Substrate processing apparatus and substrate processing method

Abstract

To provide a substrate processing technique that can properly process a substrate by collecting upwardly scattered droplets generated when processing the substrate by supplying a processing liquid to the peripheral edge of the rotating substrate.SOLUTION: When the peripheral edge of a substrate is processed with a processing liquid, upwardly scattered droplets may be generated. Therefore, in the present invention, the processing liquid is applied to the peripheral edge of the substrate from an ejection port while positioning the ejection port at a bevel processing position lower than an eave portion of a cup portion in the vertical direction, with the peripheral edge of the substrate covered vertically from above by the eave portion. Therefore, the eave portion collects the upwardly scattered droplets. As a result, re-adhesion of the upwardly scattered droplets to the substrate and scattering into the surrounding atmosphere are suppressed.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] This invention relates to a substrate processing technology for supplying a processing liquid to a substrate and processing the substrate.

Background Art

[0002] There is known a substrate processing apparatus that supplies a processing liquid to a substrate such as a semiconductor wafer while rotating the substrate to perform chemical liquid treatment, cleaning treatment, etc. For example, in the apparatus described in Patent Document 1, a splash prevention part is provided to collect and recover the processing liquid and the like scattered from the rotated substrate. The splash prevention part has a splash guard (sometimes referred to as a "cup") fixedly arranged so as to surround the outer periphery of the rotated substrate. The inner peripheral surface of the splash guard faces the outer periphery of the substrate and collects the droplets of the processing liquid shaken off from the rotated substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, when collecting droplets by the splash guard, the droplets may collide with the inner peripheral surface of the splash guard and a part of them may fly upward. Also, when the processing liquid is supplied to the peripheral portion of the substrate, a part of the droplets of the processing liquid may fly upward. When the droplets that have scattered upward (hereinafter referred to as "upward scattered droplets") reattach to the substrate, watermarks are generated. Also, the surrounding atmosphere may be contaminated by the droplets flying beyond the splash guard. Therefore, in order to process the substrate well in the above substrate processing apparatus, it is important to suppress the scattering of droplets upward.

[0005] This invention has been made in view of the above problems, and aims to provide a substrate processing technology that can process the substrate well by collecting upward-scattered droplets generated when processing the substrate by supplying a processing liquid to the peripheral edge of a rotating substrate. [Means for solving the problem]

[0006] This invention 1 The embodiment is a substrate processing apparatus comprising: a substrate holding part rotatably mounted around a vertically extending rotation axis while holding a substrate; a rotation mechanism for rotating the substrate holding part; a processing mechanism having a processing liquid discharge nozzle for discharging processing liquid from a discharge port toward the peripheral edge of the substrate held by the substrate holding part; a splash prevention mechanism having a cup part that surrounds the outer circumference of the rotating substrate and collects processing liquid scattered from the substrate as the substrate holding part rotates; and a control unit, wherein the cup part is The inner diameter of its upper end is smaller than the diameter of the substrate, and the inner diameter of its lower end is larger than the diameter of the substrate. The inner surface is finished as an inclined surface. It has an inclined portion, and the upper end of the inclined portion is In a plan view from vertically above, the peripheral edge of the substrate held in the substrate holder is covered all around, and the processing liquid scattered from the substrate is collected on the inclined surface, along the inclined surface. Towards the lower end of the inclined section The canopy area to be flowed implied The control unit, in the vertical direction The lower end of the inclined portion is located below the substrate, The processing mechanism is characterized by controlling the processing liquid discharged from the discharge port so that it lands on the peripheral edge of the substrate, while the discharge port is located at a bevel processing position lower than the overhang portion. A second aspect of the present invention is a substrate processing apparatus comprising: a substrate holding portion rotatably mounted around a vertically extending rotation axis while holding a substrate; a rotation mechanism for rotating the substrate holding portion; a processing mechanism having a processing liquid discharge nozzle for discharging processing liquid from a discharge port toward the peripheral edge of the substrate held by the substrate holding portion; a splash prevention mechanism having a cup portion that surrounds the outer circumference of the rotating substrate and collects processing liquid scattered from the substrate as the substrate holding portion rotates; and a control unit, wherein the cup portion has a canopy portion that covers the entire circumference of the peripheral edge of the substrate held by the substrate holding portion in a plan view from vertically above, and the control unit has a discharge port lower than the canopy portion in the vertical direction. The processing mechanism is controlled so that the processing liquid discharged from the discharge port lands on the peripheral edge of the substrate when it is positioned in the bevel processing position. The processing mechanism has a nozzle movement unit that moves the processing liquid discharge nozzle to switch the position of the discharge port between the bevel processing position and a pre-dispense position that is closer to the cup portion than the bevel processing position. The control unit controls the nozzle movement unit so that when processing the peripheral edge of the substrate, the discharge port is in the bevel processing position, while when pre-dispensing from the processing liquid discharge nozzle is performed, the discharge port is in the pre-dispense position so that the processing liquid discharged from the discharge port is directly discharged into the cup portion. A third aspect of the present invention is a substrate processing apparatus comprising: a substrate holding portion rotatably mounted around a vertically extending rotation axis while holding a substrate; a rotation mechanism for rotating the substrate holding portion; a processing mechanism having a processing liquid discharge nozzle for discharging processing liquid from a discharge port toward the peripheral edge of the substrate held by the substrate holding portion; a splash prevention mechanism having a cup portion that surrounds the outer circumference of the rotating substrate and collects processing liquid scattered from the substrate as the substrate holding portion rotates; and in a plan view from vertically above, the substrate held by the substrate holding portion inside the cup portion The device comprises an upper surface protection mechanism having a shielding plate that covers the upper surface of the substrate at a predetermined distance from the upper surface of the plate, and a control unit. The cup portion has a canopy portion that covers the entire circumference of the peripheral edge of the substrate held by the substrate holding portion when viewed from a plan view from vertically above. The control unit controls the processing mechanism so that the processing liquid discharged from the discharge port lands on the peripheral edge of the substrate when the discharge port is positioned at a bevel processing position lower than the canopy portion in the vertical direction. The processing liquid discharge nozzle is positioned to close a notch formed on the peripheral edge of the shielding plate.

[0007] Furthermore, this invention 4th The embodiment is a substrate processing method in which the peripheral edge of a substrate is processed by a processing liquid from the discharge port of a processing liquid discharge nozzle while the outer circumference of the substrate, which is rotated around a rotation axis extending in the vertical direction, is surrounded by a cup portion, The cup portion has an inclined portion whose upper end has an inner diameter smaller than the diameter of the substrate and whose lower end has an inner diameter larger than the diameter of the substrate, and whose inner circumferential surface is finished as an inclined surface, and the upper end of the inclined portion includes a canopy portion which, when viewed from a plan view from vertically above, covers the entire periphery of the substrate and collects the processing liquid scattered from the substrate with the inclined surface and allows it to flow along the inclined surface toward the lower end of the inclined portion, and in the vertical direction the lower end of the inclined portion is located below the substrate, The device is characterized by covering the periphery of the substrate from vertically above with the overhang portion of the cup, and positioning the discharge port at a beveled position lower than the overhang portion in the vertical direction, while applying the processing liquid from the discharge port to the periphery of the substrate.

[0008] When processing the peripheral edges of a substrate with a processing solution, upward splashing droplets may occur. However, in the invention configured as described above, the overhang portion of the cup covers the entire peripheral edge of the substrate held by the substrate holder from above, so the overhang portion collects the upward splashing droplets. As a result, re-adhesion of the upward splashing droplets to the substrate and scattering into the surrounding atmosphere are suppressed. [Effects of the Invention]

[0009] According to this invention, by supplying a processing liquid to the peripheral edge of a rotating substrate and processing the substrate, upward-scattered droplets generated during the process can be collected, thereby enabling effective processing of the substrate. [Brief explanation of the drawing]

[0010] [Figure 1] This is a plan view showing the schematic configuration of a substrate processing system equipped with a first embodiment of the substrate processing apparatus according to the present invention. [Figure 2] This figure shows the configuration of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 3] This is a plan view taken along line AA in Figure 2. [Figure 4] This is a plan view showing the configuration of the power transmission section. [Figure 5] Figure 4 is a cross-sectional view along line BB. [Figure 6] This is a disassembled and assembled perspective view showing the structure of the rotating cup section. [Figure 7] This diagram shows the dimensional relationship between the substrate held in the spin chuck and the rotating cup. [Figure 8] This diagram shows a portion of the rotating cup section and the fixed cup section. [Figure 9] This is an external perspective view showing the configuration of the top protective heating mechanism. [Figure 10] Figure 9 is a cross-sectional view of the top protective heating mechanism. [Figure 11] This is a perspective view showing the upper processing liquid discharge nozzle equipped in the processing mechanism. [Figure 12]It is a diagram showing the nozzle position in the bevel processing mode and the pre-dispensing mode. [Figure 13] It is a perspective view showing the processing liquid discharge nozzle on the lower surface side equipped in the processing mechanism and the nozzle support portion supporting the nozzle. [Figure 14] It is a partial cross-sectional view showing the configuration of the atmosphere separation mechanism. [Figure 15] It is a flowchart showing the bevel processing executed as an example of the substrate processing operation by the substrate processing apparatus shown in FIG. 2. [Figure 16A] It is a schematic diagram showing the loading operation of the substrate in the first embodiment. [Figure 16B] It is a schematic diagram showing the centering operation of the substrate in the first embodiment. [Figure 16C] It is a schematic diagram showing the bevel operation of the substrate in the first embodiment. [Figure 16D] It is a schematic diagram showing the inspection operation of the substrate in the first embodiment. [Figure 17A] It is a diagram showing the first modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 17B] It is a diagram showing the second modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 17C] It is a diagram showing the third modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 18] It is a diagram showing the fourth modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 19] It is a diagram showing the fifth modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 20A] It is a diagram showing the sixth modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 20B] It is a diagram showing the seventh modification example of the first embodiment of the substrate processing apparatus according to the present invention. [Figure 21] It is a graph showing the airflow velocity at each position in the substrate diameter direction with respect to the discharge flow rate of nitrogen gas. [Figure 22]This graph shows the airflow velocity in the radial direction of the substrate as a function of the nitrogen gas discharge flow rate at the periphery of the substrate. [Figure 23] This graph shows the change in surface temperature at various locations along the radial direction of the substrate in relation to the temperature of the heated gas. [Figure 24] This graph shows the change in surface temperature in relation to the temperature of the heated gas at the center and edges of the substrate. [Figure 25] This figure shows the configuration of a second embodiment of the substrate processing apparatus according to the present invention. [Figure 26] This figure shows the configuration of the rotating cup portion in the second embodiment. [Figure 27] Figure 25 is a flowchart showing a beveling process as an example of a substrate processing operation performed by the substrate processing apparatus shown in Figure 25. [Figure 28A] This is a schematic diagram showing the substrate loading operation in the second embodiment. [Figure 28B] This is a schematic diagram illustrating the centering operation of the substrate in the second embodiment. [Figure 28C] This is a schematic diagram showing the bevel operation of the substrate in the second embodiment. [Figure 28D] This is a schematic diagram showing the inspection operation of the substrate in the second embodiment. [Modes for carrying out the invention]

[0011] Figure 1 is a plan view showing the schematic configuration of a substrate processing system equipped with a first embodiment of the substrate processing apparatus according to the present invention. This does not show the external appearance of the substrate processing system 100, but is a schematic diagram that clearly shows its internal structure by excluding the outer wall panels and some other components of the substrate processing system 100. This substrate processing system 100 is a single-wafer type device that is installed, for example, in a clean room and processes substrates W one by one, on which circuit patterns, etc. (hereinafter referred to as "patterns") are formed only on one main surface. The substrate processing method according to the present invention is executed in the processing unit 1 equipped in the substrate processing system 100. In this specification, of the two main surfaces of a substrate, the pattern-forming surface (one main surface) on which a pattern is formed is referred to as the "front surface," and the other main surface on the opposite side on which no pattern is formed is referred to as the "back surface." Also, the surface facing downwards is referred to as the "bottom surface," and the surface facing upwards is referred to as the "top surface." In this specification, "pattern-forming surface" means a surface on a substrate on which an uneven pattern is formed in an arbitrary area.

[0012] In this embodiment, the "substrate" can be any type of substrate, such as a semiconductor wafer, a glass substrate for a photomask, a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a substrate for a Field Emission Display (FED), a substrate for an optical disk, a substrate for a magnetic disk, or a substrate for a magneto-optical disk. The following explanation will primarily use a substrate processing apparatus used for processing semiconductor wafers as an example, with reference to the drawings, but the method can also be applied to processing the various types of substrates exemplified above.

[0013] As shown in Figure 1, the substrate processing system 100 comprises a substrate processing unit 110 that processes the substrate W, and an indexer unit 120 coupled to the substrate processing unit 110. The indexer unit 120 includes a container C for housing the substrate W (a FOUP (Front Opening Unified Pod) that houses multiple substrates W in a sealed state), and a SMIF (Standard The container holding section 121 has a container holding section 121 that can hold multiple mechanical interface (Mechanical Interface) pods, open cassettes (OCs), etc. The indexer section 120 is equipped with an indexer robot 122 for accessing the containers C held by the container holding section 121 to remove unprocessed substrates W from the containers C and to store processed substrates W in the containers C. Each container C contains multiple substrates W in a nearly horizontal position.

[0014] The indexer robot 122 comprises a base portion 122a fixed to the device housing, a multi-joint arm 122b rotatably mounted on the base portion 122a around a vertical axis, and a hand 122c attached to the tip of the multi-joint arm 122b. The hand 122c is structured to hold a substrate W on its upper surface. Since indexer robots having such a multi-joint arm and a hand for holding a substrate are well known, a detailed explanation will be omitted.

[0015] The substrate processing unit 110 comprises a mounting table 112 on which the indexer robot 122 places the substrate W, a substrate transport robot 111 positioned approximately in the center in a plan view, and a plurality of processing units 1 arranged to surround the substrate transport robot 111. Specifically, the plurality of processing units 1 are arranged facing the space in which the substrate transport robot 111 is positioned. The substrate transport robot 111 randomly accesses the mounting table 112 with respect to these processing units 1 and transfers the substrate W between the mounting table 112 and the processing unit 1. On the other hand, each processing unit 1 performs predetermined processing on the substrate W and corresponds to the substrate processing apparatus according to the present invention. In this embodiment, these processing units (substrate processing apparatus) 1 have the same function. Therefore, parallel processing of multiple substrates W is possible. Note that if the substrate transport robot 111 can directly receive the substrate W from the indexer robot 122, the mounting table 112 is not necessarily required.

[0016] Figure 2 shows the configuration of the first embodiment of the substrate processing apparatus according to the present invention. Figure 3 is a plan view taken along line AA in Figure 2. In Figures 2, 3, and the figures referenced below, the dimensions and number of parts may be exaggerated or simplified for ease of understanding. The substrate processing apparatus (processing unit) 1 includes a rotation mechanism 2, a scattering prevention mechanism 3, an upper surface protection heating mechanism 4, a processing mechanism 5, an atmosphere separation mechanism 6, a lifting mechanism 7, a centering mechanism 8, and a substrate observation mechanism 9. These parts 2 to 9 are housed in the internal space 12 of the chamber 11 and are electrically connected to a control unit 10 that controls the entire apparatus. Then, each part 2 to 9 operates in accordance with instructions from the control unit 10.

[0017] The control unit 10 can be, for example, one similar to that of a general-purpose computer. That is, in the control unit 10, the CPU, acting as the main control unit, performs calculations according to the procedures described in the program, thereby controlling each part of the substrate processing device 1. The detailed configuration and operation of the control unit 10 will be described in detail later. In this embodiment, a control unit 10 is provided for each substrate processing device 1, but it is also possible to configure the system so that one control unit controls multiple substrate processing devices 1. Alternatively, the substrate processing device 1 may be controlled by a control unit (not shown) that controls the entire substrate processing system 100.

[0018] As shown in Figure 2, a fan filter unit (FFU) 13 is mounted on the ceiling wall 11a of the chamber 11. This fan filter unit 13 further purifies the air in the cleanroom where the substrate processing apparatus 1 is installed and supplies it to the processing space in the chamber 11. The fan filter unit 13 is equipped with a fan and filter (e.g., a HEPA (High Efficiency Particulate Air) filter) for taking in air from the cleanroom and sending it into the chamber 11, and it sends the clean air through an opening 11b provided in the ceiling wall 11a. This creates a downflow of clean air into the processing space in the chamber 11. In addition, a perforated plate 14 with numerous outlet holes is provided directly below the ceiling wall 11a to uniformly disperse the clean air supplied from the fan filter unit 13.

[0019] As shown in Figures 1 and 3, the substrate processing apparatus 1 is provided with a shutter 15 on the side of the chamber 11. A shutter opening / closing mechanism (not shown) is connected to the shutter 15, and the shutter 15 is opened and closed in response to an opening / closing command from the control unit 10. More specifically, in the substrate processing apparatus 1, when an unprocessed substrate W is brought into the chamber 11, the shutter opening / closing mechanism opens the shutter 15, and the unprocessed substrate W is brought into the spin chuck (substrate holding part) 21 of the rotation mechanism 2 in a face-up position by the hand of the substrate transport robot 111 (indicated as RH in Figure 16A). In other words, the substrate W is placed on the spin chuck 21 with its upper surface Wf facing upwards. After the substrate is brought in, when the hand of the substrate transport robot 111 moves away from the chamber 11, the shutter opening / closing mechanism closes the shutter 15. Then, beveling is performed on the peripheral Ws of the substrate W within the processing space of the chamber 11 (corresponding to the sealed space SPs which will be described in detail later). Furthermore, after the beveling process is completed, the shutter opening / closing mechanism opens the shutter 15 again, and the hand of the substrate transport robot 111 removes the processed substrate W from the spin chuck 21. In this embodiment, the internal space 12 of the chamber 11 is maintained at room temperature. In this specification, "room temperature" means a temperature range of 5°C to 35°C.

[0020] The rotation mechanism 2 has the function of rotating the substrate W while holding it in a substantially horizontal position with its surface facing upward, and also rotating a part of the anti-scattering mechanism 3 in synchronous motion in the same direction as the substrate W. The rotation mechanism 2 rotates the substrate W and the rotating cup portion 31 of the anti-scattering mechanism 3 around a vertical rotation axis AX that passes through the center of the main surface. In Figure 2, dots are placed on the parts that are rotated to clearly indicate the components and parts that rotate integrally with the rotation mechanism 2.

[0021] The rotating mechanism 2 includes a spin chuck 21, which is a disc-shaped member smaller than the substrate W. The spin chuck 21 is positioned so that its upper surface is approximately horizontal and its central axis coincides with the rotation axis AX. A cylindrical rotating shaft portion 22 is connected to the lower surface of the spin chuck 21. The rotating shaft portion 22 extends vertically with its axis aligned with the rotation axis AX. A rotational drive unit (e.g., a motor) 23 is connected to the rotating shaft portion 22. The rotational drive unit 23 rotates the rotating shaft portion 22 around its axis in response to a rotation command from the control unit 10. Therefore, the spin chuck 21 can rotate around the rotation axis AX together with the rotating shaft portion 22. The rotational drive unit 23 and the rotating shaft portion 22 are responsible for rotating the spin chuck 21 around the rotation axis AX, and the lower end of the rotating shaft portion 22 and the rotational drive unit 23 are housed in a cylindrical casing 24.

[0022] A through-hole (not shown) is provided in the center of the spin chuck 21, communicating with the internal space of the rotating shaft 22. A pump 26 is connected to the internal space via piping 25, which has a valve (not shown) interposed therein. The pump 26 and the valve are electrically connected to the control unit 10 and operate in response to commands from the control unit 10. This allows negative pressure and positive pressure to be selectively applied to the spin chuck 21. For example, when the substrate W is placed on the upper surface of the spin chuck 21 in a substantially horizontal position and the pump 26 applies negative pressure to the spin chuck 21, the spin chuck 21 attracts and holds the substrate W from below. On the other hand, when the pump 26 applies positive pressure to the spin chuck 21, the substrate W becomes removable from the upper surface of the spin chuck 21. Also, when the suction of the pump 26 is stopped, the substrate W becomes able to move horizontally on the upper surface of the spin chuck 21.

[0023] A nitrogen gas supply unit 29 is connected to the spin chuck 21 via a pipe 28 located in the center of the rotating shaft 22. The nitrogen gas supply unit 29 supplies ambient temperature nitrogen gas, supplied from a utility in the factory where the substrate processing system 100 is installed, to the spin chuck 21 at a flow rate and timing corresponding to the nitrogen gas supply command from the control unit 10, causing the nitrogen gas to circulate radially outward from the center on the lower surface Wb side of the substrate W. In this embodiment, nitrogen gas is used, but other inert gases may also be used. The same applies to the heated gas discharged from the central nozzle, which will be described later. Also, "flow rate" refers to the amount of fluid, such as nitrogen gas, that moves per unit time.

[0024] The rotation mechanism 2 not only rotates the spin chuck 21 integrally with the substrate W, but also has a power transmission unit 27 to rotate the rotating cup portion 31 in synchronization with the rotation. Figure 4 is a plan view showing the configuration of the power transmission unit, and Figure 5 is a cross-sectional view taken along line BB of Figure 4. The power transmission unit 27 has an annular member 27a made of a non-magnetic material or resin, a magnet 27b built into the annular member 27a, and a magnet 27c built into the lower cup 32, which is a component of the rotating cup portion 31. The annular member 27a is attached to the rotating shaft portion 22 and is rotatable around the rotating shaft AX together with the rotating shaft portion 22. More specifically, as shown in Figures 2 and 5, the rotating shaft portion 22 has a flange portion 22a that extends radially outward at a position directly below the spin chuck 21. The annular member 27a is arranged concentrically with respect to the flange portion 22a and is connected and fixed by bolts (not shown).

[0025] As shown in Figures 4 and 5, on the outer edge of the annular member 27a, a plurality of magnets (36 in this embodiment) 27b are arranged radially around the rotation axis AX and at equal angular intervals (10° in this embodiment). In this embodiment, as shown in the enlarged view of Figure 4, in one pair of adjacent magnets 27b, the outer and inner poles are arranged to be the north and south poles, respectively, while in the other pair, the outer and inner poles are arranged to be the south and north poles, respectively.

[0026] Similar to these magnets 27b, a plurality of magnets 27c (36 in this embodiment) are arranged radially around the rotation axis AX and at equal angular intervals (10° in this embodiment). These magnets 27c are housed in the lower cup 32. The lower cup 32 is a component of the splash prevention mechanism 3, which will be described next, and has an annular shape as shown in Figures 4 and 5. That is, the lower cup 32 has an inner circumferential surface that can face the outer circumferential surface of the annular member 27a. The inner diameter of this inner circumferential surface is larger than the outer diameter of the annular member 27a. The lower cup 32 is arranged concentrically with the rotation axis portion 22 and the annular member 27a, with the inner circumferential surface facing the outer circumferential surface of the annular member 27a at a predetermined distance (=(inner diameter - outer diameter) / 2). An engagement pin 35 and a connecting magnet 36 are provided on the upper surface of the outer circumferential edge of the lower cup 32, and the upper cup 33 is connected to the lower cup 32 by these, and this connected body functions as the rotation cup portion 31. I will elaborate on this point later.

[0027] The lower cup 32 is supported by bearings (not shown in the drawings) so that it can rotate around the rotation axis AX in the above arrangement. On the inner periphery of the lower cup 32, as shown in Figures 4 and 5, a plurality of magnets 27c (36 in this embodiment) are arranged radially around the rotation axis AX and at equal angular intervals (10° in this embodiment). The arrangement of two adjacent magnets 27c is the same as that of magnets 27b. That is, on one side, the outer and inner sides are arranged so that they are the north pole and south pole, respectively, and on the other side, the outer and inner sides are arranged so that they are the south pole and north pole, respectively.

[0028] In the power transmission unit 27 configured in this way, when the annular member 27a rotates together with the rotating shaft 22 by the rotation drive unit 23, the lower cup 32 rotates in the same direction as the annular member 27a while maintaining the air gap GPa (the gap between the annular member 27a and the lower cup 32) due to the magnetic force between the magnets 27b and 27c. As a result, the rotating cup portion 31 rotates around the rotation axis AX. In other words, the rotating cup portion 31 rotates in the same direction as the substrate W and in sync with it.

[0029] The splash prevention mechanism 3 includes a rotating cup portion 31 that can rotate around the rotation axis AX while surrounding the outer circumference of the substrate W held by the spin chuck 21, and a fixed cup portion 34 that is fixedly provided to surround the rotating cup portion 31. The rotating cup portion 31 is provided so as to be rotatable around the rotation axis AX while surrounding the outer circumference of the rotating substrate W, by connecting the upper cup 33 to the lower cup 32.

[0030] Figure 6 is an exploded and assembled perspective view showing the structure of the rotating cup section. Figure 7 is a diagram showing the dimensional relationship between the substrate held by the spin chuck and the rotating cup section. Figure 8 is a diagram showing a part of the rotating cup section and the fixed cup section. The lower cup 32 has an annular shape. Its outer diameter is larger than the outer diameter of the substrate W, and in a plan view from vertically above, the lower cup 32 is rotatably positioned around the rotation axis AX, protruding radially from the substrate W held by the spin chuck 21. In this protruding region, that is, the upper peripheral edge 321 of the lower cup 32, engagement pins 35 and flat lower magnets 36 are alternately attached vertically upward along the circumferential direction. There are a total of 3 engagement pins 35 and a total of 3 lower magnets 36. These engagement pins 35 and lower magnets 36 are arranged radially around the rotation axis AX and at equal angular intervals (60° in this embodiment).

[0031] On the other hand, as shown in Figures 2, 3, 6, and 7, the upper cup 33 has a lower annular portion 331, an upper annular portion 332, and an inclined portion 333 connecting them. The outer diameter D331 of the lower annular portion 331 is the same as the outer diameter D32 of the lower cup 32, and as shown in Figure 6, the lower annular portion 331 is located vertically above the peripheral edge 321 of the lower cup 32. On the lower surface of the lower annular portion 331, a recess 335 opening downward is provided in a region corresponding to the vertically above the engagement pin 35 so as to be able to fit with the tip of the engagement pin 35. Also, the upper magnet 37 is attached in a region corresponding to the vertically above the lower magnet 36. Therefore, as shown in Figure 6, with the recess 335 and the upper magnet 37 facing the engagement pin 35 and the lower magnet 36, respectively, the upper cup 33 can engage with and disengage from the lower cup 32. Note that the relationship between the recess and the engagement pin may be reversed. In addition to the combination of the lower magnet 36 and the upper magnet 37, one of them may be made of a magnet and the other of a ferromagnetic material.

[0032] The upper cup 33 is vertically movable by the lifting mechanism 7. When the upper cup 33 is moved upward by the lifting mechanism 7, a transport space (indicated as SPt in Figure 16A) for loading and unloading the substrate W is formed vertically between the upper cup 33 and the lower cup 32. On the other hand, when the upper cup 33 is moved downward by the lifting mechanism 7, the recess 335 fits over the tip of the engagement pin 35, and the upper cup 33 is positioned horizontally relative to the lower cup 32. Also, the upper magnet 37 approaches the lower magnet 36, and the attractive force generated between them connects the positioned upper cup 33 and lower cup 32 to each other. As a result, as shown in the partially enlarged view of Figure 3 and Figure 8, the upper cup 33 and lower cup 32 are vertically integrated while forming a horizontally extending gap GPc. The rotating cup portion 31 is then rotatable around the rotation axis AX while maintaining the gap GPc.

[0033] In the rotating cup portion 31, as shown in Figure 7, the outer diameter D332 of the upper annular portion 332 is slightly smaller than the outer diameter D331 of the lower annular portion 331. Comparing the inner diameters d331 and d332 of the lower annular portion 331 and the upper annular portion 332, the lower annular portion 331 is larger than the upper annular portion 332, and in a plan view from vertically above, the inner surface of the upper annular portion 332 is located inside the inner surface of the lower annular portion 331. The inner surfaces of the upper annular portion 332 and the lower annular portion 331 are connected by the inclined portion 333 around the entire circumference of the upper cup 33. For this reason, the inner surface of the inclined portion 333, that is, the surface surrounding the substrate W, is an inclined surface 334. In other words, as shown in Figure 8, the inclined portion 333 surrounds the outer circumference of the rotating substrate W and is capable of collecting droplets scattered from the substrate W, and the space enclosed by the upper cup 33 and the lower cup 32 functions as a collection space SPc.

[0034] Furthermore, the inclined portion 333 facing the collection space SPc is inclined upward from the lower annular portion 331 toward the periphery of the substrate W. As a result, as shown in Figure 8, droplets collected in the inclined portion 333 flow along the inclined surface 334 toward the lower end of the upper cup 33, that is, toward the lower annular portion 331, and can then be discharged to the outside of the rotating cup portion 31 through the gap GPc.

[0035] The fixed cup portion 34 is provided so as to surround the rotating cup portion 31 and forms a discharge space SPe. The fixed cup portion 34 has a liquid receiving portion 341 and an exhaust portion 342 provided inside the liquid receiving portion 341. The liquid receiving portion 341 has a cup structure that opens so as to face the opening of the gap GPc on the side opposite the substrate (the left-hand side opening in Figure 8). In other words, the internal space of the liquid receiving portion 341 functions as a discharge space SPe and is in communication with the collection space SPc via the gap GPc. Therefore, the droplets collected by the rotating cup portion 31 are guided to the discharge space SPe along with the gaseous components via the gap GPc. The droplets are then collected at the bottom of the liquid receiving portion 341 and discharged from the fixed cup portion 34.

[0036] Meanwhile, the gaseous components are collected in the exhaust section 342. This exhaust section 342 is separated from the liquid receiving section 341 via a partition wall 343. A gas guide section 344 is located above the partition wall 343. The gas guide section 344 extends from directly above the partition wall 343 into the discharge space SPe and the exhaust section 342, respectively, covering the partition wall 343 from above and forming a labyrinthine flow path for the gaseous components. Therefore, the gaseous components of the fluid flowing into the liquid receiving section 341 are collected in the exhaust section 342 via the above flow path. This exhaust section 342 is connected to an exhaust mechanism 38. As a result, the exhaust mechanism 38 operates in response to commands from the control unit 10, adjusting the pressure in the fixed cup section 34, and efficiently exhausting the gaseous components in the exhaust section 342. Furthermore, the pressure and flow rate of the discharge space SPe are adjusted by precise control of the exhaust mechanism 38. For example, the pressure in the discharge space SPe becomes lower than the pressure in the collection space SPc. As a result, droplets in the collection space SPc are efficiently drawn into the discharge space SPe, and the movement of droplets from the collection space SPc can be promoted.

[0037] Figure 9 is an external perspective view showing the configuration of the top surface protection heating mechanism. Figure 10 is a cross-sectional view of the top surface protection heating mechanism shown in Figure 9. The top surface protection heating mechanism 4 has a shut-off plate 41 positioned above the upper surface Wf of the substrate W held by the spin chuck 21. This shut-off plate 41 has a disc portion 42 held in a horizontal position. The disc portion 42 incorporates a heater 421 that is driven and controlled by a heater drive unit 422. This disc portion 42 has a diameter slightly shorter than that of the substrate W. The disc portion 42 is supported by a support member 43 such that its lower surface covers the surface area of ​​the upper surface Wf of the substrate W, excluding the peripheral edge Ws, from above. Reference numeral 44 in Figure 9 indicates a notch provided on the peripheral edge of the disc portion 42, which is provided to prevent interference with the processing liquid discharge nozzle included in the processing mechanism 5. The notch 44 opens radially outward.

[0038] The lower end of the support member 43 is attached to the center of the disc portion 42. A cylindrical through-hole is formed so as to penetrate vertically through the support member 43 and the disc portion 42. A central nozzle 45 is inserted vertically through this through-hole. As shown in Figure 2, the central nozzle 45 is connected to a nitrogen gas supply unit 47 via a pipe 46. The nitrogen gas supply unit 47 supplies ambient temperature nitrogen gas, supplied from the factory where the substrate processing system 100 is installed, to the central nozzle 45 at a flow rate and timing corresponding to the nitrogen gas supply command from the control unit 10. In this embodiment, a ribbon heater 48 is attached to a part of the pipe 46. The ribbon heater 48 generates heat in response to a heating command from the control unit 10 to heat the nitrogen gas flowing through the pipe 46.

[0039] The heated nitrogen gas (hereinafter referred to as "heated gas") is then pumped towards the central nozzle 45 and discharged from the central nozzle 45. For example, as shown in Figure 10, when the heated gas is supplied with the disc portion 42 positioned in a processing position close to the substrate W held by the spin chuck 21, the heated gas flows from the center to the periphery of the space SPa sandwiched between the upper surface Wf of the substrate W and the disc portion 42 with the heater built in. This prevents the surrounding atmosphere from entering the upper surface Wf of the substrate W. As a result, it is possible to effectively prevent droplets contained in the atmosphere from being trapped in the space SPa sandwiched between the substrate W and the disc portion 42. In addition, the upper surface Wf is heated overall by the heating by the heater 421 and the heated gas, making the in-plane temperature of the substrate W uniform. This suppresses warping of the substrate W and stabilizes the contact position of the processing liquid. To obtain these effects, it is desirable to control the temperature and flow rate of the heated gas supplied to the central nozzle 45. This point will be explained in detail later based on simulation results (Figures 21-24), etc.

[0040] As shown in Figure 2, the upper end of the support member 43 is fixed to a beam member 49 that extends horizontally, perpendicular to the substrate transport direction (left-right direction in Figure 3) for loading and unloading the substrate W. This beam member 49 is connected to a lifting mechanism 7 and is raised and lowered by the lifting mechanism 7 in response to a command from the control unit 10. For example, in Figure 2, when the beam member 49 is positioned downward, the disc portion 42 connected to the beam member 49 via the support member 43 is positioned in the processing position. On the other hand, when the lifting mechanism 7 raises the beam member 49 in response to a lifting command from the control unit 10, the beam member 49, support member 43, and disc portion 42 rise together, and the upper cup 33 also rises in conjunction, separating from the lower cup 32. This widens the space between the spin chuck 21 and the upper cup 33 and disc portion 42, making it possible to load and unload the substrate W into and out of the spin chuck 21 (see Figure 16A).

[0041] Figure 11 is a perspective view showing the upper processing liquid discharge nozzle equipped on the processing mechanism, viewed from a diagonal downward direction. Figure 12 shows the nozzle positions in bevel processing mode and pre-dispense mode. Figure 13 is a perspective view showing the lower processing liquid discharge nozzle equipped on the processing mechanism and the nozzle support part that supports the nozzle. The processing mechanism 5 has a processing liquid discharge nozzle 51F located on the upper side of the substrate W, a processing liquid discharge nozzle 51B located on the lower side of the substrate W, and a processing liquid supply unit 52 that supplies processing liquid to the processing liquid discharge nozzles 51F and 51B. Hereinafter, in order to distinguish between the upper processing liquid discharge nozzle 51F and the lower processing liquid discharge nozzle 51B, they will be referred to as "upper nozzle 51F" and "lower nozzle 51B," respectively. Also, although two processing liquid supply units 52 are shown in Figure 2, they are the same.

[0042] In this embodiment, three upper nozzles 51F are provided, and a processing liquid supply unit 52 is connected to them. The processing liquid supply unit 52 is configured to supply SC1, DHF, and functional water (such as CO2 water) as processing liquids, and SC1, DHF, and functional water can be discharged independently from the three upper nozzles 51F.

[0043] Each top nozzle 51F is provided with a discharge port 511 on the lower surface of its tip, as shown in Figure 11. As shown in the enlarged view in Figure 3, the lower parts of multiple (three in this embodiment) top nozzles 51F are positioned in the notches 44 of the disc portion 42, with each discharge port 511 facing the peripheral edge of the upper surface Wf of the substrate W. The upper parts of the top nozzles 51F are attached to the nozzle holder 53 so as to be movable in the radial direction X of the substrate W. This nozzle holder 53 is supported by a support member 54, which is further fixed to the lower sealing cup member 61 of the atmosphere separation mechanism 6. In other words, the top nozzles 51F and nozzle holder 53 are integrated with the lower sealing cup member 61 via the support member 54 and are raised and lowered vertically Z together with the lower sealing cup member 61 by the lifting mechanism 7. Details of the lifting mechanism 7 will be explained later.

[0044] As shown in Figures 3 and 12, the nozzle holder 53 incorporates a nozzle moving unit 55 that moves the top nozzles 51F together in the radial direction X. Therefore, in response to a position command from the control unit 10, the nozzle moving unit 55 drives the three top nozzles 51F together in the direction X. As a result, the top nozzles 51F reciprocate between the bevel processing position shown in Figure 12(a) and the pre-dispense position shown in Figure 12(b). The discharge port 511 of the nozzle moving unit 55 positioned at this bevel processing position is directed toward the peripheral edge of the top surface Wf of the substrate W. Then, in response to a supply command from the control unit 10, the processing liquid supply unit 52 supplies the processing liquid corresponding to the supply command from among three types of processing liquids to the top nozzle 51F for that processing liquid, and the processing liquid is discharged from the discharge port 511 of the top nozzle 51F toward the peripheral edge of the top surface Wf of the substrate W.

[0045] On the other hand, the discharge port 511 of the upper nozzle 51F positioned in the pre-dispense position is located above the peripheral edge of the upper surface Wf and faces the inclined surface 334 of the upper cup 33. Then, in response to a supply command from the control unit 10, the processing liquid supply unit 52 supplies all or part of the processing liquid to the corresponding upper nozzle 51F, and the processing liquid is discharged from the discharge port 511 of the upper nozzle 51F onto the inclined surface 334 of the upper cup 33. This performs the pre-dispense process. As shown in Figure 12, droplets of the processing liquid used in the beveling and pre-dispense processes are collected by the upper cup 33 and discharged into the discharge space SPe through the gap GPc. Reference numeral 56 in Figure 12 indicates a structure consisting of the upper nozzle 51F and a nozzle holder 53 that houses the nozzle moving part 55, and will be referred to as the "nozzle head 56" below. Furthermore, although only the top nozzle 51F is attached to the nozzle head 56, a gas discharge nozzle that discharges an inert gas such as nitrogen gas may be added. For example, any processing liquid remaining on the peripheral Ws without detaching during one rotation of the substrate W may be purged with the inert gas from the gas discharge nozzle.

[0046] In this embodiment, a lower nozzle 51B and a nozzle support 57 are provided below the substrate W held by the spin chuck 21 in order to discharge the processing liquid toward the peripheral edge of the lower surface Wb of the substrate W. As shown in Figure 13, the nozzle support 57 has a thin-walled cylindrical portion 571 extending in the vertical direction and a flange portion 572 having an annular shape that is folded radially outward at the upper end of the cylindrical portion 571. The cylindrical portion 571 has a shape that allows it to be loosely inserted into the air gap GPa formed between the annular member 27a and the lower cup 32. As shown in Figure 2, the nozzle support 57 is fixedly positioned such that the cylindrical portion 571 is loosely inserted into the air gap GPa and the flange portion 572 is positioned between the substrate W held by the spin chuck 21 and the lower cup 32. Three lower nozzles 51B are attached to the upper peripheral edge of the flange portion 572. Each lower nozzle 51B has a discharge port 511 that opens toward the peripheral edge of the lower surface Wb of the substrate W, and is capable of discharging the processing liquid supplied from the processing liquid supply unit 52 via the piping 58.

[0047] The processing liquid discharged from the upper nozzle 51F and lower nozzle 51B performs beveling on the peripheral edge of the substrate W. Furthermore, on the lower side of the substrate W, a flange portion 572 extends to the vicinity of the peripheral edge Ws. Therefore, nitrogen gas supplied to the lower side via the piping 28 flows along the flange portion 572 into the collection space SPc, as shown in Figure 8. As a result, backflow of droplets from the collection space SPc back onto the substrate W is effectively suppressed.

[0048] Figure 14 is a partial cross-sectional view showing the configuration of the atmosphere separation mechanism. The atmosphere separation mechanism 6 has a lower sealed cup member 61 and an upper sealed cup member 62. Both the lower sealed cup member 61 and the upper sealed cup member 62 have a cylindrical shape with openings at the top and bottom. Their inner diameters are larger than the outer diameter of the rotating cup portion 31, and the atmosphere separation mechanism 6 is positioned to completely surround the spin chuck 21, the substrate W held by the spin chuck 21, the rotating cup portion 31, and the upper surface protection heating mechanism 4 from above. More specifically, as shown in Figure 2, the upper sealed cup member 62 is fixedly positioned directly below the punching plate 14 such that its upper opening covers the opening 11b in the ceiling wall 11a from below. Therefore, the downflow of clean air introduced into the chamber 11 is divided into air that passes inside the upper sealed cup member 62 and air that passes outside the upper sealed cup member 62.

[0049] Furthermore, the lower end of the upper sealing cup member 62 has a flange portion 621 that is folded inward into an annular shape. An O-ring 63 is attached to the upper surface of this flange portion 621. Inside the upper sealing cup member 62, the lower sealing cup member 61 is arranged to be movable in the vertical direction.

[0050] The upper end of the lower sealing cup member 61 has a flange portion 611 that is folded outward and has an annular shape. This flange portion 611 overlaps with the flange portion 621 when viewed from a vertically upward plane. Therefore, as the lower sealing cup member 61 descends, as shown in Figures 3 and 14, the flange portion 611 of the lower sealing cup member 61 is locked to the flange portion 621 of the upper sealing cup member 62 via the O-ring 63. This positions the lower sealing cup member 61 at its lower limit. At this lower limit, the upper sealing cup member 62 and the lower sealing cup member 61 are connected in the vertical direction, and the downflow introduced into the upper sealing cup member 62 is guided toward the substrate W held by the spin chuck 21.

[0051] The lower end of the lower sealing cup member 61 has a flange portion 612 that is folded outward into an annular shape. In a plan view from vertically above, this flange portion 612 overlaps with the upper end of the fixed cup portion 34 (the upper end of the liquid receiving portion 341). Therefore, at the lower limit position, as shown in the enlarged view in Figure 3 and in Figure 14, the flange portion 612 of the lower sealing cup member 61 is locked to the fixed cup portion 34 via the O-ring 64. As a result, the lower sealing cup member 61 and the fixed cup portion 34 are connected in the vertical direction, and a sealed space SPs is formed by the upper sealing cup member 62, the lower sealing cup member 61, and the fixed cup portion 34. Beveling of the substrate W can be performed within this sealed space SPs. In other words, by positioning the lower sealing cup member 61 at the lower limit position, the sealed space SPs is separated from the outer space SPo (atmosphere separation). Therefore, beveling can be performed stably without being affected by the outer atmosphere. Furthermore, although a processing liquid is used for beveling, it is possible to reliably prevent the processing liquid from leaking from the sealed space SPs to the outer space SPo. Therefore, the degree of freedom in selecting and designing the components to be placed in the outer space SPo is increased.

[0052] The lower sealing cup member 61 is configured to be movable vertically upward. Furthermore, as described above, a nozzle head 56 (= upper nozzle 51F + nozzle holder 53) is fixed to the middle part of the lower sealing cup member 61 in the vertical direction via a support member 54. In addition, as shown in Figures 2 and 3, an upper surface protection heating mechanism 4 is fixed to the middle part of the lower sealing cup member 61 via a beam member 49. In other words, as shown in Figure 3, the lower sealing cup member 61 is connected to one end of the beam member 49, the other end of the beam member 49, and the support member 54 at three different points in the circumferential direction. The lifting mechanism 7 raises and lowers one end of the beam member 49, the other end of the beam member 49, and the support member 54, and the lower sealing cup member 61 moves up and down accordingly.

[0053] As shown in Figures 2, 3, and 14, multiple (four) projections 613 are provided on the inner circumferential surface of the lower sealing cup member 61, acting as engagement points that can engage with the upper cup 33. Each projection 613 extends to the space below the upper annular portion 332 of the upper cup 33. Furthermore, each projection 613 is attached so as to move downward away from the upper annular portion 332 of the upper cup 33 when the lower sealing cup member 61 is positioned at its lower limit. Then, as the lower sealing cup member 61 rises, each projection 613 can engage with the upper annular portion 332 from below. Even after this engagement, the upper cup 33 can be separated from the lower cup 32 by further rising of the lower sealing cup member 61.

[0054] In this embodiment, the lower sealing cup member 61 begins to rise together with the upper surface protection heating mechanism 4 and nozzle head 56 by the lifting mechanism 7, and then the upper cup 33 also rises together. As a result, the upper cup 33, the upper surface protection heating mechanism 4 and nozzle head 56 move upward away from the spin chuck 21. The movement of the lower sealing cup member 61 to the retracted position (the position in Figure 16A, which will be explained later) creates a transport space (indicated as SPt in Figure 16A) for the hand of the substrate transport robot 111 (indicated as RH in Figure 16A) to access the spin chuck 21. Then, loading of the substrate W into the spin chuck 21 and unloading of the substrate W from the spin chuck 21 can be performed through this transport space. Thus, in this embodiment, it is possible to access the substrate W to the spin chuck 21 with a minimal rise of the lower sealing cup member 61 by the lifting mechanism 7.

[0055] The lifting mechanism 7 has two lifting drive units 71 and 72. As shown in Figure 3, the lifting drive unit 71 is equipped with a first lifting motor 711. The first lifting motor 711 operates in response to a drive command from the control unit 10 and generates rotational force. Two lifting units 712 and 713 are connected to this first lifting motor 711. The lifting units 712 and 713 simultaneously receive the rotational force from the first lifting motor 711. The lifting unit 712 raises and lowers the support member 491 that supports one end of the beam member 49 in the vertical Z direction according to the amount of rotation of the first lifting motor 711. The lifting unit 713 raises and lowers the support member 54 that supports the nozzle head 56 in the vertical Z direction according to the amount of rotation of the first lifting motor 711.

[0056] As shown in Figure 3, the lifting drive unit 72 includes a second lifting motor 721 and a lifting unit 722. The second lifting motor 721 operates in response to a drive command from the control unit 10 to generate rotational force, which is supplied to the lifting unit 722. The lifting unit 722 raises and lowers the support member 492 that supports the other end of the beam member 49 in the vertical direction according to the amount of rotation of the second lifting motor 721.

[0057] The lifting and lowering drive units 71 and 72 synchronously move the support members 491, 492, and 54, which are fixed to the side surface of the lower sealing cup member 61 at three different locations in the circumferential direction, in the vertical direction. Therefore, the upper surface protection heating mechanism 4, the nozzle head 56, and the lower sealing cup member 61 can be raised and lowered stably. In addition, the upper cup 33 can be raised and lowered stably in conjunction with the raising and lowering of the lower sealing cup member 61.

[0058] The centering mechanism 8 includes a contact member 81 that can move closer to and further away from the end face of the substrate W loaded onto the spin chuck 21, and a centering drive unit 82 for moving the contact member 81 horizontally. In this embodiment, three radial contact members 81 are arranged at equal angular intervals around the rotation axis AX, and only one of them is shown in Figure 2. While the suction by the pump 26 is stopped (i.e., while the substrate W can move horizontally on the upper surface of the spin chuck 21), the centering drive unit 82 moves the contact member 81 closer to the substrate W in response to a centering command from the control unit 10 (centering process). This centering process eliminates the eccentricity of the substrate W relative to the spin chuck 21, so that the center of the substrate W coincides with the center of the spin chuck 21.

[0059] The substrate observation mechanism 9 has an observation head 91 for observing the peripheral edge of the substrate W. This observation head 91 is configured to be able to move closer to and further away from the peripheral edge of the substrate W. An observation head drive unit 92 is connected to the observation head 91. When observing the peripheral edge of the substrate W with the observation head 91, the observation head drive unit 92 moves the observation head 91 closer to the substrate W in response to an observation command from the control unit 10 (observation process). The peripheral edge of the substrate W is then imaged using the observation head 91. The captured image is sent to the control unit 10. Based on this image, the control unit 10 checks whether the beveling process has been performed properly.

[0060] The control unit 10 includes an arithmetic processing unit 10A, a storage unit 10B, a reading unit 10C, an image processing unit 10D, a drive control unit 10E, a communication unit 10F, and an exhaust control unit 10G. The storage unit 10B is composed of a hard disk drive or the like and stores a program for executing bevel processing by the substrate processing device 1. This program is stored, for example, on a computer-readable recording medium RM (e.g., an optical disk, magnetic disk, magneto-optical disk, etc.), read from the recording medium RM by the reading unit 10C, and stored in the storage unit 10B. Furthermore, the provision of this program is not limited to the recording medium RM; for example, the program may be provided via a telecommunications line. The image processing unit 10D performs various processing on the image captured by the substrate observation mechanism 9. The drive control unit 10E controls each drive unit of the substrate processing device 1. The communication unit 10F communicates with a control unit that integrates and controls each part of the substrate processing system 100. The exhaust control unit 10G controls the exhaust mechanism 38.

[0061] Furthermore, the control unit 10 is connected to a display unit 10H (for example, a display) that shows various information and an input unit 10J (for example, a keyboard and mouse) that receives input from the operator.

[0062] The arithmetic processing unit 10A uses a CPU (= Central Processing Unit) and RAM (= Random The system consists of a computer with Access Memory, etc., and controls each part of the substrate processing apparatus 1 according to the program stored in the memory unit 10B, and performs bevel processing. The bevel processing by the substrate processing apparatus 1 will be described below with reference to Figures 15, 16A to 16D.

[0063] Figure 15 is a flowchart showing a beveling process performed as an example of substrate processing operation by the substrate processing apparatus shown in Figure 2. Figures 16A to 16D are schematic diagrams showing various parts of the apparatus during beveling. In Figure 16A, a dot is added to the configuration that rises as a whole to clearly show it, and in Figure 16C, a dot is added to the configuration that rotates as a whole to clearly show it.

[0064] When the substrate processing device 1 bevels the substrate W, the calculation processing unit 10A uses the lifting drive units 71 and 72 to raise the lower sealed cup member 61, nozzle head 56, beam member 49, support member 43, and disc portion 42 together. During the rise of the lower sealed cup member 61, the projection 613 engages with the upper annular portion 332 of the upper cup 33, and thereafter, the upper cup 33 rises together with the lower sealed cup member 61, nozzle head 56, beam member 49, support member 43, and disc portion 42 and is positioned in the retracted position. This creates a transport space SPt above the spin chuck 21 that is sufficient for the hand RH of the substrate transport robot 111 to enter. Once the completion of the formation of the transport space SPt is confirmed, the calculation processing unit 10A requests the substrate transport robot 111 to load the substrate W via the communication unit 10F and waits for the unprocessed substrate W to be transported into the substrate processing device 1 and placed on the upper surface of the spin chuck 21, as shown in Figure 16A. Then, the substrate W is placed on the spin chuck 21 (step S1). At this point, the pump 26 is stopped, and the substrate W is able to move horizontally on the upper surface of the spin chuck 21.

[0065] Once the loading of the substrate W is complete, the substrate transport robot 111 retracts from the substrate processing device 1. Subsequently, the arithmetic processing unit 10A controls the centering drive unit 82 so that the three contact members 81 (only two are shown in Figure 16B) are close to the substrate W. This eliminates the eccentricity of the substrate W relative to the spin chuck 21, and the center of the substrate W coincides with the center of the spin chuck 21 (step S2). Once the centering process is complete, the arithmetic processing unit 10A controls the centering drive unit 82 so that the three contact members 81 are separated from the substrate W, and also operates the pump 26 to apply negative pressure to the spin chuck 21. As a result, the spin chuck 21 attracts and holds the substrate W from below.

[0066] Next, the arithmetic processing unit 10A issues a downward command to the lifting drive units 71 and 72. In response, the lifting drive units 71 and 72 lower the lower sealing cup member 61, nozzle head 56, beam member 49, support member 43, and disc portion 42 together. During this downward movement, the upper cup 33, which is supported from below by the projection 613 of the lower sealing cup member 61, connects to the lower cup 32. That is, as shown in Figure 6, the recess 335 fits over the tip of the engagement pin 35, positioning the upper cup 33 horizontally relative to the lower cup 32, and the attractive force generated between the upper magnet 37 and the lower magnet 36 causes the upper cup 33 and the lower cup 32 to connect to each other, forming the rotating cup portion 31.

[0067] After the rotating cup portion 31 is formed, the lower sealing cup member 61, nozzle head 56, beam member 49, support member 43, and disc portion 42 move further down as a single unit, and the flange portions 611 and 612 of the lower sealing cup member 61 are locked to the flange portion 621 and fixed cup portion 34 of the upper sealing cup member 62, respectively. This positions the lower sealing cup member 61 at its lower limit position (position in Figures 2 and 16C) (step S3). After the above locking, the flange portion 621 of the upper sealing cup member 62 and the flange portion 611 of the lower sealing cup member 61 are in close contact via the O-ring 63, and the flange portion 612 and fixed cup portion 34 of the lower sealing cup member 61 are in close contact via the O-ring 63. As a result, as shown in Figure 2, the lower sealing cup member 61 and the fixed cup portion 34 are connected in the vertical direction, and a sealed space SPs is formed by the upper sealing cup member 62, the lower sealing cup member 61 and the fixed cup portion 34, and the sealed space SPs is separated from the outside atmosphere (outside space SPo) (atmosphere separation).

[0068] In this atmosphere-separated state, the lower surface of the disc portion 42 covers the surface area of ​​the upper surface Wf of the substrate W from above, excluding the peripheral edge Ws. The upper nozzle 51F is positioned within the notch 44 of the disc portion 42 so that its discharge port 511 faces the peripheral edge of the upper surface Wf of the substrate W. Once the preparation for supplying the processing liquid to the substrate W is complete, the calculation processing unit 10A issues a rotation command to the rotation drive unit 23, and the spin chuck 21 and the rotating cup portion 31 that hold the substrate W begin to rotate (step S4). The rotation speed of the substrate W and the rotating cup portion 31 is set to, for example, 1800 revolutions per minute. The calculation processing unit 10A also drives and controls the heater drive unit 422 to raise the heater 421 to a desired temperature, for example, 185°C.

[0069] Next, the arithmetic processing unit 10A issues a nitrogen gas supply command to the nitrogen gas supply unit 47. As a result, the supply of nitrogen gas from the nitrogen gas supply unit 47 to the central nozzle 45 begins, as shown by arrow F1 in Figure 16C (step S5). This nitrogen gas is heated by the ribbon heater 48 as it passes through the piping 46, and after being heated to a desired temperature (e.g., 100°C), it is discharged from the central nozzle 45 towards the space SPa (Figure 10) sandwiched between the substrate W and the disc portion 42. This heats the entire upper surface Wf of the substrate W. Heating of the substrate W is also performed by the heater 421. Therefore, over time, the temperature of the peripheral Ws of the substrate W rises and reaches a temperature suitable for beveling, for example, 90°C. The temperature of areas other than the peripheral Ws also rises to approximately the same temperature. In other words, in this embodiment, the in-plane temperature of the upper surface Wf of the substrate W is approximately uniform. Therefore, warping of the substrate W can be effectively suppressed.

[0070] Subsequently, the arithmetic processing unit 10A controls the processing liquid supply unit 52 to supply processing liquid to the upper nozzle 51F and the lower nozzle 51B (arrows F2 and F3 in the figure). That is, a stream of processing liquid is discharged from the upper nozzle 51F so as to hit the upper peripheral edge of the substrate W, and a stream of processing liquid is discharged from the lower nozzle 51B so as to hit the lower peripheral edge of the substrate W. This performs beveling on the peripheral edge Ws of the substrate W (step S6). Then, when the arithmetic processing unit 10A detects the elapsed processing time required for the beveling of the substrate W, it issues a supply stop command to the processing liquid supply unit 52 and stops the discharge of processing liquid.

[0071] Subsequently, the arithmetic processing unit 10A issues a command to stop supplying nitrogen gas to the nitrogen gas supply unit 47, stopping the supply of nitrogen gas from the nitrogen gas supply unit 47 to the central nozzle 45 (step S7). The arithmetic processing unit 10A also issues a command to stop rotation to the rotation drive unit 23, stopping the rotation of the spin chuck 21 and the rotating cup unit 31 (step S8).

[0072] In the next step S9, the arithmetic processing unit 10A observes the peripheral Ws of the substrate W to check the results of the beveling process. More specifically, the arithmetic processing unit 10A positions the upper cup 33 in a retracted position, similar to when the substrate W is loaded, to form a transport space SPt. Then, the arithmetic processing unit 10A controls the observation head drive unit 92 to bring the observation head 91 close to the substrate W. When the peripheral Ws is imaged by the observation head 91, the arithmetic processing unit 10A controls the observation head drive unit 92 to retract the observation head 91 from the substrate W. In parallel with this, the arithmetic processing unit 10A checks whether the beveling process was performed well based on the image of the peripheral Ws that was captured.

[0073] After inspection, the arithmetic processing unit 10A requests the substrate transport robot 111 to unload the substrate W via the communication unit 10F, and the processed substrate W is discharged from the substrate processing device 1 (step S10). These steps are repeated.

[0074] As described above, in this embodiment, an atmosphere separation mechanism 6 is provided above the splash prevention mechanism 3, separating the sealed space SPs, where beveling is performed with the processing liquid, from the outer space SPo, thus performing so-called atmosphere separation. This limits the area processed by the processing liquid, reduces the location of turbulence generation, and stabilizes the beveling process. Furthermore, although it is inside the chamber 11, components that do not have chemical resistance can be used in the outer space SPo. To obtain these effects, in this embodiment, the atmosphere separation mechanism 6 is composed of an upper sealed cup member 62 fixed close to the ceiling wall 11a and a lower sealed cup member 61 that can move up and down between the upper sealed cup member 62 and the splash prevention mechanism 3. Therefore, the following effects can also be obtained.

[0075] Conventionally, a technique has been proposed to separate the atmosphere by bringing the cup member constituting the splash prevention mechanism into contact with the ceiling of the chamber (for example, Japanese Patent No. 6282904). In this conventional technique, the entire cup member needs to be lowered when loading or unloading the substrate W. In contrast, in this embodiment, as shown in Figure 16A, the lower sealing cup member 61 only needs to be raised by the minimum distance required for loading and unloading the substrate W, thereby suppressing the amount of movement of the lower sealing cup member 61. This can also be addressed when performing the centering process shown in Figure 16B or the observation process shown in Figure 16D by raising the lower sealing cup member 61. As a result, the cycle time of the substrate processing apparatus 1 can be shortened compared to conventional devices (Effect A).

[0076] Furthermore, in the above embodiment, since only the lower sealing cup member 61 is raised and lowered, the load on the lifting mechanism can be reduced compared to conventional devices that raise and lower the entire cup member. Also, as shown in Figure 3, the lower sealing cup member 61 is raised and lowered while being supported at three different locations in the circumferential direction. Therefore, the lower sealing cup member 61 can be raised and lowered stably. In addition, the upper cup 33, the upper surface protection heating mechanism 4, the nozzle head 56, and the lower sealing cup member 61 are also raised and lowered via the lower sealing cup member 61, and these can also be raised and lowered stably and at low cost (Effect B).

[0077] Furthermore, in this embodiment, as shown in Figure 2, by bringing the upper opening of the upper sealing cup member 62 close to the punching plate 14 provided directly below the ceiling wall 11a, the clean air sent from the fan filter unit 13 is separated into the portion sent to the sealed space SPs and the portion sent to the outer space SPo. This controls the airflow of the clean air sent to each space. Therefore, the sealed space SPs can be set to a desired pressure value, and the pressure difference with the outer space SPo can also be adjusted with high precision. Moreover, the volume of the sealed space SPs, which functions as a processing liquid atmosphere area, can be reduced, and the use of labor in the factory where the substrate processing apparatus 1 is installed can be reduced (effect C).

[0078] Here, various methods can be employed for controlling the airflow rate of the clean air. For example, as shown in Figure 17A, the inner diameter of the outlet hole 141 facing the upper opening of the upper sealed cup member 62 may be made larger than the inner diameter of the other outlet holes 142, thereby controlling the airflow rate to the sealed space SPs to be greater than the airflow rate to the outer space SPo. To improve the pressure accuracy of the sealed space SPs and the space outside them, a fan filter unit 13A for the sealed space SPs and a fan filter unit 13B for the outer space SPo may be provided separately, for example, as shown in Figure 17B. Furthermore, as shown in Figure 17C, for example, the clean air blown from the fan filter unit 13 may be supplied to the sealed space SPs via the first pipe 16a and to the outer space SPo via the second pipe 16b, instead of the punching plate 14. Furthermore, dampers 17a and 17b may be interposed in the first pipe 16a and the second pipe 16b, respectively, and the damper control unit 18 may independently control the opening of dampers 17a and 17b in response to an opening command from the control unit 10, thereby controlling the pressure by adjusting the supply amount to the sealed space SPs and the space outside it.

[0079] Furthermore, in the above embodiment, as shown in Figure 8, droplets scattered from the substrate W are collected inside the rotating cup section 31, that is, in the collection space SPc. At this time, centrifugal force generated as the cup rotates acts on the droplets adhering to the inclined surface 334 of the rotating cup section 31. They are also affected by the airflow formed by nitrogen gas, etc., supplied during the beveling process and flowing radially outward along the upper and lower surfaces of the substrate W. As a result, a downward vector stress acts on the droplets along the inclined surface 334. The droplets subjected to this stress are moved along the inclined surface 334 to the gap GPc between the upper cup 33 and the lower cup 32. The droplets that reach the entrance of the gap GPc are then moved through the gap GPc along with gaseous components such as nitrogen gas to the discharge space SPe of the fixed cup section 34. Therefore, droplets adhering to the rotating cup section 31 are quickly discharged from the rotating cup section 31 via the gap GPc. In particular, since the gap GPc is parallel to the direction of centrifugal force and airflow, droplets can be smoothly discharged from the collection space SPc to the discharge space SPe. As a result, collisions between droplets scattered from the substrate W and droplets adhering to the rotating cup portion 31 are reduced, and the generation of bounced droplets can be suppressed. As a result, beveling can be performed well (effect D). In this embodiment, the inclined surface 334 of the upper cup 33 is finished as a frustoconical surface with a constant inclination angle in the vertical cross-section, but it may also be finished as a surface that protrudes radially outward (to the left in the figure), for example, as shown in Figure 18.

[0080] Furthermore, in this embodiment, the connection of the upper cup 33 to the lower cup 32 is achieved by the engagement of the engagement pin 35 with the recess 335 and the attractive force generated between the upper magnet 37 and the lower magnet 36, as shown in Figure 6. Therefore, even during rotation, the upper cup 33 and the lower cup 32 are firmly connected, and beveling can be performed stably (effect E). Of course, the connection of the upper cup 33 and the lower cup 32 is not limited to this, and for example, the upper cup 33 and the lower cup 32 may be connected by engagement alone.

[0081] Furthermore, in this embodiment, a portion of the rotational driving force output from the rotational drive unit 23 to rotate the substrate W is supplied to the lower cup 32 via the power transmission unit 27 as cup driving force. In this way, both the substrate W and the rotating cup unit 31 can be driven by a single rotational drive unit 23, simplifying the device configuration. Moreover, the substrate W and the rotating cup unit 31 can rotate synchronously in the same direction. Therefore, when the rotating cup unit 31 is viewed from the periphery of the rotating substrate W, the rotating cup unit 31 is relatively stationary, which further suppresses the rebound of droplets when droplets of processing liquid scattered from the substrate W collide with the rotating cup unit 31 (effect F).

[0082] This power transmission unit 27 utilizes the magnetic force between magnets 27b and 27c. Therefore, as shown in Figures 4 and 5, the cup driving force can be transmitted to the lower cup 32 while maintaining an air gap GPa (the gap between the annular member 27a and the lower cup 32) between the annular member 27a and the lower cup 32. As shown in Figure 2, the flange portion 572 of the nozzle support unit 57 is loosely inserted into the air gap GPa, and the nozzle support unit 57 is fixed in place. Moreover, the air gap GPa is also used as a piping route. In other words, the piping connected to the lower nozzle 51B supported by the nozzle support unit 57 is connected to the processing liquid supply unit 52 via the air gap GPa. Therefore, the length of the piping is significantly reduced, increasing the degree of freedom and tolerance of the layout of each part of the substrate processing apparatus 1 (effect G).

[0083] Furthermore, in this embodiment, as shown in Figures 7 and 8, the inclined portion 333 of the upper cup 33 extends above the peripheral edge Ws of the substrate W. In other words, in a plan view from vertically above, the upper annular portion 332 and a part of the inclined portion 333 function as a canopy portion that covers the entire circumference of the peripheral edge Ws of the substrate W held by the spin chuck 21. Moreover, in this embodiment, as shown in Figure 12(a), the upper nozzle 51F discharges the processing liquid from its discharge port 511 with its discharge port 511 positioned at a bevel processing position lower than the canopy portion in the vertical direction, and applies the liquid to the peripheral edge Ws of the substrate W. Therefore, the following effects are obtained.

[0084] When droplets are collected by the rotating cup section 31, some droplets may collide with the inclined surface 334 of the upper cup 33 and fly upward. Also, when the processing liquid is supplied to the periphery of the substrate W, some of the processing liquid droplets may scatter upward. If these upward-scattered droplets reattach to the substrate W, a watermark will occur. However, in this embodiment, the above-described overhang section collects the upward-scattered droplets and effectively prevents them from reattaching to the substrate W. Therefore, the substrate W can be beveled even more effectively. The same effect can also be obtained in the pre-dispense process shown in Figure 12(b) (effect H).

[0085] This pre-dispensing process can be performed by moving the upper nozzle 51F by a small distance in the radial direction X of the substrate W using the nozzle moving unit 55. Therefore, it is not necessary to move the upper nozzle 51F to a position away from the rotating cup unit 31 for the pre-dispensing process, and the pre-dispensing process can be performed within the rotating cup unit 31. As a result, the cycle time of the substrate processing apparatus 1 can be shortened compared to conventional devices (Effect I).

[0086] Here, the direction of movement of the top nozzle 51F during pre-dispense processing is not limited to the radial direction X, but is arbitrary. For example, as shown in Figure 19, a pivot axis AX51 is provided at one end 513 of the nozzle body 512 that constitutes the top nozzle 51F, away from the discharge port 511. This pivot axis AX51 extends parallel to the vertical direction Z. Therefore, the nozzle moving unit 55 can change the landing position of the processing liquid discharged from the discharge port 511 by moving the top nozzle 51F around the pivot axis AX51. More specifically, the system may be configured to switch between bevel processing position and pre-dispense processing by rotating the top nozzle 51F around the pivot axis AX51.

[0087] Furthermore, in this embodiment, the nozzle movement unit 55 not only switches between the beveling position and the pre-dispense processing, but also changes the position of the processing liquid by changing the position of the discharge port 511 in the radial direction X of the substrate W. In other words, the calculation processing unit 10A controls the nozzle movement unit 55 to apply the processing liquid to the desired peripheral portion Ws. Therefore, the width of the beveling process on the peripheral portion Ws of the substrate W (the length from the end face of the substrate W to the liquid application position in the radial direction X) can be changed. Note that this function is also the same in the embodiment shown in Figure 19.

[0088] Furthermore, in this embodiment, a disc portion 42 is provided so as to cover the upper surface Wf of the substrate W from above. As shown in Figure 9, a notch 44 is provided in the disc portion 42, allowing the upper nozzle 51F to move over a relatively wide range, thereby effectively achieving the switching function of bevel processing position and pre-dispense processing, as well as the mechanism for changing the bevel processing width (Effect J).

[0089] Here, the notch 44 becomes one of the main causes of turbulence generation in the sealed space SPs. However, in this embodiment, as shown in Figures 3, 9, and 12, the lower end of the upper nozzle 51F enters into the notch 44 and partially blocks it. This makes it possible to suppress turbulence generation in the notch 44 (effect K).

[0090] Furthermore, in order to more effectively suppress turbulence generation, as shown in Figure 20A, attachments 514 may be attached to each top nozzle 51F while maintaining the position of the discharge port 511 and the orientation of the top nozzles 51F. Alternatively, as shown in Figure 20B, a single attachment 515 may be attached to all top nozzles 51F while maintaining the position of the discharge port 511 and the orientation of the top nozzles 51F. These methods increase the proportion of the notch 44 occupied by each attachment-equipped top nozzle 51F, thereby almost completely closing the notch 44. As a result, turbulence generation in the notch 44 can be suppressed even more effectively.

[0091] Furthermore, in the above embodiment, an upper surface protection heating mechanism 4 is provided to ensure uniformity of the in-plane temperature of the substrate W. More specifically, the flow rate and temperature of the heating gas supplied to the central nozzle 45 are controlled based on the simulation results described below.

[0092] As shown in Figure 10, an airflow analysis was performed when nitrogen gas (heated gas) was discharged from the central nozzle 45 at various flow rates toward a rotating substrate W held in the spin chuck 21 in the vertical direction, with the disc portion 42 in close proximity to the substrate W. Here, the heaters 421 and ribbon heaters 48 were stopped, and the specific analysis conditions were as follows: • Distance between substrate W and disc portion 42 = 2 mm • Rotation speed of circuit board W = 1800 rpm • Nitrogen gas discharge flow rate = 0, 50, 75, 100, 130 L / min • Central nozzle 45 diameter = 60mmφ The settings were adjusted accordingly. Figure 21 shows a graph plotting the airflow velocity at each position in the radial direction X of the substrate W under these analysis conditions. As can be seen from Figure 21, the airflow velocity in the radial direction X of the substrate W changes according to the flow rate of nitrogen gas discharged from the central nozzle 45. In particular, if the airflow velocity at the peripheral Ws of the substrate W (here, 147 mm from the center of the substrate) falls below zero, that is, if an airflow is generated from the periphery of the substrate W (collection space SPc) toward the center of the substrate, droplet entrapment will occur. Therefore, Figure 22 shows a graph plotting the airflow velocity at the peripheral Ws of the substrate W (here, 147 mm from the center of the substrate) for each gas flow rate. As can be seen from Figure 22, in order to prevent droplet entrapment, it is necessary to discharge nitrogen gas from the central nozzle 45 at a rate of approximately 57 L / min or more.

[0093] On the other hand, as the flow rate of nitrogen gas discharged from the central nozzle 45 increases, the airflow velocity increases. Therefore, if nitrogen gas is supplied to the central nozzle 45 at an excessive flow rate, the airflow velocity along the upper surface Wf of the substrate W increases, which may adversely affect the pattern formed on the upper surface Wf of the substrate W. Also, in this embodiment, as shown in Figure 8, droplets and gaseous components collected in the collection space SPc are discharged to the discharge space SPe through the gap GPc. Therefore, if the flow rate of nitrogen gas flowing from the substrate W into the collection space SPc is excessive to the exhaust flow rate discharged from the discharge space SPe by the exhaust mechanism 38, a backflow vortex may be generated. When the flow rate of nitrogen gas is increased, the exhaust air velocity flowing between the substrate W and the rotating cup section 31 decreases. This has been found from airflow analysis. One of the main reasons for this is that the gap GPc is narrow, and when the flow rate of nitrogen gas is increased, pressure loss occurs, and exhaust that cannot be discharged backflows, which can generate a backflow vortex even at the upper edge of the substrate W. Therefore, it is desirable to set the maximum value of the nitrogen gas flow rate discharged from the central nozzle 45 within a range where these issues do not occur, and this is set to approximately 0.3 times the exhaust flow rate.

[0094] Next, we will explain the temperature of the heated gas. As shown in Figure 10, we performed an airflow analysis when heated gases of various temperatures were discharged from the central nozzle 45 toward a rotating substrate W, with the heater-integrated disc portion 42 in close proximity to the substrate W held in the spin chuck 21 in the vertical direction. The specific analysis conditions here are: • Heater 421 temperature = 185℃ • Heating gas temperature = 27°C, 80°C, 130°C • Distance between substrate W and disc portion 42 = 2 mm • Rotation speed of circuit board W = 1800 rpm • Discharge flow rate of heated gas = 80 L / min • Central nozzle 45 diameter = 60mmφ I set it to that.

[0095] Figure 23 shows a graph plotting the surface temperature of the substrate W at various positions in the radial direction X under the analysis conditions. As can be seen from Figure 23, the uniformity of the in-plane temperature on the substrate W improves and peaks with increasing heating gas temperature, and tends to decrease slightly with further temperature increases. Therefore, Figure 24 is a graph plotting the change in the surface temperature of the substrate W at the center position (r=0mm) and edge position (r=150mm) of the substrate W in accordance with changes in the discharge temperature of the heating gas. As can be seen from this graph, the surface temperature of the substrate W can be made uniform by setting the temperature of the heating gas discharged from the central nozzle 45 to approximately 100°C. Furthermore, in order to perform beveling well while suppressing warping of the substrate W, it is desirable to keep the surface temperature difference within a range of 20°C or less. From this perspective, in this embodiment, the upper limit of the discharge temperature of the heated gas is set to 130°C based on the dashed line (+20°C) and the dotted line (r=0mm) in Figure 24, and the lower limit of the discharge temperature of the heated gas is set to 65°C based on the dashed line (-20°C) and the dotted line (r=0mm). In other words, the calculation processing unit 10A sets the discharge temperature range of the heated gas from 65°C to 130°C.

[0096] Figure 25 shows the configuration of a second embodiment of the substrate processing apparatus according to the present invention. Figure 26 shows the configuration of the rotating cup section in the second embodiment. The main difference between this second embodiment and the first embodiment is that (A) The atmosphere separation mechanism 6 is not provided. (B) Rotary drive units 23A and 23B are provided to rotate the spin chuck 21 and the rotating cup portion 31, respectively. That is the case.

[0097] Due to the above difference (A), the nozzle head 56 is fixed to the beam member 49. In addition, the first lifting drive unit 71 is connected to one end of the beam member 49 and the second lifting drive unit 72 is connected to the other end of the beam member 49. Therefore, the calculation processing unit 10A controls the first lifting drive unit 71 and the second lifting drive unit 72 in a synchronous manner, causing the nozzle head 56, beam member 49, support member 43 and disc portion 42 to move up and down as a single unit. Furthermore, the upper annular portion 332 of the upper cup 33 extends radially inward from the upper end of the inclined portion 333 so that its lower surface can engage with the upper peripheral edge of the disc portion 42 which moves up and down as described above. Therefore, the upper cup 33 is positioned in accordance with the raising and lowering of the disc portion 42, either in a position where it is connected to the lower cup 32 (Figure 25, Figure 28C which will be explained later) or in a position where it is spaced upward from the lower cup 32 (Figures 28A, 28B, and 28D which will be explained later).

[0098] Furthermore, due to the above difference (B), a cylindrical portion 322 is attached to the lower surface of the lower cup 32. This cylindrical portion 322 is connected to the rotary drive unit 23B via a belt member. Therefore, when the arithmetic processing unit 10A gives a rotation command to the rotary drive unit 23B, the rotary drive unit 23B operates accordingly and rotates the lower cup 32 around the rotation axis AX. The rotary drive unit 23A is the same as in the first embodiment and rotates the spin chuck 21 around the rotation axis AX in response to the rotation command from the arithmetic processing unit 10A. In this way, in the second embodiment, the substrate W and the rotary cup portion 31 can be driven independently of each other using so-called two-axis drive. However, when performing bevel processing, the arithmetic processing unit 10A synchronously controls the rotary drive units 23A and 23B so that both the rotary cup portion 31 and the substrate W rotate in the same direction and synchronously, similar to the first embodiment.

[0099] Furthermore, the other components are basically the same as those of the first embodiment, and the same reference numerals are used, thus omitting a detailed explanation of the components.

[0100] Figure 27 is a flowchart showing a beveling process performed as an example of substrate processing operation by the substrate processing apparatus shown in Figure 25. Figures 28A to 28D are schematic diagrams showing the various parts of the apparatus during the beveling process. In the second embodiment, except that the raising and lowering of the lower sealed cup member 61 is replaced by the raising and lowering of the beam member 49, due to the difference (A) described above, the beveling process is basically performed in the same manner as in the first embodiment. That is, the calculation processing unit 10A raises the nozzle head 56, beam member 49, support member 43 and disc portion 42 together using the lifting and lowering drive units 71 and 72. During the raising of the beam member 49, the upper peripheral edge of the disc portion 42 engages with the upper annular portion 332 of the upper cup 33, and thereafter the upper cup 33 rises together with the nozzle head 56, beam member 49, support member 43 and disc portion 42 and is positioned in the retracted position. This creates a transport space SPt above the spin chuck 21 that is sufficient for the hand RH of the substrate transport robot 111 to enter. Once the completion of the formation of the transport space SPt is confirmed, the arithmetic processing unit 10A requests the substrate transport robot 111 to load the substrate W via the communication unit 10F, and waits for the unprocessed substrate W to be transported to the substrate processing device 1 and placed on the upper surface of the spin chuck 21, as shown in Figure 28A. Then the substrate W is placed on the spin chuck 21 (step S21). At this point, the pump 26 is stopped, and the substrate W is able to move horizontally on the upper surface of the spin chuck 21.

[0101] Once the loading of the substrate W is complete, the substrate transport robot 111 retracts from the substrate processing device 1. Subsequently, the arithmetic processing unit 10A controls the centering drive unit 82 so that the three contact members 81 (only two are shown in Figure 28B) are close to the substrate W. This eliminates the eccentricity of the substrate W relative to the spin chuck 21, and the center of the substrate W coincides with the center of the spin chuck 21 (step S22). Once the centering process is complete, the arithmetic processing unit 10A controls the centering drive unit 82 so that the three contact members 81 are separated from the substrate W, and also operates the pump 26 to apply negative pressure to the spin chuck 21. As a result, the spin chuck 21 attracts and holds the substrate W from below.

[0102] Next, the arithmetic processing unit 10A issues a downward command to the lifting drive units 71 and 72. In response, the lifting drive units 71 and 72 lower the nozzle head 56, beam member 49, support member 43, and disc portion 42 together. During this downward movement, the upper cup 33, which is supported from below by the upper peripheral edge of the disc portion 42, is connected to the lower cup 32. This forms the rotating cup portion 31.

[0103] After the rotating cup portion 31 is formed, the nozzle head 56, beam member 49, support member 43, and disc portion 42 descend further as a single unit, and the disc portion 42 is positioned at its lower limit. At this lower limit, the disc portion 42 is located a predetermined distance, for example, 2 mm above the upper surface Wf of the substrate W. The upper nozzle 51F is positioned within the notch 44 of the disc portion 42 so that its discharge port 511 faces the peripheral edge of the upper surface Wf of the substrate W. Once the preparation for supplying the processing liquid to the substrate W is complete, the calculation processing unit 10A gives a rotation command to the rotation drive units 23A and 23B, and the spin chuck 21 holding the substrate W and the rotating cup portion 31 start rotating (step S24). The rotation speed of the substrate W and the rotating cup portion 31 is set to, for example, 1800 revolutions per minute. Furthermore, the arithmetic processing unit 10A drives and controls the heater drive unit 422 to raise the heater 421 to a desired temperature, for example, 185°C.

[0104] Next, the arithmetic processing unit 10A issues a nitrogen gas supply command to the nitrogen gas supply unit 47. As a result, as shown by arrow F1 in Figure 28C, the supply of nitrogen gas from the nitrogen gas supply unit 47 to the central nozzle 45 begins (step S25). This nitrogen gas is heated by the ribbon heater 48 as it passes through the piping 46, and after being heated to a desired temperature (e.g., 100°C), it is discharged from the central nozzle 45 into the space between the substrate W and the disc portion 42. This heats the entire upper surface Wf of the substrate W. Heating of the substrate W is also performed by the heater 421. Therefore, as time passes, the temperature of the peripheral Ws of the substrate W rises and reaches a temperature suitable for beveling, for example, 90°C. The temperature of areas other than the peripheral Ws also rises to approximately the same temperature. In other words, in this embodiment, the in-plane temperature of the upper surface Wf of the substrate W is approximately uniform. Therefore, warping of the substrate W can be effectively suppressed.

[0105] Subsequently, the arithmetic processing unit 10A controls the processing liquid supply unit 52 to supply processing liquid to the upper nozzle 51F and the lower nozzle 51B (arrows F2 and F3 in the figure). That is, a stream of processing liquid is discharged from the upper nozzle 51F so as to hit the upper peripheral edge of the substrate W, and a stream of processing liquid is discharged from the lower nozzle 51B so as to hit the lower peripheral edge of the substrate W. This performs beveling on the peripheral edge Ws of the substrate W (step S26). Then, when the arithmetic processing unit 10A detects the elapsed processing time required for the beveling of the substrate W, it issues a supply stop command to the processing liquid supply unit 52 and stops the discharge of processing liquid.

[0106] Subsequently, the arithmetic processing unit 10A issues a command to stop supplying nitrogen gas to the nitrogen gas supply unit 47, stopping the supply of nitrogen gas from the nitrogen gas supply unit 47 to the central nozzle 45 (step S27). The arithmetic processing unit 10A also issues a command to stop rotation to the rotation drive units 23A and 23B, stopping the rotation of the spin chuck 21 and the rotating cup unit 31 (step S28).

[0107] In the next step S29, the arithmetic processing unit 10A observes the peripheral Ws of the substrate W to check the results of the beveling process. The arithmetic processing unit 10A positions the upper cup 33 in a retracted position, similar to when the substrate W is loaded, to form a transport space SPt. The arithmetic processing unit 10A then controls the observation head drive unit 92 to bring the observation head 91 close to the substrate W. When the peripheral Ws is imaged by the observation head 91, the arithmetic processing unit 10A controls the observation head drive unit 92 to retract the observation head 91 from the substrate W. In parallel with this, the arithmetic processing unit 10A checks whether the beveling process was performed well based on the image of the peripheral Ws that was captured (step S29).

[0108] After inspection, the arithmetic processing unit 10A requests the substrate transport robot 111 to unload the substrate W via the communication unit 10F, and the processed substrate W is discharged from the substrate processing device 1 (step S30). These steps are repeated.

[0109] As described above, according to the second embodiment, due to difference (A), effects A to C cannot be obtained, and due to difference (B), effect F cannot be obtained, but other effects can be obtained in the same way as in the first embodiment.

[0110] In the embodiments described above, the spin chuck 21 corresponds to an example of the "substrate holding part" of the present invention. The rotating cup part 31 corresponds to an example of the "cup part" of the present invention. The proportion of the attachment-equipped top nozzle 51F that occupies the notch part 44 corresponds to an example of the "occupancy ratio" of the present invention. The top protective heating mechanism 4 corresponds to an example of the "top protective mechanism" of the present invention.

[0111] It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made to those described above without departing from the spirit of the invention. For example, in the above embodiments, beveling is performed on the peripheral Ws of the substrate W using three types of processing liquids, but the types of processing liquids are not limited thereto.

[0112] Furthermore, in the above embodiment, the present invention is applied to a substrate processing apparatus 1 that collects droplets using a rotating cup section 31 with a so-called split structure, in which the upper cup 33 and lower cup 32, which are separable from each other, are connected to each other during processing to form a single unit. However, the scope of application of the present invention is not limited to this, and the present invention can also be applied to a substrate processing apparatus that collects droplets using a rotating cup section in which the upper cup and lower cup are pre-integrated.

[0113] Furthermore, in the above embodiment, the present invention is applied to a substrate processing apparatus 1 in which the splash prevention mechanism 3 has a rotating cup portion 31 and a fixed cup portion 34, but the scope of application of the present invention is not limited thereto. For example, it can also be applied to a substrate processing apparatus in which the splash prevention mechanism 3 is configured to collect droplets from the substrate W with a cup portion fixedly arranged to surround the outer circumference of the substrate W held by the spin chuck 21. [Industrial applicability]

[0114] This invention is applicable to all substrate processing technologies that involve supplying a processing solution to a substrate and processing the substrate. [Explanation of Symbols]

[0115] 1…Substrate processing equipment 2…Rotation mechanism 3…Scatter prevention mechanism 4…Top surface protection heating mechanism (Top surface protection mechanism) 5…Processing mechanism 7…Lifting mechanism 21... Spin chuck (substrate holder) 31... Rotating cup section (cup section) 32...Lower cup 33…Upper cup 44... Notch 51F... Top nozzle (processing liquid discharge nozzle) 332... Upper ring portion (overhang portion) 333…Slope area (eave area) 514... Attachment AX... Rotation axis W... Circuit board Ws... Peripheral area X...Radial direction Z...Vertical direction

Claims

1. A substrate holder is provided that is rotatable around a rotation axis extending vertically while holding the substrate, A rotating mechanism for rotating the substrate holding portion, A processing mechanism having a processing liquid discharge nozzle that discharges processing liquid from a discharge port toward the peripheral edge of the substrate held by the substrate holding part, A splash prevention mechanism having a cup portion that surrounds the outer circumference of the rotating substrate and collects the processing liquid that splashes from the substrate as the substrate holder rotates, It comprises a control unit and, The cup portion has an inclined portion in which the inner diameter of its upper end is smaller than the diameter of the substrate, and the inner diameter of its lower end is larger than the diameter of the substrate, and its inner circumferential surface is finished as an inclined surface. The upper end of the inclined portion includes a canopy portion that, in a plan view from vertically above, covers the entire periphery of the substrate held in the substrate holding portion, collects the processing liquid scattered from the substrate on the inclined surface, and allows it to flow along the inclined surface toward the lower end of the inclined portion. The substrate processing apparatus is characterized in that the control unit controls the processing mechanism such that, in the vertical direction, the lower end of the inclined portion is located below the substrate and the discharge port is located at a bevel processing position lower than the overhang portion, and the processing liquid discharged from the discharge port lands on the peripheral edge of the substrate.

2. A substrate processing apparatus according to claim 1, The beveling position is vertically below the eaves portion in the substrate processing apparatus.

3. A substrate holding portion that is rotatable around a rotation axis extending vertically while holding the substrate, A rotating mechanism for rotating the substrate holding portion, A processing mechanism having a processing liquid discharge nozzle that discharges processing liquid from a discharge port toward the peripheral edge of the substrate held by the substrate holding part, A splash prevention mechanism having a cup portion that surrounds the outer circumference of the rotating substrate and collects the processing liquid that splashes from the substrate as the substrate holder rotates, It comprises a control unit and, The cup portion has a visor portion that, when viewed from a vertical upward plane, covers the entire circumference of the peripheral edge of the substrate held in the substrate holding portion. The control unit controls the processing mechanism such that, with the discharge port positioned at a bevel processing position lower than the overhang portion in the vertical direction, the processing liquid discharged from the discharge port lands on the peripheral edge of the substrate. The processing mechanism has a nozzle moving unit that moves the processing liquid discharge nozzle to switch the position of the discharge port between the bevel processing position and a pre-dispensing position that is closer to the cup portion than the bevel processing position. A substrate processing apparatus in which the control unit controls the nozzle movement unit so that when processing the peripheral edge of the substrate, the discharge port is located at the bevel processing position, and when pre-dispensing from the processing liquid discharge nozzle is performed, the discharge port is located at the pre-dispensing position so that the processing liquid discharged from the discharge port is directly discharged into the cup portion.

4. A substrate processing apparatus according to claim 3, The nozzle moving part is capable of changing the bevel processing position in the radial direction of the substrate to adjust the application position of the processing liquid at the peripheral edge of the substrate. The control unit is a substrate processing apparatus that controls the width of the region of the substrate to be processed by the processing liquid from the end face to the radially inward direction by changing the bevel processing position.

5. A substrate processing apparatus according to claim 3 or 4, The processing liquid discharge nozzle has a nozzle body that is movable in the radial direction of the substrate, In the nozzle body, the discharge port is provided on the radially outward side. The nozzle moving unit is a substrate processing apparatus that positions the discharge port at the bevel processing position or the pre-dispense position by moving the nozzle body in the radial direction of the substrate.

6. A substrate processing apparatus according to claim 3 or 4, The processing liquid discharge nozzle has a nozzle body whose one end, away from the cup portion, is pivotally supported around a pivot axis extending vertically. The discharge port is provided at the other end of the nozzle body. The nozzle moving unit is a substrate processing apparatus that positions the discharge port at the bevel processing position or the pre-dispense position by moving the nozzle body around the pivot axis.

7. A substrate holding portion that is rotatable around a rotation axis extending vertically while holding the substrate, A rotating mechanism for rotating the substrate holding portion, A processing mechanism having a processing liquid discharge nozzle that discharges processing liquid from a discharge port toward the peripheral edge of the substrate held by the substrate holding part, A splash prevention mechanism having a cup portion that surrounds the outer circumference of the rotating substrate and collects the processing liquid that splashes from the substrate as the substrate holder rotates, In a plan view from vertically above, the upper surface protection mechanism has a shielding plate that covers the upper surface of the substrate held in the substrate holding portion inside the cup portion at a predetermined distance from the upper surface of the substrate, It comprises a control unit and, The cup portion has a visor portion that, when viewed from a vertical upward plane, covers the entire circumference of the peripheral edge of the substrate held in the substrate holding portion. The control unit controls the processing mechanism such that, with the discharge port positioned at a bevel processing position lower than the overhang portion in the vertical direction, the processing liquid discharged from the discharge port lands on the peripheral edge of the substrate. The processing liquid discharge nozzle is arranged to close a notch formed on the periphery of the shut-off plate in a substrate processing apparatus.

8. A substrate processing apparatus according to claim 7, The processing liquid discharge nozzle has a nozzle body with the discharge port formed on its lower end surface, A substrate processing apparatus in which the nozzle body is positioned in the notch and closes the notch, such that the discharge port faces the peripheral edge of the substrate from the notch.

9. A substrate processing apparatus according to claim 7, The processing liquid discharge nozzle comprises a nozzle body having the discharge port formed on its lower end surface, and an attachment that is attached to the nozzle body to increase the proportion of the processing liquid discharge nozzle occupied in the notch. A substrate processing apparatus in which the nozzle body is positioned in the notch such that the discharge port faces the peripheral edge of the substrate from the notch, and the attachment enters the notch to close the notch.

10. A substrate processing apparatus according to any one of claims 7 to 9, A substrate processing apparatus comprising a lifting mechanism that integrally raises and lowers the upper surface protection mechanism, the processing liquid discharge nozzle, and the cup portion in the vertical direction.

11. A substrate processing method comprising processing the peripheral edge of a substrate with a processing liquid from the discharge port of a processing liquid discharge nozzle, while surrounding the outer circumference of the substrate, which is rotated around a rotation axis extending in the vertical direction, with a cup portion, The cup portion has an inclined portion in which the inner diameter of its upper end is smaller than the diameter of the substrate, and the inner diameter of its lower end is larger than the diameter of the substrate, and its inner circumferential surface is finished as an inclined surface. The upper end of the inclined portion includes a canopy portion that, in a plan view from vertically above, covers the entire periphery of the substrate, collects the processing liquid scattered from the substrate on the inclined surface, and allows it to flow along the inclined surface toward the lower end of the inclined portion. A substrate processing method characterized in that, in the vertical direction, the lower end of the inclined portion is located below the substrate, and the eaves portion of the cup portion covers the peripheral edge of the substrate from vertically above, and the discharge port is positioned in the vertical direction at a bevel processing position lower than the eaves portion, while the processing liquid is applied to the peripheral edge of the substrate from the discharge port.

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