Lid body, package for mounting optical component therein, optical device, and optical module

Abstract

Provided are a lid body having an optical film that is less susceptible to deterioration, a package for mounting an optical component therein, an optical device, and an optical module. The lid body comprises: a base part that has a first surface and transmits light; and a first optical film located on the first surface. The first optical film has a first inclined surface located at the edge of the first optical film, and the first inclined surface is inclined with respect to the first surface.

Description

Lid, package for mounting optical components, optical device and optical module

[0001] The present disclosure relates to a lid, an optical component mounting package, an optical device, and an optical module.

[0002] Japanese Patent Application Laid-Open No. 60-87301 describes a technique for forming an anti-reflection film on the surface of a lens or prism.

[0003] A lid body according to the present disclosure comprises: a base having a first surface and transmitting light; and a first optical film located on the first surface, wherein the first optical film has a first inclined surface located on an edge portion of the first optical film, and the first inclined surface is inclined with respect to the first surface.

[0004] The optical component mounting package according to the present disclosure includes a base having a recess for accommodating an optical component, and the above-described lid joined to the base.

[0005] An optical device according to the present disclosure includes the above-described optical component mounting package and an optical component accommodated in the recess.

[0006] An optical module according to the present disclosure includes the above-described optical device and a module substrate on which the optical device is mounted.

[0007] Fig. 2 is an exploded perspective view of an optical device according to an embodiment of the present disclosure; Fig. 3 is a cross-sectional view showing the lid of Fig. 1; Fig. 4 is a diagram illustrating the planar shapes of a first optical film and a second optical film of the lid; Fig. 5 is an enlarged cross-sectional view showing the shapes of the edges of the first optical film and the second optical film; Fig. 6 is a diagram illustrating an example of a method for manufacturing the first optical film and the second optical film; Fig. 7 is a diagram illustrating an optical module according to an embodiment of the present disclosure;

[0008] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings.

[0009] FIG. 1 is an exploded perspective view of an optical device according to an embodiment of the present disclosure.

[0010] The optical device 10 according to this embodiment includes an optical component 13 and an optical component package 11 that mounts the optical component 13. The optical component package 11 includes a base 12 having a recess 121, and a lid 20 that is bonded to the base 12. The recess 121 has a mounting portion 122 for the optical component 13 therein, and the optical component 13 is accommodated in the recess 121 by being mounted on the mounting portion 122.

[0011] The material of the substrate 12 may be an insulating material such as a ceramic material. As the ceramic material, various ceramics such as an aluminum oxide sintered body (e.g., alumina ceramics), an aluminum nitride sintered body, a mullite sintered body, or a glass ceramic sintered body may be used.

[0012] The base 12 may have an annular seat 123 around the opening of the recess 121. Wiring conductors may be located inside and on the surface of the base 12, and power or signals may be transmitted from inside the recess 121 to outside the recess 121 via the wiring conductors.

[0013] The optical component 13 may be an imaging element such as an image sensor. However, the optical component 13 is not limited to an imaging element and may include one or more light receiving elements and one or more light emitting elements. In addition to the above configuration, the optical component 13 may also include an optical system such as a prism, a mirror, or a lens.

[0014] Fig. 2 is a cross-sectional view showing the lid of Fig. 1. Fig. 2 shows a cross-section taken along line AA of Fig. 3. In Fig. 2, the thickness of each member is exaggerated.

[0015] The cover 20 may include a base 201 having a first surface 202 and transmitting light, a first optical film 210 located on the first surface 202, and a second optical film 220 located on the first optical film 210. The base 201 may further include a second surface 203 located on the opposite side of the first surface 202, a third optical film 230 located on the second surface 203, and a fourth optical film 240 located on the third optical film 230.

[0016] The lid 20 may be configured to be bonded to the base 12 so as to cover the opening of the recess 121. The lid 20 may be bonded to the annular pedestal 123 via a bonding material 204. The bonding material 204 may be a resin adhesive.

[0017] The base 201 may be made of a transparent material such as quartz glass. The base 201 may be plate-shaped, and the first surface 202 and the second surface 203 may be the two wider surfaces. Alternatively, the base 201 may be lens-shaped or prism-shaped, and the first surface 202 and the second surface 203 may be one and the other of a surface into which light is introduced and a surface from which the light is extracted after reflection or refraction.

[0018] The first optical film 210, the second optical film 220, the third optical film 230, and the fourth optical film 240 may be located inside the frame-shaped range in which the bonding material 204 is located in plan view.

[0019] The first optical film 210 may be a film that has a reflection reducing effect. ２ (magnesium fluoride) The first optical film 210 may have a thickness of 10 nm to 100 nm.

[0020] The second optical film 220 may be a film that has a reflection reducing effect. The second optical film 220 may be a film that is more moisture-resistant and abrasion-resistant than the first optical film 210. The second optical film 220 may contain SiO ２ (silicon dioxide) The second optical film 220 may have a thickness of 3 nm to 20 nm.

[0021] The third optical film 230 and the fourth optical film 240 may be similar to the first optical film 210 and the second optical film 220, except that they are located on the second surface 203 side of the base 201. That is, the components, shape, and dimensions of the third optical film 230 may be similar to those of the first optical film 210. The components, shape, and dimensions of the fourth optical film 240 may be similar to those of the second optical film 220. The positional relationship between the third optical film 230 and the fourth optical film 240 may be similar to that between the first optical film 210 and the second optical film 220. The first optical film 210 to the fourth optical film 240 may have the effect of reducing reflection of light in the visible light region and the ultraviolet region. The first optical film 210 to the fourth optical film 240 may also be called anti-reflection films.

[0022] <Inclined Surface> Fig. 3 is a diagram illustrating the planar shapes of the first optical film and the second optical film of the lid body. The upper part of Fig. 3 shows a plan view of the lid body 20 in which the first optical film 210 is indicated by a solid line, and the lower part of Fig. 3 shows a plan view of the lid body 20 in which the second optical film 220 is indicated by a solid line.

[0023] Hereinafter, the inclination angles of the inclined surfaces of the first optical film 210 and the second optical film 220 will be expressed in the range of 0° to 180°, with 90° being the angle when the inclined surfaces are perpendicular to the first surface 202. The inclined surfaces facing outward (i.e., the side opposite the base 201) and parallel to the first surface 202 will be expressed as 0°, and the inclined surfaces inclined beyond the perpendicular will be expressed as a value greater than 90°. Similarly, the inclined angles of the inclined surfaces of the third optical film 230 and the fourth optical film 240 will be expressed in the range of 0° to 180°, with 90° being the angle when the inclined surfaces are perpendicular to the second surface 203. The inclined surfaces facing outward (i.e., the side opposite the base 201) and parallel to the second surface 203 will be expressed as 0°, and the inclined surfaces inclined beyond the perpendicular will be expressed as a value greater than 90°.

[0024] As shown in the upper parts of Figures 2 and 3, the first optical film 210 may have a first inclined surface 211 on the edge portion. In the upper part of Figure 3, a starting point 212 of the first inclined surface 211 is indicated by a dashed line. The first inclined surface 211 is a surface inclined with respect to the first surface 202. The first inclined surface 211 may be located around the entire circumference of the edge portion. Note that the first inclined surface 211 is not limited to being located around the entire circumference of the edge portion, and may be located only partially. Even in this configuration, the first inclined surface 211 provides the effect described below in this portion.

[0025] The first inclined surface 211 may mainly include an inclined surface inclined at an angle of less than 90°. Furthermore, the first inclined surface 211 may mainly include an inclination (for example, an inclination of 3° or more and 87° or less) that is distinguishable from an inclination due to an error such as the inclination of a substantially vertical surface. "Mainly including" means that the inclination occupies 80% or more of the area.

[0026] By positioning the first inclined surface 211 at the edge, the intrusion of moisture from the edge into the first optical film 210 can be reduced, and the durability of the first optical film 210 can be improved. If the first optical film 210 is cut together with the base 201, or if the edge of the first optical film 210 is formed by cutting, the edge of the first optical film 210 will have no inclined surface and will be sheer at 90°. The surface of the sheer edge will be rough. Similarly, if the film is formed so that the edge is sheer at 90°, the sheer surface will be rough. On the other hand, by positioning the first inclined surface 211 at the edge as in this embodiment, the surface of the edge is smooth. The smoothness reduces the intrusion of moisture from the edge and increases the durability of the first optical film 210.

[0027] As shown in the lower parts of Figures 2 and 3, the second optical film 220 may have a second inclined surface 221 on the edge portion. In the lower part of Figure 3, a starting point 222 of the second inclined surface 221 is indicated by a dashed line. The second inclined surface 221 is a surface inclined with respect to the first surface 202. The second inclined surface 221 may be located around the entire circumference of the edge portion. Note that the second inclined surface 221 is not limited to being located around the entire circumference of the edge portion, and may be located only partially. Even in this configuration, the second inclined surface 221 provides the effect described below in this portion.

[0028] The second inclined surface 221 may mainly include an inclined surface inclined at an angle of less than 90°. Furthermore, the second inclined surface 221 may mainly include an inclination (for example, an inclination of 3° or more and 87° or less) that is distinguishable from an inclination due to an error such as the inclination of a substantially vertical surface. "Mainly including" means that the inclination occupies 80% or more of the area.

[0029] By positioning the second inclined surface 221 at the edge, the intrusion of moisture from the edge into the second optical film 220 can be reduced, and the durability of the second optical film 220 can be improved. If the second optical film 220 is cut together with the base 201, or if the edge of the second optical film 220 is formed by cutting, the edge of the second optical film 220 will have no inclined surface and will be sheer at 90°. The surface of the sheer edge will be rough. Similarly, if the film is formed so that the edge is sheer at 90°, the sheer surface will be rough. On the other hand, by positioning the second inclined surface 221 at the edge as in this embodiment, the surface of the edge is smoothed. The smoothness reduces the intrusion of moisture from the edge and increases the durability of the second optical film 220.

[0030] As described above, the starting end 212 of the first inclined surface 211 is indicated by a dashed line in the upper part of Fig. 3 , and the starting end 222 of the second inclined surface 221 is indicated by a dashed line in the lower part of Fig. 3 . In plan view, the starting end 222 of the second inclined surface 221 may be located more inward than the starting end 212 of the first inclined surface 211. As shown in Fig. 3 , in plan view, the position of the outermost periphery of the first optical film 210 may substantially overlap the position of the outermost periphery of the second optical film 220.

[0031] 4 is an enlarged cross-sectional view showing the shapes of the edges of the first optical film and the second optical film, which shows a cross section perpendicular to the first surface 202 and passing through the central portion 219 of the first optical film 210 (see FIGS. 2 and 3 ), from the central portion 219 to one edge.

[0032] 4 , the first optical film 210 may have a first end point P1 that contacts the first surface 202 and is farthest from the central portion 219, a second end point P2 that is closest to the central portion 219 on the first inclined surface 211, and a first intermediate point P11 that is located between the first end point P1 and the second end point P2 on the surface of the first optical film 210. The first inclined surface 211 includes the first end point P1 and the first intermediate point P11, and the inclination angle of the first inclined surface 211 at the first end point P1 may be larger than the inclination angle of the first inclined surface 211 at the first intermediate point P11.

[0033] The above-described shape of the first inclined surface 211 ensures smoothness of the edge surface while reducing the width W1 (see FIG. 3 ) of the first inclined surface 211 in a plan view. Because the first inclined surface 211 exerts an unnecessary refraction effect on light passing through the lid body 20, it is preferable to position it outside the light transmission area, which results in a wasted area in terms of optical properties. Reducing the width W1 allows the wasted area in terms of optical properties to be reduced.

[0034] Furthermore, the first inclined surface 211 may be an inclined surface whose inclination angle gradually increases from the second end point P2 to the first end point P1. With this configuration, the surface of the first inclined surface 211 can be made smoother without increasing the width W1. Therefore, the wasted area in terms of the optical properties of the first optical film 210 can be further reduced, and the durability of the first optical film 210 can be further improved.

[0035] 4 , the angle θ1 at the first end point P1 of the first optical film 210 may be an acute angle. According to this configuration, an inclined surface is also located near the edge of the interface between the first surface 202 and the first optical film 210, thereby reducing the intrusion of moisture into the first optical film 210 near the edge of the interface, and further improving the durability of the first optical film 210.

[0036] The above-described cross-sectional shape of the first optical film 210 may be similarly established around the entire periphery of the edge of the first optical film 210. Note that the cross-sectional shape does not have to be established around the entire periphery of the edge, and may be established only in a portion or multiple portions in the circumferential direction of the edge. Even in this configuration, the effect of the cross-sectional shape is exerted in the portion.

[0037] 4 , the second optical film 220 may have a third end point P3 that is the point closest to the first surface 202, a fourth end point P4 that is closest to the central portion 219 on the second inclined surface 221, and a second intermediate point P12 that is located between the third end point P3 and the fourth end point P4 on the surface of the second optical film 220. The second inclined surface 221 may include the third end point P3 and the second intermediate point P12, and the inclination angle of the second inclined surface 221 at the third end point P3 may be larger than the inclination angle of the second inclined surface 221 at the second intermediate point P12. Note that when the second optical film 220 is in surface contact with the first surface 202, the portion of the second optical film 220 that is closest to the first surface 202 is a line segment in the cross section. In this case, the third end point P3 is defined as the point of the line segment that is farthest from the central portion 219.

[0038] The above-described shape of the second inclined surface 221 ensures smoothness of the edge surface while reducing the width W2 (see FIG. 3) of the second inclined surface 221 in a plan view. Because the second inclined surface 221 exerts an unnecessary refraction effect on light passing through the lid body 20, it is preferable to position it outside the light transmission area, which results in a wasted area in terms of optical properties. Reducing the width W2 allows the wasted area in terms of optical properties to be reduced.

[0039] Furthermore, the second inclined surface 221 may be an inclined surface whose inclination angle gradually increases from the third end point P3 to the fourth end point P4. With this configuration, the surface of the second inclined surface 221 can be made smoother without increasing the width W2. Therefore, the wasted area in terms of the optical properties of the second optical film 220 can be further reduced, and the durability of the second optical film 220 can be further improved.

[0040] In the cross section of FIG. 4 , the angle θ2 at the third end point P3 of the second optical film 220 may be an acute angle. According to this configuration, the second optical film 220 becomes thinner in the vicinity of the third end point P3. This reduces residual stress near the edge of the boundary between the second optical film 220 and the first optical film 210. Alternatively, when the second optical film 220 is in contact with the first surface 202, an inclined surface is also located near the edge of the interface between the first surface 202 and the second optical film 220, thereby reducing moisture penetration into the second optical film 220 near the edge of the interface. This further improves the durability of the first optical film 210 and the second optical film 220.

[0041] The above-described cross-sectional shape of the second optical film 220 may be similarly established around the entire periphery of the edge of the second optical film 220. Note that the cross-sectional shape does not have to be established around the entire periphery of the edge, and may be established only in a portion or multiple portions in the circumferential direction of the edge. Even in this configuration, the effect of the cross-sectional shape is exerted in the portion.

[0042] In a plan view, the first inclined surface 211 and the second inclined surface 221 have an overlapping range (the entire area of ​​the first inclined surface 211 in the example of FIG. 3 ), and the inclination angle of the second inclined surface 221 in the overlapping range may be larger than the inclination angle of the first inclined surface 211. With this configuration, even if the first inclined surface 211 and the second inclined surface 221 overlap, the widths W1 and W2 can be reduced. Therefore, it is possible to reduce wasted areas in the first optical film 210 and the second optical film 220 in terms of optical properties.

[0043] In the cross section of FIG. 4 , the angle θ1 of the first optical film 210 at the first endpoint P1 may be larger than the angle θ2 of the second optical film 220 at the third endpoint P3. With this configuration, even if the first optical film 210 is thicker than the second optical film 220, the entire first inclined surface 211 or much of the first inclined surface 211 can be easily covered by the second inclined surface 221, and the inclination of the second inclined surface 221 can be less than 90° from the fourth endpoint P4 to the third endpoint P3, or from the fourth endpoint P4 to the vicinity of the third endpoint P3. Therefore, much of the edge of the second optical film 220 can be smoothed, thereby reducing moisture intrusion from the edge. Furthermore, since much of the edge of the first optical film 210 is covered by the second optical film 220, moisture intrusion from the edge of the first optical film 210 can be further reduced. Therefore, the durability of the first optical film 210 and the second optical film 220 can be further improved.

[0044] 2 , the third optical film 230 may have an edge shape similar to that of the first optical film 210, and the fourth optical film 240 may have an edge shape similar to that of the second optical film 220. That is, in the above-described description of the first optical film 210 and the second optical film 220, the first optical film 210 may be replaced with the third optical film 230, the second optical film 220 with the fourth optical film 240, and the first surface 202 with the second surface 203, thereby also being considered as a description of the edge shapes of the third optical film 230 and the fourth optical film 240.

[0045] <Method for manufacturing lid body> Fig. 5 is a diagram showing an example of a method for manufacturing the first optical film and the second optical film according to this embodiment. Fig. 5 is a diagram conceptually showing the manufacturing method. Fig. 5 shows that film formation is performed on the base 201 of one lid body 20, but in reality, similar film formation may be performed collectively on multiple bases 201 before or after cutting processing.

[0046] As shown in FIG. 5 , the first optical film 210 and the second optical film 220 are sequentially formed on the first surface 202 of the base 201 using a film-forming apparatus 40 that performs vapor deposition, sputtering, or the like. When forming the first optical film 210, the first surface 202 of the base 201 is faced toward a film particle generation source 41, and a jig 42 having an opening 421 corresponding to the film formation area is set along the first surface 202 of the base 201. Then, as film formation progresses, the jig 42 is replaced or the movable part of the jig 42 is displaced so that the opening 421 narrows. In this manner, as the film thickness increases, the film formation area becomes smaller, and a slope is formed at the edge of the film. This slope then becomes the first inclined surface 211 of the first optical film 210. When forming the second optical film 220, the second inclined surface 221 can be formed using a similar procedure.

[0047] When the first optical film 210 is formed by a liquid phase growth method or the like, a mask having a hollow portion corresponding to the shape of the first optical film 210 having the first inclined surface 211 is formed on the first surface 202 of the base 201 before the film formation process. Then, after forming a film on the exposed surface of the base 201 by liquid phase growth, the mask is removed, thereby forming the first optical film 210 having the first inclined surface 211 on its edge. The second optical film 220 having the second inclined surface 221 can be formed in a similar manner.

[0048] The third optical film 230 and the fourth optical film 240 can also be formed on the second surface 203 of the base 201 by the same process as the film formation method for the first optical film 210 and the second optical film 220 described above.

[0049] <Optical Module> Figure 6 is a diagram showing an optical module according to the present embodiment. An optical module 300 according to the embodiment of the present disclosure includes an optical device 10 and a module substrate 310 on which the optical device 10 is mounted. In addition to the optical device 10, other electronic devices, electronic elements, optical devices, optical elements, etc. may be mounted on the module substrate 310. Electrode pads 311 may be provided on the module substrate 310, and the optical device 10 may be bonded to the electrode pads 311 via a bonding material 312 such as solder.

[0050] According to the optical device 10, optical module 300, and package 11 for mounting optical components of this embodiment, the durability of the first optical film 210 and the second optical film 220 of the lid body 20 is improved, and therefore good optical properties can be maintained for a long time.

[0051] The above describes the embodiments of the present disclosure. However, the present invention is not limited to the above embodiments. For example, in the above embodiments, an example was shown in which the optical film located on the first surface 202 of the base 201 of the lid 20 is two layers, the first optical film 210 and the second optical film 220. However, the optical film may be a single layer of the first optical film, or may be three or more layers. In the case of three or more layers, another optical film may be located between the first optical film and the second optical film.

[0052] Furthermore, in the above embodiment, a configuration was shown in which an optical film was also located on the second surface 203 of the base 201 of the lid 20, but the optical film on the second surface 203 may be omitted. Furthermore, in the above embodiment, a configuration was shown in which the first surface 202 of the lid 20 faces the opposite side of the recess 121, but the first surface 202 of the lid 20 may face inward of the recess 121. Furthermore, in the above embodiment, an example was shown in which the first optical film 210 to the fourth optical film 240 are films that have a reflection-reducing effect, but each optical film may be a film that has a different optical effect. Other details shown in the embodiment can be modified as appropriate without departing from the spirit of the invention.

[0053] An embodiment of the present disclosure is described below. In the embodiment, (1) a cover body includes: a base having a first surface and transmitting light; and a first optical film located on the first surface, wherein the first optical film has a first inclined surface located on an edge portion of the first optical film, and the first inclined surface is inclined with respect to the first surface.

[0054] (2) In the lid body of (1) above, in a cross section perpendicular to the first surface and passing through the center of the first optical film, the cross section extending from the center to one edge, the first optical film has a first end point contacting the first surface and farthest from the center, a second end point on the first inclined surface closest to the center, and a first intermediate point located between the first end point and the second end point on the surface of the first optical film, the first inclined surface including the first end point and the first intermediate point, and the inclination angle of the first inclined surface at the first end point is greater than the inclination angle of the first inclined surface at the first intermediate point.

[0055] (3) In the cover of (2) above, the first inclined surface has an inclination angle that gradually increases from the second end point to the first end point.

[0056] (4) In the cover of (2) or (3) above, the angle at the first end point of the first optical film in the cross section is an acute angle.

[0057] (5) The cover body of any one of (1) to (4) above further comprises a second optical film located on the first optical film, the second optical film having a second inclined surface located on an edge of the second optical film, and the second inclined surface being inclined with respect to the first surface.

[0058] (6) In the lid body of (5) above, in a cross section perpendicular to the first surface and passing through the center of the first optical film, the cross section extending from the center to one edge, the second optical film has a third end point which is the point closest to the first surface or the point farthest from the center among the line segments closest to the first surface, a fourth end point on the second inclined surface which is closest to the center, and a second intermediate point located between the third end point and the fourth end point on the surface of the second optical film, the second inclined surface including the third end point and the second intermediate point, and the inclination angle of the second inclined surface at the third end point is greater than the inclination angle of the second inclined surface at the second intermediate point.

[0059] (7) In the cover of (6) above, the second inclined surface has an inclination angle that gradually increases from the third end point to the fourth end point.

[0060] (8) In the cover according to (6) or (7), the angle at the third end point of the second optical film in the cross section is an acute angle.

[0061] (9) The lid body of any one of (5) to (8) above has a range in which the first inclined surface and the second inclined surface overlap in a plan view, and the inclination angle of the second inclined surface in the overlapping range is larger than the inclination angle of the first inclined surface.

[0062] (10) The lid body of any one of (5) to (9) above, wherein, in a cross section perpendicular to the first surface and passing through the center of the first optical film, the cross section extending from the center to one edge, the first optical film has a first end point that is in contact with the first surface and is farthest from the center, the second optical film has a third end point that is a point closest to the first surface or a point on a line segment closest to the first surface that is farthest from the center, and in the cross section, an angle of the first optical film at the first end point is larger than an angle of the second optical film at the third end point.

[0063] (11) A package for mounting an optical component comprises: a base having a recess for accommodating an optical component; and a lid body of any one of (1) to (10) above, which is bonded to the base.

[0064] (12) An optical device includes the optical component mounting package according to (11) above, and an optical component accommodated in the recess.

[0065] (13) An optical module includes the optical device of (12) above, and a module substrate on which the optical device is mounted.

[0066] The present invention can be used for a cover, a package for mounting optical components, an optical device, and an optical module.

[0067] REFERENCE SIGNS LIST 10 Optical device 11 Optical component mounting package 12 Base 121 Recess 122 Mounting portion 123 Base 13 Optical component 20 Lid 201 Base 202 First surface 203 Second surface 204 Bonding material 210 First optical film 211 First inclined surface 212 Starting end (of first inclined surface) 219 Center 220 Second optical film 221 Second inclined surface 222 Starting end (of second inclined surface) P1 First end point P2 Second end point P11 First intermediate point P3 Third end point P4 Fourth end point P12 Second intermediate point W1, W2 Width 230 Third optical film 240 Fourth optical film 40 Film forming device 41 Source of film particles 42 Jig 421 Opening 300 Optical module 310 Module substrate 311 Electrode pad 312 Bonding material

Claims

1. A cover comprising: a base having a first surface and transmitting light; and a first optical film located on the first surface, the first optical film having a first inclined surface located on an edge of the first optical film, the first inclined surface being inclined with respect to the first surface.

2. The lid according to claim 1, wherein in a cross section perpendicular to the first surface and passing through the center of the first optical film, the first optical film has a first end point in contact with the first surface and furthest from the center, a second end point on the first inclined surface that is closest to the center, and a first intermediate point located between the first end point and the second end point on the surface of the first optical film, the first inclined surface includes the first end point and the first intermediate point, and an inclination angle of the first inclined surface at the first end point is greater than an inclination angle of the first inclined surface at the first intermediate point.

3. The cover according to claim 2, wherein the first inclined surface has an inclination angle that gradually increases from the second end point to the first end point.

4. A lid as described in claim 2 or claim 3, wherein in the cross section, an angle at the first end point of the first optical film is an acute angle.

5. A lid body described in any one of claims 1 to 4, further comprising a second optical film located on the first optical film, the second optical film having a second inclined surface located on an edge of the second optical film, the second inclined surface being inclined with respect to the first surface.

6. A lid as described in claim 5, wherein, in a cross section perpendicular to the first surface and passing through a central portion of the first optical film, the second optical film has a third end point which is a point closest to the first surface or a point furthest from the central portion among the line segments closest to the first surface, a fourth end point on the second inclined surface which is closest to the central portion, and a second intermediate point located between the third end point and the fourth end point on the surface of the second optical film, the second inclined surface includes the third end point and the second intermediate point, and an inclination angle of the second inclined surface at the third end point is greater than an inclination angle of the second inclined surface at the second intermediate point.

7. The cover according to claim 6, wherein the second inclined surface has an inclination angle that gradually increases from the third end point to the fourth end point.

8. A lid according to claim 6 or 7, wherein an angle at the third end point of the second optical film in the cross section is an acute angle.

9. A lid body as described in any one of claims 5 to 8, wherein the first inclined surface and the second inclined surface have an overlapping area in a plan view, and the inclination angle of the second inclined surface is greater than the inclination angle of the first inclined surface in the overlapping area.

10. A lid as described in any one of claims 5 to 9, wherein, in a cross section perpendicular to the first surface and passing through a central portion of the first optical film, the first optical film has a first end point that contacts the first surface and is farthest from the central portion, and the second optical film has a third end point that is a point closest to the first surface or a point among the line segments closest to the first surface that is farthest from the central portion, and in the cross section, an angle of the first optical film at the first end point is greater than an angle of the second optical film at the third end point.

11. A package for mounting an optical component, comprising: a base having a recess for accommodating an optical component; and a lid body according to any one of claims 1 to 10 bonded to the base.

12. An optical device comprising: the package for mounting an optical component according to claim 11; and an optical component accommodated in the recess.

13. An optical module comprising: the optical device according to claim 12; and a module substrate on which the optical device is mounted.

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