Ozone Generator and Ozone Generation Method

Abstract

The present disclosure aims to provide a structure of an ozone generator that can generate ozone gas with a relatively high concentration while minimizing the amount of refrigerant. In the ozone generator of the present disclosure, the source gas (G1) is supplied from the entire periphery of the discharge space (6) toward the center, and the ozone gas (G2) obtained in the discharge space (6) is output to the outside from the discharge central space (S1) through the gas outlet (12). The refrigerant flow path (4) provided in the low-pressure electrode (1) has a center-priority refrigerant flow path structure in which the refrigerant (C1) flows from the refrigerant inlet (4a) toward the refrigerant outlet (4b), flowing the refrigerant (C1) through the electrode center region (D1) prior to the electrode peripheral region (D2).

Description

Technical Field

[0001] The present disclosure relates to an ozone generator and an ozone generation method having an electrode structure including flat first and second metal electrodes.

Background Art

[0002] As a conventional ozone generator, there is an ozone generator having an electrode structure including flat first and second metal electrodes. For example, there is an ozone generator disclosed in Patent Document 1 as such an ozone generator.

[0003] The ozone generator disclosed in Patent Document 1 has a flat low-pressure electrode, a flat high-pressure electrode facing the main surface of the low-pressure electrode, a flat dielectric provided between the low-pressure electrode and the high-pressure electrode, and a spacer for forming a discharge space having a small thickness in the stacking direction. An ozone gas passage was provided in the low-pressure electrode.

[0004] Oxygen gas as a raw material gas flows from the entire periphery of the discharge space toward the center, is generated as ozone gas (ozonized oxygen gas) in the discharge space, and the generated ozone gas is output to the outside through an internal ozone gas passage. On the other hand, a cooling water passage was provided in the low-pressure electrode, and by flowing cooling water as a refrigerant through the cooling water passage, the gas temperature in the discharge space was lowered.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the conventional ozone delivery device represented by the ozone generator disclosed in Patent Document 1, the gas temperature in the discharge space was lowered by providing a refrigerant flow path (cooling water passage) for flowing a refrigerant (cooling water) in the low-pressure electrode.

[0007] However, as the refrigerant flow path provided in the low-pressure electrode, a plurality of partial refrigerant flow paths each provided along the circumferential direction are provided in the low-pressure electrode, and refrigerant is flowing through each of the plurality of partial refrigerant flow paths.

[0008] Thus, since the refrigerant flow path provided in the electrode of the conventional ozone generator is structured to lower the gas temperature of the entire discharge space, optimization of the refrigerant amount of the refrigerant used has not been achieved, and there has been a problem that optimal high concentration of the generated ozone gas has not been realized.

[0009] An object of the present disclosure is to provide an ozone generator and an ozone generation method that solve the above problems and can generate relatively high-concentration ozone gas while suppressing the refrigerant amount of the refrigerant to the minimum necessary.

Means for Solving the Problems

[0010] The ozone generator of the present disclosure includes a flat first metal electrode and a flat second metal electrode disposed opposite to the first metal electrode. At least one of the first and second metal electrodes has a gas outlet in the central portion. Between the first and second metal electrodes, at least one dielectric for the electrode provided adjacent to at least one of the first and second metal electrodes is further provided. A discharge space is provided in contact with the at least one dielectric for the electrode between the first and second metal electrodes. When a voltage is applied between the first and second metal electrodes, dielectric barrier discharge occurs in the discharge space. A raw material gas is supplied to the discharge space, and ozone gas is obtained by the raw material gas passing through the discharge space where the dielectric barrier discharge occurs. The discharge space includes a discharge central space communicating with the gas outlet and a discharge peripheral space existing around the discharge central space. The raw material gas is supplied from the discharge peripheral space toward the discharge central space. At least one of the first and second metal electrodes is a metal electrode with an internal flow path. The metal electrode with an internal flow path has an electrode central region overlapping the discharge central space in plan view and an electrode peripheral region overlapping the discharge peripheral space in plan view. The metal electrode with an internal flow path has a refrigerant flow path for flowing refrigerant inside. The refrigerant flow path is formed from the electrode central region to the electrode peripheral region. The ozone gas obtained in the discharge space is output to the outside through the gas outlet from the discharge central space. The refrigerant flow path has a center-priority refrigerant flow path structure for flowing the refrigerant from the electrode peripheral region to the electrode central region.

Advantages of the Invention

[0011] In the ozone generator of the present disclosure, since the refrigerant flow path provided in the metal electrode with an internal flow path has the above-described center-priority refrigerant flow path structure, the temperature of the electrode central region close to the gas outlet can be kept relatively low. On the other hand, since the raw material gas is supplied from the discharge peripheral space toward the discharge central space, regarding the ozone gas generated in the discharge space, the ozone concentration in the discharge central space tends to be higher than the ozone concentration in the discharge peripheral space.

[0012] Therefore, the ozone generator of the present disclosure can generate a relatively high-concentration ozone gas by minimizing the amount of refrigerant while enhancing the cooling effect of the discharge central space by using the refrigerant flow path provided in the metal electrode with an internal flow path in the above-described center-priority refrigerant flow path structure.

[0013] The objectives, features, aspects, and advantages of the present disclosure will become more apparent from the following detailed description and the accompanying drawings.

Brief Description of the Drawings

[0014]

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Embodiments for Carrying Out the Invention

[0015] <The Principle of the Present Disclosure> FIG. 1 is an explanatory diagram schematically showing the principle of the ozone generator of the present disclosure. The figure shows an electrode internal region R1 of a metal electrode with an internal refrigerant flow path inside. Each of the metal electrodes with an internal flow path corresponds to at least one of the flat first and second metal electrodes.

[0016] Refrigerant C1 is supplied from an external refrigerant supply flow path 31 to the electrode internal region R1 of the metal electrode with an internal flow path through a refrigerant supply port 21. After the refrigerant C1 is supplied into the electrode internal region R1, it is discharged to an external refrigerant discharge flow path 32 through a refrigerant discharge port 22.

[0017] By applying an alternating voltage between the first and second metal electrodes, a dielectric barrier discharge can be generated in the discharge space 6. Here, it is assumed that the space above the electrode internal region R1 shown in FIG. 1 is the discharge space 6.

[0018] When a dielectric barrier discharge is occurring in the discharge space 6, if a raw material gas G1 such as oxygen gas is supplied from the entire periphery of the discharge space 6 toward the center of the discharge space 6, ozone gas G2 can be obtained from the raw material gas G1 in the discharge space 6. The generated ozone gas G2 is output to the outside through a gas outlet 12 provided to penetrate the center of the electrode internal region R1.

[0019] As described above, since the refrigerant C1 is supplied to the electrode internal region R1, the electrode internal region R1 is cooled. For example, as shown in FIG. 1, when there is a temperature distribution T(0) to T(8) by the refrigerant C1 in a concentric circle centered on the gas outlet 12, it is desirable to make the temperature distribution T(0) to T(2) in the discharge central space close to the gas outlet 12 the lowest.

[0020] This is because the ozone gas G2 generated in the discharge space 6 has the highest ozone concentration in the discharge central space of the discharge space 6. Therefore, it is necessary to lower the temperature of the discharge central space to avoid the decomposition of the ozone gas G2 in a high ozone concentration state.

[0021] Ideally, the temperature distribution T(0) is the lowest, the temperature distribution T(8) is the highest, and when k = 0 to 7, it is desirable that T(k) < T(k + 1) holds. By setting such a temperature distribution T(0) to T(8), it can be expected to generate a relatively high-concentration ozone gas G2 while suppressing the amount of the refrigerant C1 supplied to the internal region R1 of the electrode to the minimum necessary.

[0022] <Embodiment 1> (Basic configuration) FIG. 2 is an explanatory diagram schematically showing a cross-sectional structure of an electrode unit 61 which is a basic configuration of Embodiment 1 of the present disclosure. The ozone generator including the electrode unit 61 becomes the ozone generator of Embodiment 1. An XYZ orthogonal coordinate system is shown in FIG. 2. As shown in FIG. 2, the electrode unit 61 includes electrode components E1 and E2 and a spacer 7 as main components.

[0023] The electrode component E1 includes a low-pressure electrode 1 as a main component. The low-pressure electrode 1, which is a flat plate-shaped first metal electrode, has a gas outlet 12 penetrating through the central portion as a gas outlet provided at the central portion.

[0024] The electrode component E2 is provided on the low-pressure electrode 1 of the electrode component E1 via the spacer 7. The electrode component E2 includes a high-pressure electrode 2 and a dielectric 3 as main components. A dielectric 3 serving as an electrode dielectric is formed on the lower surface of the high-pressure electrode 2, which is a flat plate-shaped second metal electrode. Note that the dielectric 3 is formed in a thin film shape.

[0025] In this way, the high-pressure electrode 2 serving as the flat plate-shaped second metal electrode is arranged to face the low-pressure electrode 1 serving as the flat plate-shaped first metal electrode. And a discharge space 6 is provided in contact with the dielectric 3 between the low-pressure electrode 1 and the high-pressure electrode 2.

[0026] In the basic configuration of Embodiment 1 shown in FIG. 2, the dielectric 3 serving as the electrode dielectric is provided adjacent to the high-voltage electrode 2, but it may also be provided adjacent to the low-voltage electrode 1. That is, between the low-voltage electrode 1 and the high-voltage electrode 2, at least one electrode dielectric may be provided adjacent to at least one of the low-voltage electrode 1 and the high-voltage electrode 2.

[0027] However, between the low-voltage electrode 1 and the high-voltage electrode 2, it is necessary to provide a discharge space 6 in contact with at least one electrode dielectric. That is, when forming an electrode dielectric in the electrode component E1, it is necessary to provide the electrode dielectric on the upper surface of the low-voltage electrode 1.

[0028] In the electrode unit 61 shown in FIG. 2, dielectric barrier discharge can be generated in the discharge space 6 by applying an alternating voltage between the low-voltage electrode 1 and the high-voltage electrode 2. For example, an alternating voltage is applied to the high-voltage electrode 2, and the low-voltage electrode 1 is set to a reference voltage such as a ground voltage.

[0029] The discharge space 6 includes a discharge central space S1 communicating with the gas outlet 12 and a discharge peripheral space S2 existing around the discharge central space S1.

[0030] As shown in FIG. 2, a raw material gas G1 such as oxygen gas is supplied from the entire periphery of the discharge space 6 toward the center. That is, the raw material gas G1 is supplied from the discharge peripheral space S2 toward the discharge central space S1. By passing the raw material gas G1 through the discharge space 6 where dielectric barrier discharge occurs, ozone gas G2 can be obtained.

[0031] The ozone gas G2 obtained in the discharge space 6 is output to the outside from the discharge central space S1 through the gas outlet 12.

[0032] The low-pressure electrode 1 functions as a metal electrode with an internal flow path and has a refrigerant flow path 4 through which a refrigerant C1 flows inside. The low-pressure electrode 1 that functions as a metal electrode with an internal flow path has an electrode central region D1 that overlaps with the discharge central space S1 in a plan view, and an electrode peripheral region D2 that overlaps with the discharge peripheral space S2 in a plan view on the XY plane. Note that, for example, cooling water can be considered as the refrigerant C1.

[0033] The refrigerant flow path 4 provided inside the low-pressure electrode 1 has a refrigerant inlet 4a in the central region on the lower surface of the low-pressure electrode 1 and a refrigerant outlet 4b on the side surface side of the low-pressure electrode 1, and is formed from the electrode central region D1 to the electrode peripheral region D2. And the refrigerant flow path 4 provided inside the low-pressure electrode 1 has a center-priority refrigerant flow path structure in which the refrigerant C1 flows from the refrigerant inlet 4a toward the refrigerant outlet 4b, so that the refrigerant C1 flows through the electrode central region D1 prior to the electrode peripheral region D2.

[0034] In the ozone generator having the electrode unit 61 which is the basic configuration of the first embodiment of the present disclosure, since the refrigerant flow path 4 provided in the low-pressure electrode 1 that functions as a metal electrode with an internal flow path has the above-described center-priority refrigerant flow path structure, the temperature of the electrode central region D1 close to the gas outlet 12 can be kept relatively low.

[0035] On the other hand, since the raw material gas G1 is supplied from the discharge peripheral space S2 toward the discharge central space S1, regarding the ozone gas G2 generated in the discharge space 6, the ozone concentration in the discharge central space S1 tends to be higher than the ozone concentration in the discharge peripheral space S2.

[0036] Therefore, the ozone generator having the basic configuration of the first embodiment increases the cooling effect of the discharge central space S1 by forming the refrigerant flow path 4 provided in the low-pressure electrode 1 into the above-described center-priority refrigerant flow path structure, thereby reducing the temperature of the discharge central space S1 and minimizing the phenomenon in which the ozone gas G2 in a high ozone concentration state is decomposed.

[0037] As a result, the ozone generator having the basic configuration of the first embodiment can generate a relatively high-concentration ozone gas G2 while suppressing the amount of the refrigerant C1 to the minimum necessary.

[0038] In the electrode unit 61 shown in FIG. 2, among the low-voltage electrode 1 and the high-voltage electrode 2, the low-voltage electrode 1 was made to function as a metal electrode with an internal flow path. However, at least one of the low-voltage electrode 1 and the high-voltage electrode 2 may function as a metal electrode with an internal flow path.

[0039] For example, a refrigerant flow path corresponding to the refrigerant flow path 4 may be provided in the high-voltage electrode 2 with the high-voltage electrode 2 serving as a metal electrode with an internal flow path. However, the refrigerant flowing through the refrigerant flow path in the high-voltage electrode 2 needs to have insulation properties.

[0040] (Ozone generation method) An ozone generation method using an ozone generator having the basic configuration of Embodiment 1 shown in FIG. 2 (hereinafter sometimes abbreviated as the "ozone generation method for basic configuration" in Embodiment 1 and Embodiment 2) includes the following steps (a) to (c).

[0041] Step (a): An AC voltage is applied between the low-voltage electrode 1 serving as the first metal electrode and the high-voltage electrode 2 serving as the second metal electrode to generate dielectric barrier discharge in the discharge space 6.

[0042] Step (b): In the refrigerant flow path 4 in the low-voltage electrode 1, a center-priority refrigerant flow path setting process is executed in which the refrigerant C1 is flowed from the refrigerant inlet 4a to the refrigerant outlet 4b, so that the refrigerant C1 is flowed through the electrode central region D1 prior to the electrode peripheral region D2.

[0043] Step (c): By supplying the raw material gas G1 from the entire periphery of the discharge peripheral space S2 toward the discharge central space S1, ozone gas G2 is obtained in the discharge space 6.

[0044] By executing the above steps (a) to (c), the ozone gas G2 obtained in the discharge space 6 is output to the outside through the gas outlet 12 from the discharge central space S1. Note that the execution order among steps (a) to (c) is arbitrary.

[0045] In the ozone generation method for the basic configuration of Embodiment 1, in order to execute the central priority refrigerant flow path setting process by the above-described step (b), the temperature of the central electrode region D1 close to the gas outlet 12 can be kept relatively low. On the other hand, regarding the ozone gas G2 generated in the discharge space 6, the ozone concentration in the central discharge space S1 tends to be higher than the ozone concentration in the peripheral discharge space S2.

[0046] Therefore, the ozone generation method for the basic configuration can generate a relatively high-concentration ozone gas G2 while suppressing the refrigerant amount of the refrigerant C1 to the minimum necessary by executing step (b) to enhance the cooling effect of the central discharge space S1.

[0047] (First Aspect) FIG. 3 is an explanatory diagram schematically showing a planar structure of a refrigerant flow path 4 of a low-pressure electrode 1A in an ozone generator according to the first aspect of Embodiment 1. FIG. 4 is an explanatory diagram schematically showing a discharge space 6 on the low-pressure electrode 1A shown in FIG. 3. An XYZ orthogonal coordinate system is shown in each of FIGS. 3 and 4.

[0048] FIGS. 5 and 6 are explanatory diagrams schematically showing a cross-sectional structure of the low-pressure electrode 1A shown in FIG. 3. FIG. 5 shows a cross-section taken along line A-A of FIG. 3, and FIG. 6 shows a cross-section taken along line B-B of FIG. 3. An XYZ orthogonal coordinate system is shown in each of FIGS. 5 and 6. Hereinafter, the first aspect of Embodiment 1 will be described with reference to FIGS. 3 to 6. Note that the first aspect shows a specific structure of a low-pressure electrode 1A corresponding to the low-pressure electrode 1 in the electrode unit 61 of the basic configuration shown in FIG. 2.

[0049] As shown in FIGS. 3 and 4, the low-pressure electrode 1A has a rectangular shape in plan view in the XY plane. On the other hand, as shown in FIG. 4, the discharge space 6 has a circular shape in plan view in the XY plane. For example, by forming the planar shape of the high-pressure electrode 2 in a circular shape, the discharge space 6 formed between the low-pressure electrode 1A and the high-pressure electrode 2 can be made circular.

[0050] As shown in FIGS. 3 and 6, the lower surface of the low-pressure electrode 1A has a refrigerant supply port 21 and a refrigerant discharge port 22. The refrigerant supply port 21 receives the refrigerant C1 from the outside, and the refrigerant discharge port 22 discharges the refrigerant C1 to the outside. Note that the refrigerant discharge port 22 also has the same cross-sectional structure as the refrigerant supply port 21 shown in FIG. 6.

[0051] In the low-pressure electrode 1 of the first aspect, by providing a flow path outer wall 25 along the outer periphery and a flow path separation wall 26 inside, the refrigerant flow path 4 has bending flow paths 41(1) to 41(2) that change the flow path direction and circumferential flow paths 42(1) to 42(3) that each flow the refrigerant C1 along the flow path direction. The bending flow paths 41(1) to 41(2) are at least one bending flow path, and the circumferential flow paths 42(1) to 42(3) are a plurality of circumferential flow paths. Note that the flow path outer wall 25 is formed to match the outer periphery of the discharge space 6 in a plan view in the XY plane.

[0052] As shown in FIGS. 3 and 6, the refrigerant supply port 21 and the refrigerant discharge port 22 are arranged at positions that do not overlap the discharge space 6 in a plan view in the XY plane. Further, the refrigerant supply port 21 and the refrigerant discharge port 22 are provided on the +X direction side in the same direction with respect to the discharge space 6 in a plan view.

[0053] Also, the refrigerant flow path 4 is provided with a gas outlet 12 that is blocked from the refrigerant C1 flowing through the refrigerant flow path 4 by the gas outlet wall 16.

[0054] Of the circumferential flow paths 42(1) to 42(3), a pair of adjacent circumferential flow paths 42(i) and circumferential flow path 42(i + 1) (where i = 1 or 2) are connected via the bending flow path 41(i) so that their flow path directions are opposite to each other.

[0055] That is, of the plurality of circumferential flow paths (circumferential flow paths 42(1) to 42(3)), a pair of adjacent circumferential flow paths are connected via one of the bending flow paths (bending flow paths 41(1) to 41(2)) so that their flow path directions are opposite to each other.

[0056] The circulation flow path 42(1) communicates with the refrigerant supply port 21, and the circulation flow path 42(3) communicates with the refrigerant discharge port 22. Therefore, the circulation flow path 42(1) serves as the supply-side circulation flow path, and the circulation flow path 42(3) serves as the discharge-side circulation flow path.

[0057] That is, the plurality of circulation flow paths (circulation flow paths 42(1) to 42(3)) include a supply-side circulation flow path (circulation flow path 42(1)) that communicates with the refrigerant supply port 21 and a discharge-side circulation flow path (circulation flow path 42(3)) that communicates with the refrigerant discharge port 22.

[0058] Among the circulation flow paths 42(1) to 42(3), the circulation flow path 42(1) that serves as the supply-side circulation flow path is closest to the gas outlet 12, and the circulation flow path 42(3) that serves as the discharge-side circulation flow path is farthest from the gas outlet 12.

[0059] In this way, in the refrigerant flow path 4 provided in the low-pressure electrode 1A, the refrigerant C1 is first supplied from the refrigerant supply port 21 to the circulation flow path 42(1), and finally the refrigerant C1 is discharged from the circulation flow path 42(3) to the outside through the refrigerant discharge port 22, realizing a circulation flow path structure in which the refrigerant C1 flows through the circulation flow paths 42(1) to 42(3) and the bent flow paths 41(1) to 41(2).

[0060] That is, in the first aspect of the first embodiment, as the center-priority refrigerant flow path structure of the basic configuration, a circulation flow path structure is realized, and the flow path widths of the circulation flow paths 42(1) to 42(3) and the bent flow paths 41(1) to 41(2) are each within a certain range.

[0061] The ozone generator according to the first aspect of the first embodiment of the present disclosure realizes the above-described circulation flow path structure as the center-priority refrigerant flow path structure. Therefore, due to the fact that the flow path width is within a certain range, the flow velocity of the refrigerant C1 flowing through the refrigerant flow path 4 can be improved, and the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced to the extent that the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0062] In the ozone generator according to the first aspect of the first embodiment, the refrigerant supply port 21 and the refrigerant discharge port 22 do not overlap the discharge space 6 in a plan view. Therefore, even if the refrigerant supply port 21 and the refrigerant discharge port 22 are provided, the discharge space 6 can be provided between the low-pressure electrode 1A of the electrode component E1 and the electrode component E2 without any trouble.

[0063] In the first aspect of the first embodiment, since the refrigerant supply port 21 and the refrigerant discharge port 22 are provided in the same direction with respect to the discharge space 6 in a plan view, the refrigerant supply port 21 and the refrigerant discharge port 22 can be arranged close to each other, and the supply of the refrigerant C1 from the outside and the discharge of the refrigerant C1 to the outside can be performed relatively easily.

[0064] In the first aspect of the first embodiment, since the discharge space 6 is circular in a plan view, the raw material gas G1 can be evenly supplied from the entire periphery of the discharge space 6 toward the discharge central space.

[0065] (Ozone generation method) The ozone generation method using the ozone generator according to the first aspect of the first embodiment shown in FIGS. 3 to 6 includes the following steps (b-1) and (b-2) as the above-described center-priority refrigerant flow path setting process in step (b) executed by the ozone generation method for basic configuration.

[0066] Step (b-1): Supply the refrigerant C1 from the refrigerant supply port 21 to the circulation path 42(1) serving as the supply-side circumferential circulation path.

[0067] Step (b-2): Discharge the refrigerant C1 from the circulation path 42(3) serving as the discharge-side circumferential circulation path to the refrigerant discharge port 22.

[0068] By executing the above-described steps (b-1) and (b-2), in the refrigerant flow path 4, the refrigerant C1 is first supplied from the refrigerant supply port 21 to the circulation path 42(1), and finally the refrigerant C1 is discharged to the outside through the refrigerant discharge port 22 from the circulation path 42(3). In this manner, a circulation flow path through which the refrigerant C1 flows is set in the circulation paths 42(1) to 42(3) and the bent flow paths 41(1) to 41(2).

[0069] The ozone generation method for the first aspect sets the above-described circulating flow path by executing the above-described steps (b-1) and (b-2). Therefore, the flow velocity of the refrigerant C1 flowing through the refrigerant flow path 4 can be improved, and the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced to the extent that the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0070] (Second Aspect) FIG. 7 is an explanatory diagram schematically showing the planar structure of the refrigerant flow path 4 of the low-voltage electrode 1B in the ozone generator according to the second aspect of the first embodiment. An XYZ orthogonal coordinate system is shown in FIG. 7.

[0071] FIGS. 8 and 9 are explanatory diagrams schematically showing the cross-sectional structure of the low-voltage electrode 1B shown in FIG. 7. FIG. 8 shows the C-C cross section of FIG. 7, and FIG. 9 shows the D-D cross section of FIG. 7. An XYZ orthogonal coordinate system is shown in each of FIGS. 8 and 9. Hereinafter, with reference to FIGS. 3, 7 to 9, the second aspect of the first embodiment will be described. Note that the second aspect shows the specific structure of the low-voltage electrode 1B corresponding to the low-voltage electrode 1 in the electrode unit 61 having the basic configuration shown in FIG. 2.

[0072] Further, the internal structure of the refrigerant flow path 4 formed in the low-voltage electrode 1B is substantially the same as the internal structure of the refrigerant flow path 4 formed in the low-voltage electrode 1A shown in FIG. 3.

[0073] Hereinafter, the same components as those in the first aspect shown in FIGS. 3 to 6 are denoted by the same reference numerals, and the description thereof will be omitted as appropriate, and the description will be centered on the characteristic parts of the second aspect.

[0074] As shown in FIGS. 7 and 8, the lower surface of the low-voltage electrode 1B has an ozone gas outlet 19. The gas outlet 12B communicates with the ozone gas passage 15 in the intermediate region without penetrating the low-voltage electrode 1B. The ozone gas passage 15 is formed horizontally along the X direction, one end on the -X direction side communicates with the lower end of the gas outlet 12B, and the other end on the +X direction side communicates with the upper end of the ozone gas outlet 19.

[0075] Therefore, the ozone gas G2 obtained in the discharge space 6 is taken out to the outside from the ozone gas outlet 19 through the gas outlet 12B and the ozone gas passage 15.

[0076] Thus, in the second aspect of the first embodiment, corresponding to the gas outlet 12 of the basic configuration shown in FIG. 2, a gas outlet 12B, an ozone gas passage 15, and an ozone gas outlet 19 are provided.

[0077] The ozone generator according to the second aspect of the first embodiment of the present disclosure realizes a circulating flow path structure as in the first aspect. Therefore, the flow rate of the refrigerant C1 flowing through the refrigerant flow path 4 can be improved, and the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced as long as the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0078] (Third Aspect) FIG. 10 is an explanatory diagram schematically showing a planar structure of an ozone gas generation unit 55 including a low-voltage electrode 1C in an ozone generator according to a third aspect of the first embodiment. An XYZ orthogonal coordinate system is shown in FIG. 10.

[0079] FIGS. 11 and 12 are explanatory diagrams schematically showing a cross-sectional structure of the ozone gas generation unit 55 shown in FIG. 10. FIG. 11 shows an E-E cross-section of FIG. 10, and FIG. 12 shows an F-F cross-section of FIG. 10. An XYZ orthogonal coordinate system is shown in each of FIGS. 11 and 12. Hereinafter, with reference to FIGS. 3, 10 to 12, the third aspect of the first embodiment will be described. Note that the third aspect shows a specific structure of an ozone gas generation unit 55 including a low-voltage electrode 1C corresponding to the low-voltage electrode 1 in the electrode unit 61 of the basic configuration shown in FIG. 2.

[0080] The low-pressure electrode 1C has an ozone gas connection portion 45, a refrigerant supply connection portion 46, and a refrigerant discharge connection portion 47 on the side of the ozone gas / refrigerant auxiliary member 30, and the low-pressure electrode 1C is connected to the ozone gas / refrigerant auxiliary member 30 via the ozone gas connection portion 45, the refrigerant supply connection portion 46, and the refrigerant discharge connection portion 47. Note that a plurality of bolt fixing holes 38 are provided in the low-pressure electrode 1C and the ozone gas / refrigerant auxiliary member 30 shown in FIG. 10, respectively.

[0081] As shown in FIG. 10, the main part of the low-pressure electrode 1C is circular in plan view in the XY plane. Note that the main part of the low-pressure electrode 1C means the part of the low-pressure electrode 1C excluding the ozone gas connection portion 45, the refrigerant supply connection portion 46, and the refrigerant discharge connection portion 47.

[0082] In the third aspect of the first embodiment, for example, by forming the planar shape of the high-pressure electrode 2 into a circular shape, the discharge space 6 is circular in plan view in the XY plane, similar to the first and second aspects.

[0083] Note that the internal structure of the refrigerant flow path 4 formed in the low-pressure electrode 1C is substantially the same as the internal structure of the refrigerant flow path 4 formed in the low-pressure electrode 1A shown in FIG. 3.

[0084] Hereinafter, the same components as those in the first aspect shown in FIGS. 3 to 6 or the second aspect shown in FIGS. 7 to 9 are denoted by the same reference numerals, and the description thereof will be appropriately omitted, and the description will be centered on the characteristic parts of the third aspect.

[0085] As described above, the third aspect is constituted by an ozone gas generation unit 55 including the low-pressure electrode 1C and the ozone gas / refrigerant auxiliary member 30.

[0086] As shown in FIGS. 10 and 12, the auxiliary member 30 for ozone gas and refrigerant has a refrigerant supply passage 36, and the refrigerant supply passage 36 is formed along the Z direction. This refrigerant supply passage 36 also serves as the refrigerant supply port in the third aspect. As shown in FIG. 12, in the refrigerant flow path 4 formed in the low-pressure electrode 1C, the circumferential flow path 42(1) communicates with the refrigerant supply passage 36. In the third aspect, the circumferential flow path 42(1) is formed to extend into the refrigerant supply connection portion 46 of the low-pressure electrode 1C and the auxiliary member 30 for ozone gas and refrigerant.

[0087] The auxiliary member 30 for ozone gas and refrigerant further has a refrigerant discharge passage 37, and the refrigerant discharge passage 37 is also formed along the Z direction in the same manner as the refrigerant supply passage 36. This refrigerant discharge passage 37 also serves as the refrigerant discharge port in the third aspect. In the refrigerant flow path 4 formed in the low-pressure electrode 1C, the circumferential flow path 42(3) communicates with the refrigerant discharge passage 37. In the third aspect, the circumferential flow path 42(3) is formed to extend into the refrigerant discharge connection portion 47 of the low-pressure electrode 1C and the auxiliary member 30 for ozone gas and refrigerant.

[0088] As shown in FIGS. 10 and 11, the auxiliary member 30 for ozone gas and refrigerant further has an ozone gas passage 35, and the ozone gas passage 35 is also formed along the Z direction in the same manner as the refrigerant supply passage 36 and the refrigerant discharge passage 37.

[0089] As shown in FIG. 11, the gas outlet 12C is provided to penetrate the low-pressure electrode 1C and communicates with the ozone gas passage 18 in the intermediate region. The ozone gas passage 18 is formed horizontally along the X direction, one end on the -X direction side communicates with the intermediate region of the gas outlet 12C, and the other end on the +X direction side communicates with the ozone gas passage 35.

[0090] In addition, in the third aspect, the ozone gas passage 18 is formed to extend into the ozone gas connection portion 45 of the low-pressure electrode 1C and the auxiliary member 30 for ozone gas and refrigerant.

[0091] Therefore, the ozone gas G2 obtained in the discharge space 6 flows through the gas outlet 12C and the ozone gas passage 18 into the ozone gas passage 35, and is taken out to the outside through an ozone output port (not shown) communicating with the ozone gas passage 35 provided in the auxiliary member 30 for ozone gas and refrigerant.

[0092] As shown in FIG. 10, the refrigerant supply passage 36 serving as a refrigerant supply port and the refrigerant discharge passage 37 serving as a refrigerant discharge port are arranged at positions that do not overlap the discharge space 6 in a plan view on the XY plane. Further, the refrigerant supply passage 36 and the refrigerant discharge passage 37 are provided on the +X direction side in the same direction with respect to the discharge space 6 in a plan view.

[0093] Thus, in the third aspect of the first embodiment, corresponding to the gas outlet 12 of the basic configuration shown in FIG. 2, a gas outlet 12C, an ozone gas passage 18, an ozone gas passage 35, and an ozone output port (not shown) are provided.

[0094] The gas outlet 12C is provided penetrating the low-voltage electrode 1C, assuming a laminated structure in which the electrode component E2 is also provided on the lower surface side of the low-voltage electrode 1C to form the ozone gas generation unit 55, and discharge spaces 6 are formed on the upper surface side and the lower surface side of the low-voltage electrode 1C, respectively.

[0095] The ozone generator according to the third aspect of the first embodiment of the present disclosure realizes a circulation flow path structure as in the first and second aspects. Therefore, the flow rate of the refrigerant C1 flowing through the refrigerant flow path 4 can be improved, and the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced as long as the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0096] Furthermore, in the third aspect of the first embodiment, the auxiliary member 30 for ozone gas and refrigerant can perform processes such as supply and discharge of the refrigerant C1 and extraction of the ozone gas G2.

[0097] In the ozone generator according to the third aspect of the first embodiment, the refrigerant supply passage 36 and the refrigerant discharge passage 37 do not overlap the discharge space 6 in a plan view. Therefore, even if the ozone gas / refrigerant auxiliary member 30 having the refrigerant supply passage 36 and the refrigerant discharge passage 37 is provided, the discharge space 6 can be provided between the low-pressure electrode 1C and the electrode component portion E2 without any trouble.

[0098] Therefore, the ozone generator according to the third aspect of the first embodiment can relatively easily realize a laminated structure formed by a plurality of electrode units 61 each including a low-pressure electrode 1C, a high-pressure electrode 2, and a dielectric 3.

[0099] In the third aspect of the first embodiment, since the refrigerant supply passage 36 also serving as the refrigerant supply port and the refrigerant discharge passage 37 also serving as the refrigerant discharge port are provided in the same direction with respect to the discharge space 6 in a plan view, the refrigerant supply passage 36 and the refrigerant discharge passage 37 can be arranged close to each other, and the supply of the refrigerant C1 from the outside and the discharge of the refrigerant C1 to the outside can be performed relatively easily.

[0100] Furthermore, in the third aspect of the first embodiment, by using the ozone gas / refrigerant auxiliary member 30 having the refrigerant supply passage 36 and the refrigerant discharge passage 37 as a dedicated member for the supply and discharge of the refrigerant C1, the supply and discharge processes of the refrigerant C1 can be performed with high accuracy.

[0101] (Fourth Aspect) FIG. 13 is an explanatory diagram schematically showing a planar structure of a refrigerant flow path 4 of a low-pressure electrode 1D in an ozone generator according to the fourth aspect of the first embodiment. FIG. 14 is an explanatory diagram schematically showing details of a branch refraction region R50(1) of the low-pressure electrode 1D shown in FIG. 13. An XYZ orthogonal coordinate system is shown in FIGS. 13 and 14.

[0102] As shown in FIG. 13, the refrigerant flow path 4 of the fourth aspect has eight branch refraction regions R50(1) to R50(8). In FIG. 13, illustration of a gas outlet provided at the center of the low-pressure electrode 1D is omitted. As the gas outlet of the fourth aspect, structures such as the gas outlets 12, 12B, and 12C of the first to third aspects are conceivable.

[0103] Hereinafter, with reference to FIGS. 13 and 14, a fourth aspect of Embodiment 1 will be described. Note that the fourth aspect shows the specific structure of the low-pressure electrode 1D corresponding to the low-pressure electrode 1 in the electrode unit 61 having the basic configuration shown in FIG. 2.

[0104] As shown in FIG. 13, similar to the first aspect, the lower surface of the low-pressure electrode 1D has a refrigerant supply port 21 and a refrigerant discharge port 22. The refrigerant supply port 21 receives the refrigerant C1 from the outside, and the refrigerant discharge port 22 discharges the refrigerant C1 to the outside.

[0105] In the low-pressure electrode 1D of the fourth aspect, a flow path outer wall 25 is provided along the outer periphery, and a flow path separation wall 27 is provided inside, thereby providing branch refraction regions R50(1) to R50(8). Partial refrigerant flow paths are formed in the branch refraction regions R50(1) to R50(8). That is, the refrigerant flow path 4 formed in the low-pressure electrode 1D includes eight partial refrigerant flow paths corresponding to the branch refraction regions R50(1) to R50(8).

[0106] Note that since the partial refrigerant flow paths formed in each of the branch refraction regions R50(1) to R50(8) have a similar structure, hereinafter, the partial refrigerant flow path formed in the branch refraction region R50(1) shown in FIG. 14 will be described as a representative.

[0107] As shown in FIG. 14, in the branch refraction region R50(1), branch refraction flow paths 51(1) to 51(7) for changing the flow path direction and branch circumferential flow paths 52(1) to 52(8) for flowing the refrigerant C1 along the flow path direction are provided. The branch refraction flow paths 51(1) to 51(7) correspond to at least one bent flow path, and the branch circumferential flow paths 52(1) to 52(8) correspond to a plurality of circumferential flow paths.

[0108] Among the branch circumferential flow paths 52(1) to 52(8), a pair of adjacent branch circumferential flow paths 52(i) and branch circumferential flow path 52(i + 1) (where i is any one of 1 to 7) are connected via a bent flow path 41(i) so that their flow path directions are opposite to each other.

[0109] That is, among a plurality of circulation channels (branch circulation channels 52(1) to 52(8)), a pair of adjacent circulation channels are connected via one of at least one bending channel (branch bending channels 51(1) to 51(7)) such that their flow directions are opposite to each other.

[0110] Each branch circulation channel 52(1) in the branch bending regions R50(1) to R50(8) communicates with the refrigerant supply port 21, and the channels corresponding to the branch circulation channels 52(8) in the branch bending regions R50(1) to R50(8) communicate with the refrigerant discharge port 22. Therefore, the branch circulation channel 52(1) serves as the supply-side circulation channel, and the channel corresponding to the branch circulation channel 52(8) serves as the discharge-side circulation channel.

[0111] Note that the channel corresponding to the branch circulation channel 52(8) means the branch circulation channel 52(K) (K is any one of 2 to 8) that is located farthest from the gas outlet 12 in each of the branch bending regions R50(1) to R50(8).

[0112] That is, the plurality of circulation channels (branch circulation channels 52(1) to 52(8)) include a supply-side circulation channel (branch circulation channel 52(1)) that communicates with the refrigerant supply port 21 and a discharge-side circulation channel (the channel corresponding to the branch circulation channel 52(8)) that communicates with the refrigerant discharge port 22.

[0113] Among the branch circulation channels 52(1) to 52(8), the branch circulation channel 52(1) serving as the supply-side circulation channel is closest to the gas outlet 12, and the channel corresponding to the branch circulation channel 52(8) serving as the discharge-side circulation channel is farthest from the gas outlet 12.

[0114] Thus, the refrigerant flow path 4 provided within the low-pressure electrode 1D has a branched supply form in which the refrigerant C1 is branched from the refrigerant supply port 21 and supplied to each of the branched circumferential flow paths 52(1) of the branched refraction regions R50(1) to R50(8). Further, the refrigerant flow path 4 has a combined discharge form in which the refrigerant C1 combined from the flow paths corresponding to the branched circumferential flow paths 52(8) of the branched refraction regions R50(1) to R50(8) is discharged to the outside through the refrigerant discharge port 22. Therefore, the refrigerant flow path 4 of the fourth aspect realizes a circumferential circulation flow path structure in which the refrigerant C1 flows through the branched circumferential flow paths 52(1) to 52(8) and the branched refraction flow paths 51(1) to 51(7) in the above-described branched supply form and combined discharge form.

[0115] That is, in the fourth aspect of the first embodiment, as the center-priority refrigerant flow path structure of the basic configuration, partial refrigerant flow paths having the above-described branched supply form and combined discharge form are provided in each of the branched refraction regions R50(1) to R50(8), and the flow path width of the partial refrigerant flow paths is made to fall within a certain range.

[0116] Thus, as the refrigerant flow path 4 formed within the low-pressure electrode 1D in the fourth aspect of the first embodiment, a plurality of partial refrigerant flow paths are provided corresponding to the branched refraction regions R50(1) to R50(8).

[0117] Each of the plurality of partial refrigerant flow paths has branched circumferential flow paths 52(1) to 52(8) that become a plurality of circumferential flow paths and branched refraction flow paths 51(1) to 51(7) that become at least one bent flow path.

[0118] The branched circumferential flow path 52(1) that becomes the supply-side circumferential flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant supply port 21, and a flow path corresponding to the branched circumferential flow path 52(8) that becomes the discharge-side circumferential flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant discharge port 22.

[0119] Thus, in the fourth aspect of the first embodiment, each of the plurality of partial refrigerant flow paths provided corresponding to the branched refraction regions R50(1) to R50(8) has a circumferential circulation flow path structure.

[0120] The ozone generator according to the fourth aspect of Embodiment 1 realizes a circulating flow path structure in each of the branched refraction regions R50(1) to R50(8). Therefore, the flow velocity of the refrigerant C1 flowing through the refrigerant flow path 4 can be improved, and while the thermal conductivity of the refrigerant C1 can be kept relatively high, the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced.

[0121] The refrigerant flow path 4 in the ozone generator according to the fourth aspect of Embodiment 1 includes a plurality of partial refrigerant flow paths. After branching in parallel from the refrigerant supply port 21 to the branch circulating flow paths 52(1) of each of the plurality of partial refrigerant flow paths, the flow paths corresponding to the branch circulating flow paths 52(8) of each of the plurality of partial refrigerant flow paths in a parallel relationship with each other merge and communicate with the refrigerant discharge port 22, and a plurality of circulating flow path structures are realized. That is, a plurality of circulating flow path structures are realized corresponding to the plurality of partial refrigerant flow paths.

[0122] In this way, the fourth aspect of Embodiment 1 can realize a plurality of circulating flow path structures as a center-priority refrigerant flow path structure. On the other hand, the ozone gas G2 generated in the discharge space 6 has an ozone gas direction component directed toward the gas outlet 12 in plan view via the discharge peripheral space S2 and the discharge central space S1 from the entire periphery of the discharge space 6.

[0123] Therefore, the temperature distribution formed by the plurality of circulating flow path structures becomes a temperature distribution that accurately opposes the above-described ozone gas direction component, so that the discharge central space S1 can be set to a uniform low temperature state.

[0124] As a result, the ozone generator according to the fourth aspect of Embodiment 1 can generate a higher concentration of ozone gas G2 by uniformly enhancing the cooling effect of the discharge central space S1 in the discharge space 6.

[0125] (Experimental results) FIG. 15 shows the cooling water flow rate [L / min] of the cooling water that is the refrigerant flow rate of the refrigerant C1 and the ozone (gas) concentration [g / Nm of the ozone gas G2 3It is a graph showing the relationship with. In the figure, the horizontal axis represents the cooling water flow rate and the vertical axis represents the ozone concentration.

[0126] In the figure, the ozone gas concentration change line L1 is the ozone gas concentration change line of the ozone generator of Embodiment 1 having the low-pressure electrode 1 (low-pressure electrodes 1A to 1D), and the ozone gas concentration change line L2 is the ozone gas concentration change line of the conventional ozone generator having a low-pressure electrode represented by Patent Document 1.

[0127] As shown in FIG. 15, the ozone gas concentration change line L1 can generate ozone gas G2 having a relatively high ozone concentration that is difficult to achieve with the ozone gas concentration change line L2 at a lower cooling water flow rate.

[0128] FIG. 16 is a graph showing the relationship between the temperature [°C] in the central electrode region D1 of the low-pressure electrode 1 (low-pressure electrodes 1A to 1D) of Embodiment 1 and the ozone (gas) concentration of the ozone gas G2. In the figure, the horizontal axis represents the temperature in the central electrode region D1 and the vertical axis represents the ozone concentration.

[0129] It can be seen from the ozone gas concentration change line L10 shown in the figure that the ozone concentration of the ozone gas G2 can be increased as the temperature of the central electrode region D1 is lowered.

[0130] From the experimental results shown in FIGS. 15 and 16, it can be understood that the ozone generator of Embodiment 1 generates relatively high-concentration ozone gas G2 while suppressing the amount of refrigerant (cooling water flow rate) of the refrigerant C1 to the minimum necessary.

[0131] In the first to fourth aspects of Embodiment 1, the refrigerant supply port 21 (refrigerant supply passage 36) and the refrigerant discharge port 22 (refrigerant discharge passage 37) are provided outside the discharge space 6 in a plan view, but other configurations are of course possible. For example, a refrigerant supply mechanism may be provided directly below the refrigerant inlet 4a of the refrigerant flow path 4 provided on the lower surface side of the low-pressure electrode 1 (1A to 1D). However, the refrigerant supply mechanism needs to be provided in a manner that does not affect the ozone gas G2 output from the gas outlet 12.

[0132] <Embodiment 2> (Basic Configuration) FIG. 17 is an explanatory diagram schematically showing a cross-sectional structure of an electrode unit 62 which is the basic configuration of Embodiment 2 of the present disclosure. An XYZ orthogonal coordinate system is shown in the figure. The ozone generator including the electrode unit 62 becomes the ozone generator of Embodiment 2. As shown in the figure, the electrode unit 62 includes an electrode component part E1 and E22 and a spacer 7 as main components.

[0133] Hereinafter, components and the like similar to the basic configuration of Embodiment 1 shown in FIG. 2 are denoted by the same reference numerals, and the description thereof is appropriately omitted, and the description will be centered on the characteristic parts of Embodiment 2.

[0134] The electrode component part E22 is provided on the low-voltage electrode 1 of the electrode component part E1 via the spacer 7. The electrode component part E22 includes a high-voltage electrode 2, a dielectric 3, an insulating structure 5, and a cooling plate 8 as main components. The dielectric 3 is formed on the lower surface of the high-voltage electrode 2.

[0135] The low-voltage electrode 1 functions as a metal electrode with a built-in flow path having a refrigerant flow path 4, similar to Embodiment 1.

[0136] In the electrode component part E22, the insulating structure 5 is provided on the upper surface of the high-voltage electrode 2. That is, the insulating structure 5 is provided on the opposite side of the discharge space 6 adjacent to the high-voltage electrode 2 which becomes the second metal electrode.

[0137] Furthermore, a cooling plate 8 having a cooling function is provided on the upper surface of the insulating structure 5. That is, the cooling plate 8 is provided on the opposite side of the discharge space 6 adjacent to the insulating structure 5.

[0138] The cooling plate 8 has a refrigerant flow path 9 which is a second refrigerant flow path for flowing a refrigerant C2 which becomes a second refrigerant inside. In addition, the cooling plate 8 has a cooling central region B1 that overlaps with the discharge central space S1 in a plan view in the XY plane, and a cooling peripheral region B2 that overlaps with the discharge peripheral space S2 in a plan view in the XY plane.

[0139] The refrigerant flow path 9 provided in the cooling plate 8 has a refrigerant inlet 9a in the central region on the upper surface of the cooling plate 8 and a refrigerant outlet 9b on the side surface side of the cooling plate 8, and is formed from the cooling central region B1 to the cooling peripheral region B2. And the refrigerant flow path 9 has a second center-priority refrigerant flow path structure that flows the refrigerant C2 from the refrigerant inlet 9a toward the refrigerant outlet 9b, and flows the refrigerant C2 to the cooling central region B1 prior to the cooling peripheral region B2.

[0140] The ozone generator of Embodiment 2 having the electrode unit 62 includes the cooling plate 8, and cools the discharge space 6 from the low-pressure electrode 1 side by the refrigerant flow path 4 through which the refrigerant C1 flows, and also cools the discharge space 6 from the high-pressure electrode 2 side by the cooling plate 8.

[0141] As a result, the ozone generator of Embodiment 2 can further enhance the cooling effect of the discharge space 6.

[0142] Furthermore, since the cooling plate 8 in the ozone generator of Embodiment 2 has the second center-priority refrigerant flow path structure described above, the temperature of the cooling central region B1 close to the gas outlet 12 from the high-pressure electrode 2 side can be kept relatively low.

[0143] As a result, the ozone generator of Embodiment 2 can generate a higher-concentration ozone gas G2 by suppressing the second refrigerant amount of the second refrigerant, refrigerant C2, to the minimum necessary.

[0144] Note that also in Embodiment 2, by expanding the basic configuration shown in FIG. 17, a structure similar to the first to fourth aspects of Embodiment 1 can be realized, and the same effects can be exhibited.

[0145] <Embodiment 3> (Basic Configuration) FIG. 18 is an explanatory diagram schematically showing a cross-sectional structure of an electrode unit 63 which is a basic configuration of Embodiment 3 of the present disclosure. An XYZ orthogonal coordinate system is shown in the figure. An ozone generator including the electrode unit 63 becomes the ozone generator of Embodiment 3. As shown in the figure, the electrode unit 63 includes electrode components E1R and E2 and a spacer 7 as main components.

[0146] Hereinafter, components and the like similar to those in the basic configuration of Embodiment 1 shown in FIG. 2 are denoted by the same reference numerals, and the description thereof will be omitted as appropriate, and the description will be centered on the characteristic parts of Embodiment 3.

[0147] The electrode component E1R includes a low-voltage electrode 1R as a main component. The low-voltage electrode 1R, which is a flat plate-shaped first metal electrode, has a gas supply port 11 penetrating through the central portion as a gas supply port provided in the central portion.

[0148] The electrode component E2 is provided on the low-voltage electrode 1R of the electrode component E1R via a spacer 7. The electrode component E2 includes a high-voltage electrode 2 and a dielectric 3 as main components. A dielectric 3 which is a dielectric for an electrode is formed on the lower surface of the high-voltage electrode 2 which is a flat plate-shaped second metal electrode.

[0149] In Embodiment 3, the dielectric 3 serving as the dielectric for the electrode is provided adjacent to the high-voltage electrode 2, but it may be provided adjacent to the low-voltage electrode 1R. That is, between the low-voltage electrode 1R and the high-voltage electrode 2, at least one dielectric for an electrode may be provided adjacent to at least one of the low-voltage electrode 1R and the high-voltage electrode 2.

[0150] However, between the low-voltage electrode 1R and the high-voltage electrode 2, it is necessary to provide a discharge space 6 in contact with at least one dielectric for an electrode. That is, when forming a dielectric for an electrode in the electrode component E1R, it is necessary to provide the dielectric for an electrode on the upper surface of the low-voltage electrode 1R.

[0151] In the electrode unit 63 shown in FIG. 18, similar to the electrode unit 61 of the first embodiment, dielectric barrier discharge can be generated in the discharge space 6 by applying an alternating voltage between the low-voltage electrode 1R and the high-voltage electrode 2.

[0152] The discharge space 6 includes a discharge central space S1 communicating with the gas supply port 11 and a discharge peripheral space S2 existing around the discharge central space S1. And the external space communicating with the discharge peripheral space S2 becomes the ozone gas output space. That is, the space communicating with the discharge peripheral space S2 around the entire periphery of the discharge space 6 becomes the ozone gas output space.

[0153] As shown in FIG. 18, the raw material gas G1 is supplied from below the gas supply port 11 of the low-voltage electrode 1R, and the raw material gas G1 is supplied from the center of the discharge space 6 toward the entire periphery. That is, the raw material gas G1 is supplied from the discharge central space S1 toward the discharge peripheral space S2. The ozone gas G2 is obtained by passing the raw material gas G1 through the discharge space 6 where dielectric barrier discharge occurs.

[0154] The ozone gas G2 obtained in the discharge space 6 is output to the external ozone gas output space through the discharge peripheral space S2.

[0155] The low-voltage electrode 1R functions as a metal electrode with a built-in flow path and has a refrigerant flow path 4R through which a refrigerant C1 flows inside. The low-voltage electrode 1R that functions as a metal electrode with a built-in flow path has an electrode central region D1 that overlaps with the discharge central space S1 in a plan view in the XY plane and an electrode peripheral region D2 that overlaps with the discharge peripheral space S2 in a plan view in the XY plane.

[0156] The refrigerant flow path 4R provided in the low-voltage electrode 1R has a refrigerant inlet 4Ra on the side surface side of the low-voltage electrode 1 and a refrigerant outlet 4Rb in the central region on the lower surface of the low-voltage electrode 1, and is formed from the electrode peripheral region D2 to the electrode central region D1. And the refrigerant flow path 4R provided in the low-voltage electrode 1R has a peripheral-priority refrigerant flow path structure in which the refrigerant C1 flows from the refrigerant inlet 4Ra to the refrigerant outlet 4Rb, so that the refrigerant C1 flows through the electrode peripheral region D2 prior to the electrode central region D1.

[0157] In the ozone generator having the electrode unit 63 which is the basic configuration of Embodiment 3 of the present disclosure, since the refrigerant flow path 4R provided in the low-voltage electrode 1R that functions as a metal electrode with a built-in flow path has the above-described peripheral-priority refrigerant flow path structure, the temperature of the electrode peripheral region D2 close to the ozone gas output space can be kept relatively low.

[0158] On the other hand, since the raw material gas G1 is supplied from the discharge central space S1 toward the discharge peripheral space S2, regarding the ozone gas G2 generated in the discharge space 6, the ozone concentration in the discharge peripheral space S2 tends to be higher than the ozone concentration in the discharge central space S1.

[0159] Therefore, the ozone generator having the basic configuration of Embodiment 3 enhances the cooling effect of the discharge peripheral space S2 by making the refrigerant flow path 4R provided in the low-voltage electrode 1R have the above-described peripheral-priority refrigerant flow path structure, thereby reducing the temperature of the discharge peripheral space S2 and minimizing the phenomenon in which the ozone gas G2 in a high ozone concentration state is decomposed.

[0160] As a result, the ozone generator having the basic configuration of Embodiment 3 can generate a relatively high-concentration ozone gas G2 while suppressing the amount of the refrigerant C1 to the minimum necessary.

[0161] In the electrode unit 63 shown in FIG. 18, among the low-voltage electrode 1R and the high-voltage electrode 2, the low-voltage electrode 1R is made to function as a metal electrode with a built-in flow path, but at least one of the low-voltage electrode 1R and the high-voltage electrode 2 may be made to function as a metal electrode with a built-in flow path.

[0162] For example, a refrigerant flow path corresponding to the refrigerant flow path 4R may be provided in the high-voltage electrode 2 with the high-voltage electrode 2 being a metal electrode with a built-in flow path. However, the refrigerant flowing through the refrigerant flow path in the high-voltage electrode 2 needs to have insulating properties.

[0163] (Ozone generation method) The ozone generation method using the ozone generation device having the basic configuration shown in FIG. 18 (hereinafter, may be abbreviated as "ozone generation method for basic configuration" in Embodiment 3 and Embodiment 4) includes the following steps (a) to (c).

[0164] Step (a): An alternating voltage is applied between the low-voltage electrode 1R serving as the first metal electrode and the high-voltage electrode 2 serving as the second metal electrode to generate dielectric barrier discharge in the discharge space 6.

[0165] Step (b): In the refrigerant flow path 4R in the low-voltage electrode 1R, by flowing the refrigerant C1 from the refrigerant inlet 4Ra to the refrigerant outlet 4Rb, a peripheral-priority refrigerant flow path setting process is executed to flow the refrigerant C1 to the electrode peripheral region D2 prior to the electrode central region D1.

[0166] Step (c): By supplying the raw material gas G1 from the gas supply port 11 toward the discharge peripheral space S2 via the discharge central space S1, ozone gas G2 is obtained in the discharge space 6.

[0167] By executing the above steps (a) to (c), the ozone gas G2 obtained in the discharge space 6 is output to the external ozone gas output space from the entire periphery of the discharge peripheral space S2 via the discharge peripheral space S2.

[0168] In the ozone generation method for basic configuration, since the peripheral-priority refrigerant flow path setting process is executed by the above step (b), the temperature of the discharge peripheral space S2 can be kept relatively low. On the other hand, regarding the ozone gas G2 generated in the discharge space 6, the ozone concentration in the discharge peripheral space S2 tends to be higher than the ozone concentration in the discharge central space S1.

[0169] Therefore, the ozone generation method for basic configuration can generate a relatively high-concentration ozone gas G2 while suppressing the refrigerant amount of the refrigerant C1 to the minimum necessary by executing step (b) to enhance the cooling effect of the discharge peripheral space S2.

[0170] (First Aspect) FIG. 19 is an explanatory diagram schematically showing a planar structure of a refrigerant flow path 4R of a low-pressure electrode 1AR in an ozone generator according to the first aspect of Embodiment 3. FIG. 20 is an explanatory diagram schematically showing a discharge space 6 on the low-pressure electrode 1AR shown in FIG. 19. XYZ orthogonal coordinate systems are shown in FIGS. 19 and 20 respectively.

[0171] FIGS. 21 and 22 are explanatory diagrams schematically showing a cross-sectional structure of the low-pressure electrode 1AR shown in FIG. 19. FIG. 21 shows a G-G cross section of FIG. 19, and FIG. 22 shows an H-H cross section of FIG. 19. XYZ orthogonal coordinate systems are shown in FIGS. 21 and 22 respectively. Hereinafter, the first aspect of Embodiment 3 will be described with reference to FIGS. 19 to 22. Note that the first aspect shows a specific structure of the low-pressure electrode 1AR corresponding to the low-pressure electrode 1R in the electrode unit 63 having the basic configuration shown in FIG. 18.

[0172] As shown in FIGS. 19 and 20, the low-pressure electrode 1AR has a rectangular shape in plan view on the XY plane. On the other hand, as shown in FIG. 20, the discharge space 6 has a circular shape in plan view on the XY plane. For example, by forming the planar shape of the high-pressure electrode 2 into a circular shape, the discharge space 6 formed between the low-pressure electrode 1AR and the high-pressure electrode 2 can be made circular.

[0173] As shown in FIGS. 19 and 22, the lower surface of the low-pressure electrode 1AR has a refrigerant supply port 21R and a refrigerant discharge port 22R. The refrigerant discharge port 22R discharges the refrigerant C1 from the circulation path 42(1), and the refrigerant supply port 21R supplies the refrigerant C1 to the circulation path 42(3) in the low-pressure electrode 1AR. Note that the refrigerant supply port 21R also has the same cross-sectional structure as the refrigerant discharge port 22R shown in FIG. 22.

[0174] In the low-pressure electrode 1AR of the first aspect, a flow path outer wall 25 is provided along the outer periphery, and a flow path separation wall 26 is provided inside. Thus, the refrigerant flow path 4R has bent flow paths 41(1) to 41(2) that change the flow path direction and circumferential flow paths 42(1) to 42(3) through which the refrigerant C1 flows along the flow path direction. That is, in the first aspect of the third embodiment, similar to the first aspect of the first embodiment, the bent flow paths 41(1) to 41(2) are at least one bent flow path, and the circumferential flow paths 42(1) to 42(3) are a plurality of circumferential flow paths.

[0175] As shown in FIGS. 19 and 22, the refrigerant supply port 21R and the refrigerant discharge port 22R are arranged at positions that do not overlap with the discharge space 6 in a plan view in the XY plane. Further, the refrigerant supply port 21R and the refrigerant discharge port 22R are provided on the +X direction side in the same direction with respect to the discharge space 6 in a plan view.

[0176] Also, the refrigerant flow path 4R is provided with a gas supply port 11 that is blocked from the refrigerant C1 flowing through the refrigerant flow path 4R by the gas outlet wall 16.

[0177] Of the circumferential flow paths 42(1) to 42(3), a pair of adjacent circumferential flow paths 42(i + 1) and circumferential flow path 42(i) (i = either 2 or 1) are connected via the bent flow path 41(i) so that their flow path directions are opposite to each other.

[0178] That is, of the plurality of circumferential flow paths (circumferential flow paths 42(1) to 42(3)), a pair of adjacent circumferential flow paths are connected via one of the at least one bent flow path (bent flow paths 41(1) to 41(2)) so that their flow path directions are opposite to each other.

[0179] The circumferential flow path 42(1) communicates with the refrigerant discharge port 22R, and the circumferential flow path 42(3) communicates with the refrigerant supply port 21R. Therefore, the circumferential flow path 42(1) becomes the discharge-side circumferential flow path, and the circumferential flow path 42(3) becomes the supply-side circumferential flow path.

[0180] That is, the plurality of circulation channels (circulation channels 42(1) to 42(3)) include a supply-side circulation channel (circulation channel 42(3)) communicating with the refrigerant supply port 21R and a discharge-side circulation channel (circulation channel 42(1)) communicating with the refrigerant discharge port 22R.

[0181] Among the circulation channels 42(1) to 42(3), the circulation channel 42(3) serving as the supply-side circulation channel is located farthest from the gas supply port 11, and the circulation channel 42(1) serving as the discharge-side circulation channel is located closest to the gas supply port 11.

[0182] In this way, in the refrigerant flow path 4R provided in the low-pressure electrode 1AR, the refrigerant C1 is first supplied from the refrigerant supply port 21R to the circulation channel 42(3), and finally the refrigerant C1 is discharged from the circulation channel 42(1) to the outside through the refrigerant discharge port 22R, realizing a circulation flow path structure in which the refrigerant C1 flows through the circulation channels 42(1) to 42(3) and the bent flow paths 41(1) to 41(2).

[0183] That is, in the first aspect of the third embodiment, as the peripheral-priority refrigerant flow path structure of the basic configuration, a circulation flow path structure is realized, and the flow path widths of the circulation channels 42(1) to 42(3) and the bent flow paths 41(1) to 41(2) are each within a certain range.

[0184] The ozone generator according to the first aspect of the third embodiment of the present disclosure realizes the above-described circulation flow path structure as the peripheral-priority refrigerant flow path structure. Therefore, due to the fact that the flow path width is within a certain range, the flow velocity of the refrigerant C1 flowing through the refrigerant flow path 4R can be improved, and the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced to the extent that the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0185] In the ozone generator according to the first aspect of the third embodiment, the refrigerant supply port 21R and the refrigerant discharge port 22R do not overlap the discharge space 6 in a plan view. Therefore, even if the refrigerant supply port 21R and the refrigerant discharge port 22R are provided, the discharge space 6 can be provided without any hindrance between the low-pressure electrode 1AR and the electrode component E2.

[0186] In the first aspect of the third embodiment, since the refrigerant supply port 21R and the refrigerant discharge port 22R are provided in the same direction with respect to the discharge space 6 in a plan view, the refrigerant supply port 21R and the refrigerant discharge port 22R can be arranged close to each other, and the supply of the refrigerant C1 from the outside and the discharge of the refrigerant C1 to the outside can be performed relatively easily.

[0187] In the first aspect of the third embodiment, since the discharge space 6 is circular in a plan view, the ozone gas G2 can be evenly output from the entire periphery of the discharge space 6 to the external ozone gas output space.

[0188] (Ozone generation method) The ozone generation method using the ozone generation device according to the first aspect of the third embodiment shown in FIGS. 19 to 22 includes the following steps (b-1) and (b-2) as the above-described peripheral priority refrigerant flow path setting process in step (b) executed by the ozone generation method for the basic configuration.

[0189] Step (b-1): Supply the refrigerant C1 from the refrigerant supply port 21R to the circulation flow path 42(3) serving as the supply-side circulation flow path.

[0190] Step (b-2): Discharge the refrigerant C1 from the circulation flow path 42(1) serving as the discharge-side circulation flow path to the refrigerant discharge port 22R.

[0191] By executing the above-described steps (b-1) and (b-2), in the refrigerant flow path 4R, the refrigerant C1 is first supplied from the refrigerant supply port 21R to the circulation flow path 42(3), and finally the refrigerant C1 is discharged to the outside through the refrigerant discharge port 22R from the circulation flow path 42(1). In this manner, a circulation flow path through which the refrigerant C1 flows is set in the circulation flow paths 42(1) to 42(3) and the bending flow paths 41(1) to 41(2).

[0192] Since the circulation flow path described above is set by executing the steps (b-1) and (b-2) for the ozone generation method of the first aspect, the flow rate of the refrigerant C1 flowing through the refrigerant flow path 4R can be improved, and the cooling effect of the discharge space 6 by the refrigerant C1 can be enhanced because the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0193] (Second aspect) In addition, in Embodiment 3 as well, a structure similar to the second aspect of Embodiment 1 shown in FIGS. 7 to 9 can be realized, and the same effects as those of the second aspect of Embodiment 1 can be achieved. In this case, the gas supply port, the raw material gas intake port, the refrigerant discharge port 22R, and the refrigerant supply port 21R in the second aspect of Embodiment 3 correspond to the gas outlet 12B, the ozone gas extraction port 19, the refrigerant supply port 21, and the refrigerant discharge port 22 in the second aspect of Embodiment 1.

[0194] (Third aspect) In addition, in Embodiment 3 as well, a structure similar to the third aspect of Embodiment 1 shown in FIGS. 10 to 12 can be realized, and the same effects as those of the third aspect of Embodiment 1 can be achieved. In this case, the gas supply port, the raw material gas passage, the refrigerant discharge port, and the refrigerant supply port in the third aspect of Embodiment 3 correspond to the gas outlet 12C, the ozone gas passage 35, the refrigerant supply passage 36, and the refrigerant discharge passage 37 in the third aspect of Embodiment 1.

[0195] (Fourth aspect) FIG. 23 is an explanatory diagram schematically showing a planar structure of a refrigerant flow path 4R of a low-pressure electrode 1DR in an ozone generator according to a fourth aspect of Embodiment 3. FIG. 24 is an explanatory diagram schematically showing details of a branched refraction region R50(1) of the low-pressure electrode 1DR shown in FIG. 23. An XYZ orthogonal coordinate system is shown in FIGS. 23 and 24.

[0196] As shown in FIG. 23, the refrigerant flow path 4R of the fourth aspect has eight branched refraction regions R50(1) to R50(8). Note that the illustration of the gas supply port provided at the central portion of the low-pressure electrode 1DR is omitted in FIG. 23. As the gas supply port of the fourth aspect, a structure such as the gas supply port 11 of the first aspect can be considered.

[0197] Hereinafter, with reference to FIGS. 23 and 24, the fourth aspect of Embodiment 3 will be described. Note that the fourth aspect shows a specific structure of a low-pressure electrode 1DR corresponding to the low-pressure electrode 1R in the electrode unit 63 having the basic configuration shown in FIG. 18.

[0198] As shown in FIG. 23, similar to the first aspect, the lower surface of the low-pressure electrode 1DR has a refrigerant supply port 21R and a refrigerant discharge port 22R. The refrigerant supply port 21R receives the refrigerant C1 from the outside, and the refrigerant discharge port 22R discharges the refrigerant C1 to the outside.

[0199] In the low-pressure electrode 1DR of the fourth aspect, a flow path outer wall 25 is provided along the outer periphery, and a flow path separation wall 27 is provided inside, thereby providing branch refraction regions R50(1) to R50(8). Partial refrigerant flow paths are respectively formed in the branch refraction regions R50(1) to R50(8). That is, the refrigerant flow path 4R formed in the low-pressure electrode 1DR includes eight partial refrigerant flow paths corresponding to the branch refraction regions R50(1) to R50(8).

[0200] Since the partial refrigerant flow paths formed in the branch refraction regions R50(1) to R50(8) have similar structures to each other, hereinafter, the partial refrigerant flow path formed in the branch refraction region R50(1) shown in FIG. 24 will be described as a representative.

[0201] In the branch refraction region R50(1), branch refraction flow paths 51(1) to 51(7) for changing the flow path direction and branch circumferential flow paths 52(1) to 52(8) for flowing the refrigerant C1 along the flow path direction are provided respectively. That is, the fourth aspect of the third embodiment is the same as the fourth aspect of the first embodiment in that the branch refraction flow paths 51(1) to 51(7) correspond to at least one bending flow path, and the branch circumferential flow paths 52(1) to 52(8) correspond to a plurality of circumferential flow paths.

[0202] Among the branch circumferential flow paths 52(1) to 52(8), a pair of adjacent branch circumferential flow paths 52(i + 1) and branch circumferential flow path 52(i) (i = any of 7 to 1) are connected via a bending flow path 41(i) so that their flow path directions are opposite to each other.

[0203] That is, among a plurality of circulation channels (branch circulation channels 52(1) to 52(8)), a pair of adjacent circulation channels are connected through at least one of the bending channels (branch bending channels 51(1) to 51(7)) such that the flow path directions thereof are opposite to each other.

[0204] The flow paths corresponding to the branch circulation channels 52(8) in the branch refraction regions R50(1) to R50(8) communicate with the refrigerant supply port 21R, and the branch circulation channels 52(1) in the branch refraction regions R50(1) to R50(8) communicate with the refrigerant discharge port 22R. Therefore, the flow paths corresponding to the branch circulation channels 52(8) serve as the supply-side circulation channels, and the branch circulation channels 52(1) serve as the discharge-side circulation channels.

[0205] That is, the plurality of circulation channels (branch circulation channels 52(1) to 52(8)) include a supply-side circulation channel (a flow path corresponding to the branch circulation channel 52(8)) that communicates with the refrigerant supply port 21R and a discharge-side circulation channel (the branch circulation channel 52(1)) that communicates with the refrigerant discharge port 22R.

[0206] Among the branch circulation channels 52(1) to 52(8), the flow path corresponding to the branch circulation channel 52(8) that serves as the supply-side circulation channel is located farthest from the gas supply port 11, and the branch circulation channel 52(1) that serves as the discharge-side circulation channel is located closest to the gas supply port 11.

[0207] In this way, the refrigerant flow path 4R provided in the low-pressure electrode 1DR has a branched supply form in which the refrigerant C1 is branched from the refrigerant supply port 21R to the flow paths corresponding to the branch circulation channels 52(8) in the branch refraction regions R50(1) to R50(8) and supplied. Further, the refrigerant flow path 4R has a combined discharge form in which the refrigerant C1 combined from the branch circulation channels 52(1) in the branch refraction regions R50(1) to R50(8) is discharged to the outside through the refrigerant discharge port 22R. Therefore, the refrigerant flow path 4R in the fourth aspect realizes a circulation flow path structure in which the refrigerant C1 flows through the branch circulation channels 52(1) to 52(8) and the branch bending channels 51(1) to 51(7) in the above-described branched supply form and combined discharge form.

[0208] That is, in the fourth aspect of the third embodiment, as the peripheral priority refrigerant flow path structure of the basic configuration, partial refrigerant flow paths having the above-described branch supply form and the confluence discharge form are provided in each of the branch refraction regions R50(1) to R50(8), and the flow path width of the partial refrigerant flow paths is made to fall within a certain range.

[0209] Thus, as the refrigerant flow path 4R formed in the low-pressure electrode 1DR in the fourth aspect of the third embodiment, a plurality of partial refrigerant flow paths are provided corresponding to the branch refraction regions R50(1) to R50(8).

[0210] Each of the plurality of partial refrigerant flow paths has branch circulation flow paths 52(1) to 52(8) that become a plurality of circulation flow paths and branch refraction flow paths 51(1) to 51(7) that become at least one bent flow path.

[0211] The flow paths corresponding to the branch circulation flow path 52(8) that is the supply-side circulation flow path of each of the plurality of partial refrigerant flow paths communicate with the refrigerant supply port 21R, and the branch circulation flow path 52(1) that is the discharge-side circulation flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant discharge port 22R.

[0212] Thus, in the fourth aspect of the third embodiment, each of the plurality of partial refrigerant flow paths provided corresponding to the branch refraction regions R50(1) to R50(8) has a circulation flow path structure.

[0213] The ozone generator according to the fourth aspect of the third embodiment of the present disclosure realizes a circulation flow path structure in each of the branch refraction regions R50(1) to R50(8). Therefore, it is possible to improve the flow velocity of the refrigerant C1 flowing through the refrigerant flow path 4R, and to enhance the cooling effect of the discharge space 6 by the refrigerant C1 to such an extent that the thermal conductivity of the refrigerant C1 can be kept relatively high.

[0214] In the ozone generator according to the fourth aspect of the third embodiment, the refrigerant flow path includes a plurality of partial refrigerant flow paths. Therefore, after branching in parallel from the refrigerant supply port 21R into the flow paths corresponding to the respective branch circulation flow paths 52(8) of the plurality of partial refrigerant flow paths, the branch circulation flow paths 52(1) of the plurality of partial refrigerant flow paths that are in a parallel relationship with each other merge and communicate with the refrigerant discharge port 22R, thereby realizing a plurality of circulation flow path structures. That is, a plurality of circulation flow path structures are realized corresponding to the plurality of partial refrigerant flow paths.

[0215] As described above, the fourth aspect of the third embodiment can realize a plurality of circulation flow path structures as a peripheral-priority refrigerant flow path structure. On the other hand, the ozone gas G2 generated in the discharge space 6 has an ozone gas direction component that travels from the gas supply port 11 through the discharge central space S1 and the discharge peripheral space S2 toward the entire periphery of the discharge space 6.

[0216] Therefore, the temperature distribution formed by the plurality of circulation flow path structures becomes a temperature distribution that accurately opposes the above-described ozone gas direction component, so that the discharge peripheral space S2 can be set to a uniform low-temperature state.

[0217] As a result, the ozone generator according to the fourth aspect of the third embodiment can generate a higher-concentration ozone gas G2 by uniformly enhancing the cooling effect of the discharge peripheral space S2 in the discharge space 6.

[0218] In the first to fourth aspects of the third embodiment, the configuration in which the refrigerant supply port 21R and the refrigerant discharge port 22R are provided outside the discharge space 6 in a plan view is shown, but of course, other configurations are also possible. For example, a refrigerant discharge mechanism may be provided directly below the refrigerant outlet 4Rb of the refrigerant flow path 4R provided on the lower surface side of the low-voltage electrode 1R (1AR, 1DR). However, the refrigerant discharge mechanism needs to be provided in a manner that does not affect the raw material gas G1 supplied from the gas supply port 11.

[0219] <Embodiment 4> (Basic Configuration) FIG. 25 is an explanatory diagram schematically showing a cross-sectional structure of an electrode unit 64 which is a basic configuration of Embodiment 4 of the present disclosure. An XYZ orthogonal coordinate system is shown in the figure. An ozone generator including the electrode unit 64 becomes the ozone generator of Embodiment 4. As shown in the figure, the electrode unit 64 includes electrode components E1R and E22R and a spacer 7 as main components.

[0220] Hereinafter, components and the like similar to those in the basic configuration of Embodiment 3 shown in FIG. 18 are denoted by the same reference numerals, and the description thereof is appropriately omitted, and the description will be centered on the characteristic parts of Embodiment 4.

[0221] The electrode component E22R is provided on the low-pressure electrode 1R of the electrode component E1R via the spacer 7. The electrode component E22R includes a high-voltage electrode 2, a dielectric 3, an insulating structure 5, and a cooling plate 8R as main components. The dielectric 3 is formed on the lower surface of the high-voltage electrode 2.

[0222] Similar to Embodiment 3, the low-pressure electrode 1R functions as a metal electrode with an internal flow path having a refrigerant flow path 4.

[0223] In the electrode component E22R, the insulating structure 5 is provided on the upper surface of the high-voltage electrode 2. That is, the insulating structure 5 is provided on the opposite side of the discharge space 6 adjacent to the high-voltage electrode 2 which becomes the second metal electrode.

[0224] Furthermore, a cooling plate 8R having a cooling function is provided on the upper surface of the insulating structure 5. That is, the cooling plate 8R is provided on the opposite side of the discharge space 6 adjacent to the insulating structure 5.

[0225] The cooling plate 8R has a refrigerant flow path 9R which is a second refrigerant flow path for flowing a refrigerant C2 which becomes a second refrigerant inside. In addition, the cooling plate 8R has a cooling central region B1 that overlaps with the discharge central space S1 in a plan view in the XY plane, and a cooling peripheral region B2 that overlaps with the discharge peripheral space S2 in a plan view in the XY plane.

[0226] The refrigerant flow path 9R provided in the cooling plate 8R has a refrigerant inlet 9Ra on the side surface side of the cooling plate 8R and a refrigerant outlet 9Rb in the central region on the upper surface of the cooling plate 8R, and is formed from the cooling peripheral region B2 to the cooling central region B1. And the refrigerant flow path 9R has a second peripheral-priority refrigerant flow path structure that causes the refrigerant C2 to flow from the refrigerant inlet 9Ra toward the refrigerant outlet 9Rb, thereby flowing the refrigerant C2 through the cooling peripheral region B2 prior to the cooling central region B1.

[0227] The ozone generator of Embodiment 4 having the electrode unit 64 includes a cooling plate 8R, and the low-pressure electrode 1R having a refrigerant flow path 4R through which the refrigerant C1 flows cools the discharge space 6 from the low-pressure electrode 1R side, and the cooling plate 8R can also cool the discharge space 6 from the high-pressure electrode 2 side.

[0228] As a result, the ozone generator of Embodiment 4 can further enhance the cooling effect of the discharge space 6.

[0229] Furthermore, since the cooling plate 8R in the ozone generator of Embodiment 4 has the above-described second peripheral-priority refrigerant flow path structure, it is possible to keep the temperature of the cooling peripheral region B2 close to the ozone gas output space around the entire circumference of the discharge space 6 from the high-pressure electrode 2 side relatively low.

[0230] As a result, the ozone generator of Embodiment 4 can generate a higher-concentration ozone gas G2 while suppressing the second refrigerant amount of the second refrigerant, refrigerant C2, to the minimum necessary.

[0231] Note that also in Embodiment 4, by expanding the basic configuration shown in FIG. 25, a structure similar to the first to fourth aspects of Embodiment 3 can be realized, and similar effects can be exhibited.

[0232] Although the present disclosure has been described in detail, the above description is illustrative in all aspects and the present disclosure is not limited thereto. It is understood that countless modifications not illustrated can be assumed without departing from the scope of the present disclosure.

[0233] In the above-described embodiment, the gas outlet 12 (12B, 12C) is provided at the center of the low-pressure electrode 1 (1A to 1D, 1AR, 1DR). However, it is sufficient that at least one of the low-pressure electrode 1 and the high-pressure electrode 2 has the gas outlet 12 at the center.

Explanation of Signs

[0234] 1, 1A to 1D, 1AR, 1DR Low-pressure electrode 2 High-pressure electrode 3 Dielectric 4, 4R, 9, 9R Refrigerant flow path 5 Insulating structure 6 Discharge space 8, 8R Cooling plate 11 Gas supply port 12, 12B, 12C Gas outlet 19 Ozone gas outlet 21 Refrigerant supply port 22 Refrigerant discharge port 30 Auxiliary member for ozone gas and refrigerant 35 Ozone gas passage 36 Refrigerant supply passage 37 Refrigerant discharge passage 55 Ozone gas generation unit 61 to 64 Electrode unit C1, C2 Refrigerant E1, E1R, E2, E22, E22R Electrode component G1 Source gas G2 Ozone gas

Claims

1. An ozone generator, a first metal electrode in the form of a flat plate; a second metal electrode having a flat plate shape and arranged opposite to the first metal electrode, at least one of the first and second metal electrodes having a gas outlet at a center thereof; The semiconductor device further includes at least one electrode dielectric disposed adjacent to at least one of the first and second metal electrodes between the first and second metal electrodes, a discharge space is provided between the first and second metal electrodes and in contact with the at least one electrode dielectric; a voltage is applied between the first and second metal electrodes to generate a dielectric barrier discharge in the discharge space; a raw material gas is supplied to the discharge space, and ozone gas is obtained by passing the raw material gas through the discharge space where the dielectric barrier discharge occurs; the discharge space includes a discharge central space communicating with the gas outlet and a discharge peripheral space existing around the discharge central space, and the source gas is supplied from the discharge peripheral space toward the discharge central space, At least one of the first and second metal electrodes is a channel-integrated metal electrode; the flow-path-integrated metal electrode has an electrode central region that overlaps with the discharge central space in a plan view, and an electrode peripheral region that overlaps with the discharge peripheral space in a plan view, the channel-integrated metal electrode has a coolant channel therein for allowing a coolant to flow, the coolant channel being formed from a central region of the electrode to a peripheral region of the electrode; The ozone gas obtained in the discharge space is output from the discharge central space to the outside through the gas outlet, the coolant flow path has a central priority coolant flow path structure that causes the coolant to flow to the electrode central region prior to the electrode peripheral region, The ozone generator is a refrigerant supply port for receiving the refrigerant from the outside; a refrigerant outlet for discharging the refrigerant to the outside, The refrigerant flow path is at least one bent flow path that changes flow path direction; a plurality of circular flow paths each of which allows the coolant to flow along a flow path direction; a pair of adjacent circulating flow paths among the plurality of circulating flow paths are connected via one of the at least one bent flow paths so that their flow paths are in opposite directions to each other; the plurality of circulating flow paths include a supply-side circulating flow path that communicates with the refrigerant supply port and a discharge-side circulating flow path that communicates with the refrigerant discharge port, and of the plurality of circulating flow paths, the supply-side circulating flow path is located closest to the gas outlet, and the discharge-side circulating flow path is located farthest from the gas outlet, The central priority refrigerant flow path structure is a circulating flow path structure that causes the refrigerant to flow through the plurality of circulating flow paths and the at least one bent flow path so that the refrigerant is first supplied from the refrigerant supply port to the supply-side circulating flow path and finally discharged from the discharge-side circulating flow path to the outside through the refrigerant discharge port, Ozone generator.

2. 2. The ozone generator according to claim 1, the refrigerant flow path includes a plurality of partial refrigerant flow paths; each of the plurality of partial refrigerant flow paths includes the plurality of circulating flow paths and the at least one bent flow path; the supply-side circular flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant supply port; the discharge-side circular flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant discharge port, Each of the plurality of partial refrigerant flow paths has the circulating flow path structure. Ozone generator.

3. 2. The ozone generator according to claim 1, the coolant supply port and the coolant discharge port do not overlap the discharge space in plan view; Ozone generator.

4. 4. The ozone generator according to claim 3, the coolant supply port and the coolant discharge port are provided in the same direction with respect to the discharge space in a plan view. Ozone generator.

5. 5. The ozone generator according to claim 1, The discharge space has a circular shape in a plan view. Ozone generator.

6. 5. The ozone generator according to claim 1, the channel-integrated metal electrode includes the first metal electrode; an insulating structure provided adjacent to the second metal electrode on the opposite side of the discharge space; a cooling plate provided adjacent to the insulating structure on the opposite side of the discharge space and having a cooling function. Ozone generator.

7. 7. The ozone generator according to claim 6, the cooling plate has a second coolant flow path therein through which a second coolant flows; the cooling plate has a cooling central region overlapping with the discharge central space in a plan view and a cooling peripheral region overlapping with the discharge peripheral space in a plan view, the second refrigerant flow path is formed from the central cooling region to the peripheral cooling region, and has a second central priority refrigerant flow path structure that causes the second refrigerant to flow into the central cooling region prior to flowing into the peripheral cooling region; Ozone generator.

8. An ozone generation method for generating ozone gas using an ozone generator, comprising: The ozone generator is a first metal electrode in the form of a flat plate; a second metal electrode having a flat plate shape and arranged opposite to the first metal electrode, at least one of the first and second metal electrodes having a gas outlet at a center thereof; The ozone generator is The semiconductor device further includes at least one electrode dielectric disposed adjacent to at least one of the first and second metal electrodes between the first and second metal electrodes, a discharge space is provided between the first and second metal electrodes and in contact with the at least one electrode dielectric; the discharge space includes a discharge central space communicating with the gas outlet and a discharge peripheral space present around the discharge central space, At least one of the first and second metal electrodes is a channel-integrated metal electrode; the flow-path-integrated metal electrode has an electrode central region that overlaps with the discharge central space in a plan view, and an electrode peripheral region that overlaps with the discharge peripheral space in a plan view, the channel-integrated metal electrode has a coolant channel therein for allowing a coolant to flow, the coolant channel being formed from a central region of the electrode to a peripheral region of the electrode; (a) applying a voltage between the first and second metal electrodes to generate a dielectric barrier discharge in the discharge space; (b) performing a central priority refrigerant flow path setting process in the refrigerant flow path, in which the refrigerant flows through the electrode central region prior to the electrode peripheral region; (c) supplying a source gas from the periphery of the discharge peripheral space toward the discharge central space, thereby obtaining the ozone gas within the discharge space; The ozone gas obtained in the discharge space is output from the discharge central space to the outside through the gas outlet, The ozone generator is a refrigerant supply port for receiving the refrigerant from the outside; a refrigerant outlet for discharging the refrigerant to the outside, The refrigerant flow path is at least one bent flow path that changes flow path direction; a plurality of circular flow paths each of which allows the coolant to flow along a flow path direction; a pair of adjacent circulating flow paths among the plurality of circulating flow paths are connected via one of the at least one bent flow paths so that their flow paths are in opposite directions to each other; the plurality of circulating flow paths include a supply-side circulating flow path that communicates with the refrigerant supply port and a discharge-side circulating flow path that communicates with the refrigerant discharge port, and of the plurality of circulating flow paths, the supply-side circulating flow path is located closest to the gas outlet, and the discharge-side circulating flow path is located farthest from the gas outlet, The central priority refrigerant flow path setting process in the step (b) includes: (b-1) supplying the refrigerant from the refrigerant supply port to the supply-side circular flow path; (b-2) discharging the refrigerant from the discharge-side circular flow path to the refrigerant discharge port, By performing steps (b-1) and (b-2), a circulating flow path through which the refrigerant flows is set in the plurality of circulating flow paths and the at least one bent flow path in such a manner that the refrigerant is first supplied from the refrigerant supply port to the supply-side circulating flow path in the refrigerant flow path, and finally the refrigerant is discharged from the discharge-side circulating flow path to the outside through the refrigerant discharge port. Ozone generation method.

9. An ozone generator, a first metal electrode in the form of a flat plate; a second metal electrode having a flat plate shape and arranged opposite to the first metal electrode, at least one of the first and second metal electrodes having a gas supply port at a center thereof; The semiconductor device further includes at least one electrode dielectric disposed adjacent to at least one of the first and second metal electrodes between the first and second metal electrodes, a discharge space is provided between the first and second metal electrodes and in contact with the at least one electrode dielectric; a voltage is applied between the first and second metal electrodes to generate a dielectric barrier discharge in the discharge space; a raw material gas is supplied to the discharge space via the gas supply port, and ozone gas is obtained by passing the raw material gas through the discharge space where the dielectric barrier discharge occurs; the discharge space includes a discharge central space communicating with the gas supply port and a discharge peripheral space existing around the discharge central space, the source gas is supplied from the discharge central space toward the discharge peripheral space, and an external space communicating with the discharge peripheral space serves as an ozone gas output space, At least one of the first and second metal electrodes is a channel-integrated metal electrode; the flow-path-integrated metal electrode has an electrode central region that overlaps with the discharge central space in a plan view, and an electrode peripheral region that overlaps with the discharge peripheral space in a plan view, the channel-integrated metal electrode has a coolant channel therein for allowing a coolant to flow, the coolant channel being formed from the peripheral region of the electrode to the central region of the electrode; The ozone gas obtained in the discharge space is output from the discharge peripheral space to the ozone gas output space, the coolant flow path has a peripheral priority coolant flow path structure that causes the coolant to flow to the electrode peripheral region prior to the electrode central region, The ozone generator is a refrigerant supply port for receiving the refrigerant from the outside; a refrigerant outlet for discharging the refrigerant to the outside, The refrigerant flow path is at least one bent flow path that changes flow path direction; a plurality of circular flow paths each of which allows the coolant to flow along a flow path direction; a pair of adjacent circulating flow paths among the plurality of circulating flow paths are connected via one of the at least one bent flow paths so that their flow paths are in opposite directions to each other; the plurality of circulating flow paths include a supply-side circulating flow path communicating with the refrigerant supply port and a discharge-side circulating flow path communicating with the refrigerant discharge port, and of the plurality of circulating flow paths, the supply-side circulating flow path is located farthest from the gas supply port and the discharge-side circulating flow path is located nearest to the gas supply port, The peripheral priority refrigerant flow path structure is a circulating flow path structure that causes the refrigerant to flow through the plurality of circulating flow paths and the at least one bent flow path so that the refrigerant is first supplied from the refrigerant supply port to the supply-side circulating flow path and finally discharged from the discharge-side circulating flow path to the outside through the refrigerant discharge port, Ozone generator.

10. 10. The ozone generator according to claim 9, the refrigerant flow path includes a plurality of partial refrigerant flow paths; each of the plurality of partial refrigerant flow paths includes the plurality of circulating flow paths and the at least one bent flow path; the supply-side circular flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant supply port; the discharge-side circular flow path of each of the plurality of partial refrigerant flow paths communicates with the refrigerant discharge port, Each of the plurality of partial refrigerant flow paths has the circulating flow path structure. Ozone generator.

11. 10. The ozone generator according to claim 9, the coolant supply port and the coolant discharge port do not overlap the discharge space in plan view; Ozone generator.

12. 12. The ozone generator according to claim 11, the coolant supply port and the coolant discharge port are provided in the same direction with respect to the discharge space in a plan view. Ozone generator.

13. 13. The ozone generator according to claim 9, wherein: The discharge space has a circular shape in a plan view. Ozone generator.

14. 13. The ozone generator according to claim 9, wherein: the channel-integrated metal electrode includes the first metal electrode; an insulating structure provided adjacent to the second metal electrode on the opposite side of the discharge space; a cooling plate provided adjacent to the insulating structure on the opposite side of the discharge space and having a cooling function. Ozone generator.

15. 15. The ozone generator according to claim 14, the cooling plate has a second coolant flow path therein through which a second coolant flows; the cooling plate has a cooling central region overlapping with the discharge central space in a plan view and a cooling peripheral region overlapping with the discharge peripheral space in a plan view, the second refrigerant flow path is formed from the cooling peripheral region to the cooling central region, and has a second periphery-priority refrigerant flow path structure that causes the second refrigerant to flow into the cooling peripheral region prior to flowing into the cooling central region; Ozone generator.

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