Optical Switch
Patent Information
- Application Number
- JP2024501183
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2023-02-24
- Publication Date
- 2025-01-29
- Estimated Expiration
- 2043-02-24
AI Technical Summary
Conventional optical switches using MEMS tilt mirrors for multi-core fibers suffer from crosstalk performance deterioration due to light leakage into adjacent cores, especially in high-density configurations.
An optical switch design incorporating a lens, liquid crystal polarization diffraction grating, and MEMS tilt mirror array, where the liquid crystal polarization grating adjusts the intensity of zero-order diffraction light to control attenuation without altering the MEMS tilt mirror's tilt angle, and an aperture plate blocks higher-order diffracted light to suppress crosstalk.
The design achieves improved crosstalk performance by precisely controlling light intensity and attenuation, preventing light leakage into adjacent cores, thereby enhancing the optical switch's convenience and efficiency.
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Abstract
Description
[Technical field]
[0001] The present disclosure relates to optical switches. [Background technology]
[0002] In recent years, with the increase in mobile communication speeds, the amount of communication traffic on optical networks, which serve as backbones, has continued to increase. It is difficult for current optical links using single-mode fiber (SCF) to continuously meet the increasing traffic demand. For this reason, space division multiplexing (SDM) networks using multimode fiber (MCF) have been proposed.
[0003] An SDM network includes a wavelength division multiplexing (WDM) layer using SCFs, as well as an SDM layer that uses MCF-based spatial division channel routing. In recent years, a simple and economical spatial cross-connect (SXC) architecture based on a core selection switch (CSS) has been proposed as an SXC architecture using an MCF (see, for example, Non-Patent Document 1). [Prior art documents] [Non-patent literature]
[0004] [Non-Patent Document 1] Masahiko Kamino et al., "Core selective switch with low insertion loss over ultra-wide wavelength range for spatial channel networks," Journal of Lightwave Technology, USA, March 15, 2022, Vol. 40, No. 6, pp. 1822-1828 Summary of the Invention [Problem to be solved by the invention]
[0005] The proposed core selection switch employs a MEMS tilt mirror as a switching element, which has low optical loss, wide bandwidth, low power consumption, and excellent scalability. The tilt angle of the MEMS tilt mirror is controlled by controlling the voltage applied to the MEMS tilt mirror. Through controlling the tilt angle, the core of the output multicore fiber is selected.
[0006] In addition, optical switches arranged in nodes are generally provided with an optical attenuation function to cancel different optical losses depending on the propagation path, the wavelength dependency of the optical amplifier, and the port dependency of the optical amplifier.
[0007] In conventional optical switches using MEMS tilt mirrors, the tilt angle of the MEMS tilt mirror is controlled to intentionally reduce the coupling rate to the output optical fiber core in order to achieve light attenuation. However, this light attenuation method causes light to leak into adjacent cores in high-density optical switches with a large number of cores, degrading crosstalk performance.
[0008] Therefore, according to one aspect of the present disclosure, it is desirable to provide a technique that can improve the crosstalk performance of an optical switch for a multicore fiber. [Means for solving the problem]
[0009] An optical switch according to an aspect of the present disclosure includes a connection portion to which one or more multi-core fibers are connected, a lens, a liquid crystal polarization grating, and a MEMS tilt mirror array. The one or more multi-core fibers include a plurality of cores. The MEMS tilt mirror array includes a plurality of MEMS tilt mirrors.
[0010] The lens is arranged to pass input light from one or more multi-core fibers connected to the connection portion, specifically, the lens is arranged to propagate input light from a corresponding one of the multiple cores to each of the multiple MEMS tilt mirrors.
[0011] Each of the multiple MEMS tilt mirrors is configured to reflect input light from a corresponding one of the cores at a tilt angle controlled by the controller, whereby each of the multiple MEMS tilt mirrors is configured to switch the propagation path of the input light such that the corresponding reflected light propagates to one of the multiple cores selected by the controller.
[0012] The liquid crystal polarization grating is arranged so that input light from one core corresponding to each of the multiple MEMS tilt mirrors passes through the liquid crystal polarization grating and enters the corresponding MEMS tilt mirror as zeroth-order diffracted light (i.e., zeroth-order light). The liquid crystal polarization grating is configured to be controlled by a controller to change the intensity of the zeroth-order diffracted light.
[0013] According to the optical switch configured in this manner, the intensity of the light propagating to the output optical fiber core can be adjusted by controlling the liquid crystal polarization grating without intentionally controlling the tilt angle of the MEMS tilt mirror so as to reduce the coupling rate to the output optical fiber core. Therefore, according to one aspect of the present disclosure, it is possible to provide an optical switch for a multi-core fiber with excellent crosstalk performance.
[0014] According to one aspect of the present disclosure, the liquid crystal polarization grating may be configured to be capable of independently controlling the intensity of the zeroth order diffracted light passing through the liquid crystal polarization grating and incident on each of the MEMS tilt mirrors, and for this purpose, the liquid crystal polarization grating may include a plurality of independent drive electrodes.
[0015] According to this optical switch, each of a plurality of input light beams can be attenuated at an individual attenuation rate suited to the input light and output from the corresponding core, thereby improving the convenience of the optical switch.
[0016] According to one aspect of the present disclosure, the lens may include a condenser lens for focusing input light propagating to each of the plurality of MEMS tilt mirrors, in which case the liquid crystal polarization grating may be disposed between the condenser lens and the MEMS tilt mirror array.
[0017] By passing the liquid crystal polarization grating when the input light is condensed and the beam diameter is reduced, it is possible to prevent adjacent input light from passing through the liquid crystal polarization grating in a state where they are spatially overlapped, which makes it possible to suppress the deterioration of crosstalk and to precisely control the attenuation rate of each channel.
[0018] According to one aspect of the present disclosure, the optical switch may include a light shield. The light shield may include an opening and a shielding portion. The light shield may be configured such that the opening allows zero-order diffracted light generated by the liquid crystal polarization grating to propagate to the MEMS tilt mirror array, while the shielding portion suppresses propagation of first-order or higher diffracted light generated by the liquid crystal polarization grating to the MEMS tilt mirror array. The light shield may be provided between the liquid crystal polarization grating and the MEMS tilt mirror array.
[0019] According to an optical switch having a light shield, it is possible to suppress the deterioration of crosstalk caused by first-order or higher diffracted light. [Brief description of the drawings]
[0020] [Figure 1] FIG. 1 is a diagram illustrating an example of an installation of a core selection switch in an optical network. [Diagram 2] 10A and 10B are diagrams illustrating the optical configuration of a core selection switch. [Diagram 3] FIG. 2 is a diagram illustrating a controller that controls a core selection switch. [Figure 4] FIG. 2 is a diagram conceptually illustrating optical switching in a core selection switch. [Diagram 5] FIG. 2 is a plan view illustrating a two-dimensional arrangement of multi-core fibers in a plane perpendicular to the optical axis. [Figure 6] FIG. 6A is a diagram illustrating the transmission of light through a liquid crystal polarization grating when no voltage is applied, and FIG. 6B is a diagram illustrating the diffraction of light through a liquid crystal polarization grating when a voltage is applied. [Explanation of symbols]
[0021] 1...optical network, 10...core selection switch, 20...multicore fiber, 30...MCF array, 40...microlens array, 41...microlens, 50...condenser lens, 60...liquid crystal polarization diffraction grating, 61...driving electrode, 65...area, 70...aperture plate, 71...opening, 75...shielding portion, 80...MEMS tilt mirror array, 81...MEMS tilt mirror, 90...controller. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0022] Exemplary embodiments of the present disclosure will now be described with reference to the drawings. A core selection switch (CSS) 10 of this embodiment shown in FIG. 1 is an optical switch installed in a node of an optical network 1 constructed using a multi-core fiber (MCF) 20 instead of a single mode fiber (SMF).
[0023] Each of the multi-core fibers 20 is an optical fiber having multiple cores 21 in one cladding. The core selection switch 10 of the present embodiment is connected to the multiple multi-core fibers 20 and is configured to be able to switch the propagation path of an optical signal on a core-by-core basis between an input MCF and an output MCF.
[0024] The input MCF is one or more multi-core fibers 20 among the multiple multi-core fibers 20 that input an optical signal to the core selection switch 10. The output MCF is one or more multi-core fibers 20 among the multiple multi-core fibers 20 that output an optical signal from the core selection switch 10 to the outside.
[0025] The core selection switch 10 shown in Fig. 2 includes, as components of its optical system, an MCF array 30, a microlens array 40, a condenser lens 50, a liquid crystal polarization grating (LCPG) 60, an aperture plate 70, and a MEMS tilt mirror array 80. The dashed and dotted lines in Fig. 2 roughly represent the propagation path of input light to the MEMS tilt mirror array 80. MEMS is an abbreviation for Micro Electro Mechanical Systems.
[0026] 3, a controller 90 is connected to the core selection switch 10. The controller 90 is connected to the liquid crystal polarization grating 60 and the MEMS tilt mirror array 80 so as to be able to control the liquid crystal polarization grating 60 and the MEMS tilt mirror array 80.
[0027] Fig. 4 conceptually illustrates optical switching realized in the core selection switch 10. The solid line arrow in Fig. 4 conceptually represents the propagation of input light input from the outside through the input MCF. The two-dot chain line arrow in Fig. 4 conceptually represents the propagation of reflected light from the MEMS tilt mirror array 80 corresponding to the input light, which is output to the outside through the output MCF.
[0028] The MCF array 30 functions as a connection portion with the multi-core fibers 20. A plurality of multi-core fibers 20 are connected and fixed to the MCF array 30. At least a part of the plurality of multi-core fibers 20 functions as the above-mentioned input MCF. At least a part of the plurality of multi-core fibers 20 functions as the above-mentioned output MCF.
[0029] The multiple multi-core fibers 20 may include a multi-core fiber 20 that functions as both an input MCF and an output MCF. In an exemplary MCF array 30, nine multi-core fibers 20 are two-dimensionally arranged on a plane perpendicular to the optical axis, as shown in Fig. 5. Each of the multi-core fibers 20 shown as an example in Fig. 5 has five cores 21.
[0030] The microlens array 40 includes a plurality of microlenses 41. The plurality of microlenses 41 are arranged in the microlens array 40 in a two-dimensional array corresponding to the two-dimensional array of the multi-core fibers 20 in the MCF array 30. Each microlens 41 functions as a collimator.
[0031] Each microlens 41 is associated with one of the multiple multi-core fibers 20. That is, each microlens 41 is disposed on a path along which input light from a corresponding one of the multiple multi-core fibers 20 or output light to the corresponding one multi-core fiber 20 propagates.
[0032] Input light from each core 21 of the input MCF is converted into collimated light by the corresponding microlens 41 and enters the condenser lens 50. The entrance position on the condenser lens 50 differs for each core 21. In Fig. 4, of the three multi-core fibers 20 shown in the figure, the middle multi-core fiber 20 corresponds to the input MCF.
[0033] The optical system of the core selection switch 10 is configured as a 4f optical system using a microlens array 40 and a condenser lens 50. Therefore, the core pitch and core MFD (mode field diameter) in the multi-core fiber 20 are magnified by a magnification M (=f2 / f1) on the reflecting surface of the MEMS tilt mirror array 80. Here, f1 is the focal length of the microlens 41, and f2 is the focal length of the condenser lens 50.
[0034] The condenser lens 50 is disposed so as to form a telecentric optical system. The input light from the input MCF is deflected through the condenser lens 50 so that the light after passing through the condenser lens 50 is parallel to the principal ray (principal axis) of the condenser lens 50, and is condensed so as to form a focus at the focal position of the condenser lens 50.
[0035] MEMS tilt mirror array 80 is disposed so as to have a reflective surface at this focal position. MEMS tilt mirror array 80 includes a plurality of MEMS tilt mirrors 81, the number of which is equal to or greater than the number of cores of the input MCF.
[0036] The multiple MEMS tilt mirrors 81 are provided on an imaging plane of the input light from the condenser lens 50. When the input MCF is a multiple number of multi-core fibers 20, the MEMS tilt mirror array 80 is provided with MEMS tilt mirrors 81 in a number equal to or greater than the total number of cores of the multiple multi-core fibers 20 corresponding to the input MCF.
[0037] Each MEMS tilt mirror 81 is disposed at a position where it collects input light from a corresponding one of the cores 21 propagating through the condenser lens 50. That is, in the MEMS tilt mirror array 80, the multiple MEMS tilt mirrors 81 are two-dimensionally arranged in a pattern that is an enlarged version of the two-dimensional array of the cores 21 of the input MCF.
[0038] The tilt angle of the MEMS tilt mirror 81 is controlled by a controller 90. The controller 90 is connected to the MEMS tilt mirror array 80 so as to be able to individually control the voltage applied to each of the multiple MEMS tilt mirrors 81.
[0039] The tilt angles of the multiple MEMS tilt mirrors 81 are individually controlled to tilt angles corresponding to the output cores by controlling the applied voltages by the controller 90. The output cores referred to here refer to the cores 21 of the output MCFs to which the reflected light should be optically coupled.
[0040] Each MEMS tilt mirror 81 reflects input light from a corresponding one of the cores 21 at a tilt angle controlled by the controller 90. Depending on the tilt angle, the reflected light propagates to one of the multiple cores 21 included in the output MCF selected by the controller 90, i.e., the above-mentioned output core, and is output from the core 21 to the outside of the core selection switch 10 as output light.
[0041] In addition, the liquid crystal polarization grating 60 is provided between the condenser lens 50 and the MEMS tilt mirror array 80 .
[0042] In the multi-core fiber 20, a plurality of cores 21 are arranged at high density. Therefore, the input light from each core 21 of the input MCF spatially overlaps until it approaches the MEMS tilt mirror array 80.
[0043] By collecting light through the condenser lens 50, the input light from each core 21 is completely separated from the input light of adjacent cores 21 near the MEMS tilt mirror array 80, and is incident on the corresponding MEMS tilt mirror 81. The liquid crystal polarization grating 60 is disposed at a position, particularly near the MEMS tilt mirror array 80, where the input light of each core 21 is completely separated.
[0044] The liquid crystal polarization grating 60 attenuates the intensity of the input light from each core 21 of the input MCF toward the MEMS tilt mirror array 80 at an attenuation rate according to the applied voltage. The attenuated input light propagates to the MEMS tilt mirror array 80.
[0045] The liquid crystal polarization grating 60 includes a plurality of independent drive electrodes 61 arranged two-dimensionally in the same pattern as the plurality of MEMS tilt mirrors 81. The voltages applied to the drive electrodes 61 are individually controlled by a controller 90.
[0046] Through voltage control on the multiple drive electrodes 61, individual voltages are applied to the multiple areas 65 according to the above pattern of the liquid crystal polarization grating 60. As a result, in the multiple areas 65 of the liquid crystal polarization grating 60, the light passing through the area 65 is attenuated at an attenuation rate according to the individual voltage applied to the area 65.
[0047] As shown in FIG. 6A, when no voltage is applied to the liquid crystal polarization grating 60, the liquid crystal polarization grating 60 does not actually function as a diffraction grating, and light incident on the liquid crystal polarization grating 60 is output as transmitted light (i.e., zero-order diffracted light).
[0048] 6B, when a voltage is applied to the liquid crystal polarization grating 60, the first and higher order diffracted light components increase and the intensity of the zeroth order diffracted light decreases as the applied voltage increases. Based on this principle, the light passing through the liquid crystal polarization grating 60 is attenuated and propagates to the MEMS tilt mirror array 80.
[0049] In this way, the liquid crystal polarization grating 60 is configured to be able to independently adjust or change the intensity of the input light as it propagates from each core 21 of the input MCF toward the corresponding MEMS tilt mirror 81 and passes through the liquid crystal polarization grating 60.
[0050] In addition, the liquid crystal polarization grating 60 is a transmission type device, and diffracts light on the outgoing path and the returning path of the light. Therefore, the liquid crystal polarization grating 60 is designed and arranged so as to realize a diffraction angle at which neither the first-order diffracted light generated on the outgoing path nor the first-order diffracted light generated on the returning path is coupled to the cores 21 of the multi-core fiber 20.
[0051] Furthermore, if diffracted light hits an inappropriate location on the MEMS tilt mirror array 80, light scattering may occur in an unintended direction, and the scattered light may induce coupling to an unintended core 21, degrading crosstalk.
[0052] In order to suppress the degradation of crosstalk caused by such scattered light, the aperture plate 70 is provided between the liquid crystal polarization grating 60 and the MEMS tilt mirror array 80. That is, the aperture plate 70 is arranged to block the first and higher order diffracted light of the liquid crystal polarization grating 60, which is unnecessary light, so that these diffracted lights are not coupled with the multi-core fiber 20.
[0053] Specifically, the aperture plate 70 is configured such that a plate-shaped light blocking material is formed with a plurality of openings 71. The plurality of openings 71 are provided in the aperture plate 70 in a two-dimensional array corresponding to the two-dimensional array of the MEMS tilt mirrors 81, and define holes passing through the aperture plate 70.
[0054] Each aperture 71 is provided in the propagation path of the input light from the corresponding core 21 of the input MCF, which transmits through the liquid crystal polarization diffraction grating 60 as zero-order diffracted light, to the corresponding MEMS tilt mirror 81 without being blocked by the aperture plate 70.
[0055] Shielding portion 75, which is a portion other than opening 71 of aperture plate 70, is disposed so as to block the propagation path of first- or higher-order diffracted light generated by liquid crystal polarization diffraction grating 60 to MEMS tilt mirror array 80. In this way, shielding portion 75 suppresses the propagation of first- or higher-order diffracted light to MEMS tilt mirror array 80.
[0056] In the core selection switch 10 configured as described above, input light from each core 21 of the input MCF passes through the corresponding microlens 41 and condenser lens 50, and enters the corresponding area 65 of the liquid crystal polarization grating 60. When the input light passes through the liquid crystal polarization grating 60 as zero-order diffracted light, it is attenuated at an attenuation rate according to the applied voltage of the corresponding area 65. The applied voltage is controlled by a controller 90.
[0057] The input light attenuated through the liquid crystal polarization grating 60 passes through the openings 71 of the aperture plate 70 and is incident on the corresponding MEMS tilt mirror 81. At this time, the first and higher order diffracted light of the liquid crystal polarization grating 60 is blocked by the blocking portions 75 of the aperture plate 70 and is prevented from propagating to the MEMS tilt mirror array 80.
[0058] Light incident on the MEMS tilt mirror 81 is reflected by the reflective surface in a direction according to the tilt angle of the MEMS tilt mirror 81. The reflected light is optically coupled to an output core, which is one of the cores 21 of the output MCF selected by the controller 90 through control of the tilt angle of the corresponding MEMS tilt mirror 81.
[0059] The reflected light passes from the reflecting surface of the MEMS tilt mirror 81 through the opening 71 of the aperture plate 70 and is transmitted through the liquid crystal polarization grating 60. When the reflected light passes through the liquid crystal polarization grating 60, it is attenuated again.
[0060] The reflected light transmitted through the liquid crystal polarization grating 60 is incident on the output core through the condenser lens 50 and the corresponding microlens 41. The light incident on the output core propagates to the outside of the core selection switch 10 through the output core.
[0061] According to the core selection switch 10 of the present embodiment described above, the liquid crystal polarization grating 60 realizes a light attenuation function. The liquid crystal polarization grating 60 includes a plurality of drive electrodes 61, and is configured to be able to attenuate the input light input from each core 21 of the input MCF at an individual attenuation rate. The liquid crystal polarization grating 60 can independently control the intensity of the zeroth order diffracted light that passes through the liquid crystal polarization grating 60 and enters each of the plurality of MEMS tilt mirrors 81.
[0062] A conventional light attenuation method known in the field of optical switches is, for example, a method of controlling the tilt angle of the MEMS tilt mirror 81 so as to intentionally reduce the coupling rate to the output optical fiber. However, in an optical switch in which optical fibers and / or cores 21 are densely arranged, this method cannot suppress the phenomenon of light leaking into adjacent optical fibers and / or cores 21, and deteriorates crosstalk performance.
[0063] Another known light attenuation technique is to adjust the polarization angle or deflection angle of the light output from the liquid crystal element by controlling the voltage applied to the liquid crystal element, thereby adjusting the coupling rate to the output optical fiber. However, liquid crystal elements generally have a strong polarization dependency.
[0064] To deal with the unpredictable polarization state of the light input to the optical switch, a conventional approach uses polarization diversity to split the light input to the optical switch into two orthogonal linearly polarized lights, then uses a λ / 2 wave plate to convert one linearly polarized light into the other linearly polarized light before inputting it to the liquid crystal element.
[0065] Therefore, the conventional method has a large number of optical components. Furthermore, since it is necessary to manipulate two different optical paths within the optical system, the optical system tends to become large. Furthermore, there are disadvantages in that the optical system is susceptible to aberrations of optical lenses, etc.
[0066] On the other hand, the liquid crystal polarization grating 60 has the property of being independent of the polarization state of the incident light. The liquid crystal polarization grating 60 has a structure in which the orientation direction of the liquid crystal molecules changes periodically, and can be made to function as a polarization-independent diffraction element by utilizing the optical anisotropy.
[0067] When no voltage is applied, the liquid crystal polarization grating 60 does not function as a grating, and the incident light travels straight without being diffracted. Therefore, in this state, the input light is optically coupled to the desired output core without optical attenuation.
[0068] On the other hand, when a voltage is applied to the liquid crystal polarization grating 60, the modulation depth of the grating increases in response to the applied voltage, the light intensity of the 1st order diffracted light increases, and the light intensity of the 0th order diffracted light decreases. Therefore, by controlling the voltage applied to the liquid crystal polarization grating 60, it is possible to arbitrarily adjust the light intensity of the 0th order diffracted light, which is the input light optically coupled to the output core.
[0069] In this embodiment, the liquid crystal polarization grating 60 is disposed at a position where all optical axes of the telecentric optical system of the core selection switch 10 are parallel. In this embodiment, with this arrangement, a part of the input light is diffracted as 1st order diffracted light by controlling the voltage of the liquid crystal polarization grating 60. This adjusts the intensity of the 0th order diffracted light coupled to the output core, thereby realizing a light attenuation function. Furthermore, in this embodiment, an aperture plate 70 is provided adjacent to the MEMS tilt mirror array 80 to suppress the influence of diffracted light of the first order or higher.
[0070] Therefore, according to this embodiment, it is possible to suppress the degradation of crosstalk performance due to the optical attenuation function, and it is possible to provide an optical switch for a multi-core fiber 20 having excellent crosstalk performance.
[0071] [Other embodiments] The present disclosure is not limited to the above-described embodiment, and various aspects can be adopted. For example, the number of multi-core fibers 20 and the number of cores thereof shown in the drawings are merely examples. The present disclosure can be applied to an optical switch including any number of multi-core fibers 20, which is one or more.
[0072] The function of one component in the above embodiment may be distributed among multiple components. The functions of multiple components may be integrated into one component. Some of the configurations of the above embodiment may be omitted. All aspects included in the technical idea specified by the wording of the claims are embodiments of the present disclosure.
Claims
1. a connection portion to which one or more multi-core fibers having a plurality of cores are connected; a lens arranged to pass input light from one or more multi-core fibers connected to the connection portion; A liquid crystal polarization grating; a MEMS tilt mirror array including a plurality of MEMS tilt mirrors; Equipped with the lens is disposed so that input light from a corresponding one of the plurality of cores propagates to each of the plurality of MEMS tilt mirrors; each of the plurality of MEMS tilt mirrors is configured to reflect input light from the corresponding one of the cores at a tilt angle controlled by a controller, thereby switching a propagation path of the input light such that the corresponding reflected light propagates to one of the plurality of cores selected by the controller; the liquid crystal polarization diffraction grating is disposed such that the input light from one core corresponding to each of the plurality of MEMS tilt mirrors passes through the liquid crystal polarization diffraction grating and is incident on the corresponding MEMS tilt mirror as a zero-order diffracted light, The liquid crystal polarization diffraction grating is an optical switch configured to be controlled by the controller to change the intensity of the zeroth-order diffracted light.
2. 2. The optical switch of claim 1, The liquid crystal polarization diffraction grating is an optical switch having a plurality of independent drive electrodes such that the intensity of the zeroth order diffracted light passing through the liquid crystal polarization diffraction grating and incident on each of the plurality of MEMS tilt mirrors can be independently controlled.
3. 3. The optical switch according to claim 1, the lens comprises a condenser lens for focusing the input light propagating to each of the plurality of MEMS tilt mirrors; The liquid crystal polarization grating is an optical switch disposed between the condenser lens and the MEMS tilt mirror array.
4. 3. The optical switch according to claim 1, An optical switch comprising a light shield having an opening and a shielding portion between the liquid crystal polarization diffraction grating and the MEMS tilt mirror array, the light shielding portion being configured so that the opening allows the zeroth order diffracted light generated by the liquid crystal polarization diffraction grating to propagate to the MEMS tilt mirror array, while the shielding portion suppresses the propagation of first order or higher diffracted light generated by the liquid crystal polarization diffraction grating to the MEMS tilt mirror array.