Fluid-driven actuator, method for manufacturing the same, and actuator system

Abstract

To provide a fluid driving type actuator which enables strain sensing and is excellent in durability against deformation.SOLUTION: A fluid driving type actuator of the invention includes: a tube member 10 which deforms when a fluid flows thereinto; and an elastic conductive layer 39 laminated on a part of or an entire part of at least one of an inner surface and an outer surface of the tube member 10. The fluid driving type actuator measures change of electric characteristics through the elastic conductive layer 30 to detect a deformation state of the tube member 10.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a fluid-driven actuator, a method for manufacturing the same, and an actuator system.

Background Art

[0002] Various developments have been made regarding the sensing technology of actuators. As this type of technology, for example, the technology described in Patent Document 1 is known. Patent Document 1 describes a fluid-driven actuator including a tubular elastic body composed of a first elastic sheet and a second elastic sheet having electrical conductivity, and two electrodes attached to the outer surface of the first elastic sheet (paragraph 0080 of Patent Document 1, FIG. 6, etc.).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, as a result of the study by the present inventor, it has been found that there is room for improvement in terms of deformation durability in the fluid-driven actuator described in Patent Document 1 above.

Means for Solving the Problems

[0005] As a result of further study by the present inventor, in a fluid-driven actuator, by forming a stretchable conductive layer on the surface of the tube member, it is possible to sense strain regarding the deformed state of the tube member through the stretchable conductive layer, and it has been found that the deformation durability when repeatedly deformed can be improved, leading to the completion of the present invention.

[0006] According to the present invention, A tube member that deforms when fluid flows into it, The tube member comprises a stretchable conductive layer laminated on at least one of its inner and outer surfaces, either partially or entirely. By measuring the change in electrical properties through the aforementioned stretchable conductive layer, the deformation state of the tube member can be detected. A fluid-driven actuator is provided.

[0007] Furthermore, according to the present invention, The above-mentioned fluid-driven actuator, A measuring unit for measuring the change in the aforementioned electrical characteristics, The system includes a fluid pressure control unit that detects the deformation state of the tube member based on the measured change in electrical characteristics and adjusts the pressure of the fluid flowing into the tube member according to the deformation state of the tube member. An actuator system is provided.

[0008] Furthermore, according to the present invention, A method for manufacturing a fluid-driven actuator, comprising a tube member that deforms when fluid is introduced into it, and an expandable conductive layer laminated on the surface of the tube member. A step of forming the tube member using an insulating elastomer, A method for manufacturing a fluid-driven actuator is provided, which includes the step of forming the stretchable conductive layer on at least one of the inner surface and outer surface of the tube member, either partially or entirely, using a conductive paste. [Effects of the Invention]

[0009] According to the present invention, a fluid-driven actuator capable of strain sensing and having excellent deformation durability, a method for manufacturing the same, and an actuator system are provided. [Brief explanation of the drawing]

[0010] [Figure 1] This figure shows an example of the configuration of a fluid-driven actuator according to this embodiment. [Figure 2] (a) is a cross-sectional view of AA in Figure 1, (b) is a cross-sectional view of BB in Figure 1, and (c) is a cross-sectional view of CC in Figure 1. [Figure 3] This figure shows a modified configuration of the fluid-driven actuator of this embodiment. [Figure 4] This figure shows the relationship between the applied pressure and the rate of change in the outer circumference of the tube during the expansion tests in Examples 1 and 2. [Figure 5] This figure shows the relationship between the applied pressure and the resistance value of the stretchable conductive layer in the expansion tests of Examples 1 and 2. [Modes for carrying out the invention]

[0011] Embodiments of the present invention will be described below with reference to the drawings. In all drawings, similar components are denoted by the same reference numerals, and their descriptions are omitted as appropriate. Also, the drawings are schematic diagrams and do not correspond to the actual dimensional ratios.

[0012] This document outlines the fluid-driven actuator of this embodiment.

[0013] The fluid-driven actuator of this embodiment comprises a tube member that deforms when fluid flows into it, and a stretchable conductive layer laminated on at least one of the inner and outer surfaces of the tube member, either partially or entirely. The deformation state of the tube member can be detected by measuring changes in electrical properties via the stretchable conductive layer.

[0014] A fluid-driven actuator is a drive device that uses a fluid, such as a gas or liquid, to expand or contract a tube component, converting this into mechanical motion. Specific examples of fluids include gases such as air and nitrogen, and liquids such as water and oil.

[0015] Fluid-driven actuators can be used in a wide variety of applications, including artificial muscles used in daily life and medical settings such as nursing care, welfare, medical care, and sports; artificial muscles that support work in workplaces such as agriculture, manufacturing, and construction; and drive devices for robotic muscles and joint structures.

[0016] According to this embodiment, a fluid-driven actuator that is capable of strain sensing and has excellent deformation durability can be realized.

[0017] The components of the fluid-driven actuator in this embodiment will be described in detail below.

[0018] Figures 1 and 2 show an example of the configuration of a fluid-driven actuator (actuator 100). The actuator 100 in Figure 1 comprises at least a tube member 10 and an expandable conductive layer 30.

[0019] The tube member 10 is composed of a cylindrical elastic body that expands and contracts in response to fluid pressure. The tube member 10 is capable of extending and contracting in the axial direction, and / or expanding or bending in at least one radial direction.

[0020] The actuator 100 may have a cap 20 on at least one end of the tube member 10. The cap 20 is composed of a lid member provided at the axial end of the tube member 10. The cap 20 may have a hole 22 as shown in Figure 2(b). Fluid can be injected into or discharged from the space 12 of the tube member 10 through the hole 22. When fluid is injected into the space 12, the tube member 10 expands radially and contracts axially (Figures 2(b) and 2(c)). That is, the actuator 100 generates a contraction force in the axial direction and an expansion force in the radial direction of the tube member 10.

[0021] The stretchable conductive layer 30 functions as a stretchable sensor that detects deformation such as stretching or bending of the tube member 10.

[0022] The stretchable conductive layer 30 is laminated on at least one of the inner and outer surfaces of the tube member 10, either partially or entirely.

[0023] In the actuator 100, the state in which the tube member 10 and the stretchable conductive layer 30 are laminated may be a state in which their surfaces are in surface contact with each other and are chemically and / or physically bonded and tightly adhered. Therefore, even during stretching or repeated stretching, the risk of damage such as peeling of the stretchable conductive layer 30 from the surface of the tube member 10 can be suppressed. This makes it possible to realize an actuator 100 with excellent deformation durability.

[0024] Such a stretchable conductive layer 30 is configured to cover at least a portion of the surface of the tube member 10 in its expanded and / or contracted state. Covering means covering at least a portion or all of the surface.

[0025] The stretchable conductive layer 30 deforms in accordance with the deformation of the tube member 10, causing its electrical properties to change. By measuring this change in electrical properties, it is possible to detect the deformation state of the tube member 10. In other words, the stretchable conductive layer 30 functions as a strain sensor for the tube member 10, utilizing the pressure resistance effect.

[0026] Here, we will explain an example of measuring the change in the resistance value of the stretchable conductive layer 30. For example, as shown in Figure 1, the stretchable conductive layer 30 may have a ring structure that extends in the circumferential direction along the axis on the outer surface of the tube member 10. As shown in Figure 2(a), in a cross-sectional view in the axial direction, this stretchable conductive layer 30 has portions that are not continuous in the circumferential direction and are spaced apart. Then, as shown in Figures 1(a) to 1(b), when the tube member 10 contracts in the axial direction and expands in the radial direction, the stretchable conductive layer 30 becomes stretched in the circumferential direction. At this time, the change in the resistance value of the stretchable conductive layer 30 before and after the deformation of the tube member 10 can be measured. For example, a wiring (not shown) is connected to the end of the stretchable conductive layer 30, and its resistance value is measured through the wiring.

[0027] Thus, as shown in Figures 1(a) and 1(b), when fluid flows into the tube member 10, it expands radially and contracts axially. In response, the expandable conductive layer 30 deforms, allowing the expansion state of the tube member 10 to be detected via the expandable conductive layer 30.

[0028] The stretchable conductive layer 30 may be configured to be formed on the inner surface of the tube member 10. This allows for stable measurement of changes in the electrical properties of the stretchable conductive layer 30, even when there is a risk of contact between the outer surface of the tube member 10 and the sleeve or other components, because the stretchable conductive layer 30 is located inside the tube member 10. Furthermore, forming the stretchable conductive layer 30 inside the tube member 10 suppresses a decrease in the ease of expansion of the tube member 10 compared to when the stretchable conductive layer 30 is located on the outside.

[0029] The tube member 10 is made of an insulating elastomer, and / or the stretchable conductive layer 30 may be made of a conductive elastomer.

[0030] This insulating elastomer and conductive elastomer are each composed of an elastomer with elasticity. Since the elastic conductive layer 30 containing the conductive elastomer is laminated on the tube member 10 containing the insulating elastomer, it is possible to improve durability even when stretched.

[0031] The tube member 10 and the stretchable conductive layer 30 may be configured to contain the same type of elastomer, such as the same type of silicone rubber. This ensures that even if the elastomer of the tube member 10 undergoes plastic deformation due to repeated use, the stretchable conductive layer 30 will also undergo plastic deformation to a similar extent. Therefore, it becomes possible to detect the deformation state of the tube member 10, including the plastic deformation.

[0032] By configuring the tube member 10 and the stretchable conductive layer 30 to contain the same type of silicone rubber, the adhesion between them can be improved. Therefore, even when the tube member 10 deforms, peeling and displacement of the stretchable conductive layer 30 can be prevented. This configuration is preferable when the stretchable conductive layer 30 is formed on the inner surface of the tube member 10.

[0033] A modified example of actuator 100 will be described.

[0034] The tube member 10 may be a cylindrical structure extending in the axial direction, or it may have a curved structure in which the whole or a part of it is curved.

[0035] The tube member 10 may have one or more spaces 12 inside. Specifically, the tube member 10 may have multiple spaces 12 divided by one or more rings, or by the inner surfaces of the silicone rubber layers adhering to each other. These multiple spaces 12 are arranged to be aligned in the axial direction of the tube member 10.

[0036] The tube member 10 may be a single layer or composed of two or more layers in its radial cross-section. The layers may consist of one or two or more types of silicone rubber layers. For example, there may be a fiber layer between two silicone rubber layers. Furthermore, the tube member 10 may have at least a portion of two or more silicone rubber layers or layers other than silicone rubber with different expansion and contraction rates.

[0037] The stretchable conductive layer 30 may be formed only on the inner surface as shown in Figure 1, but it may also be formed only on the outer surface, or it may be formed so as to sandwich the tube member 10 on both the inner and outer surfaces.

[0038] A stretchable cover layer may be formed on the stretchable conductive layer 30. This can improve the durability of the stretchable conductive layer 30. The stretchable cover layer can prevent the stretchable conductive layer 30 on the inner surface from coming into contact with degradation components contained in the fluid. On the other hand, the stretchable cover layer can prevent the stretchable conductive layer 30 on the outer surface from coming into contact with the sleeve or other components.

[0039] The stretchable cover layer may be made of an insulating elastomer, or it may be made of the same material as the tube member 10.

[0040] Furthermore, an example of the stretchable conductive layer 30 may be a strain sensor of the tube member 10 that utilizes capacitance. In this case, the strain sensor is composed of a stretchable capacitor. In a stretchable capacitor, a tube member 10 made of an insulating elastomer is used as a capacitance film made of a stretchable conductive material, and the stretchable conductive layer 30 can be used as two stretchable electrodes that sandwich the capacitance film.

[0041] The change in capacitance of the tube member 10 can be measured via the stretchable conductive layers 30 formed on the inner and outer surfaces of the tube member 10, respectively, sandwiching the tube member 10. Similar to how the capacitance of a capacitor changes depending on the thickness of its insulating film, the thickness of the tube member 10 changes according to its radial expansion state, allowing this thickness change to be measured as a change in capacitance. The deformation state of the tube member 10 can then be determined from its thickness.

[0042] In this embodiment, the change in electrical properties measured through the stretchable conductive layer 30 can be at least one of the following: a change in the resistance value of the stretchable conductive layer 30, and a change in the capacitance of the tube member 10 sandwiched between the stretchable conductive layers 30.

[0043] As shown in Figure 1, the stretchable conductive layer 30 may have a ring structure extending in the circumferential direction, a line structure extending in the axial direction, or a tube structure extending in both the circumferential and axial directions.

[0044] The ring structure may be annular or non-annular. If the stretchable conductive layer 30 has a ring structure, it may be provided at the axial end of the tube member 10 as shown in Figure 1(a), or at the central part. The ring structure may be O-shaped or C-shaped in cross-sectional view with respect to the axial direction.

[0045] The stretchable conductive layer 30 may have a line shape, but it can also have various other shapes, and can be formed in various wiring patterns such as linear or wavy. As will be explained in detail later, the stretchable conductive layer 30 is formed by coating means such as printing using a conductive paste, so it is possible to realize patterns of desired shapes and wiring thicknesses.

[0046] The stretchable conductive layer 30 may have a tubular structure with a space 12, as shown in Figure 3(a). Figure 3(b) is a cross-sectional view of Figure 3(a) in a DD cross-sectional view. The tubular, stretchable conductive layer 30 is configured to cover at least part or all of the inner surface of the tube member 10. This improves the mechanical strength of the actuator 100 itself.

[0047] The cap 20 may be installed on the inner circumferential surface of the tube member 10, or it may be installed on the outer circumferential surface of the tube member 10. The cap 20 may have a connecting mechanism for connecting to other mechanisms or members.

[0048] Furthermore, the actuator 100 may have a sleeve on the outer circumferential surface of the tube member 10. The sleeve is made of a cylindrical member and covers at least a portion of the outer surface of the outer circumferential surface of the tube member 10. Such a sleeve may have a mesh-like reinforcing structure made of fibers. The actuator 100, which has a tube member 10 and a sleeve, becomes a McKibben-type artificial muscle.

[0049] In one example of the actuator 100 of this embodiment, the tube member 10 is made of an insulating elastomer, and the stretchable conductive layer 30 is made of a conductive elastomer. These elastomers will be described below.

[0050] Insulating elastomers can include, for example, silicone rubber, urethane rubber, fluororubber, nitrile rubber, acrylic rubber, styrene rubber, chloroprene rubber, ethylene propylene rubber, and the like. Among these, the elastomer includes one or more thermosetting elastomers (elastomer materials) selected from the group consisting of silicone rubber, urethane rubber, and fluororubber. An insulating elastomer may consist of an elastomer material alone, or it may be composed of an elastomer material and a non-conductive filler. An example of an insulating elastomer includes silicone rubber, preferably silicone rubber and a non-conductive filler. Among elastomers, silicone rubber is chemically stable and also has excellent mechanical strength. Among these, from a hygienic standpoint, it is preferable to use silicone rubber, which has high biocompatibility, as the elastomer material.

[0051] Conductive elastomers can include, for example, silicone rubber, urethane rubber, fluororubber, nitrile rubber, acrylic rubber, styrene rubber, chloroprene rubber, ethylene propylene rubber, and the like. Among these, the elastomer includes one or more thermosetting elastomers (elastomer materials) selected from the group consisting of silicone rubber, urethane rubber, and fluororubber, and a conductive filler. A preferred example of a conductive elastomer includes silicone rubber and a conductive filler. This enhances the elasticity and conductivity of the conductive elastomer.

[0052] At least one, preferably both, of the insulating elastomer and the conductive elastomer may contain a non-conductive filler. Known materials can be used as the non-conductive filler, such as silica particles, silicone rubber particles, or talc. Among these, silica particles may also be included.

[0053] The conductive filler may include, for example, one or more selected from the group consisting of powdered or fibrous metal fillers, carbon fillers, metal oxide fillers, and metal plating fillers. Among these, carbon-based fillers such as carbon or metal-based fillers such as silver powder may be used as the conductive filler.

[0054] The conductive elastomer may further contain non-conductive fillers in addition to the conductive fillers. This can enhance the mechanical properties of the conductive elastomer.

[0055] The conductive elastomer of the stretchable conductive layer 30, the insulating elastomer of the tube member 10, and the insulating elastomer of the stretchable cover layer may be configured to include at least two or all of the same elastomer material.

[0056] In this specification, "containing the same elastomer material" means that each contains at least one of the same type of elastomer material from among the types of thermosetting elastomers exemplified above. Furthermore, if the same silicone rubber is included, this silicone rubber may be composed of a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane.

[0057] The insulating elastomer may be composed of a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane. The conductive elastomer may be composed of a conductive filler and a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane.

[0058] The components of the silicone rubber-based curable composition are described in detail below.

[0059] In this specification, "containing the same silicone rubber" means that the silicone rubber-based curable composition contains at least the same type of vinyl group-containing linear organopolysiloxane, and may further contain one or more selected from the group consisting of the same type of crosslinking agent, the same type of nonconductive filler, the same type of silane coupling agent, and the same type of catalyst.

[0060] The insulating elastomer may be composed of a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane. The conductive elastomer may be composed of a conductive filler and a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane.

[0061] A linear organopolysiloxane containing the same type of vinyl group is defined as one that contains at least the same vinyl group as a functional group and has a linear structure, even if the amount of vinyl groups in the molecule, the molecular weight distribution, or the amount added differs.

[0062] Similar crosslinking agents only need to have a common structure, such as a linear or branched structure, and may have different molecular weight distributions and functional groups, as well as different amounts added.

[0063] Non-conductive fillers of the same type only need to have at least common constituent materials, and may differ in particle size, specific surface area, surface treatment agent, or the amount of such agent added.

[0064] Similar silane coupling agents only need to have at least one common functional group; other functional groups in the molecule and the amount added may differ.

[0065] Catalysts of the same type only need to have at least common constituent materials; they may contain different compositions, and the amounts of these compositions added may differ.

[0066] A silicone rubber-based curable composition comprising the same silicone rubber may further contain one or more different types selected from the group consisting of vinyl group-containing linear organopolysiloxanes, crosslinking agents, nonconductive fillers, silane coupling agents, and catalysts.

[0067] The silicone rubber-based curable composition of this embodiment may contain a vinyl group-containing organopolysiloxane (A). The vinyl group-containing organopolysiloxane (A) is a polymer that forms the main component of the silicone rubber-based curable composition of this embodiment.

[0068] The vinyl group-containing organopolysiloxane (A) may include a vinyl group-containing linear organopolysiloxane (A1) having a linear structure.

[0069] The above vinyl group-containing linear organopolysiloxane (A1) has a linear structure and contains vinyl groups, which serve as crosslinking points during curing.

[0070] The vinyl group content of the vinyl group-containing linear organopolysiloxane (A1) is not particularly limited, but it is preferable that it has two or more vinyl groups in the molecule and that the content is 15 mol% or less. This optimizes the amount of vinyl groups in the vinyl group-containing linear organopolysiloxane (A1) and ensures the formation of a network with the components described later.

[0071] In this specification, the vinyl group content refers to the mole percent of vinyl group-containing siloxane units when the total number of units constituting the vinyl group-containing linear organopolysiloxane (A1) is considered to be 100 mol%. However, it is assumed that there is one vinyl group per vinyl group-containing siloxane unit.

[0072] Furthermore, the degree of polymerization of the vinyl group-containing linear organopolysiloxane (A1) is not particularly limited, but is preferably in the range of 1000 to 10000, and more preferably in the range of 2000 to 5000. The degree of polymerization can be determined, for example, by the number-average degree of polymerization (or number-average molecular weight) in terms of polystyrene in GPC (gel permeation chromatography) using chloroform as the developing solvent.

[0073] In this specification, "~" indicates that the upper and lower limits are included unless otherwise specified.

[0074] Furthermore, the specific gravity of the vinyl group-containing linear organopolysiloxane (A1) is not particularly limited, but is preferably in the range of 0.9 to 1.1.

[0075] By using a vinyl group-containing linear organopolysiloxane (A1) having a degree of polymerization and specific gravity within the above-mentioned range, the heat resistance, flame retardancy, and chemical stability of the resulting silicone rubber can be improved.

[0076] The vinyl group-containing linear organopolysiloxane (A1) is preferably one having a structure represented by the following formula (1).

[0077] [ka]

[0078] In formula (1), R 1 The group is a substituted or unsubstituted alkyl group, alkenyl group, aryl group, or a hydrocarbon group having 1 to 10 carbon atoms. Examples of alkyl groups having 1 to 10 carbon atoms include methyl, ethyl, and propyl groups, with methyl being preferred. Examples of alkenyl groups having 1 to 10 carbon atoms include vinyl, allyl, and butenyl groups, with vinyl being preferred. Examples of aryl groups having 1 to 10 carbon atoms include phenyl.

[0079] Also, R 2 is a substituted or unsubstituted alkyl group, alkenyl group, aryl group having 1 to 10 carbon atoms, or a hydrocarbon group combining these. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, etc. Among them, a methyl group is preferable. Examples of the alkenyl group having 1 to 10 carbon atoms include a vinyl group, an allyl group, a butenyl group. Examples of the aryl group having 1 to 10 carbon atoms include a phenyl group.

[0080] Also, R 3 is a substituted or unsubstituted alkyl group, aryl group having 1 to 8 carbon atoms, or a hydrocarbon group combining these. Examples of the alkyl group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group, etc. Among them, a methyl group is preferable. Examples of the aryl group having 1 to 8 carbon atoms include a phenyl group.

[0081] Furthermore, examples of the substituents of R 1 and R 2 in formula (1) include a methyl group, a vinyl group, etc. Examples of the substituents of R 3 include a methyl group, etc.

[0082] In addition, in formula (1), a plurality of R 1 are independent of each other, and may be different from each other or the same. Furthermore, the same applies to R 2 , and R 3 .

[0083] Furthermore, m and n are the number of repeating units constituting the vinyl group-containing linear organopolysiloxane (A1) represented by formula (1). m is an integer of 0 to 2000, and n is an integer of 1000 to 10000. m is preferably 0 to 1000, and n is preferably 2000 to 5000.

[0084] Also, specific structures of the vinyl group-containing linear organopolysiloxane (A1) represented by formula (1) include, for example, those represented by the following formula (1-1).

[0085] [ka]

[0086] In formula (1-1), R 1 and R 2 Each of these is independently either a methyl group or a vinyl group, and at least one of them is a vinyl group.

[0087] The vinyl group-containing linear organopolysiloxane (A1) may include a first vinyl group-containing linear organopolysiloxane (A1-1) having two or more vinyl groups in the molecule and containing 0.4 mol% or less. The amount of vinyl groups in the first vinyl group-containing linear organopolysiloxane (A1-1) may be 0.1 mol% or less.

[0088] Furthermore, the vinyl group-containing linear organopolysiloxane (A1) may contain a first vinyl group-containing linear organopolysiloxane (A1-1) and a second vinyl group-containing linear organopolysiloxane (A1-2) having a vinyl group content of 0.5 to 15 mol%.

[0089] By combining a first vinyl group-containing linear organopolysiloxane (A1-1) and a second vinyl group-containing linear organopolysiloxane (A1-2) with a high vinyl group content, the vinyl groups can be unevenly distributed, allowing for more effective formation of crosslink density variations within the crosslinking network of the silicone rubber. As a result, the tear strength of the silicone rubber can be more effectively increased.

[0090] Specifically, it is preferable to use, for example, a first vinyl group-containing linear organopolysiloxane (A1-1) having two or more units in the molecule where R1 is a vinyl group and / or R2 is a vinyl group in the above formula (1-1), and containing 0.4 mol% or less of these units, and a second vinyl group-containing linear organopolysiloxane (A1-2) containing 0.5 to 15 mol% of units where R1 is a vinyl group and / or R2 is a vinyl group.

[0091] Furthermore, the first vinyl group-containing linear organopolysiloxane (A1-1) preferably has a vinyl group content of 0.01 to 0.2 mol%. Also, the second vinyl group-containing linear organopolysiloxane (A1-2) preferably has a vinyl group content of 0.8 to 12 mol%.

[0092] Furthermore, when a first vinyl group-containing linear organopolysiloxane (A1-1) and a second vinyl group-containing linear organopolysiloxane (A1-2) are combined, the ratio of (A1-1) to (A1-2) is not particularly limited, but for example, a weight ratio of (A1-1):(A1-2) of 50:50 to 95:5 is preferred, and a weight ratio of 80:20 to 90:10 is more preferred.

[0093] Furthermore, the first and second vinyl group-containing linear organopolysiloxanes (A1-1) and (A1-2) may be used individually or in combination of two or more types.

[0094] Furthermore, the vinyl group-containing organopolysiloxane (A) may also include a vinyl group-containing branched organopolysiloxane (A2) having a branched structure.

[0095] <<Organohydrogenpolysiloxane (B)>> The silicone rubber-based curable composition of this embodiment may contain organohydrogenpolysiloxane (B). Organohydrogenpolysiloxanes (B) are classified into linear organohydrogenpolysiloxanes (B1) having a linear structure and branched organohydrogenpolysiloxanes (B2) having a branched structure, and may include either one or both of these.

[0096] Linear organohydrogenpolysiloxane (B1) is a polymer having a linear structure and a structure in which hydrogen is directly bonded to Si (≡Si-H), and undergoes a hydrosilylation reaction with vinyl groups of vinyl group-containing organopolysiloxane (A), as well as vinyl groups of components blended into silicone rubber-based curable compositions, thereby crosslinking these components.

[0097] The molecular weight of the linear organohydrogenpolysiloxane (B1) is not particularly limited, but for example, it is preferable that the weight-average molecular weight is 20,000 or less, and more preferably 1,000 or more and 10,000 or less.

[0098] The weight-average molecular weight of linear organohydrogenpolysiloxane (B1) can be measured, for example, by converting it to polystyrene equivalent in GPC (gel permeation chromatography) using chloroform as the developing solvent.

[0099] Furthermore, it is preferable that the linear organohydrogenpolysiloxane (B1) does not typically have vinyl groups. This effectively prevents the crosslinking reaction from proceeding within the molecule of the linear organohydrogenpolysiloxane (B1).

[0100] As the linear organohydrogenpolysiloxane (B1) described above, one having the structure represented by the following formula (2) is preferably used.

[0101] [ka]

[0102] In formula (2), R4 The group is a substituted or unsubstituted alkyl group, alkenyl group, aryl group, hydrocarbon group, or hydride group having 1 to 10 carbon atoms. Examples of alkyl groups having 1 to 10 carbon atoms include methyl, ethyl, and propyl groups, with methyl being preferred. Examples of alkenyl groups having 1 to 10 carbon atoms include vinyl, allyl, and butenyl groups. An example of an aryl group having 1 to 10 carbon atoms is the phenyl group.

[0103] Also, R 5 The group is a substituted or unsubstituted alkyl group, alkenyl group, aryl group, hydrocarbon group, or hydride group having 1 to 10 carbon atoms. Examples of alkyl groups having 1 to 10 carbon atoms include methyl, ethyl, and propyl groups, with methyl being preferred. Examples of alkenyl groups having 1 to 10 carbon atoms include vinyl, allyl, and butenyl groups. An example of an aryl group having 1 to 10 carbon atoms is the phenyl group.

[0104] Note that in equation (2), multiple R 4 These are independent of each other, and may be different from each other or the same. 5 The same applies to multiple Rs. 4 and R 5 Of these, at least two are hydride groups.

[0105] Also, R 6 R is a substituted or unsubstituted alkyl group, aryl group, or hydrocarbon group having 1 to 8 carbon atoms. Examples of alkyl groups having 1 to 8 carbon atoms include methyl, ethyl, and propyl groups, with methyl being preferred. An example of an aryl group having 1 to 8 carbon atoms is the phenyl group. Multiple R 6 These are independent of each other, and may be different from each other or the same.

[0106] Note that R in equation (2) 4 ,R 5 ,R6 Examples of substituents include methyl groups and vinyl groups, and methyl groups are preferred from the viewpoint of preventing intramolecular crosslinking reactions.

[0107] Furthermore, m and n are the number of repeating units constituting the linear organohydrogenpolysiloxane (B1) represented by formula (2), where m is an integer from 2 to 150 and n is an integer from 2 to 150. Preferably, m is an integer from 2 to 100 and n is an integer from 2 to 100.

[0108] Furthermore, linear organohydrogenpolysiloxane (B1) may be used alone or in combination of two or more types.

[0109] The branched organohydrogenpolysiloxane (B2) has a branched structure, which allows it to form regions with high crosslink density, and it is a component that greatly contributes to the formation of a dense-sparse crosslink structure in the silicone rubber system. Also, similar to the linear organohydrogenpolysiloxane (B1) described above, it has a structure in which hydrogen is directly bonded to Si (≡Si-H), and it is a polymer that undergoes hydrosilylation reactions with the vinyl groups of vinyl group-containing organopolysiloxane (A) as well as the vinyl groups of components blended into the silicone rubber curable composition, thereby crosslinking these components.

[0110] Furthermore, the specific gravity of branched organohydrogenpolysiloxane (B2) is in the range of 0.9 to 0.95.

[0111] Furthermore, it is preferable that the branched organohydrogenpolysiloxane (B2) does not typically have vinyl groups. This effectively prevents the crosslinking reaction from proceeding within the branched organohydrogenpolysiloxane (B2) molecule.

[0112] Furthermore, the branched organohydrogenpolysiloxane (B2) is preferably the one shown in the following average composition formula (c).

[0113] Average composition formula (c) (Ha (R 7 ) 3-a SiO 1 / 2 ) m (SiO 4 / 2 ) n (In equation (c), R 7 H is a monovalent organic group, a is an integer in the range of 1 to 3, and m is H a (R 7 ) 3-a SiO 1 / 2 The number of units, n is SiO 4 / 2 (The number of units)

[0114] In equation (c), R 7 The group is a monovalent organic group, preferably a substituted or unsubstituted alkyl group, aryl group, or hydrocarbon group having 1 to 10 carbon atoms. Examples of alkyl groups having 1 to 10 carbon atoms include methyl, ethyl, and propyl groups, with methyl being preferred. An example of an aryl group having 1 to 10 carbon atoms is the phenyl group.

[0115] In formula (c), a is the number of hydride groups (hydrogen atoms directly bonded to Si), and is an integer in the range of 1 to 3, preferably 1.

[0116] Also, in equation (c), m is H a (R 7 ) 3-a SiO 1 / 2 The number of units, n is SiO 4 / 2 It is the number of units.

[0117] Branched organohydrogenpolysiloxane (B2) has a branched structure. Linear organohydrogenpolysiloxane (B1) and branched organohydrogenpolysiloxane (B2) differ in their structure, with the number of alkyl groups R attached to Si (R / Si) being 1 when the number of Si is taken as 1. For linear organohydrogenpolysiloxane (B1), the range is 1.8 to 2.1, while for branched organohydrogenpolysiloxane (B2), it is 0.8 to 1.7.

[0118] Furthermore, because branched organohydrogenpolysiloxane (B2) has a branched structure, the amount of residue when heated to 1000°C at a heating rate of 10°C / min under a nitrogen atmosphere is 5% or more. In contrast, because linear organohydrogenpolysiloxane (B1) is linear, the amount of residue after heating under the above conditions is almost zero.

[0119] Furthermore, a specific example of a branched organohydrogenpolysiloxane (B2) is one having a structure represented by the following formula (3).

[0120] [ka]

[0121] In formula (3), R 7 R is a substituted or unsubstituted alkyl group, aryl group, or a hydrocarbon group combining these, or a hydrogen atom, having 1 to 8 carbon atoms. Examples of alkyl groups having 1 to 8 carbon atoms include methyl, ethyl, and propyl groups, with methyl being preferred. An example of an aryl group having 1 to 8 carbon atoms is the phenyl group. 7 Examples of substituents include methyl groups.

[0122] Note that in equation (3), multiple R 7 These are independent of each other, and may be different from each other or the same.

[0123] Furthermore, in equation (3), "-O-Si≡" indicates that Si has a branched structure that extends in three dimensions.

[0124] Furthermore, branched organohydrogenpolysiloxane (B2) may be used alone or in combination of two or more types.

[0125] Furthermore, the amount of hydrogen atoms (hydride groups) directly bonded to Si in the linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpolysiloxane (B2) is not particularly limited. However, in the silicone rubber-based curable composition, it is preferable that the total amount of hydride groups in the linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpolysiloxane (B2) is 0.5 to 5 moles, and more preferably 1 to 3.5 moles, per mole of vinyl groups in the vinyl group-containing linear organohydrogenpolysiloxane (A1). This ensures the reliable formation of a crosslinking network between the linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpolysiloxane (B2) and the vinyl group-containing linear organohydrogenpolysiloxane (A1).

[0126] <<Silica particles (C)>> The silicone rubber-based curable composition of this embodiment may optionally contain silica particles (C) as a non-conductive filler.

[0127] The silica particles (C) are not particularly limited, but for example, fumed silica, calcined silica, precipitated silica, etc., can be used. These may be used individually or in combination of two or more types.

[0128] Silica particles (C) have a specific surface area of, for example, 50-400 m² as determined by the BET method. 2 It is preferable that the amount is / g, and 100-400m 2 It is more preferable that the amount is / g. Furthermore, the average primary particle size of the silica particles (C) is preferably, for example, 1 to 100 nm, and more preferably about 5 to 20 nm.

[0129] By using silica particles (C) that fall within the specified range of specific surface area and average particle size, the hardness and mechanical strength of the resulting silicone rubber can be improved, particularly its tensile strength.

[0130] <<Silane coupling agent (D)>> The silicone rubber-based curable composition of this embodiment may contain a silane coupling agent (D). The silane coupling agent (D) may have a hydrolyzable group. The hydrolyzable group is hydrolyzed by water to a hydroxyl group, and this hydroxyl group undergoes a dehydration condensation reaction with the hydroxyl groups on the surface of the silica particles (C), thereby modifying the surface of the silica particles (C).

[0131] Furthermore, this silane coupling agent (D) may include a silane coupling agent having hydrophobic groups. As a result, these hydrophobic groups are imparted to the surface of the silica particles (C), which is expected to reduce the cohesive force of the silica particles (C) in the silicone rubber curable composition and, consequently, in the silicone rubber itself (reduced aggregation due to hydrogen bonding by silanol groups). This is expected to improve the dispersibility of the silica particles in the silicone rubber curable composition. This increases the interface between the silica particles and the rubber matrix, thereby increasing the reinforcing effect of the silica particles. Moreover, it is expected that the slipperiness of the silica particles within the matrix improves during deformation of the rubber matrix. As a result of the improved dispersibility and slipperiness of the silica particles (C), the mechanical strength of the silicone rubber due to the silica particles (C) (e.g., tensile strength and tear strength) is improved.

[0132] Furthermore, the silane coupling agent (D) may include a silane coupling agent having vinyl groups. This introduces vinyl groups to the surface of the silica particles (C). Therefore, during the curing of the silicone rubber-based curable composition, that is, when the vinyl groups of the vinyl group-containing organopolysiloxane (A) and the hydride groups of the organohydrogenpolysiloxane (B) undergo a hydrosilylation reaction to form a network (crosslinked structure), the vinyl groups of the silica particles (C) also participate in the hydrosilylation reaction with the hydride groups of the organohydrogenpolysiloxane (B), thus incorporating the silica particles (C) into the network. This makes it possible to achieve lower hardness and higher modulus in the formed silicone rubber.

[0133] As the silane coupling agent (D), a silane coupling agent having a hydrophobic group and a silane coupling agent having a vinyl group can be used in combination.

[0134] Examples of silane coupling agents (D) include those represented by the following formula (4).

[0135] Y n -Si-(X) 4-n ...(4) In formula (4) above, n represents an integer from 1 to 3. Y represents a functional group that has a hydrophobic group, a hydrophilic group, or a vinyl group, and when n is 1, it is a hydrophobic group, and when n is 2 or 3, at least one of them is a hydrophobic group. X represents a hydrolyzable group.

[0136] Hydrophobic groups are alkyl groups, aryl groups, or hydrocarbon groups having 1 to 6 carbon atoms, such as methyl groups, ethyl groups, propyl groups, and phenyl groups, with methyl groups being particularly preferred.

[0137] Furthermore, hydrophilic groups include, for example, hydroxyl groups, sulfonic acid groups, carboxyl groups, or carbonyl groups, with hydroxyl groups being particularly preferred. While hydrophilic groups may be included as functional groups, it is preferable that they are not included from the viewpoint of imparting hydrophobicity to the silane coupling agent (D).

[0138] Furthermore, hydrolyzable groups include alkoxy groups such as methoxy groups and ethoxy groups, chloro groups, or silazane groups, and among these, silazane groups are preferred due to their high reactivity with silica particles (C). Note that those having a silazane group as a hydrolyzable group are, due to their structural characteristics, (Y in formula (4) above. n It will have two -Si-) structures.

[0139] Specific examples of the silane coupling agent (D) represented by formula (4) above include, for example, alkoxysilanes such as methyltrimethoxysilane, dimethyldimethoxysilane, phenyltrimethoxysilane, methyltriethoxysilane, dimethyldiethoxysilane, phenyltriethoxysilane, n-propyltrimethoxysilane, n-propyltriethoxysilane, hexyltrimethoxysilane, hexyltriethoxysilane, and decyltrimethoxysilane, which have a hydrophobic group as a functional group; chlorosilanes such as methyltrichlorosilane, dimethyldichlorosilane, trimethylchlorosilane, and phenyltrichlorosilane; and hexamethyldisilazane, which have a hydrophobic group as a functional group. Examples of materials having a vinyl group include alkoxysilanes such as methacryloxypropyltriethoxysilane, methacryloxypropyltrimethoxysilane, methacryloxypropylmethyldiethoxysilane, methacryloxypropylmethyldimethoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, and vinylmethyldimethoxysilane; chlorosilanes such as vinyltrichlorosilane and vinylmethyldichlorosilane; and divinyltetramethyldisilazane. Among these, considering the above description, hexamethyldisilazane is particularly preferred as the material having a hydrophobic group, and divinyltetramethyldisilazane is preferred as the material having a vinyl group.

[0140] In this embodiment, the lower limit of the silane coupling agent (D) content is preferably 1% by mass or more, more preferably 3% by mass or more, and even more preferably 5% by mass or more, based on 100 parts by weight of the total amount of vinyl group-containing organopolysiloxane (A). The upper limit of the silane coupling agent (D) content is preferably 100% by mass or less, more preferably 80% by mass or less, and even more preferably 40% by mass or less, based on 100 parts by weight of the total amount of vinyl group-containing organopolysiloxane (A). By setting the content of the silane coupling agent (D) above the lower limit, the overall mechanical strength of the silicone rubber can be improved when silica particles (C) are used. Furthermore, by setting the content of the silane coupling agent (D) below the upper limit, the silicone rubber can have appropriate mechanical properties.

[0141] <<Platinum or platinum compound (E)>> The silicone rubber-based curable composition of this embodiment may contain platinum or a platinum compound (E). Platinum or platinum compound (E) is a catalytic component that acts as a catalyst during hardening. The amount of platinum or platinum compound (E) added is the catalytic amount.

[0142] As platinum or a platinum compound (E), known substances can be used, such as platinum black, platinum supported on silica or carbon black, chloroplatinic acid or an alcoholic solution of chloroplatinic acid, a complex salt of chloroplatinic acid and an olefin, or a complex salt of chloroplatinic acid and a vinylsiloxane.

[0143] Platinum or platinum compound (E) may be used alone or in combination of two or more types.

[0144] <<Water(F)>> Furthermore, the silicone rubber-based curable composition of this embodiment may also contain water (F) in addition to the above components (A) to (E).

[0145] Water (F) functions as a dispersion medium that disperses the various components contained in the silicone rubber curable composition, and also contributes to the reaction between silica particles (C) and the silane coupling agent (D). Therefore, the silica particles (C) and the silane coupling agent (D) can be more reliably linked to each other in the silicone rubber, resulting in uniform properties overall.

[0146] Furthermore, if water (F) is included, its content can be set as appropriate, but specifically, it is preferably in the range of 10 to 100 parts by weight, and more preferably in the range of 30 to 70 parts by weight, per 100 parts by weight of the silane coupling agent (D). This allows the reaction between the silane coupling agent (D) and the silica particles (C) to proceed more reliably.

[0147] (Other ingredients) Furthermore, the silicone rubber-based curable composition of this embodiment may further contain other components in addition to the components (A) to (F) described above. Examples of these other components include inorganic fillers other than silica particles (C), such as diatomaceous earth, iron oxide, zinc oxide, titanium oxide, barium oxide, magnesium oxide, cerium oxide, calcium carbonate, magnesium carbonate, zinc carbonate, glass wool, and mica; additives such as reaction inhibitors, dispersants, pigments, dyes, antistatic agents, antioxidants, flame retardants, and thermal conductivity enhancers.

[0148] In a silicone rubber-based curable composition, the proportion of each component is not particularly limited, but for example, it can be set as follows.

[0149] In this embodiment, the upper limit of the silica particle (C) content may be, for example, 60 parts by weight or less, preferably 50 parts by weight or less, and more preferably 40 parts by weight or less, per 100 parts by weight of the total amount of vinyl group-containing organopolysiloxane (A). This allows for a balance of mechanical strengths such as hardness and tensile strength. The lower limit of the silica particle (C) content is not particularly limited, but may be, for example, 10 parts by weight or more, per 100 parts by weight of the total amount of vinyl group-containing organopolysiloxane (A).

[0150] The silane coupling agent (D) is preferably present in an amount of 5 to 100 parts by weight, and more preferably 5 to 40 parts by weight, per 100 parts by weight of the vinyl group-containing organopolysiloxane (A). This ensures that the dispersibility of silica particles (C) in the silicone rubber-based curable composition is reliably improved.

[0151] The content of organohydrogenpolysiloxane (B) is preferably, for example, 0.5 parts by weight or more and 20 parts by weight or less, and more preferably 0.8 parts by weight or more and 15 parts by weight or less, per 100 parts by weight of the total amount of vinyl group-containing organopolysiloxane (A), silica particles (C), and silane coupling agent (D). A content of (B) within the above range may enable a more effective curing reaction.

[0152] The content of platinum or platinum compound (E) represents the catalytic amount and can be set as appropriate, but specifically, it is the amount such that the platinum group metal in this component is 0.01 to 1000 ppm by weight relative to the total amount of vinyl group-containing organopolysiloxane (A), silica particles (C), and silane coupling agent (D), preferably 0.1 to 500 ppm. By setting the content of platinum or platinum compound (E) to above the lower limit, the resulting silicone rubber composition can be sufficiently cured. By setting the content of platinum or platinum compound (E) to below the upper limit, the curing speed of the resulting silicone rubber composition can be improved.

[0153] Furthermore, if water (F) is included, its content can be set as appropriate, but specifically, it is preferably in the range of 10 to 100 parts by weight, and more preferably in the range of 30 to 70 parts by weight, per 100 parts by weight of the silane coupling agent (D). This allows the reaction between the silane coupling agent (D) and the silica particles (C) to proceed more reliably.

[0154] <Method for manufacturing silicone rubber> Next, the method for manufacturing the silicone rubber of this embodiment will be described. The method for producing silicone rubber according to this embodiment involves preparing a silicone rubber-based curable composition and curing this silicone rubber-based curable composition to obtain silicone rubber. The details are explained below.

[0155] First, the components of the silicone rubber curable composition are uniformly mixed using any kneading device to prepare the silicone rubber curable composition.

[0156] [1] For example, a predetermined amount of vinyl group-containing organopolysiloxane (A), silica particles (C), and a silane coupling agent (D) are weighed out, and then kneaded using any kneading device to obtain a kneaded product containing these components (A), (C), and (D).

[0157] It is preferable to obtain this compound by first kneading a vinyl group-containing organopolysiloxane (A) and a silane coupling agent (D), and then kneading (mixing) silica particles (C). This further improves the dispersibility of silica particles (C) in the vinyl group-containing organopolysiloxane (A).

[0158] Furthermore, when obtaining this mixture, water (F) may be added to the mixture of components (A), (C), and (D) as needed. This allows the reaction between the silane coupling agent (D) and the silica particles (C) to proceed more reliably.

[0159] Furthermore, it is preferable that the kneading of each component (A), (C), and (D) proceeds through a first step of heating at a first temperature and a second step of heating at a second temperature. This allows the surface of the silica particles (C) to be surface-treated with the coupling agent (D) in the first step, and ensures that by-products generated by the reaction between the silica particles (C) and the coupling agent (D) are reliably removed from the kneaded mixture in the second step. Subsequently, if necessary, component (A) may be added to the resulting kneaded mixture and kneaded further. This improves the compatibility of the components in the kneaded mixture.

[0160] The first temperature is preferably, for example, around 40 to 120°C, and more preferably, around 60 to 90°C. The second temperature is preferably, for example, around 130 to 210°C, and more preferably, around 160 to 180°C.

[0161] Furthermore, the atmosphere in the first step is preferably an inert atmosphere such as a nitrogen atmosphere, and the atmosphere in the second step is preferably a reduced pressure atmosphere.

[0162] Furthermore, the duration of the first step is preferably about 0.3 to 1.5 hours, and more preferably about 0.5 to 1.2 hours. The duration of the second step is preferably about 0.7 to 3.0 hours, and more preferably about 1.0 to 2.0 hours.

[0163] By setting the conditions for the first and second steps as described above, the aforementioned effects can be obtained more significantly.

[0164] [2] Next, predetermined amounts of organohydrogenpolysiloxane (B) and platinum or a platinum compound (E) are weighed out, and then, using any kneading apparatus, components (B) and (E) are kneaded into the mixture prepared in step [1] above to obtain a silicone rubber curable composition. The obtained silicone rubber curable composition may be a paste containing a solvent.

[0165] Furthermore, when kneading each of these components (B) and (E), it is preferable to first knead the kneaded product prepared in step [1] with the organohydrogenpolysiloxane (B), and the kneaded product prepared in step [1] with platinum or a platinum compound (E), and then knead each of these kneaded products. This ensures that each of the components (A) to (E) can be reliably dispersed in the silicone rubber-based curable composition without allowing the reaction between the vinyl group-containing organopolysiloxane (A) and the organohydrogenpolysiloxane (B) to proceed.

[0166] The temperature at which components (B) and (E) are kneaded is preferably, as the roll setting temperature, around 10 to 70°C, and more preferably around 25 to 30°C.

[0167] Furthermore, the mixing time is preferably, for example, 5 minutes to 1 hour, and more preferably 10 to 40 minutes.

[0168] In steps [1] and [2] described above, by keeping the temperature within the above range, the reaction between the vinyl group-containing organopolysiloxane (A) and the organohydrogenpolysiloxane (B) can be more effectively prevented or suppressed. Furthermore, in steps [1] and [2] described above, by keeping the kneading time within the above range, each component (A) to (E) can be more reliably dispersed in the silicone rubber-based curable composition.

[0169] The kneading equipment used in each of the processes [1] and [2] is not particularly limited, but for example, a kneader, a two-roll mixer, a Banbury mixer (continuous kneader), a pressure kneader, etc., can be used.

[0170] Furthermore, in step [2], a reaction inhibitor such as 1-ethynylcyclohexanol may be added to the kneaded mixture. This makes it possible to more effectively prevent or suppress the reaction between the vinyl group-containing organopolysiloxane (A) and the organohydrogenpolysiloxane (B), even if the temperature of the kneaded mixture is set to a relatively high temperature.

[0171] [3] Next, silicone rubber is formed by curing the silicone rubber-based curable composition.

[0172] In this embodiment, the curing process of the silicone rubber-based curable resin composition is carried out, for example, by heating at 100 to 250°C for 1 to 30 minutes (primary curing), followed by post-baking at 200°C for 1 to 4 hours (secondary curing).

[0173] By going through the above process, silicone rubber consisting of a cured product of a silicone rubber-based curable resin composition is obtained.

[0174] [3] Next, an insulating paste can be obtained by dissolving the silicone rubber-based curable composition obtained in step [2] in a solvent. Furthermore, [3] Next, a conductive paste can be obtained by dissolving the silicone rubber-based curable composition obtained in step [2] in a solvent and adding a conductive filler.

[0175] (solvent) Conductive pastes and insulating pastes contain solvents. Various known solvents can be used as solvents, but for example, high-boiling point solvents may be included. These may be used individually or in combination of two or more.

[0176] The lower limit of the boiling point of the high-boiling-point solvent is, for example, 100°C or higher, preferably 130°C or higher, and more preferably 150°C or higher. This improves the printing stability, such as in screen printing. On the other hand, the upper limit of the boiling point of the high-boiling-point solvent is not particularly limited, but may be, for example, 300°C or lower, 290°C or lower, or 280°C or lower. This suppresses excessive thermal history during wiring formation, thereby preventing damage to the substrate and maintaining the shape of the wiring formed with conductive paste in good condition.

[0177] Furthermore, the solvent can be appropriately selected from the viewpoint of its solubility and boiling point for the silicone rubber-based curable resin composition, but for example, it may include aliphatic hydrocarbons having 5 to 20 carbon atoms, preferably aliphatic hydrocarbons having 8 to 18 carbon atoms, and more preferably aliphatic hydrocarbons having 10 to 15 carbon atoms.

[0178] Examples of solvents include aliphatic hydrocarbons such as pentane, hexane, cyclohexane, heptane, methylcyclohexane, ethylcyclohexane, octane, decane, dodecane, and tetradecane; aromatic hydrocarbons such as benzene, toluene, ethylbenzene, xylene, mesitylene, trifluoromethylbenzene, and benzotrifluoride; and diethyl ether, diisopropyl ether, dibutyl ether, cyclopentyl methyl ether, cyclopentyl ethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, and diethylene glycol dimethyl ether. Examples include ethers such as chol monobutyl ether, dipropylene glycol dimethyl ether, dipropylene glycol methyl-n-propyl ether, 1,4-dioxane, 1,3-dioxane, and tetrahydrofuran; haloalkanes such as dichloromethane, chloroform, 1,1-dichloroethane, 1,2-dichloroethane, 1,1,1-trichloroethane, and 1,1,2-trichloroethane; carboxylic acid amides such as N,N-dimethylformamide and N,N-dimethylacetamide; sulfoxides such as dimethyl sulfoxide and diethyl sulfoxide; and esters such as diethyl carbonate. These may be used individually or in combination of two or more. The solvent used here should be appropriately selected from among solvents that can uniformly dissolve or disperse the components of the conductive paste described above.

[0179] The above solvent has a polarity term (δ) in the Hansen solubility parameter. p The upper limit of ) is, for example, 10 MPa 1 / 2 The following is preferred: 7 MPa 1 / 2 The following, and more preferably 5.5 MPa 1 / 2 The following first solvent may be included. This improves the dispersibility and solubility of the silicone rubber-based curable resin composition in the paste. The above polarity term (δ) of this first solvent p The lower limit of ) is not particularly limited, but for example, 0 Pa 1 / 2 That's fine too.

[0180] The hydrogen bonding term (δ) of the Hansen solubility parameter in the first solvent described above. h The upper limit of ) is, for example, 20 MPa 1 / 2 The following, preferably 10 MPa 1 / 2 The following is more preferable: 7 MPa 1 / 2 The following is the result. This makes it possible to improve the dispersibility and solubility of the silicone rubber-based curable resin composition in the paste. The above hydrogen bonding term (δ) of this first solvent h The lower limit of ) is not particularly limited, but for example, 0 Pa 1 / 2 That's fine too.

[0181] Hansen's solubility parameter (HSP) is an index that represents the solubility of one substance, indicating how much of it dissolves in another substance. HSP represents solubility as a three-dimensional vector. This three-dimensional vector typically includes a dispersion term (δ). d ), polarity term (δ p ), hydrogen bond term (δ h It can be represented as follows. And if the vectors are similar, it can be judged that they have high solubility. The similarity of the vectors can be judged by the distance of the Hansen solubility parameters (HSP distance).

[0182] The Hansen solubility parameters (HSP values) used in this specification can be calculated using software called HSPiP (Hansen Solubility Parameters in Practice). HSPiP, developed by Hansen and Abbott, includes a function to calculate HSP distances and a database containing Hansen parameters for various resins and solvents or non-solvents. The solubility of each resin in pure solvents and mixed solvents of good and poor solvents is investigated, and the results are entered into HSPiP software to calculate D: dispersion term, P: polarity term, H: hydrogen bonding term, and R0: solubility sphere radius.

[0183] As the solvent in this embodiment, for example, one can be selected that has a small difference in HSP distance, polarity term, and hydrogen bonding term between the elastomer or the constituent units of the elastomer and the solvent.

[0184] The lower limit of viscosity of conductive paste and / or insulating paste measured at room temperature (25°C) with a shear rate of 20 [1 / s] is, for example, 1 Pa·s or more, preferably 5 Pa·s or more, and more preferably 10 Pa·s or more. This improves film formation and enhances shape retention even when forming thick films. On the other hand, the upper limit of viscosity of conductive paste and / or insulating paste at room temperature (25°C) is, for example, 100 Pa·s or less, preferably 90 Pa·s or less, and more preferably 80 Pa·s or less. This improves printability of the paste.

[0185] At room temperature of 25°C, the viscosity measured at a shear rate of 1 [1 / s] is defined as η1, and the viscosity measured at a shear rate of 5 [1 / s] is defined as η5. The thixotropy index is defined as the viscosity ratio (η1 / η5). In this case, the lower limit of the thixotropy of the conductive paste and / or insulating paste is, for example, 1.0 or higher, preferably 1.1 or higher, and more preferably 1.2 or higher. This allows the shape of the wiring obtained by the printing method to be stably maintained. On the other hand, the upper limit of the thixotropy of the conductive paste and / or insulating paste is, for example, 3.0 or lower, preferably 2.5 or lower, and more preferably 2.0 or lower. This improves the printability of the paste.

[0186] The content of the silicone rubber-based curable composition in the insulating paste is preferably 10% by mass or more, more preferably 15% by mass or more, and even more preferably 20% by mass or more, based on 100% by mass of the insulating paste. Furthermore, the content of the silicone rubber-based curable composition in the insulating paste is preferably 50% by mass or less, more preferably 40% by mass or less, and even more preferably 35% by mass or less, based on 100% by mass of the insulating paste.

[0187] (Conductive filler) As the conductive filler, known conductive materials may be used, but metal powder (G) may also be used. The metals that make up the metal powder (G) are not particularly limited, but for example, it may include at least one of copper, silver, gold, nickel, tin, lead, zinc, bismuth, antimony, or alloys thereof, or two or more of these. Of these, the metal powder (G) is preferably silver or copper, that is, silver powder or copper powder, due to its high conductivity and ease of availability. Furthermore, these metal powders (G) can also be used if they are coated with other types of metal.

[0188] In this embodiment, there are no restrictions on the shape of the metal powder (G), but conventionally used shapes such as dendritic, spherical, or flake-shaped can be used. Among these, flake-shaped metal powder (G) may also be used.

[0189] Furthermore, the particle size of the metal powder (G) is not limited, but for example, the average particle size D 50 The particle size is preferably 0.001 μm or larger, more preferably 0.01 μm or larger, and even more preferably 0.1 μm or larger. The particle size of the metal powder (G) is, for example, the average particle size D 50 The particle size is preferably 1,000 μm or less, more preferably 100 μm or less, and even more preferably 20 μm or less. Average particle size D 50By setting the range to this extent, the silicone rubber can exhibit appropriate conductivity. The particle size of the metal powder (G) can be defined, for example, by observing conductive paste or silicone rubber molded using conductive paste with a transmission electron microscope, performing image analysis, and taking the average value of 200 arbitrarily selected metal powders.

[0190] The content of conductive filler in the conductive paste is preferably 30% by mass or more, more preferably 40% by mass or more, and even more preferably 50% by mass or more, based on 100% by mass of the conductive paste. Furthermore, the content of conductive filler in the conductive paste is preferably 85% by mass or less, more preferably 75% by mass or less, and even more preferably 65% ​​by mass or less, based on 100% by mass of the conductive paste. By setting the conductive filler content above the lower limit, the silicone rubber can acquire appropriate conductive properties. Furthermore, by setting the conductive filler content below the upper limit, the silicone rubber can acquire appropriate flexibility.

[0191] The content of the silicone rubber-based curable composition in the conductive paste is preferably 1% by mass or more, more preferably 3% by mass or more, and even more preferably 5% by mass or more, based on 100% by mass of the conductive paste. Furthermore, the content of the silicone rubber-based curable composition in the conductive paste is preferably 25% by mass or less, more preferably 20% by mass or less, and even more preferably 15% by mass or less, based on 100% by mass of the conductive paste. By setting the content of the silicone rubber-based curable composition to be above the lower limit, the silicone rubber can have appropriate flexibility. Furthermore, by setting the content of the silicone rubber-based curable composition to be below the upper limit, the mechanical strength of the silicone rubber can be improved.

[0192] The lower limit of the silica particle (C) content in the conductive paste is, for example, 1% by mass or more, preferably 3% by mass or more, and more preferably 5% by mass or more, based on 100% by mass of the total amount of silica particles (C) and conductive fillers. This improves the mechanical strength of the silicone rubber. On the other hand, the upper limit of the silica particle (C) content in the conductive paste is, for example, 20% by mass or less, preferably 15% by mass or less, and more preferably 10% by mass or less, based on 100% by mass of the total amount of silica particles (C) and conductive fillers. This allows for a balance between the stretch-electrical properties and mechanical strength of the silicone rubber.

[0193] In the conductive cured product obtained by curing the conductive paste that constitutes the wiring, such as the lower wiring and upper wiring, the content of conductive filler is preferably 65% ​​by mass or more, more preferably 70% by mass or more, and even more preferably 75% by mass or more, based on 100% by mass of the conductive cured product. Furthermore, the content of conductive filler in the conductive cured product is preferably 95% by mass or less, more preferably 90% by mass or less, and even more preferably 85% by mass or less, based on 100% by mass of the conductive cured product. By setting the conductive filler content above the lower limit, the silicone rubber can acquire appropriate conductivity. Furthermore, by setting the conductive filler content below the upper limit, the silicone rubber can acquire appropriate flexibility.

[0194] In this embodiment, an insulating elastomer is obtained by curing the above-mentioned silicone rubber-based curable composition. Furthermore, using the above-mentioned silicone rubber-based curable composition, insulating elastomers in a tube structure can be obtained by various molding methods such as extrusion molding and compression molding. Furthermore, an insulating elastomer can be obtained by using an insulating paste to form a coating film using various coating methods such as printing, spraying, and dipping, and then drying it. Similar to insulating pastes, conductive paste can be used to form a coating film using various application methods such as printing, spraying, and dipping, and then dried to obtain a conductive elastomer.

[0195] The manufacturing method of the fluid-driven actuator of this embodiment includes the steps of forming a tube member using an insulating elastomer and forming a stretchable conductive layer using a conductive paste on at least one of the inner surface and / or outer surface of the tube member, either partially or entirely. This provides a fluid-driven actuator comprising a tube member that deforms when fluid flows into it, and a stretchable conductive layer laminated on the surface of the tube member.

[0196] A specific example of the manufacturing process for the actuator 100 is to use a silicone rubber-based curable composition and extrude it into a tube shape using an extruder to obtain a tube member 10 containing an insulating elastomer. By applying a conductive paste to the inner surface and / or outer surface of the obtained tube member 10 and drying it, an actuator 100 can be formed in which a stretchable conductive layer 30 containing a conductive elastomer is laminated on the inner surface and / or outer surface of the tube member 10.

[0197] The upper limit of the durometer hardness A of the insulating elastomer is not particularly limited, but may be 80 or less, preferably 70 or less, and more preferably 65 or less. This allows for a balance in the cured properties of the silicone rubber. This enhances the deformability of the silicone rubber, making it easier to bend and stretch. On the other hand, the lower limit of the durometer hardness A is, for example, 40 or higher, preferably 42 or higher, and more preferably 48 or higher. This suppresses deformation due to external stress. It also improves the frictional durability and mechanical strength of the silicone rubber.

[0198] (Measurement procedure for durometer hardness A) Sheet-like test specimens are prepared using the cured product of a silicone rubber-based curable composition, and the durometer hardness A of the obtained sheet-like test specimens is measured at 25°C in accordance with JIS K6253 (1997).

[0199] The lower limit of the tensile strength of the insulating elastomer is, for example, 5.0 MPa or higher, preferably 6.0 MPa or higher, and more preferably 7.0 MPa or higher. This makes it possible to realize a structure with excellent tensile durability during repeated stretching deformation. On the other hand, the upper limit of the tensile strength is not particularly limited, but for example, it may be set to 25 MPa or less. This allows for a balance of the various properties of the silicone rubber.

[0200] (Procedure for measuring tensile strength) Using a cured silicone rubber-based curable composition, a dumbbell-shaped No. 3 test specimen was prepared in accordance with JIS K6251 (2004), and the tensile strength of the dumbbell-shaped No. 3 test specimen was measured at 25°C.

[0201] The lower limit of the elongation at break of the insulating elastomer is, for example, 500% or more, preferably 600% or more, and more preferably 700% or more. This improves the elongation durability during repeated stretching deformation. On the other hand, the upper limit of the elongation at break is not particularly limited, but may be, for example, 2000% or less, or 1800% or less. This allows for a balance of the various properties of the silicone rubber.

[0202] (Measurement conditions for elongation at break) Using a cured silicone rubber-based curable composition, a dumbbell-shaped No. 3 test specimen was prepared in accordance with JIS K6251 (2004), and the elongation at break at 25°C was measured for the obtained dumbbell-shaped No. 3 test specimen. The elongation at break was calculated as [gauge displacement (mm)] ÷ [initial gauge distance (20 mm)] × 100.

[0203] The lower limit of the tear strength of the insulating elastomer is, for example, 25 N / mm or more, preferably 28 N / mm or more, more preferably 30 N / mm or more, even more preferably 33 N / mm or more, and even more preferably 34 N / mm or more. This improves the durability of the silicone rubber during repeated use. It also improves the scratch resistance and mechanical strength of the silicone rubber. On the other hand, the upper limit of the tear strength is not particularly limited, but may be set to, for example, 80 N / mm or less, or 70 N / mm or less. This allows for a balance of the various properties of the silicone rubber.

[0204] (Procedure for measuring tear strength) Using a cured silicone rubber-based curable composition, crescent-shaped test specimens were prepared in accordance with JIS K6252 (2001), and the tear strength of the obtained crescent-shaped test specimens was measured at 25°C.

[0205] In this embodiment, the hardness, tensile strength, elongation at break, and tear strength can be controlled by appropriately selecting, for example, the type and amount of each component contained in the silicone rubber curable composition, the method of preparing the silicone rubber curable composition, etc. Among these, for example, appropriately controlling the type and blending ratio of the resin constituting the silicone rubber, the crosslinking density and crosslinking structure of the resin, improving the blending ratio of the inorganic filler and the bonding of the inorganic filler to the rubber, using a first vinyl group-containing linear organopolysiloxane (A1-1) with a vinyl group content of 0.4 mol% or less, using a silane coupling agent having vinyl groups, and appropriately adjusting the silica particle (C) content and the silane coupling agent content are examples of factors that can bring the hardness, tensile strength, elongation at break, and tear strength into desired numerical ranges.

[0206] The actuator system of this embodiment will now be described. An example of the actuator system configuration includes the above-mentioned fluid-driven actuator, a measuring unit for measuring changes in electrical characteristics, and a fluid pressure control unit for adjusting the pressure of the fluid flowing into the tube member.

[0207] The measurement unit measures changes in electrical properties, such as changes in the resistance of the stretchable conductive layer and changes in the capacitance of the capacitor formed by the stretchable conductive layer, via the stretchable conductive layer provided by the fluid-driven actuator.

[0208] The fluid pressure control unit detects the deformation state of the tube member based on the change in electrical characteristics measured by the measurement unit, and adjusts the pressure of the fluid flowing into the tube member according to the deformation state of the tube member. For example, the fluid pressure control unit can increase or decrease the pressure based on the relationship between the resistance value of the expandable conductive layer and the deformation state of the tube member, so that the degree of expansion of the tube member is within a desired range. This makes it possible to control the degree of deformation of the tube member more accurately, even after the tube member has been repeatedly deformed by expansion and contraction. Furthermore, information regarding the relationship between the changes in electrical properties and the deformation state of the tube members can be obtained and stored in advance.

[0209] Each component included in the measurement unit and the fluid pressure control unit may be implemented by dedicated hardware or by executing a software program suitable for each component. Each component may also be implemented by a program execution unit such as a CPU or processor reading and executing a software program recorded on a recording medium such as a hard disk or semiconductor memory.

[0210] Although embodiments of the present invention have been described above, these are merely examples, and various other configurations can be adopted. Furthermore, the present invention is not limited to the embodiments described above, and modifications, improvements, etc., within the scope that can achieve the objectives of the present invention are included in the present invention. Examples of reference formats are provided below. 1. A tube member that deforms when fluid is introduced, The tube member comprises a stretchable conductive layer laminated on at least one of its inner and outer surfaces, either partially or entirely. By measuring the change in electrical properties through the aforementioned stretchable conductive layer, the deformation state of the tube member can be detected. Fluid-driven actuator. 2. A fluid-driven actuator as described in 1., The tube member is made of an insulating elastomer, A fluid-driven actuator in which the aforementioned stretchable conductive layer is made of a conductive elastomer. 3.2. A fluid-driven actuator as described above, A fluid-driven actuator wherein the tear strength of the insulating elastomer, measured at 25°C in accordance with JIS K6252 (2001), is 25 N / mm or more. 4. A fluid-driven actuator as described in 2. or 3., A fluid-driven actuator in which the elongation at break of the insulating elastomer, measured at 25°C in accordance with JIS K6251 (2004), is 500% or more. 5. A fluid-driven actuator described in any one of 2. to 4., A fluid-driven actuator wherein the tensile strength of the insulating elastomer, measured at 25°C in accordance with JIS K6251 (2004), is 5.0 MPa or higher. 6. A fluid-driven actuator as described in any one of 2. to 5., A fluid-driven actuator in which at least one of the insulating elastomer and the conductive elastomer includes a non-conductive filler. 7.6. A fluid-driven actuator as described above, A fluid-driven actuator wherein the non-conductive filler contains silica particles. 8. A fluid-driven actuator as described in any one of 2. to 7., A fluid-driven actuator in which the conductive elastomer contains a conductive filler. 9.8. A fluid-driven actuator as described above, A fluid-driven actuator wherein the conductive filler includes one or more selected from the group consisting of metal-based fillers, carbon-based fillers, metal oxide fillers, and metal-plated fillers. 10. A fluid-driven actuator as described in any one of sections 2 to 9, A fluid-driven actuator in which the insulating elastomer and the conductive elastomer are composed of cured products of a silicone rubber-based curable composition containing the same type of vinyl group-containing organopolysiloxane. 11. A fluid-driven actuator described in any one of items 1 to 10, A fluid-driven actuator in which a stretchable cover layer is formed on the surface of the aforementioned stretchable conductive layer. 12. A fluid-driven actuator described in any one of items 1 to 11, A fluid-driven actuator in which the stretchable conductive layer is formed on the inner surface of the tube member. 13. A fluid-driven actuator described in any one of 1. to 12., A fluid-driven actuator comprising a sleeve on the outer circumferential surface of the aforementioned tube member. 14. A fluid-driven actuator described in any one of items 1 to 13, The tube member expands radially and contracts axially when the fluid flows into it. A fluid-driven actuator capable of detecting the expansion state of the tube member. 15. A fluid-driven actuator described in any one of 1. to 14., A fluid-driven actuator in which the change in electrical properties includes at least one of a change in the resistance of the stretchable conductive layer and a change in the capacitance of the tube member sandwiched between the stretchable conductive layers. 16. A fluid-driven actuator described in any one of items 1 to 15, A measuring unit for measuring the change in the aforementioned electrical characteristics, The system includes a fluid pressure control unit that detects the deformation state of the tube member based on the measured change in electrical characteristics and adjusts the pressure of the fluid flowing into the tube member according to the deformation state of the tube member. Actuator system. 17. A method for manufacturing a fluid-driven actuator, comprising a tube member that deforms when fluid is introduced into it, and an expandable conductive layer laminated on the surface of the tube member. A step of forming the tube member using an insulating elastomer, A method for manufacturing a fluid-driven actuator, comprising the step of forming the stretchable conductive layer on at least one of the inner surface and outer surface of the tube member, either partially or entirely, using a conductive paste.

Example

[0211] Hereinafter, the present invention will be described in detail with reference to examples, but the present invention is not limited to the descriptions of these examples at all. The raw material components shown in Table 1 are shown below. (A1-1): First vinyl group-containing linear organopolysiloxane: Vinyl group-containing dimethylpolysiloxane synthesized by the following synthesis scheme 1 (structure represented by the above formula (1-1)) (A1-2): Second vinyl group-containing linear organopolysiloxane: Vinyl group-containing dimethylpolysiloxane synthesized by the following synthesis scheme 2 (structure represented by the above formula (1-1) where R 1 and R 2 are vinyl groups)

[0212] (Organohydrogenpolysiloxane (B)) (B-1): Organohydrogenpolysiloxane: manufactured by Momentive, "TC-25D"

[0213] (Silica particles (C)) (C): Silica fine particles (particle size 7 nm, specific surface area 300 m 2 / g), manufactured by Nippon Aerosil Co., Ltd., "AEROSIL300"

[0214] (Silane coupling agent (D)) (D-1): Hexamethyldisilazane (HMDZ), manufactured by Gelest, "HEXAMETHYLDISILAZANE (SIH6110.1)" (D-2) Divinyltetramethyldisilazane, manufactured by Gelest, "1,3-DIVINYLTETRAMETHYLDISILAZANE (SID4612.0)"

[0215] (Platinum or platinum compound (E)) (E-1): Platinum compound (manufactured by Momentive, trade name "TC-25A")

[0216] (Water (F)) (F): Pure water

[0217] (Metal powder (G)) (G1): Silver powder, manufactured by Tokuriki Chemical Research Institute, product name "TC-101", median diameter d 50 : 8.0 μm, aspect ratio 16.4, average major diameter 4.6 μm

[0218] (Synthesis of vinyl group-containing organopolysiloxane (A)) [Synthesis Scheme 1: Synthesis of the first vinyl group-containing linear organopolysiloxane (A1-1)] A first vinyl group-containing linear organopolysiloxane (A1-1) was synthesized according to the following formula (5). Specifically, 74.7 g (252 mmol) of octamethylcyclotetrasiloxane and 0.1 g of potassium silicate were placed in a 300 mL separable flask equipped with a condenser and stirring blades, which had been purged with Ar gas. The mixture was then heated and stirred at 120°C for 30 minutes. An increase in viscosity was observed during this process. The temperature was then raised to 155°C, and stirring was continued for 3 hours. After 3 hours, 0.1 g (0.6 mmol) of 1,3-divinyltetramethyldisiloxane was added, and stirring was continued at 155°C for another 4 hours. Furthermore, after 4 hours, the mixture was diluted with 250 mL of toluene and washed three times with water. The organic layer after washing was reprecipitated and purified by washing several times with 1.5 L of methanol to separate the oligomer and polymer. The obtained polymer was dried under reduced pressure at 60°C overnight to obtain the first vinyl group-containing linear organopolysiloxane (A1-1) (Mn=2, 2×10⁻⁶). 5 Mw = 4, 8 × 10 5 Furthermore, the vinyl group content, calculated by 1H-NMR spectroscopy, was 0.04 mol%.

[0219] [ka]

[0220] [Synthesis Scheme 2: Synthesis of the second vinyl group-containing linear organopolysiloxane (A1-2)] In the synthesis step of the above (A1-1), except that 0.86 g (2.5 mmol) of 2,4,6,8-tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane was used in addition to 74.7 g (252 mmol) of octamethylcyclotetrasiloxane, the second vinyl group-containing linear organopolysiloxane (A1-2) was synthesized as shown in the following formula (6) in the same manner as the synthesis step of (A1-1). (Mn = 2.3×105, Mw = 5.0×105). Also, the vinyl group content calculated by 1H-NMR spectrum measurement was 0.93 mol%.

[0221] [Chemical formula]

[0222] (Preparation of silicone rubber-based curable composition) The silicone rubber-based curable compositions of Samples 1 and 2 were prepared according to the following procedure. First, a mixture of 90% vinyl group-containing organopolysiloxane (A), silane coupling agent (D), and water (F) was kneaded in advance at the ratios shown in Table 1 below. Then, silica particles (C) were added to the mixture and kneaded further to obtain a kneaded product (silicone rubber compound). Here, the kneading after the addition of silica particles (C) was carried out through a first step of kneading for 1 hour under the conditions of 60 to 90 °C in a nitrogen atmosphere for the coupling reaction and a second step of kneading for 2 hours under the conditions of 160 to 180 °C in a reduced-pressure atmosphere for the removal of by-products (ammonia). Then, it was cooled, and the remaining 10% vinyl group-containing organopolysiloxane (A) was added in two portions and kneaded for 20 minutes. Subsequently, organohydrogenpolysiloxane (B) and platinum or a platinum compound (E) were added to 100 parts by weight of the obtained kneaded product (silicone rubber compound) at the ratios shown in Table 2 below, and kneaded with a roll to obtain a silicone rubber-based curable composition.

[0223] (Preparation of conductive paste) The obtained 13.7 parts by weight of the silicone rubber-based curable composition of Sample 2 was immersed in 31.8 parts by weight of tetradecane (solvent), then stirred with a rotating / revolving mixer, and after adding 54.5 parts by weight of metal powder (G1), it was kneaded with a three-roll mixer to obtain a conductive paste.

[0224] [Table 1]

[0225] [Table 2]

[0226] (Fabrication of fluid-driven actuators) Using either Sample 1 or Sample 2 of the silicone rubber-based curable composition, a silicone rubber tube member having the dimensions shown in Table 2 was obtained by extruding it into a tube shape using an extruder. The obtained conductive paste was applied to the circumference of the outer surface of the obtained silicone rubber tube member to create a pattern with a width of 1 mm and a length of 20 mm. This was then heat-cured at 200°C for 4 hours to form a conductive silicone rubber sensor portion with a thickness of 50 μm. This resulted in a conductive sensor tube (fluid-driven actuator) as shown in Figure 2, which has a tube member 10 made of an insulating elastomer and a stretchable conductive layer 30 (stretchable sensor part) made of a conductive elastomer laminated on the outer surface of the tube member 10.

[0227] <Tube expansion test and strain sensing evaluation> In a tube expansion test in which caps were attached to both ends of the obtained conductive sensor-equipped tube, and air was injected into the tube by applying pressure from one of the caps, the outer circumference length (mm) of the outer surface of the tube and the resistance value (Ω) of the expandable sensor section from the wiring connected to both ends were measured over time as the pressure of air injection was gradually increased. The outer circumference was measured using a circumference gauge, and the resistance value was measured using an electrical resistance meter. The rate of change in outer circumference was calculated based on [(outer circumference of the tube when pressure is applied - initial outer circumference of the tube without pressure applied) / (initial outer circumference of the tube without pressure applied)] × 100. The results for the tubes in Examples 1 and 2 are shown in Table 3. The relationship between pressure and rate of change in outer circumference, and between pressure and resistance value in Table 3 were plotted, and graphs were created as shown in Figures 4 and 5. Figures 4 and 5 show that the resistance value of the stretchable sensor part also changes in accordance with the change in the rate of change of the outer circumference of the tube, i.e., the degree of deformation of the tube, and it was found that the tube with the conductive sensor part in each embodiment is capable of strain sensing.

[0228] [Table 3] <Deformation resistance> Using the conductive sensor tubes of Examples 1 and 2, the tube expansion test described above was performed under the condition of repeatedly expanding the tube from 0 MPa to 0.06 MPa and then back to 0 MPa 10 times. Afterwards, it was confirmed that there was no delamination between the tube and the conductive sensor and that the resistance value of the conductive sensor could be measured.

[0229] <Expansion controllability> Using the conductive sensor-equipped tube from Example 2, a pressure of 0.12 MPa was applied (first time), the air was removed, and then the pressure of 0.12 MPa was applied again (second time) to perform the tube expansion test described above. The rate of change in the circumference of the tube was approximately 10% in the first test and approximately 12% in the second test. Immediately after the second application of pressure, by adjusting the pressure so that the second resistance value of the conductive sensor section was approximately the same as the first resistance value, it was possible to control the rate of change of the outer circumference to be approximately the same as the rate of change of the first outer circumference, even after the second application.

[0230] <Easily expandable> The resulting conductive sensor-equipped tubes and tubes without conductive sensor sections were subjected to a predetermined pressure and injected with air, and their degree of expansion was evaluated. In both cases, it was confirmed that the rate of change in the outer circumference at the same applied pressure was approximately the same.

[0231] (Preparation of silicone rubber for evaluation) The silicone rubber-based curable composition obtained from Sample 1 or Sample 2 was pressed at 170°C and 10 MPa for 10 minutes to form a 1 mm thick sheet and undergo primary curing. Subsequently, it was heated at 200°C for 4 hours to undergo secondary curing. As a result, a sheet-like silicone rubber (cured product of the silicone rubber-based curable composition) was obtained.

[0232] The obtained sheet-like silicone rubber (sheet-like elastomer) was evaluated based on the following evaluation criteria. The results are shown in Table 4. Tensile strength and elongation at break were measured using three samples, and the average of the three values ​​was used as the measurement. Tear strength was measured using five samples, and the average of the five values ​​was used as the measurement. For hardness, measurements were taken with n=5, and the average value was used as the measured value. The average values ​​for each are shown in the table. In the table, ">" indicates that the test did not reach fracture due to the stroke limit of the tensile testing machine.

[0233] <Hardness: Durometer hardness> Six sheets of 1 mm thick silicone rubber were laminated to create a 6 mm thick test specimen. The hardness of the resulting test specimen was measured at 25°C according to JIS K6253 (1997) using a Type A durometer.

[0234] <Tear strength> Using the obtained 1 mm thick sheet of silicone rubber, crescent-shaped test specimens were prepared in accordance with JIS K6252 (2001), and the tear strength (TS) of the obtained crescent-shaped test specimens at 25°C was measured. The unit is N / mm.

[0235] <Elongation at break> Using the obtained 1 mm thick sheet of silicone rubber, a dumbbell-shaped No. 3 test specimen was prepared in accordance with JIS K6251 (2004), and the elongation at break at 25°C was measured for the obtained dumbbell-shaped No. 3 test specimen. The elongation at break was calculated as [gauge displacement (mm)] ÷ [initial gauge distance (20 mm)] × 100. The unit is %.

[0236] <Tensile strength> Using the obtained 1 mm thick sheet of silicone rubber, a dumbbell-shaped No. 3 test specimen was prepared in accordance with JIS K6251 (2004), and the tensile strength of the obtained dumbbell-shaped No. 3 test specimen was measured at 25°C. The unit is MPa.

[0237] [Table 4]

[0238] The conductive sensor-equipped tubes (fluid-driven actuators) of Examples 1 and 2 demonstrated strain sensing capability and excellent deformation resistance. [Explanation of symbols]

[0239] 10 Tube members 12 Space 20 caps 22 holes 30 Stretchable conductive layer 100 actuators

Claims

1. A tube member that deforms when fluid flows into it, The tube member comprises a stretchable conductive layer laminated on at least one of its inner and outer surfaces, either partially or entirely. The tube member is made of an insulating elastomer, The stretchable conductive layer is composed of a conductive elastomer. The tube member and the stretchable conductive layer are in surface contact with each other and are in close contact. By measuring the change in electrical properties through the stretchable conductive layer, the deformation state of the tube member can be detected, and the change in electrical properties includes a change in the resistance value of the stretchable conductive layer. Fluid-driven actuator.

2. A fluid-driven actuator according to claim 1, A fluid-driven actuator wherein the tear strength of the insulating elastomer, measured at 25°C in accordance with JIS K6252 (2001), is 25 N / mm or more.

3. A fluid-driven actuator according to claim 1 or 2, A fluid-driven actuator in which the elongation at break of the insulating elastomer, measured at 25°C in accordance with JIS K6251 (2004), is 500% or more.

4. A fluid-driven actuator according to any one of claims 1 to 3, A fluid-driven actuator having a tensile strength of 5.0 MPa or more of the insulating elastomer, measured at 25°C in accordance with JIS K6251 (2004).

5. A fluid-driven actuator according to any one of claims 1 to 4, A fluid-driven actuator in which at least one of the insulating elastomer and the conductive elastomer includes a non-conductive filler.

6. A fluid-driven actuator according to claim 5, A fluid-driven actuator wherein the non-conductive filler contains silica particles.

7. A fluid-driven actuator according to any one of claims 1 to 6, A fluid-driven actuator in which the conductive elastomer contains a conductive filler.

8. A fluid-driven actuator according to claim 7, A fluid-driven actuator wherein the conductive filler includes one or more selected from the group consisting of metal-based fillers, carbon-based fillers, metal oxide fillers, and metal-plated fillers.

9. A fluid-driven actuator according to any one of claims 1 to 8, A fluid-driven actuator in which the insulating elastomer and the conductive elastomer are composed of cured products of a silicone rubber-based curable composition containing the same type of vinyl group-containing organopolysiloxane.

10. A fluid-driven actuator according to any one of claims 1 to 9, A fluid-driven actuator in which a stretchable cover layer is formed on the surface of the aforementioned stretchable conductive layer.

11. A fluid-driven actuator according to any one of claims 1 to 10, A fluid-driven actuator in which the stretchable conductive layer is formed on the inner surface of the tube member.

12. A fluid-driven actuator according to any one of claims 1 to 11, A fluid-driven actuator comprising a sleeve on the outer circumferential surface of the aforementioned tube member.

13. A fluid-driven actuator according to any one of claims 1 to 12, The tube member expands radially and contracts axially when the fluid flows into it. A fluid-driven actuator capable of detecting the expansion state of the tube member.

14. A fluid-driven actuator according to any one of claims 1 to 13, A measuring unit for measuring the change in the aforementioned electrical characteristics, The system includes a fluid pressure control unit that detects the deformation state of the tube member based on the measured change in electrical characteristics and adjusts the pressure of the fluid flowing into the tube member according to the deformation state of the tube member. Actuator system.

15. A method for manufacturing a fluid-driven actuator, comprising a tube member that deforms when fluid is introduced, and an expandable conductive layer laminated on the surface of the tube member, wherein the tube member and the expandable conductive layer are in surface contact and in close contact with each other. A step of forming the tube member using an insulating elastomer, The process includes forming the stretchable conductive layer on at least one of the inner and outer surfaces of the tube member, either partially or entirely, using a conductive paste containing a conductive elastomer. The insulating elastomer and the conductive elastomer are composed of cured products of a silicone rubber-based curable composition containing the same type of vinyl group-containing organopolysiloxane. A method for manufacturing a fluid-driven actuator.

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