Detection device

Abstract

In order to detect a subject without having a lens, this detection device comprises: a light guide part that has a light incidence port and an emission port having an opening smaller than that of the incidence port, and emits light incident from the incidence port from the emission port; and a detection part that detects the light emitted from the emission port.

Description

Incorporation by reference

[0001] This application claims the priority of Japanese Patent Application No. 2022-131239, filed on August 19, 2022, and incorporates its content by reference herein.

Technical Field

[0002] The present invention relates to a detection device.

Background Art

[0003] An imaging device equipped with a technology for subject detection using a signal from an imaging element is known. Conventionally, improvement in the accuracy of subject detection has been required.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

[0005] A detection device, which is one aspect of the disclosed technology, includes an entrance for light and 、 than the entrance Small opening area an aperture and, from the entrance The device includes a frustum portion with a frustum-shaped through-hole through which light toward the opening passes, and a transmission portion having a light exit port formed therein for transmitting light from the opening to the exit port. a light guide portion, and a detection portion that detects the light emitted from the exit, and is provided with The through-hole is formed to be longer than the transmission section in the direction from the inlet to the outlet, and has a plurality of members formed thereon that reflect light incident on the inlet, each member having a first surface that reflects light incident on the inlet toward the inlet, and a second surface that reflects light incident on the inlet toward the first surface of the other members among the plurality of members.

Brief Description of the Drawings

[0006] [Figure 1] FIG. 1 is an explanatory diagram showing an example of a detection device according to Embodiment 1. [Figure 2A] FIG. 2A is an explanatory diagram showing Example 1 of the incident angle dependency of direct incident light on the detection device. [Figure 2B] FIG. 2B is an explanatory diagram showing Example 2 of the incident angle dependency of direct incident light on the detection device. [Figure 2C]Figure 2C is an explanatory diagram showing Example 3 of the dependence of directly incident light on the detection device on the incident angle. [Figure 3] Figure 3 is an explanatory diagram showing the dependence of the incident angle on the direct incident light and reflected incident light to the detection device. [Figure 4] Figure 4 is an explanatory diagram showing another example of the internal structure of the frustum. [Figure 5A] Figure 5A is a partial side cross-sectional view of the detection device according to Embodiment 2. [Figure 5B] Figure 5B is an external view showing two adjacent light guide sections. [Figure 6] Figure 6 is a partial plan view of the detection device according to Embodiment 2. [Figure 7] Figure 7 is an explanatory diagram showing example 1 of the arrangement spacing of multiple light guide units. [Figure 8] Figure 8 is a graph showing the MTF characteristics with respect to the arrangement angle and the angle of incidence of the incident light. [Figure 9] Figure 9 is an explanatory diagram showing example 2 of the arrangement spacing of multiple light guide units. [Figure 10] Figure 10 is an explanatory diagram showing example 3 of the arrangement spacing of multiple light guide units. [Figure 11] Figure 11 is a partial plan view of the detection device according to Embodiment 4. [Figure 12] Figure 12 is a perspective view of the detection device according to Embodiment 5. [Figure 13] Figure 13 is a side view of the detection device according to Embodiment 5. [Figure 14] Figure 14 shows a plan view and a cross-sectional view AB of the first retaining plate. [Figure 15] Figure 15 is a plan view and a cross-sectional view of the second retaining plate. [Figure 16] Figure 16 is an explanatory diagram showing an example of a manufacturing system for light guide components according to Embodiment 6. [Figure 17] Figure 17 is a perspective view showing an example of a light guide component produced by the manufacturing system. [Figure 18] Figure 18 is an explanatory diagram showing an example of connecting light guide components. [Figure 19]FIG. 19 is an explanatory diagram showing an example of another object to be processed. [Figure 20] FIG. 20 is a front view and a plan view showing another example of a light guide component generated by the manufacturing system. [Figure 21] FIG. 21 is a front view and a bottom view showing another example of a light guide component generated by the manufacturing system. [Figure 22] FIG. 22 is an explanatory diagram showing an example of connection of the light guide component. [Figure 23] FIG. 23 is a perspective view showing an example of the structure according to Embodiment 7. [Figure 24] FIG. 24 is a first cross-sectional view of the structure according to Embodiment 7. [Figure 25] FIG. 25 is a second cross-sectional view of the structure according to Embodiment 7. [Figure 26] FIG. 26 is another first cross-sectional view of the structure according to Embodiment 7.

MODE FOR CARRYING OUT THE INVENTION

[0007] [Embodiment 1] FIG. 1 is an explanatory diagram showing an example of a detection device according to Embodiment 1. The detection device 100 includes a light guide unit 101 and a detection unit 110. The light guide unit 101 passes incident light from a subject through its interior and emits it to the detection unit 110. The detection unit 110 has a photodiode, receives the light emitted from the light guide unit 101, and performs photoelectric conversion. The light guide unit 101 and the detection unit 110 will be specifically described.

[0008] The light guide unit 101 includes a frustum portion 102 and a transmission portion 103. The frustum portion 102 and the transmission portion 103 may be connected or integrally formed. The frustum portion 102 has an incident portion 121 at one end and an emission portion 122 at the other end.

[0009] The incident part 121 has an incident port 121a and an edge 121b. The incident port 121a is an opening through which light is incident. Let the center thereof be O1, and let the aperture, which is the distance from the center O1 to the edge 121b, be r1. The edge 121b is the contour of the incident port 121a. The incident light from the incident port 121a is incident inside the frustum part 102. Denote the surface (opening surface) of the incident port 121a and the area of the opening surface as S1.

[0010] The exit part 122 has an opening 122a that communicates with one end of the transmission part 103 and an edge 122b. Let the center of the opening 122a be O2, and let the aperture, which is the distance from the center O2 to the edge 122b, be r2 (< r1). The edge 122b is the contour of the opening 122a. The exit light from the opening 122a is incident inside the transmission part 103. Denote the surface (opening surface) of the opening 122a and the area of the opening surface as S2. The opening 122a has the same shape as the incident port 121a.

[0011] The inner peripheral surface of the frustum part 102 may be an absorption surface that absorbs incident light or a reflection surface that reflects incident light. Also, the inner surface of the frustum part 102 may be hollow or filled with a transparent body that allows light to pass through.

[0012] Here, the frustum part 102 is a solid shape obtained by removing a cone with the vertex O and the bottom surface being the incident port 121a of the incident part 121 from a cone with the vertex O and the bottom surface being the opening 122a of the exit part 122. That is, the frustum part 102 has a through-hole 123 that penetrates from the incident port 121a to the opening 122a. The vertex O does not necessarily exist on the surface 111 of the detection part 110, but in FIG. 1, the vertex O is disposed at the center of the surface 111 for convenience.

[0013] Let the line segment connecting the points O, O1, and O2 be L. Also, let the generatrix of the cone with the vertex at the point O and the bottom surface being the incident port 121a of the incident part 121 be M. Let the incident angle of the incident light with respect to the line segment L be θ. Let the angle formed by the line segment L and the generatrix M be φ. The generatrix M is the line segment connecting the point O and the edge 121b of the incident part 121.

[0014] The transmission unit 103 is a hollow column, i.e., a cylindrical body. One end 131 of the transmission unit 103 communicates with the output unit 122. The other end 132 of the transmission unit 103 has an output port 132a that emits incident light to the detection unit 110 and is connected to the detection unit 110. The openings at one end 131 and the other end 132 of the transmission unit 103 are the same shape and size. The inner surface of the transmission unit 103 efficiently transmits incident light to the output unit 122 by repeatedly undergoing total internal reflection and internal reflection. The through-hole from one end 131 to the other end 132 of the transmission unit 103 is called the transmission path 133.

[0015] The detection unit 110 is flat. The surface 111 of the detection unit 110 is connected to the other end 132 of the transmission unit 103. The inner surface of the surface 111 surrounded by the edge of the other end 132 becomes the light-receiving surface 112 that receives light transmitted within the transmission unit 103. A photoelectric change unit is provided inside the light-receiving surface 112.

[0016] The detection unit 110 converts the light received by the light-receiving surface 112 into an electrical signal using a photodiode. This photodiode is made of, for example, silicon or indium gallium arsenide. The electrical signal is output to an image processing unit (not shown). The image processing unit performs image processing based on the electrical signal and displays the subject image on a display unit (not shown). The image processing unit and the display unit may be located within the detection device 100, or they may be located outside the detection device 100 in a computer capable of communicating with the detection device 100. The detection unit 110 may also have a function to amplify light.

[0017] Since the transmission unit 103 is cylindrical, the light-receiving surface 112 is approximately the same plane and area as the aperture 122a of the emission unit 122. For this reason, S2 is sometimes referred to as the light-receiving area. The relationship between the aperture area S1 and the light-receiving area S2 is shown in the following equation (1).

[0018] D = S² / S¹ (1) D is the light-receiving area ratio.

[0019] Figures 2A to 2C are explanatory diagrams showing examples 1 to 3 of the dependence of directly incident light on the detection device 100 on the incident angle. In Figures 2A to 2C (and similarly in Figures 3 and 4), the frustum portion 102 is shown in cross-sections perpendicular to the circumferential directions of the entrance 121a and the aperture 122a. A and B are points on the edge 121b, and when denoted as AB, it indicates area S1 or that surface. In Figures 2A to 2C, 200a to 200c are luminous fluxes. If 200a to 200c are not distinguished, they are referred to as luminous flux 200. 201a to 201c, 202a, and 202b are rays that define the edge of luminous flux 200. If 201a to 201c are not distinguished, they are referred to as ray 201. If rays 202a and 202b are not distinguished, they are referred to as ray 202.

[0020] A0 is the intersection point of the direct incident light ray 201 from the subject and the aperture surface S1 of the entrance opening 121a, and B0 is the intersection point of the direct incident light ray 202 from the subject and the aperture surface S1 of the entrance opening 121a. When written as A0B0, it indicates the area or surface where the light beams from direct incident light A0 to B0 intersect with the aperture surface S1. A' and B' are points on the edge 122b, and when written as A'B', it indicates the area S2 or the surface.

[0021] The subscript 0 in A0 and B0 indicates the number of reflections of light passing through A0 and B0 within the frustum 102. In generalization, the number of reflections is represented as i and j (where i and j are non-negative integers), and A i B j This is how it is written.

[0022] (a) shows the dependence on the angle of incidence when θ≦φ, (b) shows the dependence on the angle of incidence when θ>φ, and (c) shows the dependence on the angle of incidence when θ>>φ. In case (a), the luminous flux 200a with area A0B0 reaches the aperture 122a without being reflected inside the frustum 102. That is, in (a), area A0B0=S2. Therefore, the receiving angle characteristic I0(θ) for direct illumination in (a) is expressed by the following equation (2).

[0023] I0(θ)=A0B0 / AB=A´B´ / AB···(2)

[0024] In the case of Figure 2B, the luminous beam 200a in Figure 2A cannot all enter the entrance opening 121a, and a partially missing luminous beam 200b enters the entrance opening 121a. Therefore, when the light ray 202b enters the aperture 122a, vignetting occurs at B. The luminous beam 200b with area A0B0 reaches the aperture 122a without being reflected inside the frustum 102. That is, in Figure 2B, area A0B0 <S2である。

[0025] In the case of Figure 2C, not all of the luminous flux 200 from Figure 2A can enter the entrance port 121a, and only the ray 201c enters the entrance port 121a. If θ >> φ becomes any greater than this, the luminous flux 200 will no longer enter the aperture 122a.

[0026] Figure 3 is an explanatory diagram showing the dependence of the incident angle on the direct incident light and reflected incident light to the detection device 100. The reflected light beams 300a-1u and 300a-1d (or reflected incident light 300a-1 if they are not distinguished) are reflected incident light that enters from the entrance 121a, is reflected once inside the frustum 102, and reaches the aperture 122a. The reflected light beam 300a-2 is reflected incident light that enters from the entrance 121a, is reflected twice inside the frustum 102, and reaches the aperture 122a.

[0027] The reflected light beam 300a-1u passes through surface A0A1. The reflected light beam 300a-1d passes through surface B0B1. The reflected light beam 300a-2 passes through surface A1A2.

[0028] The light reception angle characteristics, taking reflected light into consideration, are expressed by the following equation (3).

[0029]

number

[0030] In equation (3) above, R i R is the reflectance at the i-th reflection inside the frustum 102. j R is the reflectance at the jth reflection inside the frustum 102. The reflectance R increases as the number of reflections i and j increases. i , R j It will decrease.

[0031] Figure 4 is an explanatory diagram showing another example of the internal configuration of the frustum portion 102. A light-receiving prevention member 402 is provided on at least a portion of the inner circumferential surface 401 of the frustum portion 102. The light-receiving prevention member 402 reflects the incident light 400, causing the incident light 400 to exit from the entrance 121a of the incident portion 121. Each of the light-receiving prevention members 402 is an annular or arc-shaped member that extends in the circumferential direction of the entrance 121a and the opening 122a. The shape of the cross-section of the light-receiving prevention member 402 perpendicular to the circumferential direction is similar to, for example, the shape of the cross-section of the frustum portion 102 perpendicular to the circumferential direction.

[0032] As shown in Figure 4, the light-receiving prevention member 402 has a first surface 421 and a second surface 422. The first surface 421 is the surface facing the entrance opening 121a and reflects the incident light, causing it to exit the entrance opening 121a. The second surface 422 reflects the incident light, causing it to exit onto the first surface 421 of the other light-receiving prevention member 402 on the side of the opening 122a.

[0033] Thus, according to Embodiment 1, clear subject detection can be achieved without using a lens. Furthermore, according to Embodiment 1, highly directional subject detection can be achieved, that is, subject detection with a deep depth of field and without the concept of focus.

[0034] In Embodiment 1, the shapes of the inlet 121a and opening 122a are circular as an example, but they may also be polygonal. In this case, the cross-sectional shapes perpendicular to the line segment L of the frustum portion 102 and the transmission portion 103 will also be the same polygon.

[0035] Furthermore, in Embodiment 1, a transparent member may be provided at the entrance port 121a. As an example of a transparent member, sealing the entrance port 121a with a transparent plastic member can improve dustproofing inside the frustum portion 102 and the transmission portion 103 while ensuring subject detection. Alternatively, as another example of a transparent member, sealing the entrance port 121a with a lens can improve the light-gathering ability of the incident light and the dustproofing inside the light guide portion 101 while ensuring subject detection.

[0036] [Embodiment 2] Next, Embodiment 2 will be described. In Embodiment 1, the case where there is one light guide unit 101 was used as an example, but in Embodiment 2, an example in which multiple light guide units 101 are provided will be described. Components identical to those in Embodiment 1 are denoted by the same reference numerals, and their descriptions are omitted.

[0037] Figure 5A is a partial side cross-sectional view of a detection device according to Embodiment 2. The detection device 500 has a hemispherical housing 501. The housing 501 has a hemispherical surface 502 and a bottom surface 503. The bottom surface 503 is a disc that seals the opening of the hemispherical surface 502. Inside the housing 501, a detection processing unit 510 is provided in the center of the bottom surface 503.

[0038] The detection processing unit 510 is an assembly of detection units 110 connected to each of the multiple light guide units 101. The areas on the surface of the detection processing unit 510 connected to each transmission unit 103 constitute a photodiode, which is a detection unit 110 that becomes a pixel. These photodiodes are arranged in two dimensions. The other end 132 of each transmission unit 103 is configured such that the end face of the other end 132 is parallel to the surface of the detection processing unit 510.

[0039] Each of the light guides 101 is arranged radially from the detection processing unit 510 toward the hemispherical surface 502. In Figure 5, for the sake of explanation, five light guides 101 are arranged radially. Adjacent frustums 102 are spaced apart. The entrance port 121a is located on the hemispherical surface 502. An opening may be formed at the location of the entrance port 121a on the hemispherical surface 502. Alternatively, the hemispherical surface 502 may have a structure in which the entrance port 121a is sealed with a transparent member. The area of ​​the hemispherical surface 502 other than the entrance port 121a may be formed of a light-shielding member.

[0040] Figure 5B is an external view showing two adjacent light guides 101. In Figure 5B, one of the two adjacent light guides 101 is designated as light guide 101A, and the other as light guide 101B. The adjacent busbars M between light guides 101A and 101B are designated as busbar MA and MB, respectively. The angle formed by busbars MA and MB is designated as the arrangement angle δ between light guides 101A and 101B.

[0041] When a lens is added to the entrance opening 121a, the direction (restriction) of the incident light can be narrowed by the lens, making it possible to make the arrangement angle δ smaller compared to when there is no lens. Therefore, it becomes possible to arrange more light guides 101 compared to when there is no lens, and it becomes possible to acquire high-resolution images.

[0042] Figure 6 is a partial plan view of the detection device 500 according to Embodiment 2. Edges 121b and 122b are both circles centered at points O1 and O2. The distance from point O1 to the first incident end, which is located on edge 121b, is the radius r1 of edge 121b, and the distance from point O1 to the second incident end (a different position from the first incident end), which is located on edge 121b, is also the radius r1 of edge 121b. Similarly, the distance from point O2 to the first exit end, which is located on edge 122b, is the radius r2 of edge 122b, and the distance from point O2 to the second incident end (a different position from the first incident end), which is located on edge 122b, is also the radius r2 of edge 122b. 2 The distance to the exit end (a different position from the first exit end) is also equal to the radius r2 of the edge 122b.

[0043] Figure 7 is an explanatory diagram showing example 1 of the arrangement spacing of multiple light guide units 101. The multiple light guide units 101 are arranged radially from the surface 700 of the detection processing unit 510. The other end 132 of each transmission unit 103 is connected to the surface 700 of the detection processing unit 510.

[0044] Figure 8 is a graph showing the MTF characteristics with respect to the arrangement angle δ and the incident angle θ of the incident light. In graph 800, the horizontal axis is the incident angle θ of the incident light, and the vertical axis is the MFT (Modulation Transfer Function). Waveforms 801 to 803 are the MTF characteristics of each light guide 101. The light guide 101 of waveform 801 and the light guide 101 of waveform 802 are adjacent, and the light guide 101 of waveform 801 and the light guide 101 of waveform 803 are adjacent. Waveforms 801 to 803 are formed with a period of 2φ + δ. 2φ is the opening angle of the frustum portion 102.

[0045] The MTF is calculated using the following formula (4).

[0046] MTF = response within the opening angle (2φ) of the light guide 101 / (opening angle (2φ) of the light guide 101 + response outside the angle from the adjacent light guide 101) ... (4)

[0047] For example, the range of incident angle θ for peak 802p of waveform 802 includes the incident angle θ of the tail 801hR of waveform 801 (out-of-angle response from the adjacent light guide 101), but does not include the incident angle θ of peak 801p of waveform 801. Similarly, the range of incident angle θ for peak 803p of waveform 803 includes the incident angle θ of the tail 801hL of waveform 801 (out-of-angle response from the adjacent light guide 101), but does not include the incident angle θ of peak 801p of waveform 801.

[0048] In other words, at each peak 801p to 803p, the MTF is 100%, so the incident light in the light guide section 101 of waveform 801 does not leak into the light guide sections 101 of the adjacent waveforms 802 and 803. Therefore, by manufacturing the detection device 500 with φ and δ set to produce waveforms 801 to 803 in graph 800, the detection accuracy of the subject can be improved.

[0049] [Embodiment 3] Next, Embodiment 3 will be described. In Embodiment 2, the longitudinal length of the transmission unit 103 was the same for each light guide unit 101, but in Embodiment 3, the length of each light guide unit 101 differs depending on its position. Components identical to those in Embodiments 1 and 2 are denoted by the same reference numerals, and their descriptions are omitted.

[0050] Figure 9 is an explanatory diagram showing example 2 of the arrangement spacing of multiple light guide units 101. In Figure 9, each transmission unit 103 is longer the further inward (towards the center of the detection processing unit 510) it is located within the detection device 500, and shorter the further outward it is located. Each transmission unit 103 is connected perpendicularly to the surface 700 of the detection processing unit 510. In this case, there are also light guide units 101 where the line segment L bends at point O2, but the incident light is reflected within the transmission unit 103 and guided to the light receiving surface 112. As a result, by configuring as shown in Figure 9, the density of transmission units 103 is reduced compared to Embodiment 2, and the intrusion of incident light leaking from adjacent light guide units 101 can be reduced.

[0051] Figure 10 is an explanatory diagram showing example 3 of the arrangement spacing of multiple light guide units 101. In Figure 10, some of the light guide units 101 are not provided with a transmission unit 103, and the emission unit 122 of the light guide unit 101 is directly connected to the surface 700 of the detection processing unit 510. In Figure 10, these some of the light guide units 101 are referred to as light guide units 101L and 101R. The edge 122bL of the emission unit 122 of the light guide unit 101L is directly connected to the surface 700. Similarly, the edge 122bR of the emission unit 122 of the light guide unit 101R is also directly connected to the surface 700.

[0052] In other words, the light guides 101L and 101R are determined so that the light emitted from all the light guides 101 can be received on the flat surface 700. By configuring as shown in Figure 10, the number of parts can be reduced and the detection device 500 can be miniaturized. Note that the configuration of the light guides 101L and 101R in Figure 10 is also applicable to Embodiment 1.

[0053] [Embodiment 4] Next, Embodiment 4 will be described. In Embodiments 1 to 3, the shape of the edges 121b and 122b was made circular, but in the implementation... Form 4 This is an example where the shape of the edges 121b and 122b is polygonal. Components identical to those in Embodiments 1 to 3 are denoted by the same reference numerals, and their descriptions are omitted.

[0054] Figure 11 is a partial plan view of the detection device 500 according to Embodiment 4. In Figure 11, the shape of the edge 121b is a regular hexagon, not a circle.

[0055] The end edges 121b and 122b are both regular hexagons centered on points O1 and O2. Embodiment 4 sets the distance from point O1 to the first incident end, which is a vertex on the end edge 121b, as r1, and the distance from point O1 to the second incident end, which is a side on the end edge 121b, as s1 (< r1). Similarly, the distance from point O2 to the first exit end, which is a vertex on the end edge 122b, is set as r2, and the distance from point O2 to the second exit end, which is a side on the end edge 122b, is set as s2 (< r2).

[0056] In addition, in FIG. 11, the shapes of the end edges 121b and 122b are regular hexagons. However, as long as s1 < r1 and s2 < r2 are satisfied, polygons other than regular hexagons may also be used. Also, in the embodiment 4 for Embodiment 2 to 3 the shapes of the end edges 121b and 122b are polygons. However, the shapes of the end edges 121b and 122b in Embodiment 1 may also be polygons.

[0057] Further, the transmission unit 103 is a hollow cylindrical body, but it may be processed such that the inner peripheral surface of the cylindrical body is plated with metal so that light is reflected. Also, the transmission unit 103 may be a cylindrical body having an optical fiber inside.

[0058] As described above, according to the above-described Embodiments 1 to 4, one detection unit 110 is corresponded to one light guide unit 101 as an individual eye, and the detection unit 110 detects the intensity of the incident light from the light guide unit 101. Each of the light guide units 101 is optically isolated. By one light guide unit 101 incident with incident light from one direction (the direction of the line segment L), a wide-range image can be captured by the entire plurality of light guide units 101. The closer they are, the higher the resolution, and a more detailed image can be captured. <​​​​​​

[0060] Figure 12 is a perspective view of the detection device according to Embodiment 5. Figure 13 is a side view of the detection device according to Embodiment 5. In Figure 13, the light guide section 101 on the depth side is omitted. Figure 14 is a plan view and a cross-sectional view AB of the first retaining plate. Figure 15 is a plan view and a cross-sectional view CD of the second retaining plate.

[0061] The detection device 1200 includes a plurality of light guide units 101 (frustum portion 102 and transmission portion 103), a detection processing unit 510, and a first retaining plate 1201 and a second retaining plate 1202 (the second retaining plate 1202 is omitted in Figure 12 for convenience). The plurality of light guide units 101 are arranged in a matrix such that each incident portion 121 is located on the same curved surface. The other end 132 of each transmission portion 103 is connected to the detection processing unit 510.

[0062] The first retaining plate 1201 and the second retaining plate 1202 each hold a plurality of light guides 101. The first retaining plate 1201 and the second retaining plate 1202 are plate-shaped members. The shape of the first retaining plate 1201 and the second retaining plate 1202 is rectangular, but they may also be polygonal or circular. In addition, the first surface 1201a and the second surface 1202a and the first back surface 1201b and the second back surface 1202b of the first retaining plate 1201 and the second retaining plate 1202 may be flat or curved surfaces.

[0063] The first retaining plate 1201 and the second retaining plate 1202 are arranged so as to intersect the longitudinal direction of the light guide portion 101. Specifically, for example, the first retaining plate 1201 is provided with a first through hole 1301 at a position that intersects with the frustum portion 102, into which the frustum portion 102 can be inserted. The second retaining plate 1202 is provided with a second through hole 1302 at a position that intersects with the transmission portion 103, into which the transmission portion 103 can be inserted.

[0064] The detection device 1200 has at least one of the first retaining plate 1201 and the second retaining plate 1202.

[0065] The first retaining plate 1201 has a plurality of first through holes 1301. The plurality of first through holes 1301 are provided at positions corresponding to the insertion positions of a plurality of frustum portions 102 arranged in a matrix. The first through holes 1301 have a first upper edge 1301a and a first lower edge 1301b.

[0066] The first through-hole 1301 is a hole that penetrates between the first upper edge 1301a and the first lower edge 1301b. The first upper edge 1301a is provided on the first surface 1201a, and the first lower edge 1301b is provided on the first back surface 1201b. The opening diameter of the first upper edge 1301a is larger than the opening diameter of the first lower edge 1301b.

[0067] Therefore, the ejection portion 122 of the frustum portion 102 is inserted from the first upper edge 1301a and protrudes from the first lower edge 1301b, and the frustum portion 102 is held in the first through hole 1301. After this, the frustum portion 102, held by the first retaining plate 1201 through the first through hole 1301, is connected to the transmission portion 103.

[0068] The second retaining plate 1202 has a plurality of second through holes 1302. The plurality of first through holes 1301 are provided at positions corresponding to the insertion positions of the plurality of transmission units 103 arranged in a matrix. The second through holes 1302 have a second upper edge 1302a and a second lower edge 1302b.

[0069] The second through-hole 1302 is a hole that penetrates between the second upper edge 1302a and the second lower edge 1302b. The second upper edge 1302a is provided on the second surface 1202a, and the second lower edge 1302b is provided on the second back surface 1202b. The opening diameter of the second upper edge 1302a is the same as the opening diameter of the second lower edge 1302b.

[0070] Therefore, before connecting the transmission unit 103 to the frustum unit 102 and the detection processing unit 510, the transmission unit 103 may be inserted from the second upper edge 1302a and protrude from the second lower edge 1302b, or it may be inserted from the second lower edge 1302b and protrude from the second upper edge 1302a.

[0071] Furthermore, if the transmission unit 103 is connected to the frustum section 102 but after the detection processing unit 510 has been connected, it is inserted from the second upper edge 1302a and protrudes from the second lower edge 1302b.

[0072] The first retaining plate 1201 and the second retaining plate 1202 are held inside the housing (not shown) of the detection device 1200.

[0073] In the detection device 1200, the light guide unit 101 is composed of the frustum section 102 and the transmission section 103, but the light guide unit 101 may also be composed of only the frustum section 102. In this case, the detection processing unit 510 will be connected to the emission section 122.

[0074] The frustum portion 102 is configured such that the opening diameter of the entrance port 121a is larger than the opening diameter of the exit port 122, but the opening diameter of the entrance port 121a may be the same as the opening diameter of the exit port 122. In this case, the frustum portion 102 will have a cylindrical shape.

[0075] Thus, according to Embodiment 5, by having a structure in which multiple light guide units 101 are held by at least one of the first retaining plate 1201 and the second retaining plate 1202, the positioning accuracy of the multiple light guide units 101 is improved. This makes it easier to manufacture the detection device 1200.

[0076] [Embodiment 6] Next, Embodiment 6 will be described. Embodiment 6 will describe the manufacturing method of the light guide. Components identical to those in Embodiments 1 to 5 are denoted by the same reference numerals, and their descriptions will be omitted.

[0077] Figure 16 is an explanatory diagram showing an example of a manufacturing system for light guide components according to Embodiment 6. The manufacturing system 1600 includes a laser processing machine 1601, an XY stage 1602, and a control device 1603. In Figure 16, the X, Y, and Z axes are orthogonal to each other.

[0078] The laser processing machine 1601 irradiates the workpiece 1610 with laser light. For example, the laser processing machine 1601 forms grooves by irradiating the workpiece 1610 with laser light of a predetermined pulse width (for example, femtosecond pulses) in the Z-axis direction to process it into a desired shape.

[0079] The XY stage 1602 is a positioning platform that is movable along the X-axis and the Y-axis, which is perpendicular to the X-axis. The workpiece 1610 is fixedly mounted on the mounting surface 1620 of the XY stage 1602. The mounting surface 1620 is parallel to the plane stretched along the X-axis and Y-axis.

[0080] The control device 1603 controls the irradiation time of the laser beam from the laser processing machine 1601 and the movement of the XY stage 1602. For example, the control device 1603 adjusts the depth of the groove formed in the Z-axis direction by increasing or decreasing the irradiation time of the laser beam from the laser processing machine 1601. Also, for example, by moving the XY stage 1602 in the Y direction, the control device 1603 can form a long groove in the Y direction on the workpiece 1610 with the laser beam from the laser processing machine 1601, and by moving the XY stage 1602 in the X direction, the width of the long groove in the Y direction can be adjusted with the laser beam from the laser processing machine 1601.

[0081] The groove size can be controlled by the laser beam power (irradiation diameter), the number of pulses irradiated (duration), and the positional movement of the XY stage 1602.

[0082] The irradiation time length and the timing of its variation, controlled by the irradiation time control of the laser beam from the laser processing machine 1601, and the amount of movement and the timing of movement controlled by the movement control of the XY stage 1602 are set in advance in the control device 1603.

[0083] The workpiece to be processed 1610 is a workpiece made of metal, glass, or ceramics. The shape of the workpiece to be processed 1610 is, for example, a plate-shaped workpiece with a trapezoidal cross-section in the YZ plane. The inclined surface 1611 and back surface 1612 of the workpiece to be processed become the irradiation surfaces of the laser beam from the laser processing machine 1601. For example, after the surface 1611 has been irradiated, the back surface 1612 is fixed in place by a person or by a mechanism (not shown) so as to face the laser processing machine 1601.

[0084] The thickness of the workpiece 1610 in the Z-axis direction differs depending on the position in the Y-axis direction. Therefore, the control device 1603 controls the output of the laser processing machine 1601 to be higher in areas where the thickness of the workpiece 1610 in the Z-axis direction is greater, and controls the movement of the XY stage 1602 so that the width of the groove in the X-axis direction increases.

[0085] Figure 17 is a perspective view showing an example of a light guide component produced by the manufacturing system 1600. The light guide component 1700 is produced when the manufacturing system 1600 processes the workpiece 1610. Specifically, first grooves 1711 and 1712 are formed on the surface 1611 of the light guide component 1700, and second grooves 1721 to 1723 are formed on the back surface 1612.

[0086] The first grooves 1711, 1712 and the second grooves 1721-1723 are, for example, roughly trapezoidal in shape, and are machined so that their shape becomes smaller from the front end face 1701 towards the rear end face 1702. The first grooves 1711, 1712 and the second grooves 1721-1723 may also be semicircular in shape.

[0087] Figure 18 is an explanatory diagram showing an example of connecting light guide components 1700. Figure 18 shows a structure 1800 in which six light guide components 1700 are stacked in the Z-axis direction. Specifically, for example, the front surfaces 1611 or back surfaces 1612 of two adjacent light guide components 1700 are connected in the Z-axis direction, thereby stacking six light guide components 1700 in the Z-axis direction.

[0088] By connecting the surfaces 1611 of two adjacent light guide components 1700 in the Z-axis direction, the first grooves 1711 and 1712 of each light guide component 1700 face each other, forming a first through hole 1801. Similarly, by connecting the back surfaces 1612 of two adjacent light guide components 1700 in the Z-axis direction, the second grooves 1721 to 1723 of each light guide component 1700 face each other, forming a second through hole 1802. The structure 1800 is a structure in which the first through hole 1801 and the second through hole 1802 are used as a light guide portion 101 or a frustum portion 102.

[0089] Two adjacent light guide components 1700 are connected, for example, by screwing or crimping. In the case of screwing, screw holes are formed that penetrate through the six light guide components 1700. Furthermore, the shorter the pulse width of the laser light, the more burrs generated on the surface 1611 and back surface 1612 of the workpiece 1610 during processing can be suppressed, and the gap between two adjacent light guide components 1700 can be suppressed.

[0090] In the structure 1800, the front end surface 1701 of each light guide component 1700 becomes the incident surface of light, and the rear end surface 1702 of each light guide component 1700 becomes the outgoing surface of light. Hereafter, the connected multiple front end surfaces 1701 will be referred to as incident surfaces 1701, and the connected multiple rear end surfaces 1702 will be referred to as outgoing surfaces 1702.

[0091] Light enters through the openings of the first through-hole 1801 and the second through-hole 1802 formed on the incident surface 1701, and exits through the openings of the first through-hole 1801 and the second through-hole 1802 formed on the exit surface 1702.

[0092] The structure 1800 is applied to the detection device 100 as a plurality of light guide units 101 as shown in embodiments 1 to 4 described above. Specifically, for example, the emission surface 1702 of the structure 1800 is connected to the detection processing unit 510. More specifically, a detection unit 110 is connected to each of the openings of the first through hole 1801 and the second through hole 1802 on the emission surface 1702 side. This makes it possible to receive light that has passed through the first through hole 1801 and the second through hole 1802.

[0093] Alternatively, the structure 1800 may be applied to the detection device 100 as a plurality of frustum portions 102 as shown in embodiments 1 to 4 described above. In this case, one end 131 of the transmission unit 103 is connected to each of the openings of the first through hole 1801 and the second through hole 1802 on the exit surface 1702 side, and the detection unit 110 is connected to each of the other ends 132 of the transmission unit 103. This makes it possible to receive light that has passed through the first through hole 1801, the second through hole 1802 and the transmission unit 103.

[0094] Figure 19 is an explanatory diagram showing an example of another workpiece. Workpiece 1910 has a rectangular parallelepiped shape and differs in shape from workpiece 1610. The front surface 1911 and back surface 1912 of workpiece 1910 are the irradiation surfaces of the laser beam from the laser processing machine 1601. For example, after the front surface 1911 is irradiated, the back surface 1912 is fixed in place by a person or by a mechanism (not shown) so as to face the laser processing machine 1601.

[0095] Figure 20 is a front view and a top view showing another example of a light guide component produced by the manufacturing system 1600. Figure 21 is a front view and a bottom view showing another example of a light guide component produced by the manufacturing system 1600.

[0096] The light guide component 2000 is produced by the manufacturing system 1600 processing the workpiece 1910. Specifically, first grooves 2011 to 2013 are formed on the surface 1911 of the light guide component 1900, and second grooves 2021 to 2023 are formed on the back surface 1912.

[0097] The first grooves 2011-2013 and the second grooves 2021-2023 are, for example, roughly trapezoidal in shape, and are machined so that their shape becomes smaller from the front end face 2001 to the rear end face 2002.

[0098] Approximately U-shaped fitting grooves 2031 and 2032 are machined into both edges of the surface 1911 of the light guide component 2000 along the Y-axis direction. Approximately U-shaped fitting protrusions 2041 and 2042 are machined into both edges of the back surface 1912 of the light guide component 2000 along the Y-axis direction.

[0099] Figure 22 is an explanatory diagram showing an example of connecting light guide components 2000. Figure 22 shows a structure 2200 in which six light guide components 2000 are stacked in the Z-axis direction. Specifically, for example, the front surfaces 1911 and back surfaces 1912 of two adjacent light guide components 2000 in the Z-axis direction are connected, thereby stacking six light guide components 2000 in the Z-axis direction. The structure 2200 is a structure in which the through-hole 2201 is used as a light guide portion 101 or a frustum portion 102.

[0100] The connection of the front surfaces 1911 and back surfaces 1912 of two adjacent light guide components 2000 in the Z-axis direction causes the first grooves 2011-2013 and second grooves 2021-2023 of each light guide component 2000 to face each other, forming a through hole 2201. At the same time, the fitting protrusions 2041 and 2042 provided on the back surface 1912 of the upper of the two adjacent light guide components 2000 in the Z-axis direction engage with the fitting grooves 2031 and 2032 provided on the front surface 1911 of the lower light guide component 2000. This restricts the displacement of the light guide components 2000 in the X-axis and Y-axis directions, improving the positioning accuracy of the through hole 2201.

[0101] Two adjacent light guide components 2000 are connected, for example, by screwing or crimping. In the case of screwing, screw holes are formed that penetrate through the six light guide components 2000. Furthermore, the shorter the pulse width of the laser light, the more effectively burrs generated on the surface 1911 and back surface 1912 of the workpiece 1910 during processing can be suppressed, and the gap between two adjacent light guide components 2000 can be reduced.

[0102] In the structure 2200, the front end surface 2001 of each light guide component 2000 becomes the incident surface of light, and the rear end surface 2002 of each light guide component 2000 becomes the outgoing surface of light. Hereafter, the connected multiple front end surfaces 2001 will be referred to as incident surfaces 2001, and the connected multiple rear end surfaces 2002 will be referred to as outgoing surfaces 2002.

[0103] Light enters through the opening of the through-hole 2201 formed on the incident surface 2001 and exits through the opening of the through-hole 2201 formed on the exit surface 2002.

[0104] The structure 2200 is applied to the detection device 100 as a plurality of light guide units 101 as shown in embodiments 1 to 4 described above. Specifically, for example, the emission surface 2202 of the structure 2200 is connected to the detection processing unit 510. More specifically, a detection unit 110 is connected to each of the openings of the through holes 2201 on the emission surface 2202 side. This makes it possible to receive light that has passed through the through holes 2201.

[0105] [Embodiment 7] Next, Embodiment 7 will be described. Embodiment 7 shows a manufacturing method for producing a light guide by stacking plate-shaped members, each having a plurality of through holes in the thickness direction, in the thickness direction. Components identical to those in Embodiments 1 to 4 are denoted by the same reference numerals, and their descriptions are omitted.

[0106] Figure 23 is a perspective view showing an example of a structure 2300 according to Embodiment 7. Figure 24 is a first cross-sectional view of the structure 2300 according to Embodiment 7. The cross-sectional view shown in Figure 24 shows a cross-section when the structure 2300 is cut at cross-section 2340 in Figure 23. Figure 25 is a second cross-sectional view of the structure 2300 according to Embodiment 7. The cross-sectional view shown in Figure 25 shows a cross-section when the structure 2300 is cut at cross-section 2350 in Figure 23.

[0107] The structure 2300 is produced by stacking a first plate-like member 2301 and a second plate-like member 2302. The stacking direction of the first plate-like member 2301 and the second plate-like member 2302 is denoted as z. Two axes perpendicular to z are denoted as x and y. x and y are assumed to be orthogonal.

[0108] In the examples in Figures 23 to 25, there are seven first plate-like members 2301, but the number is not limited to seven. There are six second plate-like members 2302, but the number is not limited to six. Also, the thickness of the first plate-like members 2301 is arbitrary, and different first plate-like members 2301 may have different thicknesses. Similarly, the thickness of the second plate-like members 2302 is arbitrary, and different second plate-like members 2302 may have different thicknesses. Furthermore, the thickness of the first plate-like members 2301 and the thickness of the second plate-like members 2302 may be different.

[0109] First, the first plate-shaped member 2301 will be described. Each of the first plate-shaped members 2301 has a plurality of first through holes 2311 that penetrate approximately in the z direction. In addition, each of the first plate-shaped members 2301 has third through holes 2313 for positioning that penetrate in the z direction at its four corners. In each of the first plate-shaped members 2301, 81 first through holes 2311 are provided in a matrix. Note that the number of first through holes 2311 is not limited to 81, but the number of first through holes 2311 will be the same in multiple first plate-shaped members 2301.

[0110] The opening diameter of the first through-hole 2311 is wider for first plate-shaped members 2301 positioned higher in the z-direction, and narrower for first plate-shaped members 2301 positioned lower in the z-direction. Furthermore, as the opening diameter decreases, the spacing between adjacent first through-holes 2311 also narrows.

[0111] The bottom surface 2412 of one adjacent first plate-shaped member 2301 in the z direction comes into contact with the top surface 2411 of the other first plate-shaped member 2301 located below it. As a result, the first through-hole 2311 of the one first plate-shaped member 2301 and the first through-hole 2311 of the other first plate-shaped member 2301 communicate with each other. This forms the first light guide path 2331. The number of first light guide paths 2331 is the same as the number of first through-holes 2311 provided in one first plate-shaped member 2301 (81 in this example).

[0112] As shown in Figures 23 and 24, the first light guide path 2331 is formed so as to approach the center of the lowest first plate-shaped member 2301 from the uppermost first plate-shaped member 2301 in the z direction. Furthermore, the first plate-shaped member 2301 is formed such that its opening diameter becomes shorter as it approaches the center of the lowest first plate-shaped member 2301 from the uppermost first plate-shaped member 2301 in the z direction.

[0113] Therefore, the first light guide path 2331 has a structure similar to the space inside the frustum portion 102 shown in Embodiments 1 to 4.

[0114] Furthermore, the third through-hole 2313 is provided in the first plate-like member 2301 with the same opening diameter and at the same position. A screw groove is formed on the inner circumferential surface of the third through-hole 2313. By stacking the first plate-like members 2301 in the z direction, the multiple third through-holes 2313 in the z direction communicate with each other, thereby forming the first screw hole 2501.

[0115] Next, the second plate-shaped member 2302 will be described. Each of the second plate-shaped members 2302 has a plurality of second through holes 2322 that penetrate in the z direction. In addition, each of the second plate-shaped members 2302 has a fourth positioning through hole 2324 that penetrates in the z direction at its four corners. In each of the second plate-shaped members 2302, 81 second through holes 2322 are provided in a matrix. Note that the number of second through holes 2322 is not limited to 81, but the number of second through holes 2322 will be the same in multiple second plate-shaped members 2302.

[0116] The second through-holes 2322 are provided in multiple second plate-shaped members 2302 with the same opening diameter and at the same position. The bottom surface 2422 of one second plate-shaped member 2302 adjacent to another in the z direction comes into contact with the top surface 2421 of the other second plate-shaped member 2302 located below it. As a result, the second through-holes 2322 of the one second plate-shaped member 2302 and the second through-holes 2322 of the other second plate-shaped member 2302 communicate in the z direction. This forms the second light guide path 2332. The number of second light guide paths 2332 is the same as the number of second through-holes 2322 provided in one second plate-shaped member 2302 (81 in this example).

[0117] Thus, the second optical guide path 2332 has a structure similar to the cylindrical space inside the transmission unit 103 shown in Embodiments 1 to 4.

[0118] Furthermore, the fourth through-hole 2324 is provided in the second plate-shaped member 2302 with the same opening diameter and position. The fourth through-hole 2324 has the same shape and size as the third through-hole 2313, and like the third through-hole 2313, it is provided at the four corners of the second plate-shaped member 2302. Screw grooves are formed on the inner circumferential surface of the fourth through-hole 2324. By stacking the second plate-shaped members 2302 in the z direction, the multiple fourth through-holes 2324 in the z direction communicate with each other, thereby forming the second screw hole 2502.

[0119] Next, the boundary between the first plate-like member 2301 and the second plate-like member 2302 will be described. The lowest first plate-like member 2301 among the multiple first plate-like members 2301 is connected to the uppermost second plate-like member 2302 among the multiple second plate-like members 2302. Specifically, for example, the bottom surface 2412 of the lowest first plate-like member 2301 and the top surface 2421 of the uppermost second plate-like member 2302 are in contact.

[0120] Furthermore, the opening diameter of the first through-hole 2311 in the bottommost first plate-shaped member 2301 on the bottom surface 2412 side is the same as the opening diameter of the second through-hole 2322. The first through-hole 2311 in the bottommost first plate-shaped member 2301 is positioned to communicate with the second through-hole 2322 when the topmost second plate-shaped member 2302 comes into contact with the bottommost first plate-shaped member 2301. Therefore, when multiple first plate-shaped members 2301 and multiple second plate-shaped members 2302 are stacked, the first light guide path 2331 and the second light guide path 2332 communicate with each other. This forms the through-hole 2330.

[0121] Furthermore, the third through-hole 2313 of the bottommost first plate-shaped member 2301 is positioned to communicate with the fourth through-hole 2324 when the topmost second plate-shaped member 2302 comes into contact with the bottommost first plate-shaped member 2301. Therefore, when multiple first plate-shaped members 2301 and multiple second plate-shaped members 2302 are stacked, the first screw hole 2501 and the second screw hole 2502 communicate with each other. This forms the fourth through-hole 2314. Then, by screwing screws (not shown) into each of the four fourth through-holes 2314, the multiple first plate-shaped members 2301 and multiple second plate-shaped members 2302 are fixed in place.

[0122] In addition to connections using screws, the structure 2300 may also be formed by compression between adjacent first plate-shaped members 2301 in the z direction, between adjacent second plate-shaped members 2302 in the z direction, and between adjacent first plate-shaped members 2301 and second plate-shaped members 2302 in the z direction.

[0123] In Embodiment 6, the first plate-shaped member 2301 is placed on the XY stage 1602 of the manufacturing system 1600, and the first through-hole 2311 and the third through-hole 2313 are formed by irradiating it with laser light from the laser processing machine 1601. In this case, the XY stage 1602 can be tilted from the Z-axis direction, or the irradiation direction of the laser light from the laser processing machine 1601 can be tilted from the Z-axis direction, so that the first plate-shaped member 2301 is tilted with respect to the Z-axis direction.

[0124] Furthermore, by placing the second plate-shaped member 2302 on the XY stage 1602 of the manufacturing system 1600 and irradiating it with laser light from the laser processing machine 1601, the second through-hole 2322 and the fourth through-hole 2324 are formed.

[0125] The structure 2300 is applied to the detection device 100 as a plurality of light guides 101 as shown in embodiments 1 to 4 described above. Specifically, for example, the bottom surface 2422 of the second plate-shaped member 2302 of the lowest layer of the structure 2300 is connected to the detection processing unit 510. More specifically, a detection unit 110 is connected to each of the openings of the second through-holes 2322 on the bottom surface 2422 side of the second plate-shaped member 2302 of the lowest layer. This makes it possible to receive light that has passed through the first light guide path 2331 and the second light guide path 2332.

[0126] Furthermore, the structure 2300 may be composed of multiple first plate-shaped members 2301 instead of multiple second plate-shaped members 2302. In this case, the bottom surface 2412 of the lowest first plate-shaped member 2301 of the structure 2300 is connected to the detection processing unit 510. More specifically, a detection unit 110 is connected to each of the openings of the first through-hole 2321 on the bottom surface 2412 side of the lowest first plate-shaped member 2301. This makes it possible to receive light that has passed through the first light guide path 2331.

[0127] Furthermore, in the structure 2300, the first light guide path 2331 is configured to incline towards the central first light guide path 2331 as it moves outward, but the inner circumferential surface of the first light guide path 2331 may be formed to be parallel to the z-axis. A detailed explanation follows below.

[0128] Figure 26 is another first cross-sectional view of the structure 2300 according to Embodiment 7. The cross-sectional view shown in Figure 26 shows the cross-section obtained when the structure 2300 is cut at cross-section 2340 in Figure 23. Figure 26 will be explained mainly in terms of the differences from Figure 24.

[0129] First, the first plate-shaped member 2301 will be described. Each of the first plate-shaped members 2301 has a plurality of first through holes 2611 that penetrate approximately in the z direction. In each of the first plate-shaped members 2301, 81 first through holes 2611 are provided in a matrix. Note that the number of first through holes 2611 is not limited to 81, but the number of first through holes 2611 will be the same in multiple first plate-shaped members 2301.

[0130] The opening diameter of the first through-hole 2311 is wider for the first plate-like member 2301 positioned higher in the z-direction, and narrower for the first plate-like member 2301 positioned lower in the z-direction. However, unlike in Figures 23 and 24, in each of the first plate-like members 2301, the central first through-hole 2611 has a larger opening diameter than the other first through-holes 2611.

[0131] Here, the first light guide path 2631 formed by the first through-hole 2611 at the center of each of the multiple first plate-shaped members 2301 is designated as the first light guide path 2631A, and the other first light guide paths 2631 are designated as the first light guide path 2631B.

[0132] In the first cross-section of the first light guide path 2631A, the generatrix of the inner surface of the first through-hole 2611 on both sides in the y-direction is stepped.

[0133] In the first cross-section, the generatrix of the inner surface of the first through-hole 2611 on the side away from the first light guide 2631A is stepped, similar to the first light guide 2631A. In contrast, the generatrix of the inner surface of the first through-hole 2611 on the side adjacent to the first light guide 2631A is straight.

[0134] Thus, since steps are provided in the first light guide paths 2631A and 2631B, they have the same function as the light-receiving prevention member 402 of Embodiment 1. Therefore, they can reflect incident light like the light-receiving prevention member 402.

[0135] In Embodiment 6, the first plate-shaped member 2301 is placed on the XY stage 1602 of the manufacturing system 1600, and the first through-hole 2611 and the third through-hole 2313 are formed by irradiating it with laser light from the laser processing machine 1601. Similarly, the second plate-shaped member 2302 is placed on the XY stage 1602 of the manufacturing system 1600, and the second through-hole 2622 and the fourth through-hole 2324 are formed by irradiating it with laser light from the laser processing machine 1601.

[0136] As a result, the first through-hole 2611 penetrates in a direction perpendicular to the upper surface 2411 of the first plate-like member 2301 (z-direction). Therefore, in the manufacturing system 1600, the laser beam from the laser processing machine 1601 can be irradiated perpendicularly to the upper surface 2411, making processing control in the manufacturing system 1600 easier.

[0137] In addition to processing with laser light, the first through-hole 2611 and the third through-hole 2313 may also be created by drilling the first plate-shaped member 2301. Similarly, the second through-hole 2612 and the fourth through-hole 2314 may be created by drilling the second plate-shaped member 2302.

[0138] It should be noted that this embodiment is not limited to the above-described content, and these may be combined in any way. Furthermore, other embodiments that can be conceivable within the scope of the technical concept of this embodiment are also included within the scope of this embodiment. [Explanation of Symbols]

[0139] 100 Detection device, 101 Light guide section, 102 Frustum section, 103 Transmission section, 110 Detection section, 112 Light receiving surface, 121 Incineration section, 121a Incineration port, 123 Through hole, 132a Outlet port, 133 Transmission line, 401 Inner circumferential surface, 402 Light receiving prevention member, 500 Detection device, 510 Detection section

Claims

1. A light guide section having a light inlet, an opening with a smaller opening area than the inlet, a frustum-shaped through-hole through which light from the inlet to the opening passes, and a transmission section having a light outlet formed for light emitted from the opening and transmitting light from the opening to the outlet, The system includes a detection unit that detects light emitted from the aforementioned outlet, The through-hole is formed to be longer than the transmission section in the direction from the inlet to the outlet, and a plurality of members are formed to reflect the light incident on the inlet. The member has a first surface that reflects light incident on the entrance opening toward the entrance opening, and a second surface that reflects light incident on the entrance opening toward the first surface of the other members among the plurality of members. Detection device.

2. In the detection device according to Claim 1, The edge of the inlet has an inlet end located at a first distance from the center of the inlet, and other inlet ends located at the first distance from the center of the inlet, The edge of the nozzle has an ejection end located at a second distance shorter than the first distance from the center of the nozzle, and other ejection ends other than the ejection end located at the second distance from the center of the nozzle. Detection device.

3. In the detection device according to claim 2, The shapes of the inlet and outlet are circular. Detection device.

4. In the detection device according to claim 1, The edge of the inlet has an inlet end located at a third distance from the center of the inlet, and another inlet end located at a fourth distance shorter than the third distance from the center of the inlet, The end edge of the nozzle has an ejection end located at a fifth distance shorter than the third distance from the center of the nozzle, and other ejection ends located at a sixth distance shorter than the fifth distance from the center of the nozzle. Detection device.

5. In the detection device according to claim 4, The shapes of the inlet and outlet are polygonal. Detection device.

6. In the detection device according to claim 5, The aforementioned polygon is a hexagon. Detection device.

7. In the detection device according to claim 1, The detection unit is provided at the outlet, Detection device.

8. In the detection device according to claim 1, The entrance port has a member that focuses light toward the exit port. Detection device.

9. In the detection device according to claim 1, The transmission unit has one end into which light from the aperture is incident and the other end into which the output port is formed. Detection device.

10. In the detection device according to claim 9, The size of the opening at one end of the transmission section and the size of the outlet opening formed at the other end are approximately equal. Detection device.

11. In the detection device according to claim 1, The detection unit is made of indium gallium arsenide. Detection device.

12. In the detection device according to claim 1, The light guide unit comprises multiple such units, The multiple light guide units are arranged such that their respective entrance openings are spaced apart. Detection device.

13. In the detection device according to claim 12, The multiple light guide units are arranged so as to radiate from the output port toward the input port. Detection device.

14. In the detection device according to claim 12, The detection unit has a photodiode, and the photodiode is arranged in two dimensions. Detection device.

15. In the detection device according to claim 12, Among the multiple light guides, the light guides located outside the light guide at the center of the detection unit have a shorter transmission section that transmits light from one end to the other between the inlet and outlet. Detection device.

16. In the detection device according to claim 13, Of the multiple light guide units, the light guide units located outside the light guide unit at the center of the detection unit do not have the transmission unit. Detection device.

17. In the detection device according to claim 13, The multiple light guides are arranged in a substantially hemispherical shape. Detection device.

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