Laser Processing Equipment

Abstract

The laser processing device (100) performs laser processing by focusing a laser beam (3) with an fθ lens (4) and irradiating the laser beam (3) on a workpiece (25). The laser processing device (100) includes a protective window (5), a holder (6), a first air nozzle (7) for spraying a first air (A1), a dust collection duct (12) having a first opening (12a) and a second opening (12b), a second air nozzle (9) for spraying a second air (A2), a duct exhaust port (11), and a dust collection device (40) having a suction device (20) for sucking the second air (A2). The first opening (12a) and the second opening (12b) have an opening shape capable of surrounding the protective window (5), and the second air nozzle (9) sprays the second air (A2) over an area wider than the diameter of the protective window (5).

Description

[Technical field]

[0001] The present disclosure relates to a laser processing apparatus. [Background technology]

[0002] Laser processing devices that perform high-speed drilling or cutting on workpieces such as printed wiring boards are equipped with a lens and a protective window to protect the lens on the processing head. Such laser processing devices focus the laser light output from a laser oscillator with a focusing lens to perform laser processing on the workpiece. The protective window blocks spatter, interfering gas, and dust generated by the laser processing, preventing damage to the lens. If the protective window is exposed to spatter, interfering gas, or dust, the surface of the protective window will deteriorate or be damaged, resulting in cleaning, replacement, processing defects, etc.

[0003] In Patent Document 1, a cover glass that protects a focusing lens from debris that scatters when a workpiece is laser-processed, an air injection nozzle that injects air toward the cover glass to remove the debris, a downflow generating unit that generates a downflow that prevents the debris from entering the cover glass, an outside air introduction path, and a suction flow path are provided. The air injection nozzle and the downflow generating unit guide the debris that has scattered upwards downward without it reaching the cover glass, and collect it in the suction flow path. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2022-046068 A Summary of the Invention [Problem to be solved by the invention]

[0005] In Patent Document 1, an air curtain is adopted that introduces outside air using a configuration including an outside air introduction path and a suction flow path. However, because the air does not flow in a straight line and the air volume is small, there is variation in the protective ability of the air curtain and the protective performance of the protective window is reduced.

[0006] The present disclosure has been made in consideration of the above, and has an object to obtain a laser processing apparatus that improves the protective performance of a protective window and realizes stable laser processing. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the laser processing device of the present disclosure performs laser processing by focusing a laser beam with a focusing lens and irradiating the laser beam on a workpiece. The laser processing device includes a protective window provided on the downstream side of the optical path of the focusing lens, a holder for holding the focusing lens and the protective window, a first air nozzle for spraying first air toward the protective window, a dust collection duct having a first opening and a second opening downstream of the optical path from the first opening through which the laser beam passes, a second air nozzle for spraying second air, and a duct exhaust port which is a recovery port for the second air, and a dust collection device having a suction device for sucking the second air from the duct exhaust port. The first opening and the second opening have an opening shape large enough to surround the protective window. The second air nozzle sprays the second air over an area wider than the diameter of the protective window. Effect of the Invention

[0008] According to the laser processing apparatus of the present disclosure, it is possible to improve the protective performance of the protective window and realize stable laser processing. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram showing a schematic configuration of a laser processing apparatus according to an embodiment; [Diagram 2] FIG. 1 is a bottom view showing a configuration of a dust collection duct of a laser processing apparatus according to an embodiment; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A laser processing apparatus according to an embodiment will be described in detail below with reference to the drawings.

[0011] Embodiment FIG. 1 is a diagram showing a schematic configuration of a laser processing apparatus 100 according to an embodiment. FIG. 2 is a bottom view showing a configuration of a dust collection duct 12 of the laser processing apparatus 100 according to an embodiment. The laser processing apparatus 100 includes a laser oscillator 1, a reflecting mirror 2, an fθ lens 4 as a condensing lens, a protective window 5, a holder 6 as a first holder, a dust sensor 13, a Z-axis box 16 as a second holder, a dust collection device 40, a first high-pressure air supply source 21 as a first air supply source, a second high-pressure air supply source 22 as a second air supply source, a control device 24, and an XY table 26. The dust collection device 40 has a dust collection duct 12 and a suction device 20. The laser processing apparatus 100 performs laser processing by condensing a laser beam 3 with an fθ lens 4 and irradiating the laser beam 3 on a workpiece 25. FIG. 1 shows an X, Y, and Z coordinate system. The Z direction will be described as the up-down direction, but other implementations are possible.

[0012] The laser oscillator 1 emits a laser beam 3 as a pulse wave. The laser beam 3 emitted from the laser oscillator 1 is guided to an fθ lens 4 via a reflecting mirror 2. The reflecting mirror 2 reflects the laser beam 3 and guides it downstream on the optical path. The reflecting mirrors 2 are arranged at various positions on the optical path within the laser processing apparatus 100.

[0013] The fθ lens 4 focuses the laser light 3 on the workpiece 25. The workpiece 25 to be processed is placed on an XY table 26. The workpiece 25 is, for example, a printed wiring board. The XY table 26 can be moved two-dimensionally in the X and Y directions by a drive mechanism (not shown). The workpiece 25 is irradiated with the laser light 3, thereby drilling or cutting the workpiece 25.

[0014] A holder 6 is stored and fixed in the Z-axis box 16. The holder 6 has, for example, a cylindrical shape. The fθ lens 4 and a protective window 5 are attached inside the holder 6, and the holder 6 holds the fθ lens 4 and the protective window 5. The protective window 5 is provided below the fθ lens 4, downstream in the optical path. The protective window 5 is provided between the fθ lens 4 and the workpiece 25. The protective window 5 shields spatter B1, interfering gas B2, or dust B3 generated during processing of the workpiece 25, to protect the fθ lens 4.

[0015] A plurality of first air nozzles 7 are provided on the side of the holder 6. The plurality of first air nozzles 7 are connected to a first high-pressure air supply source 21 via a first air pipe 18. The first air nozzles 7 spray the first air A1 toward the protective window 5. That is, the plurality of first air nozzles 7 are provided below the protective window 5 and inclined obliquely so that the first air A1 is sprayed as high-pressure air toward the protective window 5 from obliquely below. This cools the protective window 5 and prevents a change in the refractive index of the protective window 5 due to the heat input of the laser light 3 and the associated processing defects. The first air A1 reflected by the protective window 5 changes direction downward and pushes back the spatter B1, interference gas B2, or dust B3 generated from the workpiece 25 downward.

[0016] A dust collection duct 12 is provided below the holder 6 to prevent spatter B1, interference gas B2, or dust B3 from being discharged to the outside. The dust collection duct 12 is attached to the underside of the Z-axis box 16 by a first bolt joint 14 and a second bolt joint 15, and is not in contact with the holder 6. That is, a gap 8 is provided between the holder 6 and the dust collection duct 12. By preventing direct contact between the dust collection duct 12 and the holder 6, negative pressure vibration of the suction device 20 described later is prevented from being transmitted to the fθ lens 4. The distance between the dust collection duct 12 and the Z-axis box 16 can be adjusted by adjusting the nut positions of the first bolt joint 14 and the second bolt joint 15 in the vertical direction.

[0017] The dust collection duct 12 has a first opening 12a through which the laser light 3 passes on the upper side and a second opening 12b through which the laser light 3 passes on the lower side so that the laser light 3 can be irradiated onto the workpiece 25. The first opening 12a and the second opening 12b have openings perpendicular to the optical axis of the laser light 3. FIG. 2 shows the dust collection duct 12 as viewed from the bottom. The dust collection duct 12 includes a second air nozzle 9 which is an outlet for the second air A2, and a duct exhaust port 11 which is a recovery port for the second air A2. The second air nozzle 9 is connected to a second high-pressure air supply source 22 via a second air piping 19. Clean second air A2 is supplied to the second air nozzle 9 from the second high-pressure air supply source 22 via the second air piping 19. The clean second air A2 is sprayed from the second air nozzle 9 into the dust collection duct 12 in the X direction so as to intersect with the laser light 3.

[0018] As shown in FIG. 2, the second air nozzle 9 has an opening that extends long in the Y direction, and the length of the opening of the second air nozzle 9 in the Y direction is greater than the diameter of the protective window 5. In other words, the second air nozzle 9 sprays the second air A2 along the surface of the protective window 5 to an area wider than the diameter of the protective window 5. This allows the second air A2 parallel to the protective window 5 to be sprayed from the second air nozzle 9 to an area wider than the outer diameter of the protective window 5. The second air nozzle 9 has an angle adjustment mechanism in the Z direction, and can be adjusted to an optimal air emission angle. It is preferable that the duct exhaust port 11 has an opening that extends long in the Y direction, similar to the second air nozzle 9, as shown in FIG. 2.

[0019] The duct exhaust port 11 is connected to the suction device 20 via an air pipe 17. The suction device 20 generates a suction force (negative pressure). The suction device 20 generates a negative pressure A3 from the duct exhaust port 11 and collects spatter B1, interfering gas B2, and dust B3 in the dust collection duct 12. In this way, the second air nozzle 9, the duct exhaust port 11, and the suction device 20 realize an air curtain function.

[0020] As shown in FIG. 2, the upper first opening 12a has a circular shape, and the lower second opening 12b has a shape that combines a semicircular shape and a rectangular shape. The upper first opening 12a has a circular shape with a diameter larger than the diameter of the protective window 5. The lower second opening 12b has a semicircular shape on the left side (-X side) with a diameter larger than the diameter of the protective window 5, and a rectangular shape on the right side (+X side) with two sides in the Y direction larger than the diameter of the protective window 5 and two sides in the X direction larger than the radius of the protective window 5. In this way, the first opening 12a and the second opening 12b have an opening shape large enough to surround the protective window 5.

[0021] As shown in FIG. 2, the second opening 12b is formed so that the area of ​​the opening region on the right side (+X side) of the center line 30 extending in the Y direction of the protective window 5 is larger than the area of ​​the opening region on the left side (-X side) of the center line 30. As long as the area of ​​the opening region on the duct exhaust port 11 side of the center line 30 of the second opening 12b is larger than the area of ​​the opening region on the second air nozzle 9 side of the center line 30 of the second opening 12b, the opening shape on the duct exhaust port 11 side of the center line 30 and the opening shape on the second air nozzle 9 side of the center line 30 of the second opening 12b may be other shapes. The center line 30 is a straight line extending in the ±Y direction from the position in the X direction through which the laser light 3 passes. The center line 30 can also be said to be a straight line extending in the ±Y direction from the circular center of the protective window 5, and when the first opening 12a has a circular shape, it can also be said to be a straight line extending in the ±Y direction from the circular center of the first opening 12a.

[0022] The dust sensor 13 measures the amount of dust in the dust collection duct 12. The dust to be measured includes spatter B1, interference gas B2, or dust B3. It is preferable to install the dust sensor 13 near the duct exhaust port 11. The measured amount of the dust sensor 13 is input to the control device 24. The control device 24 is connected to the dust sensor 13, the suction device 20, the first high-pressure air supply source 21, and the second high-pressure air supply source 22. The control device 24 stores information on the processing conditions of the laser processing and the information on the workpiece 25. The information on the processing work includes the material and thickness of the processing work. The control device 24 controls the air volume of the first air nozzle 7 by the first high-pressure air supply source 21, the air volume of the second air nozzle 9 by the second high-pressure air supply source 22, and the suction force (negative pressure) of the suction device 20 based on the measurement value of the dust sensor 13, the processing conditions of the laser processing, and the processing work information.

[0023] In the embodiment, the first opening 12a and the second opening 12b have an opening shape large enough to surround the protective window 5. Furthermore, the second air nozzle 9 sprays the second air A2 along the surface of the protective window 5 over an area wider than the diameter of the protective window 5. As a result, in the embodiment, the straightness of the second air A2 is improved, the air volume increases, the protective ability of the air curtain is stabilized, and the protective performance of the air curtain for the protective window 5 is improved.

[0024] Furthermore, at second opening 12b, the opening area on the duct exhaust port 11 side of center line 30 is larger than the opening area on the second air nozzle 9 side of center line 30, so that generation of turbulence on the duct exhaust port 11 side in dust collection duct 12 can be suppressed and a decrease in dust collection efficiency and air curtain strength can be prevented.

[0025] In the embodiment, a gap 8 is provided between the dust collection duct 12 and the holder 6 to prevent direct contact between the dust collection duct 12 and the holder 6. This makes it possible to prevent the negative pressure vibration of the suction device 20 from being propagated to the fθ lens 4, thereby preventing processing defects.

[0026] Furthermore, in the embodiment, clean first air A1 and second air A2 are supplied from the first high-pressure air supply source 21 and the second high-pressure air supply source 22, so that clean first air A1 and second air A2 can be supplied even when the outside air is filled with spatter, interfering gases, and dust, thereby reducing the risk of damage to the protective window 5.

[0027] In the embodiment, the control device 24 controls the air volume of the first air nozzle 7 from the first high pressure air supply source 21, the air volume of the second air nozzle 9 from the second high pressure air supply source 22, and the suction force (negative pressure) of the suction device 20 based on the measurement value of the dust sensor 13, the laser processing conditions, and the processing work information, so that it is possible to optimize the protective ability of the protective window 5. By optimizing the protective ability of the protective window 5 when the processing conditions, processing work, and factory environment change, it is possible to prevent damage to the protective window 5 and the retention of spatters B1, interference gas B2, and dust B3 in the environment or on the workpiece 25.

[0028] The configurations shown in the above embodiments are examples of the contents of the present disclosure, and may be combined with other known technologies, or the embodiments may be combined with each other. Also, parts of the configurations may be omitted or modified without departing from the gist of the present disclosure. [Explanation of symbols]

[0029] 1 laser oscillator, 2 reflecting mirror, 3 laser light, 4 fθ lens, 5 protective window, 6 holder, 7 first air nozzle, 8 gap, 9 second air nozzle, 11 duct exhaust port, 12 dust collection duct, 12a first opening, 12b second opening, 13 dust sensor, 14 first bolt joint, 15 second bolt joint, 16 Z-axis box, 17 air pipe, 18 first air pipe, 19 second air pipe, 20 suction device, 21 first high pressure air supply source, 22 second high pressure air supply source, 24 control device, 25 workpiece, 26 XY table, 30 center line, 40 dust collection device, 100 laser processing device, A1 first air, A2 second air, B1 spatter, B2 interference gas, B3 dust.

Claims

1. A laser processing apparatus that performs laser processing by condensing a laser beam with a condenser lens and irradiating a workpiece, a protective window provided on the optical path downstream side of the condenser lens, a holder that holds the condenser lens and the protective window, a first air nozzle that injects first air toward the protective window, a dust collection duct having a first opening through which the laser beam passes, a second opening on the optical path downstream side of the first opening, a second air nozzle that injects second air, and a duct exhaust port that is a recovery port for the second air, and a dust collection device having a suction device that sucks the second air from the duct exhaust port, the first opening and the second opening have an opening shape of a size that can surround the protective window, the second air nozzle injects the second air over a range wider than the diameter of the protective window characterized in that it is a laser processing apparatus.

2. The second air nozzle injects the second air along the surface of the protective window characterized in that it is the laser processing apparatus according to claim 1.

3. The opening area of the second opening on the duct exhaust port side from the center line is larger than the opening area of the second opening on the second air nozzle side from the center line characterized in that it is the laser processing apparatus according to claim 1.

4. The first holder, which is the holder, is housed and fixed in a second holder, the dust collection duct is fixed on the optical path downstream side of the second holder at a distance from the first holder characterized in that it is the laser processing apparatus according to claim 1.

5. a first air supply source that supplies clean first air to the first air nozzle, a second air supply source that supplies clean second air to the second air nozzle, characterized in that it is the laser processing apparatus according to claim 1.

6. a dust sensor that measures the amount of dust in the dust collection duct, a control device that controls the air volume of the first air nozzle, the air volume of the second air nozzle, and the suction force of the dust collection device based on the measured value of the dust sensor, the processing conditions of the laser processing, and the information of the workpiece characterized in that it is the laser processing apparatus according to claim 1.

7. having a mechanism for adjusting the distance between the second holder and the dust collection duct characterized in that it is the laser processing apparatus according to claim 4.

8. having a mechanism for adjusting the angle of the second air with respect to the direction perpendicular to the surface of the protective window The laser processing apparatus according to any one of claims 1 to 7, characterized by the above.

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