Shower plate, shower method and processing apparatus
The shower plate design with a transition passage buffer stabilizes air pressure, enhancing gas flow uniformity and film thickness consistency in atomic layer deposition systems.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- JIANGSU MICROVIA NANO EQUIP TECH CO LTD
- Filing Date
- 2023-12-06
- Publication Date
- 2026-07-24
AI Technical Summary
Existing shower plates in atomic layer deposition systems exhibit non-uniform gas flow rates, leading to inconsistencies in film thickness distribution within the processing cavity.
A shower plate design with a gas distribution system comprising a main gas inlet passage, transition passage, and shower passage, where the transition passage acts as a buffer to stabilize air pressure, ensuring consistent gas flow rates through multiple connecting passages and shower holes.
The uniformity of process gas distribution within the processing cavity is improved, resulting in more consistent film thickness across the substrate.
Smart Images
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Abstract
Description
Technical Field
[0005] , ,
[0001] This application claims the priority of a Chinese patent application filed with the China National Intellectual Property Administration on December 15, 2022, with the application number 202211612666.3 and the title of the invention "Shower Plate, Shower Method and Processing Apparatus", and all of its contents are incorporated herein by reference.
[0002] This application relates to the technical field of vacuum film deposition, and particularly to a shower plate, a shower method and a processing apparatus.
Background Art
[0003] In the industrial production process, it is usually necessary to shower a specific process gas into the processing cavity by means of a shower plate so as to promote the corresponding reaction and achieve a specific production purpose. For example, atomic layer deposition (ALD) technology is a thin film deposition technology based on surface chemical vapor reaction, which can plate a substance on the substrate surface in the form of a single atomic film, and can accurately control the thickness and uniformity of the deposited thin film within the range of the atomic layer thickness. Due to its advantages, atomic layer deposition technology has already been widely applied in fields such as semiconductors and photovoltaic cells. When an atomic layer deposition film forming apparatus performs a film forming operation, it is necessary to first introduce a process gas into the reaction cavity by means of a shower plate, thereby causing a film forming reaction.
[0004] However, due to structural limitations, there are significant differences in the gas flow rates in different regions of the existing shower plate, which deteriorates the uniformity of the distribution of the process gas entering the processing cavity. For the atomic layer deposition film forming process, the non-uniform distribution of the process gas reduces the uniformity of the film thickness.
Summary of the Invention
Problems to be Solved by the Invention
[0005] Therefore, the present invention has been made in view of the above problems, and aims to provide a shower plate, a shower method, and an apparatus that can improve the uniformity of the distribution of process gas within the processing cavity. [Means for solving the problem]
[0006] A shower plate comprising a plate body having a gas discharge surface, wherein a gas distribution system is formed within the plate body, the gas distribution system comprising a main gas inlet passage, a transition passage and a shower passage, wherein the shower passage has a plurality of shower holes formed along its extending direction to the gas discharge surface, and the shower passage communicates with the main gas inlet passage via the transition passage.
[0007] In one embodiment, both the transition passage and the shower passage are provided in multiples, and there is a one-to-one correspondence between the multiple transition passages and the multiple shower passages, each shower passage is connected to a corresponding transition passage via multiple connecting passages, the multiple connecting passages are arranged at intervals along the extending direction of the shower passages, and the main gas inlet passage is connected sequentially to the multiple transition passages.
[0008] In one embodiment, each of the shower passages has an elongated shape and extends along a first direction, and a plurality of the shower passages are spaced apart along a second direction perpendicular to the first direction.
[0009] In one embodiment, each of the transition passages has an elongated shape and extends along the first direction, and each of the transition passages and the corresponding shower passages are spaced apart along a third direction perpendicular to the first and second directions.
[0010] In one embodiment, the main gas inlet passage has an elongated shape and extends along the second direction.
[0011] In one embodiment, the main gas inflow passage is sequentially connected to the intermediate portions of a plurality of transition passages.
[0012] In one embodiment, the communication point between the main gas inflow passage and each of the transition passages is offset toward one end of the transition passage with respect to the midpoint of the transition passage.
[0013] In one embodiment, the inner diameter of the transition passage is such that the inner diameter on the side opposite to the center of the communication point is smaller than the inner diameter on the side facing the center of the communication point.
[0014] In one embodiment, the point of communication between the main gas inflow passage and each of the transition passages is located at the midpoint of the transition passage.
[0015] In one embodiment, the number of connecting passages is the same on both sides of the communication point along the first direction.
[0016] In one embodiment, gas inlets are provided at both ends of the main gas inflow passage in the direction of extension.
[0017] In one embodiment, the main gas inflow passage includes an introduction passage, a branch passage extending along the first direction, and two outlet passages extending along the second direction, wherein the introduction passage communicates with the intermediate portion of the branch passage, the two outlet passages each communicate with both ends of the branch passage, one of the two outlet passages sequentially communicates with one end of a plurality of transition passages, and the other outlet passage sequentially communicates with the other end of the plurality of transition passages.
[0018] In one embodiment, the point of communication between the introduction passage and the branch passage is offset toward one end of the branch passage with respect to the midpoint of the branch passage.
[0019] In one embodiment, the inner diameter of the branch passage is such that the inner diameter on the side opposite to the center of the communication point is smaller than the inner diameter on the side facing the center of the communication point.
[0020] In one embodiment, the point of communication between the introduction passage and the branch passage is located at the midpoint of the branch passage.
[0021] In one embodiment, both the introduction passage and the branch passage are provided in pairs, the two branch passages are arranged at both ends of the plate body along the second direction, one end of the two outlet passages communicates with both ends of one of the two branch passages, and the other end of the two outlet passages communicates with both ends of the other branch passage.
[0022] In one embodiment, at least two of the gas distribution systems are provided within the plate body, and the shower passages of at least two of the gas distribution systems are arranged alternately along the second direction.
[0023] A shower plate comprising a plate body having a gas discharge surface, wherein a gas distribution system is formed within the plate body, the gas distribution system comprising a main gas inlet passage, a transition passage and a shower passage, wherein a plurality of shower holes communicate with the shower passage, each shower hole is spaced apart along the extending direction of the shower passage, each shower hole is extendable to the gas discharge surface, and the shower passage communicates with the main gas inlet passage via the transition passage.
[0024] In one embodiment, both the transition passage and the shower passage are provided in multiple quantities, and there is a one-to-one correspondence between the multiple transition passages and the multiple shower passages, each shower passage is connected to a corresponding transition passage via multiple connecting passages, the multiple connecting passages are arranged at intervals along the extending direction of the shower passages, and the main gas inlet passage is connected sequentially to the multiple transition passages.
[0025] In one embodiment, each of the shower passages has an elongated shape and extends along a first direction, and the plurality of shower passages are provided at intervals along a second direction, and the first direction and the second direction are provided at an angle to each other.
[0026] In one embodiment, each of the transition passages has an elongated shape and extends along the first direction, and each of the transition passages and the corresponding shower passage are provided at intervals along a third direction, and the third direction is provided at an angle to both the first direction and the second direction.
[0027] In one embodiment, the main gas inflow passage has an elongated shape and extends along the second direction.
[0028] In one embodiment, the communication location between the main gas inflow passage and each of the transition passages is offset toward one end of the transition passage with respect to the midpoint of the transition passage.
[0029] In one embodiment, the transition passage includes a first passage portion and a second passage portion located on both sides of the communication location, the first passage portion is shorter in length than the second passage portion, and the inner diameter of the first passage portion is smaller than the inner diameter of the second passage portion.
[0030] In one embodiment, the communication location between the main gas inflow passage and each of the transition passages is located at the midpoint of the transition passage.
[0031] In one embodiment, the number of connection passages is the same on both sides of the transition passage along the first direction of the communication location.
[0032] In one embodiment, gas inlets are provided at both ends in the extending direction of the main gas inflow passage.
[0033] In one embodiment, the main gas inflow passage includes an introduction passage, a branch passage extending along the first direction, and two outlet passages extending along the second direction, wherein the introduction passage communicates with the branch passage, the two outlet passages each communicate with both ends of the branch passage, one of the two outlet passages sequentially communicates with one end of a plurality of transition passages, and the other outlet passage sequentially communicates with the other end of the plurality of transition passages.
[0034] In one embodiment, the point of communication between the introduction passage and the branch passage is offset to one end of the branch passage with respect to the midpoint of the branch passage.
[0035] In one embodiment, the branch passage includes a third passage section and a fourth passage section located on both sides of the communication point, wherein the length of the third passage section is shorter than the length of the fourth passage section, and the inner diameter of the third passage section is smaller than the inner diameter of the fourth passage section.
[0036] In one embodiment, the point of communication between the introduction passage and the branch passage is located at the midpoint of the branch passage.
[0037] In one embodiment, there are two of each of the outlet passages and branch passages, the two branch passages are arranged at both ends of the plate body along the second direction, one end of the two outlet passages communicates with both ends of one of the two branch passages, and the other end of the two outlet passages communicates with both ends of the other of the two branch passages.
[0038] In one embodiment, at least two of the gas distribution systems are provided within the plate body, and the shower passages of at least two of the gas distribution systems are arranged alternately along the second direction.
[0039] A processing apparatus comprising a shower plate and a processing cavity as described in any one of the above preferred embodiments, wherein the shower plate is attached to the processing cavity and the gas discharge surface faces inward towards the processing cavity.
[0040] In the shower plate and processing apparatus described above, the process gas first enters the plate body through the main gas inlet passage, then passes through the transition passage before entering the shower passage, and finally is introduced into the processing cavity from the gas discharge surface through the shower holes. The transition passage acts as a buffer, preventing the air pressure in the shower passage from being directly affected by air pressure fluctuations in the main gas inlet passage, thus maintaining good consistency in the air pressure within the shower passage. Consequently, the gas flow rates ejected from each region of the gas discharge surface after passing through the transition passage become more balanced, thereby improving the uniformity of the process gas distribution within the processing cavity.
[0041] It is a showering method, The steps include introducing the process gas into the transition passage via the main gas inlet passage, The process gas is transferred through the transfer passage and then introduced into a shower passage that is connected to the transfer passage. The process gas that has entered the shower passage is transported along the shower passage and showered onto the processing cavity by a plurality of shower holes arranged along the extending direction of the shower passage.
[0042] In the shower method described above, the process gas is first introduced into the transition passage via the main gas inlet passage, and after passing through the transition passage, it enters the shower passage. The transition passage acts as a buffer, preventing the air pressure in the shower passage from being directly affected by air pressure fluctuations in the main gas inlet passage, thus maintaining good consistency in the air pressure within the shower passage. Consequently, the gas flow rate ejected from the shower holes after passing through the transition passage is more balanced, thereby improving the uniformity of the process gas distribution within the processing cavity.
[0043] To more clearly illustrate the embodiments of this application or the technical concepts in the prior art, the following briefly introduces the drawings necessary for describing the embodiments or the prior art. Clearly, the drawings described below are only a few embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without performing work commensurate with inventive step. [Brief explanation of the drawing]
[0044] [Figure 1] This is a schematic diagram of a partial structure of the processing apparatus in one embodiment of this application. [Figure 2] Figure 1 is a front perspective view of the shower plate in the processing apparatus shown. [Figure 3] Figure 2 is a schematic diagram of the gas distribution system in the shower plate shown. [Figure 4] This is a front perspective view of a shower plate in another embodiment of the present application. [Figure 5] Figure 4 is a schematic diagram of the gas distribution system for the shower plate shown. [Figure 6] This is a schematic flowchart of a shower method in one embodiment of this application. [Modes for carrying out the invention]
[0045] To better understand the above-mentioned objectives, features, and advantages of this application, specific embodiments of this application will be described in detail below with reference to the drawings. In the following description, many specific details will be explained in order to fully understand this application. However, this application can be carried out in many other forms different from the embodiments described herein, and those skilled in the art can make similar improvements without departing from the spirit of this application, and therefore this application is not limited to the specific embodiments disclosed below.
[0046] In the description of this application, the orientations or positional relationships indicated by terms such as "center," "vertical," "horizontal," "length," "width," "thickness," "top," "bottom," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inside," "outside," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" are based on the orientations or positional relationships shown in the drawings and are solely for the purpose of making the description of this application easier to understand and to simplify the description. They do not mean or suggest that the devices or elements mentioned have a specific orientation or must be configured and operated in a specific orientation, and should not be understood as limiting this application.
[0047] Furthermore, the terms "first" and "second" are for descriptive purposes only and should not be understood as signifying or suggesting relative importance or indicating the number of technical features being referred to. Thus, features limited by "first" and "second" may explicitly or implicitly include at least one such feature. In the description of this application, unless otherwise clearly and specifically limited, "multiple" means at least two, for example, two, three, etc.
[0048] In this application, unless otherwise explicitly defined or limited, terms such as “attachment,” “connection,” “connection,” and “fixing” should be interpreted broadly, and may include, for example, a fixed connection, a detachable connection, or a connection that is integrated and, unless otherwise explicitly defined, may be a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, or an internal communication between two elements or an interaction relationship between two elements. Those skilled in the art will be able to understand the specific meaning of the above terms in this application depending on the specific circumstances.
[0049] In this application, unless otherwise explicitly stated or limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or that they are indirectly in contact via an intermediate medium. Furthermore, the first feature being "above," "above," and "top" of the second feature may mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is greater than that of the second feature. The first feature being "below," "below," and "bottom" of the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than that of the second feature.
[0050] When one element is described as being "fixed" or "attached" to another element, it may be directly present in the other element, or there may be an intervening element. When one element is considered to be "connected" to another element, it may be directly connected to the other element, or there may be an intervening element simultaneously. The terms “vertical,” “horizontal,” “up,” “down,” “left,” “right,” and similar expressions used herein are for illustrative purposes only and do not represent only one embodiment.
[0051] Referring to Figure 1, this application provides a processing apparatus 10 and a shower plate 100. The processing apparatus 10 includes a shower plate 100 and a processing cavity 200.
[0052] A vacuum can be formed within the processing cavity 200, and the shower plate 100 has a gas discharge surface 111. The shower plate 100 is attached to the processing cavity 200, and the gas discharge surface 111 faces inward into the processing cavity 200. After the process gas is introduced into the shower plate 100, it is showered into the processing cavity 200 through the shower holes 1231 of the gas discharge surface 111, thereby causing a reaction within the processing cavity 200. For example, an aluminum oxide film is deposited on the surface of a silicon wafer.
[0053] Specifically, in this embodiment, the processing apparatus 10 is an atomic layer deposition apparatus, and therefore, the film deposition reaction can occur after the process gas enters the processing cavity 200. As is clear, the processing apparatus 10 may be applied to other fields.
[0054] Referring together to Figures 2 and 3, the shower plate 100 in one embodiment of this application includes a plate body 110 and a gas distribution system 120.
[0055] The plate body 110 is generally formed from a metal material, and its external contour matches the contour of the processing cavity 200. The gas discharge surface 111 is formed on one side of the plate body 110. The gas distribution system 120 can introduce and distribute process gases, and finally shower the process gases into the processing cavity 200 through the shower holes 1231. Since at least two types of process gases are required during film formation, at least two (generally two) gas distribution systems 120 are provided, and at least two gas distribution systems 120 are independent of each other and have the same structure.
[0056] Each gas distribution system 120 includes a main gas inlet passage 121, a transition passage 122, and a shower passage 123.
[0057] The plate body 110 may be a single-piece molded structure, and the flow path structure of the gas distribution system 120 can be fabricated inside the plate body 110 by drilling holes. Furthermore, the plate body 110 may be constructed by joining two parts, and the flow path structure of the gas distribution system 120 can also be obtained by fabricating grooves in each of the two parts constituting the plate body 110 and then combining them.
[0058] The main gas inlet passage 121 has a gas inlet that can communicate with a gas source, thereby enabling the introduction of process gas. The shower passage 123 is uniformly arranged within the plate body 110. The shower passage 123 has a plurality of shower holes 1231 formed along its extending direction, extending to the gas discharge surface 111. That is, the shower passage 123 has a plurality of interconnected shower holes 1231, each shower hole 1231 is spaced apart along the extending direction of the shower passage 123, and each shower hole 123 is capable of extending to the gas discharge surface 111. The shower passage 123 communicates with the main gas inlet passage 121 via the transition passage 122. Therefore, the process gas introduced into the plate body 110 from the main gas inlet passage 121 can enter the shower passage 123 after passing through the transition passage 122, and is finally showered into the processing cavity 200 by the shower holes 1231. The transition passage 122 acts as a buffer, preventing the air pressure in the shower passage 123 from being directly affected by air pressure fluctuations in the main gas inlet passage 121. Therefore, the air pressure in the shower passage 123 can maintain good consistency. Consequently, the flow velocity of the process gas ejected from each region of the gas discharge surface 111 is well-consistent, and the gas flow rate is more balanced. This improves the uniformity of the distribution of the process gas within the processing cavity 200, and further improves the uniformity of the film thickness.
[0059] Specifically, in this embodiment, both the transition passage 122 and the shower passage 123 are provided in multiples, and there is a one-to-one correspondence between the multiple transition passages 122 and the multiple shower passages 123. Each shower passage 123 communicates with the corresponding transition passage 122 via multiple connecting passages 124, and the multiple connecting passages 124 are arranged at intervals along the extending direction of the shower passage 123. The main gas inlet passage 121 communicates sequentially with the multiple transition passages 122.
[0060] For example, there are 10 transition passages 122 and 10 shower passages 123. Multiple connecting passages 124 between the shower passages 123 and the transition passages 122 may be spaced equally or unevenly, and the number of connecting passages 124 may be 3, 4, 5, or any other number as required by the actual requirements. Multiple shower passages 123 allow the process gas to be showered more uniformly, while multiple transition passages 122 each passing the process gas ensures that each shower passage 123 receives a similar flow rate of process gas. Multiple connecting passages 124 allow the process gas in the transition passages 122 to enter the shower passages 123 simultaneously from multiple different locations, thereby making the distribution of the process gas within the shower passages 123 more uniform.
[0061] The shower passages 123 can take on shapes such as elongated, arc-shaped, or corrugated. Considering the complexity of the molding process, the shower passages 123 in this embodiment have an elongated shape and extend along a first direction. The first direction refers to the left-right direction shown in Figure 2, i.e., the width direction of the plate body 110. Multiple shower passages 123 are provided at intervals along a second direction perpendicular to the first direction. The second direction refers to the up-down direction shown in Figure 2, i.e., the length direction of the plate body 110. The second direction does not have to be perpendicular to the first direction; that is, the second direction may have an angle other than 90 degrees with respect to the first direction, and this is also feasible. The distance between two adjacent shower passages 123 is approximately the same, and by providing multiple shower passages 123 at intervals along the second direction, a uniform arrangement of multiple shower passages 123 within the plate body 110 can be achieved.
[0062] In this embodiment, each transition passage 122 has an elongated shape and extends along the first direction, and each transition passage 122 and the corresponding shower passage 123 are spaced apart along a third direction perpendicular to the first and second directions. The third direction is the direction perpendicular to the drawing plane as shown in Figure 2, i.e., the thickness direction of the plate body 110. The third direction does not have to be perpendicular to the first and second directions; that is, the third direction may have an angle other than 90 degrees with respect to the first and second directions, and this is also feasible.
[0063] With this configuration, the space along the first direction (e.g., the thickness direction) of the plate body 110 can be rationally utilized, and at least two gas distribution systems 120 can be easily arranged within the plate body 110. Furthermore, since the transition passage 122 is parallel to the shower passage 123, the distance between the transition passage 122 and the corresponding shower passage 123 does not change in the direction of extension of the transition passage 122 and the shower passage 123. Therefore, when passing process gas, the process gas in the transition passage 122 can be distributed more evenly into the corresponding shower passage 123.
[0064] Referring again to Figure 2, in this embodiment, the shower passages 123 of at least two gas distribution systems 120 are alternately arranged along the second direction. Specifically, the shower passages 123 of one gas distribution system 120 are located between two shower passages 123 belonging to the same gas distribution system 120. In this way, at least two different types of process gases can be uniformly distributed and reacted sufficiently within the processing cavity 200, which helps to further improve the uniformity of the distribution of process gases within the processing cavity 200.
[0065] Referring again to Figure 3, in this embodiment, the main gas inlet passage 121 has an elongated shape and extends along the second direction. This shortens the flow path of the process gas from the main gas inlet passage 121 to each transition passage 122, allowing the process gas to reach the transition passage 122 quickly and helping to reduce the velocity difference when the process gas enters each transition passage 122, which can occur due to an excessively long flow path.
[0066] In this embodiment, the main gas inlet passage 121 is sequentially connected to the intermediate portions of a plurality of transition passages 122. After the process gas enters the transition passage 122 from the main gas inlet passage 121, it branches out from the intermediate portion toward both ends of the transition passage 122. This makes the distribution of the process gas within the transition passage 122 more uniform, further improves the uniformity of the process gas within the shower passage 123, and ultimately improves the uniformity of the distribution of the process gas within the processing cavity 200.
[0067] Specifically, the point of connection between the main gas inlet passage 121 and the transition passage 122 is generally located between two connecting pipes 124. In this embodiment, the number of connecting passages 124 is the same on both sides along the first direction of the point of connection between the main gas inlet passage 121 and the transition passage 122. For example, if the transition passage 122 is connected to the corresponding shower passage 123 via four connecting passages 124, then two connecting passages 124 are provided on each side of the point of connection between the main gas inlet passage 121 and the transition passage 122. This allows the process gas in the transition passage 122 to enter the corresponding shower passage 123 in a more balanced manner.
[0068] Furthermore, in this embodiment, gas inlets are provided at both ends of the main gas inlet passage 121 in the direction of extension. Therefore, when introducing process gas into the gas distribution system 120, two gas flows can be introduced simultaneously from both ends of the main gas inlet passage 121, and the two gas flows can flow simultaneously into multiple transition passages 122. In this way, the difference in gas flow velocity at the points where the main gas inlet passage 121 and the multiple transition passages 122 connect can be further reduced, the consistency of atmospheric pressure within the multiple transition passages 122 is increased, and this contributes to further improving the uniformity of the distribution of process gas within the processing cavity 200.
[0069] In order for at least two gas distribution systems 120 to achieve distribution within the plate body 110, the main gas inlet passage 121 is typically offset to one side along the width direction of the plate body 110 (i.e., not located in the center). Specifically, in this embodiment, the points of communication between the main gas inlet passage 121 and each transition passage 122 are offset to one end of the transition passage 122 relative to the midpoint of the transition passage 122.
[0070] In this embodiment, the inner diameter of the transition passage 122 is smaller on the side opposite to the center of the communication point than on the side facing the center of the communication point. For convenience of description, the portions of the transition passage 122 located on both sides of the communication point can be called the first passage portion and the second passage portion, respectively. The length of the first passage portion is shorter than the length of the second passage portion. Thus, the first passage portion is located on the side of the transition passage 122 that faces away from the center of the communication point, and the second passage portion is located on the side of the transition passage 122 that faces the center of the communication point.
[0071] In other words, the inner diameter of the transition passage 122 differs at different locations along its extension. As an example shown in Figure 2, if the point where the main gas inlet passage 121 and the transition passage 122 of one of the gas distribution systems 120 connect is offset to the left with respect to the midpoint of the transition passage 122, the inner diameter of the left side of the transition passage 122 (i.e., the first passage section) is smaller than the inner diameter of the right side (i.e., the second passage section). A larger flow rate can be obtained on the side with the larger inner diameter. This makes it possible to achieve a more uniform distribution of process gas within the transition passage 122.
[0072] As is evident, in other embodiments, by optimizing the layout, the communication points between the main gas inlet passage 121 and each transition passage 122 can be located at the midpoint of the transition passage 122.
[0073] Referring together to Figures 4 and 5, in another embodiment, the main gas inlet passage 121 includes an inlet passage 1211, a branch passage 1212, and an outlet passage 1213.
[0074] The introduction passage 1211 has a gas inlet and enables the introduction of process gas. The branch passage 1212 extends along the first direction, and the introduction passage 1211 communicates with the middle portion of the branch passage 1212. Two outlet passages 1213 are provided, both of which extend along the second direction, and each of the two outlet passages 1213 communicates with both ends of the branch passage 1212. One of the outlet passages 1213 sequentially communicates with one end of the multiple transition passages 122, and the other outlet passage 1213 sequentially communicates with the other end of the multiple transition passages 122.
[0075] Specifically, the two outlet passages 1213 are located on the left and right sides of the plate body 110 (see the orientation and positional relationship in Figure 4). The outlet passage 1213 located on the left side communicates with the left end of the multiple transition passages 122, and the outlet passage 1213 located on the right side communicates with the right end of the multiple transition passages 122. After the process gas is introduced through the introduction passage 1211, it is branched in the branching passage 1212 and divided into two, resulting in two airflows. The two branched airflows each pass through the two outlet passages 1213 and enter the transition passage 122 from both ends of the transition passage 122. This further improves the uniformity of the process gas.
[0076] In this embodiment, there are two introduction passages 1211 and two branch passages 1212, the two branch passages 1212 are located at both ends of the plate body 110 along the second direction, one end of the two outlet passages 1213 communicates with both ends of one of the branch passages 1212, and the other end of the two outlet passages 1213 communicates with both ends of the other branch passage 1212. In this way, the gas flows of the two process gases can be introduced into the gas distribution system 120 simultaneously through the two introduction passages 1211. Therefore, the difference in gas flow velocity at the points where the main gas inlet passage 121 and the multiple transition passages 122 communicate can be further reduced, the consistency of pressure within the multiple transition passages 122 is increased, and this contributes to further improving the uniformity of the distribution of the process gas within the processing cavity 200.
[0077] Similarly, in order to enable the arrangement of at least two gas distribution systems 120 within the plate body 110, the introduction passage 1211 is typically offset to one side along the width direction of the plate body 110 (i.e., not located in the center). Specifically, in this embodiment, the point of communication between the introduction passage 1211 and the branch passage 1212 is offset to one end of the branch passage 1212 relative to the midpoint of the branch passage 1212.
[0078] In this embodiment, the inner diameter of the branch passage 1212 is smaller on the side facing away from the center of the connecting point than on the side facing the center of the connecting point. For convenience of description, the parts of the branch passage 1212 located on both sides of the connecting point can be called the third passage section and the fourth passage section, respectively. The length of the third passage section is shorter than the length of the fourth passage section. Thus, the third passage section is located on the side of the branch passage 1212 facing away from the center of the connecting point, and the fourth passage section is located on the side of the branch passage 1212 facing the center of the connecting point.
[0079] In other words, the inner diameter of the branch passage 1212 differs at different points along its extension direction. In the example shown in Figure 4, if the point of communication between the introduction passage 1211 and the branch passage 1212 in one gas distribution system 120 is offset to the left with respect to the midpoint of the branch passage 1212, the inner diameter of the left side of the branch passage 1212 (i.e., the third passage section) is smaller than the inner diameter of the right side (i.e., the fourth passage section). A larger flow rate can be obtained on the side with the larger inner diameter. In this way, a more uniform distribution of process gas can be achieved within the branch passage 1212, allowing the two outlet passages 1213 to obtain process gas at equivalent flow rates.
[0080] As is evident, in other embodiments, by optimizing the layout, the point of connection between the introduction passage 1211 and the branch passage 1212 can also be located at the midpoint of the branch passage 1212.
[0081] Regarding the shower plate 100 and processing apparatus 10 described above, the process gas first enters the plate body 110 from the main gas inlet passage 121, then passes through the transition passage 122 before entering the shower passage 123, and finally is introduced into the processing cavity 200 from the gas discharge surface 111 through the shower holes 1231. The transition passage 122 acts as a buffer, preventing the air pressure in the shower passage 123 from being directly affected by the air pressure fluctuations in the main gas inlet passage 121, and thus the air pressure in the shower passage 123 can maintain good consistency. Consequently, after passing through the transition passage 122, the gas flow rate ejected from each region of the gas discharge surface 111 is more balanced, thereby improving the uniformity of the distribution of the process gas within the processing cavity 200.
[0082] Furthermore, this application provides a showering method which may be implemented by the shower plate 100 or by other showering devices.
[0083] Referring to Figure 6, the shower method in one embodiment of this application includes steps S201 to S203. In step S201, the process gas is introduced into the transition passage via the main gas inlet passage. In step S202, the process gas, after being transferred through the transfer passage, is introduced into a shower passage connected to the transfer passage. In step S203, the process gas that has entered the shower passage is transported along the shower passage and showered into the processing cavity by a plurality of shower holes arranged along the extending direction of the shower passage.
[0084] The main gas inlet has a gas inlet that can communicate with the gas source, thereby enabling the introduction of process gas. The shower passage has multiple shower holes formed along its direction of extension, and the shower passage communicates with the main gas inlet passage via a transition passage. Therefore, the process gas introduced into the plate body from the main gas inlet passage can be introduced into the shower passage after being transferred by the transition passage, and finally showered into the processing cavity by the shower holes. The transition passage acts as a buffer, preventing the air pressure in the shower passage from being directly affected by air pressure fluctuations in the main gas inlet passage, and thus the air pressure in the shower passage can maintain good consistency. Consequently, the flow velocity of the process gas ejected from the shower holes is consistent, the gas flow rate is more balanced, and the uniformity of the distribution of process gas within the processing cavity can be improved.
[0085] The technical features of the embodiments described above can be combined in any way, and for the sake of brevity, not all possible combinations of the technical features in the embodiments described above are described. However, as long as these combinations of technical features are not contradictory, they should be considered to fall within the scope described herein.
[0086] The embodiments described above are merely examples of some embodiments of the present application, and although the descriptions are specific and detailed, they should not be understood as limiting the scope of the patent application. Those skilled in the art should note that some modifications and improvements can be made without departing from the spirit of the present application and that fall within the scope of protection. Therefore, the scope of protection of the patent application shall be as provided for in the appended claims.
Claims
1. A shower plate comprising a plate body having a gas discharge surface, wherein a gas distribution system is formed within the plate body, the gas distribution system comprising a main gas inlet passage, a transition passage and a shower passage, wherein the shower passage has a plurality of shower holes formed along its extending direction to the gas discharge surface, and the shower passage communicates with the main gas inlet passage via the transition passage. A shower plate characterized in that multiple transition passages and shower passages are provided, with a one-to-one correspondence between the multiple transition passages and the multiple shower passages, each shower passage is connected to a corresponding transition passage via multiple connecting passages, the multiple connecting passages are arranged at intervals along the extending direction of the shower passages, and the main gas inlet passage is connected sequentially to the multiple transition passages.
2. The shower plate according to claim 1, characterized in that each of the shower passages has an elongated shape and extends along a first direction, and the plurality of shower passages are provided at intervals along a second direction perpendicular to the first direction.
3. The shower plate according to claim 2, characterized in that each of the transition passages has an elongated shape and extends along the first direction, and each of the transition passages and the corresponding shower passages are spaced apart along a third direction perpendicular to the first and second directions.
4. The shower plate according to claim 2, characterized in that the main gas inlet passage has an elongated shape and extends along the second direction.
5. The shower plate according to claim 4, characterized in that the main gas inflow passage is sequentially connected to the intermediate portions of the plurality of transition passages.
6. The shower plate according to claim 5, characterized in that the communication point between the main gas inlet passage and each of the transition passages is offset to one end of the transition passage with respect to the midpoint of the transition passage.
7. The shower plate according to claim 6, characterized in that the inner diameter of the transition passage is such that the inner diameter of the communication point on the side facing away from the center of the transition passage is smaller than the inner diameter of the communication point on the side facing the center.
8. The shower plate according to claim 5, characterized in that the communication point between the main gas inlet passage and each of the transition passages is located at the midpoint of the transition passage.
9. The shower plate according to claim 6, characterized in that the number of connecting passages is the same on both sides along the first direction of the communication point.
10. The shower plate according to claim 4, characterized in that gas inlets are provided at both ends of the main gas inflow passage in the extending direction.
11. The shower plate according to claim 2, wherein the main gas inlet passage includes an introduction passage, a branch passage extending along the first direction, and two outlet passages extending along the second direction, the introduction passage communicates with the intermediate portion of the branch passage, the two outlet passages each communicate with both ends of the branch passage, one of the two outlet passages sequentially communicates with one end of the plurality of transition passages, and the other outlet passage sequentially communicates with the other end of the plurality of transition passages.
12. The shower plate according to claim 11, characterized in that the point of communication between the introduction passage and the branch passage is offset to one end of the branch passage with respect to the midpoint of the branch passage.
13. The shower plate according to claim 12, characterized in that the inner diameter of the branch passage is smaller on the side of the communication point facing away from the center of the transition passage than the inner diameter of the communication point facing the center.
14. The shower plate according to claim 11, characterized in that the point of communication between the introduction passage and the branch passage is located at the midpoint of the branch passage.
15. The shower plate according to claim 11, characterized in that both the introduction passage and the branch passage are provided in pairs, the two branch passages are arranged at both ends of the plate body along the second direction, one end of the two outlet passages communicates with both ends of one of the two branch passages, and the other end of the two outlet passages communicates with both ends of the other branch passage.
16. The shower plate according to claim 2, wherein at least two gas distribution systems are provided within the plate body, and the shower passages of at least two gas distribution systems are arranged alternately along the second direction.
17. A shower plate comprising a plate body having a gas discharge surface, wherein a gas distribution system is formed within the plate body, the gas distribution system comprising a main gas inlet passage, a transition passage and a shower passage, wherein a plurality of shower holes communicate with each other in the shower passage, each shower hole is spaced apart along the extending direction of the shower passage, each shower hole is extendable to the gas discharge surface, and the shower passage communicates with the main gas inlet passage via the transition passage. A shower plate characterized in that multiple transition passages and shower passages are provided, there is a one-to-one correspondence between the multiple transition passages and the multiple shower passages, each shower passage is connected to a corresponding transition passage via multiple connecting passages, the multiple connecting passages are arranged at intervals along the extending direction of the shower passages, and the main gas inlet passage is connected sequentially to the multiple transition passages.
18. The shower plate according to claim 17, characterized in that each of the shower passages has an elongated shape and extends along a first direction, and a plurality of the shower passages are provided at intervals along a second direction, and the first direction and the second direction are provided at an angle.
19. The shower plate according to claim 18, characterized in that each transition passage has an elongated shape and extends along the first direction, each transition passage and the corresponding shower passage are spaced apart along the third direction, and the third direction is provided at an angle to both the first and second directions.
20. The shower plate according to claim 18, characterized in that the main gas inlet passage has an elongated shape and extends along the second direction.
21. The shower plate according to claim 20, characterized in that the communication point between the main gas inlet passage and each of the transition passages is offset to one end of the transition passage with respect to the midpoint of the transition passage.
22. The shower plate according to claim 21, characterized in that the transition passage includes a first passage portion and a second passage portion located on both sides of the communication portion, the first passage portion is shorter in length than the second passage portion, and the inner diameter of the first passage portion is smaller than the inner diameter of the second passage portion.
23. The shower plate according to claim 20, characterized in that the communication point between the main gas inlet passage and each of the transition passages is located at the midpoint of the transition passage.
24. The shower plate according to claim 21, characterized in that the number of connecting passages is the same on both sides of the transition passage along the first direction of the communication point.
25. The shower plate according to claim 20, characterized in that gas inlets are provided at both ends of the main gas inflow passage in the extending direction.
26. The shower plate according to claim 18, wherein the main gas inlet passage includes an inlet passage, a branch passage extending along the first direction, and two outlet passages extending along the second direction, the inlet passage communicates with the branch passage, the outlet passages each communicate with both ends of the branch passage, one of the two outlet passages sequentially communicates with one end of the plurality of transition passages, and the other outlet passage sequentially communicates with the other end of the plurality of transition passages.
27. The shower plate according to claim 26, characterized in that the point of communication between the introduction passage and the branch passage is offset to one end of the branch passage with respect to the midpoint of the branch passage.
28. The shower plate according to claim 27, characterized in that the branching passage includes a third passage section and a fourth passage section located on both sides of the communication point, the length of the third passage section is shorter than the length of the fourth passage section, and the inner diameter of the third passage section is smaller than the inner diameter of the fourth passage section.
29. The shower plate according to claim 26, characterized in that the point of communication between the introduction passage and the branch passage is located at the midpoint of the branch passage.
30. The shower plate according to claim 26, characterized in that both the outlet passage and the branch passage are provided in pairs, the two branch passages are arranged at both ends of the plate body along the second direction, one end of the two outlet passages communicates with both ends of one of the two branch passages, and the other end of the two outlet passages communicates with both ends of the other of the two branch passages.
31. The shower plate according to claim 18, wherein at least two gas distribution systems are provided within the plate body, and the shower passages of at least two gas distribution systems are arranged alternately along the second direction.
32. An apparatus comprising a shower plate and a processing cavity according to any one of claims 1 to 31, wherein the shower plate is attached to the processing cavity and the gas discharge surface faces inward into the processing cavity.
33. The steps include introducing the process gas into the transition passage via the main gas inlet passage, The process gas is transferred through the transfer passage and then introduced into a shower passage that is connected to the transfer passage. The process gas that has entered the shower passage is transported along the shower passage and showered onto the processing cavity by a plurality of shower holes arranged along the extending direction of the shower passage, A shower method characterized in that multiple transition passages and shower passages are provided, there is a one-to-one correspondence between the multiple transition passages and the multiple shower passages, each shower passage is connected to a corresponding transition passage via multiple connecting passages, the multiple connecting passages are arranged at intervals along the extending direction of the shower passages, and the main gas inlet passage is connected sequentially to the multiple transition passages.