Surface acoustic wave sensor assembly

The integration of SAW sensor assemblies with IDTs and reflectors on piezoelectric substrates addresses the challenges of passive environmental measurement and signal differentiation, enhancing sensor performance and reducing manufacturing costs.

JP7877408B2Active Publication Date: 2026-06-22APPLIED MATERIALS INC
View PDF 8 Cites 0 Cited by

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2024-09-11
Publication Date
2026-06-22

AI Technical Summary

Technical Problem

Existing sensor technologies face challenges in efficiently measuring environmental conditions such as pressure and temperature without active power sources and in harsh environments, and there is a need for improved signal differentiation and reduced manufacturing complexity in sensor assemblies.

Method used

The development of surface acoustic wave (SAW) sensor assemblies integrated with interdigital transducers (IDTs) and reflectors on piezoelectric substrates, which utilize passive circuitry to measure environmental conditions by converting RF signals into SAWs, allowing for fine-tuning and unique signal modulation to distinguish between sensors.

Benefits of technology

The SAW sensor assemblies enable passive measurement of environmental conditions across wide areas, improving performance, enabling wider application ranges, and reducing manufacturing costs and complexity while maintaining precise signal differentiation.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 0007877408000001
    Figure 0007877408000001
  • Figure 0007877408000002
    Figure 0007877408000002
  • Figure 0007877408000003
    Figure 0007877408000003
Patent Text Reader

Abstract

To measure an environmental condition based on detection of SAW characteristics in response to receiving an incoming radio frequency (RF) signal.SOLUTION: A sensor assembly is provided that includes a surface acoustic wave (SAW) sensor. A SAW sensor is adapted to measure a first environmental condition in response to receiving an RF signal. The SAW sensor includes a substrate having a layer of piezoelectric material. The SAW sensor further includes an interdigital transducer (IDT) formed on the piezoelectric material. The IDT includes two interdigitated electrodes having interdigitated conductive fingers in a first arrangement. The interdigitated conductive fingers in the first arrangement generate a first signal modulation of the RF signal received by the first IDT. The first signal modulation identifies the first SAW sensor.SELECTED DRAWING: Figure 2
Need to check novelty before this filing date? Find Prior Art