Conveying system, film deposition apparatus, control method for conveying system, and method for manufacturing articles

Abstract

To provide a conveyance system capable of preventing a movable element from falling even when power is cut off while the movable element is floating.SOLUTION: A conveyance system includes: a first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction; a second member having a plurality of coils arranged along the first direction so as to be able to be opposed to the plurality of magnets movable in the first direction relative to the first member; and a control unit for moving a movable element in the first direction while floating one of the first member and the second member on which gravity acts in a second direction crossing the first direction at a height position higher than an equilibrium position where magnetic attraction force acting between the plurality of magnets and the plurality of coils and gravity acting on one of the first member and the second member are balanced.SELECTED DRAWING: Figure 11A

Description

Technical Field

[0001] The present invention relates to a transport system, a film forming apparatus, a control method for a transport system, and a method for manufacturing an article.

Background Art

[0002] Patent Document 1 describes a magnetic levitation transport device using a magnetic support method. The magnetic levitation transport device described in Patent Document 1 has an electromagnet arranged to face a guide rail through a gap, and a permanent magnet interposed in a magnetic circuit composed of the electromagnet, the guide rail, and the gap and mounted on a transport vehicle. The permanent magnet forms a magnetic support unit together with the magnetic circuit.

[0003] Generally, in a magnetic levitation transport device using a magnetic support method, zero-power control is known, which controls the coil current value to converge near zero in order to reduce the power consumption during levitation transport. The magnetic levitation transport device described in Patent Document 1 has a gap sensor that detects a predetermined gap length between the guide rail and the magnetic support unit, and controls the current of the electromagnet so as to maintain the gap length such that the weight of the transported object and the attractive force by the permanent magnet are exactly balanced. That is, in Patent Document 1, the gap length is set so that the excitation current of the electromagnet becomes zero, and the transported object is levitated and transported.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present invention aims to provide a transport system that can prevent the movable element from falling even if the power supply is interrupted while the movable element is levitating. [Means for solving the problem]

[0007] According to one aspect of the present invention, a transport system is provided, comprising: a first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction; a second member having a plurality of coils arranged along the first direction so as to be able to face the plurality of magnets and movable in the first direction relative to the first member; and a control unit that moves one of the first member and the second member in the first direction while levitating the first member or the second member, to which gravity acts in a second direction intersecting the first direction, at a height position higher than the equilibrium position where the magnetic attractive force acting between the plurality of magnets and the plurality of coils balances with gravity acting on one of the first member and the second member.

[0008] According to another aspect of the present invention, a transport system is provided comprising: a first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction; a second member having a plurality of coils that are movable in the first direction relative to the first member and arranged so as to face the plurality of magnets, and between which a magnetic attractive force acts; and a control unit that determines the height position of one of the first member and the second member based on cogging torque, and moves one of the first member and the second member whose height position has been determined in the first direction while levitating it in a second direction intersecting the first direction at the height position.

[0009] According to another aspect of the present invention, there is a method for controlling a transport system having a first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, and a second member having a plurality of coils arranged along the first direction so as to be able to face the plurality of magnets and movable relative to the first member in the first direction, the method being characterized by moving one of the first member or the second member in the first direction while levitating the first member or the second member, to which gravity acts in a second direction intersecting the first direction, at a height position higher than the equilibrium position where the magnetic attractive force acting between the plurality of magnets and the plurality of coils balances with gravity acting on one of the first member or the second member.

[0010] According to another aspect of the present invention, there is a method for controlling a transport system having: a first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction; and a second member having a plurality of coils that are movable in the first direction relative to the first member and arranged along the first direction so as to be able to face the plurality of magnets, and between which a magnetic attractive force acts. The method for controlling a transport system is characterized by determining the height position of one of the first member and the second member based on cogging torque, and moving one of the first member and the second member whose height position has been determined in the first direction while levitating it in a second direction intersecting the first direction at the height position. [Effects of the Invention]

[0011] According to the present invention, even if the power supply is interrupted while the movable element is levitating, the movable element can be prevented from falling. [Brief explanation of the drawing]

[0012] [Figure 1] This is a schematic diagram showing the configuration of a transport system according to the first embodiment of the present invention. [Figure 2] This is a schematic diagram showing the configuration of a transport system according to the first embodiment of the present invention. [Figure 3]It is a schematic diagram showing the configuration of the transport system according to the first embodiment of the present invention. [Figure 4] It is a schematic diagram showing the coil and the configuration related to the coil in the transport system according to the first embodiment of the present invention. [Figure 5] It is a schematic diagram showing the control system for controlling the transport system according to the first embodiment of the present invention. [Figure 6] It is a schematic diagram showing the method for controlling the attitude of the mover in the transport system according to the first embodiment of the present invention. [Figure 7] It is a schematic diagram showing an example of a control block for controlling the position and attitude of the mover in the transport system according to the first embodiment of the present invention. [Figure 8A] It is a schematic diagram showing the relationship between the force in the Z direction acting on the mover and the position of the mover in the Z direction. [Figure 8B] It is a schematic diagram showing the relationship between the force in the Z direction acting on the mover and the position of the mover in the Z direction. [Figure 8C] It is a schematic diagram showing the relationship between the force in the Z direction acting on the mover and the position of the mover in the Z direction. [Figure 8D] It is a graph showing the relationship between the force in the Z direction acting on the mover and the position of the mover in the Z direction. [Figure 9A] It is a schematic diagram showing the attractive force acting on the mover. [Figure 9B] It is an explanatory diagram for explaining the cogging torque acting on the mover. [Figure 10] It is a graph showing the cogging torque in the Z direction and the cogging torque in the Wy direction. [Figure 11A] It is a side view showing the force acting on the mover located at the transport position where the transport height is raised in the Z direction from the equilibrium position. <​​​​​​​It is a schematic diagram showing an example of a control block for controlling the position and orientation of a mover in a conveyance system according to a third embodiment of the present invention.

Mode for Carrying Out the Invention

[0013] [First Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 to 12.

[0014] First, the configuration of the conveyance system 1 according to the present embodiment will be described with reference to FIGS. 1 to 4. FIGS. 1 to 3 are schematic diagrams showing the configuration of the conveyance system 1 including a mover 101 which is a first member and a stator 201 which is a second member according to the present embodiment. Note that FIGS. 1 and 2 respectively show the main parts of the mover 101 and the stator 201 extracted. Further, FIG. 1 is a view of the mover 101 seen from obliquely above, and FIG. 2 is a view of the mover 101 and the stator 201 seen from the X direction described later. FIG. 3 is a view showing an enlarged rectangular portion surrounded by a broken line in FIG. 2. FIG. 4 is a schematic diagram showing the coil 202 and the configuration related to the coil 202 in the conveyance system 1.

[0015] As shown in FIGS. 1 and 2, the conveyance system 1 according to the present embodiment has a mover 101 that constitutes a carrier, a cart or a slider, and a stator 201 that constitutes a conveyance path. Further, the conveyance system 1 has an integrated controller 301, a coil controller 302, a coil unit controller 303, and a sensor controller 304. Note that in FIG. 1, two movers 101a and 101b are shown as the mover 101, and two stators 201a and 201b are shown as the stator 201. Hereinafter, when there is no particular need to distinguish a plurality of possible components such as the mover 101 and the stator 201, only a common numerical reference sign is used, and when necessary, a lowercase alphabet is attached after the numerical reference sign to distinguish each one.

[0016] The transport system 1 according to this embodiment is a linear motor transport system that transports the movable element 101 by generating an electromagnetic force between the coil 202 of the stator 201 and the permanent magnet 103 of the movable element 101. Furthermore, the transport system 1 according to this embodiment is a magnetic levitation type transport system that levitates the movable element 101 and transports it without contact.

[0017] The transport system 1 according to this embodiment constitutes part of a processing system that also includes a processing device for processing workpieces transported by the movable element 101. Generally, transport systems are used in production lines for assembling industrial products, semiconductor exposure equipment, and the like. In particular, transport systems in production lines transport workpieces such as parts between multiple stations within or between factory-automated production lines. They may also be used as transport systems in process equipment. The transport system 1 according to this embodiment can be used for such applications.

[0018] The transport system 1 transports the workpiece held by the movable element 101 to a processing apparatus that performs processing operations on the workpiece, for example, by transporting the movable element 101 using the stator 201. The processing apparatus is not particularly limited, but for example, it may be a film deposition apparatus, a sputtering apparatus, or other film deposition apparatus that performs film deposition on the glass substrate 102, which is the workpiece, as described later. In Figure 1, two movable elements 101 are shown with two stator elements 201, but this is not limited to these. In the transport system 1, one or more movable elements 101 may be transported on one or more stator elements 201.

[0019] Here, we define the coordinate axes, directions, etc., used in the following explanation. First, we take the X-axis along the horizontal direction, which is the transport direction of the movable element 101, and define the transport direction of the movable element 101 as the X direction. We also take the Z-axis along the vertical direction, which is perpendicular to the X direction, and define the vertical direction as the Z direction. The vertical direction is the direction of gravity (mg direction). Furthermore, we take the Y-axis along the direction perpendicular to the X and Z directions, and define the direction perpendicular to the X and Z directions as the Y direction. In addition, the rotation direction around the X-axis is defined as the Wx direction, the rotation direction around the Y-axis as the Wy direction, and the rotation direction around the Z-axis as the Wz direction. We also use "*" as the multiplication symbol. Furthermore, we define the center of the movable element 101 as the origin Oc, the Y+ side as the R side, and the Y- side as the L side. Note that the transport direction of the movable element 101 does not necessarily have to be horizontal, but in that case as well, the transport direction can be defined as the X direction and the Y and Z directions can be defined in the same way. Furthermore, the X, Y, and Z directions are not necessarily limited to mutually orthogonal directions, but can also be defined as mutually intersecting directions.

[0020] As shown by the arrow in Figure 1, the movable element 101 is configured to move along the X direction, which is the transport direction. The movable element 101 includes a permanent magnet 103, a linear scale 104, a Y target 105, a Z target 106, and a stopper 107. The movable element 101 has an upper surface and a lower surface located opposite the upper surface.

[0021] The permanent magnets 103 are installed on the upper surface of the movable element 101, attached in multiples along the X direction at each end on the R and L sides. The multiple permanent magnets 103 that make up the magnet group on each of the R and L sides are arranged so that the polarity of the surfaces facing the Z direction of adjacent surfaces in the X direction is different from each other, and the N poles and S poles are arranged alternately. Note that the installation location and number of permanent magnets 103 are not limited to those shown in Figures 1 and 2, and can be changed as appropriate.

[0022] The linear scale 104, Y target 105, and Z target 106 are mounted on the movable element 101 at positions where they can be read by the linear encoder 204, Y sensor 205, and Z sensor 206, respectively, which are installed on the stator 201.

[0023] The stopper 107 is mounted and installed so as to protrude outward in the Y direction from both sides of the movable element 101 facing the Y direction. The collision prevention rollers 207 and 208, described later, are installed opposite the stopper 107 from above and below in the Z direction.

[0024] The stator 201 includes a coil 202, a linear encoder 204, a Y sensor 205, a Z sensor 206, and collision prevention rollers 207 and 208.

[0025] Multiple coils 202 are mounted on the stator 201 along the X-direction so as to be able to face the permanent magnets 103 installed on the upper surface of the movable element 101 along the X-direction. Specifically, the multiple coils 202 are arranged in two rows along the X-direction so as to be able to face the two permanent magnets 103 installed at the R-side and L-side ends of the upper surface of the movable element 101 from above along the Z-direction. Note that the installation location and number of coils 202 are not limited to those shown in Figures 1 and 2 and can be changed as appropriate. Each coil 202 has a core 2021 such as an iron core and a winding 2022 wound around the core 2021.

[0026] The stator 201 generates an electromagnetic force between the coils 202 and the permanent magnets 103 by applying current to each coil 202. As a result, the movable element 101 levitates along the Z direction while moving along the X direction.

[0027] The linear encoder 204, Y sensor 205, and Z sensor 206 function as detection units that detect the position and orientation of the movable element 101 as it moves along the transport direction.

[0028] The linear encoder 204 is mounted on the stator 201 so as to be able to read the linear scale 104 installed on the movable element 101. The linear encoder 204 detects the relative position of the movable element 101 with respect to the linear encoder 204 by reading the linear scale 104.

[0029] The Y sensor 205 is mounted on the stator 201 so as to be able to detect the distance in the Y direction between it and the Y target 105 installed on the movable element 101. The Z sensor 206 is mounted on the stator 201 so as to be able to detect the distance in the Z direction between it and the Z target 106 installed on the movable element 101.

[0030] The collision prevention rollers 207 and 208 are mounted on the stator 201 along the X direction so as to face each stopper 107 of the movable element 101 from above and below in the Z direction. The collision prevention roller 207 is positioned to face the stopper 107 from above. The collision prevention roller 208 is positioned to face the stopper 107 from below. The collision prevention rollers 207 and 208 contact the stopper 107 depending on the position of the movable element 101 in the Z direction, thereby restricting the range of motion of the movable element 101 in the Z direction. The collision prevention rollers 207 and 208 are configured to rotate so that the stopper 107 rolls in the X direction when it comes into contact with the rollers.

[0031] The movable element 101 is designed so that a workpiece can be attached to or held above or below it for transport. In Figures 2 and 3, a glass substrate 102, which serves as the workpiece, is shown being held by a holding mechanism 108 provided on the lower surface of the movable element 101. The mechanism for attaching or holding the workpiece to the movable element 101 is not particularly limited, but general attachment mechanisms such as mechanical hooks and electrostatic chucks, as well as holding mechanisms, can be used.

[0032] Figures 1 and 2 show an example of a processing apparatus for a workpiece held by a movable element 101, specifically a vapor deposition apparatus 7 that performs vapor deposition on a glass substrate 102, which is a substrate held by the movable element 101. The vapor deposition apparatus 7 is installed and integrated into the stator 201.

[0033] The deposition apparatus 7 includes a pattern mask 501 positioned to face a glass substrate 102 held below a movable element 101, and a deposition source 701 positioned below the pattern mask 501 to face the glass substrate 102 via the pattern mask 501. The deposition source 701 is a film-forming source for creating a film on the glass substrate 102. As the movable element 101 is transported in the X direction, the glass substrate 102 held by the movable element 101 passes over the pattern mask 501. While the glass substrate 102 passes over the pattern mask 501, a deposition material is released from the deposition source 701 located below the pattern mask 501. The released deposition material is deposited onto the glass substrate 102 through the pattern mask 501. A thin film of a metal, oxide, or other deposition material is formed on the side of the glass substrate 102 facing the deposition source 701 by deposition from the deposition source 701. A pattern formed by the pattern mask 501 is created on the thin film. During the deposition process, the movable element 101 is transported so that the glass substrate 102 passes above the pattern mask 501. Alternatively, the movable element 101 may be stopped in a levitated state so that the glass substrate 102 stops above the pattern mask 501. In this way, the workpiece is transported together with the movable element 101, and the transported workpiece is processed by the process equipment to manufacture an article from the workpiece.

[0034] Figure 1 shows a region between stator 201a and stator 201b that includes a structure 100, such as a gate valve. The location where the structure 100 exists is a place within a production line or between multiple stations in a production line where electromagnets or coils cannot be placed consecutively.

[0035] Figure 3 also shows the gaps (distances) a, b, c, and d in the Z direction between components in the transport system 1. Gap a is the gap between the coil 202 and the permanent magnet 103. Gap b is the gap between the collision prevention rollers 207 and 208 and the stopper 107, and is the sum of the gap between the upper collision prevention roller 207 and the stopper 107 and the gap between the lower collision prevention roller 208 and the stopper 107. Gap c is the gap between the Z sensor 206 and the Z target 106. Gap d is the gap between the glass substrate 102 and the pattern mask 501.

[0036] The relationship a≧c>b>d holds between the sizes of each gap. Therefore, the collision prevention roller 207 contacts the stopper 107 before the coil 202 and the permanent magnet 103 come into contact. Similarly, the collision prevention roller 208 contacts the stopper 107 before the Z sensor 206 and the Z target 106 come into contact. On the other hand, the gap d between the glass substrate 102 and the pattern mask 501 is designed to be extremely narrow, ideally zero, in order to improve deposition performance.

[0037] A control system 3 is provided to control the transport system 1. The control system 3 may constitute a part of the transport system 1. The control system 3 includes an integrated controller 301, a coil controller 302, a coil unit controller 303, and a sensor controller 304. The integrated controller 301, coil controller 302, coil unit controller 303, and sensor controller 304 execute their respective processes by executing control programs corresponding to their respective processes and performing various calculations. The coil controller 302 and sensor controller 304 are communicated to the integrated controller 301. Multiple coil unit controllers 303 are communicated to the coil controller 302. Multiple linear encoders 204, multiple Z sensors 206, multiple Y sensors 205, and multiple Z sensors 206 are communicated to the sensor controller 304. A coil 202 is connected to each coil unit controller 303.

[0038] The integrated controller 301 determines the current command value to be applied to the multiple coils 202 based on the outputs from the linear encoder 204, Y sensor 205, and Z sensor 206 transmitted from the sensor controller 304. The integrated controller 301 transmits the determined current command value to the coil controller 302. The coil controller 302 transmits the current command value received from the integrated controller 301 to each coil unit controller 303. The coil unit controller 303 controls the amount of current in the connected coils 202 based on the current command value received from the coil controller 302.

[0039] As shown in Figure 4, one or more coils 202 are connected to each coil unit controller 303.

[0040] A current sensor 312 and a current controller 313 are connected to coil 202. The current sensor 312 detects the current value flowing through the connected coil 202. The current controller 313 controls the amount of current flowing through the connected coil 202.

[0041] The coil unit controller 303 commands the current controller 313 to provide a desired amount of current based on the current command value received from the coil controller 302. The current controller 313 detects the current value detected by the current sensor 312 and controls the amount of current so that the desired amount of current flows through the coil 202.

[0042] Next, the control system 3 that controls the transport system 1 according to this embodiment will be further explained with reference to Figure 5. Figure 5 is a schematic diagram showing the control system 3 that controls the transport system 1 according to this embodiment.

[0043] As shown in Figure 5, the control system 3 includes an integrated controller 301, a coil controller 302, and a sensor controller 304. The control system 3 functions as a control unit that controls the transport system 1, which includes a movable element 101 and a stator 201. The coil controller 302 and the sensor controller 304 are communicated to the integrated controller 301.

[0044] Multiple coil unit controllers 303 are communicated to the coil controller 302. The coil controller 302 and the multiple coil unit controllers 303 connected to it are provided corresponding to each row of coils 202. A coil 202 is connected to each coil unit controller 303.

[0045] The coil controller 302 can command each connected coil unit controller 303 to a target current value. The coil unit controller 303 can control the magnitude of the current in the connected coil 202.

[0046] Multiple linear encoders 204, multiple Y sensors 205, and multiple Z sensors 206 are communicated to the sensor controller 304.

[0047] Multiple linear encoders 204 are mounted on the stator 201 at intervals such that at least one of them can always measure the position of one of the movable elements 101 while the movable elements 101 are being transported. Multiple Y sensors 205 are mounted on the stator 201 at intervals such that at least two of them can always measure the Y target 105 of one of the movable elements 101. Multiple Z sensors 206 are mounted on the stator 201 at intervals and in a plane such that three of the two rows of sensors can always measure the Z target 106 of one of the movable elements 101.

[0048] The integrated controller 301 determines current command values ​​to be applied to the multiple coils 202 based on the outputs from the linear encoder 204, Y sensor 205, and Z sensor 206, and transmits them to the coil controller 302. The coil controller 302 commands the coil unit controller 303 to apply current values ​​based on the current command values ​​from the integrated controller 301, as described above. As a result, the integrated controller 301 functions as a control unit, transporting the movable element 101 along the stator 201 without contact, and controlling the posture of the transported movable element 101 in six axes.

[0049] The integrated controller 301 controls the current applied to the multiple coils 202 based on the position and orientation of the movable element 101 acquired by the linear encoder 204, Y sensor 205, and Z sensor 206. The method of controlling the orientation of the movable element 101 performed by the integrated controller 301 will be described below with reference to Figure 6. Figure 6 is a schematic diagram showing the method of controlling the orientation of the movable element 101 in the transport system 1 according to this embodiment. Figure 6 shows an overview of the method of controlling the orientation of the movable element 101, mainly focusing on the data flow. The integrated controller 301 functions as a control unit that executes processing using the movable element position calculation function 401, the movable element orientation calculation function 402, the movable element orientation control function 403, and the coil current calculation function 404, as described below. As a result, the integrated controller 301 controls the transport of the movable element 101 while controlling the orientation of the movable element 101 in six axes. Note that instead of the integrated controller 301, the coil controller 302 can be configured to perform the same processing as the integrated controller 301.

[0050] First, the movable element position calculation function 401 calculates the number and position of the movable elements 101 on the stator 201 that constitute the transport path from the measured values ​​from multiple linear encoders 204 and the information of their mounting positions. As a result, the movable element position calculation function 401 updates the movable element position information (X) and the number information of the movable elements 101 in the movable element information 406, which is information about the movable elements 101. The movable element position information (X) indicates the position of the movable element 101 on the stator 201 in the X direction, which is the transport direction. The movable element information 406 is prepared for each movable element 101 on the stator 201, for example, as shown in Figure 6 as POS-1, POS-2, ...

[0051] Next, the movable element posture calculation function 402 identifies the Y sensor 205 and Z sensor 206 capable of measuring each movable element 101 from the movable element position information (X) of the movable element information 406 updated by the movable element position calculation function 401. Then, the movable element posture calculation function 402 calculates posture information (Y, Z, Wx, Wy, Wz), which is information about the posture of each movable element 101, based on the values ​​output from the identified Y sensor 205 and Z sensor 206, and updates the movable element information 406. The movable element information 406 updated by the movable element posture calculation function 402 includes the movable element position information (X) and posture information (Y, Z, Wx, Wy, Wz).

[0052] Next, the movable element attitude control function 403 calculates applied force information 408 for each movable element 101 from the current movable element information 406, which includes movable element position information (X) and attitude information (Y, Z, Wx, Wy, Wz), and the attitude target value. The applied force information 408 is information regarding the magnitude of the force to be applied to each movable element 101. The applied force information 408 includes information regarding the three-axis components of the force T to be applied (Tx, Ty, Tz) and the three-axis components of the torque (Twx, Twy, Twz), which will be described later. The applied force information 408 is prepared for each movable element 101 on the stator 201, for example, as shown in Figure 6 as TRQ-1, TRQ-2, ...

[0053] Here, the three-axis components of force Tx, Ty, and Tz are the X-axis, Y-axis, and Z-axis components of the force, respectively. Similarly, the three-axis components of torque Twx, Twy, and Twz are the X-axis, Y-axis, and Z-axis components of the torque, respectively. The transport system 1 according to this embodiment controls the transport of the movable element 101 while controlling the posture of the movable element 101 in six axes by controlling these six-axis components of force T (Tx, Ty, Tz, Twx, Twy, Twz).

[0054] Next, the coil current calculation function 404 determines the current command value 409 to be applied to each coil 202 based on the applied force information 408 and the movable element information 406.

[0055] Thus, the integrated controller 301 determines the current command value 409 by executing processing using the movable element position calculation function 401, the movable element attitude calculation function 402, the movable element attitude control function 403, and the coil current calculation function 404. The integrated controller 301 transmits the determined current command value 409 to the coil controller 302.

[0056] The control of the position and orientation of the movable element 101 will be explained in more detail using Figure 7. Figure 7 is a schematic diagram showing an example of a control block for controlling the position and orientation of the movable element 101.

[0057] In Figure 7, P represents the position and orientation of the movable element 101, with components (X, Y, Z, Wx, Wy, Wz). ref is the target value of (X, Y, Z, Wx, Wy, Wz). err is the deviation between the target value ref and the position and orientation P.

[0058] The movable element attitude control function 403 calculates the force T to be applied to the movable element 101 in order to achieve the target value ref, based on the magnitude of the deviation err, the change in the deviation err, and the integrated value of the deviation err. The coil current calculation function 404 calculates the coil current I to be applied to the coil 202 in order to apply the force T to be applied to the movable element 101, based on the force T to be applied and the position and attitude P. When the coil current I thus calculated is applied to the coil 202, the force T acts on the movable element 101, and the position and attitude P change to the target value ref.

[0059] Furthermore, the integrated controller 301 can control the force T applied to the movable element 101 by executing processing using the force control function 605. The force control function 605 calculates the manipulated amount D to the target value ref from the difference between the force T applied to the movable element 101 and the force command value Tref. The force command value Tref is composed of Tx', Ty', Tz', Twx', Twy', and Twz' for the 6-axis components (Tx, Ty, Tz, Twx, Twy, Twz) of the force T. Tx' is the command value of Tx, Ty' is the command value of Ty, Tz' is the command value of Tz, Twx' is the command value of Twx, Twy' is the command value of Twy, and Twz' is the command value of Twz. The movable element attitude control function 403 can calculate the force T that should be applied to the movable element 101, taking the manipulated amount D into consideration. Here, so-called zero-power control can be performed by setting Tz', Twy', and Twz', which are components of the force command value Tref, to zero. With so-called zero-power control, the movable element 101 can be controlled to levitate at a position and attitude where the gravitational force and attractive force acting on the movable element 101 are balanced.

[0060] By configuring the control block in this way, it becomes possible to control the position and orientation P of the movable element 101 to a desired target value ref.

[0061] Next, a control method in which the movable element 101 always moves upward even if a power interruption occurs during the levitation transport of the movable element 101 in the transport system 1 will be explained using Figures 8A to 12. Power interruption includes stopping the application of current to the coil 202.

[0062] First, the equilibrium position of the movable element 101 in the transport system 1 will be explained using Figures 8A to 8D. Figures 8A to 8C are schematic diagrams showing the relationship between the force acting on the movable element 101 in the Z direction and the position of the movable element 101 in the Z direction. Figures 8A to 8C are views of the movable element 101 and the coil 202 of the stator 201 from the X direction. Figure 8D is a graph showing the relationship between the force acting on the movable element 101 in the Z direction and the position of the movable element 101 in the Z direction.

[0063] Figure 8A shows the equilibrium position P0 of the movable element 101 in the Z direction, where the gravitational force Fg acting on the movable element 101 balances the magnetic attractive force Fm acting on the movable element 101. In the movable element 101, a magnetic attractive force FmR acts between the permanent magnet 103 on the R side and the coil 202 opposite it, and a magnetic attractive force FmL acts between the permanent magnet 103 on the L side and the coil 202 opposite it. The attractive force Fm is the resultant force of attractive force FmR and attractive force FmL. At the equilibrium position P0, the magnitude of the gravitational force Fg and the magnitude of the attractive force Fm are equal.

[0064] Figure 8B shows the position P1 in the Z direction of the movable element 101, where the gap between the permanent magnet 103 and the coil 202 is smaller than at the equilibrium position P0. At position P1, the relationship holds that the magnitude of the attractive force Fm is greater than the magnitude of the gravitational force Fg.

[0065] Figure 8C shows the position P2 in the Z direction of the movable element 101, where the gap between the permanent magnet 103 and the coil 202 is larger than at the equilibrium position P0. At position P2, the relationship holds that the magnitude of the attractive force Fm is smaller than the magnitude of the gravitational force Fg.

[0066] The graph in Figure 8D shows the relationship between the force acting on the movable element 101 in the Z direction and the position of the movable element 101, with the horizontal axis representing the position in the Z direction and the vertical axis representing the force in the Z direction. On the horizontal axis, the further to the right, the smaller the gap between the permanent magnet 103 and the coil 202. As shown in Figure 8D, while gravity Fg remains constant even when the position in the Z direction, represented by the horizontal axis, changes, the attractive force Fm is generally proportional to the reciprocal of the square of the distance between the permanent magnet 103 and the coil 202.

[0067] The movable element 101 according to this embodiment can operate in a region where the above proportional relationship holds sufficiently. Therefore, the relationship between the position of the movable element 101 in the Z direction and the attractive force Fm can be treated as an approximate straight line, as shown by the dashed line in Figure 8D. The slope of this approximate straight line, which shows the rate of change of the attractive force Fm with respect to the change in position in the Z direction, is called the magnetic spring Kmag. The magnetic spring Kmag can be determined from the relationship between the actual levitation height of the movable element 101 and the command value Tz′ of the Z component of force T, or it can be calculated in advance by magnetic circuit simulation.

[0068] Furthermore, in the Wx direction, the equilibrium position is the position where the suction force FmR on the R side and the suction force FmL on the L side, as shown in Figure 8A, are balanced. Similarly, in the Wy direction, the equilibrium position is the position where the suction forces before and after the origin Oc, which is the center of gravity of the movable element 101, are balanced.

[0069] In order for the movable element 101 to always move upward due to the suction force Fm even if the power is interrupted during levitation transport, it is necessary to transport at a position Pz in the Z direction, which is the transport height at which the relationship holds that the magnitude of the suction force Fm is greater than the magnitude of gravity Fg, as shown in Figure 8B. During levitation transport, the larger the difference between position Pz and the equilibrium position P0, the greater the coil current I required to maintain the position and attitude of the movable element 101, resulting in higher power consumption. On the other hand, if the difference between position Pz and the equilibrium position P0 is too small, it becomes difficult to guarantee the upward movement of the movable element 101 in the event of power interruption due to the cogging torque, which will be discussed later.

[0070] Next, the cogging torque acting on the movable element 101 during levitation transport will be explained using Figures 9A and 9B. As will be described later, the cogging torque includes a force or torque that causes cogging in at least one of the following directions: the Z direction, the Wy direction which is the rotational direction with the axis along the Y axis as the axis of rotation, and the Wz direction which is the rotational direction with the axis along the Z axis as the axis of rotation. Figure 9A is a schematic diagram showing the attractive force acting on the movable element 101, and is a view of the movable element 101 from the Y direction. In Figure 9A, for the sake of simplicity, the number of permanent magnets 103 installed on the movable element 101 is set to 3. In Figure 9A, the dashed line schematically shows the magnetic attractive force generated between the permanent magnet 103 and the coil 202 (not shown). In the X direction, the attractive force has a waveform with the same period as the arrangement period MagPitch of the permanent magnet 103. Here, the upper limit of the magnitude of the attractive force is set to 1 and the lower limit to 0.

[0071] Figure 9B is an explanatory diagram illustrating the cogging torque acting on the movable element 101 when it is levitated and transported from position X1 to position X4 in the X direction, as shown in Figure 9A. In addition to the movable element 101, Figure 9B also shows the coils 202 of the stators 201a and 201b as viewed from the Y direction. In Figure 9B, the notation for the waveform, upper limit, and lower limit of the suction force is the same as in Figure 9A. In Figure 9B, for ease of explanation, the movable element 101 in positions X1, X2, X3, and X4 is shown shifted in the Z direction, but in reality, it shows the case when the movable element 101 is transported at the same position in the Z direction. Also, in Figure 9B, the dashed line along the Z direction indicates the center coordinates of the core of the coil 202. Furthermore, it is assumed that the coil 202 cannot be placed where structures such as gate valves 100 are located between stators 201a and stators 201b.

[0072] Here, if we denote the coil numbers 202 from 1 to N (where N is an integer greater than or equal to 2), and let Fi be the attractive force of the i-th coil, then the attractive force Fm acting on the movable element 101 is the sum of Fi, so Fm = ΣFi.

[0073] In Figure 9B, the attractive forces Fm at positions X1, X2, X3, and X4 in the X direction are Fm1, Fm2, Fm3, and Fm4, respectively, as follows: X1:Fm1=1+0.25+0.25+1=2.5 X2:Fm2 = 0.75 + 0.75 + 0.75 = 2.25 X3:Fm3=0.25+0.25+1+0.25+0.25=2.0 X4:Fm4=0.75+0.75+0=1.5

[0074] As the movable element 101 moves from position X1 to position X3, the attractive force Fm decreases. Furthermore, at position X4, the attractive force Fm decreases even further because the permanent magnet 103 is applied to the region of the structure 100. This fluctuation in the attractive force Fm is the cogging torque Fcz in the Z direction.

[0075] Furthermore, at positions X2 and X4, an attractive force Fm acts at a position offset from the origin Oc, which is the center of the movable element 101, thus generating a moment Fmwy around the Y axis. This moment Fmwy becomes the cogging torque Fcwy in the Wy direction.

[0076] Furthermore, although not shown in the diagram, if the arrangement of coils 202 and permanent magnets 103 differs between the R and L sides, a cogging torque Fcwx will be generated in the Wx direction as well, based on the same principle as in the Wy direction.

[0077] Figure 10 is a graph showing the cogging torque Fcz in the Z direction and the cogging torque Fcwy in the Wy direction. In the upper and lower graphs shown in Figure 10, the horizontal axis of the upper and lower graphs represents the position of the movable element 101 in the X direction, the vertical axis of the upper graph represents the cogging torque Fcz in the Z direction, and the vertical axis of the lower graph represents the cogging torque Fcwy in the Wy direction.

[0078] As shown in Figure 10, in the X direction, the periods of cogging torque Fcz and Fcwy are determined by the arrangement period MagPitch of the permanent magnet 103, respectively. Furthermore, if there are locations where coils 202 or magnetic materials cannot be placed, such as where structures 100 such as gate valves are present, larger cogging torques Fcz and Fcwy will occur in those locations compared to other locations, as shown in the TransitArea. The interval of the TransitArea is the distance over which the movable element 101 passes through the structures 100, and therefore corresponds to the length of the movable element 101 in the transport direction.

[0079] Next, the method for determining the transport height, taking into account the equilibrium position P0 and cogging torques Fcz, Fcwy, and Fcwx described above, will be explained using Figures 11A and 11B. The transport height is the height of the movable element 101 in the Z direction when the movable element 101 is moved in the X direction while being levitated.

[0080] Figures 11A and 11B are schematic diagrams showing the forces acting on the movable element 101 when it is located at a transport position P1, which is raised from the equilibrium position P0 by an offset amount (Offset) in the Z direction. The transport position P1 is the height position of the movable element 101 in the Z direction. Figure 11A is a side view of the movable element 101 as seen in the Y direction from the side in the transport direction, and Figure 11B is a perspective view of the movable element 101 as seen from diagonally above.

[0081] First, as shown in Figure 11A, gravity Fg and attractive force Fm act on the origin Oc, which is the center of gravity of the movable element 101, as indicated by the solid arrows in the figure. Here, at the transport position P1, the gap between the permanent magnet 103 and the coil 202 is smaller than at the equilibrium position P0, so the relationship Fm > Fg holds. Since the magnitude of the attractive force Fm is proportional to the magnetic spring Kmag mentioned above, the upward force Fz in the Z direction generated by the relationship between the attractive force Fm and gravity Fg at this time is expressed by the following equation (1), as shown in Figure 11B. Fz = Kmag * Offset ... Equation (1)

[0082] On the other hand, as shown in Figures 11A and 11B, the movable element 101 is subjected to cogging torques Fcz in the Z direction, Fcwy in the Wy direction, and Fcwx in the Wx direction, indicated by the dashed arrows in the figures. The magnitude of these cogging torques is determined by the arrangement of the coils 202, the arrangement of the permanent magnets 103, and the mass of the movable element 101. The magnitude of these cogging torques is calculated from command value data of the force T applied to the movable element 101 when the movable element 101 is actually levitated and transported, or it is calculated in advance by magnetic circuit simulation.

[0083] The condition for the movable element 101 to always move upward in the Z direction is that the positions of points A, B, C, and D in Figure 11B must all be displaced upward. In other words, the acceleration of points A, B, C, and D must be upward in the Z direction. Points A, B, C, and D are the four vertices of the movable element 101, which approximates a rectangular planar shape with a pair of opposite sides parallel to the X direction.

[0084] Here, the acceleration due to gravity is g[m / s²] 2 Let M[kg] be the mass of the movable element 101, L[m] be its length in the X direction, and W[m] be its width in the Y direction. Also, let Ix[kgm] be the moment of inertia acting on the movable element 101 about the X axis. 2 ], the moment of inertia around the Y axis is Iy[kgm 2 Let ]. Then the conditions under which the acceleration at points A, B, C, and D is upward in the Z direction are expressed by the following equations (2) to (5). Note that the cogging torques Fcz, Fcwx, and Fcwy change in magnitude depending on the position X of the movable element 101 in the X direction, so they are each expressed as functions of X. The unit of cogging torque Fcz is [N], and the units of cogging torques Fcwx and Fcwy are [Nm]. {(Fz / M+g)+(Fcz(X) / M)+(Fcwx(X) / Ix)*W / 2+(Fcwy(X) / Iy)*L / 2}>0 ··· Formula (2) {(Fz / M+g)+(Fcz(X) / M)+(Fcwx(X) / Ix)*W / 2-(Fcwy(X) / Iy)*L / 2}>0...Equation (3) {(Fz / M+g)+(Fcz(X) / M)-(Fcwx(X) / Ix)*W / 2-(Fcwy(X) / Iy)*L / 2}>0 ··· Formula (4) {(Fz / M+g)+(Fcz(X) / M)-(Fcwx(X) / Ix)*W / 2+(Fcwy(X) / Iy)*L / 2}>0 ··· Formula (5)

[0085] Substituting equation (1) into each of equations (2) through (5) and solving for the offset of the transport position P1 with respect to the equilibrium position P0, we derive equations (6) through (9). Offset>-{g+(Fcz(X) / M)+(Fcwx(X) / Ix)*W / 2+(Fcwy(X) / Iy)*L / 2}*M / Kmag...Equation (6) Offset>-{g+(Fcz(X) / M)+(Fcwx(X) / Ix)*W / 2-(Fcwy(X) / Iy)*L / 2}*M / Kmag...Equation (7) Offset>-{g+(Fcz(X) / M)-(Fcwx(X) / Ix)*W / 2-(Fcwy(X) / Iy)*L / 2}*M / Kmag ··· Formula (8) Offset>-{g+(Fcz(X) / M)-(Fcwx(X) / Ix)*W / 2+(Fcwy(X) / Iy)*L / 2}*M / Kmag ··· Formula (9)

[0086] According to equations (6) to (9) above, the Offset can be determined based on the cogging torques Fcz, Fcwx, and Fcwy. By determining an offset amount Offset that satisfies the conditions of equations (6) to (9) in the entire area of ​​the conveyor path formed by the stator 201, the movable element 101 will always move upward in the Z direction even when the power is cut off. In other words, by setting the Offset to a value greater than the maximum value of the right-hand side of equations (6) to (9) in the entire area of ​​the conveyor path, the movable element 101 will always move upward in the Z direction even when the power is cut off.

[0087] Figure 12 is a graph showing the variation in the values ​​of the right-hand sides of equations (6) to (9), which are the reference values ​​for determining the offset amount in the Z direction of the transport position P1 relative to the equilibrium position P0. In Figure 12, the horizontal axis represents the position of the movable element 101 in the X direction, and the vertical axis represents the values ​​of the right-hand sides of equations (6) to (9). In Figure 12, the solid line represents the value of the right-hand side of equation (6), the dashed line represents the value of the right-hand side of equations (7) and (9), and the dotted line represents the value of the right-hand side of equation (8).

[0088] In the case shown in Figure 12, among the values ​​on the right-hand side of equations (6) to (9), the value on the right-hand side of equation (6) takes the maximum value across the entire region of the transport path. In this case, the offset amount Offset is determined to be a value greater than the maximum value on the right-hand side of equation (6). Note that which of the right-hand sides of equations (6) to (9) takes the maximum value is determined by the relationship between the cogging torques Fcz(X), Fcwx(X), and Fcwy(X).

[0089] The transport position P1 is determined by adding the offset amount Offset calculated by the above method to the equilibrium position P0. The integrated controller 301 then determines the transport position P1, which is the height position at which the movable element 101 is levitated when transporting the movable element 101, based on the cogging torques Fcz, Fcwx, and Fcwy. The integrated controller 301 inputs the determined transport position P1 to the position Z in the Z direction at the target value ref shown in the block diagram of Figure 7 above, and controls the levitation transport of the movable element 101 so that the movable element 101 is located at the transport position P1.

[0090] Thus, the integrated controller 301 moves the movable element 101 in the X direction while levitating it in the Z direction at a transport position P1 higher than the equilibrium position where the magnetic attractive force between the multiple permanent magnets 103 and the multiple coils 202 balances the gravitational force acting on the movable element 101. As a result, even if the power is interrupted during the levitation transport of the movable element 101, the magnetic attractive force between the permanent magnets 103 and the coils 202 will always allow the movable element 101 to move upward, preventing it from falling. The movable element 101 that has moved upward will stop with the stopper 107 in contact with the upper collision prevention roller 207.

[0091] For example, in a vacuum deposition apparatus for organic EL panels, where a substrate is transported by a movable element 101 onto a pattern mask 501 on which a pixel pattern has been formed, the movable element 101 can be prevented from falling even if the power is interrupted due to some abnormality during levitation transport. This prevents the movable element 101 from colliding with the pattern mask 501, and allows the apparatus to maintain a high operating rate.

[0092] [Second Embodiment] A transport system according to a second embodiment of the present invention will now be described. Components similar to those in the first embodiment described above are denoted by the same reference numerals, and their descriptions are omitted or simplified.

[0093] In the first embodiment described above, a method for controlling the levitation transport of the movable element 101 was described using a transport position P1, which is the transport height considering the cogging torque acting on the movable element 101, as the target position in the Z direction. However, the invention is not limited to this method. In this embodiment, a method for controlling the levitation transport of the movable element 101 using a force command value in the Z direction, rather than the transport position, will be described.

[0094] First, we solve equations (2) through (5) for the force Fz in the Z direction, and derive equation (13) from equation (10). Fz>-{g+(Fcz / M)+(Fcwx / Ix)*W / 2+(Fcwy / Iy)*L / 2}*M ··· Formula (10) Fz>-{g+(Fcz / M)+(Fcwx / Ix)*W / 2-(Fcwy / Iy)*L / 2}*M ··· Formula (11) Fz>-{g+(Fcz / M)-(Fcwx / Ix)*W / 2-(Fcwy / Iy)*L / 2}*M ··· Formula (12) Fz>-{g+(Fcz / M)-(Fcwx / Ix)*W / 2+(Fcwy / Iy)*L / 2}*M ··· Formula (13)

[0095] In this embodiment, the force Fz in the Z direction is set to a value greater than the maximum value of the right-hand side of equations (10) to (13) in the entire area within the transport path. As a result, even if the power is cut off, the movable element 101 will always move upward in the Z direction.

[0096] The integrated controller 301 controls the levitation and transport of the movable element 101 by inputting the Fz calculated by the above method to the force command value Tz' in the Z direction (hereinafter referred to as Tref(Z) as appropriate) in the force command value Tref shown in the block diagram of Figure 7 above, with the sign reversed.

[0097] In this way, the integrated controller 301 controls the current flowing through the coils 202 so that the magnetic attractive force acting between the multiple permanent magnets 103 and the multiple coils 202 is greater than predetermined values ​​based on the cogging torques Fcz, Fcwx, and Fcwy. As a result, even if a power interruption occurs during the levitation transport of the movable element 101, the magnetic attractive force between the permanent magnets 103 and the coils 202 will always allow the movable element 101 to move upward, preventing it from falling.

[0098] In other words, in this embodiment, the force control function 605 shown in Figure 7 manipulates the target value ref so that the deviation between the force T applied to the movable element 101 and the force command value Tref becomes zero. Therefore, by inputting -Fz to the force command value Tref(Z), the position Z at the target value ref (hereinafter appropriately referred to as ref(Z)) is manipulated to the transport position P1 described in the first embodiment. As a result, the same effects as in the first embodiment can be obtained in this embodiment as well.

[0099] [Third Embodiment] A transport system according to a third embodiment of the present invention will be described with reference to Figure 13. Components similar to those in the first and second embodiments will be denoted by the same reference numerals, and their descriptions will be omitted or simplified.

[0100] In the first and second embodiments described above, ref(Z) in the target value ref and Tref(Z) in the command value Tref are input as fixed values, but the invention is not limited to this. The target value ref(Z) and command value Tref(Z) can also be input as variable values ​​that differ depending on the position X of the movable element 101 in the X direction. In particular, by inputting variable values ​​that differ as the target value and command value in the Transit Area where the cogging torque fluctuates greatly and in other areas, the power consumption during levitation transport can be kept lower than when fixed values ​​are input.

[0101] Figure 13 is a schematic diagram showing an example of a control block when the target value ref(Z) and command value Tref(Z) are input as different variable values ​​depending on the position X of the movable element 101. The integrated controller 301 executes processing using the command value table function 606 and the target value table function 607.

[0102] The command value table function 606 calculates the command value Tref(Z) of the force in the Z direction corresponding to the position X of the movable element 101, based on the command value table(Z) previously stored in the memory of the coil unit controller 303. The command value table(Z) records the correspondence between position X and the command value Tref(Z) of the force in the Z direction. Note that the command value table(Z) does not necessarily have to be stored in the memory of the coil unit controller 303, but may be stored in the memory of the integrated controller 301, the memory of an external device, etc.

[0103] Furthermore, the target value table function 607 calculates the target value ref(Z) for the Z-direction position corresponding to the position X of the movable element 101, based on the target value table(Z) previously stored in the memory device of the coil unit controller 303. The target value table(Z) records the correspondence between position X and the target value ref(Z) for the Z-direction position. Note that the target value table(Z) does not necessarily have to be stored in the memory device of the coil unit controller 303; it may also be stored in the memory device of the integrated controller 301, the memory device of an external device, etc.

[0104] The command value table (Z) and target value table (Z), which are stored in advance, are determined from command value data of the force when the movable element 101 is actually levitated and transported, or from magnetic circuit simulations.

[0105] In this embodiment, different values ​​are used for the command value Tref(Z) and target value ref(Z) in the Transit Area and other areas in the X direction. Specifically, for the command value Tref(Z), Fz1 is determined from the command value table (Z) and used in the Transit Area, and Fz2 is determined from the command value table (Z) and used in areas other than the Transit Area. Fz1 and Fz2 have the relationship Fz1 > Fz2. Similarly, for the target value ref(Z), P1 is determined from the target value table (Z) and used in the Transit Area, and P2 is determined from the target value table (Z) and used in areas other than the Transit Area. P1 and P2 have the relationship P1 > P2.

[0106] Thus, in this embodiment, the integrated controller 301 can move the movable element 101 in the X direction by changing the height position of the movable element 101 according to the position of the movable element 101 in the X direction.

[0107] Here, the Fz1 of the torque table (Z) used in the Transit Area is the same magnitude as the Fz of the command value Tref(Z) calculated in the second embodiment. In contrast, by changing the command value Tref(Z) to Fz2, which is smaller than Fz1, in areas other than the Transit Area, the force applied to the movable element 101 can be reduced. As a result, compared to the method of inputting a fixed value as the command value Tref(Z) in the second embodiment, it is possible to achieve a reduction in power consumption corresponding to the shaded area in Figure 13.

[0108] On the other hand, P1 in the target value table (Z) used in the Transit Area is the same transport height as the transport position P1 calculated in the first embodiment. In contrast, by changing the target value ref(Z) to P2, which is smaller than P1, in areas other than the Transit Area, the movable element 101 can be transported at a transport position with a small difference from the equilibrium position P0. As a result, compared to the method of inputting a fixed value as the target value ref(Z) in the first embodiment, it is possible to achieve a reduction in power consumption corresponding to the shaded area in Figure 13.

[0109] [Modified Embodiment] The present invention is not limited to the embodiments described above and can be modified in various ways. For example, in the above embodiment, a case in which the transport system 1 is configured with a moving magnet type linear motor in which a permanent magnet 103 is arranged on the movable element 101 and a coil 202 is arranged on the stator 201 has been described, but the system is not limited to this. The transport system 1 can also be configured with a moving coil type linear motor in which a permanent magnet 103 is arranged on the stator 201, which is a second member, and a coil 202 is arranged on the movable element 101, which is a first member. In either case, the second member is movable in the X direction relative to the first member.

[0110] Furthermore, the transport system according to the present invention can be used in a manufacturing system for producing articles such as electronic devices, as a transport system that transports a workpiece together with a movable element to the work area of ​​each process device, such as a machine tool, that performs each work process on the workpiece that will become the article. The process device that performs the work process may be any device, including not only the vapor deposition apparatus described above, but also devices that assemble parts on the workpiece, devices that perform painting, etc. Also, the article to be manufactured is not limited to a specific item, but may be any part. In this way, by using the transport system according to the present invention, a workpiece can be transported to the work area, and an article can be manufactured by performing work processes on the workpiece that has been transported to the work area.

[0111] The present invention can also be realized by supplying a program that implements one or more of the functions of the above-described embodiments to a system or device via a network or storage medium, and by having one or more processors in the computer of that system or device read and execute the program. It can also be realized by a circuit (e.g., an ASIC) that implements one or more functions.

[0112] This embodiment includes the following configurations and methods. (Composition 1) A first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, A second member having a plurality of coils arranged along the first direction so as to be able to face the plurality of magnets which are movable relative to the first member in the first direction, A control unit moves one of the first member and the second member in the first direction while levitating it in a second direction intersecting the first direction, at a height higher than the equilibrium position where the magnetic attractive force acting between the plurality of magnets and the plurality of coils balances the gravitational force acting on one of the first member and the second member; A transport system characterized by having the following features. (Configuration 2) The control unit determines the height position of one of the first member and the second member on which gravity acts, based on the cogging torque. The transport system according to configuration 1, characterized by the features described above. (Composition 3) A first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, A second member having a plurality of coils that are movable relative to the first member in the first direction and are arranged along the first direction so as to face the plurality of magnets, and between which a magnetic attractive force acts, A control unit that determines the height position of one of the first member and the second member based on the cogging torque, and moves one of the first member and the second member whose height position has been determined in the first direction while levitating it in a second direction intersecting the first direction at the height position, A transport system characterized by having the following features. (Composition 4) The control unit controls the current flowing through the coil so that the magnetic attraction force is greater than a predetermined value based on the cogging torque. The transport system according to configuration 2 or 3, characterized by the above. (Composition 5) The cogging torque includes a force or torque that causes cogging in the second direction. The transport system according to configuration 4, characterized by the features described above. (Composition 6) The cogging torque includes a force or torque that causes cogging in at least one of the following directions: a first rotational direction with the axis of rotation along the second direction, and a second rotational direction with the axis of rotation along the third direction intersecting the first and second directions. The transport system according to configuration 5, characterized by the features described herein. (Composition 7) The control unit causes the height position of one of the first member and the second member, on which gravity acts, to differ depending on the position in the first direction. A transport system according to any one of configurations 1 to 6, characterized by the above. (Composition 8) The first member is a movable element, and the second member is a stator. A transport system according to any one of configurations 1 to 7, characterized by the above. (Composition 9) The first member has a lower surface located opposite to the upper surface, and a holding mechanism provided on the lower surface for holding a workpiece. A transport system according to any one of configurations 1 to 8. (Composition 10) The aforementioned workpiece is a substrate. The transport system according to configuration 9, characterized by the features described therein. (Composition 11) The coil comprises a core and a winding wound around the core. A transport system according to any one of configurations 1 to 10, characterized by the features described above. (Method 12) A first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, A control method for a transport system having a second member having a plurality of coils arranged along the first direction so as to be able to face the plurality of magnets which are movable relative to the first member in the first direction, At a height higher than the equilibrium position where the magnetic attractive force acting between the plurality of magnets and the plurality of coils balances the gravitational force acting on one of the first member and the second member, one of the first member and the second member is levitated in a second direction intersecting the first direction while being moved in the first direction. A method for controlling a transport system characterized by the features described herein. (Method 13) A first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, A control method for a transport system having a second member having a plurality of coils that are movable relative to the first member in the first direction and are arranged along the first direction so as to be able to face the plurality of magnets, and between which a magnetic attractive force acts, the second member being moved in the first direction relative to the first member, Based on the cogging torque, the height position of one of the first member and the second member is determined, and at the height position, one of the first member and the second member whose height position has been determined is levitated in a second direction intersecting the first direction while moving in the first direction. A method for controlling a transport system characterized by the features described herein. (Composition 14) A transport system described in any one of configurations 1 to 11, which transports a workpiece using the first member and the second member, A film-forming source for forming a film on the aforementioned workpiece, A film deposition apparatus having a film deposition system. (Method 15) A method for manufacturing articles, which involves manufacturing articles from workpieces, The workpiece is transported by the movable element using the transport system described in any one of configurations 1 to 3. The workpiece conveyed by the movable element is subjected to machining. A method for manufacturing an article, characterized by the following: [Explanation of Symbols]

[0113] 1. Conveying System 3. Control System 7 Vapor deposition equipment 100 structures 101 Mover 102 Glass substrate 103 Permanent Magnets 104 Linear Scale 105 Y Target 106 Z Target 107 Stopper 201 Stator 202 coils 204 Linear Encoder 205 Y sensor 206 Z sensor 207 Upper collision prevention roller 208 Lower collision prevention roller 301 Integrated Controller 302 Coil Controller 303 Coil Unit Controller 304 Sensor Controller 501 Pattern Mask 701 Vapor deposition source

Claims

1. A first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, A second member having a plurality of coils arranged along the first direction so as to be able to face the plurality of magnets which are movable relative to the first member in the first direction, A control unit moves one of the first member and the second member in the first direction while levitating it in a second direction intersecting the first direction, at a height higher than the equilibrium position where the magnetic attractive force acting between the plurality of magnets and the plurality of coils balances the gravitational force acting on one of the first member and the second member, It has, A conveying system characterized in that the difference between a height position higher than the equilibrium position and the equilibrium position is greater than the maximum distance that one of the first member and the second member, on which gravity acts, moves in the second direction due to cogging torque.

2. The control unit controls the current flowing through the coil so that the magnetic attraction force is greater than a predetermined value based on the cogging torque. The transport system according to feature 1.

3. The cogging torque includes a force or torque that causes cogging in the second direction. The transport system according to feature 1.

4. The cogging torque includes a force or torque that causes cogging in at least one of the following directions: a first rotational direction with the axis of rotation along the second direction, and a second rotational direction with the axis of rotation along the third direction intersecting the first and second directions. The transport system according to feature 1.

5. The control unit causes the height position of one of the first member and the second member, on which gravity acts, to differ depending on the position in the first direction. The transport system according to feature 1.

6. The first member is a movable element, and the second member is a stator. The transport system according to any one of claims 1 to 5.

7. The first member has a lower surface located opposite to the upper surface, and a holding mechanism provided on the lower surface for holding a workpiece. The transport system according to any one of claims 1 to 5.

8. The aforementioned workpiece is a substrate. The transport system according to feature 7.

9. The coil comprises a core and a winding wound around the core. The transport system according to any one of claims 1 to 5.

10. A first member having an upper surface and a plurality of magnets arranged on the upper surface along a first direction, A control method for a transport system having a second member having a plurality of coils arranged along the first direction so as to be able to face the plurality of magnets which are movable relative to the first member in the first direction, At a height higher than the equilibrium position where the magnetic attractive force acting between the plurality of magnets and the plurality of coils balances the gravitational force acting on one of the first member and the second member, one of the first member and the second member is levitated in a second direction intersecting the first direction while being moved in the first direction. A method for controlling a transport system, characterized in that the difference between a height position higher than the equilibrium position and the equilibrium position is greater than the maximum distance that one of the first member and the second member, on which gravity acts, moves in the second direction due to cogging torque.

11. A transport system according to any one of claims 1 to 5, wherein a workpiece is transported by the first member and the second member, A film-forming source for forming a film on the aforementioned workpiece, A film deposition apparatus having a film deposition system.

12. A method for manufacturing articles, which involves manufacturing articles from workpieces, The workpiece is transported by a movable element using the transport system described in any one of claims 1 to 5. A method for manufacturing an article, characterized by performing processing on the workpiece conveyed by the movable element.

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