristics of the fluid in contact with each surface region SA. For example, the structural conditions applied to each surface region SA (in other words, the characteristics of the grooves 9) may be set to conditions (characteristics) that can reduce the resistance of each surface region SA to the fluid in contact with it. As a result, it becomes possible to manufacture turbine blades BL with appropriately reduced fluid resistance compared to the case where the structural conditions applied to multiple surface regions SA (in other words, the characteristics of the grooves 9) are the same.

[0131] Figures 19 to 24 above show examples in which grooves 7 are formed in the heat-resistant layer TBC. However, grooves 7 may also be formed in the base material BM. In this case, the processing system SYS may form the riblet structure RB on the base material BM in which grooves 7 are formed. Alternatively, the processing system SYS may form grooves 7 on the base material BM after forming the riblet structure RB on the base material BM. In this case as well, the processing system SYS may form the riblet structure RB on the base material BM in a manner that satisfies the structural conditions described above.

[0132] Furthermore, as shown in Figure 26, grooves 7 do not necessarily need to be formed in the heat-resistant layer TBC. Note that in Figure 26, lines indicating the boundaries of each surface region SA#1 to SA#6 are shown for ease of understanding, but these lines are hypothetical.

[0133] (5) Variant The machining system SYS may separately include a machining head that irradiates the workpiece W with machining light EL but does not irradiate the workpiece W with measurement light ML, and a measurement head that irradiates the workpiece W with measurement light ML but does not irradiate the workpiece W with machining light EL.

[0134] In the above description, the processing system SYS includes an injection optical system 113 that ejects both the processing light EL and the measurement light ML toward the workpiece W. However, the processing system SYS may also include separate injection optical systems 113 for ejecting the processing light EL toward the workpiece W and injection optical systems 113 for ejecting the measurement light ML toward the workpiece W. In this case, each injection optical system 113 does not need to include a beam splitter 1131 that combines the processing light EL and the measurement light ML.

[0135] In the above description, the processing device 1 is capable of measuring the workpiece W. However, the processing device 1 does not necessarily have to be capable of measuring the workpiece W. In this case, the processing device 1 does not need to be equipped with a measuring optical system 112. The processing system SYS does not need to be equipped with a measuring light source 22.

[0136] In the above description, the processing device 1 is equipped with a head drive system 12. However, the processing device 1 does not necessarily have to be equipped with a head drive system 12. In other words, the processing head 11 does not need to be movable. In this case, the processing device 1 does not necessarily have to be equipped with a position measuring device 13.

[0137] In the above description, the stage device 3 is equipped with a stage drive system 33. However, the stage device 3 does not have to be equipped with a stage drive system 33. In other words, the stage 32 does not have to be movable. In this case, the stage device 3 does not have to be equipped with a position measuring device 34.

[0138] In the above description, the processing system SYS processes a turbine blade BL comprising a base material BM and a heat-resistant layer TBC. However, the processing system SYS may process a turbine blade BL comprising a base material BM and any coating layer formed on the base material BM and different from the heat-resistant layer TBC. In this case, the processing system SYS may form a riblet structure RB on any coating layer. For example, the processing system SYS may form a riblet structure RB on any coating layer that includes at least one of the top portion 83 and the boundary portion 84 described with reference to Figures 12 to 18. For example, the processing system SYS may form a riblet structure RB on any coating layer that has a groove 9 different from the groove 7 that forms the riblet structure RB. For example, the processing system SYS may form a riblet structure RB and a groove 9 different from the groove 7 that forms the riblet structure RB on any coating layer. For example, any coating layer may be formed on the base material BM on which the processing system SYS has formed the riblet structure RB. An example of an arbitrary coating layer is a protective layer for protecting the base material BM.

[0139] Any coating layer formed on the substrate BM may include a layer newly formed by adding material to the substrate BM. Alternatively, any coating layer formed on the substrate BM may include a layer corresponding to a part of the substrate BM whose properties have been altered. In other words, any coating layer may include a layer corresponding to a part of the substrate BM whose properties have been altered, which is newly formed in contact with a part of the substrate BM whose properties have not been altered, by altering the properties of a part of the substrate BM. In other words, the part of the substrate BM whose properties have been altered may be used as a coating layer, and the part of the substrate BM whose properties have not been altered may be used as the substrate BM. An example of a layer corresponding to a part of the substrate BM whose properties have been altered is a part whose properties have been altered by quenching. In this case, the coating layer may be formed by surface treatment of the surface of the substrate BM. An example of surface treatment is quenching. Quenching may include, for example, at least one of high-frequency induction quenching, flame quenching, laser quenching, and electron beam quenching. The coating layer formed by such quenching becomes harder than the part of the substrate BM whose properties have not been altered by quenching. Quenching can be considered one specific example of a surface hardening treatment for hardening the surface of the substrate BM. In this case, the coating layer can function as a protective layer to protect the surface of the substrate BM.

[0140] In the above description, the machining system SYS is machining an axial-flow type turbine blade BL. However, as shown in Figure 27, the machining system SYS may also machine a radial-flow type turbine blade BL. In Figure 27, as indicated by arrows F1 and F2, the fluid enters the turbine blade BL parallel to the rotation axis 120 of the turbine blade BL and flows out from the outlet portion 160 in a direction intersecting the rotation axis 120.

[0141] In this case as well, the riblet structure RB can be divided into multiple surface regions SA. The structural conditions for the groove 9 formed in the first surface region SA#1 among the multiple surface regions SA may be the same as the structural conditions for the groove 9 formed in the second surface region SA#2, which is different from the first surface region SA#1 among the multiple surface regions SA. As described above, the structural conditions are conditions relating to at least one of the groove 9's depth W9, pitch P9, width W9, pitch direction, and extension direction. The depth W9, pitch P9, width W9, pitch direction, and extension direction are examples of the groove 9's characteristics. Therefore, the characteristics of the groove 9 formed in the first surface region SA among the multiple surface regions SA may be the same as the characteristics of the groove 9 formed in the second surface region SA among the multiple surface regions SA. Furthermore, the structural conditions for the groove 9 formed in the first surface region SA#1 among the multiple surface regions SA may be different from the structural conditions for the groove 9 formed in the third surface region SA#3 among the multiple surface regions SA. Here, the partition shapes of the multiple surface regions SA#1 to SA#4 do not have to be rectangular, as shown in Figure 27.

[0142] In the above description, the processing system SYS processes a turbine blade BL, which is an example of a workpiece W. However, the processing system SYS may process any blade that is different from the turbine blade BL and is another example of a workpiece W. Any blade may, like the turbine blade BL described above, comprise a base material and any coating layer formed on the surface of the base material. In this case, for example, the processing system SYS may form a riblet structure RB on any blade different from the turbine blade BL. In other words, the processing system SYS may form a riblet structure RB on at least one of the base material and coating layer of any blade. An example of any blade is a blade that constitutes a propeller. A propeller is a component that converts rotational force output from a prime mover, including at least one of an engine and a motor, into thrust for a moving body, including at least one of an airplane and a ship.

[0143] Alternatively, the machining system SYS may machine any object that is different from a blade and is another example of the workpiece W. Any object may comprise a base material and any coating layer formed on the surface of the base material, similar to the turbine blade BL described above. In this case, for example, the machining system SYS may form a riblet structure RB on any object. That is, the machining system SYS may form a riblet structure RB on at least one of the base material and coating layer of any object.

[0144] In the above description, the machining system SYS forms a riblet structure RB on the surface of the workpiece W that has the function of reducing the fluid's resistance. However, the machining system SYS may form a structure on the workpiece W that has a different function than reducing the fluid's resistance on the workpiece W's surface. For example, the machining system SYS may form a riblet structure on the workpiece W to reduce the noise generated when the fluid and the surface of the workpiece W move relative to each other. For example, the machining system SYS may form a riblet structure on the workpiece W that generates vortices in relation to the fluid flow on the surface of the workpiece W. For example, the machining system SYS may form a structure on the workpiece W that gives the surface of the workpiece W hydrophobicity.

[0145] In the above description, the machining system SYS forms a riblet structure RB on the surface of the workpiece W. However, the machining system SYS may form any structure having any shape on the surface of the workpiece W. An example of any structure is a micro- or nanometer-order fine texture structure (typically a bumpy structure) formed regularly or irregularly. Such a fine texture structure may include at least one of a sharkskin structure and a dimple structure that has the function of reducing resistance by fluids (gas and / or liquids). The fine texture structure may include a lotus leaf surface structure that has at least one of a liquid-repellent function and a self-cleaning function (e.g., having a lotus effect). The fine texture structure may include at least one of the following: a micro-protrusion structure having a liquid transport function (see U.S. Patent Publication No. 2017 / 0044002); an uneven structure having a hydrophilic function; an uneven structure having an antifouling function; a moth-eye structure having at least one of a reflectance reduction function and a liquid-repellent function; an uneven structure that exhibits structural color by interfering with only light of a specific wavelength; a pillar array structure having an adhesive function utilizing van der Waals forces; an uneven structure having an aerodynamic noise reduction function; a honeycomb structure having a droplet collection function; and an uneven structure that improves adhesion with a layer formed on the surface.

[0146] In the above description, the processing system SYS processes the workpiece W by irradiating it with processing light EL. However, the processing system SYS may also process the workpiece W by irradiating it with any energy beam other than light. In this case, the processing system SYS may be equipped with a beam irradiation device capable of irradiating any energy beam in addition to or instead of the processing light source 21. Examples of any energy beam include at least one of a charged particle beam and an electromagnetic wave. Examples of a charged particle beam include at least one of an electron beam and an ion beam.

[0147] In the above description, the turbine T may also be referred to as a turbine machine. This turbine machine may comprise multiple turbines T. Furthermore, as shown in Figure 28, the turbine machine TM may be connected to a generator DY to drive the generator DY. In Figure 28, the turbine machine TM comprises a compressor CO for compressing air, a combustor BU for mixing fuel FU with the air compressed by the compressor CO and burning it, a turbine unit TU comprising multiple turbines T, and a rotatable shaft SH connecting the compressor CO and the turbine unit TU. The combustion gas from the combustor BU rotates the turbine unit TU around the shaft SH. This rotational force is transmitted to the generator DY via the shaft SH and also to the compressor CO. Furthermore, the turbine machine may include a jet engine.

[0148] The requirements of each embodiment described above can be combined as appropriate. Some of the requirements of each embodiment described above may not be used. The requirements of each embodiment described above can be replaced with the requirements of other embodiments as appropriate. Furthermore, to the extent permitted by law, all published gazettes and U.S. patent disclosures relating to the apparatus etc. cited in each embodiment described above will be incorporated into the text.

[0149] Furthermore, the present invention may be modified as appropriate, provided that it does not contradict the gist or idea of ​​the invention as can be inferred from the claims and the specification as a whole, and such modifications to the blade, processing system and processing method are also included in the technical concept of the present invention. [Explanation of symbols]

[0150] 1 Processing equipment 11 Machining head 111 Processing optical system 112 Measuring Optical Systems 113 Exit optical system 4. Control device 8 Convex structure 81, 82 Side view 83 Top 84 Boundary 7, 9 groove EL processing light ML measurement light SYS Machining System Double job BL Turbine Blades BM base material TBC heat resistant layer RB Riblet Structure

Claims

1. The surface has multiple grooves to form a riblet structure that reduces resistance to fluids, The riblet structure has a plurality of convex structures formed along the arrangement direction in which the plurality of grooves are arranged, The groove is formed between the adjacent plurality of convex structures, Each of the plurality of convex structures has a pair of curved surfaces and a vertex that includes a surface with a smaller curvature than the pair of curved surfaces and is connected to the pair of curved surfaces. Each of the pair of curved surfaces of the plurality of convex structures is connected to the side surface that forms the plurality of grooves. blade.

2. In the blade according to claim 1, A blade in which the pair of sides connected to each of the pair of curved surfaces of the convex structure are not connected to each other.

3. In the blade according to claim 1 or claim 2, A blade in which the size of the top portion in the aforementioned arrangement direction is within the range of 1% to 9% of the arrangement pitch of the plurality of convex structures formed along the aforementioned arrangement direction.

4. In the blade according to claim 1 or claim 2, A blade in which the width of the apex and the pair of curved surfaces in the direction of arrangement are within the range of 1% to 9% of the arrangement pitch of the plurality of convex structures formed along the direction of arrangement.

5. In the blade according to any one of claims 1 to 4, A blade in which the radius of curvature of the pair of curved surfaces is in the range of 1 micrometer to 9 micrometers.

6. In the blade according to any one of claims 1 to 5, The aforementioned top portion includes a flat surface, forming a blade.

7. In the blade according to claim 6, The aforementioned top surface is connected to the pair of curved surfaces, forming a blade.

8. A beam irradiation device that irradiates the surface of the blade with an energy beam, A control device that controls the beam irradiation device so as to form multiple grooves along the alignment direction, Equipped with, A processing system that controls the beam irradiation device such that the control device controls the beam irradiation device such that the grooves are formed between a plurality of convex structures formed along an arrangement direction in which the plurality of grooves are arranged, and each of the plurality of convex structures has a vertex that includes a pair of curved surfaces and a surface with a curvature less than the pair of curved surfaces and is connected to the pair of curved surfaces, and each of the pair of curved surfaces of the plurality of convex structures is connected to the side surface that forms the plurality of grooves.

9. By irradiating the surface of the blade with an energy beam, The irradiation of the energy beam forms multiple grooves along the direction of arrangement. Includes, The above formation means The grooves are formed between multiple convex structures that are formed along the direction of arrangement in which multiple grooves are arranged, Each of the plurality of convex structures has a pair of curved surfaces and a top portion connected to the pair of curved surfaces, including a surface with a curvature less than the pair of curved surfaces, and the energy beam is irradiated such that each of the pair of curved surfaces of the plurality of convex structures is connected to the side surfaces forming the plurality of grooves. A processing method that includes the above.

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