Temperature and humidity control device, and combination of temperature and humidity control device and humidity control gas generator.

Abstract

Provided are: a temperature and humidity control apparatus that is capable of accurately controlling the temperature and humidity inside a chamber; and a combination of the temperature and humidity control apparatus and a humidity-conditioning gas generation apparatus.　A temperature and humidity control apparatus 1 is provided with: a container 2 that defines a chamber C; a water tank 3 which has a bottom wall 31, a top wall 32, and a lateral wall 33 for encircling the container 2, and which is configured such that the container 2 is disposed at a position separated from the bottom wall 31, the top wall 32, and the lateral wall 33, and a heat transfer liquid is poured in spaces between the container 2 and the bottom wall 31 and between the top wall 32 and the lateral wall 33 so as to be able to submerge the entire outer surfaces of the container 2; a temperature control device 5 for controlling the temperature of the heat transfer liquid in the water tank 3; a circulating device 5 that supplies the heat transfer liquid having undergone temperature control by the temperature control device 5 into the water tank 3 and that causes the heat transfer liquid to circulate so as to cause the heat transfer liquid in the water tank 3 to be returned to the temperature control device 5; and a gas introduction pipe 6 that has a gas outlet open to the chamber C, and that introduces a humidity conditioning gas having undergone humidity adjustment to a prescribed value into the chamber C of the container 2.

Description

Technical Field

[0001] The present invention relates to a temperature and humidity control device, and a combination of a temperature and humidity control device and a humidity conditioning gas generation device.

Background Art

[0002] Patent Document 1 discloses a thermomechanical analyzer for a humid atmosphere. According to the disclosure, a heat insulation chamber is formed inside a constant temperature jacket through which a heat medium at a predetermined temperature circulates. An air supply pipe and an exhaust pipe that communicate with the air supply port and the exhaust port of the heat insulation chamber respectively pass through the constant temperature jacket.

[0003] With such a configuration, the temperature and humidity of the atmospheric gas introduced into the heat insulation chamber are stabilized.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the device disclosed in Patent Document 1, the entire circumference of the heat insulation chamber is not covered by the constant temperature jacket. Therefore, the temperature and humidity of the atmospheric gas introduced into the heat insulation chamber cannot be controlled with high precision.

[0006] An object of the present invention is to provide a temperature and humidity control device capable of controlling the temperature and humidity inside a chamber with high precision, and a combination of a temperature and humidity control device and a humidity conditioning gas generation device.

Means for Solving the Problems

[0007] A temperature and humidity control device according to one embodiment comprises a container defining a chamber; a water tank having a bottom wall, a top wall, and side walls surrounding the container, the container being positioned at a distance from the bottom wall, top wall, and side walls, and containing a heat transfer liquid in the space between the container and the bottom wall, top wall, and side walls so that the entire outer surface of the container can be submerged in the liquid; a temperature control device for controlling the temperature of the heat transfer liquid in the water tank; a circulation device for supplying the heat transfer liquid, whose temperature is controlled by the temperature control device, into the water tank and circulating the heat transfer liquid so that it is returned to the temperature control device; and a gas introduction pipe having a gas outlet that opens into the chamber and introducing a humidity-controlled gas whose humidity has been adjusted to a predetermined value into the chamber of the container.

[0008] The system further comprises an inner tank that is placed inside the main tank and houses a container, the inner tank having a bottom plate, side plates and an upper opening, the container being positioned at a distance from the bottom plate and side plates, dividing the space into an inner space inside the inner tank and an outer space outside the inner tank, the heat transfer fluid supplied into the tank being configured to flow from the inner space to the outer space through the upper opening of the inner tank, the heat transfer fluid supply port from the circulation device being located at the bottom of the inner space inside the main tank and the heat transfer fluid outlet from the tank being located at the bottom of the outer space inside the tank.

[0009] The gas inlet pipe extends from the container through the space to the outside of the water tank, and the portion of the gas inlet pipe that exists within the space may form a heat exchanger for heat exchange between the humidifying gas flowing within the portion and the heat transfer fluid within the space.

[0010] The internal water tank is circular, rectangular, or elliptical in plan view, and multiple supply ports for the heat transfer fluid from the circulation device are arranged at the bottom of the internal space within the internal water tank. These supply ports may be positioned symmetrically with respect to the center of the internal water tank in plan view.

[0011] The capacity of the container is 500 mL or more, preferably 1.0 L, and more preferably 5.0 L or more.

[0012] A combination of a temperature and humidity control device and a humidity control gas generator according to one embodiment comprises the above-described temperature and humidity control device and a humidity control gas generator that supplies humidity control gas to the above-described temperature and humidity control device. The humidity control gas generator has a saturated tank body having a gas area and a water reservoir area located below the gas area, and a gas recirculation device disposed inside the saturated tank body. The gas recirculation device has a gas return pipe, a gas outlet pipe, a drain pipe, and a trap box. The gas return pipe runs from a gas inlet located in the gas area, through the water reservoir area, to a gas outlet located inside the trap box. The gas outlet pipe runs from a gas inlet located inside the trap box to a gas outlet located outside the saturated tank body. The drain pipe runs from a water inlet located inside the trap box to a water outlet located outside the saturated tank body. [Effects of the Invention]

[0013] The present invention provides a temperature and humidity control device capable of precisely controlling the temperature and humidity inside a chamber, and a combination of the temperature and humidity control device and a humidity control gas generator. [Brief explanation of the drawing]

[0014] [Figure 1] This diagram shows a combination of a temperature and humidity control device and a humidity control gas generator according to one embodiment, mainly showing a vertical cross-sectional view of the temperature and humidity control device. [Figure 2] This is a longitudinal cross-sectional view of a humidity control gas generator according to one embodiment. [Figure 3] This is a vertical cross-sectional view showing an enlarged view of the flange portion of a humidity control gas generator according to one embodiment. [Figure 4] This is a cross-sectional view of a gas reflux device of a humidity control gas generator according to one embodiment. [Figure 5] This figure shows a modified example of the humidity control gas generator shown in Figure 2. [Modes for carrying out the invention]

[0015] Embodiments of the present invention will be described below with reference to the drawings. Note that the embodiments described below are not intended to limit the claims, and not all of the elements and combinations thereof described in the embodiments are necessarily essential to the solution of the invention.

[0016] Figure 1 shows a combination of a temperature and humidity control device 1 and a humidity control gas generator 101 according to one embodiment, and mainly shows a vertical cross-sectional view of the temperature and humidity control device 1. The humidity control gas generator 101 is a device that generates gas whose humidity has been adjusted to a predetermined value, and supplies this gas to the temperature and humidity control device 1.

[0017] As shown in Figure 1, a temperature and humidity control device 1 according to one embodiment comprises a main unit 10 and a temperature control and circulation device 5. The main unit 10 comprises a container 2, a water tank 3, an inner water tank 4, and a gas introduction pipe 6.

[0018] Container 2 has a shape that is generally cylindrical or polygonal (e.g., a square cylinder) overall. Container 2 has a container body 21 and a lid 22. The lid 22 covers the upper opening of the container body 21, thereby defining a chamber C inside the container 2. When the lid 22 is tightly fixed to the container body 21, the immersion of liquid into the chamber C is prevented. Multiple samples 23 are placed inside the chamber C. The capacity of container 2 is, for example, 500 mL or more, preferably 1.0 L, and more preferably 5.0 L or more. The main material of the components constituting container 2 is a highly durable metal, such as stainless steel. Note that the capacity of container 2 is not limited to the above capacity and may be less than 500 mL.

[0019] The water tank 3 generally has a substantially cylindrical or polygonal cylinder (e.g., square cylinder) shape as a whole. The water tank 3 has a bottom wall 31, a top wall 32, and a side wall 33. The bottom wall 31, the top wall 32, and the side wall 33 surround the container 2. The container 2 is disposed at a position spaced from the bottom wall 31, the top wall 32, and the side wall 33. When the temperature and humidity control device 1 operates, the space S between the container 2 and the bottom wall 31, the top wall 32, and the side wall 33 is filled with a heat transfer medium liquid such as water or an aqueous coolant solution, leaving an air space at the top. The entire outer surface of the container 2 is submerged by the heat transfer medium liquid. Therefore, the temperature and humidity of the gas in the chamber C can be controlled with high precision. The main material of the components constituting the water tank 3 is a highly durable metal, such as stainless steel.

[0020] The inner water tank 4 generally has a substantially cylindrical or polygonal cylinder (e.g., square cylinder) shape as a whole. The inner water tank 4 is disposed in the water tank 3 and houses the container 2. The inner water tank 4 has a bottom plate 41, a side plate 42, and an upper opening 43. The bottom plate 41 and the side plate 42 are respectively disposed at positions spaced from the bottom wall 31 and the side wall 33. The container 2 is disposed at a position spaced from the bottom plate 41 and the side plate 42. The inner water tank 4 divides the space S into an inner space S1 inside the inner water tank 4 and an outer space S2 outside the inner water tank 4. When the temperature and humidity control device 1 operates, the heat transfer medium liquid supplied into the water tank 3 flows from the inner space S1 to the outer space S2 through the upper opening 43 of the inner water tank 4. Inside the inner water tank 4, the entire outer surface of the container 2 is submerged by the heat transfer medium liquid. Thus, when the temperature and humidity control device 1 operates, the container 2 is covered by the inner jacket of the heat transfer medium liquid and the outer jacket of the heat transfer medium liquid. Therefore, the heat exchange between the container 2 and the heat transfer medium liquid is promoted, and the temperature and humidity of the gas in the chamber C can be controlled with higher precision.

[0021] The temperature control and circulation device 5 is provided outside the device main body 10. The temperature control and circulation device 5 has a temperature control device and a circulation device. The temperature control device has heating means and cooling means and can control the heat refrigerant, for example, in the range of 5 to 55 °C. The circulation device has a pump and circulates the heat transfer medium liquid by supplying the heat transfer medium liquid at a desired temperature controlled by the temperature control unit into the water tank 3 and returning the heat transfer medium liquid in the water tank 3 to the temperature control and circulation device 5.

[0022] The temperature control and circulation device 5, the water tank 3, and the inner water tank 4 are connected by a liquid supply pipe 51 and a liquid return pipe 52. The liquid supply pipe 51 and the liquid return pipe 52 are provided inside the device main body 10. The liquid supply pipe 51 branches into a plurality of pipes midway, and each branch pipe 53 is provided with a flow meter 54. When the temperature and humidity control device 1 is operating, based on the measurement results of each flow meter 54, control is performed so that the amount of the heat transfer medium liquid flowing through each branch pipe 53 is equal.

[0023] The plurality of supply ports 55 for the heat transfer medium liquid to the inner water tank 4, which is the outlet of the liquid supply pipe 51 (branch pipe 53), are arranged at the bottom of the inner space S1 in the inner water tank 4. The outlet 56 of the heat transfer medium liquid from the water tank 3, which is the inlet of the liquid return pipe 52, is arranged at the bottom of the outer space S2 in the water tank 3. The inner water tank 4 is circular, rectangular, or elliptical in plan view. The plurality of supply ports 55 are arranged at symmetric positions with respect to the center of the inner water tank 4 in plan view. Thereby, the heat transfer medium liquid can be evenly flowed to the outer periphery of the container 2, and the accuracy of temperature control can be improved. In addition, although there are two supply ports 55 in the present embodiment, there may be three or more, and the number of branch pipes 53 increases according to the number of supply ports 55.

[0024] The gas introduction pipe 6 extends out of the water tank 3 through the space S (inner space S1 and outer space S2) from the container 2. The intermediate portion 61 existing in the outer space S2 of the gas introduction pipe 6 is not linear but has a spiral shape. When the temperature and humidity control device 1 is operating, heat exchange is performed between the conditioning gas flowing through the intermediate portion 61 and the heat transfer medium liquid in the outer space S2. Therefore, the intermediate portion 61 functions as a heat exchanger. For this reason, since the temperature of the gas passing through the intermediate portion 61 approaches the desired temperature, the accuracy of temperature control is further improved.

[0025] A flexible hose 62 is connected to the end of the gas inlet pipe 6 that is outside the water tank 3. A heater (not shown) is provided around the flexible hose 62. This heater is provided to prevent condensation of the humidity control gas flowing through the flexible hose 62. The end of the flexible hose 62 opposite to the gas inlet pipe 6 is connected to the humidity control gas generator 101. Specifically, the flexible hose 62 is connected to the gas outlet pipe 141 of the gas recirculation device 104, which will be described later (see Figure 2). When the temperature and humidity control device 1 is in operation, humidity control gas from the humidity control gas generator 101, whose humidity has been adjusted to a predetermined value, is introduced into the chamber C via the gas outlet 63 that opens into the chamber C through the gas inlet pipe 6.

[0026] Multiple ducts 7 are provided in the lid 22 of container 2. The multiple ducts 7 extend upward from the lid 22, penetrate the water tank 3, and extend to the outside of the water tank 3. The multiple ducts 7 are for inserting sensors into the chamber C and for exhausting gas from the chamber C. A temperature sensor 71, a humidity sensor 72, and a displacement sensor / load cell 73 are inserted into the chamber C via the multiple ducts 7. The temperature sensor 71 measures the temperature inside the chamber C. The humidity sensor 72 measures the humidity inside the chamber C. The detection signals from the temperature sensor 71 and the humidity sensor 72 are input to a control device (not shown) and used for temperature control of the heat transfer fluid by the temperature control / circulation device 5. The displacement sensor / load cell 73 measures the load on the sample 23 placed inside the chamber C and the displacement of the sample 23. An ambient temperature sensor 74 is provided outside the water tank 3 to monitor the ambient temperature inside the device body 10.

[0027] The temperature and humidity control device 1 further comprises a liquid level control device 8. The liquid level control device 8 includes a liquid storage container 81, a supply pipe 82, a discharge pipe 83, two pumps 84 and 85, a check valve 86, and a valve 87. The capacity of the liquid storage container 81 is, for example, 20 L. The supply pipe 82 extends from the inner water tank 4 through the outer space S2 to the outside of the water tank 3 and extends to the bottom of the liquid storage container 81. The discharge pipe 83 extends from the inner water tank 4 through the outer space S2 to the outside of the water tank 3 and extends to the top of the liquid storage container 81. The supply pipe 82 is equipped with a pump 84 and a check valve 86. The discharge pipe 83 is equipped with a pump 85 and a valve 87. The liquid storage container 81 is equipped with an intake / exhaust pipe 88 and a filter 89.

[0028] After the test is completed, the heat transfer fluid is discharged from the inner water tank 4 into the liquid container 81 by the pump 85 of the liquid level adjustment device 8. The heat transfer fluid is discharged by the liquid level adjustment device 8 until the liquid level in the inner water tank 4 is below the level of the lid 22. Then, the lid 22 is opened, the sample 23 is removed from the container 2, and the next sample 23 to be tested is placed in the container 2. After the sample 23 is placed, the lid 22 is closed, and the heat transfer fluid in the liquid container 81 is supplied to the inner water tank 4 by the pump 84 of the liquid level adjustment device 8. In this way, the liquid level of the heat transfer fluid in the inner water tank 4 is adjusted by the liquid level adjustment device 8.

[0029] The temperature and humidity control device 1 further comprises two drain pipes 9. Each drain pipe 9 is provided with a valve 9A. By opening each valve 9A, the heat transfer fluid is discharged from the water tank 3 and the inner water tank 4 to the outside through each drain pipe 9.

[0030] The water tank 3, liquid supply pipe 51, liquid return pipe 52, gas introduction pipe 6, flexible hose 62, supply pipe 82, and discharge pipe 83 are all covered with insulating material.

[0031] According to the temperature and humidity control device 1 of this embodiment described above, it is possible to control the temperature and humidity inside the chamber C with high precision.

[0032] Next, the humidity control gas generator 101 will be described.

[0033] Figure 2 is a longitudinal cross-sectional view of a humidity control gas generator 101 according to one embodiment.

[0034] One embodiment of the humidity control gas generator 101 comprises a saturation tank body 102, a reserve water tank 103, and a gas recirculation device 104.

[0035] The saturation tank body 102 has an overall shape that is elongated vertically, roughly cylindrical or polygonal (e.g., square cylinder). The saturation tank body 102 is composed of three parts: an upper cap portion 120, a central body portion 121, and a bottom base portion 122. The main material of these parts of the saturation tank body 102 is a highly durable metal, such as stainless steel.

[0036] The saturation tank body 102 is formed by sequentially connecting these three parts such that the upper end surface of the peripheral wall of the central body 121 is in close contact with the lower end surface of the peripheral wall of the upper cap portion 120, and the upper surface of the central part of the bottom base portion 122 is in close contact with the lower end surface of the peripheral wall of the central body 121. The connection between these three parts is made by bolting the flange 120a at the lower end of the peripheral wall of the upper cap portion 120 and the flange 121a at the upper end of the peripheral wall of the central body 121, and by bolting the flange 121b at the lower end of the peripheral wall of the central body 121 and the flange 122a on the outer edge of the bottom base portion 122. Therefore, if these bolt connections are released, the saturation tank body 102 can be disassembled into three parts.

[0037] When the humidity control gas generator 101 is in operation, water is filled into the saturation tank body 102, leaving the area above where gas should exist untouched. When the humidity control gas generator 101 is used for dry cleaning of silicon wafers, the water filled into the saturation tank body 102 is ultrapure water. The area of ​​the saturation tank body 102 filled with water is hereinafter referred to as the water storage area W, and the area above it containing gas is hereinafter referred to as the gas area G.

[0038] The height difference between the upper cap portion 120 and the central body portion 21 of the saturated tank body 102 is selected to satisfy the following conditions: the water level is in the height region of approximately the upper half of the central body portion 121 and never reaches the upper cap portion 120, and therefore the inside of the upper cap portion 120 is always in the gas region G.

[0039] A gas heater (heating unit) 105 for heating the gas in the gas region G is provided on the outer surface of the peripheral wall of the upper cap portion 120 of the saturated tank body 102. The upper cap portion 120 may have most of its outer surface covered by the gas heater 105.

[0040] A water heater 106 for heating the water in the reservoir W is positioned at the lower part of the interior of the saturated tank body 102, for example, at a height close to the bottom base portion 122. The heater may also be positioned on the outer surface of the wall of the saturated tank body 102, for example, the peripheral wall of the central body portion 121. Instead of the water heater 106, a water heater / cooler capable of heating and cooling the water, such as a heat pump utilizing the Peltier effect, may be attached in close contact with the outer surface of the wall of the saturated tank body 102.

[0041] A gas introduction passage 122b is formed within the wall of the bottom base portion 122 of the saturated tank body 102. The gas inlet 122c of the gas introduction passage 122b opens to the outer surface of the wall of the bottom base portion 122, and its gas outlet 122d opens toward the water storage area W of the wall of the bottom base portion 122. A porous body 107 is provided at the gas outlet 122d to convert the gas released from there into fine bubbles B into fine bubbles B.

[0042] A reserve water tank 103 is positioned outside the saturation tank body 102. The reserve water tank 103 has an upper part 130 and a lower part 131. The two parts are joined together such that the upper surface of the wall of the lower part 131 is in close contact with the lower end surface of the peripheral wall of the upper part 130, thereby forming the reserve water tank 103. The connection between these two parts is made by bolting the flange 130a at the lower end of the peripheral wall of the upper part 130 and the flange 131a on the outer edge side of the lower part 131. Therefore, the reserve water tank 103 can be disassembled into two parts by releasing these bolts.

[0043] The main material of the reserve water tank 103 is a highly durable metal, such as stainless steel.

[0044] An opening 130b is provided in the wall of the upper part 130 of the reserve water tank 103, for example, the top wall, and an opening 120b is also provided in the upper wall of the upper cap part 120 of the saturation tank body 102, and both openings 130b and 120b are connected by a gas communication pipe 108. In addition, an opening 131b is provided in the wall of the lower part 31 of the reserve water tank 103, for example, the bottom wall, and an opening 121c is also provided in the lower wall of the saturation tank body 102, for example, the lower peripheral wall of the central body part 121, and both openings 131b and 121c are connected by a water communication pipe 109.

[0045] The height of the reserve water tank 103 and its position relative to the saturation tank body 102 are selected to satisfy the following condition: its water level is within the internal height of the reserve water tank 103. Therefore, the water level inside the reserve water tank 103 is equal to the water level inside the saturation tank body 102, and similarly, a gas area G and a water storage area W exist inside the reserve water tank 103.

[0046] Thus, the interior of the reserve water tank 103 and the interior of the saturation tank body 102 are connected in both the gas area G and the water storage area W. Therefore, if the amount of water consumed in the saturation tank body 102 decreases, water is replenished from the reserve water tank 103 into the saturation tank body 102.

[0047] Another opening 130c is provided in the wall of the reserve water tank 103, to which the water supply pipe 110 is connected. If the water level in the saturation tank drops too low, water can be supplied to the reserve water tank 103 from the water supply pipe 110, either manually or automatically.

[0048] A gas reflux device 104 is placed inside the saturated tank body 102. The gas reflux device 104 comprises a gas return pipe 140, a gas delivery pipe 141, a drain pipe 142, and a trap box 143. The main material of the gas reflux device 104 is a highly durable metal, such as stainless steel.

[0049] The gas return pipe 140 has a nearly straight shape and is positioned vertically, for example, nearly vertically, with a gas inlet 140a at its upper end and a gas outlet 140b at its lower end. The gas inlet 140a of the gas return pipe 140 is located in the upper part of the gas area G within the saturation tank body 102, for example, near the top wall of the upper cap portion 120. The gas return pipe 140 passes from the gas inlet 140a in the gas area G through the water reservoir W to the gas outlet 140b inside the trap box 143.

[0050] The gas outlet 140b of the gas return pipe 140 is positioned lower than the highest point inside the trap box 143, for example, at a predetermined distance below the top wall of the trap box 143. The portion of the gas return pipe 140 near the gas outlet 140b curves at an angle to the vertical to reach the gas outlet 140b (see Figure 4). The orientation of the gas outlet 140b in the horizontal plane is different from the direction in which the gas inlet 141a of the gas delivery pipe 141 is located in the horizontal plane as viewed from the gas outlet 140b. Therefore, the gas flow blown out from the gas outlet 140b is directed in a different direction from the gas inlet 141a of the gas delivery pipe 41.

[0051] Furthermore, as shown in Figure 4, the front end surface 140c of the gas outlet 140b of the gas return pipe 140 is approximately circular, but at least a portion of its circular end surface is cut at an angle so as to contact the inner surface of the trap box 143. More specifically, the gas outlet 140b is positioned near the inner surface of the inner wall of the trap box 143, facing the inner surface of that wall, and a portion of the gas outlet 140b (for example, the furthest forward-extending tip of the gas outlet 140b) is in contact with the inner surface of the trap box 143.

[0052] With the above configuration, the problem of condensed water entering the gas inlet 140 of the gas delivery pipe 141 when it exits the gas outlet 140b and falls into the trap box 143 is reduced, as the water is carried by the gas flow blown out from the gas outlet 140b.

[0053] Furthermore, as shown in Figure 4, the central axis of the gas return pipe 140 at the gas outlet 140b of the gas return pipe 140 is inclined circumferentially with respect to the inner surface of the inner wall of the trap box 143.

[0054] A gas temperature sensor 111 is positioned at approximately the same height as the gas inlet 140a of the gas return pipe 140 within the gas area G to detect the gas temperature. The detection signal from this gas temperature sensor 111 is input to a control device (not shown) located outside the saturation tank body 102 and used for gas temperature control by a gas heater.

[0055] The gas delivery pipe 141 has, for example, an inverted L-shape, is arranged vertically, has a gas inlet 141a at the lower end of its nearly vertically standing portion, and a gas outlet 141b at the upper end of its nearly horizontally positioned portion.

[0056] The gas inlet 141a of the gas delivery pipe 141 is positioned higher than the gas outlet 140b of the gas return pipe 40 inside the trap box 143. The gas delivery pipe 141 extends upward from the gas inlet 141a, exits the trap box 143, enters the reservoir W, changes direction almost horizontally there, and then penetrates the wall of the central body 121 below the water level to reach the gas outlet 141b located outside the saturation tank body 102.

[0057] A water temperature sensor 112 is positioned at approximately the same height as the gas outlet pipe 141 within the water storage area W to detect the water temperature. The detection signal from this water temperature sensor 112 is input to a control device (not shown) located outside the saturation tank body 102 and used to control the water temperature using a water heater 106.

[0058] The drain pipe 142 has a water inlet 142a located near the bottom of the trap box 143 and a water outlet 142b located outside the saturation tank body 102. The drain pipe 142 extends from the water inlet 142a, exits the trap box 143, penetrates the wall of the central body 121, and exits the saturation tank body 102.

[0059] The trap box 143 is located within the water storage area W in the central body 121 of the saturated tank body 102, at a height higher than the aforementioned water heater 106.

[0060] As shown in Figure 4, the horizontal cross-sectional area of ​​the trap box 143 is larger than the horizontal cross-sectional area of ​​the gas return pipe 140, and the gas outlet 140b of the gas return pipe 140 and the gas inlet 140a of the gas delivery pipe 141 are positioned at a predetermined distance apart horizontally within the trap box 143. Furthermore, as mentioned above, within the trap box 143, the gas outlet 140b of the gas return pipe 140 faces a different direction than the direction in which the gas inlet 140a of the gas delivery pipe 141 is viewed from the gas outlet 140b. In addition, the trap box 143 has a height dimension greater than a predetermined value, and within the trap box 143, the gas outlet 140b of the gas return pipe 140 is positioned lower than the gas inlet 140a of the gas delivery pipe 141. Moreover, within the trap box 143, the gas inlet 141a of the gas delivery pipe 141 is positioned at a predetermined height above the bottom surface of the trap box 143 where water will accumulate.

[0061] The entire inner surface of the saturated tank body 102 that is in contact with the gas area G and the water storage area W is coated with a layer of a corrosion-resistant material, such as fluororesin (e.g., Teflon®), which has higher durability against pure water than the main material of the saturated tank body 102, such as stainless steel. As shown in Figure 3, the contact surfaces between the upper cap portion 120 and the central body portion 121 of the saturated tank body 102 (the opposing contact surfaces of the flanges 120a and 121a on both sides), and the contact surfaces between the central body portion 121 and the bottom base portion 122 (the contact surfaces of the flanges on both sides) are also coated with a layer of the same corrosion-resistant material.

[0062] The inner surface of the reserve water tank 103 that is in contact with the gas area G and the water storage area W is also coated with a layer of the same corrosion-resistant material. The contact surfaces of the upper part 130 and the lower part 131 of the reserve water tank 103 (the opposing contact surfaces of the flanges 130a and 131a) are also coated with a layer of the same corrosion-resistant material.

[0063] The outer surfaces of the gas recirculation device 104 that are in contact with the gas area G and the water reservoir area W (for example, the outer surface of the trap box 43) are also coated with a layer of the same corrosion-resistant material.

[0064] The humidity control gas generator 101 of this embodiment, as described above, is expected to be superior to conventional humidity control gas generators in terms of water resistance, ease of maintenance, cleanliness of the output gas, and controllability of the humidity of the output gas.

[0065] The humidity control gas generator 101 of this embodiment can be suitably used in the dry cleaning process of semiconductor manufacturing processes, and can also be suitably used in other semiconductor manufacturing processes, such as humidity control of the atmosphere inside a stepper in the exposure process, and humidity control of the atmosphere in a coating process using a spin coater, etc.

[0066] Figure 5 shows a modified example of the humidity control gas generator 101. In this modified example, a water stirring device 150 is added to the saturated tank body 102, which has the same configuration as shown in Figure 2. The water stirring device 150 stirs the water in the saturated tank body 102 by using a pump to draw water from the upper part of the saturated tank body 102 and returning it to the lower part of the saturated tank body 102. This makes the temperature of the water in the saturated tank body 102 more uniform overall. Incidentally, when the flow rate of gas supplied from the gas introduction passage 122b into the saturated tank body 102 is sufficiently high, the bubbles B will agitate the water in the saturated tank body 102 to some extent, so it is not always necessary to drive the water agitator. However, when the supply gas flow rate is less than a certain amount, the agitation effect of bubbles B on the water will be minimal, so it is preferable to agitate the water in the saturated tank body 102 with the water agitator to control the water temperature and, consequently, the output gas temperature to the target value.

[0067] It should be noted that the present invention is not limited to the embodiments described above, and various modifications are included. For example, the embodiments described above are described in detail to make the present invention easier to understand, and are not necessarily limited to those having all the configurations described. Furthermore, it is possible to replace parts of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add configurations from other embodiments to the configuration of one embodiment. In addition, it is possible to add, delete, or replace parts of the configuration of each embodiment with other configurations.

[0068] Furthermore, the dimensions, shapes, etc., of each component shown in the illustration are not necessarily accurately represented, and may have been modified as appropriate to emphasize the features of this embodiment. [Explanation of Symbols]

[0069] 1…Temperature and humidity control device 2…Container 3…Bottom wall of the tank 31…Bottom wall 32…Top wall 33…Side wall 4…Inner tank 41…Bottom plate 42…Side plate 43…Upper opening 5…Temperature control and circulation device 55…Supply port 56…Outlet 6…Gas inlet pipe 61…Intermediate section 63…Gas outlet 8…Liquid level adjustment device C…Chamber S…Space S1…Inner space S2…Outer space 101...Humidity control gas generator 102...Saturation tank body 103...Reserve water tank 104...Gas recirculation device 140...Gas return pipe 140a...Gas inlet 140b...Gas outlet 141...Gas delivery pipe 141a...Gas inlet 141b...Gas outlet 142...Drain pipe 142a...Water inlet 142b...Water outlet 143...Trap box G...Gas area W...Water storage area

Claims

1. A container defining the chamber, A water tank having a bottom wall, a top wall, and side walls surrounding the container, wherein the container is positioned at a distance from the bottom wall, the top wall, and the side walls, and a heat transfer liquid is contained in the space between the container and the bottom wall, the top wall, and the side walls so that the entire outer surface of the container can be submerged in the liquid, A temperature control device for controlling the temperature of the heat transfer fluid in the water tank, The heat transfer fluid, whose temperature is controlled by the temperature control device, is supplied into the water tank, and the heat transfer fluid in the water tank is returned to the temperature control device. A circulation device that circulates the heat transfer fluid, The container comprises a gas inlet pipe having a gas outlet that opens into the chamber, for introducing a humidity-controlled gas, whose humidity has been adjusted to a predetermined value, into the chamber of the container. Temperature and humidity control device.

2. The tank further comprises an inner tank that is placed inside the tank and houses the container. The inner water tank has a bottom plate, side plates and an upper opening, the container is positioned at a distance from the bottom plate and side plates, and the space is divided into an inner space inside the inner water tank and an outer space outside the inner water tank. The heat transfer fluid supplied into the tank is configured to flow from the inner space to the outer space through the upper opening of the inner tank, with the heat transfer fluid supply port from the circulation device located at the bottom of the inner space within the inner tank, and the heat transfer fluid outlet from the tank located at the bottom of the outer space within the tank. The temperature and humidity control device according to feature 1.

3. The gas introduction pipe extends from the container through the space to the outside of the water tank. The portion of the gas introduction pipe located within the space forms a heat exchanger for heat exchange between the humidifying gas flowing within the portion and the heat transfer fluid within the space. The temperature and humidity control device according to feature 1.

4. The system further comprises a liquid level adjustment device capable of adjusting the height of the heat transfer fluid in the internal water tank. The temperature and humidity control device according to claim 2.

5. The aforementioned internal water tank is circular, rectangular, or elliptical in plan view. Multiple supply ports for the heat transfer fluid from the circulation device are arranged at the bottom of the internal space within the internal water tank, and these supply ports are positioned symmetrically with respect to the center of the internal water tank in a plan view. The temperature and humidity control device according to claim 2.

6. The capacity of the container is 500 mL or more. The temperature and humidity control device according to feature 1.

7. A temperature and humidity control device according to any one of claims 1 to 6, A combination of the temperature and humidity control device and a humidity control gas generator that supplies humidity control gas, The humidity control gas generator is, A saturated tank body having a gas area and a water storage area located below the gas area, A gas reflux device arranged inside the saturation tank body and It has, The gas recirculation device comprises a gas return pipe, a gas outlet pipe, a drain pipe, and a trap box. The gas return pipe extends from the gas inlet located within the gas area, through the water storage area, to the gas outlet located within the trap box. The gas delivery pipe extends from a gas inlet located inside the trap box to a gas outlet located outside the saturation tank body. The drain pipe extends from the water inlet located inside the trap box to the water outlet located outside the saturation tank body. A combination of a temperature and humidity control device and a humidity control gas generator, characterized by the above.

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