Substrate removal method and substrate transfer system

Abstract

The present invention provides: a substrate removal method that can be applied to the handling of a substrate accommodated in a storage container, which is configured as a thin type and has a narrow pitch, and can improve control stability when removing the substrate; and a substrate transfer system. The substrate removal method includes: a first movement step for moving a robot hand and inserting an extension part of the robot hand into the storage container from an opening of the storage container; a first detection step for identifying the position of an edge section of the substrate by means of a substrate detection unit of the robot hand; a first stopping step for stopping the movement of the robot hand; a calculation step for calculating the tilt of the substrate with respect to the robot hand on the basis of the detected position of the edge section of the substrate; a correction step for correcting, on the basis of the calculated tilt of the substrate, the position and orientation of the robot hand while the extension part is positioned in the storage container; a substrate support step in which a substrate support part of the robot hand supports the substrate; and a removal step for moving the robot hand supporting the substrate and removing the substrate from the storage container.

Description

Substrate removal method and substrate transfer system

[0001] The present invention relates to a substrate unloading method and a substrate transfer system.

[0002] In the field of semiconductor manufacturing and the like, there has conventionally been a technique for using an industrial substrate transport robot provided in a substrate transport device to remove substrates (e.g., wafers, glass substrates, etc.) from a container containing the substrates, transport them to various processing equipment, and perform processing on the transported substrates. The substrate transport robot includes a robot arm and a robot hand attached to the tip of the robot arm, and transports the substrate while holding it with the robot hand. For example, various techniques have been disclosed for transporting substrates using a substrate transport robot, including a substrate removal method in which the robot hand is inserted into a container containing the substrates, supports the substrate from below, and thereby lifts the substrate from a mounting portion within the container, and removes the substrate from the container as the robot arm moves.

[0003] Japanese Patent Application Laid-Open No. 2001-135706

[0004] In recent years, in the field of semiconductor devices, device integration has increased while device miniaturization has progressed. Accordingly, a method called panel-level packaging (hereinafter referred to as PLP) has become widespread as a packaging technology for highly integrated devices. PLP is a method for collectively manufacturing multiple semiconductor packages by arranging multiple chips on a rectangular panel, and various industrial robots are used in semiconductor package manufacturing lines using PLP.

[0005] A FOUP (Front Opening Unified Pod), which serves as a storage container for substrates, has equally spaced substrate placement areas (hereinafter referred to as slots), and a substrate is placed on each slot. However, there is variation in the size (e.g., horizontal dimension) of the substrates. Due to variations in substrate size, structure, cost, and other factors, the FOUP may not be configured to provide sufficient horizontal clearance (front, back, left, and right) when a substrate is placed, and the substrate may not be positioned correctly. Therefore, due to factors such as the orientation of the substrate when placed in the FOUP or vibrations during transport, the substrate may be placed at an angle relative to the FOUP (when the edges E1 and E2 of the substrate are not parallel to the inner wall surface of the storage container H; see FIG. 7 ). Here, there are areas on the underside of the substrate that the substrate support part of the robot hand may contact (hereinafter referred to as contactable areas) and areas that must not contact (hereinafter referred to as non-contactable areas), but if the substrate is stored in a storage container in an inclined state relative to the horizontal plane, the position of the contactable areas will also change. Therefore, when the robot hand supports an inclined substrate in a fixed position (fixed support position), the substrate support part of the robot hand may come into contact with the non-contactable areas of the substrate, which may cause damage or particle adhesion to the non-contactable areas.

[0006] For these reasons, there is a need for a substrate removal method and a substrate transfer system that utilizes the substrate removal method, which can prevent damage to the substrate due to tilting in a horizontal plane when removing the substrate housed in the storage container.

[0007] Therefore, the present invention provides a substrate unloading method that can improve the control stability when unloading a substrate, and a substrate transfer system that applies the substrate unloading method.

[0008] In order to achieve the above object, according to the present invention, there is provided a substrate removal method for removing a substrate placed at a predetermined position inside a storage container having an opening on one side in a first direction, by a robot hand provided on a substrate transport robot, wherein the robot hand comprises a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion provided on the extension portion, and a substrate support portion provided on the extension portion, and is controlled by a control device, the substrate removal method comprising: a first movement step of moving the robot hand to the other side in the first direction and inserting the extension portion into the storage container through the opening; and a step of detecting at least one linear edge of the substrate by a change in a detection state of the substrate by the substrate detection portion during the first movement step. a first detection step of identifying a position of an extension portion of the robot hand; a first stopping step of stopping the movement of the robot hand toward the other side in the first direction; a calculation step of calculating an inclination of the substrate with respect to the robot hand based on the position of the edge portion of the substrate detected in the first detection step; a correction step of correcting the position and attitude of the robot hand based on the inclination of the substrate calculated in the calculation step; a substrate supporting step of supporting the substrate with the substrate support portion; and a removal step of moving the robot hand supporting the substrate to one side in the first direction and removing the substrate from the storage container, wherein the correction step is performed while the extension portion of the robot hand is located inside the storage container.

[0009] In order to achieve the above object, according to the present invention, there is provided a substrate transfer system comprising: a substrate transport robot including a robot hand for supporting a substrate and a movement mechanism that movably holds the robot hand; a substrate transport module in which the substrate transport robot is installed; and a control device that controls the substrate transport robot, wherein the robot hand of the substrate transport robot includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion provided on the extension portion, and a substrate support portion provided on the extension portion, and is controlled by the control device, and the control device controls the substrate transport robot according to the substrate removal method to cause the robot hand to remove a substrate placed at a predetermined position in a storage container.

[0010] According to the present invention, the substrate removal method and the substrate transfer system to which the substrate removal method is applied can correct the position and posture of the robot hand based on the tilt of the substrate stored in the storage container in a horizontal plane, support the substrate, and then remove it.

[0011] 1 is a perspective view showing a substrate transfer system according to an embodiment of the present invention; FIG. 2 is an explanatory perspective view of a substrate transfer robot provided in the substrate transfer system shown in FIG. 1; FIG. 3 is an explanatory view of a container placed on a load port provided in the substrate transfer system shown in FIG. 1; FIG. 4 is an explanatory plan view of contactable and non-contactable areas of the substrate shown in FIG. 2; FIG. 5 is an explanatory perspective view of a robot hand attached to the substrate transfer robot shown in FIG. 1; FIG. 6 is an explanatory top view of the robot hand shown in FIG. 5 when removing a substrate to be stored in a container; FIG. 7 is a flowchart of a substrate removal method to which the robot hand shown in FIG. 5 is applied; FIG. 8 is a flowchart of a correction step of the substrate removal method shown in FIG. 7; FIG. 9 is an explanatory top view of the relative positions of a container and a substrate of a robot hand corresponding to each step of the substrate removal method shown in FIGS. 7 and 8 in the first embodiment; FIG. 10 is an explanatory top view of the relative positions of a container and a substrate of a robot hand corresponding to a substrate support step of the substrate removal method in a modified example of the first embodiment; FIG. 11 is an explanatory top view of the relative positions of a container and a substrate of a robot hand corresponding to each step of the substrate removal method in another modified example of the first embodiment shown in FIGS. 9A to 9F. 9A to 9C are top view explanatory diagrams of the relative positions of the container and the substrate of the robot hand corresponding to each step of the substrate removal method shown in FIGS. 7 and 8 in the second to third embodiments.

[0012] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Below, a description will be given of the robot hand 100, the substrate transfer robot 30 to which the robot hand 100 is attached, the substrate transfer system 20 employing the substrate transfer robot 30, and a substrate removal method flow for removing a substrate W using the robot hand 100, in accordance with this embodiment, in combination with FIGS. 1 to 12F. The positions and operations of the substrate transfer system 20, the substrate transfer robot 30, and the storage container H for storing substrates W will be described based on the left-right direction X, the front-back direction Y, and the up-down direction Z of the spatial coordinate system XYZ. The position and operation of the robot hand 100 will be described based on the left-right direction X1, the front-back direction Y1, and the up-down direction Z1 of the spatial coordinate system XYZ. The left-right direction X1, the front-back direction Y1, and the up-down direction Z1 of the robot hand 100 may coincide with the left-right direction X, the front-back direction Y, and the up-down direction Z, depending on the orientation of the robot hand 100, or may be inclined relative to the left-right direction X, the front-back direction Y, and the up-down direction Z. However, this is merely an example of the present invention, and the present invention is not limited to this.

[0013] 1 to 3, a substrate transfer system 20 of this embodiment, a substrate transfer robot 30 applied to the substrate transfer system 20, a robot hand 100 attached to the substrate transfer robot 30, and a storage container H for storing substrates W will be described. In this embodiment, the substrate transfer system 20 includes the substrate transfer robot 30 equipped with the robot hand 100, a substrate transfer module 22 having the substrate transfer robot 30 installed therein, at least one load port C1 arranged on one side (e.g., the front side) of the substrate transfer module 22, at least one processing device C2 arranged on the other side (e.g., the rear side) of the substrate transfer module 22, and a controller 24 that controls the substrate transfer robot 30. Here, the substrate transfer module 22 is, for example, an EFEM (Equipment Front End Module), the load port C1 is a device for placing a storage container H (e.g., a FOUP) that stores substrates W and for opening and closing the door of the storage container H, and the processing device C2 is a device for processing the substrates W. The type of processing device C2 can be selected depending on the process for processing the substrates W (e.g., processes required for semiconductor manufacturing processes, such as ion implantation and etching). In another embodiment (not shown), a load lock chamber may be further installed between the substrate transfer module 22 and the processing device C2. However, the present invention is not limited to this.

[0014] Specifically, the substrate transfer module 22 includes a housing 22a, a substrate transfer robot 30 provided inside the housing 22a, a moving body 22b for moving the substrate transfer robot 30, and a guide structure 22c for guiding the movement of the substrate transfer robot 30. The housing 22a is installed between the load port C1 and the processing device C2 (or the load lock chamber) and connects the load port C1 to the processing device C2 (or the load lock chamber). Components such as the moving body 22b, the guide structure 22c, and the substrate transfer robot 30 are installed inside the housing 22a. The moving body 22b is attached to a guide structure 22c (e.g., a slide rail structure, a conveyor drive device, etc.) for guiding its movement in the left-right direction X, and is installed within the housing 22a via the guide structure 22c so that it can move freely. The substrate transfer robot 30 is attached to the moving body 22b and is movable (slidable) in the left-right direction X by the moving body 22b and the guide structure 22c. This allows the substrate transport robot 30 to freely access both the load port C1 and the processing device C2 (or the load lock chamber).

[0015] The substrate transport robot 30 also includes a robot hand 100 for supporting the substrate W and a movement mechanism (e.g., including an arm unit 32, a main body unit 34, and an arm driver 36) that movably holds the robot hand 100. The main body unit 34 is attached to the aforementioned moving body 22b and moves in the left-right direction X by the moving body 22b and the guide structure 22c. The arm unit 32 is attached to the upper end of the main body unit 34 so as to be extendable and rotatable within a horizontal plane (an imaginary horizontal plane formed by the left-right direction X and the front-back direction Y) relative to the main body unit 34 and to be movable up and down in the up-down direction Z. The arm driver 36 is, for example, a motor or a transmission mechanism built into the main body unit 34 and applies a driving force to the arm unit 32, but may also be attached to the outside of the main body unit 34. The robot hand 100 is attached to the tip of the arm unit 32. Therefore, the substrate transport robot 30 can not only move in the left-right direction X using the moving body 22b and the guide structure 22c via the main body 34, but also drive the arm 32 via the arm drive unit 36, thereby allowing the robot hand 100 to move freely (up and down, rotate, back and forth).

[0016] As an example, the substrates W are glass substrates used in PLP and are stored in a storage container H for storing substrates W. A FOUP serving as the storage container H may have, for example, multiple stages (e.g., 12 stages) of slots S (shown in FIG. 3 ), and can store multiple substrates W by placing a substrate W in each of the multiple stages of slots S. The slots S are plate members that protrude from the inner wall of the storage container H and support both ends of the substrate W in the left-right direction X. Note that the number of substrates W stored in the storage container H can be selected as appropriate, and the present invention is not limited to this. The FOUP serving as the storage container H is placed on a load port C1. By opening the door of the storage container H using the load port C1, the substrates W stored in the storage container H face the interior of the housing 22a of the substrate transfer module 22. After opening the door of the storage container H, the substrate transfer robot 30 moves the arm member 32 via the arm drive unit 36, and moves the robot hand 100 below the corresponding substrate W. Thereafter, the substrate W is supported by the substrate support part 140 of the robot hand 100, and the robot hand 100 is moved to the outside of the storage container H to remove the substrate W from the storage container H and carry it into the housing 22 a. Therefore, the control device 24 of the substrate transfer module 20 can control the substrate transfer robot 30 to remove the substrate W placed at a predetermined position in the storage container H by the robot hand 100 using a substrate removal method described below.

[0017] In another embodiment (not shown), the movable body 22b, guide structure 22c, and other structures provided on the housing 22a of the substrate transfer module 22 may be omitted, and the substrate transfer robot 30 may be fixed to the housing 110 (e.g., the main body 34 of the substrate transfer robot 30 may be fixed to the bottom of the housing 110). In this case, the substrate transfer robot 30 itself is immobile relative to the substrate transfer module 22, but can transport substrates W between the load port C1 and the processing equipment C2 by extending, lowering, and rotating the arm 32 having multiple joints about the main body 34. The specific structures and relative positions of the substrate transfer module 22, load port C1, and processing equipment C2 of the substrate transfer system 20, as well as the specific structure of the substrate transfer robot 30, may be adjusted as necessary. However, the present invention is not limited to this.

[0018] Next, the shape of the substrate W will be described with reference to FIG. 4 . FIG. 4 is a view of the substrate W as viewed from below (e.g., as viewed from the side opposite to the side indicated by the arrow in the vertical direction Z). The substrate W is a thick, rectangular plate material. Here, the bottom surface of the substrate W has a contactable region R1 with which the substrate support portion 140 of the robot hand 100 in FIG. 2 or the slot S of the storage container H in FIG. 3 may come into contact, and a non-contactable region R2 with which contact is prohibited. In this embodiment, four non-contactable regions R2 are evenly spaced on the bottom surface of the substrate W, and a contactable region R1 (shaded area in FIG. 4 ) is provided so as to surround each non-contactable region R2. However, in other embodiments not shown, the number, dimensions, relative positions, etc. of the contactable regions R1 and the non-contactable regions R2 may vary depending on the type and size of the substrate W. The present invention is not limited thereto.

[0019] 5 and 6 , a specific structure of the robot hand 100 of this embodiment and an operation for removing a substrate W will be described. In this embodiment, the robot hand 100 can be applied to removing a substrate W placed at a predetermined position in a storage container H having an opening O on one side in a first direction (here, the side opposite to the side indicated by the arrow in the forward-backward direction Y). The robot hand 100 of the substrate transport robot 30 includes a hand base 110, an extension part 120 extending from the hand base 110 on one side in a second direction (here, the side indicated by the arrow in the forward-backward direction Y1), a substrate detection part 130 provided on the extension part 120, and a substrate support part 140 provided on the extension part 120, and is controlled by a control device 24. That is, the substrate removal method described below is a method in which the control device 24 controls the robot hand 100 of the substrate transport robot 30, and the substrate W stored in the storage container H is removed from the opening O by the robot hand 100 provided on the substrate transport robot 30.

[0020] Specifically, the robot hand 100 is attached to, for example, the arm 32 of the substrate transport robot 30 and transports the substrate W while holding it in accordance with the movement of the arm 32. The hand base 110 is connected to the arm 32 (shown in FIG. 2 ), and the extension 120 extends from the hand base 110 to one side in a second direction (the side indicated by the arrow in the front-rear direction Y1). In this embodiment, two extensions 120 extend from the hand base 110, spaced apart in a third direction (here, the left-right direction X1) perpendicular to the second direction, so that the robot hand 100 is configured in a substantially Y-shape. The substrate support 140 is installed on the extension 120 and can support the substrate W from the underside thereof. As an example, a plurality of substrate support parts 140 are installed on the extension 120. For example, the substrate support portion 140 includes a first substrate support portion 140A, a second substrate support portion 140B, and a third substrate support portion 140C. The first substrate support portion 140A is located at the tip end of the extension portion 120, which is one side of the second direction (the side indicated by the arrow in the front-rear direction Y1). The second substrate support portion 140B is located at the base end of the extension portion 120, which is the other side of the second direction (here, the side opposite to the side indicated by the arrow in the front-rear direction Y1). The third substrate support portion 140C is located between the first substrate support portion 140A and the second substrate support portion 140B in the second direction (front-rear direction Y1), which is the extension direction of the extension portion 120. In this embodiment, a first substrate support portion 140A, a second substrate support portion 140B, and a third substrate support portion 140C are provided on each of the two extension portions 120. Also, in this embodiment, the underside of the substrate W has a contactable region R1 and a non-contactable region R2, as shown in Fig. 4. Here, the substrate support portions 140 are arranged so that when the robot hand 100 and the substrate W are in an appropriate positional relationship (for example, when the relative position and posture of the robot hand 100 with respect to the substrate W are predetermined), all of the substrate support portions 140 come into contact only with the contactable region R1 of the substrate W in a substrate supporting step after a correction step, which will be described later.

[0021] Furthermore, the robot hand 100 can also be provided with a regulating unit 150, as necessary, for regulating the position of the substrate W supported by the extension portion 120. For example, a first regulating unit 150A is provided at the tip end side of the extension portion 120, which is one side in the second direction (the side indicated by the arrow in the front-rear direction Y1), and a second regulating unit 150B is provided at the base end side of the extension portion 120, which is the other side in the second direction (the side opposite to the side indicated by the arrow in the front-rear direction Y1). This allows the first regulating unit 150A to abut against the end face of the substrate W on the other side in the first direction (the side indicated by the arrow in the front-rear direction Y), and the second regulating unit 150B to abut against the end face of the substrate W on one side in the first direction (here, the side opposite to the side indicated by the arrow in the front-rear direction Y). These substrate support units 140 and restriction units 150 may be installed on the upper surface 122 of the extension unit 120 so as to be retractable or deployable (as shown in FIG. 5 ), and may be driven by a drive unit 160 provided on the hand base 110 or the extension unit 120. As an example, the drive source of the drive unit 160 is provided on the hand base 110 by a mounting plate 124. However, the number and installation positions of the substrate support units 140, whether or not restriction units 150 and drive units 160 are installed, or the type and installation position of the drive unit 160 may be adjusted as necessary. The present invention is not limited to this.

[0022] The substrate detector 130 is provided in the extension portion 120 and detects the presence or absence of a substrate above the substrate detector 130. The substrate detector 130 can identify the position of the edge E of the substrate W by switching the detection state when the substrate detector 130 passes under the edge of the substrate W. Here, a rectangular substrate (e.g., a substantially rectangular shape) is exemplified as the substrate W, but a substrate having a polygonal shape (e.g., a hexagonal shape) or the like may also be used. The substrate W only needs to have at least one linear edge E. As shown in FIG. 6 , when placed in the containment vessel H, the substrate W has an edge E1 that corresponds to one side of the containment vessel H in the first direction (the side opposite to the side indicated by the arrow in the forward / backward direction Y) and is close to the opening O, and an edge E2 that corresponds to the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y) and is away from the opening O. In response to this, the substrate transport robot 30 moves the robot hand 100 to the other side of the first direction of the storage container H (the side indicated by the arrow in the forward-backward direction Y) and inserts the extension part 120 into the storage container H through the opening O, thereby identifying the position of either the edge E1 or the edge E2 using the substrate detection part 130 passing under the substrate W. Based on the identified position of either the edge E1 or the edge E2 of the substrate W, the tilt of the substrate W relative to the robot hand 100 is calculated, and the position and attitude of the robot hand 100 are corrected based on the calculated tilt of the substrate W. The substrate W is then supported by the substrate support part 140, and the robot hand 100 supporting the substrate W is moved to one side of the first direction (the side opposite to the side indicated by the arrow in the forward-backward direction Y) to remove the substrate W from the storage container H. The position of the substrate detection part 130 provided on the extension part 120 will be described using the following example.

[0023] In this embodiment as the first embodiment, the board detection unit 130 includes a first board detection unit 130a and a second board detection unit 130b. Of these, the first board detection unit 130a and the second board detection unit 130b are provided on the tip side (the side of the extension unit 120 away from the hand base 110) of one side in the second direction (the side indicated by the arrow in the front-rear direction Y1) of the two extension units 120. That is, of the two extension units 120, the first board detection unit 130a is provided on the extension unit 120 on the other side in the third direction (the side opposite to the side indicated by the arrow in the left-right direction X1), and the second board detection unit 130b is provided on the extension unit 120 on one side in the third direction (here, the side indicated by the arrow in the left-right direction X1). Furthermore, the first and second board detection units 130a and 130b, which are provided at the tip ends of the two extension portions 120, are installed side by side in the third direction (left-right direction X1) (i.e., installed without offset). However, as in a modified example (shown in FIG. 10 ) described below, the second board detection unit 130b may be installed further away from the first board detection unit 130a on one side in the second direction (the side indicated by the arrow in the forward-backward direction Y1) (i.e., installed offset). Alternatively, only one board detection unit 130 may be provided on the tip end, which is on one side in the second direction (the side indicated by the arrow in the forward-backward direction Y1) of the extension portion 120.

[0024] In a second embodiment (shown in FIGS. 12A to 12F , see the description below), the board detection unit 130 includes a first board detection unit 130a and a second board detection unit 130b. The first board detection unit 130a and the second board detection unit 130b are provided on the base end (the side of the extension unit 120 closer to the hand base 110) of each of the two extension units 120, which is the other side of the second direction (the side opposite to the side indicated by the arrow in the forward-rearward direction Y1). Similarly, the first board detection unit 130a and the second board detection unit 130b provided on the base end of each of the two extension units 120 may be installed side by side (without offset) in the third direction (the left-right direction X1), or may be installed offset in the second direction in an embodiment not shown. Alternatively, only one board detection unit 130 may be provided on the base end. However, the present invention is not limited to this.

[0025] Here, the first direction (front-rear direction Y) is used as a reference to define the orientation of the opening O of the storage container H, the relative position of the edge portions E1 and E2 of the substrate W to be placed in the storage container H, and the movement direction when the robot hand 100 is inserted into the storage container H, and the second direction (front-rear direction Y1) is used as a reference to define the extension direction of the extension portion 120 of the robot hand 100 and the position of the substrate detection unit 130 provided on the extension portion 120. It is preferable that the first direction (front-rear direction Y) and the second direction (front-rear direction Y1) are parallel to each other at least when the robot hand 100 is inserted into the storage container H. That is, as shown in FIG. 6 , the front-rear direction Y and the front-rear direction Y1 coincide with each other. In this way, the robot hand 100 inserts the extension portion 120, which extends to one side in the second direction (the side indicated by the arrow in the forward-backward direction Y1), into the storage container H from the opening O toward the other side in the first direction (the side indicated by the arrow in the forward-backward direction Y), and identifies the position of either the edge E1 of the substrate W corresponding to one side in the first direction (the side indicated by the arrow in the forward-backward direction Y1) or the edge E2 corresponding to the other side in the first direction (the side indicated by the arrow in the forward-backward direction Y1) using the substrate detection unit 130 provided at the tip side, which is the one side in the second direction (the side indicated by the arrow in the forward-backward direction Y1) of the extension portion 120, or the base side, which is the other side in the second direction (the side opposite to the side indicated by the arrow in the forward-backward direction Y1), and calculates the inclination of the substrate W with respect to the robot hand 100 based on the identified position of either the edge E1 or the edge E2 of the substrate W. After the position and posture of the robot hand 100 are corrected based on the calculated tilt of the substrate W, the second direction (front-rear direction Y1) used as the reference for the robot hand 100 is not limited to being parallel to the first direction (front-rear direction Y) used as the reference for the storage container H. It is preferable that the second direction (front-rear direction Y1) of the robot hand 100 after correction be parallel to the center line L of the substrate W in a placed state (as will be described later). Here, the center line L is a line that is perpendicular to the edge E1 and the edge E2 and connects the edge E1 and the edge E2.

[0026] Regarding the position of the board detection unit 130 on the extension portion 120, in the first embodiment (shown in Figures 5 and 6), the board detection unit 130 includes a first board detection unit 130a and a second board detection unit 130b that are provided at the tip side, which is on one side of the second direction of the extension portion 120 (the side indicated by the arrow in the front-to-back direction Y1), and are spaced apart in a third direction (left-to-right direction X1) that is perpendicular to the second direction (front-to-back direction Y1). In contrast, in a second embodiment (the example shown in FIGS. 12A to 12F , see the description below), the substrate detection unit 130 is provided on the base end side of the extension portion 120, which is the other side in the second direction (the side opposite to the side indicated by the arrow in the front-rear direction Y1), and includes a first substrate detection unit 130a and a second substrate detection unit 130b that are spaced apart in a third direction (the left-right direction X1) that is perpendicular to the second direction (the front-rear direction Y1). Furthermore, the substrate W has an edge E1 that corresponds to one side in the first direction of the storage container H (the side opposite to the side indicated by the arrow in the front-rear direction Y) and is located near the opening O, and an edge E2 that corresponds to the other side in the first direction (the side indicated by the arrow in the front-rear direction Y) and is located away from the opening O. Therefore, the operations of each step of the substrate removal method differ depending on the position of the substrate detection unit 130 and the position of the edge E to be detected. Therefore, the substrate removal method of the present invention will be described using several examples below.

[0027] 7 and 8, a substrate removal method according to this embodiment will be described. The substrate removal method is a method for removing a substrate W placed at a predetermined position in a storage container H having an opening O on one side in a first direction (the side opposite to the side indicated by the arrow in the forward-backward direction Y) by a robot hand 100 provided on a substrate transport robot 30, and includes the following steps: First movement step S01: The robot hand 100 is moved to the other side in the first direction (the side indicated by the arrow in the forward-backward direction Y), and the extension part 120 is inserted through the opening O below the substrate W in the storage container H. First detection step S02: In the first movement step S01, the position of at least one linear edge E of the substrate W (either edge E1 or E2) is identified based on a change in the detection status of the substrate W by the substrate detection part 130. First stopping step S03: The movement of the robot hand 100 toward the other side in the first direction (the side indicated by the arrow in the forward-backward direction Y) is stopped. Calculation step S04: The inclination of the substrate W with respect to the robot hand 100 is calculated based on the position of the edge E (either edge E1 or E2) of the substrate W detected in the first detection step S02. Correction step S05: The position and attitude of the robot hand 100 are corrected based on the position of the edge E identified in the first detection step S02 and the inclination of the substrate W calculated in the calculation step S04. Substrate support step S06: The substrate support part 140 abuts against the bottom of the substrate W, and the robot hand 100 supports the substrate W. Removal step S07: The robot hand 100 supporting the substrate W is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the forward / backward direction Y), and the substrate W is removed from the storage container H. The correction process S05 also includes a tilt correction process S051 for correcting the posture of the robot hand 100, a second movement process S052 for moving the robot hand 100 so that the substrate detection unit 130 provided at the tip side faces the edge E2 of the substrate W, and a second stop process S053 for stopping the movement of the robot hand 100 in the second movement process S052 after the tilt correction process S051 is completed at a position where the substrate support unit 130 is positioned below the substrate W and the substrate detection unit 130 detects the substrate W.

[0028] Here, a substrate removal method (shown in FIGS. 9A to 9F ) will be described using the robot hand 100 of the first embodiment (shown in FIGS. 5 and 6 ). The substrate detection unit 130 provided at the tip of the extension unit 120 detects the edge E2 of the substrate W located away from the opening O, corrects the tilt, and removes the substrate. Here, to explain the detection by the substrate detection unit 130, components such as the substrate support unit 140 are omitted from the robot hand 100 shown in FIGS. 9A to 9D , but this is not limiting. First, as shown in FIG. 9A , in a first movement step S01, the robot hand 100 is moved to the other side of the first direction (the side indicated by the arrow in the forward-backward direction Y) and the extension unit 120 is inserted through the opening O below the substrate W in the storage container H. Here, when inserting the robot hand 100 into the storage container H, it is preferable to control the robot hand 100 so that the first direction (forward-backward direction Y) of the storage container H and the second direction (forward-backward direction Y1) of the robot hand 100 are parallel. Furthermore, the first detection step S02 identifies the position of the edge E2 of the substrate W based on a change in the detection status of the substrate W by the substrate detection unit 130 in the first movement step S01. That is, the first detection step S02 is executed when the substrate detection unit 130 provided on the extension part 120 passes below the edge E2 of the substrate W as the robot hand 100 moves in the first movement step S01. Also, as shown in FIG. 9B , the first stopping step S03 stops the movement of the robot hand 100 toward the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y). That is, when the first stopping step S03 is executed, the first movement step S01 ends.

[0029] Specifically, in the first moving step S01, the robot hand 100 is moved toward the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y) to insert the extension portion 120 below the substrate W, and the substrate detection portion 130 provided at the tip end of the extension portion 120 is caused to protrude from below the substrate W, thereby causing the substrate detection portion 130 to pass below the edge E2 of the substrate W. That is, the extension portion 120 is moved until the substrate detection portion 130 provided at the tip end of the extension portion 120 protrudes from the edge E2 of the substrate W. In this case, in the first detecting step S02, based on a change in the detection signal before and after the substrate detection portion 130 passes below the edge E2 of the substrate W, it is determined that the detection situation of the substrate detection portion 130 with respect to the substrate W has changed, and the position of the edge E2 is identified. For example, the first detection step S02 identifies the position of the edge E2 on the other side of the substrate W in the first direction on the movement path of the substrate detection unit 130 by switching the detection signal from on to off before and after the substrate detection unit 130 passes under the edge E2 on the other side of the substrate W in the first direction (switching the substrate detection unit 130 from a state in which it determines that the substrate W is present to a state in which it determines that the substrate W is absent). Also, the first stopping step S03 stops the movement of the robot hand 100 at a position where the substrate detection unit 130 protrudes from under the substrate W to the other side in the first direction (the side indicated by the arrow in the forward / backward direction Y). The operations from the first movement step S01 to the first stopping step S03 change as shown in FIG. 9A and FIG. 9B , and the first detection step S02 is performed between the first movement step S01 and the first stopping step S03. The first stopping step S03 may be performed, for example, immediately after the position of the edge E2 is identified in the first detecting step S02, but may also be performed when a predetermined time has elapsed since the movement of the robot hand 100 after the position of the edge E2 is identified in the first detecting step S02, or when the robot hand 100 has moved a predetermined distance after the position of the edge E2 is identified in the first detecting step S02. However, the present invention is not limited to this.

[0030] After the first stopping step S03, the calculation step S04 and the correction step S05 are performed while the extension part 120 of the robot hand 100 remains positioned within the storage container H and below the substrate W. Specifically, the calculation step S04 calculates the tilt of the substrate W with respect to the robot hand 100 based on the position of the edge E2 of the substrate W detected in the first detection step S02. As an example, the calculation step S04 calculates the direction and amount of tilt of the substrate W in the horizontal plane. Furthermore, the correction step S05 corrects the position and attitude of the robot hand 100 based on the tilt of the substrate W calculated in the calculation step S04. The correction is performed in the correction step S05 while the extension part 120 of the robot hand 100 is positioned within the storage container H. That is, the position and attitude of the robot hand 100 inserted into the storage container H is corrected while the robot hand 100 is positioned within the storage container H.

[0031] As an example, in this embodiment, a first substrate detector 130a and a second substrate detector 130b are installed in parallel at the tip of the extension portion 120 of the robot hand 100. Therefore, as shown in Fig. 9B , when the substrate W placed in the storage container H is inclined with respect to the robot hand 100, the first substrate detector 130a and the second substrate detector 130b pass below the edge E2 of the substrate W at different times or positions. As a result, the first detection step S02 includes, as shown in Fig. 7 , a third detection step S021 of identifying the position of the edge E2 of the substrate W located on the movement path of the first substrate detector 130a based on a change in the detection status of the substrate W by the first substrate detector 130a, and a fourth detection step S022 of identifying the position of the edge E2 of the substrate W located on the movement path of the second substrate detector 130b based on a change in the detection status of the substrate W by the second substrate detector 130b. For example, the third detection process S021 detects the position of the edge E2 on the other side of the substrate W in the first direction by switching the detection signal from on to off (switching from substrate W present to substrate W absent) before and after the first substrate detection unit 130a passes under the edge E2 on the other side of the substrate W in the first direction, and the fourth detection process S022 detects the position of the edge E2 on the other side of the substrate W in the first direction by switching the detection signal from on to off (switching from substrate W present to substrate W absent) before and after the second substrate detection unit 130b passes under the edge E2 on the other side of the substrate W in the first direction. Then, in the first stopping step S03, after the third detection step and the fourth detection step are completed, the movement of the robot hand 100 to the other side of the first direction in the first moving step S02 is stopped at a position where both the first substrate detection unit 130a and the second substrate detection unit 130b protrude from below the substrate W.

[0032] Therefore, as shown in FIG. 9B, when the position of the edge E2 located on the movement path of the first board detection unit 130a identified in the third detection step S021 is defined as the first edge position P1, and the position of the edge E2 located on the movement path of the second board detection unit 130b identified in the fourth detection step S022 is defined as the second edge position P2, the calculation step S04 calculates the direction and amount of inclination of the board W with respect to the third direction of the robot hand 100 (for example, the inclination angle θ shown in FIG. 9B) based on first distance information corresponding to the difference D1 in the second direction (front-to-back direction Y1) between the first edge position P1 and the second edge position P2, and second distance information corresponding to the distance D2 between the first board detection unit 130a and the second board detection unit 130b in the third direction (left-to-right direction X1). Thereafter, in the correction step S05, the tilt correction step S01 is executed (shown in FIG. 9C ), and the robot hand 100 is rotated clockwise or counterclockwise on the horizontal plane based on the direction and amount of tilt calculated in the calculation step S04, thereby correcting the posture so that the third direction of the robot hand 100 is parallel to the edge E2 of the substrate W, as shown in FIG. 9C . Furthermore, at this time, when a rectangular substrate W is used, the second direction (front-back direction Y1) of the robot hand 100 is parallel to the center line L of the substrate W. Here, the center line L is a line that is perpendicular to the edge E1 and the edge E2 and connects the edge E1 and the edge E2.

[0033] The operation of the robot hand 100 in the second movement step S052 is shown in FIG. 9D . In the second movement step S052, the robot hand 100 is moved toward the opening O of the storage container H, and the substrate detection unit 130, protruding from the edge E2 of the substrate W, is moved below the substrate W. For example, in FIG. 9D , the robot hand 100 is moved in a direction parallel to the second direction (the front-rear direction Y1 as the extension direction of the extension portion 120 of the robot hand 100). However, the robot hand 100 may be moved to one side of the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y), or may be moved in a direction other than a straight line. The tilt correction step S051 and the second movement step S052 may be performed simultaneously, or may be performed first ( FIG. 9C ) and then the second movement step S052 ( FIG. 9D ). When the tilt correction step S051 and the second movement step S052 are performed simultaneously, the rotation of the robot hand 100 in the tilt correction step S051 and the movement in the second movement step S052 are performed simultaneously (the operations of FIGS. 9C and 9D are combined). Then, as shown in FIG. 9D, the second stopping step S053 stops the movement of the robot hand 100 toward the opening O of the storage container H with the substrate detection unit 130 positioned below the substrate W. That is, the second movement step S052 ends when the second stopping step S053 is performed.

[0034] As an example of means for executing the second stopping step S053, the second moving step S052 further includes a second detecting step S0521, which detects a change in the detection status of the substrate W by the substrate detector 130. That is, the second detecting step S0521 identifies the position of the edge E2 on the other side of the substrate W in the first direction by the substrate detector 130 passing under the edge E2 on the other side of the substrate W in the first direction (the side indicated by the arrow in the forward / backward direction Y) and the detection signal switching from off to on (the substrate detector 130 switching from a state in which it has determined that the substrate W is absent to a state in which it has determined that the substrate W is present). Then, the second stopping step S053 stops the movement of the robot hand 100 in the second moving step S052 after the substrate detection unit 130 passes under the edge E2 on the other side of the substrate W in the first direction in the second detection step S0521 and the detection signal switches from off to on (switches from no substrate W to substrate W present).

[0035] The second detection step S0521 further includes a fifth detection step S0522 of identifying the position of the edge E2 of the substrate W located on the movement path of the first substrate detection unit 130a based on a change in the detection status of the substrate W by the first substrate detection unit 130a, and a sixth detection step S0523 of identifying the position of the edge E2 of the substrate W located on the movement path of the second substrate detection unit 130b based on a change in the detection status of the substrate W by the second substrate detection unit 130b. For example, the fifth detection step S0522 detects the position of the edge E2 of the substrate W on the other side in the first direction based on a switch from OFF to ON of the detection signal before and after the first substrate detection unit 130a passes below the edge E2 on the other side in the first direction of the substrate W (a switch from substrate W absence to substrate W presence), and detects whether the first substrate detection unit 130a has passed the edge E2 of the substrate W and returned to below the substrate W. The sixth detection process S0523 detects the position of the edge E2 on the other side of the substrate W in the first direction by switching the detection signal from off to on (switching from no substrate W to present substrate W) before and after the second substrate detection unit 130b passes under the edge E2 on the other side of the substrate W in the first direction, and detects whether the second substrate detection unit 130b has passed the edge E2 of the substrate W and returned to under the substrate W. Furthermore, the position of the edge E2 identified in the fifth detection process S0522 may be defined as the third edge position P3, and the position of the edge E2 identified in the sixth detection process S0523 may be defined as the fourth edge position P4 (shown in Figure 9D), and the correction process S05 may further include a tilt correction completion confirmation process S0524 for determining that the correction of the tilt of the substrate W by the robot hand 100 has been completed based on the difference in the movement direction of the second movement process S052 between the third edge position P3 and the fourth edge position P4.

[0036] As another example, the calculation step S04 further calculates a first stop position based on the position of the edge E2 of the substrate W detected in the first detection step S02, and the second stop step S053 stops the movement of the robot hand 100 in the second movement step S052 when the robot hand 100 reaches the first stop position. In this case, the second detection step S0521 described above may be omitted. Therefore, the execution time of the second stop step S053 (i.e., the position of the robot hand 100 when the second movement step S052 is completed) may be determined by the second detection step S0521 using the substrate detection unit 130, or may be determined by the calculation step S04. The present invention is not limited to this.

[0037] More specifically, in the tilt correction step S051 for correcting the tilt of the substrate W on the robot hand 100, the robot hand 100 is rotated so that the edge E2 on the other side in the first direction of the substrate W is parallel to the third direction (the left-right direction X1 as the width direction of the extension portion 120) of the robot hand 100. Therefore, after the tilt correction step S051 has been performed, the distance from the first substrate detection unit 130a to the edge E2 of the substrate W is equal to the distance from the second substrate detection unit 130b to the edge E2 of the substrate W. In particular, since the first substrate detection unit 130a and the second substrate detection unit 130b are installed in parallel at positions spaced apart in the third direction, in the tilt correction completion confirmation step S0524, it is preferable to determine that the tilt correction has been completed by checking that the position in the second direction (front-to-back direction Y1) of the third edge position P3, which is the position of the edge E2 of the substrate W identified by the first substrate detection unit 130a, matches the position in the movement direction of the second movement step S052 of the fourth edge position P4, which is the position of the edge E2 of the substrate W identified by the second substrate detection unit 130b.

[0038] Therefore, in the tilt correction completion confirmation step S0524, it is determined whether the correction of the tilt of the substrate W by the robot hand 100 has been completed based on whether the third edge position P3 detected by the first substrate detection unit 130a and the fourth edge position P4 detected by the second substrate detection unit 130b match in the movement direction of the second movement step S052 (i.e., whether the difference between the third edge position P3 and the fourth edge position P4 is 0). Therefore, the tilt correction completion confirmation step S0524 is preferably performed during the second movement step S052. That is, the tilt correction step S051 and the second movement step S052 are performed in the order of first performing the tilt correction step S051 and then performing the second movement step S052, and the second detection step S0521 (divided into a fifth detection step S0522 and a sixth detection step S0523 when two board detection units 130 are provided) and the tilt correction completion confirmation step S0524 are performed during the second movement step S052. Thereafter, the movement of the robot hand 100 in the second movement step S052 is stopped in a second stopping step S053.

[0039] 10 shows a modified example of the first embodiment. In this modified example, the second substrate detector 130b is provided further away from the first substrate detector 130a on one side in the second direction (the side where the extension portion 120 extends from the hand base 110 and the side indicated by the arrow in the front-rear direction Y1) (i.e., the second substrate detector 130b is installed offset from the first substrate detector 130a). FIG. 10 shows a state in the second stopping step S053 of the modified example of the first embodiment, and corresponds to FIG. 9D showing the state in the second stopping step S053 of the first embodiment. In this case, when the tilt correction step S051 for correcting the tilt of the substrate W on the robot hand 100 is performed, the robot hand 100 is rotated so that the edge E2 on the other side in the first direction of the substrate W is parallel to the third direction of the robot hand 100 (the left-right direction X1 as the width direction of the extension portion 120). For this reason, when the second moving step S052 is performed, in the process of the robot hand 100 moving toward the opening O of the storage container H, either the first substrate detection unit 130a or the second substrate detection unit 130b, which are installed offset from each other, passes below the edge E2 of the substrate W first. Therefore, in the second stopping step S053, it is preferable to stop the movement of the robot hand 100 in the second moving step S052 at a position where either the first substrate detection unit 130a or the second substrate detection unit 130b detects the substrate W and the other does not detect the substrate W. That is, the second stopping step S053 may be performed to stop the movement of the robot hand 100 when it is determined that the substrate support unit 140 has returned to below the substrate W by one of the first substrate detection unit 130a or the second substrate detection unit 130b detecting the substrate W. This makes it possible to detect deviations of the substrate W to one side in the second direction or the other side in the second direction relative to the robot hand 100 when supporting and transporting the substrate W, which will be described later. However, if the first substrate detection unit 130a and the second substrate detection unit 130b are installed offset from each other, the second stopping step S053 may be executed after both the first substrate detection unit 130a and the second substrate detection unit 130b pass below the substrate W and detect the substrate W. However, the present invention is not limited to this.

[0040] As described above, the underside of the substrate W has a contactable region R1 and a non-contactable region R2, as shown in FIG. 4 . Here, the substrate support members 140 correct the position and attitude of the robot hand 100 in the correction step S05 to achieve an appropriate positional relationship, so that all of the substrate support members 140 come into contact only with the contactable region R1 of the substrate W in the substrate supporting step S06. The substrate W can then be supported by the substrate support members 140 and removed from the storage container H. Specifically, as shown in FIG. 9E , in the substrate supporting step S06, the substrate W is supported by the substrate support members 140. For example, the movable substrate support members 140 installed on the extension portion 120 (installed so as to be retractable or deployable on the upper surface 122 of the extension portion 120) are deployed until they contact the underside of the substrate W, or the robot hand 100 is moved in the vertical direction Z until the immovable substrate support members 140 installed on the extension portion 120 contact the underside of the substrate W, thereby supporting the substrate W with the substrate support members 140. At this time, the substrate support part 140 supports the substrate W by contacting only the contactable region R1 of the substrate W (shown in FIG. 9E). Thereafter, the substrate support part 140 or the robot hand 100 is further moved in the vertical direction Z to lift the substrate W from the slot S of the storage container H and release the contact between the substrate W and the storage container H. Here, the substrate W is placed in a placing attitude on the slot S, which is a placing member of the storage container H, inside the storage container H, and in the substrate supporting step S06, the substrate W is lifted upward from the slot S, which is a placing member, while maintaining the placing attitude, and the robot hand 100 is operated so as not to disrupt the relative position between the substrate W and the robot hand 100 after the correction.

[0041] 9F , in the unloading step S07, the robot hand 100 supporting the substrate W is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the forward-backward direction Y) to unload the substrate W from the storage container H. Here, in the unloading step S07, the robot hand 100 is moved to one side in the first direction (the side opposite to the side indicated by the arrow in the forward-backward direction Y) while maintaining the substrate W lifted by the substrate support parts 140 in the placed position, and the substrate W is unloaded from the storage container H through the opening O facing one side in the first direction. Therefore, the substrate unloading method shown in FIGS. 7 , 8 , 9A to 9F and 10 and the substrate transfer system 20 applying the substrate unloading method correct the position and attitude of the robot hand 100 based on the tilt of the substrate W, and then the substrate support parts 140 of the robot hand 100 contact and support the contactable area of ​​the substrate W, and can unload the substrate W from the storage container H while supporting it, thereby preventing damage to the substrate W due to tilting. Furthermore, the correction of the position and posture of the robot hand 100 based on the inclination of the substrate W is performed while the extension portion 120 of the robot hand 100 is positioned inside the storage container H, so there is no need to move the robot hand 100 significantly before removing the substrate W, which improves the control stability when removing the substrate W and shortens the time required to remove the substrate W.

[0042] Furthermore, the above-described first embodiment has been described as an example of a substrate removal method in which the substrate detection unit 130 provided at the tip of the extension unit 120 detects the edge E2 located away from the opening O of the substrate W. However, as shown in FIGS. 11A to 11D , a substrate removal method is also possible in which the substrate detection unit 130 provided at the tip of the extension unit 120 detects the edge E1 located close to the opening O of the substrate W. Here, in order to explain the operation of the substrate detection unit 130 during detection, the robot hand 100 shown in FIGS. 11A to 11D omits components such as the substrate support unit 140, but this is not limited to this. As shown in FIG. 11A , in the first movement step S01, the robot hand 100 is moved to the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y) and the extension unit 120 is inserted into the storage container H through the opening O. Here, the first movement step S01 of this embodiment may be the same as the first movement step S01 of the first embodiment shown in FIG. 9A . In addition, in the first moving step S01, the first detecting step S02 identifies the position of the edge E1 of the substrate W based on a change in the detection state of the substrate W by the substrate detector 130. Then, as shown in Fig. 11B, in the first stopping step S03, after the first detecting step S02, the movement of the robot hand 100 toward the other side in the first direction (the side indicated by the arrow in the forward / backward direction Y) is stopped.

[0043] 11A , the first moving step S01 inserts the extension part 120 below the substrate W toward the other side in the first direction (the side indicated by the arrow in the forward / backward direction Y), thereby causing the substrate detector 130 provided at the tip of the extension part 120 to pass below the edge E1 of the substrate W. In this case, the first detecting step S02 determines that the detection situation of the substrate detector 130 for the substrate W has changed based on a change in the detection signal before and after the substrate detector 130 passes below the edge E1 of the substrate W, and identifies the position of the edge E1. For example, the first detection step S02 identifies the position of the edge E1 on one side in the first direction of the substrate W on the movement path of the substrate 130 by switching the detection signal from off to on (switching from a state in which the substrate detection unit 130 determines that the substrate W is absent to a state in which it determines that the substrate W is present) before and after the substrate detection unit 130 passes under the edge E1 on one side in the first direction of the substrate W. The first detection step S02 corresponding to the edge E1 of the substrate W here may employ the same detection method as the first detection step S02 corresponding to the edge E2 of the substrate W described above (for example, including a third detection step S021 by the first substrate detection unit 130a and a fourth detection step S022 by the second substrate detection unit 130b). 11B , the first stopping step S03 stops the movement of the robot hand 100 at a location where the substrate detection unit 130 is located below the substrate W (a state in which the substrate detection unit 130 does not protrude from below the substrate W and determines that the substrate W is present). The operations from the first moving step S01 to the first stopping step S03 change as shown in FIGS. 11A to 11B , and the first detecting step S02 is executed between the first moving step S01 and the first stopping step S03. The first stopping step S03 may be executed, for example, when a predetermined time has elapsed since the position of the edge E1 was identified in the first detecting step S02, or when the robot hand 100 has moved a predetermined distance since the position of the edge E1 was identified in the first detecting step S02. In another embodiment not shown, the first stopping step S03 may also involve moving the robot hand 100 to a position where the substrate detection unit 130 protrudes from below the substrate W, as shown in Fig. 9B. However, the present invention is not limited to this.

[0044] Furthermore, the calculation step S04 calculates the inclination of the substrate W with respect to the robot hand 100 based on the position of the edge E1 of the substrate W detected in the first detection step S02. The correction step S05 includes an inclination correction step S051 of correcting the position and attitude of the robot hand 100 based on the inclination of the substrate W calculated in the calculation step S04 and correcting the attitude of the robot hand 100, a second movement step S052 of moving the robot hand 100 so that the substrate detection unit 130 provided on the tip side faces the edge E2 of the substrate W, and a second stopping step S053 of stopping the movement of the robot hand 100 in the second movement step S052 after the inclination correction step S051 is completed at a position where the substrate support unit 130 is positioned below the substrate W and the substrate detection unit 130 detects the substrate W.

[0045] 11C , the tilt correction step S051 corrects the orientation of the robot hand 100 in a horizontal plane based on the tilt direction and tilt amount calculated in the calculation step S04. For example, the orientation of the robot hand 100 is corrected so that an edge E1 on one side of the substrate W in the first direction is parallel to the third direction of the robot hand 100 (for example, by rotating the robot hand 100 in a plane defined by the left-right direction X and the front-back direction Y). The tilt correction step S051 corresponding to the edge E1 of the substrate W may employ the same method as the tilt correction step S051 corresponding to the edge E2 of the substrate W described above (for example, by performing the tilt correction completion confirmation step S0524 in the second movement step S052). Furthermore, as shown in FIG. 11D , the second movement step S052 moves the robot hand 100 so that the substrate detection unit 130 located below the substrate W faces the edge E2 of the substrate W. 11D , the robot hand 100 is moved in a direction parallel to the second direction (the front-rear direction Y1 as the extension direction of the extension portion 120 of the robot hand 100), but it may also be moved to one side of the first direction (the side opposite to the side indicated by the arrow in the front-rear direction Y). As shown in FIG. 11D , the second stopping step S053 stops the movement of the robot hand 100 in the second moving step S052. Here, the second stopping step S053 may be executed, for example, when the robot hand 100 reaches the first stopping position calculated in the calculating step S04 based on the position of the edge E1 of the substrate W. However, the present invention is not limited to this.

[0046] 11A to 11D, the position and attitude of the robot hand 100 with respect to the tilt of the substrate W can be corrected, and then the substrate supporting step S06 shown in Fig. 9E and the removing step S07 shown in Fig. 9F can be performed to remove the substrate W from the storage container H while supporting it. That is, even if the edge detected by the substrate detecting unit 130 provided on the tip side of the extension portion 120 differs depending on the steps from Fig. 11A to 11D, the substrate W can be removed from the storage container H while being supported by employing means similar to the substrate supporting step S06 shown in Fig. 9E and the removing step S07 shown in Fig. 9F.

[0047] As can be seen from this, in the first embodiment in which the substrate detection unit 130 is provided at the tip of the extension unit 120 of the robot hand 100, either the edge E1 or the edge E2 of the substrate W may be detected in the first detection step S02. Furthermore, if the edge E2 is detected, the stopping position in the first stopping step S03 is a position where the substrate detection unit 130 protrudes from the substrate W, and the movement direction in the second movement step S052 is a direction in which the extension unit 120 moves toward the opening O of the containment vessel H (e.g., toward one side of the first direction) and the substrate detection unit 130 protruding from the substrate W returns to below the substrate W. On the other hand, if the edge E1 is detected, the stopping position in the first stopping step S03 may be a position where the substrate detection unit 130 is located below the substrate W (not protruding), or may be a position where the substrate detection unit 130 protrudes from the substrate W. Furthermore, the movement direction in the second movement step S052 may be a direction in which the substrate detection unit 130 located below the substrate W moves toward the other side of the first direction, or a direction in which the substrate detection unit 130 protruding from the substrate W returns to a position below the substrate W. The present invention is not limited to this.

[0048] 12A to 12F , a substrate removal method according to a second embodiment will be described, in which the substrate detection unit 130 is provided on the base end side (the side of the extension unit 120 closer to the hand base 110) of the extension unit 120, which is the other side in the second direction (the side opposite to the side indicated by the arrow in the front-rear direction Y1), and includes a first substrate detection unit 130a and a second substrate detection unit 130b spaced apart in a third direction (left-right direction X1) perpendicular to the second direction (front-rear direction Y1). In this case, it is difficult for the substrate detection unit 130 provided on the base end side of the extension unit 120 to pass through the edge E2 of the substrate W that is moving away from the opening O. Therefore, although this is not excluded, it is not preferable for the substrate detection unit 130 provided on the base end side of the extension unit 120 to detect the edge E2 of the substrate W that is moving away from the opening O. Preferably, the substrate detection unit 130 provided on the base end side of the extension portion 120 passes under the edge E1 close to the opening O, thereby identifying the position of the edge E1 of the substrate W close to the opening O by the substrate detection unit 130 provided on the base end side of the extension portion 120. Here, for the purpose of explaining detection by the substrate detection unit 130, components such as the substrate support unit 140 are omitted from the robot hand 100 shown in FIGS. 12A to 12D , but this is not limiting. First, as shown in FIG. 12A , in the first movement step S01, the robot hand 100 is moved to the other side of the first direction (the side indicated by the arrow in the forward / backward direction Y) and the extension portion 120 is inserted into the storage container H through the opening O. Here, the first movement step S01 of this embodiment may be the same as the first movement step S01 shown in FIG. 9A . In addition, in the first detection step S02, the position of the edge E1 of the substrate W is identified based on a change in the detection state of the substrate W by the substrate detection unit 130 in the first movement step S01. Then, as shown in Fig. 12B, in the first stopping step S03, the movement of the robot hand 100 toward the other side in the first direction (the side indicated by the arrow in the forward / backward direction Y) is stopped.

[0049] 12A , the first moving step S01 moves the robot hand 100 toward the other side in the first direction (the side indicated by the arrow in the forward / backward direction Y) to insert the extension portion 120 below the substrate W, thereby causing the substrate detection portion 130 provided on the base end side of the extension portion 120 to pass below the edge E1 of the substrate W. In this case, the first detecting step S02 determines that the detection situation of the substrate detection portion 130 for the substrate W has changed based on a change in the detection signal before and after the substrate detection portion 130 passes below the edge E1 of the substrate W, and identifies the position of the edge E1. For example, the first detection step S02 identifies the position of the edge E1 of the substrate W on one side in the first direction on the movement path of the substrate detection unit 130 by switching the detection signal from off to on before and after the substrate detection unit 130 passes under the edge E1 on one side in the first direction of the substrate W (switching of the substrate detection unit 130 from a state in which the substrate detection unit 130 determines that the substrate W is not present to a state in which the substrate detection unit 130 determines that the substrate W is present). Here, the first detection step S02 corresponding to the edge E1 of the substrate W may further include a third detection step S021 by the first substrate detection unit 130a and a fourth detection step S022 by the second substrate detection unit 130b. Furthermore, as shown in FIG. 12B , the first stopping step S03 stops the movement of the robot hand 100 at a location where the substrate detection unit 130 is located below the substrate W. 12A and 12B , the operations from the first moving step S01 to the first stopping step S03 are changed, and the first detecting step S02 is executed between the first moving step S01 and the first stopping step S03. Here, the first stopping step S03 is executed immediately after the position of the edge E1 is identified in the first detecting step S02, for example. However, it may be executed when a predetermined time has elapsed since the position of the edge E1 is identified in the first detecting step S02, or when the robot hand 100 has moved a predetermined distance since the position of the edge E1 is identified in the first detecting step S02. The present invention is not limited to this.

[0050] After the first stopping step S03, the calculation step S04 and the correction step S05 are performed while the extension part 120 of the robot hand 100 remains positioned inside the storage container H and below the substrate W. Specifically, the calculation step S04 calculates the tilt of the substrate W with respect to the robot hand 100 based on the position of the edge E1 of the substrate W detected in the first detection step S02. As an example, the calculation step S04 calculates the direction and amount of tilt of the substrate W in a horizontal plane. The correction step S05 also includes an inclination correction step S051 of correcting the position and attitude of the robot hand 100 based on the inclination of the substrate W calculated in the calculation step S04 and correcting the attitude of the robot hand 100, a second movement step S052 of moving the robot hand 100 so that the substrate detection unit 130 provided on the base end side faces the edge E1 of the substrate W, and a second stopping step S053 of stopping the movement of the robot hand 100 in the second movement step S052 after the inclination correction step S051 is completed at a position where the substrate support unit 130 is positioned below the substrate W and the substrate detection unit 130 detects the substrate W. The correction step S05 is performed with the extension part 120 of the robot hand 100 positioned inside the storage container H. That is, the position and attitude of the robot hand 100 inserted into the storage container H is corrected while the robot hand 100 is positioned inside the storage container H.

[0051] 12C , in a tilt correction step S051, the posture of the robot hand 100 in the horizontal plane is corrected based on the direction and amount of tilt calculated in the calculation step S04. For example, the posture of the robot hand 100 is corrected so that an edge E1 on one side of the substrate W in the first direction is parallel to a third direction (left-right direction X1) of the robot hand 100 (for example, the robot hand 100 is rotated in a plane formed by the left-right direction X and the front-back direction Y). Next, as shown in FIG. 12D , in a second movement step S052, the robot hand 100 is moved toward the opening O of the storage container H. In a second stopping step S053, the movement of the robot hand 100 toward the opening O in the second movement step S052 is stopped at a position where the substrate detection unit 130 is located near the edge E1 of the substrate W and determines that the substrate W is present. For example, the robot hand 100 is moved along a linear path in one direction (e.g., the side opposite to the side indicated by the arrow in the forward-backward direction Y) in a first direction. However, the movement may also include the first direction (the forward-backward direction Y, parallel to the slot S in the storage container H where the substrate W is placed), the second direction (the forward-backward direction Y1, parallel to the extension direction of the extension portion 120 of the robot hand 100), or a movement other than a linear movement. The tilt correction step S051 and the second movement step S052 may be performed simultaneously, or may be performed in the following order: the tilt correction step S051 ( FIG. 12C ) is performed first, followed by the second movement step S052 ( FIG. 12D ). Then, as shown in FIG. 12D , a second stopping step S053 stops the movement of the robot hand 100 toward the opening O of the storage container H. That is, the second movement step S052 is completed when the second stopping step S053 is performed.

[0052] 12C is completed, the robot hand 100 is moved toward the opening O. During this process, the substrate detector 130 passes under the edge E1 of the substrate W, and the detection signal switches from on to off (switching from substrate W presence to substrate W absence), detecting the position of the edge E1 of the substrate W, and then the movement of the robot hand 100 toward the opening O is stopped. Thereafter, the robot hand 100 starts moving again toward the other side in the first direction (the side indicated by the arrow in the forward / backward direction Y). The substrate detector 130 passes under the edge E1 of the substrate W, and the detection signal switches from off to on (switching from substrate W absence to substrate W presence), detecting the position of the edge E1 of the substrate W, and then the movement of the robot hand 100 toward the other side in the first direction is stopped. Thus, in the case of the second embodiment, in the second movement step S052 after the tilt correction step S051, the robot hand 100 moves back (towards the opening O) or forward (towards the other side of the first direction) so that the substrate detection unit shown in FIG. 12D is positioned near the edge E1 and can be stopped at a position where it detects the substrate W.

[0053] In another embodiment, a first stop position may be calculated based on the position of the edge E1 detected in the first movement step S01, and the second movement step S052 may stop the movement of the robot hand 100 when it reaches the first stop position. Specifically, the calculation step S04 may further calculate a first stop position where the substrate detection unit 130 is located near the edge E1 of the substrate W and has determined that the substrate W is present, based on the position of the edge E1 of the substrate W detected in the first movement step S01. The second stop step S053 may stop the movement of the robot hand 100 when it reaches the first stop position. In this case, the second detection step S0521 (including the fifth detection step S0522 by the first substrate detection unit 130a and the sixth detection step S0523 by the second substrate detection unit 130b) may be omitted. Therefore, the time point at which the second stopping step S053 is performed (i.e., the position of the robot hand 100 when the second moving step S052 is completed) may be determined by the second detecting step S0521 (using the substrate detecting unit 130) or by the calculating step S04. The present invention is not limited to this. Furthermore, the correcting step S05 corresponding to the edge E1 of the substrate W here may employ a means including the tilt correction completion confirming step S0524 described above.

[0054] 12A to 12D, the position and attitude of the robot hand 100 with respect to the tilt of the substrate W can be corrected, and then the substrate supporting step S06 shown in Fig. 12E and the removing step S07 shown in Fig. 12F can be performed to remove the substrate W from the storage container H while supporting it. The substrate supporting step S06 shown in Fig. 12E and the removing step S07 shown in Fig. 12F may employ the same means as the substrate supporting step S06 shown in Fig. 9E and the removing step S07 shown in Fig. 9F (except for the position of the substrate detection unit 130). That is, the edge E (either edge E1 or E2) may be detected as a basis for correction by the substrate detection unit 130 provided on the tip end side of the extension portion 120 in the steps from Fig. 9A to 11D, or the edge E (preferably edge E1) may be detected as a basis for correction by the substrate detection unit 130 provided on the base end side of the extension portion 120 in the steps from Fig. 12A to 12F. As can be seen from this, the substrate detection unit 130 may be provided at the tip end of the extension portion 120 of the robot hand 100 (first embodiment), or may be provided at the base end of the extension portion 120 of the robot hand 100 (second embodiment). Furthermore, in other embodiments not shown, a plurality of substrate detection units 130 may be provided at the tip end and base end of the extension portion 120 of the robot hand 100, or may be provided between the tip end and base end. It is sufficient that the substrate detection unit 130 passes the position of at least one linear edge E (either edge E1 or E2) of the substrate W, identifies the position of the edge E (either edge E1 or E2), corrects the position and attitude of the robot hand 100 based on the inclination of the substrate W, and then the substrate support unit 140 of the robot hand 100 comes into contact with a contactable region of the substrate W, and removes the substrate W from the storage container H while supporting it. However, the present invention is not limited to this.

[0055] Finally, it should be noted that the above embodiments are only used to explain the technical solutions of the present invention, and are not intended to limit the same. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art will understand that the technical solutions described in the above embodiments can still be modified or some or all of the technical features can be replaced with equivalents, provided that such modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

[0056] The substrate unloading method of the present invention and the substrate transfer system to which the substrate unloading method is applied can improve the control stability when unloading a substrate and shorten the time required to unload a substrate W.

[0057] 20 substrate transfer system, 22 substrate transfer module, 22a housing, 22b moving body, 22c guide structure, 24 control unit, 30 substrate transfer robot, 32 arm unit, 34 main body unit, 36 arm drive unit, 100 robot hand, 110 hand base, 120 extension unit, 122 upper surface, 124 mounting plate, 130 substrate detection unit, 130a first substrate detection unit, 130b second substrate detection unit, 140 substrate support unit, 140A first substrate support unit, 140B second substrate support unit, 140C third substrate support unit, 150 regulation unit, 150A first regulation unit, 150B second regulation unit, 160 drive unit, C1 load port, C2 processing device, D1 difference, D2 distance, E edge, E1 edge, E2 Edge, H storage container, L center line, O opening, P1 first edge position, P2 second edge position, P3 third edge position, P4 fourth edge position, S slot, S01 first movement process, S02 first detection process, S021 third detection process, S022 fourth detection process, S03 first stopping process, S04 calculation process, S05 correction process, S051 tilt correction process, S052 second movement process, S0521 second detection process, S0522 fifth detection process, S0523 sixth detection process, S0524 tilt correction completion confirmation process, S06 substrate support process, S07 removal process, W substrate, X left-right direction, X1 left-right direction, Y front-back direction, Y1 front-back direction, Z up-down direction, Z1 up-down direction, θ tilt angle.

Claims

1. A substrate removal method for removing a substrate placed at a predetermined position in a storage container having an opening on one side in a first direction by a robot hand provided on a substrate transport robot, the method comprising: the robot hand includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion provided on the extension portion, and a substrate support portion provided on the extension portion, and is controlled by a control device; The substrate removal method includes: a first movement step of moving the robot hand to the other side in the first direction and inserting the extension portion into the storage container through the opening; a first detection step of identifying a position of at least one linear edge of the substrate based on a change in a detection state of the substrate by the substrate detection unit in the first movement step; a first stopping step of stopping the movement of the robot hand toward the other side of the first direction; a calculation step of calculating an inclination of the substrate with respect to the robot hand based on the position of the edge of the substrate detected in the first detection step; a correction step of correcting the position and posture of the robot hand based on the tilt of the substrate calculated in the calculation step; a substrate supporting step in which the substrate support portion supports the substrate; a removal step of moving the robot hand supporting the substrate to one side in the first direction to remove the substrate from the storage container; Including, The correction step includes: performing correction with the extension portion of the robot hand positioned inside the storage container; a tilt correction step of correcting the posture of the robot hand; a second moving step of moving the robot hand so that the substrate detection unit moves toward an edge of the substrate in a first direction; a second stopping step of stopping the movement of the robot hand in the second movement step at a position where the substrate support unit is located below the substrate and the substrate detection unit detects the substrate after the tilt correction step is completed; Including, the first moving step moves the extension portion under the substrate toward the other side in the first direction, thereby passing the substrate detection portion under the edge portion of the substrate; the first detection step determines that a detection state of the substrate by the substrate detection unit with respect to the substrate has changed based on a change in a detection signal before and after the substrate detection unit passes under the edge of the substrate, and identifies the position of the edge; the first stopping step stops the movement of the robot hand at a position where the substrate detection unit protrudes from below the substrate toward the other side in the first direction; the second moving step moves the robot hand toward the opening of the storage container; The second stopping step stops the movement of the robot hand in the second moving step after the board detection unit passes under the edge of the board on the other side in the first direction and the detection signal switches from OFF to ON. A method for removing a substrate.

2. (delete)

3. (delete)

4. (delete)

5. The first detection step detects the position of the edge of the substrate on the other side in the first direction by switching the detection signal from on to off before and after the substrate detection unit passes under the edge of the substrate on the other side in the first direction.

2. The method for removing a substrate according to claim 1.

6. the calculating step calculates a tilt direction and a tilt amount of the substrate with respect to a horizontal plane; The tilt correction step corrects the posture of the robot hand on a horizontal plane based on the calculated tilt direction and tilt amount.

2. The method for removing a substrate according to claim 1.

7. the second moving step further includes a second detecting step, the second detection step detects a change in the detection state of the substrate by the substrate detection unit; The second stopping step stops the movement of the robot hand in the second moving step after the second detecting step.

2. The method for removing a substrate according to claim 1.

8. (delete)

9. The tilt correction step and the second movement step are performed simultaneously, or are performed in the following order: first, the tilt correction step is performed, and then, the second movement step is performed.

2. The method for removing a substrate according to claim 1.

10. The tilt correction step corrects the posture of the robot hand so that an edge of the substrate on one side or the other side in the first direction is parallel to a third direction of the robot hand that is orthogonal to the second direction.

2. The method for removing a substrate according to claim 1.

11. the substrate is placed in a placement position on a placement member of the storage container within the storage container, the substrate supporting step includes lifting the substrate upward from the mounting member while maintaining the substrate in a mounting position; The removing step moves the robot hand to one side in the first direction while maintaining the substrate lifted by the substrate support part in a placed position, and removes the substrate from the storage container.

2. The method for removing a substrate according to claim 1.

12. the board detection unit includes a first board detection unit and a second board detection unit provided at a distance from the first board detection unit in a third direction perpendicular to the second direction, The first detection step a third detection step of identifying the position of the edge of the substrate based on a change in the detection state of the substrate by the first substrate detection unit; a fourth detection step of identifying the position of the edge of the substrate based on a change in the detection state of the substrate by the second substrate detection unit; Including, The position of the edge portion identified in the third detection step is set as a first edge portion position; The position of the edge portion identified in the fourth detection step is set as a second edge portion position; The calculation step first distance information according to a difference in the second direction between the first edge position and the second edge position; second distance information according to a distance between the first substrate detector and the second substrate detector in the third direction; Based on Calculating the direction and amount of tilt of the substrate relative to the third direction of the robot hand 2. The method for removing a substrate according to claim 1.

13. The first stopping step includes: stopping the movement of the robot hand toward the other side in the first direction in the first movement step at a position where both the first substrate detection unit and the second substrate detection unit protrude from below the substrate; The tilt correction step and the second movement step include: The tilt correction step is first performed, and then the second movement step is performed, in that order; The second moving step includes: Furthermore, a fifth detection step of identifying the position of the edge of the substrate based on a change in the detection state of the substrate by the first substrate detection unit; a sixth detection step of identifying the position of the edge of the substrate based on a change in the detection state of the substrate by the second substrate detection unit; Including, The position of the edge portion identified in the fifth detection step is set as a third edge portion position; The position of the edge portion identified in the sixth detection step is set as a fourth edge portion position; The correction step further includes a tilt correction completion confirmation step of determining whether the correction of the tilt of the substrate by the robot hand has been completed based on a difference between the third edge position and the fourth edge position. The method for removing a substrate according to claim 12.

14. the second substrate detection unit is further provided spaced apart from the first substrate detection unit on one side in the second direction, The second stopping step includes: one of the first substrate detection unit and the second substrate detection unit detects the substrate; And at a position where the other does not detect the substrate, The movement of the robot hand in the second movement step is stopped. The method for removing a substrate according to claim 12.

15. A substrate removal method for removing a substrate placed at a predetermined position in a storage container having an opening on one side in a first direction by a robot hand provided on a substrate transport robot, the method comprising: the robot hand includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion provided on the extension portion, and a substrate support portion provided on the extension portion, and is controlled by a control device; The substrate removal method includes: a first movement step of moving the robot hand to the other side in the first direction and inserting the extension portion into the storage container through the opening; a first detection step of identifying a position of at least one linear edge of the substrate based on a change in a detection state of the substrate by the substrate detection unit in the first movement step; a first stopping step of stopping the movement of the robot hand toward the other side of the first direction; a calculation step of calculating an inclination of the substrate with respect to the robot hand based on the position of the edge of the substrate detected in the first detection step; a correction step of correcting the position and posture of the robot hand based on the tilt of the substrate calculated in the calculation step; a substrate supporting step in which the substrate support portion supports the substrate; a removal step of moving the robot hand supporting the substrate to one side in the first direction to remove the substrate from the storage container; Including, The correction step includes: performing correction with the extension portion of the robot hand positioned inside the storage container; a tilt correction step of correcting the posture of the robot hand; a second moving step of moving the robot hand so that the substrate detection unit moves toward an edge of the substrate in a first direction; a second stopping step of stopping the movement of the robot hand in the second movement step at a position where the substrate support unit is located below the substrate and the substrate detection unit detects the substrate after the tilt correction step is completed; Including, The calculating step further includes calculating a first stop position based on a position of an edge of the substrate; The second stopping step stops the movement of the robot hand in the second moving step when the robot hand reaches the first stopping position. A method for removing a substrate.

16. a substrate transport robot including a robot hand for supporting a substrate and a movement mechanism for movably holding the robot hand; a substrate transfer module having the substrate transfer robot therein; a control device for controlling the substrate transport robot; 1. A substrate transfer system comprising: the robot hand of the substrate transport robot includes a hand base, an extension portion extending from the hand base to one side in a second direction, a substrate detection portion provided on the extension portion, and a substrate support portion provided on the extension portion, and is controlled by the control device; The control device controls the substrate transport robot by the substrate removal method according to any one of claims 1, 5 to 7, and 9 to 15, and removes the substrate placed at a predetermined position in the storage container by the robot hand. A substrate transfer system comprising: