Dynamic vacuum seal system isolation ring for physical vapor deposition sputter applications
Patent Information
- Application Number
- US29/896853
- Authority / Receiving Office
- US · United States
- Patent Type
- Designs(United States)
- Current Assignee / Owner
- Filing Date
- 2023-07-07
- Publication Date
- 2026-01-20
- Estimated Expiration
- 2041-01-20
Smart Images

Figure USD1109856-D00000_ABST
Description
[0001] FIG. 1 is a bottom perspective view of a dynamic vacuum seal system isolation ring for physical vapor deposition sputter applications of the present invention;
[0002] FIG. 2 is a top perspective view thereof;
[0003] FIG. 3 is a bottom view thereof;
[0004] FIG. 4 is a top view thereof;
[0005] FIG. 5 is a bottom sectional view thereof;
[0006] FIG. 6 is a top sectional view thereof;
[0007] FIG. 7 is a right side view thereof, wherein the front view, rear view, and left side view are all mirror images thereof; and,
[0008] FIG. 8 is a cross-sectional inner view taken along line 8-8 of FIG. 3 thereof.
[0009] The ornamental design which is claimed is shown in solid lines in the drawings. Any broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a dynamic vacuum seal system isolation ring for physical vapor deposition sputter applications, as shown and described.
Citation Information
Patent Citations
Target assembly structure and magnetron sputtering system
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CN112713077A
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CN307102160S
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JP1102367S
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