Pressure and temperature sensor

Abstract

To provide a sensor that can accurately perform measurement.SOLUTION: A sensor comprises: a sensor body 15; a diaphragm 21 that defines a storage space R with the sensor body 15; and a transmission body S that is filled into the storage space R. Measuring bodies 16, 17 and a spacer 19 are arranged in the storage space R. A through channel 24 for injecting the transmission body S into the storage space R is formed over the sensor body 15 and the spacer 19.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a pressure-temperature sensor capable of measuring the pressure and temperature of a fluid to be measured.

Background Art

[0002] In various fields, pressure and temperature are used for equipment operation, maintenance, etc. In many cases, both of these pressure and temperature are used, and a pressure-temperature sensor is used to meet the requirement of obtaining both pressure and temperature simultaneously. The pressure-temperature sensor includes a pressure measuring body that outputs a pressure signal corresponding to the pressure of the fluid to be measured, and a temperature measuring body that outputs a temperature signal corresponding to the temperature of the fluid to be measured, and can transmit the pressure signal and the temperature signal to an external device.

[0003] In such a pressure-temperature sensor, the pressure measuring body and the temperature measuring body are arranged in the fluid to be measured and may be damaged by chemical and mechanical influences from the fluid to be measured. Therefore, an isolation-type pressure-temperature sensor in which the pressure measuring body and the temperature measuring body are indirectly contacted with the fluid to be measured is widely used.

[0004] The isolation-type pressure-temperature sensor has, for example, a pressure measuring body and a temperature measuring body arranged in an accommodation space defined by a sensor body and a diaphragm, and a transmission body is filled in the accommodation space. The pressure measuring body outputs a pressure signal corresponding to the pressure of the transmission body that receives the pressure of the fluid to be measured through the diaphragm. The temperature measuring body outputs a temperature signal corresponding to the temperature of the transmission body that receives the temperature of the fluid to be measured through the diaphragm. Then, the pressure signal and the temperature signal are converted into a pressure measurement value and a temperature measurement value by an integrated circuit provided on a substrate or the like.

[0005] An example of such an isolated pressure-temperature sensor is the pressure-temperature sensor shown in Patent Document 1, in which a sensor chip integrating a pressure measuring element and a temperature measuring element is arranged in a housing space filled with a transmitting material such as silicone oil. The sensor chip is a semiconductor diaphragm type equipped with a bridge circuit. When pressure is applied to the sensor chip, the intermediate voltage of the bridge circuit, which functions as a pressure measuring element, changes, and the sensor chip outputs a pressure signal corresponding to this change. Also, when the temperature of the sensor chip changes, the voltage across the bridge circuit, which functions as a temperature measuring element, changes, and the sensor chip outputs a temperature signal corresponding to this change.

[0006] As described above, in a pressure-temperature sensor like the one in Patent Document 1, pressure and temperature can be measured by a sensor chip that integrates both a pressure measuring element and a temperature measuring element. Therefore, miniaturization is possible. However, because two types of measurements are measured by an integrated sensor chip, the structure of a pressure-temperature sensor like the one in Patent Document 1 is limited. Furthermore, changes in the pressure of the transmitting element affect the temperature measuring element. Similarly, changes in the temperature of the transmitting element affect the pressure measuring element. Due to these factors, a pressure-temperature sensor like the one in Patent Document 1 could not accurately measure values ​​for each of the measuring elements.

[0007] Therefore, pressure-temperature sensors like the one described in Patent Document 1 have difficulty correcting for the influence of temperature on pressure measurement according to the temperature signal. As a result, the measured pressure and temperature values ​​were inaccurate. However, it is possible to obtain accurate pressure and temperature values ​​by pre-calculating the relationship between pressure and temperature. However, sensor chips are manufactured using semiconductor processes, and there is a very large variation between production lots. Therefore, each sensor chip requires calibration for pressure and temperature, which is a very time-consuming process.

[0008] Another example of a pressure-temperature sensor, shown in Patent Document 2, has a pressure measuring body and a temperature measuring body as separate components. Specifically, the pressure measuring body is located in a housing space filled with a transmission material. The temperature measuring body is located protruding from the center of the diaphragm toward the fluid being measured. The temperature measuring body is constructed by fixing a thermistor located in a cap-shaped housing part, which is filled with a resin with high thermal conductivity. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] Japanese Patent Publication No. 2009-121871 (pages 6-8, Figure 2) [Patent Document 2] Japanese Patent Publication No. 2013-2885 (pages 6-9, Figure 1) [Overview of the project] [Problems that the invention aims to solve]

[0010] In a pressure-temperature sensor like the one described in Patent Document 2, the pressure measuring element and the temperature measuring element are separate components, and they can output pressure signals or temperature signals individually. Therefore, a pressure-temperature sensor like the one described in Patent Document 2 can compensate for the effect of temperature on the pressure measuring element according to the temperature signal. However, while part of the temperature measuring element is exposed to the fluid being measured, the pressure measuring element is located within a transmission element. Therefore, when the temperature of the fluid being measured changes, the temperature change transmitted to the pressure measuring element lags behind the temperature change transmitted to the temperature measuring element, and even with the above-mentioned compensation, accurate pressure measurements may not be obtained.

[0011] This invention was made in view of these problems, and aims to provide a pressure-temperature sensor capable of accurately measuring pressure. [Means for solving the problem]

[0012] To solve the above problem, the pressure and temperature sensor of the present invention is Sensor body and A diaphragm that defines the housing space together with the aforementioned sensor body, The facility comprises a transmission body filled in the aforementioned containment space, A pressure measuring element and a temperature measuring element are arranged in the aforementioned containment space. According to this, even if the temperature of the sealed fluid changes, for example, the pressure-temperature sensor can correct the pressure value measured by the pressure measuring body with the accurate temperature measured by the temperature measuring body. As a result, the pressure-temperature sensor can accurately measure pressure.

[0013] The pressure measuring element and the temperature measuring element may be located on the sensor body side. According to this, the object being measured is placed on the stationary side. Therefore, the physical changes affecting the object being measured are small.

[0014] The system includes a bonding wire electrically connected to the pressure measuring body or the temperature measuring body, In the aforementioned containment space, a buffering member may be placed between the diaphragm, the pressure measuring body, the temperature measuring body, and the bonding wire to buffer the transmission body. According to this design, even if high pressure is applied to the diaphragm from the fluid being measured in a short period of time, the diaphragm will not deform significantly. As a result, no large forces are applied from the transmission body to the pressure sensor, temperature sensor, and bonding wire itself. Therefore, the pressure sensor, temperature sensor, the connections between each bonding wire and the bonding wire, and the connections between the temperature sensor and the bonding wire are protected.

[0015] The buffer member may be positioned closer to the diaphragm than the pressure measuring body and the temperature measuring body. According to this design, the space between the diaphragm and the buffer member becomes narrower. As a result, even if a high pressure is applied from the fluid being measured in a short period of time, a large pressure will not be applied to the transmission element in the space where the pressure and temperature measuring elements are housed.

[0016] The buffer member may have a through hole formed therein. According to this, the through hole serves as an orifice function. Therefore, the configuration of the buffer member is simple.

[0017] The buffer member may be formed such that the axis of the through hole is offset from the pressure measuring body and the temperature measuring body. According to this, it becomes difficult for the transmission body moving through the through hole to directly act on the pressure measuring body and the temperature measuring body. Thereby, the pressure measuring body and the temperature measuring body are protected.

[0018] The temperature measuring body may be a resistance temperature detector. According to this, the influence of the pressure acting on the temperature measuring body is reduced. Therefore, the pressure temperature sensor can measure temperature and pressure more simply and accurately.

[0019] The pressure measuring body and the temperature measuring body may be separate bodies. According to this, the separate pressure measuring body and temperature measuring body are arranged in a common accommodation space. Thereby, the pressure temperature sensor can adopt a measuring body suitable for each measured value and can have a structure with less influence received from the other measured value.

[0020] The pressure temperature sensor may correct the measured value of the pressure measuring body and the measured value of the temperature measuring body with each other. According to this, the pressure temperature sensor can accurately measure pressure and temperature.

Brief Description of the Drawings

[0021] [Figure 1] It is a perspective view of the pressure temperature sensor of the embodiment according to the present invention. [Figure 2] It is a cross-sectional view of the main part of the pressure temperature sensor of the embodiment according to the present invention. [Figure 3] It is a top view of the spacer. [Figure 4] It is a top view of the indoor cover. [Modes for carrying out the invention]

[0022] Embodiments for implementing the pressure-temperature sensor according to the present invention will be described below based on examples. [Examples]

[0023] The pressure-temperature sensor according to the embodiment will be described with reference to Figures 1 to 4. Hereinafter, the top, bottom, left, and right sides when viewed from the front in Figure 2 will be described as the top and bottom sides of the pressure-temperature sensor. Specifically, the upper side of the paper where the connector 11 is located will be described as the top side of the pressure-temperature sensor, and the lower side of the paper where the diaphragm cover 22 is located will be described as the bottom side of the pressure-temperature sensor.

[0024] As shown in Figure 1, the pressure and temperature sensor 1 of the present invention is configured to detect the pressure of a target object and is powered by a battery (not shown). The pressure and temperature sensor 1 is fixed to an installation location such as a pipe, duct, or tank (not shown) and detects the pressure and temperature of the target object inside the installation location. The target object is a fluid to be measured, such as a liquid or gas.

[0025] As shown in Figure 1, the pressure and temperature sensor 1 mainly consists of a power supply unit 2 and a sensor unit 10. For example, the pressure and temperature sensor 1 is fixed to a pipe (not shown) by screwing the threaded portion 2a formed on the lower end of the power supply unit 2 into the mounting port of the pipe (not shown).

[0026] As shown in Figure 2, the sensor unit 10 mainly consists of, from top to bottom, a connector 11, a circuit board 12, a signal processing circuit 13, a plurality of electrode pins 14, a sensor body 15, a pressure measuring body 16, a temperature measuring body 17, a plurality of bonding wires 18, a spacer 19, an indoor cover 20 as a buffering member, a diaphragm 21, and a diaphragm cover 22.

[0027] The connector 11 is electrically connected to the power supply unit 2. The connector 11, the signal processing circuit 13, and the multiple electrode pins 14 are electrically connected to the circuit board 12. The sensor body 15 is made of a metal or resin material.

[0028] The pressure measuring element 16 and the temperature measuring element 17 are positioned within the recess 150 of the sensor body 15. Multiple bonding wires 18 are electrically connected to the electrode pins 14 and the pressure measuring element 16, or to the electrode pins 14 and the temperature measuring element 17.

[0029] The spacer 19 is positioned within the recess 150. The diaphragm 21 is made of a metal or resin material. The diaphragm cover 22 is also made of a metal or resin material. Furthermore, the housing space R defined by the sensor body 15 and the diaphragm 21 is filled with silicone oil S as a transmission medium.

[0030] The sensor body 15 is formed in a bottomed cylindrical shape. The sensor body 15 has a recess 150, a plurality of communication holes 151, and a communication passage 152. The recess 150 is recessed axially upward from the lower end of the sensor body 15. The communication holes 151 penetrate the recess 150 axially from the outer diameter side end of the bottom surface 150a. The communication passage 152 penetrates axially through one of the communication holes 151 on the outer diameter side of the bottom surface 150a.

[0031] The communication holes 151 are arranged at approximately equal intervals in the circumferential direction. Each communication hole 151 is sealed by a hermetic seal 23 with one electrode pin 14 inserted through it.

[0032] The upper end surfaces of the pressure measuring body 16 and the temperature measuring body 17 are attached to the center of the bottom surface 150a of the recess 150 with adhesive.

[0033] The pressure measuring element 16 is a MEMS (Micro Electro Mechanical Systems) device. The pressure measuring element 16 has its sensing surface 16a, which is its lower surface, facing the diaphragm 21. When the pressure acting on the sensing surface 16a changes, the resistance value of a gauge resistor (not shown) changes. Using this, the pressure measuring element 16 outputs a voltage corresponding to the pressure as a pressure signal, i.e., a measured value.

[0034] The temperature measuring element 17 has its sensing surface 17a, which is its lower surface, facing the diaphragm 21. When the temperature acting on the sensing surface 17a changes, the electrical resistance value changes. Using this, the temperature measuring element 17 outputs a voltage corresponding to the temperature as a temperature signal, i.e., a measured value. The temperature measuring element 17 is preferably a platinum resistance thermometer, but it may also be a resistance thermometer other than a platinum resistance thermometer, such as a copper resistance thermometer or a nickel resistance thermometer.

[0035] Furthermore, a cylindrical spacer 19, formed along the circumferential surface 150b which is substantially perpendicular to the bottom surface 150a, is fitted into the recess 150. The upper end surface of the spacer 19 is attached to the outer diameter side end of the bottom surface 150a with adhesive.

[0036] Referring to Figures 2 and 3, the spacer 19 is made of aluminum. The axial dimensions of the spacer 19 are formed to be substantially the same. The radial dimensions of the spacer 19 are substantially the same except that a thickened portion 190 that bulges inward is partially formed. A passage 191 that penetrates axially is formed in the thickened portion 190. This passage 191 is formed to be aligned with the passage 152 of the sensor body 15. These passages 152 and 191 form a through-flow channel 24 that communicates with the housing space R.

[0037] Referring to Figure 2, the through-channel 24 is a channel used when filling the containment space R with silicone oil S. After the silicone oil S is filled, an oil plug 25 is fitted to its upper end to seal the through-channel 24.

[0038] Furthermore, an interior cover 20, which is formed in a disc shape along the circumferential surface 150b, is fitted into the recess 150. The upper end surface of the interior cover 20 is attached to the lower end surface of the spacer 19 with adhesive.

[0039] Referring to Figures 2 and 4, the interior cover 20 is made of aluminum. The interior cover 20 has a base 200 and a peripheral wall 201. The base 200 is a round, flat plate. The peripheral wall 201 is annular and extends axially upward from the outer peripheral end of the base 200. A through hole 202 is formed in the center of the base 200, penetrating axially.

[0040] Furthermore, the peripheral wall 201 of the interior cover 20 is formed with substantially the same axial dimensions. The radial dimensions of the peripheral wall 201 are substantially the same except for the formation of a thin section 201a on the inner diameter side that is recessed towards the outer diameter side. This thin section 201a is formed to be aligned with the thick section 190 of the spacer 19.

[0041] Furthermore, the diaphragm 21 is fixed to the lower end of the sensor body 15 by welding or adhesive. The containment space R formed between the recess 150 of the sensor body 15 and the diaphragm 21 is isolated from the fluid to be measured.

[0042] More specifically, the containment space R is divided into space R1 and space R3. Space R1 is defined by the bottom surface 150a of the recess 150, the spacer 19, and the interior cover 20. Space R3 is defined by the interior cover 20, the circumferential surface 150b of the recess 150, and the diaphragm 21. Spaces R1 and R3 are connected by a through hole 202 in the interior cover 20.

[0043] Furthermore, within space R1, the space defined by the lower end surface of the thick portion 190 of the spacer 19, the inner circumferential surface of the thin portion 201a of the interior cover 20, and the upper end surface of the base portion 200 is called space R2.

[0044] Furthermore, referring to Figure 2, the height dimension of the peripheral wall 201 of the interior cover 20, or more specifically, the dimension from the upper end surface of the base 200 to the upper end surface of the peripheral wall 201, is shorter than the thickness dimension of the base 200. As a result, the height dimension of space R2 is also shorter than the thickness dimension of the base 200. Thus, space R2 is a very narrow space within space R1.

[0045] Furthermore, a dish-shaped diaphragm cover 22 is fixed to the lower end of the diaphragm 21 by welding or adhesive. In addition, multiple communication passages 22a that penetrate in the axial direction are formed in the bottom of the diaphragm cover 22.

[0046] Next, the method for outputting the pressure and temperature measurements from the pressure and temperature sensor 1 will be described. The pressure and temperature sensor 1, which is fixed to the pipe connection port, has the fluid to be measured flowing into the space between the diaphragm 21 and the diaphragm cover 22 through a communication passage 22a. Pressure and temperature are transmitted from this fluid to the silicone oil S via the diaphragm 21. Therefore, a voltage corresponding to the pressure of the silicone oil S is obtained from the pressure measuring body 16. In addition, a voltage corresponding to the temperature of the silicone oil S is obtained from the temperature measuring body 17.

[0047] Each voltage obtained from the pressure measuring element 16 or the temperature measuring element 17 is an analog signal. Each analog signal is amplified by an amplification circuit (not shown) provided on the circuit board 12, then input to the signal processing circuit 13, where it is converted to a digital signal in the A / D converter section and then corrected in the correction section. The amplification circuit may or may not be provided on the pressure measuring element 16 and the temperature measuring element 17.

[0048] Digital signals are less susceptible to external factors such as noise than analog signals. Therefore, compared to configurations where A / D conversion is performed in the power supply unit 2 or external devices, the pressure and temperature sensor 1 in this embodiment can output accurate pressure and temperature measurements to external devices.

[0049] The correction in the signal processing circuit 13 described above will now be explained. In the correction unit, the digitally converted temperature data is compared with the reference data, and the digitally converted pressure data is corrected according to this difference. As a result, the pressure and temperature sensor 1 can accurately measure pressure and temperature.

[0050] Furthermore, the correction unit may compare the digitally converted pressure data with the reference data and correct the digitally converted temperature data according to this difference. In addition, the correction unit may correct the pressure data and temperature data mutually.

[0051] Furthermore, although the correction unit was described as using data after digital conversion for correction, it is also possible to correct the analog data first and then convert it using the A / D converter unit.

[0052] As described above, the pressure-temperature sensor 1 of this embodiment can correct the pressure value measured by the pressure measuring element 16 with the accurate temperature measured by the temperature measuring element 17, even if the temperature of the sealed fluid changes. As a result, the pressure-temperature sensor 1 can accurately measure pressure.

[0053] Furthermore, pressure and temperature act on the pressure measuring element 16 and temperature measuring element 17 through the common silicone oil S. This allows the signal processing circuit 13 to compensate for the effect of temperature on the pressure measuring element 16 without any time delay, even if the temperature of the sealed fluid changes. Therefore, the pressure and temperature sensor 1 can accurately measure pressure.

[0054] Furthermore, the pressure measuring element 16 and the temperature measuring element 17 are located in a sensor body 15 that does not operate due to changes in pressure or temperature. Therefore, the physical changes applied to the pressure measuring element 16 and the temperature measuring element 17 are small.

[0055] Furthermore, both the pressure measuring element 16 and the temperature measuring element 17 have their sensing surfaces 16a and 17a facing the diaphragm 21. In other words, the sensing surfaces 16a and 17a are positioned facing the same direction. As a result, the time difference between the temperature acting on the temperature measuring element 17 and the temperature acting on the pressure measuring element 16 is reduced.

[0056] Furthermore, if shock waves or the like occur in the fluid being measured and high pressure acts on the diaphragm 21 in a short time, the diaphragm 21 will indent towards space R3. At this time, the through-hole 202 of the indoor cover 20 functions as an orifice that limits the flow rate of silicone oil S flowing from space R3 to space R1. As a result, the diaphragm 21 does not deform significantly. Consequently, no large forces are applied from the silicone oil S to the pressure measuring body 16, the temperature measuring body 17, and each bonding wire 18.

[0057] In particular, the pressure measuring element 16 is a MEMS with an outer dimension of several millimeters and a thin-walled section of less than 1 mm, making it susceptible to external forces. Furthermore, the connection points of the bonding wires 18 connected to these elements are minute and may delaminate due to external forces. Therefore, in the pressure-temperature sensor 1 of this embodiment, as described above, the connection between the pressure measuring element 16 and the bonding wires 18, and the connection between the temperature measuring element 17 and the bonding wires 18 are protected by the indoor cover 20. While the bonding wires 18 are made of metal such as gold or aluminum, other materials may be used as long as they can transmit the measurement signal.

[0058] Furthermore, the indoor cover 20 is positioned closer to the diaphragm 21 than the pressure measuring body 16 and the temperature measuring body 17. Even considering the difference between the diameter of space R1 and the diameter of space R3, space R3 is narrower than space R1. Therefore, even if a shock wave or the like occurs in the fluid being measured and a high pressure acts on the diaphragm 21 in a short time, the amount of silicone oil S that moves from space R3 to space R1 is small. In other words, a large pressure does not act on the silicone oil S in space R1 where the pressure measuring body 16 and the temperature measuring body 17 are housed.

[0059] Furthermore, as mentioned above, the through-hole 202 serves as an orifice. Therefore, the interior cover 20, which can buffer the silicone oil S, has a simple structure.

[0060] Furthermore, the through-hole 202 of the indoor cover 20 is positioned so that its axis P, indicated by the dashed line, passes between the pressure measuring body 16 and the temperature measuring body 17, which are located in the recess 150. As a result, the silicone oil S moving through the through-hole 202 is less likely to directly act on the pressure measuring body 16 and the temperature measuring body 17. This protects the pressure measuring body 16 and the temperature measuring body 17.

[0061] In addition, each electrode pin 14 is positioned on the outer diameter side of the pressure measuring body 16 and the temperature measuring body 17. Therefore, the connections between each electrode pin 14 and each bonding wire 18, the connections between the pressure measuring body 16 and the bonding wire 18, and the connections between the temperature measuring body 17 and the bonding wire 18 are preferably protected.

[0062] Furthermore, all of the electrode pins 14 are positioned on the outer diameter side of the pressure measuring body 16 and the temperature measuring body 17. Therefore, compared to a configuration where the electrode pins 14 are positioned between the pressure measuring body 16 and the temperature measuring body 17, the pressure measuring body 16 and the temperature measuring body 17 can be positioned closer together. This further reduces the time difference required for temperature and pressure to act on the pressure measuring body 16 or the temperature measuring body 17.

[0063] Furthermore, space R2 is a very narrow space within space R1. Also, space R2 is relatively spaced away from the through-hole 202 of the indoor cover 20. As a result, the pressure and temperature of the fluid being measured are less likely to affect the through-flow channel 24 from space R2.

[0064] Furthermore, the through-channel 24 communicates with space R2 at the outer diameter end of space R1. Compared to a configuration where, for example, the axis of the through-channel 24 is located between the pressure measuring body 16 and the temperature measuring body 17, the pressure and temperature of the fluid being measured are more easily transmitted to the space within space R1, excluding space R2. As a result, the pressure and temperature sensor 1 can accurately and quickly measure the pressure and temperature of the fluid being measured.

[0065] Furthermore, the temperature measuring element 17 is a resistance thermometer. This reduces the influence of pressure acting on the temperature measuring element 17. Therefore, the pressure-temperature sensor 1 can measure temperature and pressure more simply and accurately.

[0066] Furthermore, the separate pressure measuring element 16 and temperature measuring element 17 are arranged in a common containment space R filled with silicone oil S. This allows the pressure and temperature sensor 1 to use measuring elements 16 and 17 suitable for each measurement value, and to have a structure that is less affected by the other measurement value.

[0067] Furthermore, the diaphragm cover 22 is designed so that foreign matter and other debris cannot easily enter the space between it and the diaphragm 21 through its communication passage 22a. Therefore, the diaphragm cover 22 can protect the diaphragm 21.

[0068] Furthermore, space R2 is composed of the thick portion 190 of the spacer 19 and the thin portion 201a of the interior cover 20, which are separate entities. The communication passage 191 communicating with space R2 is formed in the spacer 19. Thus, compared to a configuration in which space R2 and the communication passage 191 are integrally formed, the space R2 and the communication passage 191 in this embodiment can be constructed more simply.

[0069] Furthermore, the indoor cover 20 is made of aluminum, which has high thermal conductivity. This allows heat to be easily transferred to the silicone oil S in the space R1. As a result, the pressure and temperature sensor 1 has good responsiveness in measuring pressure and temperature. Note that the indoor cover 20 can be made of any other metal or resin with high thermal conductivity, and is not limited to aluminum.

[0070] Furthermore, both the spacer 19 and the interior cover 20 are made of aluminum. As a result, the effect of thermal expansion due to the temperature of the silicone oil S is approximately the same. Therefore, the spacer 19 and the interior cover 20 are less prone to damage. It is preferable that the spacer 19 and the interior cover 20 are made of materials with the same coefficient of thermal expansion, but they may be made of materials with different coefficients of thermal expansion.

[0071] Although embodiments of the present invention have been described above with reference to the drawings, the specific configurations are not limited to these embodiments, and any changes or additions that do not depart from the spirit of the present invention are also included.

[0072] For example, in the above embodiment, the configuration was described as measuring absolute pressure without atmospheric pressure acting on the pressure measuring body, but the configuration is not limited to this, and a configuration in which atmospheric pressure is applied to the pressure measuring body to measure gauge pressure is also possible.

[0073] Furthermore, although the temperature measuring element was described as a resistance thermometer, it is not limited to this and may be a thermocouple, thermistor, resistance element, etc., and may be changed as appropriate.

[0074] Furthermore, although the pressure measuring element and temperature measuring element were described as being located on the bottom surface of the same recess, they are not limited to this configuration and may be located on the circumferential surface of the recess.

[0075] Furthermore, although the transmission medium was described as being silicone oil, it is not limited to this and may be water, air, oil, etc., and may be changed as appropriate.

[0076] Furthermore, although the spacer has been described as having a thick and wide portion, it is not limited to this configuration. The radial dimension of the peripheral wall, i.e., the thickness dimension, may be relatively longer than the thickness dimension of the peripheral wall of the indoor cover and be substantially the same over the circumferential direction. With such a configuration, after fixing the spacer to the sensor body, the through-flow channel can be formed, making it easy to create the through-flow channel and the space through which the through-flow channels communicate. [Explanation of Symbols]

[0077] 1. Pressure and temperature sensor 10 Sensor Units 15 Sensor body 16 Pressure measuring element 16a Sensing surface 17 Temperature measurement object 17a Sensing surface 18 Bonding wires 20 Indoor Cover 21 Diaphragm 202 Through hole P axis center R Containment space S Silicone oil (transmitter)

Claims

1. Sensor body and A diaphragm that defines the housing space together with the aforementioned sensor body, The transmission material filling the aforementioned containment space, Equipped with, The aforementioned containment space contains a measuring object and a cylindrical spacer. A through-channel is formed across the sensor body and the spacer for injecting the transmission material into the housing space. The through-flow channel is formed by a through-hole that penetrates the sensor body in the axial direction and a through-hole that penetrates the peripheral wall of the spacer in the axial direction.

2. The sensor according to claim 1, wherein the through hole of the spacer is formed in the thickened portion that bulges outwards on the inner diameter side of the spacer.

Images