Silicon wafer temporary storage system and method

Abstract

Provided in the present application are a silicon wafer temporary storage system and method. The system cyclically runs between production processes having a production capacity difference therebetween. The system comprises a bearing apparatus, a recognition apparatus, a temporary storage unit and a control apparatus, wherein the bearing apparatus is configured with a silicon wafer protection medium; the recognition apparatus is used for recognizing attribute information of the bearing apparatus; the temporary storage unit is used for transferring the bearing apparatus; and the control apparatus is used for receiving and analyzing the attribute information and controlling the transfer direction of the bearing apparatus.

Description

Silicon chip cache system and method

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on November 15, 2023, with application number 202311524206.X and invention name “A Silicon Wafer Cache System and Method”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to, but is not limited to, the field of silicon wafer production technology. Background Art

[0003] The silicon wafer manufacturing process includes multiple steps, such as wire cutting, degumming, acid etching and cleaning, and silicon wafers are transported between each process. Technical Solutions

[0004] First, embodiments of the present application provide a silicon wafer caching system that operates cyclically between production processes with varying production capacities. The silicon wafer caching system includes: a carrier; an identification device for identifying attribute information of the carrier; a cache unit for transporting the carrier; and a control device for receiving and analyzing the attribute information and controlling the transport direction of the carrier.

[0005] In some feasible technical solutions, the cache unit includes: a conveyor line, which can transfer the carrying device to production process one and / or production process two; a cache warehouse, which is provided with n (n≥2) storage locations for accommodating the carrying device; a transfer device A, located outside the cache warehouse, which can transfer the carrying device between any two of the conveyor line, the cache warehouse, the production process one and the production process two; a transfer device B, located inside the cache warehouse, which can transfer the carrying device into or out of the storage location.

[0006] In some feasible technical solutions, the conveyor line includes: a first conveyor line, which can transport the carrying device in a direction away from the production process one; and a second conveyor line, which can transport the carrying device in a direction away from the production process two.

[0007] In some feasible technical solutions, the first conveyor line is provided with an exit 1 and an exit 2, and the carrying device is output from the exit 1 to the production process 2 or the second conveyor line, or is output from the exit 2 to the cache.

[0008] In some feasible technical solutions, the transfer device A and the transfer device B respectively include any one or more of a hoist, a stacker, a robotic arm and an AGV vehicle.

[0009] In some feasible technical solutions, the control device is provided with an MES control terminal, which is equipped with a WMS system and at least one of a PLC control system and an AGV control system.

[0010] In some feasible technical solutions, the identification device includes: an information identifier, which is set on the carrying device; and a reader, which is set in the cache unit and is used to read the information identifier.

[0011] In some feasible technical solutions, the information identifier is a QR code mark, a barcode mark or an electronic chip, and the reader is a barcode reader or a chip identifier.

[0012] In some feasible technical solutions, a silicon wafer protection medium is configured in the carrier device.

[0013] In the second aspect, an embodiment of the present application provides a silicon wafer caching method, which is implemented based on the above-mentioned silicon wafer caching system. The steps of the silicon wafer caching method include: starting a cache unit located between production process one and production process two with a production capacity difference to transfer a carrier device without material; an identification device identifies the attribute information of the carrier device and transmits it to a control device; the control device analyzes the operating status of production process one and production process two and the attribute information, and regulates the transfer direction of the cache unit to the carrier device.

[0014] In some feasible technical solutions, the control device: determines whether there is material in the carrying device and the storage time based on the unloading signal of production process one and / or the attribute information of the carrying device; determines whether there is an idle machine position and the remaining time of the busy position in production process two based on the loading and unloading signals of production process two and the total number of machine positions in production process two; determines the number of idle storage positions in the cache warehouse based on the transfer direction of the cache unit to the carrying device and the total number of storage positions in the cache warehouse.

[0015] In some feasible technical solutions, if there is an idle position in the second production process and there is no carrier in the cache, the carrier with material is transferred to the second production process.

[0016] In some feasible technical solutions, if there are carrying devices in the cache and there are vacant storage spaces, the carrying devices with materials are transferred to the cache.

[0017] In some feasible technical solutions, if there are no idle machine positions in the second production process and no idle storage positions in the buffer warehouse, the carrying device with materials will be circulated and transferred on the conveyor line and the transfer device A.

[0018] In some feasible technical solutions, the control device determines whether to transfer the material to the second production process first based on the material storage time of the carrying device and the specified upper limit time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] FIG1 is a schematic structural diagram of an embodiment of the present application;

[0020] FIG2 is a flow chart of an embodiment of the present application. Modes for Carrying Out the Invention

[0021] The technical solutions of the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0022] In the description of the embodiments of the present application, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, it should be noted that, unless otherwise clearly stipulated and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood based on specific circumstances.

[0023] In the silicon wafer manufacturing process, significant capacity disparities between upstream and downstream processes often occur, forcing one process to halt unloading and unload capacity, leading to downtime. For example, in the wire sawing and debonding processes, after the ingot is cut by the wire saw, a robotic arm performs unloading. The wafers are stored in bins and circulated along a conveyor belt before being queued for debonding in the debonding machine. However, in actual production, multiple wire saws are typically deployed for each debonding machine, making unloading uneven and often resulting in concentrated unloading. When this occurs, the wire sawing process's output far exceeds the debonding process's capacity, causing the conveyor belt's storage slots to fill up, forcing the unloading robotic arm to halt unloading and preventing the wire sawing process from unloading capacity in a timely manner, leading to downtime. Furthermore, the conveyor belt exposes the wafers to air, which over time can lead to defects such as dirt and spots, impacting product quality. This directly prevents the aforementioned issues from being addressed by simply extending the conveyor belt and adding storage slots.

[0024] With reference to FIG1 , the present application provides a silicon wafer cache system, which circulates between a production process 10 and a production process 20 with a production capacity difference, and includes: a carrier 30, an identification device 40, a cache unit 50 and a control device 60, wherein the carrier 30 is provided with a silicon wafer protection medium 70 to prevent the silicon wafer from being directly exposed to the air for a long time and causing abnormalities such as dirt; the identification device 40 is used to identify the attribute information of the carrier 30; the cache unit 50 is provided with a conveyor line, a cache library 53, a transfer device A54 and a transfer device B55, wherein the conveyor line can transfer the carrier to the production process 10 and the production process 20. Device 30, the transfer device A54 is located outside the cache warehouse 53, and can transfer the carrier device 30 between any two of the conveyor line, the cache warehouse 53, the production process 1 10 and the production process 2 20. The cache warehouse 53 is provided with a plurality of storage locations for accommodating the carrier device 30. The transfer device B55 is located inside the cache warehouse 53, and can transfer the carrier device 30 into or out of the storage location; the control device 60 receives and analyzes the attribute information of the carrier device 30, and adjusts the transfer direction of the cache unit 50 to the carrier device 30, so as to alleviate the production capacity difference between the production process 1 10 and the production process 2 20, and prevent losses caused by unplanned downtime.

[0025] Since silicon wafers are prone to dirt and flower when they are in direct contact with the air for a long time, considering the production cost and the difficulty of obtaining raw materials, water is used as the silicon wafer protection medium 70 in the carrier device 30 in this embodiment. However, the time for storing silicon wafers in water cannot be extended indefinitely. Therefore, during implementation, the upper limit of the time for storing silicon wafers in water should be preset in the control device 60 according to the properties of the silicon wafers on the production line and other actual working conditions, and a program should be entered into the control device 60 to control the cache unit 50 to transfer the silicon wafers in the carrier device 30 in a first-in-first-out order, and to judge the storage time of each carrier device 30 in real time, and by comparing with the preset upper limit time, determine whether to transfer it to the production process 2 20 first.

[0026] In order to be able to judge the empty or full status and storage time of each carrying device 30 in real time through its attribute information, the identification device 40 in this embodiment is configured with an information identifier 41 and a reader 42 for reading the information identifier 41. The information identifier 41 is set on the carrying device 30. As the carrying device 30 flows in the cache unit 50, there are multiple readers 42 distributed in the cache unit 50. Their specific positions are configured according to actual working conditions. For example, they can be distributed equidistantly on the conveyor line or at key transmission nodes, at the entrance and exit of the cache warehouse 53, and loaded and embedded on the transfer device A54 and the transfer device B55, etc., which are not specifically limited here.

[0027] Specifically, the information identifier 41 can be a two-dimensional code mark, a barcode mark or an electronic chip, and the reader 42 is a barcode reader or a chip identifier adapted to the information identifier 41 .

[0028] During the operation of this cache system, the mechanical equipment in production process one 10 and production process two 20 are all connected to the control device 60 by signal. The control device 60 determines that there is material in the carrier device 30 with the attribute information based on the unloading signal of production process one 10 and the attribute information of the carrier device 30 located at the corresponding unloading port at this moment, and uses the time corresponding to the above unloading signal as the initial storage time. During the transportation process, the above-mentioned carrier device 30 with material continuously obtains attribute information and passing time by the readers 42 distributed at various positions on the cache unit 50. The control device 60 determines the storage time of the above-mentioned carrier device 30 based on the difference between the passing time and the initial storage time, and makes subsequent adjustments to its transportation direction.

[0029] In the process of regulating the transfer direction of the carrying device 30, the control device 60 determines whether there are idle machine positions in the production process 2 20 and the remaining time of the busy positions based on the loading and unloading signals of the production process 2 20 and the total number of machine positions in the production process 2 20. If there are idle machine positions or the remaining time of the busy positions in the production process is less than the transfer time of the carrying device 30 to be transferred, the cache unit 50 is controlled to transfer the carrying device 30 with material to the production process 2 20. If there are no idle machine positions or the remaining time of the busy positions is too long, the carrying device 30 with material will be temporarily stored in the cache 53 or circulated on the conveyor line.

[0030] In this embodiment, the above-mentioned conveyor lines are configured as two, namely the first conveyor line 51 and the second conveyor line 52, wherein the end of the first conveyor line 51 faces the production process two 20, and can transfer the carrying device 30 in the direction away from the production process one 10, and the end of the second conveyor line 52 faces the production process one 10, and can transfer the carrying device 30 in the direction away from the production process two 20, and the connection and transfer of the carrying device 30 in the path from the production process one 10, the first conveyor line 51, the production process two 20, the second conveyor line 52 to the production process one 10 is realized by the transfer device A54.

[0031] The first conveyor line 51 is terminated with a first outlet 51-1 and a second outlet 51-2. Multiple outlets 51-1 and 51-2 can be configured in parallel to improve the buffer system's efficiency in transferring carriers 30. Carriers 30 can exit from the first outlet 51-1 and be transferred directly to production process 20 or the second conveyor line 52 by transfer device A54. Alternatively, they can exit from the second outlet 51-2 and be transferred to the buffer 53 by transfer device A54.

[0032] In order to further improve the transfer efficiency of this cache system, in this embodiment, a group of transfer devices A54 are also configured before the end of the first conveyor line 51. When the control device 60 determines that there are no idle positions in the production process 20, there are no idle positions in the cache warehouse 53, and the starting end of the second conveyor line 52 is congested, the carrying device 30 on the first conveyor line 51 is preferentially transferred to the second conveyor line 52 by the above-mentioned transfer device A54. When necessary, for example, when the storage time of the carrying device 30 circulating on the second conveyor line 52 is about to reach the upper limit, it can be preferentially transferred to the first conveyor line 51 by the above-mentioned transfer device A54, and then transported to the production process 2 20.

[0033] The transfer device A54 and the transfer device B55 can be configured as any one or more of a hoist, a stacker, a robotic arm and an AGV (Automated Guided Vehicle).

[0034] The control device 60 is provided with an MES (manufacturing execution system) control terminal, which is equipped with a WMS (warehouse management system) system. It is also equipped with a PLC (Programmable Logic Controller) control system and an AGV control system based on the selection of the transfer device A54 and the transfer device B55.

[0035] In some embodiments with higher space utilization and automation level, the transfer device A54 responsible for connecting and transferring the carrying device 30 between production process 1 10, the first conveyor line 51, production process 2 20, the second conveyor line 52 and the buffer warehouse 53 is an AGV vehicle, and is controlled by the AGV control system in the control device 60; the first conveyor line 51 and the second conveyor line 52 are configured to be distributed in parallel along the vertical direction, and the transfer device A54 responsible for transporting or returning the carrying device 30 to the second conveyor line 52 before the end of the first conveyor line 51 is an elevator, and is controlled by the PLC control system in the control device 60; the buffer warehouse 53 is configured as a three-dimensional frame, and the transfer device B55 is a stacker, and is controlled by the PLC control system in the control device 60.

[0036] 2 , a silicon wafer caching method implemented by the silicon wafer caching system provided in this embodiment includes the following steps:

[0037] (1) Activate the buffer unit 50 located between the production process 1 10 and the production process 2 20 with a production capacity difference to transfer the empty carrier 30;

[0038] (2) The reader 42 identifies the information identifier 41 on the carrier 30 to obtain its attribute information and transmits it to the control device 60;

[0039] (3) The control device 60 analyzes the operating status of the production process 1 10 and the production process 2 20 and the attribute information, and adjusts the transfer direction of the buffer unit 50 to the carrier device 30.

[0040] In step (3), the control device 60 first determines whether there is material in the carrier device 30 and the storage time according to the unloading signal of the production process 1 10 and the attribute information of the carrier device 30 (the specific method has been described in detail above and will not be repeated here). If there is material in the carrier device 30, the primary goal is to transfer it to the production process 2 20. If there is no material in the carrier device 30, the primary goal is to transfer it to the production process 1 10.

[0041] In the process of transferring the loaded carrier 30 to the production process 2 20, the control device 60 determines whether there are any idle machine positions and the remaining time of the busy positions in the production process 2 20 based on the loading and unloading signals of the production process 2 20 and the total number of machine positions in the production process 2 20. If there are idle machine positions or the remaining time of the busy positions in the production process is less than the transfer time of the carrier 30 to be transferred, the cache unit 50 is controlled to transfer the loaded carrier 30 to the production process 2 20. If there are no idle machine positions or the remaining time of the busy positions is too long, the loaded carrier 30 is temporarily stored in the cache 53 or circulated on the conveyor line.

[0042] When determining whether the loaded carrier 30 should be temporarily stored in the buffer 53 or circulated on the conveyor line, the following principles are followed:

[0043] The control device 60 determines the number of free locations in the cache 53 based on the direction of transfer of the carriers 30 by the cache unit 50 (including but not limited to the number of carriers 30 with material entering and leaving the cache 53) and the total number of locations in the cache 53. If the number of free locations equals the total number of locations, there are no carriers 30 with material in the cache 53. If the number of free locations is greater than 0 but less than the total number of locations, there are carriers 30 with material in the cache 53, and further carriers 30 with material can be transported to the cache 53. If the number of free locations equals 0, the cache 53 is full.

[0044] If there is an idle position in the second production process 20 and there is no carrying device 30 with material in the buffer 53, the carrying device 30 with material is directly transferred to the second production process 20 via the transfer device A54 at the exit 1 51 - 1 of the first conveyor line 51.

[0045] In the above process, as the instantaneous production capacity of production process two 20 gradually becomes saturated, queues and congestion will gradually appear at exit one 51-1 of the first conveyor line 51. Then, the material-carrying device 30 transferred from the first conveyor line 51 will no longer be sent to exit one 51-1, but will be sent to exit two 51-2 instead, and will be transferred to the entrance of the cache warehouse 53 through the transfer device A54 at exit two 51-2, and then transferred to the designated storage location in the cache warehouse 53 by the transfer device B55 in the cache warehouse 53 for temporary storage, waiting to be shipped out. At this time, while waiting to be transported to production process two 20, the loaded carrier devices 30 originally waiting in line at exit one 51-1 are transferred first, and once there are loaded carrier devices 30 in the cache 53, the carrier devices 30 whose storage time on the first conveyor line 51 (unless it reaches the specified upper limit) is longer than the storage time in the cache 53 shall no longer be directly transferred to production process two 20 via exit one 51-1. Instead, when exit one 51-1 of the first conveyor line 51 is unblocked and idle positions are generated in production process two 20, the loaded carrier devices 30 in the cache 53 shall be transferred to production process two 20 via the transfer device B55 and the transfer device A54 at the exit of the cache 53 in the order of storage time from longest to shortest. By adopting the above technical solution, when congestion occurs at the exit 51-1, the transfer direction of the subsequent loaded carrier device 30 is first changed to ensure the transfer efficiency and smoothness of the cache unit 50 to the carrier device 30, and to ensure that the loaded carrier device 30 can be transferred away from the production process 10 in time to prevent unplanned shutdown caused by the inability to unload the material in the production process 10, and then the exit 51-1 is unblocked to ensure that the subsequent loaded carrier device 30 can be smoothly circulated and transferred on the conveyor line.

[0046] Due to the instantaneous capacity difference between the production process 10 and the production process 20, the material carrying device 30 is continuously accumulated in the buffer warehouse 53. When the buffer warehouse 53 is fully loaded, that is, there is no vacant storage space, the material carrying device 30 transferred from the first conveyor line 51 is transferred to the starting end of the second conveyor line 52 via the above-mentioned unblocked outlet 1 51-1 and the transfer device A54 at the outlet 1 51-1. The transfer device then moves along the direction of the second conveyor line 52-transfer device A54-first conveyor line 51-transfer device A54-second conveyor line 52. The material is transported in a circular manner until a vacant position appears in the buffer warehouse 53. The loaded carrying devices 30 on the above-mentioned circular transport path enter the buffer warehouse 53 in the order of the storage time from longest to shortest, so that in the subsequent process, among all the carrying devices 30 to be transported to the production process 2 20, the one with the longest storage time is always located in the buffer warehouse 53. After there is a vacant position in the production process 2 20, the carrying device 30 with the longest storage time is preferentially transported to the production process 2 20 in an orderly manner via the transfer device B55 and the transfer device A54.

[0047] In the process of circulating the loaded carrier 30 along the conveyor line, there may be more than one transfer device A54 that moves to the starting end of the second conveyor line 52. The control device 60 will then determine whether the transfer device A54 is waiting in line at the input port of the second conveyor line 52, that is, whether congestion occurs. If congestion occurs, the carrier 30 is transferred to the middle of the second conveyor line 52 via the transfer device A54 in front of the end of the first conveyor line 51. If congestion occurs, the carrier 30 is transferred to the starting end of the second conveyor line 52 via the transfer device A54 at the exit 51-1 at the end of the first conveyor line 51. Similarly, if there is a queue (i.e., congestion) at the starting end of the first conveyor line 51, the transfer device A54 waiting for instructions at the non-end of the first and second conveyor lines 51 and 52 will directly transfer the carrier 30 in the middle of the second conveyor line 52 to the middle of the first conveyor line 51.

[0048] By adopting the above technical solution, in most cases, it can be ensured that the production process 10 can unload materials normally, and the operation of each part in the cache unit 50 can be coordinated in the most orderly manner, the transfer directions will not conflict with each other, and the transfer efficiency of the carrying device 30 can be the highest; in a few cases, the density of the loaded carrying devices 30 on the conveyor line may be too high. In order to ensure that the production process 10 can unload materials normally, the loaded carrying devices 30 on the conveyor line cannot enter the cache warehouse 53 in the order of storage time from long to short. At this time, the control device 60 will compare the storage time of all the carrying devices 30 on the conveyor line and in the cache warehouse 53, and transfer the carrying devices 30 to the production process 2 20 in the order of storage time from long to short.

[0049] During the above-mentioned smooth automated transfer process, the control device 60 will determine in real time the priority of transferring the carrier devices 30 with materials on the cache unit 50 to the production process 2 20 based on the storage time of the carrier devices 30 and the specified upper limit time, that is, follow the first-in-first-out principle to prevent the surface quality of the silicon wafers from being affected by the long storage time.

[0050] In the process of transferring the empty carrier device 30 to the production process 10, the empty carrier device 30 is transferred in an orderly manner on the first conveyor line 51, the transfer device A54 and the second conveyor line 52. If congestion occurs at the starting end of the first conveyor line 51 or the second conveyor line 52, it can also be allocated and transferred through the transfer device A54 waiting for instructions located at the non-end of the first conveyor line 51 and the second conveyor line 52, so as to improve the transfer efficiency and ensure the normal unloading of the production process 10.

[0051] The silicon wafer caching system and method provided in the present application utilize a carrier device 30 containing a silicon wafer protective medium 70 to store silicon wafers, and transport the carrier device 30 in an orderly manner according to the busy or idle status of the production process 2 20. The transportation path or storage time of the carrier device 30 is used to balance the production capacity difference between the line production process 1 10 and the production process 2 20, so that production can proceed smoothly and production efficiency can be improved, while avoiding losses caused by unplanned downtime.

[0052] The above is a preferred embodiment of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

[0053] Component identification in the figure: 10, production process one; 20, production process two; 30, carrying device; 40, identification device; 41, information identification; 42, reader; 50, cache unit; 51, first conveyor line; 51-1, exit one; 51-2, exit two; 52, second conveyor line; 53, cache library; 54, transfer device A; 55, transfer device B; 60, control device; 70, silicon wafer protection medium.

Claims

1. A silicon wafer cache system, wherein the silicon wafer cache system is cyclically operated between production processes with production capacity differences, and the silicon wafer cache system comprises: Carrying device; An identification device, used to identify attribute information of the carrying device; A buffer unit, used for transporting the carrying device; The control device is used to receive and analyze the attribute information and control the transfer direction of the carrying device.

2. A silicon chip cache system according to claim 1, wherein: The cache unit comprises: A conveyor line, which can transfer the carrying device to production process one and / or production process two; A cache library, wherein n (n≥2) storage locations for accommodating the carrying devices are provided; A transfer device A is located outside the buffer storehouse and can transfer the carrying device between any two of the conveyor line, the buffer storehouse, the production process 1 and the production process 2; The transfer device B is located inside the cache warehouse and can transfer the carrying device into or out of the warehouse.

3. A silicon chip cache system according to claim 2, wherein: The conveying line comprises: A first conveying line, capable of transporting the carrying device in a direction away from the first production process; The second conveyor line can transport the carrying device in a direction away from the second production process.

4. A silicon chip cache system according to claim 3, wherein: The first conveying line is provided with an exit 1 and an exit 2, and the carrying device is output from the exit 1 to the production process 2 or the second conveying line, or is output from the exit 2 to the buffer store.

5. A silicon chip cache system according to any one of claims 2 to 4, wherein: The transfer device A and the transfer device B respectively include any one or more of a hoist, a stacker, a robotic arm and an AGV vehicle.

6. A silicon chip cache system according to any one of claims 1 to 5, wherein: The control device is provided with an MES control terminal, which is equipped with a WMS system and at least one of a PLC control system and an AGV control system.

7. A silicon chip cache system according to any one of claims 1 to 6, wherein: The identification device comprises: An information mark, which is arranged on the carrying device; A reader is arranged in the cache unit and is used for reading the information identification.

8. A silicon chip cache system according to claim 7, wherein: The information identifier is a two-dimensional code mark, a bar code mark or an electronic chip, and the reader is a bar code reader or a chip identifier.

9. A silicon chip cache system according to any one of claims 1 to 8, wherein: The carrier device is provided with a silicon wafer protection medium.

10. A silicon chip caching method, the silicon chip caching method being implemented based on the silicon chip caching system according to any one of claims 1 to 9, characterized in that: The steps of the silicon chip caching method include: A buffer unit located between production process 1 and production process 2 having a capacity difference is activated to transfer a carrier device without material; The identification device identifies the attribute information of the load-bearing device and transmits it to the control device; The control device analyzes the operating status of the production process one and the production process two and the attribute information, and adjusts the transfer direction of the buffer unit to the carrying device.

11. A silicon chip caching method according to claim 10, wherein the control device: According to the unloading signal of the production process 1 and / or the attribute information of the carrying device, determine whether there is material in the carrying device and the storage time of the material; According to the loading and unloading signals of the production process 2 and the total number of machine positions of the production process 2, it is determined whether there are idle machine positions and the remaining time of busy machine positions in the production process 2; The number of free storage locations in the cache library is determined according to the transfer direction of the cache unit to the carrier and the total number of storage locations in the cache library.

12. A silicon chip caching method according to claim 11, wherein: If there is an idle position in the production process 2 and there is no carrier in the buffer, the carrier with material will be transferred to the production process 2.

13. A silicon chip caching method according to any one of claims 11 to 12, wherein: If there are carriers in the buffer and there are free storage spaces, the carriers with materials will be transferred to the buffer.

14. A silicon chip caching method according to any one of claims 11 to 13, wherein: If there are no idle positions in the second production process and no idle positions in the buffer warehouse, the carrying device with materials will be circulated and transferred on the conveyor line and transfer device A.

15. A silicon chip caching method according to any one of claims 11 to 14, wherein: The control device determines whether to transfer the material to the second production process first based on the material storage time of the carrying device and the specified upper limit time.

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