Decomposition energy acquisition device, decomposition energy acquisition method and decomposition energy acquisition program

Abstract

To provide a resolution acquisition device, a resolution acquisition method and a resolution acquisition program capable of acquiring a correlation of resolution.SOLUTION: A resolution acquisition device comprises: a first acquisition part for sliding an X-ray source with respect to a reference object, in a direction crossing a depth direction of the reference object for radiating an X-ray, and acquiring transmission X-ray images obtained by detecting the transmission X-ray transmitted the reference object by a detection part; a second acquisition part for acquiring resolution according to the depth direction, on the basis of a plane size of reference openings which are arranged in the depth direction of the reference object and where a plane size in a plane direction crossing the depth direction is grasped in advance, and a pixel number of the images on the reference openings recorded in the transmission X-ray images acquired by the first acquisition part; and a third acquisition part for acquiring a correlation of the resolution, on the basis of positions for acquiring images on the multiple reference openings obtained on the basis of the transmission X-ray images of the reference object, and the resolution acquired by the second acquisition part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This disclosure relates to a resolution acquisition device, a resolution acquisition method, and a resolution acquisition program. [Background technology]

[0002] Conventionally, three-dimensional measurements are sometimes performed using X-ray CT scanners, and there are devices for evaluating length measurement error to assess the accuracy of these measurements (see Patent Document 1). This device consists of support rods of different lengths, each with a sphere fixed to its tip, attached to a base, thereby arranging 15 spheres in a three-dimensional space on the base. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-020799 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] Incidentally, when obtaining transmission image information (2D transmission X-ray image information) by irradiating an object with X-rays from an X-ray source and detecting the transmitted X-rays that pass through the object with a detector, the resolution of the object is determined by the distance from the X-ray source to the detector (FDD: Focus Detector Distance) and the distance from the X-ray source to the object (FOD: Focus Object Distance). The applicant has developed a depth measurement technology using 2D transmission X-ray images by applying tomosynthesis technology, but in order to obtain the planar size of the object, it was necessary to acquire a resolution suitable for the content of this development. Furthermore, the technology described in Patent Document 1 cannot adequately acquire resolution.

[0005] This disclosure provides a resolution acquisition device, a resolution acquisition method, and a resolution acquisition program that can acquire the correlation of resolutions. [Means for solving the problem]

[0006] One embodiment of a resolution acquisition device includes: a first acquisition unit that acquires a transmitted X-ray image obtained by sliding an X-ray source in a direction intersecting the depth direction of a reference object to irradiate the reference object with X-rays and detecting the transmitted X-rays that have passed through the reference object with a detection unit; a second acquisition unit that acquires a resolution corresponding to the depth direction based on the planar size of a plurality of reference apertures arranged in the depth direction of the reference object, the planar size of the plane direction intersecting the depth direction is known in advance, and the number of pixels of the image of the reference apertures recorded in the transmitted X-ray image acquired by the first acquisition unit; and a third acquisition unit that acquires a correlation of resolution based on the position where images of each of the plurality of reference apertures are obtained, which is acquired based on the transmitted X-ray image of the reference object, and the resolution acquired by the second acquisition unit. [Effects of the Invention]

[0007] The resolution acquisition device, resolution acquisition method, and resolution acquisition program of this disclosure can acquire the correlation of resolution. [Brief explanation of the drawing]

[0008] [Figure 1] This figure illustrates a resolution acquisition device according to one embodiment. [Figure 2] This is a block diagram illustrating a resolution acquisition device according to one embodiment. [Figure 3] This is a diagram illustrating an example of an X-ray source and detection unit. [Figure 4] This diagram illustrates an example of the target. (A) is a diagram illustrating the standard target, and (B) is a diagram illustrating the evaluation target. [Figure 5] These figures illustrate the contours of apertures related to image information. (A) is Figure 1 when multiple apertures are superimposed, (B) is Figure 1 illustrating the amount of transmission, (C) is Figure 2 when multiple apertures are superimposed, and (D) is Figure 2 illustrating the amount of transmission. [Figure 6]This is a diagram for explaining an example of the correlation between the depth of the reference opening and the deviation amount. [Figure 7] This is a diagram for explaining an example of the correlation between the deviation amount and the resolution. [Figure 8] This is a flowchart for explaining a resolution acquisition method according to an embodiment. **[Mode for Carrying Out the Invention]**

[0009] Hereinafter, an embodiment will be described.

[0010] [Outline of Resolution Acquisition Device 1] First, the outline of the resolution acquisition device 1 according to an embodiment will be described. FIG. 1 is a diagram for explaining the resolution acquisition device 1 according to an embodiment.

[0011] In the present disclosure, a technique for acquiring the correlation of resolution used when acquiring the planar size of the object 20 (opening 230 (see FIG. 3)) by applying tomosynthesis technology is proposed. Note that the object for acquiring the planar size is not limited to the opening 230 (evaluation opening 233 (see FIG. 4(B))), and various objects may be used.

[0012] The resolution acquisition device 1 includes, for example, an X-ray source 2, an X-ray detection unit (detection unit) 3, and a processing unit 10.

[0013] The X-ray source 2 is an X-ray generating device that generates X-rays to irradiate the object 20. The X-ray source 2 includes, for example, a fixed anode X-ray tube. For example, metals such as tungsten and molybdenum are used as the anode of the X-ray tube. The X-ray source 2 sets the amount of X-rays (energy amount) to be generated according to, for example, the thickness and material of the object 20 through which the X-rays are to pass, based on the control of the processing unit 10 described later. For the X-ray source 2, for example, a known irradiation device for X-rays may be used. The object 20 may be, for example, a member made of various materials including a metal member.

[0014] The detection unit 3 detects, for example, X-rays that have been irradiated from the X-ray source 2 and then passed through the target 20. The detection unit 3 also detects, for example, the intensity of the transmitted X-rays that have passed through the target 20 (for example, dose and irradiation dose). For example, a known X-ray detection device may be used for the detection unit 3. The detection unit 3 may also generate image information (transmitted X-ray image information) based on the detection of transmitted X-rays.

[0015] The processing unit 10 may, for example, send and receive information with the X-ray source 2 and the X-ray detection unit 3, respectively. The processing unit 10 may also be, for example, a computer (information processing device) such as a server, desktop, or laptop.

[0016] The processing unit 10 irradiates the target 20 (for example, a reference target 210 and an evaluation target 220, etc.) with X-rays from the X-ray source 2. The reference target 210 may be an object in which multiple openings 230 (reference openings 232) with different depths (known) are formed (see Figure 4(A)). The planar size (for example, width W, etc.) of each opening 230 (reference openings 232) formed in the reference target 210 may be known. The evaluation target 220 may be an object in which an opening 230 (evaluation opening 233) whose planar size is to be measured is formed (see Figure 4(B)). In this case, the processing unit 10 slides the X-ray source 2 in a direction (intersecting direction X) that intersects the depth direction Y (direction from the X-ray source 2 side to the detection unit 3 side) in which the openings 230 are formed (see Figure 3). Furthermore, the processing unit 10 irradiates the target 20 with X-rays multiple times while moving the X-ray source 2 in multiple stages or continuously in the intersecting direction X. When the processing unit 10 detects transmitted X-rays that have passed through the target 20 in response to the irradiation of X-rays from the X-ray source 2, it acquires a transmitted X-ray image obtained by the detection unit 3. In other words, the processing unit 10 acquires information related to the transmitted X-ray image (transmitted X-ray image information).

[0017] The processing unit 10, for example, obtains a resolution corresponding to the depth of each of the multiple apertures 230 (reference apertures 232) formed in the reference object 210, since the depths A, B, and C (see Figure 4(A)) of each are known. Here, the processing unit 10 obtains the resolution based on the plane size (e.g., width W) of the reference aperture 232, since the plane size is known, and the number of pixels in the image of the reference aperture 232 recorded in the transmitted X-ray image. The resolution may be the value obtained by dividing the plane size (width W) of the reference aperture 232 by the number of pixels in the image of the reference aperture 232. Conversely, the resolution may be the value obtained by dividing the number of pixels in the image of the reference aperture 232 by the plane size (width W) of the reference aperture 232.

[0018] Furthermore, the resolution is a value determined by the FDD and FOD. Since the depths of the multiple reference apertures 232 are different, the resolution obtained at each reference aperture 232 can be said to be a resolution corresponding to the depth direction.

[0019] The processing unit 10 applies tomosynthesis technology by sliding the X-ray source 2 and irradiating the reference object 210 with X-rays. Therefore, when the detection unit 3 obtains an image of the reference aperture 232, the position L2 from the reference position L1, which corresponds to the position where the reference object 210 is located, changes (moves) in accordance with the sliding movement of the X-ray source 2. The amount of displacement L from the reference position L1 to the position L2 from which the detection unit 3 obtains an image of the reference aperture 232 is 12 That is, the slide movement amount d of the X-ray source 2. 12 This varies depending on the depth of the reference opening 232. Therefore, the processing unit 10 obtains a correlation between the resolution and the position L2 at which the detection unit 3 obtains an image of the reference aperture 232, i.e., the position L2 at which the image of the reference aperture 232 is recorded in the transmitted X-ray image (see Figure 7).

[0020] [Details of Resolution Acquisition Device 1] Next, a resolution acquisition device 1 according to one embodiment will be described in detail. In particular, the processing unit 10 will be described in detail. Figure 2 is a block diagram illustrating a resolution acquisition device 1 according to one embodiment. Figure 3 is a diagram illustrating an example of an X-ray source 2 and a detection unit 3. Figure 4 is a diagram illustrating an example of Subject 20. Figure 4(A) is a diagram illustrating the standard subject 210, and Figure 4(B) is a diagram illustrating the evaluation subject 220. Figure 5 is a diagram illustrating the contour of the aperture 230 related to image information. Figure 5(A) is the first diagram showing multiple apertures 230 superimposed, Figure 5(B) is the first diagram illustrating the amount of transmission, Figure 5(C) is the second diagram showing multiple apertures 230 superimposed, and Figure 5(D) is the second diagram illustrating the amount of transmission. Figure 6 illustrates an example of the correlation between the depth of the reference opening 232 and the amount of displacement.

[0021] As illustrated in Figure 2, the resolution acquisition device 1 (processing unit 10) includes, for example, a communication unit 121, a storage unit 122, a display unit 123, and a control unit 110. The communication unit 121, storage unit 122, and display unit 123 may be embodiments of the output unit. The control unit 110 includes, for example, an X-ray source control unit 111, a first acquisition unit 112, a second acquisition unit 113, a third acquisition unit 114, a fourth acquisition unit 115, a fifth acquisition unit 116, and an output control unit 117. The control unit 110 may be configured, for example, by a calculation processing unit of the resolution acquisition device 1. The control unit 110 (for example, the arithmetic processing unit, etc.) may, for example, appropriately read and execute various programs stored in the memory unit 122, etc., to realize the functions of each unit (for example, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the fifth acquisition unit 116, and the output control unit 117, etc.).

[0022] The communication unit 121 is a communication interface that enables the transmission and reception of various information with, for example, an external device (external device) located outside the resolution acquisition device 1. The communication unit 121 may communicate with, for example, the X-ray source 2 and the detection unit 3. The communication unit 121 may also communicate with, for example, a server and a user terminal (not shown). The user terminal may be, for example, a terminal used by the user of the resolution acquisition device 1, and may be a desktop computer, laptop computer, tablet, or smartphone.

[0023] The storage unit 122 may store, for example, various information and programs. Examples of the storage unit 122 include memory, solid-state drives, and hard disk drives. The storage unit 122 may also be, for example, a storage area and server located in the cloud.

[0024] The display unit 123 is a display capable of displaying various characters, symbols, images, etc.

[0025] The X-ray source control unit 111 controls the X-ray source 2 via the communication unit 121. For example, the X-ray source control unit 111 controls the X-ray source 2 to slide. As illustrated in Figure 3, the direction of sliding may be, for example, a direction intersecting the depth direction Y of the opening 230 formed in the target 20 (intersecting direction X), or particularly an orthogonal direction. In this way, the X-ray source control unit 111 irradiates the target 20 with X-rays multiple times from the X-ray source 2 while sliding the X-ray source 2, that is, while moving the X-ray source 2 in multiple stages or continuously in the intersecting direction X. The target 20 may be a reference target 210 and an evaluation target 220, etc. The reference target 210 may be, for example, a target in which openings 230 (reference openings 232) are formed at different known depths. The planar size (e.g., width W) of each opening 230 (reference opening 232) formed in the reference target 210 may be known. The object to be evaluated 220 may be an object on which an opening 230 (evaluation opening 233) is formed, which is subject to measurement of its planar size (width W, etc.). The opening 230 may be, for example, a through hole, a hole with a bottom, or a void.

[0026] Furthermore, the reference object 210 and the evaluation object 220 may be imaged at the same time or at different sequential timings to generate their respective transmitted X-ray images. Also, the reference surfaces 213 and 221 of the reference object 210 and the evaluation object 220 may be located at the same (or approximately the same) distance from the X-ray source 2. The reference surface 213 of the reference object 210 may be the surface of the reference plate 211 closest to the X-ray source 2 in the reference object 210, as shown in Figure 4(A). Similarly, the reference surface 221 of the evaluation object 220 may be the surface closest to the X-ray source 2 in the evaluation object 220, as shown in Figure 4(B).

[0027] Here, the reference object 210 illustrated in Figure 4(A) has, for example, a plurality of openings 230 (reference openings 232) with different depths (distances) A, B, and C from the reference plate 211. In the example shown in Figure 4(A), the reference object 210 comprises a reference plate 211 and a plurality of plates 212, each containing one (or more) reference openings 232. In the reference object 210, the positions of the multiple reference openings 232 may be different when viewed in the depth direction Y (see Figure 4(A)). Also, the opening widths (width W) (known) (for example, the diameter if the reference opening 232 is circular) of the multiple reference openings 232 may be different. Furthermore, the shapes of the openings 230 may be different. As a result, when the multiple reference openings 232 are projected onto the detection unit 3 by X-rays irradiated onto the reference object 210, it becomes possible to identify the multiple reference openings 232, that is, to specify the opening width (width W) (and depth, etc.) according to the differences between the multiple reference openings 232. The reference plate 211 may or may not have a reference opening 232.

[0028] Furthermore, the evaluation target 220 illustrated in Figure 4(B) may be a component made of various materials, such as metal. The evaluation target 220 may also have an evaluation opening 233 (for example, a void) inside.

[0029] The first acquisition unit 112 acquires the transmitted X-ray image generated in the detection unit 3. Specifically, the first acquisition unit 112 acquires the transmitted X-ray image generated in response to the detection unit 3 detecting X-rays that have passed through the reference target 210 (transmitted X-rays) via, for example, the communication unit 121. That is, the first acquisition unit 112 irradiates the reference target 210 with X-rays by sliding the X-ray source 2 in a direction X intersecting the depth direction Y of the reference target 210, and acquires the transmitted X-ray image obtained by detecting the transmitted X-rays that have passed through the reference target 210 with the detection unit 3.

[0030] The second acquisition unit 113 acquires a resolution corresponding to the depth of each of the multiple openings 230 (reference openings 232) formed in the reference target 210, for example, since the depth of each of the reference openings 232 is known. That is, the second acquisition unit 113 acquires a resolution corresponding to the depth direction Y based on the plane size (width W) of the reference openings 232, which are arranged in multiple locations in the depth direction Y of the reference target 210 and whose plane size (width W) in a plane direction intersecting the depth direction Y (for example, the intersecting direction X, etc.) is known in advance, and the number of pixels in the image of the reference openings 232 recorded in the transmitted X-ray image acquired by the first acquisition unit 112 (the number of pixels (at position L2) when the detection unit 3 obtained images of each of the multiple detection targets). The planar direction may be, for example, the X-direction in which the X-ray source 2 slides, that is, the direction along the detection surface of the detection unit 3. The planar size (width W) may be at least one of the lengths of width and height in a plane along the planar direction, or it may be various lengths other than width and height (for example, diagonal lengths in the plane). The planar size (width W) of the actual reference aperture 232 is known. Furthermore, the transmitted X-ray image is composed of multiple pixels, etc. Since the image of the reference aperture 232 is recorded in the transmitted X-ray image, the second acquisition unit 113 can acquire the planar size based on the number of pixels in the image of the reference aperture 232. Therefore, the second acquisition unit 113 can acquire the resolution based on the planar size (width W) of the actual reference aperture 232 and the number of pixels in the image of that reference aperture 232 (the planar size (width) of the image). The second acquisition unit 113 acquires the resolution corresponding to the depth direction Y based on the planar size (width W) of each of the multiple reference apertures 232 arranged in the depth direction Y and the number of pixels in the image of each of the multiple reference apertures 232 (the planar size (width) of each of the multiple images). The resolution may also be the value obtained by dividing the planar size (width W) of the reference aperture 232 by the number of pixels in the image corresponding to that reference aperture 232.

[0031] Here, the resolution acquisition device 1 applies tomosynthesis technology by sliding the X-ray source 2 while irradiating the reference object 210 with X-rays. Therefore, when the detection unit 3 obtains an image of the reference aperture 232, the position L2 from the reference position L1, which corresponds to the position where the reference object 210 is placed, to the position L2, where the detection unit 3 obtains an image of the reference aperture 232, changes (moves) in accordance with the sliding movement of the X-ray source 2.

[0032] The second acquisition unit 113 identifies a position (predetermined position) L2 in which the change in the amount of X-ray transmission at the contour of the reference aperture 232 is greater than or equal to a predetermined value, based on multiple transmitted X-ray images acquired in accordance with the multi-stage or continuous movement of the X-ray source 2 for the reference target 210, and determines the displacement amount L based on the identified position L2 and the reference position L1. 12 Alternatively, we may choose to obtain it.

[0033] When multiple transmission X-ray images of the reference object 210 (reference aperture 232) are superimposed while sliding the X-ray source 2, the contour of the reference aperture 232 is expected to be sharper when the apparent movement of the X-ray source 2 is small relative to the reference aperture 232. Similarly, when the apparent movement of the X-ray source 2 is large relative to the reference aperture 232, the contour of the reference aperture 232 is expected to be less sharp when the superimposed images are large.

[0034] When the reference aperture 232 is located at a shallower position with respect to the depth direction Y (closer to the X-ray source 2), when the X-ray source 2 moves to a position closer to the reference aperture 232 (the amount of movement d as illustrated in Figure 3) 12 When the value is small, the apparent movement of the X-ray source 2 relative to the reference aperture 232 (for example, the amount of movement in the -X direction of the image of the reference aperture 232 projected onto the detection unit 3) is considered to be larger. In other words, in this case, the contour of the reference aperture 232 when multiple images are superimposed is considered to become less clear. Similarly, when the reference aperture 232 is located at a shallower position with respect to the depth Y (closer to the X-ray source 2), when the X-ray source 2 moves to a position further away from the reference aperture 232 (the amount of movement d as illustrated in Figure 3), 12When the value is large, the apparent movement of the X-ray source 2 relative to the reference aperture 232 (for example, the amount of movement in the -X direction of the image of the reference aperture 232 projected onto the detection unit 3) is thought to become smaller. In other words, in this case, the contour of the reference aperture 232, when multiple images are superimposed, is thought to become sharper.

[0035] Furthermore, when the reference aperture 232 is located at a deeper position in the depth direction Y (closer to the detection unit 3), the X-ray source 2 moves to a position closer to the reference aperture 232 (the amount of movement d as illustrated in Figure 3). 12 When the value is small, the apparent movement of the X-ray source 2 relative to the reference aperture 232 (for example, the amount of movement in the -X direction of the image of the reference aperture 232 projected onto the detection unit 3) is considered to be smaller. In other words, in this case, the contour of the reference aperture 232 superimposed on the image is considered to be sharper. Similarly, when the reference aperture 232 is located at a deeper position with respect to the depth direction Y (closer to the detection unit 3), the X-ray source 2 moves to a position further away from the reference aperture 232 (the amount of movement d as illustrated in Figure 3). 12 If the value is large, the apparent movement of the X-ray source 2 relative to the reference aperture 232 (for example, the amount of movement in the -X direction of the image of the reference aperture 232 projected onto the detection unit 3) is considered to be larger. In other words, in this case, the contour of the reference aperture 232 superimposed on the image is considered to become less clear.

[0036] The contour of the reference aperture 232 is determined, for example, according to the amount of X-ray transmission. It can be inferred that the reference aperture 232 is present when the amount of X-ray transmission is high, and that the reference aperture 232 is absent when the amount of X-ray transmission is low. Therefore, when multiple transmitted X-ray images are superimposed, a greater movement of the aperture 230 (reference aperture 232) results in a greater displacement of the images of the multiple apertures 230 (reference aperture 232) (see Figure 5(A)), the contour 231 of the aperture 230 (reference aperture 232) becomes less distinct, and the difference in X-ray transmission amount T at the contour 231 of the aperture 230 (reference aperture 232) (the boundary between the inside and outside of the aperture) becomes a more gradual fluctuation (see Figure 5(B)). Similarly, when a plurality of transmission X-ray images are superimposed, if the movement of the opening 230 (reference opening 232) is less, the displacement of the images of the plurality of openings 230 (reference opening 232) is reduced (see Fig. 5(C)), the contour portion 231 of the opening 230 (reference opening 232) becomes clearer, and the difference in the X-ray transmission amount T of the contour portion 231 (the boundary between the inside and outside of the opening) of the opening 230 (reference opening 232) becomes a more rapid change (see Fig. 5(D)).

[0037] When the change in the transmission amount T of the contour portion 231 of the reference opening 232 when a plurality of transmission X-ray images superimposed according to the slide movement of the X-ray source 2 is greater than or equal to a preset value (for example, when the ratio of the change in the transmission amount T is greater than or equal to a threshold value), the second acquisition unit 113 specifies the position where the movement of the reference opening 232 projected onto the detection unit 3 side is the least, that is, the position (predetermined position) L2 where the transmission X-ray image is acquired by moving the X-ray source 2. The second acquisition unit 113 acquires the number of pixels of the image of the reference opening 232 recorded in the transmission X-ray image at that position (predetermined position) L2. Note that the second acquisition unit 113 may use, for example, the intensity or luminance of the transmission X-ray as the transmission amount T.

[0038] The deviation amount L from the reference position L1 corresponding to the position where the reference object 210 is arranged, to the position L2 where the transmission X-ray image (image of the reference opening 232) is acquired by moving the X-ray source 2 12 has a correlation with the depths A, B, C of each of the plurality of reference openings 232. That is, based on the transmission X-ray image of the reference object 210, the second acquisition unit 113 determines the deviation amount L from the reference position L1 corresponding to the position where the reference object 210 is arranged, as shown in Fig. 3, to the position L2 where the transmission X-ray image (image of the reference opening 232) is acquired by moving the X-ray source 2 12 and the correlation with the depths A, B, C of each of the plurality of reference openings 232 can be obtained (see Fig. 6).

[0039] The third acquisition unit 114 acquires a correlation between resolution and resolution based on the position L2 from which images of each of the multiple reference apertures 232 are obtained, which are acquired based on the transmitted X-ray image of the reference target 210 acquired by the second acquisition unit 113, and the resolution. As an example, the third acquisition unit 114 acquires the amount of image displacement L from the reference position L1 corresponding to the position where the reference object 210 is placed, according to the multiple reference apertures 232 acquired by the second acquisition unit 113, to the position L2 where images of each of the multiple reference apertures 232 are obtained. 12 And the amount of that displacement L 12 A correlation between resolution and resolution may be obtained based on the corresponding resolution.

[0040] Figure 7 illustrates an example of the correlation between the amount of displacement and the resolution.

[0041] In Figure 7, the horizontal axis represents the displacement L. 12 The vertical axis represents the resolution. The planar shape of the reference aperture 232 is circular with a diameter of 5.2 mm. The reference object 210 has four such reference apertures 232, each with a different depth. The correlation of resolution obtained using such a reference object 210 is illustrated in Figure 7. In Figure 7, the points represent the actual displacement amount L. 12 The resolution is shown accordingly, and the solid line shows the correlation (approximation line) based on multiple points. The approximation line may be a straight line, a logarithmic curve, or various other types of curves. The third acquisition unit 114 acquires the correlation of resolution and uses an approximation formula (shift amount L) to obtain the approximation line. 12 You can also obtain a relationship between the relationship and the resolution.

[0042] As another example, the third acquisition unit 114 corresponds to the position L2 for obtaining images of each of the multiple reference apertures 232, and the sliding movement amount d of the X-ray source 2 is based on the position d2 of the X-ray source 2 when the transmitted X-ray image at position L2 is acquired and the reference position d1 which corresponds to the position where the reference target 210 is placed. 12Furthermore, a correlation with the resolution acquired by the second acquisition unit 113 may be obtained. Here, the triangle OL1L2 formed by the reference position L1, position L2, and position O of the aperture 230 (reference aperture 232) (see Figure 3) on the detection unit 3 side, and the triangle Od1d2 formed by the reference position d1, position d2, and position O of the aperture 230 (reference aperture 232) (see Figure 3) on the X-ray source 2 side are similar. The amount of displacement L on the detection unit 3 side 12 The relationship between this and the resolution, and the amount of slide movement d on the X-ray source 2 side. 12 The relationship between the displacement amount L and the resolution is mutually corresponding. That is, the third acquisition unit 114 is... 12 And the amount of that displacement L 12 Based on the corresponding resolution, if a correlation of resolution can be obtained, the slide movement amount d of the X-ray source 2 can be determined based on the similarity of the triangles described above. 12 And the amount of slide movement d 12 It is also possible to obtain a correlation between the resolution and the corresponding resolution.

[0043] The fourth acquisition unit 115 may have the same function as the first acquisition unit 112 described above, or it may have a different function from the first acquisition unit 112. The fourth acquisition unit 115 acquires the transmitted X-ray image (transmitted X-ray image information) generated in the detection unit 3. Specifically, the fourth acquisition unit 115 acquires the transmitted X-ray image generated in response to the detection unit 3 detecting X-rays that have passed through the evaluation target 220 (transmitted X-rays) via, for example, the communication unit 121. That is, similar to the first acquisition unit 112, the fourth acquisition unit 115 acquires the transmitted X-ray image obtained in the detection unit 3 by sliding the X-ray source 2 in a direction X intersecting the depth direction Y onto the evaluation target 220 having an evaluation aperture 233 and irradiating it with X-rays.

[0044] The fifth acquisition unit 116 acquires the planar size of the evaluation aperture 233 based on the position L2 from which the image of the evaluation aperture 233 is obtained in the transmission X-ray image of the evaluation target 220 acquired by the fourth acquisition unit 115, and the correlation acquired by the third acquisition unit 114. The fifth acquisition unit 116 acquires the position L2 for obtaining the image of the evaluation aperture 233, similar to how the second acquisition unit 113, etc., acquires the position L2 for obtaining the image of the reference aperture 232 as described above. The fifth acquisition unit 116 then determines the amount of image displacement L of the evaluation aperture 233 based on the position L2 for obtaining the image of the evaluation aperture 233 and the reference position L1 corresponding to the position where the object to be evaluated 220 is placed. 12 The fifth acquisition unit 116 may acquire the image displacement L of the evaluation aperture 233 in relation to the resolution correlation (e.g., relation (approximation formula), etc.) illustrated in Figure 7. 12 Apply this (for example, the amount of displacement L) 12 The resolution of the evaluation aperture 233 may be obtained by, for example, substituting the values. Furthermore, the fifth acquisition unit 116 acquires the number of pixels in the image (the number of pixels in the desired direction within the plane) based on the image of the evaluation aperture 233 (the image at position L2) recorded in the transmitted X-ray image. The fifth acquisition unit 116 acquires the planar size of the evaluation aperture 233 by, for example, performing multiplication or other operations based on the resolution of the evaluation aperture 233 and the number of pixels in the image of the evaluation aperture 233.

[0045] The output control unit 117 may control the output unit to output at least one of the resolution correlation acquired by the third acquisition unit 114 and the planar size of the evaluation aperture 233 acquired by the fifth acquisition unit 116. The output unit may be, for example, a communication unit 121, a storage unit 122, and a display unit 123. In other words, the output control unit 117 may control the communication unit 121 to transmit information, for example, at least one of the resolution correlation and the planar size of the evaluation aperture 233, to an external device (not shown). The external device here may be, for example, a server and a user terminal. The output control unit 117 may control the storage unit 122 to store information such as, for example, the correlation of resolutions and the planar size of the evaluation aperture 233. The output control unit 117 may control the display unit 123 to display, for example, at least one of the resolution correlation and the planar size of the evaluation aperture 233.

[0046] [Resolution acquisition method] Next, a method for obtaining resolution according to one embodiment will be described. Figure 8 is a flowchart illustrating a resolution acquisition method according to one embodiment.

[0047] In step ST101, the first acquisition unit 112 irradiates the reference object 210 with X-rays by sliding the X-ray source 2 in a direction X that intersects the depth direction Y of the reference object 210, and acquires a transmitted X-ray image obtained by detecting the transmitted X-rays that have passed through the reference object 210 with the detection unit 3.

[0048] In step ST102, the second acquisition unit 113 acquires a resolution corresponding to the depth direction Y based on the planar size of the reference apertures 232, which are arranged in multiple locations in the depth direction Y of the reference target 210 and whose planar size in the planar direction (intersecting direction X) intersecting the depth direction Y is known in advance, and the number of pixels in the image of the reference apertures 232 recorded in the transmitted X-ray image acquired in step ST101 (the number of pixels when the detection unit 3 obtains an image of each of the multiple detection targets).

[0049] In step ST103, the third acquisition unit 114 acquires a correlation between the resolution and the resolution acquired in step ST102, based on the position L2 from which images of each of the multiple reference apertures 232 are obtained, which are acquired based on the transmitted X-ray image of the reference object 210. As an example, the third acquisition unit 114 measures the amount of image displacement L from the reference position L1 corresponding to the position where the reference object 210 is placed to the position L2 from which images of each of the multiple reference apertures 232 are obtained. 12 Alternatively, you may obtain a correlation with the resolution acquired in step ST102. As another example, the third acquisition unit 114 corresponds to the position L2 for obtaining images of each of the multiple reference apertures 232, and the sliding movement amount d of the X-ray source 2 is based on the position d2 of the X-ray source 2 when the transmitted X-ray image at position L2 is acquired and the reference position d1 which corresponds to the position where the reference target 210 is placed. 12 Alternatively, you may obtain a correlation with the resolution acquired in step ST102.

[0050] In step ST104, the fourth acquisition unit 115 acquires the transmitted X-ray image obtained by the detection unit 3 by sliding the X-ray source 2 in a direction X intersecting the depth direction Y onto the evaluation target 220 having the evaluation aperture 233.

[0051] In step ST105, the fifth acquisition unit 116 acquires the planar size of the evaluation aperture 233 based on the correlation between the position L2 from which the image of the evaluation aperture 233 is obtained in the transmission X-ray image of the evaluation target 220 acquired in step ST104 and the resolution acquired in step ST103.

[0052] [Regarding functions and circuitry] Next, the functions and circuitry of the resolution acquisition device 1 described above will be explained. Each part of the resolution acquisition device 1 may be implemented as a function of a computer's processing unit or the like. That is, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the fifth acquisition unit 116, and the output control unit 117 (control unit 110) of the resolution acquisition device 1 may be implemented as an X-ray source control function, a first acquisition function, a second acquisition function, a third acquisition function, a fourth acquisition function, a fifth acquisition function, and an output control function (control function), respectively, by a computer's processing unit or the like. The resolution acquisition program can enable a computer to implement the functions described above. The resolution acquisition program may be recorded on a computer-readable, non-temporary recording medium such as memory, a solid-state drive, a hard disk drive, or an optical disc. The recording medium may be rephrased as, for example, a non-temporary computer-readable medium. Furthermore, as described above, each part of the resolution acquisition device 1 may be implemented by a computer's arithmetic processing unit or the like. This arithmetic processing unit or the like is composed of, for example, an integrated circuit. For this reason, each part of the resolution acquisition device 1 may be implemented as a circuit that constitutes the arithmetic processing unit or the like. That is, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the fifth acquisition unit 116, and the output control unit 117 (control unit 110) of the resolution acquisition device 1 may be implemented as an X-ray source control circuit, a first acquisition circuit, a second acquisition circuit, a third acquisition circuit, a fourth acquisition circuit, a fifth acquisition circuit, and an output control circuit (control circuit) that constitute the arithmetic processing unit or the like of a computer. Furthermore, the communication unit 121, storage unit 122, and display unit 123 (output unit) of the resolution acquisition device 1 may be implemented as a communication function, storage function, and display function (output function) that includes the functions of a processing unit, etc. Also, the communication unit 121, storage unit 122, and display unit 123 (output unit) of the resolution acquisition device 1 may be implemented as a communication circuit, storage circuit, and display circuit (output circuit) by being composed of an integrated circuit, etc. Also, the communication unit 121, storage unit 122, and display unit 123 (output unit) of the resolution acquisition device 1 may be configured as a communication device, storage device, and display device (output device) by being composed of a plurality of devices, for example.

[0053] The resolution acquisition device 1 can combine one or any multiple of the above-described parts. In this disclosure, the term "information" is used, but the term "information" can be replaced with "data," and the term "data" can be replaced with "information."

[0054] [Differentiation] The embodiments described above described an apparatus that utilizes X-rays. However, the apparatus of this disclosure may utilize not only X-rays but also light and radiation (electromagnetic waves) of various wavelengths (wavelength ranges). In this case, the apparatus may acquire transmission images and measure resolution (resolution correlation) and planar size using light such as infrared light, visible light, and ultraviolet light, as well as electromagnetic waves such as radiation. An example of a component that acquires transmission images using various wavelengths (wavelength ranges) and measures resolution (resolution correlation) and planar size may be a component made of various materials, including semiconductors.

[0055] [Aspects and Effects of This Embodiment] Next, an embodiment of this model and the effects of each embodiment will be described. Note that the embodiments described below are examples as of the time of filing, and this embodiment is not limited to the embodiments described below. In other words, this embodiment is not limited to the embodiments described below, and may be realized by appropriately combining the parts described above. Furthermore, lower-level embodiments may be referenced in any of the higher-level embodiments. Furthermore, the effects described below are examples only, and the effects produced by each embodiment are not limited to those described below. Also, each embodiment may produce, for example, at least one of the effects described below.

[0056] (Aspect 1) One embodiment of a resolution acquisition device includes: a first acquisition unit that acquires a transmitted X-ray image obtained by sliding an X-ray source in a direction intersecting the depth direction of a reference object to irradiate the reference object with X-rays and detecting the transmitted X-rays that have passed through the reference object with a detection unit; a second acquisition unit that acquires a resolution corresponding to the depth direction based on the planar size of a plurality of reference apertures arranged in the depth direction of the reference object, the planar size of the plane direction intersecting the depth direction is known in advance, and the number of pixels of the image of the reference apertures recorded in the transmitted X-ray image acquired by the first acquisition unit; and a third acquisition unit that acquires a correlation of resolution based on the position where images of each of the plurality of reference apertures are obtained, which is acquired based on the transmitted X-ray image of the reference object, and the resolution acquired by the second acquisition unit. This allows the resolution acquisition device to obtain the correlation of resolutions.

[0057] (Aspect 2) In one embodiment of the resolution acquisition device, the third acquisition unit may acquire the correlation between the amount of image displacement from a reference position corresponding to the position where the reference object is placed to the position where images of each of the multiple reference apertures are obtained, and the resolution acquired by the second acquisition unit. In other words, the resolution acquisition device obtains the amount of displacement L from the reference position L1 to the position L2 where the image of the reference aperture is obtained by applying tomosynthesis technology. 12 This allows us to obtain the correlation with resolution (resolution correlation).

[0058] (Aspect 3) In one embodiment of the resolution acquisition device, the third acquisition unit may acquire a correlation between the position of the X-ray source when acquiring the transmitted X-ray image at each of the multiple reference apertures, the amount of slide movement of the X-ray source based on the reference position corresponding to the position where the reference object is placed, and the resolution acquired by the second acquisition unit. To apply tomosynthesis technology, the amount of displacement L from the reference position L1 to the position L2 where the image of the reference aperture is obtained is... 12 The amount of slide movement d from the reference position d1 of the X-ray source to the position d2 where the image of the reference aperture is obtained. 12 This correlates with the following. Therefore, the resolution acquisition device is the sliding movement amount d from the reference position d1 of the X-ray source to the position d2 where the image of the reference aperture is obtained. 12 This allows us to obtain the correlation with resolution (resolution correlation).

[0059] (Aspect 4) In one embodiment of the resolution acquisition apparatus, a fourth acquisition unit may be provided that acquires a transmitted X-ray image obtained by a detection unit by sliding an X-ray source in a direction intersecting the depth direction to irradiate an object to be evaluated which has an evaluation aperture with an evaluation aperture with X-rays, and a fifth acquisition unit that acquires the planar size of the evaluation aperture based on the position where the image of the evaluation aperture recorded in the transmitted X-ray image of the object to be evaluated acquired by the fourth acquisition unit is obtained and the correlation obtained by the third acquisition unit. As a result, the resolution acquisition device can use the acquired resolution (resolution correlation) as described above to obtain the planar size of the evaluation aperture in the object being evaluated. Furthermore, even when the distance in the depth direction Y between the X-ray source and the detector is unknown, the resolution acquisition device can determine the resolution at the depth of the object to be evaluated (evaluation aperture) based on the correlation, thereby enabling the acquisition of the planar size of the evaluation aperture.

[0060] (Aspect 5) In one embodiment of the resolution acquisition method, a computer performs the following steps: a first acquisition step in which it irradiates a reference object with X-rays by sliding an X-ray source in a direction intersecting the depth direction of the reference object, and acquires a transmitted X-ray image obtained by detecting the transmitted X-rays that have passed through the reference object with a detection unit; a second acquisition step in which it acquires a resolution corresponding to the depth direction based on the planar size of a reference aperture, which is arranged in multiple locations in the depth direction of the reference object and whose planar size in the planar direction intersecting the depth direction is known in advance, and the number of pixels of the image of the reference aperture recorded in the transmitted X-ray image acquired in the first acquisition step; and a third acquisition step in which it acquires a correlation of resolution based on the position in which images of each of the multiple reference apertures are obtained, which is acquired based on the transmitted X-ray image of the reference object, and the resolution acquired in the second acquisition step. One embodiment of the resolution acquisition method can achieve the same effects as the one embodiment of the resolution acquisition device described above.

[0061] (Aspect 6) One embodiment of a resolution acquisition program enables a computer to implement: a first acquisition function that irradiates a reference object with X-rays by sliding an X-ray source in a direction intersecting the depth direction of the reference object, and acquires a transmitted X-ray image obtained by detecting the transmitted X-rays that have passed through the reference object with a detection unit; a second acquisition function that acquires a resolution corresponding to the depth direction based on the planar size of multiple reference apertures arranged in the depth direction of the reference object, the planar size of which is known in advance in the planar direction intersecting the depth direction, and the number of pixels of the image of the reference apertures recorded in the transmitted X-ray image acquired by the first acquisition function; and a third acquisition function that acquires the correlation of resolution based on the position where images of each of the multiple reference apertures are obtained, which is acquired based on the transmitted X-ray image of the reference object, and the resolution acquired by the second acquisition function. A resolution acquisition program according to one embodiment can achieve the same effects as the resolution acquisition device according to the embodiment described above. [Explanation of symbols]

[0062] 1 Resolution acquisition device 2 X-ray source 3. X-ray detection unit (detection unit) 10 Processing Unit 110 Control Unit 111 X-ray source control unit 112 First acquisition part 113 Second Acquisition Department 114 Third Acquisition Department 115 4th acquisition part 116 Fifth Acquisition Department 117 Output Control Unit 121 Communications Department 122 Storage section 123 Display section 20 Target 210 Criteria Target 211 Standard Plate 212 Plate 213 Reference plane 220 items to be evaluated 230 opening 232 Reference opening 233 Evaluation opening

Claims

1. A first acquisition unit acquires a transmitted X-ray image obtained by sliding an X-ray source in a direction intersecting the depth direction of a reference object to irradiate the reference object with X-rays, and detecting the transmitted X-rays that have passed through the reference object with a detection unit. A second acquisition unit acquires a resolution corresponding to the depth direction based on the planar size of a reference aperture which is arranged in multiple locations in the depth direction of the reference object and whose planar size in the planar direction intersecting the depth direction is known in advance, and the number of pixels of the image of the reference aperture recorded in the transmitted X-ray image acquired by the first acquisition unit, A third acquisition unit acquires a correlation between resolution and resolution based on the position where images of each of the multiple reference apertures are obtained, which are acquired based on the transmitted X-ray image of the reference target, and the resolution acquired by the second acquisition unit. A resolution acquisition device equipped with the following features.

2. The third acquisition unit acquires the correlation between the amount of image displacement from the reference position corresponding to the position where the reference object is placed to the position where images of each of the multiple reference apertures are obtained, and the resolution acquired by the second acquisition unit. The resolution acquisition device according to claim 1.

3. The third acquisition unit corresponds to the position where images are obtained for each of the multiple reference apertures, and acquires the correlation between the amount of slide movement of the X-ray source based on the position of the X-ray source when the transmitted X-ray image at that position is obtained, the reference position corresponding to the position where the reference object is placed, and the resolution acquired by the second acquisition unit. The resolution acquisition device according to claim 1.

4. A fourth acquisition unit acquires a transmitted X-ray image obtained by the detection unit by sliding the X-ray source in a direction intersecting the depth direction and irradiating the object to be evaluated, which has an evaluation opening, A fifth acquisition unit acquires the planar size of the evaluation aperture based on the position where the image of the evaluation aperture is obtained from the transmission X-ray image of the object to be evaluated acquired by the fourth acquisition unit and the correlation acquired by the third acquisition unit, A resolution acquisition device according to any one of claims 1 to 3, comprising:

5. Computers A first acquisition step involves irradiating a reference object with X-rays by sliding an X-ray source in a direction intersecting the depth direction of the reference object, and obtaining a transmitted X-ray image obtained by detecting the transmitted X-rays that have passed through the reference object with a detection unit. A second acquisition step involves acquiring a resolution corresponding to the depth direction based on the planar size of a reference aperture, which is arranged in multiple locations in the depth direction of the reference object and whose planar size in the planar direction intersecting the depth direction is known in advance, and the number of pixels of the image of the reference aperture recorded in the transmitted X-ray image acquired in the first acquisition step. A third acquisition step involves obtaining a correlation between the resolution and the resolution obtained in the second acquisition step, based on the position where images of each of the multiple reference apertures are obtained, which are acquired based on the transmitted X-ray image of the reference target. A method for obtaining the resolution to perform this operation.

6. On the computer, A first acquisition function acquires a transmitted X-ray image obtained by sliding an X-ray source in a direction intersecting the depth direction of a reference object to irradiate the reference object with X-rays, and detecting the transmitted X-rays that have passed through the reference object with a detection unit. A second acquisition function acquires a resolution corresponding to the depth direction based on the planar size of a reference aperture which is arranged in multiple locations in the depth direction of the reference object and whose planar size in the planar direction intersecting the depth direction is known in advance, and the number of pixels of the image of the reference aperture recorded in the transmitted X-ray image acquired by the first acquisition function, A third acquisition function acquires a correlation between resolution and resolution based on the position where images of each of the multiple reference apertures are obtained, which are acquired based on the transmitted X-ray image of the reference target, and the resolution acquired by the second acquisition function. A resolution acquisition program that enables this.

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