Light irradiation device, measuring device, observation device, and film thickness measuring device

Abstract

This light irradiation device comprises: a light source which emits light; a light pipe into which light emitted from the light source enters and which uniformizes the luminance distribution of the light and outputs the light; a diffusing part which diffuses the light output from the light pipe; and a light pipe into which the light diffused by the diffusion part enters and which uniformizes the luminance distribution of the light and outputs the light, wherein the diffusing part is a light diffusing surface provided on a light output surface of the light pipe.

Claims

1. A light source that emits light, A first light pipe receives light emitted from the aforementioned light source and outputs the light with a uniform illuminance distribution, A diffuser that diffuses the light output from the first light pipe, The system includes a second light pipe that receives the light diffused by the aforementioned diffusion unit and outputs the light with a uniform illuminance distribution, The diffusion portion is a light diffusion surface formed to be uneven by blasting, provided on at least one of the light output surface of the first light pipe and the light input surface of the second light pipe. If the length of the first light pipe is L1, the diameter of the first light pipe is D1, and the NA of the first light pipe is α, then L1 > D1 / α is satisfied. A light irradiation device that satisfies L2 > D2 / β, where L2 is the length of the second light pipe, D2 is the diameter of the second light pipe, and β is the NA of the second light pipe.

2. The light irradiation device according to claim 1, wherein the diameter of the light incident surface of the second light pipe is the same as the diameter of the light output surface of the first light pipe.

3. The light irradiation device according to claim 1, wherein the diameter of the light input surface of the second light pipe is smaller than the diameter of the light output surface of the first light pipe.

4. The light irradiation device according to claim 1, wherein the diameter of the light output surface of the second light pipe is larger than the diameter of the light input surface of the second light pipe.

5. The light irradiation device according to claim 1, wherein the light diffusing surface is a translucent surface.

6. The light irradiation device according to any one of claims 1 to 5, A measuring device comprising: an imaging unit that captures measurement light generated by light irradiated onto an object to be measured from the aforementioned light irradiation device;

7. The light irradiation device according to any one of claims 1 to 5, An observation device comprising: an imaging unit that captures observation light, which is light irradiated onto an object to be measured from the aforementioned light irradiation device; and a monitoring device that captures observation light, which is light irradiated onto an object to be measured from the aforementioned light irradiation device.

8. The light irradiation device according to any one of claims 1 to 5, The imaging unit captures the observation light, which is the light irradiated onto the object to be measured from the aforementioned light irradiation device, and outputs the imaging data. A film thickness measuring device comprising: a film thickness deriving unit that derives the film thickness of the object to be measured based on the aforementioned imaging data.

Images