Work handling sheet, method for handling workpieces, device manufacturing method, and use of work handling sheet.

The work handling sheet with an interfacial ablation layer efficiently separates and places micro LEDs using laser ablation, addressing the challenge of high-density LED mounting by reducing laser light needs and ensuring precise placement.

JP7875817B2Active Publication Date: 2026-06-18LINTEC CORP
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
LINTEC CORP
Filing Date
2021-12-28
Publication Date
2026-06-18

AI Technical Summary

⚠Technical Problem

Existing methods struggle to efficiently handle and mount large numbers of fine micro light-emitting diodes (LEDs) during the manufacturing process, particularly in high-density mounting applications.

⚗Method used

A work handling sheet with a base material and an interfacial ablation layer that converts ultraviolet light into thermal energy with a conversion efficiency of 60% or more, allowing precise separation of LEDs using laser ablation, facilitated by an adhesive layer containing additives like ultraviolet absorbers and photoinitiators.

🎯Benefits of technology

The work handling sheet effectively separates and places micro LEDs with high accuracy, reducing laser light requirements and preventing damage, thus enhancing the efficiency and precision of LED mounting processes.

✦ Generated by Eureka AI based on patent content.

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Abstract

[Problem] To provide a workpiece handling sheet with which it is possible to favorably handle even a very small workpiece item. [Solution] A workpiece handling sheet 1 is provided with a base material 11 and an interface ablation layer 12 that is laminated on one surface side of the base material 11, able to hold a small workpiece item, and undergoes interface ablation through irradiation with laser light. When the workpiece handling sheet 1 that has been subjected to first ultraviolet irradiation to perform irradiation with ultraviolet rays having a wavelength of 365 nm with a light amount of 190 mJ / cm2 is further subjected to second ultraviolet irradiation to perform irradiation with ultraviolet rays having a wavelength of 365 nm with a light amount of 950 mJ / cm2, the conversion efficiency with which the interface ablation layer 12 converts the light energy of the ultraviolet rays during the second ultraviolet irradiation into thermal energy is 60% or more.
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