Intelligent tool holder thin film strain gauge machining method
By designing a processing method for smart tool holder film strain gauge, the adjustable height tool holder ensures that the tool holder remains level during the sputtering process, solving the problems of sputtering instability and low measurement accuracy in the prior art, achieving higher measurement accuracy and equipment life.
Patent Information
- Application Number
- PCT/CN2023/129031
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-09-26
- Filing Date
- 2023-11-01
- Publication Date
- 2025-04-03
AI Technical Summary
The existing patch strain gauge cannot meet the needs of automated processing and high-precision measurement in intelligent manufacturing, especially in the curved surface and irregular sample processing of the tool holder, there are problems of sputtering instability and low measurement accuracy.
A processing method for the intelligent tool holder film strain gauge is designed, using a tool holder frame composed of a connecting base plate, front end fixing, rear end fixing, adjustable height hexagon stud, positioning block and positioning block fixing. The design of screw fixing and adjustable height ensures that the tool holder remains level during the sputtering process and avoids heat influence and contamination caused by the use of tape.
The tool handle is stable and horizontally fixed during the sputtering process, avoiding heat influence and pollution caused by the tape, and improving the measurement accuracy of the strain gauge and the life of the equipment.
Smart Images

Figure CN2023129031_03042025_PF_FP_ABST
Abstract
Description
A processing method for a thin film strain gauge of an intelligent tool handle Technical Field
[0001] The present invention relates to the field of processing methods for thin film strain gauges, and in particular to a processing method for a thin film strain gauge for an intelligent tool handle. Background Art
[0002] With the advancement of science and technology, intelligent manufacturing, such as CNC lathes, has also experienced rapid development. CNC technology has not only brought revolutionary changes to other traditional industries, but has also become a representative of intelligent manufacturing, driving the development of many related industries and playing an increasingly important role in the modern machinery manufacturing industry. Traditional strain measurement is patch-type, but because the strain gauges need to be connected with glue, the glue will cause the strain gauge measurement lag. Moreover, during the analysis and processing, the tool will generate a lot of heat, causing the temperature to rise, and the glue will soften, seriously affecting the measurement accuracy of the strain gauge. Later, people adopted thin film strain gauges, which can effectively avoid the adverse effects of gluing strain gauges with glue, and at the same time, thin film strain gauges have higher accuracy. Technical issues
[0003] With the development of intelligent manufacturing, automated processing methods and advanced processing technology have put forward an increasing demand for real-time measurement of tool forces during the cutting process. There is an urgent need for a device that can stably and real-time measure the forces acting on the tool during the cutting process. The previous patch strain gauges can no longer meet today's measurement needs. During the sputtering process, the tool holder cannot be sputtered due to its curved surface. At the same time, the current sputtering instruments do not have a sample holder specifically for sputtering irregular samples such as tool holders. In the past, the tool holders were directly wrapped with tape on the substrate holder. Sputtering caused the tape to soften due to high temperature, resulting in deformation, making it impossible to ensure that the sputtered surface and the target material remain level. At the same time, too much tape will affect the vacuum and cause certain pollution, affecting the quality of the sputtered film. Technical Solutions
[0004] In response to the problems encountered in the above-mentioned technology, the present invention provides a solution to the problem that the magnetron sputtering instrument has no substrate rack for placing the tool handle, and proposes a processing method for an intelligent tool handle thin film strain gauge.
[0005] The present invention is achieved through the following technical solutions:
[0006] A method for processing a thin film strain gauge for an intelligent tool handle. The tool handle frame required by the processing method consists of a connecting base plate, a front end fixing piece, a rear end fixing piece, an adjustable height hexagonal stud, a positioning block, and a positioning block fixing piece. The front end fixing piece is fixed to the upper left side of the connecting base plate by screws, the rear end fixing piece is fixed to the upper right side of the connecting base plate by screws, four adjustable height hexagonal studs are respectively fixed to the bottom four corners of the connecting base plate by screws, and the positioning block is fixed to the bottom of the center of the front end fixing piece by screws. The tool handle is placed between the front end fixing piece and the rear end fixing piece, and the positioning block is inserted into the tool handle positioning pin.
[0007] Furthermore, the front end fixing piece is fixed to the upper left of the connecting base plate by screws, and both ends of the front end fixing piece are snapped into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws.
[0008] Furthermore, the rear end fixing piece is fixed to the upper right rear of the connecting base plate, and both ends of the rear end fixing piece are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws.
[0009] Furthermore, there is a groove below the front end fixing piece, and the positioning block is embedded in the groove below the front end fixing piece through screw transition fit.
[0010] Furthermore, the groove has a depth of 1 mm and a width of 16.1 mm.
[0011] Furthermore, the groove has two M3 threaded through holes.
[0012] Furthermore, two M3 threaded countersunk holes are opened on the left side of the front end fixing part of the tool handle, and four M3 through holes are opened on the positioning block fixing part. The positioning block fixing part is fixed to the left side of the front end fixing part by two M3 screws, and the positioning block is fixed to the upper end of the positioning block fixing part by two M3 screws. When the sputtering surface of the tool handle is sputtered, the positioning pin is inserted into the positioning block under the front end fixing part. When the sputtering surface of the tool handle is sputtered, the positioning pin is inserted into the positioning block fixing part to ensure the level of the sputtered surface and prevent the tool handle from sliding due to lack of fixation during the sputtering process, so that the sputtered surface cannot be kept level.
[0013] Furthermore, the thickness of the connecting bottom plate is 5 mm.
[0014] Furthermore, there is an M6 threaded through hole at each of the four corners, all four corners are rounded to C5, and reinforcing ribs are added in the middle.
[0015] Furthermore, one end of the height-adjustable hexagonal stud is a 10 mm long M6 stud. During installation, the stud is screwed into the M6 threaded through holes connecting the four corners of the base plate. The height is adjusted by the screwing depth, thereby adjusting the target-base distance. Beneficial effects
[0016] Compared with the prior art, the present invention has the following beneficial technical effects:
[0017] (1) The present invention solves the shortcoming of the current magnetron sputtering instrument that the tool handle cannot be prevented from sputtering, and avoids a series of problems caused by the previous use of tape to wrap the tool handle around the substrate holder, such as the inability to ensure that the sputtered surface of the tool handle can remain horizontal during wrapping, the softening of the tape during the sputtering process as the temperature rises, and the tilting of the sputtered surface of the tool handle. Excessive tape will cause certain contamination to the vacuum, affecting the performance of the strain gauge.
[0018] (2) The present invention adds a moisture-proof layer, which is beneficial to extending the life of the tool handle in the presence of coolant and ensuring the working performance of the strain gauge. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] FIG1 is a perspective view of a tool holder for magnetron sputtering according to an embodiment of the present invention.
[0020] FIG2 is a top view of the tool holder for magnetron sputtering according to an embodiment of the present invention.
[0021] FIG3 is a front view of the knife handle according to an embodiment of the present invention.
[0022] FIG4 is a rear view of the knife handle according to an embodiment of the present invention. Modes for Carrying Out the Invention
[0023] The present invention will be further described below with reference to Figures 1-4 and embodiments.
[0024] A method for processing a thin film strain gauge for an intelligent tool handle. The tool handle frame required by the processing method consists of six parts: a connecting base plate 1, a front end fixing part 2, a rear end fixing part 3, an adjustable height hexagonal stud 9, a positioning block 11, and a positioning block fixing part 6. The front end fixing part 2 is fixed to the upper left side of the connecting base plate 1 by screws, the rear end fixing part 3 is fixed to the upper right side of the connecting base plate 1 by screws, four adjustable height hexagonal studs 9 are respectively fixed to the bottom four corners of the connecting base plate 1 by screws, and the positioning block 11 is fixed to the bottom of the center of the front end fixing part 2 by screws. The tool handle is placed between the front end fixing part 2 and the rear end fixing part 3, and the positioning block 11 is inserted into the tool handle positioning pins 17 and 13.
[0025] The front end fixing part 2 is fixed to the upper left of the connecting base plate 1 by screws. The two ends of the front end fixing part 2 are inserted into the grooves of the connecting base plate 1 to form a transition fit and are fixedly connected by M3 screws.
[0026] The rear end fixing piece 3 is fixed on the upper right rear of the connecting base plate 1. The two ends of the rear end fixing piece 3 are inserted into the grooves of the connecting base plate to form a transition fit and are fixed by M3 screws.
[0027] There is a groove with a depth of 1mm and a width of 16.1mm below the front end fixing piece 2. Two M3 threaded through holes are opened in the groove. The positioning block 11 is embedded in the groove below the front end fixing piece 2 through screw transition fit.
[0028] There are two M3 threaded countersunk holes on the left side of the front end fixing part 2 of the tool handle, and four M3 through holes 10 on the positioning block fixing part 6. The positioning block fixing part 6 is fixed to the left side of the front end fixing part 2 by two M3 screws, and the positioning block 11 is fixed to the upper end of the positioning block fixing part 6 by two M3 screws. When the sputtering surfaces 14 and 18 of the tool handle are sputtered, the positioning pins 17 and 13 are inserted into the positioning block below the front end fixing part 2. When the sputtering surfaces 15 and 16 of the tool handle are sputtered, the positioning pins 17 and 13 are inserted into the positioning block fixing part 6 to ensure the level of the sputtered surface and prevent the tool handle from sliding due to lack of fixation during the sputtering process, so that the sputtered surface cannot remain level.
[0029] The thickness of the connecting base plate 1 is 5 mm, and there is an M6 threaded through hole at each of the four corners. The four corners are rounded C5, and a reinforcing rib 5 is added in the middle.
[0030] One end of the height-adjustable hexagonal stud 9 is a 10 mm long M6 stud. When installed, the stud is screwed into the M6 threaded through holes connecting the four corners of the base plate. The height is adjusted by the depth of screwing in, thereby adjusting the target base distance.
[0031] Assemble the tool holder and set it aside. Before sputtering, cut 10mm x 10mm square grooves on each of the four sides of the tool holder, with a depth of 1mm. Polish the grooves before sputtering to ensure a roughness of 0.2μ or less. Clean the cleaned square grooves with alcohol and acetone, then blow dry with nitrogen. Wrap the tool holder with tin foil except for the square groove to be sputtered. Then place the tool holder in the assembled tool holder. Insert the positioning block into the positioning pin of the tool holder to ensure that the sputtered surface remains level.
[0032] The tool holder and handle are placed in the sputtering chamber. The target-substrate distance is adjusted using four adjustable hexagonal studs. A level is placed on the connecting plate to ensure the levelness of the tool holder's sputtering surface. After the height is adjusted, the level is removed. 500 microns each of Al2O3 and Si3N4 are sputtered onto the square groove as an insulating layer. Then, 800 microns of NiCr (80% Cr, 20% Ni) alloy is sputtered as a functional layer. Finally, a 300 micron layer of Al2O3 is sputtered as a protective layer.
[0033] After sputtering a layer of Al2O3 as a protective layer, a layer of moisture-proof glue is applied to prevent the coolant from corroding and affecting the strain gauge when the tool handle is working.
[0034] 20mm long M6 studs are screwed into the bottom of the four hexagonal studs to increase the range of target-base distance adjustment.
[0035] The above embodiments are only used to illustrate the present invention, and are not intended to limit the present invention. Ordinary technicians in the relevant technical field may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions also fall within the scope of the present invention. The scope of patent protection of the present invention should be defined by the claims.
Claims
1. A method for processing a thin film strain gauge of an intelligent tool handle, characterized in that: The tool handle frame required by the processing method is composed of a connecting base plate, a front end fixing part, a rear end fixing part, an adjustable height hexagonal stud, a positioning block, and a positioning block fixing part. The front end fixing part is fixed to the upper left side of the connecting base plate by screws, and the rear end fixing part is fixed to the upper right side of the connecting base plate by screws. Four adjustable height hexagonal studs are respectively fixed to the bottom of the four corners of the connecting base plate by screws, and the positioning block is fixed to the bottom of the center of the front end fixing part by screws. The tool handle is placed between the front end fixing part and the rear end fixing part, and the positioning block is inserted into the tool handle positioning pin.
2. The method for processing a thin film strain gauge for an intelligent tool handle according to claim 1, characterized in that: The front end fixing piece is fixed to the upper left side of the connecting base plate by screws, and the two ends of the front end fixing piece are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws.
3. The method for processing a thin film strain gauge for an intelligent tool handle according to claim 1, characterized in that: The rear end fixing piece is fixed on the upper right rear of the connecting base plate, and both ends of the rear end fixing piece are inserted into the grooves of the connecting base plate to form a transition fit, and are fixedly connected by M3 screws.
4. The method for processing a thin film strain gauge for an intelligent tool handle according to claim 1 or 2, characterized in that: There is a groove below the front end fixing piece, and the positioning block is embedded in the groove below the front end fixing piece through screw transition fit.
5. The method for processing a thin film strain gauge of an intelligent tool handle according to claim 4, characterized in that: The groove has a depth of 1 mm and a width of 16.1 mm.
6. The method for processing a thin film strain gauge of an intelligent tool handle according to claim 5, characterized in that: The groove has two M3 threaded through holes.
7. The method for processing a thin film strain gauge for an intelligent tool handle according to claim 1, characterized in that: There are two M3 threaded countersunk holes on the left side of the front end fixing of the tool handle, and four M3 through holes on the positioning block fixing. The positioning block fixing is fixed to the left side of the front end fixing by two M3 screws, and the positioning block is fixed to the upper end of the positioning block fixing by two M3 screws. When the sputtering surface of the tool handle is sputtered, the positioning pin is inserted into the positioning block under the front end fixing. When the sputtering surface of the tool handle is sputtered, the positioning pin is inserted into the positioning block fixing to ensure the level of the sputtered surface and prevent the tool handle from sliding due to lack of fixation during the sputtering process, so that the sputtered surface cannot remain level.
8. The method for processing a thin film strain gauge for an intelligent tool handle according to claim 1, characterized in that: The thickness of the connecting base plate is 5 mm.
9. The method for processing a thin film strain gauge of an intelligent tool handle according to claim 1, characterized in that: There is an M6 threaded through hole at each of the four corners, all four corners are rounded C5, and there are reinforcing ribs in the middle.
10. The method for processing a thin film strain gauge for an intelligent tool handle according to claim 1, characterized in that: One end of the adjustable height hexagonal stud is a 10mm long M6 stud. When installing, the stud is screwed into the M6 threaded through holes connecting the four corners of the base plate. The height is adjusted by the screwing depth, thereby adjusting the target base distance.
Citation Information
Patent Citations
Clamping assembly for cutting tool film coating
CN110172678A
Auxiliary clamp for manufacturing intelligent cutter of micro-film sensor
CN113774349A
Composite film strain gauge based on magnetron sputtering and preparation method thereof
CN114322740A
High-temperature thin film strainmeter based on metal matrix and preparation method of high-temperature thin film strainmeter
CN116734720A
Coating clamp for broaching tool
CN219297632U