Optical measurement device

Abstract

The present invention relates to an optical measurement device which controls a plurality of polarizers and an amount of light, measures anisotropic optical properties of a sample at high speed, and measures the shape and magnetism of the sample. More specifically, the present invention provides: a multifunctional ellipsometer which can selectively control a plurality of polarizers according to the polarization measurement mode and simultaneously control the amount of light incident on a detection unit; a dual optical element rotation-type ellipsometer which improves the measurement speed of an ellipsometer by reducing the number of light amount measurements per unit measurement cycle by adjusting the arrangement of optical elements rotating at a constant speed; and a multifunctional optical measurement module system which modularizes a spectroscopic ellipsometer having an oblique incidence structure and a magnetometer having a vertical incidence structure, and can simultaneously measure the shape and magnetism of a sample after aligning the sample and a reflected laser.

Description

Light measuring device

[0001] The present invention relates to an optical measuring device, and more particularly, to an optical measuring device that controls a plurality of polarizers and light amounts, measures anisotropic optical properties of a sample at high speed, and measures the shape and magnetism of a sample.

[0002] Specifically, the present invention relates to a multifunctional ellipsometer, and more particularly, to a multifunctional ellipsometer capable of selectively controlling a plurality of polarizers according to a polarization measurement mode and simultaneously controlling the amount of light incident on a detection unit.

[0003] In addition, the present invention relates to a dual optical element rotational ellipsometer, and more specifically, to a dual optical element rotational ellipsometer that improves the measurement speed of the ellipsometer by reducing the number of light quantity measurements per unit measurement cycle by adjusting the arrangement of uniformly rotating optical elements.

[0004] In addition, the present invention relates to a multifunctional optical measurement module system, and more specifically, to a multifunctional optical measurement module system capable of simultaneously measuring the shape and magnetism of a sample by modularizing a spectroscopic ellipsometer with an oblique incidence structure and a magnetometer with a vertical incidence structure and aligning a sample and a reflected laser.

[0005]

[0006] In the rapidly developing industrial fields of semiconductor devices, flat panel displays, nanobiotechnology, nanoimprinting, thin film optics, etc., the importance of technology that can non-destructively and non-contactly measure and evaluate the properties of nano samples, such as the thickness of thin films and the shape of nano patterns, at the manufacturing process stage is increasing.

[0007] With the continuous development of the above-mentioned industrial fields, the thickness of thin films is gradually decreasing, reaching the level of several atomic layers, and the shape of nano-patterns is becoming more complex from the existing two-dimensional structure to a three-dimensional structure.

[0008] Korean Patent No. 10-0701301 (Title: Multifunctional rotating element type ellipsometer) discloses a multifunctional rotating element type ellipsometer. The technology of the prior art includes: a light source that irradiates light to a specimen; a polarizer positioned on the incident path of the light between the light source and the specimen to polarize the light; a phase retardation plate that changes the polarization state of the light reflected from the specimen after passing through the polarizer; an analyzer positioned on the reflection path of the light to pass only a specific polarization component of the light; a polarization remover that removes the polarization state of the light passing through the analyzer; And a photodetector for detecting the light passing through the polarizer, and a driving motor capable of position control is mounted on each of the polarizer, the phase retardation plate, and the analyzer, wherein the driving motor comprises a body having a hollow shaft through which the light passes, a fixing groove formed with a predetermined length on an incident surface of the body, and a fixing member coupled to the fixing groove and to which the phase retardation plate is attached.

[0009] However, these conventional technologies have the problem that the optical structure of the ellipsometer must be changed differently to meet different requirements, such as high-speed measurement of anisotropic optical properties, accurate measurement of anisotropic optical properties, or high-speed and accurate measurement of isotropic optical properties. In addition, there is a problem that the amount of light incident on the photodetector cannot be controlled, so the photodetector may receive excessive light, resulting in abnormal measurement results or failure of the photodetector.

[0010] Therefore, there is a need for an invention that can accommodate all of the various measurement requirements and control the amount of light incident on the photodetector to prevent abnormal measurement results or failure of the photodetector.

[0011] Meanwhile, the optical element-rotating ellipsometer solves the problem of residual polarization of the light source by making the light source linearly polarized by adding a stationary polarizer after the light source in the optical path of the polarizer-rotating multi-channel spectroellipsometer, and solves the problem of polarization dependence of the photodetector by additionally installing a stationary polarizer before the multi-channel spectrometer in the optical path of the analyzer-rotating multi-channel spectroellipsometer to transmit linearly polarized light to the photodetector.

[0012] However, the optical element-rotating ellipsometer according to the prior art was able to find the Fourier coefficients of the light intensity waveform, the ellipsometric angle of the specimen, and the unpolarized reflectance of the specimen from the measured exposure amounts by using three polarizers, but did not specifically present a method for measuring the Mueller matrix of an anisotropic specimen, and accordingly, there was a problem that additional measurements were required to rotate the direction of the specimen or scan a fixed optical element in order to detect the shape and properties of the anisotropic specimen.

[0013] In addition, the above-mentioned conventional technology has a problem in that the measurement time is at least 8 times longer than that of a conventional spectroscopic ellipsometer for measuring isotropic optical properties, as two uniformly rotating optical elements are respectively arranged in front and behind the center of the specimen on the optical path of the measuring beam and uniformly rotate at an integer multiple of the base rotational time period.

[0014] Meanwhile, amidst the rapid development of various industrial fields related to semiconductor devices, flat panel displays, thin film solar cells, nanoimprinting, nanobiotechnology, thin film optics, etc., the thickness of thin films is gradually decreasing to the level of several atomic layers, and the shape of nano-patterns is trending toward a complex three-dimensional structure from the existing two-dimensional structure. Accordingly, there is a growing need for process measurement technology that can more accurately analyze the shape and properties of nano-scale samples, such as thin film thickness and nano-pattern shape, while performing the manufacturing process of these products in a non-contact manner to avoid damaging the nano-specimens. Among these non-contact nano-scale measurement technologies, ellipsometers and methods utilizing them are widely used along with the development of light sources, photodetectors, and computers.

[0015] Based on the angle of incidence, ellipsometers can be categorized into normal incidence and oblique incidence types. The normal incidence method measures the change in polarization state of light vertically reflected by the specimen when the measuring beam is incident perpendicularly to the specimen surface (i.e., the angle of incidence is 0°). The oblique incidence method measures by having the angle of incidence of the measuring beam be arbitrarily selected within the range of 0° to 90°. Among these, the normal incidence method has the advantage of being able to make the measuring device smaller and making the measuring beam smaller so that a smaller internal area can be measured in the specimen. The basic configuration and principles of this normal incidence type ellipsometer are well disclosed in several patent documents such as U.S. Patent No. 7,355,708 and U.S. Patent No. 7,889,340, as well as in several other papers.

[0016] Both the vertical incidence type ellipsometer and the oblique incidence type ellipsometer described above can measure the shape of a specimen, but when the specimen is made of a magnetic material, there is a problem in that it is difficult to measure the magnetism and magnetization of the sample.

[0017] Accordingly, there was a problem that the measurement time increased and the measurement accuracy decreased because a separate measuring instrument was required to measure the magneto-optical Kerr, which measures the magnetism of the sample, and an ellipsometer to measure the shape of the sample.

[0018]

[0019] (Patent Document 1) Republic of Korea Patent Publication No. 10-0701301 (March 22, 2007)

[0020] (Patent Document 2) Korean Patent Publication No. 10-2022-0004544 (January 11, 2022)

[0021]

[0022] The purpose of the present invention to solve the above problems is to provide a multifunctional ellipsometer capable of selectively controlling a plurality of polarizers according to a polarization measurement mode corresponding to the optical characteristics of a specimen and various measurement performance requirements.

[0023] In addition, an object of the present invention is to provide a multi-functional ellipsometer that can prevent malfunction of the detection unit as well as prevent abnormal measurement results from occurring by controlling the amount of light incident on the detection unit.

[0024] In addition, an object of the present invention to solve the above problem is to provide a dual optical element rotational ellipsometer capable of measuring anisotropic optical properties of a sample at high speed by selectively disposing three polarizing elements between a light source and a sample or between a sample and a detection unit, and uniformly rotating optical elements disposed in two of the three polarizing elements through a control unit, fixing optical elements disposed in one of the three polarizing elements and an additional polarizing element disposed between the light source and a sample or between the sample and a detection unit, and controlling the azimuth angles of four optical elements according to a required polarization measurement mode to adjust the amount of measurement light entering the detection unit, and then calculating the Mueller matrix components of the sample from the light amount value.

[0025] In addition, the purpose of the present invention to solve the above problem is to provide a multifunctional optical measurement module system in which a spectroscopic ellipsometer having an oblique incidence structure and a magnetometer having a vertical incidence structure are modularized, and an alignment unit projects a first reflection laser, which is a part of a reflection laser reflected from a sample, onto an xy plane to check whether the sample and the incident laser are aligned, and then, when not aligned, a control unit controls the operation of a stage to adjust the inclination of the sample, thereby aligning the first reflection laser to the sample.

[0026]

[0027] The technical problems to be solved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned can be clearly understood by a person having ordinary skill in the technical field to which the present invention belongs from the description below.

[0028]

[0029] In order to achieve the above object, the present invention comprises a configuration including a light source emitting incident light toward a specimen; an incident light conversion unit disposed between the specimen and the light source to change the optical characteristics of the incident light; a detection unit for measuring the optical characteristics of measurement light reflected or transmitted from the specimen; a measurement light analysis unit disposed between the specimen and the detection unit to adjust the optical characteristics of the measurement light; and a control unit for selectively performing a light quantity control mode for adjusting the light quantity of the measurement light and simultaneously controlling the incident light conversion unit and the measurement light analysis unit to selectively perform one polarization measurement mode among a plurality of polarization measurement modes, and is characterized in that a plurality of polarizers are selectively controlled according to the polarization measurement mode.

[0030] In an embodiment of the present invention, the incident light conversion unit may include a first polarizer disposed adjacent to the light source to receive the incident light; a second polarizer disposed between the first polarizer and the specimen; and the measurement light analysis unit may include a third polarizer disposed adjacent to the specimen to receive the measurement light; and a fourth polarizer disposed between the third polarizer and the detection unit.

[0031] In an embodiment of the present invention, the plurality of polarization measurement modes may include a first polarization measurement mode for quickly measuring anisotropic optical properties of the specimen, a second polarization measurement mode for accurately measuring anisotropic optical properties of the specimen, and a third polarization measurement mode for quickly and accurately measuring isotropic optical properties of the specimen.

[0032] The above detection unit includes a light quantity sensor for measuring the light quantity of the measurement light, and the control unit controls at least one of the incident light conversion unit and the measurement light analysis unit based on the light quantity measured by the light quantity sensor when the light quantity control mode is performed, and can adjust the relative position between the azimuth angles with respect to the characteristic axis of at least two polarizers among the polarizers.

[0033] When the light quantity measured by the above light quantity sensor is included in a preset reference light quantity range, the control unit performs the first polarization measurement mode, and in order to perform the first polarization measurement mode, the control unit controls the first polarizer and the fourth polarizer to move to the first azimuth angle and the second azimuth angle, respectively, before measurement and to remain stationary during measurement, and controls the second polarizer and the third polarizer to rotate at a constant speed.

[0034] Meanwhile, when the light quantity measured by the light quantity sensor exceeds a preset reference light quantity range, the control unit may perform the light quantity control mode and at the same time perform the second polarization measurement mode or the third polarization measurement mode depending on the physical properties of the specimen.

[0035] In a first embodiment of the second polarization measurement mode, the control unit may simultaneously perform the light amount control mode when the specimen has anisotropy and perform the second polarization measurement mode by controlling the first polarizer to move to a first azimuth angle before measurement and to remain stationary during measurement, controlling the second polarizer to move to a second azimuth angle before measurement and to remain stationary during measurement, controlling the third polarizer to rotate at a constant speed, and controlling the fourth polarizer to sequentially move to third azimuth angles configured at a constant azimuth angle interval and remain stationary during measurement in a scanning manner.

[0036] In a second embodiment of the second polarization measurement mode, the control unit may simultaneously perform the light amount control mode when the specimen has anisotropy and control the first polarizer to move to a first azimuth angle before measurement and remain stationary during measurement in order to perform the second polarization measurement mode, control the second polarizer to move sequentially to second azimuth angles configured at a constant azimuth angle interval and remain stationary during measurement in a scanning manner, control the third polarizer to rotate at a constant speed, and control the fourth polarizer to move to a third azimuth angle before measurement and remain stationary during measurement.

[0037] In a third embodiment of the second polarization measurement mode, the control unit may control the first polarizer to sequentially move to first azimuth angles configured at a constant azimuth angle interval and remain stationary during measurement in order to perform the second polarization measurement mode while performing the light amount control mode when the specimen has anisotropy, control the second polarizer to rotate at a constant speed, control the third polarizer to move to the second azimuth angle before measurement so that the polarizer remains stationary during measurement, and control the fourth polarizer to move to the third azimuth angle before measurement so that the polarizer remains stationary during measurement.

[0038] In a fourth embodiment of the second polarization measurement mode, the control unit may simultaneously perform the light amount control mode when the specimen has anisotropy and control the first polarizer to move to a first azimuth angle before measurement and remain stationary during measurement in order to perform the second polarization measurement mode, control the second polarizer to rotate at a constant speed, control the third polarizer to move sequentially to second azimuth angles configured at a constant azimuth angle interval and remain stationary during measurement in a scanning manner, and control the fourth polarizer to move to a third azimuth angle before measurement and remain stationary during measurement.

[0039] Meanwhile, in the first embodiment of the third polarization measurement mode, the control unit may control the first polarizer to move to a first azimuth angle before measurement and to be stationary during measurement in order to perform the third polarization measurement mode while simultaneously performing the light amount control mode when the specimen has isotropy, control the second polarizer to move to a second azimuth angle before measurement and to be stationary during measurement, control the third polarizer to rotate at a constant speed, and control the fourth polarizer to move to a third azimuth angle before measurement and to be stationary during measurement.

[0040] In addition, in a second embodiment of the third polarization measurement mode, the control unit may control the first polarizer to move to a first azimuth angle before measurement and to be stationary during measurement in order to perform the third polarization measurement mode while simultaneously performing the light amount control mode when the specimen has isotropy, control the second polarizer to rotate at a constant speed, control the third polarizer to move to a second azimuth angle before measurement and to be stationary during measurement, and control the fourth polarizer to move to a third azimuth angle before measurement and to be stationary during measurement.

[0041] In addition, the present invention for achieving the above object provides a dual-optical element rotational ellipsometer, characterized by including: a light source unit for irradiating incident light toward a sample; an incident light conversion unit disposed between the sample and the light source unit and including at least one incident light polarization unit for changing the optical characteristics of the incident light; a detection unit for measuring the optical characteristics of measurement light reflected or transmitted from the sample; a measurement light analysis unit disposed between the sample and the detection unit and including at least one measurement light polarization unit for adjusting the optical characteristics of the measurement light; a control unit for controlling the incident light conversion unit and the measurement light analysis unit to selectively perform a light amount control mode for adjusting the light amount of the measurement light and selectively perform a polarization measurement mode; and a calculation unit for calculating Mueller matrix components of the sample from the light amount value measured by the detection unit.

[0042] In an embodiment of the present invention, the at least one incident light polarizing unit is three, the at least one measurement light polarizing unit is one, and the control unit may control one of the at least one incident light polarizing unit to be fixed, and control two of the at least one incident light polarizing unit to be rotated at a constant speed.

[0043] In an embodiment of the present invention, it may be characterized in that the two incident light polarizing parts are positioned between the one incident light polarizing part and the sample.

[0044] In an embodiment of the present invention, the at least one incident light polarizing unit may be a first polarizing unit disposed adjacent to the light source unit to linearly polarize incident light irradiated from the light source unit; a second polarizing unit disposed adjacent to the first polarizing unit to firstly change the polarization state of incident light linearly polarized by the first polarizing unit; and a third polarizing unit disposed between the second polarizing unit and the sample to secondly change the polarization state of incident light whose polarization state has been firstly changed by the second polarizing unit; and the at least one measurement light polarizing unit may be a fourth polarizing unit disposed between the sample and the detection unit to linearly polarize measurement light reflected after the incident light whose polarization state has been secondarily changed is incident on the sample.

[0045] In an embodiment of the present invention, the at least one incident light polarizing unit is one, the at least one measuring light polarizing unit is three, and the control unit may control one of the at least one measuring light polarizing unit to be fixed, and control two of the at least one measuring light polarizing unit to be rotated at a constant speed.

[0046] In an embodiment of the present invention, the two measuring light polarizing units may be characterized in that they are placed between the one measuring light polarizing unit and the sample.

[0047] In an embodiment of the present invention, the at least one incident light polarizing unit may be a first polarizing unit arranged between the light source unit and the sample to linearly polarize incident light irradiated from the light source unit; the at least one measurement light polarizing unit may be a second polarizing unit arranged adjacent to the sample to first change the polarization state of measurement light reflected after the linearly polarized incident light is incident on the sample; a third polarizing unit arranged adjacent to the second polarizing unit to secondarily change the polarization state of measurement light whose polarization state has been first changed by the second polarizing unit; and a fourth polarizing unit arranged between the third polarizing unit and the detection unit to linearly polarize measurement light whose polarization state has been secondarily changed.

[0048] In an embodiment of the present invention, the polarization measurement mode may be characterized as a mode for measuring anisotropic optical properties of the sample at high speed.

[0049] In an embodiment of the present invention, the detection unit includes a light quantity sensor for measuring the light quantity of the measurement light, and the control unit controls at least one of the incident light conversion unit and the measurement light analysis unit based on the light quantity measured by the light quantity sensor when the light quantity control mode is performed, and may be characterized by controlling the relative position between azimuths with respect to the characteristic axis of at least two of the first to fourth optical elements.

[0050] In an embodiment of the present invention, when the light quantity measured by the light quantity sensor is included in a preset reference light quantity range, the control unit may perform the polarization measurement mode, and in order to perform the polarization measurement mode, the control unit may control the first polarizer and the fourth polarizer to move to the first azimuth angle and the second azimuth angle, respectively, before measurement and to remain stationary during measurement, and control the second polarizer and the third polarizer to rotate at a constant speed.

[0051] In addition, the configuration of the present invention for achieving the above purpose includes a light source unit that generates incident light, a polarization state generation unit that polarizes the incident light irradiated from the light source unit and then irradiates the polarized light obliquely to a sample, a polarization state analysis unit that polarizes the reflected light reflected by the incident light incident on the sample, and a detection unit that detects a signal of the polarized reflected light, thereby measuring the shape of the sample; And a multi-functional optical measurement module system is provided, which comprises a magnetometer for measuring magnetism of the sample, including an alignment light source unit that generates an incident laser, a polarization unit that polarizes the incident laser, a beam splitter unit that reflects the polarized incident laser to the sample and divides the reflected laser reflected from the sample into a first reflected laser and a second reflected laser, an alignment unit that projects the first reflected laser onto a virtual xy plane to check the alignment state of the first reflected laser, a balance detection unit that detects a signal of the second reflected laser, and a control unit that controls the operation of a stage that supports the sample so that the spot position of the first reflected laser matches the center of the xy plane.

[0052] In an embodiment of the present invention, the beam splitter unit may include a first beam splitter that reflects a polarized incident laser from the polarizing unit to the sample, and the first beam splitter may be arranged on the same axis as the alignment light source unit and the polarizing unit so as to be parallel to the sample.

[0053] In an embodiment of the present invention, the first beam splitter is positioned above the sample and passes a reflected laser reflected from the sample, and the beam splitter unit may further include a second beam splitter that divides the reflected laser passing through the first beam splitter into the first reflected laser and the second reflected laser.

[0054] In an embodiment of the present invention, the beam splitter unit may further include a polarizing beam splitter positioned on the path of the second reflection laser and disposed above the second beam splitter, and the polarizing beam splitter may be characterized in that it splits the second reflection laser parallel to the reflection laser into a first polarized beam and a second polarized beam in an orthogonal polarization state using a birefringent crystal.

[0055] In an embodiment of the present invention, the balance detection unit may be characterized by including: a first balance detection unit located above the polarizing beam splitter and detecting a signal of the first polarized beam split from the polarizing beam splitter; and a second balance detection unit located on the other side of the first balance detection unit and above the polarizing beam splitter and detecting a signal of the second polarized beam split from the polarizing beam splitter.

[0056] In an embodiment of the present invention, the alignment unit may be characterized by being a quad-photodiode that projects the first reflection laser perpendicular to the second reflection laser onto the xy plane and detects the intensity of the photocurrent for the first reflection laser.

[0057] In an embodiment of the present invention, the xy plane is divided into a first quadrant located in the upper right from the center coordinate, a second quadrant located below the first quadrant, a third quadrant located symmetrically to the second quadrant with respect to the y-axis, and a fourth quadrant located above the third quadrant, and the alignment unit includes a first sensor that detects the intensity of a first photocurrent for a portion of the first reflection laser projected into the first quadrant and transmits the intensity to the control unit; a second sensor that detects the intensity of a second photocurrent for another portion of the first reflection laser projected into the second quadrant and transmits the intensity to the control unit; a third sensor that detects the intensity of a third photocurrent for another portion of the first reflection laser projected into the third quadrant and transmits the intensity to the control unit; And it may be characterized by including a fourth sensor that detects the intensity of the fourth photocurrent for the remaining portion projected into the four quadrants among the first reflective lasers and transmits it to the control unit.

[0058] In an embodiment of the present invention, the control unit receives the intensities of the first to fourth photocurrents transmitted from the first to fourth sensors, and when the intensities of the first to fourth photocurrents are not equal, the control unit controls the operation of the stage so that the vertex of the stage rises or falls with respect to the center point (CP) of the stage, thereby adjusting the inclination of the sample until the intensities of the first to fourth photocurrents become equal, thereby aligning the first reflection laser to the sample.

[0059] In an embodiment of the present invention, the alignment light source unit may be positioned above the polarization state generating unit, and may be characterized in that it generates the incident laser and then irradiates it to the polarizing unit, and the polarizing unit is positioned on one side of the alignment light source unit to polarize the incident laser irradiated from the alignment light source unit.

[0060] In an embodiment of the present invention, the polarization state generating unit includes a fixed polarizer that polarizes the incident light irradiated from the light source unit; and a rotating polarizer that rotates and rotates the incident light polarized by the fixed polarizer and then irradiates the rotationally polarized incident light to the sample; and the light source unit, the fixed polarizer, and the rotating polarizer may be characterized in that they are arranged on a path of the incident light that forms an acute angle with the sample while being spaced apart from each other by a predetermined distance.

[0061] In an embodiment of the present invention, the rotation polarizing unit may be characterized by being one of a rotation polarizer and a rotation polarization compensator.

[0062] In an embodiment of the present invention, the polarization state analysis unit may include a rotating analyzer that rotates and polarizes reflected light reflected from incident light incident on the sample; and a fixed analyzer that polarizes reflected light that is rotationally polarized from the rotating analyzer; and the rotating analyzer, the fixed analyzer, and the detection unit may be arranged on the path of the reflected light while being spaced apart from each other by a predetermined distance.

[0063] In an embodiment of the present invention, the rotating optical detector may be characterized by being one of a rotating optical detector and a rotating optical compensator.

[0064] In an embodiment of the present invention, when the first reflection laser is aligned with the center of the xy plane and aligned with the sample, the spectroscopic ellipsometer may measure the shape of the sample and the magnetometer may measure the magnetization included in the magnetism of the sample at the same time.

[0065]

[0066] The present invention according to the above configuration has the advantage of being able to control the amount of light by selectively controlling the polarizer and at the same time having different polarization measurement modes depending on the type of specimen.

[0067] In addition, the present invention has the advantage of preventing malfunction of the detection unit as well as preventing abnormal measurement results by controlling the amount of light incident on the detection unit.

[0068] In addition, the effect of the present invention according to the above configuration is that by selectively arranging three polarizing units between a light source and a sample or between a sample and a detection unit, rotating two of the three polarizing units at a constant speed through a control unit, fixing one of the three polarizing units and an additional polarizing unit arranged between the light source and a sample or between the sample and a detection unit, and controlling the azimuth angles of four optical elements according to a required polarization measurement mode to adjust the amount of measurement light entering the detection unit, and then calculating the Mueller matrix components of the sample from the light amount value, anisotropic optical properties of the sample can be measured at high speed.

[0069] In addition, the effect of the present invention according to the above configuration is that a spectroscopic ellipsometer having an oblique incidence structure and a magnetometer having a vertical incidence structure are modularized, and an alignment unit projects a first reflection laser, which is a part of a reflection laser reflected from a sample, onto an xy plane to check whether the sample and the incident laser are aligned, and then, when not aligned, a control unit controls the operation of a stage to adjust the inclination of the sample, thereby aligning the first reflection laser to the sample, thereby enabling simultaneous measurement of magnetic properties including the shape and magnetization of a magnetic body, as well as reducing the measurement time and improving the measurement accuracy.

[0070]

[0071] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the detailed description of the present invention or the composition of the invention described in the claims.

[0072]

[0073] Figure 1 is a schematic diagram of a multi-functional ellipsometer according to the present invention.

[0074] Fig. 2 is a drawing showing a state in which the multifunctional ellipsometer of Fig. 1 performs the first polarization measurement mode.

[0075] FIG. 3 is a drawing showing a state in which the multifunctional ellipsometer of FIG. 1 performs the first embodiment of the second polarization measurement mode.

[0076] FIG. 4 is a drawing showing a state in which the multifunctional ellipsometer of FIG. 1 performs a second embodiment of the second polarization measurement mode.

[0077] Fig. 5 is a drawing showing a state in which the multifunctional ellipsometer of Fig. 1 performs the third embodiment of the second polarization measurement mode.

[0078] Fig. 6 is a drawing showing a state in which the multifunctional ellipsometer of Fig. 1 performs the fourth embodiment of the second polarization measurement mode.

[0079] Fig. 7 is a drawing showing a state in which the multifunctional ellipsometer of Fig. 1 performs the first embodiment of the third polarization measurement mode.

[0080] Fig. 8 is a drawing showing a state in which the multifunctional ellipsometer of Fig. 1 performs the second embodiment of the third polarization measurement mode.

[0081] Fig. 9 is a schematic diagram showing a dual optical element rotational ellipsometer according to the first embodiment of the present invention.

[0082] Fig. 10 is a schematic diagram showing a dual optical element rotational ellipsometer according to a second embodiment of the present invention.

[0083] Figure 11 is a conceptual diagram showing a multi-functional optical measurement module system according to one embodiment of the present invention.

[0084] FIG. 12 (a) and (b) are conceptual diagrams showing that a beam spot (BS) of a first reflective laser is projected on a virtual xy plane generated by an alignment unit provided in a multifunctional optical measurement module system according to an embodiment of the present invention.

[0085] FIG. 13 is a perspective view from one direction showing that a stage operates under the control of a control unit provided in a multi-functional optical measurement module system according to one embodiment of the present invention.

[0086]

[0087] A most preferred embodiment according to the present invention is characterized by including: a light source emitting incident light toward a specimen; an incident light conversion unit disposed between the specimen and the light source to change the optical characteristics of the incident light; a detection unit for measuring the optical characteristics of measurement light reflected or transmitted from the specimen; a measurement light analysis unit disposed between the specimen and the detection unit to adjust the optical characteristics of the measurement light; and a control unit for selectively performing a light quantity control mode for adjusting the light quantity of the measurement light and simultaneously controlling the incident light conversion unit and the measurement light analysis unit to selectively perform one polarization measurement mode among a plurality of polarization measurement modes.

[0088] In addition, a most preferred embodiment according to the present invention is characterized by including: a light source unit for irradiating incident light toward a sample; an incident light conversion unit disposed between the sample and the light source unit and including at least one incident light polarization unit for changing an optical characteristic of the incident light; a detection unit for measuring an optical characteristic of measurement light reflected or transmitted from the sample; a measurement light analysis unit disposed between the sample and the detection unit and including at least one measurement light polarization unit for adjusting an optical characteristic of the measurement light; a control unit for controlling the incident light conversion unit and the measurement light analysis unit to selectively perform a light quantity control mode for adjusting an optical quantity of the measurement light and simultaneously selectively perform a polarization measurement mode; and a calculation unit for calculating Mueller matrix components of the sample from an optical quantity value measured by the detection unit.

[0089] In addition, the most preferred embodiment according to the present invention comprises a spectroscopic ellipsometer for measuring the shape of the sample, including a light source unit for generating incident light, a polarization state generation unit for polarizing the incident light irradiated from the light source unit and then irradiating the polarized light obliquely to a sample, a polarization state analysis unit for polarizing the reflected light reflected from the incident light incident on the sample, and a detection unit for detecting a signal of the polarized reflected light; And it is characterized by including a magnetometer for measuring the magnetism of the sample, including an alignment light source unit for generating an incident laser, a polarizing unit for polarizing the incident laser, a beam splitter unit for reflecting the polarized incident laser to the sample and distributing the reflected laser reflected from the sample into a first reflected laser and a second reflected laser, an alignment unit for projecting the first reflected laser onto a virtual xy plane to check the alignment state of the first reflected laser, a balance detection unit for detecting a signal of the second reflected laser, and a control unit for controlling the operation of a stage for supporting the sample so that the spot position of the first reflected laser matches the center of the xy plane.

[0090]

[0091] Hereinafter, the present invention will be described with reference to the attached drawings. However, the present invention can be implemented in various different forms and is therefore not limited to the embodiments described herein. In the drawings, irrelevant parts have been omitted for clarity of description, and similar parts have been designated with similar reference numerals throughout the specification.

[0092] Throughout the specification, when a part is said to be "connected (connected, contacted, or coupled)" to another part, this includes not only cases where it is "directly connected," but also cases where it is "indirectly connected" with another part in between. Furthermore, when a part is said to "include" a component, this does not exclude other components, but rather implies that it may include other components, unless otherwise specifically stated.

[0093] The terminology used herein is merely used to describe specific embodiments and is not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this specification, it should be understood that the terms "comprises" or "has" indicate the presence of a feature, number, step, operation, component, part, or combination thereof described in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0094] The present invention will be described in detail with reference to the attached drawings below.

[0095]

[0096] 1. Multifunctional ellipse measuring instrument

[0097] Figure 1 is a schematic diagram of a multi-functional ellipsometer according to one embodiment of the present invention.

[0098] As shown in FIG. 1, the present invention may include a light source (110) that radiates incident light (100) toward a specimen (200), an incident light conversion unit that is arranged between the specimen (200) and the light source (110) and changes the optical characteristics of the incident light (100), a detection unit (350) for measuring the optical characteristics of the measurement light (300) reflected or transmitted from the specimen (200), a measurement light analysis unit that is arranged between the specimen (200) and the detection unit (350) and adjusts the optical characteristics of the measurement light (300), and a control unit (420) that controls the incident light conversion unit and the measurement light analysis unit to selectively perform a light amount adjustment mode for adjusting the light amount of the measurement light (300) and selectively perform one polarization measurement mode among a plurality of polarization measurement modes.

[0099] The light source (110) can generate light to measure the shape of the specimen (200) which is the object to be measured. Of course, the light emitted from a lamp or the like can be converted into parallel light by a collimator and then incident on an incident light converter. At this time, the light source (110) is at least one selected from a xenon lamp, a tungsten-halogen lamp, a deuterium lamp, a laser-driven light source (110), a gas laser, and a laser diode, or the light emitted from these can be transmitted through an optical fiber.

[0100] The light sensor (351) is built into the inside of the detection unit (350) and can measure the amount of light reflected or transmitted from the specimen (200).

[0101] The light sensor (351) can measure the incident measurement light amount and receive it in the control unit (420). If the measured measurement light amount is greater than the set measurement light amount, the control unit (420) can control the azimuth of at least one polarizer according to the required polarization measurement mode to reduce the measurement light amount entering the detection unit (350). As a result, by controlling the reflected or transmitted measurement light amount, it is possible to input a light amount less than the set amount to the detection unit (350), thereby preventing the detection unit (350) from malfunctioning due to the light amount exceeding the set amount entering.

[0102] The incident light conversion unit is disposed between the light source (110) and the specimen (200) along the path of the incident light (100), and may include a first polarizer (130) disposed adjacent to the light source (110) and into which the incident light (100) enters, and a second polarizer (140) disposed between the first polarizer (130) and the specimen (200).

[0103] In addition, a first hollow shaft motor (131) for controlling the rotation or azimuth of the first polarizer (130) may be attached to the first polarizer (130), and a second hollow shaft motor (141) for controlling the rotation or azimuth of the second polarizer (140) may be attached to the second polarizer (140).

[0104] The specimen (200) can be used in industrial fields related to conductor elements, flat panel displays, nanobio, nanoimprinting, thin film optics, etc., and can be equipped with thin films, nano patterns, etc. The multifunctional ellipsometer according to the present invention can non-destructively and non-contactly measure and evaluate physical properties such as the thickness of the thin film of the specimen (200) and the shape of the nano pattern.

[0105] The measurement light analysis unit is disposed between the specimen (200) and the detection unit (350) along the path of the measurement light (300), and may include a plurality of polarizers to which the measurement light (300), whose polarization state has changed as it is reflected or transmitted by the specimen (200), is incident. The measurement light analysis unit may include a third polarizer (310) disposed adjacent to the specimen (200) to which the measurement light (300) is introduced, and a fourth polarizer (320) disposed between the third polarizer (310) and the detection unit (350).

[0106] In addition, the measurement light analysis unit may include a third hollow shaft motor (311) attached to the third polarizer (310) to control the rotation or azimuth of the third polarizer (310), and a fourth hollow shaft motor (321) attached to the fourth polarizer (320) to control the rotation or azimuth of the fourth polarizer (320).

[0107] The first hollow shaft motor (131), the second hollow shaft motor (141), the third hollow shaft motor (311), and the fourth hollow shaft motor (321) can be stationary at a certain azimuth angle, rotated at a constant speed, or rotated in a scanning manner, i.e., at a certain azimuth interval, by the control unit (420).

[0108] For example, the control unit (420) may apply a DC voltage of a constant magnitude or a pulse voltage at a constant interval to the hollow shaft motor in order to rotate the hollow shaft motor at a constant speed. In addition, the control unit (420) may apply a DC voltage of a constant magnitude or a pulse voltage at a constant interval to the hollow shaft motor in order to rotate the hollow shaft motor in a scanning manner. In addition, the control unit (420) may apply a DC voltage of a constant magnitude or a pulse voltage at a constant interval to the hollow shaft motor in order to move the polarizers before measurement and maintain them in a stationary state during measurement. The control unit (420) may be equipped with a voltage signal converter for changing the DC voltage into a pulse voltage.

[0109] The detection unit (350) may receive the measurement light (300) reflected from the specimen (200) and may play a role in measuring the amount of light. At this time, the detection unit (350) may be formed of a CCD, CMOS, or photodiode element, and may adopt a spectrometer in which one of the detection units (350) in which a plurality of pixels are arranged in a linear or two-dimensional planar structure is selected and used, or a detection unit (350) made of a PMT, a photodiode, or the like may be adopted. In addition, at this time, the detection unit (350) may be a single spectrometer, or at least one selected from among pixels or binned pixels for each designated wavelength band in a spectrometer set including an s-polarization spectrometer and a p-polarization spectrometer.

[0110] The detection unit (350) may be a single-point detection unit (350) including a PMT and a photodiode when the light source (110) is a single-wavelength light source (110) device. The single-wavelength light source (110) device may be at least one selected from a gas laser and a laser diode. Alternatively, the detection unit (350) may be a single pixel selected from an imaging detection unit (350) including a CCD or CMOS in which pixels are arranged in a two-dimensional planar structure. At this time, if the light source (110) is a single wavelength light source (110) device, no other components are required, but if the light source (110) is a multi-wavelength light source (110) device with multiple wavelengths, color filters that transmit light of a specified wavelength band may be further provided between the light source (110) and the detection unit (350) (consisting of pixels of an imaging detection unit (350) including a CCD or CMOS).

[0111] The detection unit (350) maintains a standby state before an external trigger is transmitted, and performs measurement when the external trigger is transmitted. If the detection unit (350) is a single pixel or binned pixels (pixel binning) selected from an integrating detection unit (350) such as a CCD, CMOS, or photodiode array of a spectrometer, it operates in a manner of outputting or temporarily storing an exposure value for an integration time specified for each detection unit (350). If the detection unit (350) is a non-integrating detection unit (350) such as a detection unit (350) including a PMT, a photodiode, etc., it can operate in a manner of outputting or temporarily storing an exposure value for a very short integration time, that is, approximately the spectral radiant flux value of light.

[0112] The control unit (420) receives measurement information from the detection unit (350), and, depending on the polarization measurement mode, controls the hollow shaft motor coupled to the incident light conversion unit and the measurement light analysis unit to control the azimuth of the polarizers provided in the incident light conversion unit and the measurement light analysis unit, or controls the rotation speed of the polarizers provided in the incident light conversion unit and the measurement light analysis unit to perform constant rotation, scanning, or simple azimuth position movement. In detail, the control unit (420) can control the azimuth of the first polarizer (130), the second polarizer (140), the third polarizer (310), and the fourth polarizer (320) to a specific azimuth, control the constant rotation angular velocity, or perform scanning by repeating the process of moving at a constant azimuth interval and maintaining a stationary state during measurement a predetermined number of times.

[0113] The control unit (420) can selectively perform a light amount control mode for controlling the amount of light of the measurement light and at the same time selectively perform one polarization measurement mode among a plurality of polarization measurement modes.

[0114] In addition, the control unit (420) can control at least one of the incident light conversion unit and the measured light analysis unit based on the light amount measured by the light amount sensor (351) when performing the light amount control mode.

[0115] The multifunctional ellipsometer according to the present invention may further include a calculation unit (410). The calculation unit (410) calculates the optical characteristics of the specimen based on the data measured by the detection unit (350).

[0116] If the specimen (200) to be measured using the multifunctional ellipsometer has anisotropic optical properties, there are 9 non-zero components among the Mueller matrix components of the specimen (200), and these components can be determined using the multifunctional ellipsometer.

[0117] If the specimen (200) to be measured using the multi-functional ellipsometer has isotropic optical properties, the number of non-zero components among the Mueller matrix components of the specimen (200) is reduced to six, and since these components have symmetrical properties, the final three components can be determined using the multi-functional ellipsometer.

[0118] The polarization measurement mode may include a first polarization measurement mode for quickly measuring anisotropic optical properties of a specimen (200), a second polarization measurement mode for accurately measuring anisotropic optical properties of a specimen (200), and a third polarization measurement mode for quickly and accurately measuring isotropic optical properties of a specimen (200).

[0119] If the amount of light measured by the light sensor (351) is within a preset standard light amount range, the control unit (420) performs the first polarization measurement mode.

[0120] In addition, when the light amount measured by the light amount sensor (351) exceeds the preset standard light amount range, the control unit (420) can perform the light amount control mode and at the same time perform the second polarization measurement mode or the third polarization measurement mode depending on the properties of the specimen.

[0121] In the above light amount control mode, the control unit (420) can control the light amount of the measurement light detected by the detection unit (350) by controlling the relative position between the azimuth angles with respect to the characteristic axis of at least two polarizers among the plurality of polarizers.

[0122] Referring to Fig. 2, the process of performing the first polarization measurement mode is described as follows.

[0123] When the light amount measured by the light sensor (351) is within a preset reference light amount range, the control unit (420) controls the first polarizer (130) and the fourth polarizer (320) to move to the first azimuth and the second azimuth before measurement, respectively, and to be fixed during measurement, and controls the second polarizer (140) and the third polarizer (310) to rotate at a constant speed. Here, the first azimuth and the second azimuth may be set to the same value or may be set to different values.

[0124] When two polarizers rotate at a constant speed with an integer speed ratio as in the first polarization measurement mode, the light quantity measurement values ​​measured by the light quantity sensor (351) at equal time intervals within the mechanical rotation period are given in the form of a periodic waveform.

[0125] The above periodic waveform can be described as a function composed of Fourier coefficients, and the Fourier coefficients are given in the form of a linear simultaneous equation with the Muller matrix components of the sample (200).

[0126] Since the number of Fourier coefficients having non-zero values ​​that can be determined by the first polarization measurement mode of the multifunctional ellipsometer can be equal to or greater than the number of Mueller matrix components of the anisotropic specimen to be measured, the solutions to the linear simultaneous equations can be mathematically solved, and from this, the values ​​of the Mueller matrix components of the specimen (200) can be determined.

[0127] In the first polarization measurement mode, anisotropic optical properties of a specimen (200) can be measured at high speed. Of course, isotropic optical properties of a specimen can also be measured in the first polarization measurement mode.

[0128] Referring to Fig. 3, the process of performing the first embodiment of the second polarization measurement mode is described as follows.

[0129] The control unit (420) performs the second polarization measurement mode according to the present embodiment when the light amount measured by the light amount sensor (351) is outside the preset reference light amount range and the specimen (200) has anisotropy.

[0130] Specifically, the control unit (420) controls the first polarizer (130) to move to the first azimuth before measurement and stop during measurement in order to perform the second polarization measurement mode while simultaneously performing the light amount control mode, controls the second polarizer (140) to move to the second azimuth before measurement and stop during measurement, controls the third polarizer (310) to rotate at a constant speed, and controls the fourth polarizer (320) to sequentially move to the third azimuths configured at a constant azimuth interval and stop during measurement in a scanning manner.

[0131] The multifunctional ellipsometer according to this embodiment can accurately measure anisotropic optical properties of a specimen while simultaneously performing light quantity control.

[0132] Here, since the first polarizer (130) and the second polarizer (140) have different azimuth angles, the amount of incident light passing through the second polarizer (140) is reduced compared to the amount of incident light passing through the first polarizer (130).

[0133] In the case of one constant-speed rotating polarizer in the above multi-functional ellipsometer, the number of Fourier coefficients that can be measured is 5, which is less than the number of Mueller matrix components of the specimen (200) that can be measured by the above multi-functional ellipsometer, which is 9, so it is generally impossible to measure anisotropic optical properties.

[0134] In the second polarization measurement mode, a polarizer other than a constant-speed rotating polarizer is selected as a scanning target, and is sequentially moved to azimuths configured at regular azimuth intervals, so that the values ​​of five Fourier coefficients are determined under different measurement conditions, and by utilizing these, the anisotropic optical properties of the specimen (200) can be determined more accurately.

[0135] Referring to Fig. 4, the process of performing the second embodiment of the second polarization measurement mode is described as follows.

[0136] The control unit (420) can perform the second polarization measurement mode in a different manner from the first embodiment of the second polarization measurement mode when the light amount measured by the light amount sensor (351) is outside the preset reference light amount range and the specimen (200) has anisotropy.

[0137] Specifically, the control unit (420) controls the first polarizer (130) to move to the first azimuth before measurement and stop during measurement in order to perform the second polarization measurement mode while simultaneously performing the light amount control mode, controls the second polarizer (140) to sequentially move to the second azimuths configured at a constant azimuth interval and stop during measurement in a scanning manner, controls the third polarizer (310) to rotate at a constant speed, and controls the fourth polarizer (320) to move to the third azimuth before measurement and stop during measurement.

[0138] Here, if the first polarizer (130) and the fourth polarizer (320) have different azimuth angles, the amount of light of the measurement light passing through the fourth polarizer (420) may be reduced compared to the amount of light of the incident light passing through the first polarizer (130).

[0139] The multifunctional ellipsometer according to the present embodiment can accurately measure anisotropic optical properties of a specimen (200) using the scanning method while performing light quantity control.

[0140] Referring to Fig. 5, the process of performing the third embodiment of the second polarization measurement mode is described as follows.

[0141] The control unit (420) can perform the second polarization measurement mode in a manner different from the first and second embodiments of the second polarization measurement mode mentioned above when the light amount measured by the light amount sensor (351) is outside the preset reference light amount range and the specimen (200) has anisotropy.

[0142] Specifically, the control unit (420) can control the first polarizer (130) to sequentially move to first azimuth angles configured at a constant azimuth interval and remain stationary during measurement in order to perform the second polarization measurement mode while simultaneously performing the light amount control mode, control the second polarizer (140) to rotate at a constant speed, control the third polarizer (310) to move to the second azimuth angle before measurement and remain stationary during measurement, and control the fourth polarizer (320) to move to the third azimuth angle before measurement and remain stationary during measurement.

[0143] Here, if the third polarizer (310) and the fourth polarizer (320) have different azimuth angles, the amount of measurement light passing through the fourth polarizer (320) may be reduced compared to the amount of measurement light passing through the third polarizer (310).

[0144] The multifunctional ellipsometer according to the present embodiment can accurately measure anisotropic optical properties of a specimen (200) using the scanning method while performing light quantity control.

[0145] Referring to Fig. 6, the process of performing the fourth embodiment of the second polarization measurement mode is described as follows.

[0146] The control unit (420) can perform the second polarization measurement mode in a manner different from the first to third embodiments of the second polarization measurement mode mentioned above when the light amount measured by the light amount sensor (351) is outside the preset reference light amount range and the specimen (200) has anisotropy.

[0147] Specifically, the control unit (420) controls the first polarizer (130) to move to the first azimuth before measurement and stop during measurement in order to perform the second polarization measurement mode while simultaneously performing the light amount control mode, controls the second polarizer (140) to rotate at a constant speed, controls the third polarizer (310) to move sequentially to the second azimuths configured at a constant azimuth interval in a scanning manner to stop during measurement, and controls the fourth polarizer (320) to move to the third azimuth before measurement and stop during measurement.

[0148] Here, if the first polarizer (130) and the fourth polarizer (320) have different azimuth angles, the amount of light of the measurement light passing through the fourth polarizer (320) may be reduced compared to the amount of light of the incident light passing through the first polarizer (130).

[0149] The multifunctional ellipsometer according to the present embodiment can accurately measure anisotropic optical properties of a specimen using the scanning method while performing light quantity control.

[0150] Referring to Fig. 7, the process of performing the first embodiment of the third polarization measurement mode is described as follows.

[0151] The control unit (420) performs the third polarization measurement mode according to the present embodiment when the light amount measured by the light amount sensor (351) is outside the preset reference light amount range and the specimen (200) has isotropy.

[0152] Specifically, the control unit (420) controls the first polarizer (130) to move to the first azimuth and stop during measurement in order to perform the third polarization measurement mode while simultaneously performing the light amount control mode, controls the second polarizer (140) to move to the second azimuth and stop during measurement, controls the third polarizer (310) to rotate at a constant speed, and controls the fourth polarizer (320) to move to the third azimuth and stop during measurement.

[0153] Here, if the first polarizer (130) and the second polarizer (140) have different azimuth angles, the amount of incident light passing through the second polarizer (140) may be reduced compared to the amount of incident light passing through the first polarizer (130).

[0154] Additionally, the third polarizer (310) may have the same azimuth angle as either the first polarizer (130) or the second polarizer (140).

[0155] When the specimen (200) has isotropic optical properties and the third polarization measurement mode is used, the number of light quantity values ​​to be measured by the light quantity sensor (351) per mechanical rotation cycle of the constant-speed rotating polarizer can be reduced compared to when the first polarization measurement mode is used, and since the scanning method does not need to be applied as in the second polarization measurement mode, the isotropic optical properties can be measured more quickly and accurately.

[0156] The multi-functional ellipsometer according to this embodiment can measure the isotropic optical properties of a specimen quickly and accurately, since it performs light quantity control and eliminates the time required by the scanning method.

[0157] Referring to Fig. 8, the process of performing the second embodiment of the third polarization measurement mode is described as follows.

[0158] The control unit (420) can perform the third polarization measurement mode in a different manner from the first embodiment of the third polarization measurement mode when the light amount measured by the light amount sensor (351) is outside the preset reference light amount range and the specimen (200) has isotropy.

[0159] Specifically, the control unit (420) controls the first polarizer (130) to move to the first azimuth angle and stop during measurement in order to perform the third polarization measurement mode while simultaneously performing the light amount control mode, controls the second polarizer (140) to rotate at a constant speed, controls the third polarizer (310) to move to the second azimuth angle and stop during measurement, and controls the fourth polarizer (320) to move to the third azimuth angle and stop during measurement.

[0160] Here, if the third polarizer (310) and the fourth polarizer (320) have different azimuth angles, the amount of incident light passing through the fourth polarizer (320) may be reduced compared to the amount of incident light passing through the third polarizer (310).

[0161] Additionally, the first polarizer (130) may have the same azimuth angle as either the third polarizer (310) or the fourth polarizer (320).

[0162] When the specimen (200) has isotropic optical properties and the third polarization measurement mode is used, the number of light quantity values ​​to be measured by the light quantity sensor (351) per mechanical rotation cycle of the constant-speed rotating polarizer can be reduced compared to when the first polarization measurement mode is used, and since the scanning method does not need to be applied as in the second polarization measurement mode, the isotropic optical properties can be measured more quickly and accurately.

[0163] As a result, the present invention enables high-speed measurement of optical properties for isotropic / anisotropic specimens by performing the first polarization measurement mode when light quantity control is unnecessary.

[0164] In addition, the present invention selectively performs a second polarization measurement mode for measuring the optical properties of an anisotropic specimen while performing the light amount control mode when light amount control is required, and a third polarization measurement mode for measuring the optical properties of an isotropic specimen while performing the light amount control mode, thereby simultaneously performing the function of measuring the optical properties according to the specimen along with the light amount control function.

[0165]

[0166] 2. Dual optical element rotary ellipsometer

[0167] A dual optical element rotational ellipsometer (100) according to one embodiment of the present invention includes a light source unit (110), a polarization unit (120) including an incident light conversion unit and a measurement light analysis unit, a detection unit (130), a calculation unit (140), and a control unit (150).

[0168] Here, the dual optical element rotational ellipsometer (100) according to the first and second embodiments can be classified according to the number of polarizing parts provided in the incident light conversion part and the number of polarizing parts provided in the measurement light analysis part.

[0169]

[0170] 2-1. Example 1

[0171] Hereinafter, a dual optical element rotational ellipsometer according to a first embodiment of the present invention will be described with reference to FIG. 9.

[0172] Fig. 9 is a schematic diagram showing a dual optical element rotational ellipsometer according to the first embodiment of the present invention.

[0173] Referring to FIG. 9, a dual optical element rotational ellipsometer (100) according to the first embodiment of the present invention includes a light source unit (110), a polarizing unit (120), a detection unit (130), a calculation unit (140), and a control unit (150).

[0174] The light source unit (110) irradiates incident light toward the sample.

[0175] Specifically, the light source unit (110) can generate light to measure the shape of the sample (10) which is the object to be measured. Of course, the light emitted from a lamp or the like can be converted into parallel light by a collimator and then incident on an incident light conversion unit. At this time, the light source unit (110) can be at least one selected from a xenon lamp, a tungsten-halogen lamp, a deuterium lamp, a laser-driven light source, a gas laser, and a laser diode, or can transmit light emitted from these through an optical fiber.

[0176] The polarizing unit (120) includes an incident light conversion unit and a measurement light analysis unit.

[0177] The incident light conversion unit includes at least one incident light polarizing unit (121, 122, 123) arranged between the sample (10) and the light source unit to change the optical characteristics of the incident light.

[0178] Specifically, there are three incident light polarizing units (121, 122, 123), and two incident light polarizing units (122, 123) are positioned between one incident light polarizing unit (121) and the sample (10).

[0179] The at least one incident light polarizing unit (121, 122, 123) described above is a first polarizing unit (121), a second polarizing unit (122), and a third polarizing unit (123).

[0180] The first polarizing unit (121) is positioned adjacent to the light source unit (110) and changes the polarization state of incident light irradiated from the light source unit (110).

[0181] Specifically, the first polarizing unit (121) is placed on the other side of the light source unit (110) and changes the polarization state of incident light irradiated from the light source unit (110) as rotation is stopped by the control unit (150).

[0182] The first polarizing part (121) for this purpose includes a first optical element (121a) and a first motor (121b).

[0183] The first polarizer (121a) is placed on the other side of the light source (110) and changes the polarization state of incident light irradiated from the light source (110).

[0184] The first motor (121b) is formed on the lower sides of the first optical element (121a) and rotates the first optical element (121a) by the control unit (150) and then stops it during measurement.

[0185] The second polarizing unit (122) is positioned adjacent to the first polarizing unit (121) and firstly rotates the incident light polarized by the first polarizing unit (121).

[0186] Specifically, the second polarizing part (122) is placed on the other side of the first polarizing part (121), and rotates at a constant speed by the control part (150) to firstly rotate the incident light polarized from the first polarizing part (121).

[0187] The second polarizing part (122) for this purpose includes a second optical element (122a) and a second motor (122b).

[0188] The second optical element (122a) is arranged on the other side of the first optical element (121a) and rotates at a constant speed to first-rotate polarized incident light from the first optical element (121a).

[0189] The second motor (122b) is formed on the lower sides of the second optical element (122a) and rotates the second optical element (122a) at a constant speed by the control unit (150).

[0190] The third polarizing unit (123) is placed between the second polarizing unit (122) and the sample (10) and converts the incident light that is first rotationally polarized from the second polarizing unit (122) into second rotationally polarized light.

[0191] Specifically, the third polarizing part (123) is placed on the other side of the second polarizing part (122), and rotates at a constant speed by the control part (150) to secondarily rotate the incident light polarized from the second polarizing part (122).

[0192] The third polarizing part (123) for this purpose includes a third optical element (123a) and a third motor (123b).

[0193] The third optical element (123a) is arranged on the other side of the second optical element (122a) and rotates at a constant speed to second-rotate the incident light polarized from the second polarizer (122a).

[0194] The third motor (123b) is formed on the lower sides of the third optical element (123a) and rotates the third optical element (123a) at a constant speed by the control unit (150).

[0195] The measurement light analysis unit includes at least one measurement light polarization unit (124) arranged between the sample (10) and the detection unit (130) to control the optical characteristics of the measurement light.

[0196] Here, at least one measuring light polarizing unit (124) is one as the fourth polarizing unit (124) and is placed on the other side of the sample (10).

[0197] Specifically, the fourth polarizing unit (124) is placed between the sample (10) and the detection unit (130) to change the polarization state of the measurement light that is reflected or transmitted after the second rotationally polarized incident light is incident on the sample (10).

[0198] The fourth polarizing unit (124) for this purpose includes a fourth optical element (124a) and a fourth motor (124b).

[0199] The fourth optical element (124a) is placed on the other side of the sample (10) and changes the polarization state of the measurement light that is reflected or transmitted after the incident light that has been secondarily polarized by the third polarizer (123a) is incident on the sample (10).

[0200] The fourth motor (124b) is formed on the lower sides of the fourth optical element (124a) and rotates the fourth optical element (124a) at a constant speed by the control unit (150).

[0201] The first to fourth optical elements (121a, 122a, 123a, 124a) described above can be selected as either a linear polarizer or a compensator.

[0202] Specifically, a linear polarizer can convert incident light of any polarization state into transmitted light of a linear polarization state.

[0203] Meanwhile, the compensator can convert incident light of any polarization state into transmitted light of a polarization state having a phase difference between perpendicular polarizations.

[0204] The detection unit (130) measures the optical characteristics of the measurement light reflected or transmitted from the sample (10).

[0205] The detection unit (130) for this purpose includes a detection member (131) and a light quantity sensor (132).

[0206] The detection member (131) is placed on the other side of the fourth polarizing member (124) and measures the optical characteristics of the measurement light reflected or transmitted from the sample (10).

[0207] The light sensor (132) measures the amount of light reflected or transmitted from the sample (10).

[0208] Specifically, the light sensor (132) can measure the incident measurement light amount and receive it in the control unit (150), and if the measured measurement light amount is greater than or equal to the set measurement light amount, the control unit (150) can control the azimuth of at least one polarizer according to the required polarization measurement mode to increase or decrease the measurement light amount entering the detection member (132). As a result, the light sensor (132) can control the reflected or transmitted measurement light amount to cause the detection member (131) to receive a light amount less than the set amount, thereby preventing the detection member (132) from malfunctioning due to the light amount exceeding the set amount entering.

[0209] The calculation unit (140) calculates the Mueller matrix components of the sample (10) from the light quantity value measured by the detection unit (130).

[0210] Specifically, in order to obtain the values ​​of the Muller matrix components of the sample (10), which is a measured quantity, using the dual optical element rotational ellipsometer (100) according to the first embodiment of the present invention, it is necessary to find the waveform of the spectral radiant flux value detected by the light quantity sensor (132) according to the change in azimuth angle of the uniformly rotating optical element.

[0211] For example, a dual optical element rotational ellipsometer (100) according to the first embodiment of the present invention is equipped with one or more constantly rotating elements (the constant rotating elements in the first and second embodiments are the second and third optical elements (122a, 123a)) and has a basic rotation time period (T r ) is assumed to be rotating at a constant speed.

[0212] At this time, when a parallel beam is incident on the sample (10) at an angle of incidence (Φ), the spectral radiation flux detected by one light quantity sensor (130) corresponding to each wavelength (λ) is expressed as a periodic function of time t as in [Mathematical Formula 1] below due to the optical symmetry of the uniformly rotating optical element.

[0213]

[0214] [Mathematical Formula 1]

[0215]

[0216] (Here, I'0=DC Fourier coefficient, A' n , B' n =AC Fourier coefficients, N ho = order of the highest term among the non-zero AC Fourier coefficients)

[0217]

[0218] In [Mathematical expression 1], the AC Fourier coefficients of odd order have the value 0, so the non-zero Fourier coefficients (A') n , B' n ) is usually a total of N ho +1 exists.

[0219] Basic rotation time period (T r ) and a set of exposure measurement values ​​and Fourier coefficients (A') obtained by measuring the exposure amount J times at equal intervals during n , B' n ) is given by a system of linear equations.

[0220] Therefore, from the set of exposure measurements, the Fourier coefficients (A' n , B' n ) must satisfy the following conditional expression [Mathematical Expression 2].

[0221] [Equation 2]

[0222]

[0223] (Here, J = number of exposure measurements)

[0224]

[0225] Also, the Fourier coefficients (A' n , B' n ) and the Mueller matrix components of the sample (10), so a linear simultaneous equation is established and used.

[0226] In a conventional dual-optical-rotational ellipsometer, when the rotation ratio of the first and second uniformly rotating optical elements is 5:3, N ho =32, so the number of exposure measurements J must be at least 33.

[0227] If the minimum integration time of the light sensor is T i,min The fastest time that can be measured is 33T i,min It becomes.

[0228] Therefore, in order to measure faster using a light sensor with the same performance, it is possible to reduce the number of exposure measurements (J).

[0229] Accordingly, the dual-optical element-rotary ellipsometer (100) according to the first and second embodiments of the present invention calculates the number of exposure measurements (J) using the aforementioned [Mathematical Expression 1] and [Mathematical Expression 2], and then, according to the required polarization measurement mode, controls the azimuth of the characteristic axis of at least one optical element (121a, 122a, 123a, 124a) to reduce the amount of measurement light entering the detection member (132), thereby reducing the number of exposure measurements (J), thereby improving the measurement speed.

[0230] Here, the characteristic axis of at least one optical element (121a, 122a, 123a, 124a) is defined as the transmission axis when at least one optical element (121a, 122a, 123a, 124a) is a linear fluorescent element, and is generally defined as the polarization axis along which the phase advances rapidly when at least one optical element (121a, 122a, 123a, 124a) is a compensator.

[0231] The control unit (150) selectively performs a light amount control mode for controlling the amount of light of the measurement light and simultaneously controls the incident light conversion unit and the measurement light analysis unit to selectively perform a polarization measurement mode.

[0232] Here, the polarization measurement mode is a mode for measuring anisotropic optical properties of a sample (10) at high speed.

[0233] The control unit (150) controls at least one incident light polarizing unit (121) among at least one incident light polarizing unit (121, 122, 123) to be fixed, and controls the optical elements (122a, 123a) arranged in two incident light polarizing units (122, 123) among at least one incident light polarizing unit (121, 122, 123) to rotate at a constant speed, respectively.

[0234] Specifically, the control unit (150) controls at least one of the incident light conversion unit and the measured light analysis unit based on the light amount measured by the light amount sensor (132) when the light amount control mode is performed, and adjusts the relative position between the azimuths with respect to the characteristic axis of at least two of the first to fourth optical elements (121a, 122a, 123a, 124a).

[0235] Additionally, when the amount of light measured by the light sensor (132) falls within a preset standard light amount range, the control unit (150) performs polarization measurement mode.

[0236] Accordingly, the control unit (150) controls the characteristic axes of the first optical element (121a) and the fourth optical element (124a) to move to the first azimuth angle and the second azimuth angle, respectively, before measurement to perform the polarization measurement mode and to remain stationary during measurement, and controls the second optical element (122a) and the third optical element (123a) to rotate at a constant speed.

[0237]

[0238] 2-2. Second Example

[0239] Hereinafter, a dual optical element rotational ellipsometer according to a second embodiment of the present invention will be described with reference to FIG. 10. Descriptions of components identical to those of the first embodiment will be omitted, and technical features different from those of the first embodiment will be described in detail.

[0240] Fig. 10 is a schematic diagram showing a dual optical element rotational ellipsometer according to a second embodiment of the present invention.

[0241] Referring to FIG. 10, a dual optical element rotational ellipsometer (100) according to a second embodiment of the present invention includes a light source unit (110), a polarizing unit (120), a detection unit (130), a calculation unit (140), and a control unit (150).

[0242] The light source unit (110) irradiates incident light toward the sample, and a detailed description thereof is provided in the foregoing.

[0243] The polarizing unit (120) includes an incident light conversion unit and a measurement light analysis unit.

[0244] The incident light conversion unit includes at least one incident light polarizing unit (121) arranged between the sample (10) and the light source unit to change the optical characteristics of the incident light.

[0245] Here, at least one incident light polarizing part (121) is one as a first polarizing part (121) and is arranged on the other side of the light source part (110).

[0246] Specifically, the first polarizing unit (121) is placed between the light source unit (110) and the sample (10) to change the polarization state of incident light irradiated from the light source unit (110).

[0247] The first polarizing part (121) for this purpose includes a first optical element (121a) and a first motor (121b).

[0248] The first optical element (121a) is placed on the other side of the light source unit (110) and changes the polarization state of incident light irradiated from the light source unit (110).

[0249] The first motor (121b) is formed on the lower sides of the first optical element (121a) and rotates the first optical element (121a) by the control unit (150) and then stops it during measurement.

[0250] For a detailed description of the first polarizing portion (121) mentioned above, please refer to the above.

[0251] The measurement light analysis unit includes at least one measurement light polarization unit (122, 123, 124) arranged between the sample (10) and the detection unit (130) to control the optical characteristics of the measurement light.

[0252] The aforementioned at least one incident light polarizing part (122, 123, 124) is three in number, namely, a second polarizing part (122), a third polarizing part (123), and a fourth polarizing part (124).

[0253] Specifically, two measuring light polarizing units (122, 123) are placed between one measuring light polarizing unit (124) and the sample (10).

[0254] The second polarizing unit (122) is positioned adjacent to the sample (10) and firstly rotates the measurement light that is reflected or transmitted after the incident light linearly polarized by the first polarizing unit (121) is incident on the sample (10).

[0255] The second polarizing part (122) for this purpose includes a second optical element (122a) and a second motor (122b).

[0256] The second optical element (122a) is placed on the other side of the sample (10) and firstly rotates the measurement light that is reflected or transmitted after the incident light linearly polarized by the first optical element (121a) is incident on the sample (10).

[0257] The second motor (122b) is formed on the lower sides of the second optical element (122a) and rotates the second optical element (122a) at a constant speed by the control unit (150).

[0258] The third polarizing unit (123) is positioned adjacent to the second polarizing unit (122) and rotates the measurement light that has been firstly polarized by the second polarizing unit (122) into secondly polarized.

[0259] The third polarizing part (123) for this purpose includes a third optical element (123a) and a third motor (123b).

[0260] The third optical element (123a) is placed on the other side of the second optical element (122a) and rotates the measurement light polarized by the second optical element (122a) into a second rotation.

[0261] The third motor (123b) is formed on the lower sides of the third optical element (123a) and rotates the third optical element (123a) at a constant speed by the control unit (150).

[0262] The fourth polarizing unit (124) is placed between the third polarizing unit (123) and the detection unit (130) to change the polarization state of the second rotationally polarized measurement light.

[0263] The fourth polarizing unit (124) for this purpose includes a fourth optical element (124a) and a fourth motor (124b).

[0264] The fourth optical element (124a) is arranged on the other side of the third optical element (123a) and changes the polarization state of incident light that has been secondarily rotationally polarized by the third optical element (123a).

[0265] The fourth motor (124b) is formed on the lower sides of the fourth optical element (124a) and rotates the fourth optical element (124a) at a constant speed by the control unit (150).

[0266] The detection unit (130) includes a detection member (131) and a light sensor (132).

[0267] The detection member (131) is placed on the other side of the fourth polarizing member (124) and measures the optical characteristics of the measurement light reflected or transmitted from the sample (10).

[0268] The light sensor (132) measures the amount of light reflected or transmitted from the sample (10).

[0269] For a detailed description of the above-mentioned detection unit (130), please refer to the above.

[0270] The calculation unit (140) calculates the Mueller matrix components of the sample (10) from the light amount value measured by the detection unit (130). For a detailed description of the calculation unit (140), refer to the above.

[0271] The control unit (150) controls the optical element (124a) of one of the measuring light polarization units (122, 123, 124) to be fixed, and controls the optical elements (122a, 123a) of two of the measuring light polarization units (122, 123) to be rotated at a constant speed.

[0272] Specifically, the control unit (150) controls at least one of the incident light conversion unit and the measured light analysis unit based on the light amount measured by the light amount sensor (132) when the light amount control mode is performed, and adjusts the relative position between the azimuth angles with respect to the characteristic axis of the optical elements (122a, 123a) arranged in at least two polarizing units (122, 123) among the first to fourth polarizing units (121, 122, 123, 124).

[0273] Additionally, when the amount of light measured by the light sensor (132) falls within a preset standard light amount range, the control unit (150) performs polarization measurement mode.

[0274] Specifically, in order to perform the polarization measurement mode, the control unit (150) controls the first polarizer (121) and the fourth polarizer (124) to move to the first azimuth angle and the second azimuth angle, respectively, before measurement and to remain stationary during measurement, and controls the second polarizer (122) and the third polarizer (123) to rotate at a constant speed.

[0275] Here, the polarization measurement mode is a mode for measuring anisotropic optical properties of a sample (10) at high speed.

[0276] For a detailed description of the above control unit (150), please refer to the above.

[0277]

[0278] 3. Multifunctional optical measurement module system

[0279] [Revised 28.08.2024 under Rule 91] Figure 11 is a conceptual diagram showing a multi-functional optical measurement module system according to one embodiment of the present invention.

[0280] [Revised 28.08.2024 by Rule 91] Referring to FIG. 11, a multifunctional optical measurement module system (300) according to one embodiment of the present invention includes a spectroscopic ellipsometer (100) for measuring the shape of a sample (20) including a pattern (21) and a magnetometer (200) for measuring the magnetism of the sample (20).

[0281] [Revised 28.08.2024 under Rule 91] Referring to Fig. 11, the spectroscopic ellipsometer (100) includes a light source unit (105), a polarization state generation unit (110), a polarization state analysis unit (120), and a detection unit (130).

[0282] [Revised 28.08.2024 by Rule 91] Referring to Fig. 11, the light source unit (105) generates incident light and then irradiates the generated incident light to the polarization state generating unit (110).

[0283] The light source (105) for this purpose can be located on the upper right side of the stage (10).

[0284] For example, the light source (105) may be a white light source, but is not limited thereto.

[0285] The polarization state generation unit (110) polarizes the incident light irradiated from the light source unit (105) and then irradiates it obliquely onto the sample (20).

[0286] [Correction under Rule 91 28.08.2024] The polarization state generation unit (110) for this purpose includes a fixed polarizer (111) and a rotating polarizer (112) as shown in Fig. 11.

[0287] The fixed polarizer (111) polarizes the incident light irradiated from the light source (105).

[0288] For this purpose, the fixed polarizer (111) can be positioned on the upper right side of the stage (10) so as to be closer to the stage (10) than the light source (105).

[0289] The above-mentioned fixed polarizer (111) linearly polarizes incident light and irradiates the linearly polarized incident light to the rotating polarizer (112).

[0290] [Correction under Rule 91 28.08.2024] Referring to Fig. 11, the rotating polarizing unit (112) rotates and rotates the incident light polarized by the fixed polarizer (111) and then irradiates the rotationally polarized incident light to the sample (20).

[0291] For this purpose, the rotating polarizer (112) may be positioned on the upper right side of the stage (10) so as to be closer to the stage (10) than the fixed polarizer (111).

[0292] The above-mentioned rotation polarizing unit (112) may be either a rotation polarizer or a rotation polarization compensator.

[0293] [Correction under Rule 91 28.08.2024] The light source unit (105), fixed polarizer (111) and rotating polarizer (112) described above are arranged on the path of incident light forming an acute angle with the sample (20) while being spaced apart from each other by a predetermined distance, as shown in FIG. 11.

[0294] The polarization state analysis unit (120) polarizes the reflected light that is the incident light reflected from the sample (20).

[0295] [Correction under Rule 91 28.08.2024] The polarization state analysis unit (120) mentioned above includes a rotating analyzer unit (121) and a fixed analyzer (122) as shown in Fig. 11.

[0296] The rotating optical detector (121) rotates and rotates the reflected light that is reflected from the incident light incident on the sample (20).

[0297] Specifically, the rotating optical detector (121) may be arranged symmetrically with the rotating polarizer (112) based on the incident laser described later, but is not necessarily symmetrical.

[0298] That is, the rotating inspection unit (121) is located on the upper left side of the stage (10), and can be arranged symmetrically or asymmetrically with respect to the incident laser.

[0299] Additionally, the rotary analyzer (121) may be either a rotary analyzer or a rotary analyzer compensator.

[0300] The above-mentioned rotating detector (121) irradiates the rotationally polarized reflected light to the fixed detector (122).

[0301] The fixed polarizer (122) polarizes the rotationally polarized reflected light from the rotating polarizer (121).

[0302] [Correction under Rule 91 28.08.2024] The fixed detector (122) for this purpose is located further from the stage (20) than the rotating detector (121) as shown in Fig. 11.

[0303] The above-mentioned fixed optical detector (122) linearly polarizes the rotationally polarized reflected light and then irradiates it to the detector (130).

[0304] [Revised 28.08.2024 by Rule 91] Referring to Fig. 11, the detection unit (130) detects a signal of polarized reflected light from a fixed photodetector (122), thereby enabling shape measurement of a sample (20).

[0305] [Correction under Rule 91 28.08.2024] The above-mentioned rotating detector (121), fixed detector (122) and detection unit (130) are arranged on the path of reflected light while being spaced apart from each other by a predetermined distance as shown in Fig. 11.

[0306] [Revised 28.08.2024 by Rule 91] Referring to Fig. 11, the magnetometer (200) measures the magnetism of a sample (20) by including an alignment light source unit (210), a polarizing unit (220), a beam splitter unit (230), an alignment unit (240), a balance detection unit (250), and a control unit (260).

[0307] The alignment light source (210) generates an incident laser.

[0308] [Revised 28.08.2024 according to Rule 91] Specifically, the alignment light source unit (210) is located above the polarization state generation unit (110) as shown in Fig. 11, and generates an incident laser and then irradiates it to the polarization unit (220).

[0309] At this time, the incident laser is irradiated to the polarizing part (220) so as to be parallel to the stage (10) and the sample (20).

[0310] [Revised 28.08.2024 by Rule 91] Referring to Fig. 11, the polarizing unit (220) polarizes the incident laser irradiated from the alignment light source unit (210).

[0311] Specifically, the polarizing unit (220) is located on one side of the alignment light source unit (210) and linearly polarizes the incident laser beam irradiated from the alignment light source unit (210).

[0312] The beam splitter (230) reflects the polarized incident laser from the polarizing unit (220) to the sample (20) and divides the reflected laser reflected from the sample (20) into a first reflected laser and a second reflected laser.

[0313] [Revised 28.08.2024 under Rule 91] The above-mentioned beam splitter unit (230) includes a first beam splitter (231), a second beam splitter (232), and a polarizing beam splitter (233) as shown in FIG. 11.

[0314] The first beam splitter (231) reflects the polarized incident laser from the polarizing unit (220) to the sample (20).

[0315] For this purpose, the first beam splitter (231) is arranged on the same axis as the alignment light source unit (210) and polarizing unit (220) so as to be parallel to the stage (10) and sample (20).

[0316] Here, it is desirable to set the positions of the spectroscopic ellipsometer (100) and the magnetometer (200) in advance so that the spot positions of the incident light and the spot positions of the incident laser are the same.

[0317] Additionally, if the positions of the spectroscopic ellipsometer (100) and the magnetometer (200) cannot be set in advance so that the spot positions of the incident light and the spot positions of the incident laser are the same, the spot positions of the incident light and the spot positions of the incident laser can be made to match each other in the following manner.

[0318] First, a moving stage (not shown) that can move in the xy plane is installed at the bottom of the magnetometer (200), and by moving the entire magnetometer (200) in at least one direction of the x-axis and y-axis, the spot position of the incident light can be aligned with the spot position of the incident laser.

[0319] Second, the stage (20) can move in at least one direction of the x-axis and the y-axis to match the spot position of the incident light with the spot position of the incident laser.

[0320] Third, a tiltable condenser lens (not shown) is additionally provided between the rotating polarizer (112) and the sample (20) so that the spot position of the incident laser can be moved to the spot position of the incident light, thereby making the spot position of the incident light and the spot position of the incident laser match.

[0321] Additionally, the first beam splitter (231) is positioned above the sample (20) so that the reflected laser reflected from the sample (20) passes through it and is irradiated to the second beam splitter (232).

[0322] The second beam splitter (232) divides the reflected laser that passed through the first beam splitter (231) into the first reflected laser and the second reflected laser.

[0323] For this purpose, the second beam splitter (232) is positioned above the first beam splitter (231) so as to be spaced apart from the first beam splitter (231) by a predetermined distance.

[0324] Here, the first reflected laser is irradiated to the alignment unit (240) in a direction parallel to the incident laser irradiated from the alignment light source unit (210), and the second reflected laser is irradiated to the polarizing beam splitter (233) in a direction perpendicular to the first reflected laser and parallel to the incident laser irradiated to the sample (20) from the first beam splitter (231) and the reflected laser reflected from the sample (20).

[0325] The polarizing beam splitter (233) is positioned on the path of the second reflective laser and is placed above the second beam splitter (232).

[0326] Specifically, the polarizing beam splitter (233) uses a birefringent crystal to split a second reflection laser parallel to the reflection laser into a first polarized beam and a second polarized beam in an orthogonal polarization state, and then irradiates the split first polarized beam and the second polarized beam to a first balance detection unit (251) and a second balance detection unit (252), which will be described later, respectively.

[0327] [Revised 28.08.2024 under Rule 91] Figures 12 (a) and (b) are conceptual diagrams showing that a beam spot (BS) of a first reflective laser is projected on a virtual xy plane generated by an alignment unit provided in a multifunctional optical measurement module system according to one embodiment of the present invention.

[0328] [Revised 28.08.2024 under Rule 91] The alignment unit (240) may be a quad-photodiode that detects the intensity of the photocurrent for the first reflection laser by projecting the first reflection laser perpendicular to the second reflection laser onto a virtual xy plane as shown in (a) of FIG. 12, but is not limited thereto.

[0329] [Correction under Rule 91 28.08.2024] Referring to (a) and (b) of FIG. 11 and FIG. 12, the alignment unit (240) projects the first reflection laser onto a virtual xy plane to check the alignment state of the first reflection laser (BS).

[0330] [Correction under Rule 91 28.08.2024] Here, the xy plane is divided into the first quadrant located in the upper right from the central coordinate (0,0) shown in (a) and (b) of Figure 12, the second quadrant located below the first quadrant, the third quadrant located symmetrically to the second quadrant with respect to the y-axis, and the fourth quadrant located above the third quadrant.

[0331] [Correction under Rule 91 28.08.2024] Referring to Fig. 11, the alignment unit (240) includes a first sensor (241), a second sensor (242), a third sensor (243), and a fourth sensor (244).

[0332] The first sensor (241) detects the intensity of the first photocurrent for a portion projected onto one quadrant of the first reflective laser (BS) and transmits it to the control unit (260).

[0333] The second sensor (242) detects the intensity of the second photocurrent for another part projected into the second quadrant of the first reflective laser (BS) and transmits it to the control unit (260).

[0334] The third sensor (243) detects the intensity of the third photocurrent for another portion projected into the third quadrant of the first reflective laser (BS) and transmits it to the control unit (260).

[0335] The fourth sensor (244) detects the intensity of the fourth photocurrent for the remaining portion projected into the four quadrants of the first reflective laser (BS) and transmits it to the control unit (260).

[0336] The balance detection unit (250) detects the signal of the second reflection laser and measures the magnetization included in the magnetism of the sample (20).

[0337] The balance detection unit (250) for this purpose includes a first balance detection unit (251) and a second balance detection unit (252), as shown in FIG. 13.

[0338] The first balance detection unit (251) is located above the polarization beam splitter (233) and detects the signal of the first polarization beam split from the polarization beam splitter (233).

[0339] The second balance detection unit (252) is located on the other side of the first balance detection unit (251) and above the polarizing beam splitter (233) to detect the signal of the second polarizing beam split from the polarizing beam splitter (233).

[0340] FIG. 15 is a perspective view from one direction showing that a stage operates under the control of a control unit provided in a multi-functional optical measurement module system according to one embodiment of the present invention.

[0341] The control unit (260) controls the operation of the stage (20) supporting the sample (20) so that the spot position of the first reflective laser matches the central coordinate (0,0), which is the center (CP) of the xy plane.

[0342] Here, the center (CP) of the xy plane is, for example, the intersection of the first line (L1) on the x-axis that divides the stage (10) and the sample (20) into upper and lower parts and the second line (L2) on the y-axis that divides the stage (10) and the sample (20) into left and right parts.

[0343] The above-described control unit (260) receives the intensity of the first to fourth photocurrents transmitted from the first to fourth sensors (241, 242, 243, 244).

[0344] Specifically, as shown in (a) of FIG. 15, when the intensities of the first to fourth photocurrents are not the same, the control unit (260) controls the operation of the stage (10) so that the vertex of the stage (10) rises or falls with respect to the center point (CP) of the stage (10), thereby adjusting the inclination of the sample (20) until the intensities of the first to fourth photocurrents become the same, thereby aligning the first reflection laser (BS) to the sample (20) as shown in (b) of FIG. 15.

[0345] Meanwhile, when the intensities of the first to fourth photocurrents are the same as shown in (b) of FIG. 15, the control unit (260) determines that the first reflection laser (BS) is aligned with the sample (20) because the spot position of the first reflection laser matches the central coordinate (0,0), which is the center (CP) of the xy plane, and thus does not control the operation of the stage (20), but instead operates the spectroscopic ellipsometer (100) and the magnetometer (200).

[0346]

[0347] According to the above, the present invention has an advantage in that when the first reflection laser is aligned with the center of the xy plane and aligned with the sample (20), the spectroscopic ellipsometer (100) can measure the shape of the sample (20) and the magnetometer (200) can measure the magnetization included in the magnetism of the sample (20) at the same time.

[0348]

[0349] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will readily appreciate that the present invention can be readily modified into other specific forms without altering the technical spirit or essential characteristics of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single entity may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined manner.

[0350] The scope of the present invention is indicated by the claims described below, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention.

Claims

1. A light source that radiates incident light toward the specimen; An incident light conversion unit disposed between the above-mentioned specimen and the above-mentioned light source to change the optical characteristics of the incident light; A detection unit for measuring the optical characteristics of the measurement light reflected or transmitted from the above specimen; A measuring light analysis unit arranged between the above-mentioned specimen and the above-mentioned detection unit to control the optical characteristics of the measuring light; and A multi-functional elliptical measuring instrument including a control unit that controls the incident light conversion unit and the measurement light analysis unit to selectively perform a light amount control mode for controlling the light amount of the measurement light and selectively perform one polarization measurement mode among a plurality of polarization measurement modes.

2. In paragraph 1, The above incident light conversion unit is, A first polarizer positioned adjacent to the light source and into which the incident light enters; Including a second polarizer disposed between the first polarizer and the specimen, The above measurement light analysis unit, A third polarizer positioned adjacent to the specimen and through which the measurement light is introduced; and A multi-functional elliptical measuring instrument characterized by including a fourth polarizer disposed between the third polarizer and the detection unit.

3. In paragraph 2, A multi-functional ellipsometer, characterized in that the plurality of polarization measurement modes include a first polarization measurement mode for rapidly measuring anisotropic optical properties of the specimen, a second polarization measurement mode for accurately measuring anisotropic optical properties of the specimen, and a third polarization measurement mode for rapidly and accurately measuring isotropic optical properties of the specimen.

4. In paragraph 3, The above detection unit includes a light quantity sensor for measuring the light quantity of the measurement light, A multi-functional elliptical measuring instrument characterized in that the control unit controls at least one of the incident light conversion unit and the measured light analysis unit based on the amount of light measured by the light amount sensor when the light amount control mode is performed, and adjusts the relative position between the azimuth angles with respect to the characteristic axis of at least two polarizers among the polarizers.

5. In paragraph 4, If the light amount measured by the above light amount sensor is within a preset reference light amount range, the control unit performs the first polarization measurement mode, A multi-functional elliptical measuring instrument characterized in that the control unit controls the first polarizer and the fourth polarizer to move to the first azimuth angle and the second azimuth angle, respectively, before measurement to perform the first polarization measurement mode and to remain stationary during measurement, and controls the second polarizer and the third polarizer to rotate at a constant speed.

6. In paragraph 4, A multi-functional elliptical measuring instrument characterized in that, when the light quantity measured by the light quantity sensor exceeds a preset reference light quantity range, the control unit performs the light quantity control mode and at the same time performs the second polarization measurement mode or the third polarization measurement mode according to the physical properties of the specimen.

7. In paragraph 6, A multi-functional ellipse measuring instrument characterized in that the control unit simultaneously performs the light amount control mode when the specimen has anisotropy and controls the first polarizer to move to a first azimuth angle before measurement and remain stationary during measurement in order to perform the second polarization measurement mode, controls the second polarizer to move to a second azimuth angle before measurement and remain stationary during measurement, controls the third polarizer to rotate at a constant speed, and controls the fourth polarizer to sequentially move to third azimuth angles configured at a constant azimuth interval and remain stationary during measurement in a scanning manner.

8. In paragraph 6, A multi-functional elliptical measuring instrument characterized in that the control unit simultaneously performs the light amount control mode when the specimen has anisotropy and controls the first polarizer to move to a first azimuth angle before measurement and remain stationary during measurement in order to perform the second polarization measurement mode, controls the second polarizer to move sequentially to second azimuth angles configured at a constant azimuth angle interval and remain stationary during measurement in a scanning manner, controls the third polarizer to rotate at a constant speed, and controls the fourth polarizer to move to a third azimuth angle before measurement and remain stationary during measurement.

9. In paragraph 6, A multi-functional ellipsometer characterized in that the control unit controls the first polarizer to sequentially move to first azimuth angles configured at a constant azimuth angle interval and to remain stationary during measurement in order to perform the second polarization measurement mode while simultaneously performing the light amount control mode when the specimen has anisotropy, controls the second polarizer to rotate at a constant speed, controls the third polarizer to move to the second azimuth angle before measuring the polarizer so that it remains stationary during measurement, and controls the fourth polarizer to move to the third azimuth angle before measuring the polarizer so that it remains stationary during measurement.

10. In paragraph 6, A multi-functional ellipse measuring instrument characterized in that the control unit simultaneously performs the light quantity control mode when the specimen has anisotropy and controls the first polarizer to move to a first azimuth angle before measurement and remain stationary during measurement in order to perform the second polarization measurement mode, controls the second polarizer to rotate at a constant speed, controls the third polarizer to move sequentially to second azimuth angles configured at a constant azimuth angle interval and remain stationary during measurement in a scanning manner, and controls the fourth polarizer to move to a third azimuth angle before measurement and remain stationary during measurement.

11. In paragraph 6, A multi-functional ellipse measuring instrument characterized in that the control unit, when the specimen is isotropic, simultaneously performs the light amount control mode and controls the first polarizer to move to a first azimuth angle before measurement and to remain stationary during measurement in order to perform the third polarization measurement mode, controls the second polarizer to move to a second azimuth angle before measurement and to remain stationary during measurement, controls the third polarizer to rotate at a constant speed, and controls the fourth polarizer to move to a third azimuth angle before measurement and to remain stationary during measurement.

12. In paragraph 6, A multi-functional ellipse measuring instrument characterized in that the control unit, when the specimen is isotropic, simultaneously performs the light amount control mode and controls the first polarizer to move to a first azimuth angle before measurement and to be stationary during measurement in order to perform the third polarization measurement mode, controls the second polarizer to rotate at a constant speed, controls the third polarizer to move to a second azimuth angle before measurement and to be stationary during measurement, and controls the fourth polarizer to move to a third azimuth angle before measurement and to be stationary during measurement.

13. A light source unit that irradiates incident light toward the sample; An incident light conversion unit including at least one incident light polarizing unit disposed between the sample and the light source unit to change the optical characteristics of the incident light; A detection unit for measuring the optical characteristics of measurement light reflected or transmitted from the sample; A measuring light analysis unit including at least one measuring light polarizing unit disposed between the sample and the detection unit to control the optical characteristics of the measuring light; A control unit that controls the incident light conversion unit and the measurement light analysis unit to selectively perform a light amount control mode for controlling the light amount of the measurement light and to selectively perform a polarization measurement mode; and A dual optical element rotational ellipsometer, characterized by including a calculation unit that calculates the Mueller matrix components of the sample from the light quantity value measured by the detection unit.

14. In paragraph 13, The above at least one incident light polarizing part is three, The above at least one measuring light polarizing part is 1, A dual optical element rotational ellipsometer, characterized in that the control unit controls one of the at least one incident light polarizing unit to be fixed, and controls two of the at least one incident light polarizing unit to rotate at a constant speed.

15. In paragraph 14, A dual optical element rotational ellipsometer, characterized in that the two incident light polarizing parts are positioned between the one incident light polarizing part and the sample.

16. In paragraph 14, At least one incident light polarizing portion, A first polarizing unit arranged adjacent to the light source unit to change the polarization state of incident light irradiated from the light source unit; A second polarizing unit arranged adjacent to the first polarizing unit to first-rotate incident light whose polarization state has been changed by the first polarizing unit; and A third polarizing unit is disposed between the second polarizing unit and the sample and rotates incident light polarized by the first rotation from the second polarizing unit to a second rotation; A dual optical element rotational ellipsometer, characterized in that the at least one measuring light polarizing unit is a fourth polarizing unit disposed between the sample and the detection unit to change the polarization state of the measuring light reflected or transmitted after the second rotationally polarized incident light is incident on the sample.

17. In paragraph 13, The above at least one incident light polarizing portion is 1, The above at least one measuring light polarizing part is three, A dual optical element rotational ellipsometer, characterized in that the control unit controls one of the at least one measuring light polarization unit to be fixed, and controls two of the at least one measuring light polarization unit to rotate at a constant speed.

18. In paragraph 17, A dual optical element rotational ellipsometer, characterized in that the two measuring light polarizing units are positioned between the one measuring light polarizing unit and the sample.

19. In paragraph 17, The at least one incident light polarizing unit is a first polarizing unit arranged between the light source unit and the sample to change the polarization state of incident light irradiated from the light source unit; At least one measuring light polarizing unit, A second polarizing unit arranged adjacent to the sample to first polarize the measurement light reflected or transmitted after the polarized incident light is incident on the sample; A third polarizing unit arranged adjacent to the second polarizing unit to second-orderly polarize the measurement light that has been first-orderly polarized by the second polarizing unit; and A dual optical element rotational ellipsometer characterized by comprising a fourth polarizing unit arranged between the third polarizing unit and the detection unit to change the polarization state of the second rotationally polarized measurement light.

20. In paragraph 16 or paragraph 19, A dual optical element rotational ellipsometer characterized in that the above polarization measurement mode is a mode for measuring isotropic and anisotropic optical properties of the sample at high speed.

21. In paragraph 20, The above detection unit includes a light quantity sensor for measuring the light quantity of the measurement light, A dual optical element rotary ellipsometer, characterized in that the control unit controls at least one of the optical elements arranged in the incident light conversion unit and the measured light analysis unit based on the amount of light measured by the light amount sensor when the light amount control mode is performed, and adjusts the relative position between the azimuth angles with respect to the characteristic axis of at least two optical elements among the first to fourth optical elements.

22. In paragraph 21, If the light amount measured by the above light amount sensor is within a preset reference light amount range, the control unit performs the polarization measurement mode, A dual optical element rotational ellipsometer characterized in that the control unit controls the characteristic axes of the first optical element and the fourth optical element to move to the first azimuth angle and the second azimuth angle respectively before measurement and to remain stationary during measurement in order to perform the polarization measurement mode, and controls the second optical element and the third optical element to rotate at a constant speed.

23. A spectroscopic ellipsometer for measuring the shape of the sample, including a light source unit that generates incident light, a polarization state generation unit that polarizes the incident light irradiated from the light source unit and then irradiates the polarized light obliquely to the sample, a polarization state analysis unit that polarizes the reflected light reflected from the incident light incident on the sample, and a detection unit that detects the signal of the polarized reflected light; and A magnetometer for measuring magnetism of a sample, comprising: an alignment light source unit for generating an incident laser, a polarizing unit for polarizing the incident laser, a beam splitter unit for reflecting the polarized incident laser to the sample and distributing the reflected laser reflected from the sample into a first reflected laser and a second reflected laser, an alignment unit for projecting the first reflected laser onto a virtual xy plane to confirm the alignment state of the first reflected laser, a balance detection unit for detecting a signal of the second reflected laser, and a control unit for controlling the operation of a stage for supporting the sample so that the spot position of the first reflected laser matches the center of the xy plane; A multifunctional optical measurement module system characterized by including:

24. In paragraph 23, The above beam splitter unit includes a first beam splitter that reflects the polarized incident laser from the polarizing unit to the sample, A multifunctional optical measurement module system characterized in that the first beam splitter is arranged on the same axis as the alignment light source unit and the polarizing unit so as to be parallel to the sample.

25. In paragraph 24, The first beam splitter is positioned above the sample and passes the reflected laser reflected from the sample, A multifunctional optical measurement module system characterized in that the beam splitter unit further includes a second beam splitter that divides the reflected laser passing through the first beam splitter into the first reflected laser and the second reflected laser.

26. In paragraph 25, The above beam splitter section further includes a polarizing beam splitter positioned on the path of the second reflective laser and disposed above the second beam splitter, A multifunctional optical measurement module system characterized in that the polarizing beam splitter uses a birefringent crystal to split the second reflected laser parallel to the reflected laser into a first polarized beam and a second polarized beam in an orthogonal polarization state.

27. In paragraph 26, The above balance detection unit, A first balance detection unit located above the polarizing beam splitter and detecting a signal of the first polarized beam split from the polarizing beam splitter; and A multifunctional optical measurement module system characterized by comprising a second balance detection unit located on the other side of the first balance detection unit and above the polarizing beam splitter to detect a signal of the second polarizing beam split from the polarizing beam splitter.

28. In paragraph 23, A multi-functional optical measurement module system characterized in that the alignment unit is a quad-photodiode that projects the first reflection laser perpendicular to the second reflection laser onto the xy plane and detects the intensity of the photocurrent for the first reflection laser.

29. In paragraph 28, The above xy plane is divided into the first quadrant located in the upper right from the central coordinate, the second quadrant located below the first quadrant, the third quadrant located symmetrically to the second quadrant with respect to the y-axis, and the fourth quadrant located above the third quadrant. The above alignment part, A first sensor that detects the intensity of the first photocurrent for a portion of the first reflective laser projected onto the first quadrant and transmits the intensity to the control unit; A second sensor that detects the intensity of the second photocurrent for another portion of the first reflective laser projected into the second quadrant and transmits it to the control unit; A third sensor that detects the intensity of a third photocurrent for another portion of the first reflective laser projected into the third quadrant and transmits it to the control unit; and A multi-functional optical measurement module system, characterized by including a fourth sensor that detects the intensity of the fourth photocurrent for the remaining portion projected into the four quadrants among the first reflective lasers and transmits it to the control unit.

30. In paragraph 29, The control unit receives the intensity of the first to fourth photocurrents transmitted from the first to fourth sensors, A multi-functional optical measurement module system characterized in that, when the intensities of the first to fourth photocurrents are not equal, the control unit controls the operation of the stage so that the vertex of the stage rises or falls with respect to the center point (CP) of the stage, thereby adjusting the inclination of the sample until the intensities of the first to fourth photocurrents become equal, thereby aligning the first reflection laser to the sample.

31. In paragraph 24, The above alignment light source unit is located above the polarization state generating unit, and after generating the incident laser, irradiates it to the polarization unit, A multifunctional optical measurement module system characterized in that the polarizing unit is located on one side of the alignment light source unit and polarizes the incident laser irradiated from the alignment light source unit.

32. In paragraph 23, The above polarization state generating unit is, A fixed polarizer that polarizes the incident light irradiated from the light source; and A rotational polarizing unit that rotates incident light polarized by the fixed polarizer and then irradiates the rotationally polarized incident light to the sample; A multifunctional optical measurement module system characterized in that the light source, the fixed polarizer, and the rotating polarizer are arranged on the path of the incident light forming an acute angle with the sample while being spaced apart from each other by a predetermined distance.

33. In paragraph 32, A multifunctional optical measurement module system characterized in that the above rotational polarizing unit is one of a rotational polarizer and a rotational polarization compensator.

34. In paragraph 23, The above polarization state analysis unit, A rotating optical detector that rotates and polarizes the reflected light reflected from the incident light incident on the sample; and It includes a fixed analyzer that polarizes the rotationally polarized reflected light from the above rotating analyzer; A multi-functional optical measurement module system characterized in that the rotating optical detector, the fixed optical detector, and the detection unit are arranged on the path of the reflected light while being spaced apart from each other by a predetermined distance.

35. In paragraph 34, A multi-functional optical measurement module system characterized in that the above-mentioned rotating optical analyzer is one of a rotating optical analyzer and a rotating optical compensator.

36. In paragraph 35, A multifunctional optical measurement module system characterized in that when the first reflection laser is aligned with the center of the xy plane and aligned with the sample, the spectroscopic ellipsometer measures the shape of the sample and the magnetometer measures the magnetization included in the magnetism of the sample.

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