Electrical discharge machining apparatus and method

Abstract

To provide an electric discharge machine and a method of the same.SOLUTION: An electric discharge machine and a method of the same perform a discharge processing procedure on an object to be machined. The electric discharge machine includes a mounting base, and an electric discharge unit. The mounting base mounts the object to be machined. The object to be machined has a machining target area. The electric discharge unit performs an electric discharge procedure on the machining target area of the object to be machined, by a machining parameter, through a discharge electrode. The electric discharge unit adjusts an actual output energy value according to a state of change of a discharge frequency or discharge energy during the process of discharge of the discharge processing procedure, and thereby can maintain the discharge processing procedure in a target processing state. The electric discharge machine and the method assists in removing a residue remaining in a working groove by external force to be provided, by using a slag discharge unit, while an insulating sleeve covers the discharge electrode, which can reduce Kerf loss.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a processing apparatus and method, and particularly to an electric discharge machining apparatus and method.

Background Art

[0002] With the rapid development of the semiconductor industry, electrical discharge machining (EDM) technology is often used for the processing of crystal ingots and wafers. Electrical discharge machining is a manufacturing technology that forms a workpiece into a required shape by sparks generated by electrical discharges. By applying a voltage to two electrodes separated by a dielectric material, electrical discharges are generated by a periodically and rapidly changing current to process the above-mentioned workpiece. In electrical discharge machining technology, two electrodes are employed, one of which is referred to as a tool electrode or a discharge electrode, and the other electrode is referred to as a work electrode and is connected to the above-mentioned workpiece. During the process of electrical discharge machining, the discharge electrode does not actually contact the work electrode.

[0003] When the potential difference between the two electrodes increases, the electric field between the two electrodes also increases. When the electric field strength exceeds the dielectric strength, dielectric breakdown occurs, and a current flows through the two electrodes, melting and removing some of the material. When the current stops, new dielectric material flows into the electric field between the electrodes, removing the above-mentioned part of the material and newly providing the insulating effect by the dielectric material. After the current flows, the potential difference between the two electrodes returns to the state before dielectric breakdown. Then, dielectric breakdown can be performed again. Since the above-mentioned discharge process removes some of the material of the workpiece, the distance between the electrode and the workpiece increases. As long as the distance continues to increase until the electric field strength becomes lower than the dielectric strength, the discharge becomes impossible, that is, the electrical discharge machining procedure is interrupted. Therefore, during the feeding process of electrical discharge machining, it is necessary to continuously and immediately adjust (reduce or increase) the above-mentioned distance. However, in the prior art, the above-mentioned distance cannot be directly measured, and adjusting the distance for various workpieces has to rely on the operator's experience.

[0004] Conventional electrical discharge machining (EDM) techniques produce cut surfaces with poor roughness, resulting in numerous cracks that extend in directions other than the cutting direction, leading to unexpected ruptures. In contrast, conventional EDM techniques require clamping the periphery of a crystal ingot using a clamping device, i.e., clamping the sides of the crystal ingot along its radial direction. This prevents rolling and displacement. However, conventional techniques can only cut the crystal ingot exposed outside the clamping device, making it impossible to cut the area where the clamping device and the crystal ingot overlap. Therefore, conventional techniques require stopping the equipment and readjusting its position before another cut can be made.

[0005] Furthermore, with conventional techniques for cutting crystalline ingots, the thickness of the cut wafer is extremely thin, making it prone to bursting. On the other hand, with conventional electrical discharge machining techniques, the discharge electrode is easily adhered to the slag, resulting in uneven discharge (for example, the discharge may stop or some currents may be too high), and both the electrode and the workpiece are susceptible to damage. [Overview of the project] [Problems that the invention aims to solve]

[0006] The main object of the present invention is to provide an electrical discharge machining apparatus and method that can maintain the electrical discharge machining procedure in a planned target machining state by adjusting the actual discharge energy value during the discharge process according to the state of change in the discharge frequency or discharge energy during the discharge process. [Means for solving the problem]

[0007] The electrical discharge machining apparatus according to the present invention is an electrical discharge machining apparatus for performing an electrical discharge machining procedure on at least one workpiece, comprising a base for mounting the workpiece, the workpiece comprising at least one mounting base having at least one target machining area, at least one discharge electrode and a power supply unit, the power supply unit supplying discharge energy to the discharge electrode at a discharge frequency, the electrical discharge machining unit performing an electrical discharge machining procedure on the target machining area of ​​the workpiece via the discharge electrode at at least one machining parameter, and the electrical discharge machining unit adjusting the actual output energy value according to the state of change in discharge frequency or discharge energy during the discharge process of the electrical discharge machining procedure, thereby enabling the electrical discharge machining procedure to be maintained in a target machining state.

[0008] The electrical discharge machining apparatus according to the present invention adjusts the discharge frequency and / or discharge energy supplied from the power supply unit, thereby instantly adjusting the actual output energy value when performing the electrical discharge machining procedure, and maintaining the electrical discharge machining procedure in the target machining state.

[0009] The electrical discharge machining apparatus according to the present invention allows the electrical discharge machining unit to instantly adjust the actual output energy value by adjusting the machining parameters.

[0010] The electrical discharge machining apparatus according to the present invention allows the electrical discharge machining unit to maintain the electrical discharge machining procedure in the target machining state by adjusting the machining parameters according to the internal or external characteristics of the workpiece.

[0011] The electrical discharge machining apparatus according to the present invention has multiple types of machining parameters, and the electrical discharge machining procedure is maintained in the target machining state by selecting and adjusting at least one of these types of machining parameters.

[0012] In the electrical discharge machining apparatus according to the present invention, the target machining state is selected from a group consisting of the cutting speed of the workpiece, the material removal rate, the material loss rate and surface roughness, and the disconnection frequency of the discharge electrode.

[0013] The electrical discharge machining apparatus according to the present invention is configured such that the electrical discharge machining unit performs the electrical discharge machining procedure on the target area of ​​the workpiece at a set temperature, and the set temperature is 100 degrees Celsius or less than 100 degrees Celsius.

[0014] The electrical discharge machining apparatus according to the present invention is configured such that the electrical discharge machining unit performs the electrical discharge machining procedure on the target area of ​​the workpiece within a certain temperature range, and the workpiece has the lowest resistivity within that temperature range.

[0015] The electrical discharge machining apparatus according to the present invention is configured such that the electrical discharge machining unit performs the electrical discharge machining procedure on the target area of ​​the workpiece in a water solution.

[0016] The electrical discharge machining apparatus according to the present invention uses a semiconductor material as the workpiece.

[0017] The electrical discharge machining apparatus according to the present invention further comprises a mounting base comprising at least one clamp, the clamp having a slit structure, and the clamp fixes the workpiece by applying force to the workpiece along the radial or axial direction.

[0018] In the electrical discharge machining apparatus according to the present invention, the slit structure of the slit is selected from a group consisting of a closed type with no opening, a one-sided opening type, and a double-sided opening type.

[0019] The electrical discharge machining apparatus according to the present invention has a clamp that is of the fixed type or a detachable type, with a one-sided locking structure or a two-sided locking structure, and is for clamping the workpiece to be machined.

[0020] The electric discharge machining apparatus according to the present invention, the slit structure has one or more slits, and each of the slits has the same or different spans.

[0021] The electric discharge machining apparatus according to the present invention, the slit structure has one or more slits, and the distance between adjacent slits is the same or different.

[0022] The electric discharge machining apparatus according to the present invention, the slit structure has at least one slit, and the slit has a non-equidistant type span or an adjustable span.

[0023] The electric discharge machining apparatus according to the present invention, the slit structure has a plurality of slits, and at least two of the plurality of slits communicate with each other.

[0024] The electric discharge machining apparatus according to the present invention, the clamp and the workpiece are partially connected or adhered via a conductor or an insulator.

[0025] The electric discharge machining apparatus according to the present invention, the conductor or the insulator is a solid medium, a soft medium, or an adhesive.

[0026] The electric discharge machining apparatus according to the present invention further includes a slag discharge unit, and the slag discharge unit provides at least one external force to remove residues generated when the discharge electrode performs the electric discharge machining procedure on the workpiece.

[0027] The electric discharge machining apparatus according to the present invention, the external force is one or more selected from the group consisting of an air flow, a water flow, ultrasonic oscillation, piezoelectric oscillation, an attractive force, and a magnetic force.

[0028] The electric discharge machining apparatus according to the present invention, the slag discharge unit further includes a guide structure, and the guide structure guides the external force to a machining groove where the discharge electrode performs the electric discharge machining procedure on the machining target area of the workpiece.

[0029] The electric discharge machining apparatus according to the present invention, the guide structure changes the position and angle for guiding an external force manually or automatically according to the electric discharge electrode that performs the electric discharge machining procedure, and when the electric discharge electrode is performing the electric discharge machining procedure, guides the external force to the electric discharge machining position of the machining groove of the workpiece.

[0030] The electric discharge machining apparatus according to the present invention, the guide structure moves while filling the electric discharge machining position where the electric discharge machining procedure is performed in the machining groove of the machining target area according to the position where the electric discharge electrode moves the machining groove of the machining target area.

[0031] The electric discharge machining apparatus according to the present invention, the guide structure is an external sealed baffle, and the external sealed baffle covers an area where the electric discharge machining procedure is not performed in the machining target area of the workpiece, and moves synchronously in position together with the electric discharge electrode.

[0032] The electric discharge machining apparatus according to the present invention, the guide structure is a comb structure and corresponds to the machining groove in the machining target area of the workpiece.

[0033] The electric discharge machining apparatus according to the present invention, the guide structure automatically moves synchronously with the electric discharge electrode in accordance with the telescopic mechanism and guides the external force.

[0034] The electric discharge machining apparatus according to the present invention, the guide structure adjusts the guide effect of the guide structure according to the sensing result by the sensing element by matching the sensing element.

[0035] The electric discharge machining apparatus according to the present invention further includes a temperature control unit, and the temperature control unit provides a heat source and / or a cooling source when performing the electric discharge machining procedure to directly or indirectly adjust the temperature of the workpiece.

[0036] The electrical discharge machining apparatus according to the present invention uses infrared rays, microwaves, or a heater as the heat source.

[0037] The electrical discharge machining apparatus according to the present invention avoids freezing of the machining environment of the electrical discharge machining unit by using the cooling source in conjunction with an antifreeze agent.

[0038] The electrical discharge machining apparatus according to the present invention includes a temperature control unit equipped with a temperature sensor, which determines whether the machining environment of the workpiece has reached the target temperature and enables the machining environment to be maintained at the target temperature.

[0039] The electrical discharge machining apparatus according to the present invention improves machining efficiency by oxidation, softening, or bursting through the addition of ozone or bubbles to the machining environment of the electrical discharge machining unit.

[0040] In the electrical discharge machining apparatus according to the present invention, the material of the discharge electrode is selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, zinc, nickel, and diamond.

[0041] The electrical discharge machining apparatus according to the present invention has a metal layer inside the discharge electrode, and the discharge electrode has a dielectric material layer or a diamond layer covering the outer surface of the metal layer.

[0042] In the electrical discharge machining apparatus according to the present invention, during the electrical discharge process of the electrical discharge machining procedure, the discharge electrode senses a capacitance value as a capacitance sensing element.

[0043] In the electrical discharge machining apparatus according to the present invention, when there are multiple discharge electrodes and multiple workpieces, the electrical discharge machining procedure has multiple machining feed rates accordingly, and the electrical discharge machining unit sets the slowest of the multiple machining feed rates as the shared machining feed rate.

[0044] In the electrical discharge machining apparatus according to the present invention, the mounting table is a movable mounting table, and the joint machining feed rate is used as the moving speed.

[0045] The electrical discharge machining apparatus according to the present invention has a plurality of discharge electrodes, and each of the discharge electrodes has an independently controlled machining feed rate.

[0046] The electrical discharge machining apparatus according to the present invention has multiple discharge electrodes and workpieces, and each discharge electrode performs the electrical discharge machining procedure on the same or different workpieces.

[0047] The electrical discharge machining apparatus according to the present invention further comprises an insulating sleeve in the electrical discharge machining unit, the insulating sleeve covering the discharge electrode and exposing at least one surface of the discharge electrode in the machining feed direction, the surface being the discharge surface during the discharge process of the discharge electrode.

[0048] In the electrical discharge machining apparatus according to the present invention, the discharge surface exposed by the discharge electrode has a discharge region formed when the discharge is being performed that is basically larger than the cross-sectional area of ​​the insulating sleeve.

[0049] In the electrical discharge machining apparatus according to the present invention, the relative position of the insulating sleeve and the discharge electrode in the machining feed direction of the electrical discharge machining procedure is fixed, but the relative position of the insulating sleeve and the discharge electrode in the tension direction of the discharge electrode is not fixed.

[0050] The electrical discharge machining apparatus according to the present invention comprises an insulating sleeve having a bottom plate and two side walls, the two side walls located at both ends of the bottom plate forming a housing chamber, a chamber formed inside the housing chamber, the chamber housing the discharge electrode, and the housing chamber having an opening that communicates with the chamber, the opening exposing the discharge surface of the discharge electrode located inside the chamber.

[0051] The electrical discharge machining apparatus according to the present invention has an insulating sleeve into which the discharge electrode is fitted along the tension direction of the discharge electrode, and the insulating sleeve has one or more slits, which provide the functions of drainage and scrap discharge during the electrical discharge machining procedure.

[0052] In the electrical discharge machining apparatus according to the present invention, the degree of conformation between the clamping surface of the clamp and the contour of the workpiece changes depending on the degree of clamping between the clamp and the workpiece, and accordingly, the degree of attachment between the clamping surface of the clamp and the contour of the workpiece is changed.

[0053] In the electrical discharge machining apparatus according to the present invention, the power supply unit of the electrical discharge machining unit is configured to be integrated with or separate from the electrical discharge machining apparatus and supplies the power supply for the discharge energy to the workpiece.

[0054] The electrical discharge machining apparatus according to the present invention further includes a non-destructive testing device, which inspects the workpiece before, during, or after the electrical discharge machining procedure.

[0055] The electrical discharge machining apparatus according to the present invention further comprises a vibration measuring unit, and the vibration measuring unit measures the vibration value of the discharge electrode.

[0056] The electrical discharge machining apparatus according to the present invention further comprises a tension measuring unit in the electrical discharge machining unit, and measures the tension value of the discharge electrode using the tension measuring unit.

[0057] The electrical discharge machining method according to the present invention is characterized by comprising the steps of: using the electrical discharge machining apparatus and providing a mounting base; providing a workpiece having a target machining area and being placed on the mounting base; providing an electrical discharge machining unit, the electrical discharge machining unit comprising at least one discharge electrode and a power supply unit, the power supply unit supplying discharge energy to the discharge electrode at a discharge frequency; the electrical discharge machining unit performing an electrical discharge machining procedure on the target machining area of ​​the workpiece via the discharge electrode at machining parameters; and the electrical discharge machining unit adjusting the actual output energy value according to the state of change in discharge frequency or discharge energy during the discharge process of the electrical discharge machining procedure, thereby enabling the electrical discharge machining procedure to be maintained in a target machining state. [Effects of the Invention]

[0058] The electrical discharge machining apparatus and method according to the present invention have the following effects. (1) By adjusting the actual discharge energy value during the discharge process according to the state of change in discharge frequency or discharge energy during the discharge process, the electrical discharge machining procedure can be maintained in the planned target machining state.

[0059] (2) The slag discharge unit can provide external force to assist in the removal of residue remaining in the processed groove.

[0060] (3) The guide structure allows for precise guidance of external forces from the slag discharge unit to the electrical discharge machining position where the electrical discharge machining procedure is being performed.

[0061] (4) The discharge electrode can be a capacitance sensing element, so that the sensed capacitance value can be immediately fed back as a discharge feedback signal.

[0062] (5) The insulating sleeve covers the discharge electrode and exposes the discharge electrode to the discharge surface in the machining feed direction, thereby reducing kerf loss (cutting material loss) and improving the precision of electrical discharge machining. This effectively improves the problem of unexpected damage that can easily occur with conventional discharge electrodes and workpieces.

[0063] (6) Because the insulating sleeve covers the discharge electrode, the discharge electrode will vibrate less, and the external force (e.g., water flow or air flow) for removing slag can be increased, thus achieving a debris removal effect. The insulating sleeve reduces the vibration of the cut workpiece (e.g., wafer), thus reducing the risk of wafer rupture. Furthermore, the insulating sleeve can utilize the external force (e.g., water flow or air flow) for removing slag to reduce the frictional force between the insulating sleeve and the discharge electrode, thereby avoiding damage to the discharge electrode. On the other hand, the insulating sleeve can also provide some heating.

[0064] (7) The insulating sleeve has a crack, which can improve the effectiveness of the electrical discharge machining of the discharge electrode and also provide a function to discharge slag.

[0065] (8) Because the clamp has a slit structure, it can firmly clamp the workpiece and effectively solve the problem in conventional electrical discharge machining where it is not possible to cut the overlapping area between the clamp and the workpiece. Furthermore, the locking structure allows for easy attachment and adjustment.

[0066] (9) The clamp can be connected to or adhered to the workpiece via a buffer member. This effectively avoids the phenomenon of wafers being prone to rupture in conventional crystal ingot cutting techniques.

[0067] To further understand the technical features and achievable technical effects of the present invention, better examples and a detailed description are provided below. [Brief explanation of the drawing]

[0068] [Figure 1] This is a front view showing an electrical discharge machining apparatus according to the present invention, illustrating that a workpiece is placed on a mounting base via a mounting plate. [Figure 2] This is a front view showing an electrical discharge machining apparatus according to the present invention, illustrating that a workpiece is placed on a platform via a clamp. [Figure 3] Figures 3(A) and 3(B) show a top view of an electrical discharge machining apparatus according to the present invention, illustrating that a workpiece is placed on a platform via a clamp, and that the slit span can be adjusted according to the different thicknesses of the spacers. [Figure 4] Figure 4(A) shows a cross-sectional view of the discharge electrode of an electrical discharge machining apparatus according to the present invention, where Figure 4(B) shows that the discharge electrode is composed of a metal layer, Figure 4(C) shows that the discharge electrode is composed of a metal layer and a diamond layer, and Figure 4(C) shows that the discharge electrode is composed of a metal layer and a dielectric material layer. [Figure 5] This is a top view showing that the discharge electrode of the electrical discharge machining apparatus according to the present invention is covered with an insulating sleeve, where Figures 5(A) and 5(C) show a state in which no machining groove has been formed, and Figure 5(B) shows a state in which a machining groove has been formed. [Figure 6] This is a front view showing that an insulating sleeve covers the discharge electrode of the electrical discharge machining apparatus according to the present invention, where Figures 6(A) and 6(C) show a state in which no machining groove has been formed, and Figure 6(B) shows a state in which a machining groove has been formed. [Figure 7] This is a top view showing that the electrical discharge machining apparatus according to the present invention performs the electrical discharge machining procedure inside a tank. [Figure 8] This is a top view showing the state in which the slits of the slit structure of the electrical discharge machining apparatus according to the present invention are in communication with each other. [Figure 9] Figure 9(B) is a top view showing that the slit structure of the electrical discharge machining apparatus according to the present invention is a sealed type without an opening, and that Figure 9(B) has auxiliary holes in addition to Figure 9(A). [Figure 10]The top view shows that the slit structure of the electrical discharge machining apparatus according to the present invention is of the one-sided opening type, and Figures 10(A), 10(B), and 10(C) show configurations in which the clamp is located above and to the side of the mounting base, respectively. [Figure 11] The top view shows that the slit structure of the electrical discharge machining apparatus according to the present invention has a guide groove, and Figures 11(A), 11(B), and 11(C) show configurations in which the clamp is located above and to the side of the mounting base, respectively. [Figure 12] This is a front view showing that the clamp of the electrical discharge machining apparatus according to the present invention has a one-sided locking structure, and Figures 12(A) and 12(B) show two different forms of the clamp, respectively. [Figure 13] This is a front view showing that the clamp of the electrical discharge machining apparatus according to the present invention uses a buffer member to indirectly clamp the workpiece. [Figure 14] Figure 14(A) shows a state in which the clamp of the electrical discharge machining apparatus according to the present invention is clamping a workpiece, where Figure 14(B) shows a state in which the clamp is directly clamping the workpiece, and Figure 14(B) shows a state in which the clamp is indirectly clamping the workpiece. [Figure 15] This is a front view showing that the electrical discharge machining apparatus according to the present invention has a slag discharge unit. [Figure 16] Figure 16(A) and Figure 16(B) are front views showing the slag discharge unit of the electrical discharge machine according to the present invention in a state of discharging slag, with Figures 16(A) and 16(B) showing the slag discharge unit in a different manner. [Figure 17] This is a front view showing that the slag discharge unit of the electrical discharge machining apparatus according to the present invention has a guide structure. [Figure 18] This is a front view showing that the guide structure of the electrical discharge machining apparatus according to the present invention is an external sealed baffle. [Figure 19] This is a front view showing that the guide structure of the electrical discharge machining apparatus according to the present invention is a comb-type structure. [Figure 20] This is a front view showing that the guide structure of the electrical discharge machining apparatus according to the present invention has an arc shape. [Figure 21] This is a front view showing that the guide structure of the electrical discharge machining apparatus according to the present invention is combined with an expansion / contraction mechanism for guiding. [Figure 22] This is a front view showing how a detection element is aligned with the guide structure of an electrical discharge machining apparatus according to the present invention to detect slag discharge. [Modes for carrying out the invention]

[0069] Embodiments of the present invention will be described below with reference to the drawings. The proportions of each component in the drawings of embodiments of the present invention are shown for the purpose of facilitating understanding of the explanation and are not actual proportions. Furthermore, the proportions of the dimensions of the assemblies shown in the figures are for the purpose of explaining each component and its structure, and of course, the present invention is not limited thereto. On the other hand, for the sake of ease of understanding, the same components in the following embodiments will be denoted by the same reference numerals.

[0070] Furthermore, unless otherwise specified, terms used throughout this specification and in the claims have the ordinary meanings of each term used in the art, in the content disclosed herein, and in special contexts. Some terms used to describe the invention are described below or elsewhere in this specification to provide additional guidance to those skilled in the art regarding the description of the invention.

[0071] The use of terms such as "first," "second," and "third" in this article does not indicate a specific order or sequence, nor is it used to limit the present invention. It is used solely to distinguish components or operations described using the same technical terminology.

[0072] Next, if terms such as "include," "equip," "possess," and "contain" are used in this article, they are all open terms. That is, they mean that something includes but is not limited to.

[0073] The electrical discharge machining apparatus and method according to the present invention are for performing an electrical discharge machining procedure on at least one workpiece. In this invention, such an electrical discharge machining apparatus and method can maintain the electrical discharge machining procedure in a predetermined target machining state by improving the electrical discharge machining unit. For example, the electrical discharge machining unit instantly adjusts the actual discharge energy during the discharge process in accordance with the state of change in discharge frequency or discharge energy during the discharge process of the electrical discharge machining procedure. In this invention, the electrical discharge machining procedure can be maintained in a predetermined target machining state by intelligently adjusting the discharge energy (e.g., actual output energy). (For example, maintaining the cutting speed, maintaining the maximum material removal rate (MRR), maintaining no breakage, maintaining the predetermined surface roughness, maintaining the predetermined breakage frequency, or maintaining other conditions). On the other hand, the electrical discharge machining apparatus and method according to the present invention further improve the efficiency of electrical discharge machining by improving the structural design of the electrical discharge machining unit and the mounting base.

[0074] Figure 1 is a front view showing an electrical discharge machining apparatus according to the present invention, showing that the workpiece is placed on the mounting base via a mounting plate. Figure 2 is a front view showing an electrical discharge machining apparatus according to the present invention, showing that the workpiece is placed on the mounting base via a clamp. Figure 3 is a top view showing an electrical discharge machining apparatus according to the present invention, showing that the workpiece is placed on the mounting base via a clamp. Refer to Figures 1 to 3. The electrical discharge machining apparatus 10 according to the present invention comprises at least one mounting base 20 and at least one electrical discharge machining unit 30. The mounting base 20 is for mounting at least one workpiece 100. The mounting base 20 according to the present invention may be a fixed-position mounting base, or a movable or rotatable mounting base. The mounting base 20 according to the present invention may optionally have a mounting plate 21 as shown in Figure 1, or the mounting plate may be omitted as shown in Figures 2 and 3. The above-described form of the mounting base 20 is an example given for illustrative purposes, and the present invention is not limited thereto.

[0075] The workpiece 100 described above is any conductive or semiconductor material, such as a crystal ingot or wafer, and is a material suitable for any electrical discharge machining, and its external shape is, for example, a block-shaped object such as a cylinder, or a sheet-shaped object. The workpiece 100 has at least one processing target area 110, for example, one or more processing target areas 110. Taking semiconductor materials as an example, the workpiece 100 is composed of a semiconductor material selected from the group consisting of, for example, silicon, gallium arsenide, indium phosphide, gallium nitride, and silicon carbide. Taking multiple processing target areas 110 as an example, these processing target areas 110 are selectively located at any position on the workpiece 100 that is suitable for processing. The distance between these processing target areas 110 is not limited to being equal or unequal, as it defines (for example, the same) the thickness, thinning, or cutting interval of the cut workpiece 100, and the numerical value is adjusted according to the requirements of the actual process.

[0076] Refer to Figures 1 to 3. The electrical discharge machining unit 30 comprises at least one discharge electrode 32 and at least one power supply unit 34. The discharge electrode 32 of the electrical discharge machining unit 30 extends along a second direction Y such that the discharge section B of the discharge electrode 32 is parallel to the second direction Y. The second direction Y is perpendicular to the first direction X and the machining feed direction F, respectively. The discharge section B of the discharge electrode 32 and the machining target area 110 of the workpiece 100 undergo reciprocating or periodic relative motion (for example, displaced relative to each other along the second direction Y shown in Figures 1 to 3), thereby performing an electrical discharge machining procedure on the machining target area 110 of the workpiece 100 on the platform 20 with the discharge electrode 32 along the machining feed direction F. The power supply unit 34 of the electrical discharge machining unit 30 supplies power P1 of discharge energy to the discharge electrode 32 and the workpiece 100 during the electrical discharge machining procedure, thereby applying discharge energy to the target machining area 110 of the workpiece 100 via the discharge electrode 32 located in the discharge section B. The power supply unit 34 supplies the power P1 by having one set of power outputs or multiple sets of power outputs. The power supply unit 34 can also be electrically connected in series or parallel with the discharge electrode 32, and can be applied to the present invention as long as it can apply discharge energy to the target machining area 110 of the workpiece 100 via the discharge electrode 32. On the other hand, in the present invention, the power supply unit 34 of the electrical discharge machining unit 30 is provided to be integrated with the electrical discharge machining apparatus 10, for example, or to be separate (detachable), and supplies power P1 to the workpiece 100. To illustrate with an example, the mounting base 20 (and / or together with the clamp 24 on it) and the power supply unit 34 may be integrated or separate (detachable). The mounting base 20 may optionally have a mounting plate 21. In other words, when the mounting base 20 and the clamp 24 on it receive and clamp the workpiece 100, the power P1 is supplied to the workpiece 100 directly via the power supply unit 34, which is provided to be integrated with the mounting base 20 (and / or together with the clamp 24 on it). Alternatively, the workpiece 100 is first received and clamped, and then the power supply unit 34, which is provided as a separate (detachable) unit, is used to supply the above-mentioned power P1 to the workpiece 100.

[0077] The power supply unit 34 of the electrical discharge machining unit 30 supplies discharge energy to the discharge electrode 32 at a discharge frequency, thereby allowing the electrical discharge machining unit 30 to perform an electrical discharge machining procedure on the target machining area 110 of the workpiece 100 on the mounting table 20 along the machining feed direction F, using at least one machining parameter via the discharge electrode 32. For example, it performs an electrical discharge machining procedure such as cutting, thinning, and / or grinding / polishing (EDG) on the target machining area 110 of the workpiece 100. In the present invention, the mounting base 20 is not limited to driving the workpiece 100 to move to the discharge electrode 32 of the electrical discharge machining unit 30, or the electrical discharge machining unit 30 drives the discharge electrode 32 to move to the workpiece 100. The present invention can be applied as long as the discharge electrode 32 of the electrical discharge machining (EDM) unit 30 and the workpiece 100 on the mounting base 20 can move relative to each other along the machining feed direction F. The electrical discharge machining unit 30 according to the present invention is equipped with a processing control component (e.g., a processor) (not shown), which moves the mounting base 20 or drives the discharge electrode 32 to move to the workpiece 100, for example, by driving a servo mechanism (e.g., a stepping motor) (not shown). The fact that the electrical discharge machining unit 30 is equipped with a processing control component and drives the mounting base 20 or the discharge electrode 32 via a servo mechanism is in the prior art, and how the electrical discharge machining unit 30 is equipped with a processing control component and how it is used in conjunction with a servo mechanism is something that can be understood by a person with ordinary skill in the art to which the present invention belongs, so an explanation is omitted here.

[0078] If the processing conditions, such as the structure of the discharge electrode 32 or the material removal rate of the workpiece 100, change during the discharge process of the electrical discharge machining procedure, for example, before the discharge electrode 32 breaks or when the material removal rate decreases, the discharge frequency or discharge energy (e.g., discharge frequency or discharge energy per unit time) during the discharge process of the electrical discharge machining procedure will change. The principle is that before the discharge electrode 32 breaks or when the material removal rate decreases (for example, when the material at the newly cut location of the workpiece 100 is harder or less conductive), the normal discharge frequency decreases and the arcing discharge frequency increases. The above changes in discharge frequency or discharge energy may include, for example, the amount of change in discharge frequency or discharge energy exceeding a predetermined threshold value, or the change in discharge frequency or discharge energy exhibiting a certain trend, such as decreasing over time, increasing over time, sharply increasing, or sharply decreasing, or the ratio between normal discharge and arcing discharge exceeding a predetermined threshold value.

[0079] More specifically, the present invention determines whether a predetermined threshold value has been exceeded by measuring or calculating the change in discharge frequency or discharge energy (e.g., discharge frequency or discharge energy per unit time) during the discharge process of an electrical discharge machining procedure, and if it has been exceeded, it indicates that the machining state of the electrical discharge machining procedure (e.g., cutting speed, material removal rate, discharge electrode integrity, or surface roughness) begins to change. Since the machining parameters of the electrical discharge machining procedure and the internal and external characteristics of the workpiece affect the degree of change in the discharge frequency or discharge energy, the present invention maintains the electrical discharge machining procedure in a planned target machining state (i.e., avoids continuous changes in the machining state) by immediately adjusting the actual output energy value (e.g., actual output energy value per unit time) corresponding to the machining parameters through various adjustment plans, for example, maintaining a planned material removal rate (MRR), maintaining no breaks, maintaining a planned surface roughness, maintaining a planned break frequency, or maintaining other conditions. In this invention, the discharge frequency or discharge energy can be measured or calculated using conventional electrical discharge machining technology, and the details of how to measure or calculate the state of change in the discharge frequency or discharge energy using current electrical discharge machining technology can be understood by anyone with ordinary skill in the technical field to which this invention belongs. Therefore, the theoretical basis for measuring or calculating the discharge frequency or discharge energy, and the explanation of the measurement and calculation methods, have been omitted here.

[0080] In the first type of adjustment plan, the electrical discharge machining unit 30 according to the present invention adjusts machining parameters such as the discharge frequency and / or discharge energy provided by the power supply unit 34, thereby immediately adjusting the actual output energy value corresponding to these machining parameters when performing an electrical discharge machining procedure, and maintaining the electrical discharge machining procedure in the planned target machining state. In this invention, the discharge energy is adjusted, for example, by adjusting the voltage. In the second type of adjustment plan, the electrical discharge machining unit 30 according to the present invention immediately adjusts the actual output energy value by adjusting other machining parameters other than the discharge frequency and / or discharge energy, for example by adjusting the numerical value of the machining parameter. For example, by adjusting the numerical value of the first machining parameter to the numerical value of the second machining parameter, the actual output energy value corresponding to the numerical value of the first machining parameter can be adjusted to the actual output energy value corresponding to the numerical value of the second machining parameter. In the third type of adjustment plan, the actual output energy value is immediately adjusted by combining the first and second types of adjustment plans, that is, by adjusting the discharge frequency and / or discharge energy, and by adjusting the numerical value of the first machining parameter of the other machining parameters to the numerical value of the second machining parameter. The types of machining parameters according to the present invention include one or more of the following: directional parameters, discharge characteristic parameters, debris removal parameters, movement and tension parameters, and vibration parameters. The directional parameter is, for example, the relative machining direction between the discharge electrode and the workpiece. The discharge characteristic parameters include, for example, the discharge frequency and discharge energy, and further include, for example, one or more of the following: peak current (the maximum current flowing between the discharge electrodes during discharge), voltage when the workpiece separates from the discharge electrodes, duration of the discharge pulse, pause time of the discharge pulse, and gap voltage corresponding to the discharge gap. The slag discharge parameter includes the flow rate of the slag discharge liquid supplied to the discharge electrodes. The slag discharge liquid is, for example, water, preferably pure water, and is supplied, for example, between two endpoints of the discharge electrodes. The movement and tension parameters include one or more of the movement speed of the discharge electrodes, the tension of the discharge electrodes, and the vibration of the discharge electrodes. On the other hand, the machining parameters according to the present invention may optionally include the feedback adjustment speed of one or more of the above machining parameters. To illustrate with an example, in the present invention, by performing data analysis on the machining state obtained when different workpieces 100 undergo an electrical discharge machining procedure with a plurality of machining parameters, machining parameters that affect the machining state of different workpieces 100 can be obtained.The different workpieces 100 described above include having differences such as internal properties (e.g., doping concentration, resistivity, defects or flaws) or external properties (e.g., thickness), for example, workpieces having different doping concentrations or resistivity, or workpieces having different thicknesses. In addition, the present invention selectively creates a correspondence table showing the correspondence between the internal and external characteristics of the workpiece, the numerical values ​​and types of processing parameters, the processing state, the discharge frequency, the discharge energy, and the actual output energy value. This allows the present invention to adjust the process by selecting the optimal numerical values ​​or types of processing parameters from the correspondence table according to the desired target result (i.e., the target processing state). In short, the present invention allows the electrical discharge machining procedure to be maintained in the target processing state by selecting and adjusting at least one of the numerical values ​​and types of multiple processing parameters using the correspondence table. The processing state is selected, for example, from a group consisting of the cutting speed of the workpiece 100, the material removal rate, the material loss rate and surface roughness, and the disconnection frequency of the discharge electrode 32. Furthermore, the present invention may selectively perform non-destructive testing on the workpiece 100. This allows the above internal characteristics to be obtained. To illustrate the above internal characteristics as scratches or defects, in the present invention, non-destructive testing may be selectively performed on the workpiece 100 using a non-destructive testing device 80 (e.g., an ultrasonic testing device, an X-ray testing device, or an infrared testing device) before, during, or after performing an electrical discharge machining procedure (e.g., cutting) on ​​the workpiece 100. This allows inspection of the internal state of the workpiece 100 (e.g., a crystal ingot or wafer) before, during, or after cutting (e.g., the location or extent of defects or scratches). This allows for adjustments to be made accordingly, and furthermore, by feeding the above inspection results back to the electrical discharge machining device, optimal machining parameters can be obtained in accordance with this non-destructive testing and one or more of the above machining parameters.

[0081] Next, refer to Figures 1 to 3. In the first embodiment, the two sides A of the discharge electrode 32 of the electrical discharge machining unit 30 according to the present invention are pressed against a fixing member 36. The fixing member 36 is configured, for example, by assembling at least two receiving members 40 and at least two holding members 50, but is not limited thereto. By pressing the two sides A of the discharge electrode 32 against the two receiving members 40, either movable or fixed, the discharge section B of the discharge electrode 32 is suspended in the air, thereby performing the electrical discharge machining procedure on the target machining area 110 of the workpiece 100 via the discharge section B. The holding member 50 is securely connected to the receiving member 40, either detachably or permanently. The fixing member 36 is connected, for example, via the holding member 50 to a motion mechanism (e.g., a stepping motor) (not shown). The motion mechanism drives the fixing member 36 to perform motions such as rotation or movement. The electrical discharge machining unit 30 can drive the motion mechanism, for example via a processing control component, to process in accordance with the servo mechanism, thereby causing the discharge electrode 32 to reciprocate or circulate along the tension direction (Y-axis) and move back and forth along the machining feed direction (F-axis). The discharge electrode 32 of the electrical discharge machining unit 30 according to the present invention has, for example, a constant tension or, for example, an adjustable tension, and the tension of the discharge electrode 32 is adjusted by, for example, the motion mechanism (not shown) which causes two fixed members 36 to be displaced relative to each other, for example, moving closer to each other or away from each other. The electrical discharge machining unit 30 according to the present invention optionally includes a tension measuring unit 38. The tension measuring unit 38 can measure the magnitude of the tension of the discharge electrode 32. The tension measuring unit 38 is, for example, a conventional commercially available tension meter, so its description is omitted here. On the other hand, the present invention may optionally include a vibration measuring unit 39. The vibration measuring unit 39 can measure the vibration value of the discharge electrode 32.

[0082] The external shape of the discharge electrode 32 may be, for example, linear, sheet-like, or various other shapes. There may be, for example, one or more discharge electrodes 32. There may be, for example, one or more workpieces 100. These discharge electrodes 32 may selectively each have independently controlled machining feed rates, and the wire take-up and discharge sets (e.g., fixing members 36) of the discharge electrodes 32 may be independent or shared. Therefore, in the present invention, one or more discharge electrodes 32 may selectively perform an electrical discharge machining procedure on, for example, one or more identical or different workpieces 100, that is, they may perform an electrical discharge machining procedure on one or more machining target areas 110 on the same or different workpieces 100. When one or more discharge electrodes 32 perform an electrical discharge machining procedure on one or more identical or different workpieces 100, the electrical discharge machining procedure has multiple feed rates accordingly. Therefore, the electrical discharge machining unit 30 according to the present invention selectively sets the slowest of these feed rates as the shared feed rate. This allows these discharge electrodes 32 to have a shared feed rate. In other words, when multiple discharge electrodes 32 machine the same workpiece 100, the overall feed rate is determined by the slowest of them. Similarly, when the workpiece 100 is placed on a platform 20 and the platform 20 is a movable platform, the platform 20 uses the above-mentioned shared feed rate as its moving speed. However, the above are merely examples, and the present invention is not limited thereto. In the present invention, when performing an electrical discharge machining procedure, these discharge electrodes 32 may selectively have independently controlled feed rates, thereby allowing these discharge electrodes 32 to have their own feed rates.

[0083] As shown in Figure 4(A), the discharge electrode 32 according to the present invention is composed of a conductive material layer 32a. The material of the conductive material layer 32a is selected from the group consisting of, for example, copper, brass, molybdenum, tungsten, graphite, steel, aluminum, zinc, nickel, and diamond. Alternatively, as shown in Figure 4(B), the inside of the discharge electrode 32 is, for example, a metal layer 32b, and the outer surface of the metal layer 32b is covered with a diamond layer 32c, so that grinding and polishing effects (i.e., grinding and polishing while discharging) can be obtained simultaneously during the discharge process. Alternatively, as shown in Figure 4(C), the inside of the discharge electrode 32 is, for example, a metal layer 32b, and the outer surface of the metal layer 32b is covered with a dielectric material layer 32d. Therefore, during the discharge process, the discharge electrode 32 acts as a capacitance sensing element. This allows for immediate detection of changes in capacitance during the discharge process and provides a signal that senses the capacitance and feeds it back into the discharge. The material of the dielectric material layer 32d is, for example, ceramic or Teflon®, but is not limited to these. The material of the metal layer 32b is selected from the group consisting of, for example, copper, brass, molybdenum, tungsten, steel, aluminum, zinc, and nickel. The thickness of the discharge electrode 32 is preferably less than about 300 μm, and the thickness range is preferably about 30 μm to about 300 μm.

[0084] Furthermore, as shown in Figures 5 to 6, Figures 5(A), 5(C), 6(A), and 6(C) show the state in which the discharge electrode 32 has not formed a machining groove 120 on the workpiece 100, while Figures 5(B) and 6(B) show the state in which the discharge electrode 32 has formed a machining groove 120 on the workpiece 100. The electrical discharge machining unit 30 according to the present invention optionally includes an insulating sleeve 132. The insulating sleeve 132 is made of an electrically insulating material. The insulating sleeve 132 according to the present invention fits the circumferential surface of the discharge electrode 32 along the tension direction of the discharge electrode 32 (i.e., the Y-axis direction). The insulating sleeve 132 is not limited to fitting the circumferential surface of the discharge electrode 32 in a fixed or movable manner, thereby the relative position of the insulating sleeve 132 and the discharge electrode 32 in the tension direction can be fixed or moved relative to each other as required. The insulating sleeve 132 exposes the discharge electrode 32 from at least one surface in the machining feed direction F of the electrical discharge machining procedure, so that the above surface can be the discharge surface 32e during the process in which the discharge electrode 32 performs discharge in the electrical discharge machining procedure. A portion of the insulating sleeve 132 covers the discharge electrode 32, but it is preferable that only the surface of the discharge electrode 32 in the machining feed direction F of the electrical discharge machining procedure is exposed. In this invention, the insulating sleeve 132 covers the periphery of the discharge electrode 32 (i.e., the surface other than the processing feed direction F), and its purpose is to reduce kerf loss (also referred to as material processing loss), thereby effectively reducing the problem in which the conventional discharge electrode 32 and workpiece 100 are prone to unexpected damage. In this invention, the discharge region R formed when the discharge surface 32e to which the discharge electrode 32 is exposed is discharged is substantially larger than the cross-sectional area r of the insulating sleeve 132. This allows the discharge electrode 32 and the insulating sleeve 132 to enter the machining groove 120. In other words, the present invention can be applied as long as the discharge region R is slightly larger than the cross-sectional area r of the insulating sleeve 132. In other words, according to this invention, the precision of electrical discharge machining can be improved, and the problem of the conventional discharge electrode 32 and workpiece 100 being prone to unexpected damage can be avoided. To illustrate with an example, the insulating sleeve 132 comprises, for example, a bottom plate 132a and two side walls 132b. The insulating sleeve 132 is placed, for example, on a fixing member 36 or a support 20 (shown in Figure 2) via the bottom plate 132a, or around the workpiece 100. The two side walls 132b are located at both ends of the bottom plate 132a and constitute a storage chamber 132c. Both ends of the housing chamber 132c are open ends. A chamber is formed inside the housing chamber 132c to house the discharge electrode 32. The housing chamber 132c also has an opening 132d that communicates with the chamber. The insulating sleeve 132 exposes the discharge surface 32e of the discharge electrode 32 located inside the chamber through the opening 132d. In one embodiment, the relative position of the insulating sleeve 132 and the discharge electrode 32 in the machining feed direction F of the electrical discharge machining procedure is, for example, fixed, while the relative position of the insulating sleeve 132 and the discharge electrode 32 in the tension direction of the discharge electrode 32 is, for example, movable. Briefly, the discharge electrode 32 is movably fitted into the insulating sleeve 132, and the insulating sleeve 132 and the discharge electrode 32 move along the machining feed direction F (for example, displaced along the longitudinal direction), but only the discharge electrode 32 is displaced from side to side, while the insulating sleeve 132 is not displaced from side to side. However, the present invention is not limited to these, and in another embodiment, the relative positions of the insulating sleeve 132 and the discharge electrode 32 in the machining feed direction F of the electrical discharge machining procedure and the tension direction of the discharge electrode 32 are all fixed, for example. On the other hand, it is preferable that the insulating sleeve 132 exposes only the surface in the processing feed direction F of the discharge electrode 32. However, the present invention is not limited thereto. For example, the insulating sleeve 132 according to the present invention selectively has one or more cracks 134, as shown in Figures 6(A), 6(B), and 6(C), for example, a plurality of micropores located on the side wall 132b, and the containment tank 132c communicates with the outside through these cracks 134, thereby enabling the function of slag discharge (e.g., drainage or debris discharge) in the electrical discharge machining procedure. The purpose of providing these cracks is to discharge residue or water flow (i.e., the external force F2 generated by the slag discharge unit 64 in Figure 17) and to keep it away from the discharge electrode 32. Therefore, the present invention is not limited to a specific orientation, position, dimensions, or number, and any insulating sleeve 132 that can protect the discharge electrode 32 and provide a slag discharge function can be applied to the present invention.

[0085] Refer to Figures 1 to 3 and Figure 7. The electrical discharge machining unit 30 according to the present invention can perform dry electrical discharge machining on a workpiece 100 in a dry machining environment such as a gas environment or a vacuum environment. In addition, it can also perform wet electrical discharge machining on a workpiece 100 in a wet machining environment by immersing the workpiece 100 in the liquid in the tank 41 or by spraying the workpiece 100 with liquid. The liquid is, for example, a water solution or an electrolyte. In detail, the electrical discharge machining unit 30 according to the present invention performs an electrical discharge machining procedure on a target machining area 110 of a workpiece 100 in a liquid such as a water solution or an electrolyte. As an example, if the liquid is an electrolyte, as shown in Figure 1, the discharge electrode 32 is electrically connected to the cathode of the power supply unit 34, and the workpiece 100 is electrically connected to the anode of the power supply unit 34, so that an electrolytic reaction can be generated simultaneously during the electrical discharge machining procedure. In the present invention, the cathode protection phenomenon of the electrolytic reaction prevents the metal components of the discharge electrode 32 from dissolving in the electrolyte during the electrical discharge machining procedure, thereby reducing the occurrence of breakage of the discharge electrode 32. Due to the electrolytic reaction, hydrogen gas is generated in the target machining area 110 of the workpiece 100 from the water in the electrolyte, and the generation of hydrogen gas bubbles can help remove residue in the machining groove 120, thereby improving the cleaning effect of the workpiece 100. Furthermore, by utilizing the principle that like polarities repel each other, it is possible to prevent negatively charged residues from adhering to the discharge electrode 32 or the machined groove 120.

[0086] The electrical discharge machining unit 30 according to the present invention has a temperature range in which it can perform electrical discharge machining procedures that is, for example, less than or equal to approximately 100 degrees Celsius. That is, the set temperature in which the electrical discharge machining unit 30 according to the present invention can perform electrical discharge machining procedures is any temperature that is less than or equal to approximately 100 degrees Celsius. To explain with an example, the relatively low temperature range applicable to the present invention is, for example, approximately 0 degrees Celsius to approximately 100 degrees Celsius, and also, for example, approximately 22 degrees Celsius to approximately 100 degrees Celsius, and the set temperature is any temperature within this temperature range, for example, room temperature. In this invention, since the required temperature of the machining environment does not exceed 100 degrees Celsius when performing the electrical discharge machining procedure, the present invention further allows the electrical discharge machining procedure to be performed using a machining environment such as a tank 41 containing a water solution. In this way, since it is not necessary to use conventional high-temperature oil solutions, energy consumption can be greatly reduced and convenience can be improved. On the other hand, the electrical discharge machining unit 30 according to the present invention further optionally includes a temperature control unit 33. The temperature control unit 33 can provide a heat source and / or cooling source when performing the electrical discharge machining procedure. The heat source and / or cooling source either directly adjusts the temperature of the workpiece 100, for example, or indirectly adjusts the temperature of the workpiece 100 through various components of the electrical discharge machining apparatus, such as the clamp 24 shown in Figure 2, the guide structure 66 shown in Figure 17, the stand shown in Figure 2, the discharge electrode 32 shown in Figure 2, the plate shown in Figure 1, the insulating sleeve 132 shown in Figure 5, and / or the liquid in the tank 41 shown in Figure 7. This allows the electrical discharge machining procedure to be performed on the workpiece 100 within the above temperature range or set temperature. The temperature control unit 33 includes a heat source, such as an infrared ray, microwave, or heater. The temperature control unit 33 also includes a cooling source, such as a cooler. By selectively using the cooling source in conjunction with an antifreeze, the processing environment of the electrical discharge machining unit 30 (e.g., the water solution described above) can be prevented from freezing. On the other hand, the temperature control unit 33 also includes, for example, a temperature sensor 35. The temperature control unit 33 can detect whether the processing environment of the workpiece 100 has reached a target temperature (e.g., the temperature range or set temperature described above) using the temperature sensor 35. This allows the processing environment to be maintained at this target temperature. Furthermore, in order to further improve processing efficiency, the present invention further adds ozone (e.g., gas phase or liquid phase) or bubbles (e.g., microbubbles) to the processing environment of the electrical discharge machining unit 30 (e.g., the water solution described above) to improve the speed of electrical discharge machining by oxidation, softening, or bursting (e.g., implosion), thereby improving the quality of electrical discharge machining, removing carbides and residues generated on the surface of the discharge electrode 32, and consequently reducing wear of the discharge electrode.

[0087] On the other hand, as shown in Figures 2 and 3, the mounting base 20 of the electrical discharge machining apparatus 10 according to the present invention is optionally equipped with at least one clamp 24. As shown in Figures 2 and 3, the clamp 24 applies force to the workpiece 100 along the radial or axial direction to fix the workpiece 100. The clamp 24 according to the present invention comprises, for example, a first pressing element 23a and a second pressing element 23b. The first pressing element 23a has a first pressing portion 123a, and the second pressing element 23b has a second pressing portion 123b. This presses against both sides of the workpiece 100, for example, on both sides along the radial direction. At least one (for example, both) of the first pressing element 23a and the second pressing element 23b of the clamp 24 according to the present invention has one or more slits 25, forming a slit structure. The span D of the slit 25 is, for example, substantially larger than the width of the discharge electrode 32, so that the discharge electrode 32 can be inserted into the clamp 24 through the slit 25. When the clamp 24 clamps the workpiece 100, the slit 25 accordingly exposes the target machining area 110 of the workpiece 100, and the position of the slit 25 corresponds to the position of the machining groove 120, for example, the slit 25 and the machining groove 120 are distributed along the machining feed direction F. In this invention, by moving the discharge electrode 32 along the slit 25, the electrical discharge machining procedure can be performed on the target machining area 110 of the workpiece 100 clamped by the clamp 24. This makes it possible to form a machining groove 120 in the target machining area 110 of the workpiece 100. The outer shapes of the first pressing portion 123a and the second pressing portion 123b are preferably similar to each other, the same or different, and exhibit shapes such as planar, arcuate, curved, or other shapes, and correspond to the outer shape of the workpiece 100. To illustrate with an example, if the workpiece 100 is a circular crystal ingot, the first pressing element 23a and the second pressing element 23b are pressed against both sides of the workpiece 100 in the radial direction. Furthermore, the outer shapes of the first pressing portion 123a and the second pressing portion 123b are, for example, arc-shaped, and by selectively conforming to the contour of at least one part of the periphery of the workpiece 100, part or all of it, the workpiece 100 can be clamped and fixed more firmly. On the other hand, the degree of contact of the clamp 24 with the workpiece 100 according to the present invention (referred to as the degree of conforming to the workpiece 100) changes, for example, depending on the degree of clamping between the clamp 24 and the workpiece 100. To illustrate with an example, the contour of the clamping surface of the clamp 24 (for example, the surface of the first pressing portion 123a and the second pressing portion 123b) changes, for example, according to the contour of the surface of the workpiece 100, thereby adjusting the degree of conforming between the clamping surface of the clamp 24 and the contour of the periphery of the workpiece 100 according to the degree of clamping. In feasible applications, the outer layer of the clamp 24 is the clamping surface, and the outer layer is a deformable structure such as a soft surface layer or a flexible surface layer, or a deformable structure with resilience. The inner layer of the clamp 24 is a support member, and the support member has a structure that is difficult to deform. As a result, the degree of attachment of the clamp 24 to the workpiece 100 differs before, during, and after the clamp 24 locks the workpiece 100, so that the degree of attachment between the clamping surface of the clamp 24 and the contour of the workpiece 100 can be changed according to the degree of clamping. That is, when the clamp 24 completely locks the workpiece 100, the degree of attachment between the clamping surface of the clamp 24 and the contour of the workpiece 100 (degree of conformality) is highest.

[0088] On the other hand, in the present invention, the clamp 24 has one or more slits 25. These slits 25 are independent of each other, as shown in Figure 3, or at least two slits 25 are in communication with each other, as shown in Figure 8. With this design, the discharge electrode 32 can move from one of the slits 25 to another slit 25. This makes it possible to form machining grooves 120 at multiple different positions, and does not require a structure for attaching and detaching the clamp 24, nor does it require the introduction of a new discharge electrode 32.

[0089] The clamp 24 according to the present invention has a slit structure. The slit structure allows the workpiece 100 to be securely clamped, for example, as shown in Figure 2, the upper and lower ends of the workpiece 100 can be clamped, and the discharge electrode 32 can pass through the slit 25 of the slit structure and perform an electrical discharge machining procedure on the workpiece 100 along the extending direction of the slit 25 to form a machining groove 120, thereby preventing the discharge electrode 32 from damaging the clamp 24. In the present invention, the form of the slit 25 is selected from a group consisting of a sealed type without an opening shown in Figures 9(A) and 9(B), a one-sided opening type shown in Figures 10(A) and 10(B), and a double-sided opening type shown in Figure 3. When the one-sided opening type or double-sided opening type is taken as an example, if the mounting base 20 according to the present invention has corresponding openings on one side or both sides, as shown in Figures 10(A) and 11(A), the discharge electrode 32 will pass through the slit 25 more easily. However, the present invention is not limited thereto, and the mounting base 20 does not have to have corresponding openings on one side or both sides, or the clamp 24 according to the present invention may be located on the side of the mounting base 20 (as shown), for example, as shown in Figures 10(B), 10(C), 11(B), and 11(C). This makes it easier for the discharge electrode 32 to pass through the slit 25. The slit structure according to the present invention is not limited to specific dimensions, materials, number of slit openings, or setting direction, and the mounting base 20 and / or clamp 24 are within the scope of the claims of the present invention as long as they can clamp the workpiece 100 during the electrical discharge machining procedure. In other words, the span of the slits 25 of the slit structure and the distance between multiple slits 25 are not limited to being the same or different from one another. On the other hand, the slit 25 of the clamp 24 according to the present invention is not limited to having equidistant spans. The slit 25 may selectively have unequal spans, as shown in Figures 11(A) and 11(B), or Figure 9(B). For example, the span at the edge of the same slit 25 (e.g., the electrode passing end) is larger than the span at the center of the slit (e.g., the electrical discharge machining end), thereby forming a guide groove 125. The edge of the guide groove 125 may selectively be, for example, an arc-shaped projection as shown in Figure 11(B), or an arc-shaped recess as shown in Figure 11(C). This makes it easier to introduce the discharge electrode 32 into the slit 25 of the clamp 24. On the other hand, when unequal spans are an example, the clamp 24 (slit structure) according to the present invention may selectively have an auxiliary hole 25a communicating with the slit 25. The auxiliary hole 25a is located on one or both sides of the slit 25, for example, as shown in Figure 9(B). As a result, according to the present invention, the discharge electrode 32 can be inserted into the auxiliary hole 25a and moved from the auxiliary hole 25a to the slit 25, making it even easier for the discharge electrode 32 to pass through the slit 25 of the clamp 24. The slit 25 of the clamp 24 according to the present invention is not limited to having a fixed span, and the slit 25 may selectively have an adjustable span. To illustrate with an example, the clamp 24 according to the present invention selectively has at least one spacer 27, as shown in Figure 3, and the spacer 27 is located within the slit 25 of the clamp 24 and presses against the two side walls of the slit 25, respectively, so the span of the slit 25 can be adjusted by changing the thickness of the spacer 27, as shown in Figure 3(A). The purpose of the spacer 27 is to adjust the span of the slit 25, so the length of the spacer 27 is not particularly limited. However, if the length of the spacer 27 extends from the first pressing element 23a to the second pressing element 23b, as shown in Figure 2, it can also ensure the stability of the overall structure of the clamp 24.

[0090] Furthermore, in the present invention, the clamp 24 is not limited to being fixed or detachably positioned on the mounting base 20. Taking a detachable design as an example, the first pressing element 23a and the second pressing element 23b of the clamp 24 are detachably connected to each other by, for example, a lock-in structure 240. This is a one-sided lock structure (for example, the two types of clamp 24 shown in Figures 12(A) and 12(B)), or a two-sided lock structure shown in Figure 2, for example, and the lower second pressing element 23b is also selectively detachably connected to the mounting base 20 by a lock structure 240, for example, as shown in Figure 12. The clamp 24 according to the present invention can detachably clamp the workpiece 100 by the lock structure 240, and the dimensions of the clamp opening of the clamp 24 can also be adjusted according to the dimensions of the workpiece 100. The locking structure 240 comprises, for example, a bolt 242 and a nut 244, as shown in Figures 2 and 12, but is not limited to these. The locking structure 240 according to the present invention falls within the scope of the claims of the present invention if, according to practical requirements, the detachable workpiece 100 can be replaced with any clampable clamp 24, that is, if the effect of detachability can be obtained.

[0091] In the present invention, the clamp 24 may be used in a manner that directly contacts and clamps the workpiece 100, as shown in Figures 2 and 14(A), or it may be used in a manner that indirectly contacts and clamps the workpiece 100, as shown in Figures 13 and 14(B). In the case of using an indirect contact method, for example, the clamp 24 may be connected to the workpiece 100 in part, or adhere to the workpiece 100 in part, via a cushioning member 29. The material of the cushioning member 29 is, for example, a conductor or an insulator, and is, for example, a solid media, a soft media, or an adhesive. For example, the cushioning member 29 is, for example, a conductive or non-conductive adhesive layer, or a conductive (e.g., copper foil) or non-conductive soft pad block. This makes it possible to obtain both a pressing effect and a cushioning effect simultaneously. In the present invention, the cushioning member 29 is selectively fixed to the first pressing element 23a and the second pressing element 23b of the clamp 24, or fixed to the workpiece 100, or detachably positioned between the first pressing element 23a and the workpiece 100 of the clamp 24, and detachably positioned between the second pressing element 23b and the workpiece 100. To illustrate with an example, the clamp 24, for instance, uses copper foil as the buffer member 29. Since the clamp 24 clamps a portion of the workpiece 100 (e.g., a crystal ingot) via the copper foil (e.g., with a thickness of approximately 100 μm), the present invention prevents a portion of the workpiece 100 to be cut (e.g., a wafer) from directly contacting the clamp 24. This effectively avoids the phenomenon of wafers easily bursting, which is common in conventional techniques for cutting crystal ingots.

[0092] Refer to Figure 15. Since residue is generated when the discharge electrode 32 performs the electrical discharge machining procedure on the workpiece 100, the electrical discharge machining unit 30 according to the present invention is further optionally equipped with a slag discharge unit 64. When the electrical discharge machining unit 30 performs an electrical discharge machining procedure on the workpiece 100, the slag removal unit 64 provides one or more external forces F2 to remove residue generated when the discharge electrode 32 applies discharge energy to the workpiece 100. The direction or position of application of the external force F2 from the slag removal unit 64 is adjustable according to the shape of the workpiece 100 so that the direction or position of application of the external force F2 corresponds to the discharge section B of the discharge electrode 32. The slag removal unit 64 is selected from a group consisting of, for example, an airflow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator, an attractive force generator, and a magnetic generator. The external force F2 is selected from a group consisting of, for example, an airflow, a water flow, an ultrasonic oscillator, a piezoelectric oscillator, an attractive force, and a magnetic field. The slag removal unit 64 is not limited to being provided on the fixed member 36 or the base 20, but may also be provided around the discharge section B of the electrode 32. As shown in Figures 15, 16(A), and 16(B), the slag discharge unit 64 is a thrust generator 64a, and for example, it may be a water flow generator such as a water sprayer, or an air flow generator such as an air sprayer and / or a suction force generator 64b (for example, a water supply pump). In this case, the slag discharge unit 64 is provided, for example, on a fixing member 36 or a support 20, or around the workpiece 100. The thrust generator 64a and the suction force generator 64b are located on both sides of the workpiece 100 and generate two different external forces F2 (thrust F21 and suction force F22) in different directions. The thrust generator 64a and the suction force generator 64b suppress and suck up the residue generated during the discharge process of the electrical discharge machining procedure, respectively, and thus can effectively improve the removal of residue. It is preferable that the suction force generator 64b is provided in the path of the residue that is suppressed by the external force F2. Furthermore, the present invention is not limited to the simultaneous use of the thrust generating device 64a and the suction generating device 64b; that is, the present invention may also be used by using either the thrust generating device 64a or the suction generating device 64b alone, and as long as the residue can be effectively removed, it falls within the scope of the claims of the present invention.

[0093] Furthermore, as shown in Figure 17, the slag discharge unit 64 of the electrical discharge machining unit 30 according to the present invention is optionally further equipped with a guide structure 66. The guide structure 66 assists in the slag discharge effect by guiding the external force F2 (e.g., thrust) from the slag discharge unit 64 to the machining groove 120 on the machining target area 110 of the workpiece 100. The guide structure 66 is provided, for example, on the fixing member 36 or the mounting base 20 as shown in Figure 2, or around the workpiece 100. The guide structure 66 is a baffle, for example, an external sealed baffle as shown in Figure 18, which covers an area on the machining target area 110 of the workpiece 100 where the electrical discharge machining procedure is not being performed, and moves in synchronous position with the discharge electrode 32. The guide structure 66 is a comb-shaped structure, as shown in Figures 18 and 19, and has one or more finger baffles corresponding to the machining grooves 120 on the machining target area 110 of the workpiece 100. The cross-sectional shape of the comb-shaped structure may be straight or curved, and may be a curved shape such as the straight shape shown in Figure 17, the arc shape shown in Figure 20, or the U-shape shown in Figure 18.

[0094] In the present invention, the guide structure 66 guides the position or angle of the external force together with the discharge electrode 32 that performs the electrical discharge machining procedure, either manually as shown in Figure 17 or automatically as shown in Figure 18, thereby guiding the external force F2 (e.g., water flow or air flow) from the slag discharge unit 64 to the electrical discharge machining position of the machining groove 120 of the workpiece 100 where the electrical discharge machining procedure is being performed by the discharge electrode 32. On the other hand, the guide structure 66 according to the present invention may also be a filled-type baffle. This moves in position along the machining feed direction F, for example. To illustrate with an example, the guide structure 66 according to the present invention moves along the machining groove 120 of the machining target area 110 of the workpiece 100 together with the discharge electrode 32 that is performing the electrical discharge machining procedure. As a result, it moves along the machining feed direction F, filling in the baffle as it moves to the electrical discharge machining position on the machining groove 120 of the machining target area 110. Refer to Figures 18 and 21. In one embodiment, the guide structure 66 is, for example, a retractable baffle. The guide structure 66 is elastic and expandable in accordance with the retractable mechanism 68, so as to move automatically or manually in synchronously with the discharge electrode 32 to guide the external force F2, and, for example, when the discharge electrode 32 is performing an electrical discharge machining procedure, it automatically maintains a state of approaching or pressing against the machining groove 120 in the machining target area 110 of the workpiece 100, or, for example, approaches or presses against the outside or inside of the machining groove 120 of the workpiece 100 to be pressed. The guide structure 66 (retractable baffle) and the retractable mechanism 68 can be automatically extended and retracted by means of a spring or a retractable rod (for example, a sleeve-type retractable rod), as shown in Figure 21. On the other hand, the guide structure 66 according to the present invention is selectively adapted to the structure shown in Figure 7 during use, so that the guide structure 66 can selectively adjust its position and angle within the slit 25 shown in Figure 7. This provides an effect of guiding the external force.

[0095] Furthermore, as shown in Figure 22, the guide structure 66 according to the present invention can selectively align with the sensing element 69. This allows for the detection of slag discharge status or the guiding status of the external force F2. The sensing element 69 is a sensing component such as a residue count sensor, an airflow sensor, or a water flow sensor, and the angle or position of the guide structure 66 is adjusted based on the sensing result. This makes it possible to obtain excellent slag discharge and guiding effects.

[0096] The electrical discharge machining apparatus and method according to the present invention have the following effects. (1) By adjusting the actual discharge energy value during the discharge process according to the state of change in discharge frequency or discharge energy during the discharge process, the electrical discharge machining procedure can be maintained in the planned target machining state.

[0097] (2) The slag discharge unit can provide external force to assist in the removal of residue remaining in the processed groove.

[0098] (3) The guide structure allows for precise guidance of external forces from the slag discharge unit to the electrical discharge machining position where the electrical discharge machining procedure is being performed.

[0099] (4) The discharge electrode can be a capacitance sensing element, so that the sensed capacitance value can be immediately fed back as a discharge feedback signal.

[0100] (5) The insulating sleeve covers the discharge electrode and exposes the discharge electrode to the discharge surface in the machining feed direction, thereby reducing kerf loss (cutting material loss) and improving the precision of electrical discharge machining. This effectively improves the problem of unexpected damage that can easily occur with conventional discharge electrodes and workpieces.

[0101] (6) Because the insulating sleeve covers the discharge electrode, the discharge electrode will vibrate less, and the external force (e.g., water flow or air flow) for removing slag can be increased, thus achieving a debris removal effect. The insulating sleeve reduces the vibration of the cut workpiece (e.g., wafer), thus reducing the risk of wafer rupture. Furthermore, the insulating sleeve can utilize the external force (e.g., water flow or air flow) for removing slag to reduce the frictional force between the insulating sleeve and the discharge electrode, thereby avoiding damage to the discharge electrode. On the other hand, the insulating sleeve can also provide some heating.

[0102] (7) The insulating sleeve has a crack, which can improve the effectiveness of the electrical discharge machining of the discharge electrode and also provide a function to discharge slag.

[0103] (8) Because the clamp has a slit structure, it can firmly clamp the workpiece and effectively solve the problem in conventional electrical discharge machining where it is not possible to cut the overlapping area between the clamp and the workpiece. Furthermore, the locking structure allows for easy attachment and adjustment.

[0104] (9) The clamp can be connected to or adhered to the workpiece via a buffer member. This effectively avoids the phenomenon of wafers being prone to rupture in conventional crystal ingot cutting techniques.

[0105] The above description is merely illustrative and not limiting. Any equivalent modifications or changes made thereto, which do not depart from the spirit and scope of the present invention, are also included in the claims. [Explanation of symbols]

[0106] 10 Electrical discharge machining equipment 20 mounting platforms 21 Mounting plate 23a First pressing element 23b Second pressing element 24 Clamps 25 slits 25a Auxiliary hole 27 Spacers 29. Cushioning material 30 Electrical Discharge Machining Units 32 Discharge electrode 32a Conductive material layer 32b metal layer 32c Diamond Layer 32d Dielectric material layer 32e discharge surface 33 Temperature control unit 34 Power supply unit 35 Temperature sensor 36 Fixing member 38 Tension Measurement Unit 39. Vibration Measurement Unit 40 Receiving member 41 tanks 50 Retaining member 64 Slag discharge unit 64a Thrust Generator 64b Suction force generating device 66 Guide Structure 68 Telescopic mechanism 69 detection elements 80 Non-destructive testing equipment 100 objects to be processed 110 Processing target area 120 Machining groove 123a First pressing part 123b Second pressing part 125 Guide groove 132 Insulating Sleeve 132a Bottom plate 132b side wall 132c Storage tank 132d aperture 134 Cracks 240 Locking Structure 242 volts 244 nuts A side B Discharge section D span P1 power supply F, X, Y direction F2 external force F21 thrust F22 Suction power R discharge area r cross-sectional area

Claims

1. In an electrical discharge machining apparatus for performing an electrical discharge machining procedure on at least one workpiece having at least one machining target area, At least one platform for placing the aforementioned at least one workpiece, An electrical discharge machining unit comprising at least one discharge electrode and a power supply unit that supplies discharge energy to the at least one discharge electrode at a discharge frequency, wherein the electrical discharge machining procedure is performed on the at least one target area of ​​the at least one workpiece using at least one machining parameter via the at least one discharge electrode, By adjusting the actual output energy value in real time through adjustment of at least one of the discharge frequency and discharge energy from the power supply unit, in accordance with the state of change in the discharge frequency or discharge energy during the discharge process of the aforementioned electrical discharge machining procedure, the electrical discharge machining procedure can be maintained in a target machining state selected from the group consisting of the cutting speed of the workpiece, material removal rate (MRR), wear rate (WR) and surface roughness, and wire breakage frequency (WBF) of the discharge electrode. At least one electrical discharge machining unit, An electrical discharge machining apparatus characterized by comprising the following features.

2. The electrical discharge machining apparatus according to claim 1, characterized in that the electrical discharge machining unit can adjust the actual output energy value in real time by adjusting the machining parameters.

3. The electrical discharge machining apparatus according to claim 2, characterized in that the electrical discharge machining unit can maintain the electrical discharge machining procedure in the target machining state by adjusting the machining parameters based on the internal characteristics of the workpiece, including doping concentration, resistivity, defects or flaws as a semiconductor material of the workpiece, or external characteristics, including the thickness of the workpiece.

4. The electrical discharge machining apparatus according to claim 3, characterized in that there are multiple types of the aforementioned machining parameters, and the electrical discharge machining procedure is maintained in the target machining state by selecting and adjusting at least one of these types of machining parameters.

5. The electrical discharge machining apparatus according to claim 1, characterized in that the electrical discharge machining unit performs the electrical discharge machining procedure on the target area of ​​the workpiece at a set temperature, and the set temperature is 100 degrees Celsius or less than 100 degrees Celsius.

6. The electrical discharge machining apparatus according to claim 1, characterized in that the electrical discharge machining unit performs the electrical discharge machining procedure on the target area of ​​the workpiece, which is a semiconductor material, in the temperature range in which the resistivity of the workpiece is lowest.

7. The electrical discharge machining apparatus according to claim 5 or 6, characterized in that the electrical discharge machining unit performs the electrical discharge machining procedure on the target area of ​​the workpiece in a water solution.

8. The electrical discharge machining apparatus according to claim 1, wherein the mounting base further comprises at least one clamp, the clamp having a slit structure, and the clamp fixes the workpiece by applying force to the workpiece along the radial or axial direction.

9. The electrical discharge machining apparatus according to claim 8, characterized in that the form of the slit in the slit structure is selected from a group consisting of a closed type with no opening, a one-sided opening type, and a double-sided opening type.

10. The electrical discharge machining apparatus according to claim 8, characterized in that the clamp is a fixed type or a detachable type with a one-sided locking structure or a double-sided locking structure, and is for clamping the workpiece.

11. The electrical discharge machining apparatus according to claim 8, characterized in that the slit structure has one or more slits, and each slit has the same or different spans.

12. The electrical discharge machining apparatus according to claim 8, characterized in that the slit structure has one or more slits, and the distances between adjacent slits are the same or different.

13. The electrical discharge machining apparatus according to claim 8, wherein the slit structure has at least one slit, and the slit has a non-equal distance type span or an adjustable span.

14. The electrical discharge machining apparatus according to claim 8, characterized in that the slit structure has a plurality of slits, and at least two of the plurality of slits are in communication with each other.

15. The electrical discharge machining apparatus according to claim 8, characterized in that the clamp and the workpiece are partially connected or adhered to each other via a conductor or insulator.

16. The electrical discharge machining apparatus according to claim 15, characterized in that the conductor or the insulator is a solid media, a soft media, or an adhesive.

17. Furthermore, the electrical discharge machining apparatus according to claim 1, further comprising a slag discharge unit, wherein at least one external force is provided by the slag discharge unit to remove residue generated when the discharge electrode performs the electrical discharge machining procedure on the workpiece.

18. The electrical discharge machining apparatus according to claim 17, characterized in that the external force is one or more selected from the group consisting of airflow, water flow, ultrasonic oscillation, piezoelectric oscillation, attractive force, and magnetic force.

19. The electrical discharge machine according to claim 17, wherein the slag discharge unit further comprises a guide structure, and the guide structure guides the discharge electrode to the machining groove in which the electrical discharge machining procedure is performed with respect to the target machining area of ​​the workpiece, thereby guiding the external force.

20. The electrical discharge machining apparatus according to claim 19, characterized in that the guide structure changes the position and angle of the external force guide manually or automatically depending on the discharge electrode performing the electrical discharge machining procedure, thereby guiding the external force to the electrical discharge machining position of the machining groove of the workpiece when the discharge electrode is performing the electrical discharge machining procedure.

21. The electrical discharge machining apparatus according to claim 19, characterized in that the guide structure moves while filling to the electrical discharge machining position in the machining groove of the target area of ​​the workpiece, according to the position in which the discharge electrode moves in the machining groove of the target area of ​​the workpiece.

22. The electrical discharge machining apparatus according to claim 19, wherein the guide structure is an external sealed baffle, and the external sealed baffle covers an area of ​​the workpiece's target area where the electrical discharge machining procedure is not being performed, and moves synchronously with the discharge electrode.

23. The electrical discharge machining apparatus according to claim 19, characterized in that the guide structure is a comb-shaped structure and corresponds to the machining groove in the machining target area of ​​the workpiece.

24. The electrical discharge machining apparatus according to claim 19, characterized in that the guide structure automatically moves synchronously with the discharge electrode by conforming to the expansion and contraction mechanism, thereby guiding the external force.

25. The electrical discharge machining apparatus according to claim 19, characterized in that the guide structure is aligned with the sensing element, thereby adjusting the guiding effect of the guide structure according to the sensing result by the sensing element.

26. Furthermore, the electrical discharge machining apparatus according to claim 1, 5, or 6, characterized in that it further comprises a temperature control unit, and the temperature control unit provides a heat source and / or a cooling source to directly or indirectly adjust the temperature of the workpiece when performing the electrical discharge machining procedure.

27. The electrical discharge machining apparatus according to claim 26, characterized in that the heat source is infrared radiation, microwaves, or a heater.

28. The electrical discharge machining apparatus according to claim 26, characterized in that the cooling source is used in conjunction with an antifreeze to prevent freezing of the machining environment of the electrical discharge machining unit.

29. The electrical discharge machining apparatus according to claim 26, characterized in that the temperature control unit is equipped with a temperature sensor to determine whether the machining environment of the workpiece has reached the target temperature and to maintain the machining environment at the target temperature.

30. The electrical discharge machining apparatus according to claim 1, characterized in that the machining efficiency is improved by oxidation, softening, or bursting through the addition of ozone or bubbles to the machining environment of the electrical discharge machining unit.

31. The electrical discharge machining apparatus according to claim 1, characterized in that the material of the discharge electrode is selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, zinc, nickel, and diamond.

32. The electrical discharge machining apparatus according to claim 1, characterized in that the interior of the discharge electrode is a metal layer, and the discharge electrode has a dielectric material layer or a diamond layer covering the outer surface of the metal layer.

33. The electrical discharge machining apparatus according to claim 32, characterized in that, during the discharge process of the electrical discharge machining procedure, the discharge electrode senses a capacitance value as a capacitance sensing element.

34. The electrical discharge machining apparatus according to claim 1, characterized in that when there are multiple discharge electrodes and multiple workpieces, the electrical discharge machining procedure has multiple machining feed rates accordingly, and the electrical discharge machining unit uses the slowest of the multiple machining feed rates as the common machining feed rate.

35. The electrical discharge machining apparatus according to claim 34, characterized in that the mounting platform is a movable mounting platform and the joint machining feed rate is the moving speed.

36. The electrical discharge machining apparatus according to claim 1 or 34, characterized in that there are multiple discharge electrodes, and each discharge electrode has an independently controlled machining feed rate.

37. The electrical discharge machining apparatus according to claim 1 or 34, wherein there are multiple discharge electrodes and workpieces, and each discharge electrode performs the electrical discharge machining procedure on the same or different workpieces.

38. The electrical discharge machining apparatus according to claim 1, wherein the electrical discharge machining unit further comprises an insulating sleeve, the insulating sleeve covers the discharge electrode and exposes at least one surface of the discharge electrode in the machining feed direction, the surface being the discharge surface during the discharge process of the discharge electrode.

39. The electrical discharge machining apparatus according to claim 38, characterized in that the discharge surface exposed by the discharge electrode has a discharge region formed when the discharge is being performed that is basically larger than the cross-sectional area of ​​the insulating sleeve.

40. The electrical discharge machining apparatus according to claim 38, characterized in that the relative position of the insulating sleeve and the discharge electrode in the machining feed direction of the electrical discharge machining procedure is fixed, and the relative position of the insulating sleeve and the discharge electrode in the tension direction of the discharge electrode is not fixed.

41. The electrical discharge machining apparatus according to claim 38, wherein the insulating sleeve comprises a bottom plate and two side walls, the two side walls located at both ends of the bottom plate and forming a housing tank, a chamber formed inside the housing tank, the chamber housing the discharge electrode, and the housing tank having an opening communicating with the chamber, the opening exposing the discharge surface of the discharge electrode located inside the chamber.

42. The electrical discharge machining apparatus according to claim 38, characterized in that the insulating sleeve is fitted to the discharge electrode along the tension direction of the discharge electrode, and the insulating sleeve has one or more slits, and the slits provide the functions of drainage and waste discharge during the electrical discharge machining procedure.

43. The electrical discharge machining apparatus according to claim 1, wherein the mounting base further comprises at least one clamp, and the degree of conformation between the clamping surface of the clamp and the contour of the workpiece changes depending on the degree of clamping between the clamp and the workpiece, and the degree of attachment between the clamping surface of the clamp and the contour of the workpiece is changed accordingly.

44. The electrical discharge machining apparatus according to claim 1, characterized in that the power supply unit of the electrical discharge machining unit is integrated with or separate from the electrical discharge machining apparatus and supplies power for the discharge energy to the workpiece.

45. Furthermore, the electrical discharge machining apparatus according to claim 1, characterized in that it is equipped with a non-destructive testing device, and the workpiece is inspected by the non-destructive testing device before, during, or after the electrical discharge machining procedure.

46. The electrical discharge machining apparatus according to claim 1, further comprising a vibration measuring unit, wherein the vibration measuring unit measures the vibration value of the discharge electrode.

47. The electrical discharge machining apparatus according to claim 1, further comprising a tension measuring unit, wherein the tension measuring unit measures the tension value of the discharge electrode.

48. A method of electrical discharge machining using the electrical discharge machining apparatus described in claim 1, The steps include providing at least one mounting platform, The steps include: placing the at least one workpiece onto the at least one support platform; The present invention provides at least one electrical discharge machining unit, The at least one electrical discharge machining unit, The electrical discharge machining procedure is performed on the at least one target area of ​​the at least one workpiece using the at least one machining parameter via the at least one discharge electrode. In accordance with the state of change in the discharge frequency or discharge energy during the discharge process of the aforementioned electrical discharge machining procedure, the actual output energy value is adjusted in real time by adjusting at least one of the discharge frequency and discharge energy from the power supply unit, thereby enabling the electrical discharge machining procedure to be maintained in the target machining state. Steps and A method of electrical discharge machining characterized by including

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