Solid sauce preservative container

Abstract

To provide ready access to reactant vapor while providing improved serviceability (e.g., recharging) of a solid source precursor vessel.SOLUTION: The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utilizes a plurality of individual cavities or pockets within the interior of the vessel. Each individual pocket may be loaded with precursor. In an arrangement, the pockets may be loaded with pre-formed blocks of a compressed precursor material that typically have higher density than was previously achieved when packing solid precursor within a source vessel. The increased density of the solid precursor material increases capacity of the source vessel resulting in longer intervals between replacement and / or refilling the source vessel.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure generally relates to vapor reactors and systems. In particular, the present disclosure relates to an apparatus for delivering reaction gases from solid source precursors.

Background Art

[0002] For various applications, including depositing and etching materials on a substrate surface (e.g., a semiconductor wafer), vapor reactor systems such as chemical vapor deposition (CVD), plasma CVD (PECVD), and atomic layer deposition (ALD) can be used. For example, a vapor reactor system can be used to deposit and / or etch a layer on a substrate to form semiconductor devices, flat panel display devices, photovoltaic devices, microelectromechanical systems (MEMS), and the like.

[0003] In a vapor reactor system, reaction gases of different reactants (also referred to herein as "precursor gases") are delivered to one or more substrates in a reaction chamber. The reaction chamber typically includes one or more substrates supported on one or more substrate holders (such as susceptors), and the substrates and substrate holders are maintained at a desired process temperature. The reaction gases can react with each other or with the surface of the substrate to form a thin film on the substrate, and the growth rate is controlled, inter alia, by the temperature or amount of the reaction gases.

[0004] In some applications, reaction gases are stored in a gaseous form in the reactant source container. In such applications, reaction vapors are often gaseous at ambient (i.e., typical) pressure and temperature. Examples of such gases include nitrogen, oxygen, hydrogen, and ammonia. However, in some cases, vapors of source chemicals ("precursors") that are liquid or solid at ambient pressure and temperature are used. These source chemicals may need to be heated to produce a sufficient amount of vapor for the reaction process. Some solid substances (referred herein to be "solid source precursors") have very low vapor pressures at room temperature and therefore must be heated and / or maintained at very low pressures to produce a sufficient amount of reaction vapor.

[0005] A typical solid source precursor delivery system includes a solid source precursor container and a heating system (e.g., a radiant lamp, a resistive heater). The container contains the solid precursor (e.g., in powder form). The heating system heats the container to increase the vapor pressure of the precursor gas in the container. Unless otherwise stated, the heating system heats the solid precursor so that it evaporates (e.g., sublimes). Thus, the container is sometimes called a sublimator. The container has an inlet and an outlet for transporting the evaporating precursor to the substrate reaction chamber by flowing an inert carrier gas (e.g., nitrogen) through it. Typically, the path through the container is indirect so as to increase the distance the carrier gas travels through the container, thereby increasing the degree of saturation of the carrier gas with the evaporating precursor. The carrier gas, along with it, pushes the precursor vapor through the container outlet and finally flows into the substrate reaction chamber. The container usually includes an isolation valve to fluidly isolate the contents of the container from the outside of the container.

[0006] Any discussions included in this section, including discussions of problems and solutions, are included in this disclosure solely for the purpose of providing context to the disclosure, and should not be taken as an acknowledgment that some or all of the discussions were known at the time the invention was made, or otherwise constitute prior art. [Overview of the Initiative] [Means for solving the problem]

[0007] This summary is provided to introduce a selection of concepts in a simplified form. These concepts will be described in more detail in the detailed description of the embodiments of the examples of disclosure below. This summary is not intended to necessarily identify any important or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0008] This disclosure generally pertains to solid source precursor delivery systems. More specifically, this disclosure pertains to solid source precursor containers used to evaporate a fixed amount of solid precursor stored within the container. The disclosed source containers replace a single meandering channel used to store a fixed amount of precursor and guide a carrier gas through the container with multiple individual cavities or pockets within the container. Each individual pocket can be filled with precursor. In one configuration, the pockets can be filled with pre-formed blocks of compressed precursor, which typically have a higher density than that achievable when filling the meandering channel with powdered precursor. The increased density of the solid precursor material increases the capacity of the source container, resulting in longer intervals between source container replacements and / or replenishments.

[0009] In one configuration, a reactant source container is provided, comprising a container body and a lid. The lid is configured to adhere to the container body and seal the internal region of the container body defined by one or more side walls and a bottom surface. Multiple individual pockets are formed within the internal region of the container body, each configured to hold a certain amount of solid source precursor. In one configuration, the pockets can be of uniform size (e.g., have common dimensions). The individual pockets can have any configuration. For example, the pockets can be cylindrical, rectangular prism-shaped, etc. Generally, each pocket has a closed bottom or bottom end, one or more side walls, and an open top end. In such a configuration, the pockets can receive pre-formed blocks of compressed solid precursor (e.g., through the open top end). This configuration facilitates filling the source container. Each of the multiple individual pockets inside the source container is exposed to a fluid flow path that passes through the inside of the container between a fluid path inlet end and a fluid path outlet end. This fluid path passes over each individual pocket in the source container, enabling the transport of evaporative precursor from the source container. To determine the fluid path over the open end of each pocket, the path can be indirect (e.g., meandering) between the fluid path inlet and fluid path outlet.

[0010] In one configuration, the container body has a two-piece structure. In this configuration, the container body may have a base that receives an insert having multiple pockets formed therein. In a further configuration, the insert may be formed in multiple layers stacked to form multiple pockets. Such configurations may be beneficial when working with hard and / or brittle materials.

[0011] In another configuration, the pockets can be formed by multiple intersecting partition walls that collectively define a pocket matrix within the container body. In one configuration, the partition walls can be evenly spaced to enhance heat conduction throughout the container body. In such a configuration, the container body can have a high degree of symmetry.

[0012] These and other embodiments will be readily apparent to those skilled in the art from the following detailed description of several embodiments with reference to the accompanying drawings. This disclosure is not limited to any particular embodiment disclosed.

[0013] A more complete understanding of the exemplary embodiments of this disclosure can be obtained by referring to the detailed description and claims as considered in relation to the following exemplary drawings. [Brief explanation of the drawing]

[0014] [Figure 1] This figure shows one embodiment of a gas-phase reactor system. [Figure 2] This figure shows one embodiment of a solid precursor sauce container. [Figure 3A] This figure shows the container body of a prior art solid precursor sauce container. [Figure 3B] This figure shows the container body of a prior art solid precursor sauce container. [Figure 4] This figure shows one embodiment of a two-piece container body for a solid precursor sauce container. [Figure 5A] This diagram shows the inserts used in the two-piece container body shown in Figure 4. [Figure 5B] This is a diagram showing the first cross-sectional view of Figure 5A. [Figure 5C] This is a diagram showing the second cross-sectional view of Figure 5A. [Figure 6] This is a diagram showing a multi-piece insert. [Figure 7] This figure shows one embodiment of a solid source precursor container body. [Modes for carrying out the invention]

[0015] It will be understood that the elements in the drawings are illustrative for simplification and clarity and are not necessarily drawn to a consistent scale. For example, some dimensions of elements in the drawings may be exaggerated relative to others to help improve understanding of the illustrated embodiments of this disclosure.

[0016] The descriptions of exemplary embodiments provided below are illustrative and intended for illustrative purposes only. The following descriptions are not intended to limit the scope of this disclosure or claims. Furthermore, the descriptions of multiple embodiments having the described features are not intended to exclude other embodiments having additional features or incorporating different combinations of the described features.

[0017] This disclosure generally relates to improved solid source precursor vessels, apparatus, and methods. The disclosed embodiments make it possible to provide improved maintainability (e.g., refilling) of the solid source precursor vessel while making the reactant vapor readily available.

[0018] Figure 1 schematically shows an exemplary gas-phase reactor system 100, which includes a reactor 102, a solid reactant source 110, a second reactant source 112, and a carrier / purge gas source 114, including a reaction chamber 104, a susceptor 106 that holds a substrate 116 during processing, and a gas distribution system 108 that distributes one or more reactants onto the surface of the substrate 116. The reactant sources and carrier / purge gas sources are fluidly coupled to the reaction chamber 104 via fluid conduits and various valves or controllers. The system also includes a vacuum source 118. The solid reactant source is configured to supply gas-phase reactants generated from a solid precursor source container 20 into the gas-phase reactor 102. The solid source container 20 contains a precursor or source chemical (not shown) which is solid under standard conditions (i.e., room temperature and atmospheric pressure). The solid precursor evaporates within the source container 20, which can be maintained above the evaporation temperature of the precursor. The resulting evaporated reactants are then supplied into the reaction chamber 104. The source container 20 can be placed in the reactant source cabinet 12, which can be individually exhausted and / or thermally controlled. The exemplary system 100 can be used for deposition, such as chemical vapor deposition (CVD), plasma CVD (PECVD), or atomic layer deposition (ALD), but is not limited to these.

[0019] As shown in FIG. 1, the precursor source container 20 is fluidly coupled to the reactor 102 via a conduit 22. By selectively opening the valve 24 in the conduit 22, it becomes possible to supply a gas-phase reactant (e.g., evaporated solid precursor) from the precursor source container 20 to the reactor 102. Preferably, an inert or non-reactive gas is used as the carrier gas for the evaporated precursor. The carrier gas (e.g., nitrogen or argon) can be supplied into the precursor source container 20 through a carrier gas supply conduit 26. In this regard, the precursor source container 20 includes at least one inlet valve 44 for connection to the carrier gas supply conduit 26 and at least one outlet valve 42 for connection to the reactor 102 via the conduit 22. The carrier gas supply conduit 26 includes at least one valve 28, which can be used to fluidly isolate the interior of the source container 20 from a source of carrier gas (not shown).

[0020] The precursor source container 20 can be disposed within the reactant source cabinet 12. The internal space 18 of the cabinet 12 can be maintained at a reduced pressure to, for example, facilitate radiative heating of components within the cabinet 12 (e.g., source containers) and thermally isolate such components from each other to facilitate a uniform temperature field. In other variations, the cabinet is not evacuated and includes convection-enhancing devices (e.g., fans, cross-flow, etc.). The illustrated cabinet 12 includes one or more heating devices 8, such as a radiant heater. Additionally, a reflector (not shown) can be provided, which can be configured to surround the components within the cabinet 12 and reflect the radiant heat generated by the heating device 8 to the components disposed within the cabinet 12. The reflector can be provided on the inner walls, ceiling, and / or floor of the cabinet 12. An additional heater (not shown) can be provided to heat the conduit 22 and any valves between the cabinet 12 and the reactor 102 to prevent condensation of the precursor gas.

[0021] FIG. 2 shows an embodiment of the solid precursor source container 20. As shown, the precursor source container 20 includes a container body 30 and a lid 40. As shown, the lid 40 is removed from the container body 30. However, it will be understood that the lid 40 is fixed to the container body 30 when assembled. The illustrated container 20 is fixed to each other by fixing elements (not shown), such as a combination of screws or nuts and bolts. The fixing elements are adapted to extend into or through aligned mating holes (e.g., bolt holes) that extend around the lid and around the flange of the container body 30. Those skilled in the art will understand that this assembly can be fixed to each other by various alternative methods. As described herein, the container body 30 is configured to hold a certain amount of solid precursor. The lid 40 is configured to direct a gas stream (e.g., a carrier gas) through an internal flow path of the container body to remove the vaporized precursor (e.g., a reaction gas). When the solid source precursor is depleted and needs to be replaced, it is customary to replace the entire source container 20 with a new one having the full amount of the source chemical.

[0022] In the illustrated embodiment, the container lid 40 includes an inlet valve 44 and an outlet valve 42. The inlet valve 44 has an inlet that receives carrier gas via a carrier gas conduit 26 (see Figure 1). The inlet valve 44 has an outlet that is in fluid communication with the inlet end of an internal flow path through the container body. That is, when the source container is assembled, the outlet of the inlet valve 44 connects to a fluid passage through the lid that is in communication with the inside of the container body. The outlet valve 42 has an inlet that is in fluid communication (for example, via a fluid passage through the lid) with the outlet end of an internal flow path through the container body. The outlet valve has an outlet that is in fluid communication with a fluid conduit 22 extending between the source container 20 and the reactor. Various valves, manifolds, and conduits can be placed between the fluid conduit and the outlet valve. During use, the carrier gas flows into the source container through the inlet valve 44, flows out through the inside of the container body 30 and exits the source container through the outlet valve 42. In the illustrated embodiment, the lid 40 further includes a vent or purge valve 46 located between the inlet and outlet valves 44, 42. The purge valve 46 has an inlet that is in fluid communication (for example, via a fluid passage through the lid) with an intermediate portion of the internal flow path through the container body. The purge valve also has an exhaust outlet. During use, the purge valve can be opened to discharge a gas flow from the internal flow path out of the container and has an inlet that can be connected to a source of purge gas (not shown) and an outlet that is in fluid communication with an intermediate portion of the internal flow path through the container body. During operation, the purge valve can be used to expel gas (for example, carrier gas and / or reaction gas) from inside the source container 20.

[0023] Each of the valves 42, 44, and 46 (if utilized) preferably includes valve porting blocks 43, 45, and 47, respectively, which include a gas flow passage that can be restricted or opened by the valve. For example, the porting block 45 of the inlet valve 44 preferably includes an internal gas flow passage extending from the side of the porting block to a restrictor region which includes an internal device (not shown) for restricting the gas flow, such as a valve seat and a movable restrictor or diaphragm. In one embodiment, the movable internal restrictor or diaphragm can be moved by turning a knob (e.g., on the larger cylindrical top of the valve 44) either manually or in an automated manner. Another internal gas flow passage preferably extends from the restrictor region through the opposite side of the porting block 45 to an inlet passage which extends through the lid 40 into the source container 20.

[0024] Figures 3A and 3B show one embodiment of a flow path through the interior of the container body 30. As shown, the container body includes a flow path 38, which is a continuous meandering path extending between an inlet end 32 and an outlet end 34. When the source container is assembled, the inlet end 32 is located below the inlet valve of the lid, and the outlet end 34 is located below the outlet valve of the lid. Thus, when the source container is assembled, the inlet and outlet ends 34, 32 of the flow path 38 are in fluid communication with the inlet and outlet valves of the lid, respectively. In the illustrated embodiment, the middle portion of the flow path 38 includes a purge port manifold 36, which is in fluid communication with a purge valve when the source container is assembled. As shown, the flow path 38 extends between the front and rear walls of the container body in a series of parallel channels connected at alternately adjacent ends. The flow path defines the winding or meandering path that the carrier gas must travel as it flows through the container body 30. During use, the flow path 38 contains a solid precursor source, such as a powder. For example, a solid source precursor / chemical can be packed into the bottom of the channel. When the source container is heated, at least a portion of the solid precursor in the channel can be evaporated. The carrier gas is then exposed to the evaporative precursor while the carrier gas is introduced through a long, meandering channel 38 between the inlet end 32 and the outlet end 34, thereby causing the carrier gas to carry the reactant vapors. That is, since the carrier gas is required to flow along a longer path while being exposed to the precursor source, it is more likely to be exposed to the precursor source for a longer time and therefore more likely to be saturated with the evaporative precursor.

[0025] While the carrier bodies shown in Figures 3A and 3B are effective for generating gas-phase reactants from solid precursors, embodiments of these carrier bodies have several drawbacks. Specifically, the use of narrow, deep channels to form meandering channels makes it difficult to remove and replace solid source precursors (e.g., compacted powder). Furthermore, the narrow, deep channels limit the amount of solid precursor that can be held in the container body of the source vessel. That is, a considerable portion of the internal volume of the container body is used to form dividing walls that define the meandering channels. Embodiments of this disclosure are partly based on the understanding that increasing the surface area of ​​the solid precursor allows for more effective saturation of the carrier gas over shorter channels, while also allowing the container body to hold an increased amount of solid precursor.

[0026] Figure 4 shows one embodiment of a two-piece container body 130 according to various aspects of the present disclosure. Although shown as a two-piece container body, it will be understood that this embodiment is provided as an example and not an limitation. Along these lines, it will be understood that the container body can be a single-piece container body similar to those described above. It will be further understood that the container body 130 of Figure 4 can be replaced with the container body 30 of Figure 2. That is, the lid of Figure 2 can be used with the container body 130. In the illustrated embodiment, the container body 130 includes a base member 132 and an insert tray 150. The base member 132 is a substantially rectangular element having four side walls 134a-134d, a bottom surface 136 and a substantially open top surface. These side walls and bottom surface together define an opening / recess (e.g., an internal area) of a size that accommodates the insert tray 150. In the illustrated embodiment, the base member 132 further includes a shelf 138 positioned within its interior adjacent to the front wall 134a. The shelf 138 includes an inlet manifold 144, an outlet manifold 142, and a purge valve manifold 146. When the tray insert 150 is placed inside the base member 132, an opening in the side wall of the inlet manifold 144 opens into an opening 155b at the first end of a flow path (not shown) extending through the insertion tray 150. Similarly, when the insertion tray 150 is placed inside the base member 132, an opening in the outlet manifold 142 opens into a second opening 155a at the second end of a flow path extending through the insertion tray. Similarly, an opening in the side wall of the purge manifold 146 opens into a third opening 155c located in the middle portion of the flow path through the insertion tray 150. When the lid 40 is attached to the container body (see, for example, Figure 2), the inlet manifold 144 is positioned below the inlet valve 44, and the outlet manifold 142 is positioned below the outlet valve 42.

[0027] In the illustrated embodiment, the outer surface of the tray insert 150 is molded to correspond to the inner surface of the base member, as defined by the side walls and bottom surface. When inserted, the upper edge of the insertion tray is generally at the same height as the upper edge of the base member 132. The tray insert 150 includes a plurality of individual pockets 152, each configured to hold a certain amount of solid source precursor. Each individual pocket is formed into the tray insert, extending from an open upper end near the upper edge of the tray insert to a closed bottom end near the bottom surface of the tray insert. In one embodiment, all pockets 152 have the same dimensions (e.g., length, width, and depth), allowing each pocket to receive the same pre-prepared amount (e.g., a compressed block) of solid precursor. However, this is not a strict requirement.

[0028] Figures 5A to 5C show a perspective view of the insertion tray 150, a cross-sectional view of the insertion tray along the cutting line A-A' in Figure 5A, and a cross-sectional view of the insertion tray along the cutting line B-B' in Figure 5A, respectively. In the illustrated embodiment, the tray insert 150 includes four outer walls 154a-d (hereinafter 154 unless otherwise specified) that define the substantially rectangular perimeter of the tray insert 150. Each of the outer walls extends from a solid bottom surface 156 to the top edge. The top edge of the tray insert 150 is configured to engage with the bottom surface of the lid when the sauce container is assembled. To provide a plurality of pockets 152, the illustrated tray insert includes a first plurality of dividing walls 162a-f (hereinafter 162 unless otherwise specified) that extend between the front wall 154a and the rear wall 154c of the tray insert 150. The tray insert also includes a second set of dividing walls 164a-e (hereinafter referred to as 164 unless otherwise specified) extending between the side walls 154b and 154d of the tray insert 150. In the illustrated embodiment, the first and second sets of dividing walls 162 and 164 are evenly spaced between their respective pairs of outer walls and are substantially parallel to their respective outer walls. That is, the first set of dividing walls 162 can substantially traverse the second set of dividing walls 164. In this configuration, the two sets of dividing walls 162, 164 define a matrix of equally sized pockets 152. Although we have discussed that the pockets are formed by the intersection of the traversing dividing walls, it will be understood that the pockets can be defined in other ways. For example, each individual pocket can be a cylindrical hole recessed into the tray insert (i.e., if a two-piece container body is used) or into the container body (i.e., if a single-piece container body is used). However, by using transverse dividing walls that define a matrix of equally sized pockets, the container body becomes more symmetrical. When the source container is heated, this symmetry can provide more uniform thermal performance.

[0029] In the illustrated embodiment, each of the pockets 152 has substantially the same cross-sectional dimensions. That is, each pocket 152 can have the same length "L" measured between two opposing side walls and the same width "W" measured between another pair of opposing side walls. See Figure 5B. Furthermore, each pocket can have the same depth "D" measured from the closed bottom surface 156 of the pocket to the open top surface 158. As shown, by using pockets of a common size, it becomes possible to fill the pockets with a pre-formed amount of solid precursor. That is, rather than filling the bottom of a deep, narrow channel (e.g., a meandering channel) with powder and compressing the powder at the bottom of the channel, a pre-formed compressed block 172 of the precursor material can be inserted into each of the pockets 152. For example, the precursor powder can be compressed into a block 172 sized to fit inside the pocket 152. By using the compressed block 172, the density of the precursor in the source container is increased. For example, by packing the deep, narrow channel of the flow path 38 shown in Figures 3A and 3B with hafnium chloride (HfCl4) precursor powder, the maximum precursor density was typically about 2 grams per cubic centimeter (g / cc). By using a compression block, a precursor density of 3 g / cc or more is often achieved. Assuming that the internal volumes of the container body 30 in Figure 3A and the container body 130 in Figure 4 are equal, using a pre-compressed precursor block increases the source container capacity by 50%. This increase in source container capacity results in longer intervals between source container replacements and / or replenishments. Similarly, this reduces downtime in the manufacturing process.

[0030] Notably, each top edge or open end 158 of the pockets 152 is typically located below the upper edge of the insertion tray 150 or container 30. More specifically, there must be space above each pocket, allowing the carrier gas to flow over the top surface of the pocket between the inlet and outlet of the container body. As best shown in Figure 5A, the divider walls 162, 164 and the outer wall 154 are used collectively to define a flow path 170 through the insertion tray 150. This flow path extends over each top surface of the pockets 152 (e.g., the open end 158), allowing the carrier gas to transport the evaporative precursor from each pocket when the source container is in use. The outer wall 154 typically has its full height so that, when assembled, it contacts the bottom surface of the lid of the source container. The divider wall 162 is configured to have a height equal to the upper edge of the outer wall, or a lower height (e.g., the same height as the upper edge of the pocket 152) to guide the fluid flow through the container. In the illustrated embodiment, each pocket 152 is defined by four side walls. Two of the side walls are of full height so as to contact the lid when the source container is assembled, while the other two side walls are of lower height and define the flow path across the top surface of the pocket 152. Figure 5A shows one non-limiting embodiment of a flow path 170 extending over the top surface of each pocket 152 between the inlet and outlet.

[0031] As shown in Figures 5A to 5C, the insertion tray 150 can be a single-piece element. For example, the insertion tray can be milled or cast from a single block of material. Other manufacturing techniques are also possible.

[0032] Figure 6 shows an alternative embodiment of the insertion tray 150. In this embodiment, the insertion tray is formed from three layers of wall fasteners 160a, 160b, and 160c. The insertion tray can be manufactured by stacking these layers of wall fasteners 160a-c. In one embodiment, each wall fastener can define a matrix of pockets having upper and lower open ends. In such an embodiment, the fasteners can be stacked on a flat plate that forms the bottom of the insertion tray. In another embodiment, the lowest wall fastener 160c can include a bottom surface. Although shown as having three layers, it will be understood that multilayer insertion trays can have more or fewer layers. Constructing the insertion tray from separate layers may be particularly beneficial in insertion trays made from ceramic materials such as aluminum nitride and silicon carbide, but is not limited to these. It will be further understood that insertion trays and / or container bodies can be made from a variety of materials, including ceramics and stainless steel.

[0033] Figure 7 shows another embodiment of the container body 230. In this embodiment, the container body has a one-piece structure; that is, the pocket 152 is integrally formed within the container body 30. In this configuration, the pocket 152 also has common dimensions, making it easy to fill the pocket with a block of a common size for the compression precursor. As shown in the figure, the flow path 170 passes between the inlet manifold 144 and the outlet manifold 142, again passing over the open top surfaces of each pocket. As described above, once the source container is assembled, these manifolds are in fluid communication with the inlet and outlet valves.

[0034] While exemplary embodiments of the Disclosure are described herein, it should be understood that the Disclosure is not so limited. Various modifications, variations, and enhancements of the systems and methods described herein can be made without departing from the spirit and scope of the Disclosure. The subject matter of the Disclosure includes various systems, components, and configurations, as well as all novel and non-trivial combinations and partial combinations thereof of other features, functions, actions, and / or properties disclosed herein, and all equivalents thereof. [Explanation of Symbols]

[0035] 8 Heating devices 12 Reactant Source Cabinet 18 Interior space 20 Solid Preca Sauce Containers 22 Fluid conduit 24 valves 26 Carrier gas supply conduit 28 valves 30 Container Body 32 Inlet end 34 Outlet end 36. Purge port manifold 38 channels 40 lid 42 Outlet valve 43 Valve porting block 44 Inlet valve 45 Valve porting block 46. ​​Purge valve 47 Valve porting block 100 Gas-phase reactor system 102 Gas-phase reactor 104 Reaction Chamber 106 Susceptor 108 Gas distribution system 110 Solid Reactant Sources 112 Second reactant source 114 Carrier / Purge Gas Source 116 circuit boards 118 Vacuum Sauce 130 Two-piece container body 132 Foundation members 134a~134d Side wall 136 Bottom 138 shelves 142 Exit Manifold 144 Entrance Manifold 146 Purge valve manifold 150 Insertion Trays 152 individual pockets 154a front wall 154b side wall 154c back wall 154d side wall 155a Second opening 155b Opening at the first end 155c Third opening 156 Base 158 Apex 160a~c wall fixings 162a~f First set of multiple dividing walls 164a~e Second set of dividing walls 170 flow channels 172 Pre-formed compressed block 230 Container Body

Claims

1. A container body having an outer wall and a bottom surface that define the internal area of ​​the container body, A plurality of pockets arranged within the internal region of the container body, each of which is configured to contain a certain amount of solid source precursor, and each of which is composed of a plurality of side walls of different heights, A lid configured to engage with the container body, and which, when connected to the container body, seals the internal region of the container body; A fluid channel within the internal region of the container body, wherein the upper part of some of the side walls constituting the pockets is in contact with the bottom surface of the lid, and the upper part of the other side walls is separated from the bottom surface of the lid, so that the fluid channel is formed above the plurality of pockets and below the bottom surface of the lid, and extends between the inlet end and the outlet end along a path passing over at least a portion of each of the plurality of pockets, A reaction source container containing the reaction mixture.

2. An inlet valve and an outlet valve attached to the top surface of the lid, wherein each valve is connected to a fluid passage through the lid. The container according to claim 1, further comprising:

3. The container according to claim 2, wherein when the lid is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid passage, and the outlet valve is in fluid communication with the outlet end of the fluid passage.

4. Each of the aforementioned multiple pockets is Closed bottom end, Open upper end and The side wall surface of the side wall extending between the closed bottom end and the open upper end, wherein the closed bottom end, the open upper end and the side wall surface define the internal volume of the pocket, The container according to claim 1, including the following:

5. The container according to claim 4, wherein each of the plurality of pockets has a common dimension.

6. The container according to claim 4, wherein each of the plurality of pockets includes a rectangular prism.

7. An insert configured to be placed within the internal region of the container body, wherein the plurality of pockets are formed within the insert. The container according to claim 1, further comprising:

8. The container according to claim 7, wherein the insert comprises at least a first layer and a second layer, the first and second layers stacked within the internal region of the container body to collectively define the plurality of pockets.

9. The container according to claim 7, wherein the first and second layers of the insert are formed from a ceramic material.

10. The container according to claim 1, wherein the flow path includes an indirect flow path between the inlet end and the outlet end.

11. Each of the side walls constituting the pocket is A first set of parallel dividing walls extending between opposing side walls of the first set of container bodies, A second set of parallel dividing walls extending between opposing side walls of the second set of container bodies, wherein the first and second sets of dividing walls intersect to define the matrix of the multiple pockets, The container according to claim 1, including the following:

12. The container according to claim 11, wherein the first plurality of dividing walls and the second plurality of dividing walls are each equally spaced between the opposing side walls of the first set and the opposing side walls of the second set.

13. The container according to claim 11, wherein the first and second plurality of dividing walls differ in height so as to define the fluid flow path between the inlet end and the outlet end.

Images