Metal components

Abstract

Provided is a metal composite capable of obtaining a tool that can suppress chipping to be generated during cutting of a member to be cut.　A metal composite 1 includes a metal 2, nanodiamond particles 3 and micro-diamond particles 4. For example, the metal composite 1 is such that the nanodiamond particles 3 and the micro-diamond particles 4 disperse in a metal matrix that is configured by the metal 2.

Description

Technical Field

[0001] The present disclosure relates to a metal composition. This application claims the priority of Japanese Patent Application No. 2020-022348 filed in Japan on February 13, 2020, the content of which is incorporated herein by reference.

Background Art

[0002] Conventionally, when performing a process of cutting a target member such as dicing a semiconductor wafer on which semiconductor devices and electronic components are formed, cutting, drilling, polishing, grinding, etc., for example, a tool using micron-sized diamond particles as abrasive grains may be used. As the above tool, for example, a diamond sintered body having a first diamond particle group and a second diamond particle group, the average particle diameter of the first diamond particle group being 50 μm or more and being 5 times or more the average particle diameter of the second diamond particle group, and the bonding phase having at least a ferrous metal is known (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When trying to perform cutting at a high speed using a conventional tool using diamond abrasive grains, it may be considered to use diamond abrasive grains having a large size. However, when using diamond abrasive grains having a large size, there is a problem that chipping occurring in the cutting object becomes large.

[0005] Therefore, an object of the present disclosure is to provide a metal composition capable of obtaining a tool that can suppress chipping that occurs when performing a process of cutting a target member.

Means for Solving the Problems

[0006] The inventors of this disclosure, after diligent research to achieve the above objectives, have found that a metal composition comprising a metal, nanodiamond particles, and microdiamond particles makes it possible to obtain a tool that can suppress chipping that occurs during machining when the metal composition is used to machine a target component. This disclosure relates to a product completed based on these findings.

[0007] This disclosure provides a metal composition comprising a metal, nanodiamond particles, and microdiamond particles.

[0008] Preferably, the above metal composition contains nanodiamond particles and microdiamond particles dispersed in a metal matrix composed of the above metal.

[0009] The content of the above nanodiamond particles is preferably 0.05 to 50 parts by volume per 100 parts by volume of the total amount of the above metal.

[0010] The above metal may also be a binder in the above metal composition.

[0011] The above metal is preferably a metal bond formed by a sintering method.

[0012] The above metal preferably includes an alloy containing copper.

[0013] The above metal composition may also contain secondary particles of the above nanodiamond particles.

[0014] The average particle size (D50) of the primary nanodiamond particles in the above metal composition is preferably 1 to 240 nm.

[0015] The average particle size (D50) of the microdiamond particles in the above metal composition is preferably 1 to 600 μm.

[0016] The above-mentioned nanodiamond particles preferably include detonation nanodiamonds.

[0017] The above-mentioned metal composition is preferably a cutting member.

Advantages of the Invention

[0018] When the above-mentioned metal composition is used for machining to cut a target member, chipping generated during the machining can be suppressed. And thereby, the yield in the above-mentioned machining process is improved, and the effect that the process capability is improved is achieved.

Brief Description of the Drawings

[0019] [Figure 1] It is an enlarged schematic view of a metal composition according to an embodiment of the present disclosure. [Figure 2] It is a graph showing the evaluation results of the chipping size on the back surface of the glass cutting test in the examples and comparative examples. [Figure 3] It is a graph showing the evaluation results of the chipping size on the front surface of the glass cutting test in the examples and comparative examples.

Modes for Carrying Out the Invention

[0020] The metal composition according to an embodiment of the present disclosure includes at least a metal, nanodiamond particles, and microdiamond particles.

[0021] FIG. 1 shows an enlarged schematic view of an embodiment of the above-mentioned metal composition. The metal composition 1 includes a metal 2, nanodiamond particles 3, and microdiamond particles 4. More specifically, in the metal composition 1, the nanodiamond particles 3 and the microdiamond particles 4 are dispersed in a metal matrix composed of the metal 2.

[0022] In the above metal composition, the above metal acts as a binder (bond) for the above nano-diamond particles and the above nano-diamond particles. In the above metal composition, the above metal may be a metal bond formed by a sintering method, or an electroformed bond produced by electroplating growth by an electroforming method. Among them, from the viewpoint of excellent chipping suppression, a metal bond is preferable.

[0023] Examples of the above metal include lithium, magnesium, aluminum, calcium, chromium, titanium, vanadium, iron, cobalt, nickel, copper, zinc, silver, tin, antimony, tellurium, tungsten, gold, bismuth, and alloys containing these metals. As the above alloy, alloys containing copper such as bronze and copper-tin-zinc alloys are preferable. The above metal may be used alone or in combination of two or more.

[0024] The above nano-diamond particles are nano-sized diamond particles, not particularly limited, and known or commonly used nano-diamond particles can be used. The above nano-diamond particles may be surface-modified nano-diamond particles or non-surface-modified nano-diamond particles. Note that non-surface-modified nano-diamond particles have hydroxyl groups (-OH) on the surface. The above nano-diamond particles may be used alone or in combination of two or more.

[0025] In the above surface-modified nano-diamond, examples of the compound or functional group for surface-modifying the nano-diamond particles include silane compounds, carboxyl groups (-COOH), phosphonic acid ions or phosphonic acid residues, surface-modifying groups having vinyl groups at the ends, amide groups, cations of cationic surfactants, groups containing polyglycerol chains, groups containing polyethylene glycol chains, and the like.

[0026] The nanodiamond particles in the above metal composition preferably include primary nanodiamond particles. In addition, it may also include secondary particles in which several to several dozen of the primary particles are aggregated (adhered). That is, the nanodiamond particles in the above metal composition may be secondary particles (cluster nanodiamond particles).

[0027] The average particle diameter (D50, median diameter) of the primary particles of the nanodiamond particles in the above metal composition is, for example, 1 to 240 nm, preferably 2 to 100 nm, more preferably 3 to 50 nm, even more preferably 4 to 20 nm, and particularly preferably 4 to 10 nm. The above average particle diameter can be measured by dynamic light scattering.

[0028] As the nanodiamond particles mentioned above, for example, nanodiamonds produced by the detonation method (detonation nanodiamonds) or nanodiamonds produced by the high-temperature, high-pressure method (high-temperature, high-pressure nanodiamonds) can be used. Among these, detonation nanodiamonds are preferred because they allow for easy production of nanodiamonds with primary particle diameters of one order of magnitude nanometers.

[0029] The above-mentioned detonation-processed nanodiamonds include those produced by the air-cooled detonation method (air-cooled detonation nanodiamonds) and those produced by the water-cooled detonation method (water-cooled detonation nanodiamonds). Among these, the air-cooled detonation-processed nanodiamonds are preferred over the water-cooled detonation-processed nanodiamonds because their primary particles are smaller.

[0030] Detonation may be carried out in an atmospheric environment, or in an inert gas atmosphere such as a nitrogen atmosphere, argon atmosphere, or carbon dioxide atmosphere.

[0031] The above-mentioned microdiamond particles are micron-sized diamond particles and are not particularly limited; known or conventional microdiamond particles can be used. Only one type of microdiamond particle may be used, or two or more types may be used.

[0032] The average particle size (D50, median diameter) of the microdiamond particles in the above metal composition is, for example, 1 to 600 μm, preferably 5 to 300 μm, more preferably 7 to 100 μm, and even more preferably 10 to 50 μm. The above average particle size can be measured by dynamic light scattering.

[0033] The amount of nanodiamonds in the above metal composition is appropriately adjusted depending on the application of the metal composition, but is, for example, 0.05 to 50 parts by volume, preferably 0.1 to 20 parts by volume, and more preferably 1 to 10 parts by volume, per 100 parts by volume of the total amount of the metal.

[0034] The content of the microdiamonds in the above metal composition is appropriately adjusted depending on the application of the metal composition, but is, for example, 1 to 30 parts by volume, preferably 5 to 20 parts by volume, and more preferably 8 to 15 parts by volume, per 100 parts by volume of the total amount of the metal.

[0035] The above metal composition may contain other components besides metal, nanodiamond particles, and microdiamond particles. Examples of these other components include inorganic particles other than diamond particles, metal oxides, metal carbides, carbonates, and ceramics. Examples of these inorganic particles include particles that act as abrasives (e.g., boron nitride, silicon carbide, alumina, etc.) and carbon nanotubes. Only one of these other components may be used, or two or more may be used. The total content ratio of metal, nanodiamond particles, and microdiamond particles in the above metal composition may be, for example, 90% by mass or more, 95% by mass or more, 98% by mass or more, or 99% by mass or more, based on 100% by mass of the total amount of the above metal composition.

[0036] Examples of the above-mentioned metal composition include cutting members for cutting target members in tools used to cut target members, such as cutting tools, polishing tools, grinding tools, and drilling tools; heat sinks; and sliding members. In particular, the above-mentioned metal composition is preferably a cutting member, and more preferably a cutting member for a cutting tool (e.g., a blade). When the above-mentioned metal composition is a cutting member, its shape is preferably a sheet shape.

[0037] When the above metal composition is used as a cutting component, the microdiamond particles act as abrasive grains and are designed to have a shape and arrangement similar to that of abrasive grains in known or conventional cutting components. In the above cutting component, the nanodiamond particles are presumed to exert a friction and wear reduction effect. This is presumed to be because, when the microdiamonds as abrasive grains cut the target component, a transfer film (carbon transfer film) originating from the nanodiamond particles is formed on the surface of the target component, and this transfer film suppresses excessive wear or chipping caused by the abrasive grains. Thus, chipping is suppressed according to the above metal composition. As a result, the yield in the above processing step is improved, and thus the process capability is improved.

[0038] The above metal compositions can be manufactured as appropriate by a method suitable for the application, referring to known or conventional methods. For example, the above metal composition in the form of a sheet blade can be produced by forming a composition containing metal, nanodiamond particles, and microdiamond particles using a sintering method, or by plating and growing it using an electroforming method.

[0039] Each embodiment disclosed herein can be combined with any other features disclosed herein. Each configuration and combination thereof in each embodiment is an example, and can be added, omitted, replaced, and otherwise modified as appropriate without departing from the spirit of this disclosure. Furthermore, each invention relating to this disclosure is not limited by the embodiments or the following examples, but is limited only by the claims. [Examples]

[0040] An embodiment of this disclosure will be described in more detail below based on examples.

[0041] Example 1 Detonation-type nanodiamond particles and blades were manufactured through the following process.

[0042] (Preparation of nanodiamonds by detonation method) First, the process of producing nanodiamonds using the detonation method was carried out. In this process, the molded explosives, with electric detonators attached, were first placed inside a pressure-resistant container for detonation, and the container was sealed. The container was made of iron and had a volume of 15 m³. 3 The following was done: 0.50 kg of a mixture of TNT and RDX was used as the explosive. The mass ratio of TNT to RDX in this explosive (TNT / RDX) was 50 / 50. Next, an electric detonator was detonated, causing the explosive to detonate inside the container (detonation-based nanodiamond generation). Then, the container and its interior were allowed to cool down by leaving it at room temperature for 24 hours. After this cooling, the crude nanodiamond product (containing aggregates of nanodiamond particles and soot generated by the above detonation method) adhering to the inner wall of the container was scraped off with a spatula, and the crude nanodiamond product was recovered.

[0043] Next, an oxidation treatment process was performed. The crude nanodiamond product obtained by performing the above-described production process multiple times was subjected to the oxidation treatment process. Specifically, 6 L of 98% by mass sulfuric acid and 1 L of 69% by mass nitric acid were added to the obtained crude nanodiamond product to form a slurry, and this slurry was then heat-treated under reflux at atmospheric pressure for 48 hours. The heating temperature in this oxidation treatment was 140-160°C. Next, after cooling, the solid components (including nanodiamond aggregates) were washed with water by decantation. The supernatant liquid was colored at the beginning of the washing process, and the washing of the solid components by decantation was repeated until the supernatant liquid was visibly clear. After that, the mixture was dried to obtain nanodiamond particles containing primary particles and nanodiamond aggregates (secondary particles) as a powder. Furthermore, the mixture was heated at 400°C for 6 hours in a rotary kiln with a gas mixture of approximately 8% by volume of oxygen and approximately 92% by volume of nitrogen blown in at a flow rate of 20 L / min to obtain dried nanodiamond powder.

[0044] The obtained dried nanodiamond powder was subjected to crystal structure analysis using an X-ray diffraction spectrometer (product name "SmartLab," manufactured by Rigaku Corporation). As a result, a strong diffraction peak was observed at the diffraction peak position of diamond, i.e., at the diffraction peak position from the (111) plane of the diamond crystal, and the calculated crystallite size was 4.5 nm. Furthermore, small-angle X-ray scattering measurements were performed on the obtained dried powder using an X-ray diffraction spectrometer (product name "SmartLab," manufactured by Rigaku Corporation), and the primary particle diameter of nanodiamonds in the scattering angle region of 1° to 3° was estimated using particle size distribution analysis software (product name "NANO-Solver," manufactured by Rigaku Corporation). In this estimation, it was assumed that the primary nanodiamond particles were spherical and the particle density was 3.51 g / cm³. 3 We made the following assumption. As a result, the average particle size of the nanodiamond primary particles obtained in this measurement was 5.5 nm, and the relative standard deviation (RSD) of the primary particle distribution was 30.2.

[0045] (Blade making) A bronze was used as the binder for the metal bond, and 10 parts by volume of microdiamond powder (#800, abrasive grain for cutting, D50: 18-25 μm) was added to 100 parts by volume of the binder. Then, 6.4 parts by volume of the above nanodiamond dried powder was added to 100 parts by volume of the binder, and the mixture was sintered into a sheet at a temperature of 750°C under a nitrogen atmosphere. Subsequently, a metal blade (outer diameter: 56 mm, inner diameter: 40 mm, blade thickness: 0.13 mm) was fabricated by punching it into an annular shape.

[0046] Furthermore, when the above microdiamond powder was subjected to crystal structure analysis using an X-ray diffraction analyzer (product name "SmartLab", manufactured by Rigaku Corporation), a strong diffraction peak was observed at the diffraction peak position of diamond, i.e., at the diffraction peak position from the (111) plane of the diamond crystal, and the calculated crystallite size was 20 μm.

[0047] Comparative Example 1 A metal blade was prepared in the same manner as in Example 1, except that nanodiamond dried powder was not incorporated.

[0048] (Glass cutting test) Glass cutting tests were conducted on the metal blades prepared in the examples and comparative examples. The metal blades obtained in the examples and comparative examples were set in a dicing apparatus, and a glass plate (7.5 cm long × 7.5 cm wide × 0.4 mm thick) was cut using the metal blades. The chipping size on the front and back surfaces of the glass plate after cutting was then checked. The glass plate was cut lengthwise in 35 passes at feed rates of 1 mm / sec twice, 2 mm / sec twice, 3 mm / sec twice, 4 mm / sec twice, 5 mm / sec twice, and 6 mm / sec 25 times, with a spindle speed of 20 rpm. In addition, the glass plate was cut widthwise in 72 passes at a feed rate of 6 mm / sec with a spindle speed of 20 rpm (107 passes in total). After cutting, the chipping on the cutting lines on both the front and back surfaces of the glass plate was observed with an optical microscope, and nine points with large sizes were extracted from both the front and back surfaces. For each of the nine samples extracted from the front and back surfaces, the results of the chipping size evaluation for the back surface are shown in Figure 2 and Table 1, and the results of the chipping size evaluation for the front surface are shown in Figure 3 and Table 2, respectively. The chipping was performed while supplying pure water at a rate of 1.0 L / min.

[0049] [Table 1]

[0050] [Table 2]

[0051] As shown in Figure 2 and Table 1, when the metal blade obtained in Comparative Example 1 was used, the chipping size on the back surface of the glass plate was 13 to 30 μm, and the average value was 21 μm. On the other hand, when the metal blade obtained in Example 1 was used, the chipping size on the back surface of the glass plate was 11 to 20 μm, and the average value was 14 μm. Thus, Example 1 showed generally smaller chipping sizes, a smaller average value, a smaller standard deviation, and less variability compared to Comparative Example 1. Furthermore, as shown in Figure 3 and Table 2, it can be seen that the chipping size on the surface of the glass plate was also generally smaller in Example 1 compared to Comparative Example 1.

[0052] The following describes variations of the invention relating to this disclosure. [Note 1] A metal composition comprising a metal, nanodiamond particles, and microdiamond particles. [Note 2] The metal composition according to Note 1, wherein the nanodiamond particles and the microdiamond particles are dispersed in a metal matrix composed of the metal. [Note 3] The metal composition according to Note 1 or 2, wherein the content of the nanodiamond particles is 0.05 to 50 parts by volume (preferably 0.1 to 20 parts by volume, more preferably 1 to 10 parts by volume) per 100 parts by volume of the total amount of the metal. [Note 4] The metal composition according to any one of Notes 1 to 3, wherein the metal is a binder in the metal composition. [Note 5] The metal composition according to any one of Notes 1 to 4, wherein the metal is a metal bond formed by a sintering method. [Note 6] The metal composition according to any one of Notes 1 to 5, wherein the metal is an alloy containing copper (preferably bronze). [Note 7] A metal composition according to any one of Notes 1 to 6, comprising secondary particles of the nanodiamond particles. [Note 8] The nanodiamond particles are a metal composition according to any one of Notes 1 to 7, which includes detonation-processed nanodiamonds. [Note 9] The nanodiamond particles are a metal composition according to any one of Notes 1 to 7, including air-cooled detonation nanodiamonds. [Note 10] The metal composition according to any one of Notes 1 to 9, wherein the average particle diameter of the primary particles of the nanodiamond particles is 1 to 240 nm (preferably 2 to 100 nm, more preferably 3 to 50 nm, even more preferably 4 to 20 nm, and particularly preferably 4 to 10 nm). [Note 11] The metal composition according to any one of Notes 1 to 10, wherein the average particle size of the microdiamond particles is 1 to 600 μm (preferably 5 to 300 μm, more preferably 7 to 100 μm, and even more preferably 10 to 50 μm). [Note 12] The metal composition according to any one of Notes 1 to 11, wherein the content of the microdiamonds in the metal composition is 1 to 30 parts by volume (preferably 5 to 20 parts by volume, more preferably 8 to 15 parts by volume) per 100 parts by volume of the total amount of the metal. [Note 13] The metal composition according to any one of Notes 1 to 12, wherein the total content of metal, nanodiamond particles, and microdiamond particles in the metal composition is 90% by mass or more (95% by mass or more, 98% by mass or more, or 99% by mass or more) based on 100% by mass of the total amount of the metal composition. [Note 14] The metal composition according to any one of Notes 1 to 13, wherein the total content of metal, nanodiamond particles, and microdiamond particles in the metal composition is 90% by volume or more (95% by volume or more, 98% by volume or more, or 99% by volume or more) based on 100% by volume of the total amount of the metal composition. [Note 15] A metal composition described in any one of Notes 1 to 14, which is a cutting member. [Note 16] Use of the metal composition according to any one of claims 1 to 14 as a cutting member. [Explanation of symbols]

[0053] 1 Metal composition 2. Metal (metal matrix) 3. Nanodiamond particles 4. Microdiamond particles

Claims

1. A metal composition, The metal composition comprises a metal, nanodiamond particles, and microdiamond particles. The aforementioned metal is bronze or a copper-tin-zinc alloy. The nanodiamond particles are nano-sized diamond particles, the average particle diameter (D50) of the primary particles of the nanodiamond particles is 1 to 240 nm, and the content of the nanodiamond particles is 0.05 to 50 parts by volume per 100 parts by volume of the total amount of the metal. The microdiamond particles are micron-sized diamond particles, the average particle diameter (D50) of the microdiamond particles is 1 to 600 μm, and the content of the microdiamond particles is 1 to 30 parts by volume per 100 parts by volume of the total amount of the metal. The total content ratio of the nanodiamond particles and the microdiamond particles is 90% by mass or more with respect to 100% by mass of the total amount of the metal composition. The aforementioned metal composition is a tool. metal composition.

2. The metal composition according to claim 1, wherein the nanodiamond particles and the microdiamond particles are dispersed in a metal matrix composed of the aforementioned metal.

3. The metal composition according to claim 1 or 2, wherein the metal is a binder in the metal composition.

4. The metal composition according to any one of claims 1 to 3, comprising secondary particles of the nanodiamond particles.

5. The metal composition according to any one of claims 1 to 4, wherein the nanodiamond particles include detonation-processed nanodiamonds.

6. A metal composition according to any one of claims 1 to 5, which is a cutting member.

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