Filtering device and coating system

Abstract

The present application relates to a filtering device and a coating system. A reaction cavity is formed in a housing, and a gas inlet and a gas outlet are provided on the housing. First flow guide assemblies and second flow guide assemblies are all disposed in the reaction cavity and are alternately arranged at intervals in the flow direction of a gas flow. In the flow direction of the gas flow, the orthographic projections of first filter plates do not overlap the orthographic projections of second filter plates. After tail gas flows into a flow guide cavity through a first filter plate, the flow direction of the tail gas changes under the guidance of a second flow guide plate, and the tail gas then flows toward a second filter plate in the extension direction of the second flow guide plate; and after the tail gas flows into a flow guide cavity through the second filter plate, the flow direction of the tail gas changes under the guidance of a first flow guide plate, and the tail gas then flows toward a first filter plate in the extension direction of the first flow guide plate. In this way, the flow path of the tail gas in the flow guide cavities can be extended.

Description

Filtration device and coating system

[0001] Related applications

[0002] This application claims priority to Chinese patent application number 2023111210110, filed on August 31, 2023, entitled “Filtering device and coating system,” the entire text of which is hereby incorporated by reference. Technical Field

[0003] The present application relates to the field of film coating technology, and in particular to a filtering device and a film coating system. Background Art

[0004] The ALD (Atomic Layer Deposition) process is a relatively commonly used coating technology. During the operation of the ALD process coating system, process gas pulses are alternately introduced into the coating chamber, and the process gas chemically adsorbs and reacts on the deposition substrate to form a deposited film. The exhaust gas after the reaction will itself carry dust particles, and the unreacted process gas in the exhaust gas will react in the filter device and the vacuum pump to produce new dust particles. The vacuum pump extracts the reacted exhaust gas out of the coating device, and the exhaust gas flows through the particle capture filter device and the vacuum pump in turn.

[0005] In some cases, the filter device can filter the dust particles entrained in the exhaust gas after the reaction. However, the unreacted process gas will still react with the air in the vacuum pump after flowing through the existing filter device and produce new dust particles. The dust particles will accumulate in the vacuum pump, causing the vacuum pump to get stuck and affecting the normal operation of the coating system.

[0006] Summary of the Invention

[0007] According to various embodiments of the present application, a filtering device and a coating system are provided.

[0008] A filtering device comprising:

[0009] A shell having a reaction chamber formed therein and an air inlet and an air outlet formed on the shell;

[0010] The first flow guide component and the second flow guide component are both disposed in the reaction chamber and are alternately arranged along the flow direction of the gas flow, with a flow guide cavity formed between adjacent first flow guide components and second flow guide components;

[0011] The first flow guide component includes a first flow guide plate and a first filter plate connected together, and the second flow guide component includes a second flow guide plate and a second filter plate connected together. In the flow direction of the airflow, the orthographic projection of the first filter plate and the orthographic projection of the second filter plate do not overlap.

[0012] In the technical solution of the embodiment of the present application, the guide cavity can extend the flow path of the exhaust gas in the guide cavity. Similarly, after the exhaust gas flows into the guide cavity through the second filter plate, it will change its flow direction under the guidance of the first guide plate and flow towards the first filter plate along the extension direction of the first guide plate.

[0013] In one embodiment, the first guide plate is arranged around the circumference of the first filter plate.

[0014] In one embodiment, the second filter plate is arranged around the circumference of the second guide plate.

[0015] In the technical solution of the embodiment of the present application, the exhaust gas has a longer flow path in the guide cavity, so that the exhaust gas has more time to react with the air, thereby allowing the exhaust gas to fully react in the guide cavity.

[0016] In one embodiment, the first guide plate extends relative to the first filter plate toward the flow direction of the airflow.

[0017] In one embodiment, the first guide plate extends relative to the first filter plate in a direction opposite to the flow direction of the airflow.

[0018] In the technical solution of the embodiment of this application, the exhaust gas, guided by the first guide plate, is displaced both along the flow direction of the airflow or in a direction opposite to the flow direction of the airflow, and perpendicular to the flow direction of the airflow. This allows the exhaust gas to have a longer flow path within the guide chamber, giving it more time to react, thereby allowing it to fully react within the reaction chamber.

[0019] In one embodiment, the second guide plate includes a first sub-plate and a second sub-plate, the second sub-plate is arranged around the circumference of the first sub-plate, and the second sub-plate connects the first sub-plate and the second filter plate.

[0020] In one embodiment, the second sub-plate and the second filter plate both extend relative to the first sub-plate toward the flow direction of the airflow.

[0021] In one embodiment, the second sub-plate and the second filter plate both extend relative to the first sub-plate in a direction opposite to the flow direction of the airflow.

[0022] In the technical solution of the embodiment of the present application, the flow path of the exhaust gas in the guide cavity is longer, and the exhaust gas has more time to react, so that the exhaust gas can fully react in the guide cavity.

[0023] In one embodiment, the first guide plate, the second sub-plate and the second filter plate extend in the same direction.

[0024] In the technical solution of the embodiment of the present application, the flow path of the exhaust gas in the reaction chamber is extended as much as possible so that the exhaust gas can have more time to react, thereby allowing the exhaust gas to fully react in the guide chamber.

[0025] In one embodiment, a filter element is included, and the filter element is arranged at the air outlet.

[0026] In the technical solution of the embodiment of the present application, a filter is installed at the gas outlet to further filter dust particles in the exhaust gas, and then the exhaust gas flows into the vacuum pump through the gas outlet. This can further ensure that the exhaust gas reacts completely and the dust particles in the reaction gas are more fully filtered, thereby reducing the chance of dust particles entering the vacuum pump and extending the service life of the vacuum pump.

[0027] In one embodiment, a gas supply pipe assembly is included, wherein the gas supply pipe assembly includes an air inlet pipe and an air outlet pipe that are interconnected, the air outlet pipe is arranged in the reaction chamber, and the air outlet pipe is provided with a plurality of air outlet holes;

[0028] The air inlet pipe is used to input reaction gas into the air outlet pipe.

[0029] In one embodiment, the gas outlet pipe is located in the reaction chamber near the gas inlet.

[0030] In the technical solution of the embodiment of the present application, each outlet pipe can input reaction gas into the corresponding guide cavity, which is conducive to a more complete reaction of the exhaust gas when flowing through the guide cavity, and cooperates with the first filter plate or the second filter plate to fully filter the dust particles, thereby reducing the probability of dust particles entering the vacuum pump and extending the service life of the vacuum pump.

[0031] In one embodiment, there are multiple air outlet pipes, and the air outlet pipes correspond to the guide cavities one by one, and the air outlet pipes are arranged in the corresponding guide cavities.

[0032] In the technical solution of the embodiment of the present application, each outlet pipe can input reaction gas into the corresponding guide cavity, which is conducive to a more complete reaction of the exhaust gas when flowing through the guide cavity, and cooperates with the first filter plate or the second filter plate to fully filter the dust particles, thereby reducing the probability of dust particles entering the vacuum pump and extending the service life of the vacuum pump.

[0033] A coating system, comprising:

[0034] a film coating device, wherein a film coating chamber is provided;

[0035] vacuum pumps; and

[0036] In the filtering device in the aforementioned embodiment, the air inlet of the filtering device is communicated with the coating chamber, and the air outlet of the filtering device is communicated with the vacuum pump.

[0037] The above-mentioned filtering device and coating system, the filtering device includes a shell, a first flow guide component and a second flow guide component. A reaction chamber is formed in the shell, and an air inlet and an air outlet are opened on the shell. The first flow guide component and the second flow guide component are both arranged in the reaction chamber, and are alternately arranged along the flow direction of the airflow, and a flow guide chamber is formed between adjacent first flow guide components and second flow guide components. Among them, the first flow guide component includes a connected first flow guide plate and a first filter plate, and the second flow guide component includes a connected second flow guide plate and a second filter plate. In the flow direction of the airflow, the orthographic projection of the first filter plate and the orthographic projection of the second filter plate do not overlap. In the filtering device of the embodiment of the present application, the first flow guide component or the second flow guide component divides the reaction chamber into a connected air inlet chamber, a flow guide chamber and an air outlet chamber, the air inlet chamber is connected to the air inlet, and the air outlet chamber is connected to the air outlet. After the exhaust gas flows into the reaction chamber from the air inlet, it needs to flow through the air inlet chamber, the flow guide chamber and the air outlet chamber in sequence, and then flow out from the air outlet. After the exhaust gas flows through the first filter plate and into the guide cavity, it changes its flow direction under the guidance of the second guide plate and flows toward the second filter plate along the extension direction of the second guide plate. This extends the exhaust gas flow path in the guide cavity. Similarly, after the exhaust gas flows through the second filter plate and into the guide cavity, it changes its flow direction under the guidance of the first guide plate and flows toward the first filter plate along the extension direction of the first guide plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are merely embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the disclosed drawings without any creative work.

[0039] FIG1 is a schematic structural diagram of the coating system in the present application, wherein the direction of the arrow is the flow direction of the exhaust gas or the flow direction of the process gas involved in the coating.

[0040] FIG2 is a schematic structural diagram of a filtering device in an embodiment of the present application.

[0041] FIG3 is a schematic structural diagram of a filtering device in another embodiment of the present application, wherein the direction of the arrow is the flow direction of the exhaust gas or the flow direction of the reaction gas.

[0042] FIG4 is a schematic diagram of a partial enlarged structure of area A in FIG3 , wherein the direction of the arrow is the flow direction of the tail gas or the flow direction of the reaction gas.

[0043] FIG5 is a schematic structural diagram of a filtering device in another embodiment of the present application.

[0044] FIG6 is a schematic structural diagram of a filtering device in yet another embodiment of the present application, wherein the direction of the arrow is the flow direction of the exhaust gas or the flow direction of the reaction gas.

[0045] FIG7 is a schematic structural diagram of a filtering device in another embodiment of the present application, wherein the direction of the arrow is the flow direction of the exhaust gas or the flow direction of the reaction gas.

[0046] FIG8 is a schematic structural diagram of the air supply pipeline assembly in this application.

[0047] Reference numerals

[0048] 100. Coating system;

[0049] 11. Filter device;

[0050] 111, housing; 111a, reaction chamber; 111b, air inlet; 111c, air outlet; 111d, flow guide chamber; 111e, air inlet chamber; 111f, air outlet chamber; 1111, upper cover;

[0051] 112, first flow guide assembly; 1121, first flow guide plate; 1122, first filter plate; 112a, first truncated cone-shaped space;

[0052] 113, second flow guide assembly; 1131, second flow guide plate; 1132, first sub-plate; 1133, second sub-plate; 1134, second filter plate; 113a, second truncated cone-shaped space;

[0053] 114. Air supply pipe assembly; 1141. Air inlet pipe; 1142. Air outlet pipe;

[0054] 115. Filter element;

[0055] 12. Coating device; 13. Vacuum pump. DETAILED DESCRIPTION

[0056] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0057] Referring to FIG. 1 , the present application provides a coating system 100 , comprising a coating device 12 , a vacuum pump 13 , and a filter device 11 . The coating device 12 includes a coating chamber. The air inlet 111 b of the filter device 11 communicates with the coating chamber, while the air outlet 111 c of the filter device 11 communicates with the vacuum pump 13 .

[0058] During the operation of the coating system 100, process gases involved in coating are introduced into the coating chamber of the coating device 12. The process gases undergo a coating reaction in the coating chamber and perform the coating operation. The exhaust gas after the reaction is drawn out of the coating chamber by the vacuum pump 13 and passes through the filter device 11 and the vacuum pump 13. The exhaust gas after the reaction will carry dust particles, and the exhaust gas after the reaction may not be completely reacted. During the circulation process, the exhaust gas will react with the air in the filter device 11 and the vacuum pump 13 to generate new dust particles.

[0059] The filter device 11 in the embodiment of the present application extends the path of the exhaust gas flowing in the filter device 11 so that the exhaust gas can fully react in the filter device 11 and generate dust particles, and filters the dust particles to filter the dust inside the filter device 11, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0060] Please refer to Figures 2 and 3. On the one hand, the present application provides a filter device 11, which includes: a housing 111, a first flow guide component 112 and a second flow guide component 113.

[0061] A reaction chamber 111 a is formed in the shell 111 . An air inlet 111 b and an air outlet 111 c are formed on the shell 111 . The air inlet 111 b , the reaction chamber 111 a and the air outlet 111 c are connected in sequence.

[0062] In the embodiments of the present application, the post-reaction process gas is defined as tail gas. It is understood that the tail gas is drawn out of the coating chamber by the vacuum pump 13 and flows into the reaction chamber 111a from the air inlet 111b and then out from the air outlet 111c. Thus, the tail gas forms a flow path within the reaction chamber 111a, flowing from the air inlet 111b to the air outlet 111c.

[0063] The first flow guiding components 112 and the second flow guiding components 113 are both disposed in the reaction chamber 111 a and are alternately arranged along the flow direction of the gas flow. A flow guiding chamber 111 d is defined between adjacent first flow guiding components 112 and second flow guiding components 113 .

[0064] It is understood that the first flow guide component 112 or the second flow guide component 113 divides the reaction chamber 111a into an air inlet chamber 111e, a plurality of flow guide chambers 111d, and an air outlet chamber 111f, which are sequentially connected along the flow direction of the airflow. The air inlet chamber 111e is connected to the air inlet 111b, and the air outlet chamber 111f is connected to the air outlet 111c. The exhaust gas flows into the air inlet chamber 111e from the air inlet 111b, and needs to flow through the air inlet chamber 111e, the flow guide chamber 111d, and the air outlet chamber 111f in sequence before flowing out of the air outlet 111c. In this way, the provision of multiple flow guide chambers 111d can extend the path of the exhaust gas flowing within the filter device 11, so that the exhaust gas can fully react within the filter device 11 and generate dust particles.

[0065] Among them, the first guide component 112 includes a connected first guide plate 1121 and a first filter plate 1122, and the second guide component 113 includes a connected second guide plate 1131 and a second filter plate 1134. In the flow direction of the airflow, the orthographic projection of the first filter plate 1122 and the orthographic projection of the second filter plate 1134 do not overlap.

[0066] It is understood that after the exhaust gas flows into the guide cavity 111d through the first filter plate 1122, it will change its flow direction under the guidance of the second guide plate 1131 and flow toward the second filter plate 1134 along the extension direction of the second guide plate 1131. In this way, the flow path of the exhaust gas in the guide cavity 111d can be extended (the flow direction of the airflow is shown by arrows P, Q, and X in Figure 4). Similarly, after the exhaust gas flows into the guide cavity 111d through the second filter plate 1134, it will change its flow direction under the guidance of the first guide plate 1121 and flow toward the first filter plate 1122 along the extension direction of the first guide plate 1121 (the flow direction of the airflow is shown by arrows Q, X, and Y in Figure 4).

[0067] In one embodiment of the present application, please refer to Figures 3 to 6. After the exhaust gas flows into the air inlet chamber 111e from the air inlet 111b, the exhaust gas will flow through the first filter plate 1122 to enter the guide chamber 111d. During this process, the first filter plate 1122 filters the dust particles in the exhaust gas and the dust particles generated by the reaction in the air inlet chamber 111e, and the first guide plate 1121 can guide the exhaust gas flowing into the air inlet chamber 111e to the first filter plate 1122; entering the guide chamber 111d through the first filter plate 1122, the exhaust gas flows to the second filter plate 1134 under the guidance of the second guide plate 1131 of the second guide component 113, and enters the next guide chamber 111d through the second filter plate 1134. After passing through multiple first filter plates 1122 and second filter plates 1134, the exhaust gas flows into the outlet chamber 111f. During this process, the guide chamber 111d extends the flow path of the exhaust gas so that the exhaust gas can fully react in the guide chamber 111d and generate dust particles, and then the dust particles are filtered through the first filter plate 1122 and the second filter plate 1134, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0068] The specific number of first flow guide components 112 and second flow guide components 113 is not limited. It is understood that the first flow guide components 112 and the second flow guide components 113 are spaced apart to define the flow guide chamber 111d. Therefore, the number of first flow guide components 112 is at least one, and the number of second flow guide components 113 is at least one. Furthermore, the specific number of first flow guide components 112 and second flow guide components 113 is related to the specific dimensions of the reaction chamber 111a. Specifically, the longer the flow path of the airflow within the reaction chamber 111a, the more space is available for the first flow guide components 112 and the second flow guide components 113, and the greater the number of first flow guide components 112 and the second flow guide components 113.

[0069] The specific positions of the air inlet 111b and the air outlet 111c are not limited. In some embodiments, please refer to Figures 1 and 2, the shell 111 extends along the first direction, the air inlet 111b is arranged at one end of the shell 111 along the first direction, and the air outlet 111c is arranged on the peripheral side of the other end of the shell 111 along the first direction.

[0070] The specific style of the housing 111 is not limited. In some embodiments, referring to FIG1 , the housing 111 includes an upper cover 1111 having an air outlet 111c , a reaction chamber 111a is formed in the housing 111 , and the air outlet 111c is in communication with the reaction chamber 111a .

[0071] In some embodiments, when the specific number of either the first flow guide components 112 or the second flow guide components 113 is N, the specific number of the other should be N + 1. For example, if the specific number of the first flow guide components 112 is one and the specific number of the second flow guide components 113 is two, the layout of the first flow guide components 112 and the second flow guide components 113 should be "second flow guide component 113 - first flow guide component 112 - second flow guide component 113".

[0072] In other embodiments, the specific number of the first flow guide components 112 is equal to the specific number of the second flow guide components 113. For example, if the specific number of the first flow guide components 112 is two and the specific number of the second flow guide components 113 is two, the layout of the first flow guide components 112 and the second flow guide components 113 should be "second flow guide component 113 - first flow guide component 112 - second flow guide component 113 - first flow guide component 112" or "first flow guide component 112 - second flow guide component 113 - first flow guide component 112 - second flow guide component 113".

[0073] In the embodiment of the present application, referring to Figures 3 to 6 , the specific number of first flow guiding components 112 is equal to the specific number of second flow guiding components 113. If the specific number of first flow guiding components 112 and the specific number of second flow guiding components 113 are both M, and M satisfies the condition M ≥ 2, then the specific number of flow guiding cavities 111d defined between the first flow guiding components 112 and the second flow guiding components 113 is M+1.

[0074] It can be understood that a plurality of guide chambers 111d are formed in the filter device 11, so that the reaction gases can pass through each guide chamber 111d in turn, and react with the air in each guide chamber 111d to form new dust particles, which are then filtered by the corresponding first filter plate 1122 or second filter plate 1134 downstream. In this way, the exhaust gas can fully react in the guide chamber 111d and filter out the dust particles generated by the exhaust gas reaction, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0075] In some embodiments, referring to FIG. 3 to FIG. 6 , the first guide plate 1121 is disposed circumferentially around the first filter plate 1122 ; and the second filter plate 1134 is disposed circumferentially around the second guide plate 1131 .

[0076] It can be understood that, along the flow path of the airflow in the reaction chamber 111a, the orthographic projection of the first flow guide component 112 overlaps with the orthographic projection of the second flow guide component 113, that is, the first filter plate 1122 is located at the center of the orthographic projection of the first flow guide component 112, and the second filter plate 1134 is located on the peripheral side of the orthographic projection of the second flow guide component 113.

[0077] In one embodiment of the present application, referring to Figures 3 to 6 , exhaust gas flows from the first filter plate 1122 into the guide cavity 111d, is then guided by the second guide plate 1131, flows from the center of the second guide assembly 113 to the periphery of the second guide assembly 113, and finally flows out of the second filter plate 1134. In another embodiment of the present application, exhaust gas flows from the second filter plate 1134 into the guide cavity 111d, is then guided by the first guide plate 1121, flows from the periphery of the first guide assembly 112 to the center of the first guide assembly 112, and finally flows out of the second filter plate 1134. In this way, the exhaust gas has a longer flow path within the guide cavity 111d, allowing the exhaust gas more time to react with the air, thereby allowing the exhaust gas to fully react within the guide cavity 111d.

[0078] In some embodiments, referring to FIG. 3 to FIG. 6 , the first guide plate 1121 extends relative to the first filter plate 1122 in the direction of the airflow or in a direction opposite to the direction of the airflow.

[0079] In one embodiment of the present application, the inner diameter of the first guide plate 1121 gradually increases along its extension direction.

[0080] It can be understood that the first guide plate 1121 and the first filter plate 1122 cooperate with each other to enclose a first truncated cone shaped space 112a, wherein the first filter plate 1122 is the upper bottom surface of the first truncated cone shaped space 112a, and the first guide plate 1121 is the side surface of the first truncated cone shaped space 112a.

[0081] Specifically, referring to Figures 3 to 6 , the first guide assembly 112 is spaced apart and disposed before the second guide assembly 113. In the guide cavity 111d defined by the first and second guide assemblies 112 and 113, the exhaust gas flows from the second filter plate 1134 into the next guide cavity 111d. Guided by the first guide plate 1121, the exhaust gas flows obliquely. That is, under the guidance of the first guide plate 1121, the exhaust gas is displaced both along the flow direction of the airflow or in a direction opposite to the flow direction of the airflow, and perpendicular to the flow direction of the airflow. This allows the exhaust gas to have a longer flow path in the guide cavity 111d, allowing the exhaust gas more time to react, thereby allowing the exhaust gas to fully react within the reaction cavity 111a.

[0082] In some embodiments, referring to FIG. 3 to FIG. 6 , the second guide plate 1131 includes a first sub-plate 1132 and a second sub-plate 1133 . The second sub-plate 1133 is disposed around the circumference of the first sub-plate 1132 , and the second sub-plate 1133 connects the first sub-plate 1132 and the second filter plate 1134 .

[0083] The second sub-plate 1133 and the second filter plate 1134 both extend relative to the first sub-plate 1132 in the direction of the airflow or in the direction opposite to the airflow direction.

[0084] In one embodiment of the present application, the inner diameters of the second sub-plate 1133 and the second filter plate 1134 gradually increase along their respective extension directions.

[0085] It can be understood that the first sub-plate 1132, the second sub-plate 1133 and the second filter plate 1134 cooperate with each other to form a second truncated cone-shaped space 113a, wherein the first sub-plate 1132 is the upper bottom surface of the second truncated cone-shaped space 113a, and the second sub-plate 1133 and the second filter plate 1134 together form the side surface of the second truncated cone-shaped space 113a.

[0086] Specifically, referring to Figures 3 to 6 , the second guide assembly 113 is spaced apart from the first guide assembly 112. Within the guide cavity 111d defined by the first and second guide assemblies 112 and 113, exhaust gas flows from the first filter plate 1122 into the guide cavity 111d. After encountering the first sub-plate 1132, exhaust gas is blocked and flows toward the periphery of the first sub-plate 1132. Guided by the first guide plate 1121 and the second sub-plate 1133, the exhaust gas flows obliquely to the second filter plate 1134. During this process, the exhaust gas is guided by the first guide plate 1121, the first sub-plate 1132, and the second sub-plate 1133, respectively. Furthermore, the second sub-plate 1133 is displaced both in the direction of the airflow or in a direction opposite to the airflow direction, and also in a direction perpendicular to the airflow direction. This allows the exhaust gas to have a longer flow path within the guide cavity 111d, giving it more time to react and allowing it to fully react within the guide cavity 111d.

[0087] In some embodiments, referring to FIG. 3 to FIG. 6 , the first guide plate 1121 , the second sub-plate 1133 , and the second filter plate 1134 extend in the same direction.

[0088] It can be understood that the first guide component 112 and the second guide component 113 are spaced apart to form a first truncated cone-shaped space 112a and a second truncated cone-shaped space 113a, and the structure between the first guide component 112 and the second guide component 113 is more compact, which is conducive to setting up multiple first guide components 112 and second guide components 113 to form multiple guide chambers 111d, thereby extending the flow path of the exhaust gas in the reaction chamber 111a as much as possible, so that the exhaust gas can have more time to react, so that the exhaust gas can fully react in the guide chamber 111d.

[0089] In some embodiments, referring to FIG. 3 and FIG. 4 , a filter element 115 is included, and the filter element 115 is disposed at the air outlet 111 c .

[0090] It is understood that the filter element 115 is disposed within the air outlet cavity 111f and is used to filter the exhaust gas after it passes through all of the first and second air guide components 112, 113. Specifically, after passing through all of the first and second air guide components 112, 113, the exhaust gas enters the air outlet cavity 111f, and the exhaust gas may also react in the air outlet cavity 111f to produce new dust particles. Therefore, the filter element 115 is disposed at the air outlet 111c to further filter the dust particles in the exhaust gas before allowing the exhaust gas to flow into the vacuum pump 13 through the air outlet 111c. This further ensures that the exhaust gas reacts completely and that the dust particles in the reaction gas are more fully filtered, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0091] In some embodiments, as shown in FIG3 , the filter device 11 includes an air supply pipe assembly 114 . The air supply pipe assembly 114 includes an interconnected air inlet pipe 1141 and an air outlet pipe 1142 . The air outlet pipe 1142 has a plurality of air outlet holes. The air outlet pipe 1142 is disposed within the reaction chamber 111 a and is oriented in the direction of the air flow within the reaction chamber 111 a . The air inlet pipe 1141 is used to supply the reactant gas into the air outlet pipe 1142 .

[0092] It is understandable that the reaction gas can react with the tail gas, and the specific type of the reaction gas is related to the gas required for the tail gas reaction, such as water vapor, oxygen or air.

[0093] The specific location of the air outlet pipe 1142 is not limited.

[0094] In some embodiments, referring to FIG. 3 , the gas outlet pipe 1142 is located in the reaction chamber 111 a near the gas inlet 111 b , and the gas outlet pipe 1142 is provided with a plurality of gas outlet holes.

[0095] It is understood that by introducing the reaction gas into the air inlet pipe 1141, the reaction gas can enter the air inlet chamber 111e through the air outlet of the air outlet pipe 1142 and further diffuse to the upstream of the first guide component 112 and the second guide component 113. In this way, the exhaust gas flowing out of the coating chamber and entering the air inlet chamber 111e through the air inlet 111b can immediately be fully mixed with the reaction gas, thereby facilitating a full reaction of the exhaust gas. Dust particles are also fully filtered by the first guide component 112 and the second guide component 113 that the exhaust gas subsequently flows through, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0096] In some other embodiments, referring to FIG. 8 , there are multiple air outlet pipes 1142 , which correspond one-to-one to the flow guiding cavities 111 d , and each air outlet pipe 1142 is disposed in the corresponding flow guiding cavity 111 d .

[0097] It can be understood that each outlet pipe 1142 can input reaction gas into the corresponding guide cavity 111d, which is conducive to a more complete reaction of the exhaust gas when flowing through the guide cavity 111d, and cooperates with the first filter plate 1122 or the second filter plate 1134 to fully filter the dust particles, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0098] Furthermore, the outlet pipe 1142 is disposed near the first filter plate 1122 and / or the second filter plate 1134. It is understood that the reaction gas output by the outlet pipe 1142 can be fully mixed with the exhaust gas flowing through the first filter plate 1122 and / or the second filter plate 1134, thereby facilitating a full reaction of the exhaust gas.

[0099] The specific style of the air outlet pipe 1142 is not limited.

[0100] In some embodiments, referring to FIG. 3 , the air outlet pipe 1142 includes a plurality of sub-segments, which are straight segments and / or bent segments. The air outlet pipe 1142 is provided with a plurality of air outlet holes.

[0101] In one embodiment of the present application, the outlet pipe 1142 comprises a plurality of interconnected straight sections and a plurality of curved sections, each of which is provided with a plurality of outlet holes. Thus, the outlet holes of the outlet pipe 1142 can evenly discharge the reactant gas into the inlet chamber 111e, allowing the exhaust gas entering the inlet chamber 111e to be better mixed with the reactant gas, thereby facilitating a full reaction of the exhaust gas. Furthermore, dust particles are fully filtered by the first and second flow guide assemblies 112 and 113 through which the exhaust gas subsequently flows, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0102] It can be understood that the bending segment can be a curve segment or a broken line segment.

[0103] In other embodiments, referring to FIG. 8 , the air outlet pipe 1142 is in a circular shape.

[0104] It can be understood that the outlet pipe 1142 is arranged close to the second filter plate 1134, and the outlet pipe 1142 can be adapted to the shape of the second filter plate 1134, so that the reaction gas output from the outlet pipe 1142 can be more fully mixed with the exhaust gas flowing through the second filter plate 1134, which is conducive to a more complete reaction between the exhaust gas and the reaction gas, and the dust particles are fully filtered through the subsequent first guide component 112 and the second guide component 113, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0105] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0106] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A filtering device, wherein: include: A shell body, in which a reaction chamber is formed, and the shell body is provided with an air inlet and an air outlet; The first flow guide component and the second flow guide component are both arranged in the reaction chamber and are alternately arranged along the flow direction of the gas flow, and a flow guide chamber is formed between adjacent first flow guide components and second flow guide components; The first flow guide component includes a first flow guide plate and a first filter plate connected together, and the second flow guide component includes a second flow guide plate and a second filter plate connected together. In the flow direction of the airflow, the orthographic projection of the first filter plate and the orthographic projection of the second filter plate do not overlap.

2. The filtering device according to claim 1, wherein: The first guide plate is arranged around the circumference of the first filter plate.

3. The filtering device according to any one of claims 1 to 2, wherein: The second filter plate is arranged around the circumference of the second guide plate.

4. The filtering device according to any one of claims 2 to 3, wherein: The first guide plate extends toward the flow direction of the airflow relative to the first filter plate.

5. The filtering device according to any one of claims 2 to 3, wherein: The first guide plate extends relative to the first filter plate in a direction opposite to the flow direction of the airflow.

6. The filtering device according to any one of claims 2 to 5, wherein: The second guide plate includes a first sub-plate and a second sub-plate, the second sub-plate is arranged around the circumference of the first sub-plate, and the second sub-plate connects the first sub-plate and the second filter plate.

7. The filtering device according to any one of claim 6, wherein: The second sub-plate and the second filter plate both extend relative to the first sub-plate toward the flow direction of the airflow.

8. The filtering device according to any one of claims 6, wherein: The second sub-plate and the second filter plate both extend relative to the first sub-plate in a direction opposite to the flow direction of the airflow.

9. The filtering device according to any one of claims 6 to 8, wherein: The first guide plate, the second sub-plate and the second filter plate extend in the same direction.

10. The filtering device according to any one of claims 1 to 9, wherein: A filter element is included, and the filter element is arranged at the air outlet.

11. The filtering device according to any one of claims 1 to 10, wherein: It includes an air supply pipeline assembly, the air supply pipeline assembly includes an air inlet pipe and an air outlet pipe which are interconnected, the air outlet pipe is arranged in the reaction chamber, and the air outlet pipe is provided with a plurality of air outlet holes; The air inlet pipe is used to input reaction gas into the air outlet pipe.

12. The filtering device according to claim 11, wherein: The gas outlet pipe is located in the reaction chamber near the gas inlet.

13. The filtering device according to claim 11, wherein: There are multiple air outlet pipes, and the air outlet pipes correspond to the guide cavities one by one, and the air outlet pipes are arranged in the corresponding guide cavities.

14. A coating system, wherein: include: A coating device, wherein a coating chamber is provided; Vacuum pump; as well as The filter device described in any one of claims 1 to 13, wherein the air inlet of the filter device is connected to the coating chamber, and the air outlet of the filter device is connected to the vacuum pump.

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