Magnetic particles

Abstract

Provided are magnetic particles wherein the percentage of elemental cobalt relative to the total content of elemental iron, elemental nickel, and elemental cobalt in a cross-section is such that the difference between the maximum value and the minimum value as measured along the maximum diameter of the cross-section is no more than 19 atom%.

Description

magnetic particles

[0001] The present invention relates to magnetic particles.

[0002] Conventional inductor components using magnetic particles are described in Japanese Patent Laid-Open No. 2018-37635 (Patent Document 1), Japanese Patent Laid-Open No. 2008-277775 (Patent Document 2), and Japanese Patent Laid-Open No. 5-217730 (Patent Document 3). The inductor component of Patent Document 1 includes a magnetic composition, which includes, as metal magnetic particles, first metal magnetic particles having an average particle size of 10 to 28 μm, second metal magnetic particles having an average particle size of 1 to 4.5 μm, and third metal magnetic particles having a particle size of 300 nm or less and including an insulating film disposed on the surface. Patent Document 2 describes a method for manufacturing a powder magnetic core, which includes immersing soft magnetic powder mainly composed of Fe in an alkoxide solution to form an insulating oxide film on all or part of the powder surface, mixing with an inorganic binder, press-molding, and then heat-treating at 600°C or higher. Patent Document 3 describes an amorphous magnetic film formed by winding or laminating amorphous magnetic thin plates each having an electrically insulating plasma polymerized film coating layer on its surface.

[0003] JP 2018-37635 A JP 2008-277775 A JP 5-217730 A

[0004] However, as described below, the above-mentioned Patent Documents 1 to 3 have difficulty reducing magnetic loss due to magnetic resonance. Magnetic loss includes eddy current loss and hysteresis loss. To reduce eddy current loss, atomization or the formation of an insulating layer on the particle surface have been considered (Patent Document 1). To reduce hysteresis loss, removal of distortion through heat treatment (Patent Document 2) or the use of amorphous powder with low crystallinity (Patent Document 3) have been considered. These methods were effective in the hundreds of megahertz range, which is the operating frequency of power inductors and the like. However, the inventors have newly discovered that the above-mentioned Patent Documents 1 to 3 cannot address this issue because magnetic resonance occurs in the higher GHz range, increasing magnetic loss. For example, when magnetic particles are used at frequencies higher than those used in RF inductors, magnetic loss due to magnetic resonance can become significant.

[0005] Therefore, an object of the present invention is to provide magnetic particles that can reduce fluctuations in relative permeability during magnetic resonance and reduce magnetic loss.

[0006] In order to solve the above problem, in a magnetic particle according to one embodiment of the present disclosure, the difference between the maximum and minimum values ​​of the elemental ratio of cobalt to the total of iron, nickel, and cobalt in the cross section measured along the maximum diameter in the cross section is 19 atom % or less.

[0007] By controlling the element ratio of cobalt as described above and suppressing compositional variations, it is possible to reduce the variation in relative magnetic permeability of the magnetic particles, thereby enabling a reduction in magnetic loss.

[0008] According to the present disclosure, it is possible to provide magnetic particles that can reduce fluctuations in relative permeability in magnetic resonance and reduce magnetic loss.

[0009] FIG. 1 is a perspective perspective view showing a first embodiment of an inductor component of the present invention. FIG. 2 is an exploded view of the inductor component. FIG. 3 is an X-X cross-sectional view of the inductor component. FIG. 4 is an explanatory view illustrating a portion of an internal magnetic member of the inductor component. FIG. 5 is an explanatory view illustrating measurement of the maximum diameter. FIG. 6 is a measurement diagram showing the element ratio of cobalt atoms in Example 1. FIG. 7 is a measurement diagram showing the real part μ' of magnetic permeability and the imaginary part μ" of magnetic permeability in Example 1. FIG. 8 is a measurement diagram showing the element ratio of cobalt atoms in Example 2. FIG. 9 is a measurement diagram showing the real part μ' of magnetic permeability and the imaginary part μ" of magnetic permeability in Example 2. FIG. 10 is a measurement diagram showing the element ratio of cobalt atoms in Comparative Example 1. FIG. 11 is a measurement diagram showing the real part μ' of magnetic permeability and the imaginary part μ" of magnetic permeability in Comparative Example 1.

[0010] The magnetic particles according to one embodiment of the present disclosure will be described in detail below with reference to the illustrated embodiments. Note that the drawings include some schematic illustrations and may not reflect actual dimensions or proportions.

[0011] (First embodiment) Fig. 1 is a perspective view showing a first embodiment of an inductor component 1. Fig. 2 is an exploded view of the inductor component 1. Fig. 3 is an X-X cross-sectional view of the inductor component 1. Fig. 4 is an explanatory diagram illustrating an internal magnetic member of the inductor component 1. Fig. 5 is an explanatory diagram illustrating measurement of the maximum diameter D.

[0012] As shown in Figures 1 to 3, the inductor component 1 has a base body 10, a coil 20 provided on the base body 10, and a first external electrode 30 and a second external electrode 40 provided on the base body 10 and electrically connected to the coil.

[0013] The inductor component 1 is electrically connected to wiring on a circuit board (not shown) via the first and second external electrodes 30, 40. The inductor component 1 is used, for example, as an impedance matching coil (matching coil) for high-frequency circuits, and is used in electronic devices such as personal computers, DVD players, digital cameras, TVs, mobile phones, car electronics, and medical and industrial machinery. However, the uses of the inductor component 1 are not limited to this, and it can also be used, for example, in tuning circuits, filter circuits, rectifying and smoothing circuits, and the like.

[0014] The element body 10 further includes an insulator 11 , a first external magnetic member 61 , a second external magnetic member 62 , and an internal magnetic member 63 .

[0015] The insulator 11 includes glass. More specifically, the insulator 11 is made of a sintered body of glass. Examples of glass include borosilicate glass. The insulator 11 may further include non-magnetic ferrite, alumina, resin, etc. The insulator 11 is composed of multiple insulating layers stacked in the W direction. Each layer is in a layered form extending in the LT plane perpendicular to the stacking direction in the W direction. Note that, due to firing or the like, the interface between two adjacent layers may not be clear.

[0016] The element body 10 is formed in a substantially rectangular parallelepiped shape. The element body 10 includes a first end face 13 and a second end face 14 that face each other, a third end face 15 and a fourth end face 16 that face each other, a bottom face 17 connected between the first end face 13 and the second end face 14 and between the third end face 15 and the fourth end face 16, and a top face 18 that faces the bottom face 17. That is, the outer surface of the element body 10 is composed of the first end face 13, the second end face 14 that faces the first end face 13, the third end face 15 that is connected between the first end face 13 and the second end face 14, the fourth end face 16 that faces the third end face 15, the bottom face 17 that is connected between the third end face 15 and the fourth end face 16, and the top face 18 that faces the bottom face 17. As shown in the figure, the L direction is a direction perpendicular to the first end face 13 and the second end face 14, the W direction is a direction perpendicular to the third end face 15 and the fourth end face 16, and the T direction is a direction perpendicular to the bottom face 17 and the top face 18. The L direction, W direction, and T direction are perpendicular to one another.

[0017] The coil 20 has a helical structure in which the axis of the coil is parallel to the bottom surface 17 of the element body 10 and is wound along the axis of the coil so as to intersect the third end surface 15 and the fourth end surface 16 of the element body 10.

[0018] The coil 20 is formed in a substantially rectangular shape when viewed in the axial direction, but is not limited to this shape. The shape of the coil 20 may be, for example, circular, elliptical, rectangular, or another polygonal shape. The axial direction of the coil 20 refers to a direction parallel to the central axis of the spiral around which the coil 20 is wound. The axial direction of the coil 20 and the lamination direction of the insulating layers are the same direction. In this application, "parallel" is not limited to a strict parallel relationship, but also includes a substantial parallel relationship, taking into account the range of realistic variation.

[0019] The coil 20 includes coil wiring 21 wound along a plane. Multiple coil wirings 21 are stacked along the axial direction. The coil wiring 21 is formed by being wound on a main surface (LT plane) of an insulating layer perpendicular to the axial direction. Adjacent coil wirings 21 in the stacking direction are electrically connected in series via via wirings 26 that penetrate the insulating layer in the thickness direction (W direction). That is, the coil 20 includes coil wiring 21 and via wirings 26. In this manner, the multiple coil wirings 21 are electrically connected in series to each other and form a spiral. Specifically, the coil 20 has a configuration in which multiple coil wirings 21 are electrically connected in series to each other and each have less than one turn stacked. The coil wiring 21 is composed of one coil conductor layer. Note that the coil wiring 21 may also be composed of multiple coil conductor layers stacked in surface contact with each other, in which case the coil wiring 21 can have a high aspect ratio and a high degree of rectangularity. The coil wiring 21 may also have a spiral shape with one or more turns.

[0020] The coil 20 contains Ag. The coil 20 may contain a conductive material other than Ag (for example, Cu, Au, etc.) and glass.

[0021] The first external electrode 30 is L-shaped and extends from the first end face 13 to the bottom face 17. The second external electrode 40 is L-shaped and extends from the second end face 14 to the bottom face 17. That is, both the first and second external electrodes 30, 40 are exposed at the bottom face 17. The first external electrode 30 is connected to a first end of the coil 20, and the second external electrode 40 is connected to a second end of the coil 20.

[0022] The first external electrode 30 is made up of two layers: a base electrode layer 31 and a plating film layer 32. The second external electrode 40 is made up of two layers: a base electrode layer 41 and a plating film layer .

[0023] The base electrode layer 31 is composed of multiple external electrode conductor layers 33 stacked in surface contact with each other. The base electrode layer 41 is composed of multiple external electrode conductor layers 43 stacked in surface contact with each other. The base electrode layers 31, 41 may be composed of a conductive material such as Ag, Cu, or Au, and glass particles, or may be formed from the same material as the coil 20. The external electrode conductor layers 33 and 43 may be embedded in the element body 10, or may be formed on the outer surface of the element body 10.

[0024] The plating film layers 32 and 42 are formed by, for example, Ni, Sn, Au, or Cu plating, and more specifically, Ni and Sn plating.

[0025] The first external magnetic member 61 and the second external magnetic member 62 are located outside the coil 20 in the axial direction of the coil 20. The first external magnetic member 61 constitutes the third end surface 15 of the element body 10, and the second external magnetic member 62 constitutes the fourth end surface 16 of the element body 10. The first external magnetic member 61 and the second external magnetic member 62 may contain a magnetic material and may be composed of a composite body of a resin and a magnetic material. Note that, in this specification, a magnetic member refers to a member containing a magnetic material and does not necessarily contain resin. Note that, for the purpose of insulation and protection, other members such as insulating layers made of a resin material or an inorganic material may be laminated (coated) on the outer surfaces of the first and second external magnetic members 61, 62. In other words, providing other members can suppress peeling and cracking of the first and second external magnetic members 61, 62, as well as short circuits and current leakage between the first and second external electrodes 30, 40.

[0026] The internal magnetic member 63 is connected to the first external magnetic member 61 and the second external magnetic member 62. The internal magnetic member 63 is located inside the coil 20 in the axial direction of the coil 20.

[0027] FIG. 4 is a schematic diagram showing region A of the internal magnetic member 63 of FIG. 3 . As shown in FIGS. 3 and 4 , the internal magnetic member 63 is composed of a composite of resin 71 and magnetic particles 72 contained within the resin 71. By adopting the above-described configuration, this embodiment can improve DC bias characteristics compared to a magnetic layer made of ferrite. Furthermore, by adopting this configuration, the resin 71 provides insulation between the magnetic particles 72, thereby reducing losses (eddy current loss and hysteresis loss) at high frequencies. The internal magnetic member 63 may be composed of the same material as the first external magnetic member 61 and the second external magnetic member 62.

[0028] The resin 71 is, for example, an epoxy resin.

[0029] In this embodiment, the magnetic particle 72 is a single particle. The magnetic particle 72 may be an aggregate of multiple particles (i.e., an aggregate of particles that are not connected to each other), or may be an agglomerate of multiple particles that are sintered or connected to each other. The magnetic particle 72 is made of an alloy containing iron (Fe), nickel (Ni), and cobalt (Co). The alloy may be an amorphous alloy.

[0030] As shown in FIG. 5, the magnetic particle 72 has a maximum diameter D, a non-measurement range Z′, a measurement range Z, a straight line L1 along the maximum diameter D, and a measurement region Y.

[0031] The maximum diameter D is the largest diameter in the cross section of the magnetic particle 72. If the cross section of the magnetic particle 72 is elliptical, the maximum diameter D means the maximum length in the major axis direction, and if the magnetic particle 72 is an aggregate or agglomerate, the maximum diameter D means the maximum length in the cross section. The maximum diameter D may be the maximum diameter of the magnetic particle 72 in any cross section, and it is not necessary to select a cross section in which the longest diameter of the magnetic particle 72 appears.

[0032] The measurement range Z and the non-measurement range Z' are located on the maximum diameter D. The sum of the measurement range Z and the non-measurement range Z' is the maximum diameter D. If the maximum diameter D is taken as 100%, the non-measurement range Z' represents 10% from the surface of the magnetic particle 72 along the maximum diameter D. In the non-measurement range Z', the composition of the resin 71 present in the depth direction is detected, so the element ratio cannot be measured accurately. Therefore, the measurement range Z represents a range of 10 to 90% from one surface of the magnetic particle 72 along the maximum diameter D.

[0033] The straight line L1 is provided along the maximum diameter D.

[0034] The measurement region Y indicates a region included in a certain width in the direction perpendicular to the straight line L1 in the measurement range Z. Here, "certain width" means an aspect ratio, i.e., a ratio to the maximum diameter D, of -2.5% to 2.5% with respect to 100% of the maximum diameter D. In the measurement region Y, the element proportion of cobalt element, which will be described later, is measured. In this specification, "measured along the maximum diameter" means measurement in the measurement region Y.

[0035] The variation in the elemental proportion of cobalt element in the measurement region Y of the magnetic particle 72 is 19 atom% or less, preferably 9 atom% or less. The lower limit of the variation in the elemental proportion of cobalt element is, for example, 1 atom% or more, more preferably 2 atom% or more. The elemental proportion of cobalt element (atom%, elemental percentage) can be calculated from the ratio of cobalt element to the total of iron element, nickel element, and cobalt element, i.e., 100 x Co / (Fe + Ni + Co). By having such elemental proportions, compositional variation in the magnetic particle 72 can be suppressed. As a result, variation in the relative magnetic permeability of the magnetic particle 72 can be reduced, enabling magnetic loss to be reduced. Note that the variation in the elemental proportion of cobalt element may be within the above numerical range in the measurement region Y of any cross section of the magnetic particle 72. If the variation in the element ratio of cobalt element in the measurement region Y in any cross section of the magnetic particle 72 is within the above numerical range, the magnetic loss can be reduced compared to when it is outside the above numerical range.

[0036] The elemental proportion of cobalt element is measured as follows: A cross section is formed from the internal magnetic member 63 using a focused ion beam (FIB). One arbitrarily selected magnetic particle 72 is selected from the cross section. An electron beam is irradiated in the direction of the maximum diameter D of the magnetic particle 72 using energy dispersive X-ray spectroscopy (TEM / EDX). The difference between the maximum and minimum values ​​of cobalt element in the measurement region Y of the magnetic particle 72 is determined, and this difference is taken as the "variation in the elemental proportion of cobalt element." Since the lower detection limit of TEM / EDX is considered to be about 1 atom%, values ​​below 1 atom% are considered undetectable.

[0037] The particle size of the magnetic particles 72 is, for example, 1 μm or less. During the manufacturing stage of the inductor component 1, the particle size of the magnetic particles 72 can be measured using an electron microscope. When the particle size of the magnetic particles 72 is 1 μm or less, the DC superposition characteristics are further improved, and the fine powder can reduce iron loss at high frequencies. The particle size of the magnetic particles 72 is, for example, 0.1 μm or more. In this case, uniform dispersion in the resin is facilitated, improving the manufacturing efficiency of the internal magnetic member 63. The content of the magnetic particles 72 is preferably 20 vol% or more and 70 vol% or less with respect to the entire internal magnetic member 63.

[0038] The variation in relative permeability is, for example, 2.5% or less, specifically 1.5% or less. Here, the variation in relative permeability refers to the difference between the maximum and minimum values ​​of relative permeability in the range from 200 MHz to 2 GHz. When the variation in relative permeability occurs, loss increases on the low-frequency side compared to when the relative permeability is uniform. However, by keeping the variation in relative permeability within the above range, magnetic loss can be suppressed, particularly on the low-frequency side, similar to when the relative permeability is uniform. When an inductor component containing magnetic particles 72 is used for matching in an electric circuit, magnetic particles 72 with little variation in relative permeability can be easily used.

[0039] The fluctuation in relative permeability is measured as follows. For a composite of resin 71 and magnetic particles 72, the frequency characteristics of relative permeability are measured in the range of 200 MHz to 2 GHz. The average value of relative permeability and the maximum and minimum values ​​due to magnetic resonance are determined, and the difference between the maximum and minimum values ​​is calculated when the average value of relative permeability is set to 100%. The fluctuation in relative permeability due to magnetic resonance means the difference between the maximum and minimum values. Note that the maximum value refers to the point with the largest fluctuation in the positive direction, and the minimum value refers to the point with the largest fluctuation in the negative direction.

[0040] In this embodiment, the average Q value is a good value. Here, the average Q value is obtained by calculating the Q values ​​in the range of 200 MHz to 2 GHz and calculating the average value of these Q values. The Q value means μ' / μ" which is the ratio of the real part μ' of the magnetic permeability to the imaginary part μ" of the magnetic permeability. The average Q value is, for example, 5.0×10 １ Specifically, 1.0 × 10 ３ Here, the real part μ' of the effective permeability is the permeability of the portion that actually functions as an inductor, and the imaginary part μ" of the permeability indicates a value related to loss. When the real part μ' of the permeability decreases, the imaginary part μ" of the permeability increases.

[0041] The present invention is not limited to the first embodiment described above, and design modifications are possible within the scope of the present invention. The magnetic member may have at least one particle that satisfies the above conditions. Preferably, all particles in the magnetic member satisfy the above conditions.

[0042] For example, the magnetic particles 72 may be used in other applications, such as as a radio wave absorbent, or in electronic components such as capacitor components.

[0043] The cobalt element in the magnetic particles 72 is measured as follows. The magnetic particles 72 are fixed using a holder such as the resin 71 of the present invention to form a sheet shape, and then a cross section is formed using an FIB as described above. The cross section is irradiated with an electron beam in the direction of the maximum diameter D of the magnetic particles 72 using TEM / EDX. The difference between the maximum and minimum values ​​of the cobalt element in the measurement region Y of the magnetic particles 72 is determined, and this difference is taken as the "variation in the element ratio of the cobalt element."

[0044] For example, the magnetic particles 72 can be used as a sheet-like magnetic material containing magnetic particles. In this embodiment, radio wave loss can be imparted at a specific frequency, thereby controlling the radio waves so that they do not enter.

[0045] The cobalt element in the magnetic member is measured as follows: A composite body is formed from resin 71 and magnetic particles 72 contained within the resin 71, and this composite body is formed into a sheet shape. A cross section is then formed using an FIB as described above. Five arbitrarily selected magnetic particles 72 are selected from the cross section. An electron beam is irradiated in the direction of the maximum diameter D of each of the five magnetic particles 72 using TEM / EDX. For each magnetic particle 72, the difference between the maximum and minimum values ​​of the cobalt element in the measurement region Y is determined, and the largest difference is taken as the "variation in the element ratio of cobalt element."

[0046] The materials are not limited to those exemplified above, and known materials can be used.

[0047] The present disclosure includes the following aspects. <1> Magnetic particles, in which the difference between the maximum and minimum values ​​of the elemental ratio of cobalt to the total of iron, nickel, and cobalt in a cross section, measured along the maximum diameter in the cross section, is 19 atom % or less. <2> Magnetic particles according to <1>, in which the difference between the maximum and minimum values ​​is 9 atom % or less. <3> Magnetic particles according to <1> or <2>, in which the particle size is 1 μm or less. <4> A magnetic member having a resin and the magnetic particles according to any one of <1> to <3> contained in the resin. <5> An inductor component, comprising an element body including the magnetic member according to <4>, and a coil provided in the element body.

[0048] The present disclosure will be explained in more detail through the following examples, but is not limited to these examples.

[0049] (Example 1) (Procedure 1) Iron sulfate heptahydrate, cobalt sulfate heptahydrate, and nickel sulfate hexahydrate (all manufactured by Wako Pure Chemical Industries, Ltd.) were added to pure water and stirred and dissolved using a magnetic stirrer to prepare a metal salt solution. The total metal ion concentration was 0.3 M (Fe:Co:Ni = 2:1:1), and the metal salt solution volume was 50 mL.

[0050] (Operation 2) 18 g of an aqueous hydrazine solution (manufactured by Wako Pure Chemical Industries, Ltd.) and 7.6 g of sodium hydroxide (manufactured by Wako Pure Chemical Industries, Ltd.) were added to pure water, and the mixture was stirred and dissolved using a magnetic stirrer to form an aqueous solution of a reducing agent.

[0051] (Operation 3) The metal salt solution was heated to 70°C in a water bath, and while stirring at 200 rpm using a Teflon (registered trademark) stirring blade, the reducing agent was added dropwise to the metal salt solution using a liquid delivery pump (FP100-1, AS ONE) so that the liquid delivery rate was 3.3 mL / min.

[0052] (Operation 4) After the completion of the dropwise addition of the reducing agent, stirring was continued for 2 hours at 70° C. After the reaction was completed, the solution was allowed to stand until it reached room temperature, and the solution and precipitate were separated by magnetic separation.

[0053] After adding 50 mL of pure water to the precipitate, the precipitate was washed by magnetic separation again. This procedure was repeated three times.

[0054] Acetone (manufactured by Nacalai Tesques) was then added to replace the solvent, and the resulting powder was air-dried on a metal tray for 3 hours and then collected.

[0055] <Preparation of Sheet> The powder obtained in Example 1 was mixed with an epoxy resin and formed into a sheet using a doctor blade. A 5 mm x 18 mm sheet was cut out from the mixed powder, and the thickness of the sheet was measured using a micrometer.

[0056] <Measurement of Cobalt Element Ratio> The above sheet was cross-sectionally processed using an FIB (Hitachi High-Tech SMI-3050R), and the cross section was irradiated with an electron beam using a TEM / EDX (JEOL JEM-F200 / Noran System 7) to perform a line scan. The element ratios of iron, cobalt, and nickel were measured. For example, when the maximum diameter D of the magnetic particles was 100 nm, the left and right ends of the 10 nm region were designated as non-measurement ranges Z', and the central region ranging from 10 to 90 nm, totaling 80 nm, was designated as measurement range Z. Measurement points were set at 0.5 nm intervals on L1, and the element ratio was measured in measurement region Y. The width of measurement region Y was in the range of -2.5% to 2.5% of the maximum diameter D. From the obtained element ratios, the element ratio of cobalt element Co / (Fe + Ni + Co) × 100 was calculated. The results are shown in FIG. 6A and Table 1.

[0057] <Measurement of variation in relative permeability and Q value> The frequency characteristics of the relative permeability of the above sheet were measured using an E5071C (manufactured by Keysight Corporation). The average value (100%) of the relative permeability in the range of 200 MHz to 2 GHz, as well as the maximum and minimum values ​​due to magnetic resonance, were determined. The absolute value of the difference between the maximum and minimum values ​​was taken as the variation in relative permeability due to magnetic resonance. Similarly, the average value Qave of the Q value (μ' / μ") in the range of 200 MHz to 2 GHz was measured.

[0058] The results are shown in FIG. 6B and Table 2.

[0059] Example 2 The same procedure as in Example 1 was carried out except that the liquid delivery rate was set to 10.0 ml per minute. The results are shown in Figures 7A and 7B and Tables 1 and 2.

[0060] Comparative Example 1 The same operation as in Example 1 was carried out except that the liquid feeding rate was set to 0.65 ml per minute. The results are shown in Figures 8A and 8B and Tables 1 and 2.

[0061]

[0062]

[0063] As shown in Comparative Example 1, when the variation in the element proportion of cobalt element was high, the variation in relative magnetic permeability was large and the average value of the Q value (Qave) was small. In other words, it was found that when the variation in the element proportion of cobalt element was high, compositional irregularities occurred within the magnetic particles. In contrast, in Example 1, the variation in the element proportion of cobalt element was 19 atom%, and the compositional variation was controlled. In Example 1, the variation in relative magnetic permeability in the magnetic particles was small, the magnetic loss was reduced, and the average value of the Q value was small. Furthermore, in Example 2, the variation in the element proportion of cobalt element was 9 atom%, and the compositional variation was further controlled. Therefore, in Example 2, the variation in relative magnetic permeability in the magnetic particles was smaller, the magnetic loss was further reduced, and the average value of the Q value was further reduced.

[0064] This application claims priority based on Japanese Patent Application No. 2023-004637, filed on January 16, 2023, the entire contents of which are incorporated herein by reference.

[0065] REFERENCE SIGNS LIST 1 inductor component 10 element body 13 first end face 14 second end face 15 third end face 16 fourth end face 17 bottom face 18 top face 20 coil 21 coil wiring 26 via wiring 30 first external electrode 40 second external electrode 31, 41 base electrode layer 32, 42 plating film layer 61 first external magnetic member 62 second external magnetic member 63 internal magnetic member 71 resin 72 magnetic particle D maximum diameter Z measurement range Z' non-measurement range μ' real part of magnetic permeability μ" imaginary part of magnetic permeability L1 straight line along maximum diameter Y measurement area

Claims

1. Magnetic particles in which the difference between the maximum value and the minimum value measured along the maximum diameter in the cross section is 19 atom% or less in the elemental ratio of cobalt element to the total of iron element, nickel element, and cobalt element in the cross section.

2. The magnetic particles according to Claim 1, wherein the difference between the maximum value and the minimum value is 9 atom% or less.

3. The magnetic particles according to Claim 1 or 2, having a particle size of 1 μm or less.

4. A magnetic member having a resin and the magnetic particles according to Claim 1 or 2 contained in the resin.

5. An inductor component including a base body including the magnetic member according to Claim 4 and a coil provided in the base body.