Fluid treatment device

Abstract

According to the present invention, the lifespans of a fluid treatment device and peripheral devices located in the vicinity of the fluid treatment device are extended. This fluid treatment device comprises: a light-emitting tube; a light-emitting gas that is sealed inside the light-emitting tube, and emits ultraviolet rays including a wavelength of at most 200 nm by dielectric barrier discharge; a container that has a hole for inserting the light-emitting tube, contains a fluid to be treated with the ultraviolet rays, and blocks the ultraviolet rays; a pair of electrodes arranged so as to sandwich the light-emitting gas; a base part that fixes the light-emitting tube to the container in a state where the light-emitting tube is inserted in the hole; and a light-blocking material for preventing the ultraviolet rays from leaking outside the container.

Description

Fluid Treatment Device

[0001] The present invention relates to fluid treatment devices.

[0002] High-purity water containing as few impurities as possible is essential for cleaning semiconductors and precision instruments, pharmaceutical manufacturing, microanalysis equipment, and the like. For example, in substrate cleaning processes during semiconductor device manufacturing, large amounts of pure water (also known as "ultrapure water") are used to rinse away highly concentrated chemicals and detergents. In recent years, the demand for improved quality of pure water has increased with the miniaturization, densification, and high integration of circuit patterns in semiconductor devices. Pure water used in cleaning processes, etc., is required to have an extremely low concentration of total organic carbon (TOC), one of the water quality control items. This is because if pure water contains a large amount of organic matter, the organic matter may carbonize during the subsequent heat treatment process, potentially causing insulation defects in the substrate.

[0003] In response to the increasing demand for improved quality of pure water, various methods have been investigated in recent years for decomposing and removing trace amounts of organic matter contained in pure water. One such method involves irradiating water with ultraviolet light to decompose and remove organic matter contained in water, and a fluid treatment device for this decomposition and removal has been developed (see Patent Document 1 below).

[0004] Japanese Patent Application Laid-Open No. 2016-215119

[0005] Fluid processing devices are required to be able to withstand long-term use. The inventors of the present invention have noticed that long-term use of a fluid processing device can cause deterioration of the fluid processing device and peripheral devices located in the vicinity of the fluid processing device (hereinafter, the fluid processing device and peripheral devices located in the vicinity of the fluid processing device are collectively referred to as "fluid processing devices, etc."). Therefore, an object of the present invention is to minimize deterioration of the fluid processing device, etc., thereby extending its lifespan.

[0006] The fluid treatment device of the present invention comprises: an arc tube; a luminous gas sealed inside the arc tube and emitting ultraviolet light including wavelengths of 200 nm or less by dielectric barrier discharge; a container having a hole for inserting the arc tube, containing a fluid to be treated by the ultraviolet light, and blocking the ultraviolet light; a pair of electrodes arranged to sandwich the luminous gas; a base for fixing the arc tube to the container with the arc tube inserted in the hole; and a light-blocking material for preventing the ultraviolet light from leaking outside the container.

[0007] The background to the creation of the above-described fluid treatment device will now be explained. After extensive research, the inventors discovered that even if a container blocks ultraviolet light emitted from a light-emitting tube, the ultraviolet light can leak outside the container through the hole for inserting the light-emitting tube. In particular, ultraviolet light with a wavelength of 200 nm or less activates oxygen in the environment to generate ozone. When ultraviolet light with a wavelength of 200 nm or less is used to irradiate a fluid, leakage of the ultraviolet light activates oxygen in the atmosphere surrounding the fluid treatment device to generate ozone. Prolonged exposure of a fluid treatment device to ozone can deteriorate the device. Therefore, the inventors decided to provide a light-blocking material for blocking the ultraviolet light, separate from the container that blocks the ultraviolet light. The fluid treatment device prevents leakage of the ultraviolet light from the fluid treatment device by both the container that blocks ultraviolet light and the light-blocking material arranged around the hole in the container. Therefore, ozone is not generated outside the fluid treatment device, and deterioration of the fluid treatment device is suppressed.

[0008] The arc tube may be attached to the base with an adhesive, and the light blocking material may be included in the adhesive.

[0009] A portion of the base may be positioned between the adhesive and the container. If the adhesive comes into contact with water, there is a risk that adhesive components may leach into the water, increasing the TOC concentration or causing the adhesive to deteriorate. However, if a portion of the base is positioned between the adhesive and the container, the adhesive is less likely to come into contact with the water inside the container, reducing the risk.

[0010] The adhesive may be an inorganic adhesive, which does not dissolve in water and increase TOC even when it comes into contact with water.

[0011] The arc tube may be disposed across the inside and outside of the container.

[0012] The pair of electrodes may be arranged with the fluid sandwiched between them.

[0013] The pair of electrodes may be composed of a first electrode located inside the arc tube and a second electrode located outside the vessel.

[0014] There may be a seal between the base and the container.

[0015] According to the present invention, deterioration of a fluid treatment device or the like can be suppressed, and therefore a fluid treatment device or the like with an extended service life can be provided.

[0016] Fig. 1 is a diagram showing a fluid processing device of a first embodiment; Fig. 2 is an enlarged view of region A1 of Fig. 1; Fig. 3 is a diagram showing a fluid processing device of a second embodiment; Fig. 4 is a diagram showing a fluid processing device of a third embodiment; Fig. 5 is a diagram showing a fluid processing device of a fourth embodiment; Fig. 6 is a diagram showing a fluid processing device of a modified example of the fourth embodiment; Fig. 7 is a diagram showing a fluid processing device of a fifth embodiment; Fig. 8 is a diagram showing a fluid processing device of a first modified example of the fifth embodiment; Fig. 9 is a diagram showing a fluid processing device of a second modified example of the fifth embodiment.

[0017] The fluid treatment device of the present invention will be described below with reference to the drawings. Note that the drawings are all schematic illustrations, and the numbers on the drawings do not necessarily correspond to the actual numbers.

[0018] In the following description, the fluid to be treated is assumed to be water, but the fluid to be treated that can be applied to the present invention is not limited to water. Specifically, any liquid that undergoes decomposition and removal of contained substances or sterilization treatment when irradiated with ultraviolet light can be treated by the fluid treatment device of the present invention. In addition to liquids, gases or gas-liquid mixtures can also be treated.

[0019] <First embodiment> [Outline of fluid treatment device] A first embodiment of a fluid treatment device will be described. Fig. 1 is a diagram showing the configuration of a fluid treatment device 100 of the first embodiment. As shown in Fig. 1, the fluid treatment device 100 includes an arc tube 1 that emits ultraviolet light and a container 2 that contains water to be treated with ultraviolet light.

[0020] The vessel 2 has an inlet 11 for allowing water to flow into the vessel 2 and an outlet 12 for discharging the water from the vessel 2. A pump outside the fluid treatment device 100 sends water into the vessel 2 from the inlet 11, filling the space S1 inside the vessel 2 and outside the arc tube 1 with water. Once the space S1 is filled with water, the arc tube 1 is turned on and ultraviolet light is irradiated onto the water. Organic matter in the water irradiated with ultraviolet light is decomposed, and the decomposed water is discharged from the outlet 12.

[0021] When irradiating with ultraviolet rays, water in a stationary state may be irradiated with ultraviolet rays. Specifically, when the space S1 in the container 2 is filled with water, valves (not shown) connected to the inlet 11 and the outlet 12 are closed, and ultraviolet rays are irradiated while the inflow and outflow of water are stopped. Conversely, ultraviolet rays may be irradiated with flowing water. Specifically, ultraviolet rays are irradiated while the valves connected to the inlet 11 and the outlet 12 are open (or no valves are provided) and water is flowing in and out. Furthermore, the fluid treatment device may repeatedly introduce treated water again, i.e., circulate the water. This may enhance the decomposition ability of organic matter in the water.

[0022] The container 2 blocks ultraviolet light emitted from the arc tube 1. This prevents the ultraviolet light from passing through the container 2 and leaking out of the container 2. Not all of the materials constituting the container 2 need to be light-blocking to ultraviolet light. For example, the container 2 may be configured by forming a light-blocking film on the inner or outer surface of the translucent container 2. The light-blocking film formed on the container 2 may be the same film as the conductive film (described in detail below) formed on the container 2, or may be a different film.

[0023] The arc tube 1 is inserted into a hole opened in the container 2. In this embodiment, the arc tube 1 is inserted so that the entire arc tube 1 is positioned inside the container 2. The fluid treatment device 100 has a base 7 for fixing the arc tube 1 to the container 2. The arc tube 1 is supported on one side, that is, the arc tube 1 is supported by the base 7 at only one end. The base 7 is positioned outside the container 2. The base 7 supports one end of the arc tube 1. The base 7 covers and seals the hole, preventing water in the container 2 from leaking out of the fluid treatment device. The base 7 also has a hole for passing the conductive wire 4 through.

[0024] The base 7 has a groove on the surface that contacts the container 2, and a sealing member 8 such as an O-ring is fitted into the groove. The sealing member 8 is positioned between the base 7 and the container 2, preventing water from leaking from the gap between the base 7 and the container 2. In this manner, the base 7 has the roles of fixing the arc tube 1 to the container 2 and preventing water from leaking through the hole provided in the container 2. In this embodiment, because the container 2 blocks ultraviolet rays, the sealing member 8 is in the shadow of the container 2, making it difficult for ultraviolet rays to hit the sealing member 8, and as a result, the sealing member 8 is less likely to be deteriorated by ultraviolet rays.

[0025] An adhesive 9 is used to bond the arc tube 1 to the base 7. The adhesive 9 is located between the arc tube 1 and the base 7. In this embodiment, the adhesive 9 is provided so as to cover the portion of the metal wire (described in detail below) that becomes the first electrode 3 protruding from the arc tube 1 and one end of the arc tube 1.

[0026] [Light-blocking material] In addition to the light-blocking container 2, the fluid treatment device 100 is provided with a light-blocking material for preventing ultraviolet rays from leaking out of the container 2. This is because the container 2 cannot block ultraviolet rays leaking from the hole for inserting the arc tube 1. Instead of the container 2, the light-blocking material blocks ultraviolet rays leaking from the hole.

[0027] Unless otherwise specified, the term "light-blocking material" in this specification is a concept that includes a component having another function that has a light-blocking function, a light-blocking film formed on the surface of a component having another function, and a light-blocking plate that is separate from the component having another function. The light that is blocked by the light-blocking material is at least ultraviolet light having a wavelength of 200 nm or less among the light emitted from the arc tube 1. "Light-blocking" in this specification refers to a state in which the transmittance of light of a specific wavelength (for example, the wavelength with the highest light intensity) among wavelengths of 200 nm or less is 10% or less.

[0028] In this embodiment, there are two light-blocking materials: a first light-blocking material and a second light-blocking material. The first light-blocking material is the base 7 itself. The base 7 blocks ultraviolet light. If the base 7 does not block ultraviolet light, a film of a material that blocks ultraviolet light may be formed on the surface of the base 7. As a modified example, the first light-blocking material may be a light-blocking film sandwiched between the arc tube 1 and the base 7. The light-blocking film is fixed, for example, by attaching the arc tube 1 to the base 7 with the light-blocking material sandwiched between the arc tube 1 and the base 7. As a further modified example, after the base 7 is fixed to the container 2, a light-blocking plate separate from the base 7 may be attached to cover the base 7.

[0029] The second light-blocking material is the adhesive 9. As described above, the base 7 has holes 10 for passing the conductive wires 4. Even when the base 7 functions as a light-blocking material, there is a risk of ultraviolet light leaking through the holes 10. However, if the adhesive 9 has an ultraviolet light-blocking function, it is possible to prevent ultraviolet light from leaking through the holes 10. In order to give the adhesive 9 an ultraviolet light-blocking function, it is preferable to add a material that blocks ultraviolet light (for example, a metal material powder) to the material that constitutes the adhesive 9.

[0030] In this embodiment, the light-blocking material includes two light-blocking materials: a first light-blocking material and a second light-blocking material. However, the light-blocking material may include only one of the first light-blocking material and the second light-blocking material. The light-blocking material prevents ultraviolet rays from leaking outside the container 2. When ultraviolet rays leak, they activate oxygen in the atmosphere surrounding the fluid treatment device, generating ozone. The generated ozone may deteriorate the fluid treatment device 100 or peripheral devices located near the fluid treatment device 100. Furthermore, if the ozone is highly concentrated, it may also have adverse effects on the human body. By preventing ultraviolet rays from leaking, deterioration of the fluid treatment device 100 or peripheral devices located near the fluid treatment device 100 is suppressed, and adverse effects on the human body are prevented.

[0031] In a more preferred embodiment, the light-shielding material is formed in all areas (not limited to holes provided in the container) where ultraviolet light may leak. As a specific example, the light-shielding material is placed in a position that blocks the path of ultraviolet light propagating from inside the container to outside the container. Furthermore, it is desirable to form the light-shielding material so that there are no areas where ultraviolet light comes into contact with the air outside the container, or, if there are areas where ultraviolet light comes into contact with the air outside the container, to form a light-shielding portion to block those areas. This prevents the generation of ozone itself, or prevents the generated ozone from leaking out of the container.

[0032] 2 is an enlarged view of region A1 in FIG. 1 . In this embodiment, a portion of the base 7 is positioned between the adhesive 9 and the container 2, and the adhesive 9 is designed to be less likely to come into contact with the water filled in the container 2. However, a small gap 21 may be formed between the arc tube 1 and the base 7 to allow play for fitting the arc tube 1 into the base 7. Water filled in the space S1 may then seep into the gap 21 and come into contact with the adhesive 9. Depending on the type of adhesive 9, contact with water may cause components of the adhesive 9 to dissolve. Dissolving components of the adhesive 9 in water is undesirable for a fluid treatment device intended to produce pure water.

[0033] Therefore, it is preferable that the adhesive 9 be composed of a component that does not dissolve even when it comes into contact with water. If the goal is to keep the TOC concentration at an extremely low level, it is preferable to use an inorganic adhesive rather than an organic adhesive as the adhesive 9. Examples of inorganic adhesives include alumina, silica, magnesium oxide, zirconium oxide, and a mixture containing at least two of these materials.

[0034] The base 7 may be made of a metal, resin, glass, or ceramic material. It is preferable to use a material for the base 7 that is resistant to deterioration by ultraviolet rays, resistant to dissolution in water, and resistant to the heat of the arc tube 1. Suitable materials for the base 7 include alumina, steatite, zirconium oxide, aluminum nitride, silicon nitride, and silicon carbide. In order to improve the adhesion of the adhesive 9 to the base 7, it is preferable to use a material for the base 7 that is the same as or similar to the material for the adhesive 9.

[0035] Furthermore, in order to reduce the gap 21 itself, the base 7 may be made of a flexible material, and the insertion opening of the base 7 for the arc tube 1 may be designed to be small enough to allow the arc tube 1 to be inserted while bending the base 7, thereby minimizing the infiltration of water into the gap 21. Furthermore, a sealant (not shown) may be inserted into the gap 21 to prevent water in the space S1 from coming into contact with the adhesive 9 through the gap 21.

[0036] [Light Emitting Tube] The light emitting tube 1 has a cylindrical shape. A light emitting gas G1 is sealed inside the light emitting tube 1. A long first electrode 3 is inserted into the light emitting tube 1 along the tube axis direction of the light emitting tube 1. A conducting wire 4 extends from the first electrode 3 toward the outside of the light emitting tube 1 and is connected to a power source 6. The power source 6 provides an additive voltage. In this embodiment, the first electrode 3 is a metal wire. The metal wire functions as the first electrode 3 for applying a lighting voltage via the conducting wire 4. Although the metal wire is shown as being straight, the metal wire may also be curved or spiral (coiled). The diameter of the metal wire is preferably, for example, 0.1 mm or more and 3 mm or less, and particularly preferably 0.2 mm or more and 1 mm or less. The metal wire may also be a large-diameter, rigid metal rod. Note that the first electrode 3 may be present only inside the light emitting tube 1, and the conducting wire 4 extending from the first electrode 3 may constitute the portion extending outside the light emitting tube 1.

[0037] The container 2 is made of a conductive material, and a conductor 5 extends from the container 2. The conductor 5 is grounded. The container 2 functions as a second electrode connected to the ground side. The luminescent gas G1 and water are arranged so as to be sandwiched between the first electrode 3 (metal wire) and the container 2, which is the second electrode, respectively. When the container 2 is filled with water and a voltage is applied between the first electrode 3 and the container 2, which is the second electrode, by the power source 6, a dielectric barrier discharge occurs in the arc tube 1 via the water, which has impedance. This causes ultraviolet light to be emitted from the luminescent gas G1, and the ultraviolet light is irradiated onto the water stored in the container 2.

[0038] Since the container 2 functions as the second electrode, the container 2 in this embodiment is made of a conductive material. However, not all of the materials constituting the container 2 need to be conductive. For example, the second electrode may be formed by forming a conductive film on the inner surface of the insulating container 2.

[0039] In this embodiment, xenon (Xe) gas is sealed as the light emitting gas G1. The excimer light emitted from the xenon gas mainly contains ultraviolet light with a wavelength of 172 nm. In this specification, "ultraviolet light with a wavelength of 172 nm" refers to light with a wavelength of 172 nm that shows the maximum intensity in the optical spectrum distribution. The light emitting gas G1 is appropriately selected depending on the desired wavelength to be used. Other rare gases such as argon (Ar) gas and krypton (Kr) gas may also be used as the light emitting gas G1. Fluorine gas (F ２ ), chlorine gas (Cl ２ ), iodine gas (I ２ ) and bromine gas (Br ２ Alternatively, a mixed luminous gas may be used, which is a mixture of two or more of the above-mentioned gases.

[0040] The light emitted from the arc tube 1 preferably contains primarily ultraviolet light with wavelengths of 200 nm or less. "Mainly containing wavelengths of 200 nm or less" means that in the light intensity spectrum distribution, the integral value of the light intensity at wavelengths of 200 nm or less is greater than the integral value of the light intensity at wavelengths over 200 nm. The material of the arc tube 1 is selected based on whether it transmits the wavelength band of ultraviolet light to be used. In the present embodiment, the arc tube 1 is made of quartz glass, which transmits ultraviolet light with wavelengths of 200 nm or less.

[0041] Second Embodiment A second embodiment of the fluid processing device will be described. The following description will focus on differences from the first embodiment. In the second embodiment, if the configuration is the same as that of the first embodiment, the description of the second embodiment may be omitted. The same applies to the third and subsequent embodiments.

[0042] 3 is a diagram showing the configuration of a fluid treatment device 200 according to a second embodiment. In the first embodiment, the arc tube 1 was inserted so that the entire arc tube 1 was located within the container 2. However, in this embodiment, the arc tube 1 is arranged straddling the inside and outside of the container 2 so that a portion of the arc tube 1 is located outside the container 2. A high voltage is applied to the first electrode 3 within the arc tube 1. If water infiltrates the portion of the first electrode 3 that extends out from the arc tube 1, there is a risk of electrical leakage. However, when the arc tube 1 is arranged straddling the inside and outside of the container 2 as in this embodiment, the portion of the first electrode 3 that extends out from the arc tube 1 is located away from the water in the container 2, thereby reducing the risk of electrical leakage.

[0043] Furthermore, the base 7 forms a reservoir for the adhesive 9, and the portion of the first electrode 3 that extends from the arc tube 1 is located within the reservoir for the adhesive 9, further reducing the risk of water infiltrating into the portion of the first electrode 3 that extends from the arc tube 1. Furthermore, in this embodiment, the arc tube 1 can be reliably fixed to the base 7 with a large amount of adhesive 9.

[0044] Third Embodiment A third embodiment of the fluid treatment device will be described. Fig. 4 is a diagram showing the configuration of a fluid treatment device 300 according to the third embodiment. In the fluid treatment device 300, the arc tube 1 is configured as a double tube including an outer tube 1a and an inner tube 1b disposed inside the outer tube 1a. A first electrode 3 is formed in contact with the entire 360° of the inner wall of the inner tube 1b. A luminous gas is sealed in the space between the outer wall of the inner tube 1b and the inner wall of the outer tube 1a. The inner tube 1b is sealed at the end of the arc tube 1 that is not in contact with the base 7, so that the luminous gas does not enter the interior of the inner tube 1b.

[0045] <Fourth embodiment> A fourth embodiment of the fluid treatment device will be described. Fig. 5 is a diagram showing the configuration of a fluid treatment device 400 according to the fourth embodiment. In the fluid treatment device 400, the first electrode 3 is positioned so as to contact the base of the arc tube 1. The first electrode 3 is positioned outside the arc tube 1. The outside of the first electrode 3 is covered with adhesive 9. Fig. 6 is a diagram showing the configuration of a fluid treatment device 500 according to a modified example of the fourth embodiment. In the fluid treatment device 500, the arc tube 1 does not protrude from the base 7, ensuring a sufficient contact area with water. The first electrode 3 is positioned outside the arc tube 1. The outside of the first electrode 3 is covered with adhesive 9.

[0046] Fifth Embodiment A fifth embodiment of the fluid treatment device will be described. FIG. 7 is a diagram showing the configuration of a fluid treatment device 600 according to the fifth embodiment. The fluid treatment device 600 includes a first container 2a and a second container 2b. The second container 2b is in contact with the first container 2a via a sealing member 8. The first container 2a has a tubular shape extending in one direction. The arc tube 1 is located inside the first container 2a. The arc tube 1 is not located inside the second container 2b, and water does not penetrate into the second container 2b. A base 7 is disposed from the first container 2a to the second container 2b. A light-shielding material 31 is formed in a film form on the inner wall of the base 7. The second container 2b may or may not have light-shielding properties. In the fluid treatment device 600, it is preferable to irradiate the flowing water with ultraviolet light while allowing water to flow in through the inlet 11 and discharge from the outlet 12. When inspecting, repairing or replacing the arc tube 1, the arc tube 1 is turned off, the second container 2b is separated from the first container 2a and the arc tube 1 and the base 7 are taken out. In this embodiment, no adhesive is used.

[0047] 8 is a diagram showing the configuration of a fluid processing device 700 which is a first modified example of the fifth embodiment. The fluid processing device 700 does not have the second container 2b of the fluid processing device 600, and the base 7 serves as the second container 2b. A light-shielding material 31 is formed in a film shape on the inner wall of the base 7. In this embodiment, no adhesive is used.

[0048] FIG. 9 is a diagram showing the configuration of a fluid processing device 800 which is a second modified example of the fifth embodiment. The fluid processing device 800 has a first container 2a and a second container 2b. The second container 2b is in contact with the first container 2a via a sealing member 8. The first container 2a has the shape of a pipe extending in one direction. The arc tube 1 is contained within the first container 2a. Water does not penetrate above the base 7. The base 7 contains a light-blocking material and blocks ultraviolet light. The second container 2b may or may not have light-blocking properties.

[0049] The embodiments and modifications of the fluid processing device have been described above. The present invention is not limited to the above-described embodiments, and the above-described embodiments and modifications may be combined, or various changes or modifications may be made to the above-described embodiments and modifications without departing from the spirit of the present invention.

[0050] In the fluid treatment device shown in each of the above embodiments, the container or the second electrode arranged to be in contact with the container is grounded (i.e., at zero potential), but the second electrode does not have to be grounded, i.e., not at zero potential. Furthermore, both the first electrode and the second electrode may be arranged inside the arc tube 1.

[0051] Although an example in which an O-ring is used as the sealing member 8 has been described above, other sealing members may be used, such as packing of other shapes (C-ring, T-ring, etc.), gaskets, etc. In addition, in this embodiment, the sealing member 8 is not an essential component, and is not necessarily required in an environment in which no water leaks or a small amount of water leaks is acceptable.

[0052] REFERENCE SIGNS LIST 1: Arc tube 1a: Outer tube 1b: Inner tube 2: Container 2a: First container 2b: Second container 3: First electrode 4: Conductor (connected to first electrode) 5: Conductor (connected to second electrode) 6: Power source 7: Base 8: Sealing member 9: Adhesive 10: Hole 11: Inlet 12: Outlet 21: Gap 31: Light blocking material 100, 200, 300, 400, 500, 600, 700, 800: Fluid treatment device G1: Luminous gas S1: Space

Claims

1. A fluid treatment device comprising: an arc tube; a luminous gas sealed inside the arc tube and emitting ultraviolet light including wavelengths of 200 nm or less by dielectric barrier discharge; a container having a hole for inserting the arc tube, containing a fluid to be treated by the ultraviolet light, and blocking the ultraviolet light; a pair of electrodes arranged to sandwich the luminous gas; a base for fixing the arc tube to the container with the arc tube inserted into the hole; and a light blocking material for preventing the ultraviolet light from leaking outside the container.

2. The fluid treatment device according to claim 1, wherein the light emitting tube is bonded to the base with an adhesive, and the light blocking material is contained in the adhesive.

3. The fluid treatment device of claim 2, wherein a portion of said base is located between said adhesive and said container.

4. The fluid treatment device according to claim 3, wherein the adhesive is an inorganic adhesive.

5. A fluid treatment device according to any one of claims 1 to 4, characterized in that the light emitting tube is disposed straddling the inside and outside of the container.

6. A fluid processing device according to any one of claims 1 to 4, characterized in that the pair of electrodes are arranged with the fluid sandwiched between them.

7. The fluid treatment device according to claim 6, wherein the pair of electrodes comprises a first electrode located inside the arc tube and a second electrode located outside the vessel.

8. A fluid treatment device according to any one of claims 1 to 4, characterized in that there is a seal member between the base and the container.