Liquid coating method and liquid coating device

Abstract

[Problem] To solve the problem of degradation of coating quality that occurs when the width of a concave coating region changes between a start point and an end point of a coating path. [Solution] Provided is a liquid coating method for filling a liquid material into a coating region comprising a gap between an inner wall surface of a concave section (201) of a workpiece (111) and outer peripheries of components (202, 203) disposed in the concave section (201). The liquid coating method comprises: a position acquisition step in which positional coordinates of the components (202, 203) are acquired on the basis of a captured image that includes characteristic portions of the components (202, 203); a coating path setting step in which the coating region and a coating path for coating by a discharge device (102) are set on the basis of the positional coordinates; a coating parameter setting step in which the coating path of the discharge device (102) is divided on the basis of the positional coordinates and a coating quantity is set for each section of the divided coating path; and a coating step in which the discharge device (102) is moved along the coating path to coat the coating region with the liquid material. Also provided is a liquid coating method device for executing the liquid coating method.

Description

Liquid application method and liquid application device

[0001] The present invention relates to a liquid application method and a liquid application device, and more particularly to a liquid application method and a liquid application device for filling a liquid material into an application area defined by a gap between the inner wall surface of a recess and the outer periphery of a component.

[0002] There is a process in which a liquid material is filled around a plurality of electronic components (e.g., semiconductor elements) placed in recesses on a substrate, and the components are fixed by hardening the material (see, for example, FIG. 17 ). In this process, there is a problem that the liquid material cannot be filled appropriately due to variations in the placement positions of the electronic components.

[0003] As an example of an apparatus for applying paste in response to variations in the installation positions of electronic components, Patent Document 1 discloses a paste application apparatus that recognizes the positional relationship between a board and electronic components and controls a nozzle to apply paste in a paste pattern of a desired shape based on that positional relationship.

[0004] As an example of a device that fills according to the shape of the filling area, Patent Document 2 discloses a filling device that is equipped with a means for measuring the joint width using a CCD camera and a means for changing the amount of caulking agent discharged according to the amount of change in the joint width, and that fills the caulking agent while moving along the joints in the wall material.

[0005] JP 2011-177652 A JP 2002-364168 A

[0006] When the width of the concave coating area changes between the start point and the end point of the coating path, discharging the liquid material under the same conditions can result in areas where the amount of coating is either too much or too little, leading to a problem of reduced quality. Neither Patent Document 1 nor Patent Document 2 discloses a coating method for when the width of the coating area changes between the start point and the end point of the coating path.

[0007] The present invention aims to provide a liquid application method and liquid application device that can fill an appropriate amount of liquid material even when the width of a concave application area changes between the start point and the end point of the application path.

[0008] [1] The present invention provides a coating method for filling a coating area, defined as a gap between the inner wall surface of a recess in a workpiece and the outer periphery of a component placed in the recess, with a liquid material. The coating method includes: a position acquisition step for acquiring the position coordinates of the component based on a captured image including a characteristic portion of the component; a coating path setting step for setting the coating area and a coating path for coating by a dispensing device based on the position coordinates; a coating parameter setting step for dividing the coating path of the dispensing device based on the position coordinates and setting a coating amount for each divided coating path; and a coating step for moving the dispensing device along the coating path to apply the liquid material to the coating area. [2] In the coating method described above in [1], the coating path setting step may include dividing the coating area into divided coating areas and setting the divided coating paths for each divided coating area. [3] In the coating method described above in [2], the components may be composed of multiple components arranged with spaces between them in the same recess, and the coating area may include the areas between the multiple components. [4] In the coating method of [2] or [3] above, the recess may be polygonal in top view, the component may be polygonal in top view, and the position acquisition step may acquire position coordinates of all corners of the component and position coordinates of corners of the recess that are adjacent to each corner of the component. [5] In the coating method of [4] above, the coating path setting step may divide the coating area into divided coating areas that include corners of the component as vertices. [6] In the coating method of [4] or [5] above, the coating path setting step may divide the coating area into divided coating areas each consisting of a plurality of quadrangles. [7] In any of the coating methods of [4] to [6] above, the coating path setting step may set the coating path as a straight path that passes through the midpoint of the width of the divided coating area in a direction perpendicular to the coating path traveling direction.[8] In any of the coating methods [2] to [7] above, the coating method may further include an initial setting step, performed before the position acquisition step, of setting an initial coating area, an initial coating path, an initial coating amount, and a reference correction amount, wherein the coating parameter setting step sets the coating amount for each divided coating area based on the shape of the divided coating area and a coating amount calculated based on the reference correction amount. [9] In any of the coating methods [2] to [8] above, the coating parameter setting step may include dividing the divided coating area into secondary divided coating areas and setting a coating amount for each secondary divided coating area when the width of the divided coating area in a direction perpendicular to the direction of travel of the coating path differs between the start point and the end point.

[10] In any of the coating methods [2] to [9] above, the coating parameter setting step may include setting the coating amount by maintaining a constant discharge amount per unit time of the discharge device and setting a relative movement speed between the discharge device and the workpiece for each divided coating area.

[11] In any of the coating methods [2] to

[10] above, the coating parameter setting step may be characterized by setting the coating amount by setting one or more of the following [A] to [D]: [A] If the discharging device is a jet-type discharging device, the number of discharges per unit time; [B] If the discharging device is a screw-type discharging device, the number of screw rotations; [C] If the discharging device is a plunger-type discharging device, the moving speed of the plunger; [D] If the discharging device is an air-type discharging device, the pressure application time;

[12] In any of the coating methods [2] to

[11] above, the component may be a semiconductor element.

[13] In any of the coating methods [2] to

[12] above, the coating path setting step may be characterized by setting a coating height that does not reach the upper end of either the recess or the component.

[14] In any of the coating methods [1] to

[13] above, the position acquisition step may further comprise acquiring position coordinates of the recess based on an image including characteristic parts of the recess, and the coating parameter setting step may comprise dividing the coating path of the discharge device based on the position coordinates of the recess and the part, and setting a coating amount for each divided coating path.

[0009]

[15] A coating apparatus according to the present invention includes a dispensing device that dispenses a liquid material, a work table on which a workpiece having a recess is placed, a relative drive device that moves the dispensing device and the work table relative to one another, an imaging device that captures an image including a characteristic portion of a component placed in the recess of the workpiece with a gap therebetween, and a control device that controls the operation of the dispensing device, the relative drive device, and the imaging device, wherein the control device further includes: a position acquisition means that acquires position coordinates of the component based on the captured image; a coating path setting means that sets a coating path for the dispensing device based on the position coordinates; a coating parameter setting means that divides the coating path of the dispensing device based on the position coordinates and sets a coating amount for each divided coating path; and a coating means that moves the dispensing device along the coating path to apply the liquid material to the gap.

[16] In the coating apparatus according to the above

[15] , the coating path setting means may divide a coating area that has been set based on the position coordinates into divided coating areas and set the divided coating paths for each divided coating area.

[17] In the coating device of

[16] above, the coating parameter setting means may be configured to divide the divided coating area into secondary divided coating areas and set a coating amount for each secondary divided coating area when the width of the divided coating area in a direction perpendicular to the direction of travel of the coating path differs between the start point and the end point.

[18] In any of the coating devices of

[15] to

[17] above, the coating device may be configured to further include a length measuring device that measures the distance to the workpiece or component.

[19] In any of the coating devices of

[15] to

[18] above, the coating device may be configured to further include a calibration device that includes a test area and a measuring device.

[0010] According to the present invention, it is possible to fill an appropriate amount of liquid material even when the width of the concave application area changes between the start point and the end point of the application path.

[0011] 1 is a flowchart of an initial setting procedure according to an embodiment; FIG. 2 is a flowchart of a procedure for setting a reference image and image capture position coordinates; FIG. 3 is a flowchart of a procedure for setting an initial coating path; FIG. 4 is a flowchart of a procedure for setting initial coating parameters; FIG. 5 is a flowchart of a coating process according to an embodiment; FIG. 6 is a flowchart of a process for detecting component positional deviation; FIG. 7 is a flowchart of a procedure for setting a corrected coating path; FIG. 8 is a flowchart of a procedure for resetting coating parameters; FIG. 9 is a flowchart of a correction procedure when the width of divided coating regions is not constant; FIG. 10 is a diagram illustrating characteristic parts of an outline and coating regions according to an embodiment; FIG. 11 is a diagram illustrating setting an initial coating path according to an embodiment; FIG. 12 is a diagram illustrating variation in component installation position according to an embodiment; FIG. 13 is a diagram illustrating setting a corrected coating path according to an embodiment; FIG. 14 is a diagram illustrating a method for correcting coating parameters for divided coating regions Q11 having a non-constant width; FIG. 15 is a diagram illustrating a method for correcting coating parameters for divided coating regions Q15 having a non-constant width; FIG. 16 is a perspective view of a coating device according to an embodiment; FIG. 17 is a perspective view illustrating a substrate having a recess to be filled with liquid material.

[0012] The following describes embodiments of the present invention. The liquid application method of the present invention is performed on a workpiece including a member having a recess and one or more components placed in the recess. The member having the recess is, for example, a substrate or a block-shaped member, and the recess has a shape such as a triangle, a polygon with more than one side, a circle, or an ellipse when viewed from above. The component placed in the recess is, for example, an electronic component having a shape such as a triangle, a polygon with more than one side, a circle, or an ellipse when viewed from above.

[0013] An embodiment of the present invention will be described using as an example a case where two rectangular components (202, 203) (for example, semiconductor elements) are placed in a rectangular recess 201 provided in a substrate 111 as shown in FIG.

[0014] <Coating Method> In the coating method according to this embodiment, an initial setting step is first performed, and then the coating step is executed. Details are described below. (1) Initial Setting Step Prior to the execution of coating, initial settings required for coating are performed. As shown in FIG. 1 , the initial setting step mainly includes setting a reference image and image capture position coordinates (S101), setting an initial coating path (S102), setting initial coating parameters (S103), and setting a reference correction amount (S104). Details of each step are described below.

[0015] (1-1) Setting the Reference Image and Image Capturing Position Coordinates (S101) In this embodiment, the coating area Q is an area surrounding the entire periphery of the components 202 and 203 when viewed from above, and is the hatched area between the recess 201 of the substrate 111 and the components 202 and 203, as shown in Figure 10. To define this coating area Q, characteristic portions of the contours of the recess 201 of the substrate 111 and the components 202 and 203 are extracted by image processing. In detail, an image including the characteristic portions of the contours, namely, the four corners A1 to A4 of the recess 201 of the substrate 111, the four corners B1 to B4 of the first component 202, and the four corners C1 to C4 of the second component 203, are captured, and their coordinate values ​​are identified by image processing.

[0016] The procedure for setting the reference image and image capture position coordinates (S101) will be described with reference to FIG. 2 . (S201) An uncoated substrate 111 with components 202 and 203 properly installed in the recess 201 is placed on the work table. (S202) The imaging device (camera) 122 is moved to an initial imaging position so that the corner of the selected recess 201 or component 202 or 203 is positioned at the center of the screen. Images of the recess 201 or the corner of the component 202 or 203 may be captured in any order. (S203) An image of the substrate 111 is acquired by the imaging device 122, and the coordinate values ​​(X, Y) where the target corner is at the center of the screen are stored in the storage device of the control device 113. (S204) Steps S202 and S203 are repeated until images and coordinates have been acquired for all corners of the recess 201 and components 202 and 203. The image with the corner portion located in the center acquired in steps S202 to S204 and the coordinate values ​​of the imaging device become the reference image used for image recognition, which will be described later, and the imaging position coordinates when the imaging device 122 images the substrate 111 that is the target of the coating operation.

[0017] The substrate 111 used in S101 may be a substrate actually used in production, or a dummy substrate prepared specifically for this purpose. The coordinate values ​​of the recess 201 or the corners of the components 202 and 203 may be calculated and set using dimensional data at the time of design.

[0018] 10, if the corners of recess 201 of substrate 111 initially set in S101 are designated A1 to A4, the corners of left-side component 202 are designated B1 to B4, and the corners of right-side component 203 are designated C1 to C4, then the area surrounded by A1-A2-A3-A4, excluding the areas surrounded by B1-B2-B3-B4 and C1-C2-C3-C4 (hatched area), becomes coating area Q. A coating path for discharge device 102 is set for this coating area.

[0019] The procedure for setting the initial application path will be described with reference to Figure 3. (S301) Draw a straight line between each of the corners of each component that do not face each other, i.e., the outer corners (B1, B4, C2, C3), and the corners (A1, A2, A3, A4) of the recess 201 that are closest to those corners. In the example of Figure 11, four straight lines, shown as dotted lines, are drawn between A1 and B1, A2 and C2, A3 and C3, and A4 and B4, dividing the application area Q into multiple divided application areas. (S302) Draw a straight line between each of the two closest adjacent corners of each component, i.e., the inner corners (B2, B3, C1, C4). In the example of Figure 11, two straight lines, shown as dotted lines, are drawn between B2 and C1 and between B3 and C4, dividing the application area Q into multiple divided application areas.

[0020] (S303) Perpendicular lines are drawn from each of the four inner corners (B2, B3, C1, and C4) along the lines drawn in S302 to the two nearest sides (A1-A2 and A3-A4) of recess 201. In the example of FIG. 11, four straight lines, indicated by dotted lines, are drawn between B2 and A5, between C1 and A6, between C4 and A7, and between B3 and A8 to divide application area Q into a plurality of divided application areas. In FIG. 11, the intersections of the perpendicular lines with the sides of recess 201 are designated A5, A6, A7, and A8.

[0021] (S304) The points (hereinafter referred to as "midpoints") that are the intermediate positions of each of the straight lines (A1-B1, A2-C2, A3-C3, A4-B4, B2-C1, B3-C4, B2-A5, C1-A6, C4-A7, B3-A8) drawn in S301 to S303 above are calculated. In the example of FIG. 11, ten midpoints D1 to D10 are set. (S305) Unit coating paths are set by drawing straight lines between each of the midpoints calculated in S304 above. In this embodiment, nine unit coating paths are set, as indicated by the dashed dotted lines in FIG. 11. Furthermore, multiple unit coating paths that are on the same straight line are grouped together, and the following five divided coating paths are set.

[0022] A first divided coating path consisting of straight lines E1, E2, and E3 connecting midpoints D1, D2, D3, and D4. A second divided coating path consisting of a straight line E4 connecting midpoints D4 and D5. A third divided coating path consisting of straight lines E5, E6, and E7 connecting midpoints D5, D6, D7, and D8. A fourth divided coating path consisting of a straight line E8 connecting midpoints D8 and D1. A fifth divided coating path consisting of a straight line E9 connecting midpoints D9 and D10.

[0023] In this embodiment, the start point and end point are set for each divided coating path as follows: The first divided coating path (E1-E2-E3) has D1 as the start point and D4 as the end point. The second divided coating path (E4) has D4 as the start point and D5 as the end point. The third divided coating path (E5-E6-E7) has D8 as the start point and D5 as the end point. The fourth divided coating path (E8) has D1 as the start point and D8 as the end point. The fifth divided coating path (E9) has D9 as the start point and D10 as the end point. The above coating path setting procedure can be explained as dividing one large coating area into divided coating areas made up of a plurality of rectangles, and setting coating paths for each divided coating area.

[0024] In this embodiment, unit coating paths that are aligned in the same direction (e.g., the X direction) are collectively set as divided coating paths, but divided coating paths with arbitrary start and end points may be set. For example, start and end points may be set for each of unit coating paths E1, E2, and E3, or divided coating paths may be set corresponding to rectangular divided coating areas consisting of areas Q2, Q9, and Q6. Furthermore, start and end points may be set so that all unit coating paths are connected in a single stroke.

[0025] The method of dividing the coating area into divided coating areas is not limited to the division rules set forth in S301 to S303 above, and divided coating areas of any shape can be set. For example, instead of the division rule of S301, perpendicular lines may be drawn from each corner of parts 202 and 203 to the sides of recess 201, and the divided coating areas may be set so that all divided coating areas are rectangular.

[0026] (1-3) Setting Initial Application Parameters (S103) Initial application parameters are set for application using the application path set in S102 above. It is recommended that the initial application parameters be set for each divided application path set above. The application areas corresponding to the unit application paths E1 to E9 are referred to as divided application areas Q1 to Q9. The procedure for setting the initial application parameters will be described with reference to Figure 4. (S401) The application height H is set. As shown in Figure 17, the application height H is set to be equal to or less than the depth of the recess 201 and the height of the components 202 and 203. Note that the application height H is the same for the divided application areas Q1 to Q9. (S402) The discharge amount (e.g., volume) per unit time of the discharge device 102 is set. Here, the discharge amount per unit time may be set by measuring the discharge amount during a test discharge using the discharge device 102. (S403) The top surface projected area of ​​the selected divided coating area is calculated from the coordinate values ​​of the corners of the recess 201 and components 202 and 203 that constitute the vertices of the selected divided coating area or areas. (S404) The volume (coating amount) of the selected divided coating area is calculated from the coating height set in S401 and the area calculated in S403. (S405) The movement speed of the discharge device 102 along the unit coating path is calculated from the discharge amount per unit time set in S402, the volume (coating amount) calculated in S404, and the length of the unit coating path corresponding to the selected divided coating area. Note that the movement speed of the discharge device 102 refers to the relative movement speed between the discharge device 102 and the substrate 111. The desired coating amount is achieved by adjusting the movement speed of the discharge device 102, which has a constant discharge amount per unit time. (S406) S403 to S405 are performed for all divided coating areas.

[0027] The initial coating parameter setting process in steps S403 to S405 will be described using the example of straight lines E1 to E9. First divided coating path (E1-E2-E3) After calculating the top surface projected area from the coordinate values ​​of the corners A1, A2, B1, and C2 of the trapezoidal coating area (Q1+Q2+Q3) corresponding to the first divided coating path, the volume of the area obtained by adding together the divided coating areas Q1 to Q3 is calculated using the coating height H. The movement speed of the discharge device 102 is calculated from the total volume of the divided coating areas Q1 to Q3, the preset discharge amount per unit time, and the length of the first divided coating path (the distance between midpoints D1 and D4), and the initial coating parameters are set.

[0028] Second divided coating path (E4) After calculating the top surface projected area from the coordinate values ​​of corners A2, A3, C2, and C3 of the trapezoidal coating area Q4 corresponding to the second divided coating path, the volume of the divided coating area Q4 is calculated using the coating height H. The movement speed of the discharge device 102 is calculated from the volume of the divided coating area Q4, a preset discharge amount per unit time, and the length of the second divided coating path (distance between D4 and D5), and initial coating parameters are set.

[0029] Third divided coating path (E5-E6-E7) After calculating the top surface projected area from the coordinate values ​​of corners A3, A4, B4, and C3 of the trapezoidal coating area (Q5+Q6+Q7) corresponding to the third divided coating path, the volume of the area obtained by adding together the divided coating areas Q5 to Q7 is calculated using the coating height H. The movement speed of the discharge device 102 is calculated from the total volume of the divided coating areas Q5 to Q7, a preset discharge amount per unit time, and the length of the third divided coating path (distance between D5 and D8), and initial coating parameters are set.

[0030] Fourth divided coating path (E8) After calculating the top surface projected area from the coordinate values ​​of the corners A1, A4, B1, and B4 of the trapezoidal coating area Q8 corresponding to the fourth divided coating path, the volume of the divided coating area Q8 is calculated using the coating height H. The movement speed of the discharge device 102 is calculated from the volume of the divided coating area Q8, the preset discharge amount per unit time, and the length of the fourth divided coating path (distance between D1 and D8), and initial coating parameters are set.

[0031] Fifth divided coating path (E9) After calculating the top surface projected area from the coordinate values ​​of corners B2, B3, C1, and C4 of the rectangular coating area Q9 corresponding to the fifth divided coating path, the volume of the divided coating area Q9 is calculated using the coating height H. The movement speed of the discharge device 102 is calculated from the volume of the divided coating area Q9, the preset discharge amount per unit time, and the length of the fifth divided coating path (distance between D9 and D10), and initial coating parameters are set.

[0032] The procedure for calculating the movement speed of the above-mentioned ejection device 102 can be explained as dividing one large application area into multiple small divided application areas, calculating the amount of liquid material required for each divided application area, and setting parameters (movement speed of the ejection device and ejection amount per unit time) for applying that amount.

[0033] In this embodiment, the straight lines E1-E2-E3 and E5-E6-E7 are considered to be a single straight line without bends (in other words, there is no change in width) at the time of initial setting, and are therefore treated together as a single divided coating path, but each of the straight lines connecting the two midpoints may also be set as a divided coating path.

[0034] In this embodiment, the volume per unit time of the dispensing device 102 is used as the amount dispensed per unit time. However, mass (or weight) may be used instead of volume. If the density of the liquid material is known, volume and mass can be converted into each other. Furthermore, the amount dispensed per unit length of the dispensing device 102 may be used instead of the amount dispensed per unit time. In this embodiment, the application height H is set as a predetermined value. However, the depth of the recess 201 on the substrate 111 and the height of the component may be actually measured and set based on the measured values. The application height H is set to a height that prevents the liquid material from climbing up onto the top surfaces of the substrate and the component, in other words, a height that does not exceed the depth of the recess 201 or the heights of the components 202 and 203 (see FIG. 17 ). Preferably, the application height H is set to a height obtained by subtracting the buffer height (e.g., 10% or 20% of the lower of the depth of the recess 201 and the heights of the components 202 and 203) from the lower of the depth of the recess 201 and the heights of the components 202 and 203.

[0035] In this embodiment, the movement speed of the discharge device 102 is calculated for each divided application path, but the movement speed may be set to a default value (a constant value) and the discharge amount per unit time of the discharge device 102 to achieve the desired application may be calculated for each divided application path.

[0036] (1-4) Setting the Reference Correction Amount (S104) The initial application parameters are effective when the components 202 and 203 are positioned without misalignment. However, in reality, there may be misalignment between the components 202 and 203. Therefore, in this embodiment, a reference correction amount is set in advance to perform corrections to accommodate variations in the installation positions of the components 202 and 203. In this embodiment, a reference correction amount for the application amount is set in response to an increase or decrease in the width of the application area. For example, the reference correction amount for the application amount is set such that an increase or decrease of 0.1 mg is applied for a 0.5 mm increase or decrease in the width of the application area. In this setting, for example, if the width of the application area increases by 2 mm relative to the initial setting, the application amount is increased by 0.4 mg, and if the width decreases by 1 mm relative to the initial setting, the application amount is decreased by 0.2 mg.

[0037] (2) Execution of the Coating Process After the initial setting (S101 to S104) in (1) above is completed, the coating process is started. As shown in Fig. 5, the execution of the coating process mainly consists of detecting component misalignment (S501), determining component misalignment (S502), correcting the coating path (S503), correcting the coating parameters (S504), and executing the coating operation (S505). Each procedure described below is executed by the control device 113 executing the coating program.

[0038] (2-1) Detection of component positional deviation (S501) Before starting application to the board 111, image processing is performed on the image captured by the imaging device 122 to detect whether there is any deviation in the installation positions of the components 202 and 203. For example, as shown in Figure 12, assume that the left-side component 202 is installed out of alignment, with corners B1 to B4 at positions B5 to B8, and the right-side component 203 is installed out of alignment, with corners C1 to C4 at positions C5 to C8. When the installation positions of the components 202 and 203 are misaligned in this way, the width of the application area becomes inconsistent, and it becomes necessary to correct the application path.

[0039] The process for detecting misalignment of a component (S501) will be described with reference to FIGS. 6 and 12. Assume that the substrate 111 to be coated has been loaded into the coating apparatus 101. (S601) The imaging device 122 is moved to one of the imaging position coordinates set in S101, and an image of one corner (e.g., B5) of the recess 201 or the components 202 and 203 is captured. (S602) The image of the corner captured in S601 is compared with the reference image (e.g., B1) set in S101, and the corresponding corner (e.g., B5) is identified. (S603) Once the corresponding corner (e.g., B5) has been identified in S602, its coordinate values ​​(X, Y) are acquired and stored in the storage device of the control device 113. (S604) S601 to S603 are repeated for all remaining corners of the recess 201 and the components 202 and 203. (S605) The relative positional relationship between the recess 201 and the components 202 and 203 is identified and stored in a storage device from the acquired coordinate values ​​of the recess 201 and the corners of the components 202 and 203. Here, the relative positional relationship between the recess 201 and the components 202 and 203 is identified because there may be a misalignment in the installation position not only of the components 202 and 203 but also of the recess 201.

[0040] (2-2) Determination of Positional Misalignment (S502) Based on the detection result of S501, it is determined whether the misalignment in the relative positional relationship between the recess 201 and the components 202, 203 exceeds a preset tolerance. If the misalignment exceeds the tolerance, the process proceeds to S503. If the misalignment does not exceed the tolerance, the process proceeds to S505. Note that if the misalignment is too large to be corrected, the process may be stopped and an alarm may be issued.

[0041] (2-3) Correction of Coating Path (S503) When misalignment of components 202 and 203 that exceeds the tolerance occurs, as shown in Fig. 12, correction of the coating path is necessary. This is because, as shown in Fig. 13, the width of the coating area formed by corners B5 to B8 of component 202, corners C5 to C8 of component 203, and corners A1 to A4 of recess 201 in board 111 is not constant along each side of recess 201. In other words, it is necessary to correct the initial setting coating path (E1 to E8) in Fig. 11 to the coating path (E10 to E17) shown in Fig. 13 in accordance with the misalignment of components 202 and 203.

[0042] The coating path correction procedure (S503) will be described with reference to FIG. 7. The procedure for setting a corrected unit coating path (hereinafter referred to as the "corrected unit coating path") is the same as the procedure for setting the initial coating path shown in FIG. 3. (S701) Draw straight lines between the corners of the components 202 and 203 that do not face each other, i.e., the outer corners (B5, B8, C6, C7), and the corners (A1, A2, A3, A4) of the recess 201 that are closest to those corners. In the example of FIG. 13, four straight lines, shown as dotted lines, are drawn between A1 and B5, A2 and C6, A3 and C7, and A4 and B8 to divide the coating area Q into multiple divided coating areas. (S702) Draw straight lines between the closest adjacent corners (B6, B7, C5, C8) of each component. In the example of FIG. 13, two straight lines shown as dotted lines are drawn between B6 and C5 and between B7 and C8 to divide the application area Q into a plurality of divided application areas.

[0043] (S703) Perpendicular lines are drawn from each of the four inner corners (B6, B7, C5, and C8) along the lines drawn in S702 to the two nearest sides (A1-A2 and A3-A4) of the recess. In the example of Figure 13, four straight lines, shown as dotted lines, are drawn between B6 and A9, between C5 and A10, between C8 and A11, and between B7 and A12 to divide the application area Q into multiple divided application areas. In Figure 13, the intersections of each perpendicular line with the sides of the recess 201 are designated as A9, A10, A11, and A12.

[0044] (S704) The intermediate points (midpoints) of each of the straight lines (A1-B5, A2-C6, A3-C7, A4-B8, B6-C5, B7-C8, B6-A9, C5-A10, C8-A11, B7-A12) drawn in S701 to S703 are calculated. In the example of FIG. 13, ten midpoints D11 to D20 are set. (S705) Straight lines are drawn between each of the midpoints calculated in S704, and corrected unit coating paths are set. In this embodiment, nine corrected unit coating paths are set, as indicated by the dashed-dotted lines in FIG. 13. In addition, the following five corrected divided coating paths are set, each grouping together multiple corrected unit coating paths that are aligned in approximately the same direction.

[0045] a first corrected divided coating path consisting of straight lines E10, E11, and E12 connecting midpoints D11, D12, D13, and D14; a second corrected divided coating path consisting of straight line E13 connecting midpoints D14 and D15; a third corrected divided coating path consisting of straight lines E14, E15, and E16 connecting midpoints D15, D16, D17, and D18; a fourth corrected divided coating path consisting of straight line E17 connecting midpoints D18 and D11; and a fifth corrected divided coating path consisting of straight line E18 connecting midpoints D19 and D20.

[0046] Furthermore, in this embodiment, the start point and end point are set for each corrected divided coating path as follows: The first corrected divided coating path (E10-E11-E12) has D11 as the start point and D14 as the end point. The second corrected divided coating path (E13) has D14 as the start point and D15 as the end point. The third corrected divided coating path (E14-E15-E16) has D18 as the start point and D15 as the end point. The fourth corrected divided coating path (E17) has D11 as the start point and D18 as the end point. The fifth corrected divided coating path (E18) has D19 as the start point and D20 as the end point. The above-described coating path correction procedure can be described as dividing one large coating area into multiple smaller divided coating areas, and correcting the coating path for each divided coating area.

[0047] According to the above procedure, by setting a coating path that matches the shape of the coating area, it is possible to fill the liquid material without excess or deficiency, even if the coating area has bends or widths that vary due to misalignment in the installation positions or external shape tolerances of the components 202 and 203. Furthermore, by setting a coating path that connects the midpoints of the lines that divide the coating area, the coating path passes through approximately the center of the coating area, so the liquid material can be filled evenly into the coating area consisting of the gaps between the recess 201 and the components 202 and 203.

[0048] In this embodiment, the application path is set as shown in Figure 13, but as with the initial setting (see S102 above), it is not limited to this and any other application path may be set. Similarly, the start point and end point may be set arbitrarily. Furthermore, as with the initial setting (see S102 above), the lines connecting the sides or corners of the recess 201 with the corners of the components 202 and 203 (in other words, the lines dividing the application area) may be drawn in any way, not limited to the manner described in S701 to S703 above.

[0049] (2-4) Correction of Coating Parameters (S504) The procedure for correcting the initially set coating parameters will be described with reference to FIG. 8 . (S801) From the coordinate values ​​of the corners of the divided coating area including a selected corrected unit coating path, the width of the corresponding divided coating area in the direction perpendicular to the corrected unit coating path is calculated. Here, any corrected unit coating path may be selected as the corrected unit coating path. (S802) If the widths of the start point and end point of the selected corrected unit coating path are the same, proceed to S803; if they are different, proceed to process A shown in FIG. 9 . (S803) A difference value between the width of the divided coating area calculated in S801 and the width of the corresponding divided coating area at the initial setting is calculated. (S804) The coating amount initially set for the divided coating area is corrected based on the difference value of the width of the divided coating area calculated in S803 and the reference correction amount set in S104 above. (S805) The movement speed of the discharge device 102 is calculated from the application amount corrected in S804, the discharge amount per unit time set in S402, and the length of the selected corrected unit application path, and the application parameters are corrected. The corrected application parameters may be only parameters related to the movement speed of the discharge device 102, or may also include correction of discharge adjustment parameters according to the type of discharge device, which will be described later. (S806) S801 to S805 are repeated for all corrected unit application paths.

[0050] The correction process of the application parameters in S801 to S805 will be described using the example of paths E10, 12 to 14, and 16 to 18 shown in Fig. 13. Note that, hereinafter, the notation X( ) represents the X coordinate, and the notation Y( ) represents the Y coordinate.

[0051] Corrected Unit Application Path E10: The width Y(A9)-Y(B6) of the divided application region Q10 that includes the corrected unit application path E10 in a direction perpendicular to the corrected unit application path E10 is calculated, and the difference between this and the corresponding width Y(A5)-Y(B2) of the divided application region Q1 at the initial setting (see FIG. 11) is calculated. The application amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected application amount, the discharge amount per unit time set in S103, and the length X(D12)-X(D11) of the corrected unit application path E10, and the application parameters for the corrected unit application path E10 are reset.

[0052] Corrected Unit Application Path E12: The width Y(A10)-Y(C5) of the divided application area Q12 that includes the corrected unit application path E12 is calculated in a direction perpendicular to the corrected unit application path E12, and the difference between this and the corresponding width Y(A6)-Y(C1) of the divided application area Q3 at the initial setting (see FIG. 11) is calculated. The application amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected application amount, the discharge amount per unit time set in S103, and the length X(D14)-X(D13) of the corrected unit application path E12, and the application parameters for the corrected unit application path E12 are reset.

[0053] Corrected Unit Application Path E13: The width X(A2)-X(C6) of the divided application region Q13 that includes the corrected unit application path E13 is calculated, and the difference between this and the corresponding width X(A2)-X(C2) of the divided application region Q4 at the initial setting (see FIG. 11) is calculated. The application amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected application amount, the discharge amount per unit time set in S103, and the length Y(D14)-Y(D15) of the corrected unit application path E13, and the application parameters for the corrected unit application path E13 are reset.

[0054] Corrected Unit Application Path E14: The width Y(C8)-Y(A11) of the divided application region Q14 that includes the corrected unit application path E14 is calculated in a direction perpendicular to the corrected unit application path E14, and the difference between this and the corresponding width Y(C4)-Y(A7) of the divided application region Q5 at the initial setting (see FIG. 11) is calculated. The application amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected application amount, the discharge amount per unit time set in S103, and the length X(D15)-X(D16) of the corrected unit application path E14, and the application parameters for the corrected unit application path E14 are reset.

[0055] Corrected Unit Application Path E16: The width Y(B7)-Y(A12) of the divided application region Q16 that includes the corrected unit application path E16 is calculated in a direction perpendicular to the corrected unit application path E16, and the difference between this and the corresponding width Y(B3)-Y(A8) of the divided application region Q7 at the initial setting (see FIG. 11) is calculated. The application amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected application amount, the discharge amount per unit time set in S103, and the length X(D17)-X(D18) of the corrected unit application path E16, and the application parameters for the corrected unit application path E16 are reset.

[0056] Corrected unit coating path E17: The width X(B8)-X(A4) of the divided coating region Q17 that includes the corrected unit coating path E17 in a direction perpendicular to the corrected unit coating path E17 is calculated, and the difference between this and the corresponding width X(B4)-X(A4) of the divided coating region Q8 at the initial setting (see FIG. 11) is calculated. The coating amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected coating amount, the discharge amount per unit time set in S103, and the length Y(D11)-Y(D18) of the corrected unit coating path E17, and the coating parameters for the corrected unit coating path E17 are reset.

[0057] Corrected Unit Coating Path E18: The width X(C5)-X(B6) of the divided coating region Q18 that includes the corrected unit coating path E18 is calculated, and the difference between this and the corresponding width X(C1)-X(B2) of the divided coating region Q9 at the initial setting (see FIG. 11) is calculated. The coating amount initially set in S103 is corrected based on this difference and the reference correction amount set in S104. The movement speed of the discharge device 102 is calculated from this corrected coating amount, the discharge amount per unit time set in S103, and the length Y(D19)-Y(D20) of the corrected unit coating path E18, and the coating parameters for the corrected unit coating path E18 are reset.

[0058] Referring to FIG. 9, the correction procedure for when the width of the divided coating area in the direction perpendicular to the coating path is not constant will be described. (S901) A selected divided coating area is further divided into several smaller areas (hereinafter referred to as "secondary divided coating areas"). (S902) The difference between the width at the start and end of the selected secondary divided coating area is calculated. (S903) The correction amount for the coating amount for the selected secondary divided coating area is calculated based on the difference calculated in S902 and the reference correction amount set in S104 above. (S904) The movement speed of the discharge device 102 is calculated from the coating amount obtained by adding the correction amount calculated in S903 to the coating amount for the secondary divided coating area assuming that the width at the start side is constant and not changing, the discharge amount per unit time set in S103 above, and the length of the corrected divided coating path, and the coating parameters are corrected. (S905) Steps S902 to S904 above are performed for all secondary divided coating areas. When correction of the coating parameters for all the secondary divided coating areas is completed, the process returns to S806.

[0059] The coating parameter resetting process in steps S901 to S905 will be described using the examples of corrected unit coating paths E11 and E15 with reference to Figure 14. Corrected Unit Coating Path E11 Figure 14 is an enlarged view of the divided coating area Q11 corresponding to the corrected unit coating path E11. The divided coating area Q11 is divided into four areas in a direction perpendicular to the side A9-A10 of the recess 201, so that the width in the X direction is the same. The four divided areas are called secondary divided coating areas Q111 to Q114. In this case, the intersections of the side A9-A10 of the recess 201 and the dividing line of the secondary divided coating area Q111-114 are A13, A14, and A15, the intersections of the correction unit coating path E11 and the dividing line of the secondary divided coating area Q111-114 are G1, G2, and G3, and the intersections of the straight line B6-C5 and the dividing line of the secondary divided coating area Q111-114 are F1, F2, and F3.

[0060] The difference between the width Y(A9)-Y(B6) on the start side and the width Y(A13)-Y(F1) on the end side of the first secondary divided coating region Q111 on the start side is calculated. A correction amount is calculated from this difference and the reference correction amount set in S104. The coating amount is then calculated by adding the calculated correction amount to the coating amount ((Y(A9)-Y(B6))*(X(A13)-X(A9))*(coating height H)) that would be obtained if the width Y(A9)-Y(B6) on the start side of the secondary divided coating region Q111 remained constant from the start point D12 to the end point G1. The movement speed of the discharge device 102 in the secondary divided coating region Q111 is calculated from this calculated coating amount, the discharge amount per unit time set in S103, and the length D12-G1 of the coating path. Similarly, the movement speed of the discharge device 102 is calculated for the second secondary divided coating area Q112, the third secondary divided coating area Q113, and the fourth secondary divided coating area Q114, and the coating parameters are corrected. The coating parameters are adjusted so that the calculated movement speed of the discharge device 102 is achieved for each of the secondary divided coating areas Q111 to Q114.

[0061] Correction Unit Coating Path E15: Figure 15 is an enlarged view of the divided coating area Q15 corresponding to the correction unit coating path E15. The divided coating area Q15 is divided into four areas perpendicular to the sides A11-A12 of the recess 201 so that the widths in the X direction are the same. These four divided areas are called secondary divided coating areas Q151-Q154. In this case, the intersections of the sides A11-A12 of the recess 201 and the respective dividing lines are called A16, A17, and A18, the intersections of the correction unit coating path E15 and the dividing lines of the secondary divided coating areas Q151-Q154 are called G4, G5, and G6, and the intersections of the straight line B7-C8 and the dividing lines of the secondary divided coating areas Q151-Q154 are called F4, F5, and F6. The difference between the width Y(B7)-Y(A12) on the start side of the first secondary divided coating area Q151 on the start side and the width Y(F4)-Y(A16) on the end side is calculated. A correction amount is calculated from this difference and the reference correction amount set in step S104. The coating amount is then calculated by adding the calculated correction amount to the coating amount ((Y(B7)-Y(A12)) * (X(A16)-X(A12)) * (coating height H)) that would be obtained if the width Y(B7)-Y(A12) on the start side of the secondary divided coating area Q151 remained constant from the start point D17 to the end point G4. The movement speed of the discharge device 102 in the secondary divided coating area Q151 is calculated from this calculated coating amount, the discharge amount per unit time set in step S103, and the length D17-G4 of the coating path, and the coating parameters are corrected. Similarly, the movement speed of the discharge device 102 is calculated for the second secondary divided coating area Q152, the third secondary divided coating area Q153, and the fourth secondary divided coating area Q154, and the coating parameters are corrected. The coating parameters are adjusted so that the calculated movement speed of the discharge device 102 is achieved for each of the secondary divided coating areas Q151 to Q154.

[0062] In this embodiment, the divided coating area is divided into four to form the secondary divided coating areas, but the number of secondary divided coating areas can be any number. Also, the width in the X direction may not be divided equally, but the size of the width in the X direction may be changed for each secondary divided coating area.

[0063] The above-mentioned procedure for correcting the application path can be explained as dividing one divided application area into multiple secondary divided application areas, calculating the amount of liquid material required for each secondary divided application area, and setting application parameters (movement speed of the ejection device and ejection amount per unit time) for applying that amount.

[0064] According to the above procedure, even if there is a misalignment in the installation positions of parts 202 and 203 and the coating area varies in width, by setting the coating amount in units of divided coating area and secondary divided coating area, it is possible to coat coating areas consisting of gaps with complex shapes with the liquid material filled without excess or deficiency.

[0065] (2-5) Execution of Coating Work (S505) Coating work is performed while moving the discharge device 102 at the movement speed corrected in S504 along the coating path corrected in S503. This allows the liquid material to be filled without excess or deficiency even if the installation positions of the components 202 and 203 are misaligned, causing a change in the width of the divided coating areas.

[0066] (2-6) Executing the coating operation on uncoated workpieces (S506) The above steps S501 to S505 are executed for each substrate until the coating operation is completed on all substrates (workpieces) 111. When the type of substrate or the type of liquid material is changed, the initial settings in (1) above are executed again.

[0067] According to the present invention described above, it is possible to fill the liquid material without excess or deficiency even when the application area has a gap with a complex shape, such as a bend or a wide or narrow width, due to misalignment of the components 202, 203 placed in the recess 201 of the substrate 111 or the external tolerance of the components 202, 203 or the recess 201. From another perspective, since the liquid material can be filled to match the misaligned components placed in the recess, a high-precision component mounting device is not required, thereby reducing equipment costs. Furthermore, it is possible to reduce the number of products deemed defective due to misaligned components, thereby improving yield.

[0068] In this embodiment, an example is shown in which two components are placed in a recess in the substrate, but coating can be performed by making similar settings and corrections even if three or more components are placed.

[0069] In this embodiment, the type of ejection device is not particularly limited, but examples that can be used include a jet type that ejects by the action of a rod that reciprocates within a liquid chamber, a screw type that ejects by the action of a screw that rotates within a liquid chamber, a plunger type that ejects by the action of a plunger that slides within a measuring section, and an air type that ejects by the action of compressed gas. In these ejection devices, when setting or adjusting the ejection amount per unit time, the ejection adjustment parameters can be the number of ejections per unit time (or the number of reciprocations of the rod, sometimes referred to as "frequency") for jet types, the number of screw rotations for screw types, the movement speed of the plunger for plunger types, and the pressure application time for air types.

[0070] <Coating Apparatus> A coating apparatus 101 for carrying out the liquid coating method of this embodiment will be described. As shown in Fig. 16, the coating apparatus 101 of this embodiment is configured to include a discharge device 102 that discharges a liquid material, and a relative drive device 103 that moves the discharge device 102 relative to a work table 110 on which a substrate 111 is placed.

[0071] The relative drive device 103 is composed of an X drive device 104 that moves the discharge device 102 and the work table 110 relatively in the X direction 107, a Y drive device 105 that moves the discharge device 102 and the work table 110 relatively in the Y direction 108, and a Z drive device 106 that moves the discharge device 102 and the work table 110 relatively in the Z direction 109. In this embodiment, the Y drive device 105 is provided on the top surface of the housing 112 to extend in the Y direction 108, and the X drive device 104 is provided on the Y drive device 105 to extend in the X direction 107. The Z drive device 106 is provided on the X drive device 104, and the discharge device 102 is provided on the Z drive device 106. As a result, the discharge device 102 and the substrate 111 on the work table 110 can be moved relatively in the X direction 107, the Y direction 108, and the Z direction 109. The relative driving device 103 is controlled by the control device 113 and can move the nozzle tip of the discharge device 102 to any position on the substrate 111 at any speed. As the relative driving device 103, for example, a device combining an electric motor such as a servo motor or a stepping motor with a ball screw, a device using a linear motor, or a device that transmits power via a belt or chain can be used.

[0072] The discharge device 102 is equipped with a nozzle (not shown) having a discharge port at its tip for discharging the liquid material, and its operation is controlled by the control device 113. The control device 113 can control the discharge device 102 in conjunction with the operation of the relative drive device 103. The discharge device 102 is moved by the relative drive device 103 so that the nozzle is positioned above the recess 201 of the workpiece 111, and discharges the liquid material from the discharge port opening downward toward the recess 201. Details of the control device 113 will be described later.

[0073] The coating apparatus 101 of this embodiment includes a conveying device 118. The conveying device 118 is composed of a rail 119, a transmission element (not shown), and a conveying drive device 120. The rail 119 is composed of two members extending parallel to the Y direction 108. The rail 119 is installed so that the distance between the two members is the same as the distance between one side of the substrate 111. The rail 119 is provided with a transmission element that acts to convey the substrate 111 along the extension direction of the rail 119. The transmission element may be a belt or a chain. The transmission element is driven by a conveying drive device 120. The conveying drive device 120 may be an electric motor such as a servo motor or a stepping motor. The substrate 111 is conveyed along the rail 119 in a conveying direction 121 by the action of the transmission element driven by the conveying drive device 120. The conveying device 118 is connected to a control device 113, which controls the conveying speed, start and stop of conveying, etc.

[0074] The work table 110 is made of a rectangular parallelepiped member and can be raised and lowered by an elevator (not shown). The work table 110 is installed so as to be sandwiched between rails 119 of a conveying device 118. The width of the work table 110 in the X direction 107 is slightly smaller than the distance between the rails 119 of the conveying device 118 so as not to contact the rails 119 of the conveying device 118. When conveying the substrate 111, the work table 110 lowers to a position where it does not come into contact with the substrate 111. When performing a coating operation on the substrate 111, the work table 110 rises so as to sandwich and fix the substrate 111 between itself and a pressure plate (not shown) provided on the rails 119. To more securely fix the substrate 111, for example, a mechanism may be used in which multiple holes leading from the inside of the work table 110 to the top surface are drilled and air is sucked through the holes to adsorb the substrate 111.

[0075] The coating apparatus 101 of this embodiment includes an imaging device 122. The imaging device 122 is provided on the Z-axis drive device 106 together with the dispensing device 102 and can move relative to the substrate 111 on the work table 110. The imaging device 122 can capture images of characteristic portions of the substrate 111 (i.e., the recess 201 of the substrate 111 and the corners of the components 202 and 203), as well as identification marks on the substrate 111 and images of the applied liquid material. For example, a CCD camera or a CMOS camera can be used as the imaging device 122. The imaging device 122 is connected to the control device 113, which can control its operation and store and process the captured image results.

[0076] In addition, a length measuring device (not shown) for measuring distances may be provided. The length measuring device can measure the distance to the surface of the substrate 111, the surface of a component placed on the substrate 111, or the surface of the liquid material applied to the substrate 111. From these measurements, the height of the component or the applied liquid material can be determined. As the length measuring device, for example, a laser displacement meter or an ultrasonic distance meter can be used. The imaging device 122 and the length measuring device may be integrally provided by a mounting plate and configured to be movable relative to the substrate 111. The length measuring device is connected to the control device 113, and the control device 113 can control its operation, store measurement results, and perform arithmetic processing.

[0077] The dispensing apparatus 101 of this embodiment includes a calibration device 114. The calibration device 114 is installed near the work table 110 on the top surface of the housing 112, within the range within which the relative drive device 103 can move. The calibration device 114 is composed of a calibration table 115 and a scale 116. The calibration table 115 has a test area where the liquid material can be applied. The liquid material is applied to this test area, and the shape and dimensions of the applied liquid material are confirmed using the imaging device and length measuring device described above. Based on the results, adjustments can be made so that the liquid material to be applied to the substrate 111 has the desired shape and dimensions. Instead of the calibration table 115, a plate-like body having a test area where the liquid material can be applied may be separately prepared and fixed using the suction and fixation mechanism described above to form the test area. The scale 116 can measure the mass / weight of the liquid material applied to the measuring pan. A weighing scale, an electronic balance, or the like may be used as the scale 116. The meter 116 is connected to the control device 113, and the operation thereof can be controlled, and measurement results can be stored and processed by the control device 113. The meter 116 can measure the amount of discharge per unit time of the discharge device 102.

[0078] The control device 113 is an information processing device (computer) equipped with a processing device, a storage device for storing a coating program and the like, and a communication device, and is communicatively connected to an input device and an output device. In this embodiment, a touch panel (not shown) serves as both the input device and the output device. The control device 113 can be a personal computer (PC), a programmable logic controller (PLC), or the like, and the input device and output device can be a keyboard, a mouse, a display, or the like.

[0079] The coating apparatus 101 of this embodiment can be connected to a teaching terminal (not shown). The teaching terminal can instruct the position of the relative drive device 103, the operation of the discharge device 102, and the like. The coating apparatus 101 can sequentially arrange multiple related teaching contents and play them back as a single unit. In other words, the coating apparatus 101 can operate the discharge device 102 and the relative drive device 103 in accordance with the teaching contents. The teaching terminal can be, for example, a dedicated terminal equipped with a simple display device and multiple switches, or a personal computer with dedicated software installed. The teaching terminal can start and stop the operation of the coating apparatus 101 based on the coating program stored in the control device 113. Instead of the teaching terminal, teaching can also be performed using the above-mentioned control device 113 and a touch panel.

[0080] Furthermore, the application program includes means or steps for setting and correcting the application path (S102, S503), setting and correcting the application parameters (S103, S504), and executing the application work (S505). Execution of the application program by the control device 113 realizes a position acquisition means (or a position acquisition step) that acquires the position coordinates of the components 202, 203 arranged with a gap in the recess 201, an application path setting means (or an application path setting step) that sets an application area and an application path for application by the dispensing device 102 based on the acquired position coordinates, an application parameter setting means (or an application parameter setting step) that divides the application path and sets the application amount for each divided application path, and an application means (or an application step) that moves the dispensing device 102 along the application path to apply the liquid material to the application area.

[0081] The upper part of the housing 112, in which the discharge device 102, the relative drive device 103, the work table 110, etc. are provided, is covered with a cover 117 shown by a dotted line. Note that in FIG. 16, some of the lines are interrupted for convenience of explanation. By providing the cover 117, it is possible to prevent dust from entering the coating device 101 and to prevent inadvertent contact between an operator and moving parts such as the relative drive device 103. Although not shown, the cover 117 may be provided with an openable / closable door to allow an operator to easily access the coating device 101. Furthermore, the cover 117 may be provided with the aforementioned touch panel so that it can be operated from outside the cover 117. Furthermore, the cover 117 may be provided with a hole for loading the substrate 111 into the coating device 101 or loading the substrate 111 out of the coating device 101.

[0082] In the coating apparatus, the coating process is carried out as follows: (a) An uncoated substrate with multiple components placed in recesses is carried into the coating apparatus and fixed to the work table 110. (b) Coating is carried out according to the coating method described above. (c) The coated substrate is carried out of the coating apparatus. The above is one basic cycle, and if there are any uncoated substrates, the above steps (a) to (c) are repeated. The following steps may be added to the cycle. For example, after the coating operation is carried out, an inspection step may be added in which the state of the coated liquid material is photographed to determine whether it is good or bad.

[0083] The coating apparatus 101 of the embodiment described above allows for the creation of a coating path that matches the shape of the coating area, even if the concave coating area has bends or width variations due to misalignment of the components 202, 203 or the external tolerances of the components 202, 203 or the recess 201. This allows for coating to be performed by filling the coating area with the correct amount of liquid material, even in areas consisting of gaps with complex shapes. For example, in the manufacturing process of camera modules mounted on smartphones, variations in the installation position of semiconductor elements can result in wide and narrow gaps (coating areas) between the inner wall surface of a recess formed on a substrate and the outer periphery of the component (see FIG. 12 ). When filling these gaps (coating areas) with liquid material, insufficient liquid material can result in insufficient component fixation, while excessive liquid material can adversely affect the component. Liquid material riding up on the top surfaces of the substrate or components must be avoided because it affects quality. In particular, in camera modules, if the liquid material rides up and adheres to the top surface of the semiconductor element, it can adversely affect the lenses and other components that are subsequently installed. According to the present invention, it is possible to solve these problems by filling an appropriate amount of liquid material into the application area formed by the gap between the inner wall surface of the recess and the outer periphery of the component.

[0084] While the preferred embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the above-described embodiments. Various modifications and improvements can be made without departing from the technical spirit of the present invention, and such modifications and improvements are also included within the technical scope of the present invention.

[0085] In the above embodiment, a reference correction amount is set (S104), and the correction amount is taken into consideration when correcting the application parameters (S504). However, it is not necessary to set a reference correction amount. In other words, without setting a reference correction amount, the movement speed of the discharge device 102 may be calculated when correcting the application parameters (S504) by performing the same procedure as when setting the initial application parameters (S103).

[0086] In the above embodiment, in correcting the application path (S503), the discharge amount per unit time of the discharge device is set to a constant value and the movement speed of the discharge device 102 is corrected, but alternatively, the movement speed of the discharge device 102 may be set to a constant value and the discharge amount per unit time of the discharge device 102 may be corrected. In particular, when the discharge device is a jet type, the volume or mass / weight of one droplet may be adjusted instead of the discharge amount per unit time.

[0087] Furthermore, the liquid material may be filled in a portion of the divided application area by so-called point application, in which application is performed while the movement of the discharge device 102 is stopped at a specific application position. In this case, it is disclosed that the application amount is corrected using the time during which the movement of the discharge device 102 is stopped at the specific application position as an ejection adjustment parameter.

[0088] 101: coating device, 102: discharge device, 103: relative drive device, 104: X drive device, 105: Y drive device, 106: Z drive device, 107: X movement direction, 108: Y movement direction, 109: Z movement direction, 110: work table, 111: substrate (work), 112: housing, 113: control device, 114: calibration device, 115: calibration table, 116: measuring device, 117: cover, 118: conveyance device, 119: rail, 120: conveyance drive device, 121: conveyance direction, 122: imaging device (camera), 201: recess, 202: first part, 203: second part, 204: liquid material, A, B, C, D, F, G: feature points (corners, midpoints, intersections), E: coating path, Q: coating area, H: coating height

Claims

1. A coating method for filling a coating area defined by a gap between the inner wall surface of a recess in a workpiece and the outer periphery of a component placed in the recess with a liquid material, comprising: a position acquisition step of acquiring position coordinates of the component based on a captured image including characteristic portions of the component; a coating path setting step of setting a coating area and a coating path for coating by a discharge device based on the position coordinates; a coating parameter setting step of dividing the coating path of the discharge device based on the position coordinates and setting a coating amount for each divided coating path; and a coating step of moving the discharge device along the coating path to coat the liquid material in the coating area.

2. The coating method according to claim 1, characterized in that in the coating path setting step, the coating area is divided into divided coating areas, and the divided coating paths are set for each divided coating area.

3. The coating method according to claim 2, characterized in that the part comprises a plurality of parts arranged with spaces between them in the same recess, and the coating area includes the areas between the plurality of parts.

4. The coating method described in claim 2, characterized in that the recess is polygonal in top view, the part is polygonal in top view, and the position acquisition process acquires position coordinates of all corners of the part and position coordinates of corners of the recess that are adjacent to each corner of the part.

5. The coating method according to claim 4, characterized in that in the coating path setting step, the coating area is divided into divided coating areas each including a corner of the part as an apex.

6. The coating method according to claim 4, characterized in that in the coating path setting step, the coating area is divided into divided coating areas each consisting of a plurality of rectangles.

7. The coating method according to claim 4, characterized in that in the coating path setting step, the coating path is set as a straight path passing through the midpoint of the width of the divided coating area in a direction perpendicular to the traveling direction of the coating path.

8. The coating method described in claim 2, further comprising an initial setting process executed before the position acquisition process, for setting an initial coating area, an initial coating path, an initial coating amount and a reference correction amount, wherein the coating parameter setting process sets the coating amount for each divided coating area based on the shape of the divided coating area and a coating amount calculated based on the reference correction amount.

9. A coating method as described in any one of claims 2 to 8, characterized in that the coating parameter setting process divides the divided coating area into secondary divided coating areas when the width of the divided coating area in a direction perpendicular to the traveling direction of the coating path differs between the start point and the end point, and sets the coating amount for each secondary divided coating area.

10. A coating method as described in any one of claims 2 to 8, characterized in that in the coating parameter setting process, the coating amount is set by keeping the discharge amount per unit time of the discharge device constant and setting the relative movement speed between the discharge device and the workpiece for each divided coating area.

11. The coating method according to any one of claims 2 to 8, characterized in that the coating parameter setting step sets the coating amount by setting one or more of the following [A] to [D]: [A] the number of discharges per unit time if the discharge device is a jet type discharge device; [B] the number of screw revolutions if the discharge device is a screw type discharge device; [C] the moving speed of the plunger if the discharge device is a plunger type discharge device; [D] the application time of pressure if the discharge device is an air type discharge device.

12. The coating method according to any one of claims 2 to 8, wherein the part is a semiconductor element.

13. A coating method according to any one of claims 2 to 8, characterized in that in the coating path setting step, a coating height is set that does not reach the upper end of either the recess or the part.

14. A coating method as described in any one of claims 1 to 8, characterized in that in the position acquisition process, the position coordinates of the recess are further acquired based on an captured image including characteristic parts of the recess, and in the coating parameter setting process, the coating path of the ejection device is divided based on the position coordinates of the recess and the part, and a coating amount is set for each divided coating path.

15. A coating apparatus comprising: a discharge device for discharging liquid material; a work table on which a workpiece having a recess is placed; a relative drive device for relatively moving the discharge device and the work table; an imaging device for capturing an image including a characteristic portion of a part arranged with a gap in the recess of the workpiece; and a control device for controlling the operation of the discharge device, the relative drive device and the imaging device, wherein the control device comprises: a position acquisition means for acquiring position coordinates of the part based on the captured image; a coating path setting means for setting a coating path of the discharge device based on the position coordinates; a coating parameter setting means for dividing the coating path of the discharge device based on the position coordinates and setting a coating amount for each divided coating path; and a coating means for moving the discharge device along the coating path to apply liquid material to the gap.

16. The coating device according to claim 15, characterized in that the coating path setting means divides the coating area set based on the position coordinates into divided coating areas, and sets the divided coating path for each divided coating area.

17. The coating device described in claim 16, characterized in that when the width of the divided coating area in a direction perpendicular to the traveling direction of the coating path differs between the start point and the end point, the coating parameter setting means divides the divided coating area into secondary divided coating areas and sets the coating amount for each secondary divided coating area.

18. The coating apparatus according to any one of claims 15 to 17, further comprising a length measuring device for measuring the distance to the workpiece or the component.

19. The application device according to any one of claims 15 to 17, further comprising a calibration device including a test area and a measuring device.

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