Sensors

Description

[Technical field]

[0001] The present invention relates to sensors, and more particularly to sensors that convert applied force, pressure or vibration into a voltage. [Background technology]

[0002] Haptic and force feedback are important for surgical systems and teleoperation tasks. Haptic and force feedback require the detection of applied force, pressure or vibration.

[0003] Someya and his team worked to create a system that can measure bioinformation by attaching it to human tissue or the surface of the body without interfering with the body's movements. By forming an organic device on an extremely thin polymer film about 1 micrometer thick, they succeeded in creating a flexible organic device that is surprisingly strong despite its ultra-thin size. The soft organic transistor integrated circuit they created, the lightest and thinnest in the world, maintains its electrical performance and is mechanically unbreakable even when the film is folded and compressed to a curvature radius of 5 micrometers. Someya and his team used this organic transistor integrated circuit to successfully create a prototype soft touch sensor system.

[0004] Furthermore, a similar sensor is being researched at Stanford University (see, for example, Non-Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Non-Patent Document 1] Weichen Wang,.. Zhenan Bao, Strain-insensitive intrinsically stretchable transistors and circuits, Nature Electronics volume 4, pages143-150 (2021) Summary of the Invention [Problem to be solved by the invention]

[0006] However, when made thin and flexible, it was difficult to maintain the sensitivity to detect force, pressure or vibration.

[0007] The present invention has been made in view of these circumstances, and aims to make it possible to make a sensor thinner and more flexible, and to detect force, pressure, or vibration with higher sensitivity. [Means for solving the problem]

[0008] A sensor according to one aspect of the present invention includes a first film that generates a voltage when force, pressure or vibration is applied thereto, a plurality of first electrodes in the form of membranes arranged on one side of the first film at a predetermined interval from each other, a second film that generates a voltage when force, pressure or vibration is applied thereto, a second electrode in the form of membrane arranged on one side of the second film, and a dielectric member formed in a thin plate shape made of dielectric rubber and having a hole formed therein, the other side of the first film being affixed to a first side which is a predetermined side, and the other side of the second film being affixed to a second side opposite the first side, and a storage agent that assists in the accumulation of electric charge is filled in the hole formed in the dielectric member, and a voltage corresponding to the force, pressure or vibration applied to part or all of the sensor is generated between any or all of the first electrodes and the second electrode.

[0009] The spacing between the first electrodes provided on one surface of the first film is 30mm It can be less than.

[0010] Between the plurality of first electrodes and the second electrode, A certain voltage is applied, In the hole of the dielectric material Charge Accumulation It is possible.

[0011] A hole formed in the dielectric member may extend from the first surface to the second surface.

[0012] Any of the multiple first electrodes and the second electrode can be arranged between the first film and the second film to sandwich the portion of the dielectric member in which the hole is formed.

[0013] The cross-sectional shape of the hole formed in the dielectric member on the first surface can be made similar to the shape of the surface of the film-like first electrode.

[0014] A first electrode is formed on a dielectric member with a first film sandwiched therebetween. Anaue can be placed in

[0015] Any of the multiple first electrodes and the second electrode can be arranged between the first film and the second film to sandwich a portion of the dielectric member that is separate from the portion in which the hole is formed.

[0017] A plurality of second electrodes may be provided, and each of the second electrodes may be provided at a position facing each of the first electrodes.

[0018] When detecting the shape or pattern of the surface of an object or the force of contact with the object, a pressing means can be further provided for displacing the first film, the first electrode, the second film, the second electrode and the dielectric member to press them against the skin.

[0019] The pressing means can displace the first film, the first electrode, the second film, the second electrode and the dielectric member and press them against the skin by gas or liquid pressure.

[0020] The pressing means can be configured to cause the first film, the first electrode, the second film, the second electrode and the dielectric member to be displaced by a cam and pressed against the skin.

[0021] The pressing means can be pulled by a wire through a pulley to displace the first film, the first electrode, the second film, the second electrode and the dielectric member so as to be pressed against the skin. Effect of the Invention

[0022] As described above, according to the present invention, it is possible to make the sensor thinner and more flexible and to detect force, pressure or vibration with higher sensitivity. [Brief description of the drawings]

[0023] [Figure 1] FIG. 1 is a block diagram of a tactile sensing system 11 including a tactile sensing pad, which is an example of a sensor. [Diagram 2] 2 is a diagram showing an example of the configuration of a tactile sensing pad group 21. FIG. [Diagram 3] 13 is a diagram showing another example of the configuration of the tactile sensing pad group 21. FIG. [Figure 4] 13 is a diagram showing yet another example of the configuration of the tactile sensing pad group 21. FIG. [Diagram 5] 11 is a plan view showing an example of the configuration of a tactile sensing pad 73. FIG. [Figure 6] 6 is a cross-sectional view showing a cross section of the tactile sensing pad 73 taken along line AA' in FIG. 5. [Figure 7] 2 is a cross-sectional view showing a cross section of a tactile sensing pad 251. FIG. [Figure 8] 3 is a cross-sectional view showing a cross section of the tactile sensing pad 301. FIG. [Figure 9] 13 is a cross-sectional view showing a cross section of a tactile sensing pad 351. FIG. [Figure 10] 4 is a cross-sectional view showing a cross section of the tactile sensing pad 401. FIG. [Figure 11] 13 is a diagram showing a state of a tactile sensing pad 73 attached to a finger pad. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] Hereinafter, a sensor according to an embodiment of the present invention will be described with reference to FIGS.

[0025] FIG. 1 is a block diagram of a tactile sensing system 11 including a tactile sensing pad, which is an example of a sensor. The tactile sensing system 11 converts force, pressure, or vibration that causes a human to feel a sense of touch or pressure into information. For example, the tactile sensing system 11 detects the unevenness or pattern of an object at the point where the object is touched by a human finger or palm or a robotic hand, and the force with which the object is touched. Note that the object touched by the human finger or palm or the robotic hand may be any object as long as it has a tangible substance, and may be a natural human or an object.

[0026] The tactile sensing system 11 includes a group of tactile sensing pads 21 , a robot system 22 , a tactile / pressure drive information calculation system 41 , a virtual reality computer system / remote robot manipulation system 42 and an image processing system 43 .

[0027] The tactile sensing pad group 21 includes a plurality of Tactile Sensing Pad and the given Tactile Sensing Pad The tactile sensing pad group 21 includes an actuator that presses a touch sensor against the skin. The tactile sensing pad group 21 detects force, pressure, or vibration. It can also be said that the tactile sensing pad group 21 detects the touch of the subject.

[0028] The tactile sensing pad group 21 is created by MEMS (Micro Electro Mechanical Systems), ultra-precision cutting, 3D printing technology (three-dimensional modeling technology), and precision lamination technology. The tactile sensing pad group 21 is attached to the body, such as the fingers, palm, back of the hand, wrist, elbow, shoulder, chest, back, or waist, by a fixing band, harness, glove, or clothing. For example, the shape of the tactile sensing pad group 21 corresponds to the palm side surface of the distal phalanx of the second finger (index finger), and has a thickness of 0.2 mm or more and less than 0.5 mm. For example, the shape of the tactile sensing pad group 21 corresponds to the palm side surface of the right hand, and has a thickness of 0.2 mm or more and less than 0.5 mm. For example, when the tactile sensing pad group 21 is attached to the palm, when a person touches an object such as a human being or an object with the palm, the tactile sensing pad group 21 detects the force, pressure, or vibration generated by being pressed against the object such as a human being or an object. The tactile sensing pad group 21 outputs the detected force, pressure or vibration as a voltage.

[0029] It can also be said that the tactile sensing pad group 21 detects a force, pressure, or vibration that generates a tactile, pressure, or vibration sensation, and outputs the detected force, pressure, or vibration as a voltage. In other words, the tactile sensing pad group 21 detects the tactile, pressure, or vibration sensation of the target.

[0030] The robot system 22 includes a robot hand and performs operations such as touching, gripping, or carrying objects such as humans or objects. A tactile sensing pad group 21 is attached to the robot hand of the robot system 22. The tactile sensing pad group 21 detects force, pressure, or vibration. That is, when the robot hand of the robot system 22 touches or grips an object such as a human or object, the tactile sensation of the object is detected as force, pressure, or vibration. For example, the tactile sensing pad group 21 and the robot system 22 trace the surface of the object and detect tactile sensations according to the shape of the object, such as unevenness or patterns. The tactile / pressure drive information calculation system 41 acquires a signal of force, pressure, or vibration that indicates the feel of the object detected by the tactile sensing pad group 21.

[0031] Hereinafter, an object that is touched by the tactile sensing pad group 21 and detects force, pressure or vibration, and that is a person or an object, will be referred to as a contact object.

[0032] The image processing system 43 includes an imaging device and an image processing device, and estimates the unevenness and pattern of a target such as a human or object, and the force exerted when contacted, from an image captured of the target, and supplies information indicating the unevenness and pattern of the target, and the force exerted when contacted, to the tactile / pressure drive information calculation system 41.

[0033] The tactile / pressure drive information calculation system 41 is composed of an analog signal processing device and a computer system, and converts the force, pressure, or vibration data indicating the touch of the contact object detected by the tactile sensing pad group 21 into information that can be handled by a computer. For example, the tactile / pressure drive information calculation system 41 performs analog / digital conversion by applying signal processing such as noise removal and dynamic range conversion to the force, pressure, or vibration signal indicating the touch of the contact object obtained from the tactile sensing pad group 21. Furthermore, for example, the tactile / pressure drive information calculation system 41 converts the force, pressure, or vibration data, which is digital data, into data in a predetermined format. For example, the tactile / pressure drive information calculation system 41 converts the force, pressure, or vibration data into data in a format in which the value indicating the force or pressure is arranged to indicate a spatial or temporal position.

[0034] In addition, the tactile / pressure drive information calculation system 41 converts information indicating the unevenness or pattern of the object estimated by the image processing system 43, and the force exerted when contacted, into force, pressure or vibration data in a specified format.

[0035] Furthermore, for example, the tactile / pressure drive information calculation system 41 may link the unevenness or pattern of the object, and the force applied when contacted, estimated by the image processing system 43, with the force, pressure or vibration data indicating the feel of the contacted object detected by the tactile sensing pad group 21.

[0036] The haptic / pressure drive information calculation system 41 provides force, pressure or vibration data in a predetermined format to a virtual reality computer system / remote robotic manipulation system 42 .

[0037] The virtual reality computer system / remote robot manipulation system 42 uses force, pressure or vibration data in a predetermined format for control such as presenting tactile or pressure sensations in communication in the metaverse (virtual reality) or in work using a remote robot. For example, the virtual reality computer system / remote robot manipulation system 42 calculates the contact, abutment or collision of an avatar with another avatar or an object in the virtual space according to the movement of the avatar in the virtual space. For example, the virtual reality computer system / remote robot manipulation system 42 calculates tactile information such as tactile, pressure or vibration sensations of another avatar or object when the avatar contacts or collides with another avatar or object in the virtual space.

[0038] The tactile sensing pad group 21 will now be described.

[0039] Fig. 2 is a diagram showing an example of the configuration of the tactile sensing pad group 21. The tactile sensing pad group 21 is configured to include about 3 to 10 tactile sensing pads 73. Each of the tactile sensing pads 73 has 10 to 50 detection points. The detection points on the tactile sensing pads 73 are arranged in the left-right direction and the front-back direction (depth direction) in Fig. 2. In other words, the detection points are arranged two-dimensionally on the surface of the tactile sensing pad 73 at predetermined intervals on the surface side that comes into contact with the contact object.

[0040] In the following description, an example will be given of some of the detection points of the tactile sensing pads 73. When a predetermined tactile sensing pad 73 among the aligned tactile sensing pads 73 of the tactile sensing pad group 21 detects force, pressure, or vibration by contacting a contact object, the predetermined tactile sensing pad 73 is moved in the direction of the contact object so as to contact a predetermined portion of the contact object.

[0041] Hereinafter, for example, when the tactile sensing pad group 21 includes four tactile sensing pads 73, the tactile sensing pads 73 will be referred to as tactile sensing pads 73-1 to 73-4, etc., when they are to be distinguished from one another.

[0042] 2 shows an example of the configuration of the tactile sensing pad group 21 including four tactile sensing pads 73-1 to 73-4. The tactile sensing units 71-1 to 71-4 are configured to include air actuators 72-1 to 72-4 and tactile sensing pads 73-1 to 73-4, respectively. The tactile sensing units 71-1 to 71-4 each operate individually and independently to detect force, pressure, or vibration.

[0043] As will be described in detail later, the tactile sensing pad 73-1 has a plurality of electrodes formed on the surface thereof that comes into contact with the contact object 101. Similarly, as will be described in detail later, the tactile sensing pads 73-2 to 73-4 each have a plurality of electrodes formed on the surface thereof that comes into contact with the contact object 101.

[0044] In each of the tactile sensing pads 73-1 to 73-4, a plurality of electrodes formed on the surface that contacts the contact object 101 are detection points that detect force, pressure, or vibration. The interval between the plurality of electrodes formed on each of the tactile sensing pads 73-1 to 73-4 is less than the two-point discrimination threshold of human skin. In other words, the distance between the electrodes is less than the two-point discrimination threshold of human skin. For example, the two-point discrimination threshold of human skin is 1 to 6 mm on the fingertips and 15 to 20 mm on the palms or soles. For example, the two-point discrimination threshold of human skin is 2 to 3 mm on the lips and 30 mm on the backs of the hands or soles of the feet.

[0045] In this way, it is possible to detect force, pressure or vibration at intervals less than the two-point discrimination threshold of human skin. By using the information (signals) obtained by the tactile sensing pad group 21 in a device that applies stimuli that induce a tactile, pressure or vibration sensation at intervals less than the two-point discrimination threshold of human skin, it is possible to reproduce the tactile, pressure or vibration sensation applied to human skin.

[0046] In addition, the two-point discrimination threshold of human skin is 2 to 3 mm on the lips, which is the shortest on the body, so by making the distance between the electrodes less than 2 mm, the information obtained by tactile sensing pads 73-1 to 73-4 can be used on any part of the body.

[0047] The tactile sensing pads 73-1 to 73-4 are moved by the air actuators 72-1 to 72-4, respectively, toward the contact object 101 so as to come into contact with a predetermined portion of the contact object 101. Each of the air actuators 72-1 to 72-4 is a pneumatic actuator consisting of a cylinder and a piston. When compressed air of a predetermined pressure is supplied to each of the air actuators 72-1 to 72-4, the piston protrudes relative to the cylinder, displacing one of the tactile sensing pads 73-1 to 73-4 fixed to the piston, thereby moving it toward the contact object 101. For example, at a predetermined time, compressed air of a predetermined pressure is supplied to the air actuator 72-2, which displaces the tactile sensing pad 73-2 and moves it toward the contact object 101, whereas compressed air of a predetermined pressure is not supplied to the air actuators 72-1, 72-3, and 72-4, which do not move the tactile sensing pads 73-1, 73-3, and 73-4 toward the contact object 101. At this time, the tactile sensing pad 73-2 detects force, pressure, or vibration. That is, at this time, the tactile sensing pad 73-2 detects the unevenness or pattern of the contact object 101, or the force, pressure, or vibration coming into contact with the contact object 101.

[0048] At a given time, all of tactile sensing pads 73-1 to 73-4 or any one or more of tactile sensing pads 73-1 to 73-4 are moved by air actuators 72-1 to 72-4, respectively, toward contact object 101 so as to contact a given portion of contact object 101, or all of tactile sensing pads 73-1 to 73-4 are moved away from contact object 101.

[0049] Hereinafter, when there is no need to distinguish between the tactile sensing units 71-1 to 71-4, they will be simply referred to as tactile sensing units 71. Hereinafter, when there is no need to distinguish between the air actuators 72-1 to 72-4, they will be simply referred to as air actuators 72.

[0050] 3 is a diagram showing another example of the configuration of the tactile sensing pad group 21 including four tactile sensing pads 73-1 to 73-4. The tactile sensing units 121-1 to 121-4 are configured to include the tactile sensing pads 73-1 to 73-4, the cams 122-1 to 122-4, and the motors 123-1 to 123-4, respectively. The tactile sensing units 121-1 to 121-4 each operate individually and independently to detect force, pressure, or vibration.

[0051] The tactile sensing pads 73-1 to 73-4 in Fig. 3 are moved toward the contact target 101 by the cams 122-1 to 122-4 and the motors 123-1 to 123-4, respectively, so as to come into contact with predetermined portions of the contact target 101. For example, the cams 122-1 to 122-4 are each a rotary plate cam. For example, the cams 122-1 to 122-4 are each made of an eccentric disk. For example, the motors 123-1 to 123-4 are each an electric motor. That is, when the cams 122-1 to 122-4 are rotated by the motors 123-1 to 123-4, respectively, and reach predetermined angular positions with respect to the tactile sensing pads 73-1 to 73-4, they push the tactile sensing pads 73-1 to 73-4 toward the contact target 101, respectively.

[0052] For example, at a predetermined time, the cam 122-2 is rotated by the motor 123-2, and when the side of the cam 122-2 protruding from the rotation axis moves toward the tactile sensing pad 73-2, the tactile sensing pad 73-2 is pushed out and displaced, moving it toward the contact object 101, and the cams 122-1, 122-3, and 122-4 do not move the tactile sensing pads 73-1, 73-3, and 73-4 toward the contact object 101 because the motors 123-1, 123-3, and 123-4 do not rotate. At this time, the tactile sensing pad 73-2 detects force, pressure, or vibration. That is, at this time, the tactile sensing pad 73-2 detects the unevenness or pattern of the contact object 101, or the force, pressure, or vibration contacting the contact object 101.

[0053] At a given time, all of tactile sensing pads 73-1 to 73-4 or any one or more of tactile sensing pads 73-1 to 73-4 are moved by cams 122-1 to 122-4, respectively, toward contact object 101 so as to contact a given portion of contact object 101, or all of tactile sensing pads 73-1 to 73-4 are moved away from contact object 101.

[0054] For example, the tactile sensing pads 73-1 to 73-4 are biased away from the contact target 101 by a spring or the like (not shown).

[0055] Although each of the cams 122-1 to 122-4 has been described as a plate cam, the present invention is not limited to this and may be a groove cam or a solid cam. Also, each of the motors 123-1 to 123-4 has been described as an electric motor, the present invention is not limited to this and may be a pressure motor that utilizes the pressure of a fluid, a molecular motor, or an ultrasonic motor.

[0056] Hereinafter, when there is no need to distinguish between the tactile sensing units 121-1 to 121-4, they will simply be referred to as tactile sensing units 121. Hereinafter, when there is no need to distinguish between the cams 122-1 to 122-4, they will simply be referred to as cams 122. Furthermore, when there is no need to distinguish between the motors 123-1 to 123-4, they will simply be referred to as motors 123.

[0057] 4 is a diagram showing yet another example of the configuration of the tactile sensing pad group 21 including four tactile sensing pads 73-1 to 73-4. The tactile sensing units 151-1 to 151-4 are configured to include the tactile sensing pads 73-1 to 73-4, the wires 152-1 to 152-4, the pulleys 153-1 to 153-4, the pulleys 154-1 to 154-4, and the motors 155-1 to 155-4. The tactile sensing units 151-1 to 151-4 each operate individually and independently to detect force, pressure, or vibration.

[0058] 4 are moved toward the contact target 101 by the wires 152-1 to 152-4, the pulleys 153-1 to 153-4, the pulleys 154-1 to 154-4, and the motors 155-1 to 155-4 so as to come into contact with predetermined portions of the contact target 101. One end of each of the wires 152-1 to 152-4 is fixed to each of the tactile sensing pads 73-1 to 73-4, and the other end of each of the wires 152-1 to 152-4 is wound around each of the pulleys 154-1 to 154-4. Each of the pulleys 153-1 to 153-4 is axially supported so as to be freely rotatable. The wires 152-1 to 152-4 are hung on the pulleys 153-1 to 153-4, respectively, to change the extending direction of the wires 152-1 to 152-4. The pulleys 154-1 to 154-4 are rotated by the motors 155-1 to 155-4, respectively. The motors 155-1 to 155-4 are electric motors. When the pulleys 154-1 to 154-4 are rotated by the motors 155-1 to 155-4, respectively, the length of the wires 152-1 to 152-4 wound around the pulleys 154-1 to 154-4, respectively, changes, so that the tactile sensing pads 73-1 to 73-4 fixed to one end of the wires 152-1 to 152-4, respectively, are pulled and displaced.

[0059] That is, the pulleys 154-1 to 154-4 are rotated by the motors 155-1 to 155-4, respectively, to wind up the wires 152-1 to 152-4, respectively, and the tactile sensing pads 73-1 to 73-4 are pulled by the wires 152-1 to 152-4, respectively, and pressed against the touch target 101.

[0060] For example, at a given time, when the pulley 154-2 is rotated by the motor 155-2 and the wire 152-2 is wound up, the wire 152-2 pulls and displaces the tactile sensing pad 73-2, moving it toward the contact object 101, and the pulleys 154-1, 154-3, and 154-4 do not move the tactile sensing pads 73-1, 73-3, and 73-4 toward the contact object 101 because the motors 155-1, 155-3, and 155-4 do not rotate. At this time, the tactile sensing pad 73-2 detects force, pressure, or vibration. That is, at this time, the tactile sensing pad 73-2 detects the unevenness or pattern of the contact object 101, or the force, pressure, or vibration contacting the contact object 101.

[0061] At a given time, all of tactile sensing pads 73-1 to 73-4, or any one or more of tactile sensing pads 73-1 to 73-4, are pulled by wires 152-1 to 152-4 respectively via pulleys 153-1 to 153-4 and pulleys 154-1 to 154-4 respectively, so that they are moved toward contact object 101 so as to contact a given portion of contact object 101, or all of tactile sensing pads 73-1 to 73-4 are moved away from contact object 101.

[0062] For example, the tactile sensing pads 73-1 to 73-4 are biased away from the contact target 101 by a spring or the like (not shown).

[0063] For example, the tactile sensing pad group 21 including the tactile sensing units 151-1 to 151-4 can be realized as a glove-type device.

[0064] Although the motors 155-1 to 155-4 have been described as being electric motors, the present invention is not limited to this and may be a pressure motor that utilizes the pressure of a fluid, a molecular motor, or an ultrasonic motor.

[0065] Hereinafter, when it is not necessary to distinguish between the tactile sensing units 151-1 to 151-4, they will be simply referred to as tactile sensing units 151. Hereinafter, when it is not necessary to distinguish between the wires 152-1 to 152-4, they will be simply referred to as wires 152. Furthermore, when it is not necessary to distinguish between the pulleys 153-1 to 153-4, they will be simply referred to as pulleys 153. When it is not necessary to distinguish between the pulleys 154-1 to 154-4, they will be simply referred to as pulleys 154. Furthermore, when it is not necessary to distinguish between the motors 155-1 to 155-4, they will be simply referred to as motors 155.

[0066] Next, a detailed example of the configuration of the tactile sensing pad 73 will be described. Fig. 5 is a plan view showing an example of the configuration of the tactile sensing pad 73. Fig. 6 is a cross-sectional view showing a cross section of the tactile sensing pad 73 taken along line AA' in Fig. 5. The tactile sensing pad 73 includes a film 201, electrodes 202-1 to 202-12, a dielectric member 203, a film 204, and an electrode 205. The thickness of the tactile sensing pad 73 is equal to or greater than 0.2 mm and less than 0.5 mm.

[0067] The tactile sensing pad 73 detects force, pressure, or vibration. For example, the tactile sensing pad 73 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0068] The electrodes 202-1 to 202-12 are provided on one surface of the film 201. The electrode 205 is provided on one surface of the film 204. The other surface of the film 201 is attached to a first surface of the dielectric member 203, which is the upper surface in FIG. 6 (hereinafter also simply referred to as the upper surface). The other surface of the film 204 is attached to a second surface of the dielectric member 203, which is the lower surface in FIG. 6 (hereinafter also simply referred to as the lower surface), which faces the first surface. That is, the films 201 and 204 are attached to each other with the dielectric member 203 sandwiched therebetween. For example, the planar shape of the film 201, the planar shape of the dielectric member 203, and the planar shape of the film 204 are the same. For example, the planar shape of the film 201, the planar shape of the dielectric member 203, and the planar shape of the film 204 are rectangular. For example, film 201, dielectric member 203, and film 204 are bonded together so as to overlap one another when viewed in a planar direction. Electrodes 202-1 to 202-12 are provided on the outer surface of film 201, which is bonded together with film 204 sandwiching dielectric member 203 therebetween. Electrode 205 is provided on the outer surface of film 204, which is bonded together with film 201 sandwiching dielectric member 203 therebetween.

[0069] The film 201 is an example of a first film, and is a film formed into a film shape by a polymer material. The film 201 generates a voltage when force, pressure, or vibration is applied to it. The film 204 is an example of a second film, and is a film formed into a film shape by a polymer material. The film 204 generates a voltage when force, pressure, or vibration is applied to it. The films 201 and 204 are each a piezoelectric film such as PVDF (PolyVinylidene DiFluoride) or a fluorine-based resin film such as FEP (Fluorinated Ethylene Propylene), PTFE (Poly Tetra Fluoro Ethylene), PFA (Per Fluoro Alkoxy polymer), ETFE (Ethylene Tetra Fluoro Ethylen copolymer), PVDF, PCTFE (Poly Chloro Tri Fluoro Ethylene), or ECTFE (Ethylene Chloro Tri Fluoro Ethylene copolymer). The material of the film 204 may be the same as or different from the material of the film 201.

[0070] The dielectric member 203 is a dielectric and an insulator, and is molded into a thin plate shape using a flexible material. For example, the dielectric member 203 is molded using rubber such as silicone rubber, PDMS (dimethylpolysiloxane), fluororubber, acrylic rubber, or urethane rubber. The dielectric member 203 is formed with holes 221-1 (not shown), 221-2 (not shown), 221-3, 221-4 (not shown) to 221-6 (not shown), 221-7, 221-8 (not shown) to 221-10 (not shown), 221-11, and 221-12 (not shown). The holes 221-1 to 221-12 penetrate the surface of the dielectric member 203 from the surface on the film 201 side to the surface on the film 204 side. That is, the holes 221-1 to 221-12 penetrate from the upper surface to the lower surface of the dielectric member 203. The upper surface of the dielectric member 203 is an example of a first surface, and the lower surface of the dielectric member 203 is an example of a second surface.

[0071] The electrodes 202-1 to 202-12 are formed in a film shape using a conductor. For example, the electrodes 202-1 to 202-12 are coatings made of metal materials such as gold (Au), platinum (Pt), titanium (Ti), or aluminum (Al) or carbon nanotube (CNT) electrode films. The electrodes 202-1 to 202-12 are formed to be flexible. The electrodes 202-1 to 202-12 are insulated from each other. For example, the electrodes 202-1 to 202-12 are each formed in a circular thin film shape on one surface of the film 201. For example, the electrodes 202-1 to 202-12 are each formed in a circular shape with a diameter of 1 mm.

[0072] The electrodes 202-1 to 202-12 are detection points that detect force, pressure, or vibration. The spacing between the electrodes 202-1 to 202-12 is less than the two-point discrimination threshold of human skin. For example, when the tactile sensing pad 73 is used on a fingertip, the spacing between the electrodes 202-1 to 202-12 is less than 2 mm. In this case, the spacing between the electrodes 202-1 to 202-12 refers to the distance from the center to the center of each of the circular electrodes 202-1 to 202-12 or the distance from the outer edge to the outer edge of each of the circular electrodes 202-1 to 202-12.

[0073] The terminals 212-1 to 212-12 are terminals for outputting voltages from the electrodes 202-1 to 202-12 through the wiring portions 211-1 to 211-12, respectively. The terminals 212-1 to 212-12 and the wiring portions 211-1 to 211-12 are formed from the same material as the electrodes 202-1 to 202-12.

[0074] The terminals 212-1 to 212-12 are each formed in a circular thin film shape. The wiring portions 211-1 to 211-12 are each made of a flat thin film connecting the terminals 212-1 to 212-12 and the electrodes 202-1 to 202-12, respectively, or made of a plurality of flat thin films connected to each other.

[0075] For example, terminals 212-1, 212-2, 212-5, 212-6, 212-9, and 212-10 are arranged along one side of film 201 whose upper surface is rectangular in shape. Terminals 212-3, 212-4, 212-7, 212-8, 212-11, and 212-12 are arranged along a side opposite to the side of film 201 on which terminals 212-1, 212-2, 212-5, 212-6, 212-9, and 212-10 are arranged. For example, terminals 212-1 to 212-12 are each wire-bonded and electrically connected to the outside.

[0076] That is, a voltage is generated in each of the electrodes 202-1 to 202-12 due to pressure on the tactile sensing pad 73 or deformation of the tactile sensing pad 73. The voltage generated in each of the electrodes 202-1 to 202-12 is transmitted to each of the terminals 212-1 to 212-12.

[0077] The electrode 205 is formed in a film shape using a conductor. For example, the electrode 205 is a coating made of a metal material such as gold (Au), platinum (Pt), titanium (Ti), or aluminum (Al) or a carbon nanotube (CNT) electrode film. The electrode 205 is formed to be flexible. The electrode 205 is formed in a rectangular thin film shape on one surface of the film 204. The electrode 205 is formed so as to face all of the electrodes 202-1 to 202-12. That is, the electrode 205 is formed so as to sandwich all of the electrodes 202-1 to 202-12, the film 201, the dielectric member 203, and the film 204. In other words, the electrode 205 is formed so as to overlap all of the electrodes 202-1 to 202-12 in the thickness direction of the film 201, the dielectric member 203, and the film 204.

[0078] The hole 221-3 is formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of the dielectric member 203. The end of the hole 221-3 on the upper surface of the dielectric member 203 coincides with the outer periphery of the electrode 202-3. The electrode 205 covers, on one surface of the film 204, the end of the hole 221-3 on the lower surface of the dielectric member 203.

[0079] Moreover, hole 221-7 is formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of dielectric member 203. An end of hole 221-7 on the upper surface of dielectric member 203 coincides with the outer periphery of electrode 202-7. Electrode 205 covers, on one surface of film 204, an end of hole 221-7 on the lower surface of dielectric member 203.

[0080] Furthermore, the hole 221-11 is formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of the dielectric member 203. The end of the hole 221-11 on the upper surface of the dielectric member 203 coincides with the outer periphery of the electrode 202-11. The electrode 205 covers, on one surface of the film 204, the end of the hole 221-11 on the lower surface of the dielectric member 203.

[0081] Similarly, holes 221-1 and 221-2, holes 221-4 to 221-6, holes 221-8 to 221-10, and hole 221-12 are formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of dielectric member 203. Ends of holes 221-1 and 221-2, holes 221-4 to 221-6, holes 221-8 to 221-10, and hole 221-12 on the upper surface of dielectric member 203 respectively coincide with the outer circumferences of electrodes 202-1 and 202-2, electrodes 202-4 to 202-6, electrodes 202-8 to 202-10, and electrode 202-12. The electrode 205 is disposed on one surface of the film 204 and covers the ends of the lower surface of the dielectric member 203 of the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12.

[0082] In this manner, any one of electrodes 202-1 to 202-12 and electrode 205 are arranged to sandwich films 201 and 204, and to sandwich a portion of dielectric member 203 in which any one of holes 221-1 and 221-12 is formed.

[0083] The cross-sectional shape of each of the holes 221-1 to 221-12 formed in the dielectric member 203 on the upper surface of the dielectric member 203 is similar to the shape of each of the surfaces of the film-like electrodes 202-1 to 202-12.

[0084] Furthermore, the electrodes 202-1 to 202-12 are disposed on the cross sections of the upper surface of the dielectric member 203, which are cross sections of the holes 221-1 to 221-12 formed in the dielectric member 203, with the film 201 sandwiched therebetween.

[0085] Before use, a voltage of 100 V to 15 KV is applied to the tactile sensing pad 73 to precharge it with an electric charge. When a voltage is applied as a precharge between the electrodes 202-1 to 202-12 and the electrode 205, an electric charge is accumulated between the film 201 and the film 204, particularly in the holes 221-1 to 221-12 of the dielectric member 203. When the electric charge is precharged, the tactile sensing pad 73 generates a larger voltage with a smaller force, pressure, or vibration.

[0086] When force, pressure or vibration is applied to a predetermined portion or the entire tactile sensing pad 73, a voltage corresponding to the applied force, pressure or vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure or vibration is applied to a predetermined portion or the entire tactile sensing pad 73, a voltage corresponding to the magnitude of the force, the magnitude of the pressure or the amplitude of the vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0087] The tactile sensing pad 73 is made primarily of resin or silicone rubber, and can be easily deformed to fit the contact object 101, allowing it to detect force, pressure, or vibration caused by the movement of the contact object 101 or force, pressure, or vibration applied to the contact object 101.

[0088] When the ratio of the area of ​​the holes 221-1 to 221-12 to the total area of ​​the dielectric member 203 is between 10% and 40%, the tactile sensing pad 73 generates a larger voltage with a smaller force, pressure or vibration.

[0089] Although holes 221-1 to 221-12 have been described as penetrating from the top surface to the bottom surface of dielectric member 203, they may not penetrate from the top surface to the bottom surface of dielectric member 203, but may have a shape recessed from the top surface or bottom surface of dielectric member 203, and further, they may be bubble-shaped holes inside dielectric member 203.

[0090] Also, although the electrodes 202-1 to 202-12 have been described as being formed as circular thin films on one surface of the film 201, they may be elliptical, oval, or polygonal, such as triangular or rectangular.

[0091] As described above, it is possible to detect force, pressure or vibration applied to all or any of the electrodes 202-1 to 202-12.

[0092] Hereinafter, when there is no need to distinguish between the electrodes 202-1 to 202-12, they will simply be referred to as electrodes 202. Hereinafter, when there is no need to distinguish between the holes 221-1 to 221-12, they will simply be referred to as holes 221.

[0093] In addition, the material for forming the dielectric member 203 may be added with approximately 0.1% by weight to 30% by weight of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67, or other MOF (Metal Organic Frameworks) material, to assist in the accumulation of electric charge in the dielectric member 203.

[0094] In addition, the holes 221 may be filled with 0.5% to 50% by volume of a charge storage material such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, or MOF material to assist in the accumulation of charge.

[0095] In addition, when a capacitor such as MOF materials such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, and ZIF-67 is mixed into the dielectric member 203 or placed in the hole 221, the tactile sensing pad 73 can be used without being charged with an electric charge in advance.

[0096] In addition, when molding the dielectric member 203, a foaming agent may be mixed in an amount of 0.1% by weight to 5% by weight to create air bubbles inside the dielectric member 203, thereby forming the holes 221 in the dielectric member 203.

[0097] Human skin has many receptors for sensing vibration, shape, and shear force. The tactile sensing pad 73 is in contact with the contact object 101 and detects force, pressure, or vibration, thereby generating a voltage corresponding to the force, pressure, or vibration that activates the receptors of the human skin, that is, a voltage corresponding to the sense of touch and pressure. In other words, the tactile sensing pad 73 can detect the force, pressure, or vibration applied to the contact object 101 that activates the receptors of the human skin. It can also be said that the tactile sensing pad 73 can detect the force, pressure, or vibration that generates the sense of touch and pressure.

[0098] The voltage obtained at the tactile sensing pad 73 can be used as a signal indicative of the force, pressure or vibration activating receptors in the human skin, thereby replicating the tactile, pressure or vibration sensations applied to human skin by a device that applies stimuli that induce the tactile, pressure or vibration sensation.

[0099] As described with reference to Figures 2 to 4, when tactile sensing pad 73 is pressed against contact object 101 by air actuator 72, cam 122 and motor 123, or wire 152, pulley 153, pulley 154 and motor 155, and force, pressure or vibration is applied to all or any of electrodes 202-1 to 202-12, tactile sensing pad 73 generates a voltage between all or any of electrodes 202-1 to 202-12 and electrode 205 according to the magnitude of the force, pressure or vibration.

[0100] Next, a detailed example of the configuration of the tactile sensing pad 251 that constitutes the tactile sensing pad group 21 will be described. The tactile sensing pad 251 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73. Fig. 7 is a cross-sectional view showing a cross section of the tactile sensing pad 251. In Fig. 7, parts that are the same as those shown in Fig. 6 are given the same reference numerals, and their description will be omitted.

[0101] The tactile sensing pad 251 detects force, pressure, or vibration. For example, the tactile sensing pad 251 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0102] The tactile sensing pad 251 includes a film 201, electrodes 202-1 to 202-12, a film 204, an electrode 205, and a dielectric member 261. The thickness of the tactile sensing pad 251 is equal to or greater than 0.2 mm and less than 0.5 mm.

[0103] The other surface of the film 201 is attached to a first surface of the dielectric member 261, which is the upper surface in FIG. 7 (hereinafter also simply referred to as the upper surface). The other surface of the film 201 is attached to a second surface of the dielectric member 261 (the lower surface in FIG. 7 (hereinafter also simply referred to as the lower surface)) facing the first surface. That is, the films 201 and 204 are attached to each other with the dielectric member 261 sandwiched therebetween. For example, the planar shape of the film 201, the planar shape of the dielectric member 261, and the planar shape of the film 204 are the same. For example, the planar shape of the film 201, the planar shape of the dielectric member 261, and the planar shape of the film 204 are rectangular. For example, the film 201, the dielectric member 261, and the film 204 are attached to each other so as to overlap each other when viewed in the planar direction.

[0104] The dielectric member 261 is a dielectric and an insulator, and is molded into a thin plate shape using a flexible material. For example, the dielectric member 261 is molded using rubber such as silicone rubber, PDMS, fluororubber, acrylic rubber, or urethane rubber. Holes 271-1 to 271-9 are formed in the dielectric member 261. The holes 271-1 to 271-9 penetrate the dielectric member 261 from the upper surface to the lower surface. Note that, although cross sections of the electrodes 202-3, 202-7, and 202-11 are shown in FIG. 7, holes similar to the holes 271-1 to 271-9 are also formed in portions of the dielectric member 261 between the electrodes 202-1, 202-5, and 202-9, the electrodes 202-2, 202-6, and 202-10, and the electrodes 202-4, 202-8, and 202-12 and the electrode 205.

[0105] The electrode 205 is formed so as to overlap all of the electrodes 202-1 to 202-12 in the thickness direction of the film 201, the dielectric member 261, and the film 204.

[0106] The holes 271-1 to 271-9 are formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of the dielectric member 261. The diameter of the bottom surface of each of the holes 271-1 to 271-9 is smaller than the diameter of each of the electrodes 202-3, 202-7, and 202-11. The electrode 202-3 is disposed on one surface of the film 201 so as to cover the holes 271-2 and 271-3. The electrode 202-7 is disposed on one surface of the film 201 so as to cover the hole 271-5. The electrode 202-11 is disposed on one surface of the film 201 so as to cover the holes 271-7 and 271-8. That is, each of electrodes 202-3, 202-7, and 202-11 is disposed so as to cover one or two of holes 271-1 to 271-9 on one surface of film 201. Electrode 205 covers ends of holes 271-1 to 271-9 on the lower surface of dielectric member 261 on one surface of film 204.

[0107] Moreover, the holes 271-1, 271-4, 271-6 and 271-9 are formed in the portion of the dielectric member 261 that is not sandwiched between the electrodes 202-1 to 202-12 and the electrode 205.

[0108] In this manner, the electrodes 202-3, 202-7, and 202-11 are each disposed so as to cover one or two of the holes 271-1 to 271-9. That is, the electrodes 202-3, 202-7, and 202-11 are disposed, via the film 201, on cross sections of the upper surface of the dielectric member 261 of the holes 271-2, 271-3, 271-5, 271-7, and 271-8 formed in the dielectric member 261.

[0109] Before use, a voltage of 100V to 15KV is applied to the tactile sensing pad 251 to precharge it with an electric charge. When a voltage is applied as a precharge between the electrodes 202-1 to 202-12 and the electrode 205, an electric charge is accumulated between the film 201 and the film 204, particularly in holes similar to the holes 271-1 to 221-9 and the holes 271-1 to 271-9 of the dielectric member 261. When the electric charge is precharged, the tactile sensing pad 251 generates a larger voltage with a smaller force, pressure, or vibration.

[0110] When force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 251, a voltage corresponding to the force, pressure, or vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 251, a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0111] The tactile sensing pad 251 is made primarily of resin or silicone rubber, and can be easily deformed to fit the contact object 101, allowing it to detect force, pressure, or vibration caused by the movement of the contact object 101 or force, pressure, or vibration applied to the contact object 101.

[0112] When the ratio of the area of ​​holes 271-1 to 271-9 and holes similar to holes 271-1 to 271-9 to the total area of ​​dielectric member 261 is between 10% and 40%, tactile sensing pad 251 generates a larger voltage with less force, pressure or vibration.

[0113] It should be noted that holes 271-1 to 271-9 and holes similar to holes 271-1 to 271-9 have been described as penetrating from the top surface to the bottom surface of dielectric member 261, but they may not penetrate from the top surface to the bottom surface of dielectric member 261, and may instead be recessed from the top surface or bottom surface of dielectric member 261, and further may be bubble-shaped holes inside dielectric member 261.

[0114] Hereinafter, the holes 271-1 to 271-9 will be simply referred to as holes 271 when there is no need to distinguish between them.

[0115] In addition, the material for forming the dielectric member 261 may be added with about 0.1% by weight to 30% by weight of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67, or other MOF (Metal Organic Frameworks) material, to assist in the accumulation of electric charge in the dielectric member 261.

[0116] Additionally, the holes 271 may be filled with 0.5% to 50% by volume of a charge storage material such as graphene, carbon nanotubes, barium titanate, potassium titanate, zinc oxide, MXene, or MOF material to assist in the storage of charge.

[0117] In addition, when a capacitor such as MOF materials such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, and ZIF-67 is mixed into the dielectric member 261 or placed in the hole 271, the tactile sensing pad 251 can be used without being charged with an electric charge in advance.

[0118] In addition, when molding the dielectric member 261, a foaming agent may be mixed in an amount of 0.1% by weight to 5% by weight to create air bubbles inside the dielectric member 261, thereby forming holes 271 in the dielectric member 261.

[0119] Next, a detailed example of the configuration of the tactile sensing pad 301 that constitutes the tactile sensing pad group 21 will be described. The tactile sensing pad 301 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73. Fig. 8 is a cross-sectional view showing a cross section of the tactile sensing pad 301. In Fig. 8, parts that are the same as those shown in Fig. 6 are given the same reference numerals, and their description will be omitted.

[0120] The tactile sensing pad 301 detects force, pressure, or vibration. For example, the tactile sensing pad 301 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0121] The tactile sensing pad 301 includes the film 201, electrodes 202-1 to 202-12, a film 204, an electrode 205, and a dielectric member 311. The thickness of the tactile sensing pad 301 is equal to or greater than 0.2 mm and less than 0.5 mm.

[0122] The other surface of the film 201 is attached to a first surface of the dielectric member 311, which is the upper surface in FIG. 8 (hereinafter also simply referred to as the upper surface). The other surface of the film 201 is attached to a second surface of the dielectric member 311 (the lower surface in FIG. 8 (hereinafter also simply referred to as the lower surface)) facing the first surface. That is, the films 201 and 204 are attached to each other with the dielectric member 311 sandwiched therebetween. For example, the planar shapes of the film 201, the dielectric member 311, and the film 204 are the same. For example, the planar shapes of the film 201, the dielectric member 311, and the film 204 are rectangular. For example, the film 201, the dielectric member 311, and the film 204 are attached to each other so as to overlap each other when viewed in the planar direction.

[0123] The dielectric member 311 is a dielectric and an insulator, and is molded into a thin plate shape using a flexible material. For example, the dielectric member 311 is molded using rubber such as silicone rubber, PDMS, fluororubber, acrylic rubber, or urethane rubber. Holes 321-1 to 321-4 are formed in the dielectric member 311. The holes 321-1 to 321-4 penetrate the dielectric member 311 from the upper surface to the lower surface. Note that, although FIG. 8 shows cross sections of the electrodes 202-3, 202-7, and 202-11, holes similar to the holes 321-1 to 321-4 are also formed in portions of the dielectric member 311 between the electrodes 202-1, 202-5 and 202-9, 202-2, 202-6 and 202-10, and between the electrodes 202-4, 202-8, and 202-12 and the electrode 205.

[0124] The electrode 205 is formed so as to overlap all of the electrodes 202-1 to 202-12 in the thickness direction of the film 201, the dielectric member 311, and the film 204.

[0125] The holes 321-1 to 321-4 are formed in a columnar shape with a circular cross section so as to be circular on the upper and lower surfaces of the dielectric member 311, respectively. The hole 321-1 is formed between the left end side of the dielectric member 311 in FIG. 8 and a portion sandwiched between the electrodes 202-3 and 205. The hole 321-2 is formed between the portion sandwiched between the electrodes 202-3 and 205 and a portion sandwiched between the electrodes 202-7 and 205. The hole 321-3 is formed between the portion sandwiched between the electrodes 202-7 and 205 and a portion sandwiched between the electrodes 202-11 and 205. The hole 321-4 is formed between the portion sandwiched between the electrodes 202-7 and 205 and the right end side of the dielectric member 311 in FIG. 8.

[0126] In this manner, electrodes 202-3, 202-7, and 202-11, and electrode 205 are arranged to sandwich a portion of dielectric member 311 that is not formed with holes 321-1 to 321-4. In other words, electrodes 202-3, 202-7, and 202-11, and electrode 205 are arranged to sandwich a portion of dielectric member 311 that is not formed with holes 321-1 to 321-4.

[0127] The holes 321-1 to 321-4 are formed in the dielectric member 311 in a portion that is not sandwiched between the electrodes 202-1 to 202-12 and the electrode 205.

[0128] Before use, a voltage of 100V to 15KV is applied to the tactile sensing pad 301 to precharge it with an electric charge. When a voltage is applied between the electrodes 202-1 to 202-12 and the electrode 205 as a precharge, an electric charge is accumulated between the film 201 and the film 204, particularly in the holes 321-1 to 321-4 and holes similar to the holes 321-1 to 321-4 of the dielectric member 311. When the electric charge is precharged, the tactile sensing pad 301 generates a larger voltage with a smaller force, pressure, or vibration.

[0129] When force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 301, a voltage corresponding to the force, pressure, or vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 301, a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0130] The tactile sensing pad 301 is made primarily of resin or silicone rubber, and can be easily deformed to fit the contact object 101, allowing it to detect force, pressure, or vibration caused by the movement of the contact object 101 or force, pressure, or vibration applied to the contact object 101.

[0131] When the ratio of the area of ​​holes 321-1 to 321-4 and holes similar to holes 321-1 to 321-4 to the total area of ​​dielectric member 311 is between 10% and 40%, tactile sensing pad 301 generates a larger voltage with less force, pressure or vibration.

[0132] It should be noted that holes 321-1 to 321-4 and holes similar to holes 321-1 to 321-4 have been described as penetrating from the top surface to the bottom surface of dielectric member 311, but they may not penetrate from the top surface to the bottom surface of dielectric member 311, and may instead be recessed from the top surface or bottom surface of dielectric member 311, and furthermore, may be bubble-shaped holes inside dielectric member 311.

[0133] Hereinafter, when there is no need to distinguish between the holes 321-1 to 321-4, they will simply be referred to as holes 321.

[0134] In addition, the material for forming the dielectric member 311 may be added with about 0.1% by weight to 30% by weight of a storage agent such as graphene, carbon nanotubes, barium titanate, potassium, zinc oxide, MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, ZIF-67, or other MOF (Metal Organic Frameworks) material, to assist in the accumulation of electric charge in the dielectric member 311.

[0135] Additionally, the holes 321 may be filled with 0.5% to 50% by volume of a charge storage material such as graphene, carbon nanotubes, barium titanate, potassium titanate, zinc oxide, MXene, or MOF material to assist in the accumulation of charge.

[0136] In addition, when a capacitor such as MOF materials such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, and ZIF-67 is mixed into the dielectric member 311 or placed in the hole 321, the tactile sensing pad 301 can be used without being charged with an electric charge in advance.

[0137] In addition, when molding the dielectric member 311, a foaming agent may be mixed in an amount of 0.1% by weight to 5% by weight to create air bubbles inside the dielectric member 311, thereby forming the holes 321 in the dielectric member 311.

[0138] Next, a detailed example of the configuration of the tactile sensing pad 351 that constitutes the tactile sensing pad group 21 will be described. The tactile sensing pad 351 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73. Fig. 9 is a cross-sectional view showing a cross section of the tactile sensing pad 351. In Fig. 9, parts that are the same as those shown in Fig. 6 are given the same reference numerals, and their description will be omitted.

[0139] The tactile sensing pad 351 detects force, pressure, or vibration. For example, the tactile sensing pad 351 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0140] The tactile sensing pad 351 includes the film 201, electrodes 202-1 to 202-12, the dielectric member 203, the film 204, and electrodes 361-1 to 361-12. The thickness of the tactile sensing pad 351 is equal to or greater than 0.2 mm and less than 0.5 mm.

[0141] 9 shows cross sections of electrodes 202-3, 202-7, and 202-11, and electrodes 361-3, 361-7, and 361-7. However, a hole 321-1 is formed in a portion of dielectric member 311 between electrodes 202-1 and 361-1 (not shown), a hole 321-2 is formed in a portion of dielectric member 311 between electrodes 202-2 and 361-2 (not shown), and similarly, a hole 321-3 is formed in a portion of dielectric member 311 between electrodes 202-4 to 202-6 and electrode 361-4 (not shown). Holes 321-4 to 321-4 are formed in the portions of dielectric member 311 between electrodes 202-8 to 202-10 and electrodes 361-8 (not shown) to 361-10 (not shown), respectively, holes 321-8 to 321-10 are formed in the portions of dielectric member 311 between electrodes 202-12 and electrode 361-12 (not shown).

[0142] Each of the electrodes 361-1 to 361-12 is formed in a film shape using a conductor. For example, each of the electrodes 361-1 to 361-12 is a coating made of a metal material such as gold (Au), platinum (Pt), titanium (Ti), or aluminum (Al) or a carbon nanotube (CNT) electrode film. The electrodes 361-1 to 361-12 are formed to be flexible. The electrodes 361-1 to 361-12 are insulated from each other. For example, each of the electrodes 361-1 to 361-12 is formed in a circular thin film shape on one surface of the film 204. For example, each of the electrodes 361-1 to 361-12 is formed in a circular shape with a diameter of 1 mm. Each of the electrodes 361-1 to 361-12 is provided with a wiring portion and a terminal, similar to each of the electrodes 202-1 to 202-12.

[0143] The electrodes 361-1 to 361-12 are formed so as to face the electrodes 202-1 to 202-12, respectively. The electrodes 361-1 to 361-12 are formed so as to sandwich the film 201, the dielectric member 203, and the film 204 with the electrodes 202-1 to 202-12, respectively. The electrode 361-1 is disposed at a position facing the electrode 202-1 with the film 201, the dielectric member 203, and the film 204 sandwiched therebetween. The electrode 361-2 is disposed at a position facing the electrode 202-2 with the film 201, the dielectric member 203, and the film 204 sandwiched therebetween. Similarly, the electrodes 361-3 to 361-12 are formed at a position facing the electrodes 202-3 to 202-12, respectively, with the film 201, the dielectric member 203, and the film 204 sandwiched therebetween.

[0144] In other words, the electrodes 361-1 to 361-12 are formed at positions facing the electrodes 202-1 to 202-12, respectively, in the thickness direction of the film 201, the dielectric member 203, and the film 204.

[0145] An end of the hole 221-3 on the lower surface of the dielectric member 203 coincides with the outer periphery of the electrode 361-3. The electrode 361-3 covers an end of the hole 221-3 on the lower surface of the dielectric member 203 on one surface of the film 204. Furthermore, an end of the hole 221-7 on the lower surface of the dielectric member 203 coincides with the outer periphery of the electrode 361-7. The electrode 361-7 covers an end of the hole 221-7 on the lower surface of the dielectric member 203 on one surface of the film 204. Furthermore, an end of the hole 221-11 on the lower surface of the dielectric member 203 coincides with the outer periphery of the electrode 361-11. The electrode 361-11 covers an end of the hole 221-11 on the lower surface of the dielectric member 203 on one surface of the film 204.

[0146] The ends of the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12 on the lower surface of the dielectric member 203 respectively coincide with the outer circumferences of the electrodes 361-1 and 361-2, the electrodes 361-4 to 361-6, the electrodes 361-8 to 361-10, and the electrode 361-12. On one surface of the film 204, the electrodes 361-1 and 361-2, the electrodes 361-4 to 361-6, the electrodes 361-8 to 361-10, and the electrode 361-12 cover the ends of the holes 221-1 and 221-2, the holes 221-4 to 221-6, the holes 221-8 to 221-10, and the hole 221-12 on the lower surface of the dielectric member 203.

[0147] In this manner, each of electrodes 202-1 to 202-12 and each of electrodes 361-1 to 361-12 are arranged to sandwich films 201 and 204, and to sandwich the portions of dielectric member 203 in which holes 221-1 and holes 221-12 are formed, respectively.

[0148] Before use, a voltage of 100 V to 15 KV is applied to the tactile sensing pad 351 to precharge it with an electric charge. When a voltage is applied as a precharge between the electrodes 202-1 to 202-12 and the electrodes 361-1 to 361-12, an electric charge is accumulated between the film 201 and the film 204, particularly in the holes 221-1 to 221-12 of the dielectric member 203. When the electric charge is precharged, the tactile sensing pad 351 generates a larger voltage with a smaller force, pressure, or vibration.

[0149] When force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 351, the tactile sensing pad 351 generates a voltage corresponding to the force, pressure, or vibration between the electrodes 202-1 and 361-1 and / or between the electrodes 202-12 and 361-12. For example, when force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 351, the tactile sensing pad 351 generates a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration between the electrodes 202-1 and 361-1 and / or between the electrodes 202-12 and 361-12.

[0150] The tactile sensing pad 351 is made primarily of resin or silicone rubber, and can be easily deformed to fit the contact object 101, allowing it to detect force, pressure, or vibration caused by the movement of the contact object 101 or force, pressure, or vibration applied to the contact object 101.

[0151] When the ratio of the area of ​​the holes 221-1 to 221-12 to the total area of ​​the dielectric member 203 is between 10% and 40%, the tactile sensing pad 351 generates a larger voltage with a smaller force, pressure or vibration.

[0152] Hereinafter, when there is no need to distinguish between the electrodes 361-1 to 361-12, they will be simply referred to as the electrodes 361.

[0153] In addition, when a capacitor such as MOF materials such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, and ZIF-67 is mixed into the dielectric member 203 or placed in the hole 221, the tactile sensing pad 351 can be used without being charged with an electric charge in advance.

[0154] Next, a detailed example of the configuration of the tactile sensing pad 401 that constitutes the tactile sensing pad group 21 will be described. The tactile sensing pad 401 is used in the tactile sensing pad group 21 in the same manner as the tactile sensing pad 73. Fig. 10 is a cross-sectional view showing a cross section of the tactile sensing pad 401. In Fig. 10, parts that are the same as those shown in Fig. 6 are given the same reference numerals, and their description will be omitted.

[0155] The tactile sensing pad 401 detects force, pressure, or vibration. For example, the tactile sensing pad 401 generates a voltage signal corresponding to the magnitude of the force, the distribution of the pressure, or the amplitude or period of the vibration.

[0156] The tactile sensing pad 401 includes a film 201, electrodes 202-1 to 202-12, a dielectric member 203, a film 204, an electrode 205, and springs 411-1 and 411-2. Tactile Sensing Pad 40110 in a direction indicated by F in FIG. 10. The springs 411-1 and 411-2 are made of a spring material and have a U-shaped cross section. The spring 411-1 presses the left ends of the film 201, the dielectric member 203, and the film 204 with a force of 10 mN to 0.5 N. The spring 411-2 presses the right ends of the film 201, the dielectric member 203, and the film 204 with a force of 10 mN to 0.5 N in a direction indicated by F in FIG. 10. When the springs 411-1 and 411-2 press the opposing ends of the film 201, the dielectric member 203, and the film 204, a preload can be applied uniformly to the entire film 201, the dielectric member 203, and the film 204.

[0157] In this manner, spring 411-1 and spring 411-2 press against the ends of film 201, dielectric member 203, and film 204. In this manner, a larger voltage is generated with a smaller force, pressure, or vibration.

[0158] The springs 411-1 and 411-2 can be made of a metal material or resin. Although the springs 411-1 and 411-2 have been described as sandwiching the opposing ends of the film 201, the dielectric member 203, and the film 204, the present invention is not limited to this, and a configuration in which screws such as bolts and nuts, clips, or the like can be used to sandwich and press the ends.

[0159] Before use, a voltage of 100V to 15KV is applied to the tactile sensing pad 401 to precharge it with an electric charge. When a voltage is applied as a precharge between the electrodes 202-1 to 202-12 and the electrode 205, an electric charge is accumulated between the film 201 and the film 204, particularly in the holes 221-1 to 221-12 of the dielectric member 203. When the electric charge is precharged, the tactile sensing pad 401 generates a larger voltage with a smaller force, pressure, or vibration.

[0160] When force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 401, a voltage corresponding to the force, pressure, or vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205. For example, when force, pressure, or vibration is applied to a predetermined portion or the entire tactile sensing pad 401, a voltage corresponding to the magnitude of the force, the magnitude of the pressure, or the amplitude of the vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205.

[0161] The tactile sensing pad 401 is made primarily of resin or silicone rubber, and can be easily deformed to fit the contact object 101, allowing it to detect force, pressure, or vibration caused by the movement of the contact object 101 or force, pressure, or vibration applied to the contact object 101.

[0162] When the ratio of the area of ​​the holes 221-1 to 221-12 to the total area of ​​the dielectric member 203 is between 10% and 40%, the tactile sensing pad 401 generates a larger voltage with a smaller force, pressure or vibration.

[0163] In addition, when a capacitor such as MOF materials such as MXene, Zn2TTFTB and Cd2TTBFT, Ni3(2,3,6,7,10,11-hexaiminotriphenylene)2[Ni3(HITP)2], Zr-UiO-66, and ZIF-67 is mixed into the dielectric member 203 or placed in the hole 221, the tactile sensing pad 401 can be used without being charged with an electric charge in advance.

[0164] Next, an example of using the tactile sensing pad 73 as a sensor attached to the finger pad will be described. Fig. 11 is a diagram showing the state of the tactile sensing pad 73 attached to the finger pad. The tactile sensing pad 73 is attached to the finger 501 with a fixing band 511 so that the surface on the electrode 205 side contacts the finger pad of the finger 501 and the surface on the electrodes 202-1 to 202-12 side contacts the contact object 101. The tactile sensing pad 73 may be attached to the finger 501 so that the surface on the electrodes 202-1 to 202-12 side contacts the finger pad of the finger 501 and the surface on the electrode 205 side contacts the contact object 101.

[0165] For example, tactile sensing pad 73 as a device to be worn on the finger pad is approximately the same size as finger 501, and has a thickness of 0.2 mm or more and less than 0.5 mm. Tactile sensing pad 73 is thin and flexible, so it fits the shape of finger 501.

[0166] When the tactile sensing pad 73 is pressed against the contact object 101 with the finger 501 and a force, pressure or vibration is applied to a predetermined part or the whole, a voltage corresponding to the force, pressure or vibration is generated between all or any of the electrodes 202-1 to 202-12 and the electrode 205. In this way, the tactile sensing pad 73 can detect the force, pressure or vibration applied to the contact object 101.

[0167] In this manner, the tactile sensing pad 73 can be used alone as a sensor.

[0168] Alternatively, a thin plate glass may be doped with potassium, charged with an electric charge, and sandwiched between the dielectric member 203, the dielectric member 261, or the dielectric member 311 and the film 201 and the film 204. Alternatively, the dielectric member 203, the dielectric member 261, or the dielectric member 311 may be formed by doping 0.01 mm to 0.05 mm silica beads with potassium, mixing them with silicone rubber, and charging them with an electric charge.

[0169] Although it has been described that hole 221, hole 271 or hole 321 is formed in a cylindrical shape with a circular cross-section, the hole is not limited to this and may have any shape, such as an elliptical cylinder, an oblong cylinder, or a polygonal cylinder such as a triangular prism or a rectangular prism, and the cross-sectional shape may change in the thickness direction of dielectric member 203, dielectric member 261 or dielectric member 311.

[0170] In this way, it can be made thinner and more flexible and can detect forces, pressures or vibrations with greater sensitivity, and in wearable devices, it can detect forces, pressures or vibrations with greater sensitivity.

[0171] For example, force, pressure or vibration that causes a perception of vibration, a shock sensation, a pressure of force, an object's shape such as an edge or bump shape or a vibration pattern can be detected and a voltage generated in response.

[0172] In this way, tactile sensing pad group 21 uses one or more tactile sensing pads 73, tactile sensing pad 251, tactile sensing pad 301, tactile sensing pad 351 or tactile sensing pad 401, and each of tactile sensing pad 73, tactile sensing pad 251, tactile sensing pad 301, tactile sensing pad 351 or tactile sensing pad 401 is composed of a piezoelectric film or a fluorine-based film and silicone rubber or the like, and the piezoelectric film or fluorine-based film has electrodes formed in a predetermined pattern for outputting a voltage corresponding to the applied force, pressure or vibration, and a voltage is output independently from each electrode. In tactile sensing pad 73, tactile sensing pad 251, tactile sensing pad 301, tactile sensing pad 351, or tactile sensing pad 401, in order to impart piezoelectricity, a voltage is charged between the piezoelectric film or fluorine-based film to retain static electricity, and a bias frequency voltage is applied to this to generate a voltage corresponding to the applied force, pressure, or vibration.

[0173] As described above, the tactile sensing pad 73 is a sensor. The film 201 generates a voltage when force, pressure, or vibration is applied to it. The electrodes 202 are provided in a film shape on one side of the film 201. The electrodes 202 are provided at a predetermined interval from each other. The film 204 generates a voltage when force, pressure, or vibration is applied to it. The electrodes 205 are provided in a film shape on one side of the film 204. The dielectric member 203 is formed of rubber having dielectric properties in a thin plate shape with holes formed therein. The dielectric member 203 has the other side of the film 201 attached to a first side, which is a predetermined side, and the other side of the film 204 attached to a second side opposite the first side. A storage agent that assists in the accumulation of electric charges is placed in the holes 221-1 to 221-12 formed in the dielectric member 203. The tactile sensing pad 73 generates a voltage between any or all of the electrodes 202 and the electrode 205 in response to force, pressure or vibration applied to a portion or the whole of the pad.

[0174] The spacing between the multiple electrodes 202 provided on one surface of the film 201 can be set to be less than the two-point discrimination threshold of the human touch object 101 .

[0175] A predetermined voltage can be applied to the dielectric member 203 to precharge it.

[0176] Holes formed in the dielectric member 203 may extend from the first surface to the second surface.

[0177] Any one of the multiple electrodes 202 and electrode 205 can be disposed with film 201 and film 204 sandwiched between them, so as to sandwich the portion of dielectric member 203 in which the hole is formed.

[0178] The cross-sectional shape of the hole formed in the dielectric member 203 on the first surface can be made similar to the shape of the surface of the film-like electrode 202 .

[0179] The electrode 202 can be disposed across the film 201 on a cross section of the hole formed in the dielectric member 203, the cross section being on the first surface.

[0180] Any one of the multiple electrodes 202 and electrode 205 can be disposed with film 201 and film 204 sandwiched therebetween, sandwiching a portion of dielectric member 311 other than the portion in which the hole is formed.

[0181] Springs 411-1 and 411-2 that sandwich and press the ends of film 201, film 204 and dielectric member 203 may further be provided.

[0182] A plurality of electrodes 361 may be provided, and each of the plurality of electrodes 361 may be provided at a position facing each of the plurality of electrodes 202.

[0183] When detecting the shape or pattern of the surface of the touch object 101 or the force of contact with the touch object 101, an air actuator 72 can be further provided to displace the film 201, the electrode 202, the film 204, the electrode 205 and the dielectric member 203 and press them against the touch object 101.

[0184] The air actuator 72 can displace the film 201, the electrode 202, the film 204, the electrode 205 and the dielectric member 203 and press them against the contact object 101 by gas or liquid pressure.

[0185] The film 201 , the electrode 202 , the film 204 , the electrode 205 and the dielectric member 203 can be displaced and pressed against the contact object 101 by the cam 122 as a pressing means.

[0186] By pulling the wire 152 via the pulley 153 as a pressing means, the film 201 , the electrode 202 , the film 204 , the electrode 205 and the dielectric member 203 can be displaced and pressed against the contact object 101 .

[0187] Furthermore, the present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the spirit and scope of the present invention. [Explanation of symbols]

[0188] 11 tactile sensing system, 21 tactile sensing pad group, 22 robot system, 41 tactile / pressure drive information calculation system, 42 virtual reality computer system / remote robot manipulation system, 43 image processing system, 71 and 71-1 to 71-4 tactile sensing unit, 72 and 72-1 to 72-4 air actuator, 73 and 73-1 to 73-4 tactile sensing pad, 101 contact object, 121 and 121-1 to 121-4 tactile sensing unit, 122 and 122-1 to 122-4 cam, 123 and 123-1 to 123-4 motor, 151 and 151-1 to 151-4 tactile sensing unit, 152 and 152-1 to 152-4 wire, 153, 153-1 to 153-4, 154 and 154-1 to 154-4 pulleys, 155 and 155-1 to 155-4 motors, 201 film, 202, 202-1 to 202-12 electrodes, 203 dielectric member, 204 film, 205 electrodes, 221, 221-1 to 221-12 holes, 251 tactile sensing pad, 261 dielectric member, 271, 271-1 to 271-9 holes, 301 tactile sensing pad, 311 dielectric member, 321, 321-1 to 321-4 holes, 351 tactile sensing pad, 361, 361-1 to 361-12 electrodes, 401 tactile sensing pad, 411-1 and 411-2 springs, 501 fingers, 511 fixing band

Claims

1. a first film that generates a voltage when a force, pressure or vibration is applied to it; a plurality of first electrodes in the form of a film provided on one surface of the first film at predetermined intervals; a second film that generates a voltage when force, pressure or vibration is applied; a second electrode in the form of a film provided on one surface of the second film; a dielectric member formed of a thin plate of dielectric rubber having a hole, the other surface of the first film being attached to a first surface which is a predetermined surface, and the other surface of the second film being attached to a second surface opposite to the first surface; Including, a capacitor material is placed in the hole formed in the dielectric member to assist in the accumulation of electric charge; A voltage corresponding to a force, pressure or vibration applied to a part or the whole of the first electrode is generated between any or all of the first electrodes and the second electrode. Sensor.

2. 2. The sensor according to claim 1, The interval between the first electrodes provided on one surface of the first film is set to be less than 30 mm. Sensor.

3. 2. The sensor according to claim 1, A predetermined voltage is applied between the first electrodes and the second electrodes, and charges are accumulated in the holes of the dielectric member. Sensor.

4. 2. The sensor according to claim 1, The hole formed in the dielectric member penetrates from the first surface to the second surface. Sensor.

5. 2. The sensor according to claim 1, Any one of the plurality of first electrodes and the second electrode are disposed so as to sandwich the first film and the second film, and to sandwich a portion of the dielectric member in which a hole is formed. Sensor.

6. 6. The sensor according to claim 5, The cross-sectional shape of the hole formed in the dielectric member on the first surface is made similar to the shape of the surface of the film-like first electrode. Sensor.

7. 7. The sensor according to claim 6, The first electrode is disposed over a hole formed in the dielectric member with the first film interposed therebetween. Sensor.

8. 2. The sensor according to claim 1, Any one of the plurality of first electrodes and the second electrode are disposed to sandwich the first film and the second film, and to sandwich a portion of the dielectric member other than a portion in which a hole is formed. Sensor.

9. 2. The sensor according to claim 1, The second electrode is provided in plurality, Each of the second electrodes is provided at a position facing each of the first electrodes. Sensor.

10. 2. The sensor according to claim 1, The sensor further includes a pressing means for displacing the first film, the first electrode, the second film, the second electrode and the dielectric member and pressing them against the object when detecting the shape or pattern of the surface of the object or the force of contact with the object.

11. The sensor according to claim 10, The pressing means is a sensor that uses gas or liquid pressure to displace and press the first film, the first electrode, the second film, the second electrode and the dielectric member against the target.

12. The sensor according to claim 10, The pressing means is a sensor that uses a cam to displace the first film, the first electrode, the second film, the second electrode and the dielectric member and press them against the object.

13. The sensor according to claim 10, The pressing means is a sensor that presses the first film, the first electrode, the second film, the second electrode and the dielectric member against the object by pulling a wire through a pulley.

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