Capacitor element

Abstract

A capacitor element 2 comprises: a capacitor portion 10 which includes an anode plate 11 including a porous portion 11B on at least one main surface of a core portion 11A, a dielectric layer 13 provided on the surface of the porous portion 11B, and a cathode layer 12 provided on the surface of the dielectric layer 13; a through-conductor 20 penetrating through the dielectric layer 13 and the anode plate 11 in the thickness direction; a sealing layer 30 provided to cover the capacitor portion 10; conductor wiring layers 40A and 40B provided on the surface of the sealing layer 30; and an outer insulation layer 50 provided to cover the sealing layer 30 and the conductor wiring layers 40A and 40B. The through-conductor 20 includes cathode through-conductors 20A and 20C that are electrically connected to the cathode layer 12, and anode through-conductors 20B and 20D that are electrically connected to the anode plate 11. The conductor wiring layers 40A and 40B are electrically connected to one of the cathode through-conductor 20A and the anode through-conductor 20B. The cathode through-conductor 20A includes a first cathode through-conductor 20A1 and a second cathode through-conductor 20A2. The anode through-conductor 20B includes a first anode through-conductor 20B1. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance of the first anode through-conductor 20B1 and the first cathode through-conductor 20A1 is equal to the center-to-center distance of the first anode through-conductor 20B1 and the second cathode through-conductor 20A2. The first cathode through-conductor 20A1, the second cathode through-conductor 20A2, and the first anode through-conductor 20B1 are each a direct through-conductor that penetrates through the sealing layer 30 and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40A or 40B at the end portion thereof. The cathode through-conductor 20C further includes at least one fifth cathode through-conductor 20C5. The fifth cathode through-conductor 20C5 is an indirect through-conductor that penetrates through the outer insulation layer 50, the sealing layer 30, and the capacitor portion 10 in the thickness direction and is connected to the conductor wiring layer 40A at the side surface thereof. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance of the fifth cathode through-conductor 20C5 and the first cathode through-conductor 20A1 is equal to the center-to-center distance of the fifth cathode through-conductor 20C5 and the second cathode through-conductor 20A2.

Description

Capacitor element

[0001] The present invention relates to a capacitor element.

[0002] Patent Document 1 discloses a capacitor array including multiple solid electrolytic capacitor elements formed by dividing a single solid electrolytic capacitor sheet, a sheet-like first sealing layer, and a sheet-like second sealing layer. The solid electrolytic capacitor sheet includes an anode plate made of a valve metal, a porous layer provided on at least one main surface of the anode plate, a dielectric layer provided on the surface of the porous layer, and a cathode layer including a solid electrolyte layer provided on the surface of the dielectric layer, and has first and second main surfaces opposing each other in the thickness direction. The first main surface side of each of the multiple solid electrolytic capacitor elements is disposed on the first sealing layer. The second sealing layer is disposed so as to cover the multiple solid electrolytic capacitor elements on the first sealing layer from the second main surface side. The solid electrolytic capacitor elements are separated by slit-shaped sheet removal portions.

[0003] Japanese Patent Application Laid-Open No. 2020-167361

[0004] Patent Document 1 describes that it is preferable to provide a through electrode that penetrates the first sealing layer or the second sealing layer in the thickness direction, and to connect the anode plate or the cathode layer to an external electrode via the through electrode. For example, Figures 22A and 22B of Patent Document 1 describe a structure in which the anode and the cathode are arranged in a staggered pattern, and the anode plate is directly connected to the wall surface of the anode through electrode.

[0005] However, the capacitor array described in Patent Document 1 leaves room for improvement in terms of reducing the equivalent series resistance (ESR) and equivalent series inductance (ESL) of the individual capacitor elements included in the capacitor array.

[0006] It should be noted that there is room for improvement in terms of reducing the equivalent series resistance and equivalent series inductance not only in a capacitor array including a plurality of capacitor elements but also in a single capacitor element.

[0007] An object of the present invention is to provide a capacitor element that can reduce the equivalent series resistance and the equivalent series inductance.

[0008] The capacitor element of the present invention comprises a capacitor section including an anode plate having a porous section on at least one main surface of a core section, a dielectric layer provided on the surface of the porous section, and a cathode layer provided on the surface of the dielectric layer, a through conductor penetrating the dielectric layer and the anode plate in the thickness direction, a sealing layer provided to cover the capacitor section, a conductor wiring layer provided on the surface of the sealing layer, and an outer insulating layer provided to cover the sealing layer and the conductor wiring layer. The through conductor includes a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate. The conductor wiring layer is electrically connected to either the cathode through conductor or the anode through conductor. The cathode through conductor includes a first cathode through conductor and a second cathode through conductor. The anode through conductor includes a first anode through conductor. In a plan view from the thickness direction of the anode plate, the center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to the center-to-center distance between the first anode through conductor and the second cathode through conductor. The first cathode through conductor, the second cathode through conductor, and the first anode through conductor are each direct through conductors that penetrate the sealing layer and the capacitor unit in the thickness direction and are connected to the conductor wiring layer at their ends. The cathode through conductors further include at least one fifth cathode through conductor. The fifth cathode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor unit in the thickness direction and is connected to the conductor wiring layer at its side. In a plan view from the thickness direction of the anode plate, the center-to-center distance between the fifth cathode through conductor and the first cathode through conductor is equal to the center-to-center distance between the fifth cathode through conductor and the second cathode through conductor.

[0009] According to the present invention, it is possible to provide a capacitor element that can reduce the equivalent series resistance and the equivalent series inductance.

[0010] FIG. 1 is a cross-sectional view schematically showing an example of a capacitor element according to a first embodiment of the present invention. FIG. 2A is a plan view taken along lines A and A' in FIG. 1. FIG. 2B is a plan view taken along lines B and B' in FIG. 1. FIG. 2C is a plan view taken along lines C and C' in FIG. 1. FIG. 2D is a plan view taken along lines D and D' in FIG. 1. FIG. 2E is a plan view taken along line E in FIG. 1. FIG. 3 is a plan view schematically showing an example of an arrangement of through conductors constituting a capacitor element according to a first embodiment of the present invention. FIG. 4 is a plan view illustrating the arrangement of cathode through conductors in the arrangement shown in FIG. 3. FIG. 5 is a plan view schematically showing another example of the arrangement of through conductors constituting a capacitor element according to a first embodiment of the present invention. FIG. 6 is a plan view illustrating the arrangement of anode through conductors in the arrangement shown in FIG. 3. FIG. 7 is a plan view illustrating the arrangement of anode through conductors in the arrangement shown in FIG. 5. FIG. 8 is a plan view illustrating anode through conductors located inside a circle centered on the center of the cathode through conductor in the arrangement shown in FIG. 4. FIG. 9 is a plan view illustrating a cathode through conductor present inside a circle centered at the center of the anode through conductor in the arrangement shown in FIG. 6 . FIG. 10 is a plan view schematically illustrating yet another example of the arrangement of through conductors constituting a capacitor element according to a first embodiment of the present invention. FIG. 11 is a plan view illustrating the arrangement of anode through conductors in the arrangement shown in FIG. 10 . FIG. 12 is a cross-sectional view schematically illustrating an example of a capacitor element according to a second embodiment of the present invention. FIG. 13 is a cross-sectional view at a position different from that in FIG. 12 . FIG. 14A is a plan view taken along lines A and A′ in FIG. 12 . FIG. 14B is a plan view taken along lines B and B′ in FIG. 12 . FIG. 14C is a plan view taken along lines C and C′ in FIG. 12 . FIG. 14D is a plan view taken along lines D and D′ in FIG. 12 . FIG. 14E is a plan view taken along lines E and E′ in FIG. 12 . FIG. 14F is a plan view taken along lines F and F′ in FIG. 12 . Fig. 14G is a plan view taken along line G in Fig. 12. Fig. 15A is a plan view schematically showing an example of the arrangement of the through conductors constituting the capacitor element according to the second embodiment of the present invention. Fig. 15B is a plan view showing a state in which the indirect through conductors are removed from Fig. 15A.Fig. 16A is a plan view schematically showing another example of the arrangement of the through conductors constituting the capacitor element according to the second embodiment of the present invention. Fig. 16B is a plan view showing a state in which the indirect through conductors are removed from Fig. 16A . Fig. 17 is a plan view schematically showing yet another example of the arrangement of the through conductors constituting the capacitor element according to the second embodiment of the present invention. Fig. 18A is a plan view illustrating the arrangement of the anode through conductors in the arrangement shown in Fig. 15A . Fig. 18B is a plan view showing a state in which the indirect through conductors are removed from Fig. 18A . Fig. 19A is a plan view illustrating the arrangement of the anode through conductors in the arrangement shown in Fig. 16A . Fig. 19B is a plan view showing a state in which the indirect through conductors are removed from Fig. 19A . Fig. 20 is a plan view illustrating the arrangement of the anode through conductors in the arrangement shown in Fig. 17 . Fig. 21 is a cross-sectional view schematically showing a modified example of the outer insulating layer. Fig. 22 is a cross-sectional view schematically showing an example of the position of a capacitor element including a plurality of capacitor sections.

[0011] The capacitor element of the present invention will be described below. Note that the present invention is not limited to the following configurations and may be modified as appropriate within the scope of the present invention. In addition, a combination of multiple individual preferred configurations described below also constitutes the present invention.

[0012] The following embodiments are merely examples, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. From the second embodiment onwards, a description of the matters common to the first embodiment will be omitted, and only the differences will be described. In particular, similar effects due to similar configurations will not be mentioned in each embodiment.

[0013] In the following description, unless otherwise specified, each embodiment will be simply referred to as the "capacitor element of the present invention."

[0014] In this specification, terms indicating the relationship between elements (e.g., "perpendicular," "parallel," "orthogonal," etc.) and terms indicating the shape of elements are not expressions that only express a strict meaning, but are expressions that also include a range of substantial equivalence, for example, a difference of about a few percent.

[0015] The drawings shown below are schematic diagrams, and the dimensions, aspect ratio, scale, etc. may differ from those of the actual product.

[0016] [First embodiment] Fig. 1 is a cross-sectional view schematically showing an example of a capacitor element according to a first embodiment of the present invention. Fig. 2A is a plan view taken along lines A and A' in Fig. 1. Fig. 2B is a plan view taken along lines B and B' in Fig. 1. Fig. 2C is a plan view taken along lines C and C' in Fig. 1. Fig. 2D is a plan view taken along lines D and D' in Fig. 1. Fig. 2E is a plan view taken along line E in Fig. 1. Note that Fig. 1 is a cross-sectional view taken along line II in Fig. 2A.

[0017] The capacitor element 1 shown in Fig. 1 includes a capacitor portion 10 and a through conductor 20. In the example shown in Fig. 1, the capacitor element 1 further includes a sealing layer 30 and conductor wiring layers 40A and 40B.

[0018] The capacitor section 10 includes an anode plate 11 having a porous portion 11B on at least one main surface of a core portion 11A, a dielectric layer 13 provided on the surface of the porous portion 11B, and a cathode layer 12 provided on the surface of the dielectric layer 13. This makes up an electrolytic capacitor. In the example shown in Fig. 1, the anode plate 11 has the porous portion 11B on both main surfaces of the core portion 11A, but the porous portion 11B may be provided on only one main surface of the core portion 11A.

[0019] The cathode layer 12 includes, for example, a solid electrolyte layer provided on the surface of the dielectric layer 13. It is preferable that the cathode layer 12 further includes a conductor layer provided on the surface of the solid electrolyte layer. When the cathode layer 12 includes a solid electrolyte layer, the capacitor unit 10 constitutes a solid electrolytic capacitor.

[0020] The through conductor 20 penetrates the dielectric layer 13 and the anode plate 11 in the thickness direction (the vertical direction in FIG. 1).

[0021] The through conductors 20 include a cathode through conductor 20A electrically connected to the cathode layer 12 and an anode through conductor 20B electrically connected to the anode plate 11 .

[0022] 1 , a plurality of cathode through conductors 20A are provided so as to penetrate in the thickness direction through the sealing layer 30 and the capacitor section 10. Each cathode through conductor 20A is connected at its end to a conductor wiring layer 40A provided on the surface of the sealing layer 30.

[0023] As shown in FIG. 2C, the cathode through conductor 20A preferably exists within the cathode layer 12 in a plan view in the thickness direction of the anode plate 11.

[0024] The cathode through conductor 20A may be provided on at least the inner wall surface of a through hole that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction. That is, the cathode through conductor 20A may be provided only on the inner wall surface of the through hole, or may be provided throughout the entire interior of the through hole. When the cathode through conductor 20A is provided only on the inner wall surface of the through hole, the space surrounded by the cathode through conductor 20A within the through hole may be filled with a material containing resin. That is, a resin filling portion 25A may be provided inside the cathode through conductor 20A.

[0025] As shown in FIG. 1, an insulating material such as the sealing layer 30 is filled between the through-hole that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and the cathode through conductor 20A.

[0026] 1 , a plurality of anode through conductors 20B are provided so as to penetrate in the thickness direction through the sealing layer 30 and the capacitor section 10. Each anode through conductor 20B is connected at its end to a conductor wiring layer 40B provided on the surface of the sealing layer 30.

[0027] As shown in FIG. 2C, the anode through conductor 20B preferably exists within the cathode layer 12 in a plan view in the thickness direction of the anode plate 11.

[0028] The anode through conductor 20B may be provided on at least the inner wall surface of a through hole that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction. That is, the anode through conductor 20B may be provided only on the inner wall surface of the through hole, or may be provided throughout the entire interior of the through hole. When the anode through conductor 20B is provided only on the inner wall surface of the through hole, the space surrounded by the anode through conductor 20B within the through hole may be filled with a material containing resin. That is, a resin filling portion 25B may be provided inside the anode through conductor 20B.

[0029] In this specification, among the through conductors 20, those that penetrate the sealing layer 30 and the capacitor section 10 in the thickness direction and are connected at their ends to the conductor wiring layer 40A or 40B are referred to as "direct through conductors." Therefore, the cathode through conductor 20A and the anode through conductor 20B are each a direct through conductor.

[0030] 1 , the anode through conductor 20B is preferably electrically connected to the anode plate 11 at the inner wall surface of a through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction. More specifically, the anode through conductor 20B is preferably electrically connected to the end surface of the anode plate 11 that faces the inner wall surface of the through hole in the surface direction. In this case, no insulating material such as the sealing layer 30 is filled between the through hole that penetrates the sealing layer 30 and the capacitor unit 10 in the thickness direction and the anode through conductor 20B.

[0031] 1, the core portion 11A and the porous portion 11B are preferably exposed on the end surface of the anode plate 11 electrically connected to the anode penetrating conductor 20B. In this case, the porous portion 11B as well as the core portion 11A are electrically connected to the anode penetrating conductor 20B.

[0032] When viewed from the thickness direction of the anode plate 11, it is preferable that the anode penetrating conductor 20B is electrically connected to the anode plate 11 around the entire circumference of the through hole that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction, as shown in Figures 2D and 2E.

[0033] The anode through conductor 20B may be electrically connected via an anode connection layer, or may be directly connected to the end surface of the anode plate 11 .

[0034] The sealing layer 30 is provided so as to cover the capacitor section 10. The sealing layer 30 protects the capacitor section 10.

[0035] As shown in FIG. 1, the sealing layer 30 is preferably provided on both of the principal surfaces of the capacitor section 10 that face each other in the thickness direction.

[0036] The conductor wiring layers 40A and 40B are provided on the surface of the sealing layer 30 and are electrically connected to either the cathode through conductor 20A or the anode through conductor 20B.

[0037] The conductor wiring layer 40A is electrically connected to the cathode through conductor 20A. In the example shown in FIG. 1 , the conductor wiring layer 40A is provided on the surface of the cathode through conductor 20A and functions as a connection terminal of the capacitor element 1.

[0038] Specifically, in the example shown in FIG. 1, the conductor wiring layer 40A is electrically connected to the cathode layer 12 through a via conductor 45 that penetrates the sealing layer 30, and functions as a connection terminal for the cathode layer 12.

[0039] The conductor wiring layer 40B is electrically connected to the anode through conductor 20B. In the example shown in FIG. 1 , the conductor wiring layer 40B is provided on the surface of the anode through conductor 20B and functions as a connection terminal of the capacitor element 1.

[0040] Specifically, in the example shown in FIG. 1, the conductor wiring layer 40B is electrically connected to the anode plate 11 via the anode through conductor 20B, and functions as a connection terminal for the anode plate 11.

[0041] 3 is a plan view schematically showing an example of the arrangement of the through conductors that constitute the capacitor element according to the first embodiment of the present invention. The plan view shown in FIG. 3 is the same as the plan view shown in FIG. 2E.

[0042] In the example shown in Fig. 3, the through conductors are arranged in a square pattern. In the square pattern, a through conductor is arranged at each vertex of a square. In Fig. 3, the cathode through conductors and the anode through conductors are arranged alternately from top to bottom, and the cathode through conductors and the anode through conductors are arranged alternately from left to right.

[0043] 3, the cathode through-conductors include a first cathode through-conductor 20A1 and a second cathode through-conductor 20A2, and the anode through-conductors include a first anode through-conductor 20B1. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the first anode through-conductor 20B1 and the first cathode through-conductor 20A1 is equal to the center-to-center distance between the first anode through-conductor 20B1 and the second cathode through-conductor 20A2.

[0044] In the capacitor element according to the first embodiment of the present invention, multiple cathode through conductors are electrically connected to one cathode layer, thereby forming parallel current paths for one capacitor element, thereby reducing the equivalent series resistance and equivalent series inductance. Furthermore, the center-to-center distances between the anode through conductors and the cathode through conductors are made uniform, thereby reducing the impedance difference between the current paths. Furthermore, heat generated by the capacitor element can be dispersed, thereby increasing the current capacity.

[0045] In this specification, the center of the through conductor means the center of the smallest circle that contains the through conductor when viewed from above in the thickness direction of the anode plate. Therefore, the center-to-center distance between the anode through conductor and the cathode through conductor means the length of the line segment connecting the center of the anode through conductor and the center of the cathode through conductor, which is determined by the above method. The same applies to the center-to-center distance between the cathode through conductor and the cathode through conductor, and the center-to-center distance between the anode through conductor and the anode through conductor.

[0046] Furthermore, in this specification, the expression "having the same center-to-center distance" does not only mean that the center-to-center distance is completely the same, but also means that the center-to-center distance is substantially the same, for example, including a difference of about a few percent.

[0047] The first cathode through conductor 20A1, the second cathode through conductor 20A2 and the first anode through conductor 20B1 are each direct through conductors that penetrate the sealing layer 30 and the capacitor section 10 in the thickness direction and are connected at their ends to the conductor wiring layer 40A or 40B.

[0048] FIG. 4 is a plan view for explaining the arrangement of the cathode through conductors in the arrangement shown in FIG.

[0049] As shown in Fig. 4, the cathode through conductors preferably further include at least one third cathode through conductor 20A3. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 is equal to the center-to-center distance between the first cathode through conductor 20A1 and the third cathode through conductor 20A3. In the example shown in Fig. 4, there are three third cathode through conductors 20A3.

[0050] 4 , when the cathode through conductors include the third cathode through conductor 20A3, the third cathode through conductor 20A3 preferably exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 90 degrees or 180 degrees around the center of the first cathode through conductor 20A1 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 90 degrees or 180 degrees around the center of the first cathode through conductor 20A1 in a plan view from the thickness direction of the anode plate 11.

[0051] The third cathode through conductor 20A3 is a direct through conductor that passes through the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its end.

[0052] Furthermore, as shown in Fig. 4, it is preferable that the cathode through conductors further include at least one fourth cathode through conductor 20A4. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the second cathode through conductor 20A2 and the first cathode through conductor 20A1 is equal to the center-to-center distance between the second cathode through conductor 20A2 and the fourth cathode through conductor 20A4. In the example shown in Fig. 4, there are three fourth cathode through conductors 20A4.

[0053] When the cathode through conductors include the fourth cathode through conductor 20A4, it is preferable that the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 90 degrees or 180 degrees around the center of the second cathode through conductor 20A2 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 90 degrees or 180 degrees around the center of the second cathode through conductor 20A2 in a plan view from the thickness direction of the anode plate 11.

[0054] The fourth cathode through conductor 20A4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its end.

[0055] FIG. 5 is a plan view schematically showing another example of the arrangement of the through conductors that constitute the capacitor element according to the first embodiment of the present invention.

[0056] In the example shown in Fig. 5, the through conductors are arranged in a hexagonal arrangement. In the hexagonal arrangement, the through conductors are arranged at each vertex of a regular hexagon and at the center of the regular hexagon. In Fig. 5, the cathode through conductors and the anode through conductors are arranged alternately from top to bottom.

[0057] 5 , the cathode through-conductors include a first cathode through-conductor 20A1 and a second cathode through-conductor 20A2, and the anode through-conductors include a first anode through-conductor 20B1. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the first anode through-conductor 20B1 and the first cathode through-conductor 20A1 is equal to the center-to-center distance between the first anode through-conductor 20B1 and the second cathode through-conductor 20A2.

[0058] In the example shown in FIG. 5, one third cathode through conductor 20A3 is present.

[0059] 5 , when the cathode through conductors include the third cathode through conductor 20A3, the third cathode through conductor 20A3 preferably exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 60 degrees or 120 degrees with respect to the center of the first cathode through conductor 20A1 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 60 degrees or 120 degrees with respect to the center of the first cathode through conductor 20A1 in a plan view from the thickness direction of the anode plate 11.

[0060] Furthermore, in the example shown in FIG. 5, one fourth cathode through conductor 20A4 is present.

[0061] When the cathode through conductors include the fourth cathode through conductor 20A4, it is preferable that the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 60 degrees or 120 degrees with respect to the center of the second cathode through conductor 20A2 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the fourth cathode through conductor 20A4 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 by an angle of 60 degrees or 120 degrees with respect to the center of the second cathode through conductor 20A2 in a plan view from the thickness direction of the anode plate 11.

[0062] As shown in Figure 4 or Figure 5, when the cathode through conductor includes the third cathode through conductor 20A3, it is preferable that, in a planar view from the thickness direction of the anode plate 11, the third cathode through conductor 20A3 exists on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the first cathode through conductor 20A1.

[0063] Furthermore, when the cathode through conductor includes the fourth cathode through conductor 20A4, it is preferable that, when viewed in a plane from the thickness direction of the anode plate 11, the fourth cathode through conductor 20A4 is located on a straight line obtained by rotating a line segment connecting the center of the first cathode through conductor 20A1 and the center of the second cathode through conductor 20A2 at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the second cathode through conductor 20A2.

[0064] FIG. 6 is a plan view for explaining the arrangement of the anode through conductors in the arrangement shown in FIG.

[0065] 6, the anode through conductor preferably further includes a second anode through conductor 20B2. In a plan view in the thickness direction of the anode plate 11, the center-to-center distance between the first cathode through conductor 20A1 and the first anode through conductor 20B1 is equal to the center-to-center distance between the first cathode through conductor 20A1 and the second anode through conductor 20B2.

[0066] The second anode through conductor 20B2 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40B at its end.

[0067] As shown in Fig. 6, the anode through conductors preferably further include at least one third anode through conductor 20B3. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 is equal to the center-to-center distance between the first anode through conductor 20B1 and the third anode through conductor 20B3. In the example shown in Fig. 6, there are three third anode through conductors 20B3.

[0068] 6 , when the anode through conductors include the third anode through conductor 20B3, the third anode through conductor 20B3 preferably exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 90 degrees or 180 degrees around the center of the first anode through conductor 20B1 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the third anode through conductor 20B3 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 90 degrees or 180 degrees around the center of the first anode through conductor 20B1 in a plan view from the thickness direction of the anode plate 11.

[0069] The third anode through conductor 20B3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40B at its end.

[0070] Furthermore, as shown in Fig. 6, it is preferable that the anode through conductors further include at least one fourth anode through conductor 20B4. In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the second anode through conductor 20B2 and the first anode through conductor 20B1 is equal to the center-to-center distance between the second anode through conductor 20B2 and the fourth anode through conductor 20B4. In the example shown in Fig. 6, there are three fourth anode through conductors 20B4.

[0071] When the anode through conductors include the fourth anode through conductor 20B4, it is preferable that the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 90 degrees or 180 degrees around the center of the second anode through conductor 20B2 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 90 degrees or 180 degrees around the center of the second anode through conductor 20B2 in a plan view from the thickness direction of the anode plate 11.

[0072] The fourth anode through conductor 20B4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40B at its end.

[0073] FIG. 7 is a plan view for explaining the arrangement of the anode through conductors in the arrangement shown in FIG.

[0074] Also in FIG. 7, it is preferable that the anode through conductor further includes a second anode through conductor 20B2.

[0075] In the example shown in FIG. 7, one third anode through conductor 20B3 is present.

[0076] 7 , when the anode through conductors include the third anode through conductor 20B3, the third anode through conductor 20B3 preferably exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 60 degrees or 120 degrees around the center of the first anode through conductor 20B1 in a plan view from the thickness direction of the anode plate 11. In this case, the smallest circle that contains the third anode through conductor 20B3 in a plan view from the thickness direction of the anode plate 11 may exist on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 60 degrees or 120 degrees around the center of the first anode through conductor 20B1.

[0077] Furthermore, in the example shown in FIG. 7, one fourth anode through conductor 20B4 is present.

[0078] When the anode through conductors include the fourth anode through conductor 20B4, it is preferable that the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 60 degrees or 120 degrees around the center of the second anode through conductor 20B2 in a plan view from the thickness direction of the anode plate 11. In this case, it is sufficient that the smallest circle that contains the fourth anode through conductor 20B4 exists on a straight line obtained by rotating a line segment connecting the center of the first anode through conductor 20B1 and the center of the second anode through conductor 20B2 by an angle of 60 degrees or 120 degrees around the center of the second anode through conductor 20B2 in a plan view from the thickness direction of the anode plate 11.

[0079] As shown in Figure 6 or Figure 7, when the anode penetrating conductor includes the third anode penetrating conductor 20B3, it is preferable that, when viewed in a plane from the thickness direction of the anode plate 11, the third anode penetrating conductor 20B3 is located on a straight line obtained by rotating a line segment connecting the center of the first anode penetrating conductor 20B1 and the center of the second anode penetrating conductor 20B2 at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the first anode penetrating conductor 20B1.

[0080] Furthermore, when the anode penetrating conductor includes the fourth anode penetrating conductor 20B4, it is preferable that, when viewed in a plane from the thickness direction of the anode plate 11, the fourth anode penetrating conductor 20B4 is located on a straight line obtained by rotating a line segment connecting the center of the first anode penetrating conductor 20B1 and the center of the second anode penetrating conductor 20B2 at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the second anode penetrating conductor 20B2.

[0081] FIG. 8 is a plan view illustrating the anode through conductors present inside a circle centered on the center of the cathode through conductor in the arrangement shown in FIG.

[0082] As shown in Fig. 8, in a plan view from the thickness direction of the anode plate, it is preferable that the number of anode through conductors 20B present within a circle whose radius is the center-to-center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 and whose center is the center of the first cathode through conductor 20A1 is the same as the number of anode through conductors 20B present within a circle whose radius is the center-to-center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 and whose center is the center of the second cathode through conductor 20A2. In the example shown in Fig. 8, there are four anode through conductors 20B within each circle.

[0083] As shown in FIG. 8, by arranging capacitors evenly and in parallel on the evenly arranged current paths, the noise removal effect can be improved.

[0084] In particular, when viewed in a plane in the thickness direction of the anode plate, it is preferable that the difference between the total area of ​​the anode penetrating conductors 20B that overlap with a circle whose radius is the center-to-center distance between the first cathode penetrating conductor 20A1 and the second cathode penetrating conductor 20A2 and whose center is the center of the first cathode penetrating conductor 20A1, and the total area of ​​the anode penetrating conductors 20B that exist within a circle whose radius is the center-to-center distance between the first cathode penetrating conductor 20A1 and the second cathode penetrating conductor 20A2 and whose center is the center of the second cathode penetrating conductor 20A2, is within ±5%.

[0085] FIG. 9 is a plan view illustrating the cathode through conductors present inside a circle centered on the center of the anode through conductor in the arrangement shown in FIG.

[0086] 9, in a plan view from the thickness direction of the anode plate, it is preferable that the number of cathode through conductors 20A present within a circle whose radius is the center-to-center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 and whose center is the center of the first anode through conductor 20B1 is the same as the number of cathode through conductors 20A present within a circle whose radius is the center-to-center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 and whose center is the center of the second anode through conductor 20B2. In the example shown in FIG. 9, there are four cathode through conductors 20A within each circle.

[0087] In particular, when viewed in a plane in the thickness direction of the anode plate, it is preferable that the difference between the total area of ​​the cathode penetrating conductors 20A that overlap with a circle whose radius is the center-to-center distance between the first anode penetrating conductor 20B1 and the second anode penetrating conductor 20B2 and whose center is the center of the first anode penetrating conductor 20B1, and the total area of ​​the cathode penetrating conductors 20A that exist within a circle whose radius is the center-to-center distance between the first anode penetrating conductor 20B1 and the second anode penetrating conductor 20B2 and whose center is the center of the second anode penetrating conductor 20B2, is within ±5%.

[0088] FIG. 10 is a plan view schematically showing yet another example of the arrangement of the through conductors that constitute the capacitor element according to the first embodiment of the present invention.

[0089] In the example shown in Fig. 10, the through conductors are arranged in a hexagonal pattern. In Fig. 10, two cathode through conductors and two anode through conductors are alternately arranged from top to bottom.

[0090] The example shown in FIG. 10 differs from the example shown in FIG. 5 in that there are two third cathode through conductors 20A3 and two fourth cathode through conductors 20A4.

[0091] 4 or 10, when the cathode through conductors include the third cathode through conductor 20A3 and the fourth cathode through conductor 20A4, it is preferable that there are two or more third cathode through conductors 20A3 and two or more fourth cathode through conductors 20A4. In this case, the effects of reducing the equivalent series resistance and equivalent series inductance and the impedance difference between the current paths can be enhanced. In addition, the effects of dispersing heat generated by the capacitor element and increasing the current capacity can be enhanced.

[0092] FIG. 11 is a plan view for explaining the arrangement of the anode through conductors in the arrangement shown in FIG.

[0093] The example shown in FIG. 11 differs from the example shown in FIG. 7 in that there are two third anode through conductors 20B3 and two fourth anode through conductors 20B4.

[0094] As shown in Figure 6 or Figure 11, when the anode through conductor includes a third anode through conductor 20B3 and a fourth anode through conductor 20B4, it is preferable that there are two or more third anode through conductors 20B3 and two or more fourth anode through conductors 20B4.

[0095] The detailed configuration of the capacitor element 1 will be described below.

[0096] Examples of the planar shape of the capacitor element 1 when viewed in the thickness direction include a rectangle (square or oblong), a quadrangle other than a rectangle, a polygon such as a triangle, a pentagon, or a hexagon, a circle, an ellipse, a combination of these, etc. The planar shape of the capacitor element 1 may also be an L-shape, a C-shape, a stepped shape, etc.

[0097] The anode plate 11 is preferably made of a valve metal that exhibits so-called valve action. Examples of the valve metal include simple metals such as aluminum, tantalum, niobium, titanium, and zirconium, and alloys containing at least one of these metals. Among these, aluminum or an aluminum alloy is preferred.

[0098] The shape of the anode plate 11 is preferably a flat plate, and more preferably a foil. Thus, in this specification, the term "plate-like" includes "foil-like".

[0099] The anode plate 11 may have the porous portion 11B on at least one main surface of the core portion 11A. That is, the anode plate 11 may have the porous portion 11B on only one main surface of the core portion 11A, or may have the porous portion 11B on both main surfaces of the core portion 11A. The porous portion 11B is preferably a porous layer formed on the surface of the core portion 11A, and more preferably an etched layer.

[0100] The thickness of the anode plate 11 before etching is preferably 60 μm or more and 200 μm or less. The thickness of the unetched core portion 11A after etching is preferably 15 μm or more and 70 μm or less. The thickness of the porous portion 11B is designed according to the required withstand voltage and electrostatic capacitance, but the combined thickness of the porous portions 11B on both sides of the core portion 11A is preferably 10 μm or more and 180 μm or less.

[0101] The pore diameter of the porous portion 11B is preferably 10 nm or more and 600 nm or less. The pore diameter of the porous portion 11B refers to the median diameter D50 measured with a mercury porosimeter. The pore diameter of the porous portion 11B can be controlled, for example, by adjusting various etching conditions.

[0102] The dielectric layer 13 provided on the surface of the porous portion 11B is porous, reflecting the surface condition of the porous portion 11B, and has a finely uneven surface shape. The dielectric layer 13 is preferably made of an oxide film of the valve metal. For example, when aluminum foil is used as the anode plate 11, the dielectric layer 13 made of an oxide film can be formed by anodizing the surface of the aluminum foil in an aqueous solution containing ammonium adipate or the like (also called chemical conversion treatment).

[0103] The thickness of the dielectric layer 13 is designed according to the required withstand voltage and capacitance, but is preferably 10 nm or more and 100 nm or less.

[0104] When the cathode layer 12 includes a solid electrolyte layer, examples of materials constituting the solid electrolyte layer include conductive polymers such as polypyrroles, polythiophenes, and polyanilines. Among these, polythiophenes are preferred, and poly(3,4-ethylenedioxythiophene), also known as PEDOT, is particularly preferred. The conductive polymer may also contain a dopant such as polystyrene sulfonate (PSS). The solid electrolyte layer preferably includes an inner layer that fills the pores (recesses) of the dielectric layer 13 and an outer layer that covers the dielectric layer 13.

[0105] The thickness of the solid electrolyte layer from the surface of the porous portion 11B is preferably 2 μm or more and 20 μm or less.

[0106] The solid electrolyte layer is formed, for example, by a method of forming a polymer film of poly(3,4-ethylenedioxythiophene) or the like on the surface of the dielectric layer 13 using a treatment liquid containing a monomer such as 3,4-ethylenedioxythiophene, or by a method of applying a dispersion liquid of a polymer such as poly(3,4-ethylenedioxythiophene) to the surface of the dielectric layer 13 and drying it.

[0107] The solid electrolyte layer can be formed in a predetermined region by applying the above-mentioned treatment liquid or dispersion liquid to the surface of the dielectric layer 13 by a method such as sponge transfer, screen printing, dispenser application, or inkjet printing.

[0108] When the cathode layer 12 includes a conductor layer, the conductor layer includes at least one layer selected from a conductive resin layer and a metal layer. The conductor layer may be a conductive resin layer alone or a metal layer alone. The conductor layer preferably covers the entire surface of the solid electrolyte layer.

[0109] The conductive resin layer may be, for example, a conductive adhesive layer containing at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler, and carbon filler.

[0110] Examples of the metal layer include a metal plating film and a metal foil. The metal layer is preferably made of at least one metal selected from the group consisting of nickel, copper, silver, and alloys containing these metals as the main component. The term "main component" refers to the elemental component with the largest weight ratio.

[0111] The conductive layer includes, for example, a carbon layer provided on the surface of the solid electrolyte layer and a copper layer provided on the surface of the carbon layer.

[0112] The carbon layer is provided to electrically and mechanically connect the solid electrolyte layer and the copper layer. The carbon layer can be formed in a predetermined area by applying a carbon paste to the surface of the solid electrolyte layer by a method such as sponge transfer, screen printing, dispenser application, or inkjet printing. The carbon layer is preferably laminated with the copper layer in the subsequent step while the carbon layer is still in a viscous state before drying. The thickness of the carbon layer is preferably 2 μm or more and 20 μm or less.

[0113] The copper layer can be formed in a predetermined region by applying a copper paste to the surface of the carbon layer by sponge transfer, screen printing, spray coating, dispenser coating, inkjet printing, etc. The thickness of the copper layer is preferably 2 μm or more and 20 μm or less.

[0114] Among the through conductors 20, the cathode through conductor 20A, which is a direct through conductor, is formed, for example, as follows. First, a first through hole penetrating the capacitor unit 10 in the thickness direction is formed by processing such as drilling or laser processing. Next, an insulating material such as a sealing layer 30 is filled into the first through hole. A second through hole is formed by processing such as drilling or laser processing on the portion filled with the insulating material. At this time, the diameter of the second through hole is made smaller than the diameter of the first through hole filled with the insulating material, thereby creating a state in which the insulating material is present between the inner wall surface of the first through hole and the inner wall surface of the second through hole in the planar direction. Then, the inner wall surface of the second through hole is metallized with a metal material containing a low-resistance metal such as copper, gold, or silver, thereby forming the cathode through conductor 20A, which is a direct through conductor. When forming the cathode through conductor 20A, for example, metallizing the inner wall surface of the second through hole by processing such as electroless copper plating or electrolytic copper plating facilitates processing. As for the method of forming the cathode through conductor 20A, in addition to the method of metallizing the inner wall surface of the second through hole, a method of filling the second through hole with a metal material, a composite material of metal and resin, etc. may also be used.

[0115] Of the through conductors 20, the anode through conductor 20B, which is a direct through conductor, is formed, for example, as follows. First, a third through hole penetrating the sealing layer 30 and the capacitor unit 10 in the thickness direction is formed by processing such as drilling or laser processing. Then, the inner wall surface of the third through hole is metallized with a metal material containing a low-resistance metal such as copper, gold, or silver, thereby forming the anode through conductor 20B, which is a direct through conductor. When forming the anode through conductor 20B, for example, metallizing the inner wall surface of the third through hole by processing such as electroless copper plating or electrolytic copper plating facilitates processing. Note that the method of forming the anode through conductor 20B may include filling the third through hole with a metal material, a composite material of metal and resin, or the like, in addition to metallizing the inner wall surface of the third through hole.

[0116] When a resin filling portion 25A is provided inside the cathode penetrating conductor 20A, the material constituting the resin filling portion 25A may have a thermal expansion coefficient greater than, smaller than, or the same as that of the material constituting the cathode penetrating conductor 20A (e.g., copper).

[0117] When a resin filling portion 25B is provided inside the anode penetrating conductor 20B, the material constituting the resin filling portion 25B may have a thermal expansion coefficient greater than, less than, or the same as that of the material constituting the anode penetrating conductor 20B (e.g., copper).

[0118] The sealing layer 30 is made of an insulating material, and in this case, the sealing layer 30 is preferably made of an insulating resin.

[0119] Examples of insulating resins that form the sealing layer 30 include epoxy resins and phenolic resins.

[0120] Preferably, the sealing layer 30 further contains a filler.

[0121] Examples of the filler contained in the sealing layer 30 include inorganic fillers such as silica particles and alumina particles.

[0122] The sealing layer 30 may be composed of only one layer or two or more layers. When the sealing layer 30 is composed of two or more layers, the materials constituting the respective layers may be the same or different.

[0123] The sealing layer 30 is formed so as to seal the capacitor portion 10 by, for example, a method of thermocompressing an insulating resin sheet, or a method of applying an insulating resin paste and then thermally curing it.

[0124] Between the capacitor section 10 and the sealing layer 30, for example, a stress relaxation layer, a moisture-proof film, or the like may be provided.

[0125] Examples of the constituent material of the conductor wiring layer 40A include metal materials containing low-resistance metals such as silver, gold, copper, etc. In this case, the conductor wiring layer 40A is formed by, for example, plating the surface of the cathode through conductor 20A.

[0126] In order to improve the adhesion between the conductor wiring layer 40A and other members, in this case, the adhesion between the conductor wiring layer 40A and the cathode through conductor 20A, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler, and carbon filler and a resin may be used as a constituent material of the conductor wiring layer 40A.

[0127] Examples of the constituent material of the conductor wiring layer 40B include metal materials containing low-resistance metals such as silver, gold, copper, etc. In this case, the conductor wiring layer 40B is formed by, for example, plating the surface of the anode through conductor 20B.

[0128] In order to improve the adhesion between the conductor wiring layer 40B and other members, in this case, the adhesion between the conductor wiring layer 40B and the anode penetrating conductor 20B, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler, and carbon filler and a resin may be used as a constituent material of the conductor wiring layer 40B.

[0129] The materials constituting the conductor wiring layers 40A and 40B are preferably the same at least in terms of type, but may be different from each other.

[0130] Examples of materials that can be used to form the via conductors 45 include metal materials containing low-resistance metals such as silver, gold, and copper.

[0131] The via conductor 45 is formed, for example, by plating the inner wall surface of a through hole that penetrates the sealing layer 30 in the thickness direction with the above-mentioned metal material, or by filling it with a conductive paste and then performing a heat treatment.

[0132] Although not shown in FIG. 1 , the capacitor section 10 may further include an insulating layer provided around the through conductor 20 on at least one main surface of the anode plate 11 .

[0133] 1, the capacitor unit 10 may further include an insulating layer provided on at least one main surface of the anode plate 11 so as to surround the periphery of the cathode layer 12. By surrounding the periphery of the cathode layer 12 with the insulating layer, insulation between the anode plate 11 and the cathode layer 12 is ensured, and a short circuit between them is prevented.

[0134] The insulating layer is made of an insulating material, and in this case, the insulating layer is preferably made of an insulating resin.

[0135] Examples of insulating resins that form the insulating layer include polyphenylsulfone resins, polyethersulfone resins, cyanate ester resins, fluororesins (tetrafluoroethylene, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymers, etc.), polyimide resins, polyamideimide resins, epoxy resins, and derivatives or precursors thereof.

[0136] The insulating layer may be made of the same resin as the sealing layer 30. Unlike the sealing layer 30, if the insulating layer contains an inorganic filler, it may adversely affect the effective capacitive portion of the capacitor section 10. Therefore, it is preferable that the insulating layer be made of a resin alone.

[0137] The insulating layer can be formed in a predetermined area by applying a mask material, such as a composition containing an insulating resin, to the surface of the porous portion 11B by a method such as sponge transfer, screen printing, dispenser application, or inkjet printing.

[0138] The insulating layer may be formed on the porous portion 11B either before or after the dielectric layer 13 is formed.

[0139] Second Embodiment In a capacitor element according to a second embodiment of the present invention, the through conductors further include indirect through conductors.

[0140] FIG. 12 is a cross-sectional view schematically showing an example of a capacitor element according to a second embodiment of the present invention. FIG. 13 is a cross-sectional view taken at a position different from that in FIG. 12. FIG. 14A is a plan view taken along lines A and A' in FIG. 12. FIG. 14B is a plan view taken along lines B and B' in FIG. 12. FIG. 14C is a plan view taken along lines C and C' in FIG. 12. FIG. 14D is a plan view taken along lines D and D' in FIG. 12. FIG. 14E is a plan view taken along lines E and E' in FIG. 12. FIG. 14F is a plan view taken along lines F and F' in FIG. 12. FIG. 14G is a plan view taken along line G in FIG. 12. Note that FIG. 12 is a cross-sectional view taken along line II in FIG. 14A, and FIG. 13 is a cross-sectional view taken along line II-II in FIG. 14A.

[0141] 12 and 13 includes a capacitor portion 10, a through conductor 20, a sealing layer 30, conductor wiring layers 40A and 40B, and an outer insulating layer 50. In the example shown in Figures 12 and 13, the capacitor element 2 further includes conductor wiring layers 40C and 40D.

[0142] The capacitor section 10 includes an anode plate 11 having a porous portion 11B on at least one main surface of a core portion 11A, a dielectric layer 13 provided on the surface of the porous portion 11B, and a cathode layer 12 provided on the surface of the dielectric layer 13. This configures the capacitor section 10 as an electrolytic capacitor. In the example shown in Figures 12 and 13, the anode plate 11 has the porous portion 11B on both main surfaces of the core portion 11A, but the porous portion 11B may be provided on only one main surface of the core portion 11A.

[0143] The cathode layer 12 includes, for example, a solid electrolyte layer provided on the surface of the dielectric layer 13. It is preferable that the cathode layer 12 further includes a conductor layer provided on the surface of the solid electrolyte layer. When the cathode layer 12 includes a solid electrolyte layer, the capacitor unit 10 constitutes a solid electrolytic capacitor.

[0144] The through conductor 20 penetrates the dielectric layer 13 and the anode plate 11 in the thickness direction (the vertical direction in FIGS. 12 and 13).

[0145] The through conductors 20 include cathode through conductors 20A and 20C electrically connected to the cathode layer 12 and anode through conductors 20B and 20D electrically connected to the anode plate 11 .

[0146] 13 , a plurality of cathode through conductors 20A are provided so as to penetrate in the thickness direction through the sealing layer 30 and the capacitor section 10. Each cathode through conductor 20A is connected at its end to a conductor wiring layer 40A provided on the surface of the sealing layer 30.

[0147] As shown in FIG. 14E, the cathode through conductor 20A preferably exists within the cathode layer 12 in a plan view in the thickness direction of the anode plate 11.

[0148] 12 , a plurality of anode through conductors 20B are provided so as to penetrate in the thickness direction through the sealing layer 30 and the capacitor section 10. Each anode through conductor 20B is connected at its end to a conductor wiring layer 40B provided on the surface of the sealing layer 30.

[0149] As shown in FIG. 14E, the anode through conductor 20B preferably exists within the cathode layer 12 in a plan view in the thickness direction of the anode plate 11.

[0150] As in the first embodiment, the cathode through conductor 20A and the anode through conductor 20B are each a direct through conductor.

[0151] 13 , a plurality of cathode through conductors 20C are provided so as to penetrate the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction. Each cathode through conductor 20C is connected at its side to a conductor wiring layer 40A provided on the surface of the sealing layer 30. Furthermore, each cathode through conductor 20C is connected at its end to a conductor wiring layer 40C provided on the surface of the outer insulating layer 50.

[0152] As shown in FIG. 14E, the cathode through conductor 20C preferably exists within the cathode layer 12 in a plan view in the thickness direction of the anode plate 11.

[0153] The cathode through conductor 20C may be provided on at least the inner wall surface of a through hole that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction. That is, the cathode through conductor 20C may be provided only on the inner wall surface of the through hole, or may be provided throughout the entire interior of the through hole. When the cathode through conductor 20C is provided only on the inner wall surface of the through hole, the space surrounded by the cathode through conductor 20C inside the through hole may be filled with a material containing resin. That is, a resin filling portion 25C may be provided inside the cathode through conductor 20C.

[0154] As shown in FIG. 13, an insulating material such as the sealing layer 30 is filled between the through-hole that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and the cathode through conductor 20C.

[0155] 12 , a plurality of anode through conductors 20D are provided so as to penetrate the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction. Each anode through conductor 20D is connected at its side to a conductor wiring layer 40B provided on the surface of the sealing layer 30. Furthermore, each anode through conductor 20D is connected at its end to a conductor wiring layer 40D provided on the surface of the outer insulating layer 50.

[0156] As shown in FIG. 14E, the anode through conductor 20D preferably exists within the cathode layer 12 in a plan view in the thickness direction of the anode plate 11.

[0157] The anode through conductor 20D may be provided on at least the inner wall surface of a through hole that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction. That is, the anode through conductor 20D may be provided only on the inner wall surface of the through hole, or may be provided throughout the entire interior of the through hole. When the anode through conductor 20D is provided only on the inner wall surface of the through hole, the space surrounded by the anode through conductor 20D within the through hole may be filled with a material containing resin. That is, a resin filling portion 25D may be provided inside the anode through conductor 20D.

[0158] As shown in FIG. 12, it is preferable that an insulating material such as sealing layer 30 is filled between a through hole that penetrates sealing layer 30 and capacitor section 10 in the thickness direction and anode through conductor 20D.

[0159] In this specification, among the through conductors 20, those that penetrate the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction and are connected to the conductor wiring layer 40A or 40B at their sides are called "indirect through conductors." Therefore, the cathode through conductor 20C and the anode through conductor 20D are each an indirect through conductor. Furthermore, the indirect through conductors here are not directly connected to the anode plate 11.

[0160] The sealing layer 30 is provided so as to cover the capacitor section 10. The sealing layer 30 protects the capacitor section 10.

[0161] The sealing layer 30 is preferably provided on both of the principal surfaces of the capacitor section 10 that face each other in the thickness direction.

[0162] The conductor wiring layers 40A and 40B are provided on the surface of the sealing layer 30 and are electrically connected to either the cathode through conductor 20A or the anode through conductor 20B.

[0163] The conductor wiring layer 40A is electrically connected to the cathode through conductor 20A. In the example shown in Fig. 13, the conductor wiring layer 40A is provided on the surface of the cathode through conductor 20A.

[0164] Specifically, in the example shown in FIG. 13, the conductor wiring layer 40A is electrically connected to the cathode layer 12 through a via conductor 45 that penetrates the sealing layer 30.

[0165] The conductor wiring layer 40B is electrically connected to the anode through conductor 20B. In the example shown in Fig. 12, the conductor wiring layer 40B is provided on the surface of the anode through conductor 20B.

[0166] Specifically, in the example shown in FIG. 12, the conductor wiring layer 40B is electrically connected to the anode plate 11 via the anode through conductor 20B.

[0167] The conductor wiring layers 40C and 40D are provided on the surface of the outer insulating layer 50 and are electrically connected to either the cathode through conductor 20C or the anode through conductor 20D.

[0168] The conductor wiring layer 40C is electrically connected to the cathode through conductor 20C. In the example shown in Fig. 13, the conductor wiring layer 40C is provided on the surface of the cathode through conductor 20C.

[0169] Specifically, in the example shown in FIG. 13, the conductor wiring layer 40C is electrically connected to the cathode layer 12 through the cathode through conductor 20C, the conductor wiring layer 40A, and the via conductor 45.

[0170] The conductor wiring layer 40D is electrically connected to the anode through conductor 20D. In the example shown in Fig. 12, the conductor wiring layer 40D is provided on the surface of the anode through conductor 20D.

[0171] Specifically, in the example shown in FIG. 12, the conductor wiring layer 40D is electrically connected to the anode plate 11 via the anode penetrating conductor 20D, the conductor wiring layer 40B, and the anode penetrating conductor 20B.

[0172] Fig. 15A is a plan view schematically showing an example of the arrangement of through conductors constituting a capacitor element according to a second embodiment of the present invention, and Fig. 15B is a plan view showing a state in which the indirect through conductors are removed from Fig. 15A.

[0173] In the example shown in Fig. 15A , the through conductors are arranged in a square. As shown in Fig. 15B , cathode through conductors that are direct through conductors and anode through conductors that are direct through conductors are arranged alternately from top to bottom. In addition, in Fig. 15A , the direct through conductors and indirect through conductors are arranged alternately from left to right, and the cathode through conductors and anode through conductors are arranged alternately, while the cathode through conductors that are indirect through conductors and the anode through conductors that are indirect through conductors are arranged alternately from top to bottom.

[0174] 15B , the cathode through conductors include a first cathode through conductor 20A1 and a second cathode through conductor 20A2, and the anode through conductors include a first anode through conductor 20B1. The first cathode through conductor 20A1, the second cathode through conductor 20A2, and the first anode through conductor 20B1 are direct through conductors that penetrate the sealing layer 30 and the capacitor section 10 in the thickness direction and are connected at their ends to the conductor wiring layer 40A or 40B, respectively.

[0175] 15B , the cathode through conductor may further include at least one third cathode through conductor 20A3. The third cathode through conductor 20A3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its end.

[0176] 15B , the cathode through conductor may further include at least one fourth cathode through conductor 20A4. The fourth cathode through conductor 20A4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its end.

[0177] 15A , the cathode through conductors further include at least one fifth cathode through conductor 20C5. The fifth cathode through conductor 20C5 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its side.

[0178] In a plan view from the thickness direction of the anode plate 11, the center distance between the fifth cathode through conductor 20C5 and the first cathode through conductor 20A1 is equal to the center distance between the fifth cathode through conductor 20C5 and the second cathode through conductor 20A2.

[0179] In the capacitor element according to the second embodiment of the present invention, the indirect through conductors increase the number of current paths, thereby further enhancing the effects described in the first embodiment of the present invention. Furthermore, if the metal material of the anode plate and the metal material of the conductor wiring layer are different, it may be difficult to plate both the anode plate and the conductor wiring layer, making it difficult to form the through conductors. On the other hand, indirect through conductors that are not directly connected to the anode plate can be formed without plating the anode plate, and are therefore less subject to the constraints of such formation methods. Therefore, by including an indirect through conductor as in the capacitor element according to the second embodiment of the present invention, the reliability of the conductor connection and the degree of design freedom can be improved.

[0180] 15A , the cathode through conductor preferably further includes at least one sixth cathode through conductor 20C6. The sixth cathode through conductor 20C6 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its side.

[0181] The center-to-center distance between the first cathode through conductor 20A1 and the fifth cathode through conductor 20C5 is equal to the center-to-center distance between the first cathode through conductor 20A1 and the sixth cathode through conductor 20C6 in a plan view from the thickness direction of the anode plate 11. In the example shown in Fig. 15A, the center-to-center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 is equal to the center-to-center distance between the fifth cathode through conductor 20C5 and the sixth cathode through conductor 20C6.

[0182] Fig. 16A is a plan view schematically showing another example of the arrangement of the through conductors constituting the capacitor element according to the second embodiment of the present invention, and Fig. 16B is a plan view showing a state in which the indirect through conductors are removed from Fig. 16A.

[0183] In the example shown in Fig. 16A , the through conductors are arranged in a hexagonal pattern. As shown in Fig. 16B , rows in which cathode through conductors that are direct through conductors are lined up from left to right and rows in which anode through conductors that are direct through conductors are lined up from left to right are alternately arranged from top to bottom. In addition, in Fig. 16A , cathode through conductors that are indirect through conductors are arranged above cathode through conductors that are direct through conductors and anode through conductors that are indirect through conductors are arranged below them, and cathode through conductors that are indirect through conductors are arranged above anode through conductors that are direct through conductors and anode through conductors that are indirect through conductors are arranged below them.

[0184] In the examples shown in FIGS. 16A and 16B, although the arrangement of the through conductors is different, the same effects as those in FIGS. 15A and 15B can be obtained.

[0185] FIG. 17 is a plan view schematically showing yet another example of the arrangement of the through conductors that constitute the capacitor element according to the second embodiment of the present invention.

[0186] In the example shown in Figure 17, when viewed in a plane from the thickness direction of the anode plate 11, the center-to-center distance between the first cathode through conductor 20A1 and the fifth cathode through conductor 20C5 is equal to the center-to-center distance between the first cathode through conductor 20A1 and the sixth cathode through conductor 20C6, and the center-to-center distance between the first cathode through conductor 20A1 and the second cathode through conductor 20A2 is different from the center-to-center distance between the fifth cathode through conductor 20C5 and the sixth cathode through conductor 20C6.

[0187] Fig. 18A is a plan view for explaining the arrangement of anode through conductors in the arrangement shown in Fig. 15A. Fig. 18B is a plan view showing a state in which indirect through conductors are removed from Fig. 18A.

[0188] 18B , the cathode through conductors include a first cathode through conductor 20A1 and a second cathode through conductor 20A2, and the anode through conductors include a first anode through conductor 20B1 and a second anode through conductor 20B2. The first cathode through conductor 20A1, the second cathode through conductor 20A2, the first anode through conductor 20B1, and the second anode through conductor 20B2 are direct through conductors that penetrate the sealing layer 30 and the capacitor section 10 in the thickness direction and are connected at their ends to the conductor wiring layer 40A or 40B, respectively.

[0189] 18B , the anode through conductors may further include at least one third anode through conductor 20B3. The third anode through conductor 20B3 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its end.

[0190] 18B , the anode through conductors may further include at least one fourth anode through conductor 20B4. The fourth anode through conductor 20B4 is a direct through conductor that penetrates the sealing layer 30 and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its end.

[0191] 18A , the anode through conductors further include at least one fifth anode through conductor 20D5. The fifth anode through conductor 20D5 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its side.

[0192] In a plan view from the thickness direction of the anode plate 11, the center distance between the fifth anode through conductor 20D5 and the first anode through conductor 20B1 is equal to the center distance between the fifth anode through conductor 20D5 and the second anode through conductor 20B2.

[0193] 18A , the anode through conductors preferably further include at least one sixth anode through conductor 20D6. The sixth anode through conductor 20D6 is an indirect through conductor that penetrates the outer insulating layer 50, the sealing layer 30, and the capacitor section 10 in the thickness direction and is connected to the conductor wiring layer 40A at its side.

[0194] In a plan view from the thickness direction of the anode plate 11, the center-to-center distance between the first anode through conductor 20B1 and the fifth anode through conductor 20D5 is equal to the center-to-center distance between the first anode through conductor 20B1 and the sixth anode through conductor 20D6. In the example shown in Fig. 18A, the center-to-center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 is equal to the center-to-center distance between the fifth anode through conductor 20D5 and the sixth anode through conductor 20D6.

[0195] Fig. 19A is a plan view for explaining the arrangement of anode through conductors in the arrangement shown in Fig. 16A. Fig. 19B is a plan view showing a state in which indirect through conductors are removed from Fig. 19A.

[0196] In the examples shown in FIGS. 19A and 19B, although the arrangement of the through conductors is different, the same effects as those in FIGS. 18A and 18B can be obtained.

[0197] FIG. 20 is a plan view for explaining the arrangement of the anode through conductors in the arrangement shown in FIG.

[0198] In the example shown in Figure 20, when viewed in a plane from the thickness direction of the anode plate 11, the center-to-center distance between the first anode through conductor 20B1 and the fifth anode through conductor 20D5 is equal to the center-to-center distance between the first anode through conductor 20B1 and the sixth anode through conductor 20D6, and the center-to-center distance between the first anode through conductor 20B1 and the second anode through conductor 20B2 is different from the center-to-center distance between the fifth anode through conductor 20D5 and the sixth anode through conductor 20D6.

[0199] The following describes the detailed configuration of capacitor element 2. Note that a description of the configuration common to capacitor element 1 will be omitted.

[0200] Of the through conductors 20, the cathode through conductor 20C and the anode through conductor 20D, which are indirect through conductors, are formed, for example, as follows. First, a fourth through hole penetrating the outer insulating layer 50, the sealing layer 30, and the capacitor unit 10 in the thickness direction is formed by processing such as drilling or laser processing. Then, the inner wall surface of the fourth through hole is metallized with a metal material containing a low-resistance metal such as copper, gold, or silver, thereby forming the cathode through conductor 20C and the anode through conductor 20D, which are indirect through conductors. When forming the cathode through conductor 20C and the anode through conductor 20D, for example, metallizing the inner wall surface of the fourth through hole by processing such as electroless copper plating or electrolytic copper plating facilitates processing. Note that, as a method for forming the cathode through conductor 20C and the anode through conductor 20D, in addition to a method of metallizing the inner wall surface of the fourth through hole, a method of filling the fourth through hole with a metal material, a composite material of metal and resin, or the like may be used.

[0201] When a resin filling portion 25C is provided inside the cathode penetrating conductor 20C, the material constituting the resin filling portion 25C may have a thermal expansion coefficient greater than, less than, or the same as that of the material constituting the cathode penetrating conductor 20C (e.g., copper).

[0202] When a resin filling portion 25D is provided inside the anode penetrating conductor 20D, the material constituting the resin filling portion 25D may have a thermal expansion coefficient greater than, less than, or the same as that of the material constituting the anode penetrating conductor 20D (e.g., copper).

[0203] Examples of the constituent material of the conductor wiring layer 40C include metal materials containing low-resistance metals such as silver, gold, copper, etc. In this case, the conductor wiring layer 40C is formed by, for example, plating the surface of the cathode through conductor 20C.

[0204] In order to improve the adhesion between the conductor wiring layer 40C and other members, in this case, the adhesion between the conductor wiring layer 40C and the cathode through conductor 20C, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler, and carbon filler and a resin may be used as a constituent material of the conductor wiring layer 40C.

[0205] Examples of the constituent material of the conductor wiring layer 40D include metal materials containing low-resistance metals such as silver, gold, copper, etc. In this case, the conductor wiring layer 40D is formed by, for example, plating the surface of the anode through conductor 20D.

[0206] In order to improve the adhesion between the conductor wiring layer 40D and other members, in this case, the adhesion between the conductor wiring layer 40D and the anode penetrating conductor 20D, a mixed material of at least one conductive filler selected from the group consisting of silver filler, copper filler, nickel filler, and carbon filler and a resin may be used as a constituent material of the conductor wiring layer 40D.

[0207] The materials constituting the conductor wiring layers 40C and 40D are preferably the same at least in terms of type, but may be different from each other.

[0208] The outer insulating layer 50 is made of an insulating material.

[0209] The outer insulating layer 50 is formed, for example, by placing the capacitor element 1 shown in FIG. 1 in a cavity portion previously provided in the substrate and embedding it with insulating resin.

[0210] Alternatively, outer insulating layer 50 may be formed, for example, by attaching a cured prepreg to capacitor element 1 shown in FIG. 1 via an adhesive layer.

[0211] The outer insulating layer 50 may be composed of only one layer or two or more layers. When the outer insulating layer 50 is composed of two or more layers, the materials constituting each layer may be the same or different.

[0212] The outer insulating layer 50 may be provided on only one surface in the thickness direction, or on both surfaces.

[0213] FIG. 21 is a cross-sectional view schematically showing a modified example of the outer insulating layer.

[0214] When outer insulating layers 50 are provided on both sides in the thickness direction, as in capacitor element 3 shown in FIG. 21, the thicknesses of outer insulating layers 50 provided on each side may be different.

[0215] The capacitor element of the present invention is not limited to the above-described embodiment, and various applications and modifications can be made within the scope of the present invention with respect to the configuration of the capacitor element, the manufacturing conditions of the capacitor element, and the like.

[0216] For example, the capacitor element of the present invention may include a plurality of capacitor portions.

[0217] FIG. 22 is a cross-sectional view schematically showing an example of the position of a capacitor element having a plurality of capacitor portions.

[0218] As in the capacitor element 4 shown in FIG. 22, a plurality of capacitor sections 10 may be stacked in the thickness direction with outer insulating layers 50 interposed therebetween.

[0219] When the capacitor element of the present invention has multiple capacitor sections, the multiple capacitor sections may be arranged so as to be stacked in the thickness direction, or so as to be lined up on a plane, or a combination of both.

[0220] When the capacitor element of the present invention includes a plurality of capacitor portions, the number of the capacitor portions is not particularly limited as long as it is at least 2. The sizes and shapes of the capacitor portions may be the same, or some or all of them may be different.

[0221] When the capacitor element of the present invention includes a plurality of capacitor sections, the capacitor sections preferably have the same configuration, but capacitor sections with different configurations may also be included.

[0222] The capacitor element of the present invention can be suitably used as a constituent material of a composite electronic component. Such a composite electronic component includes, for example, the capacitor element of the present invention, external electrodes (e.g., conductor wiring layers) provided outside the sealing layer of the capacitor element and electrically connected to the anode plate and cathode layer of the capacitor element, respectively, and an electronic component connected to the external electrodes.

[0223] In a composite electronic component, the electronic component connected to the external electrode may be a passive element or an active element. Both the passive element and the active element may be connected to the external electrode, or either the passive element or the active element may be connected to the external electrode. Also, a composite of a passive element and an active element may be connected to the external electrode.

[0224] Examples of passive elements include inductors, etc. Examples of active elements include memories, GPUs (Graphical Processing Units), CPUs (Central Processing Units), MPUs (Micro Processing Units), and PMICs (Power Management ICs).

[0225] The capacitor element of the present invention has a sheet-like shape as a whole. Therefore, in a composite electronic component, the capacitor element can be treated like a mounting substrate, and electronic components can be mounted on the capacitor element. Furthermore, by making the electronic components mounted on the capacitor element sheet-like, it is also possible to connect the capacitor element and the electronic components in the thickness direction via through-hole conductors that penetrate each electronic component in the thickness direction. As a result, active elements and passive elements can be configured like a single module.

[0226] For example, a switching regulator can be formed by electrically connecting the capacitor element of the present invention between a voltage regulator including a semiconductor active element and a load to which the converted DC voltage is supplied.

[0227] In a composite electronic component, a circuit layer may be formed on either side of a capacitor matrix sheet on which a plurality of capacitor elements of the present invention are laid out, and the circuit layer may be connected to a passive element or an active element.

[0228] Alternatively, the capacitor element of the present invention may be placed in a cavity provided in a substrate, embedded in resin, and then a circuit layer may be formed on the resin. Another electronic component (a passive element or an active element) may be mounted in another cavity of the same substrate.

[0229] Alternatively, the capacitor element of the present invention may be mounted on a smooth carrier such as a wafer or glass, an outer layer made of resin may be formed, a circuit layer may be formed, and then the capacitor element may be connected to a passive or active element.

[0230] The present specification discloses the following:

[0231] <1> A capacitor element comprising: an anode plate having a porous portion on at least one main surface of a core portion; a dielectric layer provided on a surface of the porous portion; and a cathode layer provided on a surface of the dielectric layer; and through conductors penetrating the dielectric layer and the anode plate in a thickness direction, wherein the through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate, the cathode through conductors including a first cathode through conductor and a second cathode through conductor, and the anode through conductor includes a first anode through conductor, and the center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to the center-to-center distance between the first anode through conductor and the second cathode through conductor in a plan view in the thickness direction of the anode plate.

[0232] <2> The capacitor element according to <1>, wherein the cathode through conductor further includes at least one third cathode through conductor, and in a plan view in a thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the second cathode through conductor is equal to a center-to-center distance between the first cathode through conductor and the third cathode through conductor.

[0233] <3> The capacitor element according to <2>, wherein, in a plan view from the thickness direction of the anode plate, the third cathode penetrating conductor is located on a straight line obtained by rotating a line segment connecting a center of the first cathode penetrating conductor and a center of the second cathode penetrating conductor at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the first cathode penetrating conductor.

[0234] <4> The capacitor element according to <2>, wherein, in a plan view from the thickness direction of the anode plate, the third cathode penetrating conductor is located on a straight line obtained by rotating a line segment connecting a center of the first cathode penetrating conductor and a center of the second cathode penetrating conductor at an angle of 90 degrees or 180 degrees with respect to the center of the first cathode penetrating conductor.

[0235] <5> The capacitor element according to <2>, wherein, in a plan view from the thickness direction of the anode plate, the third cathode penetrating conductor is located on a straight line obtained by rotating a line segment connecting a center of the first cathode penetrating conductor and a center of the second cathode penetrating conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first cathode penetrating conductor.

[0236] <6> The capacitor element according to any one of <1> to <5>, wherein the anode through conductor further includes a second anode through conductor, and a center-to-center distance between the first cathode through conductor and the first anode through conductor is equal to a center-to-center distance between the first cathode through conductor and the second anode through conductor in a plan view in a thickness direction of the anode plate.

[0237] <7> The capacitor element according to <6>, wherein the anode through conductor further includes at least one third anode through conductor, and in a plan view in a thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the second anode through conductor is equal to a center-to-center distance between the first anode through conductor and the third anode through conductor.

[0238] <8> The capacitor element according to <7>, wherein, in a plan view from the thickness direction of the anode plate, the third anode penetrating conductor is located on a straight line obtained by rotating a line segment connecting a center of the first anode penetrating conductor and a center of the second anode penetrating conductor at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the first anode penetrating conductor.

[0239] <9> The capacitor element according to <7>, wherein, in a plan view from the thickness direction of the anode plate, the third anode penetrating conductor is located on a straight line obtained by rotating a line segment connecting a center of the first anode penetrating conductor and a center of the second anode penetrating conductor at an angle of 90 degrees or 180 degrees with respect to the center of the first anode penetrating conductor.

[0240] <10> The capacitor element according to <7>, wherein, in a plan view from the thickness direction of the anode plate, the third anode penetrating conductor is located on a straight line obtained by rotating a line segment connecting a center of the first anode penetrating conductor and a center of the second anode penetrating conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first anode penetrating conductor.

[0241] <11> The capacitor element according to any one of <2> to <5>, wherein the cathode through conductor further includes at least one fourth cathode through conductor, and a center-to-center distance between the second cathode through conductor and the first cathode through conductor is equal to a center-to-center distance between the second cathode through conductor and the fourth cathode through conductor in a plan view in a thickness direction of the anode plate.

[0242] <12> The capacitor element according to <11>, wherein, in a plan view from the thickness direction of the anode plate, the number of the anode penetrating conductors present within a circle whose radius is the center-to-center distance between the first cathode penetrating conductor and the second cathode penetrating conductor and whose center is the center of the first cathode penetrating conductor is the same as the number of the anode penetrating conductors present within a circle whose radius is the center-to-center distance between the first cathode penetrating conductor and the second cathode penetrating conductor and whose center is the center of the second cathode penetrating conductor.

[0243] <13> The capacitor element according to <12>, wherein, in a plan view in the thickness direction of the anode plate, a difference between a total area of ​​the anode penetrating conductors that overlap with a circle whose radius is the center-to-center distance between the first cathode penetrating conductor and the second cathode penetrating conductor and whose center is the center of the first cathode penetrating conductor, and a total area of ​​the anode penetrating conductors that exist within a circle whose radius is the center-to-center distance between the first cathode penetrating conductor and the second cathode penetrating conductor and whose center is the center of the second cathode penetrating conductor, is within ±5%.

[0244] <14> The capacitor element according to <12> or <13>, wherein there are two or more third cathode through conductors and two or more fourth cathode through conductors.

[0245] <15> The capacitor element according to any one of <7> to <10>, wherein the anode through conductor further includes at least one fourth anode through conductor, and a center-to-center distance between the second anode through conductor and the first anode through conductor is equal to a center-to-center distance between the second anode through conductor and the fourth anode through conductor in a plan view in a thickness direction of the anode plate.

[0246] <16> The capacitor element according to <15>, wherein, in a plan view from the thickness direction of the anode plate, the number of the cathode through conductors present within a circle whose radius is the center-to-center distance between the first anode through conductor and the second anode through conductor and whose center is the center of the first anode through conductor is the same as the number of the cathode through conductors present within a circle whose radius is the center-to-center distance between the first anode through conductor and the second anode through conductor and whose center is the center of the second anode through conductor.

[0247] <17> The capacitor element according to <16>, wherein, in a plan view in the thickness direction of the anode plate, a difference between a total area of ​​the cathode penetrating conductors that overlap with a circle whose radius is the center-to-center distance between the first anode penetrating conductor and the second anode penetrating conductor and whose center is the center of the first anode penetrating conductor and a total area of ​​the cathode penetrating conductors that exist within a circle whose radius is the center-to-center distance between the first anode penetrating conductor and the second anode penetrating conductor and whose center is the center of the second anode penetrating conductor is within ±5%.

[0248] <18> The capacitor element according to <16> or <17>, wherein there are two or more third anode through conductors and two or more fourth anode through conductors.

[0249] <19> The capacitor element according to any one of <1> to <18>, further comprising: a sealing layer provided so as to cover the capacitor section; and a conductor wiring layer provided on a surface of the sealing layer and electrically connected to either one of the cathode through conductor and the anode through conductor, wherein the first cathode through conductor, the second cathode through conductor, and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor section in the thickness direction and are connected to the conductor wiring layer at their ends.

[0250] <20> The capacitor element according to any one of <1> to <18>, further comprising: a sealing layer provided to cover the capacitor unit; a conductor wiring layer provided on a surface of the sealing layer and electrically connected to one of the cathode through conductor and the anode through conductor; and an outer insulating layer provided to cover the sealing layer and the conductor wiring layer, wherein the first cathode through conductor, the second cathode through conductor, and the first anode through conductor are each direct through conductors that pass through the sealing layer and the capacitor unit in the thickness direction and are connected to the conductor wiring layer at an end, the cathode through conductor further includes at least one fifth cathode through conductor, and the fifth cathode through conductor is an indirect through conductor that passes through the outer insulating layer, the sealing layer, and the capacitor unit in the thickness direction and is connected to the conductor wiring layer at a side, and a center-to-center distance between the fifth cathode through conductor and the first cathode through conductor is equal to a center-to-center distance between the fifth cathode through conductor and the second cathode through conductor in a plan view in the thickness direction of the anode plate.

[0251] <21> The capacitor element according to <20>, wherein the cathode through conductor further includes at least one sixth cathode through conductor, the sixth cathode through conductor is the indirect through conductor, and in a plan view in a thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the fifth cathode through conductor is equal to a center-to-center distance between the first cathode through conductor and the sixth cathode through conductor, and a center-to-center distance between the first cathode through conductor and the second cathode through conductor is different from a center-to-center distance between the fifth cathode through conductor and the sixth cathode through conductor.

[0252] <22> The semiconductor device further includes: a sealing layer provided to cover the capacitor unit; a conductor wiring layer provided on a surface of the sealing layer and electrically connected to one of the cathode through conductor and the anode through conductor; and an outer insulating layer provided to cover the sealing layer and the conductor wiring layer, wherein the first cathode through conductor, the second cathode through conductor, the first anode through conductor, and the second anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor unit in the thickness direction and are connected to the conductor wiring layer at an end, the anode through conductors further include at least one fifth anode through conductor, and the fifth anode through conductor is an indirect through conductor that penetrates the outer insulating layer, the sealing layer, and the capacitor unit in the thickness direction and is connected to the conductor wiring layer at a side, <18>. The capacitor element according to any one of <6> to <10> and <15> to <18>, wherein, in a plan view from the thickness direction of the anode plate, a center-to-center distance between the fifth anode penetrating conductor and the first anode penetrating conductor is equal to a center-to-center distance between the fifth anode penetrating conductor and the second anode penetrating conductor.

[0253] <23> The capacitor element according to <22>, wherein the anode through conductors further include at least one sixth anode through conductor, the sixth anode through conductor is the indirect through conductor, and in a plan view in a thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the fifth anode through conductor is equal to a center-to-center distance between the first anode through conductor and the sixth anode through conductor, and a center-to-center distance between the first anode through conductor and the second anode through conductor is different from a center-to-center distance between the fifth anode through conductor and the sixth anode through conductor.

[0254] REFERENCE SIGNS LIST 1, 2, 3, 4 Capacitor element 10 Capacitor portion 11 Anode plate 11A Core portion 11B Porous portion 12 Cathode layer 13 Dielectric layer 20 Through conductor 20A, 20C Cathode through conductor 20A1 First cathode through conductor 20A2 Second cathode through conductor 20A3 Third cathode through conductor 20A4 Fourth cathode through conductor 20C5 Fifth cathode through conductor 20C6 Sixth cathode through conductor 20B, 20D Anode through conductor 20B1 First anode through conductor 20B2 Second anode through conductor 20B3 Third anode through conductor 20B4 Fourth anode through conductor 20D5 Fifth anode through conductor 20D6 Sixth anode through conductor 25A, 25B, 25C, 25D Resin filling portion 30 Sealing layer 40A, 40B, 40C, 40D: Conductive wiring layer 45: Via conductor 50: Outer insulating layer

Claims

1. a capacitor section including an anode plate having a porous portion on at least one main surface of a core portion, a dielectric layer provided on a surface of the porous portion, and a cathode layer provided on a surface of the dielectric layer; a through conductor penetrating the dielectric layer and the anode plate in a thickness direction; a sealing layer provided to cover the capacitor portion; a conductor wiring layer provided on a surface of the sealing layer; an outer insulating layer provided to cover the sealing layer and the conductor wiring layer; the through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate, the conductor wiring layer is electrically connected to either one of the cathode through conductor and the anode through conductor; The cathode through conductor includes a first cathode through conductor and a second cathode through conductor, The anode through conductor includes a first anode through conductor, In a plan view in a thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to a center-to-center distance between the first anode through conductor and the second cathode through conductor, the first cathode through conductor, the second cathode through conductor, and the first anode through conductor are direct through conductors that pass through the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends, The cathode through conductor further includes at least one fifth cathode through conductor; the fifth cathode through conductor is an indirect through conductor that passes through the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface thereof, A capacitor element, wherein, in a planar view in the thickness direction of the anode plate, the center-to-center distance between the fifth cathode through conductor and the first cathode through conductor is equal to the center-to-center distance between the fifth cathode through conductor and the second cathode through conductor.

2. The cathode through conductor further includes at least one third cathode through conductor; 2. The capacitor element of claim 1, wherein, in a planar view from the thickness direction of the anode plate, the center-to-center distance between the first cathode through conductor and the second cathode through conductor is equal to the center-to-center distance between the first cathode through conductor and the third cathode through conductor.

3. 3. The capacitor element of claim 2, wherein, in a planar view from the thickness direction of the anode plate, the third cathode penetrating conductor is located on a straight line obtained by rotating a line segment connecting the center of the first cathode penetrating conductor and the center of the second cathode penetrating conductor at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the first cathode penetrating conductor.

4. 3. The capacitor element of claim 2, wherein, in a planar view from the thickness direction of the anode plate, the third cathode penetrating conductor is located on a straight line obtained by rotating a line segment connecting the center of the first cathode penetrating conductor and the center of the second cathode penetrating conductor at an angle of 90 degrees or 180 degrees with respect to the center of the first cathode penetrating conductor.

5. 3. The capacitor element of claim 2, wherein, in a planar view from the thickness direction of the anode plate, the third cathode penetrating conductor is located on a straight line obtained by rotating a line segment connecting the center of the first cathode penetrating conductor and the center of the second cathode penetrating conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first cathode penetrating conductor.

6. The anode through conductor further includes a second anode through conductor, A capacitor element according to any one of claims 1 to 5, wherein, in a planar view from the thickness direction of the anode plate, the center-to-center distance between the first cathode through conductor and the first anode through conductor is equal to the center-to-center distance between the first cathode through conductor and the second anode through conductor.

7. The anode through conductor further includes at least one third anode through conductor; 7. The capacitor element of claim 6, wherein, when viewed in a planar view from the thickness direction of the anode plate, the center-to-center distance between the first anode penetrating conductor and the second anode penetrating conductor is equal to the center-to-center distance between the first anode penetrating conductor and the third anode penetrating conductor.

8. 8. The capacitor element of claim 7, wherein, in a planar view from the thickness direction of the anode plate, the third anode penetrating conductor is located on a straight line obtained by rotating a line segment connecting the center of the first anode penetrating conductor and the center of the second anode penetrating conductor at an angle of 60 degrees, 90 degrees, 120 degrees, or 180 degrees with respect to the center of the first anode penetrating conductor.

9. 8. The capacitor element of claim 7, wherein, when viewed in a planar view from the thickness direction of the anode plate, the third anode penetrating conductor is located on a straight line obtained by rotating a line segment connecting the center of the first anode penetrating conductor and the center of the second anode penetrating conductor at an angle of 90 degrees or 180 degrees with respect to the center of the first anode penetrating conductor.

10. 8. The capacitor element of claim 7, wherein, when viewed in a planar view from the thickness direction of the anode plate, the third anode penetrating conductor is located on a straight line obtained by rotating a line segment connecting the center of the first anode penetrating conductor and the center of the second anode penetrating conductor at an angle of 60 degrees or 120 degrees with respect to the center of the first anode penetrating conductor.

11. The cathode through conductor further includes at least one fourth cathode through conductor; A capacitor element according to any one of claims 2 to 5, wherein, in a planar view from the thickness direction of the anode plate, the center-to-center distance between the second cathode through conductor and the first cathode through conductor is equal to the center-to-center distance between the second cathode through conductor and the fourth cathode through conductor.

12. 12. The capacitor element according to claim 11, wherein, in a planar view from the thickness direction of the anode plate, the number of the anode through conductors existing within a circle whose radius is the center-to-center distance between the first cathode through conductor and the second cathode through conductor and whose center is the center of the first cathode through conductor is the same as the number of the anode through conductors existing within a circle whose radius is the center-to-center distance between the first cathode through conductor and the second cathode through conductor and whose center is the center of the second cathode through conductor.

13. 13. The capacitor element according to claim 12, wherein, in a planar view in the thickness direction of the anode plate, a difference between a total area of ​​the anode through conductors that overlap with a circle whose radius is the center-to-center distance between the first cathode through conductor and the second cathode through conductor and whose center is the center of the first cathode through conductor, and a total area of ​​the anode through conductors that exist within a circle whose radius is the center-to-center distance between the first cathode through conductor and the second cathode through conductor and whose center is the center of the second cathode through conductor, is within ±5%.

14. The capacitor element according to claim 12 , wherein there are two or more third cathode through conductors and two or more fourth cathode through conductors.

15. The anode through conductor further includes at least one fourth anode through conductor; 8. The capacitor element of claim 7, wherein, when viewed in a planar view from the thickness direction of the anode plate, the center-to-center distance between the second anode penetrating conductor and the first anode penetrating conductor is equal to the center-to-center distance between the second anode penetrating conductor and the fourth anode penetrating conductor.

16. 16. The capacitor element according to claim 15, wherein, in a planar view in the thickness direction of the anode plate, the number of the cathode through conductors existing within a circle whose radius is the center-to-center distance between the first anode through conductor and the second anode through conductor and whose center is the center of the first anode through conductor is the same as the number of the cathode through conductors existing within a circle whose radius is the center-to-center distance between the first anode through conductor and the second anode through conductor and whose center is the center of the second anode through conductor.

17. 17. The capacitor element according to claim 16, wherein, in a planar view in the thickness direction of the anode plate, a difference between a total area of ​​the cathode through conductors that overlap with a circle whose radius is the center-to-center distance between the first anode through conductor and the second anode through conductor and whose center is the center of the first anode through conductor and a total area of ​​the cathode through conductors that exist within a circle whose radius is the center-to-center distance between the first anode through conductor and the second anode through conductor and whose center is the center of the second anode through conductor is within ±5%.

18. The capacitor element according to claim 16 , wherein there are two or more third anode through conductors and two or more fourth anode through conductors.

19. The cathode through conductor further includes at least one sixth cathode through conductor; the sixth cathode through conductor is the indirect through conductor, 6. A capacitor element according to claim 1, wherein, in a planar view from the thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the fifth cathode through conductor is equal to a center-to-center distance between the first cathode through conductor and the sixth cathode through conductor, and a center-to-center distance between the first cathode through conductor and the second cathode through conductor is different from a center-to-center distance between the fifth cathode through conductor and the sixth cathode through conductor.

20. the second anode through conductor is the direct through conductor, The anode through conductor further includes at least one fifth anode through conductor; the fifth anode through conductor is the indirect through conductor, 7. The capacitor element of claim 6, wherein, when viewed in a planar view from the thickness direction of the anode plate, the center-to-center distance between the fifth anode penetrating conductor and the first anode penetrating conductor is equal to the center-to-center distance between the fifth anode penetrating conductor and the second anode penetrating conductor.

21. The anode through conductor further includes at least one sixth anode through conductor; the sixth anode through conductor is the indirect through conductor, 21. The capacitor element of claim 20, wherein, in a planar view in the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the fifth anode through conductor is equal to a center-to-center distance between the first anode through conductor and the sixth anode through conductor, and a center-to-center distance between the first anode through conductor and the second anode through conductor is different from a center-to-center distance between the fifth anode through conductor and the sixth anode through conductor.

22. a capacitor section including an anode plate having a porous portion on at least one main surface of a core portion, a dielectric layer provided on a surface of the porous portion, and a cathode layer provided on a surface of the dielectric layer; a through conductor penetrating the dielectric layer and the anode plate in a thickness direction; a sealing layer provided to cover the capacitor portion; a conductor wiring layer provided on a surface of the sealing layer; an outer insulating layer provided to cover the sealing layer and the conductor wiring layer; the through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate, the conductor wiring layer is electrically connected to either one of the cathode through conductor and the anode through conductor; The cathode through conductor includes a first cathode through conductor and a second cathode through conductor, The anode through conductor includes a first anode through conductor, In a plan view in a thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the first cathode through conductor is equal to a center-to-center distance between the first anode through conductor and the second cathode through conductor, The anode through conductor further includes a second anode through conductor, In a plan view in a thickness direction of the anode plate, a center-to-center distance between the first cathode through conductor and the first anode through conductor is equal to a center-to-center distance between the first cathode through conductor and the second anode through conductor, the first cathode through conductor, the second cathode through conductor, the first anode through conductor, and the second anode through conductor are direct through conductors that pass through the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends, The anode through conductor further includes at least one fifth anode through conductor; the fifth anode through conductor is an indirect through conductor that passes through the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface thereof, A capacitor element, wherein, when viewed in a planar view in the thickness direction of the anode plate, the center-to-center distance between the fifth anode penetrating conductor and the first anode penetrating conductor is equal to the center-to-center distance between the fifth anode penetrating conductor and the second anode penetrating conductor.

23. The anode through conductor further includes at least one sixth anode through conductor; the sixth anode through conductor is the indirect through conductor, 23. The capacitor element of claim 22, wherein, in a planar view in the thickness direction of the anode plate, a center-to-center distance between the first anode through conductor and the fifth anode through conductor is equal to a center-to-center distance between the first anode through conductor and the sixth anode through conductor, and a center-to-center distance between the first anode through conductor and the second anode through conductor is different from a center-to-center distance between the fifth anode through conductor and the sixth anode through conductor.

24. a capacitor section including an anode plate having a porous portion on at least one main surface of a core portion, a dielectric layer provided on a surface of the porous portion, and a cathode layer provided on a surface of the dielectric layer; a through conductor penetrating the dielectric layer and the anode plate in a thickness direction; a sealing layer provided to cover the capacitor portion; a conductor wiring layer provided on a surface of the sealing layer; an outer insulating layer provided to cover the sealing layer and the conductor wiring layer; the through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate, the conductor wiring layer is electrically connected to either one of the cathode through conductor and the anode through conductor; The cathode through conductor includes a first cathode through conductor, The anode through conductor includes a first anode through conductor, the first cathode through conductor and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends, The cathode through conductor further includes at least one fifth cathode through conductor; the fifth cathode through conductor is an indirect through conductor that passes through the outer insulating layer, the sealing layer, and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface of the capacitor element.

25. a capacitor section including an anode plate having a porous portion on at least one main surface of a core portion, a dielectric layer provided on a surface of the porous portion, and a cathode layer provided on a surface of the dielectric layer; a through conductor penetrating the dielectric layer and the anode plate in a thickness direction; a sealing layer provided to cover the capacitor portion; a conductor wiring layer provided on a surface of the sealing layer; an outer insulating layer provided to cover the sealing layer and the conductor wiring layer; the through conductors include a cathode through conductor electrically connected to the cathode layer and an anode through conductor electrically connected to the anode plate, the conductor wiring layer is electrically connected to either one of the cathode through conductor and the anode through conductor; The cathode through conductor includes a first cathode through conductor, The anode through conductor includes a first anode through conductor, the first cathode through conductor and the first anode through conductor are direct through conductors that penetrate the sealing layer and the capacitor portion in the thickness direction and are connected to the conductor wiring layer at their ends, The anode through conductor further includes at least one fifth anode through conductor; the fifth anode through conductor is an indirect through conductor that passes through the outer insulating layer, the sealing layer and the capacitor portion in the thickness direction and is connected to the conductor wiring layer at a side surface thereof.