Gas guide device

Abstract

A gas guide device has a casing and at least one gas guide plate disposed in a gas chamber of the casing to partition the gas chamber into a first gas passage and a second gas passage. The gas guide plate has a first side, a second side, a first recess recessed from the first side toward the second side, and a second recess recessed from the second side toward the first side. The second recess is formed within a longitudinal extension range of the first recess, and has a radial area less than that of the first recess. The first recess communicates with the second recess to form a gas guide passageway. When a gas flow enters the second gas passage from the first gas passage, the gas flow is regulated to be in a laminar flow state or in a uniformly mixed state via the gas guide passageway.

Description

GAS GUIDE DEVICEFIELD OF THE INVENTION

[0001] The present invention relates to a gas guide device, and more particularly to a gas guide device capable of regulating a gas flow into a stable, uniform laminar flow.BACKGROUND OF THE INVENTION

[0002] In general, a gas guide plate is formed with holes for a gas flow to pass through the holes. However, in some fields, the gas guide plate needs a gas guide effect for the gas flow to be in a laminar flow state, otherwise the gas flow will interfere with each other to introduce moisture and fine dust. When a conventional gas guide plate is to be processed and perforated, if the holes are perforated from only one side of the gas guide plate, gas guide holes with the same diameter will be formed. Such gas guide holes have no special design and cannot meet the gas guide effect required in specific fields. If the holes are perforated from both sides of the gas guide plate, asymmetric step differences on both sides may be caused by perorating errors because the holes are perforated in the same size. As a result, the gas flow is seriously disturbed when passing through the gas guide holes, causing the gas flow to become asymmetrical or uneven and unable to be regulated into a divergent and uniformly mixed gas flow or a convergent symmetrical laminar flow. Especially when the diameter of the holes is small and the density of the holes is high, the interference is very serious, so it needs to be improved.SUMMARY OF THE INVENTION

[0003] The primary obj ect of the present invention is to provide a gas guide device. The gas guide device comprises at least one gas guide plate. One side of the gas guide plate is formed with a plurality of first recesss, and the other side of the gas guide plate is formed with a plurality of second recesss. The radial area of the second recess is less than that of the first recess. There will be no asymmetrical step differences, sot that the gas flow can be regulated into a stable symmetrical laminar flow.

[0004] In order to achieve the foregoing object, the present invention provides a gas guide device, comprising a casing and at least one gas guide plate.

[0005] The casing has a gas chamber.

[0006] The gas guide plate is disposed in the gas chamber to partition the gas chamber into a first gas passage and a second gas passage. The gas guide plate has a first side, a second side opposite to the first side, a first recess that is recessed from the first side toward the second side, and a second recess that is recessed from the second side toward the first side. The second recess has a radial area less than that of the first recess. The second recess is formed within a longitudinal extension range of the first recess. The first recess communicates with the second recess to form a gas guide passageway.

[0007] The gas guide passageway of the gas guide plate is plural. A gas flow enters the second gas passage from the first gas passage via the gas guide passageway, so that the gas flow is regulated to be in a laminar flow state or in a uniformly mixed state via the gas guide passageway.

[0008] Preferably, the gas flow passes through the second recess and the first recess in sequence to be divergent and uniformly mixed.

[0009] Preferably, the gas flow passes through the first recess and the second recess in sequence to form a convergent laminar flow.

[0010] In one embodiment, the number of the gas guide plates is three. When the gas flow passes through the gas guide passageways of the three gas guide plates, the gas flow comes in from the second recess and goes out from the first recess to be uniformly mixed between the three gas guide plates, and the gas flow is discharged from the last one of the gas guide plates to be divergent and uniformly mixed.

[0011] in one embodiment, the number of the gas guide plates is three. When the gas flow passes through the gas guide passageways of the three gas guide plates, the gas flow comes in from the first recess and goes out from the second recess to form a laminar flow mixture between the three gas guide plates, and the gas flow is discharged from the last one of the gas guide plates to form a convergent laminar flow.

[0012] Preferably, the gas guide passageway is in the form of a round hole or a grating.

[0013] Preferably, a side wall of the gas guide passageway is inclined to form an included angle with a normal of the first side or the second side of the gas guide plate. The included angle is in the range of 10° to 30° or 14° to 27°.

[0014] Preferably, the first recess has a depth same as or different from that of the second recess.

[0015] Preferably, the ratio between a diameter of the second recess and a diameter of the first recess is 1 : 1. 1 -2.BRIEF DESCRIPTION OF THE DRAWINGS

[0016] FIG. 1 is a perspective view according to a first embodiment of the present invention;

[0017] FIG. 2 is a schematic view of the processing flow of the gas guide passageway according to the first embodiment of the present invention;

[0018] FIG. 3 is a planar view of the gas guide passageway according to the first embodiment of the present invention;

[0019] FIG. 4 is a schematic view according to the first embodiment of the present invention, wherein the gas flow passes through the gas guide passageway to be divergent and uniformly mixed;

[0020] FIG. 5 is a schematic view according to the first embodiment of the present invention, wherein the gas flow passes through the gas guide passageway to form a convergent laminar flow;

[0021] FIG. 6 is a schematic view illustrating that the gas flow passes through the gas guide device according to the first embodiment of the present invention;

[0022] FIG. 7 is a schematic view illustrating another implementation of the gas guide passageway according to the first embodiment of the present invention;

[0023] FIG. 8 is a schematic view illustrating a further implementation of the gas guide passageway according to the first embodiment of the present invention;

[0024] FIG. 9 is a schematic view according to the first embodiment of the present invention, wherein the side wall of the gas guide passageway is inclined;

[0025] FIG. 10 is a schematic view illustrating that the gas flow passes through the gas guide device according to a second embodiment of the present invention;

[0026] FIG. 11 is a schematic view illustrating that the gas flow passes through the gas guide device of the present invention in a use state;

[0027] FIG. 12 is a schematic view illustrating that the gas flow passes through the gas guide device of the present invention in another use state;

[0028] FIG. 13 is a perspective view of the equipment front end module according to a third embodiment of the present invention; and

[0029] FIG. 14 is an exploded view of the equipment front end module according to the third embodiment of the present invention, wherein the gas guide plates are disposed on the top and bottom of the equipment front end module, respectively.DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0030] Referring to FIGS. 1 to 9, a gas guide device according to a first embodiment of the present invention comprises a casing 1 and at least one gas guide plate 2. The casing 1, as shown in FIG. 1 , has a gas chamber 11 extending along a length direction. The top of the casing 1 has two holes for connection of two gas pipes 12. The upper end of the gas pipe 12 is an open end for introducing a clean and dry gas, and the lower end of the gas pipe 12 communicates with the gas chamber 11 to input the gas to the gas chamber 11.

[0031] The gas guide plate 2 extends along the length direction and is detachably connected in the gas chamber 11 to partition the gas chamber 11 into a first gas passage 13 and a second gas passage 14. The gas guide plate 2 has a first side 21, a second side 22 opposite to the first side 21, a first recess 23 that is recessed from the first side 21 toward the second side 22, and a second recess 24 that is recessed from the second side 22 toward the first side 21. The radial area of the second recess 24 is less than that of the first recess 23, and the second recess 24 is formed within a longitudinal extension range of the first recess 23. The first recess 23 communicates with the second recess 24 to form a gas guide passageway 25. The gas guide plate 2 has plurality of gas guide passageways 25. The gas flow enters the second gas passage 14 from the first gas passage 13 via the gas guide passageway 25, so that the gas flow is regulated to be in a laminar flow state or in a uniformly mixed state via the gas guide passageway 25. As shown in FIG. 4, the gas flow passes through the second recess 24 and the first recess 23 in sequence to be divergent and uniformly mixed. As shown in FIG. 5, the gas flow passes through the first recess 23 and the second recess 24 in sequence to form a convergent laminar flow. In this embodiment, the ratio between the diameter of the secondrecess 24 and the diameter of the first recess 23 is 1: 1. 1-2. The depth of the first recess 23 is same as the depth of the second recess 24. The gas guide passageway 25 is in the form of a round hole or a grating.

[0032] The gas guide device may be used, for example, in the semiconductor manufacturing process, and is installed on the upper side of the load port (not shown in the figures) of a front opening unified pod (FOUP) in the equipment front end module (EFEM) to block moisture and fine dust. FIG. 6 illustrates the flow direction of the gas flow passing through the gas guide plate according to the first embodiment of the gas guide device provided by the present invention. In this first embodiment, the number of the gas guide plates 2 is three. The gas guide plates 2 are disposed in the casing 1 of the gas guide device (as shown in FIG. 1) to partition the gas chamber 11 into a first gas passage 13, a second gas passage 14, and a third gas passage 15. A clean and dry gas is first introduced into the first gas passage 13 of the casing 1 from the gas pipes 12 to form a gas flow. When the gas flow passes through the gas guide passageways 25 of the three gas guide plates 2, it comes in from the second recess 24 and goes out from the first recess 23. Since the diameter of the second recess 24 is smaller than the diameter of the first recess 23, it means that the gas flow passes through each gas guide passageway 25 from the small recess to the large recess to be divergent and uniformly mixed in the second gas flow passage 14 and the third gas flow passage 15. Because the gas flow passes through the gas guide passageway 25 from the small recess to the large recess, the gas flow diffuses around after passing through the gas guide passageway 25 to reduce the flow velocity of the gas flow and increase the flow time of the gas flow in the second gas flow passage 14 and the third gas flow passage 15, such that the gas can be uniformly mixed to reduce turbulent areas. Finally, the gas flow is discharged from the last gas guide plate 2 to enhance the uniform mixing effect and form a thick gas mass to increase the isolation distance. This can effectively block moisture and fine dust and prevent moisture and fine dust from entering the front opening unified pod.

[0033] In addition, the gas guide passageway 25 of the gas guide plate 2 is formed by secondary processing to form recesses with different diameters. Furthermore, one side of the gas guide plate 2 is first processed to form the first recess 23, and then the other side of the gas guide plate 2 is processed to form the second recess 24. The diameter of the second recess 24 is smaller than the diameter of the first recess 23, and the second recess 24 is formed with a longitudinal extension range of the first recess 23. The first recess 23 communicates with the second recess 24. Through the passageway formed by the recesses of different sizes, the gasguide passageway 25 can prevent unilateral step differences from causing asymmetry to affect the flow and mixing of the gas flow. Thus, the gas flow can be regulated stably and mixed uniformly.

[0034] It should be noted that, referring to FIG. 7 and FIG. 8, the depth of the first recess 23 is different from the depth of the second recess 24. As shown in FIG. 7, when the gas flow passes through the gas guide passageway 25 from the first recess 23 to the second recess 24, because the depth of the first recess 23 is smaller than the depth of the second recess 24, the distance the gas flow passes through the second recess 24 is longer than the distance the gas flow passes through the first recess 23, thereby achieving a convergent effect. As shown in FIG. 8, when the gas flow passes through the gas guide passageway 25 from the second recess 24 to the first recess 23, because the depth of the second recess 24 is smaller than the depth of the first recess 23, the distance the gas flow passes through the first recess 23 is longer than the distance the gas flow passes through the second recess 24, thereby achieving a divergent effect.

[0035] it should be noted that, as shown in FIG. 9, the gas guide passageway 25 may be oblique by processing the side walls of the first recess 23 and / or the second recess 24, such that the side wall of the gas guide passageway 25 is inclined to form an included angle 0 with the normal of the first side 21 or the second side 22 of the gas guide plate 2. The included angle 0 is in the range of 10° to 30°. Preferably, the included angle 9 is in the range of 14° to 27°. In the first embodiment, when the included angle 0 is 14.04°, the side wall of the gas guide passageway 25 is gradually inclined outwards from the second side 22 to the first side 21 ; when the included angle 0 is 18.43°, the side wall of the gas guide passageway 25 is gradually inclined outwards from one end, close to the second side 22, to the first side 21; when the included angle 0 is 26.57°, the side wall of the gas guide passageway 25 is gradually inclined outwards from the middle of the side wall to the first side 21. The design of the above-mentioned angles can minimize the turbulent flow generated by the gas flow passing through the two sides of the gas guide passageway 25 according to the inclined position of the side wall of the gas guide passageway 25, so that the gas flow is more laminar.

[0036] FIG. 10 illustrates the flow direction of the gas flow passing through the gas guide plate according to a second embodiment of the gas guide device provided by the present invention. The difference between the second embodiment and the first embodiment is that when the gas flow passes through the gas guide passageways 25 of the three gas guide plates 2, it comes in from the first recess 23 and goes out from the second recess 24. Since the diameterof the second recess 24 is smaller than the diameter of the first recess 23, it means that the gas flow passes through each gas guide passageway 25 from the large recess to the small recess to form a convergent laminar flow mixture in the second gas flow passage 14 and the third gas flow passage 15. Because the gas flow passes through the gas guide passageway 25 from the large recess to the small recess, the gas flow is concentrated in the center after passing through the gas guide passageway 25, and the flow velocity is increased. This also achieves uniform mixing and reduces the turbulent flow area, such that the gas can be mixed uniformly to reduce turbulent areas. Finally, the gas is discharged from the last gas guide plate 2 to enhance the convergent laminar flow, so as to form a concentrated, fast, strong laminar flow. This can effectively block moisture and fine dust and prevent moisture and fine dust from entering the front opening unified pod.

[0037] Referring to FIG. 11 and FIG. 12, the gas guide plates 2 in the gas guide device can be arranged in the casing 1 according to actual needs. For example, the gas guide passageway 25 of the last gas guide plate 2 and the gas guide passageways 25 of the other gas guide plates 2 are arranged in opposite directions. As shown in FIG. 11, the gas flow passes through the gas guide passageways 25 of the other gas guide plates 2 from the small recesses to the large recesses, and is finally discharged via the last gas guide plate 2 from the large recesses to the small recesses to form a convergent laminar flow. As shown in FIG. 12, the gas flow passes through the gas guide passageways 25 of the other gas guide plates 2 from the large recesses to the small recesses, and is finally discharged via the last gas guide plate 2 from the small recesses to the large recesses to be in a divergent and uniformly mixed state. The gas flow can be regulated into a stable symmetrical laminar flow. This can effectively block moisture and fine dust and prevent moisture and fine dust from entering the front opening unified pod.

[0038] FIG. 13 and FIG. 14 illustrate a third embodiment of the gas guide device provided by the present invention. The third embodiment is substantially similar to the first embodiment with the exceptions described hereinafter. The gas guide plates are disposed on the equipment front end module 3. 3Due to the asymmetrical design of the internal mechanism of the equipment front end module 3, the distribution of the gas flow inside the equipment front end module 3 may be uneven. Two gas guide plates 2a are disposed on the top and bottom of the equipment front end module 3, respectively. At least one gas supply unit 31 introduces gas into the equipment front end module 3. The first recesses of the gas guide plate 2a located on the top of the equipment front end module 3 face down, so that the gas sent by the gas supply unit 31 forms a divergent and uniformly mixed gas flow via the gas guide plate 2a. The secondrecesses of the gas guide plate 2a located on the bottom of the equipment front end module 3 face down, so that the gas flow becomes a convergent laminar flow and is discharged to the outside. The arrangement of the gas guide plates 2a on the top and bottom of the equipment front end module 3 is determined according to the functional requirements for a divergent or convergent laminar flow. At least one of the gas guide plates 2a is arranged in an opposite direction. Through the above structural design, the distribution uniformity of the gas flow near the load port of the front opening unified pod is improved. The prevent invention provides an auxiliary function for the gas guide device to block moisture and fine dust and to prevent moisture and fine dust from entering the front opening unified pod.

Claims

WHAT IS CLAIMED IS:

1. A gas guide device, comprising: a casing, having a gas chamber; at least one gas guide plate, disposed in the gas chamber to partition the gas chamber into a first gas passage and a second gas passage, the gas guide plate having a first side, a second side opposite to the first side, a first recess that is recessed from the first side toward the second side, and a second recess that is recessed from the second side toward the first side, the second recess having a radial area less than that of the first recess, the second recess being formed within a longitudinal extension range of the first recess, the first recess communicating with the second recess to form a gas guide passageway; wherein the gas guide passageway of the gas guide plate is plural, and a gas flow enters the second gas passage from the first gas passage via the gas guide passageway, so that the gas flow is regulated to be in a laminar flow state or in a uniformly mixed state via the gas guide passageway.

2. The gas guide device as claimed in claim 1, wherein the gas flow passes through the second recess and the first recess in sequence to be divergent and uniformly mixed.

3. The gas guide device as claimed in claim 1, wherein the gas flow passes through the first recess and the second recess in sequence to form a convergent laminar flow.

4. The gas guide device as claimed in claim 1, wherein the number of the gas guide plates is three, when the gas flow passes through the gas guide passageways of the three gas guide plates, the gas flow comes in from the second recess and goes out from the first recess to be uniformly mixed between the three gas guide plates, and the gas flow is discharged from the last one of the gas guide plates to be divergent and uniformly mixed.

5. The gas guide device as claimed in claim 1, wherein the number of the gas guide plates is three, when the gas flow passes through the gas guide passageways of the three gas guide plates, the gas flow' comes in from the first recess and goes out from the second recess to form a laminar flow mixture between the three gas guide plates, and the gas flow is discharged from the last one of the gas guide plates to form a convergent laminar flow.

6. The gas guide device as claimed in claim 1, wherein the gas guide passagew ay is in the form of a round hole or a grating.

7. The gas guide device as claimed in claim 1, wherein a side wall of the gas guide passageway is inclined to form an included angle with a normal of the first side or the second side of the gas guide plate, and the included angle is in the range of 10° to 30° or 14° to 27°.

8. The gas guide device as claimed in claim 1 , wherein the first recess has a depth same as or different from that of the second recess.

9. The gas guide device as claimed in claim 1, wherein the ratio between a diameter of the second recess and a diameter of the first recess is 1 :1.1-2.

10. The gas guide device as claimed in claim 1, wherein the gas guide passageway of the last one of the gas guide plates and the gas guide passageways of the other gas guide plates are arranged in opposite directions; wherein when the gas flow passes through the gas guide passageways of the other gas guide plates, the gas flow comes in from the second recess and goes out from the first recess to be uniformly mixed between the other gas guide plates; when the gas flow passes through the gas guide passageway of the last one of the gas guide plates, the gas flow comes in from the first recess and goes out from the second recess to form a convergent laminar flow.

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